Base member

JP1800875SActive Publication Date: 2025-06-12NAGASE INTEGREX CO LTD
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Patent Information

Application Number
JP2025000975D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-01-20
Publication Date
2025-06-12
Estimated Expiration
2050-01-20

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Abstract

The article according to this design is a base member of a polishing apparatus main body for polishing a wafer in the manufacture of semiconductors and the like. By providing holes between the legs of this article, the force transmitted from the frame can be efficiently transmitted to the legs.
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