Apparatus and process for splitting up substances

Abstract

The invention relates to a process reactor (10) for splitting off molecular components of a gaseous substance (46) or substance mixture in a separating process. The process reactor (10) comprises a reaction chamber (12) with a gas inlet (28, 40) and a gas outlet (73). At least one gas feed (22) is provided, directing the gaseous substance (46) or the gaseous substance mixture from the gas inlet (40) to a reaction site (21) in the reaction chamber (12). Separating means (53) in the reaction chamber (12) split off molecular components at the reaction site (21). A voltage supply (50, 58) is provided for the separating means (53). At least one molecule separator (76) separates from one another different molecular components or molecules newly formed from the molecular components. The invention also relates to a process involving such a process reactor (10).

Description

[0001] Device and method for splitting substances

[0002] Technical area

[0003] 1. The invention relates to a process reactor for separating molecular components of a gaseous substance or mixture of substances in a separation process, comprising: a) a reaction chamber with a gas inlet and a gas outlet, b) at least one gas supply line that conveys the gaseous substance or gaseous mixture of substances from the gas inlet to a reaction site in the reaction chamber, c) separation means in the reaction chamber for separating molecular components at the reaction site, d) a power supply for the separation means, e) at least one molecular separator that separates different molecular components or molecules newly formed from the molecular components. Furthermore, the invention relates to a method for separating molecular components of a gaseous substance or mixture of substances in a separation process using a process reactor.

[0004] Description

[0005] Electrolysis is a chemical process in which electric current induces a redox reaction. It is used, for example, to extract metals or to produce materials whose extraction would be more expensive or almost impossible through purely chemical processes. Electrolysis is used, for example, to produce hydrogen, aluminum, chlorine, and caustic soda. The splitting of water into hydrogen and oxygen is playing an increasingly important role due to the energy transition.

[0006] To produce hydrogen (H2) and oxygen (O2) from water (H2O), the current state of the art frequently uses the electrolysis process. Electrodes from a direct current source are immersed in the water. Simply put, oxygen molecules are formed at the cathode and hydrogen molecules at the anode. This electrolytic process converts electrical energy into chemical energy. This chemical energy can then be easily stored.

[0007] Electrolysis is an extremely simple process for producing hydrogen. Therefore, it is used in many technical fields. Hydrogen is also produced by other processes in which water is split into hydrogen and oxygen using high-frequency electromagnetic fields in combination with a plasma discharge. Particularly in the energy transition, great hopes are being placed on hydrogen as an easily transportable energy storage medium, produced, for example, by wind or solar power. The hydrogen can then be used as a replacement for fossil fuels. Although electrolysis is an extremely simple process, a relatively large amount of energy is still required to split the water into its components.

[0008] State of the art

[0009] DE 10 2014 010 359 A1, for example, describes a plant for producing hydrogen by electrolysis. The plant is supplied with electrical power drawn from the electrical grid to operate an electrolysis process. The plant comprises at least two electrolysis units whose electrical power can be switched on and off independently of one another.

[0010] DE 10 2014 010 813 A1 also describes an electrolysis device. A frame for such an electrolysis device is described. The electrolysis device comprises a receiving space for one or more electrolysis cell components, an inner edge enclosing the device, an outer edge, and a frame structure extending from the inner edge to the outer edge, formed integrally from a structural material. A fluid guide for the fluids supplied and removed during electrolysis is arranged in the frame structure. Furthermore, an electrolysis cell module and a stack-type electrolyzer constructed from several such electrolysis cell modules, in particular for the production of hydrogen, comprise such a frame.

[0011] DE 10 2019003 980 A1 also describes the production of hydrogen using the electrolysis process. Hydrogen is becoming increasingly important as an energy carrier. High production costs and transport options above 700 bar pose major challenges. It is possible to produce hydrogen directly on-site using solar cells.

[0012] DE 10 2011 081 915 B4 discloses a method and device for splitting water. This method is achieved by using electromagnetic fields in the high-frequency range in combination with an electrical plasma discharge in the gas phase and / or the boundary region between the water and gas phases. The method and device can be used in particular for the formation of hydrogen (H2) from water (H2O), for the formation of reactive oxidizing and / or reducing species, for the degradation of pollutants, for the sanitization of water, and / or for the desalination of seawater or other saline water, preferably in conjunction with other aforementioned applications.

[0013] EP 3919438 A1 relates to a method and a device for the thermal cracking of a hydrocarbon-containing starting material. In the method, a non-thermal microwave plasma is generated from at least a portion of the starting material in gaseous or vaporous form, or converted into gaseous or vaporous form, by means of microwave radiation acting on the starting material in a microwave plasma device. The starting material is cracked into a carbon component and a hydrogen component. Furthermore, the carbon and hydrogen components are separated from one another in a separation process outside the microwave plasma device.

[0014] The known devices and processes have the disadvantage that relatively large amounts of energy are required to produce hydrogen (H2) for technical applications. The efficiency of the known devices and processes is too low or could be improved.

[0015] Disclosure of the invention

[0016] The object of the invention is therefore to avoid the disadvantages of the prior art and to split molecules, in particular water molecules, as energy-efficiently as possible, as occurs, for example, in electrolysis. According to the invention, this object is achieved in that, in a process reactor for splitting off molecular components of a gaseous substance or mixture of substances in a separation process of the type mentioned above, f) the separation means comprise at least two spaced-apart electrodes, which are subjected to an RF frequency to generate a plasma from a plasma gas, wherein g) a pump is provided for operating the reaction chamber at negative pressure.

[0017] The invention is based on the principle of breaking down a substance or mixture of substances using a plasma and separating the fission products. Working at low pressure allows the substance or mixture of substances to be split particularly effectively by the plasma. Plasma technology is frequently used in the field of semiconductor production. This involves systems that use the gases for etching or depositing molecules on the semiconductor to be processed. Hydrogen is particularly produced during these processes. Surprisingly, it has been shown that plasma technology can also be generally applied to the production of hydrogen. In principle, other gaseous substances can also be split using plasma technology. The substance to be processed is introduced into the plasma as evenly as possible.

[0018] The plasma is created from a plasma gas, such as the noble gas argon (Ar), which is ignited by an alternating RF electric field. The plasma gas can also be a gas mixture, consisting of e.g. argon (Ar) and xenon (Xe). The proportions of the components of the gas mixture can be adjusted to the requirements of the generated plasma and the specific molecule to be split. The alternating RF electric field is generated between two electrodes into which the plasma gas is fed. By separating the fission products and the plasma gas, the desired fission product, such as hydrogen (Hz), is obtained. The separation process is extremely easy to scale. The only factors that matter are the size of the reaction chamber and the size of the electrodes, and thus the associated expansion of the plasma.

[0019] An advantageous embodiment of the process reactor according to the invention for separating molecular components from a gaseous substance or mixture of substances in a separation process consists in at least two spaced-apart electrodes formed from parallel plates. This measure serves to shape the surface area of ​​the electrodes in such a way as to allow the formation of a sufficiently large plasma in which the separation process takes place. The larger the plasma, the more separation processes take place.

[0020] A further advantageous embodiment of the process reactor according to the invention consists in the fact that the molecular separator is connected downstream of the pump. This first evacuates the fission products from the process chamber and then separates them from each other. The fission products and the plasma gas can then be more easily directed to their intended uses. The plasma gas can, for example, be reused in the reaction chamber of the process reactor to generate a plasma.

[0021] A preferred and advantageous embodiment of the process reactor according to the invention further comprises at least one gas supply with at least one outlet opening that uniformly delivers the gaseous substance or gaseous mixtures between the electrodes to the reaction site in the plasma. This measure serves to release the gaseous substance or gaseous mixtures only at the reaction site, if possible, to prevent deposition or other undesirable effects.

[0022] An advantageous embodiment of the reactor according to the invention is further achieved by having at least one outlet opening designed as a Laval nozzle. One or more simple outlet openings cannot deliver the gas to be processed evenly to the reaction site in the plasma. A Laval nozzle is a flow device in which the cross-section initially narrows and then widens, with the transition from one part to the other occurring smoothly. The cross-sectional area is usually circular or elliptical at every point. Due to their shape, Laval nozzles have the property of being able to deliver the gas to be processed into the plasma at the reaction site in a targeted and extremely even manner and over a large area. This uniformity is maintained even at very high gas velocities or pressures. For example, gas velocities of 300 m / s and more can be achieved, allowing a large amount of gas to be passed through the plasma per unit of time.In this way, a large number of molecules of the gas to be processed can be split in the plasma.

[0023] A further advantageous embodiment of the process reactor according to the invention results from the provision of pulsing means that allow the gaseous substance or mixture of substances to exit from at least one outlet opening in a pulsed manner. The pulsed outflow of the gaseous substance or mixture of substances increases the particle density per unit volume. This significantly increases the probability of a molecule splitting in the plasma.

[0024] In a further advantageous embodiment of the process reactor according to the invention, the gas guide at least partially encloses the reaction site, with at least one outlet opening directed toward the reaction site. This measure ensures that the gas supply conveys the gas to be processed into the plasma for splitting from as many sides as possible. For this purpose, the gas supply can contain an outlet body at its end, which then contains the outlet openings or Laval nozzles. This outlet body can be annular or U-shaped, for example.

[0025] Furthermore, in an advantageous embodiment of the process reactor according to the invention, a heating device is provided upstream of the gas inlet, which converts a liquid phase of a substance and / or mixture of substances into a gaseous phase. Liquid water (H2O), for example, can be converted into the vapor phase simply by heating. The vapor or gas can then be fed to the reaction site via the gas supply. The efficiency of the separation process can be further significantly increased if, in a process reactor according to the invention, means for generating a magnetic field are provided in the reaction chamber. The magnetic field acts on the reaction that takes place between the plasma and the gaseous substance to be split.

[0026] A particularly advantageous embodiment of the process reactor according to the invention for separating molecular components from a gaseous substance or mixture of substances in a separation process is further achieved by the means for generating a magnetic field containing at least one electrically operated magnetic coil. The magnetic coil can be easily tuned to the separation process in the plasma by means of the variable electric current flowing through the magnetic coils.

[0027] In a further advantageous embodiment of the process reactor according to the invention, an alternating voltage generator is provided for the at least one magnetic coil, which generates an alternating magnetic field. In this variant, the alternating magnetic field has an efficiency-enhancing effect on the production rate of the split-off fission products. The alternating magnetic field leads to additional interactions between the reactants, which positively influence the separation processes.

[0028] A preferred development of the process reactor according to the invention further results from the magnetic field being arranged perpendicular to the electric field of the electrodes. This measure also increases the production rate of fission products.

[0029] In a particular variant of the process reactor according to the invention, pairs of electrodes are formed, which are arranged in series or stacked, with a plasma being generated between each pair of electrodes. With a single pair of electrodes, the production rate of fission products is limited by the size of the plasma and the extension of the electrodes. By stacking the electrode pairs, the production of fission products can be significantly increased. This is because the areas of the electrode pairs and the plasma volume can be significantly expanded in the reaction chamber using this arrangement in a very small space. This stackable arrangement thus also helps to carry out fission cost-effectively on a larger scale, because only one reaction chamber is required.

[0030] A further advantageous embodiment of the process reactor according to the invention consists in the fact that an insulator separates each pair of electrodes. The insulator ensures that the individual electrode pairs, between which the plasma is located, do not influence each other in an undesirable manner. This shields the electrode pairs from each other.

[0031] Furthermore, in a preferred variant of the process reactor according to the invention, the insulator comprises an iron core and / or a permanent magnet. The iron core serves as a simple amplifier for the magnetic field. This allows the efficiency of the magnetic field on the plasma and thus on the fission reactions to be increased with little effort. A permanent magnet can be used, among other things, when no external magnetic field is present.

[0032] Furthermore, in a very advantageous and preferred embodiment of the process reactor according to the invention, a catalyst is provided to accelerate the separation process. The catalyst accelerates the reactions, so that the energy required to separate the substance or mixture of substances is lower. Thus, a significant increase in efficiency is achieved with the catalyst. The light from the plasma, in combination with the catalyst, can further enhance the splitting process. This is because the photons created during plasma generation can now have sufficient energy to enable the splitting of the molecule in interaction with the catalyst. The catalyst can, in particular, also be introduced in gaseous form into the reaction space at the reaction site. In an advantageous embodiment of the process reactor according to the invention, the catalyst is provided to contain titanium oxide.Titanium oxide significantly accelerates the decomposition of a substance or mixture of substances. Therefore, titanium oxide is a particularly suitable substance as a catalyst. Here, too, the light from the plasma, in combination with the catalyst, further enhances the decomposition process.

[0033] A special variant of the process reactor according to the invention consists in the fact that the electrodes and / or walls of the reaction chamber are coated with the catalyst. To avoid having to introduce the catalyst into the reaction chamber with the substance or mixture of substances to be decomposed, the electrodes and / or walls of the reaction chamber are coated with the catalyst. The coating can also be applied during ongoing operation, for example, by depositing titanium oxide on the walls or electrodes.

[0034] According to the invention, the object is further achieved by a method for splitting off molecular components of a gaseous substance or mixture of substances in a separation process with a process reactor having the aforementioned features, with the method steps: a) generating a negative pressure in the reaction space with the pump, b) generating a plasma from the plasma gas between the electrodes, which are subjected to an RF frequency, c) introducing the gas or gas mixture to be split up through the gas inlet of the process reactor, d) feeding the gas or gas mixture through the gas supply between the electrodes, e) separating the different molecular components or newly from the

[0035] Molecules formed from molecular components are separated using a molecular separator. The method according to the invention is based on the principle of breaking down a substance or a mixture of substances using a plasma and separating the fission products. Working under negative pressure allows the substance or mixture of substances to be split particularly effectively by the plasma. Hydrogen in particular is also produced during the work processes. Surprisingly, it has been shown that plasma technology can generally also be applied to the production of hydrogen. In principle, other gaseous substances can also be split using plasma technology. The material to be processed is introduced into the plasma as evenly as possible. The plasma is created from a plasma gas, such as the noble gas argon (Ar), which is ignited by an alternating RF electrical field. The alternating RF electrical field is generated between two electrodes into which the plasma gas is fed.By separating the fission products and the plasma gas, the desired fission product, such as hydrogen (Hz), is obtained.

[0036] Further embodiments and advantages emerge from the subject matter of the dependent claims and the drawings with the associated descriptions. Exemplary embodiments are explained in more detail below with reference to the attached drawings. In addition, spatially relative terms such as "beneath", "under", "lower", "above", "upper" and the like may be used in the present text to simplify the description and to describe the relationship of one element or structural element to one or more other elements or structural elements, as illustrated in the figures. The spatially relative terms are intended to include, in addition to the orientation shown in the figures, other orientations of the device during use or operation.The device may also be oriented differently (rotated 90 degrees or oriented differently), and the spatially relative descriptors used in this text may equally be interpreted accordingly.

[0037] The invention is not intended to be limited solely to these exemplary embodiments. They serve merely to explain the invention in more detail. The present invention is intended to relate to all subject matter that a person skilled in the art would consider obvious for implementing the invention, now and in the future. Furthermore, the content of the cited publications is incorporated into the disclosure of the present application.

[0038] Short description of the drawing

[0039] Fig. 1 shows, in a first embodiment, a schematic diagram of a process reactor according to the invention for splitting off molecular components of a gaseous substance or mixture of substances in a separation process with a pair of parallel electrode plates in a longitudinal section.

[0040] Fig. 2 shows a schematic diagram of a cross section through a process reactor according to Fig. 1

[0041] Fig. 3 shows, in a second embodiment, a schematic diagram of a process reactor according to the invention for splitting off

[0042] Molecular components of a gaseous substance or mixture of substances in a separation process with a stack of pairs of parallel electrode plates in a longitudinal section.

[0043] Preferred embodiment

[0044] Fig. 1 shows a schematic longitudinal section of a first embodiment of a process reactor 10 according to the invention. The process reactor 10 comprises a reaction chamber 12 with walls 13, in which molecular components of a gaseous substance or mixture of substances are split off or separated in a separation process. In such a separation process, for example, water molecules are split into their atomic elements, oxygen and hydrogen. Arranged in an interior 14 of the reaction chamber 12 is a pair of parallel and spaced-apart electrode plates 16, 18, which form an intermediate space 20. The electrode plates 16, 18, like the walls 13 of the interior 14 of the reaction chamber 12, are coated with a suitable catalyst 22 for the reaction. In the present embodiment, the catalyst layer 22 is titanium oxide. The coating with the catalyst layer can be carried out during ongoing operation.A plasma gas, designated here by "C", preferably a noble gas such as argon (Ar), is fed from a plasma gas container 24 via a gas line 26 to an inlet 28 for plasma gas C in the reaction chamber 12. The plasma gas C can also be a gas mixture consisting, for example, of argon (Ar) and xenon (Xe). The proportions of the components of the gas mixture can be adjusted to the requirements of the generated plasma and the respective molecule to be split. The amount of plasma gas admitted is regulated via a first controllable valve 30.

[0045] A gaseous substance, designated here as "AB," or possibly a mixture of substances for splitting off molecular components, is fed into the reaction chamber 12 into the intermediate space 20 via a gas supply 32. The substance AB or the mixture of substances to be processed is located in a container 34. The substance can also be present there, for example, in the liquid phase. By simply heating it using a corresponding heating device 36, the substance or mixture of substances can be converted into a more easily processable gaseous phase before entering the reaction chamber 12.

[0046] A second controllable valve 38 regulates the gas quantity of substance AB or the substance mixture as the gas to be processed, which is fed through a further inlet 40 into the interior 14 of the reaction chamber 12. The gas supply 32 opens into an outlet body 42, which, in this exemplary embodiment, encloses the intermediate space 20 between the electrode plates 16, 18 in a U-shape (see also Fig. 2). The intermediate space 20 ultimately forms a reaction site 21, since this is where the essential separation processes take place. The outlet body 42 is tubular. The outlet body 42 has outlet openings 43 directed toward the intermediate space 20 formed by the electrode plates 16, 18. In the present exemplary embodiment, the outlet openings 43 are designed as Laval nozzles 44. The gas AB to be processed exits through the Laval nozzles 44 of the outlet body 42 and flows between the electrode plates 16, 18, as indicated by arrows 46.Pulsing means 47 pulse the gaseous substance 46 or mixture of substances emerging from the outlet openings 43. Thus, only intermittent or pulsating gas quantities emerge from the outlet openings 43. The pulse duration is, for example, in a range of 10 ms to 50 ms.

[0047] The electrode plates 16, 18 are supplied with a high-frequency alternating voltage via electrical lines 48. The RF alternating voltage is generated by an AC voltage generator 50. In the present embodiment, the frequency of the RF alternating voltage is in the range of 60 MHz. The high-frequency RF alternating voltage creates an alternating electric field, which, through its interaction, energetically affects the plasma gas and ignites it. A plasma 52 is formed between the electrode plates 16, 18. Separating means 53 enclose the electrode plates 16, 18 and the plasma 52, which splits the gas AB into the fission products A and B.

[0048] The gas AB exiting from the Laval nozzles 44 of the outlet body 42 then encounters the plasma 52, which ideally splits the incoming gas AB to form the molecular components A and B. Since the plasma 52 is generated from a noble gas, the plasma gas C itself cannot react with the separated or split components A and B of the gas AB to be processed.

[0049] The interaction of the plasma 52 with the gas AB is further amplified by an alternating magnetic field. For this purpose, coils 54, 56 are arranged laterally on the reaction chamber 12 to generate an alternating magnetic field. In this exemplary embodiment, the alternating magnetic field is provided essentially perpendicular to the alternating electric field between the electrode plates 16, 18. The coils 54, 56 are also supplied with an RF alternating voltage from a further alternating voltage generator 58 via electrical lines 60. On their respective rear sides 62, 64, the electrode plates 16, 18 each have an electrical insulator 66, 68 as a shield. Iron cores 70, 72 are provided in these insulators 66, 68. These iron cores 70, 72 amplify the alternating magnetic field generated by the coils 54, 56.

[0050] In addition to the plasma gas C, the fission products, i.e., the molecular components A and B, which were formed from the gas AB, are also sucked out of the reaction chamber 12 through a lower gas outlet 73, which opens into one of the reaction chambers, using a pump 74. For this purpose, the pump 74 is tightly flanged to the gas outlet 73 of the reaction chamber 12. In this embodiment, the pump 74 maintains a negative pressure of typically 200 mTorr in the reaction chamber 10 during operation of the process reactor 10.

[0051] The gas mixture A, B, C, i.e. the different fission products A and B, as well as the plasma gas C are fed to a molecular separator 76. For this purpose, the molecular separator 76 is mounted downstream of the pump 74 and tightly at the outlet 77 of the pump 74. The molecular separator 76 separates the components A, B, and C of the gas mixture from one another. The plasma gas C is then fed back to the plasma gas container 24 via the gas line 78. The molecular separator 76 can, for example, operate with semipermeable membranes 80, 82. In this case, only molecules with a certain diameter are allowed to pass through one of the semipermeable membranes 78, 80 into a separate chamber 84, 86, 88 of the separator 76. From there, the separated gases A, B, and C can be fed to their intended purpose.

[0052] Figure 2 shows a simplified schematic diagram of a horizontal section of the process reactor 10 shown in Figure 1. Where the figures correspond, the same reference numerals are used. The upper electrode plate 16 can be seen in the interior 14 of the reaction chamber 12. The electrode plate 16 is surrounded on three sides by the U-shaped outlet body 42.

[0053] The gas supply 32 opens into the outlet body 42. The outlet body 42 has numerous outlet openings 43. The outlet openings 43 are designed as Laval nozzles 44. The Laval nozzles 44 are evenly aligned inward toward the intermediate space 20. This achieves the best possible distribution of the gas 46 to be processed in the intermediate space 20 between the electrode plates 16, 18. A uniform distribution of the gas to be processed also causes continuous interaction with the plasma 52 and effective splitting of the gas 46 to be processed. Arrows 90 indicate how the gas 46 flows out of the outlet body 42 through the Laval nozzles 44. The pulse means 47 introduce the gaseous substance 46 or the substance mixture into the reaction site 21 in pulsed form.

[0054] Coils 54, 56 are mounted laterally on the reaction chamber 12 to generate the alternating magnetic field. This alternating magnetic field is arranged perpendicular to the alternating electric field generated by electrode plates 16, 18. The effects of the alternating electric and magnetic fields are coordinated.

[0055] Molecular separator 76 and pump 74 are shown as dashed lines in this figure. Pump 74 evacuates reaction chamber 12 and maintains it at a negative pressure of approximately 200 mTorr. Molecular separator 76 contains separate chambers 84, 86, and 88, which are separated from each other by semipermeable membranes 80, 82. These semipermeable membranes are designed to allow only molecules with specific diameters to pass through. This allows for the separation of fission products A, B, and the plasma gas C. Each of the chambers 84, 86, and 88 should then contain gases A, B, and C for subsequent use.

[0056] Figure 3 shows another embodiment of the process reactor 10 for separating molecular components from a gaseous substance or mixture of substances in a separation process. The process reactor 10 is shown as a schematic diagram in a longitudinal section. Where the components in this figure correspond to the previous figures, the same reference numerals are used. Instead of a single pair of electrode plates 16, 18, several pairs are arranged one behind the other or one above the other to form a stack 92.

[0057] In the interior 14 of the reaction chamber 12, the stack 92 is formed by pairs of electrode plates 16, 18 arranged in parallel. Each pair of electrode plates 16, 18 has the intermediate space 20, which forms the reaction site 21. The electrode plates 16, 18, like the interior 14 of the reaction chamber 12, are coated with the catalyst 22 for the reaction. In the present exemplary embodiment, the catalyst layer 22 is titanium oxide. The coating with the catalyst 22 can be carried out during ongoing operation of the process reactor by suitable deposition. The plasma gas C here is also a noble gas, such as argon (Ar). In principle, a noble gas mixture comprising different noble gases could also be used as the plasma gas mixture. The plasma gas C is fed from the plasma gas container 24 via the gas line 26 through the inlet 28 into the reaction chamber 12.The required and admitted gas quantity of the plasma gas 10 is regulated via a first controllable valve 30.

[0058] The gaseous substance AB is fed via the gas supply 32 into the reaction chamber 12 to the intermediate spaces 20, analogous to Fig. 1, for splitting. The gas supply 32 comprises branches 94, each of which opens into the outlet bodies 42. The substance AB to be processed is initially located in the container 34. The substance AB can also be present there, for example, in the liquid phase, such as water (H2O). The heating device 36 generates a gas from it as needed before it is admitted into the reaction chamber 12.

[0059] The second valve 38 controls the required gas quantity of substance AB, which is fed through the inlet 40 into the interior 14 of the reaction chamber 12. Each gap 20 located between the paired electrode plates 16, 18 is assigned its own outlet body 42. These outlet bodies 42 enclose the space between the electrode plates 16, 18 in a U-shape, as shown in Fig. 2. Each outlet body 42 is tubular and has outlet openings 43. The outlet openings 43 are designed as Laval nozzles 44, each of which is directed toward its associated gap 20. During operation of the process reactor 10, the gas AB exits through the Laval nozzles 44 of the outlet body 42 and flows in a pulsed manner between the electrode plates 16, 18 via the pulsing means 47.

[0060] The electrode plates 16, 18 are subjected to a high-frequency alternating voltage. The RF alternating voltage is generated by the AC voltage generator 50 (not shown in this figure). The frequency of the RF alternating voltage is also in the range of 60 MHz. The applied RF alternating voltage is tuned or synchronized to the electrode plates 16, 18 for the stack 92. The high-frequency alternating voltage creates an alternating electric field between all the gaps 20 of the stack 92, which, through its interaction, energetically affects the plasma gas and ignites it. A plasma 52 is created between the electrode plates 16, 18.

[0061] The gas AB exiting from the Laval nozzles 44 of the outlet body 42 then encounters the plasma 52, which ideally splits the incoming gas AB to form the molecular components A and B. Since the plasma 52 is generated from a noble gas, the plasma gas C itself cannot react with the separated or split components A and B of the gas AB to be processed.

[0062] The interaction of the plasma 52 with the gas AB is further amplified by the alternating magnetic field generated by the coils 54, 56 attached to the sides of the reaction chamber 12. The alternating magnetic field is provided essentially perpendicular to the alternating electric field between the electrode plates 16, 18. The coils 54, 56 are also supplied with an RF alternating voltage from another alternating voltage generator 58 (not shown). On their respective rear sides 62, 64, the electrode plates 16, 18 have electrical insulators 66, 68 as shields. The insulators 66, 68 prevent the pairs of electrode plates 16, 18 from influencing each other. The iron cores 70, 72 are also embedded in these insulators 66, 68. These iron cores 70, 72 amplify the alternating magnetic field generated by the coils 54, 56.

[0063] Both the plasma gas C and the fission products, the molecular components A and B, are evacuated from the reaction chamber 12 by the pump 74 in the direction of arrows 96 through the lower gas outlet 73. For this purpose, the pump 74 is tightly flanged to the gas outlet 73 of the reaction chamber 12. During operation, the pump 74 ensures that a negative pressure of typically 200 mTorr prevails in the reaction chamber 10.

[0064] The gas mixture A, B, C, i.e. the different fission products A and B, as well as the plasma gas C are fed to the molecular separator 76. For this purpose, the molecular separator 76 is arranged downstream of the pump 74. For this purpose, the molecular separator 76 is tightly mounted at the outlet 77 of the pump 74. The molecular separator 76 separates the components A, B, and C of the gas mixture from one another. The plasma gas C is then fed back to the plasma gas container 24 via the gas line 78. The molecular separator 76 operates, for example, with the semi-permeable membranes 80, 82. However, gas centrifuges can also be used as the molecular separator 76. Only molecules with a certain diameter are allowed to pass through the corresponding semi-permeable membranes 80, 82 into the separate chambers 84, 86, 88 of the molecular separator 76. List of reference symbols

[0065] 10 process reactor 60 electrical cables

[0066] 12 Reaction chamber 62, 64 Backs of the electrodes

[0067] 13 walls 66, 68 insulator

[0068] 14 Interior 70, 72 Iron cores

[0069] 16, 18 Electrode plates 73 Gas outlet

[0070] 20 gap 74 pump

[0071] 21 Reaction site 76 Molecule separator

[0072] 22 Catalyst layer 77 Pump outlet

[0073] 24 plasma gas containers 78 gas lines

[0074] 26 Gas line 80, 82 semipermeable membranes

[0075] 28 Inlet for plasma gas 84,86,88 separate rooms

[0076] 30 1. controllable valve 90 arrows

[0077] 32 gas supply 92 stack

[0078] 34 tank 94 branch

[0079] 36 heater 96 arrows

[0080] 38 2. controllable valve

[0081] 40 Gas inlet

[0082] 42 outlet bodies

[0083] 43 outlet openings

[0084] 44 Laval nozzles

[0085] 46 Gas

[0086] 47 Pulse average

[0087] 48 electrical cables

[0088] 50 AC generator

[0089] 52 Plasma

[0090] 53 release agents

[0091] 54, 56 coils

[0092] 58 AC generator

Claims

Patent claims 1. Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process, comprising: a) a reaction chamber (12) with a gas inlet (28, 40) and a gas outlet (73), b) at least one gas supply (32) which directs the gaseous substance (46) or the gaseous mixture of substances from the gas inlet (40) to a reaction site (21) in the reaction chamber (12), c) separation agent (53) in the reaction chamber (12) for separating molecular components at the reaction site (21), d) a power supply (50, 58) for the separation agent (53), e) at least one molecular separator (76) which separates different molecular components ornewly formed molecules from the molecular components are separated from each other, characterized in that f) the separation agents (53) have at least two spaced-apart electrodes (16, 18) which are supplied with an RF frequency to generate a plasma (52) from a plasma gas, wherein g) a pump (74) is provided for operating the reaction chamber (12) under negative pressure.

2. Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to claim 1, characterized in that the at least two spaced-apart electrodes (16, 18) are formed from parallel plates. Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to one of claims 1 or 2, characterized in that the molecular separator (76) is downstream of the pump (74). Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to one of claims 1 to 3, characterized in that at least one gas supply (32, 42) with at least one outlet opening (43) uniformly feeds the gaseous substance (46) or the gaseous mixtures of substances between the electrodes (16, 18) to the reaction site (21) in the plasma (52). Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to claim 4, characterized in that at least one outlet opening (43) is designed as a (44) Laval nozzle.Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to any one of claims 1 to 5, characterized in that pulse means (47) are provided which cause the gaseous substance (46) or the mixture of substances to exit in a pulsed manner from at least one outlet opening (43). Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to any one of claims 4 to 6, characterized in that the gas guide (32) at least partially surrounds the reaction site (21), wherein at least one outlet opening (43) is directed towards the reaction site (21). Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to any one of claims 1 to 5. Claims 1 to 7, characterized in that a heating device (36) is provided upstream of the gas inlet (40), which converts a liquid phase of a substance (46) and / or mixture of substances into a gaseous phase. Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to any one of claims 1 to 8, characterized in that means (54, 56, 70, 72) for generating a magnetic field in the reaction chamber (12) are provided. Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to claim 9, characterized in that the means (54, 56, 70, 72) for generating a magnetic field include at least one electrically operated magnetic coil (54, 56).A process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to claim 10, characterized in that an alternating voltage generator (58) is provided for the at least one magnetic coil (54, 56), which generates an alternating magnetic field. A process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to any one of claims 9 to 11, characterized in that the magnetic field is arranged perpendicular to the electric field of the electrodes (16, 18). A process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to any one of claims 1 to 12, characterized in that pairs of electrodes (16, 18) are formed, which are arranged in series or stacked, wherein a plasma (52) is generated between each pair of electrodes.

14. Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to claim 13, characterized in that an insulator separates the electrode pairs.

15. Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to claim 14, characterized in that the insulator (66, 68) each has an iron core (70, 72) and / or a permanent magnet.

16. Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to one of claims 1 to 15, characterized in that a catalyst (22) is provided for accelerating the separation process.

17. Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to claim 16, characterized in that the catalyst (22) contains titanium oxide.

18. Process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process according to one of claims 16 or 17, characterized in that the electrodes (16, 18) and / or walls (13) of the reaction chamber (12) are coated with the catalyst (22).

19. Method for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process with a process reactor (10) according to the preceding claims, comprising the process steps: a) generating a vacuum in the reaction chamber (12) with the pump (74), b) generating a plasma (52) from the plasma gas between the electrodes (16, 18) which are subjected to an RF alternating voltage, c) Introducing the gas (46) or gas mixture to be split through the gas inlet (40) of the process chamber (12), d) Supplying the gas (40) or gas mixture through the gas inlet (32) between the electrodes (16, 18), e) Separating the different molecular components or producing new ones from the Molecules formed from molecular components using a molecular separator (76).

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