Methods and apparatus for gas line matrix and interchange assembly
Patent Information
- Application Number
- JP2024146540
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2023-08-31
- Filing Date
- 2024-08-28
- Publication Date
- 2025-03-14
Smart Images
Figure 2025036301000001_ABST
Abstract
Description
[Technical field]
[0001] FIELD OF THEINVENTION The present disclosure relates generally to methods and apparatus for gas line matrices and exchange assemblies, and more particularly to gas line arrangements having a set of sections aligned on a single axis. Technology Background [Background technology]
[0002] Semiconductor equipment requires routing various source containers and process gases to reaction chambers through valve manifolds with multiple ports. Different processes require a given source container to be routed to different valve manifold ports, requiring different gas lines. Because these gas lines are heated, this can lead to a large number of unique gas lines and heater jackets, resulting in a complex and chaotic gas line system. Summary of the Invention
[0003] Various embodiments of the present technology may provide a gas line matrix and an exchange assembly, the exchange assembly including a first plurality of gas lines, each gas line having a first end and a second end, the first ends of the first plurality of gas lines aligned on a first axis and the second ends of the first plurality of gas lines aligned on a second axis, the first axis being perpendicular to the second axis.
[0004] According to one aspect, an apparatus includes a gas line matrix and an exchange assembly coupled to the gas line matrix, the exchange assembly including a first plurality of gas lines, each gas line including a first end and a second end, the first ends of the first plurality of gas lines aligned on a first axis and the second ends of the first plurality of gas lines aligned on a second axis, the first axis being perpendicular to the second axis.
[0005] In one embodiment, the gas line matrix comprises a second plurality of gas lines, each gas line of the second plurality of gas lines coupled to one gas line from the first plurality of gas lines.
[0006] In one embodiment, each gas line of the first plurality of gas lines includes at least one right angle.
[0007] In one embodiment, each gas line from the first plurality of gas lines comprises a first section coupled to a second section having a connector, the first section comprising a first end and the second section comprising a second end.
[0008] In one embodiment, the first section is parallel to the second axis and perpendicular to the first axis.
[0009] In one embodiment, the second section is parallel to the first axis and perpendicular to the second axis.
[0010] In one embodiment, the first section is Z-shaped and the second section is L-shaped.
[0011] In one embodiment, the first section is coupled to the second section with a connector.
[0012] In one embodiment, each second section has a different length than the other second sections.
[0013] According to another aspect, a method for assembling a gas line replacement includes selecting a first gas line section from a plurality of first sections based on a first distance, each first section having a first end and a second end; selecting a second gas line section from a plurality of second sections based on a second distance, each second section having a different length than the other second sections, each second section having a first end and a second end connecting the second end of the first section to the first end of the second section; selecting a third gas line section from the plurality of first sections based on a third distance; selecting a fourth gas line section from the plurality of second sections based on a fourth distance; and connecting the second end of the third section to the first end of the fourth section, wherein the first ends of the first and third sections are aligned on a first axis and the second ends of the second and fourth sections are aligned on a second axis perpendicular to the first axis.
[0014] In one embodiment, the method further includes connecting a first end of the first gas line section to the gas line matrix and connecting a second end of the second gas line section to the vessel port.
[0015] In one embodiment, the first distance is the horizontal distance between the first axis and the vessel port.
[0016] In one embodiment, the second distance is the perpendicular distance between the second axis and the second end of the selected first gas line section.
[0017] According to yet another aspect, a system includes a reaction chamber, a gas line matrix coupled to the reaction chamber, an exchange assembly coupled to the gas line matrix, the exchange assembly comprising a first plurality of gas lines, each gas line having a first end and a second end, the first ends of the first plurality of gas lines aligned on a first axis and the second ends of the first plurality of gas lines aligned on a second axis, the first axis being perpendicular to the second axis, a gas line matrix coupled between the reaction chamber and the exchange assembly, the gas line matrix comprising a second plurality of gas lines, each gas line of the second plurality of gas lines coupled to one gas line from the first plurality of gas lines, and a plurality of vessels coupled to the exchange assembly.
[0018] In one embodiment, each gas line of the first plurality of gas lines includes at least one right angle.
[0019] In one embodiment, each gas line from the first plurality of gas lines comprises a first section coupled to a second section having a connector, the first section comprising a first end and the second section comprising a second end.
[0020] In one embodiment, the first section is parallel to the second axis and perpendicular to the first axis, and the second section is parallel to the first axis and perpendicular to the second axis.
[0021] In one embodiment, each second section has a different length than the other second sections.
[0022] In one embodiment, the first section is Z-shaped and the second section is L-shaped.
[0023] In one embodiment, the first section is connected to the second section with a first connector, the first section is connected to a gas matrix with a second connector, and the second section is connected to one of the multiple containers with a third connector. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] A more complete understanding of the present technology may be obtained by reference to the detailed description when considered in conjunction with the following illustrative drawings, in which like reference numbers refer to like elements and steps throughout the figures, in which: [Brief description of the drawings]
[0025] [Figure 1] FIG. 1 representatively illustrates a first diagram of a system in accordance with various embodiments of the present technology. [Diagram 2] FIG. 2 representatively illustrates a second view of a system in accordance with various embodiments of the present technology. [Diagram 3] FIG. 3 representatively illustrates a top view of a first section used in a system according to various embodiments of the present technology. [Figure 4] FIG. 4 representatively illustrates a top view of a second set of sections used in a system according to various embodiments of the present technology. [Diagram 5] 5 and 6 are perspective views of gas lines in an exchange assembly according to various embodiments of the present technique. [Figure 6] 5 and 6 are perspective views of gas lines within an exchange assembly in accordance with various embodiments of the present technique. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0026] The technology may be described in terms of functional block components and various processing steps. Such functional blocks may be realized by any number of components configured to perform the specified functions and achieve various results. For example, the technology may employ various reaction chambers, valves and valve manifolds, gas line connectors, and vessels.
[0027] 1, an exemplary system 100 may include a reaction chamber 105, a valve manifold 110, a source container 125, a gas line matrix 115, and an exchange assembly 120. In an exemplary embodiment, the system 100 includes a first reaction chamber 105(a) and a second reaction chamber 105(b). Further, each reaction chamber 105 is coupled to a respective valve manifold 110. For example, the first reaction chamber 105(a) is coupled to a first valve manifold 110(a), and the second reaction chamber 105(b) is coupled to a second valve manifold 110(b). Each valve manifold 110 may include multiple ports for connecting to the gas line matrix 115.
[0028] In various embodiments, the source container 125 may be configured to contain or secure solid or liquid chemicals for use during semiconductor processing. In various embodiments, the source container may be formed from a metallic material, such as stainless steel, a metal alloy, or the like. In an exemplary embodiment, the system 100 may include multiple source containers, such as a first source container 125(a), a second source container 125(b), a third source container 125(c), a fourth source container 125(d), and a fifth source container 125(e). In various embodiments, the system 100 may include any desired number of source containers.
[0029] Further, each source container 125 may include or be coupled to a respective vessel port 250. For example, a first source container 125(a) may be connected to or include a first vessel port 250(a), a second source container 125(b) may be connected to or include a second vessel port 250(b), a third source container 125(c) may be connected to or include a third vessel port 250(c), a fourth source container 125(d) may be connected to or include a fourth vessel port 250(d), and a fifth source container 125(e) may be connected to or include a fifth vessel port 250(e). In the exemplary embodiment, the vessel port 250 is aligned on the second axis 205. The vessel port 250 may include a fitting, a gasket, or any other suitable coupling.
[0030] In various embodiments, referring to FIG. 2 and FIG. 3, the exchange assembly 120 may include a first plurality of gas lines 210. The first plurality of gas lines 210 may be coupled to the gas matrix 115 via a plurality of connection joints 130, such as a first connection joint 130(a), a second connection joint 130(b), a third connection joint 130(c), a fourth connection joint 130(d), and a fifth connection joint 130(e). In some embodiments, the connection joints 130 may include gaskets, fittings, or any other suitable couplings. In an exemplary embodiment, the plurality of connection joints 130 are aligned on the first axis 200. Furthermore, each connection joint 130 connects to only one gas line 210 of the first plurality of gas lines.
[0031] Each gas line of the first plurality of gas lines may comprise a first section 215 and a second section 220. For example, the first gas line 210(a) may comprise a first section 215(a) and a second section 220(a), the second gas line 210(b) may comprise a first section 215(b) and a second section 220(b), the third gas line 210(c) may comprise a first section 215(c) and a second section 220(c), the fourth gas line 210(d) may comprise a first section 215(d) and a second section 220(d), and the fifth gas line 210(e) may comprise a first section 215(e) and a second section 220(e).
[0032] In various embodiments, the first section 215 may include a first end 225 and a second end 230. The first end 225 may be coupled to the gas matrix 115. The second end 230 may be coupled to the second section 220. The first section 215 may be coupled to the second section 220 by a connector. The connector may be any suitable pipe connector or fitting.
[0033] In various embodiments, the second section 220 may comprise a first end 235 and a second end 240. The first end 235 of the second section 220 may be coupled to the second end 230 of the first section 215. The second end 240 may be coupled to a single source container 125 of the multiple source containers 125 via a container port 250. For example, the second end 240 may comprise a gasket or fitting that connects to the container port 250. Thus, the second end 240 of the second section 220 is aligned on the second axis 205.
[0034] In an exemplary embodiment, the second section 200 may include at least one bend. For example, the second section 220 may include a right angle. In an exemplary embodiment, the second section is L-shaped, for example, as shown in Figures 4-6.
[0035] In this manner, each gas line from the first plurality of gas lines may be defined by a section extending between a first end 215 of the first section and a second end 240 of the second section.
[0036] In various embodiments, the first section 215 may include at least two bends. For example, the first section 215 may include two right angles. In an exemplary embodiment, the first section 215 is Z-shaped, for example, as shown in Figures 3, 5, and 6. Additionally, at least a portion of the first section 215 may be disposed perpendicular to the second section 220.
[0037] Additionally, the first section 215 may be disposed perpendicular to the first axis 200 and parallel to the second axis 205. The second section 220 may be disposed parallel to the first axis 200 and perpendicular to the second axis 205.
[0038] In various embodiments, the first end 225 of the first section 215 connects to a connection joint 130. For example, section 215(a) may connect to the first connection joint 130(a), section 215(b) may connect to the second connection joint 130(b), section 215(c) may connect to the third connection joint 130(c), section 215(d) may connect to the fourth connection joint 130(d), and section 215(e) may connect to the fifth connection joint 130(e).
[0039] In various embodiments, the second end 240 of the second section 220 is connected to a source vessel. For example, section 220(a) may connect to a first source vessel 125(a), section 220(b) may connect to a second source vessel 125(b), section 220(c) may connect to a third source vessel 125(c), section 220(d) may connect to a fourth source vessel 220(d), and section 220(e) may connect to a fifth source vessel 220(e). The exchange assembly 120 may be connected to the source vessels 125 via any number or type of pipe connectors or fittings.
[0040] 4, each second section 220 has a different length than the other second sections. For example, section 220(a) has a first length L1, section 220(b) has a second length L2, section 220(c) has a third length L3, section 220(d) has a fourth length L4, and section 220(e) has a fifth length L5, where L1 ≠ L2 ≠ L3 ≠ L4 ≠ L5.
[0041] In various embodiments, the gas line matrix 115 may include a second plurality of gas lines that connect to desired connection joints 130 based on the type of chemistry required for a particular reaction chamber 105. Thus, each gas line from the second plurality of gas lines is coupled to a single gas line 210 from the first plurality of gas lines.
[0042] In various embodiments, a method for assembling a gas line replacement may include selecting a first gas line section (e.g., 210(a)) from a plurality of first sections 300 based on a first distance. The first distance may be the horizontal distance between the first axis 200 and the vessel port 250 of the desired source vessel 125. For example, a shorter distance may require a shorter first gas line section 210 and a longer distance may require a longer first gas line section 210.
[0043] The method may further include connecting the first end 225 of the first section to a desired connection joint 130. The particular connection joint 130 is selected based on the desired routing of the chemicals in the source container 125 to the appropriate / desired reaction chambers 105 and / or ports on the valve manifold 110.
[0044] The method may further include selecting a second gas line section (e.g., 220(a)) from the plurality of second sections 400 based on the second distance. The second distance may be a perpendicular distance between the second axis 205 and the second end 230 of the selected first gas line section 210. For example, a shorter distance may require a shorter second gas line section 220 and a longer distance may require a longer second gas line section 200.
[0045] The method may further include connecting a second end 230 of the first section 210 to a first end 235 of the second section 220 and connecting a second end 240 of the second section 220 to a desired container port 250.
[0046] The method may include repeating the selection and connection of the first and second sections 215, 220 as described above to form any desired number of gas lines 210.
[0047] As described above, a first end of the first section is aligned on a first axis 200 and a second end of the second section is aligned on a second axis 205 perpendicular to the first axis 200 .
[0048] In the foregoing description, the technology has been described with reference to certain exemplary embodiments. The specific implementations shown and described are illustrative of the technology and its best modes, and are not intended to otherwise limit the scope of the technology in any manner. Indeed, for the sake of brevity, conventional manufacturing, connection, preparation, and other functional aspects of the methods and systems may not be described in detail. Furthermore, the connecting lines shown in the various figures are intended to represent exemplary functional relationships and / or steps between the various elements. Many alternative or additional functional relationships or physical connections may exist in an actual system.
[0049] The present technology has been described with reference to certain exemplary embodiments. However, various modifications and changes may be made without departing from the scope of the present technology. The description and drawings are to be regarded in an illustrative manner, not restrictive, and all such modifications are intended to be included within the scope of the present technology. Thus, the scope of the technology should be determined by the general embodiments described, and their legal equivalents, and not merely by the specific examples described above. For example, the steps recited in any method or process embodiment may be performed in any order, unless expressly specified otherwise, and are not limited to the explicit order presented in the specific examples. Furthermore, the components and / or elements recited in any apparatus embodiment may be assembled in various permutations or configured to operate in other ways to produce substantially the same results as the present technology, and therefore are not limited to the specific configurations recited in the specific examples.
[0050] Benefits, other advantages, and solutions to problems have been described above with regard to specific embodiments. Any benefit, advantage, solution to a problem, or any element that may cause or make more pronounced any particular benefit, advantage, or solution, is not, however, to be construed as a critical, required, or essential feature or component.
[0051] The terms "comprises," "comprising," or any variation thereof, are intended to refer to an open-ended inclusion, such that a process, method, article, composition, or apparatus comprising a list of elements may include not only those elements listed, but also other elements not expressly listed or inherent to such process, method, article, composition, or apparatus. In addition to those not specifically listed, other combinations and / or modifications of the above-described structure, arrangement, application, proportions, elements, materials, or components used in the practice of the technology may be varied or otherwise specifically adapted to particular environments, manufacturing specifications, design parameters, or other operating requirements without departing from the general principles thereof.
[0052] The present technology has been described above with reference to exemplary embodiments. However, changes and modifications may be made to the exemplary embodiments without departing from the scope of the technology. These and other changes or modifications are intended to be included within the scope of the technology, as expressed in the following claims. [Explanation of symbols]
[0053] 100 Systems 105 Reaction Chamber 105(a) First reaction chamber 105(b) Second reaction chamber 110 Valve Manifold 110(a) First valve manifold 110(b) Secondary valve manifold 115 Gas Line Matrix 120 Replacement Assembly 125 Raw material container 125(a) First container of ingredients 125(b) Secondary container of ingredients 125(c) Third container of ingredients 125(d) Fourth container of ingredients 125(e) Fifth container of ingredients 130 Connection joint 130(a) First connecting joint 130(b) Secondary connecting joint 130(c) Third connecting joint 130(d) Fourth connecting joint 130(e) Fifth connecting joint 200 First Axis 205 Second Axis 210 Gas Line 210(a) First Gas Line 210(b) Secondary Gas Line 210(c) Third Gas Line 210(d) Fourth Gas Line 210(e) Fifth Gas Line 215 First Section 220 Section 220(d) Fourth raw material container 220(e) Fifth raw material container 225 First Edge 230 Second End 235 First Edge 240 Second End 250 vessel port 250(a) First vessel port 250(b) Secondary vessel port 250(c) Third Vessel Port 250(d) Fourth Vessel Port 250(e) Fifth Vessel Port 300 First Section 400 Second Section
Claims
1. An apparatus comprising: A gas line matrix; an exchange assembly coupled to the gas line matrix, the exchange assembly including a first plurality of gas lines, each gas line including a first end and a second end; the first ends of the first plurality of gas lines are aligned on a first axis and the second ends of the first plurality of gas lines are aligned on a second axis; The apparatus, wherein the first axis is perpendicular to the second axis.
2. 2. The apparatus of claim 1, wherein the gas line matrix comprises a second plurality of gas lines, each gas line of the second plurality of gas lines being coupled to one gas line of the first plurality of gas lines.
3. The apparatus of claim 1 , wherein each gas line of the first plurality of gas lines includes at least one right angle.
4. 2. The apparatus of claim 1, wherein each gas line of the first plurality of gas lines comprises a first section coupled to a second section by a connector, the first section comprising the first end, and the second section comprising the second end.
5. The apparatus of claim 4 , wherein the first section is parallel to the second axis and perpendicular to the first axis.
6. The apparatus of claim 5 , wherein the second section is parallel to the first axis and perpendicular to the second axis.
7. The apparatus of claim 4 , wherein the first section is Z-shaped and the second section is L-shaped.
8. The device of claim 4 , wherein the first section is coupled to the second section by a connector.
9. The apparatus of claim 4 , wherein each second section has a different length than the other second sections.
10. 1. A method for assembling a gas line exchange, comprising: selecting a first gas line section from a plurality of first sections based on a first distance, each first section having a first end and a second end; selecting a second gas line section from the plurality of second sections based on a second distance, each second section having a different length than the other second sections, each second section having a first end and a second end; connecting the second end of the first section to the first end of the second section; selecting a third gas line section from the plurality of first sections based on a third distance; selecting a fourth gas line section from the plurality of second sections based on a fourth distance; connecting the second end of the third section to the first end of the fourth section; the first ends of the first and third sections are aligned on a first axis; The second ends of the second and fourth sections are aligned on a second axis perpendicular to the first axis.
11. 11. The method of claim 10, further comprising: connecting the first end of the first gas line section to a gas line matrix; and connecting the second end of the second gas line section to a vessel port.
12. The method of claim 11 , wherein the first distance is the horizontal distance between the first axis and a vessel port.
13. The method of claim 12 , wherein the second distance is a perpendicular distance between the second axis and the second end of the selected first gas line section.
14. 1. A system comprising: A reaction chamber; a gas line matrix coupled to the reaction chamber; an exchange assembly coupled to the gas line matrix, the exchange assembly including a first plurality of gas lines, each gas line including a first end and a second end; an exchange assembly, the first ends of the first plurality of gas lines being aligned on a first axis and the second ends of the first plurality of gas lines being aligned on a second axis, the first axis being perpendicular to the second axis; a gas line matrix coupled between the reaction chamber and the exchange assembly, the gas line matrix comprising a second plurality of gas lines, each gas line of the second plurality of gas lines coupled to one gas line of the first plurality of gas lines; a plurality of containers coupled to the exchange assembly.
15. 15. The system of claim 14, wherein each gas line of the first plurality of gas lines comprises a first section coupled to a second section by a connector, the first section comprising the first end, and the second section comprising the second end.
16. 16. The system of claim 15, wherein the first section is parallel to the second axis and perpendicular to the first axis, and the second section is parallel to the first axis and perpendicular to the second axis.
17. The system of claim 15 , wherein each second section has a different length than the other second sections.
18. The system of claim 14 , wherein the first section is Z-shaped.
19. The system of claim 14 , wherein the second section is L-shaped.
20. 15. The system of claim 14, wherein the first section is connected to the second section by a first connector, the first section is connected to the gas matrix by a second connector, and the second section is connected to a vessel from the plurality of vessels by a third connector.