Sensor, sensor system, and electronic apparatus

Abstract

To provide a sensor, a sensor system, and an electronic apparatus that can improve characteristics.SOLUTION: According to an embodiment, a sensor includes a base body, a fixation part, and a movable part supported to the fixation part. The movable part includes a plurality of annular parts, and a plurality of connection parts. The plurality of annular parts is individually provided around the fixation part centered on the fixation part. The plurality of annular parts includes a first annular part, a second annular part, and a third annular part. The second annular part is provided between the first annular part and the fixation part. The third annular part is provided between the second annular part and the fixation part. The plurality of connection parts includes a first connection part and a second connection part. The first connection part is connected to the first annular part and the second annular part. The second connection part is connected to the second annular part and the third annular part. The first connection part and the second connection part extend along a first radial direction. The first radial direction passes through a first center of the fixation part.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE FIELD OF THE DISCLOSURE Embodiments of the invention relate to sensors, sensor systems and electronic devices. [Background technology]

[0002] For example, there is a sensor having a MEMS (Micro Electro Mechanical Systems) structure. In some cases, electronic devices are controlled by the force obtained by the sensor. It is desirable to improve the characteristics of the sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Patent No. 7,040,163 Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE DISCLOSURE Embodiments of the present invention provide sensors, sensor systems and electronic devices that allow for improved performance. [Means for solving the problem]

[0005] According to an embodiment, the sensor includes a base body including a first surface, a fixed portion fixed to the first surface, and a movable portion supported by the fixed portion. A gap is provided between the first surface and the movable portion. The movable portion includes a plurality of annular portions and a plurality of connecting portions. Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface. The plurality of annular portions include a first annular portion, a second annular portion, and a third annular portion. The second annular portion is provided between the first annular portion and the fixed portion. The third annular portion is provided between the second annular portion and the fixed portion. The second annular portion is adjacent to the first annular portion. The third annular portion is adjacent to the second annular portion. The plurality of connecting portions include a first connecting portion and a second connecting portion. The first connecting portion is provided between the first annular portion and the second annular portion, and is connected to the first annular portion and the second annular portion. The second connection portion is provided between the second annular portion and the third annular portion and is connected to the second annular portion and the third annular portion. The first connection portion and the second connection portion are aligned along a first radial direction. The first radial direction passes through a first center in the first plane of the fixing portion and is aligned along the first plane. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 2] FIG. 2 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Diagram 3] FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 5] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 8] FIG. 8 is a schematic view illustrating an electronic device according to the second embodiment. [Figure 9] 9(a) to 9(h) are schematic views illustrating applications of the electronic device according to the embodiment. [Figure 10] 10(a) and 10(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] (First embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. 2 and 3 are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 2 is a cross-sectional view taken along the line A1-A2 in Fig. 1. Fig. 3 is a cross-sectional view taken along the line A3-A4 in Fig. 1. As shown in FIGS. 1 to 3, a sensor 110 according to the embodiment includes a base body 50s, a fixed part 10F, and a movable part 10M.

[0008] The base 50s includes a first surface 50a. The fixed portion 10F is fixed to the first surface 50a. The movable portion 10M is supported by the fixed portion 10F. A gap G1 is provided between the first surface 50a and the movable portion 10M. For example, an insulating member 55 is provided on the first surface 50a. The fixed portion 10F is provided on the insulating member 55. No insulating member 55 is provided between the first surface 50a and the movable portion 10M.

[0009] The movable part 10M is conductive. The movable part 10M may include, for example, conductive silicon. The fixed part 10F is conductive. The fixed part 10F may include, for example, conductive silicon. The fixed part 10F is electrically connected to the movable part 10M. The insulating member 55 may include, for example, silicon oxide.

[0010] The movable portion 10M includes a plurality of annular portions 10 and a plurality of connecting portions 20. Each of the plurality of annular portions 10 is provided around the fixed portion 10F with the fixed portion 10F as the center on a first plane PL1 along the first surface 50a.

[0011] The direction perpendicular to the first plane PL1 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction. The first plane PL1 is parallel to the XY plane.

[0012] For example, each of the multiple annular portions 10 is concentric about the fixing portion 10F. Each of the multiple annular portions 10 extends along a circular circumferential direction.

[0013] For example, the multiple annular portions 10 include a first annular portion 11, a second annular portion 12, and a third annular portion 13. The multiple annular portions 10 may further include a fourth annular portion 14, a fifth annular portion 15, etc. The number of the multiple annular portions 10 is arbitrary.

[0014] The second annular portion 12 is provided between the first annular portion 11 and the fixed portion 10F. The third annular portion 13 is provided between the second annular portion 12 and the fixed portion 10F. The second annular portion 12 is adjacent to the first annular portion 11 among the multiple annular portions 10. The third annular portion 13 is adjacent to the second annular portion 12 among the multiple annular portions 10. The second annular portion 12 is closest to the first annular portion 11 among the multiple annular portions 10. The third annular portion 13 is closest to the second annular portion 12 among the multiple annular portions 10.

[0015] The multiple connection portions 20 include a first connection portion 21 and a second connection portion 22. The multiple connection portions 20 may include a third connection portion 23 and a fourth connection portion 24, etc. The number of the multiple connection portions 20 is arbitrary.

[0016] The first connecting portion 21 is provided between the first annular portion 11 and the second annular portion 12. The first connecting portion 21 is connected to the first annular portion 11 and the second annular portion 12. The second connecting portion 22 is provided between the second annular portion 12 and the third annular portion 13. The second connecting portion 22 is connected to the second annular portion 12 and the third annular portion 13. As shown in FIG. 1, the first connecting portion 21 and the second connecting portion 22 are aligned along a first radial direction Dr1. The first radial direction Dr1 passes through the first center 10C in the first plane PL1 of the fixing portion 10F and is aligned along the first plane PL1. In this example, the first radial direction Dr1 is the X-axis direction.

[0017] As shown in FIG. 1, a sensor 110 is provided with a plurality of fixed electrodes 30. The plurality of fixed electrodes 30 are fixed to, for example, the first surface 50a. For example, a signal including an AC component is applied between a part of the plurality of fixed electrodes 30 and the movable part 10M. This causes the movable part 10M to vibrate. The AC component may have, for example, a frequency component that excites the resonant vibration of the movable part 10M. When an external force is applied to the vibrating movable part 10M, the vibration state changes. By detecting the change in the vibration state, the applied external force can be detected. The change in the vibration state is detected, for example, as a change in electrostatic capacitance. The change in the vibration state due to the external force is caused, for example, by Coriolis force. The change in the vibration state can be detected, for example, by another part of the plurality of fixed electrodes 30. The signal may be supplied, for example, by the control unit 70. The change in the vibration state may be detected, for example, by the control unit 70.

[0018] In the embodiment, at least three adjacent annular portions 10 are connected by a connection portion 20 along the first radial direction Dr1. The three annular portions 10 connected by the connection portion 20 vibrate in unison. This provides a high-intensity signal regarding the vibration. At least three adjacent annular portions 10 are connected linearly.

[0019] For example, there is a first reference example in which adjacent multiple annular portions 10 are not linearly connected. In the first reference example, for example, the extending direction of the first connection portion 21 intersects with the extending direction of the second connection portion 22. In such a first reference example, the coupling between adjacent multiple annular portions 10 is weak. For example, in the case of resonant vibration that vibrates in the radial direction, in the first reference example, the positions at which the multiple annular portions 10 are connected are averaged. In such a first reference example, adjacent multiple annular portions 10 do not vibrate in conjunction with each other. For this reason, the strength of the detected signal is low.

[0020] In contrast, in the embodiment, at least three adjacent annular portions 10 are connected by a connection portion 20 along the first radial direction Dr1. The at least three annular portions 10 vibrate in unison. This allows a signal of high strength to be detected. For example, high sensitivity can be obtained. For example, a high S / N ratio can be obtained. According to the embodiment, a sensor with improved characteristics can be provided.

[0021] On the other hand, for example, in the second reference example, the entire movable part 10M has a honeycomb structure. In this case, the extending direction of the connection part 20 is not the radial direction. For example, in the case of resonant vibration vibrating in the radial direction, the strength of the signal obtained in such a second reference example is low.

[0022] In contrast, in the embodiment, the multiple connection parts 20 are aligned along the radial direction. As a result, at least three annular parts 10 connected to each other by the connection parts 20 aligned along the radial direction can vibrate in unison. A signal with high strength can be obtained. In the embodiment, for example, high rigidity can be obtained. Stable detection is possible. For example, high vibration resistance and high sensitivity can be obtained.

[0023] As shown in FIG. 1, the multiple connection portions 20 may further include a fixed portion side connection portion 20i. The fixed portion side connection portion 20i is connected to the fixed portion 10F. The fixed portion side connection portion 20i is directly or indirectly connected to the third annular portion 13. In this example, the fixed portion side connection portion 20i is aligned along the first radial direction Dr1. As will be described later, the fixed portion side connection portion 20i may be aligned along a cross radial direction that crosses the first radial direction Dr1.

[0024] 1, the plurality of annular portions 10 may further include a fourth annular portion 14. The fourth annular portion 14 is provided between the third annular portion 13 and the fixing portion 10F. The fourth annular portion 14 is adjacent to the third annular portion 13 among the plurality of annular portions 10. The fourth annular portion 14 is closest to the third annular portion 13 among the plurality of annular portions 10.

[0025] 1, the multiple connection portions 20 further include a third connection portion 23. The third connection portion 23 is provided between the third annular portion 13 and the fourth annular portion 14. The third connection portion 23 is connected to the third annular portion 13 and the fourth annular portion 14. The third connection portion 23 is aligned along the first radial direction Dr1.

[0026] 1, in this example, the plurality of annular portions 10 further includes a fifth annular portion 15. The fifth annular portion 15 is provided between the fourth annular portion 14 and the fixing portion 10F. The fifth annular portion 15 is adjacent to the fourth annular portion 14 among the plurality of annular portions 10. The fifth annular portion 15 is closest to the fourth annular portion 14 among the plurality of annular portions 10.

[0027] 1, the plurality of connecting portions 20 may further include a fourth connecting portion 24. The fourth connecting portion 24 is provided between the fourth annular portion 14 and the fifth annular portion 15. The fourth connecting portion 24 is connected to the fourth annular portion 14 and the fifth annular portion 15. In this example, the fourth connecting portion 24 is along a cross radial direction Dx. The cross radial direction Dx passes through the first center 10C of the fixing portion 10F, is along the first plane PL1, and crosses the first radial direction Dr1.

[0028] As shown in FIG. 1, the multiple connection parts 20 may include a first other connection part 21A and a second other connection part 22A. The first other connection part 21A is provided between the first annular part 11 and the second annular part 12. The first other connection part 21A is connected to the first annular part 11 and the second annular part 12. The second other connection part 22A is provided between the second annular part 12 and the third annular part 13. The second other connection part 22A is connected to the second annular part 12 and the third annular part 13. The first other connection part 21A and the second other connection part 22A are aligned along a second radial direction Dr2. The second radial direction Dr2 passes through the first center 10C of the fixing part 10F and is aligned along the first plane PL1. The second radial direction Dr2 intersects with the first radial direction Dr1. For example, the second radial direction Dr2 is inclined with respect to the first radial direction Dr1. The angle between the second radiation direction Dr2 and the first radiation direction Dr1 may be, for example, 5 degrees or more and 85 degrees or less. The angle between the second radiation direction Dr2 and the first radiation direction Dr1 may be, for example, 10 degrees or more and 60 degrees or less.

[0029] As shown in FIG. 1, the sensor 110 may include a plurality of fixed electrodes 30. The plurality of fixed electrodes 30 are fixed to the first surface 50a. For example, the plurality of fixed electrodes 30 include a first fixed electrode 31 and a second fixed electrode 32. The first fixed electrode 31 is between the first annular portion 11 and the second annular portion 12. The second fixed electrode 32 is between the second annular portion 12 and the third annular portion 13. The first fixed electrode 31 is between the first connecting portion 21 and the first other connecting portion 21A in the circumferential direction centered on the fixed portion 10F. The second fixed electrode 32 is between the second connecting portion 22 and the second other connecting portion 22A in the circumferential direction.

[0030] As already described, the sensor 110 may further include a control unit 70. The control unit 70 is capable of applying an electrical signal between the fixed portion 10F and the first fixed electrode 31. The electrical signal includes an AC component.

[0031] The multiple connection portions 20 may further include a third other connection portion 23A. The third other connection portion 23A is provided between the third annular portion 13 and the fourth annular portion 14. The third other connection portion 23A is connected to the third annular portion 13 and the fourth annular portion 14. In this example, the third other connection portion 23A is aligned along the second radial direction Dr2.

[0032] For example, the multiple fixed electrodes 30 may include a third fixed electrode 33. The third fixed electrode 33 is located between the third annular portion 13 and the fourth annular portion 14. The third fixed electrode 33 is located between the third connection portion 23 and the third other connection portion 23A in the circumferential direction.

[0033] In this example, the plurality of fixed electrodes 30 includes a fourth fixed electrode 34. The fourth fixed electrode 34 is located between the fourth annular portion 14 and the fifth annular portion 15.

[0034] In this example, the direction from the fixed portion 10F to the fourth fixed electrode 34 is along the first radial direction Dr1. For example, the fourth fixed electrode 34 is between the fixed portion side connecting portion 20i and the first connecting portion 21. For example, the fifth annular portion 15 is separated in the first radial direction Dr1 from the first connecting portion 21, the second connecting portion 22, and the third connecting portion 23, which extend in the first radial direction Dr1. One of the multiple fixed electrodes 30 may be provided between the fixed portion 10F and the first connecting portion 21.

[0035] 1, the sensor 110 may further include an outer electrode 30o. The outer electrode 30o is fixed to the first surface 50a. The first annular portion 11 is between the second annular portion 12 and the outer electrode 30o. The outer electrode 30o may control the movable portion 10M or detect a detection state.

[0036] FIG. 4 is a schematic plan view illustrating the sensor according to the first embodiment. 4 illustrates the fixed part 10F and the movable part 10M. In the sensor 111 according to the embodiment, the direction in which the fourth connection part 24 extends is the first radial direction Dr1. Except for this, the configuration of the sensor 111 may be similar to the configuration of the sensor 110.

[0037] In the sensor 111, the multiple annular portions 10 include a fourth annular portion 14 and a fifth annular portion 15. The fourth annular portion 14 is between the third annular portion 13 and the fixed portion 10F. The fifth annular portion is provided between the fourth annular portion 14 and the fixed portion 10F. The fourth annular portion 14 is adjacent to the third annular portion 13 among the multiple annular portions 10. The fifth annular portion 15 is adjacent to the fourth annular portion 14 among the multiple annular portions 10. The multiple connecting portions 20 include a fourth connecting portion 24. The fourth connecting portion 24 is provided between the fourth annular portion 14 and the fifth annular portion 15. The fourth connecting portion 24 is connected to the fourth annular portion 14 and the fifth annular portion 15. The fourth connecting portion 24 is along the first radial direction Dr1.

[0038] In the sensor 111, the multiple connection portions 20 include a fifth connection portion 25. The fifth connection portion 25 is provided between the fifth annular portion 15 and the fixed portion 10F. The fifth connection portion 25 is connected to the fifth annular portion 15 and the fixed portion 10F. The fifth connection portion 25 is along the cross radial direction Dx. The fifth connection portion 25 corresponds to the fixed portion side connection portion 20i.

[0039] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. 5 illustrates the fixed part 10F and the movable part 10M. In the sensor 112 according to the embodiment, the direction in which the fourth connection part 24 extends is the cross radial direction Dx. Except for this, the configuration of the sensor 112 may be the same as the configuration of the sensor 110.

[0040] FIG. 6 is a schematic plan view illustrating the sensor according to the first embodiment. 6 illustrates the fixed part 10F and the movable part 10M. In the sensor 113 according to the embodiment, the direction in which the third connection part 23 extends is the cross radial direction Dx. Except for this, the configuration of the sensor 113 may be the same as the configuration of the sensor 110.

[0041] As described above, the sensors 110 to 113 include a base 50s including a first surface 50a, a fixed portion 10F fixed to the first surface 50a, and a movable portion 10M supported by the fixed portion 10F. A gap G1 is provided between the first surface 50a and the movable portion 10M. The movable portion 10M includes a plurality of annular portions 10 and a plurality of connecting portions 20. Each of the plurality of annular portions 10 is provided around the fixed portion 10F with the fixed portion 10F as the center on a first plane PL1 along the first surface 50a. A part of the plurality of connecting portions 20 (for example, the first connecting portion 21 and the second connecting portion 22) extends along a first radial direction Dr1. The first radial direction Dr1 passes through a first center 10C on the first plane PL1 of the fixed portion 10F and is along the first plane PL1. The above-mentioned portions of the multiple connection portions 20 (such as the first connection portion 21 and the second connection portion 22) connect portions of the multiple annular portions 10 (such as the first annular portion 11, the second annular portion 12 and the third annular portion 13) to one another.

[0042] Another part of the plurality of connecting portions 20 extends along the cross radial direction Dx. The cross radial direction Dx passes through the first center 10C of the fixing portion 10F and is along the first plane PL1. The cross radial direction Dx intersects with the first radial direction Dr1. Another part of the plurality of connecting portions 20 connects another two of the plurality of annular portions 10 to each other. The other two of the plurality of annular portions 10 are between the above-mentioned part of the plurality of annular portions 10 and the fixing portion 10F.

[0043] In this manner, the annular portion 10 provided inside the multiple annular portions 10 connected in the first radial direction Dr1 may be connected by a connecting portion 20 extending along the cross radial direction Dx. By providing the connecting portion 20 extending along the cross radial direction Dx, for example, some of the multiple annular portions 10 can be loosely connected, and the vibration state of the movable portion 10M can be appropriately controlled. For example, a well-balanced vibration can be obtained while obtaining a high-intensity signal.

[0044] As shown in FIG. 1 and other figures, the multiple annular portions 10 may include a fixed portion-side annular portion 10i. The fixed portion-side annular portion 10i is closest to the fixed portion 10F among the multiple annular portions 10. For example, the fixed portion-side annular portion 10i may be connected to the fixed portion 10F or another annular portion 10 by a connection portion 20 extending in the cross radial direction Dx. In this example, the multiple fixed electrodes 30 include a fifth fixed electrode 35. The fifth fixed electrode 35 is provided between the fixed portion 10F and the fixed portion-side annular portion 10i.

[0045] The sensors 110 to 113 may include a first fixed electrode 31. The first fixed electrode 31 is fixed to the first surface 50a. The first fixed electrode 31 is located between the first annular portion 11 and the second annular portion 12. The direction from the fixed portion 10F to the first fixed electrode 31 is along the cross radial direction Dx. The first fixed electrode 31 is provided in the cross radial direction Dx that crosses the first radial direction Dr1 in which the connection portion 20 extends. Such a first fixed electrode 31 can effectively detect the vibration state of at least one of the first annular portion 11 and the second annular portion 12.

[0046] In the embodiment, a plurality of sets of the connection portions 20 arranged in one radial direction may be provided. The plurality of sets are arranged in the circumferential direction.

[0047] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. 7 illustrates a fixed part 10F and a movable part 10M. In the sensor 120 according to the embodiment, at least one of the multiple fixed electrodes 30 includes multiple partial electrodes. The configuration of the sensor 120 other than this may be similar to the configuration of the sensor 110, etc.

[0048] In this example, at least one of the multiple fixed electrodes 30 is a second fixed electrode 32. The second fixed electrode 32 includes multiple partial electrodes. The multiple partial electrodes include a first partial electrode 30a and a second partial electrode 30b. For example, a direction from at least a part of the first partial electrode 30a to at least a part of the second partial electrode 30b is along a circumferential direction. In this example, two second partial electrodes 30b are provided. The first partial electrode 30a is provided between the two partial electrodes in the circumferential direction. Different signals may be supplied to the multiple partial electrodes. Signals obtained from the multiple partial electrodes may be processed to perform detection.

[0049] As shown in FIG. 7, the movable part 10M may further include a first structure 41. The first structure 41 is connected to the first annular part 11. The first annular part 11 is between the second annular part 12 and the first structure 41. The width of the first structure 41 along the first radial direction Dr1 is wider than the width of the first annular part 11 along the first radial direction Dr1. The first structure 41 functions as a first mass body. The first structure 41 makes it possible to control vibration characteristics. For example, the first structure 41 makes it possible to adjust the resonance frequency.

[0050] As shown in FIG. 7, the movable part 10M may further include a second structure 42. The second structure 42 is connected to the first annular part 11. The second structure 42 is provided between the first annular part 11 and the second annular part 12. The width of the second structure 42 along the first radial direction Dr1 is wider than the width of the first annular part 11 along the first radial direction Dr1. The second structure 42 functions as a second mass body. The vibration characteristics can be controlled. For example, the resonance frequency can be adjusted.

[0051] As shown in FIG. 7, the movable part 10M may further include a first radiating structure 28p. The first radiating structure 28p is connected to one of the plurality of annular parts 10. In this example, the first radiating structure 28p is connected to the fourth annular part 14. The first radiating structure 28p extends from one of the plurality of annular parts 10 along a first radial direction Dr1. The first radiating structure 28p is separated from another one of the plurality of annular parts 10 in the first radial direction Dr1. In this example, the first radiating structure 28p is separated from the fifth annular part 15 in the first radial direction Dr1. The other one of the plurality of annular parts 10 is adjacent to the one of the plurality of annular parts 10 among the plurality of annular parts 10. The other one of the plurality of annular parts 10 is closest to the one of the plurality of annular parts 10 among the plurality of annular parts 10.

[0052] The movable part 10M may further include a second radiating structure 28q. The second radiating structure 28q is connected to the one of the plurality of annular parts 10. The second radiating structure 28q is connected to the fifth annular part 15. The second radiating structure 28q extends from the other one of the plurality of annular parts 10 toward the one of the plurality of annular parts 10 along a first radial direction Dr1. The second radiating structure 28q extends from the fifth annular part 15 toward the fourth annular part 14 along the first radial direction Dr1. The second radiating structure 28q is separated from the first radiating structure 28p in the first radial direction Dr1.

[0053] By providing such a radiating structure, the distribution of the mass can be made uniform throughout the entire structure without connecting adjacent annular portions, making it easier to obtain higher characteristics.

[0054] As shown in FIG. 7, the sensor 120 may include a connection member 48. The connection member 48 is fixed to the first surface 50a. A fixed portion 10F is provided around the connection member 48. An electrical connection may be made through the connection member 48. In this example, the connection member 48 includes a first connection member 48a and a second connection member 48b. The connection member 48 (e.g., the first connection member 48a and the second connection member 48b, etc.) may be electrically insulated from the fixed portion 10F and the movable portion 10M. At least a part of the connection member 48 (e.g., the first connection member 48a and the second connection member 48b, etc.) may be electrically connected to the fixed portion 10F or the movable portion 10M by wiring for electrical connection or the like.

[0055] Second embodiment The second embodiment relates to an electronic device. FIG. 8 is a schematic view illustrating an electronic device according to the second embodiment. 8, an electronic device 310 according to an embodiment includes a sensor according to the first embodiment (e.g., sensor 110) and a circuit control unit 170. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a driving device 185. According to the embodiment, for example, the circuit 180 for controlling the driving device 185 can be controlled with high accuracy.

[0056] 8, a sensor system 210 according to an embodiment includes a sensor according to the first embodiment (for example, the sensor 110) and a detection target member 81. The sensor 110 is fixed to the detection target member 81. The sensor 110 can detect a signal from the detection target member 81.

[0057] 9(a) to 9(h) are schematic views illustrating applications of the electronic device according to the embodiment. As shown in FIG. 9(a), the electronic device 310 may be at least a part of a robot. As shown in FIG. 9(b), the electronic device 310 may be at least a part of a machine robot installed in a manufacturing plant or the like. As shown in FIG. 9(c), the electronic device 310 may be at least a part of an automatic guided vehicle in a factory or the like. As shown in FIG. 9(d), the electronic device 310 may be at least a part of a drone (unmanned aerial vehicle). As shown in FIG. 9(e), the electronic device 310 may be at least a part of an airplane. As shown in FIG. 9(f), the electronic device 310 may be at least a part of a ship. As shown in FIG. 9(g), the electronic device 310 may be at least a part of a submarine. As shown in FIG. 9(h), the electronic device 310 may be at least a part of a car. The electronic device 310 may include, for example, at least one of a robot and a moving object.

[0058] 10(a) and 10(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in Fig. 10(a), a sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transmitting / receiving unit 420. In the example of Fig. 10(a), the sensor 110 is depicted as the sensor. The transmitting / receiving unit 420 can transmit a signal obtained from the sensor 110, for example, by at least one of a wireless and a wired method. The sensor 430 is provided, for example, on a slope surface 410 of a road 400 or the like. The sensor 430 can monitor, for example, the state of a facility (for example, infrastructure) or the like. The sensor 430 may be, for example, a state monitoring device.

[0059] For example, the sensor 430 detects a change in the condition of the slope surface 410 of the road 400 with high accuracy. The change in the condition of the slope surface 410 includes, for example, at least one of a change in the inclination angle and a change in the vibration state. A signal (inspection result) obtained from the sensor 110 is transmitted by the transceiver unit 420. The condition of a facility (e.g., infrastructure) can be monitored, for example, continuously.

[0060] As shown in FIG. 10(b), the sensor 430 is provided, for example, in a part of a bridge 460. The bridge 460 is provided on a river 470. For example, the bridge 460 includes at least one of a main girder 450 and a pier 440. The sensor 430 is provided in at least one of the main girder 450 and the pier 440. For example, due to deterioration or the like, the angle of at least one of the main girder 450 and the pier 440 may change. For example, the vibration state of at least one of the main girder 450 and the pier 440 may change. The sensor 430 detects these changes with high accuracy. The detection result can be transmitted to any location by the transmitting / receiving unit 420. Anomalies can be effectively detected.

[0061] The embodiments may include the following technical solutions. (Technical proposal 1) a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with A gap is provided between the first surface and the movable portion, The movable portion includes a plurality of annular portions and a plurality of connection portions, Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, the plurality of annular portions include a first annular portion, a second annular portion, and a third annular portion; The second annular portion is provided between the first annular portion and the fixed portion, The third annular portion is provided between the second annular portion and the fixed portion, the second annular portion is adjacent to the first annular portion, the third annular portion is adjacent to the second annular portion, the plurality of connection portions include a first connection portion and a second connection portion, the first connection portion is provided between the first annular portion and the second annular portion and is connected to the first annular portion and the second annular portion; the second connection portion is provided between the second annular portion and the third annular portion and is connected to the second annular portion and the third annular portion; The first connection portion and the second connection portion are aligned along a first radial direction, The first radial direction passes through a first center of the fixed portion in the first plane and is along the first plane.

[0062] (Technical proposal 2) The plurality of connection portions further include a fixed portion side connection portion, The fixed portion side connection portion is connected to the fixed portion, the fixed portion side connection portion is directly or indirectly connected to the third annular portion, A sensor as described in Technical Proposal 1, wherein the fixed portion side connection portion is aligned along the first radial direction.

[0063] (Technical proposal 3) The plurality of connection portions further include a fixed portion side connection portion, The fixed portion side connection portion is connected to the fixed portion, the fixed portion side connection portion is directly or indirectly connected to the third annular portion, The fixed portion side connection portion is aligned along the cross radial direction, The sensor described in technical proposal 1, wherein the intersecting radial direction passes through the first center, lies along the first plane, and intersects with the first radial direction.

[0064] (Technical proposal 4) the plurality of annular portions further includes a fourth annular portion; The fourth annular portion is provided between the third annular portion and the fixed portion, the fourth annular portion is adjacent to the third annular portion, The plurality of connection portions further includes a third connection portion, the third connection portion is provided between the third annular portion and the fourth annular portion and is connected to the third annular portion and the fourth annular portion; The sensor described in Technical Solution 1 or 2, wherein the third connection portion is aligned along the first radial direction.

[0065] (Technical proposal 5) the plurality of annular portions further includes a fifth annular portion; The fifth annular portion is provided between the fourth annular portion and the fixed portion, the fifth annular portion is adjacent to the fourth annular portion, The plurality of connection portions further includes a fourth connection portion, the fourth connection portion is provided between the fourth annular portion and the fifth annular portion and is connected to the fourth annular portion and the fifth annular portion; A sensor as described in Technical Proposal 4, wherein the fourth connection portion is aligned along the first radial direction.

[0066] (Technical proposal 6) the plurality of annular portions further includes a fifth annular portion; The fifth annular portion is provided between the fourth annular portion and the fixed portion, the fifth annular portion is adjacent to the fourth annular portion, The plurality of connection portions further includes a fourth connection portion, the fourth connection portion is provided between the fourth annular portion and the fifth annular portion and is connected to the fourth annular portion and the fifth annular portion; The fourth connection portion is aligned along a cross radial direction, The sensor described in technical proposal 4, wherein the intersecting radial direction passes through the first center, lies along the first plane, and intersects with the first radial direction.

[0067] (Technical proposal 7) the plurality of annular portions further includes a fourth annular portion; The fourth annular portion is provided between the third annular portion and the fixed portion, the fourth annular portion is adjacent to the third annular portion, The plurality of connection portions further includes a third connection portion, the third connection portion is provided between the third annular portion and the fourth annular portion and is connected to the third annular portion and the fourth annular portion; The third connection portion is aligned along a cross radial direction, The sensor described in technical proposal 1, wherein the intersecting radial direction passes through the first center, lies along the first plane, and intersects with the first radial direction.

[0068] (Technical proposal 8) The plurality of connection portions include a first other connection portion and a second other connection portion, the first other connection portion is provided between the first annular portion and the second annular portion and is connected to the first annular portion and the second annular portion; the second other connection portion is provided between the second annular portion and the third annular portion and is connected to the second annular portion and the third annular portion; The first other connection portion and the second other connection portion are arranged along a second radial direction, The sensor according to any one of Technical Solutions 1 to 7, wherein the second radial direction passes through the first center, is aligned with the first plane, and intersects with the first radial direction.

[0069] (Technical proposal 9) Further comprising a plurality of fixed electrodes fixed to the first surface, the plurality of fixed electrodes includes a first fixed electrode and a second fixed electrode, the first fixed electrode is between the first annular portion and the second annular portion, the second fixed electrode is between the second annular portion and the third annular portion, the first fixed electrode is located between the first connection portion and the first other connection portion in a circumferential direction about the fixed portion, The sensor described in Technical Proposal 8, wherein the second fixed electrode is located between the second connection portion and the second other connection portion in the circumferential direction.

[0070] (Technical proposal 10) At least one of the plurality of fixed electrodes includes a plurality of partial electrodes, A sensor as described in technical proposal 9, wherein a direction from at least a portion of one of the plurality of partial electrodes to at least a portion of another of the plurality of partial electrodes is along the circumferential direction.

[0071] (Technical proposal 11) The sensor described in Technical Solution 9 or 10, further comprising a control unit capable of applying an electrical signal between the fixed portion and the first fixed electrode.

[0072] (Technical proposal 12) The movable portion further includes a first structure, the first structure is connected to the first annular portion, The sensor according to any one of Technical Solutions 1 to 11, wherein the first annular portion is between the second annular portion and the first structure.

[0073] (Technical proposal 13) the movable portion further includes a first radiating structure; the first radiating structure is connected to one of the plurality of annular portions; the first radiating structure extends from the one of the plurality of annular portions along the first radial direction; the first radiating structure is spaced from another one of the plurality of annular portions in the first radial direction; The sensor described in Technical Solution 1, wherein the other one of the plurality of annular portions is adjacent to the one of the plurality of annular portions.

[0074] (Technical proposal 14) the movable portion further includes a second radiating structure; the second radiating structure is connected to the other one of the plurality of annular portions; the second radiating structure extends along the first radial direction from the other one of the plurality of annular portions to the one of the plurality of annular portions; The sensor described in technical proposal 13, wherein the second radiating structure is spaced apart from the first radiating structure in the first radiation direction.

[0075] (Technical proposal 15) an outer electrode fixed to the first surface; The sensor described in Technical Proposal 1, wherein the first annular portion is between the second annular portion and the outer electrode.

[0076] (Technical proposal 16) a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with A gap is provided between the first surface and the movable portion, The movable portion includes a plurality of annular portions and a plurality of connection portions, Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, Some of the plurality of connection portions extend along a first radial direction, the first radial direction passes through a first center of the fixing portion in the first plane and is aligned along the first plane; A sensor, wherein the portions of the plurality of connecting portions connect portions of the plurality of annular portions to one another.

[0077] (Technical proposal 17) Another portion of the plurality of connection portions extends along the cross radial direction, the cross radial direction passes through the first center, is aligned along the first plane, and crosses the first radial direction; the other portion of the plurality of connecting portions connects another two of the plurality of annular portions to each other; The sensor described in Technical Proposal 16, wherein the other two of the plurality of annular portions are located between the portion of the plurality of annular portions and the fixed portion.

[0078] (Technical proposal 18) Further comprising a first fixed electrode fixed to the first surface, the first fixed electrode is between the first annular portion and the second annular portion, The sensor described in Technical Proposal 3, wherein the direction from the fixed portion to the first fixed electrode is along the intersecting radial direction.

[0079] (Technical proposal 19) A sensor according to Technical Proposal 1; a detection target member to which the sensor is fixed; A sensor system comprising:

[0080] (Technical proposal 20) A sensor according to any one of technical proposals 1 to 18; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; Equipped with electronic devices.

[0081] According to the embodiments, it is possible to provide a sensor, a sensor system, and an electronic device that can improve characteristics.

[0082] In this specification, "vertical" and "parallel" do not only mean strictly vertical and strictly parallel, but also include, for example, variations in the manufacturing process, and may mean substantially vertical and substantially parallel.

[0083] The above describes the embodiment of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor, such as the member, substrate, sensor unit, housing, sensor element, base, fixed unit, movable unit, and control unit, are included in the scope of the present invention as long as a person skilled in the art can implement the present invention in the same way and obtain the same effect by appropriately selecting them from the known range.

[0084] Furthermore, any combination of two or more elements of each of the specific examples, within the scope of technical feasibility, is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0085] In addition, all sensors, sensor systems, and electronic devices that can be implemented by a person skilled in the art by appropriate design modifications based on the sensors, sensor systems, and electronic devices described above as embodiments of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0086] In addition, within the scope of the concept of the present invention, a person skilled in the art may conceive of various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0087] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0088] 10: annular portion, 10C: first center, 10F: fixed portion, 10M: movable portion, 10i: fixed portion side annular portion, 11-15: first to fifth annular portions, 20: connection portion, 20i: fixed portion side connection portion, 21-25: first to fifth connection portions, 21A-23A: first to third other connection portions, 28p, 28q: first and second radiation structures, 30: fixed electrode, 30a, 30b: first and second partial electrodes, 30o: outer electrode, 31-35: first to fifth fixed electrodes, 41, 42: first and second structures, 50a: first surface, 50s: base, 55: insulating member, 70: control unit, 81: detection target member, 110-113, 120: sensor, 170: circuit control unit, 180: circuit, 185: driving device, 210: sensor system, 310: electronic device, 400: road, 410: slope surface, 420: transmitter / receiver, 430: sensor, 440: pier, 450: main girder, 460: bridge, 470: river, Dr1, Dr2: first and second radial directions, Dx: cross radial direction, G1: gap, PL1: first plane, S1: signal

Claims

1. a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with A gap is provided between the first surface and the movable portion, The movable portion includes a plurality of annular portions and a plurality of connection portions, Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, the plurality of annular portions include a first annular portion, a second annular portion, and a third annular portion, The second annular portion is provided between the first annular portion and the fixed portion, The third annular portion is provided between the second annular portion and the fixed portion, the second annular portion is adjacent to the first annular portion, the third annular portion is adjacent to the second annular portion, the plurality of connection portions include a first connection portion and a second connection portion, the first connection portion is provided between the first annular portion and the second annular portion and is connected to the first annular portion and the second annular portion; the second connection portion is provided between the second annular portion and the third annular portion and is connected to the second annular portion and the third annular portion, The first connection portion and the second connection portion are aligned along a first radial direction, The sensor, wherein the first radial direction passes through a first center of the fixed portion in the first plane and is along the first plane.

2. The plurality of connection portions further include a fixed portion side connection portion, The fixed portion side connection portion is connected to the fixed portion, the fixed portion side connection portion is directly or indirectly connected to the third annular portion, The fixed portion side connection portion is aligned along the cross radial direction, The sensor of claim 1 , wherein the cross radial direction passes through the first center, is along the first plane, and intersects the first radial direction.

3. the plurality of annular portions further includes a fourth annular portion, The fourth annular portion is provided between the third annular portion and the fixed portion, the fourth annular portion is adjacent to the third annular portion, The plurality of connection portions further include a third connection portion, the third connection portion is provided between the third annular portion and the fourth annular portion and is connected to the third annular portion and the fourth annular portion, The sensor of claim 1 , wherein the third connection portion is aligned with the first radial direction.

4. the plurality of annular portions further includes a fifth annular portion, The fifth annular portion is provided between the fourth annular portion and the fixed portion, the fifth annular portion is adjacent to the fourth annular portion, The plurality of connection portions further includes a fourth connection portion, the fourth connection portion is provided between the fourth annular portion and the fifth annular portion and is connected to the fourth annular portion and the fifth annular portion, The fourth connection portion is aligned along a cross radial direction, The sensor of claim 3 , wherein the cross radial direction passes through the first center, is along the first plane, and intersects the first radial direction.

5. The plurality of connection portions include a first other connection portion and a second other connection portion, the first other connection portion is provided between the first annular portion and the second annular portion and is connected to the first annular portion and the second annular portion; the second other connection portion is provided between the second annular portion and the third annular portion and is connected to the second annular portion and the third annular portion, The first other connection portion and the second other connection portion are aligned along a second radial direction, The sensor of claim 1 , wherein the second radial direction passes through the first center, is along the first plane, and intersects with the first radial direction.

6. Further comprising a plurality of fixed electrodes fixed to the first surface; the plurality of fixed electrodes include a first fixed electrode and a second fixed electrode, the first fixed electrode is between the first annular portion and the second annular portion, the second fixed electrode is between the second annular portion and the third annular portion, the first fixed electrode is located between the first connection portion and the first other connection portion in a circumferential direction about the fixed portion, The sensor according to claim 5 , wherein the second fixed electrode is located between the second connection portion and the second other connection portion in the circumferential direction.

7. a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with A gap is provided between the first surface and the movable portion, The movable portion includes a plurality of annular portions and a plurality of connection portions, Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, A portion of the plurality of connection portions extends along a first radial direction, The first radial direction passes through a first center of the fixing portion in the first plane and is aligned along the first plane, A sensor, wherein the portions of the plurality of connecting portions connect portions of the plurality of annular portions to one another.

8. Another portion of the plurality of connection portions extends along the cross radial direction, the cross radial direction passes through the first center, is along the first plane, and crosses the first radial direction; the other portion of the plurality of connection portions connects another two of the plurality of annular portions to each other; The sensor of claim 7 , wherein the other two of the plurality of annular portions are between the portion of the plurality of annular portions and the fixed portion.

9. A sensor according to claim 1; a detection target member to which the sensor is fixed; A sensor system comprising:

10. A sensor according to claim 1; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; Equipped with electronic devices.

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