Work holding unit

Abstract

The article according to this design is a workpiece holding unit used by being attached to a polishing apparatus for polishing wafers in the manufacture of semiconductors and the like. Reference Figures 1 to 3 showing the usage state represent the state where a workpiece holding unit for holding a workpiece (polishing object) and a dresser is attached to the polishing apparatus main body. When in use, a workpiece and a dresser are held on the lower surface of this article, and the holding portions of the workpiece and the dresser move up and down along a guide rail. At that time, by adjusting the swinging adjustment portion provided on the peripheral surface of this article, the workpiece and the dresser can be adjusted to be horizontal.

Images