Optical connection terminal, optical connection terminal connecting structure, and method for manufacturing optical device

Abstract

To provide an optical connection terminal capable of constructing an optical connection structure simply, and an optical connection terminal connecting structure and the like using the same.SOLUTION: A lens array 3a is housed inside a positioning member 1a and is fixed thereto, for example, by an adhesive. The lens array 3a is optically connected to a planar optical waveguide 5a (optical waveguide member). The planar optical waveguide 5a has a plurality of optical waveguides formed therein, which is aligned with and optically connected to each lens of the lens array 3a and fixed thereto, for example, by an adhesive. The front surface of the positioning member 1a (a surface facing a connection object) has a guide mechanism 9a for positioning with the connection object. Here, it is desirable that the planar optical waveguide 5a and the lens array 3a are made of glass, and the positioning member 1a is made of a thermoplastic resin.SELECTED DRAWING: Figure 1B

Description

[Technical field]

[0001] The present invention relates to an optical connection terminal capable of optically connecting to a connection target, and an optical connection terminal connection structure using the same. [Background technology]

[0002] In the fields of convergence of photonics and electronics (CPO) and silicon photonics (SiP), an optical connection mechanism is required to connect a photonic integrated circuit (PIC) and an optical fiber.

[0003] 57 is a conceptual diagram showing a part of an optical device having a conventional optical connection structure. A PIC (optical integrated circuit 101) such as a SiP, an integrated circuit, etc. are mounted on a substrate 100, and an optical fiber 103 is connected to the optical integrated circuit 101. A connector 105 is connected to an end of the optical fiber 103 for connection with other devices.

[0004] When constructing such an optical connection structure, for example, the substrate 100 and the optical integrated circuit 101 are connected by a reflow process. However, when a large number of optical fibers 103 with connectors 105 attached are connected to the substrate 100 in this manner, handling becomes complicated and difficult to handle. In addition, the weight of the connector 105 and the tension of the optical fibers 103 apply stress to the connection with the optical integrated circuit 101, and there is a risk of damaging the connection. In addition, the optical fibers 103 and the connector 105 also need to have heat resistance that can withstand reflow.

[0005] In response to this, a method has been proposed in which an optical wiring member is adhesively fixed to a stub fixed to an optical integrated element after the reflow process (Patent Document 1). In Patent Document 1, the optical integrated element, prism, adhesive, etc. are selected from materials with excellent heat resistance, so that they can withstand the reflow process, and by connecting an optical fiber, etc. thereafter, it is possible to prevent the optical fiber and connector from deteriorating due to heat. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2016-90614 A Summary of the Invention [Problem to be solved by the invention]

[0007] However, as mentioned above, when connecting a large number of optical fibers to a substrate, etc., it is necessary to align each optical fiber and fix it with an adhesive. This requires a considerable amount of time for the connection work, and the previously connected optical fiber may get in the way of the alignment and connection work of the subsequent optical fibers, which may result in a decrease in workability.

[0008] The present invention has been made in consideration of such problems, and aims to provide an optical connection terminal that enables easy construction of an optical connection structure, and an optical connection terminal connection structure using the same. [Means for solving the problem]

[0009] In order to achieve the above-mentioned object, the first invention is an optical connection terminal capable of optically connecting to a connection object, comprising: a positioning member having a guide mechanism for the connection object; a lens array fixed to the positioning member; and an optical waveguide member optically connected to the lens array, wherein the positioning member and the lens array are positioned and fixed, and the lens array and the optical waveguide member are aligned and fixed.

[0010] The lens array and the optical waveguide member may be made of silicon or glass, and the positioning member may be made of resin.

[0011] The difference in linear expansion coefficient between the lens array and the optical waveguide member may be 20 ppm / ° C. or less.

[0012] The positioning member may have a positioning portion with which the front surface of the lens array can come into surface contact, and a predetermined distance may be provided between an end of the lens array and the front surface of the positioning member.

[0013] A magnet may be disposed on the front surface of the positioning member to serve as a fixing portion for the connection object.

[0014] The guide mechanisms may be disposed on both sides of the lens array and have a concave-convex structure that can be fitted with a connection target.

[0015] A gap may be provided between the optical waveguide member and the lens array.

[0016] A spacer may be disposed between the optical waveguide member and the lens array at a location other than the optical path.

[0017] The spacer and the lens array may be integrally formed, and the spacer may have a thickness of 5 μm or more.

[0018] The interface between the optical waveguide member and the lens array may be formed obliquely with respect to the optical axis direction of the optical waveguide member.

[0019] The optical waveguide in the optical waveguide member may be formed obliquely with respect to the optical axis direction of the lens array.

[0020] The diameter of the beam expanded by the lens array may be 30 μm or more and 120 μm or less.

[0021] The front surface of the optical waveguide member may be set back from the back focal position of the lens array by 5 μm or more.

[0022] The positioning member may have a thickness of 0.8 mm or more.

[0023] The positioning member may have a thickness of 1 mm or more.

[0024] The distance from the rear end surface of the lens array to the front end surface of the positioning member may be 1.7 mm or less.

[0025] The distance from the rear end face of the optical waveguide member to the front end face of the positioning member may be 12 mm or less.

[0026] The lens array may be inserted into the positioning member and fixed in a state in which outer surfaces of the lens array are pressed against at least two inner surfaces of the positioning member.

[0027] The inner surface of the positioning member and the outer surface of the lens array may be formed with corresponding concave and convex shapes, and the concave and convex shapes of the inner surface of the positioning member may fit together with the concave and convex shapes of the outer surface of the lens array to position the lens array relative to the positioning member.

[0028] The inner surface of the positioning member and the outer surface of the lens array may be formed with corresponding concave and convex shapes, and when the lens array is pressed into the positioning member, the concave and convex shape of the inner surface of the positioning member elastically deforms, causing the concave and convex shapes of the inner surface of the positioning member to fit into the concave and convex shapes of the outer surface of the lens array, and the two may be fixed in a tight contact state.

[0029] The optical waveguide member may be an optical fiber array in which multi-core fibers are arranged in parallel.

[0030] The positioning member may have a shrinkage rate of 0.13% or less after heating at 260° C. for 1 minute.

[0031] More preferably, the positioning member may have a shrinkage rate of 0.02% or less after heating at 260° C. for 1 minute.

[0032] According to the first invention, a detachable optical connection terminal using a guide mechanism can be obtained. In this case, the lens array is used to expand the beam, thereby expanding the tolerance with the opposing optical connection terminal to be connected. In addition, the lens array to be optically connected and the positioning member for positioning the connection target are made of separate members, which allows for easy manufacturability and accurate optical connection.

[0033] For example, if a resin lens array is used for the reflow process, which can reach temperatures of 200°C or higher, the high-temperature resistance will be insufficient. Also, if there is a large difference in the coefficient of linear expansion (CTE) between the optical waveguide components (silicon photonics or quartz-based waveguides or optical fiber arrays) to be connected, this can cause axial misalignment due to temperature changes or damage during reflow. On the other hand, with lens arrays made of materials that are resistant to reflow (Si or glass-based), it is difficult to create guide holes with high precision for the position of the lens array part. In other words, it is difficult to form a guide mechanism that positions the connection target.

[0034] In contrast, according to the first invention, the lens array and the positioning member are formed separately. Therefore, by appropriately selecting materials suited to their respective functions, they can be produced using a mass-producible method, and optical connection to the connection object can be made with high-precision positioning.

[0035] As for such materials, the lens array and the optical waveguide member are made of glass, and the positioning member is made of resin, thereby obtaining an optical connection structure with high precision. In addition, since the lens array and the optical waveguide member are made of silicon or glass, the difference in linear expansion coefficient is small, and a highly accurate alignment state can be maintained even during reflow.

[0036] To obtain such an effect more reliably, for example, it is desirable that the difference in the linear expansion coefficient between the lens array and the optical waveguide member is 20 ppm / °C or less. This makes it possible to more reliably prevent the optical axis misalignment between the lens array and the optical waveguide member when the temperature changes. In addition, at high temperatures (e.g., 200°C or higher) during the reflow process, the dimensional mismatch due to thermal expansion can be kept within an allowable range, preventing peeling of the adhesive for fixing the lens array and the optical waveguide member and damage due to distortion.

[0037] In addition, by providing the positioning member with a positioning portion that allows the front surface of the lens array to come into surface contact with the positioning member, the distance between the tip of the lens array and the front surface of the positioning member can be made constant. This makes it possible to maintain an appropriate lens distance (for example, twice the focal length is optimal) between the opposing optical connection terminal to be connected and the lens, thereby suppressing an increase in loss due to defocusing.

[0038] In addition, by arranging a magnet on the front surface of the positioning member as a fixing part for the connection target, it is possible to connect the optical connection terminals with a small force. Also, by adjusting the magnetic force of the magnet, it is possible to minimize the force required to attach and detach the optical connection terminals.

[0039] Furthermore, if the guide mechanisms are arranged on both sides of the lens array and have a concave-convex structure that can be fitted with a connection target, positioning can be performed with high precision, similar to the conventional MT ferrule.

[0040] In addition, by providing a gap between the optical waveguide member and the lens array, the beam can be expanded efficiently by utilizing this space (refractive index). When the space is filled with a medium such as an adhesive, parameters such as the beam diameter can be adjusted as desired by adjusting the refractive index.

[0041] Furthermore, by disposing a spacer between the optical waveguide member and the lens array at a location other than the optical path, a gap can be reliably provided between the optical waveguide member and the lens array.

[0042] Furthermore, by forming the spacer and the lens array as one unit, the assembly work is easy. In this case, by making the spacer 5 μm or thicker, a gap of 5 μm or thicker can be reliably provided between the optical waveguide member and the lens array.

[0043] In addition, if the interface between the optical waveguide member and the lens array is formed at an angle to the optical axis direction of the optical waveguide member, the influence of reflected light at the interface can be reduced. The same effect can be obtained by disposing an isolator at the interface, or by providing an anti-reflection film at the interface.

[0044] Moreover, the same effect as above can be obtained even if the optical waveguide in the optical waveguide member is formed obliquely with respect to the optical axis direction of the lens array.

[0045] In addition, by making the beam expansion diameter by the lens array 30 μm or more, or even 40 μm or more, the allowable offset of the optical axis can be increased.In addition, by making the beam expansion diameter by the lens array 120 μm or less, or even 80 μm or less, the loss due to the tilt of the optical axis can be reduced and high-density mounting can be achieved.

[0046] Furthermore, by positioning the front surface of the optical waveguide member 5 μm or more, or even 10 μm or more, away from the back focal position of the lens array, it is possible to suppress beam focus shift even if the distance between the lens arrays is made greater than ideal.

[0047] In this case, by making the thickness of the positioning member 0.8 mm or more, and further 1 mm or more, the positioning member becomes easy to manufacture and handle.

[0048] Moreover, by setting the beam diameter to a predetermined value or less, it is possible to shorten the length in the optical axis direction of the optical connection part. For example, the distance from the rear end face of the lens array to the front end face of the positioning member can be set to 1.7 mm or less, or even 1.2 mm or less. Also, the distance from the rear end face of the optical waveguide member to the front end face of the positioning member can be set to 12 mm or less, or even 7 mm or less.

[0049] In addition, when the lens array is inserted into the positioning member, the outer surface of the lens array is pressed against at least two inner surfaces of the positioning member while the two are fixed, thereby enabling the positioning member and the lens array to be positioned and fixed with high precision.

[0050] In addition, by forming corresponding concave-convex shapes on the inner surface of the positioning member and the outer surface of the lens array, and fitting the concave-convex shape of the inner surface of the positioning member with the concave-convex shape of the outer surface of the lens array, the lens array can be positioned with high precision relative to the positioning member.

[0051] Furthermore, when the lens array is pressed into the positioning member, the uneven shape of the inner surface of the resin positioning member is fitted so that it elastically deforms, so that the uneven shape of the inner surface of the positioning member and the uneven shape of the outer surface of the lens array are fixed in a tightly contacting state, and the positioning member and the lens array can be positioned and fixed with high precision.

[0052] Furthermore, if the optical waveguide member is an optical fiber array in which multi-core fibers are arranged in parallel, it is possible to perform a large number of optical connections at once.

[0053] Furthermore, if the shrinkage rate of the positioning member after heating at 260°C for 1 minute is 0.13% or less, positional deviation during the reflow process can be suppressed, and high connection accuracy with the connection target can be maintained.

[0054] Furthermore, if the shrinkage rate of the positioning member after heating at 260°C for 1 minute is 0.02% or less, it is possible to suppress positional deviation during the reflow process and maintain even higher connection accuracy with the connection object, which is desirable.

[0055] The second invention is a connection structure between optical connection terminals, wherein one optical connection terminal has a first positioning member, a first lens array fixed to the first positioning member, and a first optical waveguide member optically connected to the first lens array, and the other optical connection terminal connected to the one optical connection terminal has a second positioning member, a second lens array fixed to the second positioning member, and a second optical waveguide member optically connected to the second lens array, and the optical connection terminal connection structure is characterized in that when the first positioning member and the second positioning member are connected, a space is formed at the optical connection portion between the first lens array and the second lens array.

[0056] The first optical waveguide member may be a planar optical waveguide, and the second optical waveguide member may be an optical fiber array.

[0057] One of the first positioning member and the second positioning member may be provided with a male side hole and a guide pin that is inserted into and fixed in the male side hole, and the other of the first positioning member and the second positioning member may be provided with a female side hole into which the guide pin can be inserted and removed, the diameter of the female side hole being 1 μm or more larger than the diameter of the male side hole, and when the first positioning member and the second positioning member are connected, the guide pin is inserted into the female side hole to position them relative to each other.

[0058] One of the first positioning member and the second positioning member may be provided with a male side hole and a guide pin that is pressed into and fixed in the male side hole, and the other of the first positioning member and the second positioning member may be provided with a female side hole into which the guide pin can be inserted and removed, the diameter of the female side hole being larger than the outer diameter of the guide pin, and when the first positioning member and the second positioning member are connected, the guide pin is inserted into the female side hole to position them relative to each other.

[0059] The insertion length of the guide pin into the female side hole may be 1 mm or less.

[0060] An interface between the first optical waveguide member and the first lens array may be formed obliquely with respect to an optical axis direction of the first lens array, and an interface between the second optical waveguide member and the second lens array may be formed obliquely with respect to an optical axis direction of the second lens array, and when the first positioning member and the second positioning member are connected, the interface between the first optical waveguide member and the first lens array and the interface between the second optical waveguide member and the second lens array may be approximately parallel.

[0061] An interface between the first optical waveguide member and the first lens array may be formed obliquely with respect to an optical axis direction of the first lens array, and an interface between the second optical waveguide member and the second lens array may be formed obliquely with respect to an optical axis direction of the second lens array, and when the first positioning member and the second positioning member are connected, the interface between the first optical waveguide member and the first lens array and the interface between the second optical waveguide member and the second lens array may be approximately line-symmetric with respect to the connection portion as an axis of symmetry.

[0062] An optical path of the first optical waveguide member may be formed obliquely with respect to an optical axis direction of the first lens array, and an optical path of the second optical waveguide member may be formed obliquely with respect to an optical axis direction of the second lens array, and when the first positioning member and the second positioning member are connected, the optical path of the first optical waveguide member and the optical path of the second optical waveguide member may be approximately linearly symmetric with respect to a connection portion as an axis of symmetry.

[0063] A plurality of the one optical connection terminals may be arranged on a substrate, and the plurality of the other optical connection terminals may be fixed together by a housing, and the plurality of the one optical connection terminals and the plurality of the other optical connection terminals integrated by the housing may be optically connected to each other.

[0064] A plurality of the one optical connection terminals may be arranged on a substrate, and in the other optical connection terminal, a plurality of the second lens arrays may be fixed to the second positioning member, and each of the second lens arrays may be optically connected to the second optical waveguide member, and the first lens array of each of the plurality of the one optical connection terminals may be optically connected to the plurality of second lens arrays integrated by the second positioning member.

[0065] According to the second invention, when the first positioning member and the second positioning member are connected, the first optical waveguide member and the second optical waveguide member do not come into contact with each other, and a space is formed in the optical connection portion, so that an optimal focal length can be maintained between the lenses.

[0066] Furthermore, by expanding the beam using a lens array, the tolerance for misalignment with the opposing optical connection terminal can be increased.

[0067] In such an optical connection terminal connection structure, if the first optical wave-guiding member of one optical connection terminal is a planar optical waveguide and the second optical wave-guiding member of the other optical connection terminal is an optical fiber array, one optical connection terminal can be fixed to the substrate by reflow, and then the other optical connection terminal can be connected to each of the one optical connection terminals, thereby efficiently assembling optical equipment.

[0068] In addition, by providing one of the first positioning member and the second positioning member with a guide pin that is inserted into the male side hole and fixed, and providing the other with a female side hole into which the guide pin is inserted, the first positioning member and the second positioning member can be connected with high precision. At this time, by press-fitting the guide pin into the male side hole, it is possible to suppress the inclination and deviation of the guide pin. In addition, by making the diameter of the female side hole larger than the outer diameter of the guide pin, it is possible to reduce the insertion resistance of the guide pin.

[0069] Furthermore, by making the diameter of the female side hole 1 μm or more larger than that of the male side hole, the error range in the positioning of the two is suppressed, making it possible to position them relative to each other with high accuracy.

[0070] Furthermore, by setting the insertion length of the guide pin into the female side hole to 1 mm or less, it is possible to reduce friction between the guide pin and the female side hole during fitting and to allow for play in positioning.

[0071] Furthermore, in the case where the interface between the first optical waveguide member and the first lens array is formed obliquely with respect to the optical axis direction of the first lens array, and the interface between the second optical waveguide member and the second lens array is formed obliquely with respect to the optical axis direction of the second lens array, by connecting the first optical waveguide member and the first lens array and the interface between the second optical waveguide member and the second lens array so that they are substantially parallel, the distance of each optical path (the sum of the optical path lengths of the first lens array and the second lens array) can be made substantially constant.

[0072] Conversely, in the case where the interface between the first optical waveguide member and the first lens array is formed obliquely with respect to the optical axis direction of the first lens array, and the interface between the second optical waveguide member and the second lens array is formed obliquely with respect to the optical axis direction of the second lens array, the interface between the first optical waveguide member and the first lens array and the interface between the second optical waveguide member and the second lens array can be connected so that they are approximately linearly symmetrical with respect to a center line passing through the boundary of the connection portion, thereby compensating for oblique emission and incidence at the interfaces.

[0073] Furthermore, even if the optical path (optical waveguide) of the first optical waveguide member is formed obliquely with respect to the optical axis direction of the first lens array and the optical path (optical waveguide) of the second optical waveguide member is formed obliquely with respect to the optical axis direction of the second lens array, the interface between the first optical waveguide member and the first lens array and the interface between the second optical waveguide member and the second lens array can be connected so that they are approximately linearly symmetric with respect to the center line passing through the boundary of the connection portion, thereby compensating for oblique emission and incidence at the interface.

[0074] In addition, when multiple one-side optical connection terminals are arranged on a substrate, the multiple other-side optical connection terminals are fixed together by the housing, so that the multiple other-side optical connection terminals integrated in the housing can be optically connected together to the one-side optical connection terminal.

[0075] In addition, when multiple optical connection terminals are arranged on a substrate, multiple second lens arrays are fixed to the second positioning member of the other optical connection terminal, so that the multiple second lens arrays integrated by the second positioning member can be optically connected collectively to the multiple optical connection terminals on one side.

[0076] The third invention is a manufacturing method for an optical device using the optical connection terminal connection structure of the second invention, characterized in that it includes a step a of placing one of the optical connection terminals on an electronic circuit board and connecting it to the electronic circuit board by reflow, and a step b of connecting the other optical connection terminal to the one of the optical connection terminals after the step a.

[0077] According to the third aspect of the present invention, since no optical fiber or the like is used in the reflow process, handling is easy, and the subsequent connection work is also easy. Effect of the Invention

[0078] According to the present invention, it is possible to provide an optical connection terminal that enables an optical connection structure to be easily constructed, and an optical connection terminal connection structure using the same. [Brief description of the drawings]

[0079] [Figure 1A] 4A to 4C are side views showing a process of connecting the optical connection terminals 10 and 20. [Figure 1B] Cross-sectional view taken along line AA in FIG. 1A. [Figure 2A] BB line arrow view of FIG. 1A. [Figure 2B] An arrow view of line CC in FIG. 1A. [Figure 3A] 4A to 4C are side views showing a process of connecting the optical connection terminals 10 and 20. [Figure 3B] Cross-sectional view taken along line DD in FIG. 3A. [Figure 4] Cross-sectional view taken along line ZZ in FIG. 3A. [Diagram 5] FIG. 3 is a diagram showing the positional relationship between lens arrays 3a and 3b. [Figure 6] FIG. 2 is a diagram showing dimensions of the optical connection terminal 10. [Figure 7A] 1A to 1C are diagrams showing an assembly process of an optical connection terminal connection structure. [Figure 7B] 1A to 1C are diagrams showing an assembly process of an optical connection terminal connection structure. [Figure 7C] 1A to 1C are diagrams showing an assembly process of an optical connection terminal connection structure. [Figure 8A] 1A to 1C are diagrams showing an assembly process of an optical connection terminal connection structure. [Figure 8B] 1A to 1C are diagrams showing an assembly process of an optical connection terminal connection structure. [Figure 8C] 1A to 1C are diagrams showing an assembly process of an optical connection terminal connection structure. [Figure 9A] 13A to 13C are diagrams showing another alignment method in the assembly process of the optical connection terminal connection structure. [Figure 9B] 13A to 13C are diagrams showing another alignment method in the assembly process of the optical connection terminal connection structure. [Figure 10A] 3A to 3C are diagrams showing an assembly process of the optical device 50. [Figure 10B] 3A to 3C are diagrams showing an assembly process of the optical device 50. [Figure 10C] 3A to 3C are diagrams showing an assembly process of the optical device 50. [Figure 11] 10A and 10B are diagrams showing other guide mechanisms 9a and 9b in the optical connection terminals 10 and 20. [Figure 12A] 6 is a conceptual diagram showing misalignment of positioning members 1a and 1b in guide mechanisms 9a and 9b. [Figure 12B] 6 is a conceptual diagram showing misalignment of positioning members 1a and 1b in guide mechanisms 9a and 9b. [Figure 12C] 6 is a conceptual diagram showing misalignment of positioning members 1a and 1b in guide mechanisms 9a and 9b. [Figure 13A] 6 is a conceptual diagram showing misalignment of positioning members 1a and 1b in guide mechanisms 9a and 9b. [Figure 13B]6 is a conceptual diagram showing misalignment of positioning members 1a and 1b in guide mechanisms 9a and 9b. [Figure 13C] 6 is a conceptual diagram showing misalignment of positioning members 1a and 1b in guide mechanisms 9a and 9b. [Figure 14] 13A and 13B are views showing another fixing structure of the guide pin 61. [Figure 15] 13A and 13B are views showing another fixing structure of the guide pin 61. [Figure 16A] 13A and 13B are views showing another fixing structure of the guide pin 61. [Figure 16B] 13A and 13B are views showing another fixing structure of the guide pin 61. [Figure 17A] 13A and 13B are diagrams showing other structures of the lens array 3a and the positioning member 1a. [Figure 17B] 13A and 13B are diagrams showing other structures of the lens array 3a and the positioning member 1a. [Figure 18A] FIG. 2 is a diagram showing a positioning structure between a lens array 3a and a positioning member 1a. [Figure 18B] 4 is a diagram showing a positioning structure between a lens array 3b and a positioning member 1b. FIG. [Figure 19A] 13 is a diagram showing another positioning structure between the lens array 3a and the positioning member 1a. FIG. [Figure 19B] 13 is a diagram showing another positioning structure between the lens array 3a and the positioning member 1a. FIG. [Figure 20A] 13 is a diagram showing another positioning structure between the lens array 3a and the positioning member 1a. FIG. [Figure 20B] 13 is a diagram showing another positioning structure between the lens array 3a and the positioning member 1a. FIG. [Figure 21A] A conceptual diagram showing the propagation state of a beam 77. [Figure 21B] A conceptual diagram showing the propagation state of a beam 77. [Figure 21C] A conceptual diagram showing the propagation state of a beam 77. [Figure 22] 4 is a conceptual diagram showing the positional relationship between lens arrays 3a and 3b and an optical waveguide member. FIG. [Figure 23A] FIG. 11 is a side view showing the structure of another optical connection terminal 10. [Figure 23B] Cross-sectional view of Figure 23A. [Figure 23C] FIG. 11 is a side view showing the structure of another optical connection terminal 10. [Figure 23D] Cross-sectional view of Figure 23C. [Figure 24A] FIG. 11 is a side view showing the structure of another optical connection terminal 10. [Figure 24B] Cross-sectional view of Figure 24A. [Diagram 25] FIG. 11 is a cross-sectional view showing the structure of another optical connection terminal 10. [Figure 26A] FIG. 11 is a side view showing the structure of another optical connection terminal 10. [Figure 26B] FIG. 11 is a side view showing the structure of another optical connection terminal 10. [Figure 27] FIG. 2 is a diagram showing an optical connection terminal connection structure 30a. [Figure 28] FIG. 2 is a diagram showing an optical connection terminal connection structure 30b. [Figure 29] FIG. 13 is a diagram showing an optical connection terminal connection structure 30c. [Diagram 30] FIG. 11 is a cross-sectional view showing the structure of another optical connection terminal 10. [Figure 31A] FIG. 13 is a side view showing the structure of another optical connection terminal 20. [Figure 31B] FIG. 13 is a side view showing the structure of another optical connection terminal 20. [Figure 32A] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 32B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 33A] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 33B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 33C] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 33D] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 34A] FIG. [Figure 34B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 34C] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 35A] FIG. 13 is a front view of another optical connection terminal. [Figure 35B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 35C] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 36A] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 36B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 36C] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 36D] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 36E] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 36F] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 37A] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 37B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 37C] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 38A] View from the direction of arrow J in Figure 37B. [Figure 38B] Cross-sectional view of line KK in Figure 37C. [Figure 39A] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 39B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 39C] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 39D] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 40A] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 40B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 40C] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 41A] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 41B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 41C] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 42A] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 42B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 42C] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 43A] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 43B] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 43C] 5A to 5C are diagrams showing various fixing structures of an optical connection terminal to a substrate 51a. [Figure 44A] 1A to 1C are diagrams showing various connection structures between optical connection terminals; [Figure 44B] 1A to 1C are diagrams showing various connection structures between optical connection terminals; [Figure 44C] 1A to 1C are diagrams showing various connection structures between optical connection terminals; [Figure 45A] 1A to 1C are diagrams showing various connection structures between optical connection terminals; [Figure 45B] 1A to 1C are diagrams showing various connection structures between optical connection terminals; [Figure 46A] FIG. 2 is a diagram showing a connection structure between optical connection terminals. [Figure 46B] FIG. [Figure 46C] FIG. [Figure 47] 13 is a diagram showing another connection structure between the optical connection terminal 10 and the optical connection terminal 20. FIG. [Figure 48] 13 is a diagram showing another connection structure between the optical connection terminal 10 and the optical connection terminal 20. FIG. [Figure 49]13 is a diagram showing another connection structure between the optical connection terminal 10 and the optical connection terminal 20. FIG. [Figure 50] 13 is a diagram showing another connection structure between the optical connection terminal 10 and the optical connection terminal 20. FIG. [Figure 51] 13 is a diagram showing another connection structure between the optical connection terminal 10 and the optical connection terminal 20. FIG. [Figure 52] 13 is a diagram showing another connection structure between the optical connection terminal 10 and the optical connection terminal 20. FIG. [Figure 53] 13 is a diagram showing another connection structure between the optical connection terminal 10 and the optical connection terminal 20. FIG. [Figure 54] 13 is a diagram showing another connection structure between the optical connection terminal 10 and the optical connection terminal 20. FIG. [Figure 55A] FIG. 2 is a diagram showing a connection structure between optical connection terminals. [Figure 55B] PP line arrow view of Figure 55A. [Figure 55C] Cross-sectional view of line QQ in Figure 55A. [Figure 56] FIG. 55B is a conceptual diagram of an optical path during optical connection in FIG. 55A. [Figure 57] FIG. 1 is a conceptual diagram showing a conventional structure for fixing an optical fiber 103 to a substrate 100. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0080] An optical connection terminal according to an embodiment of the present invention will be described below. Fig. 1A is a side view showing optical connection terminals 10 and 20, and Fig. 1B is a cross-sectional view taken along line AA in Fig. 1A. Fig. 2A is a view taken along line BB in Fig. 1A, and Fig. 2B is a view taken along line CC in Fig. 1A. Fig. 3A is a side view of an optical connection terminal connection structure 30 in which the optical connection terminals 10 and 20 are optically connected to each other, and Fig. 3B is a cross-sectional view taken along line DD in Fig. 3A. The optical connection terminals 10 and 20 can each be optically connected to another connection target.

[0081] One optical connection terminal 10 is composed of a positioning member 1a which is a first positioning member, a lens array 3a which is a first lens array, a planar optical waveguide 5a which is a first optical wave-guiding member, etc. The other optical connection terminal 20 connected to the one optical connection terminal 10 is composed of a positioning member 1b which is a second positioning member, a lens array 3b which is a second lens array, an optical fiber array 5b which is a second optical wave-guiding member, etc.

[0082] In this embodiment, members that guide light, such as the planar optical waveguide 5a and the optical fiber array 5b, are collectively referred to as optical waveguide members. In the following description, the optical connection of the optical connection terminals 10 and 20 will be described, but a pair of optical connection terminals 10 or a pair of optical connection terminals 20 can also be connected to each other.

[0083] First, the optical connection terminal 10 will be described. A through hole is provided in the center of the positioning member 1a, and the lens array 3a is housed inside the through hole of the positioning member 1a and fixed, for example, by an adhesive. At this time, the lens array 3a is positioned and fixed at a predetermined position relative to the positioning member 1a. Here, the lens array 3a being positioned and fixed relative to the positioning member 1a means that it is positioned with high accuracy by dimensions and angles that can be confirmed, for example, by visual inspection or a microscope monitor. If the positioning member 1a and the lens array 3a are transparent, an ultraviolet curing resin can be used as the adhesive.

[0084] The lens array 3a is optically connected to a planar optical waveguide 5a (optical wave-guiding member). A plurality of optical waveguides are formed in the planar optical waveguide 5a, and each lens of the lens array 3a is aligned with the optical waveguide to be optically connected. The lens array 3a and the planar optical waveguide 5a are fixed, for example, by an adhesive. Here, it is preferable that the planar optical waveguide 5a and the lens array 3a are made of silicon or glass, and the positioning member 1a is made of a thermoplastic resin. If the planar optical waveguide 5a and the lens array 3a are made of glass, they are less likely to deform even at high temperatures, such as during reflow, and a highly accurate aligned state can be maintained. On the other hand, by making the positioning member 1a out of resin, the processing of the guide mechanism 9a and the like becomes easier.

[0085] The positioning member 1a preferably has a shrinkage rate of 0.13% or less after heating at 260° C. for 1 minute, and more preferably has a shrinkage rate of 0.02% or less after heating at 260° C. for 1 minute. Such a positioning member 1a is manufactured, for example, as follows: First, the positioning member 1a is molded, for example, by injection molding, and then heat-treated in a heating furnace at 230°C to 260°C for 1 minute or more. To make it more stable, it is preferable to heat-treat it at 230°C to 260°C for 10 minutes or more.

[0086] Here, the heat treatment (annealing) of thermoplastic resins is generally aimed at releasing internal stress during molding. For this reason, non-crystalline resins are often heat-treated at a temperature slightly lower than the glass transition temperature Tg, and crystalline resins are often heat-treated at a temperature slightly higher than the glass transition temperature. On the other hand, if the temperature is raised to the melting point of the resin, the resin softens and is unable to maintain its shape. For this reason, for example, in the case of PPS resin, which is a crystalline resin, the glass transition temperature is about 90°C, so heat treatment is generally performed at a temperature of about Tg+20 to +30°C.

[0087] However, in this embodiment, heat treatment is performed for 1 minute or more at a set temperature of 230°C to 260°C, which is much higher than that. For example, for a PPS resin melting point Tm of 290°C, the heat treatment conditions are set at a temperature higher than (Tg+Tm) / 2. In this way, by heating at a temperature that would not be possible under normal heat treatment conditions for resin, it is possible to reliably cause the resin to thermally shrink. The heat treatment temperature may be set according to the temperature of the planned reflow process.

[0088] By doing this, the amount of shrinkage during subsequent reheating (reflow process) can be reduced compared to resin that has not been subjected to the above heat treatment. Note that shrinkage caused by heat treatment also reduces the pitch and hole diameter of the guide mechanism. Therefore, it is desirable to make these dimensions larger in advance by the amount of shrinkage so that each part has the desired dimension after shrinkage.

[0089] The difference in coefficient of linear expansion (CTE) between the lens array 3a and the planar optical waveguide 5a is preferably 20 ppm / ° C. or less, and more preferably 10 ppm / ° C. or less. This makes it possible to prevent optical axis misalignment due to temperature changes and damage during reflow.

[0090] As such combinations, quartz (CTE = 0.5 ppm / °C), silicon (CTE = 2.6 ppm / °C), indium (InP) (CTE = 4.6 ppm / °C), TEMPAX (product name) (CTE = 3.25 ppm / °C), etc. can be used as the planar optical waveguide 5a, and quartz (CTE = 0.5 ppm / °C), silicon (CTE = approximately 3 ppm / °C), TEMPAX (product name) (CTE = 3.25 ppm / °C), optical glass (CTE = 4 to 16 ppm / °C), etc. can be used as the lens array 3a.

[0091] The optical integrated circuit 13 is optically connected to the rear of the planar optical waveguide 5a. The planar optical waveguide 5a and the optical integrated circuit 13 are fixed by, for example, an adhesive. The optical integrated circuit 13 is, for example, a SiP chip, and is connected to a substrate described later.

[0092] A guide mechanism 9a is provided on the front surface of the positioning member 1a (the surface facing the connection target) for positioning with the connection target. As shown in FIG. 1B, the guide mechanisms 9a are disposed on both sides of the lens array 3a. In the illustrated example, a guide hole is formed on one side of the lens array 3a, and a fitting protrusion is formed on the other side. In other words, the guide mechanism 9a has a concave-convex structure that can be fitted with the connection target.

[0093] Moreover, magnets 11a that serve as a fixing portion for a connection target are arranged on the front surface of the positioning member 1a (the surface facing the connection target). As shown in Fig. 2A, a plurality of magnets 11a are arranged near the four corners of the positioning member 1a.

[0094] Next, the optical connection terminal 20 will be described. The optical connection terminal 20 has a structure substantially similar to that of the optical connection terminal 10. The lens array 3b is accommodated and fixed inside the positioning member 1b. At this time, the lens array 3b is positioned at a predetermined position relative to the positioning member 1b and fixed, for example, by an adhesive. If the positioning member 1b and the lens array 3b are transparent, an ultraviolet curing resin can be used as the adhesive.

[0095] The lens array 3b is optically connected to the optical fiber array 5b (optical waveguide member). The optical fiber array 5b is composed of a plurality of optical fibers, which are arranged in parallel at a predetermined interval by a holding member having holes and V-grooves. Each lens of the lens array 3b is optically connected to each optical fiber by being aligned with the optical fiber. The lens array 3b and the optical fiber array 5b are fixed, for example, by an adhesive. It is preferable that the optical fiber array 5b and the lens array 3b are made of glass, and the positioning member 1b is made of a thermoplastic resin. In this case, the materials of the positioning member 1b, the optical fiber array 5b, and the lens array 3b can be selected to be the same as those of the positioning member 1a, the lens array 3a, and the planar optical waveguide 5a in the optical connection terminal 10, respectively.

[0096] The positioning member 1b has a guide mechanism 9b on its front surface (the surface facing the connection target) for positioning with the connection target. As shown in FIG. 1B, the guide mechanisms 9b are arranged on both sides of the lens array 3b. In the illustrated example, a guide hole is formed on one side of the lens array 3b, and a fitting protrusion is formed on the other side. That is, the guide mechanism 9b has a concave-convex structure that can be fitted with the connection target, similar to the guide mechanism 9a. In this case, as shown in FIG. 3B, when the positioning members 1a and 1b are arranged opposite each other, the fitting holes and fitting protrusions are arranged to face each other.

[0097] Moreover, a magnet 11b is arranged on the front surface of the positioning member 1b (the surface facing the connection target) to serve as a fixed portion for the connection target. As shown in Fig. 2B, a plurality of magnets 11b are arranged near the four corners of the positioning member 1b, similar to the positioning member 1a. When the positioning members 1a and 1b are arranged facing each other, the magnetic directions are set so that the magnets 11a and 11b are attracted to each other.

[0098] FIG. 4 is a cross-sectional view of the optical connection terminal connection structure 30 taken along the line ZZ in FIG. 3A, and is a cross-sectional view of the magnets 11a and 11b. As shown in the figure, the magnets 11a and 11b are arranged slightly shifted backward (opposite the direction of mutual opposition) with respect to the opposing surfaces of the positioning members 1a and 1b. That is, when the opposing surfaces of the positioning members 1a and 1b are brought into contact and connected, a gap is formed between the end faces (opposing surfaces) of the magnets 11a and 11b. As a method for fixing the end faces of the magnets 11a and 11b by shifting them backward from the end faces of the positioning members 1a and 1b, for example, a step is formed so that the front of the fixing holes of the magnets 11a and 11b is reduced in diameter, and the magnets 11a and 11b are inserted from the rear of the fixing holes until they hit the step.

[0099] FIG. 5 is a diagram showing the positional relationship between the lens arrays 3a and 3b in the optical connection terminal connection structure 30 (FIGS. 3A and 3B). As described above, in the optical connection terminal 10, the planar optical waveguide 5a is optically connected to the lens array 3a fixed to the positioning member 1a. Also, in the optical connection terminal 20, the optical fiber array 5b is optically connected to the lens array 3b fixed to the positioning member 1b. When the lens arrays 3a and 3b are positioned and connected to each other by the positioning members 1a and 1b, a predetermined gap is formed without contact between the lens arrays 3a and 3b. That is, a space is formed at the optical connection portion between the lens arrays 3a and 3b.

[0100] In this way, the lens arrays 3a and 3b do not come into contact with each other, and a space is formed in the optical connection section, so that the lens interval can be kept optimal (approximately twice the front focal length of the lenses), and loss caused by defocus during optical connection can be minimized. At this time, as described above, the magnets 11a and 11b do not come into contact with each other, and the opposing surfaces of the positioning members 1a and 1b are reliably brought into contact with each other, so that the accuracy of the distance between the lens arrays can be improved.

[0101] The beam expansion diameter by the lens array 3a is preferably 30 μm or more and 120 μm or less, and more preferably 40 μm or more and 80 μm or less. By setting the beam expansion diameter by the lens array 3a to 30 μm or more, or even 40 μm or more, the allowable offset of the optical axis can be increased. Furthermore, by setting the beam expansion diameter by the lens array 3a to 120 μm or less, or even 80 μm or less, the loss due to the tilt of the optical axis can be reduced and high-density mounting can be achieved.

[0102] 6 is a side view of the optical connection terminal 10. As described above, by setting the beam diameter to a predetermined value or less, it is possible to shorten the length in the optical axis direction of the optical connection part. For example, as shown in FIG. 6, the distance (R in the figure) from the rear end face of the lens array 3a to the front end face of the positioning member 1a can be set to 1.7 mm or less, or even 1.2 mm or less. In addition, the distance (S in the figure) from the rear end face of the planar optical waveguide 5a to the front end face of the positioning member 1a can be set to 12 mm or less, or even 7 mm or less.

[0103] As in the optical connection terminal 10, the beam expansion diameter by the lens array 3b is preferably 30 μm to 120 μm, more preferably 40 μm to 80 μm. Also, the distance from the rear end face of the lens array 3b to the front end face of the positioning member 1b is preferably 1.7 mm or less, more preferably 1.2 mm or less.

[0104] For example, if the ideal beam expansion diameter is 60 μm, the distance (T in the figure) between the lens arrays 3a and 3b is preferably about 600 μm to 700 μm (about twice the focal length of the lenses). In order to ensure such a distance between the lenses, the thickness (U in the figure) of the positioning members 1a and 1b is preferably about 0.6 mm. The distance between the lenses and the thickness of the positioning members 1a and 1b will be described in detail later.

[0105] Furthermore, as shown in FIG. 5, the lens array 3a and the lens array 3b are not optically connected by contacting each other, so the force required for connection and disconnection is small, and a mechanism for gripping each other's positioning members is not required.

[0106] For example, normally, a mechanism for continuously applying a pressing force of 10 to 30 N is required to bring an optical connection part into physical contact, and since a force even greater than that is required for connection and disconnection, a strong gripping mechanism is required. In contrast, the optical connection terminal connection structure 30 does not require such a force or gripping structure in the optical connection part. In addition, by expanding the beam using the lens array 3a and the lens array 3b, the tolerance with the opposing optical connection terminal can be expanded.

[0107] Next, a method of assembling the optical connection terminals 10 and 20 will be described. First, as shown in Fig. 7A, the lens array 3b is fixed to the positioning member 1b. Then, the optical fiber array 5b is placed on the lens array 3b, and the lens array 3b and each optical fiber are aligned and fixed with an adhesive.

[0108] Similarly, as shown in FIG. 7B, the lens array 3a is fixed to the positioning member 1a. In this state, as shown in FIG. 7C, the positioning members 1a and 1b are connected. As described above, the positioning members 1a and 1b are positioned by the guide mechanisms 9a and 9b, so that the positions of the lens arrays 3a and 3b are determined and optical connection is possible. It is desirable that the clearance between the guide holes and guide protrusions constituting the guide mechanisms 9a and 9b is at least 1 μm or more. In this way, the resistance when connecting the positioning members 1a and 1b can be reduced. Meanwhile, since the beam is expanded by the lens, the increase in loss due to misalignment is suppressed.

[0109] Next, as shown in FIG. 8A, a planar optical waveguide 5a is disposed behind the lens array 3a, and the lens array 3a and the planar optical waveguide 5a are aligned.

[0110] As shown in Fig. 8B, when the alignment between the lens array 3a and the planar optical waveguide 5a is completed, the lens array 3a and the planar optical waveguide 5a are fixed with an adhesive. Next, as shown in Fig. 8C, the optical integrated circuit 13 is disposed behind the planar optical waveguide 5a, and the planar optical waveguide 5a and the optical integrated circuit 13 are aligned and fixed. This completes the assembly of the optical connection terminals 10 and 20.

[0111] It should be noted that the method of aligning the planar optical waveguide 5a and the lens array 3a may be other methods. For example, as shown in Fig. 9A, an alignment connection assembly 40 may be used. The alignment connection assembly 40 has a structure in which an optical fiber array 41 and a planar optical waveguide 43 are aligned and optically connected in advance. The planar optical waveguide 43 has the same shape as the planar optical waveguide 5a, for example.

[0112] 9B, the optical connection terminal 20 and the alignment connection assembly 40 are disposed with the planar optical waveguide 5a therebetween, and the alignment of the planar optical waveguide 5a is performed. In this manner, the alignment and assembly procedures of each part are not particularly limited.

[0113] For example, the following assembly method may be used. That is, the positioning member 1a and the lens array 3a are fixed, and the positioning member 1b and the lens array 3b are fixed, and the positioning member 1a and the positioning member 1b are connected. The planar optical waveguide 5a and the optical fiber array 5b are arranged facing each other with the connected set of the positioning member 1a and the lens array 3a, and the positioning member 1b and the lens array 3b sandwiched therebetween. Next, the planar optical waveguide 5a and the lens array 3a are aligned, and the optical fiber array 5b and the lens array 3b are aligned simultaneously, and fixed with an adhesive. Even if such a method is used, the connection structure of this embodiment can be manufactured in the same way as the above-mentioned assembly method.

[0114] Next, a method for manufacturing an optical device using the optical connection terminal connection structure 30 in which the optical connection terminals 10 and 20 are connected will be described. First, the optical connection terminal 10 is removed from the optical connection terminal 20, and as shown in FIG. 10A, the optical connection terminal 10 is placed on the substrates 51a and 51b, which are electronic circuit substrates. The substrate 51b (chiplet substrate) is a substrate that is connected to the substrate 51a, and is connected to the optical integrated circuit 13. Note that, in the illustrated example, only one substrate 51b and optical connection terminal 10 are placed on the substrate 51a, but multiple substrates 51b and optical connection terminals 10 are placed at predetermined positions on the substrate 51a.

[0115] Next, the respective parts are connected by a reflow process. For example, by performing a reflow process in a state where the optical connection terminal 10 is placed on the boards 51a and 51b, the boards 51a and 51b are connected to each other, and the board 51b is connected to the optical integrated circuit 13.

[0116] After the reflow process, as shown in Figures 10B and 10C, the optical connection terminals 20 are connected to the respective optical connection terminals 10. In this manner, an optical device 50 can be manufactured in which a plurality of optical fibers with connectors are connected to an electronic circuit board. As described above, no force is required to connect the optical connection terminals 10 and 20, and they can be easily connected by magnets 11a and 11b in a state where they are positioned relative to each other by the positioning members 1a and 1b. In addition, in the reflow process, the optical fibers and connectors are not connected to the board, making them easy to handle.

[0117] As described above, according to this embodiment, the lens arrays 3a, 3b and the optical waveguide member (planar optical waveguide 5a, optical fiber array 5b) are made of glass, so that the difference in linear expansion coefficient is small, and a highly accurate alignment state can be maintained even during reflow. In particular, by making the difference in linear expansion coefficient between the lens arrays 3a, 3b and the optical waveguide member (planar optical waveguide 5a, optical fiber array 5b) 20 ppm / °C or less, it is possible to more reliably prevent the optical axis misalignment of the lens array and the optical waveguide member due to temperature changes. In addition, at high temperatures (e.g., 200°C or higher) during the reflow process, the dimensional mismatch due to thermal expansion is kept within an allowable range, and peeling of the adhesive for fixing the lens array and the optical waveguide member and damage due to distortion can be prevented.

[0118] In addition, unlike optical connection terminals that use normal physical contacts, optical connection using the lens arrays 3a and 3b does not require a pressing force greater than a certain level. Therefore, the force required for connection is small, and no mechanism for maintaining the pressing force is required. In addition, the use of the lens arrays 3a and 3b allows the beam to be expanded, which increases the tolerance between opposing optical connection terminals.

[0119] Moreover, by making the positioning members 1a and 1b from resin, the guide mechanisms 9a and 9b can be processed with high precision, and the alignment precision can be improved. In particular, by arranging the guide mechanisms 9a and 9b on both sides of the lens arrays 3a and 3b, respectively, the positioning can be performed with high precision, similar to that of a conventional MT ferrule. Furthermore, by arranging the magnets 11a and 11b on the front of the positioning members 1a and 1b, the optical connection terminals 10 and 20 can be connected with a small force.

[0120] By using such an optical connection terminal connection structure 30, the optical connection terminals 10 are connected to the substrates 51a and 51b by reflow, and then the optical connection terminals 20 are connected to each of the optical connection terminals 10, thereby enabling efficient assembly of the optical device 50. At this time, since the optical connection terminals 20 having optical fibers are not connected in the reflow process, the workability is good and reflow resistance of the optical fibers and connectors is not required.

[0121] In this embodiment, the optical waveguide members are optically connected via the lens arrays 3a and 3b, but the lens arrays 3a and 3b may not be used. For example, the planar optical waveguide 5a may be fixed directly to the positioning member 1a. Also, the optical fiber array 5b may be fixed directly to the positioning member 1b. In this case, the planar optical waveguide 5a and the optical fiber array 5b are optically connected directly.

[0122] Next, another embodiment will be described. In the following description, the components that have the same functions as those in the above-described embodiment will be denoted by the same reference numerals as in Figs. 1 to 10C, and duplicated description will be omitted.

[0123] FIG. 11 is a diagram showing optical connection terminals 10 and 20 according to the second embodiment. In the example shown in FIG. 11, the structures of guide mechanisms 9a and 9b are different from those of the above-mentioned embodiment. In the example shown in FIG. 11, guide holes are formed in each of the positioning members 1a and 1b. For example, a guide pin 61 is inserted and fixed in a male side hole 22b, which is a guide mechanism 9b of one positioning member 1b, and a guide mechanism 9a of the other positioning member 1b is a female side hole 22a into which the guide pin 61 can be inserted and removed. Note that the male side hole 22b and the female side hole 22a may be reversed, and for example, the guide pin 61 may be fixed to the positioning member 1a side.

[0124] Here, as shown in Fig. 12A, the diameter (M in the figure) of male side hole 22b in which guide pin 61 is fixed and the diameter (L in the figure) of female side hole 22a into which the tip of guide pin 61 is inserted during connection may be the same, or the diameter of the female side hole may be larger than that of the male side hole. For example, as shown in Fig. 12B and Fig. 12C, if the diameters of both holes are the same, there is a risk that the maximum positional deviation range of positioning member 1a and positioning member 1b will become large.

[0125] In contrast, the example shown in FIG. 13A shows an example in which the diameter of the male side hole into which the guide pin 61 is inserted is made smaller, and FIG. 13B and FIG. 13C are views corresponding to FIG. 12B and FIG. 12C in this case. In this embodiment, the diameter (L in the figure) of the female side hole 22a into which the tip of the guide pin 61 is inserted at the time of connection is made larger than the diameter (N in the figure) of the male side hole 22b into which the guide pin 61 is fixed. By doing so, the amount of positional deviation between the positioning member 1a and the positioning member 1b can be made smaller than when the diameters of both holes are the same. Even in this case, the size of the female side hole 22a is larger than the guide pin 61, so that the insertion resistance can be made smaller.

[0126] It is desirable that the diameter of male side hole 22b be equal to or smaller than the outer diameter of guide pin 61. For example, it is desirable that the diameter of male side hole 22b be 0.5 μm or more smaller than the outer diameter of guide pin 61. In other words, it is desirable that guide pin 61 be press-fitted into male side hole 22b.

[0127] The diameter of the female side hole 22a is larger than the outer diameter of the guide pin 61, and is desirably larger than the diameter of the male side hole 22b by 1 μm or more. In this way, when the positioning member 1a and the positioning member 1b are connected, the guide pin 61 is inserted into the female side hole 22a, and they can be positioned with high accuracy.

[0128] Furthermore, the insertion length of the guide pin 61 into the female side hole (O in FIG. 13B) is preferably 1 mm or less, and more preferably 0.6 mm or less. By shortening the insertion length of the guide pin 61 in this way, friction between the guide pin 61 and the female side hole is reduced and some play is allowed, making insertion easier. In order to position the positioning members 1a and 1b, the insertion length of the guide pin 61 is preferably 0.2 mm or more.

[0129] On the other hand, the insertion length of guide pin 61 into male side hole 22b is at most equal to the thickness of positioning member 1b (U in FIG. 11). In this case, if the fixed length of guide pin 61 is short, there is a risk that guide pin 61 may tilt. For this reason, it is desirable to set the fixed length of guide pin 61 into male side hole 22b (insertion length of guide pin 61 into male side hole 22b) to 1.5 mm or more.

[0130] On the other hand, if the overall thickness of the positioning member is made 1.5 mm or more, the connection structure becomes large. For this reason, it is preferable to increase only the fixing length of the guide pin 61 without changing the thickness of the positioning member.

[0131] Fig. 14 is a diagram showing a positioning member in which the fixing length of the guide pin 61 is extended. Note that in the following figures, an example will be described in which, contrary to Fig. 11, the male side hole 22b is formed in the positioning member 1a to fix the guide pin 61, and the female side hole 22a is formed in the positioning member 1b; however, the guide pin 61 may be fixed to either the positioning member 1a or 1b.

[0132] In the example shown in Fig. 14, the vicinity of male side hole 22b of positioning member 1a is formed to protrude backward. That is, the thickness of positioning member 1a at the portion where lens array 3a is fixed is thickness U as in Fig. 11 and the like described above, but the thickness of positioning member 1a at male side hole 22b is thickness U1, which is larger than U. In this way, the connection interface between lens array 3a and planar optical waveguide 5a can be visually confirmed. This makes it easier to align and connect lens array 3a and planar optical waveguide 5a.

[0133] Furthermore, since the depth of male side hole 22b can be set to U1, the fixing length of guide pin 61 can be made longer than the thickness U of positioning member 1a. Therefore, the fixing length of guide pin 61 can be made 1.5 mm or more. In this case, positioning member 1b may also have the same form as positioning member 1a.

[0134] Moreover, Fig. 15 is a diagram showing another embodiment in contrast to Fig. 14. In the example shown in Fig. 15, the thickness of the positioning members 1a and 1b is U1, and a window 19 is formed in the vicinity of the fixed portions of the lens arrays 3a and 3b. The window 19 may pass through the positioning member 1a, or may open only on one side of the lens array 3a.

[0135] 15, the depth of the male side hole 22b can be set to the thickness U1 of the positioning member 1a, thereby ensuring the fixed length of the guide pin 61. In addition, the joint between the lens array 3a and the planar optical waveguide 5a is exposed to the outside through the window 19, facilitating the alignment and connection work between the lens array 3a and the planar optical waveguide 5a.

[0136] Moreover, Fig. 16A is a diagram showing yet another embodiment with respect to Fig. 14. In the example shown in Fig. 16A, a positioning member 1a having a thickness U is used. Furthermore, a guide pin holding member 21 is disposed behind the positioning member 1a. A hole 23 is formed in the guide pin holding member 21 at a position corresponding to the male side hole 22b of the positioning member 1a. Note that the male side hole 22b and the hole 23 are formed to have approximately the same diameter.

[0137] After the lens array 3a and the planar optical waveguide 5a have been aligned and fixed, as shown in Fig. 16B, the guide pin holding member 21 is brought into close contact with the rear of the positioning member 1a, and the male side holes 22b and holes 23 are arranged coaxially. In this way, the fixing length of the guide pin 61 can be set to the sum of the depth of the male side holes 22b and the depth of the holes 23. Therefore, the fixing length of the guide pin 61 can be ensured.

[0138] In the illustrated example, guide pin 61 is inserted into positioning member 1a (male side hole 22b) in Fig. 16A, but the timing of inserting guide pin 61 is not limited to the illustrated example. For example, after guide pin holding member 21 is closely arranged behind positioning member 1a, guide pin 61 may be inserted and fixed into male side hole 22b and hole 23 all at once.

[0139] In this way, when the optical connection terminals 10 and 20 are connected, the guide pin 61 fixed to one positioning member is inserted into the guide hole of the other positioning member to perform positioning. In this way, the shape of the guide mechanisms 9a and 9b of the positioning members 1a and 1b is not limited as long as they have a concave-convex structure (fitting structure) that allows positioning.

[0140] Next, a third embodiment will be described. Fig. 17A is a diagram showing a positioning member 1a and a lens array 3a according to the third embodiment. In the following description, the optical connection terminal 10 will be described, and the description of the optical connection terminal 20 will be omitted, but the present invention can also be applied to the optical connection terminal 20.

[0141] This embodiment differs from the above-described embodiment in that a positioning portion 63 is formed inside the positioning member 1a. The positioning portion 63 is a stepped portion formed so that the size of the hole decreases from the rear side to the front side. As shown in FIG. 17B, when the lens array 3a is inserted from the rear of the positioning member 1a, the flat portion on the front surface of the lens array 3a comes into surface contact with the positioning portion 63. That is, the positioning portion 63 has a surface perpendicular to the insertion direction of the lens array 3a.

[0142] In this manner, by forming the positioning member 1a with the positioning portion 63 with which the front surface of the lens array 3a can come into surface contact, the position of the lens array 3a can be accurately regulated with respect to the positioning member 1a.

[0143] In this way, by providing the positioning members 1a, 1b with the positioning parts 63 with which the front faces of the lens arrays 3a, 3b can come into surface contact, the distances between the tips of the lens arrays 3a, 3b and the front faces of the positioning members 1a, 1b can be made constant. Therefore, in the optical connection terminals 10, 20 to be connected facing each other, the distance between the lens arrays 3a and 3b can be kept optimal, for example, twice the focal length, and an increase in loss due to defocus can be suppressed.

[0144] 18A, the lens array 3a may be inserted into the positioning member 1a, and the corners of the lens array 3a may be aligned with the corners of the hole of the positioning member 1a (F in the figure) and fixed. In this way, the positioning member 1a and the lens array 3a can be positioned. That is, the positioning member 1a can be positioned to the lens array 3a by fixing the positioning member 1a in a state in which two outer surfaces of the approximately rectangular lens array 3a are pressed against at least two inner surfaces of the hole of the approximately rectangular positioning member 1a.

[0145] Similarly, as shown in Fig. 18B, the lens array 3b is inserted into the positioning member 1b, and the corners of the lens array 3b are aligned with the corners of the holes in the positioning member 1b (G in the figure) and fixed, whereby the positioning member 1b can be positioned on the lens array 3b. That is, the positioning member 1b can be positioned on the lens array 3b by fixing the substantially rectangular lens array 3b in a state in which the two outer surfaces of the substantially rectangular lens array 3b are pressed against at least two inner surfaces of the substantially rectangular positioning member 1b. Therefore, by positioning the lens arrays 3a and 3b in the mutually symmetrical angular directions of the positioning members 1a and 1b, it is possible to suppress misalignment of the lens arrays 3a and 3b when they are connected.

[0146] 19A, a convex portion 2 may be provided on the inner surface of the hole of the positioning member 1a, and a concave portion 4 may be formed on the outer surface of the lens array 3a. Note that a concave portion 4 may be provided on the inner surface of the hole of the positioning member 1a, and a convex portion 2 may be formed on the outer surface of the lens array 3a. That is, by forming corresponding concave and convex shapes on the inner surface of the positioning member 1a and the outer surface of the lens array 3a, the concave and convex shape of the inner surface of the positioning member 1a and the concave and convex shape of the outer surface of the lens array 3a can be fitted together. Therefore, the lens array 3a can be positioned and fixed with high accuracy to the positioning member 1a.

[0147] Also, as shown in FIG. 19B, the size of the convex portion 2 may be formed slightly larger than the concave portion 4. In this case, the resin positioning member 1a can be elastically deformed with respect to the glass lens array 3a. In this manner, the concave-convex shape of the inner surface of the positioning member 1a and the concave-convex shape of the outer surface of the lens array 3a can be fitted together and fixed in a state of close contact with each other. That is, when the lens array 3a is pressed into the positioning member 1a, the concave-convex shape of the inner surface of the positioning member 1a may be elastically deformed, and the lens array 3a may be pressed into the positioning member 1a and fixed. The configurations of FIG. 19A and FIG. 19B are also applicable to the optical connection terminal 20.

[0148] 20A, a positioning protrusion 6 may be formed on the front surface of the lens array 3a. In this case, a positioning hole 8 is formed in the positioning member 1a in addition to the guide mechanism 9a.

[0149] As shown in Fig. 20B, the lens array 3a can be positioned and fixed to the positioning member 1a by inserting the positioning protrusions 6 of the lens array 3a into the positioning holes 8 of the positioning member 1a. The diameter of the positioning protrusions 6 (I in the figure) is slightly smaller than the diameter of the positioning holes 8 (H in the figure). The configurations of Figs. 20A and 20B are also the same for the optical connection terminal 20.

[0150] In this way, by precisely positioning the lens arrays 3a and 3b with respect to the positioning members 1a and 1b, respectively, the precision of the distance between the lens arrays (T in FIG. 5) can be improved. Here, FIG. 21A is a conceptual diagram showing a state in which a beam 77 from a light emission portion (X in the figure) propagates to a light incidence portion (Y in the figure) via a pair of lenses 75. The diameter of the beam 77 emitted from the light emission portion X gradually widens as it enters the lens 75, becoming a substantially parallel light (not strictly speaking parallel, but slightly constricted in the middle), which then enters the opposing lens 75, where the beam diameter is narrowed by the lens 75 to the light incidence portion Y.

[0151] Ideally, the distance W1 from the light output portion X to the lens 75 and the distance W1 from the lens 75 to the light input portion Y match the rear focal length of the lens 75, and the distance V1 between the lenses 75 match twice the front focal length of the lens 75. In this case, theoretically, the beam diameter at the light output portion X and the beam diameter at the light input portion Y match, and loss due to optical connection can be minimized.

[0152] As described above, if the ideal beam expansion diameter is 60 μm, the distance (V1 in the figure) of lens 75 is desirably set to approximately 600 μm to 700 μm. To explain this positional relationship using FIG. 4, the distance T between lens arrays 3a and 3b needs to be set to 600 μm to 700 μm.

[0153] In order to ensure such distance T, the thickness U of the positioning members 1a, 1b needs to be about 0.6 mm. However, it is difficult to manufacture and handle positioning members 1a, 1b with a thickness of 0.6 mm. For this reason, in consideration of ease of handling and manufacturability, it is desirable for the positioning members 1a, 1b to have a thickness of 0.8 mm or more, and more desirably a thickness of 1 mm or more. On the other hand, if the thickness of the positioning members 1a, 1b is about 1 mm, the distance T between the lens arrays 3a, 3b will be about 1500 μm.

[0154] Fig. 21B is a conceptual diagram showing such a state, and shows a state where the lens distance is V2, which is larger than V1, in Fig. 21A. In this case, the beam 77 from the light exit portion X is expanded between the lenses 75, and as a result, the beam diameter at the light entrance portion Y becomes large. In other words, the beam is not in focus at the light entrance portion Y.

[0155] 21C, in this embodiment, the distances of the light exit portion X and the light entrance portion Y to the lens 75 are changed to a distance W2 that is greater than the rear focal length W1 of the lens 75. In this manner, by disposing the light exit portion X and the light entrance portion Y at a position shifted rearward (in the direction in which the distance from the lens 75 increases) from the rear focal length of the lens 75, the beam diameter from the light exit portion X and the beam diameter at the light entrance portion Y can be made substantially the same.

[0156] 22 is a schematic diagram showing the arrangement of each part in this state. The distance between the lens arrays 3a and 3b positioned and arranged opposite to each other by the positioning members 1a and 1b is a distance V2 (e.g., about 1500 μm) that is greater than twice the front focal length of the lens arrays 3a and 3b (e.g., about 600 to 700 μm). In this case, the distance W2 from the rear surface of the lens array 3a to the front end of the planar optical waveguide 5a is greater than the rear focal length W1 of the lens array 3a. Similarly, the distance W2 from the rear surface of the lens array 3b to the front end of the optical fiber array 5b is greater than the rear focal length W1 of the lens array 3b.

[0157] More specifically, it is preferable to position the front surface of each optical waveguide member 5 μm or more back from the back focal position (position at distance W1) of the lens arrays 3a, 3b (W2≧W1+0.5 μm). More preferably, it is preferable to position the front surface of each optical waveguide member 10 μm or more back from the back focal position of the lens arrays 3a, 3b (W2≧W1+10 μm). In this way, even if the thickness of the positioning members 1a, 1b is increased, it is possible to focus the beams entering and exiting the angle optical waveguide member.

[0158] Next, a fourth embodiment will be described. Fig. 23A and Fig. 23B are diagrams showing an optical connection terminal 10 according to the fourth embodiment, Fig. 23A being a side view and Fig. 23B being a cross-sectional view. In this embodiment, as described above, in order to maintain the distance between the lens array and the optical wave-guiding member, for example, a spacer 65 is disposed between the lens array 3a and the planar optical waveguide 5a, and a gap is formed between the lens array 3a and the planar optical waveguide 5a.

[0159] The spacer 65 may be disposed in any position other than the optical path, and the shape and location of the spacer 65 are not particularly limited. For example, a frame-shaped spacer 65 may be disposed on the outer periphery of the positioning member 1a so as to surround the lens array 3a.

[0160] 23C and 23D are diagrams showing yet another optical connection terminal 10, where FIG. 23C is a side view and FIG. 23D is a cross-sectional view. In the embodiment shown in FIG. 23C and FIG. 23D, the orientation of the lens array 3a is opposite to that in FIG. 23A and FIG. 23B. In this case, it is possible to bring the convex lens portion closer to the planar optical waveguide 5a than in the case shown in FIG. 23A and FIG. 23B. Therefore, for example, when the spread angle of the light emitted from the planar optical waveguide 5a is large, the problem of the beam diameter spreading more than necessary can be solved.

[0161] Also, Fig. 24A is a side view showing another configuration, and Fig. 24B is a cross-sectional view. In the illustrated example, similar to Figs. 23A and 23B, a spacer 65 is disposed between the lens array 3a and the planar optical waveguide 5a, and a gap is formed between the lens array 3a and the planar optical waveguide 5a. On the other hand, in the example shown in Figs. 24A and 24B, the spacer 65 and the lens array 3a are integrally formed.

[0162] 25, the spacer 65 and the planar optical waveguide 5a are integrally configured. In this manner, by integrating the spacer 65 with the lens array and the optical waveguide member, the number of parts is reduced and the assembly work is facilitated. In the optical connection terminal 20, the spacer 65 may be disposed between the optical fiber array 5b and the lens array 3b. In any embodiment, the thickness of the spacer 65 is desirably 5 μm or more.

[0163] According to the fourth embodiment, by providing a gap between the optical waveguide member and the lens arrays 3a and 3b, the beam can be efficiently expanded by utilizing this space (refractive index). Even when the space is filled with a medium such as an adhesive, parameters such as the beam diameter can be arbitrarily adjusted by the refractive index. Also, as described above, even if the distance between the lens arrays 3a and 3b is made wider than twice the front focal length, the loss of optical connection between the optical waveguide members can be suppressed.

[0164] Next, a fifth embodiment will be described. Fig. 26A is a diagram showing an optical connection terminal 10 according to the fifth embodiment. In this embodiment, in a side view, the interface between the planar optical waveguide 5a and the lens array 3a is formed obliquely with respect to the optical axis direction. That is, the interface between the lens array 3a and the planar optical waveguide 5a is not perpendicular to the optical axis of the planar optical waveguide 5a.

[0165] In the example shown in Fig. 26A, the optical axes of the planar optical waveguide 5a and the lens array 3a are aligned on the same line, and only the interface is formed at an angle. In contrast, as shown in Fig. 26B, the optical axis of the planar optical waveguide 5a and the optical axis of the lens array 3a may be connected at a predetermined angle.

[0166] Fig. 27 is a diagram showing an optical connection terminal connection structure 30a in which the optical connection terminal 10 in Fig. 26A is connected to an optical connection terminal 20 of a similar shape. That is, in a side view, the interface between the planar optical waveguide 5a and the lens array 3a is formed obliquely with respect to the optical axis direction of the lens array 3a, and the interface between the optical fiber array 5b and the lens array 3b is formed obliquely with respect to the optical axis direction of the lens array 3b. In this case, when the positioning member 1a and the positioning member 1b are connected, the interface between the planar optical waveguide 5a and the lens array 3a and the interface between the optical fiber array 5b and the lens array 3b are connected so as to be substantially linearly symmetrical with the connection part as the axis of symmetry.

[0167] In this way, it is possible to compensate for oblique emission and oblique incidence at each of the obliquely formed interfaces.

[0168] 28 is a diagram showing an optical connection terminal connection structure 30b in which an optical connection terminal 10 in which the interface between the planar optical waveguide 5a and the lens array 3a is formed obliquely toward the parallel direction of the optical paths in a planar view is connected to an optical connection terminal 20 of a similar form. That is, in a planar view, the interface between the planar optical waveguide 5a and the lens array 3a is formed obliquely with respect to the optical axis direction of the lens array 3a, and the interface between the optical fiber array 5b and the lens array 3b is formed obliquely with respect to the optical axis direction of the lens array 3b. In this case, when the positioning member 1a and the positioning member 1b are connected, the interface between the planar optical waveguide 5a and the lens array 3a and the interface between the optical fiber array 5b and the lens array 3b are connected so as to be approximately parallel.

[0169] In this way, the distance of each of the parallel optical paths (the sum of the optical path lengths of the lens array 3a and the lens array 3b) can be made approximately constant.

[0170] 29 is a diagram showing an optical connection terminal connection structure 30c in which an optical connection terminal 10 in which the optical path of the planar optical waveguide 5a is formed obliquely with respect to the interface with the lens array 3a is connected to an optical connection terminal 20 of a similar form. That is, in a plan view, the optical path of the planar optical waveguide 5a is formed obliquely with respect to the optical axis direction of the lens array 3a, and the optical path of the optical fiber array 5b is formed obliquely with respect to the optical axis direction of the lens array 3b. In this case, when the positioning member 1a and the positioning member 1b are connected, the optical path of the planar optical waveguide 5a and the optical path of the optical fiber array 5b are connected so as to be substantially line-symmetric with respect to the connection part as the axis of symmetry.

[0171] In this way, it is possible to compensate for oblique emission and oblique incidence at each of the obliquely formed interfaces.

[0172] According to the fifth embodiment, the interface between the optical waveguide member and the lens array is formed at an angle to the optical axis direction of the optical waveguide member, thereby reducing the influence of reflected light at the interface. The same effect can be obtained by providing an anti-reflection film at the interface between the optical waveguide member and the lens array.

[0173] 30, functional elements such as isolators 69a, 69b may be disposed between the planar optical waveguide 5a and the lens array 3a or in front of the lens array 3a. Note that only one of the isolators 69a, 69b may be used. Alternatively, an isolator may be disposed between the optical fiber array 5b and the lens array 3b or in front of the lens array 3b.

[0174] Next, a sixth embodiment will be described. Fig. 31A and Fig. 31B are diagrams showing an assembly process of the optical connection terminal 20 according to the sixth embodiment. In this embodiment, a GRIN fiber 67 is fusion-spliced ​​to the tip of an optical fiber array 5b. The GRIN fiber 67 is a graded-index fiber, and can expand the beam diameter relative to the optical fiber. Therefore, in this embodiment, a lens array is not required. That is, the optical fiber array 5b and the GRIN fiber 67 (a holding member that holds an optical fiber, etc.) are fixed to the positioning member 1b.

[0175] Such an optical connection terminal 20 can also be connected to another optical connection terminal 20, instead of being connected to the optical connection terminal 10. Even in this case, when one positioning member 1b is connected to the other positioning member 1b, the optical fiber arrays 5b (GRIN fibers 67) do not come into contact with each other, and a space is formed in the optical connection portion.

[0176] According to the sixth embodiment, the beam diameter can be expanded without using a lens array. Therefore, the tolerance between the opposing optical connection terminals can be expanded. In addition, since the adhesive used for bonding the optical fiber array 5b and the lens array 3b is not required, the optical power resistance can be improved. When using a lens array, a GRIN lens array may be used as the lens array.

[0177] Next, a method of arranging each optical connection terminal on a board will be described. In the example shown in Fig. 10A described above, the entire optical connection terminal 10 is arranged on the board 51a, the optical connection terminal 10 is connected to the board 51b on the board 51a, and the positioning member 1a is fixed to the board 51a, but the present invention is not limited to this form.

[0178] 32A, the optical connection terminal 10 is connected directly to the substrate 51a without using the substrate 51b. Also, the lens array 3a and the positioning member 1a are disposed so as to protrude from the end of the substrate 51a.

[0179] In the example shown in FIG. 32B, a step is formed at the end of the substrate 51a. The step is formed on the upper surface side of the substrate 51a, and the thickness of the substrate 51a on the end side becomes thinner. That is, the upper surface position of the substrate 51a becomes lower at the step portion. The positioning member 1a is disposed at the portion where the upper surface is lowered by the step, and is fixed to the substrate 51a. By disposing the positioning member 1a relative to the substrate 51a as shown in FIG. 32A and FIG. 32B, the overall height can be lowered.

[0180] 33A is substantially the same as that of FIG 10A, but glass 71 is disposed between the planar optical waveguide 5a and the substrate 51a. As described above, since the planar optical waveguide 5a is made of glass, by disposing glass 71, which has a linear expansion coefficient close to that of the substrate 51a, between the planar optical waveguide 5a and the substrate 51a, it is possible to reduce stress applied to the planar optical waveguide 5a when the temperature changes.

[0181] 33B, a step is provided at the end of the substrate 51a so that the upper surface position is lower. Glass 71 is placed on the portion where the thickness is reduced by the step. The planar optical waveguide 5a is fixed to the substrate 51a via the glass 71.

[0182] 33C, the positioning member 1a is disposed so as to completely protrude from the substrate 51a. Glass 71 is disposed on the side end surface of the substrate 51a, and the substrate 51a and the planar optical waveguide 5a or the lens array 3a are fixed via the glass 71.

[0183] In the example shown in Fig. 33D, the substrate 51b is not used, and the optical connection terminal is directly connected to the substrate 51a. The positioning member 1a is disposed so as to completely protrude from the substrate 51a. Glass 71 is disposed on the side end surface of the substrate 51a, and the substrate 51a and the planar optical waveguide 5a or the lens array 3a are fixed via the glass 71. As shown in Figs. 33B to 33D, by connecting the substrate 51a and the planar optical waveguide 5a or the lens array 3a via the glass 71, the same effect as that in Fig. 33A can be obtained.

[0184] Moreover, Fig. 34A is a diagram showing another embodiment of the positioning member 1a. In the example shown in Fig. 34A, the positioning member 1a is not formed so as to surround the entire circumference of the lens array 3a, and the lens array 3a is exposed below the positioning member 1a. That is, in this embodiment, the positioning member 1a is bonded to three surfaces, the upper surface and both side surfaces of the lens array 3a. At this time, the lower end of the lens array 3a is formed so as to slightly protrude beyond the lower end of the positioning member 1a.

[0185] In this case, as shown in Fig. 34B, the lower surface of the lens array 3a can be arranged to be in contact with the substrate 51a. In this way, the overall height can be reduced. Glass 71 is arranged between the planar optical waveguide 5a and the substrate 51a.

[0186] 34C, a step similar to that described above may be formed at the end of the substrate 51a, and the positioning member 1a may be disposed at the step. In this case, glass 71 is also disposed at the step, and the planar optical waveguide 5a or the lens array 3a is bonded to the substrate 51a via the glass 71.

[0187] Moreover, Fig. 35A is a diagram showing still another embodiment of the positioning member 1a. Fig. 35A is substantially similar to Fig. 34A, but the optical axis of the lens array 3a is configured at substantially the same height as the axis of the guide mechanism 9a.

[0188] Even in this case, the lower surface of the lens array 3a can be arranged to be in contact with the substrate 51a as shown in Fig. 35B. Glass 71 is arranged between the planar optical waveguide 5a and the substrate 51a. In this way, the overall height can be reduced.

[0189] 35C, a step similar to that described above may be formed at the end of the substrate 51a, and the positioning member 1a may be disposed at the step. In this case, glass 71 is also disposed at the step, and the planar optical waveguide 5a or the lens array 3a is bonded to the substrate 51a via the glass 71.

[0190] Also, as shown in FIG. 36A, the optical connection terminal 10 may be directly connected to the substrate 51a without using the substrate 51b, and further, the lower surface of the lens array 3a may be fixed by contacting it with a step portion formed at the end of the substrate 51a without using the glass 71.

[0191] Moreover, the example shown in FIG. 36B has substantially the same structure as that in FIG. 36A, but a plate-shaped glass 71 is disposed between the lower surface of the lens array 3a and the upper surface of the stepped portion of the substrate 51a.

[0192] 36C has a structure similar to that of FIG 36B, but glass 71 is disposed not only between the lower surface of the lens array 3a and the upper surface of the stepped portion of the substrate 51a, but also between the planar optical waveguide 5a and the upper surface of the stepped portion of the substrate 51a. In this case, the glass 71 is formed in a substantially L-shape to conform to the shape of the stepped portion.

[0193] Alternatively, as shown in FIG. 36D, lens array 3a may be disposed so as to completely extend beyond the end of substrate 51a, and glass 71 may be disposed between substrate 51a and planar optical waveguide 5a in the stepped portion.

[0194] 36E, glass 71 may be disposed so as to contact the upper surface of the lens array 3a and the upper surface of the planar optical waveguide 5a. In this way, the joints of the various parts can be reinforced.

[0195] Also, as shown in Fig. 36F, glass 71 may be disposed below the lower surface of the lens array 3a and the planar optical waveguide 5a. This also makes it possible to reinforce the joints of the various parts. Note that, in Figs. 36A to 36F, the optical axis of the lens array 3a and the axis of the guide mechanism 9a can be configured to be at approximately the same height.

[0196] 37A, a substrate 51b is disposed on a substrate 51a, and an optical integrated circuit 13 is disposed on the substrate 51b. A step is formed on the substrate 51a, and the entire planar optical waveguide 5a is disposed in the step portion and fixed via glass 71. In this case, the planar optical waveguide 5a and the positioning member 1a are adhesively fixed to the glass 71.

[0197] In the example shown in Fig. 37B, a part of the glass 71 supports the positioning member 1a in comparison with Fig. 37A. Fig. 38A is a view seen from the arrow J in Fig. 37B. A part of the center part in the width direction of the glass 71 has an upwardly convex shape. The convex shape fits into the insertion recess of the positioning member 1a into which the lens array 3a is inserted. In this case, the planar optical waveguide 5a, the positioning member 1a, and the lens array 3a are adhesively fixed to the glass 71. The glass 71 and the lens array 3a may be integrally formed.

[0198] In the example shown in Fig. 37C, compared to Fig. 37B, a part of the glass 71 supports the optical integrated circuit 13. Fig. 38B is a cross-sectional view taken along line KK in Fig. 37C. Parts of both ends of the glass 71 in the width direction have an upwardly convex shape, which contacts both sides of the optical integrated circuit 13 and supports the optical integrated circuit 13.

[0199] In the example shown in FIG. 39A, an optical fiber array 5 is connected to a planar optical waveguide 5a, instead of a lens array 3a. An optical integrated circuit 13 is connected to a substrate 51a via a substrate 51b. An end of the planar optical waveguide 5a is disposed so as to protrude from an end of the substrate 51a, and the planar optical waveguide 5a is supported by glass 71 disposed on a side end face of the substrate 51a. A connector is connected to an end of the optical fiber array 5. In this case, the optical fiber array 5 is not detachable from the substrate 51a.

[0200] 39B, unlike the example shown in Fig. 39A, the optical integrated circuit 13 is directly connected to the substrate 51a without using the substrate 51b. Even in this case, the end of the planar optical waveguide 5a is disposed so as to protrude from the end of the substrate 51a, and the planar optical waveguide 5a is supported by glass 71 disposed on the side end surface of the substrate 51a.

[0201] 39A, the example shown in Fig. 39C has a step portion similar to that described above provided at the end of the substrate 51a, and glass 71 is disposed on the step portion. Since the planar optical waveguide 5a is disposed on the step portion, the planar optical waveguide 5a is supported on the step portion by the glass 71.

[0202] 39B, the example shown in Fig. 39D has a step portion provided at the end of the substrate 51a, and glass 71 is disposed on the step portion. Since the planar optical waveguide 5a is disposed on the step portion, the planar optical waveguide 5a is supported on the step portion by the glass 71.

[0203] 40A, an optical fiber array 5 is connected to a planar optical waveguide 5a, similarly to FIG. 39A. A substrate 51b is disposed on the substrate 51a, and an optical integrated circuit 13 is disposed on the substrate 51b. A step is formed on the substrate 51a, and the entire planar optical waveguide 5a and a part of the optical fiber array 5 are disposed on the step and fixed via glass 71.

[0204] In the example shown in FIG. 40B, the optical fiber array 5 is disposed so that the entirety of the optical fiber array 5 protrudes from the step (substrate 51a) in comparison with FIG. 40A.

[0205] 40C, compared to FIG. 40B, a part of the glass 71 supports the optical integrated circuit 13 (similar to FIG. 38B). That is, a part of both ends of the glass 71 in the width direction has an upwardly convex shape, contacts both sides of the optical integrated circuit 13, and supports the optical integrated circuit 13.

[0206] 41A, a substrate 51b is disposed on top of a substrate 51a, and an optical integrated circuit 13 is fixed on the substrate 51b. A positioning member 1a is fixed near an end of the substrate 51a. That is, the optical integrated circuit 13 and the lens array 3a are optically connected without using a planar optical waveguide 5a.

[0207] In the example shown in FIG. 41B, in contrast to FIG. 41A, a step is formed at the end of substrate 51a, and positioning member 1a is fixed to the step via glass 71.

[0208] In the example shown in FIG. 41C, unlike FIG. 41B, a part of glass 71 supports positioning member 1a (similar to FIG. 38A) and also supports optical integrated circuit 13 (similar to FIG. 38B).

[0209] 42A, the optical integrated circuit 13 and the optical fiber array 5 are connected to FIG. 41A. That is, a substrate 51b is disposed on top of a substrate 51a, and the optical integrated circuit 13 is fixed onto the substrate 51b. An optical fiber array 5 is disposed near an end of the substrate 51a, and is optically connected to the optical integrated circuit 13.

[0210] In the example shown in FIG. 42B, in contrast to FIG. 42A, a step is formed at the end of substrate 51a, and positioning member 1a is fixed to the step via glass 71.

[0211] In the example shown in FIG. 42C, unlike FIG. 42B, a part of the glass 71 supports the optical integrated circuit 13 (similar to FIG. 38B).

[0212] 43A, the optical fiber array 5 is disposed without contacting the substrate 51a, as compared to FIG. 42A. That is, the substrate 51b is disposed on the top of the substrate 51a, and the optical integrated circuit 13 is fixed onto the substrate 51b. The optical fiber array 5 is adhesively fixed to the end face of the optical integrated circuit 13, and is optically connected to the optical integrated circuit 13.

[0213] 43B, the entire optical fiber array 5 is disposed at a position protruding from the substrate 51a, as compared to FIG. 43A. A guide 73 is fixed to the joint between the optical integrated circuit 13 and the optical fiber array 5. This allows the bonding area of ​​the optical fiber array 5 to be increased.

[0214] 43C, unlike in FIG 43A, the end face of the optical fiber array 5 is bonded not only to the end face of the optical integrated circuit 13 but also to the end face of the substrate 51b. This makes it possible to increase the bonding area of ​​the optical fiber array 5.

[0215] In addition, the example shown in FIG. 44A differs from the above-mentioned embodiments in the emission direction of light from the optical integrated circuit 13. In the following drawings, the illustration of the substrate is omitted. As shown in FIG. 44A, a positioning member 1a is fixed to the upper surface of the optical integrated circuit 13. Also, an optical path 14 is provided on the upper surface of the optical integrated circuit 13, and light is emitted toward the upper side of the optical integrated circuit 13 and enters the lens array 3a. In this case, the positioning member 1b is connected to the positioning member 1a from above the optical integrated circuit 13 so as to face the positioning member 1a.

[0216] In order to direct the optical path 14 upward in the optical integrated circuit 13, for example, a mirror or a grating coupler (not shown) is used. The emission direction of the light from the optical integrated circuit 13 does not necessarily have to be perpendicular to the upper surface of the optical integrated circuit 13, and may be, for example, about 90°±10°.

[0217] In the example shown in Fig. 44B, the shape of the lens array 3b is different from that of Fig. 44A. Light incident from the front of the lens array 3b is reflected by a mirror portion at an angle of about 45° on the back surface of the lens array 3b and is emitted in a direction at an angle of about 90°. That is, the positioning members 1a and 1b are connected to face each other above the optical integrated circuit 13, but the optical path 14 on the top surface of the optical integrated circuit 13 and the optical path in the optical fiber array 5b are approximately parallel to the top surface of the optical integrated circuit 13.

[0218] 44C, unlike in FIG. 44B, the end face of the optical fiber array 5b is cut obliquely, and the light is reflected at the incident portion of the optical fiber array 5b to change the direction of the light, instead of being reflected at the back surface of the lens array 3b. In this case as well, the positioning members 1a, 1b are connected opposite to each other above the optical integrated circuit 13, but the optical path 14 on the upper surface of the optical integrated circuit 13 and the optical path in the optical fiber array 5b are approximately parallel to the upper surface of the optical integrated circuit 13.

[0219] 45A, the optical path 14 in the optical integrated circuit 13 is formed on the lower surface side, not on the upper surface, of the optical integrated circuit 13. In this case, for example, on the lower surface of the optical integrated circuit 13, a reflecting portion 16 can be formed at a position corresponding to a connection portion with the lens array 3a, so that the optical path 14 is directed upward.

[0220] 45B, the lens array 3a is directly connected to the optical integrated circuit 13. That is, the positioning member 1a is not used. Even in this case, it is sufficient that the lens array 3a can be connected by aligning the position with the lens array 3b.

[0221] In the example shown in Fig. 46A, the positioning members 1a and 1b are not formed with guide mechanisms 9a and 9b that can be fitted in the opposing directions. In this case, as shown in Fig. 46B, magnets 11a are formed on both sides of the lens array 3a of the positioning member 1a, and as shown in Fig. 46C, magnets 11b are formed on both sides of the lens array 3b of the positioning member 1b. That is, the lens arrays 3a and 3b are positioned by the mutual attraction of the magnets 11a and 11b.

[0222] In this way, by not providing a fitting structure with a concave-convex shape on the opposing surfaces of the positioning members 1a and 1b, the positioning member 1b can be slid from the side of the positioning member 1a to perform the connection work, as shown in Fig. 46A. Therefore, even if there is not enough space above the optical integrated circuit 13, for example, the positioning members 1a and 1b can be connected to each other.

[0223] As described above, various structures can be adopted for arranging the optical connection terminal 10 on the substrate 51a, and a method that is low in height and allows stress relaxation when the temperature changes is desired.

[0224] In the above-described embodiments, the connection between a pair of the optical connection terminal 10 and the optical connection terminal 20 has been described. However, as will be described below, a plurality of pairs of optical connection terminals may be connected simultaneously.

[0225] For example, in the example shown in Fig. 47, a plurality of optical connection terminals 10 (positioning members 1a) are provided in a plan view on a substrate 51b. The planar optical waveguide 5a may be fixed to a substrate 51a (not shown) without using the substrate 51b. The planar optical waveguide 5a may be connected to the substrate via an optical integrated circuit 13 instead of being directly connected to the substrate. Although the following description shows an example in which two optical connection terminals are connected, three or more optical connection terminals may be connected.

[0226] The multiple optical connection terminals 20 connectable to the respective optical connection terminals 10 are integrated by a housing 79. That is, the multiple optical connection terminals 20 are arranged side by side in the housing 79 in a plan view. The housing 79 is formed with an optical connection terminal holding section 81 corresponding to the outer shape of the optical connection terminal 20. At this time, by forming an uneven shape that can be fitted into the positioning member 1b and the optical connection terminal holding section 81, the positioning member 1b is reliably held by the housing 79.

[0227] Magnets 11d are disposed near both ends of housing 79. Furthermore, magnet 11c, which has a magnetic pole that attracts magnet 11d, is disposed on substrate 51b at a position corresponding to magnet 11d.

[0228] 48 is a diagram showing a state in which each optical connection terminal 10 and optical connection terminal 20 are connected. By connecting the housing 79 to the substrate 51b by attraction of the magnets 11c and 11d, a plurality of pairs of optical connection terminals 10 and optical connection terminals 20 arranged opposite each other are connected. Therefore, the connection work is easier than when each optical connection terminal 10 and optical connection terminal 20 are individually connected.

[0229] In addition, by providing a gap between the magnets 11c and 11d when connecting the optical connection terminals 10 and 20, the positioning members 1a and 1b can be reliably brought into surface contact with each other. Also, instead of the magnets 11c and 11d, a spring may be used to press the housing 79 and the substrate 51b together to connect them.

[0230] Moreover, by making the optical connection terminal holding portion 81 larger than the optical connection terminal 20, it is possible to form a slight clearance between the optical connection terminal 20 and the housing 79. In this way, the optical connection terminal 20 can move slightly relative to the housing 79. That is, it is possible to form a so-called floating structure when connecting the positioning members 1a and 1b.

[0231] The optical connection terminals 10 and 20 may be arranged in reverse. That is, when a plurality of one optical connection terminals are arranged on the substrate 51b, a plurality of other optical connection terminals are collectively fixed to the housing 79. In this manner, a plurality of one optical connection terminals can be optically connected to a plurality of other optical connection terminals integrated in the housing 79.

[0232] 49, a plurality of optical connection terminals 20 may be arranged side by side on a substrate 51b, and the plurality of optical connection terminals 20 may be collectively held by a housing 79. That is, the plurality of optical connection terminals 20 may be collectively connected to each other.

[0233] 50, a plurality of optical connection terminals 10 may be arranged side by side in the vertical direction relative to a substrate (not shown). That is, a plurality of optical connection terminals 10 may be arranged side by side in a side view. In this case, a plurality of optical connection terminals 20 are arranged side by side in the vertical direction and collectively held by a housing 79. In this way, it is sufficient for the housing 79 to be able to hold a plurality of optical connection terminals side by side in a plan view or a side view according to the arrangement of the optical connection terminals to be connected.

[0234] 51, a plurality of lens arrays 3a and a planar optical waveguide 5a are fixed to one positioning member 1a, and a plurality of lens arrays 3b and an optical fiber array 5b are fixed to one positioning member 1b.

[0235] More specifically, in a plan view, a plurality of lens arrays 3a are provided in the positioning member 1a. A planar optical waveguide 5a is connected to each of the lens arrays 3a. Guide pins 61 are provided on both sides of the positioning member 1a so as to sandwich the plurality of lens arrays 3a. Magnets 11a are provided near both ends of the positioning member 1a.

[0236] Similarly, in plan view, a plurality of lens arrays 3b are provided in the positioning member 1b. An optical fiber array 5b is connected to each of the lens arrays 3b. Female side holes 22a are provided on both sides of the positioning member 1b so as to sandwich the plurality of lens arrays 3b. Magnets 11b are provided near both ends of the positioning member 1b.

[0237] 52, by connecting the positioning members 1a and 1b together, it is possible to collectively connect a plurality of optical connection terminals 10 and the optical connection terminals 20. As described above, the optical connection terminals 20 may be connected together. Moreover, the optical connection terminals 10 and 20 may be arranged either horizontally or vertically.

[0238] 53, multiple positioning members 1a are connected together by connecting portions 83. Multiple positioning members 1b are connected together by connecting portions 83. At connecting portions 83, positioning members 1a or positioning members 1b are bonded together by, for example, an adhesive. Guide pins 61 are fixed to male side holes 22b near both ends of the connected positioning members 1a. That is, guide pins 61 are not necessary for male side holes 22b near the center.

[0239] 54 is a diagram showing a state in which a plurality of positioning members 1a and a plurality of positioning members 1b are connected. The positioning members 1a and 1b are connected by magnets 11a and 11b (not shown). In this way, by connecting a plurality of positioning members 1a to each other and connecting a plurality of positioning members 1b to each other, a plurality of optical connection terminals 10 and 20 can be connected together.

[0240] Moreover, Fig. 55A is a diagram showing an example in which the optical fiber in the optical fiber array 5b is a multi-core fiber, Fig. 55B is a view taken along line PP in Fig. 55A, and Fig. 55C is a cross-sectional view taken along line QQ in Fig. 55A. Note that, in the illustrated example, an example in which the optical fiber array 5b is formed by four multi-core fibers 12 is shown, but the number of multi-core fibers 12 is not particularly limited. Also, an example in which the multi-core fiber 12 has four cores arranged in parallel in a straight line is shown, but the number and arrangement of the cores are not limited to the illustrated example.

[0241] Fig. 56 is a conceptual diagram of the optical path 18 at the time of optical connection in Fig. 55A. A multi-core fiber 12 is connected to each lens of the lens array 3b, and light from multiple cores enters and exits the same lens. Similarly, in the lens array 3a, each lens is optically connected to the rear planar optical waveguide through multiple optical paths. In this way, the optical fiber in the optical fiber array 5b may be configured with multiple multi-core fibers 12 arranged in parallel.

[0242] Although the embodiment of the present invention has been described above with reference to the attached drawings, the technical scope of the present invention is not limited to the above-described embodiment. It is clear that a person skilled in the art can think of various modifications or alterations within the scope of the technical ideas described in the claims, and it is understood that these also naturally belong to the technical scope of the present invention.

[0243] For example, it goes without saying that the configurations in each embodiment can be combined with each other. [Explanation of symbols]

[0244] 1a, 1b... Positioning members 2....Convex part 3a, 3b: Lens array 4...Concave 5a……Plane optical waveguide 5, 5b: Optical fiber array 6: Positioning protrusion 8.... Positioning hole 9a, 9b...Guide mechanism 10, 20: Optical connection terminal 11a, 11b, 11c, 11d...magnets 12...Multicore fiber 13. Optical integrated circuit 14, 18……light path 16……Reflector 19. Window 21...Guide pin holding member 22a……Female side hole 22b……male side hole 23……hole 30, 30a, 30b, 30c...Optical connection terminal connection structure 40....Aligning connection assembly 41...Optical fiber array 43……Planar optical waveguide 50……Optical equipment 51a, 51b... Substrate 61...Guide pin 63: Positioning part 65...Spacer 67...GRIN fiber 69a, 69b...Isolator 71………Glass 73...Yatoi 75...Lens 77...Beam 79………Housing 81....Optical connection terminal holding section 83……Connection part 100....Substrate 101....Optical integrated circuit 103...Optical fiber 105………Connector

Claims

1. An optical connection terminal capable of optical connection to a connection target, A positioning member having a guide mechanism for a connection target; a lens array fixed to the positioning member; an optical waveguide member optically connected to the lens array; Equipped with The positioning member and the lens array are positioned and fixed, An optical connection terminal, wherein the lens array and the optical waveguide member are fixed in an aligned state.

2. the lens array and the optical waveguide member are made of silicon or glass; 2. The optical connection terminal according to claim 1, wherein the positioning member is made of resin.

3. 2. The optical connection terminal according to claim 1, wherein the difference in linear expansion coefficient between said lens array and said optical waveguide member is 20 ppm / [deg.] C. or less.

4. 2. The optical connection terminal according to claim 1, wherein the positioning member has a positioning portion with which the front surface of the lens array can come into surface contact, and a predetermined distance is provided between the tip of the lens array and the front surface of the positioning member.

5. 2. The optical connection terminal according to claim 1, wherein a magnet is disposed on a front surface of the positioning member to serve as a fixing portion for a connection target.

6. 2. The optical connection terminal according to claim 1, wherein the guide mechanisms are arranged on both sides of the lens array and have a concave-convex structure that can be fitted with a connection target.

7. 2. The optical connection terminal according to claim 1, wherein a gap is provided between said optical waveguide member and said lens array.

8. 8. The optical connection terminal according to claim 7, wherein a spacer is disposed between said optical waveguide member and said lens array at a location other than the optical path.

9. 9. The optical connection terminal according to claim 8, wherein the spacer and the lens array are integrally formed, and the spacer has a thickness of 5 [mu]m or more.

10. 2. The optical connection terminal according to claim 1, wherein an interface between said optical waveguide member and said lens array is formed obliquely with respect to an optical axis of said optical waveguide member.

11. 2. The optical connection terminal according to claim 1, wherein the optical waveguide in the optical waveguide member is formed obliquely with respect to the optical axis of the lens array.

12. 2. The optical connection terminal according to claim 1, wherein a beam expansion diameter by said lens array is 30 [mu]m or more and 120 [mu]m or less.

13. 13. The optical connection terminal according to claim 12, wherein the front surface of the optical waveguide member is set back from the back focal position of the lens array by 5 [mu]m or more.

14. 13. The optical connection terminal according to claim 12, wherein the positioning member has a thickness of 0.8 mm or more.

15. 15. The optical connection terminal according to claim 14, wherein the positioning member has a thickness of 1 mm or more.

16. 2. The optical connection terminal according to claim 1, wherein the distance from the rear end face of the lens array to the front end face of the positioning member is 1.7 mm or less.

17. 2. The optical connection terminal according to claim 1, wherein the distance from the rear end face of said optical waveguide member to the front end face of said positioning member is 12 mm or less.

18. 2. The optical connection terminal according to claim 1, wherein the lens array is inserted into the positioning member and fixed in place with outer surfaces of the lens array pressed against at least two inner surfaces of the positioning member.

19. The inner surface of the positioning member and the outer surface of the lens array are formed with corresponding concave and convex shapes, 2. The optical connection terminal according to claim 1, wherein the lens array is positioned relative to the positioning member by fitting the concave-convex shape of the inner surface of the positioning member with the concave-convex shape of the outer surface of the lens array.

20. The inner surface of the positioning member and the outer surface of the lens array are formed with corresponding concave and convex shapes, The optical connection terminal of claim 2, characterized in that when the lens array is pressed into the positioning member, the uneven shape of the inner surface of the positioning member elastically deforms, so that the uneven shape of the inner surface of the positioning member fits into the uneven shape of the outer surface of the lens array, and the optical connection terminal is fixed in a tight contact state.

21. 2. The optical connection terminal according to claim 1, wherein the optical waveguide member is an optical fiber array in which multi-core fibers are arranged in parallel.

22. 2. The optical connection terminal according to claim 1, wherein the positioning member has a shrinkage rate of 0.13% or less after heating at 260[deg.] C. for 1 minute.

23. 2. The optical connection terminal according to claim 1, wherein the positioning member has a shrinkage rate of 0.02% or less after heating at 260[deg.] C. for 1 minute.

24. A connection structure between optical connection terminals, one optical connection terminal has a first positioning member, a first lens array fixed to the first positioning member, and a first optical waveguide member optically connected to the first lens array; the other optical connection terminal connected to the one optical connection terminal has a second positioning member, a second lens array fixed to the second positioning member, and a second optical wave-guiding member optically connected to the second lens array; An optical connection terminal connection structure, characterized in that when the first positioning member and the second positioning member are connected, a space is formed at the optical connection portion between the first lens array and the second lens array.

25. 25. The optical connection terminal structure according to claim 24, wherein the first optical waveguide member is a planar optical waveguide, and the second optical waveguide member is an optical fiber array.

26. one of the first positioning member and the second positioning member is provided with a male side hole and a guide pin that is inserted into and fixed to the male side hole; the other of the first positioning member and the second positioning member is provided with a female side hole into which the guide pin can be inserted and removed, The diameter of the female side hole is 1 μm or more larger than the diameter of the male side hole, 25. The optical connection terminal connection structure according to claim 24, wherein when the first positioning member and the second positioning member are connected, the guide pin is inserted into the female side hole to position them relative to each other.

27. one of the first positioning member and the second positioning member is provided with a male side hole and a guide pin that is press-fitted into the male side hole and fixed; the other of the first positioning member and the second positioning member is provided with a female side hole into which the guide pin can be inserted and removed, The diameter of the female side hole is larger than the outer diameter of the guide pin, 25. The optical connection terminal connection structure according to claim 24, wherein when the first positioning member and the second positioning member are connected, the guide pin is inserted into the female side hole to position them relative to each other.

28. 27. The optical connection terminal connection structure according to claim 26, wherein the insertion length of said guide pin into said female side hole is 1 mm or less.

29. an interface between the first optical waveguide member and the first lens array is formed obliquely with respect to an optical axis direction of the first lens array, an interface between the second optical waveguide member and the second lens array is formed obliquely with respect to an optical axis direction of the second lens array, 25. The optical connection terminal connection structure according to claim 24, wherein when the first positioning member and the second positioning member are connected, an interface between the first optical waveguide member and the first lens array and an interface between the second optical waveguide member and the second lens array are approximately parallel to each other.

30. an interface between the first optical waveguide member and the first lens array is formed obliquely with respect to an optical axis direction of the first lens array, an interface between the second optical waveguide member and the second lens array is formed obliquely with respect to an optical axis direction of the second lens array, 25. The optical connection terminal connection structure according to claim 24, wherein when the first positioning member and the second positioning member are connected, an interface between the first optical waveguide member and the first lens array and an interface between the second optical waveguide member and the second lens array are approximately linearly symmetrical with respect to a connection portion as an axis of symmetry.

31. an optical path of the first optical waveguide member is formed obliquely with respect to an optical axis direction of the first lens array; an optical path of the second optical waveguide member is formed obliquely with respect to an optical axis direction of the second lens array; 25. The optical connection terminal connection structure according to claim 24, wherein when the first positioning member and the second positioning member are connected, the optical path of the first optical waveguide member and the optical path of the second optical waveguide member are approximately linearly symmetric with respect to the connection portion as an axis of symmetry.

32. a plurality of the one optical connection terminals are arranged on a substrate; The plurality of other optical connection terminals are collectively fixed by a housing, 25. The optical connection terminal connection structure according to claim 24, wherein a plurality of said first optical connection terminals and a plurality of said second optical connection terminals integrated in said housing are optically connected to each other.

33. a plurality of the one optical connection terminals are arranged on a substrate; In the other optical connection terminal, a plurality of the second lens arrays are fixed to the second positioning member, and the second optical wave-guiding members are optically connected to the second lens arrays, respectively; The optical connection terminal connection structure according to claim 24, characterized in that the first lens array of each of the plurality of one optical connection terminals is optically connected to the plurality of second lens arrays integrated by the second positioning member.

34. A method for manufacturing an optical device using the optical connection terminal connection structure according to claim 24, comprising the steps of: a step a of disposing the one optical connection terminal on an electronic circuit board and connecting the one optical connection terminal to the electronic circuit board by reflow; a step b of connecting the other optical connection terminal to the one optical connection terminal after the step a; 13. A method for manufacturing an optical device, comprising:

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