Shower head baffle

JP1795479SActive Publication Date: 2025-04-08LAM RES CORP
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Patent Information

Application Number
JP2024020633D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2024-10-04
Publication Date
2025-04-08
Estimated Expiration
2049-10-04

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Abstract

The article according to the present application (hereinafter referred to as "the article") is a baffle used in a showerhead to distribute process gas flow around a semiconductor substrate and a pedestal in a semiconductor processing system.
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