Tray for precision substrate storage container and semiconductor wafer storage container

Abstract

To provide a tray for a precision substrate storage container which realizes weight reduction of the precision substrate storage container, eliminates the risk of deformation or damage to the semiconductor wafer storage container, and is easy to handle and can be easily taken in and out, and to provide the semiconductor wafer storage container.SOLUTION: A tray for a precision substrate storage container includes an adapter 31 which is stored in a body 11 with a precision substrate storage container 1 mounted thereon, a plurality of fasteners 50 which fastens the flange portion 2 of the precision substrate storage container 1, and a pair of fixing pieces which can contact the support teeth 12 on both sides inside the body 11, the adapter 31 is formed in a frame shape which fits into the flange portion 2 of the precision substrate storage container 1, a support piece 34 which supports the underside 5 of the precision substrate storage container 1 is formed in the adapter 31, and an escape groove is formed in the support piece 34 which faces the rear peripheral edge of the underside 5 of the precision substrate storage container 1, such that the mounting pieces protrude from both sides of the adapter 31 and each mounting piece can contact a support tooth 12 other than the support tooth 12 of the body 11 which contacts the fixing piece.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a tray for a precision substrate storage container that supports a precision substrate storage container such as a reticle storage container and is stored in a semiconductor wafer storage container, and to the semiconductor wafer storage container. [Background technology]

[0002] Semiconductor wafer storage containers called FOUPs are used in semiconductor factories to store and transport φ300mm semiconductor wafers, but in recent years, there has been a demand for photomask storage containers and reticle storage containers instead of semiconductor wafers. This is because photomasks and reticles are used in the front-end process of semiconductor manufacturing, so it would be very efficient if precision substrate storage containers consisting of photomask storage containers and reticle storage containers could be stored in a semiconductor wafer storage container and transported while being suspended by an automatic transport device such as an OHT.

[0003] However, since semiconductor wafers such as silicon wafers and precision substrate storage containers are different in size and shape, it is difficult to safely store the precision substrate storage container in the semiconductor wafer storage container. In view of this, methods for safely and reliably storing the precision substrate storage container in the semiconductor wafer storage container have been considered and proposed (see Patent Documents 1, 2, and 3). For example, (1) a method in which the precision substrate storage container is mounted and fixed on a disk-shaped adapter, and this adapter is stored in the body of the semiconductor wafer storage container via supporting teeth, and (2) a method in which a required number of precision substrate storage containers are stored in a shelf-shaped storage jig, and this storage jig is stored in the body of the semiconductor wafer storage container have been considered and proposed. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 5959302 [Patent Document 2] Patent No. 5916508 [Patent Document 3] Patent No. 7257418 Summary of the Invention [Problem to be solved by the invention]

[0005] However, although the size and flange area of ​​precision substrate containers are regulated by SEMI standards, there are no regulations regarding weight, which is problematic, and both methods (1) and (2) have issues to be considered. For example, while both methods (1) and (2) are expected to be effective, when weight restrictions are required from the perspective of transportation, it is not easy to achieve weight reduction, and there is a risk that the support teeth that support the adapter of the semiconductor wafer container may be deformed or damaged. In addition, there is a risk of interference with transportation by an automatic transportation device that suspends the semiconductor wafer container.

[0006] In addition, in the case of method (1), it is expected that it will not be easy to insert and remove the thick adapter into and from the body, which may result in deformation or damage to the body. Furthermore, in the case of method (2), the container jig will be large, which may cause problems in handling.

[0007] The present invention has been made in consideration of the above, and aims to provide a tray for a precision substrate storage container and a semiconductor wafer storage container that can reduce the weight of the precision substrate storage container, eliminate the risk of deformation or damage to the semiconductor wafer storage container, and are easy to handle and can be easily inserted and removed. [Means for solving the problem]

[0008] In order to solve the above problems, the present invention provides a precision substrate container that is supported and stored in a semiconductor wafer container, comprising: The device includes an adapter that is mounted with a precision substrate storage container and is housed in a body of a semiconductor wafer storage container that has an opening at the front side, a fixture that is attached to at least one of the front and rear parts of the adapter and that fixes a flange part of the precision substrate storage container, and a plurality of fixing members that are detachably attached to both sides of the adapter and can contact support teeth on both sides inside the body, The adapter is formed into a planar, roughly frame-like shape that can fit into the flange portion of the precision substrate storage container, and the adapter is formed with support pieces that can support the underside of the flange portion of the precision substrate storage container. The support pieces are formed with escape grooves that can face the rear peripheral edge of the underside of the flange portion of the precision substrate storage container, and mounting pieces are made to protrude from both side sides of the adapter, so that the multiple mounting pieces can come into contact with support teeth other than the support teeth of the body that contact the fixed member.

[0009] It is preferable to include a spacer interposed between the flange portion of the precision substrate storage container and the support piece of the adapter, and to form an escape groove on the surface of this spacer that can face the rear peripheral edge of the underside of the flange portion of the precision substrate storage container. In addition, an engagement hole for the spacer can be provided on the inner circumference of the hollow portion of the adapter, the spacer can be formed into an approximately X-shape in plan view, and an engagement protrusion can be formed on the end of at least one of the pair of inclined pieces that form the spacer, which can be fitted into the engagement hole in the hollow portion of the adapter.

[0010] Furthermore, a support piece having a generally L-shaped cross section that supports either the peripheral edge of the lower surface of the flange portion of the precision substrate storage container or the spacer can be formed endlessly on the rear surface of the adapter. Furthermore, a support piece having a generally plate-like cross section that supports the peripheral edge of the underside of the flange of the precision substrate storage container can be formed endlessly on the inner periphery of the hollow portion of the adapter that fits into the flange of the precision substrate storage container.

[0011] The fixing device further includes a first fixing device that is rotatably attached to the front part of the adapter and engages with the front of the flange portion of the precision substrate storage container, and a second fixing device that is approximately inverted L-shaped and is attached to the rear part of the adapter and engages with the rear of the flange portion of the precision substrate storage container, and these first and second fixing devices can be made movable up and down by a spring member.

[0012] In addition, the first fixing device includes a cylindrical portion rotatably supported on the front portion of the adapter, and a locking piece formed on this cylindrical portion that can be locked to the front of the flange portion of the precision substrate storage container, and an operating handle is formed on the locking piece, and when the precision substrate storage container mounted on the adapter is fixed, the locking piece is oriented in the fore-and-aft direction of the adapter and contacts a door set fitted to the front of the body of the semiconductor wafer storage container.

[0013] In addition, in order to solve the above-mentioned problems, the present invention provides a front-open box body that stores a tray for a precision substrate storage container as described in claim 1 or 2, and a door set that can be freely attached and detached to the open front of the body, and is characterized in that it is used in the semiconductor manufacturing process.

[0014] Here, the precision substrate storage container in the claims includes a photomask storage container or a reticle storage container, etc., at least the lower part of which projects as a flange portion. This precision substrate storage container may be a single POD type or a multi-POD type, etc., and it is preferable that one or two are stored in the body. In addition, the term "flat frame-shaped" of the adapter includes a flat frame-shaped shape as well as similar shapes that do not cause differences in the effects of the present invention. The support piece of the adapter may directly support the precision substrate storage container, or may indirectly support it via a spacer.

[0015] The term "approximately X-shaped in plan" includes not only an X-shaped in plan, but also similar shapes (such as an approximately +-shaped or an approximately X-shaped in plan) that do not cause any difference in the effects of the present invention. The term "approximately L-shaped in cross section" includes not only an L-shaped in cross section, but also similar shapes (such as an approximately J-shaped in cross section) that do not cause any difference in the effects of the present invention. The fixing device is preferably attached to the front and rear parts of the adapter, but may be attached only to the front part of the adapter or only to the rear part of the adapter.

[0016] The first fixture of the fixtures may rotate 80° or more, or may rotate 360°. The term "approximately inverted L-shape" includes not only an inverted L-shape, but also a similar shape (such as an approximately inverted J-shape) that does not cause any difference in the effect of the present invention. The up-down, front-rear, left-right directions of the tray for precision substrate storage containers according to the present invention are directions based on the drawings, and can be appropriately changed as necessary. Furthermore, although the subject of the present invention is a tray for precision substrate storage containers, if the configuration of another application is the same as the configuration of the present invention and can be converted to a tray for precision substrate storage containers, and the effect of the present invention is achieved, the configuration for the other application falls within the technical scope of the present invention.

[0017] According to the present invention, since the adapter is not a typical plate but is a hollow frame-like shape, it is expected to be lightweight, and the realization of this lightweight design reduces the risk of impeding the transportation of the semiconductor wafer storage container. Also, since the mounting piece and the fixing member of the adapter are separately brought into contact with the multiple support teeth of the body, the load acting on the support teeth can be dispersed, preventing damage or cracking of the support teeth, and the adapter can be made thin so that it can be easily inserted and removed from the body. Effect of the Invention

[0018] According to the present invention, it is possible to realize a lightweight precision substrate storage container and to eliminate the risk of deformation or damage to the semiconductor wafer storage container. In addition, it is possible to easily insert and remove the tray for the precision substrate storage container, which makes it easy to handle.

[0019] According to the invention described in claim 2, by using the spacer, the height of the precision substrate storage container relative to the fixture can be adjusted, making the fixing work easier regardless of the height of the precision substrate storage container. Also, by using the escape groove of the spacer, the flange portion of the precision substrate storage container can be well sandwiched and held between the spacer and the fixture. According to the invention described in claim 3, since the spacer is substantially X-shaped in plan view, it is possible to reduce the weight of the spacer and improve its durability, rigidity, etc. Also, since the engaging protrusion of the spacer exerts an identification function in addition to a positioning and fixing function, it is possible to prevent the spacer from being mounted in an incorrect state on the support piece of the adapter.

[0020] According to the invention described in claim 4, a support piece having a substantially L-shaped cross section is formed on the back surface of the adapter to support either the periphery of the underside of the flange of the precision substrate storage container or the spacer, so that the precision substrate storage container can be inserted deeply and stably mounted regardless of its height. In addition, since the support piece is formed endlessly instead of being divided into several pieces, it is expected that the adapter can be manufactured more easily.

[0021] According to the invention described in claim 5, since there is no need to provide an engagement hole on the inner circumference of the hollow part of the adapter, it is expected that the structure will be simplified. Also, since the support piece of the adapter has a cross section of a roughly plate shape that does not protrude downward, molding is easy. Also, since the support piece is formed endlessly instead of being divided into multiple pieces, it is expected that the manufacturing of the adapter will be simplified. According to the invention described in claim 6, the first and second fixing devices each move up and down using a spring member, making it possible for the first and second fixing devices to be properly hooked onto a flange portion, etc., of the precision substrate storage container regardless of the height of the precision substrate storage container.

[0022] According to the invention described in claim 7, by operating the handle of the locking piece of the first fixture, it is possible to facilitate the rotation of the locking piece. Also, since the locking piece comes into contact with the door set and its free rotation is restricted, it is possible to prevent the precision substrate storage container from shifting position or falling off during transportation of the semiconductor wafer storage container. According to the invention described in claim 8, precision substrate storage containers such as photomask storage containers and reticle storage containers can be stored in a semiconductor wafer storage container, and this semiconductor wafer storage container can be transported while being suspended by an automatic transport device, thereby making it possible to improve the efficiency of semiconductor manufacturing. [Brief description of the drawings]

[0023] [Figure 1] 1 is a front view illustrating a state in which a precision substrate storage container tray according to an embodiment of the present invention is stored in a semiconductor wafer storage container; FIG. [Diagram 2] 1 is a cross-sectional side view showing a state in which a precision substrate storage container tray according to an embodiment of the present invention is stored in a semiconductor wafer storage container. FIG. [Diagram 3] 1 is a perspective explanatory view showing a tray for a precision substrate storage container according to an embodiment of the present invention; [Figure 4] 1 is a perspective explanatory view showing an embodiment of a tray for a precision substrate storage container according to the present invention, viewed from the bottom side. FIG. [Diagram 5] 1 is a plan view illustrating an adapter in an embodiment of a tray for a precision substrate storage container according to the present invention; FIG. [Figure 6] 1 is a plan view illustrating a relationship between an adapter and a spacer in an embodiment of a tray for a precision substrate storage container according to the present invention; FIG. [Figure 7] 1 is a main part explanatory diagram showing, in a schematic manner, an adapter escape groove and a spacer escape groove in an embodiment of a tray for a precision substrate storage container according to the present invention; FIG. [Figure 8] 1 is a main part explanatory diagram showing a schematic relationship between the supporting teeth of the body, the mounting pieces and the fixing pieces of the adapter in an embodiment of a tray for a precision substrate storage container according to the present invention; FIG. [Figure 9] 1 is a main explanatory diagram illustrating a relationship between supporting teeth of a body and a mounting piece of an adapter in an embodiment of a tray for a precision substrate storage container according to the present invention; FIG. [Figure 10]1 is a plan view of a main portion showing a state in which an adapter is inserted into a body in an embodiment of a tray for a precision substrate storage container according to the present invention; FIG. [Figure 11] 11 is a plan view showing a state in which the fixing pieces are slid from the inside to the outside into the pair of mounting grooves of the adapter shown in FIG. 10 so as to be positioned and fitted therein. [Figure 12] 12 is a plan view showing a state in which the fixing piece of FIG. 11 is screwed and fixed by a plurality of fasteners. FIG. [Figure 13] 13 is a plan view of a main portion, showing a state in which the supporting piece of the adapter in FIG. 12 supports the peripheral edge of the underside of the flange portion of the precision substrate storage container, and the locking pieces of a pair of first fasteners are rotated. [Figure 14] 14 is a plan view showing a state in which a locking piece is locked onto the front upper surface of the flange portion of the precision substrate storage container of FIG. 13. FIG. [Figure 15] 15 is a plan view showing a state in which a door set is fitted into the open front surface of the body shown in FIG. 14. FIG. [Figure 16] 11 is a front explanatory view showing a state in which a tray for a precision substrate storage container according to a second embodiment of the present invention is stored in a semiconductor wafer storage container. FIG. [Figure 17] 10 is a cross-sectional side view showing a state in which a tray for a precision substrate storage container according to a second embodiment of the present invention is stored in a semiconductor wafer storage container. FIG. [Figure 18] FIG. 11 is a perspective explanatory view that illustrates a second embodiment of a tray for a precision substrate storage container according to the present invention. [Figure 19] 1 is a perspective explanatory view showing a second embodiment of a tray for precision substrate storage containers according to the present invention, as viewed from the bottom side. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] A preferred embodiment of the present invention will be described below with reference to the drawings. The tray 30 for precision substrate storage containers in this embodiment is a dedicated special tray that supports a wide variety of precision substrate storage containers 1 and is stored in a semiconductor wafer storage container 10, as shown in Figures 1 to 15, and is equipped with an adapter 31 that carries the flange portion 2 of the precision substrate storage container 1 and is stored in the body 11 of the semiconductor wafer storage container 10, a spacer 40 that is interposed as necessary between the flange portion 2 of the precision substrate storage container 1 and the adapter 31, a plurality of fasteners 50 that are screwed respectively to the front and rear portions of the adapter 31 and engage with the flange portion 2 of the precision substrate storage container 1, and a pair of fastening pieces 60 that are screwed detachably to both sides of the adapter 31 and can contact the support teeth 12 of the body 11, thereby contributing to the achievement of Goal 9 of the SDGs adopted at the United Nations Summit.

[0025] As shown in Figures 2, 13 to 15, the precision substrate storage container 1 is, for example, a pod weighing about 5 kg, with a lid fitted over the open top of the main body for storing precision substrates, and with the front, rear, left and right sides of the lower flange portion 2 projecting outward in the width direction. Specifically, it is at least one of a photomask storage container for storing photomasks, which are precision substrates, and a reticle storage container for storing reticles, which are precision substrates. These may be either tall or short. A pair of left and right ribs 4 are generally arranged side by side at a distance on the flat upper surface 3 in front of the flange portion 2 of the precision substrate storage container 1.

[0026] 1, 2, 11 to 15, the semiconductor wafer storage container 10 is configured as a FOUP type used in mini-environment type semiconductor factories, and includes a body 11 capable of storing a plurality of semiconductor wafers in an aligned manner, and a door set 18 that is detachably fitted to the open front of the body 11. The body 11 is molded into a front-open box with an open front from a molding material containing a predetermined resin, and a pair of left and right support teeth 12 that are originally intended to horizontally support semiconductor wafers of φ300 mm are provided on both sides inside the body 11, and the pair of left and right support teeth 12 are arranged at a predetermined interval in the vertical direction.

[0027] Each support tooth 12 is formed as a long, thin plate that extends while bending in the front-rear direction of the body 11, and near the center of the surface, a positioning step 13 that positions and supports the side edge of the semiconductor wafer is formed as a recess that is approximately a descending crescent shape in a plan view. By forming this recess in the positioning step 13, the front of the support tooth 12 is formed into a jump-out prevention part 14 that restricts the semiconductor wafer from jumping out forward.

[0028] A bottom plate 15 having a substantially Y-shape, triangle, polygon, or the like in plan view is attached horizontally to the underside of the bottom plate of the body 11, and a plurality of positioning fixtures are attached to the bottom plate 15, each of which fits from above into a positioning pin of a semiconductor processing device (not shown) to position the semiconductor wafer storage container 10 with high precision. In addition, a robotic flange 16 having a substantially rectangular shape in plan view is detachably attached as an option to the approximate center of the ceiling of the body 11, and this robotic flange 16 is suspended by an automatic transport device such as an OHT in a factory (not shown). Optional operating handles 17 for gripping are detachably attached to the outer surfaces of both sides of the body 11, respectively.

[0029] 15, the door set 18 comprises a door body 19 having a generally rectangular shape at the front that is press-fitted detachably into the open front of the body 11, and a pair of left and right door covers 20 that cover both sides of the open front of the door body 19, with a locking mechanism 21 for preventing it from falling off being interposed between both sides of the open front of the door body 19 and the pair of left and right door covers 20. A front retainer (not shown) that holds the front periphery of a semiconductor wafer horizontally with an elastic piece is detachably attached to the recessed central part of the back of the door body 19 that faces the back of the body 11, but this front retainer is removed and unused when a precision substrate storage container tray 30 is used.

[0030] As shown in Figures 1 to 6 and 13 to 15, the adapter 31 of the tray 30 for precision substrate storage containers is molded into a flat rectangular frame-shaped plate from a molding material containing a specified resin in order to position the precision substrate storage container 1 and reduce its weight, and is supported by a pair of support teeth 12 on the left and right sides of the body 11 in place of semiconductor wafers.

[0031] The specified resin for the molding material is not particularly limited, but examples thereof include thermoplastic resins such as polycarbonate (PC) resin, cycloolefin polymer (COP) resin, cycloolefin copolymer (COC) resin, polypropylene (PP) resin, polyetherimide (PEI) resin, polyether ketone (PEK) resin, polyether ether ketone (PEEK) resin, polybutylene terephthalate (PBT) resin, polyacetal (POM) resin, and liquid crystal polymer, as well as alloys thereof.

[0032] The hollow portion 32 at the center of the adapter 31 is formed into a rectangular shape when viewed from above, and is sized to fit loosely with a small gap into the flange portion 2 of the precision substrate storage container 1 or to fit tightly without any gap, in accordance with the SEMI standard. Engagement holes 33 for the spacer 40 are drilled through the inner peripheral surface of the hollow portion 32 on one front side and one rear side, and each engagement hole 33 is formed into a horizontally long rectangle.

[0033] On the rear surface of the adapter 31, a support piece 34 with an L-shaped cross section located below the inner peripheral surface of the hollow portion 32 is provided in a planar frame shape, and this support piece 34 functions to support either the peripheral edge of the underside 5 of the flange portion of the precision substrate storage container 1 or the spacer 40. On the rear surface of the support piece 34, an escape groove (also called an escape allowance) 35 that can face the rear of the peripheral edge of the underside 5 of the flange portion of the precision substrate storage container 1 is formed as a recess with an inclination of about 10°, and by using this escape groove 35, the rear of the precision substrate storage container 1 can be tilted downward before it is smoothly loaded.

[0034] Mounting grooves 36 for the fixing pieces 60 are cut out on the flat surfaces on both the left and right sides of the adapter 31, and the fixing pieces 60 are fitted into the pair of mounting grooves 36. A pair of mounting pieces 37 are formed on the outer surfaces of both sides of the adapter 31, protruding horizontally so as to face the fixing pieces 60 from below with a gap therebetween, and each mounting piece 37 is formed thinner than the thickness of the adapter 31. The mounting pieces 37 are formed in the shape of a long and narrow plate extending in the front-rear direction of the adapter 31, and are strongly supported by the support teeth 12 of the body 11 under their own weight. A notch is formed on the back surface of the mounting piece 37 as necessary, and this notch comes into contact with the positioning step portion 13 of the support teeth 12, etc., to perform a positioning function.

[0035] 3, 4, 6, 7, etc., the spacer 40 is formed into a flat X-shaped plate piece made of the same molding material as the adapter 31 in order to improve lightness and durability, and is not used and is omitted when the precision substrate storage container 1 is tall, but when the precision substrate storage container 1 is short, it fits into the hollow portion 32 of the adapter 31 and is supported and mounted on the support piece 34, and functions to mount the precision substrate storage container 1 and adjust its height relative to the multiple fixtures 50. The thickness of this spacer 40 is determined taking into consideration the heights of the multiple types of precision substrate storage containers 1.

[0036] A recessed relief groove 41 is formed in the surface of the rear part of the spacer 40 with an incline of about 10° so as to face the rear peripheral edge of the lower surface 5 of the flange part of the precision substrate storage container 1. In addition, engagement protrusions 43 that fit into the pair of engagement holes 33 to position the spacer 40 are formed on the front and rear ends of a pair of inclined pieces 42 that form the spacer 40. In addition to the function of positioning and fixing the spacer 40, each engagement protrusion 43 also prevents erroneous insertion. This prevents the spacer 40 from being upside down and being supported and mounted on the support pieces 34 of the adapter 31 in this incorrect state.

[0037] 1 to 6 and 11 to 15, the multiple fixtures 50 are comprised of a pair of left and right first fixtures 51 rotatably (swingably) arranged on the front surface of adapter 31 and engaged with the front upper surface 3 of flange portion 2 of precision substrate storage container 1, and a second fixture 55 with an inverted L-shaped cross section that is screwed into the vicinity of the center of the rear surface of adapter 31 and engaged with the rear upper surface 3 of flange portion 2 of precision substrate storage container 1 for positioning and fixing. Each of these first and second fixtures 51, 55 has a built-in coil spring (not shown) so that they can be adapted to flange portions 2 of precision substrate storage containers 1 that are not of the same height, and the coil spring allows them to move up and down in a range of 1 mm to 5 mm, preferably 1 mm to 3 mm.

[0038] One of the pair of first fasteners 51 (left side in FIG. 3, etc.) rotates 90° counterclockwise and the other (right side in FIG. 3, etc.) first fastener 51 rotates 90° clockwise, from the viewpoint of fixing while avoiding the pair of ribs 4 on the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1. Each first fastener 51 is formed in a substantially T-shape with a cylindrical tube portion 52 rotatably supported near the center of the front surface of the adapter 31 and an elongated plate-like locking piece 53 formed horizontally on the upper end of the tube portion 52 and locking with the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1, and a handle 54 for rotation is formed on one end of the locking piece 53.

[0039] When the precision substrate storage container 1 is not fixed, the locking piece 53 of the first fastener 51 is oriented in the left-right direction of the adapter 31, and when the precision substrate storage container 1 mounted on the adapter 31 is fixed, the locking piece 53 rotates 90 degrees and is oriented in the front-rear direction of the adapter 31. When the locking piece 53 rotates 90 degrees and is oriented in the front-rear direction of the adapter 31, it comes into contact with the center of the rear surface of the door main body 19 constituting the door set 18. This contact restricts the rotation of the first fastener 51, preventing the precision substrate storage container 1 from shifting position or falling off.

[0040] As shown in Figures 1, 3 to 6, 8, and 11 to 15, the pair of fixing pieces 60 are slid from inside to outside into the pair of mounting grooves 36 of the adapter 31 in order to facilitate insertion and removal of the precision substrate storage container tray 30, and are then detachably screwed in by a plurality of fasteners. The pair of fixing pieces 60 are formed in mutually different designs and shapes in order to prevent erroneous fitting or screwing. Therefore, the fixing piece 60 for one side is properly fitted or screwed into the mounting groove 36 on one side of the adapter 31, and erroneous fitting or screwing of the fixing piece 60 for the other side into the mounting groove 36 on one side is prevented.

[0041] Each of the fixing pieces 60 is made of the same molding material as the adapter 31 and is formed into a polygonal plate extending in the front-rear direction of the adapter 31, and is formed to be thinner than the thickness of the adapter 31, and functions to be pressed against the rear surface of the support tooth 12 of the body 11 from below. The fixing piece 60 is pressed against the rear surface of the support tooth 12 of the body 11 from below, but this support tooth 12 is separate from the support tooth 12 on which the mounting piece 37 of the adapter 31 is supported and mounted, and is located above the support tooth 12 on which the mounting piece 37 of the adapter 31 is supported and mounted. For example, when the fixing piece 60 is pressed against the rear surface of the support tooth 12 in the fifth row from the bottom of the body 11, the mounting piece 37 of the adapter 31 is supported and mounted on the support tooth 12 in the third row from the bottom.

[0042] The pressure contact force of the fixed piece 60 can be obtained by interposing a shim with excellent spacer function between the mounting piece 37 of the adapter 31 and the fixed piece 60, by forming an inclined portion in the fixed piece 60, by changing the thickness of the fixed piece 60, etc.

[0043] In the above configuration, when a tall precision substrate storage container 1 is stored in the semiconductor wafer storage container 10 and transported, first, the adapter 31 is inserted horizontally between the multiple support teeth 12 at the bottom inside of the empty body 11 (see Figure 10), the pair of mounting pieces 37 of the adapter 31 are supported horizontally by a pair of left and right support teeth 12 of the body 11 (see Figure 9), and the fixing pieces 60 are slid horizontally from the inside to the outside into the pair of mounting grooves 36 of the adapter 31 to position and fit them (see Figure 11), and then each fixing piece 60 is screwed and fixed with multiple fasteners such as bolts and pressed against the back surface of the upper support tooth 12 (see Figures 8 and 12).

[0044] At this time, when the mounting piece 37 of the adapter 31 is supported and mounted on the first stage of supporting teeth 12 from below, for example, the fixing piece 60 is pressed against the rear surface of the third stage of supporting teeth 12 from below the body 11 .

[0045] Next, the precision substrate storage container 1 is inserted into the body 11 and its rear part is tilted downward so that the rear of the flange portion 2 of the precision substrate storage container 1 is clamped between the rear of the support piece 34 of the adapter 31 and the second fixing device 55 via the escape groove 35, and then the front of the precision substrate storage container 1 is tilted downward so that the support piece 34 of the adapter 31 directly supports the peripheral edge of the underside 5 of the flange portion of the precision substrate storage container 1 (see Figure 13).

[0046] In this case, since no large gap occurs between the flange portion 2 of the precision substrate storage container 1 and the multiple fixtures 50 and there is no hindrance to fixing the precision substrate storage container 1, the spacer 40 is omitted. Also, since the rear part of the support piece 34 has an escape groove 35, by utilizing this escape groove 35, the rear of the flange portion 2 of the precision substrate storage container 1 can be properly clamped between the rear part of the support piece 34 of the adapter 31 and the second fixture 55. Also, since the second fixture 55 moves up and down by the coil spring, the short piece protruding forward of the second fixture 55 can be securely engaged with the rear upper surface 3 of the flange portion 2 of the precision substrate storage container 1.

[0047] Next, the handles 54 of the locking pieces 53 of each first fixing device 51 are operated to rotate the locking pieces 53 90 degrees, and each locking piece 53 is locked into the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1 to fix it in position (see Figures 13 and 14), and the door set 18 is fitted into the open front of the body 11, allowing the tall precision substrate storage container 1 to be stored in the semiconductor wafer storage container 10 and transported (see Figure 15).

[0048] At this time, the first fixture 51 moves up and down by the coil spring so as to correspond to the height of the flange portion 2 of the precision substrate storage container 1, so that the locking piece 53 can be securely locked to the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1. In addition, the locking piece 53 comes into contact with the center of the back surface of the door set 18 and restricts free rotation, so that the precision substrate storage container 1 can be prevented from shifting in position or falling off even when the semiconductor wafer storage container 10 is transported.

[0049] According to the above configuration, the adapter 31 is not a disk or the like but a hollow frame with reduced thickness, so that the weight can be reduced and the risk of the support teeth 12 of the body 11 being cracked or damaged can be eliminated. Furthermore, the realization of the reduced weight eliminates the risk of impeding the transportation of the automatic transport device that suspends the semiconductor wafer storage container 10. Furthermore, by using the spacer 40, the height of the precision substrate storage container 1 when fixed can be adjusted, which makes the work of fixing the precision substrate storage container 1 very easy.

[0050] In addition, the mounting piece 37 and the fixed piece 60 of the adapter 31 are separately brought into contact with the multiple support teeth 12 of the body 11, dispersing the load acting on the support teeth 12, which prevents deformation or damage to the support teeth 12 and allows the adapter 31 to be easily inserted and removed from the body 11. Also, the adapter 31 is not a large shelf and does not increase in size, eliminating the risk of difficulty in handling. Furthermore, the support piece 34 of the adapter 31 has an L-shaped cross section and extends in the vertical direction, allowing the precision substrate storage container 1 to be mounted in a stable position regardless of its height.

[0051] Next, Figures 16 to 19 show a second embodiment of the present invention, in which the precision substrate storage container 1 is a low-profile type, and the flange portion 2 of this precision substrate storage container 1 is directly supported by the support piece 34A of the adapter 31.

[0052] Examples of the precision substrate storage container 1 include a low-profile photomask storage container for storing a photomask and a low-profile reticle storage container for storing a reticle. The adapter 31 has a support piece 34A with a plate-like cross section that contacts and supports the peripheral edge of the flange portion underside 5 of the precision substrate storage container 1 and is provided in a flat frame shape around the lower inner circumferential surface of the hollow portion 32, and an escape groove 35 that can face the rear of the peripheral edge of the flange portion underside 5 of the precision substrate storage container 1 is formed in the rear surface of this support piece 34A and is recessed with an inclination of about 10°, and by using this escape groove 35, the precision substrate storage container 1 can be smoothly loaded after the rear part is tilted downward. The other parts are the same as those in the above embodiment, so a description thereof will be omitted.

[0053] In this embodiment, the same effects as those of the above-mentioned embodiment can be expected, and since there is no need to drill a plurality of engagement holes 33 in the inner peripheral surface of the hollow portion 32 of the adapter 31, a simplified configuration can be expected. In addition, since the support piece 34A of the adapter 31 has a plate-shaped cross section that does not protrude downward, molding is easy. Furthermore, by inserting the deep-bottom type precision substrate storage container tray 30 with the spacer 40 of the first embodiment into the lower interior of the body 11 and inserting the shallow-bottom type precision substrate storage container tray 30 of the second embodiment into the upper interior of the body 11, two low-profile precision substrate storage containers 1 can be stored in the semiconductor wafer storage container 10 and transported efficiently, and a significant improvement in production efficiency can be expected.

[0054] The body 11 and door set 18 of the semiconductor wafer storage container 10 in the above embodiment can be molded from the same molding material as the adapter 31. This semiconductor wafer storage container 10 is preferably a FOUP type, but if no problems arise, it may be an unused FOSB type used for transportation. Also, while the adapter 31 in the above embodiment has a substantially square frame shape when viewed from above, it may also have a substantially polygonal frame shape when viewed from above. The outer peripheral surface of this adapter 31 may have multiple corners or steps formed thereon, or may be curved.

[0055] In addition to a predetermined resin, the molding material of the adapter 31 may contain conductive materials such as carbon fibers, carbon powder, carbon nanotubes, conductive polymers, and various antistatic agents such as anionic, cationic, and nonionic, as necessary. Engagement holes 33 for the spacer 40 may be drilled on the other front and other rear sides of the inner circumferential surface of the hollow portion 32 of the adapter 31. The support pieces 34 and 34A of the adapter 31 may be endless frame-shaped or may be multiple. For example, the support pieces 34 and 34A may be formed to protrude only from the lower front and lower rear parts of the inner circumferential surface of the hollow portion 32 of the adapter 31.

[0056] Furthermore, when the mounting piece 37 of the adapter 31 is supported and mounted on the support teeth 12, the fixing piece 60 may be supported by the support tooth 12 immediately above and adjacent to this support tooth 12. The spacer 40 may be, but is not limited to, an X-shape in plan view, and may be, for example, an asterisk symbol with multiple lines extending radially, or a plate having a substantially H-shape in plan view. At least one of the multiple forming pieces forming the substantially H-shaped spacer 40 in plan view may have an engagement protrusion 43 formed on an end thereof, which is fitted into the engagement hole 33 of the support piece 34.

[0057] It is also possible to interpose a coil spring or a leaf spring for vertical movement between the front of the adapter 31 and the first fixing device 51. It is also possible to interpose a coil spring or a leaf spring for vertical movement between the rear of the adapter 31 and the second fixing device 55. The number of the pair of left and right first fixing devices 51 may be increased or decreased as necessary. Furthermore, all of the technologies described in this specification are subject to the acquisition of rights through amendments, divisional applications, etc. [Industrial Applicability]

[0058] The tray for precision substrate storage container and the semiconductor wafer storage container according to the present invention are used in fields such as semiconductor manufacturing. [Explanation of symbols]

[0059] 1 Precision PCB storage container 2 Flange 3 Top surface 4. Ribs 5 Bottom side 10 Semiconductor wafer storage container 11. Body 12 Support teeth 18 Door Set 19 Door body 30 Tray for storing precision substrates 31 Adapter 32 Hollow part 33 Engagement hole 34 Support piece 34A Support piece 35 Undercut 37 Mounting piece 40 Spacer 41 Undercut 42 Inclined piece 43 Engagement protrusion 50 Fixtures 51 First Fixture 52 Cylinder part 53 Locking piece 54 Toride 55 Second Fixture 60 Fixing piece (fixing member)

Claims

1. A tray for a precision substrate storage container that supports a precision substrate storage container and is stored in a semiconductor wafer storage container, The device includes an adapter that is mounted with a precision substrate storage container and is housed in a body of a semiconductor wafer storage container that has an opening at the front side, a fixture that is attached to at least one of the front and rear parts of the adapter and that fixes a flange part of the precision substrate storage container, and a plurality of fixing members that are detachably attached to both sides of the adapter and can contact support teeth on both sides inside the body, A tray for a precision substrate storage container, characterized in that an adapter is formed into a planar, approximately frame-like shape that can fit into a flange portion of a precision substrate storage container, the adapter is formed with support pieces that can support the underside of the flange portion of the precision substrate storage container, and the support pieces are formed with escape grooves that can face the rear peripheral edge of the underside of the flange portion of the precision substrate storage container, and mounting pieces are made to protrude from both side sides of the adapter, so that the multiple mounting pieces can come into contact with support teeth other than the support teeth of the body that contact the fixed member.

2. 2. A tray for a precision substrate storage container as described in claim 1, further comprising a spacer interposed between the flange portion of the precision substrate storage container and the support piece of the adapter, and a clearance groove is formed on the surface of the spacer so as to face the rear peripheral edge of the lower surface of the flange portion of the precision substrate storage container.

3. 3. A tray for precision substrate storage containers as described in claim 2, wherein an engagement hole for a spacer is provided on the inner periphery of the hollow portion of the adapter, the spacer is formed into an approximately X-shape in plan view, and an engagement protrusion is formed on the end of at least one of a pair of inclined pieces forming the spacer, which can be fitted into the engagement hole in the hollow portion of the adapter.

4. 3. A tray for precision substrate storage containers according to claim 2, wherein a support piece having a generally L-shaped cross section is formed endlessly on the rear surface of the adapter for supporting either the peripheral edge of the lower surface of the flange portion of the precision substrate storage container or the spacer.

5. 2. A tray for a precision substrate storage container as described in claim 1, wherein an endless support piece having an approximately plate-shaped cross section is formed on the inner periphery of a hollow portion of the adapter that fits into the flange portion of the precision substrate storage container to support the peripheral edge of the underside of the flange portion of the precision substrate storage container.

6. A tray for precision substrate storage containers as described in claim 1 or 2, wherein the fixing device includes a first fixing device rotatably attached to the front part of the adapter and engages with the front of the flange portion of the precision substrate storage container, and a second fixing device having an approximately inverted L-shape attached to the rear part of the adapter and engages with the rear of the flange portion of the precision substrate storage container, and these first and second fixing devices are made movable up and down by a spring member.

7. 7. A tray for precision substrate storage containers as described in claim 6, wherein the first fixing device includes a cylindrical portion rotatably supported on the front portion of the adapter, and a locking piece formed on the cylindrical portion and capable of locking with the front of the flange portion of the precision substrate storage container, a handle for operation is formed on the locking piece, and when the precision substrate storage container mounted on the adapter is fixed, the locking piece is oriented in the fore-and-aft direction of the adapter and comes into contact with a door set fitted to the front of the body of the semiconductor wafer storage container.

8. 3. A semiconductor wafer storage container for use in a semiconductor manufacturing process, comprising: a front-open box body for storing the precision substrate storage container tray according to claim 1 or 2; and a door set that is removably fitted to the open front of the body.

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