Transport device and transportation method of transported material

Abstract

To provide a transport device capable of detecting a load applied to a transported material when transporting the transported material.SOLUTION: A transport device (46) that depresses a transported material (10) to an arbitrary holding mechanism (20) and transporting it comprises: a movement part (24) that moves a frame (50) in a transportation direction of approaching the holding mechanism; a holding part (53) that is provided to the frame and holds the transported material; and a load detection part (80) that is provided to the frame on a rear side of the transportation direction of the transported material, and detects a load of depressing the transported material to the holding mechanism. The load detection part comprises: a contact part (82) that is contacted to the transported material in a case where the holding part is continuously moved by the movement part regardless of restriction of the movement of the transported material when transporting the transported material to the holding mechanism; and a sensor (83) that detects that the contact part is depressed to the transported material with force of a predetermined value or larger.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a transport device and a transport method for transporting an object. [Background technology]

[0002] In a transport device that transports an object, the object is held by a transport arm that is movable in a transport direction, and the transport arm is moved by a drive mechanism.

[0003] When an object is transported by a transport device, if the transport arm holding the object continues to move even though some obstacle restricts the movement of the object in the transport direction, the object may be damaged. For example, when transporting an object into a cassette that contains the object, if the object gets caught at the entrance of the cassette and is restricted from moving any further, and the transport arm continues to move to push the object into the cassette, an excessive load is applied to the object, causing it to be damaged.

[0004] As an example of a conventional conveying device, Patent Document 1 discloses a structure in which a loading / unloading unit that can move horizontally and vertically has a clamp that holds the object to be transported, and the loading / unloading unit is moved by a drive mechanism having a ball screw that is rotated by a motor.

[0005] In order to prevent damage to the transported object in such a transport device, a torque limit sensor is provided in the motor of the ball screw, and the moving load (pressing load) of the transported object is detected by the magnitude of the torque of the motor. When the torque of the motor exceeds a threshold value, it is determined that the transport of the transported object is being hindered, and the drive of the motor is stopped. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2014-204020 A Summary of the Invention [Problem to be solved by the invention]

[0007] There are several reasons why the torque of the motor of the drive mechanism in a conveying device increases, and the motor torque can become excessively large even when the conveyed object is not under load. For example, the motor torque varies depending on the state of engagement between the ball screw and the conveying arm (loading / unloading unit) and the state of contact between the guide rail that guides the movement of the conveying arm and the conveying arm. Accuracy errors in these locations can cause the motor torque to increase even though the movement of the conveyed object in the conveying direction is not restricted.

[0008] Therefore, it is difficult to set a threshold value for detecting the transport state of the transported object using a torque limit sensor of the motor of the drive mechanism. If the threshold value is set too low, excessive errors will be detected and transport will be stopped frequently even though the movement of the transported object is not actually restricted, resulting in poor operating efficiency. If the threshold value is set too high, the drive mechanism will continue to drive even though the movement of the transported object is actually restricted, which may apply an excessive load to the transported object and cause damage.

[0009] In addition, the torque limit sensor of the motor in the conventional conveying device had the problem that it was not possible to distinguish whether the cause of the conveying malfunction was due to the restriction of the movement of the conveyed object or due to some other reason.

[0010] The present invention has been made in consideration of the above-mentioned points, and has an object to provide a transport device and a transport method for a transported object that are capable of detecting a load applied to the transported object when the transported object is being transported. [Means for solving the problem]

[0011] One aspect of the present invention is a conveying device that conveys an object by pushing it into an arbitrary holding mechanism, the conveying device comprising a moving section that moves a frame in a conveying direction approaching the holding mechanism, a holding section that is provided on the frame and holds the object, and a load detection section that is provided on the frame rearward in the conveying direction of the object and detects the load applied when the object is pushed into the holding mechanism, the load detection section comprising a contact section that comes into contact with the object when the holding section continues to move by the moving section despite the movement of the object being restricted when the object is conveyed to the holding mechanism, and a sensor that detects when the contact section is pressed against the object with a force greater than a predetermined value.

[0012] It is preferable that the contact portion is a leaf spring having a fixed end at one end fixed to the frame and a free end at the other end which can swing, and that the sensor detects the free end which swings when the leaf spring comes into contact with the transported object.

[0013] The transported object has a workpiece held in an opening of the annular frame via a support tape, and it is preferable that the holding portion has a support plate supporting one side of the annular frame, and a pressing plate clamping the annular frame between the support plate and the pressing plate.

[0014] One aspect of the present invention is a method for transporting an object using the above-mentioned transport device, comprising a holding step in which the holding portion holds the object to be transported, and a transport step in which the holding portion is moved toward the holding mechanism to transport the object to be transported, and during the transport step, when the sensor detects that the contact portion has been pressed against the object to be transported with a force greater than or equal to a predetermined value, the movement of the holding portion is stopped. Effect of the Invention

[0015] According to the conveying device and the method for conveying a conveyed object of the present invention, the load applied to the conveyed object due to the restriction on the movement of the conveyed object when the conveyed object is being conveyed can be detected, and a conveying error of the conveyed object moving toward the holding mechanism can be determined with high accuracy. [Brief description of the drawings]

[0016] [Figure 1] FIG. 2 is a perspective view of a cutting device equipped with a conveying device. [Diagram 2] FIG. 2 is a perspective view of a cassette and a transported object unit. [Diagram 3] 4 is a cross-sectional view showing a state in which a transported object unit is held by a holding portion of the transport device. FIG. [Figure 4] 13 is a top view showing a state in which a transported object unit held by a holding portion of the transport device is pushed into the inside of a cassette and transported. FIG. [Diagram 5] 13 is a diagram showing the load detection section in a state where the transported object unit is being held by the holder; FIG. [Figure 6] 11 is a top view showing a state in which the movement of the transported object unit is restricted and a load is applied when the transported object unit held by the holding portion of the transport device is pushed into the inside of a cassette for transport; FIG. [Figure 7] 13 is a diagram showing the load detector when a load is applied to the transported object unit. FIG. [Figure 8] 13 is a diagram showing the load detection section in another state where a load is applied to the transported object unit. FIG. [Figure 9] FIG. 13 is a top view showing a conveying device equipped with a load detection unit of another practical form. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, a transfer device and a transfer method according to the present embodiment will be described with reference to the attached drawings. This embodiment is applied to a transfer device and a transfer method for transferring a workpiece 11 to be processed in a cutting device 30 shown in Fig. 1. The X-axis direction and the Y-axis direction in the cutting device 30 are horizontal directions, and are perpendicular to each other. The Z-axis direction is a vertical direction, with the +Z direction being upward and the -Z direction being downward.

[0018] The work 11 is held in an opening of the annular frame 12 via a support tape 13, and the work 11, the annular frame 12, and the support tape 13 form a transported object unit 10. As shown in Figures 2 and 4, the work 11 has a plurality of device formation areas partitioned by lattice-like planned division lines, and a chip 14, which is an electronic device, is formed in each device formation area.

[0019] The technical field to which the conveying device and conveying method of the present invention are applied is not limited to cutting devices, but can also be applied to various processing devices other than cutting devices, conveying systems other than processing devices, etc. For example, the present invention can also be applied to conveying devices equipped with a laser processing device that performs laser processing on the workpiece 11, an expanding device that expands the support tape 13 to increase the spacing between the chips 14 or to divide them, etc.

[0020] The transport device and transport method of the present invention can be applied to transporting various transport objects. In this embodiment, the workpiece 11 provided on the transport object unit 10, which is the transport object, is a substantially circular semiconductor wafer with a plurality of electronic devices formed on its surface, but the transport object is not limited to a semiconductor wafer and may be a workpiece such as a package substrate. Furthermore, the transport object may be various material substrates or plate materials other than the workpiece with electronic devices formed thereon.

[0021] The annular frame 12 is an annular member made of metal, synthetic resin, or the like, and has an opening on the inside that is larger than the diameter of the workpiece 11 .

[0022] The support tape 13 is an adhesive tape (dicing tape) having a flexible and non-adhesive base layer and an adhesive layer laminated on the base layer and having flexibility and adhesiveness, and the adhesive layer of the support tape 13 is attached to the workpiece 11 and the annular frame 12. Alternatively, the support tape 13 may be a sheet made of a thermoplastic resin without an adhesive layer. In this case, the support tape 13 is heated to a predetermined temperature, whereby the support tape 13 is attached to the workpiece 11 and the annular frame 12 by thermocompression bonding.

[0023] The workpiece 11 is transported and processed in the cutting device 30 while it is in the form of a transported object unit 10. Before the workpiece 11 is processed, the transported object unit 10 is housed in a cassette 20, which is a holding mechanism, and is carried into the cutting device 30. As shown in Fig. 2, the cassette 20 has a box-like shape with an opening 21 that opens to the side, and the transported object unit 10 can be taken in and out of the cassette 20 through the opening 21.

[0024] Inside the cassette 20, a plurality of slots, which are spaces for accommodating and supporting the transported object units 10, are formed in line in the Z-axis direction, and the cassette 20 can accommodate a plurality of transported object units 10. Inside the cassette 20, a plurality of shelves 23 are formed in a comb-teeth shape protruding from a pair of side walls 22 located on both sides of the opening 21. Each shelf 23 is configured as a long and narrow plate (rail-like) extending horizontally along the inner surface of the side wall 22, and the plurality of shelves 23 are provided at predetermined intervals in the Z-axis direction. The heights (positions in the Z-axis direction) of the shelves 23 on both sides of the cassette 20 are uniform, and one transported object unit 10 is supported by a pair of shelves 23 on both sides located at the same height. The portions of the cassette 20 that accommodate and support the individual transported object units 10 are called slots. Inside the cassette 20, a plurality of slots are formed in line in the Z-axis direction.

[0025] A pair of substantially parallel straight portions 121 and a pair of substantially parallel straight portions 122 are formed on the outer edge of the annular frame 12. The direction in which the straight portions 121 extend and the direction in which the straight portions 122 extend are perpendicular to each other. The transported object units 10 are inserted into each slot in the cassette 20 with the pair of straight portions 121 of the annular frame 12 oriented along the inner surfaces of the pair of side walls 22. The transported object units 10 inserted into each slot are supported by placing the lower surface of the annular frame 12 (the lower surface near the pair of straight portions 121) on the upper surfaces of a pair of shelves 23 that constitute each slot.

[0026] The configuration of the cutting device 30 will be described with reference to FIG. 1. The cutting device 30 is controlled by the control unit 25. The control unit 25 has a processing unit (processor) that generates signals for controlling each part of the cutting device 30, and a storage unit (memory) that stores various information used in the processing unit. The processing unit controls the operation of each part of the cutting device 30, which will be described later, by reading and executing a program stored in the storage unit. Therefore, when describing the operation of each part of the cutting device 30, unless a controlling entity is specified, it is assumed that the operation is performed under the control of the control unit 25. The transportation of the transported object unit 10 in the cutting device 30 is also performed under the control of the control unit 25.

[0027] The cutting device 30 includes a cutting unit 31 and a cutting unit 32, and cuts the workpiece 11 along the intended division line using the cutting blade of the cutting unit 31 and the cutting blade of the cutting unit 32. The number of cutting units is not limited to two, and may be one or three or more cutting units.

[0028] The cutting device 30 includes a base 33, on which various components are arranged. A cassette placement unit 34 is provided at the corners of the base 33 in the -X and -Y directions. The cassette placement unit 34 can be raised and lowered in the Z-axis direction by a lifting unit (not shown). The lifting unit for raising and lowering the cassette placement unit 34 includes, for example, a known ball screw mechanism including a motor and a ball screw below the cassette placement unit 34, and the cassette placement unit 34 is raised and lowered by rotating the ball screw with the motor. The cassette 20 is placed on the upper surface of the cassette placement unit 34. The cassette 20 is placed with the opening 21 facing the +Y direction. The height position of the transported object unit 10 inserted and removed from the cassette 20 is adjusted by raising and lowering the cassette placement unit 34 up and down.

[0029] An opening 35 is formed on base 33 at a position adjacent to cassette placement portion 34 in the +Y direction. Opening 35 extends in the X-axis direction, and a table cover 36 is supported inside opening 35, with a holding table 37 provided on table cover 36. Bellows 38 are connected to both sides of table cover 36 in the X-axis direction, and opening 35 is covered by table cover 36 and bellows 38.

[0030] The holding table 37 is a table that holds the transported object unit 10 during processing by the cutting units 31 and 32. The holding table 37 has a holding surface 39 on its upper surface that holds the workpiece 11 via the support tape 13, and is provided with a plurality of clamps 40 that hold the annular frame 12 on the outside of the holding surface 39. The holding table 37 also has a suction mechanism (not shown) that applies a suction force to the holding surface 39 to suction and hold the workpiece 11 via the support tape 13.

[0031] The table cover 36 and the holding table 37 are moved in the X-axis direction by a table feed mechanism (not shown) provided inside the base 33 below the opening 35. The table feed mechanism includes an X-axis guide rail and an X-axis ball screw extending in the X-axis direction, and a base portion supporting the table cover 36 and the holding table 37 is supported by the X-axis guide rail so as to be movable in the X-axis direction. The X-axis ball screw is screwed into the base portion, and when the X-axis ball screw is rotated by a motor, the base portion moves in the X-axis direction. In addition, the holding table 37 is rotated by a table rotation mechanism (not shown) about an axis facing the Z-axis direction relative to the base portion.

[0032] The table cover 36 and the holding table 37 are moved in the X-axis direction by a table feed mechanism, and can be positioned in a carry-in / out area on the -X direction side and a processing area on the +X direction side. In the carry-in / out area, the holding table 37 is positioned adjacent to the cassette placement part 34 in the +Y direction. In the processing area, the holding table 37 is positioned near the cutting units 31 and 32.

[0033] A pair of guide members 41 extending in the Y-axis direction and crossing above the opening 35 are provided above the loading / unloading area of ​​the holding table 37. Each guide member 41 is L-shaped and has a horizontal bottom surface 411 and a standing wall 412 protruding in the +Z direction from the bottom surface 411. The pair of guide members 41 are disposed symmetrically in the X-axis direction. The pair of guide members 41 can be moved in the X-axis direction by a gap adjustment mechanism (not shown) to change the gap between them in the X-axis direction.

[0034] A cleaning unit 42 is provided on the base 33 at a position adjacent to the opening 35 in the +Y direction. The cleaning unit 42 includes a spinner table 43 that can hold and rotate the transported object unit 10, and a cleaning nozzle 44 that sprays a cleaning liquid and drying air toward the transported object unit 10 on the spinner table 43.

[0035] A gate-shaped column 45 is provided on the base 33, spanning the opening 35 in the Y-axis direction. A first conveying device 46 and a second conveying device 47 are supported on the column 45. The first conveying device 46 is responsible for conveying the object unit 10 into and out of the cassette 20 placed on the cassette placement section 34. The second conveying device 47 is responsible for conveying the object unit 10 to the cleaning section 42.

[0036] The first conveying device 46 includes a guide rail 48 attached to the surface of the column 45 on the -X direction side and extending in the Y-axis direction, a slider 49 movable in the Y-axis direction along the guide rail 70, and a holding frame 50 supported on the lower end of the slider 49. The holding frame 50 is in the shape of a disk having an area larger than that of the conveyed object unit 10.

[0037] The slider 49 is moved in the Y-axis direction by a drive mechanism 51. The drive mechanism 51 is a mechanism that applies a force to move the slider 49 along a guide rail 48 extending in the Y-axis direction. For example, the drive mechanism 51 can be a ball screw mechanism that converts the rotational motion of a ball screw into linear motion of the slider 49, or an air cylinder mechanism that moves the slider 49 by air pressure.

[0038] The slider 49 supports the holding frame 50 so as to be movable in the Z-axis direction. The holding frame 50 is moved in the Z-axis direction relative to the slider 49 by an elevating mechanism 52. For example, the elevating mechanism 52 may be a ball screw mechanism that converts the rotational motion of a ball screw into linear motion of the holding frame 50, or an air cylinder mechanism that moves the holding frame 50 by air pressure.

[0039] A suction pad (not shown) is provided on the underside of the holding frame 50, and a suction force can be applied to the suction pad by a suction mechanism (not shown). A plurality of suction pads are provided on the underside of the holding frame 50 in an arrangement that allows the upper surface of the annular frame 12 to be suction-held at a plurality of points.

[0040] The first transport device 46 further includes a holding unit 53 provided on the holding frame 50. The holding unit 53 is provided on an edge of the holding frame 50 in the -Y direction. The guide rail 48, the slider 49, and the drive mechanism 51 constitute a moving unit 24 that moves the holding frame 50 and the holding unit 53 in a direction to approach the cassette 20 (the transport direction).

[0041] 3, the holding unit 53 has a pressing plate 54 and a support plate 55 that face each other with a gap in the Z-axis direction. The pressing plate 54 located on the +Z direction side is fixed so as not to move relative to the holding frame 50. The support plate 55 located on the -Z direction side is raised and lowered in the Z-axis direction by a plate lifting mechanism 56 to change the gap between it and the pressing plate 54.

[0042] The plate lifting mechanism 56 is configured with an air cylinder mechanism in which a piston 58 is disposed inside a cylinder 57 and the supply of air into the cylinder 57 is controlled to move the piston 58 in the Z-axis direction. A guide shaft 59 extending in the +Z direction from the piston 58 protrudes from the cylinder 57, and a support plate 55 is connected to the tip of the guide shaft 59. The support plate 55 moves in the Z-axis direction in conjunction with the movement of the piston 58, and the distance between the pressing plate 54 and the support plate 55 in the Z-axis direction changes.

[0043] The plate lifting mechanism 56 is not limited to an air cylinder mechanism and may have a different configuration. For example, a ball screw mechanism or a solenoid that moves a plunger linearly by energizing a coil may be used as the plate lifting mechanism 56.

[0044] The holding section 53 can hold the transported object unit 10 by bringing the support plate 55 close to the pressing plate 54 using the plate lifting mechanism 56 and sandwiching the annular frame 12 between the pressing plate 54 and the support plate 55 in the Z-axis direction. The support plate 55 supports the lower surface (one surface) of the annular frame 12. The pressing plate 54 presses the upper surface (the other surface) of the annular frame 12 from above and sandwiches the annular frame 12 between the support plate 55. When the slider 49 and the holding frame 50 are moved in the Y-axis direction by the drive mechanism 51 with the annular frame 12 sandwiched between the holding section 53, the transported object unit 10 can be moved in the Y-axis direction.

[0045] The operation of the first conveying device 46 configured as above is controlled by the control unit 25. The cassette 20 containing the transported object units 10 before cutting by the cutting device 30 is placed on the cassette placement part 34. The control unit 25 adjusts the position of the cassette 20 in the Z-axis direction using the cassette placement part 34, which has a lifting unit such as a known ball screw mechanism including a motor and a ball screw provided below, so that the height of the transported object units 10 to be pulled out of the cassette 20 matches the height of the pair of guide members 41.

[0046] The first conveying device 46 adjusts the position of the holding frame 50 in the Z-axis direction by the lifting mechanism 52, and aligns the height position of the holding part 53 with the height position of the transported object unit 10 to be pulled out from the cassette 20. In addition, the position of the support plate 55 is adjusted by the plate lifting mechanism 56 so that the distance in the Z-axis direction between the pressing plate 54 and the support plate 55 becomes larger than the thickness of the annular frame 12.

[0047] Next, the control unit 25 drives the drive mechanism 51 to move the slider 49 and the holding frame 50 in the -Y direction. When the holding frame 50 advances to a position where the edge of the annular frame 12 enters between the pressing plate 54 and the support plate 55, the movement in the -Y direction is stopped. Then, the plate lifting mechanism 56 moves the support plate 55 in the +Z direction, and the annular frame 12 is sandwiched between the pressing plate 54 and the support plate 55.

[0048] 3, after the annular frame 12 is sandwiched between the pressing plate 54 and the support plate 55, the driving mechanism 51 is driven to move the slider 49 and the holding frame 50 in the +Y direction. By this operation of the holding frame 50, the transported object unit 10 sandwiched by the holding part 53 is pulled out to the outside of the cassette 20 through the opening 21.

[0049] The transported object unit 10 pulled out from the cassette 20 is placed on the pair of guide members 41. As shown in Fig. 4, the transported object unit 10 is supported with a part of the lower surface of the annular frame 12 placed on the bottom surface 411 of the pair of guide members 41 and the pair of straight portions 121 facing the standing walls 412 of the pair of guide members 41. The distance between the pair of guide members 41 in the X-axis direction is adjusted so that the pair of straight portions 121 of the annular frame 12 are sandwiched between the pair of standing walls 412. In this way, the pair of guide members 41 position the transported object unit 10 in the X-axis direction.

[0050] Once the transported object unit 10 has been handed over to the pair of guide members 41, the support plate 55 is moved in the -Z direction by the plate lifting mechanism 56, and the clamping of the annular frame 12 by the holding parts 53 is released. Once the clamping of the annular frame 12 has been released, the drive mechanism 51 is driven to move the slider 49 and the holding frame 50 in the +Y direction, and the holding parts 53 are removed from the annular frame 12.

[0051] Next, the drive mechanism 51 and the lifting mechanism 52 are driven to move the holding frame 50 directly above the transported object unit 10, and the multiple suction pads on the underside of the holding frame 50 suction-hold the upper surface of the annular frame 12. The gap between the pair of guide members 41 is widened, and the lifting mechanism 52 is used to lower the holding frame 50 in the -Z direction, and the transported object unit 10 is placed on the holding table 37 located in the carry-in / out area. After the transported object unit 10 is handed over to the holding table 37, the suction-holding of the annular frame 12 by the suction pads of the holding frame 50 is released, and the holding frame 50 is raised in the +Z direction by the lifting mechanism 52, and the holding frame 50 is separated from the transported object unit 10.

[0052] As described above, the first conveying device 46 is used to take out the transported object unit 10 from the cassette 20 and place it on the holding table 37. The holding table 37 with the transported object unit 10 placed on it holds the workpiece 11 on the holding surface 39 by the suction force of the suction mechanism, and fixes the annular frame 12 with the multiple clamps 40. Then, the table feed mechanism moves the holding table 37 from the carry-in / out area to the processing area (+X direction).

[0053] In the machining area, cutting of the workpiece 11 is performed using a cutting unit 31 and a cutting unit 32 .

[0054] As shown in FIG. 1, an indexing feed unit 60 and an indexing feed unit 61 are provided on the +X direction surface of column 45, which move cutting unit 31 and cutting unit 32, respectively, in the Y axis direction, and a lifting unit 62 and a lifting unit 63 are provided on the +X direction surface of column 45, which lift cutting unit 31 and cutting unit 32, respectively, in the Z axis direction.

[0055] A pair of Y-axis guide rails (not shown) extending in the Y-axis direction and a pair of Y-axis ball screws (not shown) are provided on the support plate 64 fixed to the column 45. The pair of Y-axis guide rails support the Y-axis moving table 65 and the Y-axis moving table 66 so that they can move in the Y-axis direction. One Y-axis ball screw is screwed into a female screw portion (not shown) of the Y-axis moving table 65, and the other Y-axis ball screw is screwed into a female screw portion (not shown) of the Y-axis moving table 66. The Y-axis moving table 65 moves in the Y-axis direction by driving one of the Y-axis ball screws to rotate with a motor (not shown). The Y-axis moving table 66 moves in the Y-axis direction by driving the other Y-axis ball screw to rotate with a motor (not shown).

[0056] The Y-axis moving table 65 and a mechanism for moving it (Y-axis guide rail, Y-axis ball screw, and motor) constitute an indexing feed unit 60. The Y-axis moving table 66 and a mechanism for moving it (Y-axis guide rail, Y-axis ball screw, and motor) constitute an indexing feed unit 61.

[0057] The Y-axis moving table 65 is provided with a pair of Z-axis guide rails (not shown) extending in the Z-axis direction and a Z-axis ball screw (not shown). The pair of Z-axis guide rails support a Z-axis moving table 67 so that it can move in the Z-axis direction, and the Z-axis ball screw is screwed into a female thread portion (not shown) provided on the Z-axis moving table 67. The Z-axis moving table 67 moves in the Z-axis direction by rotating the Z-axis ball screw with a motor 621. The Z-axis moving table 67 and the mechanism for moving it (the Z-axis guide rails, the Z-axis ball screw, and the motor 621) form the lifting unit 62.

[0058] The Y-axis moving table 66 is provided with a pair of Z-axis guide rails (not shown) extending in the Z-axis direction and a Z-axis ball screw (not shown). The pair of Z-axis guide rails support a Z-axis moving table 68 so that it can move in the Z-axis direction, and the Z-axis ball screw is screwed into a female thread portion (not shown) provided in the Z-axis moving table 67. The Z-axis moving table 68 moves in the Z-axis direction by rotating the Z-axis ball screw with a motor 631. The Z-axis moving table 68 and the mechanism for moving it (the Z-axis guide rails, the Z-axis ball screw, and the motor 631) form the lifting unit 63.

[0059] The cutting unit 31 is supported at the lower end of the Z-axis moving table 67, and the cutting unit 32 is supported at the lower end of the Z-axis moving table 68. Therefore, the cutting unit 31 is moved in the Y-axis direction by the indexing feed unit 60, and is raised and lowered in the Z-axis direction by the lifting unit 62. The cutting unit 32 is moved in the Y-axis direction by the indexing feed unit 61, and is raised and lowered in the Z-axis direction by the lifting unit 63.

[0060] When cutting the workpiece 11, the control unit 25 adjusts the relative positions of the holding table 37 and the cutting units 31, 32 in the X-axis direction and the Y-axis direction by using the table feed mechanism and the indexing feed units 60, 61, and positions the cutting blades of the cutting units 31, 32 above the end of the processing line to be cut. Next, the control unit 25 lowers the cutting units 31, 32 by using the lifting units 62, 63. The cutting blades of the cutting units 31, 32 cut into the workpiece 11 of the transported object unit 10 held on the holding table 37 while rotating. Then, the table feed mechanism moves the holding table 37 in the X-axis direction (processing feed), whereby cutting is performed by the cutting blades along the processing line extending in the X-axis direction.

[0061] When the cutting process along a set of processing lines by each of the cutting units 31, 32 is completed, the control unit 25 causes each of the cutting units 31, 32 to rise by each of the lifting units 62, 63, and separates the cutting blade from the workpiece 11. Next, the control unit 25 causes each of the cutting units 31, 32 to move in the Y-axis direction (indexing feed) by each of the indexing feed units 60, 61, and positions the cutting blade of each of the cutting units 31, 32 above the end of the next uncut processing line. Then, in the same manner as above, each of the lifting units 62, 63 causes each of the cutting units 31, 32 to move down (cutting feed), and the table feed mechanism moves the holding table 37 in the X-axis direction (processing feed), and cutting is performed along the processing line.

[0062] When cutting along all the machining lines aligned in the Y-axis direction is completed, the control unit 25 rotates the holding table 37 by 90 degrees using the table rotation mechanism. As a result, the workpiece 11 on the holding table 37 is in a state where multiple uncut machining lines are aligned in the Y-axis direction (extending toward the X-axis direction). Then, in the same manner as above, the cutting units 31 and 32 are caused to sequentially perform cutting along all the uncut machining lines.

[0063] It should be noted that only one of the two cutting units 31, 32 may be operated to perform cutting processing for one processing line at a time.

[0064] When cutting of the workpiece 11 is completed, the table feed mechanism moves the holding table 37 from the processing area to the carry-in / out area (-X direction). The transported object unit 10 is transported from the holding table 37 that has moved to the carry-in / out area to the cleaning section 42. The transport of the transported object unit 10 to the cleaning section 42 is performed by a second transport device 47.

[0065] The second conveying device 47 has a configuration generally similar to that of the first conveying device 46, except that it does not have a mechanism equivalent to the holding section 53 in the first conveying device 46. The second conveying device 47 has a guide rail 70 attached to the surface on the -X direction side of the column 45 and extending in the Y axis direction, a slider 71 movable in the Y axis direction along the guide rail 70, and a holding frame 72 supported on the lower end of the slider 71. The holding frame 72 has a disk shape with an area larger than that of the conveyed object unit 10.

[0066] The slider 71 is moved in the Y-axis direction by a driving mechanism 73. The driving mechanism 73 is a mechanism that applies a force to move the slider 71 along a guide rail 70 extending in the Y-axis direction. For example, the driving mechanism 73 can be a ball screw mechanism that converts the rotational motion of a ball screw into linear motion of the slider 71, or an air cylinder mechanism that moves the slider 71 by air pressure.

[0067] The slider 71 supports the holding frame 72 so as to be movable in the Z-axis direction. The holding frame 72 is moved in the Z-axis direction relative to the slider 71 by an elevating mechanism 74. For example, the elevating mechanism 74 may be a ball screw mechanism that converts the rotational motion of a ball screw into linear motion of the holding frame 50, or an air cylinder mechanism that moves the holding frame 50 by air pressure.

[0068] A suction pad (not shown) is provided on the underside of the holding frame 72, and a suction force can be applied to the suction pad by a suction mechanism (not shown). A plurality of suction pads are provided on the underside of the holding frame 72 in an arrangement that allows the upper surface of the annular frame 12 to be suction-held at a plurality of points.

[0069] The operation of the second transport device 47 configured as above is controlled by the control unit 25. With the transported object unit 10 (the workpiece 11 having been machined) held on the holding table 37 located in the carry-in / out area, the drive mechanism 73 and the lifting mechanism 74 are driven to move the holding frame 72 directly above the transported object unit 10, and the upper surface of the annular frame 12 is sucked and held by the multiple suction pads on the lower surface of the holding frame 72.

[0070] The second transport device 47 drives the drive mechanism 73 and the lifting mechanism 74 to transport the holding frame 72 holding the annular frame 12 by suction to the cleaning section 42, and then uses the lifting mechanism 74 to lower the holding frame 72 in the -Z direction to place the transported object unit 10 on the spinner table 43. After the transported object unit 10 has been handed over to the spinner table 43, the suction hold of the annular frame 12 by the suction pads of the holding frame 72 is released, and the lifting mechanism 74 raises the holding frame 72 in the +Z direction to separate the holding frame 72 from the transported object unit 10.

[0071] In the cleaning section 42, a cleaning liquid is sprayed from the cleaning nozzle 44 and the spinner table 43 is rotated to clean the transported object unit 10. In addition, air is sprayed from the cleaning nozzle 44 to dry the transported object unit 10 after cleaning.

[0072] When cleaning of the transported object unit 10 in the cleaning section 42 is completed, the second transport device 47 transports the transported object unit 10 from the cleaning section 42 to the guide member 41. The second transport device 47 drives the drive mechanism 73 and the lifting mechanism 74 to move the holding frame 72 and bring it close to the transported object unit 10 on the spinner table 43, and adsorbs and holds the upper surface of the annular frame 12 with the multiple suction pads on the lower surface of the holding frame 72.

[0073] Next, the second transport device 47 drives the lifting mechanism 74 to lift the holding frame 72 in the +Z direction, and drives the drive mechanism 73 to move the holding frame 72 in the -Y direction. When the holding frame 72 reaches above the pair of guide members 41, the lifting mechanism 74 is driven to lower the holding frame 72 in the -Z direction so that the lower surface of the annular frame 12 of the transported object unit 10 is placed on the bottom surface 411 of the pair of guide members 41, and the suction hold of the annular frame 12 by the suction pads of the holding frame 72 is released.

[0074] The distance in the X-axis direction between the pair of guide members 41 on which the transported object unit 10 is placed is adjusted so that the pair of straight portions 121 of the annular frame 12 are sandwiched between the pair of standing walls 412. This positions the transported object unit 10 in the X-axis direction.

[0075] Next, the first transport device 46 performs a transport operation to push the transported object unit 10 into the cassette 20 and accommodate it therein. The first transport device 46 adjusts the position of the holding frame 50 in the Y-axis direction and the Z-axis direction using the drive mechanism 51 and the lifting mechanism 52, and positions the holding part 53 on the +Y-axis side of the transported object unit 10 placed on the pair of guide members 41. In addition, the position of the support plate 55 is adjusted by the plate lifting mechanism 56 so that the distance in the Z-axis direction between the pressing plate 54 and the support plate 55 is larger than the thickness of the annular frame 12.

[0076] In this state, the drive mechanism 51 is driven to move the slider 49 and the holding frame 50 in the -Y direction. When the holding frame 50 has advanced to a position where the edge of the annular frame 12 enters between the pressing plate 54 and the support plate 55, the movement in the -Y direction is stopped. Then, the support plate 55 is moved in the +Z direction by the plate lifting mechanism 56, and the annular frame 12 is sandwiched between the pressing plate 54 and the support plate 55, as shown in FIG.

[0077] The cassette loading section 34 is raised and lowered in the Z-axis direction to adjust the height position on the cassette 20 side, so that the height position of the transported object unit 10 held by the holding section 53 matches the height position of the slot in the cassette 20 that accommodates the transported object unit 10.

[0078] Next, the drive mechanism 51 is driven to move the slider 49 and the holding frame 50 in the -Y direction. This operation of the holding frame 50 moves the transported object unit 10 held by the holding parts 53 in the -Y direction while causing the annular frame 12 to slide against the pair of guide members 41, and is pushed into the inside of the cassette 20 through the opening 21, with the annular frame 12 being supported by the pair of shelves 23. The transported object unit 10 is then accommodated in the slot in the cassette 20.

[0079] In the above manner, in the cutting device 30, the following operations are performed: pulling out the transported object unit 10 from the cassette 20 before cutting the workpiece 11 and transporting it to the holding table 37, cutting the workpiece 11, transporting the transported object unit 10 after cutting the workpiece 11 to the cleaning section 42, cleaning by the cleaning section 42, and storing the transported object unit 10 after cleaning in the cassette 20.

[0080] However, when the first conveying device 46 or the second conveying device 47 conveys the transported object unit 10, if the holding frame 50 or the holding frame 72 continues to move in the transporting direction even though some obstacle restricts the movement of the transported object unit 10 in the transporting direction, excessive load may be applied to the transported object unit 10, which may result in damage.

[0081] In particular, when the transported object unit 10 after the processing and cleaning of the workpiece 11 is completed is held by the holding portion 53 of the first transport device 46 and moved in the -Y direction to be stored in the cassette 20, the transported object unit 10 may be prevented from entering a predetermined slot in the cassette 20. Possible causes of such a problem include a case where the annular frame 12 is distorted in shape and cannot enter the slot, a case where foreign matter attached to the guide member 41 or the shelf portion 23 of the cassette 20 becomes an obstacle to transport, a case where another transported object unit 10 is inserted at an angle across staggered shelf portions 23 that are positioned at different levels in the Z-axis direction in the cassette 20, and so on. In other words, there are states in which the transported object unit 10 is pressed against an obstacle near the opening 21 of the cassette 20 or inside the cassette 20 and cannot move any further, or the movement of the transported object unit 10 is hindered by another obstacle (such as a foreign object attached to the guide member 41) at a position before it reaches the opening 21 of the cassette 20.

[0082] In a situation where these problems occur, even if the holding section 53 holding the transported object unit 10 is moved in the -Y direction toward the cassette 20, the transported object unit 10 cannot move in the -Y direction, and therefore, if the holding section 53 continues to move in the -Y direction, the holding section 53 and the holding frame 50 come into contact with and press the transported object unit 10 (particularly the annular frame 12), causing a load to be applied to the transported object unit 10. Since the holding section 53 holds the transported object unit 10 at a position where there is a clearance in the Y-axis direction between the holding frame 50 and the transported object unit 10 (see FIG. 3), even if the holding section 53 moves slightly in the -Y direction relative to the transported object unit 10, a load is not immediately applied to the transported object unit 10. However, when the movement amount of the holding section 53 reaches or exceeds a predetermined value, a load is applied from the moving holding frame 50 to the stationary transported object unit 10.

[0083] The first conveying device 46 of this embodiment is capable of detecting a state in which a load is applied to the conveyed object unit 10 when the annular frame 12 is held by the holding section 53 and the conveyed object unit 10 is moved in the conveying direction. In particular, the first conveying device 46 is provided with a load detection section 80 which detects a load applied to the conveyed object unit 10 being pushed into the cassette 20 when the conveying operation (movement in the -Y direction) of pushing the conveyed object unit 10 into the cassette 20 is performed by the moving section 24 (guide rail 48, slider 49, drive mechanism 51) to bring the conveyed object unit 10 close to the cassette 20, which is an optional holding mechanism.

[0084] 3 to 8, the load detection unit 80 is provided on the holding frame 50 on the rear side of the transported object unit 10 in the transport direction approaching the cassette 20, i.e., on the +Y direction side of the transported object unit 10. In other words, the load detection unit 80 is provided on the edge of the holding frame 50 on the -Y direction side.

[0085] The load detection unit 80 has a base portion 81 fixed to the holding frame 50, and the holding unit 53 is supported by the base portion 81. As shown in Fig. 4 to Fig. 8, the load detection unit 80 has a pair of contact portions 82 and a pair of sensors 83, which are distributed on both sides in the X-axis direction of the pressing plate 54 and the holding plate 55 that configure the holding unit 53. The pair of contact portions 82 and the pair of sensors 83 are each disposed approximately symmetrically with respect to an imaginary center line C that passes through the center of the holding unit 53 in the X-axis direction and extends in the Y-axis direction.

[0086] As shown in FIGS. 4 and 5, when the transfer unit 10 is held by the holding parts 53, the pair of contact parts 82 are positioned opposite the straight parts 122 on the +Y direction side of the annular frame 12.

[0087] Each contact portion 82 is a leaf spring, and has a fixed end 84 fixed to the base portion 81 (holding frame 50) at one end (the end farther from the center line C), and a free end 85 at the other end (the end closer to the center line C) that is not fixed to the base portion 81 (holding frame 50) and can swing, with the fixed end 84 and the free end 85 connected by a connecting portion 86 to form a U-shape. The fixed end 84 is fixed to the base portion 81 by any method such as screwing.

[0088] When no external force is applied to each contact portion 82, the fixed end portion 84 and the free end portion 85 extend generally in the Y-axis direction, and the connecting portion 86 extends generally in the X-axis direction.

[0089] Each sensor 83 is a photosensor having a light-projecting section 87 and a light-receiving section 88 spaced apart in the X-axis direction, and has an entrance space 89 between the light-projecting section 87 and the light-receiving section 88 that opens in the -Y direction. When there is no object entering the entrance space 89, the light emitted from the light-projecting section 87 is received by the light-receiving section 88 without being blocked. When there is an object entering the entrance space 89, the light emitted from the light-projecting section 87 is blocked by the object, and the amount of light received by the light-receiving section 88 decreases. The sensor 83 is set to receive the amount of light received by the light-receiving section 88 without blocking the light from the light-projecting section 87 as a normal state, and detects a state in which the amount of light received by the light-receiving section 88 has decreased to a predetermined value or less, and outputs a detection signal indicating a movement failure of the transported object unit 10. The detection signal of each sensor 83 is transmitted to the control unit 25.

[0090] When no external force is applied to the contact portion 82, the free end 85 does not enter the entry space 89 of the sensor 83, and the free end 85 does not block the light emitted from the light-projecting portion 87. When the annular frame 12 of the transported object unit 10 comes into contact with the contact portion 82 and a force of a predetermined value or more is applied pressing the contact portion 82 in the +Y direction, the free end 85 swings relative to the fixed end 84, the free end 85 enters the entry space 89, and the free end 85 blocks the light emitted from the light-projecting portion 87.

[0091] 4 and 5, when the holding part 53 holds the transported object unit 10, the control unit 25 controls the operation of the first transport device 46 so that a predetermined gap S exists in the Y-axis direction between the straight part 122 on the +Y-direction side of the annular frame 12 and the connection part 86 of the pair of contact parts 82. In the initial state in which the transported object unit 10 is appropriately held by the holding part 53, the straight part 122 and the connection part 86 of the pair of contact parts 82 both extend in the X-axis direction and are in a substantially parallel relationship.

[0092] When the holding part 53 holding the transported object unit 10 is moved in the -Y direction by the moving part 24 (guide rail 48, slider 49, drive mechanism 51) to insert the transported object unit 10 into the cassette 20, if the holding part 53 continues to move by the moving part 24 despite the movement of the transported object unit 10 in the -Y direction being restricted for some reason, at least one of a pair of contact parts 82 provided on the base part 81 of the holding frame 50 moving together with the holding part 53 comes into contact with the annular frame 12 of the transported object unit 10. Then, when the contact part 82 is pressed against the annular frame 12 with a force equal to or greater than a predetermined value, the contact part 82 is pressed in the +Y direction and elastically deformed.

[0093] Specifically, when the holding part 53 continues to move in the -Y direction while the movement of the transported object unit 10 in the -Y direction is restricted, the pressing plate 54 and the support plate 55 slip relative to the annular frame 12, and the contact part 82 narrows the gap S and approaches the annular frame 12. Then, when the amount of relative movement of the holding part 53 with respect to the annular frame 12 in the -Y direction reaches or exceeds a predetermined value, the connection part 86 of the contact part 82 comes into contact with and is pressed against the outer edge of the annular frame 12, and the part of the contact part 82 beyond the fixed end 84 elastically deforms in the +Y direction.

[0094] In addition, the load detection unit 80 may be configured such that the contact portion 82 is not made of a leaf spring but is made of another material. The contact portion 82 may be configured to include an elastic member that is elastically deformed when pressed against the transported object and returns to its original shape when the pressing external force is removed. For example, the contact portion 82 may be configured of a flexible synthetic resin.

[0095] Furthermore, in the contact portion 82, the thickness of the free end portion 85 and the connection portion 86 that swing relative to the base portion 81 may be smaller than the thickness of the fixed end portion 84 that is fixed to the base portion 81, and the free end portion 85 and the connection portion 86 may have a shape that makes it easier to swing the free end portion 85 and the connection portion 86.

[0096] Furthermore, instead of forming the entire contact portion 82 from a single member, a plurality of members may be combined to form the contact portion 82. For example, the fixed end portion 84 fixed to the base portion 81 may be formed from a highly rigid material, and the free end portion 85 and the connection portion 86 which swing relative to the base portion 81 may be formed from a flexible material.

[0097] Furthermore, the shape of the contact portion 82 is not limited to the illustrated U-shape. For example, the contact portion 82 may have an arc shape that protrudes in the -Y direction.

[0098] 6 and 7 show a case where movement of the transported object unit 10 in the -Y direction is restricted at a position offset from the center line C in the X-axis direction. In this case, the transported object unit 10 changes its angle about the axis in the Z-axis direction, and the annular frame 12 is inclined with respect to the holding part 53 in a top view. Then, the vicinity of the straight part 122 on the +Y direction side of the annular frame 12 approaches one of the pair of contact parts 82 and comes into contact with the connection part 86 of the one contact part 82, pressing the contact part 82 in the +Y direction.

[0099] 7, the contact portion 82 pressed by the annular frame 12 undergoes elastic deformation, and the free end portion 85 swings in the +Y direction to enter the entry space 89. The entry movement of the free end portion 85 of one of the contact portions 82 is detected by one of the sensors 83, and a detection signal from the one of the sensors 83 is transmitted to the control unit 25.

[0100] 8 shows a case where the movement of the transported object unit 10 in the -Y direction is restricted while the orientation of the transported object unit 10 remains in the initial state. In this case, the transported object unit 10 does not rotate, and the straight portion 122 on the +Y direction side of the annular frame 12 approaches the pair of contact portions 82 and comes into contact with the connection portion 86, thereby simultaneously pressing both contact portions 82 in the +Y direction.

[0101] 8 , the pair of contact portions 82 pressed by the annular frame 12 have their free ends 85 swing in the +Y direction and enter the entry space 89. The pair of sensors 83 detect the entry motion of the free ends 85 of the pair of contact portions 82, and the detection signals from the pair of sensors 83 are transmitted to the control unit 25.

[0102] The control unit 25, which receives a detection signal from at least one of the sensors 83, determines that the holding portion 53 continues to move by the moving portion 24 (guide rail 48, slider 49, drive mechanism 51) even though the movement of the transported unit 10 in the -Y direction is restricted.

[0103] As described above, the load detection section 80 includes a contact section 82 that comes into contact with the transported object unit 10 (annular frame 12) when the holding section 53 presses the transported object unit 10 against the cassette 20, and a sensor 83 that detects that the contact section 82 is pressed against the transported object unit 10 with a force greater than or equal to a predetermined value.

[0104] The method of transporting the transported object by the first transport device 46 provided in the cutting device 30 is as follows. This transport method is performed when the transported object unit 10 is stored in the cassette 20 after the workpiece 11 has been cut and cleaned, and the operation is performed under the control of the control unit 25.

[0105] [Hold Step] In the holding step, the transported object unit 10 is held by the holding portion 53. As shown in Fig. 3, holding is performed in a state where the annular frame 12 is sandwiched between a pressing plate 54 and a support plate 55.

[0106] [Transportation step] In the transport step, the moving section 24 moves the holding section 53 holding the transported object unit 10 in the −Y direction to transport the transported object unit 10 towards the cassette 20.

[0107] [Movement stop step] In the transport step, when the sensor 83 detects that at least one of the contact portions 82 is pressed against the transported object unit 10 (annular frame 12) with a force equal to or greater than a predetermined value, the control unit 25 receives a detection signal from the sensor 83 and stops the movement of the holding frame 50 and the holding portion 53 by the moving portion 24. In particular, the driving of the driving mechanism 51 is stopped, and the application of the driving force for moving the slider 49 and the holding frame 50 in the -Y direction is terminated.

[0108] In this way, when the sensor 83 detects that the contact portion 82 is pressed against the transported object unit 10 with a force greater than a predetermined value, control is performed to stop the movement of the holding portion 53 in the -Y direction by the first transport device 46, so that excessive load is not applied to the transported object unit 10, whose movement in the -Y direction is restricted, and damage to the transported object unit 10 including the workpiece 11 can be prevented.

[0109] [Notification step] In the conveying step, when the sensor 83 detects that the contact portion 82 is pressed against the conveyed object unit 10 (annular frame 12) with a force greater than or equal to a predetermined value, the control unit 25 receives a detection signal from the sensor 83 and causes the alarm portion to issue an alarm.

[0110] As shown in FIG. 1, the cutting device 30 is provided with a display monitor 27, an indicator lamp 28, and a speaker 29 in a housing 26 (only a part of the housing 26 is shown in FIG. 1) that covers the upper part of the base 33. The display monitor 27 is an information display unit that displays various information related to the operation and settings of the cutting device 30. The indicator lamp 28 is a lamp that can display multiple colors and can change the lighting form of each color (continuous lighting, flashing, etc.). The speaker 29 is a sound generating unit that generates voice and alarm sounds. The display monitor 27, the indicator lamp 28, and the speaker 29 function as a notification unit that notifies the operator who operates the cutting device 30.

[0111] 3, display units 100, 101 such as lamps may be provided on the side portion of plate lifting mechanism 56 near holder 53, and display units 100, 101 may serve as notification units. For example, display unit 100 is turned on when detection by sensor 83 is off, and display unit 101 is turned on when detection by sensor 83 is on.

[0112] In addition, the cutting device 30 is equipped with a communication unit that enables communication with external devices (such as a server, a personal computer, or a tablet terminal), and it is also possible to send information from the communication unit of the cutting device 30 to the external device and use the communication unit or the external device as an alarm unit.

[0113] By issuing an alert from the alarm unit, the operator operating the cutting device 30 can be made aware that an abnormality has occurred in the transportation of the transported object unit 10 by the first transport device 46, and can be urged to resolve the cause of the transport abnormality.

[0114] As described above, the first conveying device 46 includes a load detection section 80 that detects the load of the transported object unit 10 being pushed into the cassette 20, and the load detection section 80 detects the load when the moving section 24 moves the holding frame 50 and the holding section 53 in a direction approaching the cassette 20 to transport the transported object unit 10 toward the cassette 20. If the holding section 53 holding the transported object unit 10 attempts to continue moving in the transport direction by the moving section 24 despite the movement of the transported object unit 10 in the transport direction (-Y direction) being restricted by some obstacle, the load detection section 80 detects a state in which a load is being applied to the transported object unit 10. This makes it possible to prevent the transported object unit 10 from being damaged due to an excessive load being applied to it while the transported object unit 10 held by the holding section 53 is being transported.

[0115] The load detection unit 80 is provided on the rear side (+Y direction side) of the first conveying device 46 in the conveying direction when the conveyed object unit 10 is conveyed into the cassette 20, and detects a relative position change of the conveyed object unit 10 with respect to the holding part 53 and the holding frame 50. Therefore, a situation in which the movement of the conveyed object unit 10 is restricted and a load is applied thereto can be directly detected through the behavior of the conveyed object unit 10, and a conveying error caused by the restriction on the movement of the conveyed object unit 10 can be determined with high accuracy.

[0116] For example, unlike the load detection unit 80 of this embodiment, if the load applied to the transported object unit 10 is detected using a torque limit sensor of the motor of the ball screw constituting the drive mechanism 51, the torque of the motor increases even if an accuracy error or malfunction occurs in the drive mechanism 51 itself, so it is not possible to properly determine whether the movement of the transported object unit 10 is restricted. In addition, when the torque limit sensor of the motor of the drive mechanism 51 is used to detect the transport state of the transported object unit 10, it is difficult to set a threshold value for determining that a transport error has occurred. If the threshold value is set too low, excessive errors are detected and transport is frequently stopped, resulting in poor operation efficiency. If the threshold value is set too high, the drive mechanism 51 continues to drive even though the movement of the transported object unit 10 is restricted, which may result in an excessive load being applied to the transported object unit 10.

[0117] In contrast, the load detector 80 of the present embodiment can accurately detect whether the transported object unit 10 is moving or not without being affected by the operating state of the drive mechanism 51, and is excellent in detection accuracy and reliability.

[0118] The load detection unit 80 includes a contact portion 82 made of a leaf spring, one end of which, a fixed end 84, is fixed to the base portion 81 of the holding frame 50, and the other end of which, a free end 85, is swingable. The sensor 83 detects the free end 85 that swings when the contact portion 82 comes into contact with the transported object unit 10. The load detection unit 80 thus configured has a small number of parts, a simple structure, and is excellent in terms of low introduction cost and high reliability of detection operation. In particular, since the free end 85 is moved by the elastic deformation of the contact portion 82 to which the fixed end 84 is fixed, there is an advantage that a complex structure for movably supporting the contact portion 82 with respect to the base portion 81 is not required.

[0119] The load detection section 80 has a pair of contact sections 82 and a pair of sensors 83, which are arranged on both sides of the holder 53 in the X-axis direction. With this configuration, it is possible to detect with high accuracy the load applied to the transported object unit 10 when the transported object unit 10 is transported to the cassette 20 side by the first transport device 46. For example, it is possible to detect the load applied to the transported object unit 10 in all of the following cases: a state in which the transported object unit 10 is inclined with respect to the center line C as shown in Figures 6 and 7; a state in which the transported object unit 10 is inclined with respect to the center line C in the opposite direction to that shown in Figures 6 and 7; and a state in which the transported object unit 10 is not inclined with respect to the center line C as shown in Figure 8.

[0120] Furthermore, by referring to the detection state of the pair of sensors 83, it is possible to obtain information such as whether the conveyance is restricted in a state where the conveyance unit 10 is inclined with respect to the center line C (FIGS. 6 and 7), in which direction the conveyance unit 10 is inclined with respect to the center line C, and whether the conveyance is restricted in an initial orientation where the conveyance unit 10 is not inclined with respect to the center line C (FIG. 8). The control unit 25 may cause the notification section to notify such detailed information. This makes it easier for the operator to identify the cause and situation in which the movement of the conveyance unit 10 is restricted, and improves the efficiency of identifying the cause of a conveyance error in the first conveyance device 46 and of recovery work.

[0121] 9 shows a load detection section 90 of another embodiment. The load detection section 90 includes a connecting plate 91 provided on an edge portion on the -Y direction side of the holding frame 50 (the rear end side in the conveying direction of the transported object unit 10 toward the cassette 20). A first contact portion 92 and a second contact portion 93, which are arranged on both sides of the holding section 53 in the X-axis direction, are fixed to the connecting plate 91.

[0122] The first contact portion 92 and the second contact portion 93 are each L-shaped in top view and are disposed approximately symmetrically with respect to a center line C extending in the Y-axis direction. The first contact portion 92 protrudes from the connecting plate 91 in the -Y direction and is bent in the +X direction. The second contact portion 93 protrudes from the connecting plate 91 in the -Y direction and is bent in the -X direction.

[0123] The connecting plate 91 is supported so as to be movable in the Y-axis direction relative to a base portion 94 fixed to the holding frame 50. The connecting plate 91 is biased in the -Y direction by a plurality of biasing members 95 arranged between the connecting plate 91 and the base portion 94. The biasing members 95 are any member that can be elastically deformed, such as a compression spring or a leaf spring. The connecting plate 91 receives the biasing force of the biasing members 95, whereby the first contact portion 92 and the second contact portion 93 are held at predetermined positions in the Y-axis direction.

[0124] A dog 96 that protrudes laterally in the X-axis direction is provided on the connecting plate 91. When the connecting plate 91 moves in the Y-axis direction, the dog 96 moves together with the connecting plate 91 in the Y-axis direction.

[0125] A sensor 97 is supported on the base portion 94. The sensor 97 is located on the +Y direction side of the dog 96. The sensor 97 is a photosensor having a light-projecting portion and a light-receiving portion, similar to the sensor 83 of the above embodiment, and when the dog 96 moves in the +Y direction and enters the space between the light-projecting portion and the light-receiving portion, the dog 96 blocks light and emits a detection signal.

[0126] Alternatively, the sensor 97 may be a switch-type sensor that makes contact when pressed by the dog 96. Alternatively, the dog 96 may be made of a magnetic material, and the sensor 97 may be a magnetic sensor that detects a change in a magnetic field caused by the approach and separation of the dog 96.

[0127] As shown in Figure 9, when no external force is applied to the first contact portion 92 and the second contact portion 93, the first contact portion 92 and the second contact portion 93 are positioned apart in the +Y direction with a gap S from the annular frame 12 of the transported object unit 10, and the dog 96 is separated from the sensor 97 in the -Y direction.

[0128] When the holding portion 53 holding the transported object unit 10 is moved in the -Y direction by the moving portion 24 (guide rail 48, slider 49, drive mechanism 51) to enter the transported object unit 10 into the cassette 20, if the movement of the transported object unit 10 in the -Y direction is restricted for some reason but the holding portion 53 continues to move in the -Y direction by the moving portion 24, at least one of the first contact portion 92 and the second contact portion 93 which move together with the holding portion 53 will come into contact with the annular frame 12 and be pressed in the +Y direction.

[0129] Specifically, when holding portion 53 continues to move in the -Y direction while movement of transported object unit 10 in the -Y direction is restricted, pressing plate 54 and support plate 55 slip relative to annular frame 12, causing first contact portion 92 and second contact portion 93 to narrow gap S and approach annular frame 12. Then, when the amount of relative movement of holding portion 53 in the -Y direction with respect to annular frame 12 reaches or exceeds a predetermined value, first contact portion 92 and second contact portion 93 come into contact with and are pressed against the outer edge of annular frame 12 (near straight portion 122 on the +Y direction side), and are pressed in the +Y direction.

[0130] When at least one of the first contact portion 92 and the second contact portion 93 is pressed against the annular frame 12 in the +Y direction, the connecting plate 91 connecting the first contact portion 92 and the second contact portion 93 moves in the +Y direction relative to the base portion 94 against the biasing force of the biasing member 95. Then, a dog 96 provided on the connecting plate 91 approaches the sensor 97, and the dog 96 enters the space between the light-emitting portion and the light-receiving portion of the sensor 97, and the sensor 97 transmits a detection signal to the control unit 25.

[0131] When the control unit 25 receives the detection signal from the sensor 97, it determines that the holding part 53 continues to move in the -Y direction by the moving part 24 even though the movement of the transported object unit 10 in the -Y direction is restricted. Then, it stops the movement of the holding part 53 by the moving part 24. More specifically, it stops the driving of the drive mechanism 51 and ends the application of the driving force that moves the slider 49 and the holding frame 50 in the -Y direction.

[0132] As shown in the load detection unit 90 above, the sensor constituting the load detection unit may have a contact portion formed of a member other than a leaf spring. In addition, the sensor constituting the load detection unit may be a switch-type sensor that mechanically brings contacts into contact with each other, a magnetic sensor that detects changes in a magnetic field, or the like, other than a photosensor. Furthermore, sensors other than those exemplified in the above embodiments and modified examples may be used, as long as they are capable of detecting the relative movement between the holder 53 and the transported object unit 10.

[0133] In the above embodiment, the arbitrary holding mechanism into which the transported object unit 10 is pushed by the first transport device 46 is the cassette 20, but the present invention can also be applied to transporting an object to a holding mechanism other than the cassette 20.

[0134] For example, when an object to be transported that is clamped by a holding section is transported and pushed into a predetermined processing stage (such as a chamber that forms an airtight space) of a processing device, if there is any obstacle on the processing stage or on the transport path on the way to the processing stage, the movement of the object to be transported is restricted and a load is applied to the object being transported. In such a case, the present invention can be applied by using the processing stage as a holding mechanism.

[0135] In the above embodiment, the transported object is a transported object unit 10 in which a workpiece 11 is held via a support tape 13 in an opening of an annular frame 12. In transporting a transported object unit 10 equipped with an annular frame 12, a type of transport device that transports the workpiece by clamping and pushing the annular frame 12, which has excellent strength, is often used, and therefore the present invention is highly useful. However, unlike the above embodiment, the present invention can also be applied to a type of transport device and transport method that directly holds and transports a plate-shaped transported object that is not held by an annular frame.

[0136] For example, in the case of a transported object that is thick and has sufficient strength so that it will not break or deform excessively even when part of its edge is held by the holding portion, the object can be transported by being pushed into the holding mechanism without attaching a ring frame, and the present invention can be applied.

[0137] In the above embodiment, the pair of contact portions 82 constituting the load detection section 80 are arranged separately in the X-axis direction, but the contact portions may be integrally formed to which leaf springs (or elastic members other than leaf springs) located on both sides of the holding section 53 are connected. In this case, when pressed against the annular frame 12 of the transported object unit 10, the leaf springs located on both sides of the holding section 53 are deformed in unison.

[0138] The embodiments of the present invention are not limited to the above-mentioned embodiments and modifications, and may be modified, substituted, or altered in various ways without departing from the spirit of the technical idea of ​​the present invention. Furthermore, if the technical idea of ​​the present invention can be realized in a different way due to technological progress or a different derived technology, the present invention may be implemented using that method. Therefore, the claims cover all embodiments that may be included within the scope of the technical idea of ​​the present invention. [Industrial Applicability]

[0139] As described above, the conveying device and method for transporting a transported object of the present invention can detect the load on the transported object due to the restriction on the movement of the transported object when the object is being transported, thereby identifying transport errors of the transported object with high accuracy and contributing to improving the reliability of the operation of the conveying device. [Explanation of symbols]

[0140] 10: Transported object unit (transported object) 11: Work 12: Circular frame 121: Straight section 122: Straight section 13: Support tape 14: Tip 20: Cassette (holding mechanism) 21: Opening 22: Side wall 23:Shelf 24: Moving section 25: Control unit 26: Housing 27: Display monitor 28: Indicator lamp 29: Speaker 30: Cutting equipment 31: Cutting unit 32: Cutting unit 33: Foundation 34: Cassette placement section 36: Table cover 37: Holding table 39: Holding surface 40: Clamp 41: Guide member 411: Bottom 412: Standing wall 42: Cleaning section 43: Spinner table 44: Cleaning nozzle 46: First conveying device (conveying device) 47: Second conveying device 48: Guide rail 49: Slider 50: Holding frame 51: Driving mechanism 52: Lifting mechanism 53: Holding part 54: Pressing plate 55: Support plate 56: Plate lifting mechanism 57: Cylinder 58: Piston 59: Guide shaft 60: Indexing feed unit 61: Indexing feed unit 62: Lifting unit 63: Lifting unit 65: Y-axis moving table 66: Y-axis moving table 67: Z-axis moving table 68: Z-axis moving table 70: Guide rail 71: Slider 72: Holding frame 73: Driving mechanism 74: Lifting mechanism 80: Load detection unit 81: Base part 82: Contact part 83: Sensor 84:Fixed end 85:Free end 86: Connection 87: Light projection section 88: Light receiving part 89:Entry space 90: Load detection section 91: Connection plate 92: First contact part 93: Second contact part 94: Base section 95: Pressing member 96: Dog 97: Sensor 100:Display section 101:Display section C: Center line S: Gap

Claims

1. A conveying device that conveys an object by pushing it into a holding mechanism, The conveying device is a moving unit that moves the frame in a conveying direction toward the holding mechanism; a holding portion provided on the frame and holding the transported object; a load detection unit provided on the frame at a rear side in a conveying direction of the conveyed object and configured to detect a load applied to the conveyed object by pushing the conveyed object into the holding mechanism; Equipped with The load detection unit is a contact portion that comes into contact with the transported object when the transported object is transported to the holding mechanism and the holding portion continues to move by the moving portion despite the movement of the transported object being restricted; a sensor that detects that the contact portion is pressed against the transported object with a force equal to or greater than a predetermined value; A conveying device comprising:

2. The contact portion is a leaf spring having a fixed end portion on one end side that is fixed to the frame and a free end portion on the other end side that is swingable, 2. The conveying device according to claim 1, wherein the sensor detects the free end of the leaf spring which is caused to swing as a result of the leaf spring coming into contact with the object to be conveyed.

3. The transported object has a workpiece held in an opening of an annular frame via a support tape, 3. The transport device according to claim 1, wherein the holding portion comprises a support plate that supports one surface of the annular frame, and a pressing plate that holds the annular frame between the support plate and a pressing plate.

4. A method for transporting an object using the transport device according to claim 1, comprising the steps of: a holding step in which the holding unit holds the transported object; a conveying step of moving the holding part toward the holding mechanism to convey the conveyed object, The method for transporting an object, wherein in the transporting step, when the sensor detects that the contact portion is pressed against the object with a force equal to or greater than a predetermined value, the sensor stops movement of the holding portion.

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