Base member
JP1800877SActive Publication Date: 2025-06-12NAGASE INTEGREX CO LTD
View PDF 0 Cites 0 Cited by
Patent Information
- Application Number
- JP2025000977D
- Authority / Receiving Office
- JP · JP
- Patent Type
- Designs
- Current Assignee / Owner
- Filing Date
- 2025-01-20
- Publication Date
- 2025-06-12
- Estimated Expiration
- 2050-01-20
Smart Images
Figure 0001800877000001 
Figure 0001800877000002 
Figure 0001800877000003
Abstract
The article related to this design is a base member of a polishing apparatus main body for polishing wafers in the manufacture of semiconductors and the like. By making the lower inner peripheral surface substantially in the shape of an inverted bowl, the load of the table of the polishing apparatus main body applied to the solid line portion in the plan view can be uniformly transmitted to the legs.
Need to check novelty before this filing date? Find Prior Art