Crystallographic defect testing

DE102025112078A1Pending Publication Date: 2025-10-02CAMTEK LTD
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Patent Information

Application Number
DE102025112078
Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-04-02
Filing Date
2025-03-28
Publication Date
2025-10-02

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Abstract

A wafer inspection system with reflected-light bright-field microscopy, equipped with polarizing optics and a mirror, can be suitable for detecting polarization-changing defects (such as microtubes) in semiconductor wafers. The polarization-changing defects can be located within the bulk of the semiconductor wafer and imaged as bright features against a darker background. The system can also be used for conventional bright-field inspection of non-polarization-changing defects such as impurities and admixtures.
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