Position setting method for transfer arm

Abstract

To reduce man-hours for a transfer adjustment.SOLUTION: A position setting method for a transfer arm includes a movement step, a measurement step, a detection step and a setting step. The transfer arm comprises an adsorption section 463 which sucks and holds a frame F. In the movement step, the transfer arm is moved in a Y axis direction across an upper side of a frame region which is defined by an outer edge OE and an inner edge IE of the frame F. In the measurement step, a negative pressure of the adsorption section 463 is measured by generating a suction force in the adsorption section 463 after the movement step. In the detection step, a first detection position and a second detection position are detected based on a measurement result of the negative pressure which is measured by repeating the movement step and the measurement step. The first detection position and the second detection position identify a boundary between a position where the adsorption section 463 protrudes from the upper side of the frame region and a position where the adsorption section does not protrude therefrom at the side of the outer edge OE and the side of the inner edge IE. In the setting step, a position between the first detection position and the second detection position is set as a carry-out position.SELECTED DRAWING: Figure 8

Description

[Technical field]

[0001] The present invention relates to a method for setting the position of a transfer arm. [Background technology]

[0002] As one method for transporting a workpiece within a processing apparatus, a method is known in which an annular frame that holds the workpiece via a tape is sucked and held by a transport arm having a suction pad and transported.

[0003] The technology related to this transport method is described, for example, in Patent Document 1. In the technology described in Patent Document 1, the distance between a pair of guides, which are the holding mechanism, and the installation position of the suction part of the transport arm are adjusted according to the size of the annular frame. This makes it possible to accommodate annular frames of various sizes. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2023-027920 A Summary of the Invention [Problem to be solved by the invention]

[0005] In the above-described transfer method, in addition to adjustment according to the size of the annular frame, an unloading position is also adjusted. The unloading position refers to the position where the transfer arm is positioned when unloading the annular frame held by the holding mechanism.

[0006] Conventionally, the operator adjusts the carry-out position by visually checking the position where the suction pad contacts the annular frame while moving the transfer arm. Therefore, the proposal of a new technology that can reduce the burden on operators in the adjustment work is anticipated.

[0007] The present invention has been made in consideration of the above-mentioned points, and has an object to reduce the number of steps for transport adjustment. [Means for solving the problem]

[0008] A method according to one aspect of the present invention is a position setting method for a transport arm that carries out an annular frame used in a frame unit that holds a workpiece from a holding mechanism, the transport arm having an adsorption portion that adsorbs and holds the annular frame, the method including a moving step of moving the transport arm in a first direction that crosses a frame area defined by an outer edge and an inner edge of the annular frame, a measuring step of generating a suction force on the adsorption portion that contacts the annular frame held by the holding mechanism after the moving step to measure the negative pressure of the adsorption portion, and repeating the moving step and the measuring step to measure the negative pressure of the adsorption portion measured in the measuring step. The method includes a detection step of detecting a first detection position that specifies the outer boundary between the position of the transport arm where the suction portion protrudes from the frame area and the position of the transport arm where the suction portion does not protrude based on the measurement result of the negative pressure detected, and a second detection position that specifies the inner boundary between the position of the transport arm where the suction portion protrudes from the frame area and the position of the transport arm where the suction portion does not protrude, and a setting step of setting a position between the first detection position and the second detection position detected in the detection step as a carry-out position at which the transport arm is positioned when the transport arm carries out the annular frame held by the holding mechanism. Effect of the Invention

[0009] According to the present invention, the number of steps for transport adjustment can be reduced. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view of a processing apparatus according to an embodiment. [Diagram 2] 2 is a perspective view showing a configuration example of a transfer arm included in the processing apparatus shown in FIG. 1. [Diagram 3] 3 is a diagram showing a configuration example of a clamping mechanism of the transport arm shown in FIG. 2. [Figure 4] 3 is a perspective view showing a configuration example of a suction and holding mechanism of the transport arm shown in FIG. 2. [Diagram 5]4 is a diagram for explaining an example of setting the carry-out position of the transport arm shown in FIG. 2 when the clamping mechanism shown in FIG. 3 is used. [Figure 6] 4 is a diagram for explaining an example of setting the carry-out position of the transport arm shown in FIG. 2 when the clamping mechanism shown in FIG. 3 is used. [Figure 7] 4 is a diagram for explaining an example of setting the carry-out position of the transport arm shown in FIG. 2 when the clamping mechanism shown in FIG. 3 is used. [Figure 8] 5 is a diagram for explaining an example of movement of the transfer arm shown in FIG. 2 when the suction and holding mechanism shown in FIG. 4 is used. [Figure 9] FIG. 13 is a diagram showing an example of a measurement result. [Figure 10] 5 is a diagram for explaining an example of setting the carry-out position of the transfer arm shown in FIG. 2 when the suction and holding mechanism shown in FIG. 4 is used. [Figure 11] 5 is a diagram for explaining an example of setting the carry-out position of the transfer arm shown in FIG. 2 when the suction and holding mechanism shown in FIG. 4 is used. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] FIG. 1 is a perspective view of a processing apparatus 1 according to an embodiment. FIG. 2 is a perspective view showing a configuration example of a transfer arm 40 included in the processing apparatus 1. FIG. 3 is a perspective view showing a configuration example of a clamping mechanism 401 of the transfer arm 40. FIG. 4 is a perspective view showing a configuration example of a suction holding mechanism 402 of the transfer arm 40. The configuration of the processing apparatus 1 will be described below with reference to FIG. 1 to FIG. 4. Note that the X-axis direction, Y-axis direction, and Z-axis direction shown in the drawings are perpendicular to each other. The X-axis direction and Y-axis direction are approximately horizontal directions, and the Z-axis direction is an up-down direction (approximately vertical direction).

[0012] In the processing apparatus 1 shown in Fig. 1, the workpiece, a wafer W, is handled in the state of a frame unit FU. As shown in Fig. 1, the frame unit FU is configured by attaching the wafer W to a tape T that covers the opening of an annular frame F, thereby integrating the frame F and the wafer W.

[0013] The processing device 1 may be equipped with at least one of a transport arm (transport arm 40, transport arm 100 described later) that suction-holds the annular frame F and a transport arm (transport arm 40 described later) that clamps and holds the annular frame F, and is preferably equipped with both. Although the processing device 1 will be described as a cutting processing device that performs cutting processing on the wafer W, the processing device 1 is not limited to a processing device that performs cutting processing, and may be any processing device that performs laser processing, grinding, polishing, etc., for example. The processing device 1 may be a dedicated processing device that performs only specific processing, and may be incorporated into a fully automatic type processing device that performs a series of processing such as grinding, polishing, cutting, laser processing, and cleaning in a fully automatic manner. Moreover, the processing device 1 is not limited to a processing device that processes a workpiece (in this example, a wafer W), and may be, for example, a tape mounter.

[0014] The wafer W processed by the processing device 1 is not particularly limited. The wafer W is, for example, a semiconductor wafer of silicon, gallium arsenide, or the like, and is formed in a substantially plate shape. The wafer W is not limited to a semiconductor wafer, and may be a ceramic, glass, or sapphire-based optical device wafer.

[0015] 1, the processing apparatus 1 includes an apparatus body 2 and gate-shaped support tables 3 and 4. A rectangular opening extending in the X-axis direction is formed on the upper surface of the apparatus body 2, and the support tables 3 and 4 are provided on the upper surface of the apparatus body 2 so as to straddle the opening. The opening formed in the apparatus body 2 is covered by a bellows-shaped cover 5 that is movable together with a chuck table 60, which will be described later. Furthermore, below the cover 5 of the apparatus body 2, there are provided an X-axis direction moving mechanism (not shown) that moves the chuck table 60 in the X-axis direction, and a table rotation mechanism (not shown) that rotates the chuck table 60 around the Z-axis direction.

[0016] As shown in FIG. 1, the processing apparatus 1 further includes a cassette stage 20, a transport mechanism 30 having a transport arm 40, a pair of guide rails 50, a chuck table 60, a pair of cutting units 70, a pair of moving mechanisms 80, a transport mechanism 90 having a transport arm 100, a cleaning unit 130, and a control unit 150.

[0017] A cassette 10 containing a frame unit FU is placed on the cassette stage 20. The cassette 10 placed on the cassette stage 20 is an example of a holding mechanism that holds a frame F. The cassette 10 has a plurality of storage sections in the Z-axis direction for storing the frame units FU. The cassette 10 has an opening for carrying the frame units FU in and out of the storage sections, and is placed on the cassette stage 20 with the opening facing the frame clamping section 42 provided on the transport arm 40, that is, facing in the +Y-axis direction.

[0018] The cassette stage 20 is configured to be capable of ascending and descending in the Z-axis direction by an elevation mechanism provided inside the apparatus main body 2. The cassette stage 20 ascends and descends to move the cassette 10 relatively to the frame clamping section 42, thereby enabling the frame unit FU to be loaded and unloaded from any of the storage sections of the cassette 10.

[0019] The transport mechanism 30 transports the frame unit FU between the cassette 10 and the apparatus main body 2, more specifically, between the cassette 10 and a pair of guide rails 50. Furthermore, the transport mechanism 30 also transports the frame unit FU from the pair of guide rails 50 to the chuck table 60. The transport mechanism 30 is supported by a support base 3. The transport mechanism 30 includes a transport arm 40, an elevation drive unit 31 that moves the transport arm 40 in the Z-axis direction (vertical direction), and a horizontal drive unit 32 that moves the transport arm 40 in the Y-axis direction (horizontal direction).

[0020] As shown in FIG. 2, the transport arm 40 has a disk-shaped support member 400 fixed to the lower end of the lift drive unit 31, and further has a clamping mechanism 401 and a suction holding mechanism 402 supported by the support member 400.

[0021] The clamping mechanism 401 is a mechanism that clamps the frame F of the frame unit FU, and is used for loading and unloading the frame unit FU between the cassette 10 and the pair of guide rails 50. On the other hand, the suction holding mechanism 402 is a mechanism that suction-holds the frame F of the frame unit FU, and is used for unloading the frame unit FU from the pair of guide rails 50 to the chuck table 60.

[0022] The clamping mechanism 401 includes a frame clamping section 42 that clamps the frame F, and an arm section 41 that supports the frame clamping section 42. With the frame clamping section 42 clamping the frame unit FU, the horizontal drive section 32 and the elevation drive section 31 move the transport arm 40, causing the frame unit FU to move between the cassette 10 and the pair of guide rails 50, and the transport mechanism 30 loads and unloads the frame unit FU.

[0023] More specifically, as shown in FIG. 3, the clamping mechanism 401 includes a first moving section 43 and sensors (sensors 44 and 45) in addition to the arm section 41 and frame clamping section 42 described above.

[0024] The frame clamping unit 42 includes a pressing plate 421 and a support plate 422 aligned in the Z-axis direction (first direction) which is the thickness direction of the frame F held by the guide rail 50. The pressing plate 421 is fixed to a predetermined position of the arm unit 41. In contrast, the support plate 422 is provided so as to be freely movable relative to the pressing plate 421 by a first moving unit 43.

[0025] The first moving unit 43 includes a cylinder 431 and a piston 432 provided in the cylinder 431. The first moving unit 43 transmits the linear motion of the piston 432 provided in the cylinder 431 to the support plate 422, thereby moving the support plate 422 in the Y-axis direction relative to the pressing plate 421. The first moving unit 43 moves the support plate 422 sufficiently close to the pressing plate 421, so that the frame clamping unit 42 can clamp the frame F between the pressing plate 421 and the support plate 422.

[0026] The sensors 44 and 45 are sensors that detect the positional relationship in the Y-axis direction between the pressing plate 421 and the support plate 422. The sensors 44 and 45 are, for example, magnetic sensors. A magnet is embedded in the piston 432 in advance, and the sensors 44 and 45 detect the piston 432 by being disposed in close proximity to the piston 432, thereby detecting the positional relationship between the pressing plate 421 and the support plate 422.

[0027] More specifically, the sensors 44 and 45 are arranged in advance so that when the pressing plate 421 and the support plate 422 are in contact with each other as shown in Fig. 3(a), both the sensors 44 and 45 detect the piston 432, and when the pressing plate 421 and the support plate 422 are spaced apart by approximately the thickness of the frame F as shown in Fig. 3(b), only the sensor 45 detects the piston 432. This allows the control unit 150 to determine whether or not the frame F has been clamped based on the outputs of the sensors 44 and 45 when attempting to clamp the frame F described below.

[0028] 4, the suction holding mechanism 402 includes a first arm portion 461 extending in the X-axis direction, a pair of second arm portions 462 extending in the Y-axis direction connected to the first arm portion 461, and a total of four suction portions 463 provided on both ends of the pair of second arm portions 462. With the suction portions 463 holding the frame unit FU by suction, the horizontal drive portion 32 and the elevation drive portion 31 move the transport arm 40, whereby the frame unit FU moves from the pair of guide rails 50 to the chuck table 60, and the transport mechanism 30 carries out the frame unit FU.

[0029] A plurality of fitted portions 464 are formed on the first arm portion 461. A plunger (not shown) is provided on the bottom surface of the second arm portion 462, and the plunger is fitted into the fitted portion 464, thereby fixing the second arm portion 462 to the first arm portion 461. By changing the fitted portion 464 with which the plunger fits, the position of the second arm portion 462 can be changed in the X-axis direction as indicated by arrow 465, and thus the interval between the second arm portions 462 can be adjusted to an interval according to the size of the frame F.

[0030] Each of the four suction parts 463 is, for example, a suction pad made of an elastic member. The four suction parts 463 communicate with the suction source 470 via a suction path. A pressure gauge 480 is connected to the suction path between the four suction parts 463 and the suction source 470. The pressure gauge 480 measures the negative pressure (hereinafter, simply referred to as the negative pressure of the suction part 463) generated in the suction part 463 during the suction operation of the suction source 470.

[0031] The suction portion 463 is not limited to a suction pad. The suction portion 463 may be any portion that comes into contact with the annular frame F and holds it by suction, and may be a through hole formed in the second arm portion 462 and connected to the suction path.

[0032] The pair of guide rails 50 is an example of a holding mechanism that holds the frame F, and is provided along the Y-axis direction. Each of the pair of guide rails 50 has an L-shaped cross section in the XZ cross section, and is configured to be movable in the X-axis direction by a spacing adjustment mechanism (not shown). When the frame unit FU is carried from the cassette 10 to the pair of guide rails 50, the spacing between the guide rails 50 is adjusted to a slightly wider spacing, approximately equal to the spacing between the pair of cutout portions FN of the frame F. As a result, the frame unit FU carried onto the pair of guide rails 50 is supported by the pair of guide rails 50.

[0033] In addition, after the frame unit FU is carried into a pair of guide rails 50 that has been adjusted to a distance that is somewhat wider than the distance between the cutout portions FN of the frame F and that can support the frame F, the distance between the pair of guide rails 50 may be narrowed until the frame unit FU is sandwiched between the guide rails 50, and the processing device 1 may recognize the distance between the pair of cutout portions FN. The recognized distance may be used to adjust the transport arm 40 according to the size of the frame F.

[0034] Moreover, when the transport mechanism 30 places the frame unit FU on the chuck table 60, the interval between the pair of guide rails 50 is made sufficiently wider than the interval between the pair of cutout portions FN. Moreover, when the transport mechanism 90 places the frame unit FU on the cleaning unit 130, the interval between the pair of guide rails 50 is also made sufficiently wider than the interval between the pair of cutout portions FN. This makes it possible to move the frame unit FU to the chuck table 60 or the cleaning unit 130 by passing between the pair of guide rails 50.

[0035] The chuck table 60 is a table that holds the frame unit FU, and is an example of a holding mechanism that holds the frame F. As shown in Fig. 1, the chuck table 60 has a holding surface 61 that suction-holds the wafer W, and a clamp portion 62 that holds the frame F. The chuck table 60 moves, by an X-axis direction moving mechanism (not shown), between a carry-in / out position where the frame unit FU is carried in and out by the transport mechanism 90 and a cutting position where cutting processing is performed by the cutting unit 70. In addition, the chuck table 60 rotates around the Z axis by a rotation mechanism (not shown) to change the orientation of the held frame unit FU.

[0036] The pair of cutting units 70 are devices that cut the wafer W of the frame unit FU held on the chuck table 60, and each includes a blade fixed to a spindle with a rotation axis oriented in the Y-axis direction. The pair of moving mechanisms 80 are supported by the support base 4 and move the pair of cutting units 70 in the Z-axis direction and the Y-axis direction. The cutting units 70 are moved in the Z-axis direction and the Y-axis direction by the moving mechanisms 80, thereby cutting any position of the wafer W along the X-axis direction.

[0037] The transfer mechanism 90 transfers the frame unit FU into and out of the cleaning unit 130. The transfer mechanism 90 is supported by a support stand 3. The transfer mechanism 90 includes a transfer arm 100, an elevation drive unit 91 that moves the transfer arm 100 in the Z-axis direction (vertical direction), and a horizontal drive unit 92 that moves the transfer arm 100 in the Y-axis direction (horizontal direction).

[0038] The transport arm 100 holds by suction the frame F of the frame unit FU held on the chuck table 60, and carries it into the cleaning unit 130. Also, the transport arm 100 holds by suction the frame F of the frame unit FU held in the cleaning unit 130, and carries it into the guide rail 50.

[0039] The configuration of the transfer arm 100 is similar to that of the suction holding mechanism 402 of the transfer arm 40 shown in Fig. 4. That is, the transfer arm 100 includes a first arm portion extending in the X-axis direction, a pair of second arm portions connected to the first arm portion and extending in the Y-axis direction, and a total of four suction portions provided on both ends of the pair of second arm portions.

[0040] The cleaning unit 130 cleans and dries the wafer W cut by the cutting unit 70. The cleaning unit 130 cleans the wafer W on the frame unit FU placed on the spinner table 131 with cleaning water, and further dries the wafer W with blown air.

[0041] The control unit 150 comprehensively controls the processing device 1. The control unit 150 includes a processor that executes various processes, and a storage unit (memory) that stores various parameters, programs, etc. The storage unit of the control unit 150 stores, as part of the control program, for example, a program for controlling the operation of setting the unloading positions of the transfer arm 40 and the transfer arm 100.

[0042] In the processing apparatus 1 configured as above, the flow from the loading of the frame unit FU from the cassette 10 to the apparatus main body 2 to the unloading of the frame unit FU from the apparatus main body 2 to the cassette 10 is as follows.

[0043] The transport mechanism 30 pulls out the frame unit FU from the cassette 10 placed on the cassette stage 20, carries it into the apparatus body 2, and places it on the pair of guide rails 50. The distance between the guide rails 50 is adjusted in advance so that it approximately matches the distance between the cutout portions FN and is equal to or greater than the distance between the cutout portions FN. In this way, the pair of guide rails 50 function as a temporary storage area for the frame unit FU.

[0044] Next, the transport mechanism 30 holds and lifts the frame unit FU placed on the guide rails 50, and a gap adjustment mechanism (not shown) widens the gap between the guide rails 50 to ensure a gap for the frame unit FU to pass through. Once the gap is secured, the transport mechanism 30 lowers the frame unit FU, and places it on the chuck table 60 through the guide rails 50.

[0045] The chuck table 60 holds the frame unit FU carried in by the transport mechanism 30, and then moves in the -X axis direction from the carry-in / out position to the cutting position. Thereafter, the cutting unit 70 performs cutting processing on the wafer W of the frame unit FU held on the chuck table 60. The cutting processing is performed while the movement mechanism 80 adjusts the position of the cutting unit 70 relative to the wafer W.

[0046] When the cutting process is completed, the chuck table 60 moves in the +X axis direction from the cutting position to the carry-in / out position. When the chuck table 60 returns to the carry-in / out position, the transport mechanism 90 carries the frame unit FU out from the chuck table 60 to the cleaning unit 130. Thereafter, the cleaning unit 130 cleans and dries the frame unit FU.

[0047] When the cleaning and drying are completed, the transport mechanism 90 places the frame unit FU on the pair of guide rails 50 with the adjusted gap between them. Note that the gap between the guide rails 50 is the same as when the transport mechanism 30 places the frame unit FU on the guide rails 50.

[0048] Finally, the transport mechanism 30 pushes out the frame unit FU arranged on the guide rails 50 and carries it out to the cassette 10. As a result, the frame unit FU having the cut wafer W is accommodated in the accommodation portion of the cassette 10.

[0049] Incidentally, when the frame unit FU is transported while the frame F is clamped by the transport mechanism 30 equipped with the transport arm 40, the frame F is held in a cantilevered state by the frame clamping portion 42. For this reason, if the frame clamping portion 42 thinly clamps the frame F at a position that is not sufficiently close to the frame F, the frame F becomes unstable during transport, which is undesirable. On the other hand, if the frame clamping portion 42 is brought too close to the frame F, the transport arm 40 collides with the frame F before the frame clamping portion 42 clamps the frame F. In particular, when the frame F is unloaded from the cassette 10, the frame F is pushed to the innermost part of the cassette 10, which causes a strong impact on each of the cassette 10, the transport arm 40, and the frame F. Such an operation is undesirable because it may cause deformation or failure of the cassette 10, the transport arm 40, and the frame F. Therefore, in order to reliably and stably unload the frame F, it is necessary to place the transport arm 40 at an appropriate position with respect to the annular frame F and firmly clamp the frame F with the frame clamping portion 42.

[0050] On the other hand, the position in the Y-axis direction of the frame F held by a holding mechanism such as the cassette 10 is not necessarily constant. For example, the position in the Y-axis direction of the frame F housed in the cassette 10 may change due to replacement of the cassette 10, etc. For this reason, in the past, when installing the apparatus or changing settings (for example, when replacing the cassette 10), a transport adjustment was generally performed in which an operator visually checks the position of the transport arm 40 where the frame F is securely clamped by the frame clamping portion 42 and sets this as the unloading position.

[0051] Similarly, when the frame unit FU is transported while the frame F is held by suction using the transport mechanism 30 including the transport arm 40, if the suction part 463 is positioned at a position protruding from the frame F of the frame unit FU, the hole connected to the suction source 470 formed in the suction part 463 is not completely blocked by the frame F. In this case, even if the suction source 470 performs a suction operation, gas leaks (leaks) from the gap between the suction part 463 and the frame F, so that a sufficient negative pressure is not generated in the suction part 463, and the frame F cannot be held by suction. This situation may also occur in the transport arm 100 having a configuration similar to that of the suction holding mechanism 402 of the transport arm 40. Therefore, in order to hold the frame F by suction and transport it out, it is necessary to accurately position the suction part on the annular frame F and generate a sufficient negative pressure in the suction part.

[0052] On the other hand, the position in the Y-axis direction of the frame F placed on a holding mechanism such as the guide rail 50 may vary depending on the settings of the device, individual differences between parts, etc. For this reason, in the past, when installing the device or changing the settings (for example, when replacing the suction unit, or when replacing the transport arm 40 or the transport arm 100), a transport adjustment was generally performed in which an operator visually checks the position of the transport arm (transport arm 40, transport arm 100) where the suction unit is placed on the frame F and sets it as the carry-out position.

[0053] While the conventional processing apparatus performs the above-mentioned transport adjustment, the processing apparatus 1 according to the present embodiment sets the unloading position without requiring additional work or judgment by the operator, thereby reducing the number of steps required for transport adjustment.

[0054] Below, we will specifically explain how to set the ejection position of the transport arm when the transport arm clamps the frame F and transports it out of the holding mechanism, and how to set the ejection position of the transport arm when the transport arm suction-holds the frame F and transports it out of the holding mechanism.

[0055] First, the process of setting the carry-out position performed by the processing device 1 (control unit 150) will be described with reference to Fig. 5 to Fig. 7. Fig. 5 to Fig. 7 are diagrams for explaining an example of setting the carry-out position of the transport arm 40 when using the clamping mechanism 401. In the setting of the carry-out position described with reference to Fig. 5 to Fig. 7, a total of four steps are performed: an approach step, a clamping trial step, a determination step, and a setting step, which will be described later.

[0056] 5 to 7, there is an example of a method for setting an unloading position (also referred to as a method for setting the position of the transport arm 40), in which an unloading position is set when unloading the frame F from the cassette 10, but the holding mechanism that holds the frame F is not limited to the cassette 10. The position setting method described below may also be applied to a case in which the transport arm 40 unloads the frame F while clamping it from another holding mechanism. For example, it may also be applied to a case in which the frame F is unloaded from the guide rail 50, which is a holding mechanism, to the cassette 10.

[0057] First, the control unit 150 moves the transport arm 40 including the clamping mechanism 401 to an initial position. More specifically, the control unit 150 causes the first moving unit 43 to place the pressing plate 421 and the support plate 422 in a state of being sufficiently separated from each other, and then moves the transport arm 40 to the initial position by the lifting drive unit 31 and the horizontal drive unit 32. The initial position is, for example, as shown in FIG. 5(a), a height (position in the Z-axis direction) suitable for clamping the frame F between the pressing plate 421 and the support plate 422, and a position (position in the Y-axis direction) where the frame clamping unit 42 is not expected to collide with the frame F.

[0058] Next, the control unit 150 brings the support plate 422 closer to the pressing plate 421, and confirms that the frame F is not clamped by the frame clamping portion 42 at the initial position, as shown in Fig. 5(b), based on the outputs of the sensors 44 and 45. That is, the control unit 150 confirms that the frame F held in the cassette 10 is located between the pressing plate 421 and the support plate 422 in the Z-axis direction (first direction), and is not located between the pressing plate 421 and the support plate 422 in the Y-axis direction (second direction perpendicular to the first direction).

[0059] Thereafter, the control unit 150 repeats the approach step, the clamping attempt step, and the determination step in this order.

[0060] 5(c), in a state in which the pressing plate 421 and the support plate 422 are sufficiently separated from each other, the control unit 150 uses the horizontal drive unit 32 (second movement unit) to move the transport arm 40 closer to the frame F. The movement distance Δd1 of the transport arm 40 in the Y-axis direction in the approaching step is preset to a distance shorter than the length of the frame clamping unit 42 in the Y-axis direction in order to avoid a collision between the transport arm 40 and the frame F.

[0061] In the clamping trial step after the approaching step, as shown in Fig. 6(a), the control unit 150 uses the first moving part 43 to reduce the gap in the Z-axis direction between the pressing plate 421 and the support plate 422 and attempts to clamp the frame F. In Fig. 6(a), the gap is reduced until the pressing plate 421 and the support plate 422 come into contact with each other, but it is sufficient that the gap is reduced to at least the thickness of the frame F.

[0062] In the determination step after the clamping trial step, the control unit 150 determines whether or not the frame clamping portion 42 has clamped the frame F based on the positional relationship between the pressing plate 421 and the support plate 422 detected by the sensors 44 and 45. In Fig. 6(a), both the sensors 44 and 45 are in the ON state, and the control unit 150 determines from this result that the frame clamping portion 42 has not clamped the frame F.

[0063] If the control unit 150 determines in the determination step that the frame clamping section 42 is not clamping the frame F, it repeats the above-mentioned approach step, clamping attempt step, and determination step in this order. Note that FIG. 6(b) shows the second approach step. Also, FIG. 6(c) shows the second clamping attempt step and determination step. In FIG. 6(c), the sensor 44 is in the OFF state and the sensor 45 is in the ON state, and the control unit 150 determines from this result that the frame clamping section 42 is clamping the frame F.

[0064] If the control unit 150 determines in the determination step that the frame clamping section 42 is clamping the frame F, it stops the repetition of the approach step, clamping trial step, and determination step described above, and performs the setting step.

[0065] In the setting step, the control unit 150 sets a position where the transfer arm 40 is brought closer to the annular frame F by a predetermined distance ΔD1 from the reference position, which is the current position of the transfer arm 40, as the unloading position. The predetermined distance ΔD1 may be set in advance according to the length of the frame clamping unit 42 in the Y-axis direction. In order to avoid a collision between the frame F and the transfer arm 40, it is desirable to set the sum of the predetermined distance ΔD1 and the moving distance Δd1 in the approaching step to fall within the length of the frame clamping unit 42 in the Y-axis direction. The predetermined distance ΔD1 is not particularly limited, but is desirably about half the length of the frame clamping unit 42 in the Y-axis direction, for example, and is greater than the moving distance Δd1 in the approaching step.

[0066] When the setting step is completed, the control unit 150 moves the transfer arm 40 to the setting position and causes the frame clamping portion 42 to clamp the frame F.

[0067] 7(a), the control unit 150 first releases the clamping of the frame F. That is, the control unit 150 causes the first moving part 43 to move the pressing plate 421 and the support plate 422 to a state where they are sufficiently separated from each other.

[0068] Thereafter, as shown in Fig. 7(b), the control unit 150 uses the horizontal drive unit 32 (second movement unit) to move the transport arm 40 closer to the frame F by a predetermined distance ΔD1 to the unloading position. Finally, as shown in Fig. 7(c), the control unit 150 uses the first movement unit 43 to reduce the gap in the Z-axis direction between the pressing plate 421 and the support plate 422 to clamp the frame F.

[0069] 5 to 7, the processing device 1 repeatedly tries to clamp the frame F while gradually changing the position of the transport arm 40, thereby identifying the tip position of the frame F (reference position of the transport arm 40), and can set the position of the transport arm 40 that can reliably clamp the frame F based on the identified tip position as the transport position. This makes it possible to omit the transport adjustment work by an operator, and reduce the man-hours for transport adjustment.

[0070] Next, the process of setting the unloading position performed by the processing device 1 (control unit 150) will be described with reference to Fig. 8 and Fig. 9. Fig. 8 is a diagram for explaining an example of movement of the transfer arm 40 when the suction and holding mechanism 402 is used. Fig. 9 is a diagram showing an example of a measurement result. In the setting of the unloading position described with reference to Fig. 8 and Fig. 9, a total of four steps are performed: a movement step, a measurement step, a detection step, and a setting step, which will be described later.

[0071] 8 and 9, a case where a carry-out position is set when the carry-out arm 40 carries the frame F out from the guide rail 50 to the chuck table 60 will be described as an example, but the holding mechanism that holds the frame F is not limited to the guide rail 50. The position setting method described below may also be applied when the carry-out arm sucks and holds the frame F from another holding mechanism and carries it out. For example, it may also be applied to setting a carry-out position when the carry-out arm 40 carries the frame F out from the chuck table 60 or when the carry-out arm 100 carries the frame F out from the cleaning unit 130.

[0072] First, the control unit 150 controls the transport mechanism 30 to move the transport arm 40 in the Y-axis direction (moving step), and attempts to suction and hold the frame F at the position after the movement, and measures the negative pressure of the suction portion 463 with the pressure gauge 480 (measuring step).

[0073] More specifically, in the measurement step after the movement step, the transport arm 40 is lowered to bring the suction portion 463 into contact with the frame F held by the guide rail 50. Thereafter, the control unit 150 generates a suction force in the suction portion 463 that is in contact with the frame F, and measures the negative pressure of the suction portion 463.

[0074] 8, the control unit 150 repeats the moving step and the measuring step so that the suction portion 463 traverses the frame area, that is, straddles the inner edge IE and outer edge OE of the frame F. The frame area is an area above the frame F, and is a band-like area that forms a ring shape as a whole, partitioned by the outer edge OE and inner edge IE of the frame F. Note that the Y-axis direction, which is the moving direction in the moving step, is an example of a first direction that traverses the frame area.

[0075] Positions 201 to 209 indicated by circles in Fig. 8 indicate the positions of the suction part 463 when the measurement step is performed. Positions 301 to 309 indicated by crosses in Fig. 8 indicate the positions of the transfer arm 40 when the measurement step is performed. Fig. 9 shows the measurement results of the negative pressure at each position of the transfer arm 40. Figs. 8 and 9 show an example in which the negative pressure was measured at a total of nine positions.

[0076] In the above-described repetitive process, the transport arm 40 may be moved in the Y-axis direction by a few mm (e.g., 3 mm) at a time so that the suction portion 463 crosses the frame region, and measurements may be performed at a plurality of positions. The order in which each measurement position is measured in the repetitive process is not particularly limited.

[0077] For example, first, assuming that the suction unit 463 is located on the frame area, the suction unit 463 may move from a preset initial position to a position (e.g., position 209) displaced in the -Y axis direction with respect to the frame area, and then move from that position (e.g., position 209) to a position (e.g., position 201) displaced in the +Y axis direction at predetermined intervals (e.g., 3 mm) and measure at the position after movement. Also, for example, the suction unit 463 may move from the initial position to a position (e.g., position 201) displaced in the +Y axis direction with respect to the frame area, and then move from that position (e.g., position 201) to a position (e.g., position 209) displaced in the -Y axis direction at predetermined intervals and measure at the position after movement. In addition, movement in the -Y axis direction at a predetermined interval to a position shifted from the initial position in the -Y axis direction (for example, position 209) and measurement at the moved position may be repeated, and then returning to the initial position, movement in the +Y axis direction at a predetermined interval to a position shifted from the initial position in the +Y axis direction (for example, position 201), and measurement at the moved position may be repeated.

[0078] When the repetitive process ends, the control unit 150 detects a detection position that specifies the boundary between the position of the transfer arm 40 when the suction portion 463 protrudes from the frame area and the position of the transfer arm 40 when it does not protrude, based on the negative pressure measurement result (detection step). More specifically, the control unit 150 detects a first detection position that specifies the boundary on the outer edge OE side between the position of the transfer arm 40 when the suction portion 463 protrudes from the frame area and the position of the transfer arm 40 when it does not protrude, and a second detection position that specifies the boundary on the inner edge IE side between the position of the transfer arm 40 when the suction portion 463 protrudes from the frame area and the position of the transfer arm 40 when it does not protrude.

[0079] It is preferable that the control unit 150 calculates an average value of the negative pressures of the multiple suction parts 463 (four suction parts 463 in this example) measured in each measurement step based on the measurement results. It is also preferable that the control unit 150 detects the first detection position and the second detection position using the average value of the negative pressures. That is, it is preferable that the detection step includes an average value calculation step of calculating, based on the measurement results, an average value of the negative pressures of the multiple suction parts 463 measured in each measurement step, which is used for detecting the first detection position and the second detection position.

[0080] By detecting the first detection position and the second detection position based on the average value, the control unit 150 can avoid misidentifying a position where leakage occurs in at least one of the plurality of suction parts 463 as a position where leakage does not occur. Therefore, it is possible to appropriately detect the first detection position and the second detection position, and further to appropriately set the discharge position in the setting step described later.

[0081] The position of the transport arm 40 when the suction part 463 protrudes from the frame area refers to the position of the transport arm 40 at which gas leaks from a gap generated between the suction part 463 and the frame F during the suction operation. The position of the transport arm 40 when the suction part 463 does not protrude from the frame area refers to the position of the transport arm 40 at which gas does not leak from between the suction part 463 and the frame F during the suction operation.

[0082] The method of determining whether the suction portion 463 protrudes from the frame area is not particularly limited, and may be determined by comparing the absolute value of the negative pressure with a threshold value, for example. For example, as shown in Fig. 9, a value smaller than the value of the negative pressure of the suction portion 463 generated when the suction portion 463 does not protrude from the frame area and larger than the value of the negative pressure generated when the suction portion 463 protrudes from the frame area may be set as the threshold value TH in advance. Then, the control unit 150 may detect the detection position by determining that the suction portion 463 protrudes from the frame area if the measured negative pressure is less than the threshold value TH, and determining that the suction portion 463 does not protrude from the frame area if the measured negative pressure exceeds the threshold value TH.

[0083] When this determination method is used, as shown in Figures 8 and 9, it is determined that the adhesive portion 463 does not protrude from the frame area from position 304 to position 306 shown by solid lines, and it is determined that the adhesive portion 463 protrudes from the frame area from other positions shown by dashed lines (position 301 to position 303, position 307 to position 309). Note that in Figure 8, position 204 to position 206 of the adhesive portion 463 corresponding to position 304 to position 306 are also shown by solid lines, and positions 201 to 203 and positions 207 to 209 of the adhesive portion 463 corresponding to positions 301 to 303 and positions 307 to 309 are shown by dashed lines.

[0084] The determination as to whether the suction unit 463 is protruding from the frame area may be made based on the change in negative pressure at the measurement position. For example, a measurement position where the negative pressure has dropped suddenly compared to an adjacent measurement position may be determined as a position protruding from the frame area, and the adjacent measurement position may be determined as a position not protruding from the frame area. The determination as to whether the negative pressure has dropped suddenly may be made using, for example, a threshold value indicating the amount of change in negative pressure. Furthermore, the determination as to whether the suction unit 463 is protruding from the frame area may be made using both the amount of change in negative pressure and the absolute value of the negative pressure.

[0085] The first detection position and the second detection position may be positions that allow identification of the boundary between a protruding position and a non-protruding position. For example, the control unit 150 may detect a non-protruding position adjacent to the protruding position (e.g., position 304, position 306) as the first detection position and the second detection position.

[0086] When the first and second detection positions are detected, the control unit 150 sets a position between the first and second detection positions detected in the detection step as the unloading position (setting step). By setting a position between the first and second detection positions as the unloading position, a position where the suction portion 463 does not protrude from the frame area is set as the unloading position, so that the frame F can be reliably sucked and held.

[0087] As described above, in the detection step, when the control unit 150 detects a position that does not protrude as the detection position, the position between the first detection position and the second detection position that is set as the discharge position in the setting step may or may not include the first detection position and the second detection position.

[0088] Furthermore, in the setting step, it is preferable that the control unit 150 calculates an intermediate position between the first detection position and the second detection position as the unloading position, and it is preferable that the control unit 150 sets the calculated unloading position. That is, it is preferable that the setting step includes a position calculation step of calculating an intermediate position between the first detection position and the second detection position as the unloading position. By setting an intermediate position between the first detection position and the second detection position as the unloading position, it is possible to arrange the suction part 463 without being too biased toward the inner edge IE side or the outer edge OE side of the frame F. This allows the transport arm 100 to hold the frame F more stably.

[0089] 8 and 9, the processing device 1 repeatedly tries to suck and hold the frame F while gradually changing the position of the transport arm 40, thereby identifying a position where suction and holding is possible and setting the identified position as the unloading position. This makes it possible to omit the transport adjustment work by an operator, and reduces the number of steps required for transport adjustment.

[0090] 10 and 11 are diagrams for explaining an example of setting the carry-out position of the transfer arm 40 when using the suction and holding mechanism 402. Figs. 8 and 9 show an example of detecting the detection position based on the measurement results at a plurality of measurement positions that are spaced apart by a certain interval. However, in the movement step, movement at a plurality of different intervals may be performed. Hereinafter, with reference to Figs. 10 and 11, an example of detecting the detection position with high accuracy and setting the carry-out position by combining movements at a plurality of different intervals will be described.

[0091] 10(a) shows a state in which the transport arm 40 equipped with the suction part 463 has moved to an initial position. The initial position is a position that is set in advance assuming that the suction part 463 is located above the frame area. When the transport arm 40 moves to the initial position, the control unit 150 lowers the transport arm 40 to a height at which the suction part 463 contacts the frame F, as shown in FIG. 10(b), starts a suction operation, and measures the negative pressure of the suction part 463.

[0092] The control unit 150 determines whether the adsorption portion 463 protrudes from the frame area based on the measurement result of the negative pressure. For example, if the negative pressure is equal to or greater than a threshold, the control unit 150 determines that the adsorption portion 463 does not protrude from the frame area, and if the negative pressure is less than the threshold, the control unit 150 determines that the adsorption portion 463 protrudes from the frame area. It is desirable that the negative pressure compared with the threshold is an average value of the negative pressures of the multiple adsorption portions 463. In this example, at the initial position, the control unit 150 determines that the adsorption portion 463 does not protrude from the frame area.

[0093] The control unit 150 stops the suction operation, and raises the transport arm 100 to a height where the suction portion 463 does not contact the frame F, as shown in FIG. 10(c), and then moves the transport arm 40 a predetermined distance ΔD2 (e.g., 3 mm) in the -Y axis direction.

[0094] 10(d), the control unit 150 lowers the transport arm 40 to a height where the suction portion 463 contacts the frame F, starts the suction operation, and measures the negative pressure of the suction portion 463. In this example, even at this position, which is −3 mm from the initial position, the control unit 150 determines that the suction portion 463 does not protrude from the frame area.

[0095] The control unit 150 stops the suction operation, and raises the transport arm 40 to a height where the suction portion 463 does not contact the frame F, as shown in FIG. 10(e), and then moves the transport arm 40 further in the -Y axis direction by a predetermined distance ΔD2 (e.g., 3 mm).

[0096] 10(f), the control unit 150 lowers the transport arm 40 to a height where the suction portion 463 contacts the frame F, starts the suction operation, and measures the negative pressure of the suction portion 463. In this example, at this position, which is −6 mm from the initial position, the control unit 150 determines that the suction portion 463 protrudes from the frame area.

[0097] When the control unit 150 determines that the suction portion 463 protrudes from the frame area, that is, when it determines that a leak is occurring at the suction portion 463, it moves the transport arm 40 in the opposite direction at a smaller interval and searches for the position of the transport arm 40 where the suction portion 463 is on the frame area.

[0098] Specifically, the control unit 150 stops the suction operation, raises the transport arm 40 to a height where the suction portion 463 does not contact the frame F, as shown in FIG. 11(a), and then moves the transport arm 40 in the +Y-axis direction by a predetermined distance Δd2 (e.g., 1 mm) which is smaller than the predetermined distance ΔD2.

[0099] 11(b), the control unit 150 lowers the transfer arm 40 to a height where the suction portion 463 contacts the frame F, starts the suction operation, and measures the negative pressure of the suction portion 463. In this example, at this position, which is −5 mm from the initial position, the control unit 150 determines that the suction portion 463 protrudes from the frame area.

[0100] The control unit 150 stops the suction operation, and raises the transport arm 40 to a height where the suction portion 463 does not contact the frame F, as shown in FIG. 11(c), and then moves the transport arm 40 further in the +Y-axis direction by a predetermined distance Δd2 (e.g., 1 mm).

[0101] 11(d), the control unit 150 lowers the transfer arm 40 to a height where the suction portion 463 contacts the frame F, starts the suction operation, and measures the negative pressure of the suction portion 463. In this example, at this position, which is −4 mm from the initial position, the control unit 150 determines that the suction portion 463 does not protrude from the frame area.

[0102] Through the above processing, the control unit 150 determines that there is a boundary between positions where the suction portion 463 protrudes and positions where it does not protrude, between -5 mm and -4 mm from the initial position, and detects the position -4 mm from the initial position as the second detection position that determines the boundary.

[0103] If the control unit 150 determines that the suction portion 463 does not protrude from the frame region, it may move the transport arm 40 in the opposite direction by an even smaller interval (for example, 0.5 mm) to search for a position of the transport arm 40 where the suction portion 463 protrudes from the frame region. In this way, by repeatedly searching for a position where the suction portion 463 does not protrude and a position where the suction portion 463 protrudes from the frame region while reversing the movement direction, the boundary can be narrowed down to a narrower range.

[0104] Thereafter, the control unit 150 returns the transfer arm 40 to the initial position, and repeats the same process in the +Y-axis direction to detect the first detection position. That is, the control unit 150 measures the negative pressure while moving in the +Y-axis direction by a predetermined distance ΔD2, and when it finds a position that falls outside the frame area, moves in the -Y-axis direction by a smaller predetermined distance Δd2 while measuring the negative pressure, and finds a position that does not fall outside the frame area.

[0105] Specifically, as shown in Fig. 11(e), the control unit 150 moves the transfer arm 40 in the +Y-axis direction by a predetermined distance ΔD2 (e.g., 3 mm), and then, as shown in Fig. 11(f), lowers the transfer arm 40 to a height where the suction part 463 contacts the frame F, starts the suction operation, and measures the negative pressure of the suction part 463. In this example, at this position, which is +3 mm from the initial position, the control unit 150 determines that the suction part 463 protrudes from the frame area.

[0106] The control unit 150 stops the suction operation, raises the transport arm 40 to a height where the suction portion 463 does not come into contact with the frame F, and then moves the transport arm 40 a predetermined distance Δd2 (e.g., 1 mm) in the -Y axis direction, lowers the transport arm 40 to a height where the suction portion 463 comes into contact with the frame F, starts the suction operation, and measures the negative pressure of the suction portion 463. In this example, at this position, which is +2 mm from the initial position, the control unit 150 determines that the suction portion 463 does not protrude from the frame area.

[0107] Through the above processing, the control unit 150 determines that there is a boundary between positions where the suction portion 463 protrudes and positions where it does not protrude, between +2 mm and +3 mm from the initial position, and detects the position of +2 mm from the initial position as the first detection position that determines the boundary.

[0108] 10 and 11, by identifying the boundary using a plurality of predetermined intervals in the movement step, the detection position can be detected accurately in a short search time. Therefore, when the intermediate position between the first detection position and the second detection position is set as the unloading position, it is possible to suck and hold the center part of the outer edge OE and the inner edge IE of the frame. This allows the transport arm 40 to realize more stable transport.

[0109] According to the method for setting the unloading position described with reference to Fig. 5 to Fig. 11, the processing device 1 can reliably hold the frame F and unload it from the holding mechanism by setting the unloading position as a pre-processing for unloading the frame F. Due to such an advantage, when performing a series of transport processes performed from when the frame unit FU is loaded from the cassette 10 to the apparatus body 2 until when the frame unit FU is unloaded from the apparatus body 2 to the cassette 10, the processing device 1 may automatically set the unloading positions of the transport arms (transport arm 40 and transport arm 100) used in each transport process.

[0110] Specifically, the processing apparatus 1 may automatically set the carry-out position of the transfer arm 40 when transferring the frame F from the cassette 10 to the apparatus body 2, the carry-out position of the transfer arm 40 when transferring the frame F from the guide rail 50 to the chuck table 60, the carry-out position of the transfer arm 100 when transferring the frame F from the chuck table 60 to the cleaning unit 130, the carry-out position of the transfer arm 100 when transferring the frame F from the cleaning unit 130 to the guide rail 50, and the carry-out position of the transfer arm 40 when transferring from the guide rail 50 to the cassette 10. As a result, transfer adjustments related to suction holding are performed collectively and all carry-out positions are automatically set, so that the operator does not need to be aware of the adjustment work.

[0111] The automatic setting of the unloading position described above may be performed in response to a predetermined action such as a change in the settings of the processing device 1 (e.g., replacement of the cassette 10, the transport arm 40, or the transport arm 100). This allows the setting to be performed only once each time it is required, thereby preventing a decrease in throughput of the processing device 1 due to unnecessary repetition of the setting work.

[0112] The embodiments of the present invention are not limited to the above-mentioned embodiments and modifications, and may be modified, substituted, or altered in various ways without departing from the spirit of the technical idea of ​​the present invention. Furthermore, if the technical idea of ​​the present invention can be realized in a different way due to technological progress or other derived technology, it may be implemented using that method. Therefore, the claims cover all embodiments that may be included within the scope of the technical idea of ​​the present invention.

[0113] In the above-described embodiment, an example is shown in which the frame F of a frame unit FU in which a wafer W is fixed to the frame F via a tape T is held by suction, but the frame F alone may be transported within the processing device 1, and the above-described method may be used to set the discharge position when transporting the frame F alone. [Industrial Applicability]

[0114] As described above, the method for setting the position of the transfer arm of the present invention can omit the adjustment work by an operator regarding the transfer position of the transfer arm that suctions and holds the transfer object, and can reduce the number of steps for transfer adjustment. Therefore, it is useful for further automation of processing in a processing device that includes a transfer arm. [Explanation of symbols]

[0115] 1: Processing equipment 10: Cassette 30, 90: Transport mechanism 31, 91: Lifting drive unit 32, 92: Horizontal drive unit 40, 100: Transport arm 42: Frame clamping part 43: First moving part 44, 45: Sensor 50: Guide rail 60: Chuck table 100: Transport arm 150: Control unit 401: Holding mechanism 402: Suction holding mechanism 421: Presser plate 422: Support plate 463: Adsorption part F: Frame FU: Frame unit IE: Common-law marriage OE: Outer edge T: Tape W: Wafer

Claims

1. A method for setting a position of a transport arm that transports an annular frame used in a frame unit that holds a workpiece from a holding mechanism, comprising the steps of: the transport arm has a suction portion that suction-holds the annular frame, a moving step of moving the transport arm in a first direction across a frame area defined by an outer edge and an inner edge of the annular frame; a measuring step of generating a suction force on the suction portion in contact with the annular frame held by the holding mechanism after the moving step, and measuring a negative pressure on the suction portion; a detection step of detecting, based on a measurement result of the negative pressure measured in the measurement step by repeating the moving step and the measurement step, a first detection position that specifies the boundary on the outer edge side between the position of the transport arm where the suction portion protrudes from the frame area and the position of the transport arm where the suction portion does not protrude, and a second detection position that specifies the boundary on the inner edge side between the position of the transport arm where the suction portion protrudes from the frame area and the position of the transport arm where the suction portion does not protrude; a setting step of setting a position between the first detection position and the second detection position detected in the detection step as a carry-out position at which the transport arm is positioned when the transport arm carries out the annular frame held by the holding mechanism. A position setting method comprising:

2. 2. The position setting method according to claim 1, The setting step includes a position calculation step of calculating an intermediate position between the first detection position and the second detection position as the unloading position. A position setting method comprising:

3. 3. The position setting method according to claim 1, further comprising the steps of: the transport arm has a plurality of the suction portions, The detection step includes an average value calculation step of calculating an average value of the negative pressures of the plurality of suction parts measured in each measurement step, the average value being used for detecting the first detection position and the second detection position, based on the measurement results. A position setting method comprising:

Images