Frame for grinding device

JP1800873SActive Publication Date: 2025-06-12NAGASE INTEGREX CO LTD
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Patent Information

Application Number
JP2025000973D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-01-20
Publication Date
2025-06-12
Estimated Expiration
2050-01-20

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Abstract

The article according to this design is a frame used in a polishing apparatus for polishing wafers in the manufacture of semiconductors and the like. As shown in the reference figures 1 to 3 showing the usage state, a work (polishing object) and a dresser are held on the lower surface of the frame, and a work holding unit etc. in which the holding parts of the work and the dresser move up and down is fixed. And by adjusting the swinging adjustment part fixed to the frame, the work and the dresser can be adjusted to be horizontal.
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