Carrier support apparatus, film formation apparatus, carrier support method, film formation method, and electronic device manufacturing method

Abstract

To suppress the generation or increase of particles in a carrier support device which supports a substrate carrier that holds a substrate and lifts it from a mask.SOLUTION: A carrier support device includes: carrier support means; and control means that controls the movement of the carrier support means so as to lift a substrate carrier 9 from a mask 6. The carrier support means includes: a first carrier support part 7 which rises and lowers while supporting the substrate carrier 9; and a second carrier support part 8 which rises and lowers while supporting the substrate carrier 9 at a different position from the first carrier support part 7. The control means controls the carrier support means so as to raise the first carrier support part 7 and start the rise of the second carrier support part 8 after the first carrier support part 7.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a carrier support device, a film forming apparatus including the carrier support device, and a carrier supporting method. [Background technology]

[0002] Organic EL display devices are known as flat panel display devices. The organic EL elements that make up organic EL display devices have a basic structure in which a functional layer having a light-emitting layer, an organic material layer that emits light, is formed between two opposing electrodes (a cathode electrode and an anode electrode). The functional layer and electrode layer of an organic EL element are formed in a film-forming device by depositing the materials that make up each layer on a substrate such as glass through a mask.

[0003] When a film is formed in a film forming apparatus, a substrate carrier holding a substrate is transported inside the film forming apparatus while being placed on a mask. Patent Document 1 discloses a configuration in which, in the film forming apparatus, a substrate carrier is placed on a mask before film formation, and the mask and substrate carrier are separated after film formation. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2021-010414 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the above-mentioned configuration, there is a possibility that particles may be scattered during the process of separating the mask from the substrate carrier, which may cause a decrease in the degree of vacuum or may adhere to the substrate, thereby contaminating the substrate.

[0006] The present invention has been made in view of the above-mentioned problems, and has an object to provide a technique for suppressing the generation or increase of particles in a carrier support device that supports a substrate carrier and lifts it from a mask. [Means for solving the problem]

[0007] The carrier support device of the present invention is a carrier support means for supporting a substrate carrier for holding a substrate; control means for controlling operation of the carrier support means to lift the substrate carrier from a mask; A carrier support device comprising: the carrier support means includes a first carrier support part which moves up and down while supporting the substrate carrier, and a second carrier support part which moves up and down while supporting the substrate carrier at a position different from that of the first carrier support part, The control means controls the carrier support means so as to raise the first carrier support part and to start raising the second carrier support part after the first carrier support part. The carrier supporting method of the present invention further comprises the steps of: A carrier support method for lifting a substrate carrier holding a substrate from a mask, comprising the steps of: A carrier supporting method using a carrier supporting apparatus including carrier supporting means for supporting the substrate carrier, the carrier supporting means having a first carrier supporting part which moves up and down while supporting the substrate carrier, and a second carrier supporting part which moves up and down while supporting the substrate carrier at a position different from that of the first carrier supporting part, The method is characterized in that the first carrier support part rises so that a portion of the substrate carrier is lifted off the mask, and the second carrier support part begins to rise after the first carrier support part so that a portion of the substrate carrier other than the portion is lifted off the mask. Effect of the Invention

[0008] According to the present invention, in a carrier support device that supports a substrate carrier and lifts it up from a mask, the generation or increase of particles can be suppressed. [Brief description of the drawings]

[0009] [Figure 1] FIG. 2 is a schematic diagram showing a configuration of a substrate carrier according to an embodiment. [Diagram 2] FIG. 2 is a schematic top view showing the configuration of a mask according to an embodiment. [Diagram 3] FIG. 1 is a schematic configuration diagram of an in-line manufacturing system according to an embodiment. [Figure 4] 1 is a schematic cross-sectional view showing a configuration of a carrier support device according to an embodiment. [Diagram 5] 5A and 5B are schematic diagrams illustrating a configuration of a carrier support part according to the embodiment. [Figure 6] 11A to 11C are schematic diagrams illustrating a lifting operation of a substrate carrier in the embodiment. [Figure 7] FIG. 13 is a schematic perspective view showing a carrier support part according to a modified example. [Figure 8] FIG. 1 is a diagram illustrating a configuration of an electronic device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, the embodiment of the present invention will be described in detail with reference to the drawings. However, the dimensions, materials, shapes, and relative positions of the components described in the embodiment may be changed as appropriate depending on the configuration and various conditions of the device to which the invention is applied. In other words, the scope of the present invention is not limited to the following embodiment.

[0011] The present invention can be understood as a carrier support apparatus or carrier support method for supporting a substrate carrier holding a substrate and lifting it from a mask. The present invention can also be understood as a film formation apparatus or film formation method using the carrier support apparatus or carrier support method. The present invention can also be understood as an electronic device manufacturing apparatus or electronic device manufacturing method using the film formation apparatus or film formation method. The present invention can also be understood as a method for controlling each of the above-mentioned apparatuses.

[0012] The present invention can be applied to a film forming apparatus that forms a thin film of a film forming material on the surface of a film forming object such as a substrate by deposition or sputtering while transporting the film, and can be desirably applied to an apparatus that forms a thin film (material film) of a desired pattern by vacuum deposition. The substrate material can be any material such as glass, a polymeric film, a silicon wafer, or a metal, and the substrate can be, for example, a substrate in which a film such as polyimide is deposited on a glass substrate. The deposition material can also be any material such as an organic material or a metallic material (metal, metal oxide, etc.). In addition to the vacuum deposition apparatus described below, the present invention can also be applied to a film forming apparatus including a sputtering apparatus and a CVD (Chemical Vapor Deposition) apparatus. The technology of the present invention can be specifically applied to an apparatus for manufacturing an organic electronic device (for example, an organic light-emitting element, a thin-film solar cell), an optical member, etc. Among them, an apparatus for manufacturing an organic light-emitting element that forms an organic light-emitting element by evaporating a deposition material and depositing it on a substrate through a mask is one of the preferred application examples of the present invention. Hereinafter, the present invention will be described with reference to an example in which the present invention is applied to an apparatus for manufacturing an electronic device, but the carrier support apparatus of the present invention is not limited to this and can be applied to the various manufacturing apparatuses described above.

[0013] <Example> (PCB Carrier 9) The configuration of a substrate carrier 9 according to this embodiment will be described with reference to Fig. 1. Fig. 1(a) is a schematic plan view of the substrate carrier 9 as viewed from a direction perpendicular to a holding surface 31 that holds a substrate 5, and Fig. 1(b) is a cross-sectional view taken along line A-A of Fig. 1(a). The substrate carrier 9 is a substantially rectangular, flat-plate-like structure in plan view. The substrate carrier 9 has a carrier face plate 30 which is a rectangular, flat-plate-like member, a plurality of chuck members 32, and a plurality of supports 33. The substrate carrier 9 holds a substrate 5 on the holding surface 31 of the carrier face plate 30.

[0014] For the sake of convenience, the following description will be given assuming that a substrate holding portion corresponding to the position where the substrate 5 is held and an outer periphery portion surrounding the outer periphery of the substrate 5 are set on the substrate carrier 9. In Fig. 1(a), the dashed line indicating the outer edge of the substrate 5 is the boundary between the substrate holding portion and the outer periphery portion. However, there need not be any difference in structure between the substrate holding portion and the outer periphery portion.

[0015] The vicinity of two opposing sides of the four sides forming the rectangular periphery of the substrate carrier 9 are supported by transport rollers 15, which will be described later. The substrate carrier 9 is supported with each of the two opposing sides aligned along the transport direction. The transport rollers 15 are composed of a plurality of transport rotators arranged along the transport direction on both sides of the transport path of the substrate carrier 9. The substrate carrier 9 is guided in the transport direction by the transport rollers 15 rotating while being supported by the substrate carrier 9.

[0016] The chuck member 32 is a protrusion having a chuck surface that contacts the substrate 5 and chucks the substrate 5. The chuck surface of the chuck member 32 in this embodiment is an adhesive surface made of a sticky material (PSC: Physical Sticky Chucking), and is an adhesive pad that holds the substrate 5 by physical adhesion or physical adsorption. The substrate 5 can be held along the holding surface 31 of the carrier face plate 30 by chucking the substrate 5 with the multiple chuck members 32. The multiple chuck members 32 are arranged so that the chuck surface of each of them protrudes a predetermined distance from the holding surface 31 of the carrier face plate 30. The chuck members 32 are preferably arranged according to the shape of the mask 6, and more preferably arranged corresponding to a boundary portion (a crosspiece portion) of the mask 6 for dividing the film-forming area of ​​the substrate 5. This makes it possible to suppress the chuck members 32 from contacting the substrate 5 and affecting the temperature distribution of the film-forming area of ​​the substrate 5.

[0017] The chuck members 32 are preferably arranged outside the active area of ​​the display. This is because there is a concern that the stress caused by adhesion by the chuck members 32 may distort the substrate 5 or cause temperature distribution during film formation. It is preferable that the contact area between the chuck members 32 and the substrate 5 is as small as possible, and that the number of chuck members held is as small as possible. In addition, for the above reasons, it is preferable in terms of film formation that the chuck members 32 are arranged on the back side of the mask section.

[0018] The material of the carrier face plate 30 is preferably mainly made of aluminum or an aluminum alloy in order to reduce the weight of the entire substrate carrier 9 .

[0019] The supports 33 support the substrate carrier 9 relative to the mask 6 when the substrate carrier 9 is inverted so that the holding surface 31 of the carrier face plate 30 that holds the substrate 5 faces downward and placed on the mask. At least in the vicinity of the supports 33, the supports 33 support the substrate carrier 9, so that the substrate 5 held by the substrate carrier 9 is separated from the mask 6.

[0020] (Mask 6) The configuration of the mask 6 according to this embodiment will be described with reference to Fig. 2. Fig. 2 is a top view of the mask frame 6a of the mask 6. The top surface of the mask frame 6a here refers to the surface that faces upward during film formation. As shown in Fig. 2, the mask 6 has a structure in which a mask foil 6b having a thickness of about several µm to several tens of µm is welded and fixed to the mask frame 6a.

[0021] The mask frame 6a supports the mask foil 6b in a state of being pulled in the in-plane direction so that the mask foil 6b does not bend. The mask foil 6b includes a boundary portion for dividing the film-forming region of the substrate 5. The boundary portion of the mask foil 6b adheres to the substrate 5 when the mask 6 is attached to the substrate 5, and blocks the film-forming material. The mask 6 may be an open mask in which the mask foil 6b has only a boundary portion, or a fine mask in which fine openings corresponding to pixels or subpixels are formed in the portion other than the boundary portion, i.e., the portion corresponding to the film-forming region of the substrate 5. When a glass substrate or a substrate on which a resin film such as polyimide is formed on a glass substrate is used as the substrate 5, an iron alloy, particularly an iron alloy containing nickel, can be used as the main material of the mask frame 6a and the mask foil 6b.

[0022] Furthermore, mask marks 6c are formed at each of the four corners of the mask frame 6a. An image of the mask marks 6c can be captured through the substrate 5 by an image capturing means such as a camera provided in the chamber. By detecting the mask marks 6c from the captured image by a control means such as a control unit 70 described later, position information of the mask 6 can be obtained, and alignment of the substrate 5 and the mask 6 becomes possible.

[0023] (In-line film forming equipment) Next, the configuration of an in-line type film forming apparatus for manufacturing an organic EL panel will be described. Fig. 3 shows a manufacturing system 300 including an in-line type film forming apparatus for manufacturing an organic EL panel. An organic EL panel is generally manufactured through a circuit element forming process for forming circuit elements, an organic light emitting element forming process for forming an organic light emitting element on a substrate, and a sealing process for forming a protective layer on the formed organic light emitting layer. The manufacturing system 300 performs the organic light emitting element forming process.

[0024] The manufacturing system 300 has a mask carry-in chamber 90, an alignment chamber 100 (mask mounting chamber), a plurality of film formation chambers 110a, 110b, reversal chambers 111a, 111b, a transfer chamber 112, a mask separation chamber 113, a substrate separation chamber 114, a carrier transfer chamber 115, a mask transfer chamber 116, and a substrate carry-in chamber 117 (substrate mounting chamber). The manufacturing system 300 further has a transfer means, which will be described later, and the substrate carrier 9 is transferred by the transfer means along a predetermined transfer path passing through each chamber.

[0025] Specifically, the substrate carrier 9 is transported through each chamber in the order of the substrate loading chamber 117, the inversion chamber 111a, the mask loading chamber 90, the alignment chamber 100, the multiple film forming chambers 110a, 110b, the transport chamber 112, the mask separation chamber 113, the inversion chamber 111b, the substrate separation chamber 114, and the carrier transport chamber 115, and then returns to the substrate loading chamber 117 again. Meanwhile, the mask 6 is transported through each chamber in the order of the mask loading chamber 90, the alignment chamber 100, the multiple film forming chambers 110a, 110b, the transport chamber 112, and the mask separation chamber 113, and then returns to the mask loading chamber 90 again. In this way, the substrate carrier 9 and the mask 6 are transported in a circulating manner along the predetermined transport path (circulating transport path) indicated by the dashed line and the dotted line, respectively. The function of each chamber will be described below.

[0026] The substrate 5 on which a film is not yet formed is loaded from the substrate carry-in chamber 117 into the circulation transfer path, and a film is formed on the substrate 5 while being held by the substrate carrier 9. The substrate 5 on which a film has been formed is then carried out from the substrate separation chamber 114. The substrate 5 on which a film is not yet formed that has been carried into the substrate carry-in chamber 117 is first attached to and held by the substrate carrier 9 in the substrate carry-in chamber 117. Then, the substrate 5 is carried into the alignment chamber 100 together with the substrate carrier 9 via the reversal chamber 111a and the mask carry-in chamber 90 before film formation.

[0027] In the inversion chambers 111a and 111b, the holding surface 31 of the substrate carrier 9 is oriented vertically upward. Inversion mechanisms 120a, 120b are provided to invert the substrate 1 from the substrate 1 to the substrate 2 in a vertically downward direction, or from the substrate 2 in a vertically downward direction to the substrate 2 in a vertically upward direction. The inversion mechanisms 120a, 120b as inversion means may be appropriately selected from conventionally known mechanisms capable of changing the position (direction) of the substrate 1 by gripping the substrate 1 or the like, and a description of the specific configuration will be omitted.

[0028] The substrate 5 is carried into the substrate carry-in chamber 117 with the surface on which a film is to be formed facing vertically upward. At this time, the substrate carrier 9 is arranged in the substrate carry-in chamber 117 with the holding surface 31 facing vertically upward. Therefore, the carried-in substrate 5 is placed on the holding surface 31 of the substrate carrier 9 and held by the substrate carrier 9. Thereafter, in the reversal chamber 111a, the substrate carrier 9 holding the substrate 5 is reversed by the reversal mechanism 120a, so that the surface on which a film is to be formed of the substrate 5 faces vertically downward.

[0029] On the other hand, when the substrate carrier 9 is carried into the inversion chamber 111b from the mask separation chamber 113, the substrate 5 is carried in with the surface on which the film is to be formed facing vertically downward. After carrying in, the substrate carrier 9 holding the substrate 5 is inverted by the inversion mechanism 120b, so that the surface on which the film is to be formed of the substrate 5 faces vertically upward. Thereafter, the substrate 5 is carried out of the substrate separation chamber 114 with the surface on which the film is to be formed facing vertically upward.

[0030] The inverted substrate carrier 9 holding the substrate 5 is carried into the alignment chamber 100 via the mask carry-in chamber 90. In conjunction with this, the mask 6 is also carried into the alignment chamber 100 from the mask carry-in chamber 90. An alignment device is installed in the alignment chamber 100 (mask mounting chamber). In the alignment chamber 100, the alignment device aligns the substrate 5 and mask 6 placed on the substrate carrier 9 with high precision, and places the substrate carrier 9 (substrate 5) on the mask 6.

[0031] Thereafter, the mask 6 on the substrate carrier 9 is transferred to the transport rollers, and transport to the next process is started. A plurality of transport rollers are arranged on both sides of the transport path along the transport direction, and each of them transports the mask 6 by rotating with the driving force of an AC servo motor (not shown).

[0032] In the film formation chambers 110a and 110b, the substrate 5 adsorbed on the substrate carrier 9 that has been brought in passes over the deposition source 130, so that a film is formed on the surface of the substrate 5 other than the portion blocked by the mask 6. The film formation chambers 110a and 110b can adjust the chamber pressure (pressure inside the chamber) by a chamber pressure control unit (not shown) equipped with a vacuum pump and a chamber pressure gauge. An evaporation source (film formation source, film formation means) containing an evaporation material (film formation material) can be placed inside the film formation chambers 110a and 110b, and a film formation space with reduced pressure is formed inside the chamber. In the film formation space, the evaporation material flies from the evaporation source toward the substrate 5, and a film is formed on the substrate. The evaporation source may be equipped with, for example, a material storage unit such as a crucible that contains the evaporation material, and a heating means such as a sheath heater that heats the evaporation material. Furthermore, by providing a mechanism for moving the material storage section within a plane approximately parallel to the substrate carrier 9 and mask 6, or a mechanism for moving the entire evaporation source, the position of the ejection port for ejecting the deposition material can be displaced relative to the substrate 5 within the chamber 4, thereby making the film formed on the substrate 5 uniform.

[0033] After the film formation in the film formation chambers 110a and 110b is completed, the substrate carrier 9 reaches the mask separation chamber 113, where the substrate carrier 9 and the mask 6 are separated. The separated mask 6 is transported to the mask transport chamber 116 and used in the film formation process of a new substrate 5. Meanwhile, the substrate carrier 9 holding the substrate 5 is inverted in the reversal chamber 111b and transported to the substrate separation chamber 114. In the substrate separation chamber 114, the substrate 5 is separated from the substrate carrier 9, collected from the circulating transport path, and sent to the next process. Meanwhile, the substrate carrier 9 is transported to the substrate load chamber 117 and used to transport the new substrate 5.

[0034] As described above, inside the mask separation chamber 113, the mask 6 and the substrate carrier 9 are separated from each other, and the substrate carrier 9 holding the substrate 5 is transported to the reversal chamber 111b. At this time, particles may be attached to the mask 6 and the substrate carrier 9 that are transported into the mask separation chamber 113. In addition, new particles may be generated inside the mask separation chamber 113. Particles may be generated due to various factors, such as dust generation due to contact between members in the chamber, deposition material falling off and scattering on members other than the substrate 5, and dust entering the chamber.

[0035] Particles attached to the mask 6 or the substrate carrier 9 may scatter and adhere to the substrate 5 when the substrate carrier 9 is lifted from the mask 6, contaminating the substrate 5. Even if the particles do not adhere to the substrate 5, it may lead to a decrease in the vacuum level of the chamber. Here, the inventors of the present application have found that the amount of particles scattered when the substrate carrier 9 is lifted from the mask 6 can be reduced or the generation of particles can be suppressed depending on the method of lifting the substrate carrier 9. More specifically, it has been found that the amount of particles is reduced by a method of lifting only a part of the substrate carrier 9 first and then lifting the other part of the substrate carrier 9, compared to a method of lifting the entire substrate carrier 9 at once. Hereinafter, a carrier support device and a carrier support method capable of suppressing scattering of particles and preventing contamination of the substrate 5 during the operation of lifting the substrate carrier 9 will be described in detail.

[0036] (Mask separation room) The configuration of the mask separation chamber 113 according to this embodiment will be described with reference to Fig. 4. Fig. 4 is a schematic cross-sectional view showing the configuration of the mask separation chamber 113 of the in-line type film formation apparatus. The mask 6 and the substrate carrier 9 are carried into the mask separation chamber 113 together, the mask 6 and the substrate carrier 9 are separated inside the mask separation chamber 113, and the mask 6 and the substrate carrier 9 are carried out from the mask separation chamber 113 separately.

[0037] The mask separation chamber 113 is equipped with a carrier support device 1 that lifts and supports the substrate carrier 9 from the mask 6. The carrier support device 1 has a carrier support mechanism 60 that supports the substrate carrier 9, a mask receiving stand 16 that supports the mask 6, a transport means that loads and unloads the mask 6 and the substrate carrier 9, and a control unit 70 that controls various operations performed by the carrier support device 1.

[0038] The carrier support mechanism 60 as a carrier supporting means lifts up the substrate carrier 9 placed on the mask 6 and supports the substrate carrier 9. The carrier support mechanism 60 has, inside the chamber 4 of the mask separation chamber 113, a first carrier support part 7 that supports one end of the outer circumferential edge of the substrate carrier 9, and a second carrier support part 8 that supports the other end of the outer circumferential edge of the substrate carrier 9 opposite to the one end.

[0039] The carrier support mechanism 60 further includes an in-plane moving means 11, a Z lifting base 13, and a Z lifting slider 10. The in-plane moving means 11, the Z lifting base 13, and the Z lifting slider 10 are all provided on the upper outside of the chamber 4. The in-plane moving means 11 is connected to the upper part of the chamber 4, and moves the Z lifting base 13 in the XY direction and rotates it in θ. The Z lifting base 13 serves as a base when the substrate carrier 9 moves in the Z direction. The Z lifting slider 10 is a member that can be driven in the Z direction, and is connected to the first carrier support part 7 and the second carrier support part 8. In this embodiment, the first carrier support part 7 and the second carrier support part 8 can be raised and lowered independently of each other (can be driven in the Z direction), and are configured to be able to approach and move away from the mask receiving table 16.

[0040] When the in-plane moving means 11 performs XYθ drive in a plane parallel to the substrate carrier 9 (substrate 5) and the mask 6 (i.e., in a plane parallel to the deposition surface of the substrate 5), the Z lift base 13 and The Z lift slider 10 moves as a single unit. As the in-plane movement means, a known mechanism including a motor, an encoder, etc. can be used.

[0041] When the substrate carrier 9 is moved in the Z direction (i.e., the intersecting direction intersecting the film formation surface of the substrate 5), a Z lift slider 10 serving as a moving means is driven in the Z direction relative to a Z lift base 13, thereby transmitting a driving force to the first carrier support part 7 and the second carrier support part 8. As the Z lift slider 10, a known driving means equipped with a motor, a ball screw, an encoder, etc. can be used.

[0042] The first carrier support part 7 has a shaft part 7a connected to the Z lift slider 10, and a claw part 7b provided at the tip of the shaft part 7a and abutting against the substrate carrier 9. The Z lift slider 10 moves the shaft part 7a and the claw part 7b up and down together, so that the substrate carrier 9 can be supported and lifted by the claw part 7b. Similarly, the second carrier support part 8 also has a shaft part 8a and a claw part 8b. In FIG. 4, the movement directions of the first carrier support part 7 and the second carrier support part 8 are indicated by arrows. The carrier support means may include a carrier holding member that holds the substrate carrier 9 from above, or may be a mechanism that clamps the substrate carrier 9 from above and below with the claw part 7b and the carrier holding member.

[0043] The transport means for loading and unloading the mask 6 and the substrate carrier 9 includes a plurality of transport rollers 15 and a plurality of transport rollers 14. The transport rollers 15 move the mask 6 along a mask transport path. The transport rollers 14 move the substrate carrier 9 along a carrier transport path. The transport rollers 15 are configured to be movable at least in the horizontal direction, and can be moved to a position where the mask 6 is supported, or can be retracted from below the mask 6. Similarly, the transport rollers 14 are also configured to be movable in the horizontal direction, and can be moved to a position where the substrate carrier 9 is supported, or can be retracted from below the substrate carrier 9.

[0044] The mask receiving stage 16 serving as the mask supporting means is configured to be movable in the vertical direction, and supports the mask 6 carried into the mask separation chamber 113. In Fig. 4, the movement direction of the mask receiving stage 16 is indicated by an arrow. The mask 6 is lifted from the substrate carrier 9 while it is supported by the mask receiving stage 16. The mask supporting means may include a mask holding member that holds the mask 6 from above, or may be a mechanism that clamps the mask 6 from above and below using the mask receiving stage 16 and the mask holding member.

[0045] The carrier support device 1 is not limited to a configuration in which the first carrier support part 7 and the second carrier support part 8 can be driven in the XYθ directions. As long as the first carrier support part 7 and the second carrier support part 8 can be driven independently of each other and a mechanism for lifting the substrate carrier 9 from the mask 6 is provided, the carrier support device 1 can fulfill the minimum role of the carrier support device of the present invention.

[0046] The control unit 70 is a control means for controlling various operations (Z-axis lifting, lifting operation of the substrate carrier 9, loading and unloading of the substrate carrier 9 and the mask 6 into and out of the chamber 4, etc.) by the mask separation chamber 113. The control unit 70 can be configured, for example, by a computer having a processor, memory, storage, I / O, etc. In this case, the functions of the control unit 70 are realized by the processor executing a program stored in the memory or storage. As the computer, a general-purpose personal computer may be used, or an embedded computer or a PLC (programmable logic controller) may be used. Alternatively, some or all of the functions of the control unit 70 may be configured by a circuit such as an ASIC or FPGA. Note that a control unit 70 may be provided for each chamber such as the film formation chamber 110a and the mask separation chamber 113, or one control unit 70 may control the entire manufacturing system 300.

[0047] (Carrier support part) 5(a) to 5(c), a detailed configuration of the first carrier support part 7 will be described. Note that the second carrier support part 8 is also configured in the same manner as the configuration of the first carrier support part 7 described below.

[0048] FIG. 5(a) is a side view of the first carrier support part 7 as viewed from the Y direction, and FIG. 5(b) is a front view of the first carrier support part 7 as viewed from the X direction. As shown in FIG. 5(b), the first carrier support part 7 is composed of two shaft parts 7a and six claw parts 7b. Furthermore, the first carrier support part 7 includes a base part 7c to which all the shaft parts 7a and all the claw parts 7b are connected. The six claw parts 7b are arranged in a row along one side of the rectangular peripheral part of the substrate carrier 9, and support one end of the outer peripheral part of the substrate carrier 9. With this configuration, the base part 7c can be driven by a single driving source to drive the multiple claw parts 7b in a unified and synchronous manner. Furthermore, compared to the case where each claw part 7b is driven individually, there is no need to increase the strength of the claw parts 7b or the number of driving sources, which prevents the device from becoming larger and more expensive.

[0049] FIG. 5(c) is a side view showing a detailed configuration of the claw portion 7b of the first carrier support portion 7. The claw portion 7b includes a bearing portion 7b1 fixed to the base portion 7c, a rotating shaft portion 7b2 supported by the bearing portion 7b1, and an abutment portion 7b3 supported by the rotating shaft portion 7b2 and abutting against the substrate carrier 9. The rotating shaft portion 7b2 is a rotating shaft extending in the arrangement direction of the multiple claw portions 7b, and supports the abutment portion 7b3 rotatably within a predetermined angle range. In FIG. 5(c), the rotation direction of the abutment portion 7b3 is indicated by an arrow. In this embodiment, the abutment portion 7b3 is configured to be rotatable within a range of less than 1°. By abutting the abutment portion 7b3 against the substrate carrier 9 in a posture in which the abutment portion 7b3 rotates in accordance with the change in posture of the substrate carrier 9, the substrate carrier 9 can be firmly supported during the lifting operation of the substrate carrier 9.

[0050] As described above, the second carrier support portion 8 is configured similarly to the first carrier support portion 7. The six claw portions 8b of the second carrier support portion 8 are arranged in a row along one side of the rectangular peripheral portion of the substrate carrier 9, and support the other end opposite to the one end supported by the claw portions 7b on the outer peripheral portion of the substrate carrier 9. Thus, in this embodiment, the substrate carrier 9 is supported by a total of 12 claw portions and lifted up from the mask 6. When the substrate carrier 9 is supported, the first carrier support portion 7 is located near one side of the rectangular peripheral portion of the substrate carrier 9, and the second carrier support portion 8 is located near the opposite side of the one side of the rectangular peripheral portion of the substrate carrier 9.

[0051] (How to lift the board carrier) Next, the lifting operation of the substrate carrier 9 using the carrier support device 1 will be described with reference to Figures 6(a) to (f). Figures 6(a) to (f) are schematic diagrams showing the lifting operation of the substrate carrier 9 from the mask 6 performed inside the mask separation chamber 113. The carrier supporting method characteristic of the present invention will be described in detail below.

[0052] First, in the carrying-in step, the substrate 5, substrate carrier 9, and mask 6 are carried together into the mask separation chamber 113. Fig. 6(a) shows the state when the substrate 5, substrate carrier 9, and mask 6 are carried into the mask separation chamber 113. At this time, the substrate 5 is held by the substrate carrier 9, and the substrate carrier 9 is placed on the mask 6. The mask 6 is carried by the transport rollers 15 to a position where the substrate carrier 9 can be lifted from the mask 6 by the first carrier support part 7 and the second carrier support part 8.

[0053] Next, in the placing step, the mask 6 is placed on the mask receiving stand 16. FIG. 6(b) shows the state in which the mask 6 is placed on the mask receiving stand 16. When the mask 6 is placed on the mask receiving stand 16, the transport roller 15 retreats from under the mask 6. Then, as shown in FIG. As shown in c), the claws 7b and 8b move to the bottom of the substrate carrier 9.

[0054] Next, in the first lifting step, only the first carrier support part 7 supports the substrate carrier 9 and moves upward to separate from the mask receiving platform 16. FIG. 6(d) shows a state in which a part of the substrate carrier 9 is lifted by the first carrier support part 7. In the first lifting step, the second carrier support part 8 does not move up and down. That is, the substrate carrier 9 is lifted so that the holding surface 31 is inclined with respect to the horizontal plane while holding the substrate 5. Then, among the supports 33 of the substrate carrier 9, the supports 33 located near the first carrier support part 7 are separated from the mask 6. At this time, it is necessary to set the lifting amount of the substrate carrier 9 in the first lifting step so that the inclination of the substrate carrier 9 is not excessively large, causing problems such as the substrate carrier 9 being shifted and not being properly supported. In order to prevent malfunctions in the lifting operation of the substrate carrier 9, it is preferable that the inclination amount of the holding surface 31 of the substrate carrier 9 with respect to the horizontal plane is within about 0.4°.

[0055] As described above, in the state shown in Figure 6(d), the substrate carrier 9 is supported at an angle, but since the abutment portion 7b3 of the claw portion 7b of the first carrier support portion 7 is configured to be rotatable, the abutment portion 7b3 follows the substrate carrier 9 whose posture changes, and the substrate carrier 9 is firmly held.

[0056] Next, in the second lifting step, the second carrier support part 8 moves upward while supporting the substrate carrier 9, and separates from the mask receiving stand 16. FIG. 6(e) shows the state in which the substrate carrier 9 is lifted horizontally by the first carrier support part 7 and the second carrier support part 8. That is, the second carrier support part 8 rises and separates from the mask receiving stand 16 after the first carrier support part 7. At this time, a configuration may be adopted in which only the second carrier support part 8 moves upward from the state of FIG. 6(d) until the substrate carrier 9 is supported horizontally. Alternatively, the second lifting step may include a step in which the first carrier support part 7 and the second carrier support part 8 are moved upward, and then, as a posture adjustment step, a step in which only the second carrier support part 8 is further moved upward so that the substrate carrier 9 is supported horizontally. That is, the substrate carrier 9 is horizontalized at some timing before being supported by the transport rollers 14 to be carried out of the mask separation chamber 113, and the timing does not matter.

[0057] Finally, in the unloading step, the substrate carrier 9, while holding the substrate 5, is unloaded from the mask separation chamber 113 by the transport rollers 14 and transported to the inversion chamber 111b. Similarly, in the unloading step, the mask 6 is unloaded from the mask separation chamber 113 by the transport rollers 15 and transported to the mask transport chamber 116. FIG. 6(f) shows a state in which the substrate carrier 9 is supported by the transport rollers 14 and the mask 6 is supported by the transport rollers 15. At this time, the mask 6 is separated from the mask receiving platform 16, and the first carrier support part 7 and the second carrier support part 8 are retracted from under the substrate carrier 9.

[0058] As described above, according to the configuration of this embodiment, when lifting the substrate carrier 9 from the mask 6, the carrier support device 1 lifts a part of the substrate carrier 9 before the other part. When lifting the substrate carrier 9 from the mask 6 by the carrier support device 1, by lifting only a part of the substrate carrier 9 and then lifting a part other than the part, it is possible to suppress the generation or increase of particles compared to a method in which the entire substrate carrier 9 is lifted from the beginning.

[0059] The present invention is not limited to the above configurations and methods, and various modifications are possible within the scope of the invention embodied in the above embodiment. For example, in the above embodiment, the carrier support device 1 includes the first carrier support section 7 and the second carrier support section 8, but it may be configured to include three or more carrier support sections that are driven independently of each other.

[0060] 7 is a perspective view showing a substrate carrier 9 being supported by a carrier support device according to a modified example. The modified carrier support device has a first carrier support part 21, a second carrier support part 22, a third carrier support part 23, and a fourth carrier support part 24. The four carrier support parts have a single claw part, and support the vicinity of the four corners of the outer periphery of the substrate carrier 9, respectively. Even with the carrier lifting method in which the four corners of the substrate carrier 9 are lifted up in order by the four carrier support parts, the amount of particles adhering to the substrate 5 can be suppressed, as in the above-described embodiment.

[0061] (Electronic device manufacturing method) Next, an example of a method for manufacturing an electronic device using the film forming apparatus according to this embodiment will be described. Below, the configuration of an organic EL display device will be shown as an example of the electronic device, and a method for manufacturing the organic EL display device will be illustrated.

[0062] First, the organic EL display device to be manufactured will be described. Fig. 8(a) is an overall view of an organic EL display device 700, and Fig. 8(b) shows the cross-sectional structure of one pixel.

[0063] As shown in FIG. 8(a), a plurality of pixels 702 each including a plurality of light-emitting elements are arranged in a matrix in a display region 701 of an organic EL display device 700. Although details will be described later, each light-emitting element has a structure including an organic layer sandwiched between a pair of electrodes. Note that the pixel here refers to the minimum unit that allows a desired color to be displayed in the display region 701. In the case of the organic EL display device according to this embodiment, the pixel 702 is configured by a combination of a first light-emitting element 702R, a second light-emitting element 702G, and a third light-emitting element 702B that emit light different from each other. The pixel 702 is often configured by a combination of a red light-emitting element, a green light-emitting element, and a blue light-emitting element, but may also be a combination of a yellow light-emitting element, a cyan light-emitting element, and a white light-emitting element, and is not particularly limited as long as it is at least one color.

[0064] Fig. 8(b) is a schematic partial cross-sectional view taken along line BB in Fig. 8(a). The pixel 702 is made up of a plurality of light-emitting elements, and each light-emitting element has a first electrode (anode) 704, a hole transport layer 705, one of the light-emitting layers 706R, 706G, and 706B, an electron transport layer 707, and a second electrode (cathode) 708 on a substrate 703. Among these, the hole transport layer 705, the light-emitting layers 706R, 706G, and 706B, and the electron transport layer 707 correspond to organic layers. In this embodiment, the light-emitting layer 706R is an organic EL layer that emits red light, the light-emitting layer 706G is an organic EL layer that emits green light, and the light-emitting layer 706B is an organic EL layer that emits blue light. The light-emitting layers 706R, 706G, and 706B are formed in patterns corresponding to the light-emitting elements (sometimes referred to as organic EL elements) that emit red, green, and blue light, respectively.

[0065] The first electrode 704 is formed separately for each light-emitting element. The hole transport layer 705, the electron transport layer 707, and the second electrode 708 may be formed in common for the plurality of light-emitting elements 702R, 702G, and 702B, or may be formed for each light-emitting element. In order to prevent the first electrode 704 and the second electrode 708 from being shorted by foreign matter, an insulating layer 709 is provided between the first electrodes 704. Furthermore, since the organic EL layer deteriorates due to moisture and oxygen, a protective layer 710 is provided to protect the organic EL element from moisture and oxygen.

[0066] 8(b), the hole transport layer 705 and the electron transport layer 707 are shown as single layers, but depending on the structure of the organic EL display element, they may be formed of multiple layers including a hole blocking layer and an electron blocking layer. In addition, a hole injection layer having an energy band structure that can smoothly inject holes from the first electrode 704 to the hole transport layer 705 can be formed between the first electrode 704 and the hole transport layer 705. Similarly, an electron injection layer can be formed between the second electrode 708 and the electron transport layer 707.

[0067] Next, an example of a method for manufacturing an organic EL display device will be specifically described.

[0068] First, a circuit (not shown) for driving the organic EL display device and a substrate (mother glass) 703 on which a first electrode 704 is formed are prepared.

[0069] An acrylic resin is formed by spin coating on the substrate 703 on which the first electrode 704 is formed, and the acrylic resin is patterned by lithography so as to form an opening in the portion where the first electrode 704 is formed, forming an insulating layer 709. This opening corresponds to the light-emitting region where the light-emitting element actually emits light.

[0070] The substrate 703 with the patterned insulating layer 709 is placed on a substrate carrier on which an adhesive member is arranged. The substrate 703 is held by the adhesive member. The substrate is then carried into a first organic material deposition apparatus, and after inversion, a hole transport layer 705 is deposited as a common layer on the first electrode 704 in the display area. The hole transport layer 705 is deposited by vacuum deposition. In practice, the hole transport layer 705 is formed to be larger than the display area 701, so no high-resolution mask is required.

[0071] Next, the substrate 703 on which the hole transport layer 705 has been formed is carried into a second organic material film forming apparatus. The substrate and a mask are aligned, and the substrate is placed on the mask. A red light emitting layer 706R is formed on the portion of the substrate 703 where the red light emitting element is to be disposed.

[0072] Similar to the formation of the light-emitting layer 706R, a light-emitting layer 706G that emits green light is formed by a third organic material film formation apparatus, and further a light-emitting layer 706B that emits blue light is formed by a fourth organic material film formation apparatus. After the formation of the light-emitting layers 706R, 706G, and 706B is completed, an electron transport layer 707 is formed over the entire display area 701 by a fifth film formation apparatus. The electron transport layer 707 is formed as a layer common to the three light-emitting layers 706R, 706G, and 706B.

[0073] The substrate on which the electron transport layer 707 has been formed is moved in a metallic evaporation material deposition device, and a second electrode 708 is deposited.

[0074] Thereafter, the substrate is transferred to a plasma CVD apparatus, where a protective layer 710 is formed, completing the film formation process on the substrate 703. After inversion, the adhesive member is peeled off from the substrate 703, thereby separating the substrate 703 from the substrate carrier. Then, the organic EL display device 700 is completed through cutting.

[0075] If the substrate 703 on which the insulating layer 709 is patterned is exposed to an atmosphere containing moisture or oxygen from the time when it is carried into the film forming apparatus until the film formation of the protective layer 710 is completed, the light emitting layer made of an organic EL material may be deteriorated by moisture or oxygen. Therefore, in this embodiment, the substrate is carried in and out of the film forming apparatus in a vacuum atmosphere or an inert gas atmosphere. [Explanation of symbols]

[0076] REFERENCE SIGNS LIST 1... carrier support device, 6... mask, 7... first carrier support section, 8... second carrier support section, 9... substrate carrier, 70... control section (control means)

Claims

1. a carrier support means for supporting a substrate carrier that holds a substrate; control means for controlling operation of the carrier support means to lift the substrate carrier from a mask; A carrier support device comprising: the carrier support means includes a first carrier support part that moves up and down while supporting the substrate carrier, and a second carrier support part that moves up and down while supporting the substrate carrier at a position different from that of the first carrier support part, A carrier support device characterized in that the control means controls the carrier support means so that the first carrier support section is raised and the second carrier support section begins to rise after the first carrier support section.

2. The carrier support device according to claim 1, characterized in that the control means controls the carrier support means so that the second carrier support portion remains stationary from the time the first carrier support portion starts to rise until the time the second carrier support portion starts to rise.

3. 2. The carrier support device of claim 1, wherein the control means controls the carrier support means to raise the first carrier support part so that the portion of the substrate carrier is lifted from the mask, and then to raise the second carrier support part so that the holding surface of the substrate carrier that holds the substrate is horizontal.

4. The carrier support device described in claim 3, characterized in that the control means controls the carrier support means to raise the first carrier support portion and the second carrier support portion to horizontally position the holding surface of the substrate carrier, and then raise the first carrier support portion and the second carrier support portion in synchronization.

5. the first carrier support portion has a shaft portion configured to be able to move up and down and a claw portion that moves integrally with the shaft portion, 2. The method according to claim 1, wherein the control means controls the carrier support means so that the claws come into contact with the substrate carrier from below to support the substrate carrier. Carrier support device.

6. The carrier support device according to claim 5 , wherein the first carrier support portion has a plurality of the claw portions arranged in a line and a base portion to which the plurality of the claw portions and the shaft portion are connected.

7. the claw portion includes a bearing portion, a rotation shaft portion supported by the bearing portion, and an abutment portion rotatably supported by the rotation shaft portion within a predetermined angular range and abutting against the substrate carrier, The carrier support device according to claim 5, characterized in that the control means controls the carrier support means so that the abutment portion abuts against the substrate carrier in a posture in which the abutment portion rotates in accordance with changes in posture of the substrate carrier.

8. the first carrier support portion supports one end of an outer periphery of the substrate carrier; The carrier support device according to claim 1 , wherein the second carrier support portion supports the other end of the outer periphery of the substrate carrier opposite to the one end.

9. the carrier support means further includes a third carrier support part that moves up and down while supporting the substrate carrier at a position different from the first carrier support part and the second carrier support part, The carrier support device of claim 1, wherein the control means controls the carrier support means so that the third carrier support unit begins to rise after the second carrier support unit so that the portion of the substrate carrier that is in contact with the mask is lifted off the mask.

10. a mask separation chamber in which the carrier support device according to any one of claims 1 to 9 is installed; a film formation chamber in which a film is formed on the substrate held by the substrate carrier through the mask; A film forming apparatus comprising:

11. A carrier support method for lifting a substrate carrier holding a substrate from a mask, comprising: A carrier supporting method using a carrier supporting apparatus including carrier supporting means for supporting the substrate carrier, the carrier supporting means having a first carrier supporting part that moves up and down while supporting the substrate carrier, and a second carrier supporting part that moves up and down while supporting the substrate carrier at a position different from that of the first carrier supporting part, A carrier support method characterized in that the first carrier support part rises so that a portion of the substrate carrier is lifted from the mask, and the second carrier support part begins to rise after the first carrier support part so that a portion other than the portion of the substrate carrier is lifted from the mask.

12. 12. The carrier support method of claim 11, wherein after the first carrier support part is raised to lift a portion of the substrate carrier from the mask, the second carrier support part is raised so that the substrate holding surface of the substrate carrier becomes horizontal.

13. 13. The carrier support method of claim 12, wherein the first carrier support portion and the second carrier support portion are raised to horizontalize the holding surface of the substrate carrier, and then the first carrier support portion and the second carrier support portion are raised synchronously.

14. the carrier support means further includes a third carrier support part that moves up and down while supporting the substrate carrier at a position different from the first carrier support part and the second carrier support part, 12. The carrier supporting method according to claim 11, wherein the third carrier supporting portion rises after the first carrier supporting portion and the second carrier supporting portion.

15. A film formation method characterized by having a film formation process in which a film is formed on a substrate held by a substrate carrier through a mask, and a lifting process in which the mask is separated from the carrier by a carrier support method described in any one of claims 11 to 14.

16. A method for manufacturing an electronic device, comprising a step of forming an organic film on a substrate using the film formation method described in claim 15.

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