Work holding unit

Abstract

The article related to this design is a workpiece holding unit or the like that is attached to a polishing apparatus for polishing wafers in the manufacture of semiconductors and the like and used. Reference Figures 1 to 3 showing the usage state represent the state in which a workpiece holding unit or the like that holds a workpiece (polishing object) or a dresser is attached to the polishing apparatus main body. When in use, a workpiece or a dresser is held on the lower surface of this article, and the holding portion of the workpiece or the dresser moves up and down along the guide rail. At that time, by adjusting the swinging adjustment portion provided on the peripheral surface of this article, the workpiece or the dresser can be adjusted to be horizontal.

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