Mapping device and load port device

Abstract

To provide a mapping device capable of preventing a collision of a projection against a projecting wafer even if an interval of the projections in which a detection sensor is arranged is narrow.SOLUTION: A mapping device that detects a housing state of an object in a container that can house target objects at a predetermined interval along a first direction, includes: a mapping frame configured to move in the first direction and a second direction; a first detection unit that includes a pair of first protrusions protruding from the mapping frame in the second direction in an amount of a first length, the first protrusions being disposed with a first distance therebetween in a third direction, and first sensors disposed near respective extremities of the pair of the first protrusions; and a second detection unit that includes a pair of second protrusions protruding from the mapping frame in an amount of a second length longer than the first length, the second protrusions being disposed at locations same as those of the first protrusions in the third direction, and second sensors near respective extremities of the pair of the second protrusions, the second detecting unit being disposed at a location different from that of the first detecting unit by a predetermined distance.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present disclosure relates to a mapping apparatus and a load port apparatus. [Background technology]

[0002] Equipment for transferring plate-like objects such as substrates, such as load port equipment, is equipped with a mapping device that detects the storage state of objects stored in a container. The mapping device detects the number and positions of objects stored in the container, and detects whether the objects are properly stored in the container (see Patent Document 1). Objects detected by the mapping device include silicon substrates and processed silicon substrates, as well as thin plate-like materials such as glass substrates.

[0003] On the other hand, as the objects transported in semiconductor processing plants become larger and thinner, the containers and the objects contained in them are becoming more diverse. For example, a container for 200 mm (8 inch) silicon wafers and a container for 300 mm (12 inch) silicon wafers may be simultaneously conveyed through a semiconductor processing plant, and the two types of containers may be alternately delivered to a given load port device. In such a case, the mapping device installed in the load port is required to be compatible with both 200 mm and 300 mm silicon wafers.

[0004] However, when a conventional mapping device compatible with a container for 200 mm silicon wafers is applied to a container for 300 mm silicon wafers, if a 300 mm silicon wafer is present that protrudes slightly from the container, a problem may occur in which the detection unit of the mapping device collides with the silicon wafer even if the amount of protrusion is within the allowable range for a 200 mm silicon wafer. This is because the allowable range for the protrusion of the silicon wafer becomes narrow when the conventional mapping device compatible with a container for 200 mm silicon wafers is applied to a 300 mm silicon wafer. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2011-35384 A Summary of the Invention [Problem to be solved by the invention]

[0006] The present disclosure relates to a mapping device and a load port device that can prevent collisions between objects and sensors even when applied to a plurality of objects of different sizes. [Means for solving the problem]

[0007] In order to achieve the above object, a mapping device according to a first aspect of the present disclosure comprises: A mapping device that detects a state in which a plurality of objects are contained in a container that can contain the objects at predetermined intervals along a first direction, the mapping device comprising: a mapping frame moving in the first direction and in a second direction that is substantially perpendicular to the first direction; a first detection unit including a pair of first protrusions protruding from the mapping frame by a first length in the second direction and arranged at a first interval in a third direction that is substantially perpendicular to the first direction and the second direction, and a first sensor unit provided near each tip of the pair of first protrusions; The mapping frame includes a pair of second convex portions protruding from the mapping frame in the second direction by a second length longer than the first length and positioned at the same position as the first convex portions in the third direction, and a second sensor portion provided near each tip of the pair of second convex portions, and a second detection portion positioned at a position different by a predetermined distance from the first detection portion in the first direction.

[0008] The mapping device according to the first aspect of the present disclosure has a first detection unit and a second detection unit that are arranged at positions different from each other by a predetermined distance in a first direction, which is a direction in which the objects overlap, and the protruding length (second length) of the second protruding unit is longer than the protruding length (first length) of the first protruding unit. Since the first detection unit has a short protruding length, it is possible to detect an object that may collide with the second detection unit having a long protruding length while avoiding contact with an object that has jumped out of a container, and to prevent the object from colliding with the second detection unit by appropriate operation of a mapping frame or the like. In addition, by making the positions of the first protruding unit and the second protruding unit the same in the third direction, it is possible to widen the interval between the second protruding units by making maximum use of the opening width of the container for small-sized objects, and to widen the allowable range for objects to jump out.

[0009] For example, a mapping device according to a second aspect of the present disclosure includes: A mapping device that detects a state in which a plurality of objects are contained in a container that can contain the objects at predetermined intervals along a first direction, the mapping device comprising: a mapping frame movable in the first direction and a second direction substantially perpendicular to the first direction; a first detection unit including a pair of first protrusions protruding from the mapping frame by a first length in the second direction and arranged at a first interval in a third direction substantially perpendicular to the first direction and the second direction, and a first sensor unit provided near each tip of the pair of first protrusions; The mapping frame includes a pair of second protrusions protruding from the mapping frame in the second direction by a second length longer than the first length and arranged at a second interval in the third direction that is narrower than the first interval, and a second sensor unit provided near each tip of the pair of second protrusions, and a second detection unit arranged at a position a predetermined distance different from the first detection unit in the first direction.

[0010] The mapping device according to the second aspect of the present disclosure has a first detection unit and a second detection unit disposed at positions different from each other by a predetermined distance in the first direction, which is the overlapping direction of the objects, similarly to the mapping device according to the first aspect, and the protruding length (second length) of the second protrusion is longer than the protruding length (first length) of the first protrusion. Since the protruding length of the first detection unit is short, it is possible to detect an object that may collide with the second detection unit having a long protruding length while avoiding contact with an object that has jumped out of the container, and to prevent the object from colliding with the second detection unit by appropriate operation of the mapping frame or the like. In addition, by making the second interval of the second protrusion narrower than the first interval of the first protrusion, it is possible to avoid overlapping between the first direction top surface of a container that contains a small-sized object and the first protrusion when viewed from above, and it is possible to allow the second protrusion to pass through the top surface of the container in the vertical direction, thereby simplifying the movement of the mapping frame.

[0011] Also, for example, the first direction may be a downward direction, and the first detection unit may be disposed at the predetermined distance below the second detection unit. The first direction may be an upward direction, and the first detection unit may be disposed above the second detection unit by the predetermined distance.

[0012] In the mapping device according to the present disclosure, the first direction can be any direction, but for example, the present disclosure can be suitably applied to a mapping device in which the first direction, which is the movement direction of the mapping frame during detection, is a downward or upward direction.

[0013] Furthermore, for example, the mapping device according to the present disclosure may include a storage unit that stores a detection result of the object by the second detection unit.

[0014] The second detection unit can detect the number and position of objects contained in the container, as well as whether the objects are contained properly in the container. By having a memory unit for storing the detection results, devices such as load port equipment can easily use the detection results of the second detection unit after detection.

[0015] Furthermore, for example, the mapping device according to the present disclosure may have a movement control unit that, when a first detection result, which is a detection result of the object by the first detection unit, is input and the first detection result indicates the detection of the object by the first sensor unit, stops the movement of the mapping frame before the mapping frame moves the specified distance from the time the object is detected by the first sensor unit.

[0016] By the action of such a movement control unit, even if an object with a large protruding amount is present in a container that contains a large object, the movement of the mapping frame can be stopped before the second detection unit collides with the object. Note that, in addition to the movement control unit that stops the movement of the mapping frame, a movement control unit that slows down the movement of the mapping frame or changes the movement direction is also conceivable.

[0017] Furthermore, for example, the mapping device according to the present disclosure may have a third detection unit in which the shortest distance from a central axis of the container parallel to the first direction of the container to a detection position is longer than the first detection unit and the second detection unit.

[0018] In this type of mapping device, if there is an object that protrudes so far that it may collide with even the first detection unit, the third detection unit can detect the object and prevent the object from colliding with the first and second detection units by controlling the movement of the mapping frame.

[0019] A load port apparatus according to the present disclosure includes any one of the mapping apparatuses described above, A placement section for placing the container; and a door for opening and closing the lid of the container.

[0020] The mapping device according to the present disclosure may be used in any type of device, but can be suitably used, for example, as part of an interface section that transfers substrates and the like using containers within a semiconductor factory, such as a load port device provided in semiconductor processing equipment. [Brief description of the drawings]

[0021] [Figure 1] FIG. 1 is a schematic diagram of a load port apparatus having a mapping device according to a first embodiment of the present disclosure. [Diagram 2] FIG. 2 is an enlarged perspective view showing a main part of a mapping device provided in the load port apparatus shown in FIG. [Diagram 3] FIG. 3 is a front view of a main part of the mapping device as seen in a direction opposite to the second direction. [Figure 4] FIG. 4 is a plan view of a main part of the mapping device as viewed along a first direction. [Diagram 5] FIG. 5 is a conceptual diagram for explaining the shapes of the first convex portion and the second convex portion of the mapping device. [Figure 6] FIG. 6 is a conceptual diagram illustrating a state in which the mapping device detects objects of different sizes. [Figure 7] FIG. 7 is an explanatory diagram (partial cross-sectional view) showing a first stage in the detection operation by the mapping device shown in FIG. [Figure 8] FIG. 8 is an explanatory diagram (partial cross-sectional view) showing a second stage in the detection operation by the mapping device shown in FIG. [Figure 9] FIG. 9 is an explanatory diagram (partial cross-sectional view) showing a third stage in the detection operation by the mapping device shown in FIG. [Figure 10] FIG. 10 is a conceptual diagram comparing the comparative example with the mapping device according to the first embodiment. [Figure 11] FIG. 11 is a conceptual diagram comparing the mapping device according to the first embodiment with the mapping device according to the second embodiment. [Figure 12] FIG. 12 is a schematic perspective view of a main part of a mapping device according to the second embodiment of the present disclosure, viewed obliquely from above. [Figure 13] FIG. 13 is a schematic perspective view of a main part of a mapping device according to the second embodiment of the present disclosure, viewed obliquely from below. [Figure 14]FIG. 14 is a conceptual diagram showing the detection axes of the detection units in the mapping device according to the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] Hereinafter, the present invention will be described based on the embodiments shown in the drawings. FIG. 1 is a schematic perspective view of a load port apparatus 10 having a mapping apparatus 20 according to a first embodiment of the present disclosure. The mapping apparatus 20 according to this embodiment is provided around a door 15 of the load port apparatus 10. The mapping apparatus 20 detects the accommodation state of a substrate or a silicon wafer (for example, a first object 81a (see FIG. 7) and a second object 82a (see FIG. 6)) as objects accommodated in a first container 70 (see FIG. 7) and a second container 90 (see FIG. 6) as containers placed on the load port apparatus 10.

[0023] The load port device 10 is attached to an EFEM (not shown) or the like when used in a semiconductor factory. The load port device 10 functions as an interface unit for transferring objects such as silicon wafers contained in the first container 70 and the second container 90 and transported within the semiconductor factory from the first container 70 and the second container 90 to a predetermined semiconductor processing device. Examples of the first container 70 and the second container 90 that contain the first object 81a and the second object 82a include a FOUP, a FOSB, a SMIF, and an open cassette.

[0024] In the load port device 10 and mapping device 20 according to the first embodiment, a FOUP capable of accommodating a plurality of first objects 81a, which are 300 mm (12 inch) silicon wafers, is exemplified as the first container 70, and an open cassette capable of accommodating second objects 82a, which are 200 mm (8 inch) silicon wafers, is exemplified as the second container 90. However, the objects and their containers whose accommodation state is detected by the mapping device 20 are not limited to those exemplified as the first object 81a, the second object 82a, the first container 70, and the second container 90, and may be combinations of other objects and containers having different sizes and shapes.

[0025] Fig. 7 is an explanatory diagram (partial cross-sectional view) showing a first stage in the detection operation by the mapping device 20 shown in Fig. 1. As shown in Fig. 7, the first container 70 is capable of housing a plurality of first objects 80a at predetermined intervals along the first direction, that is, the negative Z-axis direction. Further, the first container 70 has a main opening 70a formed on the side of the first container 70 for taking out the first objects 80a.

[0026] 1, the load port equipment 10 has, in addition to the mapping device 20, a mounting section 19 for mounting a first container and a second container 90 for housing objects, a frame section 16 attached so as to cover the opening of the EFEM, and a door 15 for opening and closing a lid 74 (see FIGS. 8 and 9) of the first container 70 and a frame opening of the frame section 16. Note that the mapping device 20 is not limited to being provided in the load port equipment 10, and can be used to detect the housing state of the first and second objects 81a, 82a in the first container 70, the second container 90, and other containers, shelves, and the like that house the first and second objects 81a, 82a.

[0027] Fig. 2 is an enlarged perspective view showing the main parts of the mapping device 20 shown in Fig. 1. As shown in Fig. 2, the mapping device 20 has a mapping frame 28 including a horizontal portion 28a, a first detection unit 30, and a second detection unit 40. The mapping device 20 also has, as elements which can be optionally selected, a third detection unit 50 shown in Fig. 1, a mapping control unit 29 having a memory unit 25, a movement control unit 26, a calculation unit 27, etc., shown in Figs. 7 to 9, a first moving means 22, a second moving means 24, etc.

[0028] 1 and 7 to 9, in the description of the load port device 10 and the mapping device 20, the up-down direction is defined as the Z-axis direction, the direction perpendicular to the Z-axis in which the mounting unit 19 approaches or moves away from the frame unit 16 is defined as the Y-axis direction, and the direction perpendicular to the Z-axis and Y-axis is defined as the X-axis direction. In the mapping device 20 according to the first embodiment, the first direction coincides with the negative Z-axis direction, the second direction coincides with the negative Y-axis direction, and the third direction coincides with the negative X-axis direction. However, in mapping devices according to other embodiments, the first to third directions may be different from those of the mapping device 20 shown in FIG. 1 etc.

[0029] 2, the first detection unit 30 and the second detection unit 40 of the mapping device 20 are attached to a horizontal portion 28a extending in a third direction, which is a substantially horizontal direction, of the mapping frame 28. As shown in FIG 1, the mapping frame 28 is disposed in the load port device 10 near the door 15 or the opening of the frame portion 16 where the door 15 can be closed and opened.

[0030] 1 and 7, in a state in which the door 15 closes the opening of the frame portion 16, the mapping frame 28 is disposed at a position spaced a predetermined distance on the Y-axis positive side from the opening of the frame portion 16. In contrast, as shown in Figures 7 to 9, when detecting the storage state of the first object 81a in the first container 70, the mapping frame 28 moves from the state shown in Figures 1 and 7 in a second direction (Y-axis negative direction) that is substantially perpendicular to the first direction, and further moves in the first direction (Z-axis negative direction) (see Figures 8 and 9).

[0031] 2, the first detection unit 30 is disposed below (on the negative Z-axis direction) the second detection unit 40. The first detection unit 30 has a pair of first protrusions 33a, 33b protruding from the horizontal portion 28a of the mapping frame 28 in the second direction (on the negative Y-axis direction) by a first length L1, and first sensor units 34a, 34b provided near each tip of the pair of first protrusions 33a, 33b.

[0032] The pair of first protrusions 33a, 33b of the first detection unit 30 are disposed at a first interval W1 in a third direction (negative direction of the X-axis) perpendicular to the first and second directions. One of the first sensors 34a, 34b has a light-emitting element, and the other has a light-receiving element. The first detection unit 30 detects objects 81a, 82a that obstruct a first detection axis 32 connecting the pair of first sensors 34a, 34b, thereby detecting objects 81a, 82a that have protruded beyond a predetermined length from the storage positions of the first and second containers 70, 90.

[0033] Fig. 3 is a front view of a main part of the mapping device 20 viewed in the opposite direction to the second direction (from the negative Y-axis side toward the positive Y-axis side). As shown in Figs. 2 and 3, the second detection unit 40 is disposed above the first detection unit 30 (on the positive Z-axis side). As shown in Fig. 2, the second detection unit 40 has a pair of second protrusions 43a, 43b protruding from the horizontal portion 28a of the mapping frame 28 in the second direction (the negative Y-axis side) by a second length L2 longer than the first length L1, and second sensor units 44a, 44b provided near the respective tips of the pair of second protrusions 43a, 43b.

[0034] The pair of second protrusions 43a, 43b of the second detection unit 40 are disposed at the same positions as the pair of first protrusions 33a, 33b in a third direction (negative direction of the X-axis) perpendicular to the first and second directions. One of the second sensor units 44a, 44b has a light-emitting element, and the other has a light-receiving element. The second detection unit 40 detects the storage state of the objects 81a, 82a by detecting the position and time when the objects 81a, 82a block the second detection axis 42 connecting the pair of second sensor units 44a, 44b.

[0035] 3, the second detection unit 40 is disposed at a position different from the first detection unit 30 by a predetermined distance L11 in the first direction (negative Z-axis direction). More specifically, as shown in FIG 3, the second detection axis 42 of the second detection unit 40 is disposed above (in the opposite direction to) the first detection axis 32 of the first detection unit 30 by a predetermined distance L11 in the first direction (negative Z-axis direction).

[0036] 4 is a plan view of the main part of the mapping device 20 viewed along the first direction (from the positive side of the Z axis toward the negative side). As shown in FIG. 4, the first detection axis 32 of the first detection unit 30 is spaced apart from the horizontal part 28a of the mapping frame 28 by a length L12 in the second direction (negative direction of the Y axis), and the second detection axis 42 of the second detection unit 40 is spaced apart from the horizontal part 28a of the mapping frame 28 by a length L22 in the second direction (negative direction of the Y axis). Note that the length L12, the length L22, and the difference between the length L12 and the length L22 shown in FIG. 4 may be slightly different from or the same as the first length L1, the second length L2, and the difference between the first length L1 and the second length L2 shown in FIG. 2.

[0037] 5 is a conceptual diagram for explaining the shapes of the first convex portion 33b and the second convex portion 43b of the mapping device 20. As shown in FIG. 5, the first convex portion 33b and the second convex portion 43b are both part of the sensor attachment portion 60, and the first convex portion 33b and the second convex portion 43b are configured as an integral member. The sensor attachment portion 60 is fixed to the horizontal portion 28a of the mapping frame 28 by a bolt or the like. However, the shapes of the first convex portion 33b and the second convex portion 43b of the mapping device 20 are not limited to the shape shown in FIG. 5, and the first convex portion 33b and the second convex portion 43b may be configured as separate members.

[0038] 6 is a conceptual diagram illustrating a state in which the mapping device 20 detects a first object 81a and a second object 82a having different sizes. As shown in FIG. 6, the second container 90 that accommodates the small-sized second object 82a has an opening width W12 in the third direction (negative direction of the X-axis) narrower than the opening width of the first container 70 that accommodates the large-sized first object 81a. Therefore, in the mapping device 20 that is used for both the first object 81a and the second object 82a having different sizes, a restriction occurs in that the first interval W1, which is the interval between the second convex portions 43a and 43b in the third direction, cannot be made larger than the opening width W12 of the second container 90 in order to allow the second convex portions 43a and 43b to enter the second container 90 having a narrow opening width.

[0039] Fig. 10 is a conceptual diagram comparing a mapping device 920 according to a comparative example having only the second detection unit 40 with the mapping device 20 according to the embodiment. Fig. 10(a) to Fig. 10(c) show the positional relationship between the first detection unit 30, the second detection unit 40, and the third detection unit 50 and the first objects 81a, 81ab, 81ac, and the second object 82ab during a detection operation. As shown in Fig. 10(a), even if the mapping device 920 does not have the first detection unit and has only the second detection unit 40, the allowable range of the protrusion amount of the object (positional deviation amount in the positive Y-axis direction) is wide if only the small second object 82a is detected. In other words, if only the second object 82a is to be detected, even in the mapping device 920 of the comparative example, if the amount of protrusion is not detected by the third detection axis 52 of the third detection unit 50 arranged on the frame portion 16 (see Figure 1) or the like (if the second object 82a is closer to the second object 82ab shown by the dashed double-dotted line in the normal position shown by the solid line), no contact will occur between the second convex portions 43a, 43b and the second object 82a.

[0040] However, as shown in FIG. 10(b), when the mapping device 920 detects the large first object 81a, the allowable range of the protrusion amount of the object is narrower than that of the small second object 82a. That is, when detecting the first object 81a, in the mapping device 920 according to the comparative example, even if the protrusion amount is not detected by the third detection axis 52 of the third detection unit 50 arranged on the frame unit 16 (see FIG. 1), the second convex parts 43a and 43b may come into contact with the first object 81ab shown by the two-dot chain line as indicated by the arrow 99. Also, if the mapping device is dedicated to the large first object 81a, it is possible to deal with the problem by widening the interval between the second convex parts 43a and 43b in the third direction, but it is difficult to widen the interval between the second convex parts 43a and 43b in a mapping device that is used for both purposes.

[0041] 3, the mapping device 20 according to the first embodiment has a first detection unit 30 (hatched with diagonal lines) having first convex portions 33a, 33b whose protruding length (first length L1) in the second direction (negative Y-axis direction side) is shorter than that of the second detection unit 40. As shown in FIG. 10(c), since the protruding length of the first detection unit 30 in the second direction is shorter than that of the second detection unit 40, if the protruding amount is not detected by the third detection axis 52 of the third detection unit 50 (if the first detection unit 30 is located closer to the first object 81a in the normal position shown by the solid line than the first object 81ab shown by the two-dot chain line), no contact occurs between the first convex portions 33a, 33b and the first object 81a.

[0042] As shown in FIG. 10(c), the first detection axis 32 of the first detection unit 30 is located between the second detection axis 42 of the second detection unit 40 and the third detection axis 52 of the third detection unit 50 in the second direction. As a result, the first detection unit 30 can detect a large-sized first object 81a that is not detected by the third detection unit 50 (third detection axis 52) but has a protruding amount that may come into contact with the second convex parts 43a and 43b (a first object that is located at an intermediate position between the first object 81ab and the first object 81ac in FIG. 10(c)). When the mapping device 20 detects such first objects 81ab and 81ac by the first detection unit 30, the mapping device 20 can prevent the second convex parts 43a and 43b from coming into contact with the first object 81a by stopping the movement (lowering) of the mapping frame 28, etc.

[0043] In the third detection unit 50, the shortest distance from a container central axis 76 (see FIG. 1) parallel to the first direction of the first container 70 to a third detection axis 52 (see FIG. 10) which is the detection position is longer than the shortest distance from the container central axis 76 to the first detection axis 32 which is the detection position of the first detection unit 30 and the second detection axis 42 which is the detection position of the second detection unit 40. The third detection unit 50 has a third detection axis 52 which passes near the center of the opening of the frame unit 16 and extends in the Z-axis direction, for example, as shown in FIG. 1.

[0044] An example of the detection operation of the storage state of the first object 81a by the mapping device 20 will be described below with reference to Figs. 7 to 9. Fig. 7 shows a first stage in the detection operation of the first object 81a by the mapping device 20. In the first stage shown in Fig. 7, a first container 70 containing a plurality of first objects 81a is placed on the placement unit 19 of the load port device 10, but the lid 74 of the first container 70 is closed and the first container 70 is not connected to the frame unit 16 of the load port device 10. Moreover, in the state shown in Fig. 7, the mapping device 20 itself has not started the detection operation.

[0045] Fig. 8 shows a second stage in the detection operation of the substrate 80 in the mapping device 20. In the second stage shown in Fig. 8, the first container 70 placed on the placement portion 19 is connected to the frame portion 16, and the lid 74 of the first container 70 is opened by the door 15. After the door 15 engages with the lid 74 of the first container 70 while engaged with the frame portion 16 as shown in Fig. 7, the third moving means 23 pulls the door 15 in the positive direction of the Y axis as shown in Fig. 8, thereby opening the lid 74 of the first container 70.

[0046] Furthermore, the second moving means 24 of the mapping device 20 moves the horizontal portion 28a of the mapping frame 28 in the second direction (Y-axis negative direction), and inserts at least a portion of the first detection unit 30 and the second detection unit 40 fixed to the horizontal portion 28a of the mapping frame 28 into the first container 70. As a result, the second detection axis 42 of the second detection unit 40 is disposed above the first object 81a contained in the first container 70, as shown in FIG.

[0047] The second moving means 24 moves the horizontal part 28a of the mapping frame 28 in the Y-axis direction by rotating the mapping frame 28 or by translating the mapping frame 28 in the Y-axis direction. The second moving means 24 can move the horizontal part 28a of the mapping frame 28 in the second direction (Y-axis negative direction) independently of the opening operation of the door 15 by the third moving means 23.

[0048] Fig. 9 shows a third stage in the detection operation of the first object 81a by the mapping device 20. In the third stage shown in Fig. 9, the first moving means 22 moves the mapping frame 28 in the first direction (Z-axis negative direction), thereby moving the first and second detection units 30, 40, which are located at a position higher than the first object 81a stored on the top shelf in Fig. 8, to a position lower than the first object 81a stored on the bottom shelf as shown in Fig. 9.

[0049] That is, the first moving means 22 moves the first detection unit 30 and the second detection unit 40 along the first direction, which is the arrangement direction, so that the second detection axis 42 sequentially intersects with each of the first objects 81a to be detected. At this time, the second sensor units 44a, 44b of the second detection unit 40 output a detection signal that changes in accordance with the shielding by the first object 81a to the calculation unit 27 of the mapping device 20 shown in Figs. 7 to 9. In addition, the mapping device 20 has a sensor position detection unit 21, which detects the position of the second detection unit 40 in the Z-axis direction and outputs the signal to the calculation unit 27.

[0050] The calculation unit 27 detects the accommodation state of the first object 81a accommodated in the first container 70 by using the detection signal from the second detection unit 40, the position information from the sensor position detection unit 21, etc. As shown in Fig. 7 to Fig. 9, the mapping device 20 has a mapping control unit 29 having the calculation unit 27, a storage unit 25, a movement control unit 26, etc. The mapping control unit 29 is composed of, for example, a microcontroller, a memory, etc.

[0051] The memory unit 25 stores the second detection result, which is the detection result of the first object 81a by the second detection unit 40. The movement control unit 26 receives the first detection result, which is the detection result of the first object 81a contained in the first container 70 by the first detection unit 30. Furthermore, when the first detection result indicates the detection of the first object 81a by the first sensor units 34a and 34b, the movement control unit 26 can stop the movement of the mapping frame 28 before the mapping frame 28 moves downward a predetermined distance L11 (see FIG. 3) counting from the time of the detection of the first object 81a by the first sensor units 34a and 34b. The movement and stopping operation of the mapping frame 28 by the movement control unit 26 may be performed directly by the mapping control unit 29, or may be performed via the load port control unit 18 that controls the entire load port device 10 from the mapping control unit 29.

[0052] The detection of the accommodation state of the second object 82a (see FIG. 6) by the mapping device 20 can be performed in the same manner as the above-mentioned second object 82a. However, as shown in FIG. 10(a), when all of the second objects 82a that may collide with the second convex portions 43a, 43b can be detected by the third detection unit 50, the detection may be performed without operating the first detection unit 30. Also, for example, when the second container 90 that accommodates the second object 82a is an open cassette, the mapping device 20 or the load port device 10 may be able to rotate the second container 90 by 90 degrees on the placement unit 19 and change the arrangement direction of the second object 82a from the Y-axis direction to the Z-axis direction.

[0053] The mapping device 20 according to this embodiment has a first detection unit 30 and a second detection unit 40 that are disposed at positions different from each other by a predetermined distance L11 in the first direction (Z-axis negative direction) that is the overlapping direction of the objects, and the protruding length (second length L2) of the second convex parts 43a, 43b is longer than the protruding length (first length L1) of the first convex parts 33a, 33b. Since the protruding length of the first detection unit 30 is short, it is possible to detect the objects 81a, 82a that may collide with the second detection unit 40 having a long protruding length while avoiding contact with the objects 81a, 82a that have jumped out of the storage position of the container, and to prevent the objects 81a, 82a from colliding with the second detection unit 40 by appropriate operation of the mapping frame 28, etc. Furthermore, by making the positions of the first convex portions 33a, 33b and the second convex portions 43a, 43b the same in the third direction (negative direction of the X-axis), it is possible to widen the spacing (W1) in the third direction between the second convex portions 43a, 43b by making maximum use of the opening width W12 (see Figure 6) of the second container 90 of the smaller-sized second object 82a, and the allowable range of the protrusion amount (positional deviation amount in the positive direction of the Y-axis) of the first object 81a can be made wider considering that it is shared with the second object 82a.

[0054] Second embodiment FIG. 11 is a conceptual diagram comparing the mapping device 20 according to the first embodiment with the mapping device 120 according to the second embodiment. FIG. 11(a) shows the first convex portions 33a, 33b and the second convex portions 43a, 43b of the mapping device 20 according to the first embodiment superimposed on the shape of the first direction upper surface 92 of the second container 90. As shown in FIG. 11(a), in the first mapping device 20, the interval in the third direction between the second convex portions 43a, 43b is approximately equal to the first interval W1 in the third direction between the first convex portions 33a, 33b. In this case, it is possible to lengthen the interval in the third direction between the second convex portions 43a, 43b, but when viewed from the Z-axis direction, the tips of the second convex portions 43a, 43b and the first direction upper surface 92 of the second container 90 partially overlap.

[0055] 11(b), in the mapping device 20, when the first detection unit 30 and the second detection unit 40 are inserted into the second container 90, it is necessary to align the heights of the first detection unit 30 and the second detection unit 40 with the first direction upper surface 92 of the second container 90. Meanwhile, FIG. 11(c) shows the first convex portions 133a, 133b and the second convex portions 143a, 143b of the mapping device 120 according to the second embodiment superimposed on the shape of the first direction upper surface 92 of the second container 90.

[0056] 11(c), in the mapping device 120 according to the second embodiment, a pair of second protrusions 143a, 143b of the second detection unit 140 are arranged at a second interval W2 narrower than the first interval W1 in the third direction. In the mapping device 120, unlike in FIG. 11(a), when viewed from the Z-axis direction, the tips of the second protrusions 143a, 143b do not overlap with the first-direction upper surface 92 of the second container 90.

[0057] 11(d), in the mapping device 120, when the first detection unit 30 and the second detection unit 40 are inserted into the second container 90, they can be lowered along the Z-axis direction without aligning the heights of the first detection unit 30 and the second detection unit 40 with the first-direction upper surface 92 of the second container 90. In such a mapping device 120, for example, it is possible to make the movement of the mapping frame 28 during detection common to the case where the detection is performed for the first object 81a contained in the first container 70 and the case where the detection is performed for the second object 82a contained in the second container 90.

[0058] Fig. 12 is a schematic perspective view showing a main part of a mapping device 120 according to the second embodiment, and Fig. 13 is a partially enlarged view showing a first convex portion 133b, a first sensor unit 134b, a second convex portion 143b, and a second sensor unit 144b in the mapping device 120. As shown in Figs. 12 and 13, the mapping device 120 also has a first detection unit 130 and a second detection unit 140, similar to the mapping device 20 shown in Fig. 2.

[0059] 12, the first detection unit 130 has a pair of first protrusions 133a, 133b protruding from the horizontal portion 28a of the mapping frame 28 in the second direction (negative Y-axis direction) by a first length L1, and first sensors 134a, 134b provided near the respective tips of the pair of first protrusions 133a, 133b. The pair of first protrusions 133a, 133b of the first detection unit 130 are disposed with a first interval W1 therebetween in a third direction (negative X-axis direction) perpendicular to the first and second directions (see FIG. 11(c)).

[0060] One of the first sensors 134a, 134b has a light-emitting element, and the other has a light-receiving element. The first detection unit 130 detects objects 81a, 82a that obstruct a first detection axis 132 connecting the pair of first sensors 134a, 134b, thereby detecting objects 81a, 82a that have protruded beyond a predetermined length from the storage positions of the first and second containers 70, 90.

[0061] As shown in FIG. 12, the second detection unit 140 is disposed above the first detection unit 130 (Z-axis positive direction side). As shown in FIG. 12 and FIG. 13, the second detection unit 140 has a pair of second protrusions 143a, 143b protruding from the horizontal portion 28a of the mapping frame 28 by a second length L2 longer than the first length L1 in the second direction (Y-axis negative direction side), and second sensor units 144a, 144b provided near the respective tips of the pair of second protrusions 143a, 143b. The pair of second protrusions 143a, 143b of the second detection unit 140 are disposed with a second interval W2 narrower than the first interval W1 in the third direction (see FIG. 11(c)). As with the mapping device 20 shown in FIG. 3, the second detection unit 140 is disposed at a position different by a predetermined distance from the first detection unit 30 in the first direction (Z-axis negative direction). The second detection section 140 detects the accommodation state of the objects 81a, 82a by detecting the position and time at which the objects 81a, 82a block a second detection axis 142 connecting the pair of second sensor sections 144a, 144b.

[0062] Fig. 14 shows the positional relationship between the first detection unit 130 and the second detection unit 140 and the first objects 81a, 81ab, and 81ac during the detection operation. Like the first detection unit 30 shown in Fig. 10, the first detection unit 130 shown in Fig. 14 can detect the large first object 81a that is not detected by the third detection axis 52 of the third detection unit but has a protruding amount that may come into contact with the second convex portions 143a and 143b (a first object located in the middle between the first object 81ab and the first object 81ac in Fig. 14).

[0063] 14, the second interval W2 in the third direction of the second detection unit 140 is narrower than the interval (first interval W1) in the third direction of the second detection unit 40 in the mapping device 20 shown in FIG 10(c). Therefore, the mapping device 120 has a narrower allowable range of the protrusion amount of the first object that does not contact the second convex portions 143a, 143b of the second detection unit 140 than the mapping device 20, and it is necessary to narrow the interval in the Y-axis direction between the first detection axis 132 and the second detection axis 142.

[0064] The mapping device 120 of the second embodiment is similar to the mapping device 20 except that a pair of second protrusions 143a, 143b of the second detection unit 140 are arranged at a second interval W2 that is narrower than the first interval W1, and in terms of the commonalities with the mapping device 20, it has the same effects as the mapping device 20.

[0065] The present invention has been described above while showing the embodiment, but it goes without saying that the present invention is not limited to the above-mentioned embodiment and includes other embodiments and modified examples. For example, in the mapping device 20, 120, the first direction is downward, and the first detection unit 30, 130 is disposed a predetermined distance L11 below the second detection unit 40, 140, but conversely, the first direction may be upward, and the first detection unit may be disposed a predetermined distance above the second detection unit. When the first direction is downward, the mapping frame 28 of the mapping device 20, 120 moves downward to detect the objects 81a, 82a. On the other hand, when the first direction is upward, the mapping frame of the mapping device moves upward to detect the objects.

[0066] 5 and 13, and can be appropriately changed according to the shapes of the first and second sensor units 33a, 33b, 133a, 133b, 34a, 34b, 134a, 134b, etc. The first detection axes 32, 132 and second detection axes 42, 142 of the first detection units 30, 130 and second detection units 40, 140 may be parallel to the third direction, or may be inclined with respect to the third direction or the horizontal direction.

[0067] The first sensor units 33a, 33b, 133a, 133b and the second sensor units 43a, 43b, 143a, 143b are not limited to combinations of light-emitting elements and light-receiving elements, but may be combinations of light-emitting elements and light-receiving elements and reflecting elements, or combinations of generators and detectors for electromagnetic waves other than light, etc. [Explanation of symbols]

[0068] 10...Load port equipment 15…Door 16…Frame section 18...Load port control unit 19...Placement section 20, 120...Mapping device 21...Sensor position detection unit 22…First means of transportation 23…Third transportation means 24…Second transportation means 25...Storage section 26...Movement control unit 27...Arithmetic section 28…Mapping frame 28a…Horizontal part 29...Mapping control section 30, 130...First detection section 32, 132...First detection axis 33a, 33b, 133a, 133b...first convex portion 34a, 34b, 134a, 134b...First sensor section L1…First length W1…First interval L12, L11, L22…length 40, 140...Second detector 42, 142...Second detection axis 43a, 43b, 143a, 143b...Second protrusion 44a, 44b, 144a, 144b...Second sensor section L2: Second length R2: Second detection result 50…Third detection section 52…Third detection axis 70…1st container 70a…Main opening 74…Lid 76…Container center axis 81a…First object 82a…Second Object 90…Second container 92...Top surface in the first direction W12…Opening width 97, 98, 99...Arrows

Claims

1. 1. A mapping device for detecting a state in which a plurality of objects are contained in a container capable of containing the objects at predetermined intervals along a first direction, the mapping device comprising: a mapping frame moving in the first direction and in a second direction that is substantially perpendicular to the first direction; a first detection unit including a pair of first protrusions protruding from the mapping frame by a first length in the second direction and arranged at a first interval in a third direction that is substantially perpendicular to the first direction and the second direction, and a first sensor unit provided near each tip of the pair of first protrusions; A mapping device comprising: a pair of second convex portions protruding from the mapping frame by a second length longer than the first length in the second direction and positioned at the same position as the first convex portions in the third direction; and a second sensor portion provided near each tip of the pair of second convex portions, and a second detection portion positioned at a position different by a predetermined distance from the first detection portion in the first direction.

2. 1. A mapping device for detecting a state in which a plurality of objects are contained in a container capable of containing the objects at predetermined intervals along a first direction, the mapping device comprising: a mapping frame movable in the first direction and in a second direction substantially perpendicular to the first direction; a first detection unit including a pair of first protrusions protruding from the mapping frame by a first length in the second direction and arranged at a first interval in a third direction substantially perpendicular to the first direction and the second direction, and a first sensor unit provided near each tip of the pair of first protrusions; A mapping device comprising: a pair of second convex portions protruding from the mapping frame by a second length longer than the first length in the second direction and arranged at a second interval narrower than the first interval in the third direction; and a second sensor portion provided near each tip of the pair of second convex portions, and a second detection portion arranged at a position a predetermined distance different from the first detection portion in the first direction.

3. the first direction is a downward direction, and the first detection unit is disposed at the predetermined distance below the second detection unit; or 3. The mapping device according to claim 1, wherein the first direction is an upward direction, and the first detection unit is disposed above the second detection unit by the predetermined distance.

4. The mapping device according to claim 1 or 2, further comprising a storage unit configured to store a second detection result that is a detection result of the object by the second detection unit.

5. A mapping device as described in claim 1 or claim 2, further comprising a movement control unit that, when a first detection result, which is a detection result of the object by the first detection unit, is input and the first detection result indicates the detection of the object by the first sensor unit, stops the movement of the mapping frame before the mapping frame moves the specified distance from the time the object is detected by the first sensor unit.

6. 3. The mapping device according to claim 1, further comprising a third detector, the shortest distance from a central axis of the container parallel to the first direction of the container to a detection position being longer than the first detector and the second detector.

7. A mapping device according to claim 1 or 2; A placement section for placing the container; and a door for opening and closing the lid of the container.

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