Ultrasonic wave generator

Abstract

To provide a technique to facilitate the suppression of conductivity degradation caused by vibrations of an ultrasound source.SOLUTION: An ultrasonic wave generator 10 includes an ultrasonic wave generation source 11, an ultrasonic wave converging part 12, and a waveguide 13. The ultrasonic wave generation source 11 has a piezoelectric substance 30, and a first electrode part 31 provided on a first face 30A opposite to the ultrasonic converging part 12 side of the piezoelectric substance 30. The ultrasonic wave generator 10 has elastic members (for example, first electric members 51, 52) electrically connected to the first electrode part 31, and receiving parts (for example, a first receiving part 53A) arranged opposite to the first electrode part 31 with the elastic member held therebetween.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to ultrasonic generators. [Background technology]

[0002] Patent Document 1 discloses an ultrasonic emitter. This ultrasonic emitter includes an ultrasonic transducer and an acoustic transmitter that transmits ultrasonic waves from the ultrasonic transducer. The acoustic transmitter includes a main body and a shaft extending forward from the front surface of the main body. The front surface of the main body functions as a concave primary reflecting surface that reflects ultrasonic waves from the ultrasonic transducer. The main body has a concave secondary reflecting surface that reflects ultrasonic waves from the primary reflecting surface. The ultrasonic waves reflected by the secondary reflecting surface are transmitted to the shaft. As a result, the ultrasonic waves that are focused while suppressing attenuation are transmitted to a waveguide formed by the shaft.

[0003] The ultrasonic transducer is, for example, a simple transducer made of PZT. A pair of electrodes is provided on the front and rear surfaces of the ultrasonic transducer. A voltage is applied between the pair of electrodes. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6774697 Summary of the Invention [Problem to be solved by the invention]

[0005] For example, a covered electric wire is directly soldered to each of the pair of electrodes. In this configuration, stress is likely to be generated in the solder when the ultrasonic transducer vibrates. If stress is generated in the solder, it may deteriorate, leading to a decrease in conductivity.

[0006] The present disclosure aims to provide a technique that can easily suppress a decrease in conductivity caused by vibration of an ultrasonic generation source. [Means for solving the problem]

[0007] The ultrasonic generating device of the present disclosure comprises: An ultrasonic source that generates ultrasonic waves; an ultrasonic focusing unit that focuses the ultrasonic waves generated from the ultrasonic generation source; a waveguide that transmits the ultrasonic waves focused by the ultrasonic focusing unit, The ultrasonic focusing unit includes: a first reflecting surface that reflects the ultrasonic waves generated by the ultrasonic wave generating source; a second reflecting surface that reflects the ultrasonic wave reflected by the first reflecting surface, The first reflecting surface and the second reflecting surface are arranged so that the ultrasonic wave reflected by the second reflecting surface is reflected as a plane wave and introduced into the waveguide, The ultrasonic wave generating source includes: A piezoelectric body; a first electrode portion provided on a first surface of the piezoelectric body opposite to the ultrasonic focusing portion side, Furthermore, the ultrasonic generator an elastic member electrically connected to the first electrode portion; The elastic member is disposed between the first electrode portion and a receiving portion disposed opposite the first electrode portion. Effect of the Invention

[0008] According to the present disclosure, it is easy to suppress a decrease in conductivity caused by vibration of an ultrasonic generation source. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a schematic diagram illustrating the configuration of an ultrasonic generating system according to the first embodiment. [Diagram 2] FIG. 2 is a plan view of the ultrasonic generator of the first embodiment. [Diagram 3] FIG. 3 is an enlarged view of the periphery of an ultrasonic wave generating source, a first elastic member, and a second elastic member in the first embodiment. [Figure 4]FIG. 4 is an enlarged view of the periphery of an ultrasonic wave generating source, a first elastic member, and a second elastic member in the second embodiment. [Diagram 5] FIG. 5 is an enlarged view of the periphery of an ultrasonic wave generating source, a first elastic member, and a second elastic member according to the third embodiment. [Figure 6] FIG. 6 is a perspective view of a first elastic member of the third embodiment. [Figure 7] FIG. 7 is a perspective view of a second elastic member of the third embodiment. [Figure 8] FIG. 8 is an explanatory diagram showing a state in which the first contact portion of the first elastic member is inserted into the first recess. [Figure 9] FIG. 9 is an explanatory diagram showing a state in which the first contact portion of the first elastic member is inserted into the second recess. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] [Description of the embodiments of the present disclosure] In the following, embodiments of the present disclosure are listed and illustrated.

[0011] [1] An ultrasonic source that generates ultrasonic waves; an ultrasonic focusing unit that focuses the ultrasonic waves generated from the ultrasonic generation source; a waveguide that transmits the ultrasonic waves focused by the ultrasonic focusing unit, The ultrasonic focusing unit includes: a first reflecting surface that reflects the ultrasonic waves generated by the ultrasonic wave generating source; a second reflecting surface that reflects the ultrasonic wave reflected by the first reflecting surface, The first reflecting surface and the second reflecting surface are arranged so that the ultrasonic wave reflected by the second reflecting surface is reflected as a plane wave and introduced into the waveguide, The ultrasonic wave generating source includes: A piezoelectric body; a first electrode portion provided on a first surface of the piezoelectric body opposite to the ultrasonic focusing portion side, Furthermore, the ultrasonic generator an elastic member electrically connected to the first electrode portion; a receiving portion disposed opposite the first electrode portion with the elastic member interposed therebetween; Ultrasonic generator.

[0012] In the ultrasonic generator, the elastic member is sandwiched between the first electrode and the receiving part constituting the ultrasonic generating source and is electrically connected to the first electrode. Therefore, even if the ultrasonic generating source vibrates, the elastic member is elastically deformed, so that stress is unlikely to occur in the electrical connection between the first electrode and the elastic member. Therefore, the ultrasonic generator is unlikely to cause deterioration in the electrical connection between the first electrode and the elastic member, so that it is easy to suppress a decrease in conductivity caused by the vibration of the ultrasonic generating source.

[0013] [2] A plurality of the elastic members having different natural frequencies are arranged The ultrasonic generating device according to [1].

[0014] When the elastic member resonates with the ultrasonic generating source, the connection between the elastic member and the first electrode part of the ultrasonic generating source becomes easy to come off. Therefore, it is conceivable to make the elastic member less likely to resonate by shifting the natural frequency of the elastic member from the frequency of the AC voltage applied to the ultrasonic generating source. However, in a configuration in which the frequency of the AC voltage applied to the ultrasonic generating source is changed, it is difficult to configure the frequency to always be shifted. In this regard, since the ultrasonic generating device is arranged with a plurality of elastic members having different natural frequencies, even if the frequency of the AC voltage applied to the ultrasonic generating source is changed, any of the elastic members is always in a state in which it is difficult to resonate. Therefore, the ultrasonic generating device is easy to maintain a state in which at least one elastic member is electrically connected to the first electrode part.

[0015] [3] The elastic member has a plurality of elastic parts having different natural frequencies and a connecting part connecting the ends of the plurality of elastic parts. The ultrasonic generating device according to [1].

[0016] When the elastic member resonates with the ultrasonic generating source, the electrical connection between the elastic member and the first electrode of the ultrasonic generating source becomes easy to come off. Therefore, it is conceivable to make the elastic member less likely to resonate by shifting the natural frequency of the elastic member from the vibration frequency of the ultrasonic generating source. However, in a configuration in which the vibration frequency of the ultrasonic generating source is changed, it is difficult to configure the frequency to always be shifted. In this respect, in the ultrasonic generating device, the elastic member has a plurality of elastic parts with different natural frequencies and a connecting part that connects the ends of the plurality of elastic parts. Therefore, even if the vibration frequency of the ultrasonic generating source is changed, any of the elastic parts is always in a state in which it is difficult to resonate. Therefore, the ultrasonic generating device makes it easy to maintain a state in which the elastic member is electrically connected to the first electrode.

[0017] [4] The ultrasonic wave generating source has a second electrode portion provided on a second surface of the piezoelectric body opposite to the first surface, and an extended electrode portion extending from the second electrode portion onto the first surface while being spaced apart from the first electrode portion; The ultrasonic generator includes a second elastic member electrically connected to the extended electrode portion, and a second receiving portion disposed opposite the extended electrode portion with the second elastic member interposed therebetween. An ultrasonic generating device according to any one of [1] to [3].

[0018] In the ultrasonic generator, the second elastic member is electrically connected to the extended electrode portion while being sandwiched between the extended electrode portion and the second receiving portion. Therefore, in the ultrasonic generator, even if the ultrasonic generating source vibrates, the second elastic member is elastically deformed, so that stress is unlikely to occur in the electrical connection portion between the extended electrode portion and the second elastic member. Therefore, in the ultrasonic generator, deterioration is unlikely to occur in the electrical connection portion between the extended electrode portion and the second elastic member, so that it is easy to suppress a decrease in conductivity caused by the vibration of the ultrasonic generating source. Moreover, the second elastic member is connected to the extended electrode portion from the same side as the elastic member with respect to the ultrasonic generating source. Therefore, in the ultrasonic generator, the elastic member and the second elastic member can be arranged on the same side with respect to the ultrasonic generating source.

[0019] [5] The ultrasonic generating source has a recess in an area where the first electrode portion is formed, A part of the elastic member enters the recess and is connected to the first electrode portion. An ultrasonic generating device according to any one of [1] to [4].

[0020] In the ultrasonic generating device, the recess can regulate the positional deviation of the elastic member.

[0021] [Details of the embodiment of the present disclosure] The ultrasonic generator of the present disclosure is used in, for example, ultrasonic diagnostic devices, ultrasonic treatment devices, cavitation generators, dental scalers, blood coagulation cutting devices (e.g., ultrasonic scalpels), ultrasonic processing machines, ultrasonic cleaning machines (e.g., ultrasonic cleaners), and the like.

[0022] 1. First embodiment 1-1. Configuration of ultrasonic generation system 1 As shown in FIG. 1, the ultrasound generating system 1 includes an ultrasound generating device 10 and a power supply device 80.

[0023] The power supply device 80 outputs an electric signal to the ultrasonic generator 10 to drive the ultrasonic generator 10. The power supply device 80 includes a signal generator 81, a power amplifier 82, and a measuring instrument 83. The signal generator 81 generates an arbitrary vibration signal. The signal generator 81 may be, for example, a frequency response analyzer. The power amplifier 82 amplifies the signal output from the signal generator 81 and applies the amplified signal to the ultrasonic generator 10. The power amplifier 82 may be, for example, a known power amplifier. The measuring instrument 83 monitors the signal amplified by the power amplifier 82. The measuring instrument 83 may be, for example, an oscilloscope. The power supply device 80 supplies the amplified signal to the ultrasonic generator 10 and monitors the applied voltage.

[0024] The power supply device 80 generates an AC electric signal. The power supply device 80 can change the frequency of the generated electric signal. A first wiring 71 and a second wiring 72 are connected to the power supply device 80. The power supply device 80 applies an AC voltage between the first wiring 71 and the second wiring 72. The power supply device 80 applies the AC voltage to the ultrasonic generator 10 via the first wiring 71 and the second wiring 72.

[0025] 1-2. Configuration of ultrasonic generator 10 1 and 2, the ultrasonic generator 10 includes an ultrasonic source 11, an ultrasonic focusing unit 12, and a waveguide 13. The ultrasonic source 11 generates ultrasonic waves. The ultrasonic focusing unit 12 focuses the ultrasonic waves generated from the ultrasonic source 11. The waveguide 13 transmits the ultrasonic waves focused by the ultrasonic focusing unit 12.

[0026] Each of the ultrasonic generating source 11, the ultrasonic focusing unit 12, and the waveguide 13 has a shape that is obtained when a figure on a plane is rotated once around a straight line on the plane as an axis. In other words, each of the ultrasonic generating source 11, the ultrasonic focusing unit 12, and the waveguide 13 is configured as a rotating body.

[0027] The ultrasonic generating source 11 is composed of, for example, a piezoelectric element. The ultrasonic generating source 11 is plate-shaped. The ultrasonic generating source 11 is ring-shaped (more specifically, annular). Note that the ultrasonic generating source 11 does not have to be ring-shaped, and may be composed of a plurality of piezoelectric elements. The ultrasonic generating source 11 is joined to the ultrasonic focusing unit 12. The plate surface of the ultrasonic generating source 11 is joined to the ultrasonic focusing unit 12.

[0028] The ultrasonic source 11 generates ultrasonic waves when an electric signal is given from the power supply device 80. The ultrasonic source 11 has a radiation surface 15 that emits ultrasonic waves. The radiation surface 15 is formed on the front surface of the ultrasonic source 11 and is disposed facing forward. The radiation surface 15 is a flat surface and extends in a direction perpendicular to the front-rear direction of the ultrasonic generator 10. The radiation surface 15 emits ultrasonic waves forward. The ultrasonic waves generated by the ultrasonic source 11 are plane waves that travel straight forward. The ultrasonic source 11 generates ultrasonic waves at a frequency of, for example, 30 kHz or more and 10 MHz or less.

[0029] The ultrasonic focusing unit 12 is formed of a metal (e.g., duralumin). The ultrasonic focusing unit 12 has a contact surface 20 that contacts the ultrasonic generation source 11 (more specifically, the radiation surface 15). The contact surface 20 is formed on the rear surface of the ultrasonic focusing unit 12 and is disposed facing backward.

[0030] The ultrasonic focusing section 12 has a first reflecting surface 21 and a second reflecting surface 22. The first reflecting surface 21 is disposed at a position forward of the contact surface 20. The first reflecting surface 21 is disposed opposite the radiation surface 15 of the ultrasonic generating source 11. The opposing direction of the first reflecting surface 21 and the radiation surface 15 of the ultrasonic generating source 11 is parallel to the front-rear direction. When viewed from the outside of the ultrasonic focusing section 12, the first reflecting surface 21 is a curved surface (e.g., a parabolic surface) that is convex toward the front side (the side opposite to the ultrasonic generating source 11). When viewed from the inside of the ultrasonic focusing section 12, the first reflecting surface 21 is concave.

[0031] The second reflecting surface 22 is disposed opposite to the first reflecting surface 21. The second reflecting surface 22 is disposed at a position rearward of the front end of the first reflecting surface 21. When viewed from the outside of the ultrasonic focusing unit 12, the second reflecting surface 22 is a curved surface (e.g., a parabolic surface) that is convex toward the rear side (the side opposite to the first reflecting surface 21). When viewed from the inside of the ultrasonic focusing unit 12, the second reflecting surface 22 is concave. The second reflecting surface 22 protrudes rearward.

[0032] The first reflecting surface 21 reflects the ultrasonic waves generated by the ultrasonic generating source 11 toward the second reflecting surface 22. The second reflecting surface 22 reflects the ultrasonic waves reflected by the first reflecting surface 21 toward the rear end of the waveguide 13. The first reflecting surface 21 and the second reflecting surface 22 are arranged such that the ultrasonic waves reflected by the second reflecting surface 22 are reflected as a plane wave and introduced into the waveguide 13.

[0033] When an electrical signal is given from the power supply device 80, the ultrasonic wave generating source 11 generates ultrasonic waves forward from the radiation surface 15. The ultrasonic waves radiated from the radiation surface 15 are reflected by the first reflecting surface 21 and focused toward the focal point F of the first reflecting surface 21. The focal point F of the first reflecting surface 21 is the same as the focal point F of the second reflecting surface 22. Therefore, the ultrasonic waves that pass through the focal point F of the first reflecting surface 21 are reflected by the second reflecting surface 22 and are introduced into the waveguide 13 as a plane wave.

[0034] The waveguide 13 has a shape extending forward from the front end of the ultrasonic focusing unit 12. The direction in which the waveguide 13 extends may be parallel to the traveling direction of the plane wave generated at the second reflecting surface 22, or may be slightly inclined or bent with respect to the traveling direction of the plane wave generated at the second reflecting surface 22.

[0035] In this embodiment, the waveguide 13 is described as a separate member from the ultrasonic focusing unit 12, but it may be the same member as the ultrasonic focusing unit 12. The waveguide 13 is preferably made of a material with high ultrasonic propagation properties, such as an aluminum alloy or metallic glass. The waveguide 13 may also be made of a shape memory alloy, such as an alloy of titanium and nickel. The waveguide 13 is elastically deformable.

[0036] 1-3. Connection structure between ultrasonic generating source 11 and power supply device 80 As shown in FIGS. 1 and 3, the ultrasonic wave generating source 11 has a piezoelectric body 30, a first electrode portion 31, a second electrode portion 32, and an extended electrode portion 33.

[0037] The piezoelectric body 30 has a plate shape. The piezoelectric body 30 has an annular shape (more specifically, an annular shape). The piezoelectric body 30 has a first surface 30A on the side opposite to the ultrasonic focusing section 12 side, and a second surface 30B on the ultrasonic focusing section 12 side.

[0038] The first electrode portion 31 is provided on the first surface 30A of the piezoelectric body 30. The first electrode portion 31 covers the first surface 30A except for an excluded area AR that is a part of the first surface 30A.

[0039] The second electrode portion 32 is provided on the second surface 30B of the piezoelectric body 30. The second electrode portion 32 covers the entire second surface 30B.

[0040] The extended electrode portion 33 extends from the second electrode portion 32. The extended electrode portion 33 folds back the side surface of the piezoelectric body 30 and extends to the excluded area AR on the first surface 30A.

[0041] The ultrasonic generator 10 includes first elastic members 51 and 52 and first receiving members 53 and 54. The first elastic members 51 and 52 and the first receiving members 53 and 54 are conductive and made of, for example, metal.

[0042] The first elastic member 51 and the first receiving member 53 are configured as a contact probe. The first elastic member 51 includes a first elastic body 51A made of a compression coil spring. Specifically, the first elastic member 51 has a first elastic body 51A and a first plunger 51B. The first plunger 51B may be plated to suppress deterioration and oxidation due to heat. The first receiving member 53 has a first receiving portion 53A and a first cylindrical portion 53B. The first receiving portion 53A is provided at one end of the first cylindrical portion 53B. The first elastic body 51A is disposed within the first cylindrical portion 53B. One end of the first elastic body 51A is electrically connected to the first receiving portion 53A. One end of the first elastic body 51A may or may not be fixed to the first receiving portion 53A. In addition, being not fixed means that the first elastic body 51A is in a state in which it can be relatively displaced. The other end of the first elastic body 51A is electrically connected to the first plunger 51B. The other end of the first elastic body 51A may or may not be fixed to the first plunger 51B. A portion of the first plunger 51B protrudes from the other end of the first cylindrical portion 53B. The first plunger 51B is electrically connected to the first electrode portion 31 of the ultrasonic generating source 11. That is, the first elastic member 51 is electrically connected to the first electrode portion 31. The first plunger 51B may or may not be fixed to the first electrode portion 31.

[0043] The first elastic member 51 is disposed between the first electrode portion 31 and the first receiving portion 53A. The first elastic member 51 is disposed in a compressed state by being pressed from both sides of the first electrode portion 31 and the first receiving portion 53A. In the compressed state, the first elastic member 51 applies an elastic force in a direction that separates the first electrode portion 31 and the first receiving portion 53A. The first receiving portion 53A is disposed opposite the first electrode portion 31 with the first elastic member 51 in between.

[0044] The first elastic member 52 and the first receiving member 54 are configured as a contact probe. The first elastic member 52 has a natural frequency different from that of the first elastic member 51. The first elastic member 52 includes a first elastic body 52A made of a compression coil spring. Specifically, the first elastic member 52 has a first elastic body 52A and a first plunger 52B. The first plunger 52B may be plated to suppress deterioration and oxidation due to heat. The first elastic body 52A has a coil thickness and a coil diameter different from those of the first elastic body 51A. The first receiving member 54 has a first receiving portion 54A and a first cylindrical portion 54B. The first receiving portion 54A is provided at one end of the first cylindrical portion 54B. The first elastic body 52A is disposed inside the first cylindrical portion 54B. One end of the first elastic body 52A is electrically connected to the first receiving portion 54A. One end of the first elastic body 52A may or may not be fixed to the first receiving portion 54A. The other end of the first elastic body 52A is electrically connected to the first plunger 52B. The other end of the first elastic body 52A may or may not be fixed to the first plunger 52B. A part of the first plunger 52B protrudes from the other end of the first cylindrical portion 54B. The first plunger 52B is electrically connected to the first electrode portion 31 of the ultrasonic generating source 11. That is, the first elastic member 52 is electrically connected to the first electrode portion 31. The first plunger 52B may or may not be fixed to the first electrode portion 31.

[0045] The first elastic member 52 is disposed between the first electrode portion 31 and the first receiving portion 54A. The first elastic member 52 is disposed in a compressed state by being pressed from both sides of the first electrode portion 31 and the first receiving portion 54A. In the compressed state, the first elastic member 52 applies an elastic force in a direction that separates the first electrode portion 31 and the first receiving portion 54A. The first receiving portion 54A is disposed opposite the first electrode portion 31 with the first elastic member 52 in between.

[0046] The ultrasonic generator 10 includes second elastic members 61 and 62 and second receiving members 63 and 64. The second elastic members 61 and 62 and the second receiving members 63 and 64 are conductive and made of, for example, a metal.

[0047] The second elastic member 61 and the second receiving member 63 are configured as a contact probe. The second elastic member 61 includes a second elastic body 61A made of a compression coil spring. Specifically, the second elastic member 61 has a second elastic body 61A and a second plunger 61B. The second plunger 61B may be plated to suppress deterioration and oxidation due to heat. The second receiving member 63 has a second receiving portion 63A and a second cylindrical portion 63B. The second receiving portion 63A is provided at one end of the second cylindrical portion 63B. The second elastic body 61A is disposed within the second cylindrical portion 63B. One end of the second elastic body 61A is electrically connected to the second receiving portion 63A. One end of the second elastic body 61A may or may not be fixed to the second receiving portion 63A. The other end of the second elastic body 61A is electrically connected to the second plunger 61B. The other end of the second elastic body 61A may or may not be fixed to the second plunger 61B. A portion of the second plunger 61B protrudes from the other end of the second tube portion 63B. The second plunger 61B is electrically connected to the extended electrode portion 33 of the ultrasonic generating source 11. In other words, the second elastic member 61 is electrically connected to the extended electrode portion 33. The second plunger 61B may or may not be fixed to the extended electrode portion 33.

[0048] The second elastic member 61 is disposed between the extended electrode portion 33 and the second receiving portion 63A. The second elastic member 61 is disposed in a compressed state by being pressed from both sides of the extended electrode portion 33 and the second receiving portion 63A. In the compressed state, the second elastic member 61 applies an elastic force in a direction that separates the extended electrode portion 33 and the second receiving portion 63A. The second receiving portion 63A is disposed opposite the extended electrode portion 33 with the second elastic member 61 in between.

[0049] The second elastic member 62 and the second receiving member 64 are configured as a contact probe. The second elastic member 62 has a natural frequency different from that of the second elastic member 61. The second elastic member 62 includes a second elastic body 62A made of a compression coil spring. Specifically, the second elastic member 62 has a second elastic body 62A and a second plunger 62B. The second plunger 62B may be plated to suppress deterioration and oxidation due to heat. The second elastic body 62A has a coil thickness and a coil diameter different from those of the second elastic body 61A. The second receiving member 64 has a second receiving portion 64A and a second cylindrical portion 64B. The second receiving portion 64A is provided at one end of the second cylindrical portion 64B. The second elastic body 62A is disposed within the second cylindrical portion 64B. One end of the second elastic body 62A is electrically connected to the second receiving portion 64A. One end of the second elastic body 62A may or may not be fixed to the second receiving portion 64A. The other end of the second elastic body 62A is electrically connected to the second plunger 62B. The other end of the second elastic body 62A may or may not be fixed to the second plunger 62B. A part of the second plunger 62B protrudes from the other end of the second cylindrical portion 64B. The second plunger 62B is electrically connected to the extended electrode portion 33 of the ultrasonic generating source 11. That is, the second elastic member 62 is electrically connected to the extended electrode portion 33. The second plunger 62B may or may not be fixed to the extended electrode portion 33.

[0050] The second elastic member 62 is disposed between the extended electrode portion 33 and the second receiving portion 64A. The second elastic member 62 is disposed in a compressed state by being pressed from both sides of the extended electrode portion 33 and the second receiving portion 64A. In the compressed state, the second elastic member 62 applies an elastic force in a direction that separates the extended electrode portion 33 and the second receiving portion 64A. The second receiving portion 64A is disposed opposite the extended electrode portion 33 with the second elastic member 62 in between.

[0051] The above-mentioned ultrasonic focusing unit 12 is composed of a main body 40 and a flange 41. The main body 40 has the above-mentioned contact surface 20, a first reflecting surface 21, and a second reflecting surface 22. The flange 41 protrudes radially outward from the outer periphery of the main body 40. The flange 41 forms an annular shape (more specifically, a circular ring shape).

[0052] The ultrasonic generator 10 includes a connecting member 67. The first receiving members 53, 54 and the second receiving members 63, 64 are fixed to the ultrasonic generator 10 (more specifically, the flange portion 41) via the connecting member 67. The connecting member 67 has insulating properties. The connecting member 67 electrically insulates the first receiving members 53, 54 and the second receiving members 63, 64 from the ultrasonic generator 10. The connecting member 67 is fixed to the first receiving members 53, 54, the second receiving members 63, 64, and the ultrasonic generator 10 by, for example, an adhesive.

[0053] The ultrasonic generator 10 includes a first wiring 71 and a second wiring 72. The first wiring 71 is electrically connected to the first receiving members 53 and 54. The second wiring 72 is electrically connected to the second receiving members 63 and 64. When an AC voltage is applied between the first wiring 71 and the second wiring 72, the ultrasonic generator 10 generates an ultrasonic wave.

[0054] 1-4. Functions and Effects of Ultrasonic Generator 10 When the power supply device 80 applies an AC voltage between the first wiring 71 and the second wiring 72, an AC voltage is applied between the first electrode unit 31 and the second electrode unit 32. As a result, the ultrasonic wave generating source 11 vibrates and generates ultrasonic waves.

[0055] When the ultrasonic source 11 vibrates, the first elastic members 51, 52 are elastically deformed in accordance with the vibration of the ultrasonic source 11. Therefore, even if the ultrasonic source 11 vibrates, stress is unlikely to be generated in the electrical connection between the first electrode unit 31 and the first elastic members 51, 52. Therefore, in the ultrasonic generator 10, deterioration is unlikely to occur in the electrical connection between the first electrode unit 31 and the first elastic members 51, 52, and therefore a decrease in conductivity caused by the vibration of the ultrasonic source 11 can be easily suppressed.

[0056] Furthermore, when the ultrasonic source 11 vibrates, the second elastic members 61, 62 are also elastically deformed in accordance with the vibration of the ultrasonic source 11. Therefore, even if the ultrasonic source 11 vibrates, stress is unlikely to be generated in the electrical connection between the extended electrode 33 and the second elastic members 61, 62. Therefore, in the ultrasonic generator 10, deterioration is unlikely to occur in the electrical connection between the extended electrode 33 and the second elastic members 61, 62, and therefore it is easy to suppress a decrease in conductivity caused by the vibration of the ultrasonic source 11.

[0057] Furthermore, the second elastic members 61, 62 are connected to the extended electrode portion 33 from the same side as the first elastic members 51, 52 with respect to the ultrasonic wave generating source 11. Therefore, the ultrasonic wave generating device 10 can arrange the first elastic members 51, 52 and the second elastic members 61, 62 on the same side with respect to the ultrasonic wave generating source 11.

[0058] Furthermore, since the ultrasonic generator 10 has a plurality of first elastic members 51, 52 with different natural frequencies, any of the first elastic members 51, 52 is always unlikely to resonate even if the frequency of the AC voltage applied to the ultrasonic source 11 is changed. Therefore, the ultrasonic generator 10 can easily maintain a state in which at least one of the first elastic members 51, 52 is electrically connected to the first electrode portion 31.

[0059] In addition, since the ultrasonic generator 10 has a plurality of second elastic members 61, 62 with different natural frequencies, any of the second elastic members 61, 62 is always unlikely to resonate even if the frequency of the AC voltage applied to the ultrasonic generating source 11 is changed. Therefore, the ultrasonic generator 10 can easily maintain a state in which at least one of the second elastic members 61, 62 is electrically connected to the second electrode portion 32.

[0060] 2. Second embodiment In the first embodiment, a configuration using a contact probe is described. In the second embodiment, a configuration not using a contact probe is described. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

[0061] 2-1. Configuration of ultrasonic generation system 201 The ultrasonic generating system 201 of the second embodiment includes an ultrasonic generating device 210 and a power supply device 80, as shown in FIG.

[0062] 2-2. Configuration of ultrasonic generator 210 The ultrasonic generator 210 includes an ultrasonic source 11, an ultrasonic focusing section 12, and a waveguide 13 (see FIG. 1).

[0063] 2-3. Connection structure between ultrasonic generating source 11 and power supply device 80 The ultrasonic generator 210 includes first elastic members 251 and 252, a first receiving portion 253, and a first wall portion 254. The first elastic members 251 and 252, the first receiving portion 253, and the first wall portion 254 are conductive and made of, for example, a metal.

[0064] The first elastic members 251 and 252 are each configured as a compression coil spring. The diameter of the first elastic member 251 is smaller than the diameter of the first elastic member 252. The first elastic member 251 is disposed inside the first elastic member 252. The natural frequencies of the first elastic members 251 and 252 are different from each other.

[0065] The first elastic members 251, 252 are disposed between the first electrode portion 31 and the first receiving portion 253. The first elastic members 251, 252 are disposed in a compressed state by being pressed from both sides of the first electrode portion 31 and the first receiving portion 253. In the compressed state, the first elastic members 251, 252 apply an elastic force in a direction that separates the first electrode portion 31 and the first receiving portion 253. The first receiving portion 253 is disposed facing the first electrode portion 31 with the first elastic members 251, 252 interposed therebetween.

[0066] One end of each of the first elastic members 251 and 252 is electrically connected to the first receiving portion 253. One end of each of the first elastic members 251 and 252 may or may not be fixed to the first receiving portion 253. The other end of each of the first elastic members 251 and 252 is electrically connected to the first electrode portion 31. The other end of each of the first elastic members 251 and 252 may or may not be fixed to the first electrode portion 31. The other end of each of the first elastic members 251 and 252 may be plated to suppress deterioration and oxidation due to heat.

[0067] The first wall portion 254 has a cylindrical shape that surrounds the periphery of the first elastic members 251 and 252. One end of the first wall portion 254 is fixed to the first receiving portion 253.

[0068] The ultrasonic generator 210 includes second elastic members 261 and 262, a second receiving portion 263, and a second wall portion 264. The second elastic members 261 and 262, the second receiving portion 263, and the second wall portion 264 are conductive and made of, for example, a metal.

[0069] The second elastic members 261 and 262 are each configured as a compression coil spring. The diameter of the second elastic member 261 is smaller than the diameter of the second elastic member 262. The second elastic member 261 is disposed inside the second elastic member 262. The natural frequencies of the second elastic members 261 and 262 are different from each other.

[0070] The second elastic members 261, 262 are disposed between the extended electrode portion 33 and the second receiving portion 263. The second elastic members 261, 262 are disposed in a compressed state by being pressed from both sides of the extended electrode portion 33 and the second receiving portion 263. In the compressed state, the second elastic members 261, 262 apply an elastic force in a direction that separates the extended electrode portion 33 and the second receiving portion 263. The second receiving portion 263 is disposed opposite the extended electrode portion 33 with the second elastic members 261, 262 sandwiched therebetween.

[0071] One end of each of the second elastic members 261, 262 is electrically connected to the second receiving portion 263. One end of each of the second elastic members 261, 262 may or may not be fixed to the second receiving portion 263. The other end of each of the second elastic members 261, 262 is electrically connected to the extended electrode portion 33. The other end of each of the second elastic members 261, 262 may or may not be fixed to the extended electrode portion 33. The other end of each of the second elastic members 261, 262 may be plated to suppress deterioration and oxidation due to heat.

[0072] The second wall portion 264 has a cylindrical shape that surrounds the periphery of the second elastic members 261 and 262. One end of the second wall portion 264 is fixed to the second receiving portion 263.

[0073] The ultrasonic generator 210 includes an insulating portion 266 provided between the first receiving portion 253 and the second receiving portion 263. The insulating portion 266 connects the first receiving portion 253 and the second receiving portion 263. The insulating portion 266 electrically insulates the first receiving portion 253 and the second receiving portion 263. The insulating portion 266 is fixed to the first receiving portion 253 and the second receiving portion 263 by, for example, an adhesive.

[0074] The ultrasonic generator 210 includes a connecting member 267. The first receiving portion 253 and the second receiving portion 263 are fixed to the ultrasonic generator 210 via the connecting member 267. Specifically, the second receiving portion 263 is fixed to the ultrasonic generator 210 via the connecting member 267. The connecting member 267 has insulating properties. The connecting member 267 electrically insulates the first receiving portion 253 and the second receiving portion 263 from the ultrasonic generator 10. The connecting member 267 is fixed to the second receiving portion 263 and the ultrasonic generator 10 by, for example, an adhesive.

[0075] The ultrasonic generator 210 includes a first wiring 71 and a second wiring 72. The first wiring 71 is electrically connected to a first receiving portion 253. The second wiring 72 is electrically connected to a second receiving portion 263. When an AC voltage is applied between the first wiring 71 and the second wiring 72, the ultrasonic generator 210 generates an ultrasonic wave.

[0076] 2-4. Functions and Effects of Ultrasonic Generator 210 When the power supply device 80 applies an AC voltage between the first wiring 71 and the second wiring 72, an AC voltage is applied between the first electrode unit 31 and the second electrode unit 32. As a result, the ultrasonic wave generating source 11 vibrates and generates ultrasonic waves.

[0077] When the ultrasonic source 11 vibrates, the first elastic members 251, 252 are elastically deformed in accordance with the vibration of the ultrasonic source 11. Therefore, even if the ultrasonic source 11 vibrates, stress is unlikely to occur in the electrical connection between the first electrode unit 31 and the first elastic members 251, 252. Therefore, in the ultrasonic generator 210, deterioration is unlikely to occur in the electrical connection between the first electrode unit 31 and the first elastic members 251, 252, and therefore it is easy to suppress a decrease in conductivity caused by the vibration of the ultrasonic source 11.

[0078] Furthermore, when the ultrasonic source 11 vibrates, the second elastic members 261, 262 are also elastically deformed in accordance with the vibration of the ultrasonic source 11. Therefore, even if the ultrasonic source 11 vibrates, stress is unlikely to be generated in the electrical connection between the extended electrode 33 and the second elastic members 261, 262. Therefore, in the ultrasonic generator 210, deterioration is unlikely to occur in the electrical connection between the extended electrode 33 and the second elastic members 261, 262, and therefore a decrease in conductivity caused by the vibration of the ultrasonic source 11 can be easily suppressed.

[0079] Furthermore, the second elastic members 261, 262 are connected to the extended electrode portion 33 from the same side as the first elastic members 251, 252 with respect to the ultrasonic wave generating source 11. Therefore, the ultrasonic wave generating device 10 can arrange the first elastic members 251, 252 and the second elastic members 261, 262 on the same side with respect to the ultrasonic wave generating source 11.

[0080] Furthermore, since the ultrasonic generator 210 has a plurality of first elastic members 251, 252 with different natural frequencies, any of the first elastic members 251, 252 is always unlikely to resonate even if the frequency of the AC voltage applied to the ultrasonic generator 11 is changed. Therefore, the ultrasonic generator 210 is likely to maintain a state in which at least one of the first elastic members 251, 252 is electrically connected to the first electrode portion 31.

[0081] In addition, since the ultrasonic generator 210 has a plurality of second elastic members 261, 262 with different natural frequencies, any of the second elastic members 261, 262 is always unlikely to resonate even if the frequency of the AC voltage applied to the ultrasonic generator 11 is changed. Therefore, the ultrasonic generator 210 is likely to maintain a state in which at least one of the second elastic members 261, 262 is electrically connected to the second electrode section 32.

[0082] 3. Third embodiment In the third embodiment, an example in which the elastic member is a leaf spring will be described. Note that in the third embodiment, the same components as those in the first embodiment are given the same reference numerals, and detailed description thereof will be omitted.

[0083] 3-1. Configuration of ultrasonic generation system 301 As shown in FIG. 5, an ultrasonic generating system 301 according to the third embodiment includes an ultrasonic generating device 310 and a power supply device 80.

[0084] 3-2. Configuration of ultrasonic generator 310 The ultrasonic generator 310 includes an ultrasonic source 11, an ultrasonic focusing section 12, and a waveguide 13 (see FIG. 1).

[0085] 3-3. Connection structure between ultrasonic generating source 11 and power supply device 80 The ultrasonic generator 310 includes a first elastic member 351 and a first receiving portion 353. The first elastic member 351 and the first receiving portion 353 are conductive and made of, for example, metal. The first elastic member 351 is configured as a leaf spring. As shown in FIG. 6, the first elastic member 351 includes first elastic portions 355 and 356 and a first connecting portion 357. The first connecting portion 357 connects the ends of the first elastic portions 355 and 356 to each other. The first connecting portion 357 is electrically connected to the first receiving portion 353. The first connecting portion 357 is fixed to the first receiving portion 353. The first elastic portions 355 and 356 are each obliquely extended from the first connecting portion 357 toward the first electrode portion 31 side, and then extended along the first electrode portion 31. The first elastic portion 355 has a first contact portion 355A that contacts the first electrode portion 31. The first contact portion 355A may or may not be fixed to the first electrode portion 31. The first elastic portion 356 has a first contact portion 356A that contacts the first electrode portion 31. The first contact portion 356A may or may not be fixed to the first electrode portion 31. The first elastic portions 355 and 356 have different lengths and widths. The first elastic portions 355 and 356 have different natural frequencies. The first contact portions 355A and 356A may be plated to suppress deterioration and oxidation due to heat.

[0086] The ultrasonic generator 310 includes a second elastic member 361 and a second receiving portion 363. The second elastic member 361 and the second receiving portion 363 are conductive and made of, for example, metal. The second elastic member 361 is configured as a leaf spring. The second elastic member 361 has a configuration similar to that of the first elastic member 351. As shown in FIG. 7, the second elastic member 361 includes second elastic portions 365, 366 and a second connecting portion 367. The second connecting portion 367 connects the ends of the second elastic portions 365, 366 to each other. The second connecting portion 367 is electrically connected to the second receiving portion 363. The second connecting portion 367 is fixed to the second receiving portion 363. The second elastic parts 365 and 366 are each extended obliquely from the second connecting part 367 toward the extended electrode part 33, and then extend along the extended electrode part 33. The second elastic part 365 has a second contact part 365A that contacts the extended electrode part 33. The second contact part 365A may or may not be fixed to the extended electrode part 33. The second elastic part 366 has a second contact part 366A that contacts the extended electrode part 33. The second contact part 366A may or may not be fixed to the extended electrode part 33. The second elastic parts 365 and 366 have different lengths and widths. The second elastic parts 365 and 366 have different natural frequencies. The second contact parts 365A and 366A may be plated to suppress deterioration and oxidation due to heat.

[0087] The ultrasonic generator 310 includes an insulating portion 368 provided between the first receiving portion 353 and the second receiving portion 363. The insulating portion 368 connects the first receiving portion 353 and the second receiving portion 363. The insulating portion 368 electrically insulates the first receiving portion 353 and the second receiving portion 363. The insulating portion 368 is fixed to the first receiving portion 353 and the second receiving portion 363 by, for example, an adhesive.

[0088] The ultrasonic generator 310 includes a connecting member 369. The first receiving portion 353 and the second receiving portion 363 are fixed to the ultrasonic generator 310 via the connecting member 369. Specifically, the second receiving portion 363 is fixed to the ultrasonic generator 310 via the connecting member 369. The connecting member 369 has insulating properties. The connecting member 369 electrically insulates the first receiving portion 353 and the second receiving portion 363 from the ultrasonic generator 310. The connecting member 369 is fixed to the second receiving portion 363 and the ultrasonic generator 310 by, for example, an adhesive.

[0089] The ultrasonic generator 310 includes a first wiring 71 and a second wiring 72. The first wiring 71 is electrically connected to a first receiving portion 353. The second wiring 72 is electrically connected to a second receiving portion 363. When an AC voltage is applied between the first wiring 71 and the second wiring 72, the ultrasonic generator 310 generates an ultrasonic wave.

[0090] 3-4. Functions and Effects of Ultrasonic Generator 310 When the power supply device 80 applies an AC voltage between the first wiring 71 and the second wiring 72, an AC voltage is applied between the first electrode unit 31 and the second electrode unit 32. As a result, the ultrasonic wave generating source 11 vibrates and generates ultrasonic waves.

[0091] When the ultrasonic source 11 vibrates, the first elastic member 351 elastically deforms in accordance with the vibration of the ultrasonic source 11. Therefore, even if the ultrasonic source 11 vibrates, stress is unlikely to occur between the first electrode unit 31 and the first elastic member 351. Therefore, in the ultrasonic generator 310, deterioration is unlikely to occur in the electrical connection portion of the first elastic member 351 to the first electrode unit 31, and therefore a decrease in conductivity caused by the vibration of the ultrasonic source 11 can be easily suppressed.

[0092] Furthermore, when the ultrasonic source 11 vibrates, the second elastic member 361 also elastically deforms in accordance with the vibration of the ultrasonic source 11. Therefore, even if the ultrasonic source 11 vibrates, stress is unlikely to occur between the extended electrode portion 33 and the second elastic member 361. Therefore, in the ultrasonic generator 310, deterioration is unlikely to occur in the electrical connection portion of the second elastic member 361 to the extended electrode portion 33, and therefore a decrease in conductivity caused by the vibration of the ultrasonic source 11 can be easily suppressed.

[0093] Furthermore, the second elastic member 361 is connected to the extended electrode portion 33 from the same side as the first elastic member 351 with respect to the ultrasonic wave generating source 11. Therefore, the ultrasonic wave generating device 310 can arrange the first elastic member 351 and the second elastic member 361 on the same side with respect to the ultrasonic wave generating source 11.

[0094] Furthermore, since the first elastic member 351 has a plurality of first elastic parts 355, 356 with different natural frequencies, any of the first elastic parts 355, 356 is always unlikely to resonate even if the frequency of the AC voltage applied to the ultrasonic generating source 11 is changed. Therefore, the ultrasonic generating device 310 can easily maintain a state in which at least one of the first elastic parts 355, 356 is electrically connected to the first electrode part 31.

[0095] In addition, since the second elastic member 361 has a plurality of second elastic parts 365, 366 with different natural frequencies, any of the second elastic parts 365, 366 is always unlikely to resonate even if the frequency of the AC voltage applied to the ultrasonic generating source 11 is changed. Therefore, the ultrasonic generating device 310 is likely to maintain a state in which at least one of the second elastic parts 365, 366 is electrically connected to the extended electrode part 33.

[0096] <Other embodiments> The present invention is not limited to the embodiments described above and in the drawings, and the following embodiments are also included in the technical scope of the present invention. In addition, the various features of the above-mentioned embodiments and the embodiments to be described later may be combined in any combination as long as they are not contradictory.

[0097] (1) In each of the above embodiments, the ultrasonic wave generating source may have a recess in an area where the first electrode portion is formed. A part of the elastic member may enter the recess and be connected to the first electrode portion. For example, as shown in FIG. 8, the ultrasonic wave generating source 411 may have a recess 432 in an area where the first electrode portion 431 is formed. The recess 432 is formed by adding a protrusion 433 to the first electrode portion 431. The first contact portion 356A of the first elastic member 351 described in the third embodiment may enter the recess 432 and be connected to the first electrode portion 431. As another example, as shown in FIG. 9, the ultrasonic wave generating source 511 may have a recess 532 in an area where the first electrode portion 531 is formed. The recess 532 is formed by recessing a part of the first electrode portion 531. The first contact portion 356A of the first elastic member 351 described in the third embodiment may enter the recess 532 and be connected to the first electrode portion 531.

[0098] (2) In the first and second embodiments, the number of first elastic members having different natural frequencies may be 3 or more. In the first and second embodiments, the number of second elastic members having different natural frequencies may be 3 or more.

[0099] (3) In the third embodiment, the number of first elastic portions having different natural frequencies may be 3 or more. In the third embodiment, the number of second elastic portions having different natural frequencies may be 3 or more.

[0100] (4) In each of the above embodiments, the first elastic member and the second elastic member have the same structural characteristics, but the first elastic member and the second elastic member may have different structural characteristics. For example, the first elastic member may be the contact probe described in the first embodiment, and the second elastic member may be the compression coil spring described in the second embodiment or the leaf spring described in the third embodiment.

[0101] (5) The method of fixing the elastic member may be by bonding with a general adhesive such as epoxy resin, by bonding with a conductive adhesive, by joining with a bonding material such as wax, or by fixing by welding, engagement, etc.

[0102] (6) In each of the above embodiments, the second elastic member may be omitted. In this case, the second wiring may be joined to the second electrode portion or to the ultrasonic focusing portion.

[0103] It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present invention is not limited to the embodiments disclosed herein, and is intended to include all modifications within the scope indicated by the claims or within the scope equivalent to the claims. [Explanation of symbols]

[0104] 1. Ultrasonic generating system 10. Ultrasonic generator 11...Ultrasonic source 12...Ultrasonic focusing section 13...Waveguide 15...Radiating surface 20…Contact surface 21...First reflective surface 22…Second reflective surface 30...Piezoelectric body 30A…First side 30B…Second side 31...First electrode part 32…Second electrode part 33…Extended electrode part 40…Main body 41...Flange section 51...First elastic member (elastic member) 51A…First elastic body 51B…First plunger 52...First elastic member (elastic member) 52A…First elastic body 52B…First plunger 53…First receiving member 53A…First receiving part (receiving part) 53B…First cylindrical part 54…First receiving member 54A…First receiving part (receiving part) 54B…First cylindrical part 61...Second elastic member 61A…Second elastic body 61B…Second plunger 62...Second elastic member 62A…Second elastic body 62B…Second plunger 63...Second receiving member 63A…Second receiving part 63B…Second cylinder part 64...Second receiving member 64A…Second receiving part 64B…Second cylinder part 67...Connecting member 71...1st wiring 72…Second wiring 80...Power supply device 81...Signal generator 82...Power amplifier 83…Measuring Instrument 201...Ultrasonic generating system 210...Ultrasonic generator 251...First elastic member (elastic member) 252...First elastic member (elastic member) 253…First receiving part (receiving part) 254…First wall part 261...Second elastic member 262...Second elastic member 263…Second receiving part 264…Second wall part 266…Insulation section 267...Connecting member 301...Ultrasonic generating system 310...Ultrasonic generator 351...First elastic member (elastic member) 353…First receiving part (receiving part) 355…First elastic part 355A…1st contact part 356…First elastic part 356A…1st contact part 357…First joint 361...Second elastic member 363…Second receiving part 365…Second elastic part 365A…Second contact part 366…Second elastic part 366A…Second contact part 367…Second joint 368…Insulation section 369…Connecting member 411…Ultrasonic source 431...First electrode part 432…Recess 433…Convex 511…Ultrasonic source 531...First electrode part 532…Recess AR…Exclusion area F…Focus

Claims

1. An ultrasonic source that generates ultrasonic waves; an ultrasonic focusing unit that focuses the ultrasonic waves generated from the ultrasonic generation source; a waveguide that transmits the ultrasonic waves focused by the ultrasonic focusing unit, The ultrasonic focusing unit includes: a first reflecting surface that reflects the ultrasonic waves generated by the ultrasonic wave generating source; a second reflecting surface that reflects the ultrasonic wave reflected by the first reflecting surface, The first reflecting surface and the second reflecting surface are arranged so that the ultrasonic wave reflected by the second reflecting surface is reflected as a plane wave and introduced into the waveguide, The ultrasonic wave generating source includes: A piezoelectric body; a first electrode portion provided on a first surface of the piezoelectric body opposite to the ultrasonic focusing portion side, Furthermore, the ultrasonic generator an elastic member electrically connected to the first electrode portion; a receiving portion disposed opposite the first electrode portion with the elastic member interposed therebetween; Ultrasonic generator.

2. A plurality of elastic members having different natural frequencies are arranged 2. The ultrasonic generating device according to claim 1.

3. The elastic member has a plurality of elastic portions having different natural frequencies and a connecting portion connecting the ends of the plurality of elastic portions.

2. The ultrasonic generating device according to claim 1.

4. The ultrasonic wave generating source has a second electrode portion provided on a second surface of the piezoelectric body opposite to the first surface, and an extended electrode portion extending from the second electrode portion onto the first surface while being spaced apart from the first electrode portion, The ultrasonic generator includes a second elastic member electrically connected to the extended electrode portion, and a second receiving portion disposed opposite the extended electrode portion with the second elastic member interposed therebetween. The ultrasonic generating device according to any one of claims 1 to 3.

5. the ultrasonic wave generating source has a recess in a region where the first electrode portion is formed, A part of the elastic member enters the recess and is connected to the first electrode portion. The ultrasonic generating device according to any one of claims 1 to 3.

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