Vacuum system

Abstract

The invention relates to a vacuum system with a vacuum pump and a receiver, each having a functional side, and with a mounting device for vacuum-tight mounting of the vacuum pump to the receiver with mutually facing functional sides, wherein the mounting device is designed to first enable the vacuum pump to be supported on the receiver, namely by hooking or by sliding it in, and then to enable the vacuum pump to be fastened to the receiver, wherein the mounting device on the receiver comprises at least one support element projecting from its functional side and on the vacuum pump at least one counterpart which can be brought into engagement with the support element by hooking it in from above or by sliding it in from the side in order to support the vacuum pump in a pre-fixed position on the receiver.and wherein the mounting device, in addition to the support element and the counterpart on the receiver and on the vacuum pump, comprises fastening means with which the vacuum pump can be fastened to the receiver either directly in the pre-fixing position or after being moved from the pre-fixing position to a final fixing position.

Description

[0001] The invention relates to a vacuum system with a vacuum pump, in particular a split-flow pump, and a receiver, each having a functional side, and with a mounting device for mounting the vacuum pump on the receiver with mutually facing functional sides.

[0002] The invention also relates to a vacuum pump, in particular for a vacuum system according to the invention, with a functional side in which at least one functional area, in particular an intake opening or a connection, is arranged or formed.

[0003] Installing vacuum pumps on receivers is often problematic in practice. This can be due, in particular, to the considerable weight of the vacuum pump and structural conditions that make the installation location difficult to access. Known mounting aids are either expensive or suffer from other shortcomings. Many solutions can only be used under very specific conditions, require considerable force, or can easily damage the pump.

[0004] The object of the invention is to create a way for the simple and cost-effective assembly of vacuum pumps.

[0005] This problem is solved by the features of claim 1.

[0006] According to the invention, the mounting device is designed to first enable the vacuum pump to be supported on the recipient, namely by hooking or sliding it in, and then to enable the vacuum pump to be fastened to the recipient, wherein the mounting device on the recipient comprises at least one support element projecting from its functional side and on the vacuum pump at least one counterpart which can be engaged with the support element by hooking it in from above or by sliding it in from the side in order to support the vacuum pump in a pre-fixed position on the recipient, and wherein, in addition to the support element and the counterpart on the recipient and on the vacuum pump, the mounting device comprises fastening means formed with which the vacuum pump can be fastened to the recipient either directly in the pre-fixed position or after being moved from the pre-fixed position to a final fixed position.

[0007] The two-stage concept according to the invention – first supporting and then securing – is extremely efficient, suitable for virtually all installation situations, and also extremely cost-effective, as it can be implemented with simple mechanical means. By supporting the pump, it is already held by the receiver, meaning the user no longer needs to support the entire weight of the pump. Hooking or sliding it in can be easily accomplished in such a way that the pump is secured against moving away from the receiver, thus preventing it from accidentally moving out of the supported pre-fixing position. With the pump supported in the pre-fixing position, the user can therefore concentrate on the final fastening of the pump to the receiver. In particular, it is only necessary to hold the pump with one hand and, if necessary, to move it into a final fixing position different from the pre-fixing position.Then the pump can be permanently attached to the receiver using the appropriate fastening devices, thus creating a vacuum-tight connection between the vacuum pump and the receiver.

[0008] The engagement between the receiver's support element and the counterpart of the vacuum pump, achieved by hooking or sliding them in, is preferably locking such that the pump is secured against movement away from the receiver. This does not preclude the pump from remaining movable to a certain extent relative to the receiver in the supported pre-fixed position. In particular, such mobility can serve to move the pump from the pre-fixed position to a final fixed position, although such a move is not an essential feature of the invention.

[0009] The term "functional side" refers to the side of the vacuum pump that, in its final assembled state, faces the recipient. Similarly, with regard to the recipient, the term "functional side" refers to the side of the recipient that, in its final assembled state, faces the vacuum pump. The term "functional side" therefore does not represent a limitation regarding the specific design of the respective side of the vacuum pump or the recipient, and thus does not imply any restriction to specific functional parts or areas. For example, in a vacuum pump, one side may have one or more vacuum or intake openings, while the opposite side of the vacuum pump may also be provided with functional openings, such as taps. The invention can also be designed for mounting the vacuum pump to a recipient, in which the opposite side, e.g.,The side with the taps constitutes the functional side within the meaning of this disclosure. In particular, both a vacuum pump and a receiver can have more than one functional side within the meaning of this disclosure. The term "receiver" is therefore to be understood broadly. It does not have to be a device that is to be evacuated. In principle, any device to which a vacuum pump can be mounted for any purpose whatsoever can be a receiver within the meaning of this disclosure.

[0010] According to a preferred embodiment, the vacuum pump can be moved from the pre-fixed position achieved by hooking or sliding it into place to a final fixed position different from the pre-fixed position by means of a pivoting movement. In particular, the pivoting movement takes place about a pivot axis that runs through the support area, which is formed by the support element of the receiver and the counterpart of the vacuum pump supported by the support element. Thus, the pump can be pivoted about the support area in the hooked or slid-in state in order to bring the two functional sides into contact with each other, whereupon the final fastening is carried out by means of the fastening elements.

[0011] As already mentioned, depending on the specific design of the mounting device, it is possible, but not mandatory, to transfer the vacuum pump from its pre-fixing position to its final fixing position in some way. The intended relative position of the two functional sides, in which the vacuum pump is finally attached to the receiver, can also already be achieved in the pre-fixing position obtained by hooking or sliding it in.

[0012] The functional sides of the vacuum pump and the receiver can each have at least one functional area, for example, an intake opening or a connection. To ensure a vacuum-tight connection between the pump and the receiver, these functional areas can be provided with sealing materials, in particular specially designed sealing surfaces and / or separate sealing elements such as elastomeric O-rings. Either in the pre-fixing position or in the final fixing position, the functional sides of the vacuum pump and the receiver, and thus their functional areas and sealing materials, are correctly aligned relative to each other. This ensures that the vacuum-tight connection is established by finally attaching the vacuum pump to the receiver, and in particular, that the intended compression of the O-rings is achieved.

[0013] According to another embodiment, at least part of the fastening means is arranged at a distance from the pivot axis around which the pivoting movement for moving the vacuum pump from the pre-fixed position to the final fixed position takes place. The fastening of the vacuum pump and its support are therefore located at different points. However, this does not preclude the possibility that the fastening may also take place partially in the area of ​​the support.

[0014] To implement the suspension concept according to the invention, it can be provided in particular that the support element of the receiver comprises a bolt projecting from its functional side with a locking head spaced apart from the functional side, and wherein the counterpart of the vacuum pump comprises a suspension section with a recess for the bolt, which can be inserted between the functional side and the locking head of the receiver. Preferably, the receiver has several support elements arranged at a distance from one another, for each of which the vacuum pump has a suspension section with a corresponding recess. Two support elements arranged at a sufficient distance from one another may be sufficient in many cases.

[0015] Such support elements can be implemented in a remarkably simple and cost-effective manner using a screw that is screwed into a threaded opening in the receiver until the screw head is at the desired distance from the functional side. The screw shank then forms the bolt into which the counterpart of the vacuum pump engages with its recess. In particular, the support element can be a flanged screw, which is available as a very inexpensive, simple standard part, for example according to DIN 6921.

[0016] The insertion concept according to the invention can be implemented, for example, by the support element of the recipient comprising at least one support rail with a support surface and a locking web spaced apart from the functional side, wherein the counterpart of the vacuum pump comprises an insertion web that is slidable between the functional side and the locking web of the recipient on the support surface.

[0017] The vacuum pump can be easily slid onto such a support rail using its insertion tab until the pre-fixed position is reached. An end stop can be provided for this purpose. Depending on accessibility, the vacuum pump can also be hooked into the support rail using its insertion tab, with the locking tab of the support rail preventing the pump from moving away from the receiver and thus securing the supported position. This mounting device can therefore allow for both insertion and hooking. When the pump is hooked in, the insertion tab acts as a hooking tab. It can then be provided that the pump can be pivoted from the inserted or hooked pre-fixed position into a final fixed position.

[0018] Implementing such a suspension concept using a support rail and insertion ramp is possible if support is provided on only one side. The insertion concept according to the invention can also be realized with support on both sides, using two parallel support rails spaced apart from each other. In this case, the pre-fixed position can be achieved solely by inserting the vacuum pump.

[0019] Regardless of whether one-sided support with a support rail or two-sided support with two parallel support rails is implemented, a support rail with a locking web spaced away from the functional side is used particularly in so-called side mounting, where the functional sides run at least essentially vertically when the receiver and vacuum pump are oriented as intended.

[0020] As an alternative to such side mounting, a so-called overhead mounting is also possible, in which the functional sides run at least substantially horizontally when the receiver and vacuum pump are oriented as intended. In such an overhead mounting with the functional side of the receiver facing downwards, the insertion concept according to the invention is preferably used, preferably with two parallel support rails, in each case the support surface being spaced away from the functional side.

[0021] Consequently, according to an embodiment of the invention, it can be provided that the support element of the recipient comprises at least one support rail with a support surface spaced away from the functional side, wherein the counterpart of the vacuum pump comprises an insertion web that is slidable on the support surface.

[0022] The support surface can run either parallel to or, in an alternative configuration, at an angle to the functional side, with the distance between the support surface and the functional side decreasing from an entry point. Such a "run-on ramp" can significantly facilitate the insertion of the pump, particularly in overhead installations, as it can initially be inserted at an angle from below. The support surface can be designed so that, at the end of the insertion process, the rear section of the functional side is at a predetermined distance from the functional side of the receiver, and the pump only needs to be slightly lifted at the front to pivot it into its final locking position and then permanently secure it.

[0023] The achievement of the pre-fixing position can in turn be marked by an end stop, which limits the insertion depth exactly to the dimension required for the respective correct relative position of pump and receiver.

[0024] It may therefore be possible to design the mounting device for side mounting, where the functional points run at least essentially vertically when oriented as intended, for either one-sided or two-sided support. In one possible embodiment, the pump is supported only on one side and pivoted from the supported pre-fixing position to a final fixing position before final fastening.

[0025] For overhead mounting with functional sides that, in the intended orientation, run at least essentially horizontally, the mounting device is preferably designed for two-sided support. The final fastening of the pump to the receiver can then take place directly in the pre-fixing position after being moved to a final fixing position that differs from the pre-fixing position.

[0026] According to one embodiment, the vacuum pump has a longitudinal extension with a longitudinal axis running parallel to a pump rotor and an end face extending transversely to the longitudinal axis, wherein a counterpart of the vacuum pump, designed for support on only one side, is arranged in the region of an end face of the functional side running parallel to the longitudinal axis. The end face can, in particular, be formed by a connection side of a lower part attached to a housing part.

[0027] The arrangement of the counterpart in the region of the end face of the vacuum pump is particularly advantageous when, in a vertical installation, the vacuum pump is suspended from the receiver with its longitudinal axis running vertically in its intended orientation. This is because the suspension takes place at a point relatively far from the sealing surfaces or sealing elements of the functional sides. Consequently, the installation of such pumps can be significantly simplified by the invention.

[0028] The vacuum pump can comprise a housing part and a separate lower part connected to the housing part, arranged successively along a longitudinal axis, with the counterpart of the vacuum pump being arranged on the lower part or on a flange of the housing part running parallel to the longitudinal axis.

[0029] The mounting concept according to the invention can therefore also be used for such pumps for both vertical mounting with a vertical longitudinal axis and horizontal mounting with a horizontal longitudinal axis.

[0030] The term "lower section" refers to a separate unit attached to the housing containing the pumping components of the vacuum pump. This lower section may contain components other than the pumping components and may be equipped with external connections. In particular, electrical and electronic components may be housed in the lower section. The lower section may also serve to connect a control unit.

[0031] According to a further embodiment, at least a pair of mutually associated connections are formed on connection sides of the vacuum pump and the receiver that differ from the functional sides, the connection of which can be established by hooking or sliding in the vacuum pump.

[0032] Advantageously, the process of hooking or sliding in the component to establish the pre-fixed position can simultaneously be used to create one or more connection points. This utilizes the fact that the mounting device, designed for hooking or sliding in, ensures a correct relative position between the vacuum pump and the receiver as soon as the pre-fixed position is reached.

[0033] The invention also relates to a vacuum pump for a vacuum system of the type described herein, wherein the vacuum pump consequently comprises a functional side and at least one counterpart which is designed to cooperate with a respective support element of a recipient, either in the sense of the hanging concept according to the invention or the insertion concept according to the invention.

[0034] The vacuum pump is, in particular, a so-called split-flow pump, which has a longitudinal extension with a longitudinal axis running parallel to a pump rotor. Preferably, the split-flow pump has at least two intake ports arranged longitudinally at intervals on the functional side, through which the split-flow pump, in its assembled state, is connected to one or more chambers of a recipient to be evacuated. Such intake ports of a split-flow pump are also referred to as ports.

[0035] Another aspect of the invention relates to a vacuum pump, in particular for a vacuum system of the type described herein, with a functional side in which at least one functional area, in particular an intake opening or a connection, is arranged or formed, wherein the functional area is at least partially surrounded by a protrusion that projects from a surrounding surface of the functional side and around which an annular sealing element is placed or stretched.

[0036] The ring-shaped sealing element is in particular an O-ring made of an elastomeric material.

[0037] By placing or clamping the sealing element around a protruding projection, as in the invention, it is no longer necessary to create a receiving groove for the sealing element in the functional side of the pump. This represents a significant advantage, since the production of such grooves is comparatively time-consuming and costly. This is primarily because such grooves are typically produced using an end mill. The narrow width of such grooves necessitates the use of small end mills, typically with diameters between 1 and 6 mm. This machining process is responsible for the relatively long time required for groove production.

[0038] The invention has the advantage that the functional side can be machined with a comparatively large tool, which, for example, has a diameter between 20 and 100 mm. This allows the use of comparatively large cutter heads, which enable particularly economical machining.

[0039] A particular advantage of this machining method is that the desired shape can be given to a side wall of a raised section remaining after machining the functional side. For example, a step formed by the raised section on the functional side can be provided with a lateral undercut. Such an undercut can be created simultaneously with the machining of the surface being machined, provided a suitable tool geometry is used.

[0040] According to the invention, the annular sealing element is not arranged in a groove. In particular, this means that the sealing element is exposed on its side facing away from the protrusion. It has been found that grooves are not necessary for the correct and secure positioning of annular sealing elements; rather, it is sufficient if the sealing element is placed or clamped around the respective protrusion.

[0041] It is preferred, but not strictly necessary, that the survey completely surrounds the respective functional area, i.e., that the survey is closed around the functional area.

[0042] As already mentioned, the outer wall of the raised section, facing away from the functional area and thus towards the sealing element, can have a fundamentally arbitrary shape. For example, the outer wall can run at least substantially perpendicular to the functional side. Alternatively, the outer wall can have an undercut into which the sealing element partially projects. The undercut can, for example, be designed as a partial dovetail groove, in particular as a so-called half dovetail.

[0043] Preferably, the functional side comprises a flat surface from which the elevation protrudes.

[0044] Furthermore, it is preferred if the raised side of the elevation, opposite the functional side, comprises a flat surface. The flat surface of the elevation can run parallel to a flat surface of the functional side from which the elevation projects.

[0045] The surface roughness of the area from which the protrusion protrudes and against which the sealing element rests is preferably provided with a surface roughness of a maximum of Ra = 3.6.

[0046] The sealing concept according to the invention enables a vacuum-tight connection between the pump and a respective recipient, with which leakage rates of less than 5 x 10 -7< mbar I / s can be ensured in particular.

[0047] Fluororubber (abbreviated FKM) is one possible material for the sealing element. In principle, the sealing element can be made from any elastomer material.

[0048] The present revelation includes, among other things: 1. Vacuum system comprising a vacuum pump (11), in particular a split-flow pump, and a receiver (13), each having a functional side (11a, 13a), and a mounting device (15, 17) for, preferably vacuum-tight, mounting the vacuum pump (11) to the receiver (13) with mutually facing functional sides (11a, 13a), wherein the mounting device (15, 17) is designed to first allow the vacuum pump (11) to be supported on the receiver (13), namely by hooking or by sliding it in, and then to fasten the vacuum pump to the receiver, wherein the mounting device on the receiver (13) comprises at least one support element (17) projecting from its functional side (13a) and on the vacuum pump (11) at least one counterpart (15) which is connected to the support element (17) by hooking it in from above or by sliding it in from the side can be brought into engagement in order to support the vacuum pump (11) in a pre-fixed position on the recipient (13),and wherein the mounting device, in addition to the support element (17) and the counterpart (15) on the receiver (13) and on the vacuum pump (11), comprises fastening means (19, 21) with which the vacuum pump (11) can be fastened to the receiver (13) either directly in the pre-fixed position or after being moved from the pre-fixed position to a final fixed position. 2. Vacuum system according to embodiment 1, wherein the vacuum pump (11) can be moved from the pre-fixed position achieved by hooking or sliding it into the final fixed position by a pivoting movement, wherein in particular the pivoting movement takes place about a pivot axis (23) that passes through a support area formed by the support element (17) of the receiver and the counterpart (15) of the vacuum pump (11) supported on the support element (17). 3. Vacuum system according to embodiment 1 or 2, wherein at least a part of the fastening means (19,21) is arranged at a distance from the pivot axis (23). 4. Vacuum system according to one of the preceding embodiments, wherein the support element (17) of the receiver (13) comprises a bolt (17a) projecting from its functional side with a locking head (17b) spaced apart from the functional side, and wherein the counterpart (15) of the vacuum pump (11) comprises a mounting section with a recess for the bolt (17a) that can be inserted between the functional side (13a) and the locking head (17b) of the receiver (13). 5. Vacuum system according to one of embodiments 1 to 3, wherein the support element (17) of the receiver (13) comprises at least one support rail with a support surface (17c) and a locking web (17d) spaced apart from the functional side (13a),and wherein the counterpart (15) of the vacuum pump (11) comprises an insertion web that is slidable between the functional side (13a) and the locking web (17d) of the recipient (13) on the support surface (17c). 6. Vacuum system according to one of embodiments 1 to 3, wherein the support element (17) of the recipient (13) comprises at least one support rail with a support surface (17c) spaced apart from the functional side (13a), and wherein the counterpart (15) of the vacuum pump (11) comprises an insertion web that is slidable on the support surface (17c), wherein preferably the support surface (17c) extends obliquely to the functional side (13a) with a decreasing distance between the support surface (17c) and the functional side (13a) starting from an entry region. 7. Vacuum system according to one of the preceding embodiments, wherein for side mounting with functional sides (11a, 13a) extending at least substantially vertically when oriented as intended, the mounting device (15,17) is designed for one-sided support and, in particular, for fastening after being moved from the pre-fixing position to the final fixing position, or wherein, for overhead mounting with functional sides (11a, 13a) extending at least substantially horizontally when oriented as intended, the mounting device (15, 17) is designed for two-sided support and, in particular, for fastening directly in the pre-fixing position without moving to a final fixing position different from the pre-fixing position. 8. Vacuum system according to one of the preceding embodiments, wherein the vacuum pump (11) has a longitudinal extension with a longitudinal axis (29) extending parallel to a pump rotor and an end face (31) extending transversely to the longitudinal axis, which is formed, in particular, by a connection side of a lower part (27) attached to a housing part (25),and wherein a counterpart (15) of the vacuum pump (11) designed for only one-sided support is arranged in the region of an end face of the functional side (11a) extending parallel to the longitudinal axis (29). 9. Vacuum system according to one of the preceding embodiments, wherein the vacuum pump (11) comprises a housing part (25) and a separate lower part (27) connected to the housing part (25) successively along a longitudinal axis (29), wherein the counterpart (15) of the vacuum pump (11) is arranged on the lower part (27) or on a flange of the housing part extending parallel to the longitudinal axis (29). 10. Vacuum system according to one of the preceding embodiments, wherein at least one pair of corresponding functional openings (11b, 13b) is formed in the functional sides (11a, 13a) of the vacuum pump (11) and the receiver (13),which are already aligned with each other before being attached to the vacuum pump (11) supported on the receiver (13). 11. Vacuum system according to one of the preceding embodiments, wherein at least one pair of mutually associated connections (35, 37) is formed on connection sides (31, 33) of the vacuum pump (11) and the receiver (13) that differ from the functional sides (11a, 11b), the connection of which can be established by hooking or sliding in the vacuum pump (11). 12. Vacuum pump (11), in particular a split-flow pump, for a vacuum system according to one of the preceding embodiments, in particular with the features relating to the vacuum pump of one of the preceding embodiments. 13. Vacuum pump (11), in particular for a vacuum system according to one of embodiments 1 to 11, with a functional side (11a) in which at least one functional area (11b), in particular an intake opening or a connection, is arranged or formed,wherein the functional area (11b) is at least partially surrounded by a projection (51) that extends from a surrounding surface (53) of the functional side (11a) and around which an annular sealing element (55), in particular an O-ring, is placed or stretched, wherein in particular the sealing element (55) is exposed on its side facing away from the projection (51). 14. Vacuum pump according to embodiment 13, wherein an outer wall (57) of the projection (51) facing away from the functional area (11b) extends at least substantially perpendicular to the functional side (11a) or is provided with an undercut (59) into which the sealing element (55) partially projects, wherein in particular the undercut (59) is designed as a partial dovetail groove. 15. Vacuum pump according to embodiment 13 or 14, wherein the functional side (11a) comprises a flat surface (53) from which the projection (51) extends.and / or wherein the raised side (61) of the elevation (51) opposite the functional side (11a) comprises a flat surface which, in particular, runs parallel to a flat surface (53) of the functional side (11a) from which the elevation (51) projects.

[0049] The invention is described below by way of example with reference to the drawing. The drawing shows: Figs. 1 to 8 show different embodiments of a vacuum system according to the invention, in which a vacuum pump is either suspended or inserted into a receiver, and Figs. 9 to 11 show an embodiment of a vacuum pump with a sealing concept according to the invention.

[0050] All vacuum pumps 11 shown in the figures are so-called split-flow vacuum pumps, which can be used to produce a high vacuum or ultra-high vacuum in one or more chambers of a receiver 13. Preferably, the vacuum pump 11 comprises at least one pump rotor defining a longitudinal axis 29, which carries the rotating parts of one or more pump sections. At least one pump section of the vacuum pump 11 is preferably a turbomolecular pump section.

[0051] The vacuum pump 11 comprises an elongated housing section 25, to which a lower section 27 is attached at the end. This lower section is equipped with various connections and a control unit, among other things. This design of a split-flow vacuum pump is generally known, so it does not need to be discussed in detail here.

[0052] The vacuum system according to Fig. 1 The device is designed for vertical mounting with a longitudinal axis 29 that runs at least substantially vertically in the mounted state. A mounting device according to the invention comprises two support elements 17 spaced apart from one another on the receiver 13, each formed by a screw with bolt 17a and locking head 17b screwed into the functional side 13b of the receiver 13. As mentioned in the introduction, simple, inexpensive standard or norm screws with flanges can be used for these screws 17. This also applies to the variants described below.

[0053] The counterparts of the vacuum pump 11 for the support elements 17 of the receiver 13 are formed by recesses 15, which are formed in a mating flange 15a on the lower part 27 of the pump 11. The recesses 15 are open downwards in the direction of the longitudinal axis 29 of the pump 11, so that – as shown in the figure below left in Fig. 1 Figure 1 shows that the pump 11 can be mounted in a vertical orientation. This is done by hooking the pump 11 with the recesses 15 into the screws 17 from above, whereby the recesses 15 engage with the bolts 17a. In the hooked state, the pump 11 is locked by the screw heads 17b, i.e., secured against movement away from the receiver 13.

[0054] Depending on the specific design of this mounting device 15, 17, in this pre-fixed position, in which the pump 11 is already supported on the receiver 13, the two functional sides 11a, 13a can run parallel to each other and abut each other via sealing surfaces or sealing elements not shown here. Alternatively, as in Fig. 1 The illustration at the bottom left shows that a slight pivoting movement, indicated by an arrow, takes place around the support area formed by the support elements 17 and the counterparts 15 in order to transfer the pump 11 from the supported pre-fixing position to a final fixing position with functional sides 11a, 13a running parallel to each other.

[0055] The pivot axis 23 is shown in the lower right of the illustration. Fig. 1 indicated by a dashed line.

[0056] For the final fastening of the pump 11 to the receiver 13 in the final fixing position, the mounting device according to the invention comprises fastening means. These are formed on the vacuum pump 11 by two flanges 19 extending parallel to the longitudinal axis 29, which are attached to the housing part 25 or formed integrally with it and are provided with openings 19a for fastening screws 20. Corresponding threaded openings are formed on the functional side 13a of the receiver 13, into which the fastening screws 20 can be screwed. The finally fastened assembly state is shown in the figure below right. Fig. 1 .

[0057] How Fig. 1 Furthermore, this assembly concept according to the invention can be used simultaneously to establish connections between the vacuum pump 11 and the receiver 13. The downward-facing end face 31 of the lower part 27 is provided, among other things, with a connection 35, to which a connection 37 on a corresponding connection side 33 of the receiver 13 is assigned. This receiver-side connection 37 is provided with a sealing element 37a. By attaching the pump 11 to the receiver 13, the connection 35 of the pump 11 is connected to the connection 37 of the receiver 13 in the intended manner. This is shown in the figure below left. Fig. 1 The distance between the two connection sides 31, 33 is shown to be excessively large to illustrate this connection concept.

[0058] When the pump 11 is attached to the receiver 13, the pump 11 and receiver 13 are already in their final relative position with respect to the attachment direction – in this case, the vertical direction. This fact can be advantageously utilized by aligning the mounting elements 19, 19a of the pump 11 and the threaded openings (not shown) that form the mounting elements of the receiver 13 with each other when attached. This means that after attaching and pivoting the pump 11 into its final fixed position, the user only needs to screw in the mounting screws 20, without having to first ensure the correct alignment of the pump 11.

[0059] Fig. 2 Figure 1 shows a variant in which the vacuum pump 11 is again suspended from the receiver 13, but here with a horizontal longitudinal axis 29. The counter flange 15a of the housing part 25, which runs parallel to the longitudinal axis 29, is provided with three recesses, the two outer recesses 15 forming the counterparts for the support elements 17 of the receiver 13, which are again designed as screws. A middle recess does not serve to support the pump 11 in the pre-fixed position, but rather to receive a fastening screw 20, with which the pump 11 is fastened to the receiver 13 in the area of ​​the counter flange 15a. On the opposite side of the pump 11, analogous to the embodiment of the Fig. 1 A flange (not shown here) is provided, which has openings through which the pump 11 can also be screwed onto the top of the receiver 13, after the pump 11 has been hooked in and pivoted from this pre-fixing position into the final fixing position.

[0060] Fig. 3 Another variant is shown, in which the pump 11 is again mounted vertically with its longitudinal axis 29 running in a vertical direction. In contrast to the embodiment of the Fig. 1 The recesses 15 forming the counterparts are located at the end face of the housing part 25 opposite the lower part 27. The pump 11 is thus mounted vertically with the lower part 27 facing upwards, and for this purpose – as in the exemplary embodiment of the Fig. 1 - suspended on the receiver 13, pivoted if necessary and then attached to the receiver 13 on side flanges 19 by means of fastening screws 20.

[0061] The Fig. 4 and 5 show a possible embodiment of an insertion concept according to the invention, here in side mounting with one-sided support by a support rail 17 attached to the receiver 13.

[0062] The support rail 17 is screwed to the functional side 13a of the recipient 13 and comprises a longitudinally extending support surface 17c oriented perpendicular to the functional side 13a and a locking web 17d spaced from the functional side 13a, which limits the support surface 17c.

[0063] The receiver 13, shown here in a purely schematic way, has three chambers which are to be evacuated by means of the vacuum pump 11 and for this purpose are aligned via functional openings 13b opening into the functional side 13a with corresponding intake openings in the functional side 11a of the vacuum pump 11, which are not shown here, when the pump 11 is mounted on the receiver 13 in the intended manner.

[0064] To mount the vacuum pump 11, it is slid onto the support rail 17 using an insertion tab (not shown) running parallel to the longitudinal axis 29. After reaching the pre-fixed position, it is pivoted against the functional side 13a of the receiver 13. The pump 11 can then be screwed to the receiver 13 via the mounting tab 19 provided on the top of the housing part 25, thus permanently securing it to the receiver 13. Threaded openings 21 in the functional side 13a of the receiver 13, the aforementioned mounting tab 19, the mounting holes 19a formed therein, and mounting screws 20 constitute the fastening means of the mounting device according to the invention in this embodiment.

[0065] For example, at the end of the support rail 17, the receiver 13 can be provided with an end stop against which the vacuum pump 11 rests in the fully extended state and which indicates to the user that the correct pre-fixing position has been reached, in which the threaded openings 21 on the receiver 13 are aligned with the mounting openings 19a on the mounting flange 19 of the vacuum pump 11.

[0066] The Fig. 6 , 7 and 8 shown in various illustrations of an inventive insertion concept for overhead mounting with two-sided support for the vacuum pump 11.

[0067] The recipient 13 is provided on its downward-facing functional side 13a with two support rails 17, each of which has a support surface 17c spaced apart from the functional side 13a and running obliquely to the functional side 13a.

[0068] This causes the distance between support surface 17c and function side 13a to vary such that, starting from a point in the middle representation of the Fig. 6 The entrance area on the left decreases to the right. At the end of these ramps formed by the support surfaces 17c, an end stop 39 for the vacuum pump 11 is arranged.

[0069] The lower representation in Fig. 6 shows the beginning of the sliding of the vacuum pump 11, which is provided on its functional side 11a with laterally projecting insertion webs, which here each represent the counterpart 15 for the support element 17 formed by the respective support rail of the recipient 13.

[0070] Fig. 7 shows the pre-fixing position in which the vacuum pump 17 is fully inserted and rests against the end stops 39.

[0071] In this pre-fixed position, the two functional sides of pump 11 and receiver 13 are not yet parallel to each other, but mounting openings 19a formed at the end region of the insertion web 15 are aligned with threaded openings on the functional side 13a of the receiver 13, so that the pump 11 only needs to be pivoted from this supported pre-fixed position against the functional side 13a of the receiver 13 (indicated by the arrow in Fig. 7 (indicated), in order to subsequently use fastening screws 20 (see Fig. 8 ) to be screwed onto the receiver 13 in order to finally attach the pump 11 to the receiver 13.

[0072] The support rails 17, which are provided with the inclined support surfaces 17c, are in turn screwed to the functional side 13a of the receiver 13. The fastening screws 22 are shown in particular in the upper illustration of the Fig. 8 to recognize.

[0073] The preceding explanations demonstrate that the components and geometries required for support (i.e., hanging or sliding) and fastening can be implemented in a remarkably simple and cost-effective manner. In the described embodiments, the support elements—screws or rails—simply need to be screwed onto the functional side 13a of the receiver 13. The vacuum pump 11 requires only elongated flanges or webs, optionally with recesses or openings. These flanges or webs can be formed during the manufacturing of the pump 11, for example, on the housing part 25 or on a lower part 27, or they can be added subsequently.

[0074] In the sealing concept according to the invention, Fig. 9 bis 11 For the vacuum-tight sealing of the intake openings 11b of the vacuum pump 11, no sealing elements arranged in circumferential narrow grooves are provided. Instead, the intake openings 11b are each completely surrounded by a protrusion 51, which forms a step that projects from a surrounding flat surface 53 of the functional side 11a.

[0075] This results in a circumferential system area at each of the intake openings 11b, formed by the outer wall 57 of the elevation 51. At this system area, as Fig. 10 and 11 show - for example an O-ring made of an elastomer, which is stretched around the protrusion 51.

[0076] How Fig. 10 As shown, during the production of the flat surface 53 surrounding the intake openings 11b, in which the protrusions 51 are left intact, the outer walls 57 can be shaped as desired. In one possible embodiment, the protrusions 51 are each provided with an undercut 59 on their outer wall 57. This ensures that the ring seals 55, which are clamped around each protrusion 51, are securely held against the respective protrusion 51.

[0077] How Fig. 10 Furthermore, the ring seal 55, which projects into the undercut 59, protrudes in the state not yet mounted on the recipient, over a raised side 61 of the elevation 51 running parallel to the surrounding surface 53.

[0078] Fig. 11 shows the finished assembly state in which the vacuum pump 11 is screwed onto the receiver 13 and the ring seals 55 surrounding the protrusions 51 are pressed in the intended manner between the flat surface 53 surrounding the protrusions 51 and a counter-sealing surface of the receiver 13.

[0079] The assembled state according to Fig. 11 can have been produced by the assembly concept according to the invention, as described above in conjunction with the Fig. 1 bis 9 has been described. Bezugszeichenliste

[0080] 11 Vacuum pump 11a Functional side of the vacuum pump 11b Functional area of ​​the vacuum pump 13 Receptacle 13a Functional side of the receiver 13b Functional opening of the receiver 15 Counterpart on the vacuum pump 15a Counterflange 17 Support element on the receiver 17a Bolt 17b Locking head 17c Support surface 17d Locking lug 19 Fastening element on the vacuum pump 19a Opening 20 Fastening screw 21 Fastening element on the receiver 22 Fastening screw 23 Swivel axis 25 Housing part 27 Lower part 29 Longitudinal axis 31 Front side of the vacuum pump 33 Connection side of the receiver 35 Connection of the vacuum pump 37 Connection of the receiver 37a Sealing element 39 End stop 51 Rise 53 surrounding area 55 sealing element 57 exterior wall 59 undercut 61 raised side

Claims

1. Vacuum pump (11) with a functional side (11a) in which at least one functional area (11b) is arranged or formed, wherein the functional area (11b) is at least partially surrounded by a projection (51) which extends from a surrounding surface (53) of the functional side (11a) and around which an annular sealing element (55) is placed or stretched, wherein an outer wall (57) of the projection (51) facing away from the functional area (11b) is provided with an undercut (59) into which the sealing element (55) partially projects.

2. Vacuum pump (11) according to claim 1, wherein the sealing element (55) is exposed on its side facing away from the protrusion (51).

3. Vacuum pump (11) according to claim 1 or 2, wherein the undercut (59) is designed as a partial dovetail groove.

4. Vacuum pump (11) according to one of claims 1 to 3, wherein the functional side (11a) comprises a flat surface (53) from which the protrusion (51) extends.

5. Vacuum pump (11) according to one of claims 1 to 4, wherein the side (61) of the elevation (51) which is raised relative to the functional side (11a) comprises a flat surface.

6. Vacuum pump (11) according to claim 5, wherein the flat surface runs parallel to a flat surface (53) of the functional side (11a) from which the elevation (51) protrudes.

7. Vacuum pump (11) according to one of claims 1 to 6, wherein the at least one functional area (11b) is an intake opening or a connection.

8. Vacuum pump (11) according to one of claims 1 to 7, wherein the sealing element (55) is an O-ring, in particular made of an elastomer material.

9. Vacuum pump (11) according to one of claims 1 to 8, wherein the protrusion (51) completely surrounds the respective functional area (11b).

10. Vacuum pump (11) according to one of claims 1 to 9, wherein the surface roughness of a surface (53) from which the protrusion (51) protrudes and on which the sealing element (55) rests is provided with a surface roughness of maximum Ra = 3.

6.

11. Vacuum pump (11) according to one of claims 1 to 10, the sealing element (55) being made of a fluororubber.

12. Vacuum pump (11) according to any one of claims 1 to 11, wherein the vacuum pump (11) is a split-flow vacuum pump.

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