Temperature regulator

JP1803423SActive Publication Date: 2025-07-11SHINWA CONTROLS
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Patent Information

Application Number
JP2024025061D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2024-12-04
Publication Date
2025-07-11
Estimated Expiration
2049-12-04

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Abstract

The article "temperature regulator" according to the present design is used to regulate the temperature of a liquid such as a refrigerant used in a manufacturing apparatus such as a semiconductor manufacturing apparatus.
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