Thin film capacitor, substrate, and electronic device

Abstract

To provide a thin film capacitor having a high adhesion strength between a dielectric layer and an electrode layer.SOLUTION: A thin film capacitor has a first electrode layer 10, a second electrode layer 50, and a dielectric layer 20 provided between the first electrode layer 10 and the second electrode layer 50. The thin film capacitor has an intermediate layer 40 between the dielectric layer 20 and the second electrode layer 50. The intermediate layer 40 has at least one stacking unit composed of a first intermediate layer 41 and a second intermediate layer 42 stacked in contact with the first intermediate layer 41. The first intermediate layer 41 of the at least one stacking unit closest to the dielectric layer 20 is stacked in contact with the dielectric layer 20. The first intermediate layer 41 contains a first metal (M1) as a main component, and the second intermediate layer 42 contains a second metal (M2), different from the first metal, as a main component.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a thin film capacitor, a substrate, and an electronic device. [Background technology]

[0002] Thin-film capacitors can be manufactured by thin-film methods such as sputtering, and can be easily embedded inside a substrate, so various research and development efforts are being conducted. For example, in Patent Document 1, a thin-film capacitor has been developed whose ESR is unlikely to increase even when heat is applied.

[0003] However, in conventional thin-film capacitors, as a part of the electrode layer formed on the surface of the dielectric layer, a metal layer (such as a Ni film) with a thickness of about 500 nm was generally formed as the metal layer in contact with the surface of the dielectric layer from the viewpoint of protecting the dielectric layer, etc. However, conventional thin-film capacitors had an issue with the peel strength between the dielectric layer and the electrode layer. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2019-169622 A Summary of the Invention [Problem to be solved by the invention]

[0005] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a thin film capacitor having high adhesion strength between a dielectric layer and an electrode layer. [Means for solving the problem]

[0006] In order to achieve the above object, a thin film capacitor according to a first aspect of the present invention comprises: A thin film capacitor having a first electrode layer, a second electrode layer, and a dielectric layer provided between the first electrode layer and the second electrode layer, an intermediate layer between the dielectric layer and the second electrode layer; the intermediate layer has at least one lamination unit including a first intermediate layer and a second intermediate layer laminated in contact with the first intermediate layer; the first intermediate layer of the at least one lamination unit closest to the dielectric layer is laminated in contact with the dielectric layer; the first intermediate layer contains a first metal (M1) as a main component, The second intermediate layer contains, as a main component, a second metal (M2) different from the first metal.

[0007] The present inventors have confirmed that the capacitor according to the first aspect allows the first intermediate layer in contact with the dielectric layer to have a thickness of, for example, less than 100 nm, and the second intermediate layer to have a thickness of, for example, less than 100 nm, and further improves the adhesive strength between the dielectric layer and the electrode layer. The present inventors have also found that the reliability of this capacitor, such as its high-temperature load life, is improved compared to the prior art.

[0008] Preferably, the first intermediate layer has a thickness in the range of 8 to 80 nm, more preferably in the range of 8 to 50 nm, and the second intermediate layer has a thickness in the range of 8 to 80 nm, more preferably in the range of 8 to 50 nm. The present inventors have discovered for the first time that by forming the relatively thin first and second intermediate layers in such a way that the first intermediate layer is in contact with the dielectric layer, the adhesive strength between the dielectric layer and the second electrode is improved and reliability (high temperature accelerated life) is improved at the same time.

[0009] The reasons for this are thought to be, for example, as follows. It is thought that the first metal, which is the main component of the first intermediate layer, reacts with oxygen contained in the dielectric layer during annealing of the second electrode layer, etc., and the bond with the dielectric layer becomes stronger. In addition, during the heat treatment, the first metal, which is the main component of the first intermediate layer, and the second metal, which is the main component of the second intermediate layer, are alloyed, which suppresses the first metal from reacting excessively with the dielectric layer and prevents deterioration of the dielectric properties, and therefore it is thought that reliability such as high temperature load life is improved. In addition, it is thought that the thickness of the first intermediate layer and the second intermediate layer is thin within a predetermined range, which also suppresses the first metal from reacting excessively with the dielectric layer and prevents deterioration of the dielectric properties.

[0010] Preferably, the first metal (M1) is at least one selected from the group consisting of Cu, Cr, Mo, Ti and W, The second metal (M2) is at least one selected from the group consisting of Ni, Pd, Pt, Au, Ru, Rh and Ir. The first metal is preferably a metal that reacts more with the dielectric layer than the second metal during heat treatment such as annealing the second electrode layer. The second metal is preferably a metal that forms an alloy with the first metal and suppresses the migration of the first metal toward the dielectric layer during heat treatment such as annealing the second electrode layer.

[0011] Preferably, in the intermediate layer, the laminate unit is laminated repeatedly within a range of 2 to 10. When the number of repetitions of the laminate unit is within a predetermined range, reliability and adhesion are improved.

[0012] The ratio (t2 / t1) of the thickness (t2) of the second intermediate layer to the thickness (t1) of the first intermediate layer is not particularly limited, but is preferably 0.2 to 1.0, and more preferably 0.32 to 0.64. By setting this ratio in an appropriate range, reliability and adhesion are improved.

[0013] A thin film capacitor according to a second aspect of the present invention comprises: A thin film capacitor having a first electrode layer, a second electrode layer, and a dielectric layer provided between the first electrode layer and the second electrode layer, an intermediate layer between the dielectric layer and the second electrode layer; the intermediate layer has at least one lamination unit including a first intermediate layer and a second intermediate layer laminated in contact with the first intermediate layer; the first intermediate layer of the at least one lamination unit closest to the dielectric layer is laminated in contact with the dielectric layer; The first intermediate layer contains a second metal (M2) as a main component, the second intermediate layer contains, as a main component, a first metal (M1) different from the second metal, The first intermediate layers each have a thickness within the range of 8 to 80 nm, and the second intermediate layers each have a thickness within the range of 8 to 80 nm.

[0014] In the capacitor according to the second aspect, the first intermediate layer in contact with the dielectric layer has a thin thickness of 80 nm or less, and the second intermediate layer is also thin, being 80 nm or less. The present inventors have discovered for the first time that by forming the relatively thin first and second intermediate layers in such a way that the first intermediate layer is in contact with the dielectric layer, the adhesive strength between the dielectric layer and the second electrode is improved, and reliability (high temperature load life) is also improved at the same time.

[0015] The reason for this is thought to be, for example, as follows. It is thought that the first metal, which is the main component of the second intermediate layer, diffuses into the relatively thin first intermediate layer and reacts with the dielectric layer during annealing of the second electrode layer, and reacts with oxygen contained in the dielectric layer to strengthen the bond with the dielectric layer. In addition, during the heat treatment, the second metal, which is the main component of the first intermediate layer, and the first metal, which is the main component of the second intermediate layer, are alloyed, which suppresses the first metal from reacting excessively with the dielectric layer and prevents deterioration of the dielectric properties, and therefore improves reliability such as high temperature load life. In addition, it is thought that the thickness of the first intermediate layer and the second intermediate layer is thin within a predetermined range, which suppresses the first metal from reacting excessively with the dielectric layer and prevents deterioration of the dielectric properties.

[0016] The first metal is preferably a metal that has a faster diffusion rate than the second metal and reacts more with the dielectric layer than the second metal during heat treatment such as annealing of the second electrode layer. The second metal is preferably a metal that forms an alloy with the first metal during heat treatment such as annealing of the second electrode layer and suppresses the migration of the first metal toward the dielectric layer.

[0017] Preferably, in the intermediate layer, the laminate unit is laminated repeatedly in a range of 4 to 10. When the number of repetitions of the laminate unit is within a predetermined range, reliability and adhesion are improved.

[0018] A substrate according to an aspect of the present invention has any of the thin film capacitors described above.An electronic device according to an aspect of the present invention has any of the thin film capacitors described above. [Brief description of the drawings]

[0019] [Figure 1] FIG. 1 is a schematic cross-sectional view of a main part of a thin film capacitor according to one embodiment of the present invention. [Diagram 2] FIG. 2 is a schematic cross-sectional view of a main part of a thin film capacitor according to another embodiment of the present invention. [Diagram 3] FIG. 3 is a schematic diagram showing a method for measuring adhesion strength (peel strength). DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] Hereinafter, an embodiment of the present invention will be described in detail.

[0021] First embodiment As shown in Fig. 1, the thin film capacitor 1 according to this embodiment has a first electrode layer 10, a second electrode layer 50, and a dielectric layer 20 provided between the first electrode layer 10 and the second electrode layer 50. In this embodiment, an intermediate layer 40 is provided between the dielectric layer 20 and the second electrode layer 50. There is no particular limit to the shape of the thin film capacitor 1, but it is usually a rectangular parallelepiped shape. There is also no particular limit to the dimensions, and the thickness and length are determined according to the application, etc.

[0022] (1st electrode layer) The first electrode layer 10 may be formed on a substrate (not shown), for example. Alternatively, the first electrode layer 10 can also serve as the substrate. The thickness of the first electrode layer 10 is not particularly limited, but can be, for example, 0.01 to 100 μm. The first electrode layer 10 is an electrode that sandwiches the dielectric layer 20 together with the second electrode layer 50, and causes the thin film capacitor to function as a capacitor.

[0023] The first electrode layer 10 may be made of a material having electrical conductivity. Examples of the material having electrical conductivity include simple metals such as Au, Pt, Ag, Ir, Ru, Co, Ni, Fe, Cu, and Al; alloys of the above metals; semiconductors such as Si, GaAs, GaP, InP, and SiC; and conductive metal oxides such as ITO, ZnO, and SnO2. It is preferable to use a material containing a base metal as the material having electrical conductivity. It is particularly preferable to use simple Ni, simple Cu, or a Ni-Cu alloy as the material containing a base metal.

[0024] (substrate) When the first electrode layer 10 is formed on a substrate (not shown), the type of the substrate is not particularly limited. The substrate may be made of a material that is chemically and thermally stable, is unlikely to cause stress in the substrate, and can maintain the smoothness of the substrate surface.

[0025] Examples of the substrate include single crystal substrates made of single crystal Si, single crystal sapphire, single crystal SrTiO3, single crystal MgO, etc.; ceramic polycrystalline substrates made of alumina (Al2O3), magnesia (MgO), forsterite (2MgO·SiO2), steatite (MgO·SiO2), mullite (3Al2O3·2SiO2), beryllia (BeO), zirconia (ZrO2), aluminum nitride (AlN), silicon nitride (Si3N4), silicon carbide (SiC), etc.; glass ceramic substrates (LTCC substrates) made of alumina (crystal phase) and silicon oxide (glass phase) obtained by firing at 1000°C or less; glass substrates such as quartz glass; and metal substrates made of Fe-Ni alloys, etc. Metal foils made of nickel (Ni) or copper (Cu) may also be used as the substrate.

[0026] There is no particular limit to the thickness of the substrate, and it may be, for example, 10 μm to 5000 μm. The resistivity of the substrate varies depending on the material used. If the substrate is made of a material with low resistivity, current leakage may occur during operation of the thin-film capacitor. As a result, the electrical characteristics of the thin-film capacitor may be affected. Therefore, if the electrical resistivity of the substrate is low, it is preferable to apply an insulating treatment to the surface of the substrate to make it difficult for the current generated during operation of the thin-film capacitor to flow to the substrate.

[0027] For example, when the substrate is a Si single crystal substrate, it is preferable that an insulating layer is formed on the surface of the substrate. There is no particular limitation on the material constituting the insulating layer, and it is sufficient if the material ensures sufficient insulation. Examples of the insulating layer include SiO2, Al2O3, Si3N x The thickness of the insulating layer is not particularly limited, and may be 0.01 μm or more and 1 μm or less.

[0028] (Dielectric layer) In this embodiment, the dielectric layer 20 is formed directly on the surface of the first electrode layer 10. The main component of the dielectric composition constituting the dielectric layer 20 is not particularly limited and is composed of, for example, an oxide dielectric (including an oxynitride dielectric) containing an oxide (including an oxynitride), and specific examples of the dielectric materials are shown below. Examples of the main component of the dielectric layer 20 include a dielectric having a perovskite-type crystal structure, a bismuth layered compound, or a dielectric having a tungsten bronze-type crystal structure.

[0029] Examples of dielectric materials with a perovskite structure include (Ba,Ca)(Ti,Zr)O3 (barium titanate, etc.), (Ca,Sr)(Ti,Zr)O3 (calcium titanate, strontium titanate, etc.), (K,Na)NbO3, (Bi,Na)TiO3, etc. Examples of bismuth layered compounds include Bi4Ti3O 12 , SrBi2Ta2O9, etc. are examples.

[0030] Examples of dielectrics with a tungsten bronze structure include Ba(Nb,Ta)2O6, Ca(Nb,Ta)2O6, (Sr X Ba 1-X )Nb2O6, (K,Na)Sr2Nb5O 15 , Ba3TiNb4O 15 ,Ba2LaTi2Nb3O 15 , (Ba,Sr)TaO 12 , B.A. 5.75 (Zr 1.5 Ta 8.5 )O 30 , B.A. 4.0 La 2.0 Zr 4.0 (Nb 0.5 Ta 0.5 )6O 30 Other examples of dielectric materials include BMT(Ba(Mg 1 / 3 Ta 2 / 3 )O3) are examples.

[0031] In addition to the main components of the dielectric composition, the dielectric layer 20 may further include auxiliary components. The type and content of the auxiliary components may be selected according to the desired characteristics. Examples of such auxiliary components include an oxide of at least one element selected from manganese (Mn), chromium (Cr), cobalt (Co), nickel (Ni), and iron (Fe); an oxide of at least one element selected from vanadium (V), molybdenum (Mo), and tungsten (W); an oxide of a rare earth element; an oxide of magnesium (Mg); an oxide of at least one element selected from silicon (Si), lithium (Li), aluminum (Al), germanium (Ge), barium (Ba), calcium (Ca), and boron (B), and the like.

[0032] The dielectric layer 20 may contain voids, trace impurities, and other subcomponents to the extent that they do not deteriorate the properties such as the dielectric constant, resistivity, withstand voltage, or high temperature load life. For example, the dielectric layer 20 may contain Zn, Cu, Ga, etc.

[0033] The thickness of the dielectric layer 20 is not particularly limited, but is preferably set to, for example, 50 nm to 8000 nm, or 50 nm to 6000 nm. By setting it in such a range, it is possible to ensure sufficient capacitance while suppressing leakage current. In addition, reliability is improved.

[0034] (Middle class) An intermediate layer 40 is formed on the dielectric layer 20. In this embodiment, the intermediate layer 40 is one lamination unit composed of a first intermediate layer 41 and a second intermediate layer 42, and the first intermediate layer 41 is in contact with the dielectric layer 20. The second intermediate layer 42 is in contact with the first intermediate layer 41, and a second electrode layer 50 is in contact with the surface of the second intermediate layer 42.

[0035] The first intermediate layer 41 contains a first metal M1 as a main component, and the second intermediate layer 42 contains a second metal M2 different from the first metal M1 as a main component. In this specification, the term "main component" means that the atomic ratio of the metal layer exceeds 50%.

[0036] The first metal (M1) is at least one selected from the group consisting of Cu, Cr, Mo, Ti and W, and is preferably Cu, Cr or Ti. The second metal (M2) is at least one selected from the group consisting of Ni, Pd, Pt, Au, Ru, Rh and Ir, and is preferably Ni, Pd, Pt or Au.

[0037] In the first intermediate layer 41 and the second intermediate layer 42, the respective main components may be single metals different from each other, and the purity thereof may be 99 at% or more. Alternatively, in the first intermediate layer 41 and the second intermediate layer 42, the combination of the respective main components may be a combination of different alloys, or a combination of an alloy and a metal.

[0038] The thickness t1 of the first intermediate layer 41 is not particularly limited, but is preferably 8 nm to 80 nm, more preferably 8 nm to 50 nm. The thickness t2 of the second intermediate layer 42 is not particularly limited, but is preferably 8 nm to 80 nm, more preferably 8 nm to 50 nm.

[0039] The thickness t1 of the first intermediate layer 41 and the thickness t2 of the second intermediate layer 42 can be measured by processing the thin film capacitor 1 including the intermediate layer 40 with a focused ion beam (FIB) processing device or the like and observing the obtained cross section with a scanning electron microscope (SEM). If the first intermediate layer 41 and the second intermediate layer 42 cannot be distinguished with an SEM, they may be distinguished by crystal orientation observation with a transmission electron microscope (TEM) or by electron backscatter diffraction (EBSD). The thicknesses of the first electrode layer 20 and the second electrode layer 50 can also be measured by a similar method.

[0040] The thickness ratio (t2 / t1) of the second intermediate layer 42 to the first intermediate layer 41 is not particularly limited, but is preferably 0.2 to 1.0, and more preferably 0.32 to 0.64. When it is in such a range, the adhesive strength between the second electrode layer 50 and the dielectric layer 20 is improved, and reliability such as high temperature accelerated life is also improved.

[0041] (2nd metal layer) In this embodiment, the second electrode layer 50 is formed on the surface of the second intermediate layer 42 of the intermediate layer 40. The second electrode layer 50 may be made of a conductive material, similar to the first electrode layer 10. The conductive material constituting the second electrode layer 50 may be the same as the conductive material constituting the first electrode layer 10, but it is not necessary that they are exactly the same, and they may be made of different materials. For example, when the first electrode layer 10 is made of Ni or a Ni alloy, the second electrode layer 50 may be made of Cu or a Cu alloy.

[0042] The thickness T1 of the second electrode layer 50 is not particularly limited, but is preferably adjusted to be larger than the total thickness T2 of the intermediate layer 40. For example, T1 is about 5 to 70 times larger than T2. ​​The thickness T1 of the second electrode layer 50 is not particularly limited, but can be, for example, 0.01 to 100 μm, and is preferably equal to or greater than the thickness of the first electrode layer 10, but may be smaller than that.

[0043] (Method of manufacturing thin film capacitor) Next, an example of a method for manufacturing the thin film capacitor 1 shown in Fig. 1 will be described below. First, a first electrode layer 10 is formed on a substrate (not shown). Alternatively, the first electrode layer 10 may be a metal foil that also serves as the substrate.

[0044] Then, the dielectric layer 20 is formed on the first electrode layer 10. There is no particular limitation on the method for forming the dielectric layer 20, and various film formation methods can be used. Examples of the film formation methods include vacuum deposition, sputtering, PLD (pulsed laser deposition), MO-CVD (metal organic chemical vapor deposition), MOD (metal organic decomposition), sol-gel, and CSD (chemical solution deposition). These film formation methods can also be used as a method for forming the first electrode layer 10 on a substrate.

[0045] The raw materials (evaporation materials, various target materials, organometallic materials, etc.) used in forming the dielectric layer 20 may contain trace amounts of impurities, secondary components, etc., but this should not impair the effects of the present invention.

[0046] Next, the intermediate layer 40 consisting of the first intermediate layer 41 and the second intermediate layer 42 is formed on the formed dielectric layer 20 by repeatedly using the film formation method as described above in a predetermined number of stacking units. In the embodiment shown in FIG. 1, the number of stacking units is one. As an apparatus for alternately forming the relatively thin first intermediate layer 41 and the second intermediate layer 42, for example, a carousel type sputtering apparatus is exemplified, but a multi-target type sputtering apparatus such as a load lock type or a cluster type may also be used. For example, the thickness of the first intermediate layer 41 and the second intermediate layer 42 can be controlled by controlling the sputtering time.

[0047] Thereafter, the second metal layer 50 is formed on the intermediate layer 40. The method for forming the second metal layer 50 is not particularly limited, and may be any of the above-mentioned film forming methods as well as a plating method.

[0048] Annealing may be performed before or after forming the second metal layer 50. There are no particular limitations on the annealing conditions. For example, it is preferable to perform the annealing at an annealing temperature of 300° C. to 1000° C. for an annealing time of 30 minutes to 120 minutes in an atmosphere that does not oxidize the electrode layer 50 or 10. An atmosphere that does not oxidize the electrode layer means an atmosphere with an oxygen content of 1% or less.

[0049] Through the above steps, a thin film capacitor 1 is obtained in which the dielectric layer 20, the intermediate layer 40 and the second electrode layer 50 are laminated in this order on the first electrode layer 10, as shown in FIG.

[0050] (Summary of this embodiment) According to the thin film capacitor 1 of this embodiment, it is possible to set the thickness of the first intermediate layer 41 in contact with the dielectric layer 20 to, for example, less than 100 nm, and also to set the thickness of the second intermediate layer 42 to, for example, less than 100 nm, and further to improve the adhesive strength between the dielectric layer 20 and the second electrode layer 50. Furthermore, according to this thin film capacitor 1, reliability such as high temperature load life is improved compared to conventional ones.

[0051] The reason for this is considered to be, for example, as follows. It is considered that the first metal M1, which is the main component of the first intermediate layer 41, reacts with oxygen contained in the dielectric layer 20 during annealing of the second electrode layer 50, and the bond with the dielectric layer 20 becomes stronger. In addition, during the heat treatment, the first metal, which is the main component of the first intermediate layer 41, and the second metal M2, which is the main component of the second intermediate layer 42, are alloyed, which suppresses the first metal M1 from reacting excessively with the dielectric layer 20 and prevents the deterioration of the characteristics of the dielectric 20, and therefore it is considered that the reliability, such as the high temperature load life, is improved. In addition, it is considered that the thickness of the first intermediate layer 41 and the second intermediate layer 42 is thin within a predetermined range, which suppresses the first metal M1 from reacting excessively with the dielectric layer 20 and prevents the deterioration of the characteristics of the dielectric.

[0052] The first metal M1 is preferably a metal that reacts more with the dielectric layer 20 than the second metal M2 during heat treatment such as annealing of the second electrode layer 50. The second metal M2 is preferably a metal that forms an alloy with the first metal M1 and suppresses the migration of the first metal M1 toward the dielectric layer 20 during heat treatment such as annealing of the second electrode layer 50.

[0053] Second embodiment 2, the thin film capacitor 1a according to this embodiment is similar to the thin film capacitor 1 of the first embodiment described above, except that the intermediate layer 40 has a stacked structure of two or more stacked units 40a, and has the same configuration and effects. Below, differences from the first embodiment will be mainly described, and some overlapping descriptions will be omitted.

[0054] In this thin film capacitor 1a, a first intermediate layer 41 is formed in contact with the surface of the dielectric layer 20, and a second intermediate layer 42 is formed by laminating on top of that to form one laminate unit 40a. A first intermediate layer 41 which will become another laminate unit is formed in contact with the second intermediate layer 42 of that laminate unit 40a, and a second intermediate layer 42 is formed by laminating on top of that to form another laminate unit 40a. In this manner, the laminate unit 40a is repeated a predetermined number of times to form the intermediate layer 40.

[0055] Although there is no particular restriction on the number of repetitions of the laminate unit 40a in the intermediate layer 40, from the viewpoint of adhesion (peel strength), the repetition number is preferably smaller, for example, the repetition number is preferably 10 or less, and more preferably 8 or less. From the viewpoint of reliability (high temperature load life), the repetition number of the laminate unit 40a is preferably 2 to 10, more preferably 4 to 10, or preferably 4 to 8.

[0056] Third embodiment The thin-film capacitor of this embodiment is a modified example of the thin-film capacitor 1a shown in Fig. 2, and is similar to the thin-film capacitor 1a of the second embodiment described above, except that the first intermediate layer 41 contains the second metal (M2) as a main component, the second intermediate layer 42 contains the first metal (M1) as a main component, and the preferred thickness ratio (t2 / t1) of these intermediate layers 41 and 42 is different, and the thin-film capacitor of this embodiment has the same configuration and effects. The following mainly describes the parts that are different from the second embodiment, and some overlapping descriptions will be omitted.

[0057] In the thin film capacitor 1a, unlike the second embodiment, the first intermediate layer 41 contains a second metal (M2) as a main component, and the second intermediate layer 42 contains a first metal (M1) different from the second metal as a main component. That is, the first intermediate layer 41 contains, for example, Ni as a main component, and the second intermediate layer 42 contains Cu as a main component.

[0058] In this embodiment, the thickness ratio (t2 / t1) of the second intermediate layer 42 to the first intermediate layer 41 is not particularly limited, but is preferably 1 to 5, and more preferably 1.5 to 3.2. When it is in this range, the adhesive strength between the second electrode layer 50 and the dielectric layer 20 is improved, and reliability such as high-temperature accelerated life is also improved.

[0059] In the thin film capacitor 1a of this embodiment, the first intermediate layer 41 in contact with the dielectric layer 20 has a thin thickness of 80 nm or less, and the second intermediate layer 42 is also thin, also 80 nm or less. By forming the relatively thin first intermediate layer 41 and second intermediate layer 42 in this manner so that the first intermediate layer 41 is in contact with the dielectric layer 20, the adhesive strength between the dielectric layer 20 and the second electrode 50 is improved, and reliability (high temperature loaded life) is improved at the same time.

[0060] The reason for this is considered to be, for example, as follows. It is considered that the first metal M1, which is the main component of the second intermediate layer 42, diffuses into the relatively thin first intermediate layer 41 and reacts with the dielectric layer 20 during the annealing treatment of the second electrode layer 50, and reacts with the oxygen contained in the dielectric layer 20, thereby strengthening the bond with the dielectric layer 20. In addition, during the heat treatment, the second metal M2, which is the main component of the first intermediate layer 41, and the first metal M1, which is the main component of the second intermediate layer 42, are alloyed, which suppresses the first metal from reacting excessively with the dielectric layer 20 and prevents the deterioration of the characteristics of the dielectric 20, and therefore improves the reliability, such as the high temperature load life. In addition, it is considered that the thickness of the first intermediate layer 41 and the second intermediate layer 42 is thin within a predetermined range, which suppresses the first metal M1 from reacting excessively with the dielectric layer 20 and prevents the deterioration of the characteristics of the dielectric.

[0061] From this viewpoint, the first metal M1 is preferably a metal that has a faster diffusion rate than the second metal M2 and reacts more with the dielectric layer 20 than the second metal M2 during heat treatment such as annealing of the second electrode layer 50. The second metal M2 is preferably a metal that forms an alloy with the first metal M1 and suppresses the migration of the first metal M1 toward the dielectric layer 20 during heat treatment such as annealing of the second electrode layer 50.

[0062] Although the first to third embodiments have been described above, the present invention is not limited to the above-mentioned embodiments, and may be modified in various aspects within the scope of the present invention.

[0063] For example, there is no particular limitation on the use of the thin film capacitor of each embodiment. For example, the above-mentioned thin film capacitor may be used as a snubber capacitor used in a DC-DC converter, an inverter circuit, or the like. The thin film capacitor may be mounted on a power supply module, or the like. Furthermore, the thin film capacitor may be embedded in, for example, a circuit board, or the like. Furthermore, the thin film capacitor may be incorporated into, and used in, an electronic device including a power supply module, for example, a digital television, a server, or an in-vehicle device. EXAMPLES

[0064] The present invention will be described below with reference to more detailed examples, but the present invention is not limited to these examples.

[0065] Example 1 Examples of the present invention and comparative examples will be described in detail below, but the present invention is not limited to the following examples.

[0066] Example 1 A Ni foil having a thickness of 28 μm was prepared as the first electrode layer 10. A dielectric layer 20 made of barium titanate was formed on the first electrode layer 10 by sputtering to a thickness of 600 nm. A first intermediate layer 41 made of Cu having a thickness t1=25 nm and a second intermediate layer 42 made of Ni having a thickness t2=16 nm were formed on the dielectric layer 20 by sputtering in this order, respectively, to form an intermediate layer 40 consisting of one laminate unit. Then, a second electrode layer 50 made of Cu was formed by sputtering to a thickness T1=2500 nm on the intermediate layer 40, and a thin film capacitor 1 was obtained.

[0067] Peel strength (adhesion) A thin-film capacitor sample with cuts at 1 cm intervals was prepared and attached to a glass substrate with tape. Then, as shown in FIG. 3, the end of the second electrode layer 50 was partially peeled off from the dielectric layer 20, and the peel strength was measured, for example, with a peel tester (manufactured by Aiko Engineering) based on JIS K 6854-1: 1999. The gripping movement speed was 100 mm / min. The results are shown in Table 1. Note that in FIG. 3, the illustration of the intermediate layer 40 shown in FIG. 1 is omitted, but in reality, most of the intermediate layer 40 is in close contact with the second electrode layer 50 and peeled off from the surface of the dielectric layer 20 together with the second electrode layer 50.

[0068] High temperature load life (reliability HALT) A thin-film capacitor sample was placed in a thermostatic chamber and heated to 135°C. Once that temperature was reached, a voltage of 4V was applied to the capacitor sample to begin the test. The temperature was maintained at 135°C for 133 hours, during which the resistance was continuously measured, and the time at which the resistance dropped by one digit was determined to be the high-temperature load life. If the insulation resistance did not drop by more than one digit after 133 hours of maintenance, the high-temperature load life was deemed to be 133 hours. The results are shown in Table 1.

[0069] Example 2 A thin film capacitor was fabricated in the same manner as in Example 1 except that the thickness of the first intermediate layer 41 was changed to 50 nm, and evaluation was performed in the same manner as in Example 1. The results are shown in Table 1.

[0070] (Examples 3 to 7) A thin film capacitor was formed in the same manner as in Example 1, except that sputtering using different target materials was alternately repeated to repeatedly stack the stack units 40a so that the number of repetitions of the stack units 40a of the intermediate layer 40 (the number of layers in the table) was the number (number of layers) shown in Table 1, and an evaluation was performed in the same manner as in Example 1. The results are shown in Table 1. In Table 1, for example, the number of layers being 2 means that the stack unit 40a shown in FIG. 2 was repeatedly formed twice, and then the second electrode layer 50 was formed thereon, and the number of layers being 10 means that the stack unit 40a shown in FIG. 2 was repeatedly formed 10 times, and then the second electrode layer 50 was formed thereon.

[0071] (Examples 8 to 10) A thin film capacitor was produced in the same manner as in Example 4, except that the thickness of the first intermediate layer and the thickness of the second intermediate layer were adjusted to the values ​​shown in Table 1, and evaluations were performed in the same manner as in Example 1. The results are shown in Table 1.

[0072] Comparative Example 1 A thin film capacitor was fabricated in the same manner as in Example 1, except that a first intermediate layer 41 made of Ni and having a thickness of 500 nm was directly formed on the dielectric layer by sputtering without forming a second intermediate layer made of Cu, and evaluations were performed in the same manner as in Example 1. The results are shown in Table 1.

[0073] Comparative Example 2 A thin film capacitor was fabricated in the same manner as in Example 1, except that after the formation of the dielectric layer, the second electrode layer was formed by directly sputtering Cu on the dielectric layer, and evaluations were performed in the same manner as in Example 1. The results are shown in Table 1.

[0074] (evaluation) As shown in Table 1, it was found that in each Example having a predetermined structure, it was possible to achieve both high peel strength and high temperature load life (HALT reliability) at a high level compared to Comparative Examples 1 and 2. In particular, as shown in Examples 3 to 7, it was found that when the number of repetitions (number of layers) of the stacking unit of the intermediate layer was 2 to 10, there was a tendency for the adhesion strength and reliability to be good.

[0075] Furthermore, as shown in Examples 4 and 8 to 10, it was found that by adjusting the ratio t2 / t1 of the thickness t2 of the second intermediate layer to the thickness t1 of the first intermediate layer within a predetermined range, it was possible to further improve reliability while maintaining a sufficiently high peel strength compared to Comparative Example 1.

[0076] Example 11

[0077] The dielectric layer 20 is made of tungsten bronze (Ba 4.0 La 2.0 Zr 4.0 (Nb 0.5 Ta 0.5 )6O 30 A thin film capacitor was fabricated in the same manner as in Example 5, except that the film thickness was 5000 nm. The peel strength was measured in the same manner as in Example 1, and the high temperature accelerated life was further determined under the following conditions.

[0078] High temperature load life (reliability HALT) A thin-film capacitor sample was placed in a thermostatic chamber and heated to 125°C. Once that temperature was reached, a voltage of 400V was applied to the capacitor sample to begin the test. The temperature of 125°C was maintained for 100 hours, and the resistance was continuously measured during this time. The time at which the resistance dropped by one digit was determined to be the high-temperature load life. If the insulation resistance did not drop by more than one digit after 100 hours of maintenance, the high-temperature load life was deemed to be 100 hours. The results are shown in Table 2.

[0079] Comparative Example 3 A thin film capacitor was fabricated in the same manner as in Example 11, except that a first intermediate layer 41 made of Ni and having a thickness of 500 nm was directly formed on the dielectric layer by sputtering without forming a second intermediate layer made of Cu, and evaluations were performed in the same manner as in Example 11. The results are shown in Table 2.

[0080] (evaluation) As shown in Table 2, it was found that in the case of Example 11 in which the dielectric layer was made of a tungsten bronze material, it was possible to achieve both a high level of peel strength and high temperature load life (HALT reliability) compared to Comparative Example 3. In particular, it was confirmed that the peel strength was improved by more than seven times compared to Comparative Example 3.

[0081] (Examples 12 to 16) Thin film capacitors were fabricated in the same manner as in Examples 4 to 8, except that the metal type of the first intermediate layer was changed to Ni, the metal type of the second intermediate layer was changed to Cu, and the thicknesses of each were changed to the values ​​shown in Table 3, and evaluations were performed in the same manner as in Example 1. The results are shown in Table 3.

[0082] As shown in Table 3, it was found that each of the Examples was able to achieve both peel strength and high temperature accelerated life (reliability HALT) in comparison with Comparative Example 1 and Comparative Example 2. Also, it was confirmed that, compared with Examples 4 to 8, in Examples 12 to 16 in which the metals M1 and M2 were interchanged, t2 / t1 is preferably 1 or more. Also, it was confirmed that, compared with Examples 12 to 16, Examples 4 to 8 were improved in both peel strength and high temperature accelerated life (reliability HALT).

[0083] (Example 17) A thin film capacitor was fabricated in the same manner as in Example 11, except that the metal type of the first intermediate layer was Ni, the metal type of the second intermediate layer was Cu, and the thicknesses of the first intermediate layer and the second intermediate layer were changed as shown in Table 4, and evaluations were performed in the same manner as in Example 11. The results are shown in Table 4.

[0084] As shown in Table 4, it was found that even in the case of Example 17 in which the dielectric layer was made of tungsten bronze, it was possible to achieve both high levels of peel strength and high temperature accelerated life (reliability HALT) compared to Comparative Example 3. It was also confirmed that in Example 11, both the peel strength and high temperature accelerated life (reliability HALT) were improved compared to Example 17.

[0085] [Table 1]

[0086] [Table 2]

[0087] [Table 3]

[0088] [Table 4] [Explanation of symbols]

[0089] 1,1a...Thin film capacitor 10...First electrode layer 20...Dielectric layer 40…Middle class 40a…Layer unit 41…First middle class 42…Second middle class 50…Second electrode layer

Claims

1. A thin film capacitor having a first electrode layer, a second electrode layer, and a dielectric layer provided between the first electrode layer and the second electrode layer, an intermediate layer between the dielectric layer and the second electrode layer; the intermediate layer has at least one lamination unit including a first intermediate layer and a second intermediate layer laminated in contact with the first intermediate layer; the first intermediate layer of the at least one lamination unit closest to the dielectric layer is laminated in contact with the dielectric layer; The first intermediate layer contains a first metal (M1) as a main component, The thin film capacitor, wherein the second intermediate layer contains, as a main component, a second metal (M2) different from the first metal.

2. 2. The thin film capacitor according to claim 1, wherein the first intermediate layer has a thickness in the range of 8 to 80 nm, and the second intermediate layer has a thickness in the range of 8 to 80 nm.

3. The first metal (M1) is at least one selected from the group consisting of Cu, Cr, Au, Ru, Rh, Ir, Mo, Ti and W, 2. The thin film capacitor of claim 1, wherein the second metal (M2) is at least one selected from the group consisting of Ni, Pd, Pt, Au, Ru, Rh and Ir.

4. 2. The thin film capacitor according to claim 1, wherein the intermediate layer has 2 to 10 laminated layers each including the laminate unit.

5. 2. The thin film capacitor according to claim 1, wherein a ratio (t2 / t1) of a thickness (t2) of the second intermediate layer to a thickness (t1) of the first intermediate layer is 0.2 to 1.

0.

6. A thin film capacitor having a first electrode layer, a second electrode layer, and a dielectric layer provided between the first electrode layer and the second electrode layer, an intermediate layer between the dielectric layer and the second electrode layer; the intermediate layer has at least one lamination unit including a first intermediate layer and a second intermediate layer laminated in contact with the first intermediate layer; the first intermediate layer of the at least one lamination unit closest to the dielectric layer is laminated in contact with the dielectric layer; The first intermediate layer contains a second metal (M2) as a main component, the second intermediate layer contains a first metal (M1) different from the second metal as a main component, A thin film capacitor, wherein the first intermediate layers each have a thickness within a range of 8 to 80 nm, and the second intermediate layers each have a thickness within a range of 8 to 80 nm.

7. 7. The thin film capacitor according to claim 6, wherein the intermediate layer has 4 to 10 of the laminated units laminated thereon.

8. A substrate comprising the thin film capacitor according to any one of claims 1 to 7.

9. 8. An electronic device comprising the thin film capacitor according to claim 1.

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