Module for replacing an interface unit in a test system for testing semiconductor components and test system with such a module

Abstract

Module for replacing an approximately flat interface unit (20) in a test system (1) for testing semiconductor elements, comprising - a base element (5) that can be attached to the test system (1), - a holder (19) for receiving an interface unit (20), - Guide elements (10, 15) with which the holder (19) is attached to the base element (5) such that the holder (19) is movable between an end position on the base element (5) and a removal position, wherein in the end position the interface unit (20) is located in an interface plane (34) and the guide elements (10, 15) comprise the holder (19) for guiding it along a predetermined path of movement. at least a lever mechanism (10) which is designed at least to guide a straight translational movement of the holder (19) a distance in the direction perpendicular to the interface plane (34) starting from the end position, at least one cam (25; 58) which engages with the lever mechanism (10) for actuating it, wherein the cam (25, 58) is movably mounted in a direction transverse to the linear translational movement of the holder (19), and an actuating means (29) for moving the cam (25; 58) so that the lever mechanism (10) is actuated.

Description

[0001] The present invention relates to a module for replacing an interface unit in a test system for testing semiconductor elements and to a test system with such a module.

[0002] JP H09-159 730 A describes a test device for testing semiconductor components, in which a performance board is coupled to a test head in such a way that it can be pulled out laterally from the test head, similar to a drawer. The performance board has guide holes through which guide pins of the test head extend for positioning. The performance board can be easily replaced by pulling it out laterally.

[0003] From EP 1 495 339 B1 and US 2003 / 0194821 A1, a further test device for testing semiconductor components is disclosed. This device is movable relative to a handling device in a direction perpendicular to a test plane of a device interface board (DIB). A sub-assembly supporting the interface board is pivotably and telescopically mounted to the handling device. By pivoting and then extending the sub-assembly, the interface board can be easily removed from the test system and replaced after separating the test device from the handling device.

[0004] DE 102 05 115 B4 discloses a coupling device designed for connecting a first circuit board, which is attached to a test device for electronic components, and a second circuit board, which is attached to a handling device for electronic components. A feed frame is guided on the first circuit board such that it is movable perpendicular to a plane of the circuit board. The second circuit board is connected to an additional coupling device in the form of an auxiliary frame located in its edge region. The second circuit board can be detachably coupled to the feed frame via this auxiliary frame. The auxiliary frame has two outwardly extending locking lugs on each of two opposite sides, which are inserted into corresponding guides on the feed frame and can be locked into a precisely defined position by sliding the auxiliary frame parallel to the plane of the feed frame.The mechanism is operated by means of a drive belt.

[0005] German patent DE 197 52 229 A1 describes a compliant wafer tester coupling adapter. This adapter features a test head mounted on a roller stand. The test head is fixed to the roller stand by pivoting connections. These pivoting connections allow the test head to be positioned in an upward-facing horizontal position, enabling the attachment of a loading plate, a calibration or mounting plate, and a DUT plate with a base to the test head of an electronic circuit tester. The test head can be pivoted to various angular positions so that the base forms an interface with an automated material handling device. A frame can be attached to the test head to create an interface between the base and the automated material handling device or a wafer tester of a wafer testing station.A clamping device corresponding to the frame is attached to the automated material handling device or wafer testing station to align the test head with respect to the handling device or station such that the base or a wafer probe touches the component or circuit under test.

[0006] Furthermore, the inventors are aware of a test system in which the interface unit can be extended and retracted by means of a drawer, wherein, in the retracted state of the drawer, the interface unit is moved into a final position by a linear movement perpendicular to the plane of the interface unit. This movement into the final position is actuated by pneumatic cylinders and is executed automatically. Additional pneumatic cylinders are also provided to lock the final position. This device is very advantageous compared to the device known from EP 1 495 339 B1, since the interface unit is moved into the final position by a linear movement. With the pivoting movement known from EP 1 495 339 B1, there is a significant risk of damaging the contact pins of the test system or the interface unit, or the dowel pins that engage in corresponding bores of the interface unit.Due to the complex movement path of the interface unit when extending and retracting from the test system, several independently actuated pneumatic cylinder-piston units are required. While this mechanism allows for the safe exchange of interface units without damaging contact pins, and the exchange can be performed quickly by a single user with fewer steps, this device is considerably more complex than the device known from EP 1 495 339 B1.

[0007] The invention is based on the objective of creating a module for replacing an approximately flat interface unit in a test system for testing semiconductor elements, which enables safe and reliable replacement of the interface unit without damaging contact pins or dowel pins, and which is nevertheless cost-effective and essentially maintenance-free.

[0008] The problem is solved by a module having the features of claim 1 or 13. Advantageous embodiments of the invention are specified in the dependent claims.

[0009] The module according to the invention for replacing an approximately flat interface unit in a test system for testing semiconductor elements comprises - a basic element that can be attached to the test system, - a bracket for holding an interface unit, - Guide elements with which the holder is attached to the base element in such a way that the holder is movable between an end position on the base element and a removal position, wherein in the end position the interface unit is located in an interface plane and the guide elements comprise a predetermined path of movement for guiding the holder at least a lever mechanism which is designed to guide a linear translational movement of the holder a distance in a direction perpendicular to the interface plane from the end position, at least a cam for actuating the lever mechanism, wherein the cam is movably mounted in a direction transverse to the linear translational movement of the interface unit, and an actuating device for moving the backdrop so that the lever mechanism is actuated.

[0010] The module can be attached to a test system using its base element. Test systems for testing semiconductor components typically comprise a test unit ("tester") and a handling unit ("handler" or "prober"). The test unit includes a test head, which contacts the semiconductor components under test, and evaluation electronics. The handling unit includes elements that feed the semiconductor components under test sequentially to the test unit. To enable the testing of different semiconductor components with such a test system, there is an interface unit located at the interface between the test unit and the handling unit, which has contact elements for contacting the semiconductor components under test.The contact elements are each arranged in a pattern specific to the semiconductor elements being tested, in order to ensure correct contact with the semiconductor element's contact points. Depending on the test system, this interface unit is attached to either the test unit or the handling unit. Instead of directly attaching the interface unit to the test unit or the handling unit, the module according to the invention is attached to the test unit or the handling unit with its base element.

[0011] The interface unit is a roughly flat component, typically formed from a rigid printed circuit board. Contact pins and electrical components integrated into the interface unit may protrude from this circuit board. When the test system is in use, the interface unit must be positioned in a specific location within the test unit or the handling unit of the test system. The plane containing the roughly flat interface unit in its operating position is hereinafter referred to as the interface plane. The module according to the invention is designed such that the base element attached to the test system, with corresponding guide elements, allows the interface unit to be moved into a final position that lies within the interface plane.

[0012] The module's guide elements are designed such that the interface unit is movable between its end position and a removal position, with the holder guiding the interface unit along a predetermined path. This path includes at least one linear translational movement extending from the end position perpendicular to the interface plane. This linear section of the predetermined path is guided by a lever mechanism. Furthermore, the guide elements include at least one cam that is movably mounted transversely to the linear translational movement of the holder. The cam is movable by an actuating means, and the cam engages with the lever mechanism in such a way that movement of the cam actuates the lever mechanism.

[0013] Preferably, the cam is designed to lock the lever mechanism in the end position.

[0014] Preferably, the module has two lever mechanisms that each engage opposite sides of the holder and can each be actuated by a cam.

[0015] The actuating device for moving the cam is preferably an endless drive belt. Such a drive belt can be a toothed belt, a steel cable, or a chain. The actuating device can also be a rod mechanism.

[0016] Preferably, the lever mechanism has at least one lever arm pivotably attached at one end to the base element and pivotably attached at the other end to the support, wherein a cam track is formed on the cam which engages with a pivot pin arranged on this lever arm in order to control a pivoting movement of the lever relative to the base element by moving the cam, wherein the lever arm has a locking pin which is further away from the end of the lever arm attached to the base element than the pivot pin and engages with a further locking cam track on the cam at least in the end position.

[0017] The cam tracks are inclined relative to the interface plane, each preferably having a locking section in which the respective locking pins are located in their end position and which has a shallower inclination relative to the interface plane than the rest of the cam track. This locking section fixes the end position of the bracket or interface unit by means of the cam, whereby the cam itself only requires minimal force to hold it in this position. The frictional force of the system or a spring element, in particular an air spring, is sufficient for this purpose, as it can assist the movement into or from the end position.

[0018] Preferably, an actuating lever is provided with which the cams can be operated. This actuating lever can be equipped with a detent device that has at least detent settings corresponding to the end position and an intermediate position.

[0019] The lever mechanism preferably has a straight guide comprising two lever arms that are pivotably coupled to each other by means of a common pivot joint, wherein both lever arms are pivotably arranged at one end on the base element and / or the holder by means of a pivot joint, and wherein at least one of the two lever arms is pivotably arranged on the corresponding other part, comprising the holder and the base element, and the distances from the common pivot joint to the respective pivot joints with which the lever arms are attached to the holder and the base element are of the same length.

[0020] In one embodiment, the lever mechanism can have a straight guide with two coupled lever arms and an additional guide with at least one lever arm, the pivoting movement of which is controlled by means of a separate cam track of the cam such that the holder, starting from the end position, first performs a straight translational movement perpendicular to the interface plane and then a pivoting movement.

[0021] Preferably, the holder has telescopically extendable rails to allow the interface unit to be moved linearly.

[0022] With the module according to the invention, when replacing an interface unit, the interface unit is moved from its end position to an intermediate position in which all contacts and dowel pins or bores are disconnected, and then from this intermediate position by means of the telescopic rails to a removal position in which the interface unit can be easily replaced. Only the test unit needs to be lifted slightly. There is no need to completely remove the test unit from the handling unit. This saves considerable time when replacing the interface unit.

[0023] The module according to the invention is essentially composed of mechanical components and generally requires neither electrical nor pneumatic control. It is therefore very low-maintenance and reliable.

[0024] The module can be integrated into a fully automated test system and connected to a suitable controller. Only a single automatically controlled actuator, such as an electric motor or a pneumatic piston / cylinder unit, is required to actuate the drive belt.

[0025] The interface unit can be equipped with two downward-projecting positioning pins that engage in corresponding positioning bushings. The positioning bushings are attached to the handling unit. The positioning pins and the positioning bushings form a pneumatically actuated positioning system (docking system) and are designed according to US 6,870,362 B2. The combination of a module for exchanging an interface unit with a mechanism for lifting the interface unit linearly from its end position to an intermediate position and a device for pulling out the interface unit, such as telescopic rails, constitutes an independent inventive concept, since the module only needs to roughly position the interface unit in its end position, and fine adjustment is performed by the positioning system.

[0026] The module can be equipped with a distance adjustment device comprising several threaded elements, in particular threaded flanges or threaded bushings, coupled to one another via a drive belt and engaging with corresponding threaded elements on the handling unit or the test unit. By means of an actuating element, such as an adjusting wheel, the drive belt can be actuated such that all threaded elements of the distance adjustment device rotate synchronously and the distance between the module and the handling unit or the test unit is changed. This distance adjustment device is highly advantageous in combination with the module for exchanging an interface unit, which includes a mechanism for linearly lifting the interface unit from its end position to an intermediate position and a device for removing the interface unit, such as...the telescopic rails, as this allows for the use of a wide variety of interface units with different thicknesses or heights, which can be easily exchanged, positioned and adjusted.

[0027] The invention is explained in more detail below by way of example with reference to the drawings. The drawings show: Fig. 1. Schematic representation of a test system in a perspective view with a module for replacing an interface unit, Fig. 2 the module from Fig. 1 in a withdrawal position, Fig. 3 the module out Fig. 1 in an intermediate position, Fig. 4 the module from Fig. 1 in a final position, Fig. 5 a backdrop of the module made of Fig. 1 in a side view, Fig. 6 A module for replacing an interface unit for a vertical test system, in perspective view Fig. 7 the module out Fig. 6 in the area of ​​an upper lever mechanism in a perspective partial view, Fig. 8 the lever mechanism from Fig. 7 together with a telescopic rail without the other parts of the module in a perspective view, Fig. 9-11 an exchange module for a horizontal test system, which is attached to the underside of a test unit, in perspective view in different positions, Fig. 12 a lever mechanism of the exchange module from the Fig. 9, Fig. 10 to Fig. 11 in perspective partial view, Fig. 13 the lever mechanism from Fig. 12, where a retaining plate of the backdrop has been removed, so that further parts are visible, Fig. 14-16 the lever mechanism Fig. 12 and Fig. 13, with parts being cut away in different planes, Fig. 17, Fig. 18 each a backdrop of a side view, Fig. 19 the module from Fig. 6 in perspective view with an interface unit in end position and a distance adjustment device that is exploded out, Fig. 20 a distance adjustment element of the distance adjustment device according to Fig. 19 in a perspective partial view, Fig. 21 a lever mechanism of an exchange module for a horizontal test system, which can be attached to the underside of a test unit, in a perspective partial view, and in Fig. 22 a backdrop of the lever mechanism Fig. 21 in a side view.

[0028] In the Fig. 1, Fig. 2, Fig. 3, Fig. 4 to Fig. Figure 5 is a test system 1 for testing semiconductor elements with a first embodiment of a module 2 according to the invention for replacing an interface unit shown schematically.

[0029] The term semiconductor elements includes semiconductor devices and wafers.

[0030] The test system comprises a handling unit 3 (prober) and a test unit 4 (tester). During operation, the handling unit 3 is positioned below the test unit 4 ( Fig. 1) wherein module 2 for exchanging an interface unit is arranged between the handling unit 3 and the test unit 4. This module 2 is hereinafter referred to as exchange module 2.

[0031] In the first embodiment, the handling unit 3 serves to feed wafers 43 to the interface unit 20. Both the handling unit 3 and the test unit 4 are approximately cuboid in shape, with the opposing side faces, between which the exchange module 2 is located, arranged horizontally. This test system is therefore referred to as a horizontal test system.

[0032] The exchange module 2 has a base element 5 that is attached to the test system 1. In the present embodiment, the base element 5 is attached to the handling unit 3. The base element is a rigid, frame-shaped body made of aluminum or steel, adapted to the contour of the handling unit 3. The base element has a front and rear cross member 6, 7 and a right and left longitudinal member 8, 9. The positions "front" and "rear" or "right" and "left" are chosen from the perspective of an operator of the test system 1, since such a test system typically has one side from which an operator has access to the system, which in the present embodiment is located in the Fig. 1, Fig. 2, Fig. 3 to Fig. 4 is located in the drawings at the bottom right.

[0033] A lever mechanism 10 is attached to each of the inner sides of the longitudinal struts 8, 9. In the present embodiment, the two lever mechanisms 10 are identical, which is why only one of the two lever mechanisms 10 will be described below.

[0034] The lever mechanism has a universal joint consisting of a first and a second lever arm 11, 12.

[0035] The first lever arm 11 is attached at one end to the inside of the longitudinal strut 8, 9 by a fixed pivot joint 13. At its other end, the first lever arm 11 is attached to a telescopic rail 15 by a further pivot joint 14. The telescopic rail 15 is explained in more detail below. The pivot joint 14 is designed to be slidable along the telescopic rail 15.

[0036] The first and second lever arms 11, 12 are pivotably connected at approximately their longitudinal midpoint by a pivot joint 16.

[0037] The second lever arm 12 is attached at one end to the inside of the longitudinal strut 8, 9 by a pivot joint 17 which is slidable in the longitudinal direction of the longitudinal strut 8, 9. At its other end, the second lever arm 12 is attached to the telescopic rail 15 by a further, stationary pivot joint 18.

[0038] The universal joint can be opened like a pair of scissors ( Fig. 2, Fig. 3) or folded ( Fig. 4) When the universal joint is opened and closed, the telescopic rail is raised or lowered relative to the base element 5. The telescopic rail 15 is always arranged parallel to the respective longitudinal strut 8, 9.

[0039] Since the two fixed pivot joints 13, 18 are arranged opposite each other and the sections of the lever arms from the common pivot joint 16 to the pivot joints 13, 14, 17, 18, with which the lever arms 11, 12 are articulated to the base element 5 and to the telescopic rail 15, are each of the same length, the movement when opening and closing the universal joint of the telescopic rail 15 is linear. The universal joint thus forms a linear guide, as it guides the telescopic rail 15 along a straight path of movement.

[0040] The two telescopic rails 15 hold a retaining frame 19, which forms a bracket for holding an interface unit 20. The interface unit 20 consists of a stiffening frame 20 / 1 and an interface board 20 / 2.

[0041] The retaining frame is slidably mounted by means of the telescopic rails 15, so that it can be pulled out from the area above the handling unit 3.

[0042] The retaining frame 19 has recesses 21 into which protrusions 22 on the interface unit 20 can be inserted, so that the interface unit 20 is held in the retaining frame 19.

[0043] Two retaining plates 23 project from the outside of the stiffening frame 20 / 1 of the interface unit 20. Each retaining plate has two downward-projecting positioning pins. The positioning pins can engage in corresponding positioning bushings 24. The positioning bushings 24 are attached to the handling unit 3. The positioning pins and the positioning bushings 24 form a pneumatically actuated positioning system (docking system) and are designed according to US 6,870,362 B2.

[0044] The lever mechanisms 10 are each coupled to a cam 25. The cam 25 is linearly displaceable on the base element 5. The cam 25 of the present embodiment has a first cam track 26 and a second cam track 27. The first cam track 26 is hereinafter referred to as the pivot cam track 26 and the second cam track as the locking cam track 27. The cam tracks 26, 27 are elongated recesses in the cam 25 into which the first lever arm 11 engages with a pivot pin (not visible in the Fig. 1, Fig. 2, Fig. 3, Fig. 4 to Fig. 5) and engages a locking pin 28.

[0045] The two cams 25, which are identical in the present embodiment, are coupled to a drive belt 29, which is guided by means of several deflection pulleys 30 arranged on the base element 5 such that a section of the drive belt extends along one of the two lever mechanisms and one of the two cams is coupled to each of these sections of the drive belt, so that when the drive belt 29 is moved, both cams are moved linearly by the drive belt.

[0046] In the present embodiment, the drive belt 29 is a toothed belt. However, it can also be designed as a chain, steel cable, or rod mechanism.

[0047] A strip 31 is arranged on the base element, projecting slightly from the front of the base element. An actuating lever 32, equipped with a detent mechanism, is arranged at the far end of the strip 31. The actuating lever 32 is coupled to a pinion that meshes with the drive belt, so that when the pinion is rotated by means of the actuating lever, the drive belt 29 is moved. The strip 31 projects sufficiently far from the base element 5 that the actuating lever 32 remains freely accessible even when the test system is closed.

[0048] Instead of the actuating lever 32, an automatic actuating device, such as a pneumatic lifting / piston mechanism, can also be provided to move the drive belt 29.

[0049] A spring assembly 33, which in this embodiment is a gas spring 33, is coupled between the drive belt 29 and the base element 5. In this embodiment, the gas spring 33 is attached at one end to one of the two cams 25 and at the other end to the base element 5.

[0050] In Fig. Figure 4 shows the adapter 20 in an end position in which the positioning pins engage in corresponding positioning bushings 24 and are fixed therein. In this end position, the interface unit is in the position required for operating the test system 1. Fig. Figure 4 shows the interface unit 20 with a schematically simplified representation of the interface board 20 / 2. The level in which the interface board 20 / 2 is located in its final position is referred to below as interface level 34.

[0051] The swivel curve track 26 ( Fig. 5) exhibits a first flat section 26 / 1 (in Fig. 5 below), a more steeply inclined section 26 / 2 and a second flat section 26 / 3 (in Fig. 5 above). The inclination of the three sections refers to the interface plane 34, i.e., the flat sections 26 / 1 and 26 / 3 have only a very slight inclination with respect to the interface plane 34, and the inclined section 26 / 2 has a greater inclination with respect to the interface plane 34. Hereinafter, the first flat section 26 / 1 is referred to as the first locking section 26 / 1, the inclined section 26 / 2 as the actuating section 26 / 2, and the second flat section as the second locking section 26 / 3.

[0052] When the cam 25 is moved, the pivot pin of the lever arm 11 slides in the pivot cam track 26 such that, as the pivot pin slides from the first locking section 26 / 1 along the actuating section 26 / 2 to the second locking section 26 / 3, the pivot pin is lifted, thus pivoting the lever arm 11 about the pivot joint 13. The pivoting movement is primarily executed by the interaction of the pivot pin and the actuating section 26 / 2. The locking sections 26 / 1 and 26 / 2 are designed to be so flat that they cause no or only a very slight pivoting movement. During this pivoting movement, in which the pivot pin slides from the first locking section 26 / 1 along the actuating section 26 / 2 to the second locking section 26 / 3, the universal joint is opened and the retaining frame 19 with the adapter 20 is lifted from the end position upwards into an intermediate position. Fig. 3) Because the second locking section 26 / 3 is very flat, the universal joint is locked in this intermediate position by the cam 25.

[0053] In this intermediate position, the retaining frame 19 and the adapter 20 can be pulled out of the area above the handling unit 3 using the telescopic rails. The retaining frame 19 and the adapter 20 are then in a removal position ( Fig. 2), in which the adapter 20 can be easily replaced by a user. Devices are provided to prevent the telescopic rails from being extended when they are not in the intermediate position. These devices are shown in the schematically simplified Fig. 1, Fig. 2, Fig. 3, Fig. 4 to Fig. 5 not shown.

[0054] When the cam 25 is moved back so that the pivot pin slides from the second locking section 26 / 3 along the actuating section 26 / 2 to the first locking section 26 / 1, the lever arm 11 is pivoted downwards, thus closing the universal joint. This closed position ( Fig. 4) represents the end position. When the lever arm is lowered, the locking pin 28 engages in the locking cam track 27, which has an upwardly open opening and is flat with respect to the interface plane 34 (i.e., has a slight inclination with respect to the interface plane 34). The locking pin 28 and the locking cam track 27 are further away from the pivot joint 13 than the pivot pin and the corresponding pivot cam track 26, so that, due to the longer lever, a stronger additional locking of the universal joint is achieved in the end position.

[0055] The locking pin 28 and the locking cam track 27 provide additional fixation of the telescopic rails 15 and prevent them from deflecting. Therefore, it may be possible to meet the required tolerances even without a positioning system comprising the positioning pins and the positioning bushings 24. This is particularly relevant for test systems used to test semiconductor components, as the tolerances here are larger than in test systems used to test wafers.

[0056] During lowering, the gas spring 33 is tensioned, so that the gas spring 33 counteracts the weight of the mounting frame 19, the adapter 20 and the interface unit. This allows the actuating lever 32 to be operated with little force to move the module from the end position ( Fig. 4) into the intermediate position ( Fig. 3) and move back again. The detent mechanism of the actuating lever has at least detent positions for the end position and the intermediate position, so that, in conjunction with the locking effect of the pivot cam track 26 and the locking cam track 27, the exchange module 2 is securely held in the end position or in the intermediate position.

[0057] In the intermediate position, the retaining frame can be pulled out using the telescopic rails 15 in order to replace the adapter 20 with the interface unit.

[0058] The straight guidance of the universal joint with the lever arms 11, 12 ensures that the positioning pins are correctly inserted into and removed from the positioning bushings 24 and that, if further contact pins are provided on the interface unit, they are not damaged.

[0059] The first embodiment described above is a test system for testing wafers that are fed to the interface unit by a handling unit (prober). Within the scope of the invention, the test system can also be configured for testing semiconductor devices. A handling unit for feeding wafer disks is referred to in the field as a "prober," and a handling unit for feeding individual integrated circuits is referred to as a "handler."

[0060] The Fig. 6, Fig. 7 to Fig. Figure 8 shows a second embodiment of an exchange module 2 for a test system designed for testing semiconductor components. This test system is a vertical test system, meaning that the handling unit and the test unit (not shown) are arranged side by side and the contacting connection surfaces are vertically oriented. Accordingly, an approximately flat interface unit located between the handling unit 3 and the test unit 4 is also arranged vertically.

[0061] This exchange module 2 for a vertical test system is essentially designed the same way as the one in the Fig. 1, Fig. 2, Fig. 3, Fig. 4 to Fig. The exchange module 2 shown is for a horizontal test system. Therefore, identical parts are designated with the same reference numerals and are not explained again. This exchange module 2 also has two lever mechanisms 10, a lower lever mechanism and an upper lever mechanism, each comprising a universal joint consisting of a first lever arm 11 and a second lever arm 12. The two lever mechanisms 10 are identical. The lower lever mechanism 10 must support the weight of the interface unit 20, the mounting frame 19, and the telescopic rail 15. Therefore, the first lever arm 11 and the second lever arm 12 are wider and stiffer than in the first embodiment in order to absorb the weight force with essentially no distortion and transfer it to the base element 5.

[0062] The scenery 25 is each attached to two sleds 35 by means of a connecting plate 43. In Fig. The connecting plate 7 has been omitted to better show the slides and the guide. The slides 35 are slidably mounted on a rail 36. The slides 35 are connected to a mounting block 37, which is attached to the drive belt 29.

[0063] The cam 25 has the same curved tracks 26, 27 as in the first embodiment. The locking pin 28 and the pivot pin 38 engage in the curved tracks ( Fig. 8) The locking pin 28 and the pivot pin 38 are designed as rollers projecting from the lever arm 11, which fit into the recess of the cam tracks 26, 27.

[0064] A locking plate 39 is pivotably mounted on the telescopic rail 15, being pivotably connected approximately at the longitudinal center of the segment of the telescopic rail 15 connected to the first and second lever arms 11, 12. From this pivot point, the locking plate 39 extends to the end of this segment at which the other segments of the telescopic rail 15 can be extended. This end of the segment is engaged by the locking plates with a locking section 40. Adjacent to the locking section 40, an elongated hole 41 is formed in the locking plate 39, which is penetrated by a pin 42 attached to the telescopic rail 15, thus limiting the pivoting movement of the locking plate 39.In the locking plates 39, a curved track is formed adjacent to the lever arm 11, into which a pin projecting from the lever arm 11 engages such that when the universal joint is folded, the locking plate 39 is pivoted in such a way that it locks the telescopic rail with the locking section 40, preventing it from being extended. When the telescopic rail is in the extended position ( Fig. 7) Then the locking plate 39 with the locking section 40 abuts the section extended by the telescopic rail 15, thus preventing the locking plate 39 from pivoting back into the locked position. This locking is transmitted via the cam track pin mechanism between the locking plate 39 and the first lever arm 11, so that when the telescopic rail 15 is extended, the lever mechanism 10 is locked and cannot be folded.

[0065] The locking plate 39 thus ensures that the telescopic rail 15 can only be extended in the intermediate position and that it must be retracted when the lever mechanism 10 is folded up.

[0066] A third embodiment of an exchange module is described in the Fig. 9, Fig. 10, Fig. 11, Fig. 12, Fig. 13, Fig. 14, Fig. 15, Fig. 16, Fig. 17 to Fig. Figure 18 shows that this exchange module 2 is constructed similarly to the two preceding embodiments, so that identical parts are designated with the same reference numerals. They will not be explained again.

[0067] The exchange module 2 according to the third embodiment is again provided for a horizontal test system for testing semiconductor components, wherein this time the exchange module is located on the underside of the test unit 4, which is in the Fig. 9, Fig. 10 to Fig. 11 is merely schematically represented by a plate, and is attached.

[0068] In this embodiment, the lever mechanism 10 for guiding the retaining frame 19 and the interface unit 20 differs from the preceding embodiments in that no universal joint is provided, but rather a straight guide with a long lever arm 45 and a short lever arm 46 and an additional guide with a separate lever arm 47 ( Fig. 15, Fig. 16).

[0069] The short lever arm 46 of the straightening guide corresponds to the first lever arm 11 of the first and second embodiments. The long lever arm 45 is attached to the telescopic rail 15 by a fixed pivot joint 48 and to the base element 5 by a movable pivot joint 49. The short lever arm 46 is attached to the base element 5 by a fixed pivot joint 50 and to the long lever arm 45 by a further pivot joint 51 approximately in the middle. The distance between the pivot joints 48 and 49 and the pivot joint 51 (= effective lever lengths of the long lever arm) is equal to the distance between the pivot joint 50 and the pivot joint 51 (= effective lever length of the short lever arm 46 with respect to the connection point to the long lever arm 45).The two opposing joints 48, 50 are fixed in position, so that when the long lever arm 45 pivots about the movable pivot joint 49, the straight guidance guides the pivot joint 50, which is fixedly connected to the base element 5, along a straight line that runs perpendicular to the interface plane.

[0070] The separate lever arm 47 is attached to the base element 5 by a fixed pivot joint 52 and to the telescopic rail 15 by a sliding pivot joint 53. The sliding pivot joint 53 is formed by a rotatable pin 55, which is mounted on the telescopic rail 15, and an elongated hole 54 extending longitudinally in the separate lever arm 47.

[0071] The movable pivot joint 49 is formed by an elongated hole 54 and a rotatable pin 55, wherein the elongated hole 54 extends parallel to the interface plane.

[0072] A pivot pin 56 projecting outwards is provided on the short lever arm 46 and a pivot pin 57 projecting further outwards is provided on the separate lever arm 47.

[0073] A linearly displaceable cam 58 has a first pivot cam track 59 and a second pivot cam track 60. The first pivot pin 56 of the straight guide engages in the first pivot cam track 59. The second pivot pin 57 of the separate lever arm 47 engages in the second pivot cam track 60. Fig. 14). The two swivel curve tracks 59, 60 are each formed at an end area of ​​the strip-shaped backdrop 58.

[0074] The cam 58 has a locking cam track 61 in its longitudinal center, which opens downwards. A locking pin 62 is attached to the telescopic rail 15 by means of a corresponding bracket such that the locking pin 62 can engage in the locking cam track 61.

[0075] The pivot cam tracks 59, 60 each have a lower inclined actuating section 59 / 1 or 60 / 1 and an upper locking section 59 / 2 or 60 / 2 which is only slightly inclined or parallel to the interface plane.

[0076] If the cam is moved such that the pivot pins 56, 57 slide upwards from the lower end of the actuating sections 59 / 1 and 60 / 1 respectively towards the locking sections 59 / 2 and 60 / 2 respectively, then the short lever arm 46 is pivoted upwards around the pivot joint 50 and the separate lever arm 47 is pivoted upwards around the pivot joint 52. This raises the telescopic rail 15 with the retaining frame 19 and the interface unit 20.

[0077] At a certain height of the telescopic rail 15, the locking pin 62 engages in the locking cam track 61. Like the other two cam tracks 59, 60, the locking cam track 61 has a flat locking section, so that all three pins 56, 57, 62 are simultaneously arranged in the locking section when the cam 58 is moved into its end position.

[0078] As the cam 58 moves back, the three pins 56, 57, 62 slide along the pivot cam tracks 59, 60 and the locking cam track 61, respectively. The shape of the actuating sections 59 / 1 and 60 / 1 determines the pivoting movement of the lever arms 46 and 47, respectively. Depending on the distance traveled by the cam 58, the two levers 45 and 47 are pivoted. In the present embodiment, the shape of these actuating sections 59 / 1 and 60 / 1 is selected such that the ends of the lever arms 45 and 47 connected to the telescopic rail 15 are initially lowered by the same length when the cam 58 moves. After a certain distance has been traveled, the separate lever arm 47 lowers more than the long lever arm 45 of the straight guide. This causes the telescopic rail 15 to be slightly inclined relative to the interface plane 34.This different actuation by the different swivel cam tracks 59, 60 is barely perceptible to the naked eye. This swiveling component can be achieved, for example, by a steeper inclination in the lower part of the actuating section 60 / 1. The length of the lever arms and the points of application of the swivel pins must be taken into account here, so that a steeper inclination of the cam track does not necessarily lead to faster lowering. However, the general rule is that the steeper the inclination of the cam track, the greater the lowering of the corresponding lever or lever mechanism.

[0079] The opposing cams 58 are moved in opposite directions when actuated by the drive belt 29. The cam tracks are each located on the inside of the cam 58. This ensures that, when viewed from the perspective of the cam tracks, the cams move in the same direction, e.g., from left to right. Fig. 17 and Fig. 18. The curved tracks of the two backdrops 58 are accordingly aligned in the same direction. However, due to the pivoting component, these two sets of curved tracks differ slightly.

[0080] In this embodiment, the separate lever arm 47 is controlled by a separate pivot cam track independently of the respective straight-line guidance. This independence is used to initially move the telescopic rails 15 parallel to the interface plane and, after traversing a predetermined distance, to lower them by means of a pivoting movement.

[0081] Fig. Figure 9 shows the replacement module 2 with the mounting frame 19 and interface unit 20 raised to their maximum positions. Fig. In section 10, the retaining frame is lowered slightly, while still being arranged parallel to the interface plane 34. Fig. In position 11, the retaining frame is in the intermediate position where the telescopic rail 15 is lowered to its maximum extent relative to the base element 5. The front side of the retaining frame is lowered more than the rear side due to the greater lowering effect of the separate lever arm 47 relative to the guide rails 45, 46. Because of this inclination, the retaining frame with the interface unit 20 can be pulled out diagonally downwards. Handles 63 are provided on the retaining frame 19 for this purpose.

[0082] On the base element 5, two plates 64 are arranged adjacent to the front end of the retracted telescopic rails 15. The plates 64 extend downwards from the base element to such an extent that they cover a portion of the telescopic rails as long as the telescopic rails 15 are arranged parallel to the base element or parallel to the interface plane. If the telescopic rails are in the intermediate position ( Fig. 11) pivoted, then they are no longer covered by the plates 64. The telescopic rails can be extended with the retaining frame 19 and the interface unit 20. These plates thus prevent the retaining frame from being pulled out before the retaining frame or the interface unit is sufficiently far from the interface plane.

[0083] The in Fig. Figure 6 shows a second embodiment of an exchange module 2, which has a distance adjustment device 65 that is located in Fig. 19 is shown explosively lifted from the base element 5. This distance adjustment device 65 comprises four distance adjustment elements 66 ( Fig. 20). Each spacer adjustment element 66 has a threaded flange 67. The threaded flange 67 is tubular and has an external thread on its outer surface. One end of the threaded flange 67 is screwed into a gear 68. The gear 68 is mounted on a bearing disk 69. The gear 68 is rotatably mounted by means of an axial and radial bearing (not shown).

[0084] The four distance adjustment elements 66 are arranged distributed around the edge of the base element and protrude with their threaded flanges 67 on the base element 5 in the direction of the handling unit.

[0085] A second drive belt 70 is guided along the edge of the base element 5 by means of deflection pulleys 71 such that the drive belt 70 engages with all gears 68. A further bar 72 is attached to the base element and projects from its edge. A manually operated adjusting wheel 73 is located on the bar 72 and is coupled to another gear (not shown). This gear also engages with the drive belt 70, so that the drive belt can be moved by turning the adjusting wheel 73. The rotation of the adjusting wheel 73 is thus transmitted to all threaded flanges 67 of the distance adjusting elements 66. A digital scale (not shown) is provided on the adjusting wheel 73 for counting its rotations.The individual hollow threaded flanges 67 are attached to corresponding threaded holes on the test unit by means of screws (not shown), the screws extending through the hollow threaded flanges 67.

[0086] To join the test unit 4 with the handling unit 3, protruding pre-centering pins 74 are arranged on the base element, which engage in corresponding bores in the handling unit 3. During joining, the pre-centering pins 74 are inserted into the corresponding bores.

[0087] By rotating the threaded flanges 67 using the adjusting wheel 73, the gears meshing with the threaded flanges 67 are moved along the threaded flanges 67, thereby engaging the base element 5, which is coupled to the gears via the bearing disk 69. This allows the distance of the base element 5 from the handling unit to be adjusted. With the current embodiment, the distance can be freely varied over a length of 40 mm. In principle, the threaded flanges 67 can also be made longer, thus enabling a greater adjustment range. The distance is adjusted with an accuracy of 1 / 100 mm.

[0088] This distance adjustment device 65 allows the use of different types of interface units 20, which can be arranged at different distances from the handling unit. With an exchange module 2 equipped with a distance adjustment device, a wide variety of interface units can thus be quickly and easily exchanged and correctly positioned and adjusted in just a few steps.

[0089] The provision of the distance adjustment device 65 on an exchange module 2 with a mechanism for lifting the interface unit in a straight line from the end position to an intermediate position and a device for pulling out the interface unit, such as telescopic rails, represents an independent inventive concept, since it significantly increases the flexibility of the entire test system and allows the use of a wide variety of interface units.

[0090] The following describes another embodiment with a lever mechanism 10 ( Fig. 21, Fig. 22) for an exchange module 2, wherein the lever mechanism 10 is provided for a horizontal test system for testing semiconductor devices, in which the exchange module is attached to the underside of the test unit 4.

[0091] The lever mechanism 10 corresponds approximately to the lever mechanism shown in the first embodiment. Identical parts are provided with the same reference numerals.

[0092] Each of these lever mechanisms 10 is attached to the inner sides of the longitudinal struts 8, 9. According to the fourth embodiment, the two lever mechanisms 10 are designed to be mirror-symmetrical.

[0093] The lever mechanism 10 has a universal joint with a first and a second lever arm 11, 12.

[0094] The first lever arm 11 is attached at one end to a fixed pivot joint 13 on the inside of the longitudinal strut 8, 9. At its other end, the first lever arm 11 is attached to the telescopic rail 15 by a pivot joint 14. The pivot joint 14 is designed to be slidable along the telescopic rail 15.

[0095] The first and second lever arms 11, 12 are pivotably connected at approximately their longitudinal midpoint by a pivot joint 16.

[0096] The second lever arm 12 is attached at one end to the pivot joint 17, which is slidable in the longitudinal direction of the longitudinal strut 8, 9, on the inside of the longitudinal strut 8, 9. At its other end, the second lever arm 12 is attached to the telescopic rail 15 by a further, stationary pivot joint 18.

[0097] The two lever arms 11, 12 form a universal joint. The universal joint can be opened or closed like a pair of scissors. When the universal joint is opened or closed, the telescopic rail is lowered or raised relative to the base element 5. The telescopic rail 15 is always arranged parallel to the respective longitudinal strut 8, 9.

[0098] Since the two fixed pivot joints 13, 18 are arranged opposite each other and the sections of the lever arms from the common pivot joint 16 to the pivot joints 13, 14, 17, 18, with which the lever arms 11, 12 are articulated to the base element 5 and to the telescopic rail 15, are each of equal length, the movement when opening and closing the universal joint of the telescopic rail 15 is linear, with the telescopic rail 15 and the respective longitudinal strut 8, 9 always being arranged parallel to each other. The universal joint thus forms a linear guide, as it guides the telescopic rail 15 along a straight path of movement without rocking it.

[0099] The two telescopic rails 15 hold the retaining frame 19, which forms a holder for holding an interface unit 20.

[0100] The lever mechanisms 10 are each coupled to a cam 25. The cam 25 is linearly displaceable on the base element. The cam 25 of the present embodiment has a first cam track 26 and two second cam tracks 27. The first cam track 26 is referred to below as the pivot cam track 26 and the second cam tracks as the locking cam tracks 27. The cam tracks 26, 27 are elongated recesses in the cam 25 into which the lever arms 11, 12 engage with a pivot pin and a locking pin 28, respectively. By means of the locking pins 28 engaging with the cam tracks 27, the free ends, i.e., the ends of the two lever arms 11, 12 connected to the pivot joints 14, 18, are locked.

[0101] The locking pins 28 and the locking cam tracks 27 provide additional fixation of the telescopic rails 15 and prevent them from deflecting. This is particularly advantageous since the exchange module is attached to the underside of the test unit and is subjected to a force from below.

[0102] The two cams 25, which in the present embodiment are mirror-symmetrical about a vertical plane of symmetry, are coupled at their two ends to a deflection linkage 75. Thus, when actuated, both cams are moved in the same direction. By moving the deflection linkage 75, both cams can be moved in a straight line.

[0103] Instead of the deflection linkage 75, a toothed belt, a chain, or a steel cable can also be used. In that case, however, the two deflection linkages are designed point-symmetrically or asymmetrically.

[0104] The actuating lever 32, which is equipped with a detent mechanism, is provided for moving the deflection linkage 75. The actuating lever 32 is coupled to a pinion that meshes with the deflection linkage 75, so that when the pinion is turned by means of the actuating lever, the deflection linkage 75 is moved.

[0105] Instead of the actuating lever 32, an automatic actuating device, such as a pneumatic lifting / piston mechanism, can also be provided to move the deflection linkage 75.

[0106] In the third embodiment described above, a single cam is used to actuate the lever mechanism 10, which comprises a straight guide 45, 46 and a separate lever arm 47. Within the scope of the invention, it is of course also possible to provide two cams for acting on the straight guide and for acting on the separate lever arm, respectively.

[0107] In the embodiments described above, the two cams 25, 58 are driven in opposite directions by the drive belt. Within the scope of the invention, it is also possible for the two cams to be driven in the same direction, so that they are moved simultaneously in the same direction, i.e., simultaneously towards the front cross member 6 or simultaneously towards the rear cross member. In a parallel arrangement, the cam tracks of one cam must be mirrored accordingly.

[0108] According to the embodiments described above, it is sometimes specified whether they are preferably designed and used for a horizontal or a vertical test system for testing semiconductor devices. Within the scope of the present invention, all embodiments can be used for both a horizontal and a vertical test system for testing semiconductor devices, even if they are specifically designed for both.

[0109] The invention can be briefly summarized as follows: The invention relates to a module for replacing an approximately flat interface unit in a test system for testing semiconductor components. The module comprises a base element, a holder, and guide elements. The guide elements are designed such that the interface unit can be moved by a linear translational movement from an end position to an intermediate position and from the intermediate position to a removal position located outside the test system. The mechanism includes a lever mechanism controlled by a cam that is movably mounted transversely to the linear translational movement of the holder.

[0110] The module according to the invention thus represents a drawer system that allows the interface unit to be quickly inserted and removed, whereby the linear movement into the end position ensures a safe and reliable insertion of the interface unit into the test system, so that positioning pins are correctly inserted into corresponding positioning bores and protruding spring contact pins are not damaged. Reference symbol list 1 test system Module 2 3 handling unit 4 test units 5 Basic element 6 front crossbar 7 rear cross member 8 right longitudinal strut 9 left longitudinal strut 10 lever mechanism 11 Lever arm 12 Lever arm 13 Swivel joint 14 Swivel joint 15 telescopic rail 16 Swivel joint 17 Swivel joint 18 Swivel joint 19 mounting frames 20 adapters 21 Exclusion 22 lead 23 Mounting plate 24-position socket 25 Backdrop 26 Swivel curve track 27 Locking cam track 28 locking pins 29 drive belts 30 pulley 31 bar 32 operating levers 33 Spring mechanism 34 Interface level 35 sleds 36 rail 37 Mounting block 38 pivot pins 39 Locking plate 40 Locking section 41 Slotted hole 42 cones 43 wafers 44 Connecting plate 45 long lever arm 46 short lever arm 47 separate lever arm 48 Swivel joint (stationary) 49 Swivel joint (sliding) 50 Swivel joint (stationary) 51 Swivel joint 52 Swivel joint (stationary) 53 Swivel joint (sliding) 54 slotted hole 55 cones 56 pivot pins 57 pivot pins 58 Scenery 59 Swivel curve track 60 swivel curve track 61 Locking pivot track 62 locking pins 63 Handle 64 tiles 65 Distance adjustment device 66 Distance adjustment element 67 Threaded flange 68 gear 69 Bearing washer 70 drive belts 71 Pulley 72 bar 73 Adjusting wheel 74 Pre-centering pin

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