METHOD FOR MAKING A VOLUME ACOUSTIC WAVE FILTER.

Abstract

METHOD FOR MAKING A BODY ACOUSTIC WAVE FILTER One aspect of the invention relates to a method for making a bandpass filter comprising a first body acoustic wave resonator (1) and a second body acoustic wave resonator (2), the resonance frequency of the second resonator being shifted from the resonance frequency of the first resonator by a predetermined shift, the method comprising the steps of: supplying a piezoelectric substrate (10) on an insulator, forming a lower electrode (31) of the first resonator (1) and a lower electrode (32) of the second resonator (2), gluing the donor substrate (10) onto a receiving substrate (50), removing the donor substrate (10) with a stop on the piezoelectric layer (13), forming an upper electrode (33) of the first resonator (1) and an upper electrode (34), the formation of the lower electrodes (31,32) being preceded by a step of forming a mass overload pattern (20) at the level of the second zone (134), and / or the formation of the upper electrodes (33,34) being preceded by a step of forming a mass overload pattern (21) at the level of the second zone (134), the total thickness of the mass overload pattern(s) (20,21) being chosen to shift the resonance frequency of the second resonator with the predetermined shift.

Description

Title of the invention: METHOD FOR PRODUCING A VOLUME ACOUSTIC WAVE FILTER. TECHNICAL FIELD OF THE INVENTION

[0001] The technical field of the invention is that of radiofrequency filters based on bulk acoustic wave resonators.

[0002] The present invention relates to a method of manufacturing a radiofrequency filter using several bulk acoustic wave resonators formed on the same substrate of piezoelectric material. TECHNOLOGICAL BACKGROUND OF THE INVENTION

[0003] In the field of telecommunications systems, “wideband” radiofrequency filters are necessary to select the useful radiofrequency signal.

[0004] Thus, for fifth generation (or 5G) mobile telephony applications, we seek to obtain filters having an operating frequency of between 3.3 GHz and 6 GHz, a relative bandwidth of a few percent, for example 10%, losses of less than 3 dB in the bandwidth and greater than 45 dB in the rejection bands, i.e. outside the bandwidth.

[0005] For this purpose, solutions based on piezoelectric materials are being developed. Bulk acoustic wave filters using multiple bulk acoustic wave resonators, also known as BAW resonators for "Bulk Acoustic Wave" in English terminology, are an example of solutions adapted to mobile telephony standards.

[0006] BAW resonators exploit the propagation of acoustic waves in piezoelectric layers. Generally, a BAW resonator comprises a stack of layers formed on a substrate and comprising a lower electrode and an upper electrode framing a portion of a layer formed of a piezoelectric material, called a piezoelectric layer. Furthermore, this stack of layers is mechanically isolated from the substrate by a stack of layers forming a mechanically insulating device. This device may be an air gap, in which case the BAW resonator is called an FBAR resonator for "Film Bulk Acoustic Resonator" according to English terminology. Alternatively, the device may be a Bragg mirror structure, in which case the BAW resonator is called an SMR resonator for "Solidly Mounted resonator" according to English terminology.

[0007] A type of bulk acoustic wave filter whose topology is called "ladder" or "ladder" according to English terminology is particularly used, due to its simplicity and adaptability.

[0008] With reference to [Fig.l], such a ladder filter 100 comprises a first set J1 of bulk acoustic wave resonators S arranged in series between an input 110 and an output 120, and a second set J2 comprising a bulk acoustic wave resonator P arranged in parallel and connected to ground.

[0009] For the sake of simplification, the series bulk acoustic wave S resonators are called series S resonators, and the parallel bulk acoustic wave P resonator is called parallel P resonator.

[0010] The series S resonators all have the same resonance frequency fRS which corresponds to the desired operating frequency f0 for the filter 100. The series S resonators consequently all have the same antiresonance frequency f AS-

[0011] The resonance frequency f^ of the parallel P resonator is shifted from the resonance frequency fRS of the series S resonators to a lower frequency, the shift A / being predetermined so that the antiresonance frequency f^ of the parallel P resonator corresponds to the resonance frequency fRS of the series S resonator. In other words, the shift is equal to the result of the difference between the antiresonance frequency fAS and the resonance frequency fRS of the series S resonator.

[0012] The electrical response SF of such a filter 100 is given in [Fig.2]. The response Ss of the series S resonators as well as that SP of the parallel P resonator are also displayed. At the resonance frequency fRS of the series S resonators, the electrical signal SF generated by the filter, via the series S resonators, is maximal. Conversely, at the anti-resonance frequency fAS of the series resonators, the electrical signal SF is redirected to ground or blocked at the input due to the series resonators which have a high impedance, which leads to a maximum attenuation of the signal SF. Far from these resonance frequencies fRS and anti-resonance fAS, the filter behaves like a capacitive bridge attenuating the signal SF.

[0013] For such a filter 100 to achieve the broadband specifications described above, several requirements are necessary.

[0014] A first requirement concerns the piezoelectric material. Its electromechanical properties in fact partly determine the performance of the filter, in particular its bandwidth and its losses, through a quality factor Q (or merit factor) and an electromechanical coupling coefficient k2 (or kt2) characteristic of the filter.

[0015] Aluminum nitride AIN and aluminum scandium nitride (AlFxScxN) deposited in thin layers, although commonly used in industry, are not suitable piezoelectric materials. The intrinsic electromechanical coupling coefficient of aluminum nitride, which is around 7.5%, is in fact too low. As for aluminum scandium nitride, if its intrinsic electromechanical coupling coefficient increases with the scandium concentration, its mechanical losses canics also increase, which no longer allows the synthesis of filters with satisfactory insertion losses.

[0016] It is therefore necessary to replace these materials with materials having better intrinsic electromechanical performances.

[0017] Lithium niobate is one of these materials.

[0018] The document “Large electromechanical coupling factor film bulk acoustic resonator with x-cut LiNbO3 layer transfer” by Pijolat et al., Applied Physics Letters, 2009 thus showed that a thin layer 6.6 pm thick of lithium Niobate formed by layer transfer has an electromechanical coupling coefficient greater than six times the coupling coefficient of aluminum nitride (45% compared to 7.5% for PAIN), making it possible to envisage a bandwidth up to six times wider than the bandwidth of aluminum nitride filters.

[0019] The document "High frequency LiNbO3 bulk Wave resonator" by Gorisse et al., IEEE international Frequency Control Symposium, 2019 based on patent EP2330737B1 describes a way to manufacture a bulk acoustic wave resonator based on such a piezoelectric material. The manufacturing method comprises 1) providing a donor substrate comprising a lithium niobate layer having a crystal orientation along the X-section plane, 2) implanting ions at a determined depth of the donor substrate to form a fragile plane therein, 3) forming a lower electrode on the lithium niobate layer, 4) transferring the donor substrate to a receiving substrate, leaving the stack comprising the lower electrode and the lithium niobate layer on the receiving substrate, and 5) forming an upper electrode on the piezoelectric layer, at the area defined by the lower electrode.Such a process advantageously circumvents the difficulty in depositing or etching lithium niobate.

[0020] Another requirement for obtaining a broadband filter with the above specifications concerns the ability to shift the resonant frequency of a parallel resonator relative to the resonant frequency of a series resonator with sufficient amplitude and precision.

[0021] Several techniques for shifting the frequency of one of the resonators are described. All are based on the principle of varying, in one of the parallel or series P,S resonators, the total thickness of the resonator.

[0022] All these techniques are mainly described for filters whose piezoelectric material is aluminum nitride. However, lithium niobate has different physical and chemical properties from aluminum nitride. Some of the well-known techniques of the prior art are therefore not suitable for lithium niobate.

[0023] Among the unsuitable techniques, there is a first family of techniques consisting of varying the thickness of the layer of piezoelectric material and a second family of techniques consisting of varying the thickness of an electrode by successive steps of deposition and etching of a metal layer over the entire surface of the piezoelectric layer.

[0024] The first family of techniques uses piezoelectric layer deposition processes (to increase the thickness) on the already formed piezoelectric layer, or piezoelectric layer etching processes (to reduce the thickness). However, lithium niobate is not easy to deposit. Furthermore, its etching can quickly damage the surface of the material (by causing its roughening or amorphization), which leads to a loss of its piezoelectric properties. In addition, the etching processes are relatively inhomogeneous at the scale of a substrate, which prevents achieving the precision and uniformity (i.e. less than 1% variation at the scale of a substrate) required to satisfy the tolerances on the frequency dispersions of the filter.

[0025] The second family of techniques, described for example in patent US6617249B2, consists precisely in 1) depositing a first metal layer on the entire layer of piezoelectric material, then 2) depositing, on this first layer and on a surface corresponding to the parallel P resonator, a metal mass overload layer making it possible to increase the thickness of the upper electrode of the parallel P resonator. The upper electrodes of the S, P series and parallel resonators are then defined by common etching of the first metal layer and the mass overload layer.

[0026] If the fact of depositing and then etching a first electrode layer on a piezoelectric layer of aluminum nitride does not induce degradation of the aluminum nitride, this is not the case when the piezoelectric layer is made of lithium niobate. Indeed, the chemical compatibility between the electrodes, in particular if they are formed of aluminum, and the lithium niobate is different. Thus, the deposition of the first electrode layer on the surface of a layer of lithium niobate, then its removal by chemical etching leaves visible residues on the surface of the piezoelectric layer. These residues, which are signs of the inter-diffusion between the aluminum and the piezoelectric material, induce an unwanted roughness and can disturb the propagation of acoustic waves.Furthermore, the inter-diffusion between the aluminum and the piezoelectric material leads to the formation of a mixed oxide, behaving like a dead layer degrading the piezoelectric properties of the piezoelectric layer.

[0027] Among the techniques adapted to lithium niobate, there are a third, a fourth and a fifth family of techniques.

[0028] The third family of techniques consists either of thinning one of the electrodes of the re series S resonator once it has been formed, or to increase the mass charge of one of the electrodes of the parallel P resonator once it has been formed.

[0029] Thinning an electrode consists of partially etching this electrode. However, the electrode etching processes do not allow the desired thickness of the electrode to be achieved with the desired tolerance (less than 1%). In addition, thinning the electrodes leads to an increase in their resistivity, which increases the resistive losses in the filter circuit. An alternative, proposed in patent US6617249B2, consists of surface oxidizing the electrode. Here too, the metal oxide is electrically less conductive than the metal of the electrode, which degrades the performance of this electrode. Thus, the third technique has the disadvantage of degrading the performance of the filter.

[0030] The fourth family of techniques consists of varying the thickness of the support layer located under the parallel P resonator.

[0031] Patent US6842089B2 thus describes the production, before the manufacture of the resonators, of a series of masking and etching operations on the substrate to increase the thickness of the support layer located under the parallel resonator. The variation in thickness of the support layer, due to its distance from the piezoelectric layer, is significant, and negatively influences the electromechanical coupling coefficient of the parallel P resonator. One reason is that any addition of material under or near the resonator tends to store mechanical energy outside the piezoelectric layer, which is then not converted into electrical energy, the conversion taking place only in the layer of piezoelectric material. The electromechanical coefficient of the parallel P resonator thus formed is then degraded.

[0032] Patent US6617249B2 describes modifying a layer thickness closer to the piezoelectric layer. Specifically, this patent describes a solution consisting of depositing a layer, called a mass overload layer, under the lower electrode of a parallel resonator. For this, the deposition of the mass overload layer is carried out on a substrate layer, before the step of forming the lower electrode. Although the thickness variation is closer to the piezoelectric layer than the solution described previously, the electromechanical coefficient of the resonator thus formed remains degraded.

[0033] The fifth family of techniques consists of depositing a layer of metallic mass overload on the upper electrode of the resonator P other than by using a deposition / removal of a metallic layer on the entire surface of the piezoelectric layer.

[0034] Patent US5894647B1 thus describes a first combination of photolithography and etching steps to form the upper electrodes of the series and parallel S, P resonators over the layer of piezoelectric material, then a second combination of photolithography and etching to deposit a mass overlay layer only on the top electrode of the parallel resonator. A disadvantage is that misalignments between the top electrode and the mass overlay layer can occur, resulting in regions called "overhangs" where the top electrode is not covered by the mass overlay layer, and / or regions where the mass overlay layer is in contact with the piezoelectric layer. These regions behave like resonators and introduce parasitic resonances that are detrimental to the filter's performance.

[0035] To remedy this and define the desired structure for the upper electrode of the parallel P resonator, the same patent describes carrying out a new photolithography and a new deposition of a mass overload layer over an area larger than the area defined for the parallel P resonator, and etching the aforementioned regions as well as the edges of the region where the electrode layer and the mass overload layer overlap. The etching of the mass overload layer is then necessarily a selective etching with respect to the metal of the electrode, which therefore requires the use, for the mass overload layer and for the electrodes, of metals having different etching chemistries. The disadvantage is that intermetallic compounds resistant to etching chemistries can form on the surface of the piezoelectric material.It is then necessary to provide an additional mask level to be able to non-selectively etch the electrode overhangs, which is complex to achieve.

[0036] Patent US6472954B1 proposes a way of circumventing this problem by describing a step of forming a mass overload layer carried out after the formation of the resonators (and therefore of the upper electrode of the parallel P resonator) and comprising a step of depositing a structured sacrificial layer with a localized loading pattern on the upper electrode of the parallel P resonator, a step of depositing the mass overload layer on the structured sacrificial layer, and a step of removing by lift-off the sacrificial layer and the deposited metal overload layer.

[0037] Patent US7802349B2 from the same author describes more specifically that the sacrificial layer is a resin mask, and that the removal of this mask is carried out without etching, by so-called “soft” chemistry based on a solution adapted to the resins.

[0038] Thanks to the sacrificial layer, the piezoelectric material is preserved from inter-diffusion phenomena during the formation of the mass overload layer. However, the removal of this sacrificial layer poses the problem of preserving the upper electrodes of the filter resonators. Indeed, the removal of the sacrificial layer requires the use of solutions which are generally aggressive towards the metallic material used for the electrodes. Cracks and weak points can thus appear on the electrodes under the combined effect of chemical agents and temperature conditions, which degrades the performance of the resonators and, therefore, of the filter. Aluminum is particularly very sensitive to these solutions, as is molybdenum, although to a lesser extent. The upper electrodes of the resonators in parallel can therefore be damaged.

[0039] There is therefore a need to improve existing techniques describing the adjustment of the resonance frequency of a parallel P resonator to produce a wideband filter suitable for mobile telephone applications. Summary of the invention

[0040] The invention offers a solution to the problems mentioned above, by providing a production method which preserves the electrodes of the resonators and can dispense with a succession of steps of depositing and removing a metal layer over the entire surface of the piezoelectric layer, and which is compatible with the use of a monocrystalline piezoelectric material such as lithium niobate.

[0041] For this, the method according to the invention begins with the provision of a piezoelectric substrate on insulator and uses an assembly step interposed between the production of the lower part and the upper part of the resonators. Furthermore, the method makes it possible to thicken the lower electrode and / or the upper electrode of the parallel resonator before the formation of said electrodes.

[0042] One aspect of the invention relates to a method of producing a bandpass filter comprising a first bulk acoustic wave resonator and a second bulk acoustic wave resonator, the resonant frequency of the second resonator being offset from the resonant frequency of the first resonator with a predetermined offset, the method comprising the steps of: • provision of a piezoelectric substrate on insulator, called donor substrate, comprising in the upper part a piezoelectric layer, • formation of a lower electrode of the first resonator on a first predefined area of ​​the piezoelectric layer, and of a lower electrode of the second resonator on a second predefined area of ​​the piezoelectric layer, • assembly by bonding the donor substrate to a receiving substrate, so that the lower electrodes of the first and second resonators are arranged between the receiving substrate and the donor substrate, • removal, in the assembly of the receiver substrate and the donor substrate, of the donor substrate with stop on the piezoelectric layer, • formation, on the piezoelectric layer, of an upper electrode of the first resonator at the level of the first zone, and of a su- upper part of the second resonator at the level of the second zone, the formation of the lower electrodes being preceded by a step of forming a mass overload pattern at the level of the second zone, called mass overload pattern of the lower electrode, and / or the formation of the upper electrodes being preceded by a step of forming a mass overload pattern at the level of the second zone, called mass overload pattern of the upper electrode, the total thickness of the mass overload pattern(s) being chosen to shift the resonance frequency of the second resonator with the predetermined shift.

[0043] Thus, the combination of providing a piezoelectric substrate on insulator, and an assembly step interposed between the formation of the lower part of the resonators (including the lower electrodes) and the formation of the upper part of the resonators (including the upper electrodes) makes it possible to use single-crystal piezoelectric materials, such as lithium niobate, lithium tantalate, etc., obtained by layer transfer. Since these materials have intrinsic piezoelectric properties superior to aluminum nitride, they are compatible with the synthesis of a broadband filter.

[0044] This feature also has the effect of making both faces (lower, upper) of the piezoelectric layer accessible. This makes it possible to adjust the thickness of one or other of the electrodes of the second resonator, or to adjust the thickness of both of the electrodes of the second resonator. The possibility of varying the thickness of the two lower / upper electrodes finds a particular advantage in increasing the bandwidth of the filter. This feature provides an improvement over existing techniques.

[0045] Furthermore, the formation of the lower electrodes is preceded by a step of forming a mass overload pattern at the second zone, and / or the formation of the upper electrodes is preceded by a step of forming a mass overload pattern at the second zone, the mass overload patterns being obtained by deposition of a mass overload layer. The total thickness of the mass overload pattern(s) is chosen to shift the resonance frequency of the second resonator with the predetermined shift.

[0046] Since the second area comprises the area of ​​the piezoelectric layer corresponding to the second resonator, the electrodes of the second resonator are thickened by a mass overload pattern arranged as follows: • When the lower electrode is thickened, the metal overcharge pattern is interposed between the piezoelectric layer and the lower electrode, • When the top electrode is thickened, the mass overload pattern is intercalated between the piezoelectric layer and the top electrode, • When both electrodes are thickened, a first overload pattern mass is intercalated between the piezoelectric layer and the lower electrode, and a second mass overload pattern is intercalated between the piezoelectric layer and the upper electrode.

[0047] The advantage of such an arrangement lies in the fact that the variation in thickness is obtained as close as possible to the piezoelectric layer, which makes it possible to best preserve the electromechanical coupling coefficient of the second resonator, and therefore to improve the performance of the filter. It should be noted that this characteristic is different from the prior art, which describes a mass overload layer arranged on the upper electrode or under the lower electrode, therefore further away from the piezoelectric layer.

[0048] Finally, since the mass overload patterns are formed before the electrodes are formed, the formation of the patterns cannot damage the metal of the electrodes. The electrodes of the resonators are therefore preserved.

[0049] For these reasons at least, the method according to the invention makes it possible to improve existing techniques describing the adjustment of the resonant frequency of a resonator, while being compatible with the use of a monocrystalline piezoelectric material. The method according to the invention is thus suitable for producing a wideband filter according to the specifications required, for example, for mobile telephony.

[0050] Advantageously, the formation of each mass overload pattern comprises the following sub-steps: • deposition of a sacrificial layer over the entire surface of the piezoelectric layer, • defining an opening through the sacrificial layer at the level of the second zone, the opening opening onto the piezoelectric layer at the level of said second zone, • deposition of a mass overload layer so as to cover the piezoelectric layer only at the opening and to cover the sacrificial layer outside the opening, • removal of the stack formed by the sacrificial layer and the mass overload layer by lift-off removal of the sacrificial layer, said removal leaving the mass overload layer on the piezoelectric layer only at the level of the second zone to form the mass overload pattern.

[0051] Thus, the mass overload pattern(s) are formed without the need for an etching operation that could cause inter-diffusion phenomena that could degrade the piezoelectric layer. The sacrificial layer therefore makes it possible to protect (preserve) the piezoelectric layer of the resonators and thus preserve its intrinsic piezoelectric properties.

[0052] Advantageously, the mass overload pattern of the lower electrode is formed from a material identical to the mass overload pattern of the upper electrode and has a thickness identical to said mass overload pattern of the upper electrode.

[0053] Thus, two mass overload layers are arranged symmetrically between respectively the piezoelectric layer and the lower electrode of the second resonator, and the piezoelectric layer and the upper electrode of the second resonator. In other words, the second resonator has a symmetrical structure with respect to a central plane of the piezoelectric layer.

[0054] This characteristic finds an advantage in achieving a wide bandwidth without increasing the losses in this bandwidth. Indeed, to achieve certain wide bandwidths, the quantity of mass is such that it requires a relatively thick mass overload layer compared to the other layers. This would degrade the symmetry of the second resonator, and would cause a reduction in the electromechanical coupling coefficient and also the excitation of asymmetric vibration modes, one limiting the possibility of achieving a wide bandwidth, the other limiting the rejection at the excitation frequencies of the antisymmetric vibration modes. By distributing this quantity of mass symmetrically between the two mass overload layers of the lower and upper electrode, these phenomena of parasitic resonances and degradation of the electromechanical coupling coefficient are avoided.

[0055] Advantageously, the mass overload pattern of the lower electrode is formed from a material identical to the material of the lower electrodes, and the mass overload pattern of the upper electrode is formed from a material identical to the material of the upper electrodes, and the second zone is laterally more extensive than the second resonator.

[0056] Thus, the second resonator can be laterally redefined at the end of the production of the filter to eliminate potential parasitic resonance phenomena on its edges. Because the same material is used for the mass overload layer and the electrode associated with it, the redefinition of the second resonator can be carried out by a single-step removal of the stack formed of the mass overload layer and the electrode located around the area defined for the second resonator. This removal is simple to carry out because it does not generate intermetallic compounds complicating the etching.

[0057] Advantageously, the method may comprise forming a mechanical isolation structure under the first resonator and a mechanical isolation structure under the second resonator.

[0058] The mechanical isolation structures isolate the resonators from the receiving substrate and allow them to function.

[0059] According to a first variant embodiment, the method comprises a step of forming a Bragg structure on the lower electrode of the first resonator and a Bragg structure on the lower electrode of the second resonator, said step of forming the Bragg structures being carried out between the formation of the lower electrodes and the assembly step.

[0060] Bragg structures are mechanical isolation structures for isolating resonators from the receiving substrate.

[0061] According to a second variant embodiment, the method comprises steps for forming an air cavity of the first resonator and an air cavity of the second resonator, said steps being the following: • between the formation of the lower electrodes and the assembly step, formation of a box on and around the lower electrode of the first resonator, and of a box on and around the lower electrode of the second resonator, the boxes comprising a sacrificial layer • after the assembly step and before the formation of the upper electrodes, formation through the piezoelectric layer of an opening to reach the box located on and around the lower electrode of the first resonator, and of an opening to reach the box located on and around the lower electrode of the second resonator, • after the upper electrode formation step, removal of the sacrificial layer through the openings to release the boxes and fill them with air.

[0062] Air cavities allowing the resonators to be isolated from the receiving substrate.

[0063] Advantageously, the method comprises, after the step of forming the upper electrodes, an additional step of depositing on the upper face of the bandpass filter and only on the upper electrodes, a metallic layer, called an over-metallization layer.

[0064] This over-metallization layer aims to consolidate the electrodes electrically, the metallic layer limiting the resistive losses of the upper electrodes.

[0065] In addition to the characteristics which have just been mentioned in the preceding paragraphs, the method according to one aspect of the invention may have one or more complementary characteristics among the following, considered individually or according to all technically possible combinations: • The piezoelectric layer is formed from a single-crystal piezoelectric material. • The monocrystalline piezoelectric material is chosen from one of the following materials: lithium niobate, lithium tantalum, potassium niobate, nitride aluminum and monocrystalline scandium. • The lower and upper electrodes are made of one of the following materials: aluminum, molybdenum, tungsten, ruthenium, iridium.

[0066] The invention and its various applications will be better understood upon reading the following description and examining the accompanying figures. BRIEF DESCRIPTION OF THE FIGURES

[0067] The figures are presented for information purposes only and in no way limit the invention. • [Fig.l] schematically represents the structure of a low-pass filter of the prior art, said filter using two volume acoustic wave resonators arranged in series, and one volume acoustic wave resonator arranged in parallel, • [Fig.2] represents the electrical response as a function of frequency of the filter of [Fig.l], as well as the individual electrical responses of the series and parallel resonators of [Fig.l], • Figures 3A to 31 schematically represent steps of a method according to a first embodiment of the invention, • Figures 4A to 4D schematically represent sub-steps of the second step of the method of [Fig.3B], • Figures 5A to 51 schematically represent steps of a method according to a second embodiment of the invention, • Figures 6A to 6J schematically represent steps of a method according to a third embodiment of the invention. DETAILED DESCRIPTION

[0068] It should be recalled first of all that, in a general manner and well known to those skilled in the art, a bandpass filter is produced from at least two electrically coupled bulk acoustic wave resonators arranged in a so-called ladder structure. These two resonators have an offset in their resonance frequencies which is obtained by dimensioning a mass overload layer formed at the lower electrode or the upper electrode of one of the resonators.

[0069] The total thickness of the mass overload layer determines the frequency shift between the resonant frequencies of the two resonators. The thickness control (tolerance) determines the accuracy of this shift.

[0070] If broadband performance is required for the filter, it is necessary to form a mass overload layer thickness of the order of 100 nm to 150 nm with a tolerance of less than 2 nm, without damaging either the piezoelectric layer or the electrodes. By "broadband performance" is meant a frequency of operation operation between 3.3 GHz and 6 GHz, a bandwidth between 330 MHz and 600 MHz, losses less than 3 dB in the bandwidth and greater than 45 dB in the rejection bands.

[0071] In the remainder of the description, the resonator of the filter not receiving a mass overload layer will be arbitrarily called "first resonator", and the resonator of the filter receiving the mass overload layer will be arbitrarily called "second resonator". With reference to the "Background of the invention" section, the first resonator is considered to be the series S resonator, and the second resonator is considered to be the parallel P resonator. Furthermore, the first and second resonators are FBAR type or SMR type bulk acoustic wave resonators.

[0072] The method according to the invention is remarkable in particular in that the second resonator can receive a mass overload layer at one and / or the other of its electrodes.

[0073] Figures 3A to 31 schematically represent steps of a method 300 according to a first embodiment of the invention.

[0074] According to this first embodiment and with reference for example to [Fig.31], the first and second resonators 1, 2 are of the FBAR type, and the second resonator 2 receives a mass overload layer 20 at its lower electrode 32.

[0075] The first step S301 illustrated [Fig.3A] consists of providing a donor substrate 10 comprising on its upper part a layer 13 of piezoelectric material, called piezoelectric layer 13. The piezoelectric layer 13 has a first face 131 and a second face 132 (also called upper face 132) and comprises a first zone 133 in which the first resonator 1 will be defined and a second zone 134 in which the second resonator 2 will be defined.

[0076] The second zone 134 may comprise a zone 135, called active zone 135, predefining the second resonator more precisely. The second zone 134 is laterally larger than the active zone 135.

[0077] It should be noted that areas 133, 134 and 135 do not assume the exact dimensions of resonators 1,2.

[0078] Preferably, the donor substrate 10 is a piezoelectric on insulator substrate 10 or POI for “piezoelectric on insulator” according to the English terminology. The POI substrate 10 comprises a first substrate layer 11, for example made of silicon, a dielectric layer 12, for example made of silicon oxide, and the piezoelectric layer 13.

[0079] The piezoelectric layer 13 is advantageously formed from a monocrystalline piezoelectric material. The piezoelectric layer 13 is then formed by a known layer transfer technique on the POI substrate 10.

[0080] The piezoelectric layer 13 is for example a layer of lithium niobate having a Y+36° crystal cut and a thickness of 500 nm. Thus, the piezoelectric layer 13 is capable of promoting the propagation of longitudinal waves with a high propagation speed (7316 m / s) allowing the synthesis of a filter operating at frequencies above 4 GHz. Naturally, other crystal orientations may be suitable, for example Z, or X, or Y+163° crystal cuts. The thickness of the piezoelectric layer 13 is then adapted according to the chosen crystal orientation and the desired performance for the filter.

[0081] Other monocrystalline piezoelectric materials may be chosen, such as: lithium tantalum LiTaO3, potassium niobate KNbO3, and monocrystalline scandium Al,xScxN.

[0082] The second step S302 illustrated [Fig.3B] follows the first step S301. It consists of forming a mass overload pattern 20 on the first face 131 of the piezoelectric layer 13, at the level of the second zone 134.

[0083] The formation of the mass overload pattern 20 comprises the sub-steps S302A, S302B, S302C, and S302D illustrated respectively in [Fig.4A], in [Fig.4B], in [Fig.4C], and in [Fig.4D].

[0084] The first sub-step S302A consists of depositing on the first face 131 of the piezoelectric layer 13 a sacrificial layer 210 so as to cover the entire surface of the piezoelectric layer 13. The sacrificial layer 210 is preferably a photosensitive resin.

[0085] The second sub-step S302B consists of defining a loading pattern 220 through the deposited sacrificial layer 210 and at the level of the second zone 134. The loading pattern 220 is an opening formed in the sacrificial layer 210, over its entire thickness. It is for example defined by insolation and chemical revelation of the sacrificial layer 210.

[0086] At the end of this sub-step S302B, the sacrificial layer 210 covers the first face 131 with the exception of the second zone 134 which is located at the level of the loading pattern 220.

[0087] The third sub-step S302C consists of depositing a mass overload layer 230 over the entire surface of the sacrificial layer 210 structured with the loading pattern.

[0088] The mass overload layer 230 is formed from a metallic material, for example aluminum.

[0089] The metallic material chosen for the mass overload layer 230 is advantageously identical to the material chosen to form the lower electrode 32.

[0090] The thickness of the mass overload layer is for example 150 nm.

[0091] At the end of this sub-step S302C, the mass overload layer has reached the first face 131 of the piezoelectric layer 13 only at the level of the pattern of loading 220, and covered the surface of the sacrificial layer 210 where the loading pattern is not present.

[0092] The fourth sub-step S302D consists of removing, by a technique called lifting (or “lift-off” according to the English terminology), the stack formed by the sacrificial layer 210 and the mass overload layer 230. More precisely, the sacrificial layer 210 is removed by dissolving in a solvent (for example a solvent adapted to the resin chosen for the sacrificial layer 210). By removing itself, the sacrificial layer 210 lifts the mass overload layer covering it.

[0093] At the end of sub-step S302D, the mass overload layer 230 remains only at the level of the second zone 134, where it was in direct contact on the first face 131 of the piezoelectric layer 13, and forms the mass overload pattern 20 there.

[0094] Thus carried out, step S302 of forming the mass overload pattern 20 preserves the surface of the piezoelectric layer 13. Indeed, this step S302 does not require any etching step (chemical or physical) of a metal layer on the first face 131 of the piezoelectric layer 13. The absence of etching makes it possible to avoid damage such as cracks or roughness on this piezoelectric layer 13, in particular if the latter is formed from lithium niobate.

[0095] It should also be noted that the state-of-the-art methods generally do not use this step S302 because aluminum nitride, which is the most commonly used piezoelectric material, is damaged by the solvent used to dissolve the sacrificial layer 210. This is not the case with the chosen piezoelectric materials, which remain crack-free and smooth after the application of the solvent.

[0096] The second step S302 is followed by a third step S303, illustrated [Fig.3C], consisting of forming the lower electrode 31 of the first resonator 1 and the lower electrode 32 of the second resonator 2.

[0097] Step S302 therefore comprises depositing a layer of a metallic material, this being chosen (but not limited to) from the following: aluminum, molybdenum, tungsten, ruthenium, iridium.

[0098] For example, the metallic material (and therefore the lower electrodes 31, 32) is aluminum.

[0099] The thickness of the layer of metallic material (and therefore of the lower electrodes 31, 32) is for example 100 nm.

[0100] The deposition of the metal layer is followed by a photolithography operation - comprising the spreading of a resin, its exposure and then the revelation of patterns -, a wet etching operation in a solution adapted to the metal layer, and a resin removal operation, all to define the shape of the lower electrodes 31, 32 of the first and second resonators 1, 2. The lower electrode 31 of the first resonator 1 can be connected to the lower electrode 32 of the second resonator 2 as illustrated in [Fig.3C], or it can be separated from this lower electrode 32 of the second resonator 2.

[0101] It should be noted that the etching operation is carried out outside the first zone 133 defined for the first resonator 1 and outside the active zone 135 predefined for the second resonator 2.

[0102] When the second zone 134 is larger than the active zone 135, the etching operation to define the lower electrodes 31, 32 is also carried out at the level of the mass overload pattern 20, in the zone 134a of the second zone 134 adjacent to the active zone 135.

[0103] When the mass overload layer 230 is formed from a material identical to the lower electrodes 31, 32 (as illustrated in [Fig. 3C]), this etching operation is carried out in a single step. This simplifies the process because it is not necessary to provide different etching chemistries. Furthermore, this avoids the risk of forming intermetallic compounds on the piezoelectric layer near the second resonator 2.

[0104] At the end of this step S303, the lower electrodes 31, 32 of the first and second resonator 1, 2 are therefore well defined and the piezoelectric layer 13 is preserved from intermetallic contaminants at the level of the first zone 133 and the active zone 135.

[0105] Step S303 is followed by a step S304 illustrated in [Fig.3D], making it possible to begin the formation of a mechanical isolation structure 41 (see [Fig.31]) of cavity type at the level of the first zone 133, and a mechanical isolation structure 42 of cavity type at the level of the second zone 134.

[0106] For this, step S304 consists of forming a box 410, called a release box on and around the lower electrode 31 of the first resonator 1, and another release box 420 on and around the lower electrode 32 of the second resonator 2.

[0107] For this, a deposit of a sacrificial layer with a thickness of, for example, 300 nm is carried out. The sacrificial layer is preferably formed from amorphous silicon. Then, photolithography, dry etching, and then resin removal are successively carried out to define the shape of the release boxes 410, 420.

[0108] Step S304 ends with the deposition of a dielectric layer 430, for example of silicon oxide, for example by a plasma-enhanced chemical vapor deposition technique (or PECVD for “Plasma Enhanced Chemical Vapor Deposition” according to the English terminology), then by the chemical-mechanical polishing of the upper surface 431 of the dielectric layer formed.

[0109] At the end of this step S304, the first part 1a of the first resonator 1 and the second part 2a of the second resonator 2 are formed on the first face 131 of the piezoelectric layer 13. The donor substrate 10 further has a flat and smooth free surface 431, corresponding to the upper surface 431 of the formed dielectric layer.

[0110] Step S305 which follows step S304 is illustrated in [Fig.3E]. It aims to assemble by bonding the donor substrate 10 obtained at the end of step S304 on a receiving substrate 50, with the lower electrodes 31, 32 (and the release boxes 410, 420) arranged between the receiving substrate 50 and the donor substrate 10.

[0111] The receiving substrate 50 is a silicon support substrate 51 of high resistivity (at least 3 kQ.cm, preferably more than 10 kQ.cm) covered with a dielectric layer 52, preferably of silicon oxide, smoothed by chemical-mechanical polishing.

[0112] The assembly step S305 firstly consists of turning over the donor substrate 10 obtained at the end of step S304 to transfer the planarized free face 431 of the device formed by the donor substrate 10 (see [Fig.3D]) onto the upper face 520 of the receiving substrate 50.

[0113] Then, direct bonding is carried out by a heat treatment (or annealing) called consolidation of the bonding.

[0114] The next step is step S306 illustrated in [Fig.3F]. This step S306 consists of removing, on the assembly formed in step S305, the silicon substrate layer 11 and the dielectric layer 12 of the donor substrate 10. For this, mechanical lapping then chemical etching in a solution comprising tetramethylammonium hydroxide (or TMAH for “tetramethylammonium hydroxide” according to the English terminology) are carried out on the silicon substrate layer 11, and chemical etching based on a solution comprising hydrofluoric acid (HF) is carried out on the dielectric layer 12.

[0115] At the end of step S306, the receiving substrate 50 comprises the first part 1a of the first resonator 1, as well as the first part 2a of the second resonator 2 and has in the upper part a free face corresponding to the second face 132 of the piezoelectric layer 13.

[0116] With reference to [Fig.3G], step S307 consists of forming openings 136, 137 through the piezoelectric layer 13 from the second face 132. One of the openings 136 reaches the lower electrodes 31, 32, and the other opening 137 reaches the release box 420. Another opening (not shown in [Fig.3G]) reaches the release box 410.

[0117] To do this, photolithography is carried out, then etching of the piezoelectric layer by ion beam (or IBE for “Ion Beam Etching” according to English terminology), then removal of the resin.

[0118] Step S308 following step S307 is illustrated in [Fig.3H]. It consists of forming the upper electrode 33 of the first resonator 1 as well as the upper electrode 34 of the second resonator 2.

[0119] Analogously to step S303 of forming the lower electrodes 31, 32, step S308 comprises deposition of a layer of a metallic material, this being chosen (but not limited to) from the following: aluminum, molybdenum, tungsten, ruthenium, iridium.

[0120] The thickness of the layer of metallic material (and therefore of the upper electrodes 33, 34) is for example 100 nm.

[0121] The upper electrodes 33, 34 are advantageously formed from the same metallic material as the lower electrodes 31, 32, for example aluminum.

[0122] The deposition of the metal layer is followed by a photolithography operation comprising the deposition of a resin, a wet etching operation in a solution adapted to the metal layer, and a resin removal operation to define the shape of the upper electrodes 33, 34 of the first and second resonators 1, 2. With reference to [Fig. 3H], the upper electrode 33 of the first resonator 1 is separated from the upper electrode 34 of the second resonator 2.

[0123] The following step S309, illustrated in [Fig.31], consists of the release of the release boxes 410,420 by dissolution of the sacrificial layer of amorphous silicon by gaseous XeF2.

[0124] Thus, the release boxes fill with air and form the air cavities 41, 42 of the first and second resonator 1, 2.

[0125] At the end of step S309, the first part 1a, 1b of the first resonator 1, and the second part 2a, 2b of the second resonator 2 are produced, and the bandpass filter is produced.

[0126] Figures 5A to 51 schematically represent steps of a method 500 of production according to a second embodiment of the invention.

[0127] According to this second embodiment and with reference for example to [Fig.51], the first and second resonators 1, 2 are of the SMR type, and the second resonator 2 receives a mass overload layer 21 at its upper electrode 34.

[0128] The method 500 comprises steps S501, S502, S503, S504, S505, S506, S507, S508 and S509 shown respectively in [Fig.5A], in [Fig.5B], in [Fig.5C], in [Fig.5D], in [Fig.5E], in [Fig.5F], in [Fig.5G], in [Fig.5H] and in [Fig.51].

[0129] Steps S501, S502, S505, S506 and S509 are respectively analogous to steps S301, S303, S305, S306 and 308 of method 300 according to the first embodiment.

[0130] Step S507, illustrated in [Fig.5G] differs from step S307 (cf. [Fig.3G]) only in that there are only openings 136 reaching the lower electrodes 31, 32 and intended to serve as an electrical via through the piezoelectric layer 13.

[0131] The second embodiment (method 500) differs from the first embodiment (method 300) in two ways.

[0132] Firstly, step S301 of forming a mass overload pattern 20 on the first face 131 of the piezoelectric layer 13 is not carried out but is replaced by step S508 of forming a mass overload pattern 21 on the second face 132 (see [Fig.5F]) of the piezoelectric layer 13, at the level of the second zone 134.

[0133] This step S508 is illustrated in [Fig.5H]. It is carried out as an extension of step S507 of forming an opening 136 through the piezoelectric layer 13, and before step S509 of forming the upper electrodes 33, 34 of the resonators 1, 2.

[0134] The mass overload pattern 21 may cover the opening 136, the latter being formed in the previous step S507 and being intended to connect the lower electrode 32 of the second resonator 2. Thus, the mass overload pattern 21 serves as a conductive via at the same time as it makes it possible to thicken the upper electrode 34.

[0135] Step S508 follows the same substeps S302A to S302D described previously and shown in [Fig.4A], 4B, 4C and 4D. Thus, the formation of the mass overload pattern 21 is carried out without damaging the second face 132 of the piezoelectric layer 13.

[0136] Secondly, steps S304, S307 and S309 intended to form the air cavities 41, 42 (these making it possible to form FBAR type resonators 1, 2) are replaced by steps S503 and S504. These are intended to form the Bragg structures 43, 43 (see [Fig. 5D]) making it possible to form the SMR type resonators 1, 2 (see [Fig. 51]).

[0137] Step S503, illustrated in [Fig.5C], is intended to begin the formation of the Bragg structures 43, 43.

[0138] Specifically, step S503 consists of forming a stack of layers 43a on the lower electrode 31 of the first resonator 1 and a stack of layers 44a on the lower electrode 32 of the second resonator 2.

[0139] Step S503 therefore comprises the following successive sub-steps: • Deposition of a first layer 431 of silicon oxide over the entire surface of the piezoelectric layer 13, the first layer 431 covering the lower electrodes 31, 32 of the first and second resonator 1, 2. • Deposition of a second layer 432 of tungsten on the first layer 431. A bonding layer of titanium, titanium oxide, titanium nitride or any other material known from the state of the art may be deposited beforehand. • Definition of the second layer 432 to begin the formation of the stack 43a at the level of the first zone 133 and the second em stacking 44a at the level of the second zone 134. For this, a combination of photolithography and dry etching, for example by reactive ion etching (or RIE for “Reactive Ion Etching” according to English terminology) is carried out. • Deposition of a third layer 433 of silicon oxide on the second layer 432. • Deposition of a fourth layer 434 of tungsten on the third layer 433. As previously, a bonding layer of titanium, titanium oxide, titanium nitride or any other material known from the state of the art can be deposited beforehand. • Definition of the fourth layer 434 to continue the first stack 43a and the second stack 44a by a combination of photolithography and dry etching. • Removal of the resin used for photolithography.

[0140] The first, second, third and fourth layers 431,432,433 and 434 form the Bragg mirrors of the Bragg structures 43,44.

[0141] Alternatively, it is possible to form the Bragg structures 43 and 44 by carrying out only a single step of simultaneous etching of the metal layers 432 and 434 as well as the intermediate dielectric layer 433. For this, the following succession of sub-steps is used: • Deposition of a first layer 431 of silicon oxide over the entire surface of the piezoelectric layer 13, the first layer 431 covering the lower electrodes 31, 32 of the first and second resonator 1, 2. • Deposition of a second layer 432 of tungsten on the first layer 431. A bonding layer of titanium, titanium oxide, titanium nitride or any other material known from the state of the art may be deposited beforehand. • Deposition of a third layer 433 of silicon oxide on the second layer 432. • Deposition of a fourth layer 434 of tungsten on the third layer 433. As previously, a bonding layer of titanium, titanium oxide, titanium nitride or any other material known from the state of the art can be deposited beforehand. • Definition of the Bragg mirrors by photolithography and ion beam etching of the fourth, third and second layers 434, 433 and 432 to continue the first stack 43a and the second stack 44a. • Removal of the resin used for photolithography.

[0142] Step S504, illustrated in [Fig.5D], consists of deposition of a thick layer 435, of 2.5 pm for example by PECVD, of silicon oxide on the donor substrate 10.

[0143] The silicon oxide layer 435 completely covers the stacks 43a, 44a formed in step S503 and has an upper surface 435a.

[0144] A counter mask may be employed at this step S504. It comprises a combination of photolithography and partial etching of the silicon oxide layer 435 and resist removal to equalize the level of the upper surface 435a between the top of the Bragg mirrors and the surrounding areas.

[0145] This surface is then planarized by polishing with a stop on the fourth layer 434.

[0146] Thus, the method 500 according to this second embodiment relates to the production of a bandpass filter using SMR type resonators, and comprises, before the formation of the upper electrodes 33, 34, the formation of a mass overload pattern 21 interposed between the piezoelectric layer 13 and the upper electrode 34 of the second SMR resonator. The advantage of proceeding in this way compared to arranging the mass overload layer between the piezoelectric layer 13 and the lower electrode 31 is to simplify the polishing sub-step of step 504, since the absence of the mass overload layer under the lower electrode ensures that the upper surfaces of the structures 43 and 44 are located at the same height.

[0147] Figures 6A to 6J schematically represent steps of a method 600 of production according to a third embodiment of the invention.

[0148] According to this third embodiment, the first and second resonators 1, 2 are of the FBAR type (see [Fig.6J]), and the second resonator 2 receives a mass overload layer 20 at its lower electrode 32 and a mass overload layer 21 at its upper electrode 34. Advantageously, these mass overload layers 21, 22 are formed from the same metallic material, for example aluminum, and are of identical thickness, equal to half the total thickness necessary to achieve the desired frequency shift for the resonance frequency of the second resonator 2.

[0149] The method 600 comprises steps S601, S602, S603, S604, S605, S606, S607, S608, S609 and S610 shown respectively in [Fig.6A], in [Fig.6B], in [Fig.6C], in [Fig.6D], in [Fig.6E], in [Fig.6F], in [Fig.6G], in [Fig.6H], in [Fig.61] and in [Fig.6J],

[0150] The first seven steps S601, S602, S603, S604, S605, S606, S607 are identical to the first seven steps S301, S302, S303, S304, S305, S306, S307 illustrated in Figures 3A, 3B, 3C, 3D, 3E, 3F, and 3G.

[0151] Steps S601 to S607 thus make it possible to arrive at the same device (see [Fig.6G]) as that represented in [Fig.3G].

[0152] Step S610 illustrated in [Fig.6J] is otherwise identical to step S309 illustrated in [Fig.3I],

[0153] The method 600 according to the third embodiment is distinguished from the method 300 according to the first embodiment in that it comprises a step S608 of forming one or more mass overload patterns 21 on the second face 132 of the piezoelectric layer 13, at the level of the second zone 134 (see [Fig.6H]). This step S608 is analogous to the step S507 shown in [Fig.5G] of the method 500 according to the second embodiment.

[0154] Advantageously, the mass overload patterns 20 and 21 are formed from the same metallic material and are of identical thickness. Thus, the mass overload is distributed and arranged symmetrically with respect to the piezoelectric layer.

[0155] This third embodiment finds a particular advantage when one wishes to synthesize a very wide band filter (for example 600 MHz). Indeed, for these bandwidth values, the frequency shift requires the use of mass layer thicknesses greater than 150 nm. Such a thickness, if it is achieved with only one mass overload pattern, can cause an asymmetry in the stack forming the second resonator 2. This asymmetry favors the excitation of asymmetric vibration modes, such as the 2nd order resonance, which cause poorer rejection, i.e. lower attenuation, outside the passband. By distributing the overload layer thickness symmetrically over two mass overload patterns, the third embodiment overcomes this drawback.

[0156] In a manner common to the three embodiments which have just been described, optional steps can be carried out at the end of the method, that is to say after step S309 of method 300, or after step S509 of method 500, or after step S610 of method 600.

[0157] These steps, not shown, consist, among other things, • to add a passivation layer above the upper electrodes 33, 34, on the second face 132 (see [Fig. 31] for example), this passivation layer defining the last layer (or upper layer) of the filter. The passivation layer makes it possible to protect the resonators 1, 2 from the ambient environment and thus to improve their reliability in the long term. The passivation layer is formed of a dielectric, for example silicon dioxide. • to form a metallic layer, called an over-metallization layer on the second face 132 (see [Fig. 31]), this only at the level of the upper electrode 33 of the first resonator 1 and only at the level of the upper electrode 34 of the second resonator 2. At the level of the resonators 1, 2, this over-metallization layer does not in any way coat the areas located outside the upper electrodes 33, 34. The formation of the metallic layer comprises a combination of photolithography, etching and removal of resin. It aims to consolidate the electrodes 33,34 electrically (the metallic layer limits the resistive losses of the upper electrodes 33,34).

[0158] For FBAR type resonators, it is also possible to provide for forming a passivation layer below the lower electrodes 31, 32, in addition to the passivation layer described above, in order to encapsulate the filter on both sides.

[0159] The various embodiments describe a filter comprising two bulk acoustic wave resonators. Naturally, the method according to the invention applies to a filter comprising several bulk acoustic wave resonators, for example between three and nine resonators.

[0160] The production method (300,500,600) according to the invention makes it possible to produce a wideband filter adapted to new generations of mobile communication by improving the techniques of the prior art, in particular by making it possible to use monocrystalline piezoelectric materials and by making it possible to modify more significantly the frequency of a bulk acoustic wave resonator (of the FBAR or SMR type), while preserving the electromechanical coupling coefficient and the electrodes of the resonators.

Claims

Claims

1. A method (300,500,600) of producing a bandpass filter comprising a first bulk acoustic wave resonator (1) and a second bulk acoustic wave resonator (2), the resonant frequency of the second resonator being offset from the resonant frequency of the first resonator by a predetermined offset, the method (300,500,600) comprising the steps of: - providing (S302, S502, S602) a piezoelectric substrate (10) on insulator, called donor substrate (10), comprising in the upper part a piezoelectric layer (13), - forming (S303, S502, S603) a lower electrode (31) of the first resonator (1) on a first predefined area (133) of the piezoelectric layer (13), and a lower electrode (32) of the second resonator (2) on a second predefined area (134) of the piezoelectric layer (13), - assembly (S305, S505, S605) by bonding the donor substrate (10) to a receiving substrate (50), such that the lower electrodes (31, 32) of the first and second resonators (1, 2) are arranged between the receiving substrate (50) and the donor substrate (10), - removal (S306, S606), in the assembly of the receiver substrate (50) and the donor substrate (10), of the donor substrate (10) with stop on the piezoelectric layer (13), - formation (S308, S509, S609) on the piezoelectric layer (13), of an upper electrode (33) of the first resonator (1) at the level of the first zone (133), and of an upper electrode (34) of the second resonator (2) at the level of the second zone (134), the formation (S303, S502, S603) of the lower electrodes (31, 32) being preceded by a step of forming (S302, S602) a mass overload pattern (20) at the level of the second zone (134), called mass overload pattern (20) of the lower electrode, and / or the formation (S308, S509, S609) of the upper electrodes (33, 34) being preceded by a step of forming (S508, S608) a mass overload pattern (21) at the level of the second zone, called mass overload pattern (21) of mass overload of the upper electrode, the total thickness of the mass overload pattern(s) (20, 21) being chosen to shift the resonant frequency of the second resonator with the predetermined shift, the formation (S302, S602, S508, S608) of each mass overload pattern (20, 21) comprising the following sub-steps: - deposition (S302A, S302B) of a sacrificial layer (210) over the entire surface of the piezoelectric layer (13), - definition of an opening (220) through the sacrificial layer at the second zone (134), the opening opening onto the piezoelectric layer (13) at said second zone (134), - deposition (S302C) of a mass overload layer (230) so as to cover the piezoelectric layer only at the opening (136) and cover the sacrificial layer (210) outside the opening (136),- removal (S302D) of the stack formed by the sacrificial layer (210) and the mass overload layer (230) by removal by lift-off of the sacrificial layer (210), said removal leaving the mass overload layer (230) on the piezoelectric layer (13) only at the level of the second zone (134) to form the mass overload pattern (21,21).,

2. The method (300,500,600) of claim 1 wherein the lower electrode mass overload pattern (20) is formed of a material identical to the upper electrode mass overload pattern (21) and has a thickness identical to said upper electrode mass overload pattern (21).

3. Method (300,500,600) according to one of claims 1 to 2 in which the mass overload pattern (20) of the lower electrode is formed of a material identical to the material of the lower electrodes (31,32), and the mass overload pattern (21) of the upper electrode is formed of a material identical to the material of the upper electrodes (33,34), and in which the second zone (134) is laterally more extended than the second resonator (2).

4. Method (300,500,600) according to one of claims 1 to 3 wherein the piezoelectric layer (13) is formed from a monocrystalline piezoelectric material.

5. The method (300,500,600) of claim 4 wherein the single-crystal piezoelectric material is selected from one of the following materials: lithium niobate, lithium tantalum, potassium niobate, and single-crystal scandium.

6. Method (300,500,600) according to one of claims 1 to 5 in which the lower (31,32) and upper (33,34) electrodes are formed from one of the following materials: aluminum, molybdenum, tungsten, ruthenium, iridium.

7. Method (300,500,600) according to one of claims 1 to 6 comprising a step of forming (S503) a Bragg structure (42) on the lower electrode (31) of the first resonator (1) and a Bragg structure (43) on the lower electrode (32) of the second resonator (2), said step of forming (S503) the Bragg structures (43,44) being carried out between the formation (S502) of the lower electrodes and the assembly step (S505).

8. Method (300,500,600) according to one of claims 1 to 6 comprising steps (S304, S306, S309) for forming an air cavity (41) of the first resonator (1) and an air cavity (42) of the second resonator (2), said steps (S304, S306, S309) being the following: - between the formation (S303) of the lower electrodes (31, 32) and the assembly step (S305), forming (S304) a box (410) on and around the lower electrode (31) of the first resonator (1), and a box (420) on and around the lower electrode (32) of the second resonator (2), the boxes (410,420) comprising a sacrificial layer, - after the assembly step (S305) and before the formation (S308) of the upper electrodes, formation (S306) through the piezoelectric layer (13) of an opening (137) to reach the box (410) located on and around the lower electrode of the first resonator (1),and an opening to reach the box (420) located on and around the lower electrode of the second resonator (2), - after the step of forming (S308) the upper electrodes, removing (S309) the sacrificial layer through the openings to release the boxes (410,420) and fill them with air.

9. Method (300,500,600) according to one of claims 1 to 8, comprising, after the step of forming (S309, S508, S609) the upper electrodes (33,34), an additional step of depositing on the upper face (132) of the bandpass filter and only on the upper electrodes (33,34), a metallic layer, called the over-metallization layer.

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