Passage joint structure

Abstract

To provide a passage joint structure which can efficiently discharge electricity from a charged transfer fluid.SOLUTION: A passage joint structure of the disclosure seals passage holes respectively formed at two fluid devices to connect the passage holes. The passage joint structure includes: a conductive cylindrical body provided with a communication hole through which the passage holes communicate and a transfer fluid flows; and a conductive porous body which is disposed in the communication hole of the cylindrical body and through which the transfer fluid passes.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a flow path joint structure. [Background technology]

[0002] A pipe joint described in Patent Document 1 is known as a connection structure for connecting flow paths formed in fluid devices such as tubes and diaphragm pumps in manufacturing equipment in various technical fields such as semiconductor manufacturing and medical and pharmaceutical manufacturing. The pipe joint in Patent Document 1 includes an inner ring attached to the inner circumference of the end of the tube, a cylindrical joint body attached to the outer circumference of the end of the tube, and a union nut attached to the outer circumference of the joint body. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2018-168947 A Summary of the Invention [Problem to be solved by the invention]

[0004] When an electrically charged transport fluid flows through a fluid device connected by the pipe joint, dielectric breakdown such as pinholes may occur in the thin-walled parts of the fluid device (such as the peripheral wall of a tube or the diaphragm membrane of a diaphragm pump.) When such dielectric breakdown occurs, the transport fluid leaks to the outside.

[0005] Therefore, it is conceivable to construct the joint body from a conductive material, and have the transfer fluid contact the inner circumferential surface of the joint body, thereby discharging the charge on the transfer fluid to the joint body. However, in such a discharge structure, only a portion of the transfer fluid flowing near the inner circumferential surface of the joint body contacts the joint body, and therefore, if the transfer fluid is a fluid with low conductivity, the charge on the transfer fluid cannot be sufficiently discharged to the joint body.

[0006] An object of the present disclosure is to provide a flow path joint structure that can efficiently discharge charged fluid being transported. [Means for solving the problem]

[0007] (1) The flow path joint structure disclosed herein is a flow path joint structure that seals and connects flow path holes formed in two fluid devices, and includes a conductive cylindrical body having communication holes that connect the flow path holes and through which a transport fluid flows, and a conductive porous body that is disposed in the communication hole of the cylindrical body and through which the transport fluid passes.

[0008] According to the flow path joint structure of the present disclosure, when the electrically charged transfer fluid flows through the communication hole of the conductive cylinder, it passes through the conductive porous body arranged in the communication hole, so that the charge on the transfer fluid is discharged to the cylinder through the porous body. At that time, the transfer fluid flows in multiple directions inside the porous body, so the amount of transfer fluid that comes into contact with the porous body increases. This allows efficient discharge from the transfer fluid to the cylinder through the porous body.

[0009] (2) In the flow path joint structure of (1) above, it is preferable that the flow path joint structure further comprises a holding part that holds the porous body in a state where the porous body is disposed in the communication hole. In this case, the retaining portion can prevent the porous body from being swept away by the transport fluid from the communicating holes of the cylindrical body.

[0010] (3) In the flow path joint structure of (2), it is preferable that the joint member includes the cylindrical body having a male thread formed on its outer periphery, and a union nut having a female thread on its inner periphery which is fastened to the male thread, and the retaining portion is an annular groove formed on the inner periphery of the cylindrical body and into which the porous body is fitted. In this case, the porous body is fitted into a groove formed on the inner circumference of the cylindrical body of the joint member, thereby effectively preventing the porous body from being swept away from the communicating hole of the cylindrical body by the transport fluid.

[0011] (4) In the flow path fitting structure of (2), each of the fluid devices is provided with a pair of annular seal grooves formed at the connection end of the flow path hole, and a gasket as the cylindrical body having a pair of annular seal portions on both axial sides to be inserted into each of the seal grooves, the inner surface of the communicating hole of the gasket has a larger diameter than the inner surface of the flow path hole of each of the fluid devices, the retaining portion has a pair of annular step surfaces formed between the inner surface of the communicating hole and the inner surface of the flow path hole in each of the seal grooves, and the porous body is preferably sandwiched between the step surfaces of the pair of the seal grooves when placed in the communicating hole. In this case, the porous body placed in the communicating hole of the gasket (cylindrical body) is sandwiched between the step surfaces of the seal grooves of the two fluid devices, thereby effectively preventing the porous body from being pushed out of the communicating hole of the gasket. Effect of the Invention

[0012] According to the present disclosure, a charged transport fluid can be efficiently discharged. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a cross-sectional view showing a flow path joint structure according to a first embodiment. [Diagram 2] FIG. 2 is a perspective view showing a porous body. [Diagram 3] FIG. 3 is a cross-sectional view showing a flow path joint structure according to the second embodiment. [Figure 4] FIG. 4 is a cross-sectional view showing a flow path joint structure according to the third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Next, preferred embodiments of the present disclosure will be described with reference to the accompanying drawings. [First embodiment] <Overall configuration of flow path joint structure> FIG. 1 is a cross-sectional view showing a flow path joint structure according to a first embodiment. The flow path joint structure of this embodiment is a pipe joint 1. The pipe joint 1 is used, for example, in a piping path through which a chemical liquid used in a semiconductor manufacturing device flows as a transport fluid, to seal and connect flow path holes formed in two fluid devices. Each fluid device in this embodiment is, for example, a tube 10 made of synthetic resin. The internal space of the tube 10 is a flow path hole 10a through which the transport fluid flows.

[0015] The pipe joint 1 includes a joint member 2 and a pair of union nuts 5. Hereinafter, in this embodiment, the direction from the axial center of the pipe joint 1 toward both axial sides is referred to as the axial outer side, and the direction from both axial sides of the pipe joint 1 toward the axial center is referred to as the axial inner side.

[0016] The joint member 2 has a cylindrical joint body 3 and a pair of inner rings 4 provided on both axial sides of the joint body 3. The joint body 3 is a cylinder formed of a conductive material. Examples of the conductive material include metal and conductive resin. The joint body 3 of this embodiment is made of carbon resin mixed with a filler that is conductive and chemical resistant.

[0017] The joint body 3 has a main body portion 3a and a pair of socket portions 3b extending from the main body portion 3a on both sides in the axial direction. A communication hole 3c through which the transferred fluid flows is formed penetrating the main body portion 3a in the axial direction. The communication hole 3c communicates with the flow passage holes 10a of both tubes 10 via a communication hole 4d (described later) of the inner ring 4. A ground wire 12 is connected to the outer periphery of the main body portion 3a. Each socket portion 3b is formed in a cylindrical shape. The inner diameter of each socket portion 3b is larger than the inner diameter of the main body portion 3a. A male thread 3d is formed on the outer periphery of each socket portion 3b.

[0018] A primary seal groove 3e and a secondary seal groove 3f are formed radially inward of the socket 3b at both axial ends of the main body 3a. The primary seal groove 3e is a tapered groove cut out so as to gradually expand in diameter from the inner circumferential surface of the communication hole 3c toward the axial outer end. The secondary seal groove 3f is formed in a cylindrical shape between the primary seal groove 3e and the socket 3b.

[0019] The inner ring 4 is made of an insulating synthetic resin material. Examples of insulating synthetic resin materials include polyvinyl chloride (PVC), polypropylene (PP), polyethylene (PE), and fluororesin (perfluoroalkoxyalkane (PFA), polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PVDF), etc.). The inner ring 4 of this embodiment is made of fluororesin because purity is required for the transport fluid (chemical liquid) used in semiconductor manufacturing equipment.

[0020] The inner ring 4 has a bulging portion 4a, a primary seal portion 4b, and a secondary seal portion 4c. The bulging portion 4a is formed on the axially outer side of the inner ring 4, protruding radially outward in a mountain shape. The bulging portion 4a is press-fitted into the end of the tube 10, expanding the diameter of the end. In this way, the inner ring 4 is connected to the end of the tube 10.

[0021] The primary seal portion 4b is formed in an annular shape on the radially inner side of the axially inner side of the inner ring 4. The outer peripheral surface of the primary seal portion 4b gradually reduces in diameter from the axially inner end to the axially outer end. The primary seal portion 4b is inserted into and pressed against the primary seal groove 3e of the joint body 3. The secondary seal portion 4c is formed in a cylindrical shape on the radially outer side of the axially inner side of the inner ring 4. The secondary seal portion 4c is inserted (press-fitted) into the secondary seal groove 3f of the joint body 3.

[0022] The inner ring 4, with the bulge 4a press-fitted into the end of the tube 10, is fitted into the inner circumference of the socket 3b of the joint body 3. As a result, the end of the tube 10 is sandwiched between the bulge 4a of the inner ring 4 and the socket 3b of the joint body 3. The inner diameter of the inner ring 4 is the same as the inner diameter of the joint body 3. The inner ring 4 is formed with a communication hole 4d penetrating in the axial direction, through which the transported fluid flows. The communication hole 4d of the inner ring 4 communicates with the communication hole 3c of the main body 3a and the flow passage hole 10a of the tube 10. As a result, the communication hole 4d of each inner ring 4 communicates with the communication hole 3c of the main body 3a and the flow passage hole 10a of both tubes 10.

[0023] The union nut 5 is formed into a cylindrical shape from a synthetic resin material such as PVC, PP, PE, or fluororesin (such as PFA or PTFE). The union nut 5 has a pressing portion 5a and a female thread 5b. The pressing portion 5a is formed on the axially outer side of the union nut 5, protruding radially inward. The female thread 5b is formed on the inner circumference on the axially inner side of the union nut 5. The female thread 5b is screwed into the male thread 3d of the joint body 3. As a result of this screwing, the axially inner end of the pressing portion 5a presses against the outer peripheral surface of the tube 10, which is bulged radially outward by the bulging portion 4a.

[0024] With the above configuration, when the female thread 5b of the union nut 5 is fastened to the male thread 3d of the fitting body 3, the primary seal portion 4b and the secondary seal portion 4c of the inner ring 4 are inserted into the primary seal groove 3e and the secondary seal groove 3f of the fitting body 3, respectively. This ensures the sealing performance of the connection between the fitting body 3 (main body portion 3a) and the inner ring 4, and the sealing performance between the outer circumferential surface of the inner ring 4 and the inner circumferential surface of the fitting body 3 (receiving portion 3b). In addition, the pressing portion 5a of the union nut 5 can prevent the end of the tube 10 from slipping out of the pipe fitting 1.

[0025] Regarding the shape of the joint member 2, it is sufficient that the socket portion 3b in which the male thread 3d is formed is formed in a cylindrical shape, and the main body portion 3a may be formed in a cylindrical shape or a polygonal tube shape.

[0026] <Porous body> The pipe fitting 1 further includes a porous body 6 disposed in the communicating hole 3c of the fitting body 3. Fig. 2 is a perspective view showing the porous body 6. In Figs. 1 and 2, the porous body 6 is formed in a disk shape as a whole. The outer diameter of the porous body 6 is larger than the pore diameter of the communicating hole 3c. The porous body 6 includes a skeleton 6a having a three-dimensional network structure and a large number of pores 6b formed in the skeleton 6a.

[0027] The porous body 6 is made of a material having electrical conductivity. The porous body 6 in this embodiment is made of, for example, graphite or glassy carbon. The porosity of the porous body 6 is, for example, 40% to 95%. The resistivity of the porous body 6 is, for example, 10 6 Ω·cm or less, preferably 10 4 Ω·cm or less.

[0028] <Holding part> The pipe fitting 1 further includes a retaining portion 7 that retains the porous body 6 with the porous body 6 disposed in the communicating hole 3c. The retaining portion 7 in this embodiment is composed of an annular groove 71 formed on the inner periphery of the main body portion 3a of the fitting body 3. The groove 71 is formed to a size that allows the outer periphery of the porous body 6 to be fitted therein. With the outer periphery of the porous body 6 fitted in the groove 71, the porous body 6 is retained in the disposed state in the communicating hole 3c.

[0029] With the above configuration, the transport fluid that has flowed into the communication hole 3c of the joint body 3 flows from one axial side of the porous body 6 through the numerous pores 6b to the other axial side of the porous body 6. Therefore, when the transport fluid is electrically charged, as the transport fluid passes through the porous body 6, the charge on the transport fluid is conducted to the earth wire 12 via the conductive porous body 6 and the joint body 3 and is discharged.

[0030] <Action and effect> According to the pipe joint 1 of the first embodiment, the charged transfer fluid passes through the conductive porous body 6 arranged in the communication hole 3c of the conductive joint body 3, so that the charge on the transfer fluid is discharged to the joint body 3 through the porous body 6. At that time, inside the porous body 6, the transfer fluid passes through many pores 6b and flows in many directions, so that the amount of transfer fluid that comes into contact with the porous body 6 increases. This allows efficient discharge from the transfer fluid to the joint body 3 through the porous body 6. As a result, it is possible to suppress the occurrence of dielectric breakdown such as pinholes in the tube 10.

[0031] The porous body 6 is fitted into a groove 71 (retaining portion 7) formed on the inner circumference of the fitting body 3, thereby effectively preventing the porous body 6 from being washed away from the communicating hole 3c of the fitting body 3 by the transport fluid.

[0032] The porous body 6 in this embodiment is disposed in the communication hole 3c of the main body 3a, but is not limited thereto. For example, the inner ring 4 may be formed of a conductive material, so that the joint body 3 and the inner ring 4 form a cylindrical body, and the porous body 6 may be disposed in the communication hole 4d of the inner ring 4. In this case, a groove 71 (holding portion 7) into which the porous body 6 is fitted may be formed on the inner peripheral surface of the communication hole 4d, or the outer peripheral surface of the porous body 6 may be pressed in without forming the groove 71. In the latter case, if the outer peripheral surface of the porous body 6 is pressed into the inner peripheral surface of the axial outer end of the communication hole 4d, when the union nut 5 is tightened, the pressing portion 5a presses the porous body 6 radially inward via the tube 10 and the bulging portion 4a. As a result, the porous body 6 is held in a state in which it is disposed in the communication hole 4d of the inner ring 4.

[0033] [Second embodiment] 3 is a cross-sectional view showing a flow path joint structure according to a second embodiment. The flow path joint structure of this embodiment is a modified example of the pipe joint 1 of the first embodiment, and the configuration of the joint member 2 is different from that of the first embodiment. The joint member 2 of this embodiment is composed only of a joint body 3 which is a cylindrical body formed of a conductive material. The joint body 3 has a main body portion 3a, a pair of socket portions 3b extending in both axial directions from the radially outer side of the main body portion 3a, and a pair of connecting portions 3g extending in both axial directions from the radially inner side of the main body portion 3a.

[0034] Each connection part 3g is formed in a cylindrical shape. The inner diameter of each connection part 3g is the same as the inner diameter of the main body part 3a. A communication hole 3h through which the transport fluid flows is formed penetrating each connection part 3g in the axial direction. The communication hole 3h communicates the communication hole 3c of the joint main body 3 and the flow path hole 10a of the tube 10. As a result, the communication hole 3h of each connection part 3g communicates the flow path holes 10a of both tubes 10 together with the communication hole 3c of the main body part 3a. Both axial ends of each connection part 3g are press-fitted into the end of the tube 10, respectively, to expand the diameter of the end. As a result, each connection part 3g of the joint main body 3 is connected to the end of the tube 10.

[0035] With the above configuration, when the female thread 5b of the union nut 5 is fastened to the male thread 3d of the fitting body 3, the axially inner end of the pressing portion 5a of the union nut 5 presses the outer circumferential surface of the tube 10 that bulges radially outward due to the connection portion 3g of the fitting body 3. This makes it possible to prevent the end of the tube 10 from coming out of the pipe fitting 1.

[0036] Other configurations of this embodiment are similar to those of the first embodiment, so the same reference numerals are used and the description thereof is omitted. The pipe joint 1 of this embodiment also achieves the same effects as the first embodiment.

[0037] The porous body 6 in this embodiment is disposed in the communication hole 3c of the main body 3a, but may be disposed in the communication hole 3h of the connection part 3g. In this case, a groove 71 (holding part 7) into which the porous body 6 is fitted may be formed on the inner peripheral surface of the connection part 3g, or the outer peripheral surface of the porous body 6 may be press-fitted without forming the groove 71. In the latter case, if the outer peripheral surface of the porous body 6 is press-fitted into the inner peripheral surface of the axial outer end of the connection part 3g, when the union nut 5 is tightened, the pressing part 5a presses the porous body 6 radially inward through the tube 10. As a result, the porous body 6 is held in a state of being disposed in the communication hole 3h of the connection part 3g.

[0038] [Third embodiment] <Overall composition> 4 is a cross-sectional view showing a flow path joint structure 20 according to a third embodiment. The flow path joint structure 20 of this embodiment is used to seal and connect flow path holes 30a, 30a formed in two fluid devices 30, 30 in a piping path through which a chemical used in a semiconductor manufacturing apparatus flows as a transport fluid. Each fluid device 30 of this embodiment is composed of a pump, a valve, an accumulator, a filter, a flow meter, a pressure sensor, a piping block, or the like.

[0039] The flow path joint structure 20 includes a primary seal groove (seal groove) 21 and a secondary seal groove 22 formed in each fluid device 30, a gasket 23, and a clamp 27. Hereinafter, in this embodiment, the direction from the axial center of the gasket 23 toward both axial sides is referred to as the axial outer side, and the direction from both axial sides of the gasket 23 toward the axial center is referred to as the axial inner side.

[0040] The primary seal groove 21 is an annular tapered groove that is cut out so as to gradually increase in diameter from the axial inner end toward the axial outer end on the radially outer side of the connection end of the flow passage hole 30a in each fluid device 30. The secondary seal groove 22 is formed in a cylindrical shape on the radially outer side of the primary seal groove 21 in each fluid device 30.

[0041] The gasket 23 is a cylindrical body formed of a conductive material. The gasket 23 in this embodiment is made of carbon resin mixed with a filler having conductivity and chemical resistance. The gasket 23 is formed with a communication hole 23a penetrating in the axial direction, through which the transfer fluid flows. The communication hole 23a communicates with the flow path holes 30a, 30a of the two fluidic devices 30, 30.

[0042] The gasket 23 has a cylindrical main body 24, and a pair of primary seal portions (seal portions) 25 and a pair of secondary seal portions 26 provided on both axial sides of the main body 24. An earth wire 32 is connected to the outer periphery of the main body 24.

[0043] The primary seal portion 25 protrudes axially outward from the radially inner side of both axial ends of the main body portion 24. The primary seal portion 25 is formed in an annular shape. The outer peripheral surface of the primary seal portion 25 gradually reduces in diameter from the axial inner end to the axial outer end. The primary seal portion 25 is inserted into and pressed against the primary seal groove 21 of the fluid device 30.

[0044] The secondary seal portion 26 protrudes axially outward from the radially outer sides of both axial ends of the main body portion 24. The secondary seal portion 26 is formed in a cylindrical shape. The secondary seal portion 26 is inserted (press-fitted) into the secondary seal groove 22 of the fluid device 30.

[0045] As described above, the pair of primary seal portions 25 and the pair of secondary seal portions 26 of the gasket 23 are inserted into the primary seal grooves 21 and the secondary seal grooves 22 of both fluid devices 30. This ensures the sealing performance of the connection portion between the flow path holes 30a, 30a of both fluid devices 30, 30.

[0046] The clamp 27 is a member that connects the ends of both fluid devices 30, 30 connected by the gasket 23. The clamp 27 is formed, for example, in a substantially C-shaped cross section. The clamp 27 of this embodiment clamps and tightens the flange portions 30b, 30b formed at the ends of both fluid devices 30, 30 from both outside in the axial direction. This maintains a sealed state in which the primary seal portion 25 and the secondary seal portion 26 of the gasket 23 are inserted into the primary seal groove 21 and the secondary seal groove 22 of each fluid device 30.

[0047] The flow path joint structure 20 may include other connecting means such as bolts and nuts in addition to the clamps 27. Also, the gasket 23 does not need to have the pair of secondary seal portions 26. In that case, the secondary seal grooves 22 of both fluid devices 30 are not necessary.

[0048] <Porous body> The flow path joint structure 20 further includes a porous body 6 disposed in the communication hole 23a of the gasket 23. The porous body 6 in this embodiment is formed in a cylindrical shape as a whole. The outer diameter of the porous body 6 is approximately the same as the hole diameter of the communication hole 23a. The outer peripheral surface 6c of the porous body 6 is fitted into the inner peripheral surface 23a1 of the communication hole 23a.

[0049] The inner peripheral surface 23a1 of the communication hole 23a has a larger diameter than the inner peripheral surface 30a1 of the flow path hole 30a of each fluid device 30. The axial length of the porous body 6 is longer than the axial length of the inner peripheral surface 23a1 of the communication hole 23a. An annular abutment surface 6d is formed on the outer peripheral edge portion on each of both axial sides of the porous body 6. The abutment surface 6d is a tapered surface whose diameter gradually decreases from the axial inner end to the axial outer end of the porous body 6. The other configuration of the porous body 6 is the same as that of the first embodiment, and therefore description thereof will be omitted.

[0050] <Holding part> The flow path joint structure 20 further includes a holding portion 7 that holds the porous body 6 in a state in which the porous body 6 is disposed in the communication hole 23a of the gasket 23. The holding portion 7 in this embodiment is composed of a pair of annular step surfaces 72 formed in the primary seal grooves 21 of both fluid devices 30 and a pair of primary seal portions 25 of the gasket 23.

[0051] The step surface 72 is a part of the primary seal groove 21. Specifically, the step surface 72 is a surface of the primary seal groove 21 that does not come into contact with the primary seal portion 25, and is formed between the inner circumferential surface 23a1 of the communication hole 23a and the inner circumferential surface 30a1 of the flow passage hole 30a. With the porous body 6 disposed in the communication hole 23a of the gasket 23, the pair of step surfaces 72 of both fluid devices 30 abut against the abutment surfaces 6d at both axial ends of the porous body 6. As a result, the porous body 6 is sandwiched between the pair of step surfaces 72.

[0052] When the primary seal portion 25 of the gasket 23 is inserted into the primary seal groove 21 of the fluid device 30, it is pressed into the primary seal groove 21 and deformed so as to collapse radially inward. The primary seal portion 25 that collapses radially inward presses the outer peripheral surface 6c of the porous body 6 radially inward. Therefore, both axial ends of the outer peripheral surface 6c of the porous body 6 are pressed radially inward by the pair of primary seal portions 25.

[0053] The porous body 6 is sandwiched between the pair of step surfaces 72 and pressed radially inward by the pair of primary seal portions 25, thereby being held in a state in which it is disposed in the communication hole 23a of the gasket 23.

[0054] The retaining portion 7 in this embodiment is composed of a pair of step surfaces 72 and a pair of primary seal portions 25, but may be composed of only a pair of step surfaces 72 or only a pair of primary seal portions 25. As in the first embodiment, a recessed groove into which the porous body 6 is fitted may be formed on the inner circumferential surface 23a1 of the communication hole 23a of the gasket 23, and this recessed groove may be used as the retaining portion 7.

[0055] With the above-mentioned configuration, the transport fluid that has flowed into the communication hole 23a of the gasket 23 flows from one axial side of the porous body 6 through the numerous pores 6b to the other axial side of the porous body 6. Therefore, when the transport fluid is electrically charged, as the transport fluid passes through the porous body 6, the charge on the transport fluid is conducted to the earth wire 32 via the conductive porous body 6 and the gasket 23 and is discharged.

[0056] <Action and effect> According to the flow path joint structure 20 of the second embodiment, the charged transport fluid passes through the conductive porous body 6 arranged in the communication hole 23a of the conductive gasket 23, so that the charge on the transport fluid is discharged to the gasket 23 through the porous body 6. At that time, inside the porous body 6, the transport fluid passes through many pores 6b and flows in many directions, so that the amount of transport fluid that comes into contact with the porous body 6 increases. This allows efficient discharge from the transport fluid to the gasket 23 through the porous body 6. As a result, it is possible to suppress the occurrence of dielectric breakdown such as pinholes in the fluidic device 30.

[0057] The porous body 6 arranged in the communication hole 23a of the gasket 23 is sandwiched between a pair of step surfaces 72 of both fluid devices 30, and is pressed radially inward by a pair of primary seal portions 25. Therefore, the porous body 6 can be effectively prevented from being swept away from the communication hole 23a of the gasket 23 by the transferred fluid.

[0058] [others] The embodiments disclosed above are illustrative in all respects and are not restrictive. For example, the pipe joint 1 and the flow path joint structure 20 of the above-mentioned embodiments may be applied to the liquid crystal / organic electroluminescence field, the medical / pharmaceutical field, or the automotive field, in addition to semiconductor manufacturing equipment. The holding portion 7 of the above-mentioned embodiments is not limited to the recessed groove 71 or the stepped surface 72, and may have other configurations as long as it can hold the porous body 6 in a state in which it is arranged in the communication holes 3c, 23a. [Explanation of symbols]

[0059] 1 Pipe joint (flow path joint structure) 2 Joint members 3. Joint body (cylinder) 3c Communication hole 3d male thread 5 Union Nut 5b Female thread 6 Porous bodies 7 Holding part 10 Tube (fluidic device) 10a Flow passage hole 20 Flow path joint structure 21 Primary seal groove (seal groove) 23 Gasket (cylinder) 23a Communication hole 23a1 Inner surface 25 Primary seal (seal) 30 Fluid Devices 30a Flow passage hole 30a1 Inner surface 71 Groove 72 Step surface

Claims

1. A flow path joint structure for sealing and connecting flow path holes formed in two fluid devices, comprising: a conductive cylinder having a communication hole through which the transport fluid flows, the communication hole communicating with the flow path hole; a conductive porous body that is disposed in the communication hole of the cylindrical body and through which the transport fluid passes.

2. The flow path joint structure according to claim 1 , further comprising a holding portion that holds the porous body in a state where the porous body is disposed in the communication hole.

3. a joint member having the cylindrical body with a male thread formed on an outer periphery thereof; A union nut having a female thread on an inner periphery thereof to be fastened to the male thread, The flow path joint structure according to claim 2 , wherein the retaining portion is an annular recessed groove formed on an inner periphery of the cylindrical body and into which the porous body is fitted.

4. In each of the fluid devices, a pair of annular seal grooves are formed at connection ends of the flow passage holes; a gasket as the cylindrical body having a pair of annular seal portions on both axial sides thereof to be inserted into each of the seal grooves, an inner circumferential surface of the communication hole of the gasket has a larger diameter than an inner circumferential surface of the flow path hole of each of the fluidic devices; the retaining portion has a pair of annular step surfaces formed between an inner circumferential surface of the communication hole and an inner circumferential surface of the flow passage hole in each of the seal grooves, The flow passage joint structure according to claim 2 , wherein the porous body is sandwiched between the step surfaces of the pair of the seal grooves while being disposed in the communication hole.

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