Reflector parts

JP1816305SActive Publication Date: 2026-01-09NUFLARE TECH INC
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Patent Information

Application Number
JP2025015853D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-08-08
Publication Date
2026-01-09
Estimated Expiration
2050-08-08

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Abstract

This product is a reflector component that is installed on the outer periphery of a rotation that contains a heater in a process chamber in a semiconductor manufacturing device or the like, and that suppresses the deposition and growth of by-products.
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