Baking method for enhancing lithographic performance of metal-containing resist

Abstract

SOLUTION: Various embodiments herein relate to methods, apparatus, and systems for baking metal-containing on a semiconductor substrate in the presence of a reactive gas species. For example, the method may include: receiving the substrate in a process chamber, the substrate having a photoresist layer thereon, where the photoresist layer includes a metal-containing photoresist material; causing a reactive gas species to flow from a gas source, through a gas delivery line, into the process chamber; and exposing the substrate to the reactive gas species in the process chamber; and baking the photoresist layer while the substrate is exposed to the reactive gas species.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] Incorporation by Reference A PCT application is being filed contemporaneously herewith as a part of this application. Each application to which this application claims benefit or priority that is identified in the contemporaneously filed PCT application is hereby incorporated by reference in its entirety for all purposes.

[0002] The present disclosure relates generally to the field of semiconductor processing. In a particular aspect, the present disclosure relates to a process and apparatus for photoresist processing associated with lithographic patterning and film development to form a pattern mask. [Background technology]

[0003] As semiconductor manufacturing advances, feature sizes continue to shrink, requiring new processing methods. One area of ​​advancement relates to patterning, for example, using photoresist materials that are patterned by exposure to radiation.

[0004] The discussion of the background art provided herein is intended to present the contents of the present disclosure generally, and the inventions of the presently listed inventors are not admitted expressly or impliedly as prior art to the present disclosure, to the extent that they are described in this Background section, or in aspects of the description that are not prior art at the time of filing. Summary of the Invention

[0005] Various embodiments herein relate to methods, apparatuses, and systems for baking a photoresist layer on a substrate. In one aspect of the embodiments of the present disclosure, a method of baking a photoresist layer on a substrate is provided, the method comprising: receiving a substrate in a processing chamber, the substrate comprising a photoresist layer thereon, the photoresist layer comprising a metal-containing photoresist material, flowing reactive gas species from a gas source through a gas supply line into the processing chamber, exposing the substrate to the reactive gas species in the processing chamber, and baking the photoresist layer while the substrate is exposed to the reactive gas species.

[0006] In various embodiments, the photoresist layer comprises an extreme ultraviolet (EUV) photoresist material. In some embodiments, the reactive gas species comprises a gas selected from the group consisting of water, hydrogen, oxygen, ozone, hydrogen peroxide, carbon monoxide, carbon dioxide, ammonia, nitrous oxide, nitric oxide, alcohol, acetylacetone, formic acid, oxalyl chloride, pyridine, carboxylic acid, amine, and combinations thereof. In some cases, the reactive gas species may comprise water. In these or other cases, the reactive gas species may comprise hydrogen. In these or other cases, the reactive gas species may comprise oxygen. In these or other cases, the reactive gas species may comprise ozone. In these or other cases, the reactive gas species may comprise hydrogen peroxide. In these or other cases, the reactive gas species may comprise carbon monoxide. In these or other cases, the reactive gas species may comprise carbon dioxide. In these or other cases, the reactive gas species may comprise ammonia. In some such cases, baking the photoresist occurs after the photoresist is exposed to EUV radiation to pattern the photoresist, and any of the following conditions are met: (i) the process chamber is maintained at atmospheric pressure during the photoresist bake and ammonia is provided at a concentration of about 0.001-5% (by volume), and (ii) the process chamber is maintained at sub-atmospheric pressure during the photoresist bake and ammonia is provided at a partial pressure of about 1-100 mTorr. In these and other cases, the reactant gas species may include nitrous oxide and / or nitric oxide. In these and other cases, the reactant gas species may include alcohol. In these and other cases, the reactant gas species may include acetylacetone. In these and other cases, the reactant gas species may include formic acid. In these and other cases, the reactant gas species may include oxalyl chloride. In these and other cases, the reactant gas species may include a carboxylic acid. In these and other cases, the reactant gas species may include an amine. Examples of amines may include methylamine, dimethylamine, trimethylamine, ethylamine, diethylamine, and / or triethylamine in certain cases.In various embodiments, the reactant gas species may be oxidizing. In these and other cases, the reactant gas species may be polar.

[0007] In certain embodiments, exposure of the substrate to reactive gas species may promote crosslinking in the photoresist layer. In these or other embodiments, exposure of the substrate to reactive gas species may promote removal of low molecular weight species in the photoresist layer. For example, the low molecular weight species may include zero, one, or two metal atoms per molecule. In some embodiments, exposure of the substrate to reactive gas species may oxidize metal hydride species in the photoresist layer to metal hydroxide species.

[0008] In certain embodiments, the method may further comprise applying a vacuum to the processing chamber while baking the photoresist layer. In these or other embodiments, the method may further comprise controlling a moisture concentration in the processing chamber to remain within a target moisture concentration range while baking the photoresist layer. Similarly, the method may comprise controlling an oxygen concentration in the processing chamber to remain within a target oxygen concentration range while baking the photoresist layer. In some embodiments, the processing chamber may be maintained at or below atmospheric pressure while baking the photoresist layer. For example, in some cases, the processing chamber may be maintained at less than atmospheric pressure while baking the photoresist layer.

[0009] The support on which the substrate is mounted may be temperature controlled during baking of the photoresist layer. For example, in some embodiments, the method may further comprise increasing the temperature of the substrate support on which the substrate is mounted during baking of the photoresist layer. In these or other embodiments, the method may further comprise decreasing the temperature of the substrate support on which the substrate is mounted during baking of the photoresist layer. In some cases, the method may comprise controlling the flow of reactants to the process chamber to achieve a target degree of crosslinking. A variety of different types of heat may be provided. In some embodiments, baking the photoresist includes heating the substrate on a hotplate. In some embodiments, baking the photoresist includes exposing the substrate to infrared and / or ultraviolet radiation. In some embodiments, baking the photoresist layer may include heating the substrate from above. In these or other embodiments, baking the photoresist layer may include heating the substrate from below.

[0010] The methods described herein may be used for different applications. In some cases, the photoresist layer is applied to a substrate but not yet patterned, and the baking is a post-apply bake (PAB). In other cases, the photoresist layer is applied to a substrate and patterned by partial exposure to EUV radiation resulting in exposed and unexposed portions of the photoresist layer, and the baking is a post-exposure bake (PEB). In these or other embodiments, the reactive gas species may include polar and oxidizing molecules. For example, the reactive gas species may include hydrogen peroxide.

[0011] In another aspect of an embodiment of the present disclosure, an apparatus for baking a photoresist layer on a substrate is provided, the apparatus comprising a process chamber, an inlet for introducing reactive gas species into the process chamber, an outlet for removing material from the process chamber, a substrate support within the process chamber, a heater configured to heat the substrate by conduction, convection, and / or radiation, and a controller having at least one processor configured to control the apparatus to perform a method of the present application or methods described herein.

[0012] These and other aspects are further described below with reference to the drawings. [Brief description of the drawings]

[0013] [Figure 1] 1 is a flow chart illustrating a lithographic patterning process in accordance with various embodiments.

[0014] [Diagram 2] 1 is a simplified diagram of a processing chamber in accordance with certain embodiments. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] Detailed reference is made herein to certain embodiments of the present disclosure. Examples of certain embodiments are illustrated in the accompanying drawings. Although the present disclosure will be described in conjunction with these specific embodiments, it will be understood that there is no intent to limit the present disclosure to such specific embodiments. To the contrary, the present disclosure is intended to include alternatives, modifications, and equivalents that may be included within the spirit and scope of the present disclosure. In the following description, certain specific details are set forth in order to provide a thorough understanding of the present disclosure. The present disclosure may be practiced without some or all of these specific details. In other instances, well-known process operations have not been described in detail so as not to unnecessarily obscure the present disclosure.

[0016] Patterning of thin films in semiconductor processing is often a critical step in semiconductor manufacturing. Patterning involves lithography. In conventional photolithography (such as 193 nm photolithography), a pattern is printed onto a light-sensitive photoresist film by exposing the photoresist to photons in selected areas defined by a photomask, which causes a chemical reaction in the photoresist to form a chemical contrast that can be exploited in a development step to remove certain portions of the photoresist to form the pattern. The patterned and developed photoresist film can then be used as an etch mask to transfer the pattern to an underlying film made of metal, oxide, etc.

[0017] Advanced technology nodes (as defined by the International Technology Roadmap for Semiconductors), including the 22 nm node, 16 nm node, and beyond, require continuing improvements in lithographic resolution. For example, at the 16 nm node, via or line widths in damascene structures are typically around 30 nm or less, which are not possible using simple 193 nm photolithography or would otherwise involve complex multi-patterning methods.

[0018] Extreme ultraviolet (EUV) lithography can expand lithography technology by moving to shorter image source wavelengths than are achievable with traditional photolithography methods. EUV sources with wavelengths of approximately 10-20 nm or 11-14 nm (e.g., 13.5 nm wavelength) can be used in state-of-the-art lithography tools (also called scanners). EUV radiation is strongly absorbed by a wide range of solid and liquid materials, including quartz, water vapor, and atmospheric pressure gases, so EUV scanners operate in a vacuum.

[0019] EUV lithography utilizes EUV resists that can be patterned with EUV light to form masks for use in etching underlying layers. The EUV resists can be polymer-based chemically amplified resists (CAR) applied by liquid spin-on techniques. An alternative to CARs are metal oxide-based EUV photoresist (PR) films that can be directly photopatterned. Such PR films may be formed by (wet) spin-on techniques, such as those available from Inpria, Corvallis, Oregon, such as those described in U.S. Patent Applications US2017 / 0102612 and US2016 / 0116839, which are incorporated by reference herein for at least their disclosure of photopatternable metal oxide-containing films, or the dry-deposited films described in PCT Application No. PCT / US19 / 31618, filed May 9, 2019, entitled METHODS FOR MAKING EUV PATTERNABLE HARD MASKS, which is incorporated by reference herein for at least its disclosure regarding the composition and patterning of directly photopatternable metal oxide films to form EUV resist masks. These directly photopatternable EUV resists may consist of or include high EUV absorbance metals, their organometallic oxides / hydroxides, and other derivatives. Upon EUV exposure, EUV photons and generated secondary electrons are converted into SnO x These can induce chemical reactions such as beta-H elimination reactions in metal oxide-based resists (and other metal oxide-based resists) and provide chemical functionality that promotes crosslinking and other changes in the resist film. These chemical changes can then be exploited in a development step to selectively remove exposed or unexposed areas of the resist film to form an etch mask for pattern transfer.

[0020] The present disclosure relates to lithographic patterning techniques and materials exemplified by EUV lithography, but it should be understood that it is also applicable to other next generation lithographic techniques. In addition to EUV, with the standard 13.5 nm EUV wavelength currently in use and under development, the most relevant radiation source for such lithography is DUV (deep ultraviolet), which generally refers to the use of 248 nm or 193 nm excimer laser sources, X-rays (formally including EUV in the low energy range of X-rays), and electron beams (which may include a wide energy range). The specific methods may depend on the specific materials and applications used in the semiconductor substrate and the final semiconducting device. Thus, the methods described herein are merely examples of methods and materials that may be used in the present technology.

[0021] Photolithography processes typically include one or more bake steps to promote the chemical reactions necessary to create chemical contrast between exposed and unexposed areas of the photoresist. Such bake steps are typically performed on a track-based basis for high volume manufacturing (HVM), where the wafer is baked in ambient or, in some cases, on a hotplate at a predefined temperature under N2 flow. During these bake steps, tighter control of the bake ambient as well as the introduction of additional reactive gas components into the ambient can help further reduce dose requirements and / or improve pattern fidelity.

[0022] This disclosure describes a new baking method that includes thorough control of the baking atmosphere and reactive gas introduction, and in some cases thorough control of the baking temperature ramp rate. Such a method may be particularly effective for metal oxide-based EUV photoresists (PR). Examples of effective reactive gases include water, hydrogen, oxygen, ozone, hydrogen peroxide, carbon monoxide, carbon dioxide, ammonia, nitrous oxide, nitric oxide, methylamine, dimethylamine, alcohols, acetylacetone, formic acid, oxalyl chloride, carboxylic acids, other amines, substitutions of these materials, and the like. The reactive gases may be provided in the gas phase and vaporized prior to delivery to the reaction chamber. Various exemplary gases are further described below.

[0023] Although the present disclosure is not limited to a particular logic or mechanism of operation, it is understood that these reactive gas molecules may accelerate the crosslinking reaction of the metal oxide-based EUV photoresist in the EUV-exposed regions (in this example, the regions remaining for mask formation following development of the pattern film) through oxidation, coordination, or acid-base chemistry, while having limited impact on crosslinking in the non-exposed regions. Alternatively, or in addition, in some cases the reactive gas molecules may facilitate the removal of volatile species from the metal oxide-based EUV photoresist, further enhancing the stability of the resist.

[0024] FIG. 1 shows a flow chart according to various embodiments. In operation 101, a resist is deposited on a substrate. The substrate on which the resist is deposited typically includes an underlying material that will eventually be etched after the resist is patterned / developed. In various embodiments, the substrate on which the resist is deposited may have an exposed layer such as amorphous carbon, spin-on carbon (SoC), spin-on glass (SoG), silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, silicon oxycarbide, etc. In many cases, the exposed layer is an ashable hard mask (AHM). The resist deposited in operation 101 is a metal oxide-based EUV photoresist. The deposition may occur by a wet spin-on technique or a dry vapor-based technique such as chemical vapor deposition (CVD) and / or atomic layer deposition (ALD), which may be operated by thermal energy, plasma energy, or both. Next, in operation 103, the substrate is exposed to heat in a first baking step, often called a post-application bake (PAB). In operation 105, the substrate is exposed to EUV radiation to pattern the resist, forming exposed and unexposed regions of the resist. The substrate is then exposed to heat in a second baking step, often referred to as a post-exposure bake (PEB), in operation 107. The resist is then developed in operation 109 to selectively remove the unexposed regions. In various embodiments herein, the atmosphere to which the substrate is exposed may be controlled during the PAB in operation 103 and / or during the PEB in operation 107. For example, the substrate may be exposed to one or more reactive gases during these steps. Each baking step is described further below. 1. Post-apply bake (PAB)

[0025] A post-apply bake is performed after the resist is deposited on a substrate and before the resist is exposed to EUV radiation for patterning. See operation 103 in FIG. 1. PAB may be performed to remove excess solvent (e.g., if the resist is deposited by a spin-on method), remove other low molecular weight or volatile species, and promote a desired degree of cross-linking in the resist. These features act to enhance the stability of the resist. For example, by removing unbound or only loosely bound low molecular weight or volatile species in the resist, outgassing of metal-containing molecules is reduced to an acceptable amount (e.g., <1E10 molecules / (cm 2 × months). Removal of these materials is advantageous since they can contaminate downstream processes, equipment, and substrates if not removed. Crosslinking achieved during PAB also increases the stability of the resist, but too much crosslinking can result in increased linewidth roughness. Therefore, crosslinking may be controlled to a desired degree during PAB.

[0026] In various embodiments herein, the substrate may be exposed to a reactive gas during the PAB. The reactive gas may facilitate the removal of low molecular weight or volatile species. In various embodiments, the low molecular weight species removed during the PAB may have zero metal atoms, one metal atom, or two metal atoms. In some cases, the low molecular weight species removed may include bimetallic species. Molecules with three or more metal atoms typically have a relatively heavy molecular weight and are relatively less volatile, and may remain substantially in the resist during the PAB. In addition to removing the low molecular weight species, the reactive gas may facilitate a desired degree of crosslinking in the resist. As a result of these features, the use of a reactive gas during the PAB may help stabilize the resist.

[0027] Exemplary processing equipment and reactive gases are provided below. In various embodiments, the substrate may be exposed to one or more of these reactive gases during PAB. In certain examples, the substrate may be exposed to a processing atmosphere having a controlled amount of oxygen and / or moisture (e.g., water vapor) along with an inert gas during PAB. In some embodiments, suitable gas sensors and feedback mechanisms may be used to ensure that the components of the processing atmosphere are controlled within desired ranges.

[0028] In various embodiments, one or more process conditions may be controlled during the PAB as follows: The substrate may be heated to an elevated temperature of about 100-170° C. (e.g., in some cases about 100-130° C.). The pressure may be maintained at about 0.1-760 Torr (e.g., in some cases about 0.1-1 Torr). The substrate may be exposed to the elevated temperature for about 1-10 minutes (e.g., about 2-5 minutes). An inert gas may be flowed into the process chamber at a rate of about 10-10,000 sccm. In certain examples, the oxygen (e.g., O2) concentration in the process chamber may be controlled during the PAB. In these or other embodiments, the moisture (e.g., H2O vapor) concentration may be controlled during the PAB.

[0029] In some embodiments, PAB may be omitted. For example, if the resist is deposited by a dry vapor-based technique rather than a wet spin-on technique, PAB may not be necessary since there is no need to remove excess solvent used to deposit the resist. However, even if the resist is deposited by a dry vapor-based technique, it may be advantageous to perform PAB to promote the desired degree of crosslinking and to remove low molecular weight or non-volatile species that may be of greater concern with dry vapor-based deposition techniques than with wet spin-on techniques. In some embodiments, the PAB may be a conventional PAB; that is, the PAB may occur without exposing the substrate to reactive gas species and / or in an uncontrolled atmosphere. In such embodiments, the substrate may be exposed to reactive gas species during a post-exposure bake, as described further below. 2. Post-exposure bake (PEB)

[0030] A post-exposure bake is performed after the resist is exposed to EUV radiation for patterning and before the resist is developed to remove the unexposed portions thereof, see operation 107 in Figure 1. The PEB may be performed for several purposes, for example, 1) to promote complete evaporation of organic fragments generated during EUV exposure, 2) to oxidize metal hydride species (other products from the beta-H elimination reaction during EUV exposure) to metal hydroxides, and 3) to promote cross-linking between adjacent -OH groups to form a cross-linked metal oxide network.

[0031] The bake temperature is carefully selected to achieve optimal EUV lithography performance. Too low a PEB temperature will result in incomplete removal of organic fragments as well as insufficient crosslinking, resulting in insufficient chemical contrast for development at a given dose. Too high a PEB temperature will also result in adverse effects including severe oxidation and film shrinkage in the unexposed areas (in this example, the areas that are removed by development of the patterned film to form the mask) and undesirable interdiffusion at the interface between the PR and the underlayer (UL) (usually a spin-on carbon material), both of which will result in reduced chemical contrast and increased defect density due to insoluble debris. With bake temperature and bake time as the only knobs, tunability and process window are often quite limited.

[0032] Tight control of the baking atmosphere and introduction of reactive gas species during the PEB process as described herein provides additional chemical knobs to fine-tune the crosslinking process. For example, exposed regions tend to be more polar than unexposed regions due to loss of alkyl groups and formation of hydride / hydroxide moieties, so having polar and oxidizing molecules such as H2O2 present during the bake step can promote oxidation of metal hydrides in exposed regions. Other gases, such as those described in the Reactive Gases section below, may similarly alter the rate of hydride oxidation and hydroxide crosslinking reactions through oxidation, acid-base chemistries, coordinating chemistries, and combinations thereof. Reactive gases may be provided in a controlled atmosphere, for example, using any of the equipment described in the Bake Apparatus section below. Reactive gases may be provided along with non-reactive gases such as N2, Ar, He, Ne, Kr, Xe, etc. In some cases, air or clean dry air may be provided to the atmosphere during PEB.

[0033] The ability to tune the rate of crosslinking reactions in metal oxide-based EUV photoresist materials provides a wider process window that allows further optimization of lithographic performance by minimizing interdiffusion and other related defect formation mechanisms. For example, if the reactive gases can efficiently lower the bake temperature requirements, the interdiffusion concerns at the PR / UL interface can be alleviated, which would be beneficial for defect reduction.

[0034] In certain embodiments, one or more process conditions may be controlled during the PEB as follows: The substrate may be heated to an elevated temperature of about 100-250° C. (e.g., in some cases about 120-200° C.). The pressure may be maintained at about 0.1-760 Torr (e.g., in some cases about 0.1-1 Torr). The substrate may be exposed to the elevated temperature for about 1-10 minutes (e.g., about 2-5 minutes). An inert gas may be flowed into the process chamber at a rate of about 10-10,000 sccm. In certain examples, the oxygen (e.g., O2) concentration in the process chamber may be controlled during the PEB. In these or other embodiments, the moisture (e.g., H2O vapor) concentration may be controlled during the PEB.

[0035] In certain embodiments, the substrate may be exposed to ammonia during the PEB. In some cases, ammonia may be the only reactive gas present in the PEB, and in other cases, one or more additional reactive gases may be provided along with the ammonia. In some embodiments, ammonia may be provided at a concentration of about 0.001-5.0% (by volume), and in some cases, at atmospheric pressure or at a partial pressure of about 1-100 mTorr, or at a partial pressure of about 1-10 mTorr if the processing chamber is under vacuum. The duration of the PEB (and / or the duration of the substrate exposure to ammonia during the PEB) may be about 5 seconds to about 10 minutes, and in some cases about 5 seconds to 1 minute. After the substrate is exposed to ammonia, the processing chamber may be purged with an inert gas. In various embodiments, the inert gas purge period may be as long as the period during which the substrate is exposed to ammonia, or may be longer. These steps may promote the alkali-catalyzed reaction of M-OH condensation / crosslinking to form relatively high molecular weight, less volatile species, resulting in a more stable photoresist film as described above. These steps may harden and densify the film areas exposed to EUV radiation (or other types of lithographic patterning radiation) and may enable these effects at lower bake temperatures than those required to achieve the same film properties. In some embodiments, these same reaction conditions may be used during PAB. In some cases, these same reaction conditions may be used during PAB and / or PEB using alternative or additional reactant gases as described herein, including, but not limited to, other volatile amines such as methylamine, dimethylamine, trimethylamine, ethylamine, diethylamine, triethylamine, pyridine, and the like.

[0036] In some embodiments, the PEB may be a conventional PEB, i.e., the PEB may be performed without providing reactive gases to the substrate and / or in an uncontrolled atmosphere, in which case one or more reactive gases may be provided to the substrate during the PEB. 3.Reactive gas

[0037] In various embodiments herein, the substrate may be exposed to one or more reactive gases during a photoresist baking operation, which may promote a desired degree of crosslinking, promote removal of low molecular weight or volatile species, and / or stabilize the photoresist, as described above.

[0038] A number of different reactant gases may be used. Examples of useful reactant gases are water (H2O), hydrogen (H2), oxygen (O2), ozone (O3), hydrogen peroxide (H2O2), carbon monoxide (CO), carbon dioxide (CO2), ammonia (NH3), nitrous oxide (N2O), nitric oxide (NO), methylamine (CH3NH2), dimethylamine ((CH3)2NH), trimethylamine (N(CH3)3), ethylamine (CH3CH2NH2), diethylamine ((CH3CH2)2NH), triethylamine (N(CH2CH3)3), alcohol (C n H 2n+1 OH (including but not limited to methanol, ethanol, propanol, and butanol), acetylacetone (CH3COCH2COCH3), formic acid (HCOOH), oxalyl chloride ((COCl)2), carboxylic acids (C n H 2n+1 COOH), and other small molecule amines (NR 1 R 2 R 3 (R 1 , R 2 , R 3 each independently selected from hydrogen, hydroxyl, aliphatic, haloaliphatic, haloheteroaliphatic, heteroaliphatic, aromatic, aliphatic-aromatic, heteroaliphatic-aromatic, or combinations thereof). Permutations of these reactive gases may be used. In some cases, the substrate may be exposed to more than one reactive gas during the photoresist bake operation.

[0039] The reactive gas may interact with the photoresist through oxidation, coordination, or acid-base chemistry. If the reactive gas is provided during the PEB operation, the reactive gas may preferentially interact with the photoresist in areas exposed to EUV radiation. This preferential interaction may occur due to chemical changes that occur during EUV exposure (e.g., loss of alkyl groups in the photoresist).

[0040] Following exposure of the substrate to reactive gases during PAB and / or PEB, the chamber in which the substrate is processed may be evacuated and / or purged, for example with an inert gas, In some cases, the inert gas purge period may be at least as long as the period during which the substrate is exposed to the reactive gas. 4. Temperature Gradient

[0041] In some embodiments, the rate at which the substrate temperature changes may be controlled during the baking process. In some cases, rapid heating and cooling may be problematic. By controlling the rate at which the substrate temperature increases and decreases, problems associated with rapid heating and cooling are avoided. Furthermore, the rate at which the baking temperature increases and / or decreases may be controlled to fine-tune the cross-linking reaction in the resist. 5.Baking equipment

[0042] The baking operations described herein may occur in a variety of different types of processing equipment. In some cases, the processing equipment may have a closed chamber that is sealed from the surrounding environment. In other cases, the processing equipment may have an open chamber that is not sealed from the surroundings. In certain cases where an open chamber is used, the substrate may be processed on a track-based basis that can operate continuously or non-continuously. Closed chambers generally provide greater control over the processing atmosphere and provide additional safety against potentially harmful reactive chemicals. However, open chambers may be preferred, for example, in cases where non-hazardous chemicals are used in mass production.

[0043] The chamber may include one or more inlets for providing a desired process atmosphere. The desired process atmosphere may include one or more reactive gases as described above. The inlets may therefore be fluidly connected to a reactive gas source. The reactive gas may flow from the reactive gas source through a gas supply line and into the chamber through the inlet. If the reactive gas is a liquid at an appropriate temperature, it may be stored as a liquid and vaporized before being delivered to the gas supply line / inlet / chamber. Also, in certain embodiments, air and / or inert gases (e.g., N2, Ar, He, Ne, Kr, Xe, etc.) may be provided to the process atmosphere. These may also flow from a gas source through a gas supply line and into the chamber through the inlet. In some cases, the process atmosphere may be free of air.

[0044] The chamber may also include one or more outlets for removing materials from the chamber. The outlets may be fluidly connected to a vacuum source to allow active removal of gaseous species from the chamber. Vacuum-connected outlets may be used in both closed and open chambers. When used in closed chambers, the vacuum-connected outlets may allow processing at sub-atmospheric pressures. When the processing chamber is an open chamber that is not sealed from the environment, the outlets may be a path by which gas can passively escape from the chamber.

[0045] As mentioned above, in certain embodiments, the atmosphere in the chamber may be controlled during the baking process. In some cases, the concentration of reactive gases (e.g., oxygen and / or water and / or other reactive gases described herein) may be actively controlled during the baking process. In addition to the inlets and outlets mentioned above, the chamber may further include sensors (e.g., residual gas analyzers, Fourier transform infrared spectroscopy sensors, etc.) to monitor the composition of its atmosphere. These sensors may be used to provide feedback to actively control the composition of the baking atmosphere.

[0046] To bake the photoresist, the chamber includes one or more heating elements configured to heat the substrate. The heating elements may heat the substrate from above and / or below. The heating elements may heat the front side of the substrate (e.g., where the semiconductor devices / structures are formed) and / or the back side of the substrate. A variety of different types of heating elements may be used alone or in combination with each other. Examples of heating elements may include a heated substrate support (e.g., pedestal, chuck, etc.) and a radiation source such as an infrared lamp and / or an ultraviolet lamp.

[0047] In some embodiments, the chamber may include one or more cooling elements configured to cool the substrate. For example, the substrate support may be configured to cool the substrate. In one embodiment, the substrate support may include cooling channels through which a heat exchange fluid flows to cool the substrate. Other heat exchange devices may be used as needed for a particular application. The cooling elements may be particularly useful in controlling the rate at which the substrate cools after a bake operation.

[0048] The chamber may also include a temperature sensor for monitoring the temperature of the substrate and / or substrate support during the baking operation. In one example, the chamber includes a pyrometer for measuring the temperature of the substrate surface during baking. Temperature measurements from the pyrometer or other temperature sensor may be used as feedback to actively control the substrate temperature during baking.

[0049] FIG. 2 depicts a simplified diagram of a processing chamber 200 according to one embodiment. In this example, the processing chamber 200 is an enclosed chamber with a controllable atmosphere. The substrate 201 may be placed on a substrate support 202, which may also heat and / or cool the substrate. In some cases, alternative or additional heating and cooling elements may be provided. Processing gases enter the processing chamber 200 through an inlet 203. Materials are removed from the processing chamber 200 through an outlet 204, which may be connected to a vacuum source (not shown). The operation of the processing chamber 200 may be controlled by a controller 206, which is further described below. Additionally, a sensor 205 may be provided, for example to monitor the temperature and / or composition of the atmosphere of the processing chamber 200. Values ​​from the sensor 205 may be used by the controller 206 in an active feedback loop.

[0050] The chamber in which baking takes place may be configured in several ways. In some embodiments, the chamber is the same as the chamber used to deposit the photoresist, and / or the same as the chamber used to expose the photoresist to EUV radiation, and / or the same as the chamber used to develop the photoresist. In some embodiments, the chamber is a dedicated bake chamber that is not used for other processes such as deposition, etching, EUV exposure, or photoresist development. The chamber may be a stand-alone chamber or may be integrated with a larger processing tool, such as a deposition tool used to deposit the photoresist, an EUV exposure tool used to expose the photoresist to EUV radiation, and / or a development tool used to develop the photoresist. The chamber used for baking may be combined with one or more of these tools as needed for a particular application.

[0051] The chamber may include a controller. In some embodiments, the controller is part of a system that may be part of the examples above. Such systems may include processing tools, chambers, processing platforms, and / or semiconductor processing equipment with specific processing components (wafer pedestals, gas flow systems, etc.). These systems may be integrated with electronics to control pre-, during, and post-processing operations of the semiconductor wafer or substrate. These electronics may be referred to as "controllers" and may control various components or sub-components of the system. The controller may be programmed to control any process disclosed herein, including supply of process gases, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow settings, fluid supply settings, position operation settings, wafer loading and unloading from tools and other transport tools connected or coupled to a particular system, and / or load locks, depending on the processing requirements and / or type of system.

[0052] In general, a controller may be defined as an electronic device having various integrated circuits, logic, memory, and / or software that receive instructions, issue instructions, control operations, enable cleaning operations, enable endpoint measurements, etc. Integrated circuits may include chips in firmware format that store program instructions, digital signal processors (DSPs), chips defined as application specific integrated circuits (ASICs), and / or one or more microprocessors or microcontrollers that execute program instructions (e.g., software). Program instructions may be instructions communicated to the controller in the form of various personalizations (or program files) that define operational parameters for performing a particular process on or for a semiconductor wafer or for a system. In some embodiments, the operational parameters may be part of a recipe defined by a process engineer to accomplish one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or one or more processing steps during the manufacture of a wafer die.

[0053] In some embodiments, the controller may be part of or coupled to a computer that is integrated or coupled with the system, or otherwise networked or combined with the system. For example, the controller may be in the "cloud" that allows remote access of wafer processing, or may be all or part of a fab host computer system. The computer may allow remote access to the system to monitor the progress of a manufacturing operation, review the history of past manufacturing operations, review trends or performance metrics from multiple manufacturing operations, modify parameters of a current process, set processing steps following a current process, or initiate a new process. In some examples, a remote computer (e.g., a server) may provide a process recipe to the system over a network that may include a local network or the Internet. The remote computer may include a user interface that allows entry or programming of parameters and / or settings that are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data that specifies parameters for each processing step to be performed during one or more operations. It should be understood that the parameters may be specific to the type of process being performed and the type of tool that the controller is configured to couple to or control. Thus, as noted above, the controller may be distributed, for example, by including one or more separate controllers networked together and cooperating toward a common purpose, such as a process or control as described herein. An example of a controller distributed for such purposes would be one or more integrated circuits on the chamber that are located remotely (e.g., at the platform level or as part of a remote computer) and that cooperate to control a process in the chamber.

[0054] Without being limited thereto, example systems may include plasma etch chambers or modules, deposition chambers or modules, spin rinse chambers or modules, metal plating chambers or modules, cleaning chambers or modules, bevel edge etch chambers or modules, physical vapor deposition (PVD) chambers or modules, chemical vapor deposition (CVD) chambers or modules, ALD chambers or modules, atomic layer etch (ALE) chambers or modules, ion implantation chambers or modules, track chambers or modules, and other semiconductor processing systems that may be related to or used in the fabrication and / or manufacturing of semiconductor wafers.

[0055] As described above, depending on the processing steps being performed by the tool, the controller may be in communication with one or more of other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, nearby tools, tools installed throughout the factory, a main computer, another controller, or tools used to transport materials to and from tool locations and / or load ports in a semiconductor manufacturing factory. conclusion

[0056] A baking method is disclosed that improves the EUV lithography performance of metal-containing EUV resists.

[0057] It is understood that the examples and embodiments described herein are for illustrative purposes, and various modifications or changes in view thereof will be suggested to those skilled in the art. Various details have been omitted for clarity, but various conceptual changes may be implemented. Thus, the examples should be considered as illustrative rather than restrictive, and the disclosure should not be limited to the details described herein, but may be modified within the scope of the disclosure.

Claims

1. 1. A method of baking a photoresist layer on a substrate, comprising the steps of: receiving the substrate in a processing chamber, the substrate having the photoresist layer thereon, the photoresist layer comprising a metal-containing photoresist material; flowing reactive gas species from a gas source through a gas supply line into the processing chamber and exposing the substrate to the reactive gas species within the processing chamber; baking the photoresist layer while the substrate is exposed to the reactive gas species; A method comprising:

2. 2. The method of claim 1 , The method, wherein the photoresist layer comprises an extreme ultraviolet (EUV) photoresist material.

3. 3. The method of claim 2, The method of claim 1, wherein the reactive gas species comprises a gas selected from the group consisting of water, hydrogen, oxygen, ozone, hydrogen peroxide, carbon monoxide, carbon dioxide, ammonia, nitrous oxide, nitric oxide, alcohol, acetylacetone, formic acid, oxalyl chloride, pyridine, carboxylic acids, amines, and combinations thereof.

4. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises the water.

5. 4. The method of claim 3, The method according to claim 1, wherein the reactive gas species comprises hydrogen.

6. 4. The method of claim 3, The method according to claim 1, wherein the reactive gas species comprises oxygen.

7. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises the ozone.

8. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises the hydrogen peroxide.

9. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises carbon monoxide.

10. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises carbon dioxide.

11. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises ammonia.

12. 12. The method of claim 11, Baking the photoresist occurs after the photoresist is exposed to EUV radiation to pattern the photoresist, and any of the following conditions are met: (i) the process chamber is maintained at atmospheric pressure during baking of the photoresist, and the ammonia is provided at a concentration of about 0.001 to 5% (by volume); and (ii) the process chamber is maintained at sub-atmospheric pressure during baking of the photoresist, and the ammonia is provided at a partial pressure of about 1-100 mTorr.

13. 4. The method of claim 3, The method, wherein the reactive gas species comprises the nitrous oxide and / or the nitric oxide.

14. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises the alcohol.

15. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises the acetylacetone.

16. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises the formic acid.

17. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises the oxalyl chloride.

18. 4. The method of claim 3, The method according to claim 1, wherein the reactive gas species comprises the carboxylic acid.

19. 4. The method of claim 3, The method of claim 1, wherein the reactive gas species comprises the amine.

20. 20. The method of claim 19, The method of claim 1, wherein the amine comprises methylamine, dimethylamine, and / or trimethylamine.

21. 20. The method of claim 19, The method of claim 1, wherein the amine comprises ethylamine, diethylamine, and / or triethylamine.

22. A method according to any one of claims 2 to 21, comprising The method according to claim 1, wherein the reactive gas species is oxidizing.

23. A method according to any one of claims 2 to 22, comprising The method according to claim 1, wherein the reactive gas species is polar.

24. A method according to any one of claims 2 to 23, comprising The method, wherein exposing the substrate to the reactive gas species promotes crosslinking in the photoresist layer.

25. A method according to any one of claims 2 to 24, comprising the steps of: The method, wherein exposing the substrate to the reactive gas species increases the stability of the photoresist layer.

26. A method according to any one of claims 2 to 25, comprising the steps of: The method, wherein exposing the substrate to the reactive gas species promotes removal of low molecular weight species within the photoresist layer.

27. 27. The method of claim 26, The method, wherein the low molecular weight species comprises zero, one, or two metal atoms per molecule.

28. A method according to any one of claims 2 to 27, comprising the steps of: The method, wherein exposing the substrate to the reactive gas species oxidizes metal hydride species in the photoresist layer to metal hydroxide species.

29. The method according to any one of claims 2 to 28, further comprising: applying a vacuum to the processing chamber while baking the photoresist layer.

30. The method according to any one of claims 2 to 29, further comprising: controlling a moisture concentration in the processing chamber to remain within a target moisture concentration range while baking the photoresist layer.

31. The method according to any one of claims 2 to 30, further comprising: controlling an oxygen concentration in the processing chamber to remain within a target oxygen concentration range while baking the photoresist layer.

32. A method according to any one of claims 2 to 31, comprising The method wherein the processing chamber is maintained at sub-atmospheric pressure while baking the photoresist layer.

33. 33. The method of claim 32, The method wherein the processing chamber is maintained at sub-atmospheric pressure while baking the photoresist layer.

34. The method according to any one of claims 2 to 33, further comprising: The method includes increasing the temperature of a substrate support on which the substrate is mounted while baking the photoresist layer.

35. The method according to any one of claims 2 to 34, further comprising: The method includes reducing a temperature of a substrate support on which the substrate is mounted while baking the photoresist layer.

36. The method according to any one of claims 2 to 35, further comprising: controlling a flow of said reactive species into said processing chamber to achieve a target degree of crosslinking.

37. A method according to any one of claims 2 to 36, comprising the steps of: The method, wherein baking the photoresist layer comprises heating the substrate on a hotplate.

38. A method according to any one of claims 2 to 37, comprising the steps of: The method, wherein baking the photoresist layer comprises exposing the substrate to infrared and / or ultraviolet radiation.

39. A method according to any one of claims 2 to 38, comprising the steps of: The method, wherein baking the photoresist layer comprises heating the substrate from above.

40. A method according to any one of claims 2 to 39, comprising the steps of: The method, wherein baking the photoresist layer comprises heating the substrate from below.

41. A method according to any one of claims 2 to 40, comprising The method, wherein the photoresist layer is applied to the substrate but not yet patterned, and the baking is a post-apply bake (PAB).

42. A method according to any one of claims 2 to 41, comprising The method, wherein the photoresist layer is applied to the substrate and patterned by partial exposure to EUV radiation resulting in exposed and unexposed portions of the photoresist layer, and the baking is a post-exposure bake (PEB).

43. 43. The method of claim 42, comprising: The method wherein the reactive gas species include polar and oxidizing molecules.

44. 44. The method of claim 43, The method of claim 1, wherein the reactive gas species comprises hydrogen peroxide.

45. 1. An apparatus for baking a photoresist layer on a substrate, comprising: a processing chamber; an inlet for introducing reactive gas species into the processing chamber; an outlet for removing material from the processing chamber; a substrate support within the processing chamber; a heater configured to heat the substrate by conduction, convection, and / or radiation; a controller having at least one processor, said at least one processor being configured to control said device to perform any of the methods of claims 1 to 44; An apparatus comprising:

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