Workholding unit

Abstract

The article according to this design is a workpiece holding unit or the like that is used by being attached to a polishing apparatus for polishing wafers in the manufacture of semiconductors or the like. Reference Figures 1 to 3 showing the usage state represent a state in which a workpiece holding unit or the like that holds a workpiece (polishing object) or a dresser is attached to the polishing apparatus main body. When in use, a workpiece or a dresser is held on the lower surface of this article, and the holding portion of the workpiece or the dresser moves up and down along the guide rail. The portion for which a design registration is sought is a part of the guide rail mounting surface, the guide rail, and a part of the holding portion of the workpiece or the dresser that moves up and down along the guide rail.

Images