Conveyor roller, conveyor device, vacuum assembly

Abstract

Conveyor roller, conveyor device, vacuum assembly The conveyor roller (100) has a support roller (110) and several tubular conveyor segments (120). Each conveyor segment (120) has a peripheral wall (121), is traversed by a support receiving space (122) for receiving the support roller (110) in the conveyor segment (120), and has a cavity (123) adjacent to the support receiving space (122), which spatially separates the peripheral wall (121) from the support receiving space (122). Figure 1

Description

Title of the invention: Conveyor roller, conveyor device, vacuum assembly

[0001] Various embodiments relate to a transport roller, a transport device, and a vacuum assembly.

[0002] In general, a substrate may be processed and transported within a vacuum chamber, for example by means of a plurality of transport rollers. For example, the plurality of transport rollers may respectively have a receiving space in which the substrate may be received. When the plurality of transport rollers transport the substrate, rotation of a first transport roller allows the substrate to be transported from the first transport roller to a second transport roller, and so on. Furthermore, a temperature of the substrate may be changed during and / or due to the processing, for example the substrate may be heated.

[0003] According to various embodiments, it has been recognized that a heated substrate can deliver thermal energy to the transport rollers while the substrate is being transported by them. It has also been recognized that the transport rollers may consequently heat up and expand, which may hinder the transport process.

[0004] It has clearly been found, among other things, that the heated substrate can deliver thermal energy to the first transport roller and that the first transport roller can consequently expand. As a result, a position of the substrate on the first transport roller relative to the second transport roller can change, which can lead to incorrect positioning. If the substrate is now transported from the heated first transport roller to the second transport roller, which is not heated, it may happen that the substrate does not reach the second transport roller in the desired position. Instead, the substrate may, for example, hit the second transport roller or at least partially miss a subsequent processing zone. As a result, the substrate, the second transport roller or other components of the vacuum system may, for example, be damaged.Due to improper substrate positioning, a process may need to be interrupted in order to correctly reposition the substrate.

[0005] According to various embodiments, a conveying roller is provided, which has a support roller and a plurality of tubular conveying segments. The plurality of tubular conveying segments may respectively have a peripheral wall (e.g., an outer wall) and a support receiving space in which the support roller may be received, for example, by sliding the plurality of transport segments onto the support roller. For example, the support receiving space may form a form fit with the support roller. Furthermore, the transport segments may have a cavity, which is arranged between the support receiving space and the peripheral wall.

[0006] Thus, according to various embodiments, a transport roller is provided, the transport segments of which promote thermal decoupling of the substrate, so that heat transport from the substrate to the support roller and thus thermal expansion of the support roller are prevented. For example, a transport roller is thus provided which, compared to conventional transport rollers, has a lower heat transmission between the substrate and the transport roller. Heat transmission is prevented, for example, by the fact that only the transport segments have direct physical contact with the substrate and that the support roller is spatially separated at least in sections from the transport segments by means of a cavity in which conduction is prevented.

[0007] Furthermore, the modular structure of the transport roller, consisting of a support roller and a plurality of transport segments, makes it possible, in the event of damage to one of the plurality of transport segments, to replace only the damaged transport segment, and not the entire transport roller. This allows, for example, faster and less expensive repair and / or replacement with another set of transport segments optimized, for example, for another substrate (for example, another substrate size, another substrate material).

[0008] Furthermore, the modular structure of the transport roller, consisting of a support roller and several transport segments, makes it easier to adapt the geometry of the transport roller, for example to a change in the substrate. For example, a set of transport segments of the first geometry can be exchanged for a set of transport segments of the second geometry. Alternatively or additionally, the number of transport segments carried by the support roller can be changed.

[0009] We can see that

[0010] [Fig.l] [Fig.l] shows different aspects of a transport roller in a schematic view;

[0011] [Fig.2] [Fig.2] different aspects of a transport roller in a sectional view schematic;

[0012] [Fig.3] [Fig.3] different aspects of a transport roller in a schematic perspective view;

[0013] [Fig.4] [Fig.4] different aspects of a transport roller in a sectional view schematic;

[0014] [Fig 5A] [Fig 5B] Figures 5A and 5B different aspects of a transport roller showing a set of first transport segments in a schematic side view and a sectional view;

[0015] [Fig 6A] [Fig 6B] Figures 6A and 6B different aspects of a transport roller showing a set of second transport segments in a schematic side view and a sectional view;

[0016] [Fig 7A] [Fig 7A] various aspects of a conveyor roller showing a set of first conveyor segments in a schematic side view and a sectional view; and

[0017] [Fig 7B] [Fig 7B] various aspects of a conveyor roller showing a set of second conveyor segments in a schematic side view and a sectional view.

[0018] In the following detailed description, reference is made to the accompanying drawings which form part thereof and in which are shown, by way of illustration, specific embodiments in which the invention may be implemented. In this regard, directional terminology such as "top", "bottom", "front", "back", "forward", "back", etc. is used with reference to the orientation of the figure(s) depicted. Since the components of the embodiments may be positioned in a number of different orientations, the directional terminology is used for illustrative purposes and is in no way restrictive. It is understood that other embodiments may be used and that structural or logical modifications may be made without departing from the scope of protection of the present invention.It is understood that the features of the various embodiments described herein by way of example may be combined with each other, unless specifically indicated otherwise. The following detailed description should therefore not be interpreted in a restrictive sense, and the scope of protection of the present invention is defined by the appended claims.

[0019] In the context of this description, the terms "connected", "connected" and "coupled" are used to describe both a direct and indirect connection (e.g., ohmic and / or electrically conductive, e.g., an electrically conductive connection), a direct or indirect connection as well as a direct or indirect coupling. In the figures, identical or similar elements are designated by identical reference signs, where appropriate.

[0020] According to different embodiments, the term "coupled" or "coupling" can be understood in the sense of a connection and / or an interaction (e.g. mechanical, hydrostatic, thermal and / or electrical), e.g. direct or indirect. Several elements can for example be coupled together along an interaction chain along which the interaction can be exchanged, for example a fluid (we then also speak fluid coupling). For example, two elements coupled to each other may exchange an interaction with each other, for example a mechanical, hydrostatic, thermal and / or electrical interaction. A coupling of several vacuum components (e.g. valves, pumps, chambers, etc.) with each other may have the fact that these are fluidically coupled with each other. According to different embodiments, "coupled" may be understood in the sense of a mechanical (e.g. physical or bodily) coupling, for example by means of direct physical contact. A coupling may be designed to transmit a mechanical interaction (e.g. force, torque, etc.).

[0021] The term "fluid" may be understood as a material that continuously deforms under the influence of shear forces, for example by conforming to the shape of a container. For example, it may offer no resistance to shear or only resistance to flow (i.e., it has a finite viscosity). For example, the fluid may be subject to the flow law above the yield stress (DIN 1342, version March 2023). A fluid may have or consist of a gas and / or a liquid, and may optionally have solid particles. A fluid, as used herein, may have or consist of a paste, such as a thermally conductive paste. A paste may mean a suspension (solid-liquid mixture). A thermally conductive paste may mean a paste that improves the heat transmission between two objects, such as a substrate and a frame, compared to air.

[0022] The term "fluidic" relating to a connection of two objects (e.g., areas or building elements) to each other may be understood to mean that the connection of the two objects is designed to communicate a hydrostatic interaction between the two objects by means of a fluid, for example to communicate an exchange of the fluid between the two objects. The connection may for example be implemented by means of direct contact between them, a conduit (e.g., of the tube and / or pipe type) or another fluid-permeable building element that transmits the hydrostatic interaction. The term "fluid-tight" with respect to a connection of two objects may be understood as "non-fluidic".

[0023] According to various embodiments, a vacuum chamber can be or become provided by means of a chamber housing in which one or more chambers can be or become provided. The chamber housing can, for example, be coupled to a pump assembly, for example a vacuum pump assembly (for example gas), for providing a negative pressure or a vacuum (vacuum chamber housing) and be stably designed such that it resists the action of air pressure in the pumped state. The pump assembly, which has for example at least one vacuum pump (for example a high vacuum pump, for example a turbo- lecular), may allow some of the gas to be pumped from inside a process chamber, for example from the process space, into the vacuum chamber. Accordingly, one or more vacuum chambers may be provided in a chamber housing. In other words, the chamber housing may be designed as a vacuum chamber housing or a coating chamber may be designed as a vacuum chamber.

[0024] Thermal conductivity may be understood, according to various embodiments, as a thermal conductivity greater than 25 W / (mK) (watts per meter and kelvin). Examples of thermally conductive material (also called material) have: a metallic material, for example a material which has a metal or which is essentially made of it (for example at more than 95% by weight).

[0025] The term "fit" can be understood as an indication of the dimensional relationship between two construction elements to be joined (e.g. one into the other), for example with respect to their respective joining point. For example, both construction elements have the same contour at the joining point, once as an inner shape, once as an outer shape. When joining the two construction elements (e.g. one into the other), these are brought into contact by their joining points, so that the joining points pass in front of each other, e.g. by sliding over each other. With regard to the fit, the following groups are distinguished: a clearance fit (in which, for example, a gap remains between the joining points) and an oversized fit (also called an interference fit, in which the joining requires a geometric deformation of the joining point).If the tolerance range during the manufacture of the two building elements allows for both clearance and oversize, we speak of a transition fit, which belongs to one of these two groups depending on the actual dimensions obtained. In this case, a clearance fit of type H7 / h6 is preferably used, which favors the fact that the building elements can be assembled by hand.

[0026] [Fig.l] illustrates various aspects of a transport roller 100 in a schematic view. The transport roller may have a support roller 110 and a plurality of tubular transport segments 120.

[0027] According to various embodiments, each of the plurality of transport segments 120 may have a peripheral wall 121. For example, the peripheral wall 121 may be made in a tubular manner.

[0028] According to various embodiments, each of the plurality of transport segments 120 may have a media receiving space 122 (shown by lines in [Fig. 1]) extending therethrough, which is designed to receive a media roll 110 in the transport segment 120. This makes it possible, for example, to insert the media roll 110 in each of the plurality of transport segments 120. For example, each of the plurality of transport segments 120 can thus be threaded onto the support roller 110, for example individually. This further promotes, for example, the fact that the plurality of transport segments 120 can be manufactured from a different material than the support roller 110. Furthermore, defective transport segments can be replaced individually with intact transport segments. Maintenance costs can thus, for example, be reduced. According to different embodiments, the support receiving space 122, for example a diameter of the support receiving space, can be delimited respectively by an area of ​​a bearing section 124, for example an opening within the bearing section.

[0029] According to various embodiments, each of the plurality of transport segments 120 may further have a cavity 123 adjacent to the media receiving space 122, for example surrounding it. For example, the cavity 123 may spatially separate the peripheral wall 121 from the media receiving space 122, for example in the radial direction. This makes it possible, for example, to reduce a thermal coupling between the peripheral wall 121 and the media roller 110, which may be received within the media receiving space 122. For example, the cavity 123 and / or the peripheral wall 121 may extend along a self-closed path around the media receiving space 122.

[0030] Alternatively or additionally, each of the plurality of transport segments 120 may have a bearing section 124 which delimits the cavity 123 on the end side and which is shown in [Fig. 1] by means of a dotted line. For example, the bearing section 124 may be annular. For example, the bearing section 124 may be designed to receive a bearing ring 130, see also [Fig. 2], or have the same. For example, the bearing section 124 and / or the bearing ring may have an opening corresponding to an outer diameter of the support roller. This allows, for example, that the respective transport segment is positioned on the support roller 110, for example by means of the bearing section 124 and / or the bearing ring 130 (e.g. positioned by form fit).For example, the respective opening of the bearing section 124 and / or the bearing ring 130 may form a fit into which the support roller 110 may be inserted.

[0031] According to various embodiments, the transport roller 100 may be designed to transport a substrate. For example, the transport segments 120 may have several grooves, each groove of which can receive a bar-shaped substrate which is transported. It can be understood that what is described here can be applied by analogy to any other substrate geometry. It is precisely for the transport of bar-shaped substrates that a lower thermal expansion of a roller transport can already cause the substrate to collide with a subsequent transport roller, which is why the embodiments described here are particularly advantageous for this substrate geometry.

[0032] [Fig. 2] illustrates various aspects of the transport roller 100 in a plan view. schematic section, the transport roller 100 having a support roller 110 and several transport segments 120.

[0033] According to various embodiments, each of the plurality of conveying segments 120, for example the peripheral wall 121 of the respective conveying segment 120, may have a plurality of grooves 126. For reasons of clarity, only four of the plurality of grooves shown are designated by a reference sign for each conveying segment. For example, each of the plurality of grooves 126 may extend along a closed path around the conveying roller, for example around the media receiving space 122. For example, the plurality of conveying segments 120 may have a comb shape due to the plurality of grooves 126 in a sectional view (in this case, the plurality of conveying segments 120 may also be referred to as comb segments 120).

[0034] According to various embodiments, the transport roller 100 may further optionally have a bearing ring 130 (also called positioning ring 130). For example, the bearing ring 130 may be in contact with two directly neighboring transport segments 120 or be a monolithically integral part of one of the two directly neighboring transport segments 120. For example, the bearing ring 130 may be arranged within one or two bearing sections of two neighboring transport segments 120. For example, a shape of one or both bearing sections 124 may correspond to a shape of the bearing ring 130. For example, the bearing ring 130 may be positioned by form-fitting within one or both bearing sections 124.

[0035] Alternatively or additionally, the bearing ring 130 may fit in a form-fitting manner to the peripheral wall 121, for example to a rear face of the peripheral wall 121, or be connected thereto by a material bond. For example, the bearing ring 130 may be connected by a material bond to the peripheral wall 121 of a first conveying segment of the plurality of conveying segments 120 and fit in a form-fitting manner into the bearing section 124 of a second of the plurality of conveying segments. For example, the second conveying segment may be arranged in the vicinity of the first conveying segment.

[0036] The bearing ring allows, for example, stable accommodation of the transport segments 120 on the support roller 110 (e.g. by providing an adjustment). For example, the bearing ring 130 prevents the peripheral wall 121 from flexing due to its own weight and / or the weight of a substrate. For example, the bearing ring 130 is designed to separate the cavities 123 of neighboring transport segments from each other, for example to separate them in a fluid-tight manner.

[0037] According to various embodiments, the support roller 110 may have a tubular section which has an interior support roller space 111, also called an additional cavity 111. Furthermore, the support roller 110 may have at least one opening on an exterior surface, for example a first opening 113, one or more second openings 112 and / or one or more third openings.

[0038] According to various embodiments, the support roller may have the first opening 113 (also referred to as the axis opening 113), which may be formed along a rotation axis 101 of the transport roller 100 and which may open into the support roller interior 111. For example, the axis opening 113 may be formed in an end section of the transport roller 100, for example the support roller 110. For example, the axis opening 113 may be formed on an end face of the support roller 110. For example, an end piece may be applied in or onto the axis opening 113.

[0039] According to various embodiments, the support roller 110 may have one or more second openings 112 (also referred to as a vent opening 112), which may be formed transversely to the rotational axis 101 of the transport roller 100 and which may open into the support roller interior 111. For example, the one or more vent openings 112 may be formed in an envelope surface of the support roller 110. For example, the one or more vent openings 112 may respectively form a connection, for example a fluid connection, between the cavity 123 of a respective transport segment 120 and the support roller interior 111 within the support roller 110. The vent opening 112 promotes, for example, a vacuuming (for example, the provision of a vacuum) of the respective cavity 123. by means of the support roller 110.For example, the vacuuming makes it possible to reduce a thermal coupling (for example due to thermal convection) between the peripheral wall 121 and the support roller 110. Alternatively or additionally, the respective ventilation opening 112 makes it possible, for example, to bring a fluid into the cavity 123 for cooling and / or heating and / or ventilating the respective transport segment 120.

[0040] According to various embodiments, the transport roller 100, for example the support roller 110, can be coupled to a bearing assembly. For example, the support roller 110 can have an end piece 150 by means of which the support roller 110 can be coupled to the bearing assembly. For example, the end piece 150 can have a coupling section 152 which can be coupled to the bearing assembly. The coupling section 152 can for example have a sealing ring and / or a coupling element (e.g., a thread, a plug, a socket, etc.) by means of which the end piece 150 can be coupled to the bearing assembly.

[0041] For example, the end piece 150 may be mounted on an end section of the support roller 110, for example on / in the axle opening 113. For example, the end piece may have a roller section 153. The roller section 153 may, for example, correspond to the axle opening 113. For example, the roller section may fit positively into the axle opening 113. For example, the roller section and the axle opening 113 may each have a corresponding thread.

[0042] For example, the end piece 150 may have a through opening 151 (also referred to as the third opening 151) that passes through the end piece 150. The through opening may open into the support roller interior space 111 when the end piece 150 is mounted on the support roller 110. For example, the through opening may extend from the coupling section 152 to the roller section 153. For example, the through opening 151 may provide a fluid connection between the support roller interior space 111 and the bearing assembly, which, for example, allows the support roller interior space to be evacuated or tempered, for example, by means of a fluid.

[0043] The separate manufacture of the end piece 150 and the support roller 110 facilitates manufacture. However, it can be understood that, in certain embodiments, the end piece 150 can also be monolithically connected to the support roller 110, for example if the first opening 113 is omitted or if they are connected to each other by material bonding after assembly.

[0044] According to various embodiments, the support roller 110 may have a segment-carrying section 115. The segment-carrying section 115 may be configured to be received in the respective support-receiving space 122 of the plurality of transport segments 120. For example, the segment-carrying section 115 may have a fit that corresponds to a cross-section of the respective support-receiving spaces 122. This makes it possible, for example, to position the individual transport segments in a form-fitting manner on the support roller 110.

[0045] For example, the fit between the segment carrier section 115 and the carrier receiving space 122 may be configured to prevent relative movement of the plurality of transport segments 120 relative to the carrier roller 110. For example, the carrier roller may have a groove, e.g., a longitudinal groove, into which a projection of the plurality of transport segments 120 and / or a mounting member 140 engages. For example, the longitudinal groove may extend over an outer surface of the support roller 110 along the rotation axis 101 of the transport roller 100. This makes it possible, for example, to reduce a relative movement of the plurality of transport segments 120 relative to the support roller 110, when the plurality of transport segments 120 is positioned on the support roller 110.

[0046] According to various embodiments, the transport roller 100 may optionally have the mounting element 140. For example, the mounting element 140, for example at least a portion of the mounting element 140, may have a larger geometric extent than the support receiving space 122. For example, the mounting element 140 may be ring-shaped and / or disc-shaped. For example, the mounting element 140 may have a thread, for example an internal thread. According to various aspects, the mounting element 140 may have, for example, a cover disc 143. Alternatively or additionally, the mounting element 140 may have, for example, a union nut and / or a fastening disc.

[0047] According to various embodiments, the support roller 110 may have a mounting section 114, which is designed to be connected in a form-fitting manner to the mounting element 140. For example, the support roller 110 may have, within the mounting section 114, a projection 114c (e.g. thickened in this section) which is designed such that the mounting element 140 (e.g. a cover disc 143) can be fixed (e.g. wedged) between the projection and a transport segment 120. By way of example, the projection 114c is highlighted by a dotted circle in [Fig. 2]. Alternatively or additionally, the mounting section 114 may have a thread, for example a male thread. For example, the thread of the mounting section 114 may match a thread of the mounting member 140, so that the mounting member 140 may be screwed onto the mounting section 114.For example, the mounting member 140 may be used to secure the plurality of transport segments 120 to the support roller 110. For example, the mounting section 114 may have a longitudinal groove 114b. For example, the longitudinal groove 114b may extend along the rotation axis 101 of the transport roller 100.

[0048] [Fig. 3] shows various aspects of a transport roller 100 from a schematic exterior view. One of the plurality of transport segments 120 and the support roller 110 are shown as examples. The end piece 150 is mounted on the support roller 110 as described herein.

[0049] Furthermore, the support roller 110 may have the mounting section 114. The mounting section 114 may have a thread 114a and a longitudinal groove 114b. The mounting element 140 may be screwed onto the thread 114a.

[0050] For example, the mounting element 140 may have, for example, a union nut 141, a fastening disc 142 and / or a cover disc 143. For example, the cover disc 143 may cover (e.g., cover in a fluid-tight manner) an end face, for example, a bearing section, of an outer conveying segment of the plurality of conveying segments 120. For example, a diameter of the cover disc 143 may be larger than a diameter of the outer conveying segment (e.g., a diameter of the cavity 123). For example, the fastening disc 142 may be a retaining disc, for example, a star disc, positioned between the union nut 141 and the cover disc 143.For example, the union nut 141 can be screwed against the fixing disc 142 and the cover disc 143 by means of the thread 114a of the support roller, whereby the cover disc 143 closes the outer conveying segment, for example in a fluid-tight manner.

[0051] For example, the mounting element may further have a seal, for example an O-ring, by means of which an opening inside the cover disc in which the support roller is located can be sealed.

[0052] For example, the longitudinal groove 114b may extend further into the segment carrier section 115 (not shown). The plurality of transport segments 120 may be mounted within the segment carrier section 115. For example, the respective carrier receiving spaces 122 of the plurality of transport segments 120 may have a fit, for example a form-fit, that corresponds to the shape of the carrier roller 110. For example, the fit may be provided by means of the bearing rings and / or the bearing sections. Due to the longitudinal groove 114b, a relative movement of the plurality of transport segments 120 relative to the, for example, tubular, carrier roller 110 may then, for example, be prevented.

[0053] [Fig. 4] illustrates various aspects of the transport roller 100 in a schematic sectional view. The transport roller 100 may have the plurality of transport segments 120 and the support roller 110, as described herein. The plurality of support segments 120 may be disposed on the transport roller 110, for example, slid thereon. For example, the plurality of transport segments 120 may have received the transport roller 110 in its respective support receiving space 122.

[0054] According to various aspects, the plurality of transport segments 120 may be disposed within the segment carrying section 115 of the transport roller 110. For example, the transport roller 110 may have a first mounting section 114-1 that delimits the segment carrying section 115 on a first side. For example, the first mounting section 114-1 may have a thread 114a and / or a groove 114b (not shown). The first mounting section 114-1 may for example be designed to mount a mounting element 140, for example a first mounting element 140-1, thereon, for example by engaging in the thread 114a and / or a groove 114b. The first mounting element 140-1 may for example have a cover disc 143, a fixing disc 142 and a union nut 141, as described herein. For example, the transport roller 110 may have a second mounting section 114-2 which delimits the segment carrier section 115 on a second side. For example, the second mounting section 114-2 may have a projection 114c. The second mounting section 114-2 may, for example, be designed to mount a mounting element 140 therein, for example a second mounting element 140-2. The second mounting element 140-2 may, for example, have (for example, be) a cover disc 143, as described herein.

[0055] [Fig. 4] shows, by way of example, how the plurality of transport segments 120 are clamped between a first and a second mounting element 140-1, 140-2, which forcefully connects them together. For example, the second mounting element 140-2 (e.g. the cover disc 143) can be slid onto the support roller 110 until it reaches the projection 114c in the second mounting section 114-2. Then, the plurality of transport segments 120 and, if applicable, the plurality of bearing rings 130 can be slid onto the support roller 110. For example, a first of the plurality of transport segments 120 can press the second mounting element 140-2 against the projection 114c, so that the cover disc 143 closes the cavity 123 of the first transport segment, for example, closes it in a fluid-tight manner.When the plurality of transport segments 120 and, if applicable, the plurality of bearing rings 130 are applied to the support roller, the first mounting element 140-1 can be mounted on the support roller 110. For example, the cover disc 143 can first be slid to close the cavity 123 of a last of the plurality of transport segments 120. The cover disc 143 can then be fixed by means of the fixing disc 142 and the union nut 141, by screwing the union nut 141 onto the thread 114 of the first mounting section 114-1. For example, due to the screwing of the union nut 141, the plurality of transport segments 120 and the plurality of bearing rings can be pushed towards the second mounting section 114-2, so that the cover disc 143 exerts pressure against the projection 114c.

[0056] It goes without saying that this is only an exemplary embodiment and that, in an alternative embodiment, both the first and the second mounting section 114-1, 114-2 may, for example, have a thread respectively. Thus, the plurality of transport segments 120 can be fixed, for example, between two union nuts. This makes it possible, for example, to vary a position of the plurality of transport segments 120 relative to the support roller 110.

[0057] Furthermore, it is shown in [Fig. 4] that the transport roller 100 may have a first end piece 150-1 on a first side and a second end piece 150-2 on a second side. For example, the support roller interior space 111 may open, by means of a respective axis opening 113, into the respective passage opening 151 of the first and second end pieces 150-1, 150-2. It is thus possible, for example, to allow the passage of a fluid from the first end piece 150-1 to the second end piece 150-2 via the support roller 110. This makes it possible, for example, to pass a fluid through the support roller interior space 111 in order to temper the support roller 110, for example to cool it or heat it.

[0058] Furthermore, it is shown in [Fig. 4] by way of example that the cavity 123 of each of the plurality of transport segments 120 is coupled, for example fluidically coupled, to the interior space of the support roller 111 by means of a respective ventilation opening 112. This makes it possible, for example, to evacuate the respective cavities 123 and / or to temper them by means of a fluid, for example to cool them or to heat them.

[0059] [Fig 5A] and [Fig 5B] schematically illustrate different aspects of the transport roller 100 respectively. [Fig 5B] shows a schematic cross-section of the transport roller 100 of [Fig 5A] along line AA.

[0060] According to various aspects, the plurality of transport segments 120 may have a set of first transport segments 120a. For example, the transport segments of the set of first transport segments 120a, which may also be referred to as first transport segments 120a, may be designed in the same way respectively. For example, the first transport segments 120a may coincide in terms of geometry (e.g., their geometric dimensions) and / or material composition. By geometry, one may, for example, mean a diameter (e.g., an inner diameter, an outer diameter), and / or a thickness of the peripheral wall, and / or a length of the transport segment concerned, and / or an extent of the grooves (e.g., a depth, a width, and / or a spacing of the grooves), and / or a number of grooves.

[0061] [Fig 6A] and [Fig 6B] respectively schematically illustrate different aspects of the transport roller 100. [Fig 6B] shows a schematic cross-section of the transport roller 100 of [Fig 6A] along line AA.

[0062] According to various aspects, the plurality of transport segments 120 may have a set of second transport segments 120b. For example, the transport segments of the set of second transport segments 120b, which may also be referred to as second transport segments 120b, may be configured respectively of the same way. For example, the second transport segments 120b may coincide in terms of geometry (e.g. their geometric dimensions) and / or material composition.

[0063] For example, the second transport segments 120b may be different from the first transport segments 120a, for example with respect to their geometry and / or their material composition.

[0064] For example, the second transport segments 120b and the first transport segments 120a may be configured to be interchanged.

[0065] [Fig 7A] and [Fig 7B] schematically illustrate different aspects of the transport roller 100. [Fig 7A] shows an excerpt from [Fig 5B], in which the transport roller 100 has a set of first transport segments 120a, and [Fig 7B] shows an excerpt from [Fig 6B], in which the transport roller 100 has a set of second transport segments 120b.

[0066] According to various aspects, the support roller 110 may have an inner diameter 110d. The inner diameter 110d may be a diameter of the support roller interior space 111. Further, the support roller 110 may have a wall thickness 110w. For example, the inner diameter 110d may be greater than the wall thickness 110w, for example, greater than twice the wall thickness 110w. Further, for the same outer diameter, the wall thickness 110w may be configured larger by decreasing the inner diameter 110d. For example, the wall thickness 110w is maximum when the inner diameter 110d is zero. In this case, the support roller 110 would not have a support roller interior space. Furthermore, it goes without saying that an outer diameter of the support roller 110 results from the sum of the inner diameter 1 lOd and twice the wall thickness 1 lOw.

[0067] According to various aspects, a conveying segment of the plurality of conveying segments may have a wall thickness 120w, for example a wall thickness 120w of the peripheral wall 121. For example, the wall thickness 120w of the conveying segment may be less than a wall thickness 110w of the support roller 110. This makes it possible, for example, to reduce the absorption of thermal energy by the conveying segment and at the same time to ensure, by means of the support roller 110, as high a stability as possible (for example against deflection) of the conveying roller 100.

[0068] According to various aspects, a conveying segment of the plurality of conveying segments may have a diameter 120d, for example, an inner diameter 120d. The diameter 120d may be a diameter of the cavity 123. For example, the diameter 120d may be larger than an outer diameter of the support roller 110. For example, if the diameter 120d is only slightly larger (e.g., less than 50%, e.g., example less than 25%) to the outer diameter of the support roller 110, the transport segment can be positioned directly on the support roller, i.e. without additional bearing rings 130. For example, the wall thickness 120w can be less than the diameter 120d of the transport segment.

[0069] According to various aspects, each transport segment of the plurality of transport segments may have a length 1201. For example, the length 1201 of the respective transport segment may be less than a length of the support roller 110, which is for example a distance along the rotation axis 101 between two end sides of the support roller 110. Thus, several transport segments 120 may for example be arranged on a single support roller 110.

[0070] According to various aspects, each of the plurality of transport segments 120 may respectively have a plurality of grooves 126. For example, each of the plurality of grooves 126 may have a depth 126d and a width 1261. For example, the depth 126d and the width 1261 of the grooves of a transport segment, for example of transport segments of the same set, may be identical.

[0071] For example, two directly adjacent grooves 126 may be spaced apart from each other by a groove spacing (not explicitly shown). For example, the groove spacing of a transport segment, e.g., of transport segments of the same set, may be the same. For example, the groove spacing may be less than the width 1261 of the plurality of grooves 126 of a transport segment. The groove spacing may, for example, represent a width of a surface (e.g., an annular surface) of the transport segment that is in physical contact with a substrate transported by means of the transport roller. For example, in this case, a minimum distance between the grooves may minimize thermal interaction (e.g., physical heat transfer) between the substrate and the respective transport segment. In another embodiment, the substrate may be guided within the plurality of grooves 126.In this case, reducing the groove spacing can result in an increase in the number of grooves, allowing more substrate to be transported in the same time.

[0072] Furthermore, it is evident that the length 1201 of a conveyor segment as well as the number of grooves 126, their respective distance between the grooves and their width 1261 are linked, which has the effect that one of the quantities can be determined on the basis of the others.

[0073] In various aspects, the first transport segments 120a, shown as an example in [Fig 7A], may be distinguished from the second transport segments 120b, shown as an example in [Fig 7B], with respect to their geometry.

[0074] For example, the first transport segments 120a may respectively have a first wall thickness 120w-l, a first diameter 120d-l and a first length 1201-1. Further, the plurality of grooves 126 of the first conveying members 120a may respectively have a first depth 126d-l, a first width 1261-1 and a first groove spacing. For example, the second conveying segments 120b may respectively have a second wall thickness 120w-2, a second diameter 120d-2 and a second length 1201-2. Further, the plurality of grooves 126 of the second conveying members 120b may respectively have a second depth 126d-2, a second width 1261-2 and a second groove spacing.

[0075] For example, the first wall thickness 120w-l and the second wall thickness 120w-l may be different from each other. Alternatively or in addition, the first diameter 120d-l and the second diameter 120d-2 may be different from each other. Alternatively or in addition, the first length 1201-1 and the second length 1201-2 may be different from each other. Alternatively or in addition, the first depth 126d-l and the second depth 126d-2 may be different from each other. Alternatively or in addition, the first width 1261-1 and the second width 1261-2 may be different from each other. Alternatively or in addition, the first groove spacing and the second groove spacing may be different from each other.

[0076] According to various embodiments, a transport device may have one or more transport rollers 100. For example, each of the one or more transport rollers 100 may be configured according to the aspects of the transport roller described herein. For example, the transport device may further have a bearing device that is configured to rotatably accommodate each of the one or more transport rollers 100. For example, one of the one or more transport rollers 100 may be coupled to the bearing device by means of a respective end piece 150.

[0077] According to various embodiments, a vacuum assembly may have a vacuum chamber and the transport device. For example, the transport device, for example the one or more transport rollers, may be arranged in the vacuum chamber. For example, the vacuum chamber may optionally further have a processing device for processing a substrate which can be transported or is transported into the vacuum chamber by means of the transport device.

[0078] According to various embodiments, a transport roller is provided which has reduced thermal expansion, for example compared to conventional transport rollers.

[0079] According to various embodiments, a transport roller is provided, which has reduced internal stress (e.g. reduced mechanical tensions) within the transport roller, for example compared to conventional transport rollers. For example, due to its multi-part construction and / or a re cooling, the transport roller may flex less than an uncooled, single-piece transport roller.

[0080] According to various embodiments, a transport roller is provided which allows efficient changeover (e.g., inexpensive and / or rapid changeover) between different substrate sizes compared to conventional transport rollers.

[0081] According to various embodiments, a transport roller is provided which, due to its multi-part construction, allows for more efficient (e.g., less expensive and / or faster) repair than conventional transport rollers.

[0082] According to various embodiments, a transport roller is provided, for which different materials may be used, for example the support roller may have a first material composition and the transport segments a second material composition which is different from the first material composition.

[0083] According to various embodiments, a transport roller is provided, which has a more homogeneous temperature distribution of the support roller, for example of a support tube, compared to conventional transport rollers. This can be important, for example, when the rotational speed is low and / or the transport roller is stationary. For example, this phenomenon can occur with heat sources that are not homogeneous over the periphery, for example with respect to a geometry, a (local) temperature distribution.

[0084] According to various embodiments, a transport roller is provided, in which the functions of the transport roller are distributed between a support tube and individual interchangeable segments for transporting the substrate, called transport segments. For example, the transport roller has a support tube which is equipped with the plurality of segments. Due to the segments, it is possible to reduce the thermal influence on the support tube and / or to protect it from the thermal influence of the substrate, as described herein. The transport roller can thus maintain its dimensions.

[0085] In various embodiments, the transport roller can be actively cooled, for example by means of a support roller interior space within the support roller. Additional external cooling devices can thus, for example, be reduced, which has the effect of reducing manufacturing costs and operating costs. Furthermore, the transport roller can be designed for other substrate sizes. Furthermore, changeover times can be reduced compared to conventional transport rollers, since there is no additional interface for a cooling medium, but this interface can be integrated directly into the transport roller (for example by means of the end piece).

[0086] Various embodiments relate to a transport roller. The support roller may be arranged inside the transport roller. The individual transport segments, also called comb segments, may be located outside the transport roller. The comb segments may be mounted as follows. For example, the support tube may have a fit. For example, fit-guided bearing rings, also called positioning rings, may be mounted on the support tube. For example, the bearing rings are not necessary when the overall diameter of the comb segments is smaller, since the comb segments may rest directly on the support tube. Furthermore, the comb segments may be centered on the positioning rings.According to various embodiments, all construction elements can be axially locked by means of form-fitting, for example by means of one or more mounting elements (for example circlips).

Claims

Claims

1. Conveyor roller (100), having: a support roller (110); several tubular transport segments (120), each transport segment (120): has a peripheral wall (121); is traversed by a support receiving space (122) for receiving the support roller (110) in the transport segment (120); has a cavity (123) adjacent to the support receiving space (122), which spatially separates the peripheral wall (121) from the support receiving space (122), and preferably a bearing section (124) which delimits the cavity (123) on the end side.

2. A conveyor roller (100) according to claim 1, the support roller (110) having: a tubular section which has an additional cavity (111); and one or more openings opening onto an outer surface of the support roller (110), of which: a first opening (113), which is preferably formed in an end section of the support roller (110), opens along a rotation axis (101) of the conveyor roller (100) into the additional cavity (111); and / or one or more second openings (112), which is preferably formed in the tubular section, opens into the additional cavity (111) along a direction extending transversely to the rotation axis.

3. A conveyor roller (100) according to claim 1 or 2, the peripheral wall (121) having: a plurality of grooves (126), each groove (126) of which extends along a path closed on itself around the support receiving space (122).

4. Conveyor roller (100) according to any one of claims 1 to 3, further having a bearing ring (130), which is designed to fit in a form-fitting manner with the bearing section (124), or is connected to the peripheral wall (121) by a material bond.

5. A conveyor roller (100) according to any one of claims 1 to 4, wherein the bearing section (124) is annular.

6. A conveyor roller (100) according to any one of claims 1 to 5, wherein the cavity (123) and / or the peripheral wall (121) extend along a path closed on itself around the support receiving space (122).

7. A conveyor roller (100) according to any one of claims 1 to 6, wherein the peripheral wall (121) is configured in a tubular manner.

8. A conveyor roller (100) according to any one of claims 1 to 7, the support roller (110) further having: a segment carrying section (115), which is adapted to be received in the support receiving space (122) of the plurality of conveyor segments (120); wherein the segment carrying section (115) has a corresponding fit to the support receiving space (122).

9. A conveyor roller (100) according to any one of claims 1 to 8, further comprising: a mounting element (140), preferably annular, which has a larger extent than the support receiving space (122); wherein the support roller (110) has a mounting section (114), which is designed to be connected in a form-fitting manner to the mounting element (140), wherein the mounting section (114) preferably has a thread and / or a longitudinal groove.

10. A conveyor roller (100) according to any one of claims 1 to 9, wherein the plurality of conveyor segments (120) has a set of first conveyor segments (120a) whose conveyor segments (120a) are designed similarly, preferably are designed to coincide in geometry.

11. A conveyor roller (100) according to claim 10, wherein the plurality of conveyor segments (120) has a set of second conveyor segments (120b) which differ from the set of first conveyor segments (120a), preferably by geometry, more preferably by their diameter, their number of grooves and / or their extent of grooves.

12. A conveyor roller (100) according to any one of claims 1 to 11, further having an end piece (150), which is mounted on an end section of the support roller (110), preferably in a first opening (113), and adapted to couple the conveyor roller (100) to a bearing device, wherein the end piece (150) preferably has a through opening (151) which passes through the end piece (150) and which, when the end piece (150) is mounted on the support roller (110), opens into an additional cavity (111) inside the support roller (110).

13. A conveying device (200), having: a plurality of conveying rollers (100), each conveying roller (100) of which is configured according to any one of claims 1 to 12; a bearing device (200), which is configured to rotatably accommodate each of the plurality of conveying rollers (100).

14. A vacuum assembly, having: a vacuum chamber, a conveying device according to claim 13, the conveying rollers (100) of which are arranged in the vacuum chamber; preferably a processing device for processing a substrate conveyed into the vacuum chamber by means of the conveying device.