Control method of continuous furnace, continuous furnace, and control program of continuous furnace

Abstract

To prevent, in a continuous furnace that performs heat treatment, occurrence of leakage between treatment chambers that perform treatments in different conditions.SOLUTION: A continuous furnace 100 comprises: a first treatment chamber 1 capable of treating an object; a second treatment chamber 2 capable of treating an object; a first middle chamber 3 disposed between the first treatment chamber 1 and the second treatment chamber 2; a first closing mechanism 33 that opens / closes between the first treatment chamber 1 and the first middle chamber 3; and a second closing mechanism 34 that opens / closes between the second treatment chamber 2 and the first middle chamber 3. A control method of the continuous furnace includes the steps of: closing the first closing mechanism 33 and the second closing mechanism 34; and adjusting a gas pressure in the first middle chamber 3, in the step of closing the first closing mechanism 33 and the second closing mechanism 34, so that a pressure is applied in a direction of closing the first closing mechanism 33 by a difference between a gas pressure of the first middle chamber 3 and a gas pressure of the first treatment chamber 1 and / or a pressure is applied in a direction of closing the second closing mechanism 34 by a difference between a gas pressure of the first middle chamber 3 and a gas pressure of the second treatment chamber 2.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a method for controlling a continuous furnace, a continuous furnace, and a control program for a continuous furnace. [Background technology]

[0002] A type of apparatus known as a continuous furnace is known that continuously performs multiple processes on a given object (e.g., a metal powder compact, a ceramic powder compact, etc.) under different conditions (spatial atmosphere, pressure, temperature, etc.).

[0003] For example, equipment is known that includes a dewaxing chamber in which an inert gas is circulated to heat a metal powder molding to dewax the metal powder molding, a vacuum sintering chamber in which the metal powder molding is vacuum sintered, an intermediate chamber disposed between the dewaxing chamber and the vacuum sintering chamber, a door for opening and closing the dewaxing chamber and the intermediate chamber, and a door for opening and closing the intermediate chamber and the vacuum sintering chamber (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6607368 Summary of the Invention [Problem to be solved by the invention]

[0005] In recent years, there has been a demand to perform some of the processes in a continuous furnace in a high-pressure atmosphere. For example, there are cases where firing is required at a temperature of several thousand degrees in an atmosphere of about 10 atmospheres. However, conventional continuous furnaces could not handle processes that require such high pressure. Specifically, conventional continuous furnaces could have the following problems.

[0006] In a continuous furnace, a door separating the treatment chamber and the intermediate chamber is brought into close contact with the treatment chamber or the intermediate chamber to spatially separate the treatment chamber and the intermediate chamber. Because there is a pressure difference between the treatment chamber and the intermediate chamber, a force acts on the door in a direction away from the treatment chamber or the intermediate chamber due to this pressure difference. The mechanism for driving the door applies a force to the door that resists the force acting on the door due to the pressure difference between the treatment chamber and the intermediate chamber, thereby bringing the door into close contact with the treatment chamber or the intermediate chamber.

[0007] When the pressure in the processing chamber is high, i.e., when the pressure difference between the processing chamber and the intermediate chamber is large, the force acting on the door is large, and the force of the door drive mechanism alone is not enough to bring the door into close contact with the processing chamber or the intermediate chamber, which may cause leakage from the processing chamber. If leakage occurs from the processing chamber, it becomes difficult to maintain the processing chamber at the desired pressure, and there is a possibility that the desired processing may not be performed properly.

[0008] An object of the present invention is to prevent or suppress the occurrence of leakage between a processing chamber and an intermediate chamber in a continuous furnace including the processing chamber and the intermediate chamber even when the processing chamber becomes high pressure. [Means for solving the problem]

[0009] A control method for a continuous furnace according to a preferred embodiment of the present invention is a control method for a continuous furnace comprising a first treatment chamber capable of treating an object, a second treatment chamber capable of treating an object, an intermediate chamber arranged between the first treatment chamber and the second treatment chamber, a first closing mechanism for opening and closing between the first treatment chamber and the intermediate chamber, and a second closing mechanism for opening and closing between the second treatment chamber and the intermediate chamber, the control method including the steps of closing the first closing mechanism and the second closing mechanism, and adjusting the gas pressure in the intermediate chamber so that, in the step of closing the first closing mechanism and the second closing mechanism, a pressure is applied in the direction of closing the first closing mechanism due to the difference between the gas pressure in the intermediate chamber and the gas pressure in the first treatment chamber, and / or a pressure is applied in the direction of closing the second closing mechanism due to the difference between the gas pressure in the intermediate chamber and the gas pressure in the second treatment chamber.

[0010] A continuous furnace according to a preferred embodiment of the present invention comprises a first treatment chamber capable of treating an object, a second treatment chamber capable of treating an object, an intermediate chamber disposed between the first treatment chamber and the second treatment chamber, a first closing mechanism for opening and closing between the first treatment chamber and the intermediate chamber, a second closing mechanism for opening and closing between the second treatment chamber and the intermediate chamber, a first pressure adjustment mechanism for adjusting the gas pressure in the first treatment chamber, a second pressure adjustment mechanism for adjusting the gas pressure in the second treatment chamber, and a third pressure adjustment mechanism capable of adjusting the gas pressure in the intermediate chamber independently of the gas pressures in the first treatment chamber and the second treatment chamber. Effect of the Invention

[0011] In the above continuous furnace and its control method, the difference between the gas pressure in the intermediate chamber and the gas pressure in the first treatment chamber applies pressure to the first closing mechanism in a direction in which the first closing mechanism is closed, so that the first closing mechanism can be more reliably attached to the portion connecting the first treatment chamber and the intermediate chamber. Alternatively, the difference between the gas pressure in the intermediate chamber and the gas pressure in the second treatment chamber applies pressure to the second closing mechanism in a direction in which the second closing mechanism is closed, so that the second closing mechanism can be more reliably attached to the portion connecting the second treatment chamber and the intermediate chamber. As a result, even when the first treatment chamber and / or the second treatment chamber are adjusted to a high pressure, the first treatment chamber and the intermediate chamber can be more reliably closed, and the second treatment chamber and the intermediate chamber can be more reliably closed, so that gas leakage between these treatment chambers and the intermediate chamber can be prevented or suppressed. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a diagram showing the configuration of a continuous furnace. [Diagram 2] FIG. 2 is a diagram showing a gas line configuration provided in a continuous furnace. [Diagram 3] FIG. 2 is a diagram showing a control configuration of a continuous furnace. [Figure 4] 1 is a flowchart showing the operation of a continuous furnace (part 1). [Diagram 5] 1 is a flowchart showing the operation of a continuous furnace (part 2). [Figure 6] FIG. 2 is a diagram showing the configuration of a continuous furnace according to a first modified example. [Figure 7] FIG. 11 is a diagram showing the configuration of a continuous furnace according to a second modified example. [Figure 8] FIG. 13 is a diagram showing the configuration of a continuous furnace according to another embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] <1. Overview> The continuous furnace 100 will be described below. The continuous furnace 100 is an apparatus in which a plurality of processing chambers are arranged side by side, each of which can independently set the internal pressure (gas pressure, hereinafter the same) and / or temperature. The continuous furnace 100 can continuously perform processing such as heat treatment under different conditions on a specified object in each processing chamber. Here, "continuously performing processing" means that the specified object is transported from a specific processing chamber to another processing chamber without being taken out, and individual processing is performed in the specific processing chamber and the other processing chamber.

[0014] The predetermined objects to be treated in the continuous furnace 100 are, for example, metal powder compacts, ceramic powder compacts, etc. In the continuous furnace 100, heat treatments such as sintering and degreasing of these powder compacts can be performed. In the continuous furnace 100, the objects are treated under high temperature and high pressure conditions. For example, sintering of ceramic powder compacts is performed at a temperature of more than one thousand and several hundred degrees (for example, 1500 degrees) in an atmosphere of about 10 atmospheres (for example, 0.9 MPa).

[0015] <2. Structure of the continuous furnace> The configuration of the continuous furnace 100 will be described below with reference to Fig. 1. Fig. 1 is a diagram showing the configuration of the continuous furnace 100. As shown in Fig. 1, the continuous furnace 100 mainly includes a first treatment chamber 1, a second treatment chamber 2, and a first intermediate chamber 3.

[0016] The first treatment chamber 1 is a cylindrical treatment furnace having a first space SP1 therein. The first treatment chamber 1 is a second-class pressure vessel and has a structure capable of withstanding high temperatures and high pressures. Specifically, the first treatment chamber 1 has a structure capable of withstanding pressures of -0.1 MPa (vacuum) or more and less than 1 MPa (10 atmospheres).

[0017] The first treatment chamber 1 has openings at both ends. An entrance door 11 is provided at the opening at one end of the first treatment chamber 1. The entrance door 11 opens and closes the opening at one end of the first treatment chamber 1. When the entrance door 11 is open, the outside communicates with the first space SP1 via the opening at one end of the first treatment chamber 1. By opening the entrance door 11 to communicate the outside with the first space SP1, an object to be treated in the continuous furnace 100 can be placed in the first space SP1. The opening at the other end of the first treatment chamber 1 is connected to a first connection portion 31 of the first intermediate chamber 3.

[0018] A plurality of first conveyor rollers 12 and a first heater 13 are provided in the first space SP1 of the first processing chamber 1. The plurality of first conveyor rollers 12 are arranged side by side in the longitudinal direction of the first space SP1 at the bottom of the first space SP1. The plurality of first conveyor rollers 12 are rotatable about their axes by a first motor 14 (FIG. 3).

[0019] In the first space SP1, an object to be processed using the continuous furnace 100 is placed on the first conveyor rollers 12. When the first conveyor rollers 12 rotate, the object placed on the first conveyor rollers 12 is conveyed in its longitudinal direction within the first space SP1 in accordance with the rotation of the first conveyor rollers 12. The first heater 13 heats the first space SP1 to make the first space SP1 at a predetermined temperature. The first processing chamber 1 has a first temperature sensor T1 (FIG. 3) that measures the temperature of the first space SP1.

[0020] The second treatment chamber 2 is a cylindrical treatment furnace having a second space SP2 therein. The second treatment chamber 2 is a second-class pressure vessel and has a structure capable of withstanding high temperatures and high pressures. Specifically, the second treatment chamber 2 has a structure capable of withstanding a pressure of -0.1 MPa or more and less than 1 MPa.

[0021] The second treatment chamber 2 has openings at both ends. The opening at one end of the second treatment chamber 2 is connected to the second connection part 32 of the first intermediate chamber 3. As described above, the first connection part 31 of the first intermediate chamber 3 is connected to the opening at the other end of the first treatment chamber 1. Therefore, the first space SP1 of the first treatment chamber 1 and the second space SP2 of the second treatment chamber 2 are connected via the first intermediate chamber 3. This allows the object to be treated in the continuous furnace 100 to be transported from the first space SP1 to the second space SP2 or in the opposite direction. The opening at the other end of the second treatment chamber 2 is connected to the third connection part 41 of the second intermediate chamber 4.

[0022] A plurality of second transport rollers 21 and a second heater 22 are provided in the second space SP2 of the second processing chamber 2. The second transport rollers 21 are arranged side by side in the longitudinal direction of the second space SP2 at the bottom of the second space SP2. The second transport rollers 21 are rotatable about their axis by a second motor 23 (FIG. 3).

[0023] In the second space SP2, the object transported from the first space SP1 is placed on the second transport roller 21. When the second transport roller 21 rotates, the object placed on the second transport roller 21 is transported in its longitudinal direction within the second space SP2 in accordance with the rotation of the second transport roller 21. The second heater 22 heats the second space SP2 to make the second space SP2 at a predetermined temperature. The second processing chamber 2 has a second temperature sensor T2 (FIG. 3) that measures the temperature of the second space SP2.

[0024] The first intermediate chamber 3 is disposed between the first treatment chamber 1 and the second treatment chamber 2. Specifically, a first connection portion 31 of the first intermediate chamber 3 is connected to an opening on the other end side of the first treatment chamber 1. A second connection portion 32 of the first intermediate chamber 3 is connected to an opening on one end side of the second treatment chamber 2. The first intermediate chamber 3 has a third space SP3 therein. A first closing mechanism 33 and a second closing mechanism 34 are provided in the third space SP3. As the first closing mechanism 33 and the second closing mechanism 34, for example, a valve, a door, etc. may be adopted, and therefore, hereinafter, they will be referred to as a first valve 33 and a second valve 34.

[0025] The first valve 33 is disposed on the first connection portion 31 side of the third space SP3, and opens and closes between the first space SP1 of the first processing chamber 1 and the third space SP3 of the first intermediate chamber 3. The first valve 33 is connected to a first valve drive rod 35 via a first link mechanism 33a. The first valve drive rod 35 is capable of moving up and down within the third space SP3 by a first actuator 36 (FIG. 3).

[0026] When the first valve drive rod 35 is moved downward, the first valve 33 moves downward and the first link mechanism 33a brings the first valve 33 into tight contact with the first connecting part 31. A seal member (O-ring) is provided at the part of the first valve 33 that comes into tight contact with the first connecting part 31, and the seal member is elastically deformed to bring the first valve 33 into tight contact. The seal member may be provided on the first connecting part 31 side.

[0027] This spatially separates the first space SP1 of the first treatment chamber 1 and the third space SP3 of the first intermediate chamber 3. On the other hand, when the first valve driving rod 35 is moved upward, the first valve 33 moves upward away from the first connecting portion 31. This spatially connects the first space SP1 and the third space SP3.

[0028] The second valve 34 is disposed on the second connection portion 32 side of the third space SP3, and opens and closes between the second space SP2 of the second treatment chamber 2 and the third space SP3 of the first intermediate chamber 3. The second valve 34 is connected to the first valve drive rod 35 via a second link mechanism 34a.

[0029] When the first valve drive rod 35 is moved downward, the second valve 34 moves downward and the second link mechanism 34a brings the second valve 34 into tight contact with the second connection part 32. A seal member (O-ring) is provided at the part of the second valve 34 that comes into tight contact with the second connection part 32, and the seal member is elastically deformed to bring the valve 34 into tight contact. The seal member may be provided on the second connection part 32 side.

[0030] This spatially separates the second space SP2 of the second treatment chamber 2 and the third space SP3 of the first intermediate chamber 3. On the other hand, when the first valve driving rod 35 is moved upward, the second valve 34 moves upward away from the second connection portion 32. This spatially connects the second space SP2 and the third space SP3.

[0031] A third conveying roller 37 is provided at the first connecting portion 31 of the first intermediate chamber 3, and a fourth conveying roller 38 is provided at the second connecting portion 32. The third conveying roller 37 and the fourth conveying roller 38 are rotatable about their axes by a third motor 39 (FIG. 3). The third conveying roller 37 guides the object conveyed by the first conveying roller 12 to the first intermediate chamber 3. The fourth conveying roller 38 conveys the object guided to the first intermediate chamber 3 by the third conveying roller 37 to the second space SP2 of the second treatment chamber 2.

[0032] As shown in FIG. 1, the continuous furnace 100 includes a second intermediate chamber 4 and a final treatment chamber 5. The second intermediate chamber 4 is disposed between the second treatment chamber 2 and the final treatment chamber 5. Specifically, a third connection part 41 of the second intermediate chamber 4 is connected to an opening on the other end side of the second treatment chamber 2. A fourth connection part 42 of the second intermediate chamber 4 is connected to an opening on one end side of the final treatment chamber 5. The second intermediate chamber 4 has a fourth space SP4 therein. A third closing mechanism 43 and a fourth closing mechanism 44 are provided in the fourth space SP4. As the third closing mechanism 43 and the fourth closing mechanism 44, for example, a valve or a door may be adopted, and therefore, hereinafter, they will be referred to as a third valve 43 and a fourth valve 44.

[0033] The third valve 43 is disposed on the third connecting portion 41 side of the fourth space SP4, and opens and closes between the second space SP2 of the second processing chamber 2 and the fourth space SP4 of the second intermediate chamber 4. The third valve 43 is connected to the second valve driving rod 45 via a third link mechanism 43a. The second valve driving rod 45 is capable of moving up and down within the third space SP3 by a second actuator 46 (FIG. 3).

[0034] When the second valve drive rod 45 is moved downward, the third valve 43 moves downward and the third link mechanism 43a brings the third valve 43 into tight contact with the third connecting part 41. A seal member (O-ring) is provided at a portion of the third valve 43 that comes into tight contact with the third connecting part 41, and the seal member elastically deforms to bring the valve 43 into tight contact. The seal member may be provided on the third connecting part 41 side.

[0035] This spatially separates the second space SP2 of the second treatment chamber 2 and the fourth space SP4 of the second intermediate chamber 4. On the other hand, when the second valve driving rod 45 is moved upward, the third valve 43 moves upward away from the third connecting portion 41. This spatially connects the second space SP2 and the fourth space SP4.

[0036] The fourth valve 44 is disposed on the fourth connection portion 42 side of the fourth space SP4, and opens and closes between the fifth space SP5 of the final processing chamber 5 and the fourth space SP4 of the second intermediate chamber 4. The fourth valve 44 is connected to the second valve drive rod 45 via a fourth link mechanism 44a.

[0037] When the second valve drive rod 45 is moved downward, the fourth valve 44 moves downward and the fourth link mechanism 44a brings the fourth valve 44 into tight contact with the fourth connection part 42 with great force. A seal member (O-ring) is provided at the part of the fourth valve 44 that comes into tight contact with the fourth connection part 42, and the seal member is elastically deformed to bring the valve 44 into tight contact. The seal member may be provided on the fourth connection part 42 side.

[0038] This spatially separates the fifth space SP5 of the final processing chamber 5 and the fourth space SP4 of the second intermediate chamber 4. On the other hand, when the second valve driving rod 45 is moved upward, the fourth valve 44 moves upward away from the fourth connecting portion 42. This spatially connects the fifth space SP5 and the fourth space SP4.

[0039] A fifth conveying roller 47 is provided at the third connecting portion 41 of the second intermediate chamber 4, and a sixth conveying roller 48 is provided at the fourth connecting portion 42. The fifth conveying roller 47 and the sixth conveying roller 48 are rotatable about their axes by a fourth motor 49 (FIG. 3). The fifth conveying roller 47 guides the object conveyed by the second conveying roller 21 to the second intermediate chamber 4. The sixth conveying roller 48 conveys the object guided to the second intermediate chamber 4 by the fifth conveying roller 47 to the fifth space SP5 of the final processing chamber 5.

[0040] The final processing chamber 5 is a cylindrical processing chamber having a fifth space SP5 therein. The final processing chamber 5 has openings at both ends. The opening at one end of the final processing chamber 5 is connected to the fourth connection portion 42 of the second intermediate chamber 4. On the other hand, an exit door 51 is provided at the opening at the other end of the final processing chamber 5. The exit door 51 opens and closes the opening at the other end of the final processing chamber 5. When the exit door 51 is open, the outside communicates with the fifth space SP5 through the opening at the other end of the final processing chamber 5. By opening the exit door 51 to communicate the outside with the fifth space SP5, the object that has been processed in the continuous furnace 100 and transported to the fifth space SP5 can be taken out to the outside.

[0041] A plurality of seventh conveyor rollers 52 and a cooling device 53 are provided in the fifth space SP5 of the final processing chamber 5. The seventh conveyor rollers 52 are arranged side by side in the longitudinal direction of the fifth space SP5 at the bottom of the fifth space SP5. The seventh conveyor rollers 52 are rotatable about their axis by a fifth motor 54 (FIG. 3). The cooling device 53 is provided at the exit door 51, and cools the object conveyed to the fifth space SP5. The cooling device 53 is, for example, a fan.

[0042] The continuous furnace 100 includes a control device 6. The control device 6 is a computer system including a CPU, a storage device (RAM, ROM, SSD, HDD, etc.), various interfaces, etc. As shown in Fig. 3, the control device 6 includes a storage unit 61 and a control unit 62. Fig. 3 is a diagram showing the control configuration of the continuous furnace 100.

[0043] The memory unit 61 is a storage area of ​​a storage device of the computer system, and stores a computer program for controlling the continuous furnace 100, various setting values ​​necessary for controlling the continuous furnace 100, and the like. The control unit 62 is composed of a CPU of the computer system, a part of the storage device, and various interfaces, and controls each component of the continuous furnace 100. The control unit 62 executes the computer program stored in the memory unit 61 to control the continuous furnace 100. Additionally, the control unit 62 may realize part of the control of the continuous furnace 100 as hardware.

[0044] <3. Gas line configuration of continuous furnace> Next, the gas line configuration of the continuous furnace 100 will be described with reference to Fig. 2. Fig. 2 is a diagram showing the gas line configuration of the continuous furnace 100. In the continuous furnace 100, a first gas line GL1, a second gas line GL2, and an exhaust line PL are provided in each of the first treatment chamber 1, the second treatment chamber 2, and the final treatment chamber 5. In addition, a first pressure gauge G1 is provided in each treatment chamber to measure the pressure in the internal space (first space SP1, second space SP2, fifth space SP5) of each treatment chamber.

[0045] A first gas supply source GS1 is connected to the first gas line GL1 via a first opening / closing device V1. The first opening / closing device V1 is, for example, a valve such as an electromagnetic valve. The first gas line GL1 introduces gas supplied from the first gas supply source GS1 into the internal space of each processing chamber. The first gas supply source GS1 supplies, for example, an inert gas such as nitrogen, a gas used in processing an object in each processing chamber, or a mixed gas thereof.

[0046] The first gas supply source GS1 includes, for example, a gas cylinder and a flow control device (for example, a mass flow controller) connected to the gas cylinder. The first gas supply source GS1 supplies gas at a pressure higher than the maximum pressure (for example, 1 MPa) used in each processing chamber. The first gas supply source GS1 may be different for each processing chamber and may be capable of supplying different gases to each processing chamber.

[0047] In the above configuration, when the first opening / closing device V1 is opened, the gas used for processing the object is supplied from the first gas supply source GS1 to the internal space of each processing chamber. On the other hand, when the first opening / closing device V1 is closed, the supply of gas to the internal space of each processing chamber is stopped.

[0048] The second gas line GL2 is connected to the outside via a second opening / closing device V2. The second opening / closing device V2 is, for example, a valve such as an electromagnetic valve. The second gas line GL2 exhausts gas in the internal space of each processing chamber to the outside. Specifically, when the second opening / closing device V2 is opened, the gas present in the internal space is exhausted due to the pressure difference between the internal space of each processing chamber and the outside. On the other hand, when the second opening / closing device V2 is closed, the exhaust of gas from the internal space is stopped.

[0049] The exhaust line PL is connected to a pump RP, and the exhaust line PL evacuates the internal space of each processing chamber by the pump RP.

[0050] In the gas line configuration shown in Fig. 2, the pressure in the internal space of each processing chamber can be stabilized at a desired pressure by balancing the amount of gas supplied from the first gas line GL1 to the internal space and the amount of gas discharged from the internal space to the outside through the second gas line GL2. By providing the first gas line GL1, the second gas line GL2, and the exhaust line PL in each processing chamber, a desired gas atmosphere having a desired pressure independent of other processing chambers can be created in the internal space of each processing chamber. Therefore, for example, the first gas line GL1, the second gas line GL2, the first opening / closing device V1, the second opening / closing device V2, and the exhaust line PL constitute a pressure adjustment mechanism that adjusts the pressure of each processing chamber, and an independent pressure adjustment mechanism is provided for each processing chamber.

[0051] Meanwhile, a third gas line GL3 and a fourth gas line GL4 are provided in each of the first intermediate chamber 3 and the second intermediate chamber 4. Also, a second pressure gauge G2 that measures the pressure in the internal space (third space SP3, fourth space SP4) of each intermediate chamber is provided in each intermediate chamber.

[0052] The third gas line GL3 is connected to the second gas supply source GS2 via a third opening and closing device V3. The third opening and closing device V3 is, for example, a valve such as an electromagnetic valve. The third gas line GL3 introduces gas supplied from the second gas supply source GS2 into the internal space of each processing chamber. The second gas supply source GS2 supplies, for example, an inert gas such as nitrogen.

[0053] The second gas supply source GS2 includes, for example, a gas cylinder and a flow rate control device connected to the gas cylinder, etc. The second gas supply source GS2 supplies gas at a pressure higher than the maximum pressure (for example, 1 MPa) of each intermediate chamber.

[0054] In the above configuration, when the third opening / closing device V3 is opened, the inert gas is supplied from the second gas supply source GS2 to the internal space of each intermediate chamber. On the other hand, when the third opening / closing device V3 is closed, the supply of gas to the internal space of each intermediate chamber is stopped.

[0055] The fourth gas line GL4 is connected to the outside via a fourth opening / closing device V4. The fourth opening / closing device V4 is, for example, a valve such as an electromagnetic valve. The fourth gas line GL4 discharges gas in the internal space of each intermediate chamber to the outside. Specifically, when the fourth opening / closing device V4 is opened, the gas present in the internal space is discharged due to the pressure difference between the internal space of each intermediate chamber and the outside. On the other hand, when the fourth opening / closing device V4 is closed, the discharge of gas from the internal space is stopped.

[0056] In the above gas line configuration, the pressure in the internal space of each intermediate chamber can be stabilized at a desired pressure by balancing the amount of gas supplied from the third gas line GL3 to the internal space and the amount of gas discharged from the internal space to the outside through the fourth gas line GL4. Therefore, for example, the third gas line GL3, the fourth gas line GL4, the second gas supply source GS2, the third opening / closing device V3, the fourth opening / closing device V4, etc. configure a pressure adjustment mechanism, and this pressure adjustment mechanism can adjust the pressure in the intermediate chamber independently of the pressure in each processing chamber adjusted by the pressure adjustment mechanism provided in each processing chamber.

[0057] <4. Control configuration> The control configuration of the continuous furnace 100 will be described below with reference to FIG. 3. The control device 6 is connected to a first motor 14. The control unit 62 controls the first motor 14 to control the rotation of the first conveyor roller 12, thereby controlling the conveyance of the object in the first space SP1. The control device 6 is connected to a second motor 23. The control unit 62 controls the second motor 23 to control the rotation of the second conveyor roller 21, thereby controlling the conveyance of the object in the second space SP2. The control device 6 is connected to a third motor 39. The control unit 62 controls the third motor 39 to control the rotation of the third conveyor roller 37 and the fourth conveyor roller 38, thereby controlling the conveyance of the object from the first space SP1 to the second space SP2.

[0058] A fourth motor 49 is connected to the control device 6. The control unit 62 controls the fourth motor 49 to control the rotation of the fifth conveyor roller 47 and the sixth conveyor roller 48, and controls the conveyance of the object from the second space SP2 to the third space SP3. A fifth motor 54 is connected to the control device 6. The control unit 62 controls the fifth motor 54 to control the rotation of the seventh conveyor roller 52, and controls the conveyance of the object in the third space SP3.

[0059] A first actuator 36 is connected to the control device 6. The control unit 62 controls the first actuator 36 to control the vertical movement of the first valve drive rod 35, and controls the opening and closing of the first valve 33 and the second valve 34. A second actuator 46 is connected to the control device 6. The control unit 62 controls the second actuator 46 to control the vertical movement of the second valve drive rod 45, and controls the opening and closing of the third valve 43 and the fourth valve 44. The first actuator 36 and the second actuator 46 are, for example, air cylinders driven by air pressure.

[0060] The first heater 13 is connected to the control device 6. The control unit 62 controls the amount of power output to the first heater 13 based on a set temperature set as a condition for the process performed in the first space SP1 and the actual temperature of the first space SP1 measured by the first temperature sensor T1. This allows the first space SP1 to be at the set temperature.

[0061] The control device 6 is connected to the second heater 22. The control unit 62 controls the amount of power output to the second heater 22 based on a set temperature set as a condition for the process performed in the second space SP2 and the actual temperature of the second space SP2 measured by the second temperature sensor T2. This allows the second space SP2 to be at the set temperature.

[0062] The control device 6 is connected to the cooling device 53. The control unit 62 controls the cooling device 53 to cool the object transported to the third space SP3. Note that a temperature sensor that measures the temperature of the object in the third space SP3 may be provided in the final processing chamber 5, and the cooling device 53 may be controlled based on this temperature, making it possible to adjust the cooling speed of the object.

[0063] The first gas supply source GS1, the first opening and closing device V1, the second opening and closing device V2, and the pump RP are connected to the control device 6. The control unit 62 controls the flow rate of the gas supplied from the first gas supply source GS1, the opening and closing of the first opening and closing device V1, the opening and closing of the second opening and closing device V2, and / or the pump RP based on a set pressure set as a condition of the process performed in the first space SP1 of the first processing chamber 1 and an actual measured pressure of the first space SP1. This allows the first space SP1 to be at the set pressure.

[0064] Furthermore, the control unit 62 controls the flow rate of the gas supplied from the first gas supply source GS1, the opening and closing of the first opening and closing device V1, the opening and closing of the second opening and closing device V2, and / or the pump RP based on a set pressure set as a condition of the process performed in the second space SP2 of the second process chamber 2 and the actual measured pressure of the second space SP2. This allows the second space SP2 to be at the set pressure.

[0065] Furthermore, the control unit 62 controls the flow rate of the gas supplied from the first gas supply source GS1, the opening and closing of the first opening and closing device V1, the opening and closing of the second opening and closing device V2, and / or the pump RP based on the set pressure of the fifth space SP5 of the final processing chamber 5 and the actual measured pressure of the fifth space SP5. This allows the fifth space SP5 to be at the set pressure.

[0066] The second gas supply source GS2, the third opening and closing device V3, and the fourth opening and closing device V4 are connected to the control device 6. The control unit 62 controls the flow rate of gas supplied from the second gas supply source GS2, the opening and closing of the third opening and closing device V3, and / or the opening and closing of the fourth opening and closing device V4 based on the set pressure of the third space SP3 of the first intermediate chamber 3 and the actual measured pressure of the third space SP3. This allows the third space SP3 to be at the set pressure.

[0067] That is, when closing the first valve 33 and the second valve 34, the control device 6 sets and adjusts the gas pressure in the first intermediate chamber 3 so that a pressure is applied in a direction in which the first valve 33 is closed due to the difference between the gas pressure in the first intermediate chamber 3 and the gas pressure in the first processing chamber 1, and / or a pressure is applied in a direction in which the second valve 34 is closed due to the difference between the gas pressure in the first intermediate chamber 3 and the gas pressure in the second processing chamber 2. Specifically, in this embodiment, the first valve 33 is driven from the first intermediate chamber 3 side to the first processing chamber 1 side to close the gap between the first processing chamber 1 and the first intermediate chamber 3, and the second valve 34 is driven from the first intermediate chamber 3 side to the second processing chamber 2 side to close the gap between the second processing chamber 2 and the first intermediate chamber 3. Therefore, the gas pressure in the first intermediate chamber 3 is adjusted to a gas pressure higher than the gas pressure in the first processing chamber 1 and the gas pressure in the second processing chamber 2. Therefore, although not particularly limited, the gas pressure in the first intermediate chamber 3 can be calculated by adding a predetermined gas pressure to the greater of the set gas pressures of the first processing chamber 1 and the second processing chamber 2.

[0068] Furthermore, the control unit 62 controls the flow rate of the gas supplied from the second gas supply source GS2, the opening and closing of the third opening and closing device V3, and / or the opening and closing of the fourth opening and closing device V4 based on the set pressure of the fourth space SP4 of the second intermediate chamber 4 and the actual measured pressure of the fourth space SP4. This allows the second space SP2 to be at the set pressure.

[0069] That is, when closing the third valve 43 and the fourth valve 44, the control device 6 sets and adjusts the gas pressure in the second intermediate chamber 4 so that a pressure is applied in a direction in which the third valve 43 is closed due to the difference between the gas pressure in the second intermediate chamber 4 and the gas pressure in the second processing chamber 2, and / or a pressure is applied in a direction in which the fourth valve 44 is closed due to the difference between the gas pressure in the second intermediate chamber 4 and the gas pressure in the final processing chamber 5. Specifically, in this embodiment, the third valve 43 is driven from the second intermediate chamber 4 side to the second processing chamber 2 side to close the gap between the second processing chamber 2 and the second intermediate chamber 4, and the fourth valve 44 is driven from the second intermediate chamber 4 side to the final processing chamber 5 side to close the gap between the final processing chamber 5 and the second intermediate chamber 4. Therefore, the gas pressure in the second intermediate chamber 4 is adjusted to a gas pressure higher than the gas pressure in the second processing chamber 2 and the gas pressure in the final processing chamber 5.

[0070] <5. Operation of the continuous furnace> Hereinafter, the operation of treating the object in the continuous furnace 100 will be described with reference to Figures 4 and 5. Figures 4 and 5 are flowcharts showing the operation of the continuous furnace 100. First, the control unit 62 spatially separates the first space SP1 of the first treatment chamber 1, the third space SP3 of the first intermediate chamber 3, the second space SP2 of the second treatment chamber 2, the fourth space SP4 of the second intermediate chamber 4, and the fifth space SP5 of the final treatment chamber 5 (step S1).

[0071] Specifically, the control unit 62 causes the first actuator 36 to move the first valve driving rod 35 downward to move the first valve 33 and the second valve 34 downward, bringing the first valve 33 into contact with the first connecting portion 31 of the first intermediate chamber 3, and bringing the second valve 34 into contact with the second connecting portion 32. In this state, the control unit 62 causes the first actuator 36 to move the first valve driving rod 35 further downward to bring the first valve 33 into close contact with the first connecting portion 31 with a predetermined force, and the second valve 34 into close contact with the second connecting portion 32 with a predetermined force.

[0072] As a result, the first valve 33 closes the gap between the first processing chamber 1 and the first intermediate chamber 3 (the first valve 33 is in a closed state), and the second valve 34 closes the gap between the second processing chamber 2 and the first intermediate chamber 3 (the second valve 34 is in a closed state). As a result, the first space SP1 of the first processing chamber 1, the second space SP2 of the second processing chamber 2, and the third space SP3 of the first intermediate chamber 3 are spatially separated, and it becomes possible to set separate pressures and temperatures independently in the first space SP1, the second space SP2, and the third space SP3.

[0073] Similarly to the control of the first valve 33 and the second valve 34, the control unit 62 moves the second valve driving rod 45 downward by the second actuator 46 to move the third valve 43 and the fourth valve 44 downward, so that the third valve 43 is brought into close contact with the first connecting part 31 with a predetermined force, and the second valve 34 is brought into close contact with the second connecting part 32 with a predetermined force. As a result, the third valve 43 closes the space between the second processing chamber 2 and the second intermediate chamber 4 (the third valve 43 is in a closed state), and the fourth valve 44 closes the space between the final processing chamber 5 and the second intermediate chamber 4 (the fourth valve 44 is in a closed state). As a result, the second space SP2 of the second processing chamber 2, the fifth space SP5 of the final processing chamber 5, and the fourth space SP4 of the second intermediate chamber 4 are spatially separated, and it becomes possible to set individual pressures and temperatures independently in the second space SP2, the fourth space SP4, and the fifth space SP5.

[0074] Next, the control unit 62 introduces gas from the second gas supply source GS2 into the third space SP3 of the first intermediate chamber 3, and sets the pressure in the third space SP3 to a pressure higher than the set pressure of the first space SP1 of the first processing chamber 1 and the set pressure of the second space SP2 of the second processing chamber 2. In addition, the control unit 62 introduces gas from the second gas supply source GS2 into the fourth space SP4 of the second intermediate chamber 4, and sets the pressure in the fourth space SP4 to a pressure higher than the set pressure of the second space SP2 of the second processing chamber 2 and the set pressure of the fifth space SP5 of the final processing chamber 5 (step S2).

[0075] For example, when the set pressure of the first space SP1 for processing the object is the first pressure P1 and the set pressure of the second space SP2 is the second pressure P2, the control unit 62 sets the pressure of the third space SP3 of the first intermediate chamber 3 to a pressure higher than the first pressure P1 and higher than the second pressure P2. More specifically, when the first pressure P1 is 0.8 MPa and the second pressure P2 is 0.5 MPa, the pressure of the third space SP3 can be set to 0.9 MPa. As a result, the pressure difference between the pressure of the first intermediate chamber 3 and the pressure of the first processing chamber 1 applies pressure in a direction to close the first valve 33, so that the degree of elastic compression of the seal member provided in the first valve 33 increases, and the first valve 33 comes into closer contact with the first connection portion 31 more firmly. Similarly, the pressure difference between the pressure in the first intermediate chamber 3 and the pressure in the second processing chamber 2 applies pressure in a direction to close the second valve 34, increasing the degree of elastic compression of the sealing member provided in the second valve 34, and causing the second valve 34 to adhere more firmly to the second connection portion 32.

[0076] Similarly, when the set pressure of the fifth space SP5 of the final processing chamber 5 is the fifth pressure P5, the control unit 62 sets the pressure of the fourth space SP4 of the second intermediate chamber 4 to a pressure higher than the second pressure P2, which is the set pressure of the second space SP2, and higher than the fifth pressure P5. As a result, the pressure difference between the pressure of the second intermediate chamber 4 and the pressure of the second processing chamber 2 applies pressure in a direction in which the third valve 43 is closed, so that the degree of elastic compression of the seal member provided in the third valve 43 increases, and the third valve 43 comes into closer contact with the third connecting portion 41 more firmly. Similarly, the pressure difference between the pressure of the second intermediate chamber 4 and the pressure of the final processing chamber 5 applies pressure in a direction in which the fourth valve 44 is closed, so that the degree of elastic compression of the seal member provided in the fourth valve 44 increases, and the fourth valve 44 comes into closer contact with the fourth connecting portion 42 more firmly.

[0077] After spatially separating the first space SP1 of the first treatment chamber 1, the second space SP2 of the second treatment chamber 2, the third space SP3 of the first intermediate chamber 3, the fourth space SP4 of the second intermediate chamber 4, and the fifth space SP5 of the final treatment chamber 5, the entrance door 11 provided at the opening on one end side of the first treatment chamber 1 is opened, and the object to be processed is placed on the first conveying roller 12 provided in the first space SP1 of the first treatment chamber 1 (step S3).

[0078] Thereafter, the control unit 62 sets the first space SP1 of the first processing chamber 1 to a set temperature and set pressure for performing processing (heat processing) on ​​the object (step S4), and performs the processing on the object (step S5).

[0079] Specifically, the control unit 62 controls the amount of power output to the first heater 13 based on the set temperature and the actual temperature of the first space SP1 measured by the first temperature sensor T1 to set the first space SP1 to the set temperature. Also, the control unit 62 controls the flow rate of gas supplied from the first gas supply source GS1, the opening and closing of the first opening and closing device V1, the opening and closing of the second opening and closing device V2, and / or the pump RP based on the set pressure and the actual pressure of the first space SP1 to set the first space SP1 to the set pressure.

[0080] Furthermore, in order to perform a process on the object in the second process chamber 2, the control unit 62 may control the second space SP2 of the second process chamber 2 to a set temperature and a set pressure for this process. Specifically, the control unit 62 controls the amount of power output to the second heater 22 based on the set temperature and the actual temperature of the second space SP2 measured by the second temperature sensor T2 to set the second space SP2 to the set temperature. Furthermore, the control unit 62 controls the flow rate of the gas supplied from the first gas supply source GS1, the opening and closing of the first opening and closing device V1, the opening and closing of the second opening and closing device V2, and / or the pump RP based on the set pressure and the actual pressure of the second space SP2 to set the second space SP2 to the set pressure.

[0081] The control of setting the second space SP2 to the set temperature and pressure may be carried out in parallel with the control of setting the first space SP1 to the set temperature and pressure (i.e., step S4), or may be started after the process of separating the first space SP1 to the fifth space SP5 (i.e., step S2) is carried out.

[0082] While processing is being performed in the first processing chamber 1, the control unit 62 determines whether processing has been performed on the object in the first processing chamber 1 for a preset time (step S6). If processing of the object has not been performed for the set time ("No" in step S6), the control unit 62 maintains the set temperature and set pressure of the first space SP1 as they are and continues processing the object.

[0083] On the other hand, if the processing of the object has been performed for the set time ("Yes" in step S6), the control unit 62 transports the object after processing in the first processing chamber 1 from the first space SP1 of the first processing chamber 1 to the second space SP2 of the second processing chamber 2. When transporting the object, the following steps are performed.

[0084] First, the control unit 62 sets the first space SP1 of the first processing chamber 1, the second space SP2 of the second processing chamber 2, and the third space SP3 of the first intermediate chamber 3 to the same pressure (step S7). Specifically, the control unit 62 controls the amount of gas supplied from the first gas supply source GS1 and / or the second gas supply source GS2, the opening and closing of the first opening / closing device V1 to the fourth opening / closing device V4, and / or the pump RP so that the first pressure gauge G1 and the second pressure gauge G2 are at the same pressure, thereby setting the pressures of the first space SP1 to the third space SP3 to the same pressure.

[0085] In addition, when step S7 is performed, the second space SP2 is often at a set pressure for the process to be performed in the second processing chamber 2, and the processing of the object in the second processing chamber 2 will continue to be performed. Therefore, in step S7, it is preferable that the pressures in the first space SP1 to the third space SP3 are set to the same as the set pressure of the second space SP2. This makes it possible to prevent the atmosphere (pressure, temperature) formed in the second space SP2 from changing significantly even if the first space SP1 to the third space SP3 are spatially connected by opening the first valve 33 and the second valve 34 in a later process. As a result, it is possible to shorten the time required to reset the second space SP2 to the pressure and temperature for the process to be performed in the second processing chamber 2.

[0086] After the first space SP1 to the third space SP3 are made to have the same pressure, the control unit 62 releases the first valve 33 from the first connection portion 31 to open the space between the first processing chamber 1 and the first intermediate chamber 3 (opens the first valve 33), and releases the second valve 34 from the second connection portion 32 to open the space between the second processing chamber 2 and the first intermediate chamber 3 (opens the second valve 34) (step S8).

[0087] Specifically, the control unit 62 moves the first valve driving rod 35 upward using the first actuator 36 to move the first valve 33 and the second valve 34 upward, moving the first valve 33 away from the first connecting part 31 and moving the second valve 34 away from the second connecting part 32. This spatially connects the first space SP1 of the first treatment chamber 1, the second space SP2 of the second treatment chamber 2, and the third space SP3 of the first intermediate chamber 3. As a result, the object processed in the first treatment chamber 1 can be transported from the first space SP1 of the first treatment chamber 1 to the second space SP2 of the second treatment chamber 2.

[0088] As described above, by opening the first valve 33 and the second valve 34 after the first space SP1 to the third space SP3 are made to have the same pressure, it becomes unnecessary to separate the first valve 33 from the first connection part 31 against the force generated by the pressure difference between the first space SP1 and the third space SP3, and to separate the second valve 34 from the second connection part 32 against the force generated by the pressure difference between the second space SP2 and the third space SP3. As a result, it is possible to suppress a large load from being applied to the drive parts of these valves (for example, the first link mechanism 33a, the second link mechanism 34a, the first valve drive rod 35, the first actuator 36, etc.).

[0089] After opening the first valve 33 and the second valve 34 to connect the first space SP1 to the third space SP3, the control unit 62 transports the object after processing in the first processing chamber 1 from the first space SP1 of the first processing chamber 1 to the second space SP2 of the second processing chamber 2 (step S9). Specifically, the control unit 62 rotates the first transport roller 12 by the first motor 14 to transport the object from the first space SP1 to the third space SP3 of the first intermediate chamber 3. Thereafter, the control unit 62 rotates the third transport roller 37 and the fourth transport roller 38 by the third motor 39 to transport the object from the third space SP3 to the second space SP2 of the second processing chamber 2.

[0090] After the object is transported to the second space SP2, the control unit 62 closes the first valve 33 and the second valve 34 to spatially separate the first space SP1 of the first processing chamber 1, the third space SP3 of the first intermediate chamber 3, and the second space SP2 of the second processing chamber 2 (step S10 in FIG. 5). The specific control when closing the first valve 33 and the second valve 34 is the same as that described in step S1 above, and therefore will not be described here.

[0091] Thereafter, as necessary, the second space SP2 of the second processing chamber 2 is set to a set temperature and set pressure for processing the object, and processing is performed on the object transported to the second space SP2 (step S11).

[0092] While processing is being performed in the second processing chamber 2, the control unit 62 determines whether processing has been performed on the object in the second processing chamber 2 for a preset time (step S12). If processing of the object has not been performed for the set time ("No" in step S12), the control unit 62 maintains the set temperature and set pressure of the second space SP2 as they are and continues processing the object.

[0093] On the other hand, if the processing of the object has been performed for the set time ("Yes" in step S12), the control unit 62 transports the object after processing in the second processing chamber 2 from the second space SP2 of the second processing chamber 2 to the fifth space SP5 of the final processing chamber 5. When transporting the object, the following steps are executed.

[0094] First, the control unit 62 sets the second space SP2 of the second processing chamber 2, the fourth space SP4 of the second intermediate chamber 4, and the fifth space SP5 of the final processing chamber 5 to the same pressure (step S13). Specifically, the control unit 62 controls the amount of gas supplied from the first gas supply source GS1 and / or the second gas supply source GS2, the opening and closing of the first opening / closing device V1 to the fourth opening / closing device V4, and / or the pump RP so that the first pressure gauge G1 and the second pressure gauge G2 are at the same pressure, thereby setting the pressures of the second space SP2, the fourth space SP4, and the fifth space SP5 to the same pressure. In this case, as in the above step S7, it is preferable to set the pressures of these spaces to the same pressure as the set pressure of the second space SP2.

[0095] After the second space SP2, the fourth space SP4, and the fifth space SP5 are all at the same pressure, the control unit 62 releases the third valve 43 from the third connection portion 41 to open the space between the second processing chamber 2 and the second intermediate chamber 4 (opens the third valve 43), and releases the fourth valve 44 from the fourth connection portion 42 to open the space between the final processing chamber 5 and the second intermediate chamber 4 (opens the fourth valve 44) (step S14).

[0096] Specifically, the control unit 62 moves the second valve driving rod 45 upward using the second actuator 46 to move the third valve 43 and the fourth valve 44 upward, moving the third valve 43 away from the third connecting part 41 and moving the fourth valve 44 away from the fourth connecting part 42. This spatially connects the second space SP2 of the second treatment chamber 2, the fourth space SP4 of the second intermediate chamber 4, and the fifth space SP5 of the final treatment chamber 5. As a result, the object processed in the second treatment chamber 2 can be transported from the second space SP2 of the second treatment chamber 2 to the fifth space SP5 of the final treatment chamber 5.

[0097] As described above, by opening the third valve 43 and the fourth valve 44 after the second space SP2, the fourth space SP4, and the fifth space SP5 are made to have the same pressure, the third valve 43 is separated from the third connecting part 41, and therefore no large force is required to separate the fourth valve 44 from the fourth connecting part 42. As a result, it is possible to prevent a large load from being applied to the drive parts of these valves.

[0098] After opening the third valve 43 and the fourth valve 44 to connect the second space SP2, the fourth space SP4, and the fifth space SP5, the control unit 62 transports the object processed in the second treatment chamber 2 from the second space SP2 of the second treatment chamber 2 to the fifth space SP5 of the final treatment chamber 5 (step S15). Specifically, the control unit 62 rotates the second transport roller 21 by the second motor 23 to transport the object from the second space SP2 to the fourth space SP4 of the second intermediate chamber 4. Thereafter, the control unit 62 rotates the fifth transport roller 47 and the sixth transport roller 48 by the fourth motor 49 to transport the object from the fourth space SP4 to the fifth space SP5 of the final treatment chamber 5.

[0099] After the object is transported to the fifth space SP5, the control unit 62 closes the third valve 43 and the fourth valve 44 to spatially separate the second space SP2 of the second processing chamber 2, the fourth space SP4 of the second intermediate chamber 4, and the fifth space SP5 of the final processing chamber 5 (step S16). The specific control when closing the third valve 43 and the fourth valve 44 is the same as that described in step S1 above, and therefore will not be described here.

[0100] Thereafter, as necessary, the fifth space SP5 of the final processing chamber 5 is set to a set pressure for processing the object, and processing is performed on the object transported to the fifth space SP5 (step S17). Specifically, the control unit 62 drives the cooling device 53 to cool the object transported to the fifth space SP5. After the object has been sufficiently cooled, the exit door 51 provided at the opening on the other end side of the final processing chamber 5 is opened, and the cooled object is taken out to the outside.

[0101] In this way, in the continuous furnace 100, when the first valve 33 to the fourth valve 44 spatially separate the processing chambers from the intermediate chambers to process the objects in each processing chamber, the pressure in the internal space of each intermediate chamber (third space SP3, fourth space SP4) is set to be higher than the pressure in the internal space of each processing chamber (first space SP1, second space SP2, fifth space SP5). Therefore, a pressure difference occurs between each intermediate chamber and each processing chamber, and this pressure difference generates a force in the first valve 33 to the fourth valve 44 that pushes these valves in the direction from the intermediate chamber to the processing chamber. The force that pushes the valves caused by this pressure difference is added to the force that the valve driving rod pushes these valves toward the connecting parts of the intermediate chambers, and the first valve 33 to the fourth valve 44 can be reliably and firmly attached to the connecting parts of the corresponding intermediate chambers (first connecting part 31 to fourth connecting part 42) with a stronger force. In other words, the elastic deformation amount of the seal members provided in the first valve 33 to the fourth valve 44 can be increased. As a result, even if each processing chamber becomes high pressure, each processing chamber and each intermediate chamber can be securely closed, so that leakage between the processing chamber and the intermediate chamber can be prevented.

[0102] <6. Variation 1> In the above-described continuous furnace 100, when the first space SP1 to the fifth space SP5 of each processing chamber and each intermediate chamber are connected, the first valve 33 to the fourth valve 44 are driven to open with these spaces at the same pressure. The continuous furnace 100 of the first modification has a configuration that can more reliably make the pressures of the first space SP1 to the fifth space SP5 the same.

[0103] Specifically, as shown in Fig. 6, the continuous furnace 100 of the first modification further includes a first bypass pipe BP1 connecting the first space SP1 of the first treatment chamber 1 and the third space SP3 of the first intermediate chamber 3, a second bypass pipe BP2 connecting the third space SP3 of the first intermediate chamber 3 and the second space SP2 of the second treatment chamber 2, a third bypass pipe BP3 connecting the second space SP2 of the second treatment chamber 2 and the fourth space SP4 of the second intermediate chamber 4, and a fourth bypass pipe BP4 connecting the fourth space SP4 of the second intermediate chamber 4 and the fifth space SP5 of the final treatment chamber 5. Fig. 6 is a diagram showing the configuration of the continuous furnace 100 of the first modification.

[0104] Furthermore, the first bypass pipe BP1 is provided with a fifth opening and closing device V5 for opening and closing the first bypass pipe BP1. The second bypass pipe BP2 is provided with a sixth opening and closing device V6 for opening and closing the second bypass pipe BP2. The third bypass pipe BP3 is provided with a seventh opening and closing device V7 for opening and closing the third bypass pipe BP3. The fourth bypass pipe BP4 is provided with an eighth opening and closing device V8 for opening and closing the fourth bypass pipe BP4. The fifth opening and closing device V5 to the eighth opening and closing device V8 are, for example, valves such as electromagnetic valves.

[0105] In the continuous furnace 100 of the first modification, when the first space SP1 to the fifth space SP5 of each processing chamber and each intermediate chamber are connected, the control unit 62 introduces gas into the first space SP1 to the fifth space SP5 and / or exhausts gas from these spaces in the same manner as described above to keep the pressures in the first space SP1 to the fifth space SP5 approximately the same. After that, the control unit 62 opens the necessary ones of the fifth opening and closing device V5 to the eighth opening and closing device V8, and sets the necessary ones of the first bypass pipe BP1 to the fourth bypass pipe BP4 to a state in which gas can flow.

[0106] Specifically, when the pressures in the first space SP1 to the third space SP3 are to be made equal to each other in order to open the first valve 33 and the second valve 34, the control unit 62 opens the fifth opening / closing device V5 and the sixth opening / closing device V6 to make the first bypass pipe BP1 and the second bypass pipe BP2 in a state in which gas can flow. When the first bypass pipe BP1 and the second bypass pipe BP2 are in a state in which gas can flow, even if there is a difference in pressure between the first space SP1 to the third space SP3, a gas flow according to the pressure difference is generated in the first bypass pipe BP1 and / or the second bypass pipe BP2, so that the pressures in the first space SP1 to the third space SP3 can be made equal more reliably.

[0107] On the other hand, when the pressures in the second space SP2, the fourth space SP4, and the fifth space SP5 are made equal to each other in order to open the third valve 43 and the fourth valve 44, the control unit 62 opens the seventh opening / closing device V7 and the eighth opening / closing device V8 to make the third bypass pipe BP3 and the fourth bypass pipe BP4 in a gas-permeable state. When the third bypass pipe BP3 and the fourth bypass pipe BP4 are in a gas-permeable state, even if there is a difference in pressure between the second space SP2, the fourth space SP4, and the fifth space SP5, a gas flow corresponding to the pressure difference is generated in the third bypass pipe BP3 and / or the fourth bypass pipe BP4, so that the pressures in the second space SP2, the fourth space SP4, and the fifth space SP5 can be made equal more reliably.

[0108] <7. Variation 2> In the above-mentioned continuous furnace 100, the first valve 33 to the fourth valve 44 are disposed inside the internal space (third space SP3, fourth space SP4) of each intermediate chamber. However, this is not limited thereto, and in the continuous furnace 100 of the second modification, these valves are disposed in the treatment chambers as shown in FIG. 7. Specifically, the first valve 33 is disposed on the first intermediate chamber 3 side of the first treatment chamber 1, and the second valve 34 is disposed on the first intermediate chamber 3 side of the second treatment chamber 2. The first valve 33 is opened and closed by the vertical movement of the third valve drive rod 35a. The second valve 34 is opened and closed by the vertical movement of the fourth valve drive rod 35b. FIG. 7 is a diagram showing the configuration of the continuous furnace 100 of the second modification.

[0109] In the continuous furnace 100 of the second modification, the control unit 62 brings the first valve 33 into close contact with the connection portion of the first treatment chamber 1 with the first intermediate chamber 3 to close the gap between the first treatment chamber 1 and the first intermediate chamber 3. The control unit 62 also brings the second valve 34 into close contact with the connection portion of the second treatment chamber 2 with the first intermediate chamber 3 to close the gap between the second treatment chamber 2 and the first intermediate chamber 3. That is, the first valve 33 is driven from the first treatment chamber 1 side to the first intermediate chamber 3 side to close the gap between the first treatment chamber 1 and the first intermediate chamber 3, and the second valve 34 is driven from the second treatment chamber 2 side to the first intermediate chamber 3 side to close the gap between the second treatment chamber 2 and the first intermediate chamber 3.

[0110] Furthermore, when the control unit 62 closes the first valve 33 and the second valve 34, it sets the pressure in the third space SP3 of the first intermediate chamber 3 lower than the set pressure of the first space SP1 of the first processing chamber 1 and lower than the set pressure of the second space SP2 of the second processing chamber 2. This allows a pressure difference between the first space SP1 and the third space SP3 to apply pressure in a direction in which the first valve 33 is closed, so that a force that brings the first valve 33 into close contact with the connection portion of the first processing chamber 1 and the first intermediate chamber 3 can be increased. Furthermore, a pressure difference between the second space SP2 and the third space SP3 allows a pressure to be applied in a direction in which the second valve 34 is closed, so that a force that brings the second valve 34 into close contact with the connection portion of the second processing chamber 2 and the first intermediate chamber 3 can be increased.

[0111] Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications are possible without departing from the gist of the invention.

[0112] (A) The processing content of each step in the flowcharts shown in FIGS. 4 and 5 and the processing order of each step can be modified as appropriate without departing from the spirit and scope of the invention.

[0113] (B) The configuration of the processing chambers included in the continuous furnace 100 is not limited to the configuration including only the first processing chamber 1, the second processing chamber 2, and the final processing chamber 5 as described above. For example, as shown in Fig. 8, a third processing chamber 7 can be further connected to the other end side of the second processing chamber 2 without an intermediate chamber. Fig. 8 is a diagram showing the configuration of a continuous furnace 100 in another embodiment.

[0114] (C) The control method of the continuous furnace of the present invention can be realized even in a continuous furnace that does not have a dedicated pressure adjustment mechanism for the first intermediate chamber 3 (i.e., the third gas line GL3, the fourth gas line GL4, the second gas supply source GS2, the third opening / closing device V3, the fourth opening / closing device V4, etc.) in Fig. 1 or Fig. 7. In this case, when the pressure in the first intermediate chamber 3 is set to be higher or lower than the pressure in the first treatment chamber 1 and the pressure in the second treatment chamber 2, first, the pressure adjustment mechanism of the first treatment chamber 1 or the second treatment chamber 2 is used to set the pressure in the first intermediate chamber 3 with the first valve 33 and the second valve 34 open. Then, the first valve 33 and the second valve 34 are closed, and the pressure in the first treatment chamber 1 and the pressure in the second treatment chamber 2 are set using the respective pressure adjustment mechanisms.

[0115] The final treatment chamber 5 present at the final stage of the continuous furnace 100 is also a treatment chamber separate from the first treatment chamber 1 and the second treatment chamber 2, and can be considered as an example of a third treatment chamber. Also, a plurality of first treatment chambers 1 and second treatment chambers 2 may be present.

[0116] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0117] (First aspect) A control method for a continuous furnace comprising a first treatment chamber capable of treating an object, a second treatment chamber capable of treating an object, an intermediate chamber disposed between the first treatment chamber and the second treatment chamber, a first closing mechanism for opening and closing between the first treatment chamber and the intermediate chamber, and a second closing mechanism for opening and closing between the second treatment chamber and the intermediate chamber, the control method including the steps of closing the first closing mechanism and the second closing mechanism, and adjusting the gas pressure in the intermediate chamber so that, in the step of closing the first closing mechanism and the second closing mechanism, a pressure is applied in the direction of closing the first closing mechanism due to a difference in gas pressure between the intermediate chamber and the gas pressure of the first treatment chamber, and / or a pressure is applied in the direction of closing the second closing mechanism due to a difference in gas pressure between the intermediate chamber and the gas pressure of the second treatment chamber.

[0118] In the control method for a continuous furnace according to the first aspect, a pressure difference occurs between the intermediate chamber and the first processing chamber, and this pressure difference applies a force to the first valve in a direction in which the first valve is closed, so that the first valve can be more reliably attached to the opening portion communicating between the first processing chamber and the intermediate chamber. Also, a pressure difference occurs between the intermediate chamber and the second processing chamber, and this pressure difference applies a force to the second valve in a direction in which the second valve is closed, so that the second valve can be more reliably attached to the opening portion communicating between the second processing chamber and the intermediate chamber. As a result, even if the first processing chamber and / or the second processing chamber becomes high pressure, the first processing chamber and the intermediate chamber can be more reliably closed, and the second processing chamber and the intermediate chamber can be more reliably closed, so that leakage between these processing chambers and the intermediate chamber can be suppressed or prevented.

[0119] (Second Aspect) In the method for controlling a continuous furnace according to the first aspect, the first closing mechanism is driven from the intermediate chamber side to the first treatment chamber side to close the gap between the first treatment chamber and the intermediate chamber, and the second closing mechanism is driven from the intermediate chamber side to the second treatment chamber side to close the gap between the second treatment chamber and the intermediate chamber. When the first closing mechanism and the second closing mechanism are closed, the gas pressure in the intermediate chamber is adjusted to a gas pressure higher than the gas pressures in the first treatment chamber and the second treatment chamber. As a result, similarly to the first embodiment, even if the first processing chamber and / or the second processing chamber becomes high pressure, the first processing chamber and the intermediate chamber can be more reliably closed, and the second processing chamber and the intermediate chamber can be more reliably closed, thereby suppressing or preventing the occurrence of leaks between these processing chambers and the intermediate chamber.

[0120] (Third Aspect) In the method for controlling a continuous furnace according to the first aspect, the first closing mechanism is driven from the first treatment chamber side to the intermediate chamber side to close the gap between the first treatment chamber and the intermediate chamber, and the second closing mechanism is driven from the second treatment chamber side to the intermediate chamber side to close the gap between the second treatment chamber and the intermediate chamber. When the first closing mechanism and the second closing mechanism are closed, the gas pressure in the intermediate chamber is adjusted to a gas pressure lower than the gas pressures in the first treatment chamber and the second treatment chamber. As a result, similarly to the first embodiment, even if the first processing chamber and / or the second processing chamber becomes high pressure, the first processing chamber and the intermediate chamber can be more reliably closed, and the second processing chamber and the intermediate chamber can be more reliably closed, thereby suppressing or preventing the occurrence of leaks between these processing chambers and the intermediate chamber.

[0121] (Fourth Aspect) In the control method of a continuous furnace according to any one of the first to third aspects, when the first closing mechanism and the second closing mechanism are opened, the gas pressure in the first treatment chamber, the gas pressure in the second treatment chamber, and the gas pressure in the intermediate chamber are adjusted to the same gas pressure. In this case, it is possible to prevent a large load from being applied to the drive mechanisms of the first closing mechanism and the second closing mechanism.

[0122] (Fifth Aspect) In the control method for the continuous furnace according to the fourth aspect, the continuous furnace further has a bypass pipe connecting the first treatment chamber, the second treatment chamber, and the intermediate chamber, and an opening / closing device for opening and closing the bypass pipe, and when the first closing mechanism and the second closing mechanism are opened, the opening / closing device is opened, thereby adjusting the gas pressure in the first treatment chamber, the gas pressure in the second treatment chamber, and the gas pressure in the intermediate chamber to the same gas pressure. In this case, the pressures in the first processing chamber, the second processing chamber, and the intermediate chamber can be more reliably made the same, so that, as in the fourth aspect, it is possible to prevent a large load from being placed on the drive mechanisms of the first closing mechanism and the second closing mechanism.

[0123] (Sixth Aspect) In the method for controlling a continuous furnace according to any one of the first to fifth aspects, the gas pressure in the first treatment chamber and the gas pressure in the second treatment chamber are within a range of -0.1 MPa or more and less than 1 MPa. That is, since the first and second processing chambers are set to high pressure and processing is performed, the problem of gas leakage becomes more pronounced; however, as in the first embodiment, even if the first and / or second processing chamber is at high pressure, the first processing chamber and the intermediate chamber can be more securely closed, and the second processing chamber and the intermediate chamber can be more securely closed, so that leakage between these processing chambers and the intermediate chamber can be suppressed or prevented.

[0124] (Seventh aspect) A continuous furnace includes a first treatment chamber capable of treating an object, a second treatment chamber capable of treating an object, an intermediate chamber disposed between the first treatment chamber and the second treatment chamber, a first closing mechanism for opening and closing between the first treatment chamber and the intermediate chamber, a second closing mechanism for opening and closing between the second treatment chamber and the intermediate chamber, a first pressure adjustment mechanism for adjusting the gas pressure in the first treatment chamber, a second pressure adjustment mechanism for adjusting the gas pressure in the second treatment chamber, and a third pressure adjustment mechanism for adjusting the gas pressure in the intermediate chamber independently of the gas pressures in the first treatment chamber and the second treatment chamber.

[0125] In the continuous furnace according to the seventh aspect, the gas pressure in the intermediate chamber can be adjusted independently, and therefore, by adjusting the gas pressure in the intermediate chamber, a pressure can be applied in a direction to close the first closing mechanism due to the difference between the gas pressure in the first processing chamber and the gas pressure in the intermediate chamber, and / or a pressure can be applied in a direction to close the second closing mechanism due to the difference between the gas pressure in the second processing chamber and the gas pressure in the intermediate chamber. Even if the first processing chamber and / or the second processing chamber become high pressure, the first processing chamber and the intermediate chamber can be more reliably closed, and the second processing chamber and the intermediate chamber can be more reliably closed, so that leakage between these processing chambers and the intermediate chamber can be suppressed or prevented.

[0126] (8th Aspect) The continuous furnace according to the 7th aspect further includes a first pressure adjustment mechanism, a second pressure adjustment mechanism, and a third pressure adjustment mechanism, and a control unit that controls the opening and closing of the first closing mechanism and the second closing mechanism, and the control unit controls the third pressure adjustment mechanism so that a pressure is applied in the direction of closing the first closing mechanism due to a difference between the gas pressure in the first processing chamber and the gas pressure in the intermediate chamber, and / or so that a pressure is applied in the direction of closing the second closing mechanism due to a difference between the gas pressure in the second processing chamber and the gas pressure in the intermediate chamber.

[0127] In this case, a pressure difference occurs between the intermediate chamber and the first processing chamber, and this pressure difference applies a force to the first valve in a direction in which the first valve is closed, so that the first valve can be more reliably attached to the opening portion communicating between the first processing chamber and the intermediate chamber. Also, a pressure difference occurs between the intermediate chamber and the second processing chamber, and this pressure difference applies a force to the second valve in a direction in which the second valve is closed, so that the second valve can be more reliably attached to the opening portion communicating between the second processing chamber and the intermediate chamber. As a result, even if the first processing chamber and / or the second processing chamber becomes high pressure, the first processing chamber and the intermediate chamber can be more reliably closed, and the second processing chamber and the intermediate chamber can be more reliably closed, so that leakage between these processing chambers and the intermediate chamber can be suppressed or prevented.

[0128] (Ninth Aspect) In the continuous furnace according to the eighth aspect, the first closing mechanism drives from the intermediate chamber side to the first treatment chamber side to close the gap between the first treatment chamber and the intermediate chamber, and the second closing mechanism drives from the intermediate chamber side to the second treatment chamber side to close the gap between the second treatment chamber and the intermediate chamber, and the third pressure adjustment mechanism adjusts the gas pressure in the intermediate chamber to a gas pressure higher than the gas pressure in the first treatment chamber and the gas pressure in the second treatment chamber. As a result, as in the eighth embodiment, even if the first processing chamber and / or the second processing chamber becomes high pressure, the first processing chamber and the intermediate chamber can be more reliably closed, and the second processing chamber and the intermediate chamber can be more reliably closed, thereby suppressing or preventing leaks between these processing chambers and the intermediate chamber.

[0129] (10th Aspect) In the continuous furnace according to the eighth aspect, the first closing mechanism drives from the first treatment chamber side to the intermediate chamber side to close the gap between the first treatment chamber and the intermediate chamber, and the second closing mechanism drives from the second treatment chamber side to the intermediate chamber side to close the gap between the second treatment chamber and the intermediate chamber, and the third pressure adjustment mechanism adjusts the gas pressure in the intermediate chamber to a gas pressure lower than the gas pressure in the first treatment chamber and the gas pressure in the second treatment chamber. As a result, as in the eighth embodiment, even if the first processing chamber and / or the second processing chamber becomes high pressure, the first processing chamber and the intermediate chamber can be more reliably closed, and the second processing chamber and the intermediate chamber can be more reliably closed, thereby suppressing or preventing leaks between these processing chambers and the intermediate chamber.

[0130] (Eleventh Aspect) In the continuous furnace according to any one of the seventh to tenth aspects, the first pressure adjustment mechanism, the second pressure adjustment mechanism, and the third pressure adjustment mechanism adjust the gas pressures in the first treatment chamber, the second treatment chamber, and the intermediate chamber to the same gas pressure when the first closing mechanism and the second closing mechanism are opened. In this case, it is possible to prevent a large load from being applied to the drive mechanisms of the first closing mechanism and the second closing mechanism.

[0131] (Twelfth Aspect) The continuous furnace according to the eleventh aspect further includes a bypass pipe connecting the first treatment chamber, the second treatment chamber, and the intermediate chamber, and an opening / closing device for opening and closing the bypass pipe, and the first pressure adjustment mechanism, the second pressure adjustment mechanism, and the third pressure adjustment mechanism open the opening / closing device to adjust the gas pressures in the first treatment chamber, the second treatment chamber, and the intermediate chamber to the same gas pressure. In this case, the pressures in the first processing chamber, the second processing chamber, and the intermediate chamber can be more reliably made the same, so that, as in the eleventh embodiment, a large load can be prevented from being placed on the drive mechanisms of the first closing mechanism and the second closing mechanism.

[0132] (Thirteenth Aspect) In the continuous furnace according to any one of the seventh to twelfth aspects, the gas pressure in the first treatment chamber and the gas pressure in the second treatment chamber are within a range of -0.1 MPa or more and less than 1 MPa. That is, since the first processing chamber and the second processing chamber are set to high pressure and processing is performed, the problem of gas leakage becomes more pronounced; however, as in the first embodiment, even if the first processing chamber and / or the second processing chamber becomes high pressure, the first processing chamber and the intermediate chamber can be more securely closed, and the second processing chamber and the intermediate chamber can be more securely closed, so that leakage between these processing chambers and the intermediate chamber can be suppressed or prevented.

[0133] (14th aspect) A control program that causes a computer to execute functions of a continuous furnace comprising a first treatment chamber capable of treating an object, a second treatment chamber capable of treating an object, an intermediate chamber disposed between the first treatment chamber and the second treatment chamber, a first closing mechanism that opens and closes between the first treatment chamber and the intermediate chamber, and a second closing mechanism that opens and closes between the second treatment chamber and the intermediate chamber, the control program causing the computer to execute the steps of closing the first closing mechanism and the second closing mechanism, and adjusting the gas pressure in the intermediate chamber so that, in the step of closing the first closing mechanism and the second closing mechanism, a pressure is applied in the direction of closing the first closing mechanism due to a difference in gas pressure between the intermediate chamber and the gas pressure of the first treatment chamber, and / or a pressure is applied in the direction of closing the second closing mechanism due to a difference in gas pressure between the intermediate chamber and the gas pressure of the second treatment chamber. [Explanation of symbols]

[0134] 100: Continuous furnace 1: First treatment chamber 11: Entrance door 12: First conveyor roller 13: First heater 14: First motor 2: Second treatment chamber 21: Second conveying roller 22: Second heater 23: Second motor 3: First intermediate room 31: First connection part 32: Second connection part 33: First valve 33a: First link mechanism 34: Second valve 34a: Second link mechanism 35: First valve drive rod 35a: 3rd valve drive rod 35b: 4th valve drive rod 36: First actuator 37: Third conveyor roller 38: Fourth conveyor roller 39: 3rd motor 4: Second intermediate room 41: Third connection part 42: 4th connection part 43: 3rd valve 43a: Third link mechanism 44: 4th valve 44a: 4th link mechanism 45: No. 2 valve drive rod 46: Second actuator 47: 5th conveyor roller 48: 6th conveyor roller 49: 4th motor 5: Final processing room 51: Exit door 52: 7th conveyor roller 53: Cooling device 54: 5th motor 6: Control device 61: Storage section 62: Control section 7: 3rd treatment chamber BP1: First bypass pipe BP2: Second bypass pipe BP3: 3rd bypass pipe BP4: 4th bypass pipe G1: First pressure gauge G2: Second pressure gauge GL1: First gas line GL2: Second gas line GL3: 3rd gas line GL4: 4th gas line GS1: First gas supply source GS2: Second gas supply source PL: Exhaust line RP: Pump SP1: 1st space SP2: 2nd space SP3: 3rd space SP4: 4th space SP5: 5th space T1: First temperature sensor T2: Second temperature sensor V1: First switchgear V2: Second switchgear V3: Third switchgear V4: 4th switchgear V5: 5th switchgear V6: 6th switchgear V7: Seventh switchgear V8: 8th switchgear

Claims

1. A control method for a continuous furnace including a first treatment chamber capable of treating an object, a second treatment chamber capable of treating the object, an intermediate chamber disposed between the first treatment chamber and the second treatment chamber, a first closing mechanism for opening and closing between the first treatment chamber and the intermediate chamber, and a second closing mechanism for opening and closing between the second treatment chamber and the intermediate chamber, comprising: closing the first closing mechanism and the second closing mechanism; and adjusting the gas pressure in the intermediate chamber so that, in the step of closing the first closing mechanism and the second closing mechanism, a difference between the gas pressure in the intermediate chamber and the gas pressure in the first processing chamber applies pressure in a direction in which the first closing mechanism is closed, and / or a difference between the gas pressure in the intermediate chamber and the gas pressure in the second processing chamber applies pressure in a direction in which the second closing mechanism is closed.

2. the first closing mechanism is driven from the intermediate chamber side to the first treatment chamber side to close the gap between the first treatment chamber and the intermediate chamber, and the second closing mechanism is driven from the intermediate chamber side to the second treatment chamber side to close the gap between the second treatment chamber and the intermediate chamber, The method of claim 1 , wherein when the first closing mechanism and the second closing mechanism are closed, the gas pressure in the intermediate chamber is adjusted to a gas pressure higher than the gas pressure in the first processing chamber and the gas pressure in the second processing chamber.

3. the first closing mechanism is driven from the first treatment chamber side to the intermediate chamber side to close the gap between the first treatment chamber and the intermediate chamber, and the second closing mechanism is driven from the second treatment chamber side to the intermediate chamber side to close the gap between the second treatment chamber and the intermediate chamber, The method of claim 1 , wherein when the first closing mechanism and the second closing mechanism are closed, the gas pressure in the intermediate chamber is adjusted to a gas pressure lower than the gas pressure in the first processing chamber and the gas pressure in the second processing chamber.

4. The method of claim 1 , wherein when the first closing mechanism and the second closing mechanism are opened, the gas pressure in the first processing chamber, the gas pressure in the second processing chamber, and the gas pressure in the intermediate chamber are adjusted to the same gas pressure.

5. the continuous furnace further includes a bypass pipe connecting the first treatment chamber, the second treatment chamber, and the intermediate chamber, and an opening and closing device opening and closing the bypass pipe, The method according to claim 4, wherein when the first closing mechanism and the second closing mechanism are opened, the gas pressure in the first treatment chamber, the gas pressure in the second treatment chamber, and the gas pressure in the intermediate chamber are adjusted to the same gas pressure by opening the opening and closing device.

6. 6. The method according to claim 1, wherein the gas pressure in the first processing chamber and the gas pressure in the second processing chamber are within a range of -0.1 MPa or more and less than 1 MPa.

7. a first processing chamber capable of processing an object; A second treatment chamber capable of treating the object; an intermediate chamber disposed between the first processing chamber and the second processing chamber; a first closing mechanism that opens and closes between the first treatment chamber and the intermediate chamber; a second closing mechanism that opens and closes between the second processing chamber and the intermediate chamber; a first pressure adjustment mechanism that adjusts a gas pressure in the first processing chamber; a second pressure adjustment mechanism that adjusts the gas pressure in the second processing chamber; a third pressure adjustment mechanism capable of adjusting the gas pressure in the intermediate chamber independently of the gas pressures in the first treatment chamber and the second treatment chamber.

8. A control unit that controls the first pressure adjustment mechanism, the second pressure adjustment mechanism, and the third pressure adjustment mechanism, and the first closing mechanism and the second closing mechanism, The continuous furnace according to claim 7, wherein the control unit controls the third pressure adjustment mechanism so that a pressure is applied in a direction in which the first closing mechanism is closed due to a difference in gas pressure between the first processing chamber and the intermediate chamber, and / or so that a pressure is applied in a direction in which the second closing mechanism is closed due to a difference in gas pressure between the second processing chamber and the intermediate chamber.

9. the first closing mechanism is driven from the intermediate chamber side to the first treatment chamber side to close the gap between the first treatment chamber and the intermediate chamber, and the second closing mechanism is driven from the intermediate chamber side to the second treatment chamber side to close the gap between the second treatment chamber and the intermediate chamber, 9. The continuous furnace according to claim 8, wherein the third pressure adjustment mechanism adjusts the gas pressure in the intermediate chamber to a gas pressure higher than the gas pressures in the first processing chamber and the second processing chamber.

10. the first closing mechanism is driven from the first processing chamber side to the intermediate chamber side to close the gap between the first processing chamber and the intermediate chamber, and the second closing mechanism is driven from the second processing chamber side to the intermediate chamber side to close the gap between the second processing chamber and the intermediate chamber, 9. The continuous furnace according to claim 8, wherein the third pressure adjustment mechanism adjusts the gas pressure in the intermediate chamber to a gas pressure lower than the gas pressures in the first treatment chamber and the second treatment chamber.

11. 8. The continuous furnace according to claim 7, wherein the first pressure adjustment mechanism, the second pressure adjustment mechanism, and the third pressure adjustment mechanism adjust the gas pressures in the first treatment chamber, the second treatment chamber, and the intermediate chamber to the same gas pressure when the first closing mechanism and the second closing mechanism are opened.

12. a bypass pipe connecting the first processing chamber, the second processing chamber, and the intermediate chamber; An opening and closing device for opening and closing the bypass pipe, 12. The continuous furnace according to claim 11, wherein the first pressure adjustment mechanism, the second pressure adjustment mechanism, and the third pressure adjustment mechanism open the opening and closing device to adjust the gas pressures in the first treatment chamber, the second treatment chamber, and the intermediate chamber to the same gas pressure.

13. 13. The continuous furnace according to claim 7, wherein the gas pressure in the first treatment chamber and the gas pressure in the second treatment chamber are in the range of -0.1 MPa or more and less than 1 MPa.

14. A control program for causing a computer to execute functions of a continuous furnace including a first treatment chamber capable of treating an object, a second treatment chamber capable of treating the object, an intermediate chamber disposed between the first treatment chamber and the second treatment chamber, a first closing mechanism for opening and closing between the first treatment chamber and the intermediate chamber, and a second closing mechanism for opening and closing between the second treatment chamber and the intermediate chamber, closing the first closing mechanism and the second closing mechanism; a step of adjusting the gas pressure in the intermediate chamber so that, in the step of closing the first closing mechanism and the second closing mechanism, a pressure is applied in the direction of closing the first closing mechanism due to a difference between the gas pressure in the intermediate chamber and the gas pressure in the first processing chamber, and / or a step of adjusting the gas pressure in the intermediate chamber so that a pressure is applied in the direction of closing the second closing mechanism due to a difference between the gas pressure in the intermediate chamber and the gas pressure in the second processing chamber.

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