Bubble removal method and bubble removal device

Abstract

To provide a bubble removal method and bubble removal device, capable of removing bubbles formed with an adherend without subjecting an adhesive member to special machining.SOLUTION: A bubble removal method capable of removing bubbles formed between a workpiece W and an adhesive member 13 when bonding the workpiece W to the adhesive member comprises: a linear member arrangement step of arranging a linear member 14 between the workpiece W and the adhesive member 13 so as to extend from one end of the adhesive member 13 to the other end; and a pressing step of pressing at least one of the workpiece W and the adhesive member 13 toward the other.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an air bubble removing method and an air bubble removing device, and more particularly to an air bubble removing method and an air bubble removing device for removing air bubbles generated between an adherend and an adhesive member when the two are attached to each other. [Background technology]

[0002] 2. Description of the Related Art Conventionally, adhesive members such as pressure-sensitive adhesive sheets having a smooth adhesive surface have been widely known. However, when such adhesive members are applied to an adherend, there is no way for the air to escape, and so air bubbles are easily generated between the adherend and the adherend, resulting in problems such as a poor appearance of the adhesive member.

[0003] In order to solve such problems, an adhesive member (adhesive sheet) as described in Patent Document 1, for example, has been proposed.

[0004] The adhesive member described in Patent Document 1 has a large number of small independent protrusions formed on an adhesive layer. According to this technique, when the adhesive member is attached to the adherend, an escape route for air is formed between each small convex portion, so that the generation of air bubbles can be suppressed, and as a result, it is possible to achieve an attractive-looking attached state. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Utility Model Registration No. 2587198 Summary of the Invention [Problem to be solved by the invention]

[0006] However, the adhesive member described in Patent Document 1 has a problem in that it is necessary to prepare a mold for forming small convex portions on the adhesive layer, which inevitably increases the manufacturing cost.

[0007] Moreover, the adhesive member described in Patent Document 1 is configured so that the small convex portions are mainly adhered to the adherend, which naturally results in a problem that the adhesive strength (adhesion) to the adherend is weak.

[0008] Incidentally, when a treatment such as film formation (hereinafter referred to as "surface treatment") is performed on the surface of a workpiece (for example, a glass substrate), the treatment is sometimes performed in a state where the workpiece is held by an adhesive member. In this case, if the adhesive member described in Patent Document 1 is used to hold the workpiece, there is a risk that the workpiece may come off the adhesive member due to poor adhesion (poor adhesion), which may lead to problems such as a decrease in the quality of film formation, etc.

[0009] It is considered that such a problem can be solved by using an adhesive member on which no small protrusions are formed, such as the above-mentioned conventional adhesive member. However, surface treatments such as film formation are generally carried out under reduced pressure (vacuum state) below atmospheric pressure, so if an adhesive member that is prone to generating air bubbles (such as the conventional adhesive member described above) is used, the air bubbles will expand when the pressure is reduced, resulting in a problem of a decrease in the adhesive strength between the workpiece and the adhesive member.

[0010] In addition, the applicant of the present application has disclosed a workpiece holding mechanism and a workpiece holding method in previously filed Patent Application No. 2022-109237 and Patent Application No. 2022-178166 (hereinafter referred to as the "prior applications") that hold a workpiece using an adhesive member.

[0011] Here, a workpiece holding mechanism equipped with an adhesive member according to the prior application will be described with reference to FIG. As shown in FIG. 8, the workpiece holding mechanism 110′ according to the prior application includes a support 11, an adhesive tape 12 provided on the support 11, an elastic member 115 (elastic sheet) provided on the adhesive tape 12 from the side opposite the support 11, and an attachment member 113 (adhesive sheet) attached so as to wrap around the outer periphery of the elastic member 115 from one end to the other end of a bottom 115b thereof, and the attachment member 113 has a base-side attachment portion 113b attached to the adhesive tape 12 provided on the support 11, and a workpiece-side attachment portion 113a on the side opposite the base-side attachment portion 113b to which a workpiece (e.g., a glass substrate, see “workpiece W” in FIG. 6) can be attached.

[0012] In the workpiece holding mechanism 110', the adhesive force between the affixing member 113 and the adhesive tape 12 (hereinafter referred to as "first adhesive force"), the adhesive force between the affixing member 113 and the workpiece (hereinafter referred to as "second adhesive force"), and the adhesive force between the affixing member 113 and the elastic member 115 (hereinafter referred to as "third adhesive force") are respectively: ·1st adhesive force > 2nd adhesive force > 3rd adhesive force Adhesive strength between the elastic member 115 and the adhesive tape 12 > second adhesive strength > third adhesive strength The above relationship is set to hold.

[0013] In the work holding mechanism 110' thus configured, when the adhered and held work is moved in a direction to remove it from the adhesive member 113, the work side adhesive portion 113a can be gradually peeled off from the upper portion 115a of the elastic member 115 (see Figures 7(a) and (b)). That is, according to the workpiece holding mechanism 110' of the prior application, it is possible to reduce the adhesion area (adhesive force) between the workpiece and the adhesive member 113, so that the workpiece can be easily removed.

[0014] Furthermore, the workpiece holding mechanism 110' according to the prior application is configured so that the workpiece can then be pressed against the attachment member 113, thereby allowing the workpiece attachment portion 113a to be attached again to the upper portion 115a of the elastic member 115. As a result, in the workpiece holding mechanism 110' of the prior application, when the workpiece is pressed against the adhering member 113, it is possible to adhere them in a state of surface contact with each other, thereby making it difficult for the workpiece to come off the adhering member 113.

[0015] In this way, the workpiece holding mechanism 110' according to the prior application makes it possible to prevent the workpiece from coming off during surface treatment such as film formation, while allowing the workpiece to be easily removed after surface treatment.

[0016] However, in the workpiece holding mechanism 110' according to the prior application, when the workpiece side adhesive part 113a is attached to the upper part 115a of the elastic member 115, air bubbles are likely to form between them, as in the case of the above-mentioned conventional adhesive members. In such a case, the adhesive strength between the work-side adhesive portion 113a and the upper portion 115a of the elastic member 115 is reduced, and in some cases, there is a good chance that they may peel off, which may cause problems such as the held work being peeled off from the adhesive member 113.

[0017] Furthermore, in the workpiece holding mechanism 110' according to the prior application, if air bubbles are generated between the adhesive member 113 and the elastic member 115, causing the front surface of the workpiece side adhesive portion 113a to become uneven, the adhesion area between the workpiece and the adhesive member 113 will decrease, resulting in a problem that the adhesive force of the adhesive member 113 that adheres and holds the workpiece will decrease.

[0018] Furthermore, in the workpiece holding mechanism 110' according to the prior application, when the workpiece is repeatedly removed and attached, air bubbles are generated each time, which may cause vertical wrinkles or sagging in the workpiece attachment portion 113a. In such a case, the adhesive strength of the work-side adhesive portion 113a (adhesive member 113) that is attached to the work or the elastic member 115 decreases, which can easily cause a problem that it becomes difficult to stably hold the work.

[0019] Considering these points, it can be said that there is still room for improvement in the workpiece holding mechanism 110' according to the prior application from the viewpoint of stably holding the workpiece.

[0020] The present invention has been made to solve such problems, and aims to provide an air bubble removal method and device that can remove air bubbles that occur between the adhesive member and the adherend without requiring special processing of the adhesive member. [Means for solving the problem]

[0021] The above problem is solved by a bubble removal method for removing air bubbles generated between an adherend and an adhesive member when the two are adhered to each other, the method comprising: a linear member arrangement step of arranging a linear member between the adherend and the adhesive member so that the linear member extends from one end of the adhesive member to the other end; and a pressing step of pressing at least one of the adherend and the adhesive member towards the other after the linear member arrangement step.

[0022] In addition, in the invention relating to the bubble removal method, it is preferable that the adherend is a workpiece, the adhesive member has a workpiece adhesive portion to which the workpiece can be attached, and the linear member placement process includes a process of placing the linear member between the workpiece and the workpiece adhesive portion.

[0023] In the invention relating to the air bubble removal method, the adherend is made of an elastic member that can elastically deform, and has a base mounting portion that is affixed to an adhesive tape provided on a base, the affixing member is made of an adhesive sheet and is affixed so as to wrap around the outer periphery of the adherend from one end to the other end of the base mounting portion, and has a base-side affixing portion that is affixed to the adhesive tape and a work-side affixing portion on the opposite side to the base-side affixing portion to which a workpiece can be affixed, and when the adhesive force between the affixing member and the adhesive tape is defined as a first adhesive force, the adhesive force between the affixing member and the workpiece is defined as a second adhesive force, and the adhesive force between the affixing member and the elastic member is defined as a third adhesive force, then the following relationships are established: the first adhesive force > the second adhesive force > the third adhesive force, and the adhesive force between the elastic member and the adhesive tape > the second adhesive force > the third adhesive force, and the linear member arrangement step preferably includes a step of arranging the linear member between the elastic member and the work-side affixing portion.

[0024] Furthermore, in the invention related to the air bubble removal method, the adherend is made of an elastic member that can be elastically deformed and is provided on a base, the attachment member is made of an adhesive sheet and is attached so as to cover the entire outer periphery of the elastic member, and has a base-side attachment part that is attached to an adhesive tape provided on the base and a work-side attachment part that can attach a work on the opposite side to the base-side attachment part, and when the adhesive force between the attachment member and the adhesive tape is a first adhesive force, the adhesive force between the attachment member and the work is a second adhesive force, and the adhesive force between the attachment member and the elastic member is a third adhesive force, a relationship of the first adhesive force > the second adhesive force > the third adhesive force is established, and the linear member arrangement step includes a step of arranging the linear member between the elastic member and at least one of the base-side attachment part and the work-side attachment part. It is preferable that:

[0025] Furthermore, in the invention relating to the air bubble removal method, it is preferable that the adherend and the adhesive member are contained in a space that can be depressurized, and the air bubble removal method includes a depressurization step of depressurizing the space after performing the pressing step.

[0026] Furthermore, in the invention relating to the air bubble removal method, it is preferable that the linear member arrangement step includes a step of arranging a plurality of the linear members in parallel with intervals between the adhesive member and the adherend.

[0027] In the invention relating to the air bubble removal method, it is preferable that the linear member has an outer diameter within a range of 0.03 to 0.1 mm.

[0028] The above problem can also be solved by providing an air bubble removal device for removing air bubbles that occur between an adherend and an adhesive member when the two are adhered to each other, the air bubble removal device comprising a linear member arranged on an adhesive surface of the adhesive member to which the adherend is adhered, the linear member extending from one end of the adhesive surface to the other end. Effect of the Invention

[0029] As described above, the air bubble removal method and air bubble removal device of the present invention have a relatively simple configuration and can efficiently and stably remove air bubbles that have formed between the adhesive member and the adherend, without requiring any special processing of the adhesive member. [Brief description of the drawings]

[0030] [Figure 1] FIG. 1 is a schematic side view showing a workpiece holding mechanism which is one embodiment of an air bubble removing device according to the present invention. [Diagram 2] FIG. 2 is a flow chart for explaining the air bubble removal method according to the present invention. [Diagram 3] FIG. 3 is a plan view schematic diagram showing the state of air bubbles present between the workpiece and the adhesive member, where (a) shows the state under atmospheric pressure, (b) shows the state at the initial stage of decompression, and (c) shows the state at the final stage of decompression. [Figure 4] FIG. 4 is a schematic diagram showing an apparatus provided with a plurality of the workpiece holding mechanisms of FIG. 1, where (a) is a plan view and (b) is a side view. [Diagram 5] FIG. 5 is a graph showing the results of a test performed using the workpiece holding mechanism of FIG. [Figure 6]FIG. 6 is a schematic side view showing a modified example of the workpiece holding mechanism. [Figure 7] Figure 7 is a schematic side view for explaining the operation of the workpiece holding mechanism in Figure 6, where (a) is a diagram showing the state immediately before the workpiece adhered to the adhering member is removed, and (b) is a diagram showing the state in which the workpiece in (a) is being removed from the adhering member. [Figure 8] FIG. 8 is a schematic side view showing a workpiece holding mechanism previously filed by the present applicant. [Figure 9] FIG. 9 is a graph showing the results of tests carried out using the workpiece holding mechanisms shown in FIGS. [Figure 10] FIG. 10 is a schematic side view showing a modification of the workpiece holding mechanism of FIG. [Figure 11] 11A and 11B are schematic side views for explaining the operation of the workpiece holding mechanism in FIG. 10, in which (a) and (b) show a state in which the workpiece is being removed from the adhering member. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0031] The air bubble removing method and device of the present invention will be described below based on a preferred embodiment with reference to the drawings. Fig. 1 is a schematic side view showing one embodiment of the air bubble removing device of the present invention, Fig. 2 is a flow chart for explaining the air bubble removing method of the present invention, and Fig. 3 is a schematic plan view showing the state of air bubbles generated between a workpiece and an adhesive member.

[0032] <Overall configuration of film forming apparatus 1> As shown in FIG. 1, a workpiece holding mechanism 10 serving as a bubble removing device according to this embodiment is provided inside (inner space S) of a film forming apparatus 1 that performs surface treatment such as film formation on a workpiece W (eg, a glass substrate). As will be described in more detail later, the workpiece holding mechanism 10 is configured to adhere and hold the workpiece W (workpiece holding function) and to remove any air bubbles that may be generated when the workpiece W is adhered (air bubble removal function). The workpiece holding mechanism 10, the workpiece W, and the internal space S correspond to the "air bubble removing device," the "adherend," and the "space that can be depressurized" described in the claims.

[0033] Before describing the workpiece holding mechanism 10 according to this embodiment, the configuration of the film forming apparatus 1 will be described below.

[0034] The film forming apparatus 1 includes a vacuum chamber 2 that constitutes a film forming chamber, and a pressure reducing means 3 . The vacuum chamber 2 has an internal space S, in which a workpiece holding mechanism 10 and various devices (not shown) required for performing surface treatments such as film formation, for example, a device for vacuum deposition (not shown), a device for sputtering, and a device for raising and lowering the workpiece W to attach and detach it from the workpiece holding mechanism 10, are provided. The pressure reducing means 3 is a device for reducing the pressure of the internal space S of the vacuum chamber 2 to a vacuum state below atmospheric pressure, and can be configured using, for example, a known vacuum exhaust pump. The pressure reduction by the pressure reducing means 3 is performed when the workpiece W is subjected to surface treatment.

[0035] (Work holding mechanism 10) Next, the workpiece holding mechanism 10 will be described. As shown in FIG. 1, the workpiece holding mechanism 10 includes a support 11, an adhesive tape 12, an attachment member 13, and a linear member 14. The adhesive member 13 and the linear member 14 correspond to the "adhesive member" and the "linear member" recited in the claims, respectively.

[0036] The support 11 is a member whose upper and lower surfaces are both formed flat, and its lower surface is fixedly attached to the bottom of the vacuum chamber 2. The adhesive tape 12 is a so-called double-sided tape having adhesive layers formed on both sides, and is attached to the upper surface of the support 11. As such adhesive tape 12, for example, a known double-sided adhesive tape made of polyimide can be used.

[0037] The attachment member 13 is made of a sheet-like member with adhesive layers formed on both sides, one side of which is adhered and fixed to the support 11 via the adhesive tape 12, while the other side is configured to be capable of adhering (holding) the workpiece W. As such attachment member 13, for example, a double-sided adhesive tape made of polyimide or silicone and having a tape thickness of about 1 mm can be used. In this embodiment, the adhesive member 13 is attached to the vacuum chamber 2 via the support 11, but it is also possible to omit the support 11 and attach the adhesive member 13 directly to the vacuum chamber 2.

[0038] The linear member 14 is made of a member that can be stretched linearly, and is attached to the upper surface of the adhesive member 13 . Specifically, the linear member 14 according to this embodiment is disposed at the center of the width of the adhesive member 13 and extends from one end to the other end in the length direction (see FIG. 3). As such a linear member 14, for example, a commonly used thread material or wire can be used. More details will be given later, but in this embodiment, the workpiece W is adhered (held) to the adhesive member 13 by, for example, pressing the workpiece W against the adhesive member 13 on which the linear member 14 is arranged, and air bubbles generated between the workpiece W and the adhesive member 13 at this time are discharged to the outside along the linear member 14 (see "air bubbles A1, A2" and "air A3" in Figure 3). The upper surface of the adhesive member 13 corresponds to the "adhesive surface" described in the claims.

[0039] <Operation of the workpiece holding mechanism 10> Next, a bubble removal method using the workpiece holding mechanism 10 configured as above will be described with reference to Figures 1 to 3. In the following, the description will be given on the assumption that the workpiece W is attached to the attaching member 13 under atmospheric pressure.

[0040] As shown in FIG. 2, the air bubble removal method according to this embodiment includes a linear member arrangement step S100, a pressing step S200, and a decompression step S300. The above-mentioned air bubble removal method, linear member arrangement step S100, pressing step S200, and depressurization step S300 correspond to the "air bubble removal method", "linear member arrangement step", "pressurization step", and "depressurization step" described in the claims, respectively.

[0041] (Linear member arrangement process S100) The air bubble removal method according to this embodiment begins with a linear member arrangement step S100, as shown in FIG.

[0042] In the linear member placement step S100, the linear member 14 is placed on the upper surface of the attachment member 13. Specifically, in the linear member arrangement step S300, as shown in FIG. 3, the linear member 14 is attached to the attachment member 13 at approximately the center in the width direction thereof so as to extend from one end to the other end in the longitudinal direction.

[0043] It is preferable that the end of the linear member 14 is disposed so as to protrude from the longitudinal end of the adhesive member 13 or disposed in a position close to the end. This makes it possible to efficiently expel air bubbles ("air bubbles A1" in FIG. 3) existing between the workpiece W and the adhesive member 13 to the outside when the pressing step S200 or the decompression step S300 is performed. This point will be described later.

[0044] As shown in FIG. 2, the air bubble removal method according to this embodiment is configured to perform a linear member pressing step S100 and then a pressing step S200.

[0045] (Pressing step S200) In the pressing step S200, the workpiece W is attached to and pressed against the attachment member 13. Such pressing may be performed mechanically using a device for raising and lowering the workpiece W, or may be performed manually.

[0046] As shown in FIG. 3(a), when the workpiece W is attached to the attachment member 13, air bubbles A1 tend to form between them. In this state, when the workpiece W is pressed, the air bubbles A1 are crushed between the workpiece W and the adhesive member 13 and begin to expand. As described above, in this embodiment, the linear member 14 is adhered to the adhesive member 13, so that when the expanded air bubble A1 comes into contact with the linear member 14, the air bubble A2 moves along the linear member 14 and is discharged to the outside (see "air A3").

[0047] In this manner, in this embodiment, by performing the pressing step S200, it is possible to remove air bubbles (air bubbles A1, A2) that exist between the workpiece W and the adhesive member 13. As a result, in this embodiment, the adhesion (adhesion) between the workpiece W and the adhesive member 13 can be improved, and therefore the adhesive force of the adhesive member 13 that adheres and holds the workpiece W can be increased.

[0048] The pressure of the workpiece W pressed against the adhesive member 13 can be appropriately adjusted depending on the contact area with the adhesive member 13, the amount of bubbles A1 generated, and the like. For example, when the contact area between the workpiece W and the adhesive member 13 is large or when a large amount of air bubbles A1 are generated, it is sufficient to press the workpiece W with a relatively strong pressing force. This makes it easier to bring the air bubbles A1 into contact with the linear member 14, so that the air bubbles (air bubbles A1, A2) existing between the workpiece W and the adhesive member 13 can be efficiently removed. Conversely, when the contact area between the workpiece W and the adhesive member 13 is small, the workpiece W may be pressed by using its own weight, or the workpiece W may be pressed with a relatively light pressing force.

[0049] As shown in FIG. 2, the air bubble removal method according to this embodiment is configured to perform a pressure reducing step S300 after a pressing step S200.

[0050] (Decompression step S300) In the depressurization step S300, the internal space S of the vacuum chamber 2 is depressurized (see FIG. 1). Specifically, in the depressurization step S300 according to this embodiment, the depressurization means 3 is operated (driven).

[0051] Figures 3(b) and (c) are planar schematic diagrams showing the state of air bubbles after the decompression process S300 is performed, where (b) shows the state at the initial stage of decompression (low vacuum state) and (c) shows the state at the final stage of decompression (high vacuum state).

[0052] As shown in FIG. 3(b), the air bubble A1 existing between the workpiece W and the adhesive member 13, i.e., the air bubble A1 remaining between them even after the above-mentioned pressing process S200, gradually expands as the internal space S (see FIG. 1) is decompressed.

[0053] Thereafter, as the internal space S is decompressed, the air bubble A1 expands further and comes into contact with the linear member 14 as shown in Fig. 3(c) (see "air bubble A2"). As a result, the air bubble A2 in contact with the linear member 14 travels along the linear member 14 and is discharged to the outside (see "air A3"), so that the air bubble A1 existing between the workpiece W and the attachment member 13 is gradually removed. As a result, the adhesion area between the workpiece W and the attachment member 13 increases, and it becomes possible to further improve the adhesion force of the attachment member 13 that adheres and holds the workpiece W.

[0054] As shown in FIG. 2, in the bubble removal method according to the present embodiment, after the decompression step S300, (1) Surface treatment of the workpiece W, (2) Removal of the workpiece W from the attachment member 13; (3) Preparation of a new workpiece W (a workpiece W that has not been subjected to surface treatment), The above operations are performed in order, and then the pressing step S200 is performed again.

[0055] In this embodiment, after the depressurization process S300, the pressing process S200 is repeatedly executed without performing the linear member arrangement process S100 (without replacing the linear member 14 arranged on the adhesive member 13) (depressurization process S300 → pressing process S200 → depressurization process →...), but it is also possible to remove the linear member 14 from the adhesive member 13 and then perform the linear member arrangement process S100 each time a surface treatment or the like is performed on the workpiece W (depressurization process S300 → linear member pressing process S100 → pressing process S200 → depressurization process S300 →...).

[0056] <Test 1> Incidentally, if the diameter of the linear member 14 is too small, it becomes difficult to efficiently discharge air bubbles to the outside, whereas if the diameter is too large, problems such as impeded adhesion of the workpiece W to the adhesive member 13 may occur. For this reason, the applicant of the present application conducted a test (hereinafter referred to as "Test 1") on the diameter of the linear member 14 to examine such problems. "Test 1" will be described below with reference to Figs. 1 to 3.

[0057] In "Test 1," a workpiece W and a workpiece holding mechanism 10 (see FIG. 1) under the following conditions were used, and the linear member arrangement process S100, the pressing process S200, and the decompression process S300 (see FIG. 2) were performed in that order for each of a number of linear members 14 having different diameters. Workpiece W: Glass substrate (width: 100 mm, length: 100 mm) Adhesive tape 12: Polyimide tape (PI tape) Adhesive material 13: Adhesive sheet (width: 10 mm, length: 50 mm, tape thickness: 1.0 mm) Linear member 14: Thread Diameter of the linear member 14: 0.01mm, 0.02mm, 0.03mm, 0.06mm, 0.1mm, 5 types in total In the following, for ease of explanation, the test in which the diameter of the linear member 14 is 0.01 mm will be referred to as "Test 1a", the test in which the diameter is 0.02 mm will be referred to as "Test 1b", the test in which the diameter is 0.03 mm will be referred to as "Test 1c", the test in which the diameter is 0.06 mm will be referred to as "Test 1d", and the test in which the diameter is 0.1 mm will be referred to as "Test 1e".

[0058] In addition, in "Test 1", for each of the multiple linear members 14 having different diameters, Change in the amount of bubbles before and after the pressing step S200 (see FIG. 3(a)), Change in the amount of bubbles before and after the decompression step S300 (see FIG. 3(c)), This was done by visual inspection.

[0059] As a result of conducting "Test 1a" to "Test 1e," the following changes in the amount of bubbles were confirmed in each test. (1) Results of "Test 1a" and "Test 1b" Change in the amount of air bubbles before and after the pressing process S200: Decreased Change in the amount of bubbles before and after the decompression step S300: No change (2) Results of Test 1c and Test 1d Change in the amount of air bubbles before and after the pressing process S200: Decreased Change in the amount of bubbles before and after the decompression step S300: Decreased (3) Test results for "Test 1e" Change in the amount of air bubbles before and after the pressing process S200: Decreased Change in the amount of bubbles before and after the decompression step S300: Decreased (bubbles disappear after the decompression step S300)

[0060] From these test results, it was confirmed that regardless of whether the diameter of the linear member 14 was 0.01 mm, 0.02 mm, 0.03 mm, 0.06 mm, or 0.1 mm, when the workpiece W was pressed against the adhesive member 13 under atmospheric pressure, the amount of air bubbles present between them decreased.

[0061] On the other hand, it was found that the change in the amount of air bubbles when the internal space S of the vacuum chamber 2 (see Figure 1) was reduced in pressure only decreased when the diameter of the linear member 14 was 0.03 mm or more, and that when the diameter was 0.1 mm, the workpiece W and the adhesive member 13 were adhered over their entire surfaces (full-surface adhesion).

[0062] From the above test results, it was found that when performing surface treatment on the workpiece W, i.e., in an environment where the atmospheric pressure state is changed to a vacuum state, the diameter of the linear member 14 is preferably 0.03 mm to 0.1 mm, and more preferably 0.1 mm.

[0063] <Test 2> In addition to the above-mentioned "Test 1," the applicant also conducted a test (hereinafter referred to as "Test 2") to verify the adhesive strength (adhesion strength) of the adhesive member 13 that adheres and holds the workpiece W. "Test 2" will be described below with reference to FIGS.

[0064] "Test 2" was carried out by measuring the adhesive strength of the adhesive member 13 in a state where the workpiece W was pressed against the adhesive member 13 under atmospheric pressure (the state after "pressure step S200" and before "depressurization step S300"). The adhesive strength was measured using a known method (tensile test method) of applying tensile stress to the workpiece W and measuring it. The workpiece W used in "Test 2" was a glass substrate with a width of 500 mm and a length of 250 mm.

[0065] FIG. 4 is a schematic diagram showing the apparatus used in “Test 2”, where (a) is a plan view and (b) is a side view. In "Test 2", the apparatus shown in Figure 4 was used. As shown in FIG. 4, the device used in “Test 2” was a device in which multiple (five in this test) workpiece holding mechanisms 10 (see FIG. 1) described above were arranged side by side at regular intervals. In "Test 2", in addition to the device shown in Fig. 4 (hereinafter referred to as "workpiece holding device with linear member"), a test was also conducted using a device from which the linear member 14 was removed (not shown, hereinafter referred to as "workpiece holding device without linear member"). Note that the test using the "workpiece holding device without linear member" was conducted under the same test conditions (e.g., the method of measuring adhesive strength) as the "workpiece holding device with linear member".

[0066] FIG. 5 is a graph showing the test results of "Test 2." From the graph shown in Figure 5, it can be seen that in the case of the "workpiece holding device with linear member," the adhesive force gradually decreases from "50 N" to "40 N" during the period from when the workpiece W is attached (pressed) to the adhesive member 13 until "approximately 14 minutes" have passed, and then it suddenly drops toward "0 N," which indicates peeling. In contrast, in the case of the "linear member-free workpiece holding device," the adhesive force gradually decreases from "50 N" to "40 N" during the period from when the workpiece W is pressed against the adhesive member 13 until "approximately 7 minutes" have elapsed, and then it suddenly drops to "0 N," indicating peeling.

[0067] That is, in "Test 2," it was found that when the linear member 14 was placed on the adhesive member 13, the workpiece W could be held for "approximately twice as long" as when the linear member 14 was not placed on the adhesive member 13. In this regard, it can be said that it has been demonstrated that by placing the linear member 14 on the adhesive member 13, air bubbles present between the workpiece W and the adhesive member 13 are efficiently removed, thereby increasing the adhesive strength of the adhesive member 13.

[0068] As described above, in this embodiment, after the linear member 14 is placed on the adhesive member 13 ("linear member placement process S100" in Figure 2), the workpiece W is pressed against the adhesive member 13 ("pressing process S200" in Figure 2), and the internal space S in which they are contained is depressurized ("depressurization process S300" in Figure 2), so that air bubbles present between the workpiece W and the adhesive member 13 are discharged to the outside along the linear member 14.

[0069] That is, in this embodiment, it is possible to efficiently and stably remove air bubbles (see "air bubble A1" in Figure 3, etc.) that occur between the workpiece W and the adhesive member 13, thereby increasing the adhesion area thereof. As a result, in this embodiment, the adhesive force between the workpiece W and the adhesive member 13 can be increased, so that the workpiece W can be stably held.

[0070] Furthermore, in this embodiment, unlike the above-mentioned conventional technology (Utility Model Registration No. 2587198), a configuration for removing air bubbles (air bubble removal device) can be obtained by simply arranging (adhering) a thread material or the like (a general-purpose product) as the linear member 14 on the adhesive member 13 without performing any processing on the adhesive member, and therefore the production thereof is extremely easy.

[0071] <Second embodiment> In the above embodiment, the adherend to be attached to the adhesive member is a workpiece W (for example, a glass substrate), but the present invention is not limited to this, and other members may be used. Hereinafter, an embodiment (variant) in which the adherend is a member other than the workpiece W will be described with reference to Figs. 6 to 9. Note that in the following, configurations similar to those in the above embodiment will be given the same reference numerals and descriptions thereof will be omitted. Also, for ease of explanation, the above embodiment will be referred to as the "first embodiment" and the variant described below will be referred to as the "second embodiment".

[0072] 6 and 7, in the second embodiment, an adherend to be adhered to the affixing member 113 is provided, together with the affixing member 113, in a work holding mechanism 110 that holds a workpiece W. Hereinafter, the work holding mechanism 110 including such an adherend and the affixing member will be described with reference to FIGS. 6 to 9.

[0073] (Work holding mechanism 110) As shown in FIG. 6, the workpiece holding mechanism 110, similar to the workpiece holding mechanism 10 of the first embodiment, is a device for holding a workpiece W (e.g., a glass substrate) and is provided within a film forming apparatus 1 (internal space S) that performs surface treatment of the workpiece W (see FIG. 1). The workpiece holding mechanism 110 and the workpiece W correspond to the "air bubble removing device" and the "workpiece" recited in the claims (claim 3), respectively.

[0074] The work holding mechanism 110, like the work holding mechanism 110' (see Figure 8) of the prior application, is equipped with a support 11, an adhesive tape 12, an attachment member 113, and an elastic member 115, and is also configured to include a linear member 14 having a configuration similar to that of the first embodiment. The support 11, adhesive tape 12, adhesive member 113, elastic member 115, and linear member 14 correspond to the "base," "adhesive tape," "adhesive member," "elastic member," and "linear member" respectively as described in the claims (Claim 3).

[0075] Here, the adhesive member 113 and the elastic member 115 will be explained again. The elastic member 115 is made of a known elastic sheet that is elastically deformable, and its bottom portion 115b is adhered and fixed to the support 11 via an adhesive tape 12. The adhesive member 113 is made of an adhesive sheet-like member (for example, a double-sided adhesive tape) and is attached so as to wrap around the outer periphery of the elastic member 115 from one end to the other end in the width direction of the bottom portion 115b. The adhesive member 113 thus constructed has a base side adhesive portion 113b which is adhered and fixed to the support 11 via the adhesive tape 12, and a work side adhesive portion 113a to which a work W can be adhered on the opposite side to the base side adhesive portion 113b. The base side adhesion portion 113b, the work side adhesion portion 113a, and the bottom portion 115b correspond to the "base side adhesion portion", the "work side adhesion portion", and the "base mounting portion" respectively as described in the claims (Claim 3).

[0076] In the workpiece holding mechanism 110 according to the second embodiment, the adhesive force between the elastic member 115 and the adhesive tape 12 (hereinafter referred to as "adhesive force A0"), the adhesive force between the attachment member 113 and the adhesive tape 12 (hereinafter referred to as "first adhesive force A1"), the adhesive force between the attachment member 113 and the workpiece W (hereinafter referred to as "second adhesive force B1"), and the adhesive force between the attachment member 113 and the elastic member 115 (hereinafter referred to as "third adhesive force C1") are respectively: ·1st adhesive force A1>2nd adhesive force B1>3rd adhesive force C1 ·Adhesive force A0 > 2nd adhesive force B1 > 3rd adhesive force C1 The following relationship is established (see FIG. 7(a)). The above adhesive strength A0, the first adhesive strength A1, the second adhesive strength B1, and the third adhesive strength C1 correspond to the "adhesive strength", the "first adhesive strength", the "second adhesive strength", and the "third adhesive strength" respectively as defined in the claims (Claim 3).

[0077] Furthermore, in the workpiece holding mechanism 110 according to the second embodiment, the second adhesive force B1 and the third adhesive force C1 have the following relationship with the force for removing the workpiece W adhered to the adhesion member 113 (see FIG. 7(b) , hereinafter referred to as the “peeling force E”): · Secondary adhesive strength B1>Peeling strength E>Third adhesive strength C1 It is set so that:

[0078] The linear member 14 according to the second embodiment is disposed between a work-side adhering portion 113 a of an adhering member 113 and an upper portion 115 a of an elastic member 115 . Specifically, the linear member 14 is attached to the back side of the work-side adhesive portion 113a, and is positioned so that, with the adhesive member 113 attached to the elastic member 115, it is positioned at the center of the width of the elastic member 115 and extends from one end to the other end in the length direction (see Figure 3). The operation of arranging the linear member 14 between the attachment member 113 and the elastic member 115 corresponds to the "linear member arranging step" recited in the claims (claim 3).

[0079] Moreover, the linear member 14 according to the second embodiment is arranged to be embedded in the upper portion 115a of the elastic member 115 in a state in which the attachment member 113 is attached to the elastic member 115. This allows the front surface side of the work-side attachment portion 113a to be a substantially flat surface, so that when the work W is attached to the attachment member 113, they can be in good surface contact with each other.

[0080] In the workpiece holding mechanism 110 configured in this manner, when the pressing step S200 (see FIG. 2) of pressing the workpiece W against the adhering member 113 is performed, the workpiece W is adhered to the adhering member 113 as shown in FIG. 7(a).

[0081] In the second embodiment, similarly to the first embodiment, a decompression process S300 (see FIG. 2) and a process for performing surface treatment on the workpiece W are then performed, and the workpiece W is then removed using a peeling force E.

[0082] When the workpiece W is moved in the removal direction (the upward direction of the paper, hereinafter referred to as the "removal direction"), the adhesive force A0 and the first adhesive force A1 to the third adhesive force A3 are · First adhesive strength A1> Second adhesive strength B1> Peel strength E> Third adhesive strength C1 Adhesive strength A0>Secondary adhesive strength B1>Peeling strength E>Third adhesive strength C1 Since the above relationship is established, the adhesive member 113 and the elastic member 115 behave as shown in FIG. 7(b).

[0083] That is, in the second embodiment, when the workpiece W is moved in the outward direction with a peeling force E, the workpiece side adhesive portion 113a of the adhesive member 113 is actively peeled off from the upper portion 115a of the elastic member 115, so that a gap G1 is formed between them.

[0084] Thereafter, when the workpiece W is further moved in the removal direction, the portion of the workpiece-side adhesion portion 113a that is attached to the workpiece W is pulled, and the adhesion member 113 moves in the removal direction of the workpiece W, centering on the attached portion. As a result, the adhesion member 113 forms an arc shape with the portion that is attached to the workpiece W at the top, and gradually peels off from the workpiece W.

[0085] That is, in the second embodiment, when removing the workpiece W from the adhesive member 113, the workpiece holding mechanism 10 of the first embodiment (see FIG. 1) requires a force greater than the adhesive force between the adhesive member 13 and the workpiece W (adhesive force corresponding to the second adhesive force B1), whereas the workpiece holding mechanism 110 makes it possible to remove the workpiece W with a force (peel force E) smaller than the second adhesive force B1.

[0086] In the second embodiment, after performing such a workpiece W removal operation, the operation of attaching a new workpiece W to the adhesion member 113 is repeated as in the first embodiment (see "Depressurizing step S300" → "Pressing step S200" → "Depressurizing step S300" → ... in Figure 2).

[0087] In this manner, in the second embodiment, the attachment and detachment of the workpiece W to the attachment member 113 is repeated, and accordingly, the attachment member 113 is similarly detached from and attached to the elastic member 115.

[0088] In this regard, in the workpiece holding mechanism 110, in order to hold the workpiece W more stably, it is preferable that in addition to the workpiece W and the adhesive member 113 being properly adhered with the second adhesive force B1, the adhesive member 113 and the elastic member 115 are also properly adhered with the third adhesive force C1, that is, that no air bubbles are generated between the adhesive member 113 and the elastic member 115, and that they are adhered with a strong adhesive force (adhesion force).

[0089] If the adhesive member 113 and the elastic member 115 were not adhered with such adhesion force, even if the workpiece W is adhered to the adhesive member 113, there is a risk that the adhesion between the adhesive member 113 and the elastic member 115 may be released, and in such a case, a problem will arise in which the workpiece W will come off the adhesive member 113.

[0090] Furthermore, if air bubbles are generated between the adhesive member 113 and the elastic member 115 and the adhesive member 115 is repeatedly attached to each other, wrinkles or the like may form in the adhesive member 113. In such a case, not only will the third adhesive force C1 between the adhesive member 113 and the elastic member 115 decrease, but the second adhesive force B1 between the workpiece W and the adhesive member 113 will also decrease.

[0091] Therefore, in the workpiece holding mechanism 110, the linear member 14 similar to that in the first embodiment is disposed between the adhesive member 113 and the upper portion 115a of the elastic member 115. This makes it possible to remove air bubbles generated between the adhesive member 113 and the elastic member 115 as described in the first embodiment, and as a result, it is possible to solve the above-mentioned problems.

[0092] <Test 3> The applicant of the present application conducted a test (hereinafter referred to as "Test 3") using a work holding mechanism 110 (see FIG. 6) in which a linear member 14 is arranged and a work holding mechanism 110' (see FIG. 8) in which no linear member 14 is arranged as a comparison, in order to verify the adhesion (adhesion) between the adhesive member 113 and the elastic member 115. For ease of explanation, in the following, the work holding mechanism 110 shown in FIG. 6 will be referred to as the "work holding mechanism with linear member" and the work holding mechanism 110' shown in FIG. 8 will be referred to as the "work holding mechanism without linear member".

[0093] In "Test 3", a test was performed for each of the attachment member 113 and the elastic member 115 under conditions 1 to 3 shown below, using the "workpiece holding mechanism with linear member" and the "workpiece holding mechanism without linear member". (1) Condition 1 Adhesive material 113: Polyimide-based silicone double-sided adhesive tape ("Kapton double-sided tape NO. 760H (manufactured by Teraoka Seisakusho)") Elastic member 115: Silicone elastic sheet (2) Condition 2 Adhesive material 113: Polyimide-based silicone double-sided adhesive tape ("Kapton double-sided tape NO. 760H (manufactured by Teraoka Seisakusho)") Elastic member 115: Non-silicon elastic sheet (3) Condition 3 Adhesive member 113: Polyimide-based silicone double-sided adhesive tape ("Polyimide-based silicone double-sided adhesive tape 4390 (manufactured by 3M)") Elastic member 115: Non-silicon elastic sheet In "Test 3", a "glass substrate" was used as the workpiece W, similarly to "Test 1" and "Test 2" described above.

[0094] In "Test 3", a "tensile load of 40 N" was applied to the "glass substrate" attached to the adhesive member 113 under "vacuum conditions", and the time during which the adhesive member 113 held the "glass substrate" (hereinafter referred to as "holding time") was measured. In "Test 3", the "holding time" was measured for a maximum of "60 minutes".

[0095] FIG. 9 is a graph showing the test results of "Test 3." From the graph shown in Figure 9, it can be seen that the "workpiece holding mechanism with linear members" adheres and holds the "glass substrate" for "60 minutes", which is the longest measured time in "Test 3", under all conditions from Condition 1 to Condition 3. In contrast, it can be seen that the "linear member-free workpiece holding mechanism" adheres and holds the "glass substrate" for only about "20 minutes" under any of Conditions 1 to 3.

[0096] The reason why the holding time of the "workpiece holding mechanism without linear members" to hold the "glass substrate" is shorter than that of the "workpiece holding mechanism with linear members" is believed to be because the latter held the "glass substrate" in a state in which there were many air bubbles between the adhesive member 113 and the elastic member 115, i.e., the adhesion between the adhesive member 113 and the elastic member 115 was gradually released by the air bubbles.

[0097] In this regard, it can be said that by carrying out "Test 3", it was demonstrated that when the linear member 14 is disposed between the adhesive member 113 and the elastic member 115, air bubbles generated between them can be effectively removed.

[0098] In this way, according to the workpiece holding mechanism 110 of the second embodiment, the workpiece W can be held more stably during surface treatment such as film formation, and can be removed with a relatively small force after the surface treatment.

[0099] <Modification> In the second embodiment, the bottom 115b of the elastic member 115 is adhered to the adhesive tape 12 together with the substrate-side adhesion parts 113b, 113b of the attachment member 113. However, it may be configured not to be adhered as in the work holding mechanism 210 shown in Fig. 10. Hereinafter, the work holding mechanism 210 according to the modified example will be described with reference to Figs. 10 and 11. Note that the work holding mechanism 210 differs from the work holding mechanism 110 according to the second embodiment only in the manner in which the attachment member is adhered to the elastic member 115, and is otherwise similar in configuration. Therefore, the same reference numerals will be used and description thereof will be omitted unless necessary.

[0100] (Work holding mechanism 210) As shown in FIG. 10, the workpiece holding mechanism 210 of the modified example includes the support 11, adhesive tape 12, linear member 14, and elastic member 115 described above, and also includes an adhesive member 213 having a different configuration from the adhesive member 113 (see FIG. 6) described above. The above-mentioned workpiece holding mechanism 210, support 11, adhesive tape 12, adhesion member 213, linear member 14, and elastic member 115 correspond to the "air bubble removal device," "base," "adhesive tape," "adhesive member," "linear member," and "elastic member" respectively as described in the claims (Claim 4).

[0101] The adhesive member 213 is attached so as to cover the entire outer periphery of the elastic member 115 in the width direction, and has a work-side adhesive portion 213a to which the work W can be attached, and a base-side adhesive portion 213b which is adhered to the adhesive tape 12 attached to the support 11. That is, in the attachment member 213 according to this modification, the base side attachment portion 213b and the work side attachment portion 213a are arranged to face each other (fully facing each other) in a state where they are attached to the elastic member 115. Note that as the attachment member 213, for example, an adhesive sheet such as a double-sided adhesive sheet can be used. The workpiece side attachment portion 213a and the base side attachment portion 213b correspond to the "workpiece side attachment portion" and the "base side attachment portion" recited in the claims (claim 4), respectively.

[0102] In the modified example configured in this manner, unlike the second embodiment shown in Figure 6, the elastic member 115 is attached to the support 11 by adhering the base side adhesive portion 213b of the adhesive member 213 attached to the elastic member 115 to the adhesive tape 12.

[0103] The linear member 14 according to the modified example is disposed between the work-side adhering portion 213a of the adhering member 213 and the upper portion 115a of the elastic member 115, similar to the linear member 14 according to the second embodiment (see FIG. 6). Specifically, the linear member 14 in the modified example is attached to the back side of the work-side adhesive portion 213a, and when the adhesive member 213 is attached to the elastic member 115, it is positioned so as to be at the center of the width of the elastic member 115 and extend from one end to the other end in the length direction (see Figure 3).

[0104] In addition, similar to the linear member 14 according to the second embodiment (see FIG. 6), the linear member 14 according to the modified example is embedded in the upper portion 115a of the elastic member 115 with the adhesive member 213 adhered to the elastic member 115, thereby making it possible to form the front surface side of the work side adhesive portion 213a into an approximately flat surface.

[0105] In addition, in the work holding mechanism 210 according to this modified example, similarly to the work holding mechanism 110 according to the second embodiment (see FIG. 6), the first adhesive force A2 between the affixing member 213 and the adhesive tape 12, the second adhesive force B2 between the affixing member 213 and the work W, and the third adhesive force C2 between the affixing member 213 and the elastic member 115 are respectively: ·1st adhesive force A2>2nd adhesive force B2>3rd adhesive force C2 The above relationship is set to hold. The above-mentioned first adhesive strength A2, second adhesive strength B2, and third adhesive strength C2 correspond to the "first adhesive strength", "second adhesive strength", and "third adhesive strength" respectively as defined in the claims (Claim 4).

[0106] In other words, in the work holding mechanism 210, when an attempt is made to remove the attached work W from the adhesive member 213 with a peeling force E, the adhesion between the work side adhesive portion 213a of the adhesive member 213 and the upper portion 115a of the elastic member 115 is gradually released, since the third adhesive force C2 is set smaller than the second adhesive force B2 and the third adhesive force C2.

[0107] As a result, in the workpiece holding mechanism 210, it is possible to peel the workpiece W from between the workpiece-side adhesive portion 213a of the adhesive member 213 and the upper portion 115a of the elastic member 115 (see "gap G2" in FIG. 11(a)). As a result, in the workpiece holding mechanism 210 according to the modified example, the workpiece W can be removed with a force (peeling force E) smaller than the second adhesive force B2, as in the workpiece holding mechanism 110 according to the second embodiment (see FIG. 7(b)).

[0108] Furthermore, in the work holding mechanism 210, a linear member 14 similar to that in the work holding mechanism 110 of the second embodiment (see FIG. 7(b)) is arranged between the work side adhesive portion 213a of the adhesive member 213 and the upper portion 115a of the elastic member 115. That is, in the workpiece holding mechanism 210 according to the modified example, when the pressing step S200 or the depressurizing step S300 is performed, it is possible to effectively expel air bubbles existing between the adhesive member 213 and the elastic member 115 to the outside (see FIG. 3), and therefore the workpiece W can be held more stably.

[0109] In this manner, according to the workpiece holding mechanism 210 of the modified example, like the workpiece holding mechanism 110 of the second embodiment (see FIG. 6), the workpiece W can be held more stably during surface treatment such as film formation, and can be removed with a relatively small force after the surface treatment.

[0110] In this modification, the second attachment member 213 is attached so as to cover the entire outer periphery of the elastic member 115 (e.g., an elastic sheet), unlike the second embodiment (see FIG. 6). Therefore, when removing the workpiece W from the attachment member 213, depending on the removal direction, the magnitude of the peeling force E, etc., the workpiece W may peel off from between the base-side attachment portion 213b of the attachment member 213 and the lower portion 115b of the elastic member 115 as shown in FIG. 11(b).

[0111] In such a case, the portion of the work-side adhesive portion 213a that is attached to the workpiece W is pulled, and the adhesive member 213 takes on an arc shape with that portion at the top, and the elastic member 115 is also pulled by the adhesive member 213, and curves while forming a dome-shaped gap G3 between the bottom portion 115b and the base-side adhesive portion 213b of the adhesive member 213. That is, even when the adhesive member 213 and the elastic member 115 are peeled off in the manner shown in FIG. 11(b), it is possible to gradually peel off the adhesive member 213 from the workpiece W as the workpiece W moves in the removal direction.

[0112] In this way, in the modified work holding mechanism 210, it is possible that the work W will be peeled off in the manner shown in Figure 11(b). However, even in this case, as in the case of peeling off in the manner shown in Figure 11(a), it is possible to remove the work W with a force (peeling force E) smaller than the second adhesive force B2.

[0113] However, after the workpiece W is removed in this peeling manner, when the base-side adhesive portion 213b of the adhesive member 213 and the lower portion 115b of the elastic member 115 are attached to each other, air bubbles are likely to occur between them as described above. In such a case, there arises a problem that the adhesiveness (adhesion) between the adhesive member 213 and the elastic member 115 decreases, that is, the adhesive force (holding force) of the adhesive member 213 that holds the workpiece W decreases.

[0114] Therefore, in this modification, when the adhesive member 213 and the elastic member 115 are peeled off in such a peeling manner, the linear member 14 is arranged between the base side adhesive portion 213b of the adhesive member 213 and the lower portion 115b of the elastic member 115. Such an arrangement can be realized, for example, by adhering the linear member 14 to the back side of the base side adhesive portion 213b (see FIG. 11(b)). This makes it possible to remove air bubbles that are generated between the base side adhesive portion 213b of the adhesive member 213 and the lower portion 115b of the elastic member 115, and as a result, it is possible to improve the adhesive force (holding force) of the adhesive member 213 that holds the workpiece W.

[0115] In this modified example, the linear member 14 is disposed at one of the positions shown in FIG. 11(a) and (b), but it is also possible to dispose it at both positions.

[0116] In the second embodiment and the modified example thereof, the linear member 14 is attached to the adhesive member 113 (adhesive member 213) side. However, the linear member 14 may be attached to the elastic member 115 side.

[0117] Furthermore, in each of the above embodiments, a single linear member 14 is disposed between the adhesive member and the elastic member, but multiple linear members may be disposed between the adhesive member and the elastic member. In this case, the multiple linear members may be disposed in parallel with each other at intervals. With this configuration, it is expected that air bubbles generated between the adhesive member and the elastic member can be removed more efficiently and stably.

[0118] In each of the above embodiments, the workpiece W (adherend) is pressed toward the adhesive member, but the opposite may also be true, and the workpiece W and the adhesive member may be configured to press against each other.

[0119] Further, in each of the above embodiments, an example has been shown in which a workpiece holding mechanism is used as a method for removing air bubbles, but the present invention is not limited to this. For example, the air bubble removal method according to the present invention can be applied even when a sheet-like adhesive member (e.g., a seal or sticker) is attached (adhered) to a specific smooth surface (an adherend, for example, the outer surface of a vending machine). In this case, for example, a linear member stretched in a straight line is attached so that it protrudes from the adhesive surface of the adhesive member, and then this is attached to the specific smooth surface described above. In this case, the linear member can be removed (pulled out) after the adhesive member is attached to the smooth surface.

[0120] Furthermore, in each of the above embodiments, the decompression process is performed after the linear member arrangement process and the pressing process (see Figure 2, etc.), but it is also possible to omit the decompression process depending on the purpose or use of adhering the adherend and the adhesive member.

[0121] In addition, in each of the above embodiments, a work holding mechanism is shown as an example of a bubble removal device, but the present invention can be applied to any device that adheres an adhesive member to an adherend (for example, a device that adheres a sealing material to a product, etc.).

[0122] Although the embodiment of the invention made by the present inventor has been described above, the present invention is not limited by the description and drawings which form part of the disclosure of the present invention according to the embodiment. In other words, it should be added that all other embodiments, examples, and operation techniques made by those skilled in the art based on the embodiment are naturally included in the scope of the present invention. [Explanation of symbols]

[0123] 1 Film deposition equipment 2. Vacuum chamber 3. Pressure reduction means 10,110,210 Work holding mechanism (air bubble removal device) 110´ Work holding mechanism 11 Support (base) 12 Adhesive Tape 13,113,213 Adhesive material 113a, 213a Work side attachment part 113b, 213b Base side attachment part 14 Linear members 115 Elastic Members 115a Upper 115b Bottom (base mounting part) Double work S interior space A1, A2 bubbles A3 Air G1~G3 Gap A0 Adhesive strength A1,A2 1st adhesive strength B1,B2 2nd adhesive strength C1,C2 3rd adhesive strength E Peeling force

Claims

1. A method for removing air bubbles that are generated between an adherend and an adhesive member when the adherend and the adhesive member are attached to each other, comprising the steps of: a linear member arranging step of arranging a linear member between the adherend and the adhesive member so as to extend from one end of the adhesive member to the other end of the adhesive member; a pressing step of pressing at least one of the adherend and the adhesive member toward the other after the linear member arrangement step; The method for removing air bubbles comprises:

2. The adherend is a workpiece, The adhering member has a work adhering portion capable of adhering the work, The bubble removing process according to claim 1 , wherein the linear member arranging step includes a step of arranging the linear member between the workpiece and the workpiece attachment portion.

3. the adherend is made of an elastic member that is elastically deformable, and has a base mounting portion that is attached to an adhesive tape provided on a base; The affixing member is made of an adhesive sheet and is affixed so as to wrap around the outer periphery of the adherend from one end to the other end of the base mounting portion, and has a base side affixing portion that is affixed to the adhesive tape, and a work side affixing portion that is capable of affixing a work on the opposite side to the base side affixing portion, When the adhesive strength between the adhesive member and the adhesive tape is a first adhesive strength, the adhesive strength between the adhesive member and the workpiece is a second adhesive strength, and the adhesive strength between the adhesive member and the elastic member is a third adhesive strength, the first adhesive strength>the second adhesive strength>the third adhesive strength Adhesive strength between the elastic member and the adhesive tape>the second adhesive strength>the third adhesive strength The relationship is established, The air bubble removing process according to claim 1 , wherein the linear member arranging step includes a step of arranging the linear member between the elastic member and the work-side attachment portion.

4. The adherend is made of an elastic member that is elastically deformable and is provided on a base; the affixing member is made of an adhesive sheet and is affixed so as to cover the entire outer periphery of the elastic member, and has a base-side affixing portion that is affixed to an adhesive tape provided on the base, and a work-side affixing portion that is capable of affixing a work on the opposite side to the base-side affixing portion, When the adhesive strength between the adhesive member and the adhesive tape is a first adhesive strength, the adhesive strength between the adhesive member and the workpiece is a second adhesive strength, and the adhesive strength between the adhesive member and the elastic member is a third adhesive strength, the first adhesive strength>the second adhesive strength>the third adhesive strength The relationship is established, The bubble removal process according to claim 1 , wherein the linear member arrangement step includes a step of arranging the linear member between the elastic member and at least one of the base side attachment portion and the work side attachment portion.

5. The adherend and the adhesive member are accommodated in a space that can be decompressed, The air bubble removal method according to claim 1 , further comprising a depressurizing step of reducing the pressure inside the space after the pressing step.

6. The bubble removal method according to any one of claims 1 to 4, wherein the linear member arrangement step includes a step of arranging a plurality of the linear members in parallel with intervals between the adhesive member and the adherend.

7. The bubble removing method according to any one of claims 1 to 4, wherein the linear member has an outer diameter within a range of 0.03 to 0.1 mm.

8. An air bubble removing device for removing air bubbles generated between an adherend and an adhesive member when the adherend and the adhesive member are attached to each other, An air bubble removing device comprising a linear member disposed on an adhesive surface of the adhesive member to which the adherend is attached so as to extend from one end of the adhesive surface to the other end.

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