Substrate processing apparatus, electrode, semiconductor device manufacturing method, and program

Abstract

To provide a technique that enables more uniform substrate processing.SOLUTION: A technology includes a processing chamber that processes a substrate, and a plasma generation portion including a first electrode group arranged with at least one first electrode for generating plasma in the processing chamber, to which an arbitrary potential is applied and which has a first length, at least one second electrode to which an arbitrary potential is applied and which has a second length different from the first length, and at least one third electrode to which a reference potential is applied and which has a third length which is the same as the first length, in this order.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present disclosure relates to a substrate processing apparatus, an electrode, a method for manufacturing a semiconductor device, and a program. [Background technology]

[0002] As one step in the manufacturing process of a semiconductor device, substrate processing may be performed in which a substrate is loaded into a processing chamber of a substrate processing apparatus and raw material gas and reactive gas are supplied into the processing chamber to form various films, such as insulating films, semiconductor films, and conductor films, on the substrate or to remove various films.

[0003] In mass-produced devices in which fine patterns are formed, lower temperatures are sometimes required to suppress the diffusion of impurities and to enable the use of materials with low heat resistance, such as organic materials. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2007-324477 A Summary of the Invention [Problem to be solved by the invention]

[0005] In order to solve such problems, substrate processing using plasma is generally performed, but this can make it difficult to uniformly process the film.

[0006] An object of the present disclosure is to provide techniques that enable more uniform substrate processing. [Means for solving the problem]

[0007] According to one aspect of the present disclosure, a technology is provided that includes a processing chamber for processing a substrate, and a plasma generating unit having electrodes for generating plasma in the processing chamber, the electrodes being composed of at least one first electrode to which an arbitrary potential is applied and which has a first length, at least one second electrode to which an arbitrary potential is applied and which has a second length different from the first length, and at least one third electrode to which a reference potential is applied and which has a third length which is the same as the first length, the first electrode being arranged in this order, the second electrode, and the third electrode. Effect of the Invention

[0008] According to the present disclosure, it is possible to provide a technique that enables more uniform substrate processing. [Brief description of the drawings]

[0009] [Figure 1] 1 is a schematic configuration diagram of a vertical processing furnace of a substrate processing apparatus suitably used in an embodiment of the present disclosure, showing a vertical cross section of a processing furnace portion. [Diagram 2] 2 is a cross-sectional view of the substrate processing apparatus shown in FIG. [Diagram 3] 1A is a perspective view of an electrode according to an embodiment of the present disclosure when the electrode according to the embodiment of the present disclosure is installed in an electrode fixture, and FIG. 1B is a diagram showing the positional relationship among a heater, an electrode fixture, an electrode, a protrusion for fixing the electrode, and a reaction tube according to an embodiment of the present disclosure. [Figure 4] 1A is a perspective view of an electrode according to a first modified example of an embodiment of the present disclosure when the electrode according to the first modified example of an embodiment of the present disclosure is installed on an electrode fixture, and FIG. 1B is a diagram showing the positional relationship among a heater, an electrode fixture, an electrode, a protrusion for fixing the electrode, and a reaction tube according to the first modified example of an embodiment of the present disclosure. [Diagram 5] 1A and 1B are diagrams illustrating an electrode according to an embodiment of the present disclosure, in which (a) is a front view of the electrode according to the embodiment of the present disclosure, and (b) is a diagram illustrating how the electrode is fixed to an electrode fixture. [Figure 6]FIG. 2 is a schematic configuration diagram of a controller in the substrate processing apparatus shown in FIG. 1, and is a block diagram showing an example of a control system of the controller. [Figure 7] 2 is a flowchart showing an example of a substrate processing process using the substrate processing apparatus shown in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the present disclosure will be described with reference to Figures 1 to 7. Note that all drawings used in the following description are schematic, and the dimensional relationships of each element, the ratio of each element, and the like shown in the drawings do not necessarily match the actual ones. Furthermore, the dimensional relationships of each element, the ratio of each element, and the like between multiple drawings do not necessarily match.

[0011] (1) Configuration of the substrate processing device (heating device) As shown in Fig. 1, the processing furnace 202 of the vertical substrate processing apparatus has a heater 207 as a heating device (heating mechanism, heating section). The heater 207 has a cylindrical shape and is installed vertically by being supported by a holding plate. The heater 207 also functions as an activation mechanism (excitation section) that activates (excites) gas by heat.

[0012] (Processing room) An electrode fixture 301, which will be described later, is disposed inside the heater 207, and an electrode 300, which will be described later, of a plasma generating unit is disposed inside the electrode fixture 301. A reaction tube 203 is disposed inside the electrode 300, concentrically with the heater 207. The reaction tube 203 is made of a heat-resistant material such as quartz (SiO2) or silicon carbide (SiC), and is formed in a cylindrical shape with a closed upper end and an open lower end. A manifold 209 is disposed below the reaction tube 203, concentrically with the reaction tube 203. The manifold 209 is made of a metal such as stainless steel (SUS), and is formed in a cylindrical shape with open upper and lower ends. The upper end of the manifold 209 engages with the lower end of the reaction tube 203, and is configured to support the reaction tube 203. An O-ring 220a is provided between the manifold 209 and the reaction tube 203 as a seal member. The manifold 209 is supported by the heater base, so that the reaction tube 203 is installed vertically. A processing vessel (reaction vessel) is mainly constituted by the reaction tube 203 and the manifold 209. A processing chamber 201 is formed in a cylindrical hollow portion of the processing vessel. The processing chamber 201 is configured to be capable of accommodating a plurality of wafers 200 as substrates. Note that the processing vessel is not limited to the above configuration, and in some cases only the reaction tube 203 is referred to as the processing vessel.

[0013] (Gas supply section) In the processing chamber 201, nozzles 249a and 249b as first and second supply units are provided so as to penetrate the sidewall of the manifold 209. The nozzles 249a and 249b are also referred to as the first and second nozzles, respectively. The nozzles 249a and 249b are made of a heat-resistant material such as quartz or SiC. The nozzles 249a and 249b are connected to the gas supply pipes 232a and 232b, respectively. In this manner, the processing vessel is provided with two nozzles 249a and 249b and two gas supply pipes 232a and 232b, and it is possible to supply a plurality of types of gases into the processing chamber 201. In addition, when only the reaction tube 203 is used as the processing vessel, the nozzles 249a and 249b may be provided so as to penetrate the sidewall of the reaction tube 203.

[0014] Gas supply pipes 232a and 232b are provided with mass flow controllers (MFCs) 241a and 241b, which are flow rate controllers (flow rate control parts), and valves 243a and 243b, which are on-off valves, in order from the upstream side of the gas flow. Gas supply pipes 232c and 232d, which supply inert gas, are connected to the gas supply pipes 232a and 232b downstream of the valves 243a and 243b. Gas supply pipes 232c and 232d are provided with MFCs 241c and 241d and valves 243c and 243d, respectively, in order from the upstream side.

[0015] As shown in FIG. 1 and FIG. 2, the nozzles 249a and 249b are provided in a circular space between the inner wall of the reaction tube 203 and the wafers 200 in a plan view, along the inner wall of the reaction tube 203 from the lower part to the upper part, so as to rise upward in the loading direction of the wafers 200. That is, the nozzles 249a and 249b are provided on the side of the end (peripheral part) of each wafer 200 loaded into the processing chamber 201, perpendicular to the surface (flat surface) of the wafer 200. Gas supply holes 250a and 250b for supplying gas are provided on the side of the nozzles 249a and 249b, respectively. The gas supply hole 250a opens toward the center of the reaction tube 203, and can supply gas toward the wafers 200. A plurality of gas supply holes 250a and 250b are provided from the lower part to the upper part of the reaction tube 203.

[0016] In this embodiment, the gas is transported through the nozzles 249a and 249b arranged in a vertically elongated space that is annular in plan view and is defined by the inner wall of the sidewall of the reaction tube 203 and the ends (peripheral parts) of the multiple wafers 200 arranged in the reaction tube 203, that is, the nozzles 249a and 249b arranged in a cylindrical space. Then, the gas is ejected into the reaction tube 203 for the first time near the wafer 200 from the gas supply holes 250a and 250b that are opened in the nozzles 249a and 249b, respectively. Then, the main flow of the gas in the reaction tube 203 is parallel to the surface of the wafer 200, that is, the horizontal direction. With this configuration, the gas can be uniformly supplied to each wafer 200, and the uniformity of the film thickness of the film formed on each wafer 200 can be improved. The gas that has flowed on the surface of the wafer 200, that is, the remaining gas after the reaction, flows toward the exhaust port, that is, the exhaust pipe 231 described later. However, the direction of the flow of the residual gas is appropriately determined depending on the position of the exhaust port, and is not limited to the vertical direction.

[0017] From the gas supply pipe 232a, a raw material (raw material gas) is supplied into the processing chamber 201 via the MFC 241a, the valve 243a, and the nozzle 249a.

[0018] From the gas supply pipe 232b, a reactant (reaction gas), for example, an oxygen (O)-containing gas, is supplied into the processing chamber 201 via the MFC 241b, the valve 243b, and the nozzle 249b.

[0019] An inert gas is supplied from the gas supply pipes 232c and 232d into the processing chamber 201 via the MFCs 241c and 241d, the valves 243c and 243d, and the nozzles 249a and 249b, respectively.

[0020] A raw material supply system as a first gas supply system is mainly composed of the gas supply pipe 232a, the MFC 241a, and the valve 243a. A reactant supply system (reactant gas supply system) as a second gas supply system is mainly composed of the gas supply pipe 232b, the MFC 241b, and the valve 243b. An inert gas supply system is mainly composed of the gas supply pipes 232c, 232d, the MFCs 241c, 241d, and the valves 243c, 243d. The raw material supply system, the reactant supply system, and the inert gas supply system are also simply referred to as a gas supply system (gas supply section).

[0021] (Substrate support) As shown in FIG. 1, the boat 217 as a substrate support is configured to support a plurality of wafers 200, for example 25 to 200, in a horizontal position and aligned vertically with their centers aligned, i.e., arranged at intervals. The boat 217 is made of a heat-resistant material such as quartz or SiC. At the bottom of the boat 217, heat insulating plates 218 made of a heat-resistant material such as quartz or SiC are supported in multiple stages. This configuration makes it difficult for heat from the heater 207 to be transmitted to the seal cap 219. However, this embodiment is not limited to this form. For example, instead of providing the heat insulating plate 218 at the bottom of the boat 217, a heat insulating cylinder configured as a cylindrical member made of a heat-resistant material such as quartz or SiC may be provided.

[0022] (Plasma generation section) Next, the plasma generating unit will be described with reference to FIGS.

[0023] An electrode 300 for generating plasma is provided outside the reaction tube 203, i.e., outside the processing vessel (processing chamber 201). By applying power to the electrode 300, it is possible to convert the gas into plasma and excite it inside the reaction tube 203, i.e., inside the processing vessel (processing chamber 201), i.e., to excite the gas into a plasma state. Hereinafter, it is configured such that, by simply applying power, the plasma is generated as a capacitively coupled plasma (abbreviated as CCP) inside the reaction tube 203, i.e., inside the processing vessel (processing chamber 201).

[0024] 2, an electrode 300 and an electrode fixture 301 for fixing the electrode 300 are disposed between the heater 207 and the reaction tube 203. The electrode fixture 301 is disposed inside the heater 207, the electrode 300 is disposed inside the electrode fixture 301, and the reaction tube 203 is disposed inside the electrode 300.

[0025] As shown in FIGS. 1 and 2, the electrode 300 and the electrode fixture 301 are provided in a space between the inner wall of the heater 207 and the outer wall of the reaction tube 203, which is annular in plan view, so as to extend from the lower part to the upper part of the outer wall of the reaction tube 203 in the arrangement direction of the wafers 200. The electrode 300 is provided parallel to the nozzles 249a and 249b. The electrode 300 and the electrode fixture 301 are arranged and disposed concentrically with the reaction tube 203 and the heater 207 in plan view, and so as to be out of contact with the heater 207. The electrode fixture 301 is made of an insulating material (insulator) and is provided so as to cover at least a part of the electrode 300 and the reaction tube 203, so that the electrode fixture 301 can also be called a cover (quartz cover, insulating wall, insulating plate) or a cross-sectional arc cover (cross-sectional arc body, cross-sectional arc wall).

[0026] As shown in FIG. 2, a plurality of electrodes 300 are provided, and these electrodes 300 are fixed and installed on the inner wall of an electrode fixing tool 301. More specifically, as shown in FIG. 5, a protrusion (hook) 310 capable of hooking the electrode 300 is provided on the inner wall surface of the electrode fixing tool 301, and an opening 305 that is a through hole through which the protrusion 310 can be inserted is provided on the electrode 300. By hooking the electrode 300 on the protrusion 310 provided on the inner wall surface of the electrode fixing tool 301 through the opening 305, the electrode 300 can be fixed to the electrode fixing tool 301. Note that FIG. 3 and FIG. 4 show an example in which two openings 305 are provided for one electrode 300, and one electrode 300 is fixed by hooking two protrusions 310, that is, an example in which one electrode is fixed at two points. In addition, Figure 2 shows an example of a configuration (unit) in which nine electrodes 300 are fixed to one electrode fixing device 301, and the configuration (unit) consists of two sets, in which three electrodes 300-1, three electrodes 300-2, and three electrodes 300-0 are fixed to one electrode fixing device 301.

[0027] The electrodes 300 (the first-type electrode 300-1, the second-type electrode 300-2, the third-type electrode 300-3, and the zeroth-type electrode 300-0) are made of an oxidation-resistant material such as nickel (Ni). The electrodes 300 can be made of metal materials such as SUS, aluminum (Al), and copper (Cu), but by making the electrodes 300 of an oxidation-resistant material such as Ni, deterioration of electrical conductivity can be suppressed, and a decrease in plasma generation efficiency can be suppressed. Furthermore, the electrodes 300 can be made of a Ni alloy material to which Al is added. In this case, an aluminum oxide film (AlO film), which is an oxide film having high heat resistance and corrosion resistance, can be formed on the outermost surface of the electrodes 300. The AlO film formed on the outermost surface of the electrodes 300 acts as a protective film (block film, barrier film) and can suppress the progress of deterioration inside the electrodes 300. This makes it possible to further suppress a decrease in plasma generation efficiency caused by a decrease in electrical conductivity of the electrodes 300. The electrode fixture 301 is made of an insulating material (insulator), for example, a heat-resistant material such as quartz or SiC. The material of the electrode fixture 301 is preferably the same as the material of the reaction tube 203.

[0028] As shown in FIG. 3(a), FIG. 3(b), FIG. 4(a), and FIG. 4(b), the electrode 300 includes a first-type electrode 300-1, a second-type electrode 300-2, a third-type electrode 300-3, and a zeroth-type electrode 300-0. The first-type electrode 300-1, the second-type electrode 300-2, and the third-type electrode 300-3 are connected to a high-frequency power source (RF power source) 320 via a matching unit 325, and an arbitrary potential is applied to them. The zeroth-type electrode 300-0 is grounded to earth and serves as a reference potential (0V). The first-type electrode 300-1, the second-type electrode 300-2, and the third-type electrode 300-3 are also referred to as hot electrodes or HOT electrodes, and the zeroth-type electrode 300-0 is also referred to as a ground electrode or GND electrode. The first-type electrodes 300-1, the second-type electrodes 300-2, the third-type electrodes 300-3, and the zeroth-type electrodes 300-0 are each configured as a plate-shaped member when viewed from the front. In Fig. 2 and Fig. 3, a plurality of the first-type electrodes 300-1, the second-type electrodes 300-2, and the zeroth-type electrodes 300-0 are provided, and Fig. 3(a) and Fig. 3(b) show an example in which four first-type electrodes 300-1, four second-type electrodes 300-2, and four zeroth-type electrodes 300-0 are provided. Fig. 4(a) and Fig. 4(b) show an example in which a plurality of the third-type electrodes 300-3 are further provided, and four first-type electrodes 300-1, two second-type electrodes 300-2, two third-type electrodes 300-3, and four zeroth-type electrodes 300-0 are provided. By applying RF power between the first-type electrode 300-1 and the zeroth-type electrode 300-0 from the RF power source 320 via the matching unit 325, plasma is generated in the region between the first-type electrode 300-1 and the zeroth-type electrode 300-0, and similarly, by applying RF power between the second-type electrode 300-2 and the zeroth-type electrode 300-0, plasma is generated in the region between the second-type electrode 300-2 and the zeroth-type electrode 300-0, and by applying RF power between the third-type electrode 300-3 and the zeroth-type electrode 300-0, plasma is generated in the region between the third-type electrode 300-3 and the zeroth-type electrode 300-0. These regions are also referred to as plasma generation regions.As shown in FIG. 1, the electrodes 300 are arranged in a vertical direction (vertical direction, the direction in which the substrates are loaded) with respect to the processing vessel, and as shown in FIG. 2 to FIG. 4, the electrodes 300 are arranged in an arc shape in a plan view and at equal intervals, that is, the distances (gaps) between adjacent electrodes 300 (first type electrode 300-1, second type electrode 300-2, third type electrode 300-3, zeroth type electrode 300-0) are equal. The electrodes 300 are arranged between the reaction tube 203 and the heater 207 in a substantially arc shape in a plan view along the outer wall of the reaction tube 203, and are fixed to the inner wall surface of the electrode fixture 301 formed in an arc shape with a central angle of 30 degrees or more and 240 degrees or less. As described above, the electrodes 300 are provided in parallel with the nozzles 249a and 249b.

[0029] Here, the electrode fixture 301 and the electrodes 300 (the first type electrode 300-1, the second type electrode 300-2, the third type electrode 300-3, and the zeroth type electrode 300-0) can also be referred to as an electrode unit. As shown in FIG. 2, the electrode units are preferably arranged at positions avoiding the nozzles 249a, 249b and the exhaust pipe 231. FIG. 2 shows an example in which two electrode units are arranged to face each other across the center of the wafer 200 (reaction tube 203) while avoiding the nozzles 249a, 249b and the exhaust pipe 231. FIG. 2 shows an example in which the two electrode units are arranged line-symmetrically, i.e., symmetrically, with a straight line L as an axis of symmetry in a plan view. By arranging the electrode unit in this manner, it is possible to arrange the nozzles 249a, 249b, the temperature sensor 263, and the exhaust pipe 231 outside the plasma generation region in the processing chamber 201, and it is possible to suppress plasma damage to these members, wear and tear of these members, and generation of particles from these members. In this disclosure, when there is no particular need to distinguish between them, they will be described as electrode 300.

[0030] A high frequency wave of, for example, 25 MHz or more and 35 MHz or less, more specifically, a frequency of 27.12 MHz, is input to the electrode 300 from a high frequency power supply 320 via a matching box 325, thereby generating plasma (active species) 302 in the reaction tube 203. The plasma thus generated makes it possible to supply the plasma 302 for substrate processing to the surface of the wafer 200 from the periphery of the wafer 200. The electrode 300 is configured to be powered from the lower side (lower end).

[0031] A plasma generating unit (plasma excitation unit, plasma activation mechanism) that excites (activates) a gas into a plasma state is mainly constituted by the electrodes 300, i.e., the first type electrode 300-1, the second type electrode 300-2, the third type electrode 300-3 and the zeroth type electrode 300-0, and the electrode fixture 301, the matching box 325 and the RF power supply 320 may also be considered to be included in the plasma generating unit.

[0032] As shown in FIG. 5(a), the electrode 300 is formed with an opening 305 consisting of a circular cutout 303 through which the projection head 311 described later passes and a slide cutout 304 through which the projection shaft 312 slides.

[0033] The electrode 300 is preferably configured to have a thickness of 0.1 mm to 1 mm and a width of 5 mm to 30 mm so as to have sufficient strength and not significantly reduce the efficiency of wafer heating by the heat source. In addition, it is preferable that the electrode 300 has a bent structure as a deformation suppressing part to prevent deformation due to heating by the heater 207. In this case, since the electrode 300 is disposed between the quartz reaction tube 203 and the heater 207, a bending angle of 90° to 175° is appropriate due to the space constraints. A coating is formed on the electrode surface by thermal oxidation, and since the coating may peel off due to thermal stress and generate particles, care must be taken not to bend too much.

[0034] In the vertical substrate processing apparatus, the frequency of the high frequency power supply 320 is set to 27.12 MHz, and the electrode 300 having a length of 1 m and a thickness of 1 mm is used to generate plasma in the CCP mode.

[0035] If the loading range of the wafers 200 in the boat 217 is set to 8% or more of the output wavelength of the high frequency power supply 320, the uneven voltage distribution of the standing wave (cosine curve) consisting of the superposition of the forward wave and the reflected wave in the vertical direction of the electrode 300 will affect the uneven density distribution of the plasma 302. Therefore, the film thickness and film quality, which are correlated with the density distribution of the plasma 302, will be non-uniform among the wafers 200.

[0036] As an approach to solving this problem, there is a method of shifting the voltage distribution of the standing wave in the wafer area downward by changing the phase difference between the forward wave and the reflected wave, since the reflection coefficient changes by adjusting the length of the tip of the electrode 300. By using this method, it is possible to improve the bias of the voltage distribution, ensure a uniform density distribution of the plasma 302, and improve the uniformity of the film thickness and film quality between the wafers 200.

[0037] For example, as shown in FIG. 3(a) and FIG. 3(b), on the outer wall of a tubular reaction tube 203, four first type electrodes 300-1 each having a width of 12.5 mm and a height of 1650 mm, four second type electrodes 300-2 each having a width of 12.5 mm and a height of 1200 mm, and four zeroth type electrodes 300-0 each having a width of 12.5 mm and a height of 1650 mm are alternately arranged in the order of the first type electrode 300-1, the second type electrode 300-2, the zeroth type electrode 300-0, the first type electrode 300-1, the second type electrode 300-2, the zeroth type electrode 300-0, .... Furthermore, the gap between the first type electrode 300-1 and the second type electrode 300-2, the gap between the second type electrode 300-2 and the 0th type electrode 300-0, and the gap between the 0th type electrode 300-0 and the first type electrode 300-1 are all set to 7.5 mm.

[0038] As shown in FIG. 4(a) and FIG. 4(b), on the outer wall of the tubular reaction tube 203, four first type electrodes 300-1 each having a width of 12.5 mm and a height of 1650 mm, two second type electrodes 300-2 each having a width of 12.5 mm and a height of 1350 mm, two third type electrodes 300-3 each having a width of 12.5 mm and a height of 1050 mm, and four zeroth type electrodes 300-0 each having a width of 12.5 mm and a height of 1650 mm are alternately arranged in the following order: the first type electrode 300-1, the second type electrode 300-2, the zeroth type electrode 300-0, the first type electrode 300-1, the third type electrode 300-3, the zeroth type electrode 300-0, the first type electrode 300-1, the second type electrode 300-2, the zeroth type electrode 300-0, ... Furthermore, the gap between the first type electrode 300-1 and the second type electrode 300-2, the gap between the second type electrode 300-2 and the 0th type electrode 300-0, the gap between the 0th type electrode 300-0 and the first type electrode 300-1, the gap between the first type electrode 300-1 and the third type electrode 300-3, and the gap between the third type electrode 300-3 and the 0th type electrode 300-0 are all 7.5 mm.

[0039] 3(a), 3(b) and 4(a) and 4(b), the first-type electrode 300-1 is at the same level as or lower than the 0th-type electrode 300-0, and the second-type electrode 300-2 and the third-type electrode 300-3 are at the same level as or lower than both the first-type electrode 300-1 and the 0th-type electrode 300-0. More preferably, when the loading range of the wafers 200 in the boat 217 is set to 12% of the output wavelength of the high-frequency power source 320, the tips of the second-type electrode 300-2 and the third-type electrode 300-3 are set to be at a position 0.5 to 6% (0.5% or more and 6% or less) lower than the output wavelength of the high-frequency power source 320 from the position of the topmost wafer, and the tip of the 0th-type electrode 300-0 is set to be at the same level as or higher than the position of the topmost wafer. In addition, when the tips of both the second type electrode 300-2 and the third type electrode 300-3 are configured at the top wafer position, or when the second type electrode 300-2 or the third type electrode 300-3 is configured at a position that is lower than 6% of the output wavelength of the high frequency power supply 320 from the top wafer position, the bias in the voltage distribution of the electrode 300 becomes significant, making it difficult to ensure uniformity in the density distribution of the plasma 302.

[0040] Here, taking the first type electrode 300-1, the second type electrode 300-2, and the zeroth type electrode 300-0 shown in Fig. 3(a) and the first type electrode 300-1, the second type electrode 300-2, the third type electrode 300-3, and the zeroth type electrode 300-0 shown in Fig. 4(a) as examples, it can be said that the following applies. Note that each electrode is configured as follows.

[0041] In Fig. 3(a), three electrodes (a first type electrode 300-1, a second type electrode 300-2, and a zeroth type electrode 300-0) arranged from the right side are set as a first electrode group. The first electrode group is arranged repeatedly. In the first electrode group, the first type electrode 300-1, the second type electrode 300-2, and the zeroth type electrode 300-0 are set as a first electrode, a second electrode, and a third electrode.

[0042] In FIG. 4(a), three electrodes (first type electrode 300-1, second type electrode 300-2, and zeroth type electrode 300-0) arranged from the right side are set as the first electrode group, and three electrodes (first type electrode 300-1, third type electrode 300-3, and zeroth type electrode 300-0) arranged on the left side of the first electrode group are set as the second electrode group. The first electrode group and the second electrode group are arranged alternately. In the first electrode group, the first type electrode 300-1, the second type electrode 300-2, and the zeroth type electrode 300-0 are set as the first electrode, the second electrode, and the third electrode. In the second electrode group, the first type electrode 300-1, the third type electrode 300-3, and the zeroth type electrode 300-0 are set as the fourth electrode, the fifth electrode, and the sixth electrode.

[0043] The above first to sixth electrodes are preferably configured as follows.

[0044] 1) The second electrode is of a shorter length than the first electrode. 2) The fifth electrode is shorter in length than the fourth electrode. 3) The fifth electrode is shorter in length than the second electrode. 4) The second electrode is of a shorter length than the third electrode. 5) The fifth electrode is shorter in length than the sixth electrode.

[0045] 6) The first electrode and the fourth electrode have the same length. 7) The third electrode and the sixth electrode are the same length. 8) The first electrode and the third electrode are the same length. 9) The fourth electrode and the sixth electrode are the same length. 10) The second electrode and the fourth electrode arranged adjacent to the third electrode have different lengths.

[0046] 11) The first electrode, the second electrode, and the third electrode are arranged in the order of the first electrode, the second electrode, and the third electrode. Also, the fourth electrode, the fifth electrode, and the sixth electrode are arranged in the order of the fourth electrode, the fifth electrode, and the sixth electrode. 12) The first, second, and third electrodes are disposed at equal intervals, and the fourth, fifth, and sixth electrodes are disposed at equal intervals. 13) The center distance between the first electrode and the second electrode, the center distance between the second electrode and the third electrode, the center distance between the fourth electrode and the fifth electrode, and the center distance between the fifth electrode and the sixth electrode are each 13.0 mm or more and 53.5 mm or less. 14) The first electrode, second electrode, third electrode, fourth electrode, fifth electrode, and sixth electrode are arranged in a direction in which a plurality of substrates 200 are stacked and held (perpendicular to the processing chamber 201). 15) The tip of the second electrode is positioned lower than the tip of the first electrode.

[0047] 16) The tip of the fifth electrode is positioned lower than the tip of the fourth electrode. 17) The tip of the fifth electrode is positioned lower than the tip of the second electrode. 18) The tip of the second electrode is positioned lower than the tip of the third electrode. 19) The tip of the fifth electrode is positioned lower than the tip of the sixth electrode. 20) The tip of the first electrode and the tip of the fourth electrode are positioned at the same height.

[0048] 21) The tip of the third electrode and the tip of the sixth electrode are positioned at the same height. 22) The tip of the second electrode and the tip of the fifth electrode are positioned at a position that is 0.5% to 6% lower than the output wavelength of the applied high frequency power source from the position of the substrate held on the topmost level of the multiple substrates 200 that are stacked and held. 23) The frequency of the high frequency power applied to the first electrode, the second electrode, the fourth electrode, and the fifth electrode shall be 25 MHz or more and 35 MHz or less. 24) The first electrode group and the second electrode group are provided outside a processing chamber 201 in which a substrate 200 is processed, and are configured to generate plasma within the processing chamber 201. 25) A heating unit 207 for heating the substrate 200 is provided, and the first electrode group and the second electrode group are provided between the processing chamber 201 and the heating unit 207.

[0049] As described above, when the electrode 300 is appropriately configured, the electric field generated between the inner wall of the reaction tube 203 near the electrode 300 and the wafer 200 is uniformly and strongly distributed, so that the density of the plasma 302 is high and uniformly distributed, and the efficiency, quality, and uniformity of the substrate processing can be improved at the same time. Furthermore, when the tips of the second type electrode 300-2 and the third type electrode 300-3 are configured at positions 1.5 to 4.5% lower than the position of the uppermost wafer with respect to the output wavelength of the high frequency power supply 320, it is possible to simultaneously achieve even higher efficiency, quality, and uniformity.

[0050] Here, the pressure inside the furnace during substrate processing is preferably controlled in the range of 10 Pa or more and 300 Pa or less. This is because, when the pressure inside the furnace is lower than 10 Pa, the mean free path of the gas molecules becomes longer than the Debye length of the plasma, and the plasma directly hitting the furnace wall becomes prominent, making it difficult to suppress the generation of particles. Also, when the pressure inside the furnace is higher than 300 Pa, the plasma generation efficiency becomes saturated, so that even if a reactive gas is supplied, the amount of plasma generation does not change, resulting in wasteful consumption of the reactive gas, and at the same time, the mean free path of the gas molecules becomes shorter, which reduces the transport efficiency of the plasma active species to the wafer.

[0051] (Electrode fixing jig) Next, the electrode fixture 301 as an electrode fixing jig for fixing the electrode 300 will be described with reference to Fig. 3 and Fig. 5. As shown in Fig. 3(a) and (b) and Fig. 5(a) and (b), the openings 305 of the electrodes 300 are hooked onto protrusions 310 provided on the inner wall surface of the electrode fixture 301, which is a curved electrode fixing jig, and slid to fix the electrodes 300, and the electrodes 300 are united with the electrode fixture 301 to form a unit (hook-type electrode unit) and are installed on the outer periphery of the reaction tube 203. Quartz and a nickel alloy are used as materials for the electrode fixture 301 and the electrode 300, respectively.

[0052] Electrode fixture 301 is preferably configured to have a thickness in the range of 1 mm to 5 mm so as to have sufficient strength and not significantly reduce the efficiency of wafer heating by heater 207. If electrode fixture 301 is less than 1 mm thick, it will not be possible to obtain a predetermined strength against its own weight, temperature changes, etc., and if it is configured to be thicker than 5 mm, it will absorb the thermal energy radiated from heater 207, making it impossible to perform appropriate heat treatment on wafer 200.

[0053] The electrode fixture 301 has a plurality of protrusions 310 as rivet-shaped fixing parts for fixing the electrode 300 on the inner wall surface on the reaction tube side. The protrusions 310 are composed of a protrusion head 311 and a protrusion shaft 312. The maximum width of the protrusion head 311 is smaller than the diameter of the circular notch 303 of the opening 305 of the electrode 300, and the maximum width of the protrusion shaft 312 is smaller than the width of the slide notch 304. The opening 305 of the electrode 300 is shaped like a keyhole, and the slide notch 304 can guide the protrusion shaft 312 when it slides, and the protrusion head 311 is structured not to come out of the slide notch 304. In other words, the electrode fixing jig has a fixing portion equipped with a protrusion head 311, which is a tip portion that prevents the electrode 300 from slipping out of the protrusion shaft portion 312, which is a columnar portion to which the electrode 300 is fixed. It is clear that the shapes of the opening 305 and the protrusion head 311 described above are not limited to the shapes shown in Figures 3 and 5, as long as the electrode 300 can be fixed to the electrode fixing jig 301. For example, the protrusion head 311 may have a convex shape like a hammer or a thorn.

[0054] In order to keep the distance between the electrode fixture 301 or the reaction tube 203 and the electrode 300 constant, the electrode fixture 301 or the electrode 300 may have a spacer or an elastic body such as a spring between them, or these may be integrated with the electrode fixture 301 or the electrode 300. In this embodiment, a spacer 330 as shown in Fig. 5(b) is integrated with the electrode fixture 301. It is more effective to have a plurality of spacers 330 for one electrode in order to keep the distance between them constant.

[0055] In order to obtain a high substrate processing capacity at a substrate temperature of 500° C. or less, it is desirable that the occupancy rate of the electrode fixture 301 is an approximately arc shape with a central angle of 30° to 240°, and that the electrode fixture 301 is arranged to avoid the exhaust pipe 231, which is an exhaust port, and the nozzles 249a, 249b, etc., in order to prevent the generation of particles. In other words, the electrode fixture 301 is arranged on the outer periphery of the reaction tube 203 except for the positions where the nozzles 249a, 249b, which are gas supply units provided in the reaction tube 203, and the exhaust pipe 231, which is a gas exhaust unit, are installed. In this embodiment, two electrode fixtures 301 with a central angle of 110° are arranged symmetrically on the left and right.

[0056] (Spacer) 5(a) and (b) show a spacer 330 for fixing the electrode 300 at a fixed distance to the electrode fixture 301, which is an electrode fixing jig, and the outer wall of the reaction tube 203. For example, the spacer 330 is made of a cylindrical quartz material and integrated with the electrode fixture 301, and the electrode 300 is fixed to the electrode fixture 301 by abutting against the electrode 300. As long as the electrode 300 can be fixed at a fixed distance to the electrode fixture 301 and the reaction tube 203, the spacer 330 may be in any form and integrated with either the electrode 300 or the electrode fixture 301. For example, the spacer 330 may be made of a semi-cylindrical quartz material and integrated with the electrode fixture 301 to fix the electrode 300, or the spacer 330 may be made of a metal plate such as SUS and integrated with the electrode to fix the electrode 300. In any case, since the protrusion 310 and the spacer are provided, the positioning of the electrode 300 becomes easy, and when the electrode 300 deteriorates, only the electrode 300 can be replaced, which reduces costs. Here, the spacer 330 may be included in the above-mentioned electrode unit.

[0057] (Exhaust section) As shown in FIG. 1, the reaction tube 203 is provided with an exhaust pipe 231 for exhausting the atmosphere in the processing chamber 201. A vacuum pump 246 as a vacuum exhaust device is connected to the exhaust pipe 231 via a pressure sensor 245 as a pressure detector (pressure detection unit) for detecting the pressure in the processing chamber 201 and an APC (Auto Pressure Controller) valve 244 as an exhaust valve (pressure adjustment unit). The APC valve 244 is a valve configured to be able to perform evacuation and stop evacuation in the processing chamber 201 by opening and closing the valve while the vacuum pump 246 is in operation, and further, to adjust the pressure in the processing chamber 201 by adjusting the valve opening based on pressure information detected by the pressure sensor 245 while the vacuum pump 246 is in operation. An exhaust system is mainly configured by the exhaust pipe 231, the APC valve 244, and the pressure sensor 245. The vacuum pump 246 may be included in the exhaust system. The exhaust pipe 231 is not limited to being provided in the reaction tube 203, but may be provided in the manifold 209 in the same manner as the nozzles 249a and 249b.

[0058] (Peripheral Devices) Below the manifold 209, a seal cap 219 is provided as a furnace port cover capable of air-tightly closing the lower end opening of the manifold 209. The seal cap 219 is configured to abut against the lower end of the manifold 209 from below in the vertical direction. The seal cap 219 is made of a metal such as SUS and is formed in a disk shape. An O-ring 220b is provided on the upper surface of the seal cap 219 as a seal member that abuts against the lower end of the manifold 209.

[0059] A rotation mechanism 267 for rotating the boat 217 is installed on the opposite side of the seal cap 219 from the processing chamber 201. A rotation shaft 255 of the rotation mechanism 267 is connected to the boat 217 through the seal cap 219. The rotation mechanism 267 is configured to rotate the wafers 200 by rotating the boat 217. The seal cap 219 is configured to be raised and lowered in the vertical direction by a boat elevator 115 as a lifting mechanism vertically installed outside the reaction tube 203. The boat elevator 115 is configured to be able to load and unload the boat 217 into and out of the processing chamber 201 by lifting and lowering the seal cap 219.

[0060] The boat elevator 115 is configured as a transfer device (transfer mechanism) that transfers the boat 217, i.e., the wafers 200, into and out of the processing chamber 201. A shutter 219s is provided below the manifold 209 as a furnace port cover that can airtightly close the lower end opening of the manifold 209 while the seal cap 219 is lowered by the boat elevator 115. The shutter 219s is made of a metal such as SUS and is formed in a disk shape. An O-ring 220c is provided on the upper surface of the shutter 219s as a seal member that contacts the lower end of the manifold 209. The opening and closing operation (lifting and lowering operation, rotating operation, etc.) of the shutter 219s is controlled by a shutter opening and closing mechanism 115s.

[0061] A temperature sensor 263 serving as a temperature detector is installed inside the reaction tube 203. By adjusting the power supply to the heater 207 based on temperature information detected by the temperature sensor 263, the temperature distribution in the process chamber 201 becomes a desired one. The temperature sensor 263 is installed along the inner wall of the reaction tube 203, similar to the nozzles 249a and 249b.

[0062] (Control device) Next, the control device will be described with reference to Fig. 6. As shown in Fig. 6, the controller 121, which is a control unit (control device), is configured as a computer equipped with a CPU (Central Processing Unit) 121a, a RAM (Random Access Memory) 121b, a storage device 121c, and an I / O port 121d. The RAM 121b, the storage device 121c, and the I / O port 121d are configured to be able to exchange data with the CPU 121a via an internal bus 121e. An input / output device 122 configured as, for example, a touch panel, is connected to the controller 121.

[0063] The storage device 121c is composed of, for example, a flash memory, a hard disk drive (HDD), a solid state drive (SSD), etc. A control program for controlling the operation of the substrate processing apparatus, a process recipe in which the procedure and conditions of a film forming process described later are described, etc. are readably stored in the storage device 121c. The process recipe is a combination of procedures in various processes (film forming processes) described later that are executed by the controller 121 in the substrate processing apparatus to obtain a predetermined result, and functions as a program. Hereinafter, the process recipe, the control program, etc. are collectively referred to simply as a program. In addition, the process recipe is also simply referred to as a recipe. In this specification, when the word program is used, it may include only a recipe, only a control program, or both. The RAM 121b is configured as a memory area (work area) in which the programs and data read by the CPU 121a are temporarily stored.

[0064] The I / O port 121d is connected to the above-mentioned MFCs 241a to 241d, valves 243a to 243d, pressure sensor 245, APC valve 244, vacuum pump 246, heater 207, temperature sensor 263, rotation mechanism 267, boat elevator 115, shutter opening / closing mechanism 115s, high frequency power supply 320, and the like.

[0065] The CPU 121a is configured to read and execute a control program from the storage device 121c, and to read a recipe from the storage device 121c in response to an input of an operation command from the input / output device 122, etc. The CPU 121a is configured to be capable of controlling the control of the rotation mechanism 267, the flow rate adjustment operation of various gases by the MFCs 241a to 241d, the opening and closing operations of the valves 243a to 243d, the opening and closing operation of the APC valve 244 and the pressure adjustment operation by the APC valve 244 based on the pressure sensor 245, the start and stop of the vacuum pump 246, the temperature adjustment operation of the heater 207 based on the temperature sensor 263, the forward and reverse rotation, rotation angle and rotation speed adjustment operation of the boat 217 by the rotation mechanism 267, the lifting and lowering operation of the boat 217 by the boat elevator 115, the opening and closing operation of the shutter 219s by the shutter opening and closing mechanism 115s, the power supply of the high frequency power source 320, etc., in accordance with the contents of the read recipe.

[0066] The controller 121 can be configured by installing the above-mentioned program stored in an external storage device (for example, a magnetic disk such as a hard disk, an optical disk such as a CD, a magneto-optical disk such as an MO, or a semiconductor memory such as a USB memory) 123 into a computer. The storage device 121c and the external storage device 123 are configured as computer-readable recording media. Hereinafter, these are collectively referred to simply as recording media. When the term recording media is used in this specification, it may include only the storage device 121c alone, only the external storage device 123 alone, or both. The program may be provided to the computer using a communication means such as the Internet or a dedicated line, without using the external storage device 123.

[0067] (2) Substrate processing An example of a process for forming a film on a substrate as one step of a manufacturing process of a semiconductor device using the above-mentioned substrate processing apparatus will be described with reference to Fig. 7. In the following description, the operation of each part constituting the substrate processing apparatus is controlled by a controller 121.

[0068] 7 may be expressed as follows for convenience in this specification. Similar notations will be used in the following explanations of modified examples and other embodiments.

[0069] (raw material gas → reactive gas) × n In this specification, the term "wafer" may refer to the wafer itself or to a laminate of the wafer and a predetermined layer, film, etc. formed on the surface thereof. In this specification, the term "surface of a wafer" may refer to the surface of the wafer itself or the surface of a specific layer, film, etc. formed on the wafer. In this specification, the term "substrate" is synonymous with the term "wafer."

[0070] (Loading step: S1) When a plurality of wafers 200 are loaded into the boat 217 (wafer charge), the shutter 219s is moved by the shutter opening / closing mechanism 115s to open the lower end opening of the manifold 209 (shutter open). Thereafter, as shown in Fig. 1, the boat 217 supporting the plurality of wafers 200 is lifted by the boat elevator 115 and carried into the processing chamber 201 (boat load). In this state, the seal cap 219 seals the lower end of the manifold 209 via the O-ring 220b.

[0071] (Pressure and temperature adjustment step: S2) The inside of the processing chamber 201 is evacuated (reduced pressure exhaust) by the vacuum pump 246 so that the inside of the processing chamber 201 reaches a desired pressure (vacuum level). At this time, the pressure inside the processing chamber 201 is measured by the pressure sensor 245, and the APC valve 244 is feedback-controlled (pressure adjustment) based on the measured pressure information. The vacuum pump 246 is kept in a constantly operating state at least until the film formation step described later is completed.

[0072] The inside of the processing chamber 201 is heated by the heater 207 so as to reach a desired temperature. At this time, the power supply to the heater 207 is feedback-controlled (temperature adjustment) based on temperature information detected by the temperature sensor 263 so as to achieve a desired temperature distribution inside the processing chamber 201. The heating inside the processing chamber 201 by the heater 207 continues at least until a film formation step, which will be described later, is completed. However, when the film formation step is performed under a temperature condition below room temperature, the heating inside the processing chamber 201 by the heater 207 does not need to be performed. Note that when only processing is performed under such a temperature, the heater 207 is unnecessary and does not need to be installed in the substrate processing apparatus. In this case, the configuration of the substrate processing apparatus can be simplified.

[0073] Next, the rotation mechanism 267 starts to rotate the boat 217 and the wafers 200. The rotation mechanism 267 continues to rotate the boat 217 and the wafers 200 at least until the film forming step, which will be described later, is completed.

[0074] (Deposition steps: S3, S4, S5, S6) Thereafter, the film forming step is performed by sequentially executing steps S3, S4, S5, and S6.

[0075] (Source gas supply steps: S3, S4) In step S 3 , a source gas is supplied to the wafer 200 in the processing chamber 201 .

[0076] The valve 243a is opened to allow the source gas to flow into the gas supply pipe 232a. The flow rate of the source gas is adjusted by the MFC 241a, and the source gas is supplied from the gas supply hole 250a into the processing chamber 201 via the nozzle 249a, and is exhausted from the exhaust pipe 231. At this time, the source gas is supplied to the wafer 200. At the same time, the valve 243c may be opened to allow an inert gas to flow into the gas supply pipe 232c. The flow rate of the inert gas is adjusted by the MFC 241c, and the inert gas is supplied into the processing chamber 201 together with the source gas, and is exhausted from the exhaust pipe 231.

[0077] In order to prevent the source gas from entering the nozzle 249b, the valve 243d may be opened to allow an inert gas to flow into the gas supply pipe 232d. The inert gas is supplied into the process chamber 201 through the gas supply pipe 232d and the nozzle 249b, and is exhausted from the exhaust pipe 231.

[0078] The processing conditions in this step are as follows: Treatment temperature: room temperature (25°C) to 550°C, preferably 400 to 500°C Treatment pressure: 1 to 4000 Pa, preferably 100 to 1000 Pa Raw gas supply flow rate: 0.1 to 3 slm Raw material gas supply time: 1 to 100 seconds, preferably 1 to 50 seconds Inert gas supply flow rate (per gas supply pipe): 0 to 10 slm Examples are given below.

[0079] In this specification, the expression of a numerical range such as "25 to 550°C" means that the lower limit and the upper limit are included in the range. Therefore, for example, "25 to 550°C" means "25°C or more and 550°C or less". The same applies to other numerical ranges. In this specification, the process temperature means the temperature of the wafer 200 or the temperature inside the process chamber 201, and the process pressure means the pressure inside the process chamber 201. A gas supply flow rate of 0 slm means that the gas is not supplied. These also apply to the following explanations.

[0080] By supplying the source gas to the wafer 200 under the above-mentioned conditions, a first layer is formed on the wafer 200 (a surface undercoat film). For example, when a silicon (Si)-containing gas described later is used as the source gas, a Si-containing layer is formed as the first layer.

[0081] After the first layer is formed, the valve 243a is closed to stop the supply of the source gas into the processing chamber 201. At this time, the APC valve 244 is left open, and the processing chamber 201 is evacuated by the vacuum pump 246 to remove the source gas and reaction by-products remaining in the processing chamber 201 that have not reacted or that have contributed to the formation of the first layer from the processing chamber 201 (S4). Furthermore, the valves 243c and 243d are opened to supply an inert gas into the processing chamber 201. The inert gas acts as a purge gas.

[0082] As the raw material gas, for example, aminosilane-based gases such as tetrakis(dimethylamino)silane (Si[N(CH3)2]4, abbreviated as 4DMAS) gas, tris(dimethylamino)silane (Si[N(CH3)2]3H, abbreviated as 3DMAS) gas, bis(dimethylamino)silane (Si[N(CH3)2]2H2, abbreviated as BDMAS) gas, bisdi(ethylamino)silane (Si[N(C2H5)2]2H2, abbreviated as BDEAS) gas, bis(tertiarybutyl)aminosilane (SiH2[NH(C4H9)]2, abbreviated as BTBAS) gas, and (diisopropylamino)silane (SiH3[N(C3H7)2], abbreviated as DIPAS) gas can be used. As the raw material gas, one or more of these can be used.

[0083] Also, as the raw material, for example, chlorosilane-based gases such as monochlorosilane (SiH3Cl, abbreviated as MCS) gas, dichlorosilane (SiH2Cl2, abbreviated as DCS) gas, trichlorosilane (SiHCl3, abbreviated as TCS) gas, tetrachlorosilane (SiCl4, abbreviated as STC) gas, hexachlorodisilane (Si2Cl6, abbreviated as HCDS) gas, and octachlorotrisilane (Si3Cl8, abbreviated as OCTS) gas, fluorosilane-based gases such as tetrafluorosilane (SiF4) gas and difluorosilane (SiH2F2) gas, bromosilane-based gases such as tetrabromosilane (SiBr4) gas and dibromosilane (SiH2Br2) gas, and iodosilane-based gases such as tetraiodosilane (SiI4) gas and diiodosilane (SiH2I2) gas can be used. That is, as the raw material gas, a halosilane-based gas can be used. As the source gas, one or more of these can be used.

[0084] As the source gas, for example, silicon hydride gas such as monosilane (SiH4, abbreviation: MS) gas, disilane (Si2H6, abbreviation: DS) gas, trisilane (Si3H8, abbreviation: TS) gas, etc. As the source gas, one or more of these can be used.

[0085] As the inert gas, for example, nitrogen (N2) gas or a rare gas such as argon (Ar) gas, helium (He) gas, neon (Ne) gas, xenon (Xe) gas, etc. This also applies to each step described later.

[0086] (Reaction gas supply steps: S5, S6) After the film formation process is completed, a plasma-excited reactive gas is supplied to the wafer 200 in the processing chamber 201 (S5).

[0087] In this step, the valves 243b to 243d are controlled to open and close in the same procedure as the valves 243a, 243c, and 243d in step S3. The reactive gas is adjusted in flow rate by the MFC 241b and supplied from the gas supply hole 250b to the processing chamber 201 via the nozzle 249b. At this time, high frequency power (RF power, frequency 27.12 MHz in this embodiment) is supplied (applied) from the high frequency power source 320 to the electrode 300. The reactive gas supplied to the processing chamber 201 is excited to a plasma state inside the processing chamber 201, supplied to the wafer 200 as active species, and exhausted from the exhaust pipe 231.

[0088] The processing conditions in this step are as follows: Treatment temperature: room temperature (25°C) to 550°C, preferably 400 to 500°C Treatment pressure: 1 to 300 Pa, preferably 10 to 100 Pa Reactive gas supply flow rate: 0.1 to 10 slm Reactive gas supply time: 1 to 100 seconds, preferably 1 to 50 seconds Inert gas supply flow rate (per gas supply pipe): 0 to 10 slm RF power: 50~1000W RF frequency: 27.12MHz Examples are given below.

[0089] By exciting the reactive gas into a plasma state and supplying it to the wafer 200 under the above-mentioned conditions, a modification process is performed on the first layer formed on the surface of the wafer 200 by the action of ions generated in the plasma and electrically neutral active species, and the first layer is modified into a second layer.

[0090] When an oxidizing gas (oxidizing agent) such as an oxygen (O)-containing gas is used as the reactive gas, the O-containing gas is excited into a plasma state to generate O-containing active species, which are then supplied to the wafer 200. In this case, an oxidation process is performed as a modification process on the first layer formed on the surface of the wafer 200 by the action of the O-containing active species. In this case, when the first layer is, for example, a Si-containing layer, the Si-containing layer as the first layer is modified into a silicon oxide layer (SiO layer) as the second layer.

[0091] Furthermore, when a nitriding gas (nitriding agent) such as a gas containing nitrogen (N) and hydrogen (H) is used as the reactive gas, the N- and H-containing gas is excited into a plasma state to generate N- and H-containing active species, which are then supplied to the wafer 200. In this case, a nitriding process is performed as a modification process on the first layer formed on the surface of the wafer 200 by the action of the N- and H-containing active species. In this case, when the first layer is, for example, a Si-containing layer, the Si-containing layer as the first layer is modified into a silicon nitride layer (SiN layer) as the second layer.

[0092] After the first layer is reformed into the second layer, the valve 243b is closed to stop the supply of the reaction gas. In addition, the supply of RF power to the electrode 300 is stopped. Then, the reaction gas and reaction by-products remaining in the process chamber 201 are removed from the process chamber 201 using the same process procedure and process conditions as in step S4 (S6).

[0093] As described above, for example, an O-containing gas or an N- and H-containing gas can be used as the reaction gas. For example, oxygen (O2) gas, nitrous oxide (NO) gas, nitrogen monoxide (NO2) gas, ozone (O3) gas, hydrogen peroxide (H2O2) gas, water vapor (H2O), ammonium hydroxide (NH4(OH)) gas, carbon monoxide (CO) gas, carbon dioxide (CO2) gas, etc. can be used as the O-containing gas. For example, ammonia (NH3) gas, diazene (N2H2) gas, hydrazine (N2H4) gas, N3H8 gas, or other hydrogen nitride gas can be used as the N- and H-containing gas. One or more of these can be used as the reaction gas.

[0094] As the inert gas, for example, the various gases exemplified in step S4 can be used.

[0095] (Performed a set number of times: S7) The above-mentioned steps S3, S4, S5, and S6 are performed in this order non-simultaneously, i.e., without synchronization, to form one cycle, and this cycle is performed a predetermined number of times (n times, n is an integer equal to or greater than 1), i.e., one or more times, to form a film with a predetermined composition and a predetermined thickness on the wafer 200. The above-mentioned cycle is preferably repeated a plurality of times. That is, it is preferable to make the thickness of the first layer formed per cycle smaller than the desired thickness, and to repeat the above-mentioned cycle a plurality of times until the thickness of the film formed by stacking the second layer reaches the desired thickness. Note that, when a Si-containing layer, for example, is formed as the first layer, and a SiO layer, for example, is formed as the second layer, a silicon oxide film (SiO film) is formed as the film. Also, when a Si-containing layer, for example, is formed as the first layer, and a SiN layer, for example, is formed as the second layer, a silicon nitride film (SiN film) is formed as the film.

[0096] (Atmospheric pressure recovery step: S8) When the above-mentioned film formation process is completed, an inert gas is supplied into the processing chamber 201 from each of the gas supply pipes 232c and 232d, and exhausted from the exhaust pipe 231. As a result, the processing chamber 201 is purged with the inert gas, and the reaction gas remaining in the processing chamber 201 is removed from the processing chamber 201 (inert gas purge). Thereafter, the atmosphere in the processing chamber 201 is replaced with the inert gas (inert gas replacement), and the pressure in the processing chamber 201 is returned to normal pressure (return to atmospheric pressure: S8).

[0097] (Exit step: S9) Thereafter, the seal cap 219 is lowered by the boat elevator 115 to open the lower end of the manifold 209, and the processed wafers 200 supported by the boat 217 are unloaded from the lower end of the manifold 209 to the outside of the reaction tube 203 (boat unloading). After the boat unloading, the shutter 219s is moved and the lower end opening of the manifold 209 is sealed by the shutter 219s via the O-ring 220c (shutter close). After being unloaded to the outside of the reaction tube 203, the processed wafers 200 are taken out of the boat 217 (wafer discharging). After the wafer discharging, an empty boat 217 may be loaded into the processing chamber 201.

[0098] Here, the pressure inside the furnace during substrate processing is preferably controlled in the range of 10 Pa or more and 300 Pa or less. This is because, when the pressure inside the furnace is lower than 10 Pa, the mean free path of the gas molecules becomes longer than the Debye length of the plasma, and the plasma directly hitting the furnace wall becomes prominent, making it difficult to suppress the generation of particles. Also, when the pressure inside the furnace is higher than 300 Pa, the plasma generation efficiency becomes saturated, so that even if a reactive gas is supplied, the amount of plasma generation does not change, resulting in wasteful consumption of the reactive gas, and at the same time, the mean free path of the gas molecules becomes shorter, which reduces the transport efficiency of the plasma active species to the wafer.

[0099] (3) Effects of this embodiment By configuring the range of the area of ​​the wafers 200 loaded in the boat 217 to be 12% of the output wavelength of the high frequency power supply 320, configuring the tips of the second type electrode 300-2 and the third type electrode 300-3 at a position 0.5 to 6% lower than the position of the top wafer of the high frequency power supply 320 of the output wavelength, and configuring the tip of the zeroth type electrode 300-0 at a position equal to or higher than the position of the top wafer, the electric field generated between the inner wall of the reaction tube 203 near the electrode 300 and the wafers 200 is uniformly and strongly distributed in the vertical direction (the direction in which the substrates are loaded), and the density of the plasma 302 is high and uniformly distributed in the vertical direction, making it possible to simultaneously improve the efficiency and quality of the substrate processing and the uniformity between the substrates.

[0100] Although the embodiments of the present disclosure have been specifically described above, the present disclosure is not limited to the above-described embodiments and can be modified in various ways without departing from the spirit and scope of the present disclosure.

[0101] Also, for example, in the above embodiment, an example in which the reactants are supplied after the raw materials are supplied has been described. The present disclosure is not limited to such an embodiment, and the order in which the raw materials and reactants are supplied may be reversed. In other words, the raw materials may be supplied after the reactants are supplied. By changing the supply order, it is possible to change the film quality and composition ratio of the film to be formed.

[0102] The present disclosure is suitably applicable not only to the case of forming an SiO film or SiN film on the wafer 200, but also to the case of forming an Si-based oxide film, such as a silicon oxycarbide film (SiOC film), a silicon oxycarbonitride film (SiOCN film), or a silicon oxynitride film (SiON film), on the wafer 200.

[0103] For example, other than or in addition to the above-mentioned gases, nitrogen (N)-containing gas such as ammonia (NH3) gas, carbon (C)-containing gas such as propylene (C3H6) gas, boron (B)-containing gas such as boron trichloride (BCl3) gas, etc. can be used to form, for example, a SiN film, a SiON film, a SiOCN film, a SiOC film, a SiCN film, a SiBN film, a SiBCN film, a BCN film, etc. The order in which each gas is flowed can be changed as appropriate. Even when forming these films, the films can be formed under the same processing conditions as in the above-mentioned embodiment, and the same effects as in the above-mentioned embodiment can be obtained. In these cases, the above-mentioned reactive gas can be used as the oxidizing agent as the reactive gas.

[0104] In addition, the present disclosure can also be suitably applied to the case of forming a metal oxide film or a metal nitride film containing a metal element such as titanium (Ti), zirconium (Zr), hafnium (Hf), tantalum (Ta), niobium (Nb), aluminum (Al), molybdenum (Mo), or tungsten (W) on the wafer 200. That is, the present disclosure relates to a method for forming a TiO film, a TiOC film, a TiOCN film, a TiON film, a TiN film, a TiSiN film, a TiBN film, a TiBCN film, a ZrO film, a ZrOC film, a ZrOCN film, a ZrON film, a ZrN film, a ZrSiN film, a ZrBN film, a ZrBCN film, a HfO film, a HfOC film, a HfOCN film, a HfON film, a HfN film, a HfSiN film, a HfBN film, a HfBCN film, a TaO film, a TaOC film, a TaOCN film, a TaON film, a TaN film, a TaSiN film, a TaBN film, a TaBCN film, The present invention can also be suitably applied to the formation of a NbO film, a NbOC film, a NbOCN film, a NbON film, a NbN film, a NbSiN film, a NbBN film, a NbBCN film, an AlO film, an AlOC film, an AlOCN film, an AlON film, an AlN film, an AlSiN film, an AlBN film, an AlBCN film, a MoO film, a MoOC film, a MoOCN film, a MoON film, a MoN film, a MoSiN film, a MoBN film, a MoBCN film, a WO film, a WOC film, a WOCN film, a WON film, a WN film, a WSiN film, a WBN film, a WBCN film, and the like.

[0105] In these cases, for example, the raw material gas may be tetrakis(dimethylamino)titanium (Ti[N(CH3)2]4, abbreviated as TDMAT) gas, tetrakis(ethylmethylamino)hafnium (Hf[N(C2H5)(CH3)]4, abbreviated as TEMAH) gas, tetrakis(ethylmethylamino)zirconium (Zr[N(C2H5)(CH3)]4, abbreviated as TEMAZ) gas, trimethylaluminum (Al(CH3)3, abbreviated as TMA) gas, titanium tetrachloride (TiCl4) gas, hafnium tetrachloride (HfCl4) gas, etc.

[0106] In other words, the present disclosure can be suitably applied to the formation of semi-metallic films containing semi-metallic elements and metallic films containing metallic elements. The process and conditions of these film formation processes can be the same as those of the film formation processes shown in the above-mentioned embodiments and modified examples. In these cases, the same effects as those of the above-described embodiment can be obtained.

[0107] It is preferable that the recipes used in the film forming process are prepared individually according to the process contents and stored in the storage device 121c via an electric communication line or an external storage device 123. Then, when starting various processes, it is preferable that the CPU 121a appropriately selects an appropriate recipe according to the process contents from among the multiple recipes stored in the storage device 121c. This makes it possible to form thin films of various film types, composition ratios, film qualities, and thicknesses in a versatile and reproducible manner using a single substrate processing device. It is also possible to reduce the burden on the operator and quickly start various processes while avoiding operational errors.

[0108] The above-mentioned recipes may not only be newly created, but may also be prepared by modifying an existing recipe that has already been installed in the substrate processing apparatus. When modifying a recipe, the modified recipe may be installed in the substrate processing apparatus via an electric communication line or a recording medium on which the recipe has been recorded. Also, an existing recipe that has already been installed in the substrate processing apparatus may be directly modified by operating the input / output device 122 provided in the existing substrate processing apparatus.

[0109] <Preferred aspects of the present disclosure> Preferred aspects of the present disclosure will be described below.

[0110] (Appendix 1) According to one aspect of the present disclosure, An electrode for generating plasma, An electrode is provided having: a first electrode group consisting of at least one first electrode to which an arbitrary potential is applied, a second electrode having a length different from that of the first electrode to which the arbitrary potential is applied, and at least one third electrode to which a reference potential is applied; a second electrode group consisting of at least one fourth electrode to which an arbitrary potential is applied, at least one fifth electrode having a length different from that of the fourth electrode to which the arbitrary potential is applied, and at least one sixth electrode to which a reference potential is applied.

[0111] (Appendix 2) In the electrode of Appendix 1, preferably, The second electrode is of a shorter length than the first electrode.

[0112] (Appendix 3) In the electrode of claim 1 or 2, preferably The fifth electrode has a shorter length than the fourth electrode.

[0113] (Appendix 4) In the electrode according to any one of Supplementary Notes 1 to 3, preferably, The fifth electrode has a shorter length than the second electrode.

[0114] (Appendix 5) In the electrode according to any one of Supplementary Notes 1 to 4, preferably, The second electrode has a shorter length than the third electrode.

[0115] (Appendix 6) In the electrode according to any one of Supplementary Notes 1 to 5, preferably, The fifth electrode has a shorter length than the sixth electrode.

[0116] (Appendix 7) In the electrode according to any one of Supplementary Notes 1 to 6, preferably, The first electrode and the fourth electrode have the same length.

[0117] (Appendix 8) In the electrode according to any one of Supplementary Notes 1 to 7, preferably, The third electrode and the sixth electrode have the same length.

[0118] (Appendix 9) In the electrode according to any one of Supplementary Notes 1 to 8, preferably, The first electrode and the third electrode have the same length.

[0119] (Appendix 10) In the electrode according to any one of Supplementary Notes 1 to 9, preferably, The fourth electrode and the sixth electrode have the same length.

[0120] (Appendix 11) In the electrode according to any one of Supplementary Notes 1 to 10, preferably, The second electrode and the fourth electrode disposed adjacent to the third electrode have different lengths.

[0121] (Appendix 12) In the electrode according to any one of Supplementary Notes 1 to 11, preferably, The first electrode, the second electrode, and the third electrode are arranged in the order of the first electrode, the second electrode, and the third electrode, and the fourth electrode, the fifth electrode, and the sixth electrode are arranged in the order of the fourth electrode, the fifth electrode, and the sixth electrode.

[0122] (Appendix 13) In the electrode according to any one of Supplementary Notes 1 to 12, preferably, The first electrode, the second electrode, and the third electrode are disposed at equal intervals, and the fourth electrode, the fifth electrode, and the sixth electrode are disposed at equal intervals.

[0123] (Appendix 14) In the electrode according to any one of Supplementary Notes 1 to 13, preferably, The center distance between the first electrode and the second electrode, the center distance between the second electrode and the third electrode, the center distance between the fourth electrode and the fifth electrode, and the center distance between the fifth electrode and the sixth electrode are 13.0 mm or more and 53.5 mm or less.

[0124] (Appendix 15) In the electrode according to any one of Supplementary Notes 1 to 14, preferably, The first electrode, the second electrode, the third electrode, the fourth electrode, the fifth electrode, and the sixth electrode are disposed in a direction in which a plurality of substrates are stacked and held (a direction perpendicular to the processing chamber).

[0125] (Appendix 16) In any one of the electrodes according to Supplementary Notes 1 to 15, a tip of the second electrode is preferably arranged at a lower position than a tip of the first electrode.

[0126] (Appendix 17) In the electrode according to any one of Supplementary Notes 1 to 16, preferably, The tip of the fifth electrode is disposed at a lower position than the tip of the fourth electrode.

[0127] (Appendix 18) In the electrode according to any one of Supplementary Notes 1 to 17, preferably, The tip of the fifth electrode is disposed at a lower position than the tip of the second electrode.

[0128] (Appendix 19) In the electrode according to any one of Supplementary Notes 1 to 18, preferably, The tip of the second electrode is disposed at a lower position than the tip of the third electrode.

[0129] (Appendix 20) In the electrode according to any one of Supplementary Notes 1 to 19, preferably, The tip of the fifth electrode is disposed at a lower position than the tip of the sixth electrode.

[0130] (Appendix 21) In the electrode according to any one of Supplementary Notes 1 to 20, preferably, The tip of the first electrode and the tip of the fourth electrode are disposed at the same height.

[0131] (Appendix 22) In the electrode according to any one of Supplementary Notes 1 to 21, preferably, The tip of the third electrode and the tip of the sixth electrode are disposed at the same height.

[0132] (Appendix 23) In the electrode according to any one of Supplementary Notes 1 to 22, preferably, The tip of the second electrode and the tip of the fifth electrode are positioned at a position that is 0.5% to 6% lower than the position of the uppermost substrate among the plurality of substrates stacked and held, relative to the output wavelength of the applied high frequency power source.

[0133] (Appendix 24) In the electrode according to any one of Supplementary Notes 1 to 23, preferably, The frequency of the high frequency power applied to the first electrode, the second electrode, the fourth electrode, and the fifth electrode is set to be equal to or higher than 25 MHz and equal to or lower than 35 MHz.

[0134] (Appendix 25) In the electrode according to any one of Supplementary Notes 1 to 24, preferably, The first electrode group and the second electrode group are provided outside a processing chamber in which a substrate is processed, and are configured to generate plasma within the processing chamber.

[0135] (Appendix 26) In the electrode according to any one of Supplementary Notes 1 to 25, preferably, A heating unit for heating the substrate is provided, The first electrode group and the second electrode group are provided between the processing chamber and the heating unit.

[0136] (Appendix 27) According to one aspect of the present disclosure, a processing chamber for processing a substrate; a plasma generating unit having electrodes for generating plasma, the first electrode group being composed of at least one first electrode to which an arbitrary potential is applied, a second electrode having a length different from that of the first electrode to which the arbitrary potential is applied, and at least one third electrode to which a reference potential is applied; a second electrode group being composed of at least one fourth electrode to which an arbitrary potential is applied, at least one fifth electrode having a length different from that of the fourth electrode to which the arbitrary potential is applied, and at least one sixth electrode to which a reference potential is applied; A substrate processing apparatus comprising:

[0137] (Appendix 28) According to one aspect of the present disclosure, There is provided a substrate processing apparatus comprising the electrode according to any one of claims 1 to 26.

[0138] (Appendix 29) According to one aspect of the present disclosure, carrying the substrate into a processing chamber of a substrate processing apparatus including a plasma generating unit having electrodes for generating plasma, the electrodes being a first electrode group including at least one first electrode to which an arbitrary potential is applied, a second electrode having a length different from that of the first electrode to which the arbitrary potential is applied, and at least one third electrode to which a reference potential is applied, and a second electrode group including at least one fourth electrode to which an arbitrary potential is applied, at least one fifth electrode having a length different from that of the fourth electrode to which the arbitrary potential is applied, and at least one sixth electrode to which a reference potential is applied; generating plasma in the processing chamber by the plasma generating unit; A method for manufacturing a semiconductor device having the above structure is provided.

[0139] (Appendix 30) According to one aspect of the present disclosure, carrying the substrate into a processing chamber of a substrate processing apparatus including a plasma generating unit having electrodes for generating plasma, the electrodes being a first electrode group including at least one first electrode to which an arbitrary potential is applied, a second electrode having a length different from that of the first electrode to which the arbitrary potential is applied, and at least one third electrode to which a reference potential is applied, and a second electrode group including at least one fourth electrode to which an arbitrary potential is applied, at least one fifth electrode having a length different from that of the fourth electrode to which the arbitrary potential is applied, and at least one sixth electrode to which a reference potential is applied; generating plasma in the processing chamber by the plasma generating unit; A method for processing a substrate is provided, comprising:

[0140] (Appendix 31) According to one aspect of the present disclosure, a step of carrying the substrate into a processing chamber of a substrate processing apparatus including a plasma generating unit having electrodes for generating plasma, the electrodes being a first electrode group including at least one first electrode to which an arbitrary potential is applied, a second electrode having a length different from that of the first electrode to which the arbitrary potential is applied, and at least one third electrode to which a reference potential is applied, a second electrode group including at least one fourth electrode to which an arbitrary potential is applied, at least one fifth electrode having a length different from that of the fourth electrode to which the arbitrary potential is applied, and at least one sixth electrode to which a reference potential is applied; generating plasma in the processing chamber by the plasma generating unit; A program for causing a computer to execute the above in the substrate processing apparatus is provided. [Explanation of symbols]

[0141] 300...electrode 300-0: Type 0 electrode 300-1: First type electrode 300-2: Type 2 electrode 300-3: Third type electrode

Claims

1. a processing chamber for processing a substrate; a plasma generating unit having a first electrode group for generating plasma in the processing chamber, the first electrode group being composed of at least one first electrode to which an arbitrary potential is applied and having a first length, at least one second electrode to which an arbitrary potential is applied and having a second length different from the first length, and at least one third electrode to which a reference potential is applied and having a third length the same as the first length, the first electrode being arranged in this order, the second electrode, and the third electrode; A substrate processing apparatus comprising:

2. 2. The substrate processing apparatus according to claim 1, further comprising: at least one fourth electrode to which an arbitrary potential is applied and which has a fourth length; at least one fifth electrode to which an arbitrary potential is applied and which has a fifth length different from the fourth length; and at least one sixth electrode to which a reference potential is applied and which has a sixth length which is the same as the fourth length, the second electrode group being arranged in the order of the fourth electrode, the fifth electrode, and the sixth electrode.

3. The substrate processing apparatus of claim 1 , wherein the second length is shorter than the first length.

4. The substrate processing apparatus of claim 1 , wherein the second length is shorter than the third length.

5. The substrate processing apparatus of claim 2 , wherein the first length and the fourth length are the same length.

6. The substrate processing apparatus of claim 2 , wherein the second length is longer than the fifth length.

7. The substrate processing apparatus of claim 2 , wherein the third length and the sixth length are the same length.

8. The substrate processing apparatus of claim 2 , wherein the fifth length is shorter than the fourth length.

9. The substrate processing apparatus of claim 2 , wherein the fifth length is shorter than the sixth length.

10. The substrate processing apparatus according to claim 2 , wherein each of the first electrode, the second electrode, the third electrode, the fourth electrode, the fifth electrode, and the sixth electrode is formed of a plate-shaped member.

11. The substrate processing apparatus according to claim 1 , wherein the first electrode, the second electrode, and the third electrode are arranged in a direction in which a plurality of the substrates are stacked and held.

12. The substrate processing apparatus according to claim 11 , wherein a tip of the third electrode is disposed at a position equal to or higher than a position of the substrate disposed on the uppermost stage.

13. 12. The substrate processing apparatus according to claim 11, wherein a tip of the second electrode is positioned at a position that is 0.5% to 6% lower than the position of the uppermost substrate among the plurality of substrates stacked and held, relative to the output wavelength of the applied high frequency power source.

14. The substrate processing apparatus according to claim 2 , wherein the fourth electrode, the fifth electrode, and the sixth electrode are arranged in a direction in which a plurality of the substrates are stacked and held.

15. The substrate processing apparatus according to claim 14 , wherein a tip of the sixth electrode is disposed at a position equal to or higher than a position of the substrate disposed on the uppermost stage.

16. 15. The substrate processing apparatus according to claim 14, wherein a tip of the fifth electrode is positioned at a position that is 0.5% to 6% lower than the position of the uppermost substrate among the plurality of substrates stacked and held, relative to the output wavelength of the applied high frequency power source.

17. The substrate processing apparatus according to claim 2 , wherein the first electrode group and the second electrode group are provided outside the processing chamber.

18. An electrode for generating plasma, a first electrode group including at least one first electrode to which an arbitrary potential is applied and which has a first length, at least one second electrode to which an arbitrary potential is applied and which has a second length different from the first length, and at least one third electrode to which a reference potential is applied and which has a third length equal to the first length, the first electrode group being arranged in the order of the first electrode, the second electrode, and the third electrode; An electrode having

19. carrying the substrate into a processing chamber of a substrate processing apparatus including a plasma generating unit having a processing chamber for processing the substrate and a first electrode group for generating plasma, the first electrode group being composed of at least one first electrode to which an arbitrary potential is applied and having a first length, at least one second electrode to which an arbitrary potential is applied and having a second length different from the first length, and at least one third electrode to which a reference potential is applied and having a third length equal to the first length, the first electrode being arranged in this order, the second electrode, and the third electrode; generating plasma in the processing chamber by the plasma generating unit; A substrate processing apparatus comprising:

20. carrying the substrate into a processing chamber of a substrate processing apparatus including a plasma generating unit having a processing chamber for processing the substrate and a first electrode group for generating plasma, the first electrode group being composed of at least one first electrode to which an arbitrary potential is applied and having a first length, at least one second electrode to which an arbitrary potential is applied and having a second length different from the first length, and at least one third electrode to which a reference potential is applied and having a third length equal to the first length, the first electrode being arranged in this order, the second electrode, and the third electrode; generating plasma in the processing chamber by the plasma generating unit; A method for manufacturing a semiconductor device having the above structure.

21. a step of carrying the substrate into a processing chamber of a substrate processing apparatus including: a plasma generating unit having: a processing chamber for processing the substrate; and a first electrode group for generating plasma, the first electrode being configured to include at least one first electrode to which an arbitrary potential is applied and having a first length, at least one second electrode to which an arbitrary potential is applied and having a second length different from the first length, and at least one third electrode to which a reference potential is applied and having a third length equal to the first length, the first electrode being arranged in this order, the second electrode, and the third electrode; generating plasma in the processing chamber by the plasma generating unit; A program for causing the substrate processing apparatus to execute the above.

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