System including gas analyzer

Abstract

To meet the needs for processes carried out in a process chamber to be stably controlled.SOLUTION: Provided is a system comprising: a process chamber in which a plasma process is carried out; a gas analyzer to which a sample gas is supplied from the process chamber; an exhaust system for exhausting the sample gas via the gas analyzer, and a process control unit that controls at least one process carried out in the process chamber on the basis of measurement result from the gas analyzer.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a gas analyzer. [Background technology]

[0002] Patent Document 1 discloses a technique for providing a thermionic emission filament that can ensure a long life and for improving the analytical accuracy of a mass spectrometer that uses this thermionic emission filament. To this end, it discloses a thermionic emission filament that includes a core material through which a current flows and an electron emission layer formed so as to cover the surface of the core material, and that the electron emission layer is dense enough to substantially block gas.

[0003] Patent Document 2 describes a glow discharge optical emission spectrometry (GD-OES) in which a sample holder includes an electrode (second electrode) having a sample fixing surface, and an outer cylinder and an inner cylinder (contact portion) with the sample fixing surface disposed on the inside. With the sample separated from the opening of the glow discharge tube, the open end of the inner cylinder is contacted with the periphery of the opening. The inside of the glow discharge tube and the outer and inner cylinders, which are connected to each other, is depressurized, and argon gas is supplied. Next, the inner cylinder is moved relative to the outer cylinder to bring the sample closer to the tip of the cylindrical portion (end portion) of the anode (first electrode) of the glow discharge tube, a refrigerant is caused to flow in a flow path (cooling portion) to cool the sample, and a voltage is applied to the electrodes to perform glow discharge optical emission analysis. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2017-107816 A [Patent Document 2] JP 2016-27327 A Summary of the Invention [Problem to be solved by the invention]

[0005] It is desirable to be able to stably control the process carried out in the process chamber. [Means for solving the problem]

[0006] One aspect of the present invention is a system including a process chamber in which a plasma process is performed, a gas analyzer to which a sample gas is supplied from the process chamber, an exhaust system that exhausts the sample gas via the gas analyzer, and a process control unit that controls at least one process performed in the process chamber based on the measurement results of the gas analyzer. In this system, the internal state of the process chamber can be stably and accurately monitored based on the measurement results of the gas analyzer, and the process performed in the process chamber can be stably controlled.

[0007] The gas analyzer may include a sample chamber having a dielectric wall structure and into which only the sample gas to be measured flows, a plasma generation mechanism that generates plasma in the sample chamber, which has been decompressed, by an electric field and / or a magnetic field via the dielectric wall structure, and an analysis unit that analyzes the sample gas through the generated plasma. In this gas analyzer, the plasma is generated in the sample chamber into which only the sample gas to be measured flows, so that the plasma can be generated without using any gas other than the sample gas, such as argon gas for glow discharge or argon gas for generating a plasma torch. Therefore, by analyzing the sample gas through the generated plasma by the analysis unit, it becomes possible to more accurately and quantitatively measure the components contained in the sample gas.

[0008] In addition, by generating plasma in the sample chamber using an electric field and / or a magnetic field via a dielectric wall structure, it is possible to eliminate parts with low resistance to corrosion, such as a cathode for glow discharge and a filament for thermoelectric emission, etc. This makes it possible to provide a gas analyzer that can accurately analyze sample gases containing corrosive gases for a long period of time.

[0009] The gas analyzer may include a gas input unit configured to allow only sample gas from a process to flow into the sample chamber. Sample gas from a process, particularly a process including a plasma process such as etching or film formation, is likely to generate plasma without the assistance of argon gas or the like, and is one of the applications to which the gas analyzer is applied.

[0010] The dielectric wall structure may include at least one of quartz, aluminum oxide (Al2O3), and silicon nitride (SiN3).The plasma generation mechanism may include a mechanism for generating plasma by at least one of inductively coupled plasma (ICP), dielectric barrier discharge (DBD), and electron cyclotron resonance (ECR).

[0011] The sample chamber may be a miniature chamber. A stable plasma for measurement can be generated in a small chamber independent of a large process chamber. For example, the total length of the sample chamber may be 1-100 mm and the diameter may be 1-100 mm. The total length and the diameter may be 5 mm or more, 10 mm or more, 80 mm or less, 50 mm or less, or 30 mm or less. The volume of the sample chamber may be 1 mm or more. 3 It may be 10 or more. 5 mm 3 The volume of the sample chamber may be less than 10 mm 3 It may be more than 30 mm 3 It may be more than 100 mm 3 The capacity of the sample chamber may be 10 4 mm 3 It may be less than 10 3 mm 3 It may be the following.

[0012] The analysis unit may be an optical emission analysis unit that optically detects optical emissions from the plasma generated in the sample chamber. The optical emission analysis unit may include an optical spectrometer. The analysis unit may include a filter unit that filters ionized gas in the plasma and a detector unit that detects the filtered ions. The gas analyzer may further include an energy filter disposed between the filter unit and the sample chamber.

[0013] The gas analyzer may be a process monitoring device having the above gas analyzer. This monitoring device includes a sample chamber that is different from the process chamber, and can generate plasma in the sample chamber that is independent of the process plasma generated in the process chamber. Therefore, unlike conventional process monitors (plasma process monitors) that measure the process plasma generated in the process chamber, this monitoring device can generate plasma with conditions suitable for gas analysis and accurately monitor the state of the gas in the process chamber.

[0014] The system may include the above gas analyzer and a process chamber in which a plasma process is carried out and a sample gas is supplied to the gas analyzer. The gas analyzer has high resistance to corrosive gases and generates plasma without using a support gas such as argon gas, so that the plasma process can be monitored accurately over a long period of time. The system may include a process monitoring device.

[0015] The system may include a process control unit for controlling at least one plasma process carried out in the process chamber based on measurements by the gas analyzer. The process control unit may include a unit for determining an endpoint of the at least one plasma process based on measurements by the gas analyzer of by-products of the at least one plasma process.

[0016] A method of controlling a system having a process chamber performing a plasma process is also disclosed. The system has a gas analyzer including a sample chamber separate from the process chamber into which only sample gas from the process chamber flows. The method of monitoring plasma formed in the process chamber includes controlling a plasma process performed in the process chamber based on measurements from the gas analyzer. Controlling the plasma process may include determining an endpoint of the at least one plasma process based on measurements from the gas analyzer of by-products of the at least one plasma process. The at least one plasma process may include at least one of etching, film formation, and cleaning.

[0017] In this control method, the gas analyzer may measure ions ionized by thermal electrons in the sample chamber. This control method may also include generating plasma in the sample chamber independent of the process chamber. This allows more continuous and accurate monitoring of the condition in the process chamber, enabling stable control.

[0018] Also disclosed is a program for controlling a system having a process chamber for performing a plasma process. The program has instructions for controlling a plasma process performed in the process chamber based on the measurement results of the gas analyzer. The program may further have instructions for generating plasma in a sample chamber independent of the process chamber. The program or program product may be provided recorded on a suitable recording medium. [Brief description of the drawings]

[0019] [Figure 1] FIG. 1 is a block diagram illustrating an example of a gas analyzer. [Diagram 2] FIG. 1 illustrates an example system including a gas analyzer that performs plasma ionization. [Diagram 3] 4 is a flowchart showing an example of control of the system. [Figure 4] FIG. 13 is a diagram showing another example of a mass spectrometer that performs plasma ionization. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] One embodiment of the present invention is a gas analyzer, one example of which is a mass spectrometer. In applications where corrosive gases are used, such as monitoring semiconductor manufacturing processes, sensors that are highly resistant to corrosion are required.

[0021] With reference to FIG. 1, an outline of a quadrupole mass spectrometer will be described as an example of a gas analyzer. The quadrupole mass spectrometer (mass analyzer) 99 includes an ionizer (ionization unit, ion source) 90 that ionizes a gas (gas sample, sample gas) 9 to be analyzed, and an analysis unit (gas analysis section) 21 that analyzes the ionized gas 8. The gas analysis unit 21 includes a quadrupole section that is a filter unit 20, and a detector unit (detection section, for example, a Faraday cup) 30 that collects gas ions 8 that arrive through between the electrodes of the quadrupole. The quadrupole section of the filter unit 20 includes a plurality of, typically four, cylindrical electrodes that extend in the vertical direction and are arranged at predetermined intervals in the circumferential direction. The mass analyzer 99 includes a vacuum container (housing) 40 that houses the ionizer 90 and the gas analysis unit 21, and the gas 9 that flows into the housing 40 is ionized by the ionizer 90. The gas analyzer 99 includes an exhaust system 60 that maintains the housing 40 at a negative pressure (vacuum). The exhaust system 60 may include a turbomolecular pump (TMP) 61 and a roots pump (RP) 62 as vacuum pumps.

[0022] The ionizer 90 includes a grid 91 and a filament 92 that functions as a cathode that supplies thermoelectrons (electron flow) 93. An example of the grid 91 is formed by assembling thin metal wires in a lattice shape and a cylindrical shape. The filament 92 is connected to metal support pins that are installed on a support frame at predetermined intervals in the circumferential direction, and is disposed on the outer periphery of the grid 91. An example of the filament 92 is an iridium base material whose surface is coated with yttrium oxide by electrochemical deposition. A focus electrode 25 that efficiently focuses ions moving toward the quadrupole section is interposed between the filter unit 20 and the ionizer 90. The focus electrode 25 is, for example, electrically connected to the support pin of the filament 92, and the potential of the filament 92 and the potential of the focus electrode 25 are made equal.

[0023] A conventional mass spectrometer 99 is designed to operate under conditions of pure gas, i.e., an environment that is not corrosive. A cathode material (filament material) that corresponds to this condition is Y2O3 / Ir, i.e., a filament whose core material is made of iridium Ir and whose electron emission layer is made of yttrium oxide (yttria, Y2O3). In this filament 92, the yttrium Y of Y2O3 reacts with fluorine F or a fluorine-based gas to become yttrium fluoride YF3 or yttrium oxyfluoride YOF, which are volatile. For gases that contain carbon fluoride CFx as a component, tungsten W material is considered to be effective as a filament material (cathode material). However, tungsten W cannot be said to have a sufficient life in gases or environments such as carbon tetrachloride CCl4, hydrochloric acid HCl, tungsten fluoride WF6, and tungsten chloride WCL6.

[0024] Furthermore, in an environment containing silicone oil, the filament 92 may become coated with Si, SiO2, SiN, etc., and its function may be impaired, particularly when the mass spectrometer 99 is started and stopped. It is also possible to clean the filament 92 with corrosive gases including fluoromethane CF4, nitrogen fluoride NF3, etc., but this may further shorten the life of the filament 92.

[0025] Inconel 600 is often used as the grid 91. Some gas may accumulate on the grid 91 and become an insulating film, which may not create the correct potential distribution in the ionizer / ion optics region.

[0026] Currently, an electron impact ion source is mainly used as an ionization method for mass spectrometers 99. In this method, a hot filament 92 is required as an electron emitter, and the filament 92 may react with the sample gas 9 or its by-products. In addition, the filament 92 may heat the surrounding parts, which may increase the rate of chemical reactions. It is possible to consider using a plasma ionization source that does not have a heating part. However, a support gas such as argon gas must be introduced to generate the plasma torch that serves as the plasma source, and this gas becomes the subject of gas analysis together with the sample gas 9. If thermal electrons are used to generate plasma, as in glow discharge, a filament (cathode) is required, and there is a problem of resistance to corrosion, similar to ionization by thermal electrons. In addition, the vaporized products and chemical reactants of the filament may become the subject of gas analysis.

[0027] FIG. 2 shows one embodiment of the present invention. The system 80 shown in FIG. 2 includes a process apparatus 70 including a process chamber 71 in which a plasma process is performed, and a process monitoring device (process monitor) 50 that monitors each process performed in the process chamber 71. The process apparatus 70 is an apparatus used to manufacture and / or process various products in processing and manufacturing industries including the chemical industry. The process apparatus 70 in this example includes an apparatus that manufactures or processes products using a plasma process, and is typically an apparatus that performs a process of forming various types of films or layers on a substrate 78 or a process of etching the substrate 78. One example of the process apparatus 70 is a CVD (Chemical Vapor Deposition, Ch The process equipment 70 is a system that performs photochemical vapor deposition (PCVD) or physical vapor deposition (PVD). One example of the process equipment 70 is an equipment that performs a process using a semiconductor as the substrate 78. Another example of the process equipment 70 is an equipment that performs a process of stacking various types of thin films using an optical component such as a lens or a filter as the substrate 78. The process equipment 70 is not limited to these examples.

[0028] The process equipment 70 includes a chamber (process chamber) 71 in which a substrate to be processed is placed, a gas supply device 72 that supplies processing gas to the process chamber 71, and a process control unit 75 including a function of controlling generation of plasma for film formation and / or etching (process plasma) in the process chamber 71. The process control unit 75 may further include a function of controlling generation of cleaning plasma for cleaning the inside of the process chamber 71.

[0029] The process monitor 50 includes a gas analyzer 1 that analyzes a gas (sample gas) 9 supplied from a process chamber 71, and a monitor control unit 51 that controls the gas analyzer 1 to monitor the internal state of the process chamber 71. The gas analyzer 1 includes a plasma generation unit 10 that generates plasma 18 of the sample gas 9 to be measured that is supplied from the process device 70, and an analysis unit 21 that analyzes the sample gas 9 via the generated plasma 18. The plasma generation unit 10 includes a chamber (sample chamber) 11 having a dielectric wall structure 12 and into which only the sample gas 9 to be measured flows, and a plasma generation mechanism 13 that generates plasma 18 in the reduced-pressure sample chamber 11 by an electric field and / or a magnetic field via the dielectric wall structure 12.

[0030] The gas analyzer 1 of this example is a mass spectrometry type, and the analysis unit 21 has a filter unit (quadrupole section in this example) 20 that filters the ionized sample gas (sample gas ions) 8 generated as plasma 18 in the plasma generation device 10 according to the mass-to-charge ratio, a focus electrode 25 that draws in a part of the plasma 18 as an ion flow 8, a detector unit 30 that detects the filtered ions, and a vacuum container (housing) 40 that houses the analysis unit 21. The gas analyzer 1 includes an exhaust system 60 that maintains the inside of the housing 40 at an appropriate negative pressure condition (vacuum condition). The exhaust system 60 of this example includes a turbomolecular pump (TMP) 61 and a roots pump 62. The exhaust system 60 also controls the internal pressure of the sample chamber 11 of the plasma generation device 10.

[0031] The gas analyzer 1 further includes a gas input unit 19 configured to allow only the sample gas 9 from the process device 70 to flow into the sample chamber 11 of the plasma generation unit 10. Only the sample gas 9 from the process device 70 flows into the sample chamber 11, which has been depressurized by the exhaust system 60, and plasma 18 is formed inside the sample chamber 11. That is, in the plasma generation unit 10, plasma 18 for analysis is generated only by the sample gas 9 without using an assist gas (support gas) such as argon gas. The wall 12 of the sample chamber 11 is made of a dielectric material, and examples of such dielectric materials include quartz, aluminum oxide (Al2O3), silicon nitride (SiN3), and other dielectric materials that are highly resistant to plasma.

[0032] The plasma generating mechanism 13 of the plasma generating unit 10 generates plasma 18 by electric and / or magnetic fields through the dielectric wall structure 12 inside the sample chamber 11 without using electrodes or a plasma torch. An example of the plasma generating mechanism 13 is a mechanism that excites the plasma 18 with radio frequency (RF) power. Examples of plasma include inductively coupled plasma (ICP), dielectric barrier discharge (DBD), and electron cyclotron resonance (ECR). The plasma generating mechanism 13 includes a high frequency power source 15 and a coil 14 arranged along the sample chamber 11 .

[0033] The internal pressure of the sample chamber (container) 11 is controlled to an appropriate negative pressure using an exhaust system 60 shared with the gas analyzer 1, an independent exhaust system, or an exhaust system shared with the process device 70. The internal pressure of the sample chamber 11 may be a pressure at which plasma is easily generated, for example, in the range of 0.01-1 kPa. When the internal pressure of the process chamber 71 is controlled to about 1-several hundreds of Pa, the internal pressure of the sample chamber 11 may be controlled to a lower pressure, for example, about 0.1-several tens of Pa, or may be controlled to 0.1 Pa or more, or 0.5 Pa or more, 10 Pa or less, or 5 Pa or less. For example, the inside of the sample chamber 11 may be depressurized to about 1-10 mTorr (0.13-1.3 Pa). By maintaining the sample chamber 11 at the above-mentioned reduced pressure, it is possible to generate plasma 18 at a low temperature using only the sample gas 9.

[0034] In the process monitor 50, the object to be monitored is the sample gas 9 supplied from the process chamber 71 in which the plasma process is carried out. Therefore, by supplying RF power under appropriate conditions, plasma 18 can be maintained in the sample chamber 11 by simply introducing the sample gas 9, without using an arc discharge or a plasma torch. A magnetic field and an electric field may be used in combination to generate and confine the plasma 18 in the chamber 11. By ionizing the sample gas 9 through plasma generation that does not require consumable electrodes, the problem of the lifespan associated with electrode wear can be solved, and a gas analyzer 1 capable of stable measurement with a longer measurement lifespan can be provided.

[0035] Furthermore, by eliminating the need for a support gas such as argon gas, plasma 18 can be generated by ionizing only the sample gas 9, and the plasma can be supplied to the gas analysis unit 21. This makes it possible to provide a gas analyzer 1 that has high measurement accuracy for the sample gas 9 and enables quantitative measurement of not only the gas components, but also the components. Therefore, in a process monitor (process monitoring device) 50 equipped with the gas analyzer 1, the internal state of the process chamber 71 of the process device 70 can be stably and accurately monitored for a long period of time.

[0036] Furthermore, in the process monitor 50, plasma 18 of the sample gas 9 can be generated in the sample chamber 11 dedicated to gas analysis, independent of the process chamber 71. Therefore, plasma 18 can be generated in the sample chamber 11 under conditions suitable for sampling and gas analysis, different from those in the process chamber 71. Therefore, even when no process plasma or cleaning plasma is being generated in the process chamber 71, the internal condition of the process chamber 71 can be monitored via the sample gas 9.

[0037] The sample chamber 11 may be a small chamber (miniature chamber) of, for example, several mm to several tens of mm in size that can generate the plasma 18. By reducing the capacity of the sample chamber 11, it is possible to provide a gas analyzer 1 with excellent real-time performance. Even when an emission analysis type unit equipped with an optical spectrometer is used as the gas analysis unit 21, gas analysis is possible by maintaining the plasma 18 having a length of several mm to several tens of mm.

[0038] The total length of the sample chamber 11 may be 1-100 mm, and the diameter may be 1-100 mm. The total length and diameter of the sample chamber 11 may be 5 mm or more, 10 mm or more, 80 mm or less, 50 mm or less, or 30 mm or less. The volume of the sample chamber 11 may be 1 mm or more.3 It may be 10 or more. 5 mm 3 The volume of the sample chamber 11 may be 10 mm 3 It may be more than 30 mm 3 It may be more than 100 mm 3 The capacity of the sample chamber 11 may be 10 4 mm 3 It may be less than 10 3 mm 3 It may be the following.

[0039] The monitor control unit 51 of the process monitor 50 includes a plasma control unit (plasma control function) 52 that controls the plasma generation unit 10, a filter control unit (filter control function) 53 that controls the filter unit 20, and a detector control unit (detector control function) 54 that controls the detector unit 30. The monitor control unit 51 may be equipped with computer resources including a memory and a CPU, and the functions of the monitor control unit 51 may be provided by a program 59. The program (program product) 59 may be provided by being recorded on an appropriate recording medium.

[0040] The plasma control unit 52 may have a function of controlling the frequency, voltage, etc. of the high frequency power supply 15 for generating plasma 18 in the sample chamber 11, a function of controlling the inflow rate of the sample gas 9 by a flow control valve 19a provided in the gas input unit 19, and a function of controlling the internal pressure of the sample chamber 11 by a pressure control valve 65 provided in the connection line to the exhaust system 60. By controlling these factors, even if the type of process performed in the process chamber 71 changes or the process state changes, the plasma 18 can be stably generated in the sample chamber 11, and the sample gas 9 can be continuously analyzed and monitored from the process device 70.

[0041] In this embodiment, the analysis unit 21 is a mass spectrometry type, particularly a quadrupole mass spectrometry type, and the filter unit 20 is a quadrupole filter. Therefore, the filter control unit 53 includes a function as a drive unit (RF / DC unit) that applies high frequency and direct current to the quadrupole. The filter unit 20 filters the ionized sample gas 8 according to the mass-to-charge ratio.

[0042] The detector control unit 54 detects components contained in the sample gas 9 by capturing an ion current generated by the detector unit (detection unit, collector unit) 30, for example, a Faraday cup, due to ions passing through the filter unit 20. The filter unit 20 scans a range of a specified amu (atomic mass unit), and the detector unit 30 obtains the ion intensity in the scanned range, making it possible to quantitatively measure atoms (molecules) contained in the sample gas 9. For this reason, the monitor control unit 51 can output (display) the gas components and concentrations contained in the sample gas 9 as measurement results or monitoring results. The monitor control unit 51 includes a unit (function) 55 that displays or outputs these measurement results (monitoring results).

[0043] A process control unit 75 of the process equipment 70 controls at least one plasma process carried out in a process chamber 71 in which a plasma process is carried out and in which a sample gas 9 is supplied to the gas analyzer 1, based on the measurement results of the gas analyzer 1. The process control unit 75 includes a function (endpoint control unit) 76 for determining an end point of the at least one plasma process based on the measurement results of a by-product of the at least one plasma process by the gas analyzer 1.

[0044] The process control unit 75 further includes a function (etching control unit) 74a for controlling an etching process, a function (film formation control unit) 74b for controlling a film formation process, and a function (cleaning control unit) 74c for controlling a cleaning process, and an end point of each process is controlled by an end point control unit (end point control function) 76. The process control unit 75 includes a memory and a CPU. The process control unit 75 may be provided with computer resources, and the functions of the process control unit 75 may be provided by a program 79. The program (program product) 79 may be provided by being recorded on an appropriate recording medium.

[0045] The etching control unit 74a introduces etching gases such as carbon fluoride CFx, sulfur hexafluoride SF6, nitrogen fluoride NF3, and silicon tetrafluoride SiF4 into the process chamber 71 to generate process plasma and etch the substrate 78. The end point of the etching process can be determined in the end point control unit 76 based on the measurement results of the gas analyzer 1 of the concentration of the component of the layer to be etched, which is a by-product of the etching process, in the sample gas 9, for example, silicon oxide SiO2. In this process, the concentration of the by-product SiO2 is correlated, for example, proportional, with the etched area, and it can be accurately determined that etching of a region of a predetermined depth or width has ended. In particular, by monitoring the etching process using the gas analyzer 1 with high corrosion resistance, the process can be stably and accurately controlled.

[0046] In the gas analyzer 1, it is possible to measure the components of the etching gas as well as the by-products. Therefore, the process monitor 50 can monitor the state of the process with multiple monitoring items including monitoring of the state of the etching gas and monitoring of the end point. The etching control unit 74a may include a machine-learned model (artificial intelligence, AI) that controls the progress of the etching process based on the multiple monitoring items obtained from the process monitor 50. The same applies to each process control described below.

[0047] The endpoint of the etching process may be determined by the endpoint control unit 76 when the process monitor 50 detects components of the endpoint layer as by-products in the substrate 78 on which the endpoint layer is provided, and the method of detecting the endpoint is not limited to the above-mentioned method. In the conventional monitoring of the endpoint using a plasma process monitor, the state of the plasma in the process chamber 71 is optically determined and detected. In contrast, the monitoring of the endpoint using the gas analyzer 1 includes monitoring the actual concentration of by-products in real time via plasma generated separately from the process plasma, and the endpoint can be determined with even greater accuracy.

[0048] In the film formation process using the film formation control unit 74b, the end point can be determined by detecting by-products of the plasma for film formation. In the film formation process (film generation process), for example, TEOS plasma (tetraethyl orthosilicate) is generated in the process chamber 71 for forming a SiO2 layer on a semiconductor substrate 78, and plasma containing silane SiH4 and ammonia NH3 is generated in the process chamber 71 for forming a silicon nitride SiNx layer. The end point of the film formation process can be determined in the end point control unit 76 from the measurement results of the gas analyzer 1 for the concentrations of by-products in the film formation process, for example, hydrides (moisture), hydrocarbons, and carbon oxides, in the sample gas 9.

[0049] In the case of a film formation process, the concentration of the by-products is correlated, for example proportionally, with the area or thickness of the film formed, and it is possible to accurately determine when the formation of a film of a predetermined area or thickness has been completed. At the same time, the state of the process plasma during the film formation process can be monitored by the process monitor 50, and the film formation process can be controlled by AI using the monitoring results of the process monitor 50, as in the above-mentioned etching control. Furthermore, by monitoring the process using the gas analyzer 1, which is less affected by coatings, etc., the film formation process can be stably and accurately controlled.

[0050] In the cleaning process using the cleaning control unit 74c, the end point can be determined by the by-products generated by the cleaning plasma. When cleaning is performed after forming a SiO2 layer in the process chamber 71, a cleaning plasma containing a corrosive gas such as nitrogen fluoride NF3 is generated. The end point of the cleaning process can be determined by accurately detecting silicon tetrafluoride SiF4, which is a by-product of the cleaning plasma in this example, in real time by the gas analyzer 1 via the sample gas 9.

[0051] FIG. 3 shows a flow chart of an example of the control of the system 80 having the process monitor 50 equipped with the gas analyzer 1 of this embodiment. In step 101, the plasma process in the process equipment 70 is started. In step 102, the gas analyzer 1 connected to the process chamber 71 is monitored, and in step 103, the plasma process performed in the process chamber 71 is controlled based on the measurement results of the gas analyzer 1. In this process, in step 104, when the end point of the plasma process being performed is determined based on the measurement results of the gas analyzer 1 of the by-products of the plasma process, in step 105, the plasma process is terminated. In step 106, if the next plasma process is required in the manufacturing or processing process of the work object such as a semiconductor substrate in the process equipment 70, the process returns to step 101 and the next plasma process is started. By a manufacturing method or processing method including such a control method, a high-quality product can be manufactured and provided using the process equipment 70 in the minimum processing time.

[0052] FIG. 4 shows another embodiment of the present invention. The basic configuration of this system 80 is the same as that of the system 80 shown in FIG. 2. The gas analyzer 1 includes a plasma generation unit 10. The gas analyzer 1 further includes an energy filter 27 between the plasma generation unit 10 and a filter unit (a quadrupole unit in this example) 20. In this example, a Bessel-Box type energy filter (energy analyzer) is used, but a CMA (Cylindrical Mirror Analyzer) may also be used. The energy filter 27 is composed of a cylindrical electrode, a disk-shaped electrode (having the same potential as the cylindrical electrode) arranged at the center of the cylindrical electrode, and electrodes arranged at both ends of the cylindrical electrode, and operates as a pass-pass filter that passes only ions having a specific kinetic energy by the electric field created by the potential difference Vba between the cylindrical electrode and the electrodes at both ends and the potential Vbe of the cylindrical electrode. The disk-shaped electrode arranged at the center of the cylindrical electrode can prevent soft X-rays generated during plasma generation and light generated during gas ionization from directly entering the ion detector 30, thereby reducing noise. In addition, the structure is such that ions and neutral particles that are generated inside and outside the ion generation unit and enter parallel to the central axis are not detected.

[0053] In the plasma generating unit 10, which generates plasma at a lower pressure than the process, there is no need to inject a support gas such as argon plasma, and it is possible to perform accurate quantitative analysis of the sample gas collected from the process. In addition, plasma is generated continuously, rather than by pulse discharge using electrodes, and fluctuations due to pulse duty and the like can be suppressed, which also reduces noise and improves analytical accuracy. Furthermore, direct ionization reduces the ionization current and suppresses the generation of fragments.

[0054] In addition, by operating the plasma generating unit 10 at low pressure, it is possible to prevent highly reactive components from flowing into the ionization unit and, via it, into the gas analyzer (mass spectrometer) 1, thereby extending the measurement life, including the analysis of the sample gas 9 containing highly corrosive components. Furthermore, since not only positive ions but also negative ions are formed during plasma ionization, it is possible to detect the components in the gas by filtering out the positive and negative ions. This allows for more accurate analysis. Furthermore, since the sample gas 9 is confined within the sample chamber 11 when it is ionized, the ionization area can be increased and the ionization efficiency can be improved. At the same time, a large amount of radicals that have been converted into plasma is supplied to the chamber 11 and the gas analyzer 1, which can also suppress the deposition of oxides and the like.

[0055] Furthermore, if many parts of the gas analyzer 1, including the housing 40, are made of Fe-Ni material, in the worst case, HF, HCL, WFx, WCLx, etc. may react with the Fe-Ni material and disappear. It is possible to draw plasma from highly corrosive gases such as CFx into the gas analyzer 1 as a cleaning plasma and clean it, but if many parts of the gas analyzer 1 are made of metal, the metal may corrode and the life of the gas analyzer 1 may be shortened. For this reason, it is effective to attach or coat pyrolytic carbon (pyrolytic graphite, PG) to or on the surface of the metal or to the parts that make up the gas analyzer 1 instead of metal.

[0056] Although the above description is given taking a quadrupole type mass spectrometer as an example, the filter section 20 may be of an ion trap type or of another type such as a Wien filter. The filter section 20 is not limited to a mass spectrometer type, and may be one that filters gas molecules or atoms using other physical quantities such as ion mobility. The gas analysis unit may be an optical analysis device such as an emission analysis unit.

[0057] The above discloses a gas analyzer having a sample chamber having a dielectric wall structure into which only a sample gas to be measured flows, a plasma generation mechanism for generating plasma in the sample chamber, which has been reduced in pressure, by an electric field and / or a magnetic field through the dielectric wall structure, and an analysis unit for analyzing the sample gas through the generated plasma. The gas analyzer may have a gas input unit configured to allow only the sample gas from a process to flow into the sample chamber. The dielectric wall structure may include at least one of quartz, aluminum oxide, and silicon nitride. The plasma generation mechanism may include a mechanism for generating plasma by at least one of inductively coupled plasma, dielectric barrier discharge, and electron cyclotron resonance. The sample chamber may have a total length of 1-100 mm and a diameter of 1-100 mm. The analysis unit may include a filter unit for filtering ionized gas in the plasma, and a detector unit for detecting the filtered ions. The gas analyzer may further include an energy filter disposed between the filter unit and the sample chamber.

[0058] The above discloses a process monitoring device having the gas analyzer described above. The above discloses a system having the gas analyzer described above and a process chamber in which a plasma process is carried out, the process chamber being supplied with the sample gas to the gas analyzer. The system may have a process control unit that controls at least one plasma process carried out in the process chamber based on a measurement result of the gas analyzer. The process control unit may include a unit that determines an end point of the at least one plasma process based on a measurement result of a by-product of the at least one plasma process by the gas analyzer.

[0059] The above discloses a method for controlling a system having a process chamber for performing a plasma process. The system includes a gas analyzer including a sample chamber separate from the process chamber into which only sample gas from the process chamber flows, and the method includes controlling a plasma process performed in the process chamber based on a measurement result of the gas analyzer. Controlling the plasma process may include determining an end point of at least one plasma process based on a measurement result of a by-product of the at least one plasma process by the gas analyzer. The at least one plasma process may include at least one of etching, film formation, and cleaning. The control method may include generating a plasma in the sample chamber independent of the process chamber.

[0060] Further, the above discloses a program for controlling a system having a process chamber for performing a plasma process, the system having a gas analyzer including a sample chamber separate from the process chamber into which only sample gas from the process chamber flows, the program having instructions for controlling the plasma process performed in the process chamber based on the measurement results of the gas analyzer.

[0061] Furthermore, while particular embodiments of the present invention have been described above, various other embodiments and modifications may be conceived by those skilled in the art without departing from the scope and spirit of the present invention, and such other embodiments and modifications are within the scope of the following claims, which define the present invention. [Explanation of symbols]

[0062] 1 Gas analyzer, 9 Sample gas, 11 chamber, 12 wall structure, 13 plasma generation mechanism 18 Plasma

Claims

1. a process chamber in which a plasma process is carried out; a gas analyzer to which the sample gas from the process chamber is supplied; an exhaust system for exhausting the sample gas through the gas analyzer; and a process control unit for controlling at least one process carried out in the process chamber based on measurements from the gas analyzer.

2. In claim 1, A system comprising a gas input unit including a function for controlling the flow of the sample gas from the process chamber to the gas analyzer.

3. In claim 2, The gas input unit supplies only gas from the process chamber to the gas analyzer as the sample gas.

4. In claim 1, The gas analyzer includes a filter unit that filters the ionized sample gas; and a detector unit for detecting the filtered ions.

5. In claim 1, The system, wherein the process control unit includes a unit for determining an endpoint of the at least one plasma process based on measurements of by-products of the at least one plasma process by the gas analyzer.

6. In any one of claims 1 to 5, The system, wherein at least one process performed in the process chamber includes at least one of chemical vapor deposition (CVD) and physical vapor deposition (PVD).

7. In any one of claims 1 to 5, The at least one process performed in the process chamber includes at least one semiconductor manufacturing process.

8. In any one of claims 1 to 5, The system, wherein the at least one process performed in the process chamber includes at least one optical component manufacturing process.

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