Machining device

Abstract

To provide a machining device that is able to prevent liquid from leaking outside.SOLUTION: A machining device 1 includes: a holding table 10 configured to hold a workpiece 200; a cutting unit 20 configured to cut the workpiece 200 held by the holding table 10; a liquid supply unit 50 configured to supply cutting water to the workpiece 200 held by the holding table 10 or the cutting unit 20 configured to cut the workpiece 200; and a cover 73 composing a part of outer covering for the machining device. The cover 73 has a flow control member 74 configured to control a flow of the cutting water adhering to an internal surface 732.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a processing device having a cover that constitutes a part of an exterior thereof. [Background technology]

[0002] When cutting a workpiece with a cutting blade (processing unit) of a cutting device (processing device), the workpiece is held on a holding table and cutting water (liquid) is supplied from a cutting water nozzle (liquid supply unit), for example, to cool the processing heat generated by the cutting and to discharge cutting chips generated by the cutting from the top surface of the workpiece (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2023-018559 A Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, the exterior of such processing equipment is covered with a cover. In some cases, a part of the cover can be opened and closed. Cutting water (liquid) may adhere to the inside of such an openable cover, and when the cover is repeatedly opened and closed, the adhering cutting water (liquid) may drip down the inside of the cover and flow out of the processing equipment. If the processing equipment is installed in a clean room, a problem occurs in that the cleanliness level (purity) is reduced if the cutting water (liquid) flows into the clean room.

[0005] Therefore, there is a challenge to provide a processing device that has a cover that forms part of the exterior, and that does not allow cutting water (liquid) adhering to the inside of the cover to flow out of the processing device even when the cover is opened or closed.

[0006] An object of the present invention is to provide a processing device capable of suppressing liquid from leaking to the outside. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, the processing apparatus of the present invention is a processing apparatus for processing a workpiece, comprising a holding table for holding the workpiece, a processing unit for processing the workpiece held on the holding table, a liquid supply unit for supplying liquid to the workpiece held on the holding table or the processing unit for processing the workpiece, and a cover that forms part of the exterior of the processing apparatus, characterized in that the cover has a flow control unit for controlling the flow of the liquid adhering to the inner surface.

[0008] In the processing apparatus, the cover may be openable and closable so that an angle formed between the inner surface having the flow control portion and an object to be covered inside the processing apparatus changes.

[0009] In the processing apparatus, when the cover is closed, the angle between the inner surface and the covered object may be approximately 0 degrees, and when the cover is opened, the angle between the inner surface and the covered object may be approximately 90 degrees.

[0010] In the processing apparatus, the flow control section may store the liquid. Effect of the Invention

[0011] The present invention has an effect of suppressing liquid from leaking to the outside. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a perspective view showing a configuration example of a processing device according to the first embodiment. [Diagram 2] FIG. 2 is a perspective view showing a state in which the exterior cover of the processing apparatus shown in FIG. 1 is located at a closed position. [Diagram 3]FIG. 3 is a perspective view illustrating a state in which the exterior cover illustrated in FIG. 2 is located at an open position. [Figure 4] FIG. 4 is a side view showing the hinges of the exterior cover shown in FIG. [Diagram 5] FIG. 5 is a side view showing the hinges of the exterior cover shown in FIG. [Figure 6] 6 is a perspective view of a flow control member of the exterior cover shown in FIG. 2. FIG. [Figure 7] 7 is a perspective view of a flow control member of the exterior cover shown in FIG. 3. FIG. [Figure 8] FIG. 8 is a perspective view showing a modification of the flow control member of the exterior cover shown in FIG. [Figure 9] FIG. 9 is a perspective view showing a modification of the flow control member of the exterior cover shown in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0014] [Embodiment 1] A processing device according to a first embodiment of the present invention will be described with reference to the drawings, in which: Fig. 1 is a perspective view showing an example of the configuration of the processing device according to the first embodiment.

[0015] The processing apparatus 1 shown in Fig. 1 according to the first embodiment is a cutting apparatus that cuts a workpiece 200. The workpiece 200 to be processed by the processing apparatus 1 shown in Fig. 1 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, whose substrate is silicon, sapphire, gallium, or the like. The workpiece 200 has a surface 202 on which a plurality of mutually intersecting division lines 203 are set, and a device 204 is formed in an area partitioned by the division lines 203. The device 204 is, for example, an integrated circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), a Charge Coupled Device (CCD), or an image sensor such as a CMOS (Complementary Metal Oxide Semiconductor).

[0016] 1, the workpiece 200 is supported within an opening of the annular frame 210 by having an adhesive tape 209 attached to a back surface 206 behind a front surface 202 of the workpiece 200, the adhesive tape 209 being a disk shape having a diameter larger than the outer diameter of the workpiece 200 and having an annular frame 210 attached to its outer edge. The workpiece 200 is divided into individual devices 204 by cutting along intended division lines 203.

[0017] (Processing equipment) The processing apparatus 1 shown in FIG. 1 is a processing apparatus that holds a workpiece 200 on a holding table 10 and cuts the workpiece 200 along intended division lines 203 with a cutting blade 21 to divide the workpiece 200 into individual devices 204 .

[0018] As shown in FIG. 1, the processing device 1 includes a holding table 10 that holds the workpiece 200 by suction on a holding surface 11, a cutting unit 20 that cuts the workpiece 200 held on the holding table 10, an imaging unit 30 that photographs the workpiece 200 held on the holding table 10, and a control unit 100.

[0019] The processing device 1 also includes a moving unit 40 that moves the holding table 10 and the cutting unit 20 relatively. The moving unit 40 includes at least a processing feed unit 41 that processes and feeds the holding table 10 in the X-axis direction parallel to the horizontal direction, an indexing feed unit 42 that indexes and feeds the cutting unit 20 in the Y-axis direction parallel to the horizontal direction and perpendicular to the X-axis direction, a cutting feed unit 43 that cuts and feeds the cutting unit 20 in the Z-axis direction parallel to the vertical direction perpendicular to both the X-axis direction and the Y-axis direction, and a rotational moving unit 44 that rotates the holding table 10 around an axis parallel to the Z-axis direction. That is, the moving unit 40 moves the holding table 10 and the cutting unit 20 relatively in the X-axis direction, the Y-axis direction, the Z-axis direction, and around the axis.

[0020] The processing feed unit 41 moves the holding table 10 and the rotational movement unit 44 in the X-axis direction, which is the processing feed direction, to relatively move the cutting unit 20 and the holding table 10 along the X-axis direction. The indexing feed unit 42 moves the cutting unit 20 in the Y-axis direction, which is the indexing feed direction, to relatively move the cutting unit 20 and the holding table 10 along the Y-axis direction. The cutting feed unit 43 moves the cutting unit 20 in the Z-axis direction, which is the cutting feed direction, to relatively move the cutting unit 20 and the holding table 10 along the Z-axis direction. The rotational movement unit 44 is supported by the processing feed unit 41, supports the holding table 10, and is disposed so as to be freely movable in the X-axis direction together with the holding table 10.

[0021] The processing feed unit 41, the indexing feed unit 42 and the cutting feed unit 43 each include a known ball screw rotatably provided about its axis, a known motor for rotating the ball screw about its axis, and a known guide rail for supporting the holding table 10 or the cutting unit 20 movably in the X-axis, Y-axis or Z-axis direction. The rotation transfer unit 44 also includes a motor for rotating the holding table 10 about its axis.

[0022] The holding table 10 is disk-shaped, and a holding surface 11 for holding the workpiece 200 is formed of porous ceramics or the like. The holding table 10 is provided so as to be movable by a processing feed unit 41 between a processing area below the cutting unit 20 and a carry-in / out area spaced from below the cutting unit 20 for carrying in and out the workpiece 200, thereby being provided so as to be movable in the X-axis direction. The holding table 10 is provided so as to be rotatable by a rotary movement unit 44 about an axis parallel to the Z-axis direction.

[0023] The holding table 10 has a holding surface 11 connected to a suction source (not shown), and is sucked by the suction source to suck and hold the workpiece 200 placed on the holding surface 11. In the first embodiment, the holding table 10 sucks and holds the back surface 206 side of the workpiece 200 via an adhesive tape 209. In addition, a plurality of clamping units 12 for clamping an annular frame 210 are provided around the holding table 10, as shown in FIG.

[0024] The cutting unit 20 is a processing unit in which a cutting blade 21 is attached to a spindle 23 and cuts a workpiece 200 held on the holding table 10. The cutting unit 20 is provided so as to be movable in the Y-axis direction by an indexing feed unit 42 with respect to the workpiece 200 held on the holding table 10, and is provided so as to be movable in the Z-axis direction by a cutting feed unit 43. The cutting unit 20 is provided on a support frame 3 erected from the device main body 2 via the indexing feed unit 42, the cutting feed unit 43, and the like. The cutting unit 20 is capable of positioning the cutting blade 21 at any position on the holding surface 11 of the holding table 10 by the indexing feed unit 42 and the cutting feed unit 43.

[0025] The cutting unit 20 comprises a cutting blade 21, a spindle housing 22 which is freely movable in the Y-axis and Z-axis directions by an indexing feed unit 42 and a cutting feed unit 43, a spindle 23 which is rotatably mounted on the spindle housing 22 about its axis and has the cutting blade 21 attached to its tip, a spindle motor (not shown) which rotates the spindle 23 about its axis, a blade cover 24 which is attached to the tip surface of the spindle 23, and a liquid supply nozzle 25 which supplies liquid cutting water to the cutting blade 21.

[0026] The cutting blade 21 is an extremely thin cutting grindstone having a substantially ring shape. The cutting blade 21 is fixed to the tip of the spindle 23. In the first embodiment, the cutting blade 21 is a so-called hub blade having an annular base and an annular cutting blade disposed on the outer periphery of the annular base for cutting the workpiece 200. The cutting blade is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bond material such as metal or resin, and is formed to a predetermined thickness. In the present invention, the cutting blade 21 may be a so-called washer blade composed only of the cutting blade. The cutting blade 21 is attached to the tip of the spindle 23 and cuts the workpiece 200 held by the holding surface 11 of the holding table 10.

[0027] The cutting blade 21 is attached to the tip of the spindle 23, and is rotated around its axis by a spindle motor to rotate the cutting blade 21. The spindle motor is provided with a rotor that is attached to the spindle 23 and rotates integrally with the spindle 23, and a stator that is disposed on the outer periphery of the rotor and in the spindle housing 22, and rotates the rotor when power is supplied from a power source. In the spindle motor, the stator rotates the rotor, causing the spindle 23 to rotate around its axis.

[0028] The blade cover 24 covers at least the upper part of the cutting blade 21. The blade cover 24 is fixed to the tip surface of the spindle housing 22.

[0029] The liquid supply nozzle 25 supplies cutting water to the cutting blade 21 when the cutting blade 21 cuts the workpiece 200 held on the holding surface 11 of the holding table 10. The liquid supply nozzle 25 is attached to the blade cover 24. The liquid supply nozzles 25 extend parallel to the X-axis direction and are arranged at intervals from each other in the Y-axis direction. The liquid supply nozzles 25 position the lower ends of the cutting edges of the cutting blade 21 between each other and supply cutting water to the lower ends of the cutting edges of the cutting blade 21 during cutting.

[0030] The processing device 1 also includes a liquid supply unit 50 that supplies cutting water to the liquid supply nozzle 25 of the cutting unit 20. The liquid supply unit 50 supplies cutting water to the liquid supply nozzle 25 of the cutting unit 20, thereby supplying the cutting water, which is a liquid, to the workpiece 200 held on the holding table 10 and the cutting unit 20 that cuts the workpiece 200.

[0031] The imaging unit 30 is fixed to the cutting unit 20 so as to move integrally with the cutting unit 20. The imaging unit 30 includes an imaging element that captures an image of an area to be divided of the workpiece 200 held on the holding table 10 before cutting. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 30 captures an image of the workpiece 200 held on the holding table 10 to obtain an image for performing alignment between the workpiece 200 and the cutting blade 21, and outputs the obtained image to the control unit 100.

[0032] The processing device 1 also includes an X-axis position detection unit (not shown) for detecting the position of the holding table 10 in the X-axis direction, a Y-axis position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction, and a Z-axis position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis position detection unit and the Y-axis position detection unit can be configured with a linear scale parallel to the X-axis direction or the Y-axis direction, and a reading head. The Z-axis position detection unit detects the position of the cutting unit 20 in the Z-axis direction by a motor pulse. The X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit output the position of the holding table 10 in the X-axis direction and the position of the lower end of the cutting blade of the cutting unit 20 in the Y-axis direction or the Z-axis direction to the control unit 100.

[0033] In the first embodiment, the positions in the X-axis direction, the Y-axis direction, and the Z-axis direction of the holding table 10 and the cutting unit 20 of the processing device 1 are determined based on a predetermined reference position (not shown). In the first embodiment, the positions in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined by the distances in the X-axis direction, the Y-axis direction, and the Z-axis direction from a reference position. In the first embodiment, the XY coordinates represented by the X-axis direction and the Y-axis direction of the processing device 1 (coordinates indicated by the distance in the X-axis direction from a reference position indicating the position in the X-axis direction and the distance in the Y-axis direction from a reference position indicating the position in the Y-axis direction) may indicate any position of the workpiece 200 held on the holding surface 11 of the holding table 10.

[0034] The processing device 1 also includes an air curtain 60. The air curtain 60 is provided between the processing area and the carry-in / out area on the device body 2, and is disposed across the moving path of the holding table 10 moved in the X-axis direction by the processing feed unit 41, and extends linearly in the Y-axis direction. The air curtain 60 blows pressurized air toward the surface 201 of the workpiece 200 after cutting processing, which moves from the processing area toward the carry-in / out area, to remove cutting water from the surface 201 of the workpiece 200.

[0035] (Exterior cover) The processing device 1 also includes an exterior cover 70 that constitutes a part of the exterior of the processing device 1. Next, the exterior cover 70 will be described. FIG. 2 is a perspective view showing a state in which the cover of the exterior cover of the processing device shown in FIG. 1 is located at a closed position. FIG. 3 is a perspective view showing a state in which the cover of the exterior cover shown in FIG. 2 is located at an open position. FIG. 4 is a side view showing a hinge of the exterior cover shown in FIG. 2, etc. FIG. 5 is a side view showing a hinge of the exterior cover shown in FIG. 3, etc. FIG. 6 is a perspective view showing a flow control member of the exterior cover shown in FIG. 2. FIG. 7 is a perspective view showing a flow control member of the exterior cover shown in FIG. 3.

[0036] The exterior cover 70 covers the holding table 10 positioned in the carry-in / out area and the workpiece 200 held by suction on the holding table 10. For this reason, the workpiece 200 is an object covered by the exterior cover 70. The exterior cover 70 is provided in the carry-in / out area, and includes a support section 71, a case 72, and a cover 73, as shown in Figs. 2 and 3. The support section 71 is disposed adjacent to the holding table 10 positioned in the carry-in / out area of ​​the apparatus body 2 in the Y-axis direction, and stands upright from the apparatus body 2.

[0037] Case 72 is fixed to apparatus body 2 and surrounds holding table 10 positioned in the carry-in / out area. Case 72 is formed in a flat box shape with an opening 721 formed at the top and an access port 722 formed on the processing area side for freely inserting and removing holding table 10. Opening 721 and access port 722 communicate with the inside and outside of case 72.

[0038] The cover 73 includes a flat cover body 731, constitutes a part of the exterior of the processing device 1, and is attached to the case 72 by a hinge 75 shown in Figures 4 and 5 so as to be capable of opening and closing the opening 721. The hinge 75 includes a pair of flat plate portions 751 and a hinge 752 which rotatably connects the pair of flat plate portions 751 to each other.

[0039] One flat plate portion 751 of the hinge 75 is attached to one end of the case 72 in the Y-axis direction near the support portion 71, and the other flat plate portion 751 is attached to one end of the cover main body 731 in the Y-axis direction near the support portion 71. The rotation axis of the hinge 752 of the hinge 75 is parallel to the X-axis direction. In the first embodiment, the other flat plate portion 751 of the hinge 75 is attached to the cover main body 731 via a connecting plate member 76.

[0040] The flat plate portions 751 of the cover 73 rotate relative to each other around the rotation axis of the hinges 752 of the hinges 75, so that the cover body 731 is displaced between a closed position where the cover body 731 closes the opening 721 of the case 72 shown in Figures 2 and 4 and an open position where the cover body 731 opens the opening 721 of the case 72 shown in Figures 3 and 5. The cover 73 can open and close the opening 721 such that an angle formed between an inner surface 732 facing the holding table 10 and the workpiece 200 held on the holding table 10 and a surface 201 of the workpiece 200 inside the case 72 changes when the cover body 731 of the cover 73 is in the closed position.

[0041] In addition, when the opening 721 is closed due to the cover body 731 being displaced between the closed position and the open position, the angle between the inner surface 732 and the surface 201 of the workpiece 200 inside the case 72 is approximately 0 degrees. In addition, when the opening 721 is open, the angle between the inner surface 732 and the surface 201 of the workpiece 200 inside the case 72 is approximately 90 degrees.

[0042] 3, 4 and 5, the cover 73 includes a cover plate 733 and a flow control member 74 in addition to the cover body 731. The cover plate 733 is formed in a flat plate shape, connected to the end of the cover body 731 on the side away from the support portion 71 in the Y-axis direction, and overlaps the outer wall of the case 72 at the closed position. The flow control member 74 controls the flow of cutting water, which is a liquid adhering to the inner surface 732 of the cover body 731 of the cover 73, and is attached to the inner surface 732 of the cover body 731. That is, the inner surface 732 of the cover body 731 of the cover 73 has the flow control member 74.

[0043] 3, the flow control member 74 extends linearly along the X-axis direction and is attached to the inner surface 732 of the cover body 731 of the cover 73 over the entire length of the inner surface 732 in the X-axis direction. In addition, in the first embodiment, the flow control member 74 is disposed closer to one end in the Y-axis direction than the center in the Y-axis direction of the cover body 731 of the cover 73 and closer to the hinge 75.

[0044] The flow control member 74 is made of sheet metal or the like, and as shown in Figures 6 and 7, integrally includes an attachment portion 741 that is overlapped on and attached to the inner surface 732 of the cover body 731 of the cover 73, a pair of leakage prevention pieces 742 connected to both ends of the attachment portion 741 in the X-axis direction, and a flow control portion 743 connected to the attachment portion 741 and the pair of leakage prevention pieces 742.

[0045] The leakage prevention piece 742 is bent from the end of the mounting portion 741 in a direction perpendicular to the inner surface 732 , and prevents cutting water from leaking out of the exterior cover 70 from between the cover 73 and the case 72 .

[0046] The flow control section 743 controls the flow of cutting water, which is a liquid adhering to the inner surface 732 of the cover body 731 of the cover 73. The flow control section 743 is connected to the other end of the mounting section 741 in the Y-axis direction, which is distant from the hinge 75 of the cover 73, over the entire length of the mounting section 741 in the X-axis direction. The flow control section 743 is gradually inclined in a direction away from the inner surface 732 as it moves away from the mounting section 741 in the Y-axis direction over the entire length of the X-axis direction. For this reason, when the cover body 731 of the cover 73 is positioned at the open position, the flow control section 743 stores cutting water between the flow control section 743 and the inner surface 732. In addition, when the cover body 731 of the cover 73 is displaced from the open position to the closed position, the flow control section 743 causes the stored cutting water to flow over the surface and into the case 72.

[0047] The control unit 100 also controls each component of the processing device 1 to cause the processing device 1 to perform a processing operation on the workpiece 200. The control unit 100 is a computer having an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the processing device 1 to each component of the processing device 1 via the input / output interface device.

[0048] The control unit 100 is connected to a display unit (not shown) configured with a liquid crystal display device or the like for displaying the status and images of the machining operation, and an input unit (not shown) used by an operator to register machining content information, etc. The input unit is configured with a touch panel provided on the display unit.

[0049] (Machining operation) Next, a description will be given of the processing operation of the processing device 1. In the processing device 1 having the above-mentioned configuration, processing conditions are set in the control unit 100, the workpiece 200 is placed on the holding surface 11 of the holding table 10, and the cover body 731 of the cover 73 is positioned at the closed position. When the control unit 100 receives an instruction to start the processing operation from an operator or the like, the processing device 1 starts the processing operation.

[0050] When the processing operation is started, the processing device 1 suction-holds the workpiece 200 on the holding surface 11 via the adhesive tape 209, and clamps the annular frame 210 with the clamp section 12. In the processing device 1, the control unit 100 rotates the spindle 23 about its axis and controls the liquid supply unit 50 to supply cutting water from the liquid supply nozzle 25 to the cutting edge of the cutting blade 21. In the processing operation, the control unit 100 controls the moving unit 40 to move the holding table 10 to below the imaging unit 30, and the imaging unit 30 captures an image of the workpiece 200 suction-held on the holding table 10, thereby performing alignment.

[0051] In the processing operation, the control unit 100 of the processing device 1 controls the moving unit 40 etc. based on the processing conditions to relatively move the cutting blade 21 and the workpiece 200 along the planned dividing line 203, while cutting the cutting blade 21 into the planned dividing line 203 of the workpiece 200 until it reaches the adhesive tape 209, thereby performing cutting processing. The processing device 1 cuts the planned dividing line 203 of the workpiece 200 in accordance with the processing conditions, and divides the workpiece 200 into individual devices 204.

[0052] When all of the planned division lines 203 of the workpiece 200 have been cut, the processing device 1 moves the holding table 10 from the processing area toward the carry-in / out area while spraying air from the air curtain 60. The processing device 1 stops the movement of the holding table 10 in the carry-in / out area, stops the suction holding of the workpiece 200 on the holding table 10, and releases the clamp of the clamp unit 12. The operator positions the cover body 731 of the cover 73 of the exterior cover 70 in the open position, and removes the cut workpiece 200 from the holding surface 11 of the holding table 10.

[0053] The operator places the workpiece 200 to be cut next on the holding surface 11 of the holding table 10, and positions the cover body 731 of the cover 73 of the exterior cover 70 in the closed position. In this manner, the opening 721 of the processing device 1 is opened and closed by the cover 73, and the workpiece 200 before cutting is placed on the holding table 10, and the workpiece 200 after cutting is removed from the holding table 10.

[0054] Furthermore, during machining operations, cutting water may adhere to the inner surface 732 of the cover body 731 of the cover 73 of the exterior cover 70 due to air being sprayed from the air curtain 60. For this reason, when the cover body 731 of the cover 73 is positioned in the open position and then again in the closed position, the cutting water adhering to the inner surface 732 tends to leak out of the exterior cover 70.

[0055] However, in the processing device 1 according to the first embodiment, since the exterior cover 70 is provided with the flow control member 74 on the inner surface 732 of the cover body 731 of the cover 73, when the cover body 731 of the cover 73 is positioned in the open position, the cutting water adhering to the inner surface 732 is stored in the flow control portion 743 of the flow control member 74. Also, in the processing device 1 according to the first embodiment, when the cover body 731 of the cover 73 of the exterior cover 70 is displaced from the open position to the closed position, the cutting water stored in the flow control portion 743 is transmitted to the flow control portion 743 and flows into the case 72.

[0056] The processing apparatus 1 of the embodiment 1 described above has a flow control member 74 on the inner surface 732 of the cover body 731 of the cover 73 that constitutes part of the exterior, which controls the flow of cutting water adhering to the inner surface 732 of the cover 73. When the flow control member 74 is in the open position, it stores cutting water and, when it is displaced from the open position to the closed position, causes the stored cutting water to flow over the surface and into the case 72.

[0057] Therefore, in the processing device 1, the flow control section 743 of the flow control member 74 controls the flow of cutting water adhering to the inner surface 732 of the cover 73, thereby preventing the cutting water adhering to the inner surface 732 of the cover 73 from flowing out of the processing device 1 even when the cover 73 is opened or closed.

[0058] As a result, the machining device 1 has an effect of suppressing cutting water from leaking to the outside.

[0059] The present invention is not limited to the above embodiment. That is, various modifications can be made without departing from the gist of the present invention. For example, in the present invention, as shown in Figs. 8 and 9, the width of the mounting portion 741 of the flow control member 74 may be gradually narrowed toward the center in the longitudinal direction of the mounting portion 741, and the flow control portion 743 may be inclined so as to be gradually positioned downward toward the center in the longitudinal direction at the closed position. In the case shown in Figs. 8 and 9, when the cover body 731 of the cover 73 is displaced from the open position to the closed position, the accumulated cutting water flows from the center in the longitudinal direction of the flow control portion 743 of the flow control member 74 into the case 72, and the leakage of cutting water from the exterior cover 70 can be suppressed.

[0060] Fig. 8 is a perspective view showing a modified example of the flow control member of the exterior cover shown in Fig. 6. Fig. 9 is a perspective view showing a modified example of the flow control member of the exterior cover shown in Fig. 7. In Figs. 8 and 9, the same reference numerals are used to designate the same parts as those in the first embodiment, and the description thereof will be omitted.

[0061] In the present invention, the flow control portion 743 of the flow control member 74 may be inclined or curved in any direction as long as it gradually moves away from the inner surface 732 as it moves away from the mounting portion 741 in the Y-axis direction. In the present invention, the inner surface 732 of the cover body 731 of the cover 73 of the exterior cover 70 may be subjected to a hydrophilic treatment. [Explanation of symbols]

[0062] 1 Processing equipment 10 Holding table 20 Cutting unit (processing unit) 50 Liquid Supply Unit 73 Cover 200 Workpiece (covered object) 732 Inner surface 743 Flow Control Unit

Claims

1. A processing device for processing a workpiece, comprising: A holding table for holding the workpiece; a processing unit for processing the workpiece held on the holding table; a liquid supply unit for supplying liquid to the workpiece held on the holding table or to the processing unit for processing the workpiece; A cover that constitutes a part of the exterior of the processing device; Equipped with The cover has a flow control section for controlling the flow of the liquid adhering to the inner surface thereof.

2. 2. The processing apparatus according to claim 1, wherein the cover is openable and closable so that an angle formed between the inner surface having the flow control portion and an object to be covered inside the processing apparatus changes.

3. When the cover is closed, the angle between the inner surface and the covered object is approximately 0 degrees; 3. The processing apparatus according to claim 2, wherein when the cover is opened, an angle between the inner surface and the covered object is approximately 90 degrees.

4. 2. The processing apparatus according to claim 1, wherein the flow control portion stores the liquid.

Images