Switching between vacuum-pressure operation and near-atmospheric-pressure operation in a material analysis system

Abstract

The invention relates to the provision of a suitable interior for a near-atmospheric-pressure operating mode and a vacuum-pressure operating mode of an entrance portion of a material analysis system. The entrance portion comprises a housing which is designed for vacuum pressure and for near-atmospheric pressure and which has an interior that can be provided according to an operating mode of the material analysis system, which interior is designed to receive, at its distal end via an entrance opening, charged particles released by a sample. The entrance portion also comprises an interior-providing device which is designed to provide the interior in the near-atmospheric-pressure operating mode in such a way that a near-atmospheric pressure is reduced, from the distal end of the interior to the proximal end of the interior, to a vacuum pressure and to provide the interior in a vacuum-pressure operating mode in such a way that a solid angle which is assumed by the charged particles released by the sample and which extends into the interior and a distance between the sample and the distal end of the interior are greater in the vacuum-pressure operating mode than in the near-atmospheric-pressure operating mode. This allows the entrance portion to receive more electrons per unit time in different pressure environments of the entrance portion and can allow improved analysis of a sample.

Description

[0001] Switching between vacuum and near-atmospheric pressure operation in a materials analysis system

[0002] FIELD OF THE INVENTION

[0003] The invention relates to an input section of a material analysis system for charged particles emitted by a sample, a material analysis system for analyzing a sample with a corresponding input section for charged particles emitted by the sample, a vacuum system, and a method for selectively operating an input section in a vacuum pressure mode or a near-atmospheric pressure mode, as well as a corresponding method for analyzing a material in the vacuum pressure mode or the near-atmospheric pressure mode using the vacuum system. The input section can be used, for example, for photoelectron spectroscopy in various pressure environments.

[0004] STATE OF THE ART

[0005] Cushman et al., “Trends in Advanced XPS Instrumentation. Near-Ambient Pressure XPS,” in Vac. Technol Coatings, August 2017, describes a near-ambient pressure (NAP) XPS (X-ray photoelectron spectroscopy system) capable of performing photoelectron spectroscopy at pressures close to atmospheric pressure.

[0006] DESCRIPTION OF THE INVENTION

[0007] It can be seen as an object of the invention to provide an inlet section, a material analysis system, a vacuum system, and a method for analyzing a material, which make it possible to carry out better analyses of samples over a large pressure range, in particular with a higher resolution or in a shorter time with the same resolution.

[0008] According to a first aspect of the invention, an inlet section of a material analysis system is provided for charged particles emitted by a sample. The inlet section comprises a housing designed for vacuum pressure and near-atmospheric pressure and an interior space provision device. The housing has an interior space that can be provided depending on an operating mode of the material analysis system and is designed to receive the charged particles at its distal end via an inlet opening.The interior space providing device is configured to provide the interior space in a near-atmospheric pressure operation mode such that a near-atmospheric pressure is reduced from the distal end of the interior space to its proximal end to a vacuum pressure, and to provide the interior space in a vacuum pressure operation mode such that a solid angle extending into the interior space occupied by the charged particles emitted from the sample and a distance between the sample and the distal end of the interior space are larger in the vacuum pressure operation mode than in the near-atmospheric pressure operation mode.

[0009] Since the input section for charged particles emitted from a sample has an interior space providing device that can provide an interior space for the vacuum pressure operating mode and an interior space for the near-atmospheric pressure operating mode, the input section can be used in the vacuum pressure operating mode and the near-atmospheric pressure operating mode of a materials analysis system. The input section also enables switching between the vacuum pressure operating mode and the near-atmospheric pressure operating mode, allowing a sample to be analyzed in different pressure environments and, in particular, over a wider pressure range. The input section can also make it possible to achieve an intensity tailored to the pressure environment and shorten the measurement and analysis time.

[0010] Vacuum pressure is defined here as an absolute pressure in a pressure range between less than 10' 1 and 10' 8mbar. The vacuum pressure can, for example, be an absolute pressure between 10' 3 mbar and 10' 6 mbar. Near-atmospheric pressure is defined here as pressure close to atmospheric pressure, for example, an absolute pressure between 0.1 mbar and 1000 mbar.

[0011] In near-atmospheric pressure operating mode, a near-atmospheric pressure prevails in front of the distal end of the interior space. This pressure can be reduced to a vacuum pressure through the inlet section, so that collisions between the charged particles and gas particles located in the interior of the inlet section can be reduced. As a result, a larger number of charged particles reach the proximal end of the interior space, which can increase the intensity of the charged particles measured by a detector arranged proximally behind the proximal end of the interior space. In vacuum pressure operating mode, a vacuum pressure already prevails in front of the distal end of the interior space. In this case, the pressure between the distal end and the proximal end of the interior space does not need to be reduced, or not as much as in near-atmospheric pressure operating mode.This allows for a larger solid angle, allowing more charged particles to be received through the entrance port in the interior during vacuum pressure operation. Furthermore, a greater distance from the sample can be provided, allowing for easier handling and sample selection with fewer restrictions. The entrance section allows switching between vacuum pressure operation mode and near-atmospheric pressure operation mode of the material analysis system.

[0012] The interior space providing device can, for example, be designed to provide the interior space in the near-atmospheric pressure operating mode such that a near-atmospheric pressure of, for example, above 0.1 mbar, above 1 mbar, above 10 mbar, above 100 mbar, between 0.1 mbar and 1000 mbar, between 1 mbar and 1000 mbar, between 10 mbar and 1000 mbar or between 100 mbar and 1000 mbar in front of the distal end of the interior space between its distal end and its proximal end to a vacuum pressure of, for example, below 10' 2 mbar, below 10' 3 mbar, below 10' 4 mbar, below 10' 5 mbar, below 10' 6 mbar, below 10' 7 mbar, between 10' 2 mbar and 10' 8 mbar, between 10' 3 mbar and 10' 8 mbar, between 10' 4 mbar and 10' 8 mbar, between 10' 5 mbar and 10' 8 mbar, between 10' 6 mbar and 10' 8 mbar or between 10' 7mbar and 10' 8 mbar is reduced.

[0013] The charged particles released by the sample can be, for example, electrons or ions.

[0014] The material analysis system may be a surface analysis system, for example a photoelectron spectrometer and in particular an XPS system.

[0015] The interior space providing device can be designed to provide the interior space in the vacuum pressure operating mode such that a pressure from the distal end of the interior space to its proximal end at least does not increase and preferably decreases.

[0016] The entrance section can be configured to provide the interior space without changing the position of the sample. This allows switching between operating modes without having to change the position of the sample.

[0017] A cross-section of the interior in the near-atmospheric pressure operating mode can increase at least along a pressure-reducing portion of the interior in the direction from its distal end to its proximal end. This allows the pressure to be reduced along the pressure-reducing portion, since the particles have more volume available in the direction from the distal end to the proximal end of the interior. A profile of the cross-section along the pressure-reducing portion can, for example, increase such that an absolute pressure prevailing in front of the distal end of the interior of 10 mbar at the proximal end decreases to 10' 4 mbar or 10' 3 mbar is reduced.

[0018] The cross-section of the interior space in the vacuum pressure operating mode may also increase at least along a pressure reducing part of the interior space in the direction from its distal end to its proximal end.

[0019] At least a portion of the inlet section may have a conical shape. In particular, the pressure-reducing portion may have a conical shape. The portion of the inlet section may, for example, have a truncated cone shape or a truncated cone-like shape. In particular, the pressure-reducing portion may have a truncated cone shape or a truncated cone-like shape.

[0020] The inlet section can, for example, have or be a nozzle.

[0021] A cross-section of the interior in vacuum pressure operating mode can increase from the distal end to the proximal end such that the solid angle occupied by the charged particles emitted by the sample and extending into the interior is between 0.1 sr and 1.47 sr, preferably between 0.21 sr and 0.84 sr. This allows a large number of charged particles with different properties, in particular different kinetic energies, to be received in the entrance section. The more charged particles received in the entrance section, the higher the intensity measured by a detector that detects the charged particles can be.

[0022] The entrance opening area depends on the distance and solid angle and is larger for the vacuum pressure operating mode than for the near-atmospheric pressure operating mode. The entrance opening area of ​​the entrance opening in the near-atmospheric pressure operating mode can be between 0.0003 mm 2and 1 mm 2 , especially between 0.07 mm 2 and 0.8 mm 2 large. The entrance opening area of ​​the entrance opening in vacuum pressure operation mode can be between over 1 mm 2 and 1000 mm 2 , especially between 20 mm 2 and 300 mm 2 The distance between the sample and the distal end of the interior space in vacuum pressure operation mode can be between 1 mm and 40 mm, in particular between 5 mm and 20 mm.

[0023] The inlet opening can have one or more openings. In the case of multiple openings, the opening areas of the openings form the inlet opening area. If the inlet opening consists of a single opening, the opening area of ​​the opening corresponds to the inlet opening area. The opening or openings can be, for example, circular, elliptical, rectangular, or slit-shaped. The inlet openings in the near-atmospheric pressure operating mode and the vacuum pressure operating mode can have an identical opening shape or a different opening shape. They can be, for example, circular, elliptical, rectangular, or slit-shaped. The shape can also be formed, for example, by multiple openings of the respective inlet opening.For example, a slot-shaped opening shape of the respective input opening can be created by arranging several circular openings next to each other along a line with a respective distance from each other, so that the openings together form a slot.

[0024] The solid angle extending into the interior space occupied by the charged particles emitted by the sample may be composed of a plurality of partial solid angles, wherein a partial solid angle extends through each of the openings of the plurality of openings from the location on the surface of the sample into the interior space at which the charged particles are emitted.

[0025] The entrance aperture area in the near-atmospheric pressure mode of operation can, for example, be circular with a diameter between 0.02 mm and 1 mm, for example between 0.02 mm and 0.05 mm or between 0.3 mm and 1 mm. A smaller diameter allows the near-atmospheric pressure mode of operation to be operated at higher pressure. The smaller diameter can reduce the number of charged particles that can be received by the entrance section. Reducing the distance between the sample and the entrance aperture of the entrance section can counteract this, as this can increase the number of charged particles received in the entrance aperture. The intensity required for an analysis can be adjusted depending on the distance and entrance aperture area for a specific near-atmospheric pressure by adjusting the distance and / or the entrance aperture area.This makes it possible to maintain a specific minimum intensity for different pressures. For example, the diameter of the entrance opening in vacuum pressure mode can be between over 1 mm and 100 mm, preferably between 10 mm and 40 mm. The diameter of the entrance opening area in vacuum pressure mode can, for example, be equal to the distance between the sample and the distal end of the interior space. The diameter of the entrance opening area can, for example, also be between 1 and 2 times, for example, 1.5 or 2 times, the distance between the sample and the distal end of the interior space.

[0026] The inlet section can have at least two interconnectable sections. A first section can have the interior space for the vacuum pressure operating mode. The connected sections can form the interior space for the near-atmospheric pressure operating mode. The inlet section can be configured such that an opening is formed between the interconnected sections along their junction, the gas flow of which is lower than the gas flow through the inlet opening, in particular 20% or less, for example 10% or less, 5% or less, or 1% or less of the gas flow through the inlet opening. This makes it possible to provide a simple design of the inlet section, with which switching between the vacuum pressure operating mode and the near-atmospheric pressure operating mode of the material analysis system can be carried out.

[0027] The connectable sections can be manufactured in such a way that very precise positioning of the sections relative to one another is possible, for example, to within a few pm. The fit of the connectable sections relative to one another can be less than + / - 10 pm, for example, less than + / - 5 pm, or between + / - 1 pm and + / - 5 pm.

[0028] The interior space provision device can have one or more sliding mechanisms, for example, guide rails. The guide rails can be configured to slide the first section relative to the second section. For example, a first guide rail can be configured to slide the sections relative to one another in an x-direction in order to connect the sections to one another. A second guide rail can be configured to slide the sections relative to one another in a z-direction perpendicular to the x-direction, so that the sections can be pushed against one another in order to connect the sections via a seal.

[0029] The housing of the input section can be made of a temperature-resistant material, for example, temperature-resistant up to 100°C, 120°C, 150°C, or 300°C. The temperature-resistant material can be made of stainless steel or bronze, for example. The material can have a coating, for example, a carbon coating. This makes it possible to bake out the input section.

[0030] A wall of the interior space can be coated, for example, with graphite. The coating can be applied, for example, by physical vapor deposition. The coating can contain carbon, for example. The coating can have a thickness of between 2 pm and 10 pm or between 5 pm and 10 pm, for example. This can make it possible to provide a conductive surface near the charged particles. This makes it possible to reduce the surface's charging, thus improving the electron-optical properties of the input section.

[0031] The interior space provision device may have one or more drives, e.g., a stepper motor, a gear drive, or a pneumatic drive. The one or more drives may be configured to move the two sections relative to one another, for example, to pivot them.

[0032] The sections can each have a sealing part. The sealing parts can be configured to overlap one another when the sections are connected to one another and to create a pressure-tight connection such that, in the near-atmospheric pressure operating mode, the penetration of particles between the sections does not prevent the near-atmospheric pressure from being reduced from the distal end of the interior space to its proximal end to a vacuum pressure. By overlapping the sections in the near-atmospheric pressure operating mode, an improved seal can be achieved. Furthermore, the positioning of the sections relative to one another can be improved when switching between the vacuum pressure operating mode and the near-atmospheric pressure operating mode.

[0033] The seal can comprise a labyrinth seal, in particular a smooth-gap labyrinth seal. The sections can, for example, be sealed to each other without contact via a smooth-gap labyrinth seal in the form of a long, thin gap between their surfaces that serves as a constriction. Alternatively, the seal can also comprise an O-ring. The seal can comprise a fluororubber (FKM) according to DIN ISO 1629, e.g., Viton. The seal can, for example, be vulcanized onto the surfaces of the overlapping parts of the sections.

[0034] When establishing the pressure-tight connection between the sections, the interior space provision device can be configured to press one section onto the other section, so that at least some of the sealing parts of the sections lie directly on top of one another. This can improve the seal.

[0035] The surfaces, especially the opposing surfaces of the sections, can be lapped, for example, based on DIN 8589 TI 5. Lapping allows for smoothing the surfaces and thus reducing surface roughness. This can enable the production of a better seal.

[0036] The interior space provision device can have at least one bearing via which the sections are pivotally connected to one another. The interior space provision device can be configured to pivot the sections relative to one another such that the interior space is provided for the near-atmospheric pressure operating mode or the interior space is provided for the vacuum pressure operating mode. The provision of few moving parts enables a restriction of the degrees of freedom of movement. This can reduce inaccuracies, so that the sections can be positioned automatically in certain directions due to the restriction of the degrees of freedom. This makes it possible to provide a simple and reliable input section that can achieve a high positioning accuracy of the sections relative to one another. Furthermore, a compact input section can be provided, thus enabling the provision of a compact materials analysis system.

[0037] The interior space provision device can, for example, have two bearings, both of which are designed to pivot the sections relative to each other. The first bearing can be designed to pivot one section around the other section about a first pivot axis. The second bearing can be designed to pivot one section around itself about a second pivot axis. The second bearing can, in particular, be designed to position one section on the other section with kinematically restricted degrees of freedom.

[0038] The sections can overlap concentrically across a sealing section. This can enable an improved seal, for example, based on improved positioning accuracy of the sections relative to each other.

[0039] One or each of the two sections can comprise a hollow truncated cone. The two sections can each have an opening at their distal and proximal ends. The openings of the sections can be centered relative to each other. This allows for high positioning accuracy of the sections when connected.

[0040] The input section may be an aperture device for receiving charged particles. The input section may be connected to a lens or an analyzer. The lens may be configured to guide the charged particles from the input section to the analyzer. Alternatively, the input section may also be part of the lens. The input section may also be configured to guide the charged particles from its distal end to its proximal end. The proximal end of the input section may be connected to the lens or the analyzer and deliver the charged particles to the lens or the analyzer. The analyzer may be a hemispherical energy analyzer. The analyzer may be connected to a detector. Alternatively, the input section may also be part of an aperture device, for example a front cap electrode of an aperture device.The aperture device may comprise one or more electron optical lenses, stigmators, deflectors and / or slits.

[0041] The entrance section can be a fold-away entrance section or a sliding entrance section.

[0042] The entrance section may have a solid angle adjustment device. The solid angle adjustment device may be configured to adjust the solid angle. The solid angle adjustment device may have an entrance opening angle adjustment device configured to adjust an entrance opening angle. The solid angle adjustment device may have a distance adjustment device configured to adjust a distance between the sample and the distal end of the provided interior space. Additionally or alternatively, the solid angle adjustment device may have an entrance opening area adjustment device configured to adjust an entrance opening area. The solid angle adjustment device enables the solid angle to be adjusted.

[0043] Alternatively or additionally, the entrance section can have a diaphragm. The diaphragm can be, for example, an iris diaphragm, in particular a conical iris diaphragm. The iris diaphragm can be moved continuously or stepwise to change the entrance opening area and the distance between the sample and the distal end of the provided interior space. This allows for setting different entrance opening areas and distances between the sample and the distal end of the provided interior space. This can ensure, for example, sufficient intensity for analysis under changing pressure conditions.

[0044] According to a further aspect of the invention, a material analysis system is provided which is configured to analyze a sample. The material analysis system comprises a detector for detecting charged particles emitted by the sample and an input section connected to the detector according to at least one of claims 1 to 9 or any embodiment of the input section.

[0045] The material analysis system may be a photoelectron spectrometer. The photoelectron spectrometer may include a lens and an analyzer. The entrance section may be part of the lens or connected to it. The analyzer may be connected to the entrance section or the lens. The analyzer may be a hemispherical energy analyzer. The analyzer may be connected to the detector. The material analysis system may be a surface analysis system for analyzing surface and / or material properties.

[0046] According to a further aspect of the invention, a vacuum system is provided. The vacuum system comprises: a vacuum housing designed for vacuum pressure and near-atmospheric pressure for hermetically enclosing a cavity for arranging a sample, an illumination system for illuminating the sample, and a materials analysis system according to claim 10 or any embodiment of the materials analysis system for analyzing the sample. The vacuum system can enable samples to be analyzed at different pressures with the materials analysis system. The illumination system can be an X-ray source, for example, an X-ray source for illuminating the sample with monochromatic X-rays. The illumination system can include a monochromator designed to monochromatize X-rays.The monochromator can be positioned between the X-ray source and the sample to irradiate monochromatic X-rays onto the sample. This allows the sample to be illuminated with monochromatic X-rays and photoelectrons to be extracted from the sample. The vacuum system can be used, for example, to generate X-ray photoemission spectra and analyze the sample based on them.

[0047] The vacuum system may include a sample holder and / or sample tray. The sample holder or sample tray may be movable and / or pivotable. The sample holder or sample tray may be part of the materials analysis system.

[0048] According to a further aspect of the invention, a method is provided for selectively operating an input section according to any one of claims 1 to 9 or any embodiment of the input section in a vacuum pressure operating mode or a near-atmospheric pressure operating mode. The method comprises the steps:

[0049] Selecting the near atmospheric pressure operating mode or the vacuum pressure operating mode and

[0050] Providing the interior space depending on the selected operating mode, so that in the near-atmospheric pressure operating mode, the interior space is provided such that a near-atmospheric pressure is reduced from the distal end of the interior space to its proximal end to a vacuum pressure, and the interior space is provided in the vacuum pressure operating mode such that a solid angle extending into the interior space occupied by the charged particles emitted by the sample and a distance between the sample and the distal end of the interior space is greater in the vacuum pressure operating mode than in the near-atmospheric pressure operating mode.

[0051] The selection of the near-atmospheric pressure operating mode or the vacuum pressure operating mode can be done manually, for example, by a user, or automatically, for example, based on a pressure measurement upstream of the distal end of the interior space. For this purpose, the inlet section can have a pressure sensor. Alternatively, a pressure sensor can also be provided in the negative pressure system. Depending on the pressure upstream of the distal end of the interior space, an appropriate interior space can be provided that ensures operation with sufficient intensity. This can enable improved and more reliable operation under different pressure conditions. Furthermore, samples can be analyzed at different pressures; in particular, it can be analyzed how the different pressures affect the sample and its properties.

[0052] According to a further aspect of the invention, a method is provided for selectively analyzing a material in a vacuum pressure mode of operation or a near-atmospheric pressure mode of operation using a vacuum system according to claim 11 or any embodiment of the vacuum system. The method comprises the steps:

[0053] Providing a sample in the vacuum housing of the vacuum system, operating the inlet section according to the method of claim 12, adjusting the pressure in front of the distal end of the interior of the inlet section depending on the operating mode, so that in the near-atmospheric pressure operating mode, near-atmospheric pressure prevails in front of the distal end of the interior and in the vacuum pressure operating mode, vacuum pressure prevails in front of the distal end of the interior,

[0054] Illuminate the sample with the illumination system, and

[0055] Detection of charged particles emitted by the sample in the detector.

[0056] The charged particles can be detected in the detector with energy resolution. For this purpose, an analyzer, preferably an energy analyzer, in particular a hemispherical energy analyzer, can be arranged in front of the detector and connected to it.

[0057] The method may, for example, include a step of adjusting the distance of the entrance opening to the sample to 1 to 2 times, preferably 1.5 times, the entrance opening area of ​​the entrance opening.

[0058] According to a further aspect of the invention, the vacuum system according to claim 11 or any embodiment of the vacuum system is used for: a surface analysis, a measurement of a surface reaction, a measurement of liquid-solid reactions, a measurement of liquid-gas reactions, a measurement of liquids, a measurement of thin layers, a detection of foreign substances in liquids, a photoemission measurement, a photoelectron spectroscopy measurement near atmospheric pressure, an X-ray photoelectron spectroscopy measurement near atmospheric pressure, an electrochemical measurement, a battery analysis, an oxidation measurement, an electrolyte measurement, an electrode measurement, a sample measurement through a liquid, a quality control, a corrosion measurement, a catalyst measurement, a pressure-dependent measurement, a measurement of a biological sample, a potentiometry measurement,a measurement of a supersaturated liquid, or an analysis of microelectronic devices.

[0059] According to a further aspect of the invention, the method according to claim 13 or any embodiment of the method is used for: a surface analysis, a measurement of a surface reaction, a measurement of liquid-solid reactions, a measurement of liquid-gas reactions, a measurement of liquids, a measurement of thin layers, a detection of foreign substances in liquids, a photoemission measurement, a photoelectron spectroscopy measurement near atmospheric pressure, an X-ray photoelectron spectroscopy measurement near atmospheric pressure, an electrochemical measurement, a battery analysis, an oxidation measurement, an electrolyte measurement, an electrode measurement, a sample measurement through a liquid, a quality control, a corrosion measurement, a catalyst measurement, a pressure-dependent measurement, a measurement of a biological sample, a potentiometry measurement,a measurement of a supersaturated liquid, or an analysis of microelectronic devices.

[0060] According to a further aspect of the invention, a computer program product is provided for selectively operating an input section according to any one of claims 1 to 9 in a vacuum pressure operating mode or a near-atmospheric pressure operating mode. The computer program product includes computer program code means for causing a processor to execute the method according to claim 12 or any embodiment of the method when the computer program product is executed on the processor.

[0061] According to a further aspect, a computer-readable medium is provided that stores the computer program product for selectively operating the input section. Alternatively, or additionally, the computer-readable medium may store the computer program product according to one or more embodiments of the computer program product.

[0062] According to a further aspect of the invention, a computer program product is provided for selectively analyzing a material in a vacuum pressure operating mode or a near-atmospheric pressure operating mode using a negative pressure system according to claim 11 or any embodiment of the negative pressure system. The computer program product includes computer program code means for causing a processor to execute the method according to claim 13 or any embodiment of the method when the computer program product is executed on the processor.

[0063] According to a further aspect, a computer-readable medium is provided that stores the computer program product for selectively analyzing the material. Alternatively, or additionally, the computer-readable medium may store the computer program product according to one or more embodiments of the computer program product.

[0064] The input section according to claim 1, the material analysis system according to claim 10, the negative pressure system according to claim 11, the method according to claim 12, the method according to claim 13, the use according to claim 14 and the use according to claim 15, as well as the computer program products and computer-readable media may have similar and / or identical preferred embodiments, as particularly defined in the dependent claims.

[0065] Furthermore, a preferred embodiment of the invention may also be any combination of the features of the dependent claims or the aforementioned embodiments in conjunction with the corresponding independent claim.

[0066] These and other aspects of the invention are explained in more detail below with reference to exemplary embodiments illustrated in the figures. BRIEF DESCRIPTION OF THE FIGURES

[0067] In the following figures shows:

[0068] Fig. 1 A schematically and exemplarily shows a first embodiment of the inlet section in the form of a foldable nozzle arrangement in a near atmospheric pressure operating mode;

[0069] Fig. 1B shows schematically and exemplarily the first embodiment during the folding process;

[0070] Fig. IC schematically and exemplarily shows the first embodiment in a vacuum pressure operating mode;

[0071] Fig. 2A schematically and exemplarily shows an embodiment of a vacuum system with a material analysis system in the form of a photoelectron spectrometer in vacuum pressure operating mode, containing a second embodiment of an input section;

[0072] Fig. 2B shows schematically and exemplarily the embodiment of the vacuum system in the near atmospheric pressure operating mode;

[0073] Fig. 3 A schematically and exemplarily shows a third embodiment of the inlet section in the form of a displaceable nozzle in the near atmospheric pressure operating mode;

[0074] Fig. 3B schematically and exemplarily shows a third embodiment of the inlet section in the form of a displaceable nozzle in the vacuum pressure operating mode;

[0075] Fig. 4A shows schematically and exemplarily a fourth embodiment of the inlet section in a sectional drawing in the near atmospheric pressure operating mode;

[0076] Fig. 4B schematically and exemplarily shows the fourth embodiment of the input section in the vacuum pressure operating mode;

[0077] Fig. 5 is an exemplary flowchart of an embodiment of the method for selectively operating the input section in the vacuum pressure operating mode or in the near atmospheric pressure operating mode;

[0078] Fig. 6 is an exemplary flow diagram of an embodiment of a method for selectively analyzing a material in vacuum pressure mode or near atmospheric pressure mode using a vacuum system.

[0079] DESCRIPTION OF THE EMBODIMENTS

[0080] Fig. 1A shows a first embodiment of an input section 10 of a materials analysis system. In this embodiment, the materials analysis system is a photoelectron spectrometer that receives photoelectrons from a sample and generates energy-resolved photoemission spectra. The photoemission spectra can be used for materials analysis. In the first embodiment, the input section 10 is a fold-away nozzle arrangement. The input section 10 is configured to receive the photoelectrons emitted by the sample. In other embodiments, the input section can also be configured to receive other types of charged particles emitted by the sample, for example ions. The input section 10 can be operated in a near-atmospheric pressure mode (see Fig. 1A) or in a vacuum pressure mode (see Fig. 1C).

[0081] The input section 10 has a housing 12 designed to withstand vacuum pressure and near-atmospheric pressure. In the first embodiment, the housing 12 is formed by two sections 14 and 16 that can be connected to one another in a pressure-tight manner and that enclose an interior space 18 that extends from its distal end 20 to its proximal end 22. During operation of the photoelectron spectrometer, the distal end 20 is oriented toward the sample (not shown). During operation, the proximal end 22 is oriented toward an energy analyzer (not shown). At the distal end 20, there is an input opening 24 into the interior space 18 that receives the photoelectrons. At the proximal end 22, there is an output opening 26 that guides the photoelectrons out of the input section 10. A seal 28 in the form of an O-ring is located between the interconnectable sections 14 and 16.The interior space 18 can be adjusted via an interior space provision device 30 with a drive 32 and a bearing in the form of a radial bearing 34 driven by the drive 32. For this purpose, the section 14 can be folded away around the radial bearing 34, as shown in Fig. 1B, so that the provided interior space 18' only extends from the distal end 20' to the proximal end 22. The section 16 thus forms the interior space 18' for the vacuum pressure operating mode, and the connected sections 14 and 16 form the interior space 18 for the near-atmospheric pressure operating mode. The section 14 can be folded away such that it does not impede the operation of the inlet section 10. For this purpose, the section 14 is folded further away from the inlet opening 24', as shown in Fig. 1C. The inlet section 10 can be operated in the vacuum pressure operating mode in Fig. 1C.The section 14 can also be folded away in such a way that a position of the sample does not have to be changed for the folding process (not shown).

[0082] The interior space provision device 30 makes it possible to provide an interior space 18 or 18' depending on the operating mode of the material analysis system. In other exemplary embodiments, the interior space provision device can also have a plurality of bearings, via which the sections are pivotally connected to one another and can be designed to pivot the sections relative to one another such that the interior space is provided for the near-atmospheric pressure operating mode or the interior space is provided for the vacuum pressure operating mode. The interior space provision device 30 provides the interior space 18 in the near-atmospheric pressure operating mode such that a near-atmospheric pressure is reduced to a vacuum pressure from the distal end 20 to the proximal end 22. For this purpose, the cross-section of the interior space 18 increases along a pressure-reducing part 36 in the direction from its distal end 20 to its proximal end 22.By reducing the pressure between distal end 20 and proximal end 22, the mean free path of the photoelectrons is increased, allowing more photoelectrons to reach the proximal end 22 without colliding with gas molecules. In near-atmospheric pressure mode, for example, an absolute pressure of 100 mbar prevails in front of distal end 20 and a vacuum pressure prevails at the proximal end 22, for example, an absolute pressure of approximately 10'. 3 mbar. The absolute pressure can then be further reduced by additional vacuum pumps up to the energy analyzer, for example to 10' 6 mbar. The absolute pressure in front of the distal end 20 can also be between 0.1 mbar and 1000 mbar in near-atmospheric pressure operating mode.

[0083] In vacuum pressure mode, for example, the pressure in front of the distal end 20' is between 10' 1 mbar and 10' 8 mbar, e.g. between 10' 3 mbar and 10' 6mbar. The interior space providing device 30 provides the interior space 18' in the vacuum pressure operating mode such that a solid angle occupied by the photoelectrons emitted by the sample and extending into the interior space 18' is larger than a solid angle occupied by the photoelectrons emitted by the sample and extending into the interior space 18 (not shown). In this case, the solid angle is 0.84 sr for the vacuum pressure operating mode and 0.46 sr for the near-atmospheric pressure operating mode. In this case, an entrance opening area of ​​the entrance opening 24' of the interior space 18' is also larger than an entrance opening area of ​​the entrance opening 24 of the interior space 18. In addition, a distance between the sample and the distal end 20' of the interior space 18' is larger than a distance between the sample and the distal end 20 of the interior space 18 (not shown).In this exemplary embodiment, a cross-section of the interior space 18' in the vacuum pressure operating mode increases from the distal end 20' to the proximal end 22 such that the interior space 18' can receive a solid angle of 0.84 sr in the vacuum pressure operating mode. This corresponds to a cone with a half-angle of 30° of the photoelectrons emitted by the sample during operation of the photoelectron spectrometer. In other exemplary embodiments, the cross-section of the interior space can also increase from the distal end to the proximal end in the vacuum pressure operating mode such that the solid angle occupied by the charged particles emitted by the sample and extending into the interior space is between 0.1 sr and 1.47 sr. This corresponds to a cone with a half-angle of between 10° and 40° for the charged particles emitted by the sample.In further embodiments, a cone with a half angle, for example, between 0.1° and 40°, between 3° and 40° or between 20° and 40° of the charged particles emitted by the sample can be received by the interior space.

[0084] In this embodiment, the cross-section of the interior space 18 in near-atmospheric pressure operation also increases from the distal end 20 to the proximal end 22 such that the interior space 18 can receive a solid angle of 0.46 sr in near-atmospheric pressure operating mode.

[0085] In this embodiment, in the near atmospheric pressure operating mode, the inlet opening shape of the inlet opening 24 is circular and has an inlet opening area of ​​0.1 mm 2In other embodiments, the inlet opening shape may also have a different shape, for example, rectangular, oval, or another shape. Furthermore, in near-atmospheric pressure mode, the inlet opening area may also have a different size, for example, between 0.0003 mm 2 and 1 mm 2 , e.g. between 0.03 mm 2 and 0.8 mm 2 , especially between 0.07 mm 2 and 0.8 mm 2 be big.

[0086] In this embodiment, in the vacuum pressure operating mode, the inlet opening of the inlet opening 24' is circular and has an inlet opening area of ​​100 mm 2 In other embodiments, the inlet opening shape may also have a different shape, for example, rectangular, oval, or another shape. Furthermore, in vacuum pressure mode, the inlet opening area may also have a different size, for example, between more than 1 mm 2 and 1000 mm 2, especially between 20 mm 2 and 300 mm 2 be big.

[0087] In this embodiment, in the vacuum pressure operating mode, the distance between the sample and the distal end 20' of the interior space 18' is 10 mm. In other embodiments, in the vacuum pressure operating mode, the distance between the sample and the distal end 20' of the interior space 18' can be between 1 mm and 40 mm, in particular between 5 mm and 20 mm.

[0088] In the following exemplary embodiments, the same reference numerals are used for identical features. A repeated explanation of the features is omitted where this is not necessary for understanding.

[0089] An embodiment of a vacuum system 100 is shown in Fig. 2A.The vacuum system 100 can be used, for example, for surface analysis, surface reaction measurement, liquid-solid reaction measurement, liquid-gas reaction measurement, liquid measurement, thin film measurement, detection of foreign substances in liquids, photoemission measurement, near-atmospheric pressure photoelectron spectroscopy measurement, near-atmospheric pressure X-ray photoelectron spectroscopy measurement, electrochemical measurement, battery analysis, oxidation measurement, electrolyte measurement, electrode measurement, sample measurement through a liquid, quality control, corrosion measurement, catalyst measurement, pressure-dependent measurement, biological sample measurement, potentiometry measurement, supersaturated liquid measurement, or microelectronic device analysis.

[0090] The vacuum system 100 includes a vacuum housing 102 designed for vacuum pressure and near atmospheric pressure, an illumination system 40 for illuminating a sample 42, and a material analysis system in the form of a photoelectron spectrometer 50 for analyzing the sample 42.

[0091] The vacuum housing 102 hermetically encloses a cavity 104. The vacuum housing 102 has an X-ray transparent window 108 and a hermetically sealable transfer opening 110 for placing the sample 40 on a sample holder 44 arranged in the cavity 104, as well as a connection opening 111 for connecting to the photoelectron spectrometer 50. In this case, the sample holder 44 is a tiltable and movable platform for placing the sample 42 under the photoelectron spectrometer 50. The cavity 104 is set to a predetermined absolute pressure by a vacuum pump 112.

[0092] The illumination system 40 includes an electron gun 45, a target anode 46, and an X-ray monochromator 48. The illumination system 40 generates X-rays by firing electrons from the electron gun 45 onto the target anode 46. The target anode 46 is made of a material, such as Al, Ag, or Cr, that produces characteristic X-rays with a predetermined energy. The X-ray monochromator 48 generates monochromatic X-rays 106 from the X-rays. The sample 42 is illuminated with the monochromatic X-rays 106 to excite photoelectrons 114. The photoelectrons 114 are emitted from the sample 42 and received by the photoelectron spectrometer 50.

[0093] The photoelectron spectrometer 50 includes a second embodiment of an input section 10' with a conical iris diaphragm 15, an electron-optical lens 52, an analyzer 54 in the form of a hemispherical energy analyzer, and a detector 56 in the form of a CMOS detector. In other embodiments, any other embodiment of the input section can also be used together with the material analysis system and / or in the vacuum system.

[0094] The detector 56 is connected to the input section 10' via the lens 52 and the analyzer 54 and can detect the photoelectrons emitted by the sample 42. In other embodiments, the detector can also be configured to detect other types of charged particles emitted by the sample.

[0095] In this exemplary embodiment, the conical iris diaphragm 15 of the entrance section 10' is formed from a thin metallic foil. The foil has a wall thickness of 5 μm. In other exemplary embodiments, the wall thickness can also be, for example, between 1 μm and 50 μm. The foil is suspended in a housing 12 of the entrance section 10' and rolled up into a funnel shape, so that displacement of the foil at one or more points of engagement of the foil by an interior space provision device 30 changes the distance d between the sample 42 and the distal end of the interior space 18' (see Fig. 2A) or 18 (see Fig. 2B). In addition, this also changes the entrance shape, the solid angle assumed by the photoelectrons 114 emitted by the sample 42 and extending into the interior space 18' or 18, as well as the entrance opening area of ​​the entrance opening of the entrance section 10'. The input shape can vary between round and elliptical.As the distance d is increased, the entrance opening area and the solid angle are also increased. Thus, the interior space provision device 30 enables provision of the interior space 18 for the near-atmospheric pressure operating mode (see Fig. 2B) and the interior space 18' for the vacuum pressure operating mode (see Fig. 2A).

[0096] In this embodiment, the lens 52 has several pressure stages in which the absolute pressure is successively reduced. Vacuum pumps 58 and 59 are provided for this purpose, which evacuate the interior spaces of the pressure stages of the lens 52. This allows the pressure upstream of the analyzer 54 to be further reduced. The lens 52 serves to guide the photoelectrons 114 from the proximal end of the input section 10' to the analyzer 54. In other embodiments, the input section 10' can also be part of the lens.

[0097] In the analyzer 54, the photoelectrons 114 are spatially separated based on their kinetic energy and guided to the detector 56.

[0098] The detector 56 receives and detects the photoelectrons 114 and can thus create an energy-resolved photoelectron emission spectrum of the sample 42 for analysis. In this embodiment, an absolute pressure of 10' is applied in front of the detector 56. 6 mbar. For this purpose, in addition to vacuum pumps 58 and 59, additional vacuum pumps may be provided in the material analysis system (not shown). In other embodiments, a different vacuum pressure may also be set.

[0099] Fig. 3A and Fig. 3B show a third embodiment of the inlet section 10" in the form of a movable nozzle. In contrast to the first embodiment, the nozzle in the third embodiment is not folded away, but rather displaced linearly. For this purpose, the interior space provision device 30 has a slotted guide 35 driven by a drive 32, which can displace the section 14 of the inlet section 10" between a position connected to the section 16 for the near-atmospheric pressure operating mode (see Fig. 3A) and a position separate from the section 16 for the vacuum pressure operating mode (see Fig. 3B).

[0100] Fig. 4A shows a fourth embodiment of the inlet section 10'" in a sectional view in near-atmospheric pressure operating mode. The fourth embodiment of the inlet section 10'" is similar to the first embodiment of the inlet section 10. However, in contrast to the first embodiment of the inlet section 10, the fourth embodiment of the inlet section 10'" has, among other things, a gap seal between the sections 14 and 16 instead of an O-ring.

[0101] The sections 14 and 16 each have a sealing part 64 and 66, respectively. The sealing parts 64 and 66 overlap with one another when the sections 14 and 16 are connected to one another, so that a pressure-tight connection is created such that in the near-atmospheric pressure operating mode, the penetration of particles, in particular gas particles, between the sections 14 and 16 does not prevent the near-atmospheric pressure from being reduced from the distal end 20 of the interior space 18 to its proximal end 22 to a vacuum pressure. In this exemplary embodiment, a gas flow rate through the sealing parts 64 and 66 is less than 5% of the gas flow rate through the inlet opening 24. In other exemplary embodiments, a different tightness of the seal can be achieved by the sealing parts 64 and 66, for example a lower one, e.g., with a gas flow rate of up to 20% of the gas flow rate through the inlet opening, or a higher one, e.g.,with a gas flow rate of less than 1% of the gas flow rate through the inlet opening.

[0102] In the fourth exemplary embodiment of the input section 10'", the interior space provision device 30 has two radial bearings 34' and 34" (see Fig. 4B). The section 14 can be pivoted around the section 16 around the first radial bearing 34'. The second radial bearing 34" enables the section 14 to be pivoted about an additional axis in order to create an improved pressure-tight connection between the sections 14 and 16. For this purpose, the interior space provision device 30 can press the section 14 onto the other section 16 when creating the pressure-tight connection between the sections 14 and 16, so that some of the sealing parts 64 and 66 of the sections 14 and 16 lie directly on top of one another. Furthermore, the sections 14 and 16 overlap concentrically in this exemplary embodiment via a sealing section 68 (see Fig. 4A).

[0103] Like the other embodiments, the fourth embodiment of the input section 10'" can also be operated in the near-atmospheric pressure operating mode (see Fig. 4A) and in the vacuum pressure operating mode (see Fig. 4B). The solid angle a' occupied by the photoelectrons 114 emitted by the sample 42 and extending into the interior space 18' in the vacuum pressure operating mode is larger than the solid angle a occupied by the photoelectrons 114 emitted by the sample 42 and extending into the interior space 18 in the near-atmospheric pressure operating mode.

[0104] The distal end 20 or 20' is located near the sample 42 arranged on the sample holder 44. The sample 42 is preferably located at a distance of between 1 and 2 times the diameter of the circular entrance opening. In this embodiment, the sample is centered on an optical axis 70 of the entrance section 10'". The optical axis 70 is identical to the optical axis of a lens (not shown) arranged at the proximal end 22 of the entrance section 10'", which guides photoelectrons 114 to an analyzer. The analyzer, in turn, guides the photoelectrons in an energy-resolved manner to a detector so that they can be detected in an energy-resolved manner.

[0105] Fig. 5 shows an embodiment of the method 500 for selectively operating an input section, for example one of the embodiments of the input section of Figures 1 to 4, in the vacuum pressure operating mode or in the near atmospheric pressure operating mode.

[0106] In step 502, the near-atmospheric pressure operating mode or the vacuum pressure operating mode is selected. The operating mode can be selected automatically, for example, based on a pressure measurement in front of the distal end of the interior of the inlet section, or manually by a user.

[0107] In step 504, the interior space is prepared depending on the selected operating mode. If the near-atmospheric pressure operating mode was selected, the interior space is prepared such that a near-atmospheric pressure is reduced from the distal end of the interior space to its proximal end to a vacuum pressure. If the vacuum pressure operating mode was selected, the interior space is prepared with a larger solid angle occupied by the charged particles emitted by the sample extending into the interior space and a larger distance between the sample and the distal end of the interior space than in the near-atmospheric pressure operating mode. In addition, the entrance opening area of ​​the entrance opening is also larger. Depending on the type of entrance section, the interior space can be prepared in various ways. For example, two interconnected sections can be unfolded by folding one section away.This allows the entrance opening area to be enlarged and at the same time the distance between the sample and the distal end of the now provided interior space to be increased.

[0108] Fig. 6 shows an embodiment of a method 600 for selectively analyzing a material in vacuum pressure mode of operation or in near atmospheric pressure mode of operation using a negative pressure system, for example the negative pressure system shown in Figs. 2A and 2B.

[0109] In step 602, a sample is provided in the vacuum housing of the vacuum system.

[0110] In step 604, the inlet section of the vacuum system is operated according to method 500. First, in step 502, the near-atmospheric pressure operating mode or the vacuum pressure operating mode is selected, and then, in step 504, the interior space is provided depending on the selected operating mode.

[0111] In step 606, the pressure in front of the distal end of the interior of the inlet section is set depending on the operating mode. For example, the pressure in the vacuum housing can be set for this purpose. Alternatively, only the pressure in the area of ​​the sample can be set locally. The pressure is set so that in the near-atmospheric pressure operating mode, near-atmospheric pressure prevails in front of the distal end of the interior and in the vacuum pressure operating mode, vacuum pressure prevails in front of the distal end of the interior. Steps 604 and 606 can also be carried out in reverse order. For example, if the operating mode is selected automatically, e.g. based on a pressure measurement, the pressure can be set first in step 606 so that the operating mode is then automatically selected in step 502.

[0112] In step 608, the sample is illuminated with the illumination system. For this purpose, monochromatic X-rays of a specific wavelength or energy can be irradiated onto the sample surface.

[0113] In step 610, the charged particles emitted by the sample are detected in the detector. For example, photoelectrons exiting the sample, excited by the monochromatic X-rays, can be detected in the detector. Before the photoelectrons are detected, they can be passed through an energy analyzer, for example, a hemispherical energy analyzer, to resolve their kinetic energy.

[0114] The method for selectively analyzing can be used, for example, for a surface analysis, a measurement of a surface reaction, a measurement of liquid-solid reactions, a measurement of liquid-gas reactions, a measurement of liquids, a measurement of thin layers, a detection of foreign substances in liquids, a photoemission measurement, a photoelectron spectroscopy measurement near atmospheric pressure, an X-ray photoelectron spectroscopy measurement near atmospheric pressure, an electrochemical measurement, a battery analysis, an oxidation measurement, an electrolyte measurement, an electrode measurement, a sample measurement through a liquid, a quality control, a corrosion measurement, a catalyst measurement, a pressure-dependent measurement, a measurement of a biological sample, a potentiometry measurement, a measurement of a supersaturated liquid, an analysis of microelectronic devices.

[0115] The above description of the invention, in conjunction with the drawings, serves to illustrate the features of the invention by way of example in the form of exemplary embodiments. However, the features explained in the exemplary embodiments are only exemplary and should not be understood as limiting. In particular, the invention is not limited to the exemplary embodiments or the combination of features of individual exemplary embodiments. For example, it is also possible to operate the invention in an exemplary embodiment with a different material analysis system that analyzes, for example, other charged particles, such as ions.

[0116] Other variants and variations of the embodiments shown can be understood and implemented by those skilled in the art by reworking the claimed invention in view of the figures, description and claims.

[0117] The words “contain”, “comprise”, “include” do not exclude further elements, components or steps and the indefinite articles “a” or “an” do not exclude a plurality.

[0118] For example, a unit, processor, or device can perform a variety of functions of different subject matter recited in the claims. The fact that certain means are recited in different claims should not be understood to mean that a combination of these means cannot be used advantageously.

[0119] Method steps such as selecting the near-atmospheric pressure operating mode or the vacuum pressure operating mode, providing the interior space depending on the selected operating mode, etc., which are performed by one or more units, components, or devices, can also be performed by a different number of units, components, or devices. These method steps and / or the method can be implemented or provided, for example, as computer program code or computer program code means and / or as specific hardware.

[0120] A computer program product may be stored or provided on a suitable medium, such as an optical storage medium or a solid-state medium. It may also be provided together with or as part of other hardware. Furthermore, it may also be provided in other ways, such as via the Internet, Ethernet, or via another wired or wireless telecommunications system. The reference numerals used in the claims are not to be understood as limiting the features of the embodiments, but merely as examples of the features of the claims.

[0121] The invention relates to the provision of a suitable interior space for a near-atmospheric pressure operating mode and a vacuum pressure operating mode of an inlet section of a materials analysis system. The inlet section comprises a housing designed for vacuum pressure and near-atmospheric pressure, with an interior space that can be provided depending on an operating mode of the materials analysis system, which is designed to receive charged particles emitted by a sample at its distal end via an inlet opening.In addition, the input section includes an internal space providing device configured to provide the internal space in the near-atmospheric pressure operating mode such that a near-atmospheric pressure is reduced from the distal end of the internal space to its proximal end to a vacuum pressure, and to provide the internal space in a vacuum pressure operating mode such that a solid angle extending into the internal space occupied by the charged particles emitted from the sample and a distance between the sample and the distal end of the internal space are larger in the vacuum pressure operating mode than in the near-atmospheric pressure operating mode. This allows the input section to receive more electrons per unit time under different pressure environments of the input section and can enable improved analysis of a sample.

Claims

CLAIMS:

1. Inlet section (10; 10'; 10"; 10'") of a material analysis system (50) for charged particles (114) emitted by a sample (42), the inlet section (10; . . . ; 10'") comprising: a housing (12) designed for vacuum pressure and near atmospheric pressure, with an interior space (18; 18') that can be provided depending on an operating mode of the material analysis system (50), which is designed to receive the charged particles (114) at its distal end (20; 20') via an inlet opening (24), and an interior space providing device (30) that is designed to fill the interior space (18;18') in a near-atmospheric pressure operating mode such that a near-atmospheric pressure is reduced from the distal end (20) of the interior space (18) to its proximal end (22) to a vacuum pressure, and to provide the interior space (18') in a vacuum pressure operating mode such that a solid angle (a, a') extending into the interior space (18') occupied by the charged particles (114) emitted by the sample (42) and a distance (d) between the sample (42) and the distal end (20') of the interior space (18') are greater in the vacuum pressure operating mode than in the near-atmospheric pressure operating mode; 2. The inlet section (10; ... ; 10'") according to claim 1, wherein a cross-section of the interior space (18) in the near-atmospheric pressure operating mode increases at least along a pressure reduction part (36) of the interior space (18) in the direction from its distal end (20) to its proximal end (22).

3. Input section (10; ... ; 10'") according to claim 1 or 2, wherein a cross-section of the interior space (18') in the vacuum pressure operating mode increases from the distal end (20') to the proximal end (22) such that the solid angle (a, a') extending into the interior space (18') occupied by the charged particles (114) emitted by the sample (42) is between 0.1 sr and 1.47 sr, preferably between 0.21 sr and 0.84 sr.

4. Inlet section (10; ... ; 10'") according to at least one of claims 1 to 3, wherein an inlet opening area of ​​the inlet opening (24) in the near atmospheric pressure operating mode is between 0.0003 mm 2 and 1 mm 2 , especially between 0.07 mm 2 and 0.8 mm 2 large, an inlet opening area of ​​the inlet opening (24) in vacuum pressure operating mode between over 1 mm 2 and 1000 mm 2 , especially between 20 mm 2 and 300 mm 2is large and a distance (d) between the sample (42) and the distal end (20') of the interior (18') in the vacuum pressure operating mode is between 1 mm and 40 mm, in particular between 5 mm and 20 mm.

5. Input section (10; 10"; 10'") according to at least one of claims 1 to 4, wherein the input section (10; 10"; 10'") has at least two interconnectable sections (14; 16), wherein a first section (16) has the interior space (18') for the vacuum pressure operating mode and the connected sections (14, 16) form the interior space (18) for the near atmospheric pressure operating mode.

6. Input section (10") according to claim 5, wherein the sections (14, 16) each have a sealing part (64, 66), and the sealing parts (64, 66) are designed to overlap one another in the interconnected state of the sections (14, 16) and to create a pressure-tight connection such that in the near-atmospheric pressure operating mode, penetration of particles between the sections (14, 16) does not prevent the near-atmospheric pressure from being reduced from the distal end (20) of the interior space (18) to its proximal end (22) to a vacuum pressure.

7. Input section (10") according to claim 6, wherein the interior space providing device (30) is designed to press one part (14) onto the other part (16) when establishing the pressure-tight connection between the parts (14, 16), so that at least some of the sealing parts (64, 66) of the parts (14, 16) lie directly on one another.

8. Input section (10; 10"; 10"') according to at least one of claims 5 to 7, wherein the interior space providing device (30) has at least one bearing (34; 34', 34"), via which the sections (14, 16) are pivotally connected to one another, and wherein the interior space providing device (30) is designed to pivot the sections (14, 16) relative to one another in such a way that the interior space (18) is provided for the near-atmospheric pressure operating mode or the interior space (18') is provided for the vacuum pressure operating mode.

9. Input section (10") according to at least one of claims 5 to 8, wherein the sections (14, 16) overlap concentrically via a sealing section (68).

10. A material analysis system (50) configured to analyze a sample, comprising: a detector (56) for detecting charged particles emitted by the sample (42) and an input section (10') connected to the detector (56) according to at least one of claims 1 to 9.

11. A vacuum system (100) comprising: a vacuum housing (102) designed for vacuum pressure and near atmospheric pressure for hermetically enclosing a cavity (104) for arranging a sample (42), an illumination system (40) for illuminating the sample (42), and a material analysis system (50) according to claim 10 for analyzing the sample (42).

12. A method (500) for selectively operating an input section according to any one of claims 1 to 9 in a vacuum pressure operating mode or a near atmospheric pressure operating mode, comprising the steps: Selecting the near atmospheric pressure operating mode or the vacuum pressure operating mode and Providing the interior space depending on the selected operating mode, so that in the near-atmospheric pressure operating mode, the interior space is provided such that a near-atmospheric pressure is reduced from the distal end of the interior space to its proximal end to a vacuum pressure, and the interior space is provided in the vacuum pressure operating mode such that a solid angle (a, a') extending into the interior space (18') occupied by the charged particles (114) emitted by the sample (42) and a distance between the sample and the distal end of the interior space is greater in the vacuum pressure operating mode than in the near-atmospheric pressure operating mode.

13. A method (600) for selectively analyzing a material in a vacuum pressure operating mode or a near atmospheric pressure operating mode using a vacuum system according to claim 11, comprising the steps: Providing a sample in the vacuum housing of the vacuum system, operating the input section according to the method of claim 12, Adjusting the pressure in front of the distal end of the interior of the inlet section depending on the operating mode, so that in the near-atmospheric pressure operating mode, near-atmospheric pressure prevails in front of the distal end of the interior space and in the vacuum pressure operating mode, vacuum pressure prevails in front of the distal end of the interior space, Illuminate the sample with the illumination system and detect charged particles emitted by the sample in the detector.

14. Use of the vacuum system (100) according to claim 11 for: a surface analysis, a measurement of a surface reaction, a measurement of liquid-solid reactions, a measurement of liquid-gas reactions, a measurement of liquids, a measurement of thin layers, a detection of foreign substances in liquids, a photoemission measurement, a photoelectron spectroscopy measurement near atmospheric pressure, an X-ray photoelectron spectroscopy measurement near atmospheric pressure, an electrochemical measurement, a battery analysis, an oxidation measurement, an electrolyte measurement, an electrode measurement, a sample measurement through a liquid, a quality control, a corrosion measurement, a catalyst measurement, a pressure-dependent measurement, a measurement of a biological sample, a potentiometry measurement, a measurement of a supersaturated liquid, an analysis of microelectronic devices. Use of the method (600) according to claim 13 for: a surface analysis, a measurement of a surface reaction, a measurement of liquid-solid reactions, a measurement of liquid-gas reactions, a measurement of liquids, a measurement of thin layers, a detection of foreign substances in liquids, a photoemission measurement, a photoelectron spectroscopy measurement near atmospheric pressure, an X-ray photoelectron spectroscopy measurement near atmospheric pressure, an electrochemical measurement, a battery analysis, an oxidation measurement, an electrolyte measurement, an electrode measurement, a sample measurement through a liquid, a quality control, a corrosion measurement, a catalyst measurement, a pressure-dependent measurement, a measurement of a biological sample, a potentiometry measurement, a measurement of a supersaturated liquid, an analysis of microelectronic devices.

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