Gas supply device

Abstract

SOLUTION: A gas supply device 10 for supplying gas to a biological sample comprises: an inlet port 122 through which the gas flows in; an outlet port 124 through which the gas flows out; a discharge port 126 through which the gas is discharged to the outside; a pressure adjustment valve 82 having a main valve 132 that adjusts, according to a pilot pressure, the pressure of the gas flowing through a flow path 150, and an exhaust valve 134 that discharges the gas in the flow path from the discharge port in accordance with the pilot pressure; a pilot pressure adjustment solenoid valve 84 that adjusts the pilot pressure; and a throttle flow path 50 that limits the flow rate of the gas to a predetermined flow rate.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a gas supply device. [Background technology]

[0002] Patent Document 1 discloses a pressure type flow rate control device that supplies gas used in semiconductor manufacturing. The pressure type flow rate control device has a common inlet through which gas flows in from a gas supply source, and a common outlet through which gas flows out to a process chamber of a semiconductor manufacturing device. A first flow path and a second flow path are provided between the common inlet and the common outlet. A control valve and a throttle portion are provided in each of the first flow path and the second flow path. The first flow path is used when a large flow rate of gas flows, and the second flow path is used when a small flow rate of gas flows. Gas flows through only one of the flow paths by controlling the control valve. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2018 / 070464 Summary of the Invention [Problem to be solved by the invention]

[0004] According to the pressure type flow control device disclosed in Patent Document 1, when the flow rate passing through the throttle section is very small, gas tends to remain upstream of the throttle section. This residual gas may affect the use of the device to which the gas is supplied. For example, assume that the pressure type flow control device disclosed in Patent Document 1 is used to supply a gas such as air to a biological sample in a bioreactor at a very small flow rate. In that case, even after the control valve is closed, the remaining gas continues to be output at a very small flow rate for a long time. It is desirable to output the remaining gas quickly.

[0005] The present invention aims to solve the above-mentioned problems. [Means for solving the problem]

[0006] One aspect of the present invention is a gas supplying device that supplies gas to a biological sample, and includes an inlet port through which gas from a gas supply source flows in, an outlet port through which the gas flows out, a discharge port through which the gas is discharged to the outside of the gas supplying device, a main valve that adjusts the pressure of the gas flowing through a flow path connecting the inlet port to the outlet port in accordance with a pilot pressure, and a pressure regulating valve having an exhaust valve that discharges the gas in the flow path from the exhaust port in accordance with the pilot pressure, a pilot pressure regulating solenoid valve that adjusts the pilot pressure, and a throttling flow path that limits the flow rate of the gas flowing out of the outlet port to a predetermined flow rate and outputs the gas at the predetermined flow rate for gas supply. Effect of the Invention

[0007] According to the present invention, gas remaining in a gas supply device having a throttle flow passage that limits the flow rate of gas to a minute flow rate can be quickly output. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram illustrating a gas supply device and a control circuit for controlling the gas supply device. [Diagram 2] FIG. 2 is a diagram illustrating a schematic diagram of the pressure adjusting section. [Diagram 3] FIG. 3 is a diagram showing a drawn laminate. [Figure 4] FIG. 4 is an enlarged view of the drawn laminate. [Diagram 5] FIG. 5 is a diagram showing the structure of a drawn laminate. [Figure 6] Fig. 6A is a diagram illustrating a rectangular cross section of a throttle channel, Fig. 6B is a diagram illustrating a rectangular cross section of a throttle channel, and Fig. 6C is a diagram illustrating a channel width of the throttle channel. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] 1 is a diagram illustrating a gas supplying device 10 and a control circuit 20 that controls the gas supplying device 10. The gas supplying device 10 supplies gas to a biological sample contained in a bioreactor (not shown). The gas supplied to the biological sample is a gas that can be discharged to the outside of the gas supplying device 10 without any problems, such as air containing oxygen, nitrogen, and carbon dioxide.

[0010] The gas supplying device 10 limits the flow rate of gas flowing in from a gas supply source (not shown) to a very small flow rate in order to supply the gas to the biological sample. The very small flow rate includes, for example, a flow rate of 0.01 [mL / min] to 1000 [mL / min]. The gas supplying device 10 outputs the gas with the limited flow rate to the bioreactor for supplying the gas to the biological sample.

[0011] The control circuit 20 has a processor such as a CPU (Central Processing Unit) and memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory). The control circuit 20 executes a program stored in the memory to control the gas supply device 10 based on a command signal from a higher-level device (not shown). The higher-level device is, for example, a PLC (Programmable Logic Controller).

[0012] The gas supply device 10 has a pressure adjustment unit 30, a filter 40, a throttle flow path 50, and a switching solenoid valve 60. The pressure adjustment unit 30 includes a pressure adjustment valve 82 and a pilot pressure adjustment solenoid valve 84 of the pressure adjustment valve 82. When the main valve of the pressure adjustment valve 82 opens in response to an increase in pilot pressure adjusted by the pilot pressure adjustment solenoid valve 84, the pressure adjustment valve 82 adjusts the pressure of the gas from the gas supply source according to the pilot pressure. The gas whose pressure has been adjusted flows through the flow path in the pressure adjustment valve 82, flows out of the pressure adjustment valve 82, and heads toward the filter 40 and the throttle flow path 50.

[0013] As the pilot pressure decreases, the main valve of the pressure regulating valve 82 closes. In this case, the flow of gas that has flowed from the gas supply source to the pressure regulating valve 82 is blocked. When the exhaust valve of the pressure regulating valve 82 opens as the pilot pressure further decreases, the gas in the flow path inside the pressure regulating valve 82 is exhausted from the pressure regulating valve 82 to the outside of the gas supply device 10.

[0014] As will be described later, gas remaining between the pressure regulating valve 82 and the switching solenoid valve 60 is also discharged from the pressure regulating valve 82 to the outside of the gas supply device 10 by opening an exhaust valve of the pressure regulating valve 82. The structure of the pressure regulating valve 82 and the discharge of gas remaining between the pressure regulating valve 82 and the switching solenoid valve 60 will be described later with reference to FIG.

[0015] As described above, the pilot pressure regulating solenoid valve 84 regulates the pilot pressure of the pressure regulating valve 82. The pilot pressure regulating solenoid valve 84 includes an air supply solenoid valve 84s and an exhaust solenoid valve 84e. The control circuit 20 controls the air supply solenoid valve 84s to cause the air supply solenoid valve 84s to supply gas to the pilot chamber of the pressure regulating valve 82. This increases the pilot pressure. In the example shown in FIG. 1, the air supply solenoid valve 84s supplies a portion of the gas that has flowed from the gas supply source into the pressure regulating valve 82 to the pilot chamber. The air supply solenoid valve 84s may supply gas from another gas supply source to the pilot chamber.

[0016] The control circuit 20 controls the exhaust solenoid valve 84e to cause the exhaust solenoid valve 84e to exhaust gas from the pilot chamber of the pressure regulating valve 82. This reduces the pilot pressure. In the example shown in FIG. 1, the air supply solenoid valve 84s exhausts the gas in the pilot chamber to the outside of the gas supply device 10. The gas in the pilot chamber may be exhausted to the outside of the gas supply device 10 together with the gas exhausted by the exhaust valve of the pressure regulating valve 82.

[0017] The gas flowing out from the pressure regulating valve 82 flows through a connecting flow passage 90 from the pressure regulating valve 82 to the throttle flow passage 50, and heads toward the filter 40 and the throttle flow passage 50. The filter 40 is disposed in the connecting flow passage 90 and removes dust from the gas flowing through the connecting flow passage 90. This makes it possible to prevent clogging of the throttle flow passage 50, which has a narrow flow passage width.

[0018] The gas supply device 10 has one or more throttle channels 50 downstream of the pressure regulating valve 82 and the filter 40. In the example shown in Fig. 1, five throttle channels 50a, 50b, 50c, 50d, and 50e are provided. Each throttle channel 50 limits the flow rate of the gas flowing out from the pressure regulating valve 82 to a predetermined flow rate within a predetermined range corresponding to each throttle channel 50. In this embodiment, the predetermined range corresponding to each throttle channel 50 is included in the throttle range of 0.01 [mL / min] to 1000 [mL / min], which corresponds to a minute flow rate.

[0019] The predetermined ranges corresponding to the five throttle channels 50a, 50b, 50c, 50d, and 50e are different from each other. For example, the throttle channel 50a limits the flow rate of the gas to a predetermined flow rate within a predetermined range of 0.01 [mL / min] to 0.1 [mL / min] among the throttle ranges described above. The throttle channel 50b limits the flow rate of the gas to a predetermined flow rate within a predetermined range of 0.1 [mL / min] to 1 [mL / min] among the throttle ranges described above. The throttle channel 50c limits the flow rate of the gas to a predetermined flow rate within a predetermined range of 1 [mL / min] to 10 [mL / min] among the throttle ranges described above.

[0020] The throttle flow path 50d limits the flow rate of the gas to a predetermined flow rate within a predetermined range of 10 [mL / min] to 100 [mL / min] among the throttle ranges described above. The throttle flow path 50e limits the flow rate of the gas to a predetermined flow rate within a predetermined range of 100 [mL / min] to 1000 [mL / min] among the throttle ranges described above. Any one of the throttle flow paths 50 outputs gas at a predetermined flow rate within the predetermined range corresponding to that throttle flow path 50 for gas supply to the biological sample.

[0021] The specific predetermined flow rate can take any value based on the pressure of the gas adjusted according to the pilot pressure of the pressure regulating valve 82 described above. That is, in order to realize gas supply at a predetermined flow rate, first, the throttle flow path 50 corresponding to a predetermined range including the predetermined flow rate is determined. Next, the pilot pressure of the pressure regulating valve 82 is appropriately set, so that gas is output at the predetermined flow rate from the determined throttle flow path 50. The predetermined flow rate can be increased by increasing the pilot pressure.

[0022] The connecting flow passage 90 includes five connecting flow passages 90a, 90b, 90c, 90d, and 90e that branch off toward the five throttle flow passages 50 downstream of the filter 40. The five connecting flow passages 90a, 90b, 90c, 90d, and 90e are connected to the five throttle flow passages 50a, 50b, 50c, 50d, and 50e, respectively.

[0023] The switching solenoid valve 60 is connected to the throttle flow passage 50 and outputs gas from the throttle flow passage 50. The gas supply device 10 has one switching solenoid valve 60 or a plurality of switching solenoid valves 60 according to the number of throttle flow passages 50 to which the switching solenoid valve 60 is connected. When the gas supply device 10 has a plurality of throttle flow passages 50, the switching solenoid valve 60 outputs gas from any one of the throttle flow passages 50. When only one throttle flow passage 50 is provided, one switching solenoid valve 60 may be provided or may not be provided. In the example shown in FIG. 1, five switching solenoid valves 60a, 60b, 60c, 60d, and 60e are provided.

[0024] Each switching solenoid valve 60 is disposed downstream of the connected throttle flow path 50, and switches whether or not to output gas from the throttle flow path 50. The control circuit 20 controls each switching solenoid valve 60 to switch each switching solenoid valve 60 from a valve open state to a valve closed state, or from a valve closed state to a valve open state.

[0025] When the switching solenoid valve 60 is open, it outputs gas from the throttle flow path 50. The gas flows through the section flow path 100 from the throttle flow path 50 to the switching solenoid valve 60, flows through the flow path inside the switching solenoid valve 60, and flows out from the gas supply device 10 toward the bioreactor. When the switching solenoid valve 60 is closed, it blocks the output of gas from the throttle flow path 50.

[0026] The switching solenoid valve 60 is connected to the throttle flow passage 50 via a section flow passage 100. As shown in Fig. 1, the section flow passage 100 includes five section flow passages 100a, 100b, 100c, 100d, and 100e.

[0027] That is, the switching solenoid valve 60a is connected to the throttle passage 50a via the section passage 100a. The switching solenoid valve 60b is connected to the throttle passage 50b via the section passage 100b. The switching solenoid valve 60c is connected to the throttle passage 50c via the section passage 100c. The switching solenoid valve 60d is connected to the throttle passage 50d via the section passage 100d. The switching solenoid valve 60e is connected to the throttle passage 50e via the section passage 100e.

[0028] The output flow path 110 includes five output flow paths 110a, 110b, 110c, 110d, and 110e that are connected to the five switching solenoid valves 60, respectively, downstream of the five switching solenoid valves 60. The five output flow paths 110a, 110b, 110c, 110d, and 110e merge into one. The gas that flows through the merged output flow path 110 is output from the gas supply device 10.

[0029] When one switching solenoid valve 60 is in an open state and the remaining switching solenoid valves 60 are in a closed state, gas can be output from the throttle flow path 50 to which the switching solenoid valve 60 in the open state is connected. The gas output from the throttle flow path 50 flows through the switching solenoid valve 60 in the open state and the output flow path 110, and is output from the gas supply device 10. The gas output from the gas supply device 10 is supplied to the bioreactor.

[0030] For example, when the switching solenoid valve 60a is in an open state and the remaining switching solenoid valves 60b, 60c, 60d, and 60e are in a closed state, gas can be output from the throttle flow path 50a. In this case, the gas from the throttle flow path 50a flows through the switching solenoid valve 60a and the output flow path 110a and is output. When the output of gas from the throttle flow path 50a is stopped and the output of gas from the throttle flow path 50b is started, the following process is performed.

[0031] First, the control circuit 20 controls the switching solenoid valve 60a to switch the switching solenoid valve 60a from a valve open state to a valve closed state. This stops the output of gas from the throttle flow path 50a. Next, the control circuit 20 controls the switching solenoid valve 60b to switch the switching solenoid valve 60b from a valve closed state to a valve open state. This starts the output of gas from the throttle flow path 50b. Since the switching solenoid valve 60 is provided for each throttle flow path 50 from which gas is output, it is easy to control the output of gas with a flow rate limited to a predetermined flow rate.

[0032] In this way, the switching solenoid valve 60 can output gas whose flow rate is limited to a predetermined flow rate from any one of the throttle channels 50. That is, the switching solenoid valve 60 can switch the predetermined flow rate within a throttle range of 0.01 [mL] to 1000 [mL] and output gas at the switched predetermined flow rate. This makes it possible to easily switch the flow rate of gas to a predetermined flow rate suitable for supplying gas to a biological sample. In FIG. 2, the main valve 132 and the exhaust valve 134 are both closed.

[0033] When the valve element 132d of the main valve 132 is pressed against the valve seat 132s by the repulsive force of the elastic body 132e, the main valve 132 is closed. As described below, when the main valve 132 is pressed by the diaphragm 142 and the valve element 132d is separated from the valve seat 132s, the main valve 132 opens. When the main valve 132 is open, gas that has flowed into the inlet port 122 flows out from the outlet port 124.

[0034] When the exhaust valve 134 is pressed against the main valve 132 by the diaphragm 142, the exhaust valve 134 is closed. As described below, when the diaphragm 142 pulls the exhaust valve 134 and the exhaust valve 134 moves away from the main valve 132, the exhaust valve 134 opens. When the exhaust valve 134 is open, the gas in the pressure regulating valve 82 flows through an exhaust flow path 134p formed in the main valve 132, and is discharged from the exhaust port 126.

[0035] 2 is a diagram showing a schematic diagram of the pressure adjustment unit 30. The pressure adjustment valve 82 of the pressure adjustment unit 30 has an inlet port 122, an outlet port 124, an exhaust port 126, a main valve 132, an exhaust valve 134, and a diaphragm 142. Gas flows into the inlet port 122 from a gas supply source.

[0036] When the main valve 132 of the pressure regulating valve 82 is open, a flow path 150 is formed that communicates from the inlet port 122 to the outlet port 124. The gas that has flowed into the inlet port 122 flows through the flow path 150 in the pressure regulating valve 82 and flows out from the outlet port 124. The flow path 150 includes an inlet path 150a from the inlet port 122 to the main valve 132, and an outlet path 150b from the main valve 132 to the outlet port 124. The gas flowing out from the outlet port 124 flows toward the filter 40 and the throttle flow path 50 at a pressure adjusted according to the opening degree of the main valve 132.

[0037] The main valve 132 adjusts the pressure of the gas flowing through the flow path 150 in accordance with the pilot pressure adjusted by the pilot pressure adjusting solenoid valve 84. The air supply solenoid valve 84s supplies gas to a pilot chamber 160 in the pressure adjusting valve 82. A diaphragm 142 is disposed in the pilot chamber 160. When the gas in the pilot chamber 160 increases, the pilot pressure increases. In accordance with the pilot pressure, the diaphragm 142 presses the main valve 132. This opens the main valve 132. The pressure of the gas flowing through the flow path 150 is adjusted by the opening degree of the main valve 132 in accordance with the pilot pressure.

[0038] The exhaust solenoid valve 84e exhausts the gas in the pilot chamber 160 of the pressure regulating valve 82 to the outside of the gas supply device 10. When the gas in the pilot chamber 160 decreases, the pilot pressure decreases and the diaphragm 142 returns. When the diaphragm 142 is pulled back by the decrease in pilot pressure and the main valve 132 of the pressure regulating valve 82 closes, the flow of gas that has flowed from the gas supply source to the inlet port 122 is blocked. When the inlet port 122 is open, the gas from the gas supply source stops at the inlet path 150a. When the inlet port 122 is closed, the gas from the gas supply source stops outside the inlet port 122.

[0039] When the pilot pressure further decreases, the diaphragm 142 pulls the exhaust valve 134 of the pressure regulating valve 82 in response to the pilot pressure. This opens the exhaust valve 134. The exhaust valve 134 exhausts gas from within the flow path 150, etc., to the outside of the gas supply device 10 through the exhaust port 126 in response to the pilot pressure.

[0040] When the exhaust valve 134 is open, the gas in the flow path 150, the gas in the connection flow path 90, the gas in the throttle flow path 50, and the gas in the section flow path 100 are exhausted from the exhaust port 126. When the inlet port 122 is open, of the gas in the flow path 150, the gas in the outlet path 150b is exhausted. When the pressure in each flow path is reduced to atmospheric pressure, the exhaust of the gas is completed. Note that there is usually no problem even if the gas supplied to the biological sample is released into the atmosphere.

[0041] Since the pressure regulating valve 82 has the exhaust valve 134, the gas remaining in the flow path 150 in a relatively large amount and the gas in the connection flow path 90 are exhausted without being output from the throttle flow path 50, which is limited to a minute flow rate. Therefore, the gas can be exhausted in a short time. In other words, the gas remaining in the gas supply device 10 can be quickly output.

[0042] FIG. 3 is a diagram showing the drawing laminated plate 180. In the example shown in FIG. 3, five drawing laminated plates 180 and five switching solenoid valves 60 are fixed to the protruding portion 200c of the flow path block 200 by fixing members 190. The fixing members 190 are, for example, screws. In the example shown in FIG. 3, two screws are used as the fixing members 190. Each switching solenoid valve 60 has a through hole 60T through which the fixing member 190 is inserted and screwed. Each drawing laminated plate 180 has a through hole 180T through which the fixing member 190 is inserted. A groove 200T into which the fixing member 190 is screwed is formed in the protruding portion 200c of the flow path block 200.

[0043] Each of the throttle channels 50 is formed inside each of the throttle laminates 180. As described later with reference to FIG. 5, the throttle laminate 180 is obtained by laminating a plurality of thin metal plates. The connection channel 90 is formed in the channel block 200. The filter 40 arranged in the connection channel 90 is provided in the channel block 200. The connection channels 90a, 90b, 90c, 90d, and 90e obtained by branching the connection channel 90 into five are formed in the protruding portion 200c of the channel block 200. The throttle laminate 180 is sandwiched between the switching solenoid valve 60 and the channel block 200.

[0044] The switching solenoid valve 60 has a main body 60m and a solenoid portion 60s. The main body 60m of the switching solenoid valve 60 houses a valve disposed in a gas flow path in the switching solenoid valve 60. The solenoid portion 60s of the switching solenoid valve 60 opens and closes the valve in the main body 60m. The drawing laminated plate 180 is sandwiched between the solenoid portion 60s of the switching solenoid valve 60 and the protruding portion 200c of the flow path block 200.

[0045] The connection flow path 90 branches into five in the flow path block 200. A connection flow path 90a, which is one of the five connection flow paths obtained by branching the connection flow path 90, includes an outlet 90ac formed in the protruding portion 200c of the flow path block 200. Of the gas that flows out of the outlet port 124 of the pressure regulating valve 82 and passes through the filter 40, the gas flowing through the connection flow path 90a reaches the outlet 90ac.

[0046] 4 is an enlarged view of the throttle laminate 180a. The throttle laminate 180a has a recess 90ao formed on one surface of the throttle laminate 180a facing the flow path block 200. The gas that reaches the outlet 90ac flows into the recess 90ao. The recess 90ao is formed at a position overlapping the outlet 90ac. That is, the recess 90ao corresponds to the downstream end of the connection flow path 90a whose upstream end is the branch point. The upstream end of the throttle flow path 50a is formed in a part of the peripheral wall of the recess 90ao.

[0047] The throttle laminate 180a has a recess 100ai formed on the other surface of the throttle laminate 180a facing the switching solenoid valve 60. The gas that has flowed through the throttle flow path 50a flows into the recess 100ai. The downstream end of the throttle flow path 50a is formed in a part of the peripheral wall of the recess 100ai. The recess 100ai corresponds to the upstream end of the section flow path 100a. The gas that has reached the recess 100ai flows through the section flow path 100a to the downstream end of the section flow path 100a formed in the main body portion 60m of the switching solenoid valve 60a.

[0048] The gas that flows from the downstream end of the section flow path 100a into the main body 60m of the switching solenoid valve 60a flows into the output flow path 110a when the switching solenoid valve 60a is in an open state. The output flow path 110a includes a through hole 110ai in the diaphragm laminate 180a and an inlet 110ac formed in the protruding portion 200c of the flow path block 200. The gas that flows through the through hole 110ai and flows into the flow path block 200 from the inlet 110ac flows through the output flow path 110 including the output flow path 110a, and is output from the gas supply device 10.

[0049] 5 is a diagram showing the configuration of the drawn laminated plate 180. The drawn laminated plate 180 is obtained by stacking a plurality of thin metal plates 212. The stacked plurality of thin metal plates 212 are integrated by thermal diffusion bonding to form the drawn laminated plate 180. FIG. 5 shows the drawn laminated plate 180 in which seven thin metal plates 212a, 212b, 212c, 212d, 212e, 212f, and 212g are stacked in this order. The thin metal plate 212a faces the flow path block 200. The thin metal plate 212g faces the switching solenoid valve 60.

[0050] The aforementioned recess 90ao is formed by a circular through hole 90aoa in the thin metal plate 212a, a circular through hole 90aob in the thin metal plate 212b, a circular through hole 90aoc in the thin metal plate 212c, a circular through hole 90aod in the thin metal plate 212d, a circular through hole 90aoe in the thin metal plate 212e, a circular through hole 90aof in the thin metal plate 212f, and the thin metal plate 212g.

[0051] That is, a thin metal sheet 212g that does not have a through hole at a position where the through holes 90aoa, 90aob, 90aoc, 90aod, 90aoe, and 90aof overlap each other is stacked on the thin metal sheets 212a, 212b, 212c, 212d, 212e, and 212f. This forms a recess 90ao.

[0052] The thin metal plate 212b further has straight and curved through holes 50ab. The thin metal plates 212a and 212c, which do not have through holes at the positions of the through holes 50ab, are stacked with the thin metal plate 212b sandwiched therebetween. This forms a part of the throttle flow passage 50a. In the thin metal plate 212b, the straight and curved through holes 50ab are connected to the circular through hole 90aob. This forms the upstream end of the throttle flow passage 50a described above.

[0053] The thin metal plate 212c further has a straight and curved through hole 50ac. The thin metal plates 212b and 212d, which do not have a through hole at the position of the through hole 50ac, are stacked with the thin metal plate 212c sandwiched therebetween. This forms a part of the throttled flow path 50a. The thin metal plate 212e further has a straight and curved through hole 50ae. The thin metal plates 212d and 212f, which do not have a through hole at the position of the through hole 50ae, are stacked with the thin metal plate 212e sandwiched therebetween. This forms a part of the throttled flow path 50a.

[0054] The thin metal plate 212f further has straight and curved through holes 50af. The thin metal plates 212e and 212g, which do not have through holes at the positions of the through holes 50af, are stacked with the thin metal plate 212f sandwiched therebetween. This forms a part of the throttled flow path 50a.

[0055] By laminating the metal thin plates 212a, 212b, 212c, 212d, 212e, 212f, and 212g, a throttle passage 50a having a rectangular cross section is formed with a flow passage width D and a flow passage length L according to the above-mentioned predetermined flow rate. By appropriately designing the flow passage width D and the flow passage length L, it is easy to realize the predetermined flow rate. The calculation of the flow passage width D in a rectangular cross section perpendicular to the flow direction of the gas flowing through the throttle passage 50a will be described later with reference to Figures 6A, 6B, and 6C. The predetermined flow rate changes depending on the pilot pressure of the pressure regulating valve 82. The other throttle passages 50b, 50c, 50d, and 50e are formed in the same manner as the throttle passage 50a.

[0056] The recess 100ai is formed by the thin metal plate 212e, the circular through hole 100aif of the thin metal plate 212f, and the circular through hole 100aig of the thin metal plate 212g. That is, the thin metal plate 212e, which does not have a through hole at the position where the through holes 100aif and 100aig overlap each other, is laminated on the thin metal plates 212f and 212g. This forms the recess 100ai.

[0057] The aforementioned through hole 110ai is formed by a circular through hole 110aia in the thin metal plate 212a, a circular through hole 110aib in the thin metal plate 212b, a circular through hole 110aic in the thin metal plate 212c, a circular through hole 110aid in the thin metal plate 212d, a circular through hole 110aie in the thin metal plate 212e, a circular through hole 110aif in the thin metal plate 212f, and a circular through hole 110aig in the thin metal plate 212g.

[0058] That is, the thin metal plates 212a, 212b, 212c, 212d, 212e, 212f, and 212g are stacked so that the through holes 110aia, 110aib, 110aic, 110aid, 110aie, 110aif, and 110aig overlap one another. This forms the through hole 110ai.

[0059] The aforementioned through hole 180T is formed by a circular through hole 180Ta in the thin metal plate 212a, a circular through hole 180Tb in the thin metal plate 212b, a circular through hole 180Tc in the thin metal plate 212c, a circular through hole 180Td in the thin metal plate 212d, a circular through hole 180Te in the thin metal plate 212e, a circular through hole 180Tf in the thin metal plate 212f, and a circular through hole 180Tg in the thin metal plate 212g.

[0060] That is, the thin metal plates 212a, 212b, 212c, 212d, 212e, 212f, and 212g are stacked such that the through holes 180Ta, 180Tb, 180Tc, 180Td, 180Te, 180Tf, and 180Tg overlap one another. This forms the through hole 180T.

[0061] As described above, the fixing member 190 is inserted through the through hole 180T of the throttling laminated plate 180 sandwiched between the switching solenoid valve 60 and the protruding portion 200c of the flow path block 200. The fixing member 190 is screwed into the through hole 60T of the switching solenoid valve 60 and the groove 200T of the protruding portion 200c. That is, the switching solenoid valve 60 and the throttling laminated plate 180 in which the throttling flow path 50 to which the switching solenoid valve 60 is connected is formed are fastened together by the fixing member 190 and fixed to the flow path block 200.

[0062] 3, the solenoid portion 60s of the switching solenoid valve 60 is fixed to the protruding portion 200c of the flow path block 200, together with the drawn laminated plate 180 sandwiched therebetween. In more detail, the main body portion 60m of the switching solenoid valve 60, the solenoid portion 60s of the switching solenoid valve 60, the drawn laminated plate 180, and the protruding portion 200c of the flow path block 200 are arranged in this order and fixed to each other. This ensures the rigidity of the relatively thin drawn laminated plate 180.

[0063] By fastening the switching solenoid valve 60 and the throttle laminate 180 together, the length of the section flow path 100 from the throttle flow path 50 to the switching solenoid valve 60 can be kept short. As a result, the gas supply device 10 can be made compact. When the section flow path 100 is long, a large amount of gas remains in the section flow path 100 after all the switching solenoid valves 60 are closed to stop the gas supply from the gas supply device 10 to the biological sample.

[0064] When the exhaust valve 134 of the pressure regulating valve 82 is open, the gas in the flow path 150, the gas in the connection flow path 90, the gas in the throttle flow path 50, and the gas in the section flow path 100 are exhausted from the exhaust port 126. However, because the flow rate of the gas is limited to a very small flow rate by the throttle flow path 50, it takes a long time to complete the exhaust of the gas in the section flow path 100. When the switching solenoid valve 60 is in the valve open state, the gas in the section flow path 100 can be output from the output flow path 110. However, in that case, an overshoot may occur in which a large amount of gas is output to the bioreactor at high pressure. This may result in the death of the biological sample, etc.

[0065] In this embodiment, the length of the section flow path 100 can be kept short, and therefore the time required for the gas in the section flow path 100 to be completely discharged can be kept short.

[0066] Fig. 6A is a diagram for explaining a rectangular cross section S of the throttle flow channel 50. The rectangular cross section S is a cross section obtained when the throttle flow channel 50 is cut perpendicularly to the flow direction F of the gas flowing through the throttle flow channel 50a having a flow channel length L. Fig. 6A illustrates the width W of the rectangular cross section S, the height H of the rectangular cross section S, the perimeter P of the rectangular cross section S, and the area A of the rectangular cross section S.

[0067] 6B is a diagram showing a rectangular cross section S of the throttled flow path 50. The perimeter P of the rectangular cross section S is expressed by formula (1) based on the width W of the rectangular cross section S and the height H of the rectangular cross section S. The area A of the rectangular cross section S is expressed by formula (2) based on the width W of the rectangular cross section S and the height H of the rectangular cross section S. P = 2 (W + H) (1) A = W H (2)

[0068] FIG. 6C is a diagram for explaining the flow path width D of the throttle flow path 50. FIG. 6C shows a circular cross section SR of an equivalent flow path 50R equivalent to the throttle flow path 50. In general, the diameter of a circular cross section SR having the same perimeter P and area A as the perimeter P and area A of the rectangular cross section S, respectively, is known as the equivalent diameter of the rectangular cross section S. In this embodiment, the equivalent diameter of the rectangular cross section S is used as the flow path width D of the throttle flow path 50. Therefore, the flow path width D of the throttle flow path 50 is expressed by formula (3). Using formulas (1), (2), and (3), the flow path width D of the throttle flow path 50 is expressed by formula (4). D=4·A / P ···(3) D=4·W·H / (2·(W+H)) ···(4)

[0069] The predetermined flow rate limited by each throttle channel 50 is determined according to the channel width D and channel length L of the throttle channel 50 and the pilot pressure of the pressure regulating valve 82. That is, the channel width D and channel length L of the throttle channel 50 are determined for each throttle channel 50. The narrower the channel width D, the greater the influence of the inner wall of the throttle channel 50, and therefore the smaller the predetermined flow rate. By appropriately designing the channel width D, it is possible to create a throttle channel 50 capable of outputting a minute flow rate of gas suitable for supplying gas to a biological sample.

[0070] Furthermore, the longer the flow path length L, the greater the influence of the inner wall of the throttle flow path 50, and therefore the smaller the predetermined flow rate. By appropriately designing the flow path length L, it is possible to create a throttle flow path 50 capable of outputting a minute flow rate of gas suitable for supplying gas to a biological sample. When the flow path width D is the same value in all throttle flow paths 50, the flow path length L of each throttle flow path 50 can be designed using a value obtained by multiplying the flow path width D by N.

[0071] For example, N=7000 is used to design the flow path length L of the throttle flow path 50a having the smallest predetermined flow rate. That is, the flow path length L of the throttle flow path 50a is designed to satisfy L=7000·D. This makes it possible to limit the flow rate of the gas output from the throttle flow path 50a to a predetermined flow rate included in a predetermined range from 0.01 [mL / min] to 0.1 [mL / min].

[0072] In designing the flow path length L of the throttle flow path 50e having the largest predetermined flow rate, for example, N=500 is used. That is, the flow path length L of the throttle flow path 50e is designed to satisfy L=500·D. This makes it possible to limit the flow rate of the gas output from the throttle flow path 50e to a predetermined flow rate included in a predetermined range from 100 [mL / min] to 1000 [mL / min].

[0073] As described above, the throttle channel 50 outputs a predetermined flow rate of gas for supplying the gas to the biological sample. Therefore, the flow channel length L of the throttle channel 50 is preferably at least 500 times the flow channel width D. This allows the throttle channel 50 to output a predetermined flow rate of gas suitable for supplying the gas to the biological sample.

[0074] In addition to the above disclosure, the following notes are also disclosed.

[0075] (Appendix 1) A gas supplying device (10) for supplying gas to a biological sample includes an inlet port (122) through which gas from a gas supply source flows in, an outlet port (124) through which the gas flows out, an exhaust port (126) through which the gas is exhausted to the outside of the gas supplying device, a main valve (132) for adjusting the pressure of the gas flowing through a flow path (150) communicating from the inlet port to the outlet port in response to a pilot pressure, a pressure regulating valve (82) having an exhaust valve (134) for exhausting the gas in the flow path from the exhaust port in response to the pilot pressure, a pilot pressure adjusting solenoid valve (84) for adjusting the pilot pressure, and a throttle flow path (50) for limiting the flow rate of the gas flowing out of the outlet port to a predetermined flow rate and outputting the gas at the predetermined flow rate for gas supply. With this configuration, gas remaining in the gas supplying device can be output quickly.

[0076] (Appendix 2) In the gas supply device described in Appendix 1, the throttle channel may be formed in a throttle laminate (180) formed by laminating thin metal plates (212) with a channel width (D) and a channel length (L) according to the predetermined flow rate. With such a configuration, the predetermined flow rate can be easily achieved.

[0077] (Appendix 3) In the gas supplying device described in Appendix 2, the longer the flow path length, the smaller the predetermined flow rate may be. With such a configuration, by appropriately designing the flow path length, it is possible to create a throttled flow path capable of outputting a minute flow rate of gas suitable for supplying gas to a biological sample.

[0078] (Appendix 4) In the gas supplying device described in Appendix 2, the narrower the flow path width, the smaller the predetermined flow rate may be. With such a configuration, by appropriately designing the flow path width, it is possible to create a throttle flow path capable of outputting a minute flow rate of gas suitable for supplying gas to a biological sample.

[0079] (Appendix 5) In the gas supplying device described in Supplementary Note 2, the channel length may be at least 500 times the channel width. According to such a configuration, a predetermined flow rate of gas suitable for supplying gas to a biological sample is output from the throttle channel.

[0080] (Appendix 6) The gas supplying device according to any one of Supplementary Notes 1 to 5 may further include a switching solenoid valve (60) that has a plurality of the throttle channels, the predetermined flow rates of which are different from one another, is connected to the plurality of throttle channels, and outputs the gas from any one of the throttle channels. With this configuration, the gas flow rate can be easily switched to a predetermined flow rate suitable for supplying gas to a biological sample.

[0081] (Appendix 7) In the gas supply device described in Supplementary Note 6, the switching solenoid valve may be provided in plurality, and each of the switching solenoid valves may be connected to each of the throttle channels. With this configuration, it is easy to control the output of gas whose flow rate is limited to a predetermined flow rate.

[0082] (Appendix 8) In the gas supplying device described in Supplementary Note 6, the switching solenoid valve may switch the predetermined flow rate within a throttle range of 0.01 [mL] to 1000 [mL] by outputting the gas from any one of the throttle channels, and output the gas at the switched predetermined flow rate. With this configuration, the flow rate of the gas can be easily switched to a predetermined flow rate suitable for supplying the gas to a biological sample.

[0083] (Appendix 9) The gas supply device according to any one of Supplementary Notes 2 to 5 may further include a switching solenoid valve connected to the throttle passage and outputting the gas from the throttle passage, and the switching solenoid valve and the throttle laminate may be fastened together. With this configuration, the time required to complete exhaust of the gas in the section passage from the throttle passage to the switching solenoid valve can be kept short.

[0084] (Appendix 10) The gas supply device according to any one of Supplementary Notes 1 to 5 may further include a filter (40) disposed in a connection flow path (90) through which the gas flows from the outlet port to the throttle flow path, for removing dust from the gas. This configuration can prevent clogging of the throttle flow path having a narrow flow path width.

[0085] The present invention is not limited to the above disclosure, and various configurations can be adopted without departing from the gist of the present invention. [Explanation of symbols]

[0086] 10...gas supply device 20...control circuit 30: Pressure adjusting section 40: Filter 50: Throttle flow passage 60: Switching solenoid valve 82: Pressure regulating valve 84: Pilot pressure regulating solenoid valve 90...connecting flow path 100...section flow path 110: Output flow passage; 122: Inlet port 124...Outlet port 126...Discharge port 132...Main valve 134...Exhaust valve 142...Diaphragm 150...Flow path 160: Pilot chamber 180: Drawing laminate 190: fixing member 200: flow path block 212…Thin metal plate

Claims

1. A gas supplying device for supplying gas to a biological sample, comprising: a pressure regulating valve having an inlet port through which gas from a gas supply source flows in, an outlet port through which the gas flows out, a discharge port through which the gas is discharged to the outside of the gas supply device, a main valve that adjusts the pressure of the gas flowing through a flow path communicating from the inlet port to the outlet port in response to a pilot pressure, and an exhaust valve that discharges the gas in the flow path from the discharge port in response to the pilot pressure; a pilot pressure adjusting solenoid valve for adjusting the pilot pressure; a throttle flow path that limits a flow rate of the gas flowing out from the outlet port to a predetermined flow rate and outputs the gas at the predetermined flow rate for gas supply; A gas supply device comprising:

2. The gas supply device according to claim 1, The throttle flow passage is formed in a throttle laminate plate in which thin metal plates are laminated, with a flow passage width and a flow passage length according to the predetermined flow rate.

3. The gas supply device according to claim 2, A gas supply device, wherein the longer the flow path length, the smaller the predetermined flow rate.

4. The gas supply device according to claim 2, The narrower the flow path width, the smaller the predetermined flow rate.

5. The gas supply device according to claim 2, A gas supply device, wherein the flow path length is at least 500 times the flow path width.

6. The gas supply device according to any one of claims 1 to 5, The throttle channel is provided in a plurality of locations. the predetermined flow rates of the plurality of throttle channels are different from one another, The gas supply device further comprises a switching electromagnetic valve connected to the plurality of throttle channels and configured to output the gas from any one of the throttle channels.

7. The gas supply device according to claim 6, The switching solenoid valve is provided in plurality, A gas supply device, wherein each of the plurality of switching electromagnetic valves is connected to each of the plurality of throttle passages.

8. The gas supply device according to claim 6, The switching solenoid valve switches the specified flow rate within a throttling range of 0.01 mL to 1000 mL by outputting the gas from any one of the throttling paths, and outputs the gas at the switched specified flow rate.

9. The gas supply device according to any one of claims 2 to 5, A switching solenoid valve is further provided which is connected to the throttle passage and outputs the gas from the throttle passage. The switching solenoid valve and the drawing laminated plate are fastened together in the gas supply device.

10. The gas supply device according to any one of claims 1 to 5, The gas supply device further comprises a filter disposed in a connecting flow path from the outlet port to the throttle flow path through which the gas flows, the filter removing dust from the gas.

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