Dehumidification EFEM and dehumidification module applied to the same

Abstract

To provide a dehumidification module for reducing humidity in an EFEM (Equipment Front End Module) and the EFEM.SOLUTION: A dehumidification EFEM 400 includes a FOUP (Front-Opening Unified Pod) 114 with a substrate W mounted, a body 411 in which a first space 410 that communicates with the foup through a door D1 and enables the transferred substrate to stay is formed inside, a dehumidification module 420 arranged so as to communicate with the first space to dehumidify gas, an air blower 440 for supplying the dehumidified gas to the first space, and a penetration pipe 461 for providing a movement path of the gas dehumidified between a dehumidifier and the air blower.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] This embodiment relates to an EFEM (EQUIPMENT FRONT END MODULE) including a dehumidification module. [Background technology]

[0002] Recently, as the transition to an information society accelerates, the demand for highly integrated electronic devices is rapidly increasing. Representative examples of highly integrated electronic devices include high-resolution display devices and high-density, high-performance semiconductor devices, which are manufactured by integrating a large number of electronic structures in a single area through a high-precision surface treatment process.

[0003] Known processes used in the manufacture of highly integrated electronic devices include thin film deposition processes, photolithography processes, etching processes, etc., and highly integrated electronic devices are manufactured through a composite process in which different processes such as these are applied one or more times.

[0004] The process system may have process processing equipment such as an Equipment Front End Module (EFEM), a transfer robot, a process chamber, etc., in order to apply multiple processes to highly integrated electronic devices. A substrate (e.g., a semiconductor wafer) to be processed waits in the EFEM among such process processing equipment, and is then moved to an appropriate process chamber by a transfer robot, where it undergoes the required process.

[0005] The EFEM may include a Load Port Module (LPM), a Front-Opening Unified Pod (FOUP), an EFEM chamber, and the like.

[0006] The load port module is a device to which a semiconductor wafer storage device called a FOUP is connected. A number of semiconductor wafers can be loaded in the FOUP, and a transfer device including a transfer robot sequentially transfers the semiconductor wafers loaded in the FOUP to a process chamber. Semiconductor wafer processing is performed in a clean room with a high level of cleanliness, but semiconductor wafers can be loaded in the FOUP to provide even higher levels of cleanliness.

[0007] Meanwhile, moisture can react with fumes generated from process processing equipment and oxidize or etch devices. Furthermore, moisture can react with fine reactive particles to form foreign matter. Such oxidation of devices, etching of devices and / or formation of foreign matter can be factors that reduce device yields. Since substrates (e.g., semiconductor wafers) to be processed remain in EFEMs for a considerable amount of time, industrial sites recognize humidity control within process equipment such as EFEMs as an important factor for improving yields. Summary of the Invention [Problem to be solved by the invention]

[0008] Against this background, it is an object of the present embodiments, in one aspect, to provide a technique for reducing humidity within an EFEM.

[0009] In another aspect, an object of the present embodiments is to provide a technique that can reduce humidity in an EFEM while minimizing costs.

[0010] In yet another aspect, an object of the present embodiments is to provide a technique for reducing humidity in key areas affecting a substrate without replacing an existing EFEM chamber.

[0011] In yet another aspect, an object of the present embodiment is to provide a technique that can reduce humidity in an EFEM without taking up a lot of space.

[0012] In yet another aspect, an object of the present embodiments is to provide a technique that can reduce humidity in an EFEM without significantly increasing power consumption. [Means for solving the problem]

[0013] To achieve the above object, one embodiment provides a dehumidifying EFEM including a FOUP (Fort-Opening Unified Pod) on which substrates are loaded, a main body communicating with the FOUP through a door and having a first space formed therein in which the substrates to be transported can stay, a dehumidification module arranged to communicate with the first space and dehumidify gas, a blower supplying the dehumidified gas to the first space, and a through pipe providing a passageway for the dehumidified gas between the dehumidifier and the blower.

[0014] The dehumidifying EFEM may further include an external circulation duct that provides a circulation passage for gas in the first space to be supplied to the dehumidifying module.

[0015] The dehumidifying EFEM may further include an internal circulation duct connecting the external circulation duct and the through pipe, and an external air intake port connected to the external circulation duct and adapted to draw in gas from the outside.

[0016] The dehumidification module may be a rotor-type dehumidifier including a dehumidification section and a regeneration section.

[0017] The body may emit gas to the outside, and the dehumidification module may be located within the body and arranged to communicate with the first space.

[0018] The body may further include a perforated plate for collecting gas, the perforated plate being disposed in a lower portion within the first space.

[0019] The dehumidifying EFEM may further include an exhaust device connected to the first space so as to communicate with gas and assist in discharging the gas.

[0020] The exhaust system may include one or more baffles that include openings.

[0021] The openings may be one or more formed uniformly on the baffle.

[0022] The dehumidifying EFEM may further include an exhaust pipe connected to the exhaust device and providing a gas exhaust passage.

[0023] Another embodiment provides a dehumidification module applicable to an EFEM including a main body having a front-opening unified pod (FOUP) on which substrates are loaded and a first space formed therein in which the substrates can be transported and communicate with the FOUP through a door, the dehumidification module including a dehumidifier disposed in communication with the first space and configured to dehumidify gas and supply the gas to the first space.

[0024] The dehumidification module may further include a filter for filtering the dehumidified gas.

[0025] The dehumidifier may include a dehumidifying filter section that filters outside air, an inhalation section that draws in gas filtered from the dehumidifying filter section, a dehumidification section that receives gas from the inhalation section and performs dehumidification, and a cooling section that cools the gas dehumidified by the dehumidification section.

[0026] The dehumidifier may include a regeneration gas inlet and a regeneration gas outlet through which the regeneration gas of the dehumidification section flows.

[0027] The dehumidification module may further include a blower for blowing gas, and a fan filter module including a main filter unit for filtering the blown gas.

[0028] Another embodiment provides an EFEM including a Fort-Opening Unified Pod (FOUP) on which substrates are loaded, a main body that communicates with the FOUP through a door and has a first space formed therein in which the substrates being transported can stay and that releases gas to the outside, a dehumidifier that is disposed within the main body and communicates with the first space and dehumidifies the gas, and a blower that is disposed within the main body and spaced apart from the dehumidifier and supplies the dehumidified gas to the first space.

[0029] In another embodiment, the EFEM may further include a through-pipe arranged to penetrate a second space formed between the dehumidifier and the blower and providing a passage for the dehumidified gas to move.

[0030] In another embodiment of the EFEM, the penetration pipe may be formed perpendicular to the ground and in a straight line.

[0031] In an EFEM according to another embodiment, the dehumidifier may comprise a rotor dehumidifier (Rotor) including a dehumidifying rotor.

[0032] In an EFEM according to another embodiment, the rotor dehumidifier includes a dehumidification section and a regeneration section, and the regeneration section may be disposed above the dehumidification section.

[0033] In the EFEM according to another embodiment, an exhaust device arranged in a lower part of the main body and configured to exhaust gas in the first space to the outside can be further included.

[0034] In the EFEM according to another embodiment, the gas in the first space can form a vertical laminar flow by the blower.

[0035] In the EFEM according to another embodiment, a control device that acquires humidity information of the gas in the first space and controls the air volume of the blower can be further provided.

[0036] In an EFEM according to another embodiment, the gas in the first space may have a relative humidity of 5% or less.

[0037] In an EFEM according to another embodiment, the main body may further include a perforated plate for collecting gas, the perforated plate being disposed at a lower portion within the first space.

[0038] In another embodiment of the EFEM, the space within the hoop can be purged with nitrogen.

[0039] In an EFEM according to another embodiment, the dehumidifier may be integrally coupled to the main body.

[0040] Yet another embodiment provides an EFEM including a Fort-Opening Unified Pod (FOUP) on which substrates are loaded, a main body communicating with the FOUP through a door and having a first space formed therein in which the substrates being transported can reside, a dehumidifier arranged to communicate with the first space and to dehumidify gas, a blower arranged within the main body and spaced apart from the dehumidifier and supplying the dehumidified gas to the first space, and a through pipe arranged to penetrate a second space formed between the dehumidifier and the blower and providing a passageway for the dehumidified gas.

[0041] In yet another embodiment, the EFEM may further include an external circulation duct that provides a circulation passage for gas in the first space to be supplied to the dehumidifier.

[0042] In yet another embodiment, the EFEM may further include an internal circulation duct connecting the external circulation duct and the through pipe, and an external air intake port connected to the external circulation duct for drawing in gas from the outside.

[0043] In yet another embodiment of the EFEM, the EFEM may further include a first valve for controlling the flow of gas between the dehumidifier and the through pipe, a second valve for controlling the flow of gas from the outside air intake, a third valve for controlling the flow of gas supplied from the external circulation duct to the dehumidifier, and a fourth valve for controlling the flow of gas in the internal circulation duct.

[0044] In yet another embodiment of the EFEM, when the EFEM operates in a first mode, the first valve, the second valve, and the third valve may be in an on (on) state, and the fourth valve may be in an off state.

[0045] In yet another embodiment of the EFEM, when the EFEM operates in a second mode, the first valve and the third valve may be in an on (on) state, and the second valve and the fourth valve may be in an off state.

[0046] In yet another embodiment of the EFEM, when the EFEM operates in a third mode, the fourth valve may be in an on state, and the first valve, the second valve, and the third valve may be in an off state.

[0047] In an EFEM according to yet another embodiment, in the third mode, the humidity of the gas circulating through the EFEM may be 1% or less.

[0048] In yet another embodiment, the EFEM may further include a control device that acquires humidity information of the gas in the first space, controls the on / off of the first to fourth valves, and controls the air volume of the blower.

[0049] In yet another embodiment of the EFEM, the penetration pipe may be formed perpendicular to the ground and in a straight line.

[0050] In an EFEM according to yet another embodiment, the dehumidifier is a rotor type dehumidifier (Rotor) including a dehumidifying section and a regenerating section, and the regenerating section may be disposed above the dehumidifying section.

[0051] In yet another embodiment of the EFEM, the dehumidifier may be disposed within the body and formed integrally therewith.

[0052] In yet another embodiment, an EFEM can be provided that includes a front opening unified pod (FOUP) on which substrates are loaded, a main body that communicates with the FOUP through a door and has a first space formed therein in which the substrates being transported can reside, a dehumidifier that dehumidifies gas supplied to the first space, a blower that is disposed within the main body and spaced apart from the dehumidifier and supplies the dehumidified gas to the first space, a through pipe that is disposed to pass through a second space formed between the dehumidifier and the blower and provides a passageway for the dehumidified gas, and a fixture structure that is coupled to the dehumidifier.

[0053] In an EFEM according to yet another embodiment, the jig structure may include a jig support portion coupled to the dehumidifier, and one or more jig side portions connected to the jig support portion.

[0054] In an EFEM according to yet another embodiment, the jig structure may further include one or more length adjustment portions that adjust the length of the one or more jig side portions.

[0055] In yet another embodiment of the EFEM, the dehumidifier can be coupled to a lower stage of the jig support portion of the jig structure.

[0056] In an EFEM according to yet another embodiment, the dehumidifier may be detachably coupled to the main body.

[0057] In the EFEM according to yet another embodiment, the dehumidifier and the main body are coupled together through a fixing bracket and a fixing means, and an airtight member may be disposed between the dehumidifier and the main body.

[0058] In yet another embodiment, the EFEM may further include an external circulation duct providing a circulation passage so that gas inside the first space is supplied to the dehumidifier, an internal circulation duct connecting the external circulation duct and the through pipe, and an external air intake port connected to the external circulation duct and drawing in gas from the outside.

[0059] In yet another embodiment of the EFEM, the EFEM may further include a first valve for controlling the flow of gas between the dehumidifier and the through pipe, a second valve for controlling the flow of gas from the outside air intake, a third valve for controlling the flow of gas supplied from the external circulation duct to the dehumidifier, and a fourth valve for controlling the flow of gas in the internal circulation duct.

[0060] In yet another embodiment of an EFEM, when the EFEM operates in a first mode, the first valve, the second valve, and the third valve are in an on (on) state and the fourth valve is in an off (off) state; when the EFEM operates in a second mode, the first valve and the third valve are in an on (on) state and the second valve and the fourth valve are in an off (off) state; and when the EFEM operates in a third mode, the fourth valve is in an on (on) state and the first valve, the second valve, and the third valve are in an off (off) state.

[0061] In the EFEM according to yet another embodiment, the main body can exhaust gas that has passed through the first space to the outside.

[0062] In the EFEM according to yet another embodiment, an exhaust device that sucks in gas within the first space and exhausts it to the outside can be further provided.

[0063] In yet another embodiment of the EFEM, the penetration pipe may be formed perpendicular to the ground and in a straight line.

[0064] In an EFEM according to yet another embodiment, the dehumidifier is a rotor type dehumidifier (Rotor) including a dehumidifying section and a regenerating section, and the regenerating section may be disposed above the dehumidifying section.

[0065] In yet another embodiment, an EFEM can be provided that includes a front opening unified pod (FOUP) on which substrates are loaded, a main body that communicates with the FOUP through a door and has a first space formed therein in which the substrates to be transported can be stored, a dehumidifier that is arranged to communicate with the first space and dehumidifies gas, a blower that is arranged within the main body and spaced apart from the dehumidifier and supplies the dehumidified gas to the first space, a through pipe that is arranged to pass through a second space formed between the dehumidifier and the blower and provides a passageway for the dehumidified gas, and a fixture structure to which the dehumidifier is attached at its outer upper part.

[0066] In an EFEM according to yet another embodiment, the jig structure may include a jig support portion coupled to the dehumidifier, and one or more jig side portions connected to the jig support portion.

[0067] In an EFEM according to yet another embodiment, the jig structure may further include one or more length adjustment portions that adjust the length of the one or more jig side portions.

[0068] In yet another embodiment of the EFEM, the fixture structure can be adjusted in height so that the dehumidifier can be coupled with the main body.

[0069] In an EFEM according to yet another embodiment, the dehumidifier may be detachably coupled to the main body.

[0070] In the EFEM according to yet another embodiment, the dehumidifier and the main body are coupled together through a fixing bracket and a fixing means, and an airtight member may be disposed between the dehumidifier and the main body.

[0071] In yet another embodiment of the EFEM, the inside of the fixture structure may be formed larger than the main body.

[0072] In yet another embodiment, the EFEM may further include a first valve for controlling the flow of gas within the penetration pipe.

[0073] In the EFEM according to yet another embodiment, the main body can exhaust gas that has passed through the first space to the outside.

[0074] In the EFEM according to yet another embodiment, an exhaust device that sucks in gas within the first space and exhausts it to the outside can be further provided.

[0075] In yet another embodiment of the EFEM, the penetration pipe may be formed perpendicular to the ground and in a straight line.

[0076] In an EFEM according to yet another embodiment, the dehumidifier is a rotor type dehumidifier (Rotor) including a dehumidifying section and a regenerating section, and the regenerating section may be disposed above the dehumidifying section.

[0077] In yet another embodiment, an EFEM can be provided that includes a front opening unified pod (FOUP) on which substrates are loaded, a main body that communicates with the FOUP through a door and has a first space formed therein in which the substrates being transported can stay and that discharges gas that has passed through the first space to the outside, a dehumidifier that is disposed in communication with the first space and dehumidifies the gas, a blower that is disposed within the main body and spaced apart from the dehumidifier and supplies the dehumidified gas to the first space, and an exhaust device that is connected in communication with the first space and helps discharge the gas.

[0078] In yet another embodiment of the EFEM, the exhaust device may include a first baffle including one or more openings of a first size, a second baffle including one or more openings of a second size larger than the first size and arranged in parallel to the first baffle, a third baffle including one or more openings of a third size larger than the second size and arranged in parallel to the second baffle, and a joining portion that joins gas that has passed through the third baffle.

[0079] In yet another embodiment of the EFEM, the exhaust system may include one or more baffles that include openings.

[0080] In yet another embodiment of the EFEM, the openings may be formed uniformly on the baffle in one or more locations.

[0081] In an EFEM according to yet another embodiment, the exhaust device may further include a lid for controlling the flow of incoming gas.

[0082] In yet another embodiment, the EFEM may further include an exhaust pipe connected to the exhaust device and providing a gas exhaust passage.

[0083] In an EFEM according to yet another embodiment, the exhaust pipe may be arranged to connect to one side or an underside of the main body.

[0084] In yet another embodiment of the EFEM, the exhaust pipe is connected to an exhaust fan that helps exhaust gas, and the surface of the blades of the exhaust fan can be coated with Teflon.

[0085] In yet another embodiment of the EFEM, the exhaust device can include a first baffle including one or more openings of a first size, a second baffle including one or more openings of a second size larger than the first size, a third baffle including one or more openings of a third size larger than the second size, and a connection portion that connects gas that has passed through the third baffle.

[0086] In yet another embodiment of the EFEM, the openings included in the first baffle, the second baffle, and the third baffle may be uniformly formed on each baffle, and the first baffle, the second baffle, the third baffle, and the interface may be arranged parallel to one another.

[0087] The EFEM according to yet another embodiment may further include an exhaust pipe that is connected to the joint portion so that gas can communicate with the exhaust pipe, and has a cross section formed in a circle larger than the third size.

[0088] In yet another embodiment of the EFEM, a through pipe may be further provided, the through pipe being arranged to penetrate a second space formed between the dehumidifier and the blower and providing a passage for the dehumidified gas to move.

[0089] In yet another embodiment of the EFEM, the penetration pipe may be formed perpendicular to the ground and in a straight line.

[0090] In yet another embodiment of the EFEM, the EFEM may further include an external connection duct arranged outside the main body to provide a passage for the dehumidified gas to move between the dehumidifier and the blower, and an external connection valve to control the flow of gas in the external connection duct.

[0091] In yet another embodiment, the EFEM may further include an outside air inlet that supplies outside air to the dehumidifier, an outside air valve that controls the flow of gas at the outside air inlet, a blower outside air inlet that supplies outside air to the blower, and a blower outside air valve that controls the flow of gas at the blower outside air inlet.

[0092] In the EFEM according to yet another embodiment, when the relative humidity of the outside air is 5% or more, the outside air valve and the external connection valve may be in an on state, and the blower outside air valve may be in an off state.

[0093] In the EFEM according to yet another embodiment, when the relative humidity of the outside air is 5% or less, the outside air valve and the external connection valve may be in an off state, and the blower outside air valve may be in an on state.

[0094] In an EFEM according to yet another embodiment, the dehumidifier is a rotor type dehumidifier (Rotor) including a dehumidifying section and a regenerating section, and the regenerating section may be disposed above the dehumidifying section.

[0095] In an EFEM according to yet another embodiment, the dehumidifier may be disposed inside the main body and formed integrally therewith.

[0096] In an EFEM according to yet another embodiment, the dehumidifier may be detachably coupled to the main body.

[0097] In the EFEM according to yet another embodiment, the gas in the first space may form a vertical laminar flow by the blower and have a relative humidity of 5% or less.

[0098] Yet another embodiment provides a dehumidifying FFU that includes a dehumidification module that receives outside air and dehumidifies it, and a fan filter module that filters the gas dehumidified by the dehumidification module and supplies it to a retention space in an EFEM chamber.

[0099] In yet another embodiment of the dehumidifying FFU, a main valve may be provided to control the flow of gas between the dehumidifying module and the fan filter module.

[0100] In yet another embodiment of a dehumidification FFU, the dehumidification module can include a dehumidification filter section that filters outside air, an intake section that draws in gas filtered from the dehumidification filter section, a dehumidification section that receives gas from the intake section and performs dehumidification, and a cooling section that cools the gas dehumidified by the dehumidification section.

[0101] In a dehumidification FFU according to still another embodiment, the dehumidification module can include a regeneration gas inlet and a regeneration gas outlet through which the regeneration gas of the dehumidification section flows.

[0102] In a dehumidification FFU according to yet another embodiment, the fan filter module can include a blower that blows gas, and a main filter section that filters the blown gas.

[0103] Another embodiment provides an EFEM including a Fort-Opening Unified Pod (FOUP) on which substrates are loaded, a main body that communicates with the FOUP through a door and has a holding space formed therein in which the substrates being transported can be held, and a dehumidifying FFU that receives outside air, dehumidifies and purifies it, and supplies it to the holding space.

[0104] In yet another embodiment of the EFEM, the dehumidifying FFU may include an Ultra Low Penetration Air (ULPA) filter.

[0105] In yet another embodiment, the EFEM may include a perforated plate that allows gas to flow uniformly within the retention space, and a collection section that collects gas that has passed through the perforated plate.

[0106] In yet another embodiment of the EFEM, the gas that has passed through the retention space can be discharged to the outside.

[0107] In yet another embodiment of the EFEM, the EFEM may further include a purification section that filters the gas that has passed through the retention space, a circulation section that provides a passageway so that the gas that has passed through the purification section can be supplied to a dehumidifying FFU, and a circulation valve that controls the flow of gas in the circulation section. Effect of the Invention

[0108] As described above, according to this embodiment, it is possible to provide a technique for reducing humidity inside an EFEM.

[0109] Furthermore, according to the present embodiment, it is possible to reduce the humidity in the EFEM while minimizing costs, and it is possible to reduce the humidity in key areas that affect the substrate without replacing the existing EFEM chamber.

[0110] According to this embodiment, the humidity in the EFEM can be reduced without occupying a large amount of space, and the humidity in the EFEM can be reduced without significantly increasing power consumption. [Brief description of the drawings]

[0111] [Figure 1] 1 is a side view showing a configuration of a process system according to an embodiment; [Diagram 2] 1 is a top view showing a configuration of a process system according to an embodiment; [Diagram 3] FIG. 1 illustrates a common technique for reducing humidity in an EFEM chamber. [Figure 4] FIG. 2 is a front view illustrating a first exemplary technique for reducing humidity in an EFEM chamber. [Diagram 5] FIG. 2 is a side view illustrating a first exemplary technique for reducing humidity in an EFEM chamber. [Figure 6]1A-1C are diagrams illustrating the operation of a first exemplary technique for reducing humidity in an EFEM chamber. [Figure 7] FIG. 13 is a diagram illustrating another embodiment of the first exemplary technique for reducing humidity in an EFEM chamber. [Figure 8] FIG. 13 is a diagram illustrating yet another embodiment of the first exemplary technique for reducing humidity in an EFEM chamber. [Figure 9] FIG. 14 illustrates a second exemplary technique for reducing humidity in an EFEM chamber. [Figure 10] FIG. 13 is a diagram illustrating operation of a second exemplary technique for reducing humidity in an EFEM chamber. [Figure 11] FIG. 13 is a diagram illustrating operation of a second exemplary technique for reducing humidity in an EFEM chamber. [Figure 12] FIG. 13 is a diagram illustrating operation of a second exemplary technique for reducing humidity in an EFEM chamber. [Figure 13] FIG. 13 is a diagram illustrating another embodiment of the second exemplary technique for reducing humidity in an EFEM chamber. [Figure 14] FIG. 13 is a diagram illustrating yet another embodiment of the second exemplary technique for reducing humidity in an EFEM chamber. [Figure 15] FIG. 13 illustrates a third exemplary technique for reducing humidity in an EFEM chamber. [Figure 16] FIG. 1 is a diagram for explaining a rotor type dehumidifier that can be used in an EFEM according to one embodiment. [Figure 17] FIG. 1 is a diagram for explaining a control device that can be used in an EFEM according to an embodiment. [Figure 18] FIG. 1 is a front view of a gentri crane. [Figure 19] FIG. 2 is a side view of the Gentry crane. [Figure 20] FIG. 1 is a diagram for explaining a gentri crane applied to an EFEM. [Figure 21] FIG. [Figure 22] FIG. 13 is a front view of the jig structure with its length adjusted. [Figure 23] FIG. [Figure 24] FIG. 13 is a diagram illustrating a jig structure coupled to a dehumidifier. [Diagram 25] FIG. 13 is a diagram illustrating a jig structure coupled to a dehumidifier. [Figure 26] FIG. 13 is a diagram for explaining the gas circulation operation of the EFEM coupled to the jig structure. [Figure 27] FIG. 13 is a diagram for explaining the non-gas circulation operation of the EFEM coupled to the jig structure. [Figure 28] FIG. 13 is a diagram illustrating a jig structure coupled to a dehumidifier. [Figure 29] FIG. 13 is a diagram for explaining the gas circulation operation of the EFEM coupled to the jig structure. [Diagram 30] FIG. 13 is a diagram for explaining the non-gas circulation operation of the EFEM coupled to the jig structure. [Diagram 31] FIG. 13 is a front view illustrating a fourth exemplary technique for reducing humidity in an EFEM chamber. [Diagram 32] FIG. 13 is a side view illustrating a fourth exemplary technique for reducing humidity in an EFEM chamber. [Diagram 33] FIG. 1 is a diagram for explaining an exhaust device that can be included in an EFEM according to one embodiment. [Diagram 34] FIG. 13 is a diagram for explaining gas exhaust through an exhaust device that may be included in an EFEM according to one embodiment. [Diagram 35] FIG. 13 is a diagram for explaining gas exhaust through an exhaust device that may be included in an EFEM according to one embodiment. [Diagram 36] FIG. 1 is a diagram for explaining an exhaust pipe and an exhaust fan that may be included in an EFEM according to an embodiment. [Figure 37] FIG. 1 is a diagram showing the configuration of an exhaust system that can be included in the EFEM. [Figure 38]FIG. 2 is a side view of an exemplary exhaust device that may be included in the EFEM. [Figure 39] FIG. 13 is a side view of another example exhaust system that may be included in the EFEM. [Diagram 40] FIG. 2 is a diagram showing the configuration of a dehumidifying FFU. [Diagram 41] FIG. 1 illustrates one example technique in which a dehumidifying FFU is applied to reduce humidity in an EFEM chamber. [Diagram 42] FIG. 13 is a diagram illustrating another example technique in which a dehumidifying FFU is applied to reduce humidity in an EFEM chamber. [Diagram 43] FIG. 13 illustrates yet another example technique in which a dehumidifying FFU is applied to reduce humidity in an EFEM chamber. [Diagram 44] FIG. 13 illustrates yet another example technique in which a dehumidifying FFU is applied to reduce humidity in an EFEM chamber. [Diagram 45] FIG. 1 is a diagram for explaining a control device used in an EFEM chamber to which a dehumidifying FFU is applied. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0112] Hereinafter, some embodiments will be described in detail with reference to the drawings. It should be noted that, when a reference symbol is added to a component in each drawing, the same component has the same symbol as much as possible even if it is displayed in another drawing. In addition, in the description of the present invention, if a detailed description of a related known configuration or function is judged to make the gist of the present invention unclear, the detailed description will be omitted.

[0113] Furthermore, when describing components, terms such as first, second, A, B, (a), (b), etc. may be used. Such terms are used to distinguish the components from other components, and do not limit the nature, order, sequence, etc. of the components. When a component is described as being "coupled," "coupled," or "connected" to another component, it should be understood that the component may be directly coupled or connected to the other component, but another component may be "coupled," "coupled," or "connected" between each component.

[0114] FIG. 1 is a side view showing the configuration of a process system according to an embodiment, and FIG. 2 is a top view showing the configuration of the process system according to an embodiment.

[0115] 1 and 2, a process system 100 may include an EFEM 110, a load lock apparatus 120, a transfer chamber 130, a process chamber 140, and the like.

[0116] The EFEM 110 is an interface module for supplying a substrate W, such as a wafer, to the process chamber 140 . The substrate W is loaded into and unloaded from the process system 100 through the EFEM 110 .

[0117] The substrate W to be processed resides in the EFEM before being transferred to the process chamber 140, and can be transferred to the process chamber 140 via the transfer chamber 130 when necessary.

[0118] The substrates W held in the EFEM may be sequentially transferred to the load lock device 120. The substrates W transferred to the load lock device 120 are then transferred to the transfer chamber 130, and a transfer robot disposed in the transfer chamber 130 transfers the substrates W to the process chamber 140 so that the substrates W can be processed.

[0119] The process system 100 may include a number of process chambers 140a, 140b, and 140c, and each process chamber 140a, 140b, and 140c may apply a different process to the substrate W. The transfer robot disposed in the transfer chamber 130 may input the substrate W into the first process chamber 140a to apply a first process to the substrate W, and may input the substrate W removed from the first process chamber 140a into the second process chamber 140b again to apply a second process to the substrate W. The transfer robot may then input the substrate W into the third process chamber 140c to apply a third process to the substrate W.

[0120] Doors D1, D2, D3, and D4 are arranged between the respective devices, and mixing of gases between the respective devices can be minimized. For example, a second door D2 can be arranged between the EFEM 110 and the load lock device 120, a third door D3 can be arranged between the load lock device 120 and the transfer chamber 130, and a fourth door D4 can be arranged between the transfer chamber 130 and the process chamber 140. Each of the doors D1, D2, D3, and D4 may be opened only when the substrate W is moving, and may be closed at other times.

[0121] The EFEM 110 may include an EFEM chamber 112, a FOUP 114, a load port module 116, etc.

[0122] A large number of substrates W can be loaded on the FOUP 114. The multiple substrates W can be transferred to the EFEM chamber 112 in sequence.

[0123] The FOUP 114 may be in communication with the EFEM chamber 112 through a first door D1. A transfer apparatus may be disposed within the EFEM chamber 112, and when the first door D1 is opened, the transfer apparatus may remove the substrate W from the FOUP 114 and transfer it to the load lock apparatus 120.

[0124] The EFEM 110 may include a plurality of FOUPs 114a, 114b, and 114c. Each of the FOUPs 114a, 114b, and 114c may communicate with the EFEM chamber 112 at a different position from the others. A transfer device disposed in the EFEM chamber 112 may sequentially open first doors D1a, D1b, and D1c disposed in each of the FOUPs 114a, 114b, and 114c, and sequentially unload the substrates W from each of the FOUPs 114a, 114b, and 114c.

[0125] The FOUP 114 may have a relatively narrow internal space compared to the EFEM chamber 112. The FOUP 114 has a relatively narrow space, so the gas atmosphere surrounding the substrate can be well adjusted. For example, an oxide film may form on the surface of a substrate such as a semiconductor wafer when exposed to moisture, oxygen, etc., but this problem can be minimized by purging the internal space of the FOUP 114 with N2 (nitrogen).

[0126] The load port module 116 supporting the FOUP 114 can supply N2 to the internal space of the FOUP 114. The load port module 116 can include an N2 supply device, N2 piping, an MFC (Mass Flow Controller), a filter, etc. N2 supplied from the N2 supply device can be transferred to the internal space of the FOUP 114 through the N2 piping, and at this time, the MFC can control the flow of the N2 fluid, and a filter in the N2 distribution path can control foreign matter.

[0127] According to such a structure in which the load port module 116 purges the internal space of the FOUP 114 with N2, the time required to lower the internal humidity of the FOUP 114 can be shortened, the effect of preventing contamination of the substrates W such as semiconductor wafers can be improved, the generation of static electricity during the transportation of the substrates W can be suppressed, the diffusion of particles can be prevented, and the possibility of corrosion of the substrates W due to particles can be reduced.

[0128] Meanwhile, moisture can oxidize or etch elements by reacting with fumes generated from process processing equipment, and can form foreign matter by reacting with fine reactive particles, so it is important to minimize moisture within the EFEM 110. The FOUP 114 has a relatively narrow space, making it easy to reduce humidity, but the EFEM chamber 112 has a relatively large space, making it difficult to reduce humidity.

[0129] Various techniques have been attempted to reduce humidity in such EFEM chambers, but most have had problems with being expensive or of limited utility.

[0130] FIG. 3 is a diagram illustrating a common technique for reducing humidity in an EFEM chamber.

[0131] Referring to FIG. 3, the N2 circulation type EFEM chamber 10 can circulate N2 50 in the space where the substrate W is exposed to control the humidity in the space.

[0132] An N2 supply pipe 311 may be connected to the upper side of the N2 circulation type EFEM chamber 10, and a differential pressure exhaust unit 312 may be connected to the lower side of the N2 circulation type EFEM chamber 10. A FOUP 20 may be connected to one side of the EFEM chamber 10.

[0133] The EFEM chamber 10 can supply N2 (50) to the internal space through the N2 supply pipe 311. The internal space of the EFEM chamber 10 may have a certain path through which N2 (50) can circulate, and the N2 (50) supplied through the N2 supply pipe 311 circulates in the internal space along that path.

[0134] The EFEM chamber 10 can adjust the air pressure in the internal space through the differential pressure exhaust unit 312, and adjust the N2(50) density in the internal space.

[0135] The FOUP 20 can be N2 purged through a load port module (not shown).

[0136] The internal space of the FOUP 20 can be connected to the EFEM chamber 10 by opening the door, and since both spaces are filled with N2 at this time, the humidity of the entire EFEM can be controlled to be low.

[0137] Meanwhile, the N2 circulating EFEM chamber 10 can be designed with a sealed structure since N2 must not leak to the outside. However, since the conventional EFEM chamber is not a sealed structure, a problem may arise that the EFEM chamber must be replaced in order to introduce the N2 circulating EFEM chamber 10. Generally, replacement of process equipment in a semiconductor manufacturing process results in huge costs and time losses. Therefore, it may be necessary to apply other technologies that can minimize such costs and time losses.

[0138] 4 and 5 are front and side views for explaining a first exemplary technique for reducing humidity in an EFEM chamber.

[0139] 4 and 5, an EFEM chamber 400 according to an embodiment may include a first space 410, a dehumidifier 420, a second space 430, a blower 440, and a filter 450, which are formed in a body 411. Also, an outside air intake 466 may be included.

[0140] The EFEM chamber 400 may also include a through pipe 461, and a first valve 4601 between the dehumidifier 420 and the through pipe 461. Here, the first valve 4601 may be referred to as a main valve or a main control valve. The EFEM chamber 400 may also include a second valve 4602 between the outside air intake 466 and the dehumidifier 420. The second valve 4602 may be referred to as an outside air valve.

[0141] In addition, the EFEM chamber 400 may include an exhaust device (not shown), a collection unit 480, and a perforated plate 481. Here, the perforated plate 481 may be a plate having perforations formed therein for collecting gas, and the collection unit 480 may refer to a space in which the gas is collected.

[0142] Gas dehumidified by the dehumidifier 420 may flow through the first space 410. Here, the gas may include, but is not limited to, air, nitrogen (N2), and other gases, and may be variously changed as necessary. The gas flowing through the first space 410 may be discharged to the outside. Also, the gas flowing through the first space 410 may be discharged through a lower portion of the first space 410.

[0143] By flowing dehumidified gas into the first space 410, it is possible to prevent the substrate W supplied to the first space 410 from being contaminated by moisture (water), and it is possible to prevent a decrease in the yield of wafer production.

[0144] The dehumidifier 420 may remove moisture from the gas. Here, the dehumidifier may receive gas from the outside, dehumidify the gas, and supply the dehumidified gas to the first space 410. The dehumidifier 420 may be disposed within the main body 411 and formed as an integrated unit, or may be disposed outside the main body 411 and formed as a detachable unit.

[0145] Here, the dehumidifier 420 may be a heater type, or may have one of the following forms: a moisture removal filter type dehumidifier, a compressor type dehumidifier, an electronic type dehumidifier, and a regenerative type dehumidifier. The dehumidifier 420 may be a rotor type dehumidifier, and the dehumidifier 420 may be detachable from the EFEM chamber 400 and used in a detachable manner.

[0146] The humidity of the gas passing through the dehumidifier 420 may be 10% or less, 9% or less, 8% or less, 7% or less, 6% or less, 5% or less, 4% or less, 3% or less, 2% or less, 1% or less, 0.5% or less, or 0.1% or less. Specifically, the humidity of the gas passing through the dehumidifier 420 may have a humidity of 5% or less, 4% or less, 3% or less, 2% or less, or 1% or less in an atmosphere of 20° C. to 30° C., where humidity may refer to relative humidity.

[0147] The second space 430 may refer to a space formed between the dehumidifier 420 and the blower 440. The second space 430 may be an empty space, and various configurations may be arranged therein as necessary. A control box used for the EFEM may also be arranged in the second space 430. Here, the control box may be a configuration that controls each configuration of the EFEM, or may be a configuration related to power supply to each configuration.

[0148] The blower 440 may be configured to supply the gas dehumidified from the dehumidifier 420 to the first space 410. The blower 440 may include a fan (442). The fan 442 rotates to supply the gas dehumidified by the dehumidifier 420 to the first space 410, and the gas that has gained power through the blower 440 may have a flow in a certain direction in the first space 410. As an example, the gas in the first space 410 may flow downward (toward the ground). That is, the gas in the first space 410 may form a vertical laminar flow flowing from the top to the bottom. The blower 440 may be disposed in the main body 411 and formed as an integral type, or may be disposed outside the main body 411 and formed as a detachable type.

[0149] The filter 450 can filter the gas coming out of the blower 440. That is, the dehumidified gas can be powered by the blower 440 and supplied to the first space 410 through the filter 450. The filter 450 can remove impurities such as dust particles or dirt contained in the dehumidified gas. The position of the filter 450 can be disposed between the first space 410 and the blower 440 as shown in FIG. 5, but is not limited thereto and can be changed in various ways as necessary. The filter 450 is disposed in the main body 411 and can be formed integrally with the blower 440 or can be formed detachably from the blower 440.

[0150] Here, the combination of the blower 440 and the filter 450 may be called a fan filter unit (FFU).

[0151] The through pipe 461 can be arranged to penetrate the second space 430, and the dehumidified gas from the dehumidifier 420 can move to the blower 440 through the through pipe 461, and the gas supplied to the blower 440 can be supplied to the first space 410 through the filter 450.

[0152] The through pipe 461 may be arranged to penetrate the second space 430, and may also be arranged to penetrate a configuration arranged in the second space 430. As an example, the through pipe 461 may be arranged to penetrate a control box used in the EFEM.

[0153] The through pipe 461 may be curved or straight. The through pipe 461 may also be arranged in a horizontal, vertical, or inclined direction. As an example, the through pipe 461 may be straight and arranged in a direction perpendicular to the ground, and such a through pipe 461 may be called a straight pipe.

[0154] The first valve 4601 can control the flow of gas between the dehumidifier 420 and the through pipe 461. Specifically, when the first valve 4601 is on, gas can be circulated, and when the first valve 4601 is off, gas flow may not occur.

[0155] The second valve 4602 may be configured to control the flow of outside air provided to the dehumidifier 420 .

[0156] The first valve 4601 and the second valve 4602 can be controlled by a controller.

[0157] The exhaust device can play a role of discharging the gas in the first space 410 to the outside. Specifically, the exhaust device can be disposed in the lower part of the EFEM chamber 400, and can easily discharge the gas that has passed through the first space 410 to the outside. In addition, the exhaust device can suck the gas in the first space 410 to the lower part, and can make the flow of the gas in the first space 410 smooth. The exhaust device can be disposed in the main body 411 and formed as an integral type, or can be disposed outside the main body 411 and formed as a detachable type.

[0158] The outside air intake 466 may be configured to draw in gas from the outside, and the gas drawn in through the outside air intake 466 may be supplied to the first space 410 through the dehumidifier 420.

[0159] In addition, a collecting portion 480 that collects the airflow and a perforated plate 481 used to collect the airflow may be disposed in the lower portion of the first space 410.

[0160] The dehumidifier 420 can be used as a detachable type.

[0161] The main body 411 may include a first space 410 which is an internal space, and the main body 411 may be equipped with a blower 440 and a filter 450, and the dehumidifier 420 and the exhaust device may be integrally connected to the main body 411 or detachably connected to the main body 411 and may be disposed inside the main body 411.

[0162] In addition, the components of the EFEM chamber 400, such as the dehumidifier 420, the through pipe 461, the FFUs 440 and 450, the main body 411 including the first space 410, and the exhaust device, may be arranged in a housing (not shown). Here, the housing may be a configuration that forms the outer shape of the EFEM chamber 400, and the housing 490 can be used in any of the cases where the dehumidifier 420 and the exhaust device are connected to the main body 411 as an integral unit, where they are connected in a detachable manner, and where they are arranged inside the main body (411), and can include all of the piping and the like outside the main body.

[0163] The dehumidifier 420 is a component of the EFEM chamber 400 and may be integrally manufactured and positioned therein.

[0164] 4, the EFEM chamber 400 can include one or more through-pipes 461. This can also include one or more of a blower 440, a fan 442, a filter 450, a first valve 4601, and the like.

[0165] FIG. 6 is a diagram illustrating the operation of a first exemplary technique for reducing humidity in an EFEM chamber.

[0166] Referring to FIG. 6, the dehumidifier 420 may include a regenerating gas inlet 468 and a regenerating gas outlet 467 .

[0167] The dehumidifier 420 may be a heater type, and may have one of the following forms: a moisture removal filter type dehumidifier, a compressor type dehumidifier, an electronic type dehumidifier, and a regenerative type dehumidifier. The dehumidifier 420 may be a rotor type dehumidifier. The dehumidifier 420 may be supplied with gas for regenerating the dehumidifying rotor through a regenerative gas inlet 468, and the gas used for regenerating the dehumidifying rotor may be discharged through a regenerative gas outlet 467. The regenerating part of the dehumidifying rotor provided in the rotor type dehumidifier may be disposed in the upper part of the dehumidifier 420, and the dehumidifying part of the dehumidifying rotor may be disposed in the lower part of the dehumidifier 420. The regenerative container gas inlet 468 and the regenerative gas outlet 467 may be disposed above the outside air inlet 466 and the external circulation duct 465. The dehumidifier 420 may be disposed within the main body 411 and formed as an integral part, or may be disposed outside the main body 411 and formed as a detachable type.

[0168] In addition, the dehumidifier 420 may include a heater (not shown), which is supplied with the regeneration gas to increase the temperature of the regeneration gas and supply the high-temperature regeneration gas to the regeneration unit. The high-temperature regeneration gas passes through a dehumidification rotor disposed in the regeneration unit to regenerate the dehumidification rotor. For example, the temperature of the gas discharged through the regeneration gas outlet 467 may be 60° C. or higher. Here, the regeneration gas may include air, nitrogen (N2), etc., but is not limited thereto, and may be variously changed as necessary.

[0169] Here, the flow of the regenerating gas can be expressed as RC.

[0170] Next, the gas can be sucked in through the outside air intake 466, and the gas can be supplied to the dehumidifier 420. The flow of outside air can be controlled by a second valve 4602. The dehumidified air can be supplied to the through pipe 461, and can be supplied to the first space 410 through the blower 440 and the filter 450. Then, the gas that has passed through the first space 410 is collected in the collecting section 480 through the perforated plate 481, and is discharged to the outside.

[0171] The flow of gas supplied from the dehumidifier 420 to the through pipe 461 can be controlled by a first valve 4601 .

[0172] Here, an exhaust device can be further used when discharging the gas to the outside.

[0173] The flow of gas going through the dehumidification process can be expressed as RA.

[0174] FIG. 7 is a diagram illustrating another embodiment of the first exemplary technique for reducing humidity in an EFEM chamber.

[0175] Referring to FIG. 7, the EFEM chamber 700 may further include an FFU fresh air intake pipe 766 and an FFU fresh air intake pipe valve 7601.

[0176] Furthermore, in the EFEM chamber 700, the first valve 4601 and the second valve 4602 may be in an off state (closed state), and gas may be supplied through the FFU fresh air intake pipe 766. Here, the flow of gas in the FFU fresh air intake pipe 766 may be controlled by the FFU fresh air intake pipe valve 7601.

[0177] The gas supplied through the FFU external intake pipe 766 can be immediately supplied to the blower 440 and can be supplied to the first space 410 through the filter 450.

[0178] The gas supplied through the FFU outside air intake pipe 766 can be gas that already has low humidity. In this case, the operation of the dehumidifier 420 can be stopped, which has the effect of preventing unnecessary power consumption.

[0179] In addition, the FFU outside air intake pipe 766 can be connected to the through pipe 461.

[0180] Here, the flow of gas that does not pass through the dehumidifier 420 can be represented as RD.

[0181] FIG. 8 is a diagram illustrating yet another embodiment of the first exemplary technique for reducing humidity in an EFEM chamber.

[0182] 8, the EFEM chamber 800 can include one through pipe 861. This allows the first valve 4601, the blower 840, the filter 450, etc. to be configured as one.

[0183] FIG. 9 is a diagram illustrating a second exemplary technique for reducing humidity in an EFEM chamber.

[0184] 9, in the EFEM chamber 900, the through pipe 461 may be configured as one or more. Therefore, the configuration corresponding to the through pipe 461 may also be configured as one or more. For example, the blower 440, the fan 442, the filter 450, the internal circulation duct 462, the fourth valve 4604, etc. may be configured as one or more.

[0185] In addition, the EFEM chamber 900 of this embodiment can include a purification section 463, an external circulation duct 465, an internal circulation duct 462, an outside air intake port 466, a regeneration gas intake port 468, a regeneration gas exhaust port 467, a first valve 4601, a second valve 4602, a third valve 4603, and a fourth valve 4604.

[0186] Additionally, a pump (not shown) can be added for gas flow in the external circulation duct 465 .

[0187] The outside air intake 466 may be configured to draw in gas from the outside, and the outside air intake 466 may be connected to an external circulation duct 465 .

[0188] The external circulation duct 465 may be configured to supply the gas that has passed through the first space 410 to the dehumidifier 420, providing a circulation path for the gas.

[0189] The internal circulation duct 462 may be configured to supply the gas directly to the through pipe 461, rather than passing the gas through the first space 410 to the dehumidifier 420, thereby providing an internal circulation passage for the gas.

[0190] Purification section 463 may be configured to receive the gas collected in collection section 480 arranged in the lower stage of first space 410 and purify the gas through a filter.

[0191] The first valve 4601 can control the flow of gas between the dehumidifier 420 and the through pipe 461. The second valve 4602 can control the flow of gas from the outside air intake 466. The third valve 4603 can control the flow of gas supplied to the dehumidifier 420 from the outside circulation duct 465. The fourth valve 4604 can control the flow of gas in the inside circulation duct 462. Here, the first valve 4601 can be referred to as a main valve or a main control valve. The second valve 4602 can be referred to as an outside air valve. The third valve 4603 can be referred to as an outside circulation valve. The fourth valve 4604 can be referred to as an inside circulation valve.

[0192] The first valve 4601, the second valve 4602, the third valve 4603, and the fourth valve 4604 are valves that can be controlled on / off, and can be controlled by a control device (not shown).

[0193] The dehumidifier 420 may be a heater type, or may have one of the following forms: a moisture removal filter type dehumidifier, a compressor type dehumidifier, an electronic dehumidifier, and a regenerative type dehumidifier. In addition, a rotor type dehumidifier can be used as the dehumidifier 420. In addition, the dehumidifier 420 may be supplied with gas for regenerating the dehumidifying rotor through a regenerative gas inlet 468, and the gas used for regenerating the dehumidifying rotor may be discharged through a regenerative gas outlet 467. A regenerating part of the dehumidifying rotor included in the rotor type dehumidifier may be disposed at the top of the dehumidifier 420, and a dehumidifying part of the dehumidifying rotor may be disposed at the bottom of the dehumidifier 420. In addition, the regenerative container gas inlet 468 and the regenerative gas outlet 467 may be disposed above the outside air inlet 466 and the external circulation duct 465. The dehumidifier 420 may be disposed within the main body 411 and formed as an integral part, or may be disposed outside the main body 411 and formed as a detachable type.

[0194] The dehumidifier 420 may also include a heater (not shown), which is supplied with the regeneration gas to increase the temperature of the regeneration gas and supply the high-temperature regeneration gas to the regeneration unit. The high-temperature regeneration gas passes through a dehumidification rotor disposed in the regeneration unit to regenerate the dehumidification rotor. For example, the temperature of the gas discharged through the regeneration gas outlet 467 may be 60° C. or higher. The regeneration gas may include, but is not limited to, air, nitrogen (N2), and the like, and may be variously changed as necessary.

[0195] In this way, the EFEM chamber 900 can operate in a circulation type in which the gas that has passed through the first space 410 is dehumidified by the dehumidifier 420 and then resupplied to the first space 410. The dehumidifier 420 can also be used as a detachable type that can be separated from the EFEM chamber 900.

[0196] In addition, the main body 411 may include a first space 410 which is an internal space, and the main body 411 may be equipped with a blower 440 and a filter 450, and the dehumidifier 420 and the exhaust device may be integrally connected to the main body 411 or detachably connected to the main body 411 and may be disposed inside the main body 411.

[0197] FIG. 10 is a diagram illustrating a mode of operation of a second exemplary technique for reducing humidity in an EFEM chamber.

[0198] 10, in a first mode of the EFEM chamber 900, the first valve 4601, the second valve 4602, and the third valve 4603 may be in an on state, and the fourth valve 4604 may be in an off state, where the first mode may be referred to as an inflow mode.

[0199] In the EFEM chamber 900 according to this embodiment, the gas flowing through the first space 410 may be re-supplied to the dehumidifier 420 through the external circulation duct 465. The gas re-supplied to the dehumidifier 420 may be dehumidified and then re-supplied to the first space 410, so that the gas may be circulated.

[0200] Specifically, the gas passing through the first space 410 may be supplied to the dehumidifier 420 again through the external circulation duct 465, and a purification unit 463 for purifying the gas in the external circulation duct 465 may be disposed. For example, the gas may flow to a lower portion after passing through the first space 410, may be collected in the collection unit 480 through the perforated plate 481, may be purified through the purification unit 463, and may be supplied to the dehumidifier 420 through the external circulation duct 465. The external circulation duct 465 may be connected to the through pipe 461 through the internal circulation duct 462. Here, the perforated plate 481 may be a plate having perforations formed therein to collect the gas, and the collection unit 480 may refer to a space in which the gas is collected.

[0201] In other words, in the first mode of the EFEM chamber 900, the gas passing through the first space 410 passes through the perforated plate 481, is collected in the collection unit 480, passes through the purification unit 463, and can be transported through the external circulation duct 465, and the gas flowing in from the outside air intake 466 can be combined with the gas passing through the external circulation duct 465 and supplied to the dehumidifier 420. Then, the dehumidified gas can be supplied to the first space 410 again through the through pipe 461, the blower 440, and the filter 450.

[0202] Here, since the fourth valve 4604 is in the OFF state, gas may not flow through the internal circulation duct 462 .

[0203] The dehumidifier 420 may be a heater type, and may have one of the following forms: a moisture removal filter type dehumidifier, a compressor type dehumidifier, an electronic type dehumidifier, and a regenerative type dehumidifier. The dehumidifier 420 may be a rotor type dehumidifier, and may receive regenerative gas through a regenerative gas inlet 468, regenerate the dehumidification rotor with the regenerative gas, and discharge the regenerative gas to a regenerative gas outlet 467.

[0204] Referring to FIG. 10, RC may represent the flow of regenerating gas, RB may represent the flow of gas entering through the outside air intake 466, and RA may represent the flow of gas passing through the dehumidifier 420.

[0205] FIG. 11 is a diagram illustrating a mode of operation of a second exemplary technique for reducing humidity in an EFEM chamber.

[0206] 11, in the second mode of the EFEM chamber 900, the first valve 4601 and the third valve 4603 may be in an on state, and the second valve 4602 and the fourth valve 4604 may be in an off state. This may prevent outside air from flowing in through the outside air intake 466, and may prevent gas from flowing through the internal circulation duct 462. The second mode of the EFEM chamber 900 may also be referred to as a dehumidification mode.

[0207] In the second mode of the EFEM chamber 900, the gas passing through the first space 410 is collected in the collection section 480 through the perforated plate 481, passes through the purification section 463, and can be supplied to the dehumidifier 420 through the external circulation duct 465, and such gas can be supplied again to the first space 410 through the through pipe 461, the blower 440, and the filter 450.

[0208] FIG. 12 is a diagram illustrating a mode of operation of a second exemplary technique for reducing humidity in an EFEM chamber.

[0209] 12, in a third mode of the EFEM chamber 900, the fourth valve 4604 may be in an on state, and the first valve 4601, the second valve 4602, and the third valve 4603 may be in an off state, where the third mode may be referred to as a circulation mode.

[0210] In the third mode of the EFEM chamber 900, the gas passing through the first space 410 is collected by the collecting section 480 through the perforated plate 481, passes through the purifying section 463, and is supplied to the internal circulation duct 462 through the external circulation duct 465, and the gas passes through the internal circulation duct 462 and can be supplied to the first space 410 again through the through pipe 461, the blower 440, and the filter 450. In addition, the third mode has the effect of saving electricity by circulating the gas without passing through the dehumidifier 420, since further dehumidification is not necessary if the humidity of the gas circulating in the EFEM chamber 900 is sufficiently low.

[0211] Here, in the third mode, the humidity of the gas circulating in the EFEM chamber 900 may be 10% or less, 9% or less, 8% or less, 7% or less, 6% or less, 5% or less, 4% or less, 3% or less, 2% or less, 1% or less, 0.5% or less, or 0.1% or less. Specifically, the humidity of the gas may have a humidity of 5% or less, 4% or less, 3% or less, 2% or less, or 1% or less in an atmosphere of 20°C to 30°C, where humidity may mean relative humidity. Also, exemplarily, a control device (not shown) that controls the operation of the EFEM chamber 900 may control the on / off of the first to fourth valves 4601, 4602, 4603, and 4604 according to the humidity of the gas.

[0212] Illustratively, the EFEM chamber 900 can operate in the first mode or the second mode and enter the third mode when the humidity of the circulating gas falls below 1%.

[0213] Here, RD may refer to the flow of gas that does not pass through the dehumidifier 420.

[0214] FIG. 13 is a diagram illustrating another embodiment of a second exemplary technique for reducing humidity in an EFEM chamber.

[0215] 13, the EFEM chamber 1300, which includes an external circulation duct 465, an internal circulation duct 462, and an external air intake 466, and is configured to circulate gas, may be formed with one through-pipe 1361. As a result, the components corresponding to the through-pipe 1361, such as a first valve 4601 (referred to as a main valve or a main control valve), a blower 1340, a fan 1342, a filter 450, the first valve 4601, and the internal circulation duct 462, may also be configured as one. The EFEM chamber 1300 may be an example of the EFEM chamber 112.

[0216] The main body 411 may include a first space 410 which is an internal space, and the main body 411 may include a blower 1340 and a filter 450, and the dehumidifier 420 and the exhaust device may be integrally connected to the main body 411, may be detachably connected to the main body 411, or may be disposed inside the main body 411.

[0217] FIG. 14 is a diagram illustrating yet another embodiment of the second exemplary technique for reducing humidity in an EFEM chamber.

[0218] 14, the internal circulation duct 462 of the EFEM chamber 1400 can be connected to the blower 1340. As a result, the gas that has passed through the external circulation duct 465 is supplied to the internal circulation duct 462, and then the gas is supplied to the blower 1340, and can be supplied to the first space 410 without passing through the through pipe 461.

[0219] FIG. 15 illustrates a third exemplary technique for reducing humidity in an EFEM chamber.

[0220] 15, each component of the EFEM chamber 1500 can be integrally arranged in a housing 1510. Specifically, the dehumidifier 420, the through pipe 461, the blower 440, the filter 450, the main body 411, and the collector 480 can be arranged in the housing 1410. In addition, the purifier 463, the external circulation duct 465, the outside air intake 466, the regeneration gas intake 468, and the regeneration gas exhaust 467 may be arranged in the housing 1410 or outside the housing 1410. The EFEM chamber 1500 can be an example of the EFEM chamber 112.

[0221] That is, the EFEM chamber 1500 may be formed as a circulation type in which gas circulates through the first space 410 and the dehumidifier 420 through the external circulation duct 465 and the internal circulation duct 462, and in the EFEM chamber 1500, the dehumidifier 420 may be disposed within the housing 1510 and configured as an integrated unit.

[0222] FIG. 16 is a diagram for explaining a rotor type dehumidifier that can be used in the EFEM according to one embodiment.

[0223] The dehumidifier 420 according to an embodiment may be formed as a rotor type dehumidifier and may include a dehumidification rotor 1600. Here, the dehumidification rotor 1600 may include a dehumidification unit 1610 and a regeneration unit 1620. Here, the dehumidification unit 1610 may be configured to remove moisture contained in the gas that needs to be dehumidified by passing the gas through the dehumidification rotor 1600. The regeneration unit 1620 may be configured to regenerate the dehumidification rotor 1600 whose dehumidification capacity has decreased.

[0224] The dehumidifying rotor 1600 can be made of materials including silica gel, polymers, zeolites, and the like.

[0225] The dehumidification rotor 1600 can rotate within the dehumidifier 420, and a portion of the dehumidification rotor 1600 whose dehumidification capacity has decreased can be positioned in the regeneration section 1620 and regenerated, and the dehumidification rotor 1600 can dehumidify gas in the dehumidification section 1610.

[0226] In the regeneration section 1620, high-temperature gas may pass through the dehumidification rotor 1600. Absorbed moisture may be removed by passing high-temperature gas through the dehumidification rotor 1600. Here, the regeneration section 1620 of the dehumidifier 420 may be supplied (RC) with regeneration gas from the EFEM chamber 112. Here, in order to generate high-temperature gas, the dehumidifier may include a regeneration gas inlet, a heater capable of heating the regeneration gas, and a fan for gas flow. Exemplarily, the temperature of the regeneration gas used for regeneration of the dehumidification rotor 1600 may be 60°C to 200°C.

[0227] Furthermore, the rotation of the dehumidifying rotor 1600, the air volume of the fan in the dehumidifier, the temperature of the heater, etc. can be controlled by a control device (not shown).

[0228] In the dehumidification section 1610, gas that needs to be dehumidified can pass through the dehumidification rotor 1600, and the gas that needs to be dehumidified here can be gas RA that has passed through the first space 410 in the main body 411 and gas RB that has entered from the outside.

[0229] FIG. 17 is a diagram for explaining a control device that can be used in the EFEM according to one embodiment.

[0230] The controller 1700 may be configured to process information regarding the EFEM, and may also be configured to control the operation of the EFEM and EFEM chamber components.

[0231] The control device 1700 may be disposed outside the EFEM or EFEM chamber, may be disposed in a control box used in the EFEM chamber, or may be disposed in the second space 430 in the EFEM chamber. That is, the through pipe 461 may be formed to pass through the control device 1700.

[0232] Referring to FIG. 17, the control device 1700 may include an instruction processing unit 1710, a temperature acquisition unit 1721, a humidity acquisition unit 1722, a pressure acquisition unit 1723, a blower operation controller 1730, a memory unit 1741, an input unit 1741, other operation controllers 1750, a valve operation controller 1760, a dehumidifier controller 1770, a dehumidification controller 1771, a regeneration controller 1772, an air volume controller 1773, a communication module 1780, and a screen display unit 1790.

[0233] The instruction processing unit 1710 may be a component (eg, a processor) that processes signals received from each component.

[0234] The temperature acquisition unit 1721 may be configured to acquire temperature information by measuring the temperatures of the EFEM and the EFEM chamber. The temperature acquisition unit 1721 may be configured to acquire temperatures of the components of the EFEM, such as the outside air intake, the external circulation duct, the internal circulation duct, the dehumidifier, the regenerating unit and the dehumidifying unit in the dehumidifier, the heater in the dehumidifier, the blower, the filter, the collecting unit, the perforated plate, the purifying unit, the through pipe, each valve, the first space in the main body, etc. To acquire the temperatures, a temperature sensor may be disposed in each component of the EFEM and the EFEM chamber.

[0235] The humidity acquisition unit 1722 may be configured to measure the humidity of the EFEM and the EFEM chamber to acquire humidity information. It may be configured to acquire humidity of the components of the EFEM, such as the outside air intake, the external circulation duct, the internal circulation duct, the dehumidifier, the regenerator and dehumidifier in the dehumidifier, the heater in the dehumidifier, the blower, the filter, the collector, the perforated plate, the purifier, the through pipe, each valve, and the first space in the main body. To acquire humidity, a humidity sensor may be disposed in each component of the EFEM and the EFEM chamber.

[0236] The pressure acquisition unit 1723 may be configured to measure the pressure of the EFEM and the EFEM chamber to acquire pressure information. It may be configured to acquire pressure of the components of the EFEM, such as the outside air intake, the external circulation duct, the internal circulation duct, the dehumidifier, the regenerating unit and the dehumidifying unit in the dehumidifier, the heater in the dehumidifier, the blower, the filter, the collecting unit, the perforated plate, the purifying unit, the through pipe, each valve, the first space in the main body, etc. To acquire the pressure, a pressure sensor may be disposed in each component of the EFEM and the EFEM chamber.

[0237] The blower operation controller 1730 may be configured to control the operation of the blower of the EFEM chamber. That is, the blower operation controller 1730 can control the on / off or wind strength of the blower.

[0238] The storage unit 1741 may be configured to store the operation of each component of the EFEM chamber, or may be configured to save process recipes.

[0239] The input unit 1742 may be configured to input a command to operate each component of the EFEM and the EFEM chamber. The input unit 1642 may also be configured to transmit the input command to the command processing unit 1610.

[0240] The other operation controller 1750 may be configured to control the operation of further components of the EFEM chamber. For example, the other operation controller 1650 may control the operation of an ion controller that controls an ion bar. Here, the ion bar may be disposed at the upper portion of the space in the main body of the EFEM chamber, and may remove static electricity generated by the gas flowing in the space through which the gas flows. Here, the ion bar may be applied in various forms.

[0241] The valve operation controller 1760 may be configured to control the on / off of the valves included in the EFEM chamber. That is, the operation mode of the EFEM chamber can be controlled by the valve operation controller 1760, and the valve operation controller 1760 can control the main valve, outside air valve, external circulation valve, internal circulation valve, etc.

[0242] The dehumidifier controller 1770 may be configured to control the operation of the dehumidifier in the EFEM chamber, and the dehumidifier controller 1770 may include a dehumidification controller 1771, a regeneration controller 1772, and an air volume controller 1773. The dehumidification controller 1771 may be configured to control the dehumidification unit of the dehumidifier, the regeneration controller 1772 may be configured to control the regeneration unit of the dehumidifier, and the air volume controller 1773 may be configured to control the air volume of the gas supplied to the dehumidifier. Here, the dehumidification controller 1771 may be configured to determine the degree of dehumidification of air in the dehumidifier and control the size and position of the dehumidification unit, and the regeneration controller 1772 may be configured to determine the degree of regeneration of the dehumidifier and control the size and position of the regeneration unit, and can control the heater, fan, etc. used in the regeneration unit. The air volume controller 1773 can control the air volume by controlling a fan arranged in the dehumidifier used for the inflow and exhaust of regeneration air.

[0243] The dehumidifier controller 1770 (regeneration controller and dehumidification controller) can also control the rotation of the dehumidification rotor in a rotor-type dehumidifier.

[0244] The communication module 1780 may be configured to communicate with the outside world.

[0245] The screen display unit 1790 may be configured to display on a screen the status inside the EFEM chamber, such as the process recipe, the temperature, humidity, and pressure conditions inside the EFEM chamber, the airflow of the dehumidifier and blower, and whether the valves are on or off.

[0246] Fig. 18 is a front view of the Gentry crane, Fig. 19 is a side view of the Gentry crane, and Fig. 20 is a diagram for explaining the Gentry crane applied to the EFEM.

[0247] 18, 19 and 20, the gentree crane 5000 may include a crane support 5100, a crane side 5200, a trolley 5300, a crane wheel 5400, and a crane lower stage 5500. The gentree crane 5000 may also include a crane coupling 5310 that is coupled to the trolley 5300 and may be coupled to the dehumidifier 420.

[0248] A Gantry Crane (5000) may be a structure used to traverse an object or a working space, and may be a structure used to transport a dehumidifier 420 used in an EFEM.

[0249] The crane support 5100 may be configured to be disposed on the upper part of the gentree crane 5000 and may be configured to support the weight of an object to be transported by the gentree crane 5000.

[0250] The crane sides 5200 can form sides of the gentry crane 5000, and the gentry crane 5000 can include one or more crane sides 5200.

[0251] 18 and 19, the crane side portion 5200 is formed in a straight line shape when viewed from the front and in a curved shape when viewed from the side, and the gentree crane 5000 is provided with four crane side portions 5200, but is not limited thereto and may be modified in various ways as necessary. The crane side portion 5200 can support the weight of an object to be transported together with the crane support portion 5100.

[0252] The trolley 5300 may be configured to be connected to the crane support 5100, and can move while connected (or coupled, etc.) to the crane support 5100. The trolley 5300 can move in forward, backward, left and right directions, and can also move up and down as necessary. The trolley 5300 may include wheels and can be connected to the crane coupling 5310 through the wheels, but is not limited thereto, and can be changed depending on the weight of the object to be transported, the situation of the user, etc.

[0253] The crane connector 5310 may be configured to connect the trolley 5300 and an object to be transported. Here, the object to be transported may be a dehumidifier 420 used in the EFEM. The crane connector 5310 may be connected to a wheel formed on the dehumidifier 420, but is not limited thereto, and may be connected to the object to be transported in various ways.

[0254] A variety of configurations and connection methods for the crane connection portion 5310 can be used.

[0255] The crane wheel unit 5400 may be coupled to the crane side unit 5200 or may be equipped with wheels. Furthermore, the gentree crane 5000 may be equipped with one or more crane wheel units 5400, each of which may be coupled to one or more crane side units 5200, and the crane wheel unit 5400 may be disposed at a lower stage of the crane side unit 5200 so as to be in contact with the bottom. Furthermore, the crane wheel unit 5400 may facilitate the movement of the gentree crane 5000 through the rotation of the wheels.

[0256] The crane lower section 5500 may be configured to connect the crane side sections 5200 to the sides of the gentree crane 5000, and may be disposed under the gentree crane 5000. The crane lower section 5500 may enable the gentree crane 5000 to stably stand on the bottom.

[0257] The gentry crane 5000 can be moved by the crane wheel section 5400, and therefore can be called a mobile gentry crane.

[0258] The Gentree crane 5000 can be connected to or coupled and separated from the dehumidifier 420 used in the EFEM, and can also be detachably connected. The Gentree crane 5000 can be used to install the dehumidifier 420 in the body 411 of the EFEM chamber to supply dehumidified gas to the EFEM chamber.

[0259] The gen tree crane 5000 can be separated and removed from the EFEM chamber once installation of the dehumidifier 420 is complete and the EFEM chamber can be used while the gen tree crane 5000 is maintained if desired.

[0260] The dehumidifier 420 and the main body 411 of the EFEM chamber can be detachably connected or coupled, and an airtight member (not shown) for preventing the outflow of gas and the inflow of external gas can be disposed between the dehumidifier 420 and the main body 411. The airtight member can be connected or coupled through the dehumidifier 420 and the main body 411 as well as a fixing bracket and a fixing means.

[0261] The EFEM and EFEM chamber to which the gentree crane 5000 can be applied may be any of the EFEM and EFEM chambers described above, and is not limited thereto, and EFEM and EFEM chambers in various cases may be used.

[0262] Specifically, the EFEM chamber may be of a non-circulating type in which gas is discharged to the outside, or of a circulating type in which gas that has passed through the first space 410 is supplied again to the dehumidifier 420.

[0263] The dehumidifier 420 can be installed in the main body 411 of the EFEM chamber by a gentree crane 5000, and the purification section 463, the external circulation duct 465, the internal circulation duct 462, the external air intake 466, the regeneration gas exhaust 467, etc. can be connected to the dehumidifier 420 and the main body 411.

[0264] Figure 21 is a front view of the jig structure, Figure 22 is a front view of the jig structure with the length adjusted, and Figure 23 is a side view of the jig structure.

[0265] 21 to 23, the jig structure 6000 may include a jig support portion 6100, a jig side portion 6200, a length adjustment portion 6300, a jig wheel portion 6400, and a jig lower portion 6500.

[0266] The jig structure 6000 may be a structure used to determine the position of an object and guide it to be fixed at that position. It may also be a structure used to transport the dehumidifier 420 used in the EFEM.

[0267] The jig support portion 6100 may be configured to be disposed on top of the jig structure 6000, and may be configured to support the weight of an object transferred by the jig structure 6000.

[0268] The fixture side 6200 can form a side of the fixture structure 6000, and the fixture structure 6000 can include one or more fixture sides 6200.

[0269] The jig side portion 6200 is formed to be linear when viewed from the front and linear when viewed from the side, and the jig structure 6000 includes four jig side portions 6200, but is not limited to this and may be variously modified as necessary. The jig side portion 6200 can support the weight of an object to be transported together with the jig support portion 6100.

[0270] The jig side portion 6200 may be formed in a shape that allows the length to be adjusted.

[0271] The length adjustment unit 6300 may be configured to adjust the length of the jig side unit 6200. Exemplarily, the length adjustment unit 6300 may be configured with a hydraulic cylinder or a linear actuator, etc. However, the length adjustment unit 6300 is not limited thereto and may be variously modified as necessary.

[0272] The length adjusting part 6300 may be formed in a form combined with the fixture side part 6200. Therefore, as the length of the length adjusting part 6300 is adjusted, the length of the fixture side part 6200 may also be adjusted.

[0273] By adjusting the length of the jig side portion 6200, the position of the jig support portion 6100 can be changed up or down.

[0274] The jig wheel unit 6400 may be coupled to the jig side unit 6200 or may include wheels. Furthermore, the jig structure 6000 may include one or more jig wheel units 6400, each of which may be coupled to one or more jig side units 6200, and the jig wheel unit 6400 may be disposed at a lower stage of the jig side unit 6200 so as to be in contact with the bottom. Furthermore, the jig wheel unit 6400 may facilitate the movement of the jig structure 6000 through the rotation of the wheels.

[0275] The jig lower part 6500 may be configured to connect the jig side part 6200 to each other on the side of the jig structure 6000, and may be disposed at the bottom of the jig structure 6000. The jig lower part 6500 may enable the jig structure 6000 to stably stand on the bottom.

[0276] The jig structure 6000 can be referred to as a mobile jig structure since it can be moved by the jig wheels 6400.

[0277] The fixture structure 6000 can be connected to or coupled and separated from the dehumidifier 420 used in the EFEM, and can be detachably connected. The fixture structure 6000 can be used to install the dehumidifier 420 in the body 411 of the EFEM chamber to supply dehumidified gas to the EFEM chamber.

[0278] The fixture structure 6000 may be separated and removed from the EFEM chamber once installation of the dehumidifier 420 is complete, and the EFEM chamber may be used, if desired, while retaining the fixture structure 6000.

[0279] The dehumidifier 420 and the main body 411 of the EFEM chamber can be detachably connected or coupled, and an airtight member for preventing the outflow of gas and the inflow of external gas can be disposed between the dehumidifier 420 and the main body 411. The airtight member can be connected or coupled through the dehumidifier 420 and the main body 411 as well as a fixing bracket and a fixing means.

[0280] The EFEM and EFEM chamber to which the jig structure 6000 can be applied can be any of the EFEM and EFEM chambers described above, and is not limited thereto, and EFEMs and EFEM chambers in various cases can be used.

[0281] Specifically, the EFEM chamber may be of a non-circulating type in which gas is discharged to the outside, or of a circulating type in which gas that has passed through the first space 410 is supplied again to the dehumidifier 420.

[0282] The dehumidifier 420 is mounted on the main body 411 of the EFEM chamber by the fixture structure 6000, and the purification section 463, the external circulation duct 465, the internal circulation duct 462, the external air intake port 466, the regeneration gas exhaust port 467, etc. can be connected to the dehumidifier 420 and the main body 411.

[0283] The jig structure 6000 can maintain the length of the jig side portion 6200 short when the dehumidifier 420 is moved, and when the dehumidifier 420 is installed in the EFEM chamber, the length of the jig side portion 6200 can be appropriately adjusted according to the height of the EFEM chamber.

[0284] In addition, in order to install the dehumidifier 420 in the EFEM chamber using the jig structure 6000, the inside of the jig structure 6000 can be formed larger than the size of the EFEM chamber, and can be formed larger than the main body 411 of the EFEM chamber.

[0285] In order to couple the dehumidifier 420 to the jig structure 6000, the dehumidifier 420 may first be transferred by a moving means (not shown) (e.g., a moving dolly, etc.) and disposed inside the jig structure 6000. Alternatively, the dehumidifier 420 may be transferred by the moving means and disposed on the upper outside of the jig structure 6000. Then, the dehumidifier 420 may be coupled to the jig structure 6000 by a coupling means. Specifically, the dehumidifier 420 may be coupled to the jig support portion 6100 of the jig structure 6000. Then, in order to appropriately arrange the dehumidifier 420 in the EFEM chamber, the height of the jig structure 6000 may be appropriately adjusted as necessary.

[0286] FIG. 24 is a diagram for explaining a jig structure coupled to a dehumidifier.

[0287] 24, the dehumidifier 420 can be coupled to the jig structure 6000. Furthermore, the dehumidifier 420 can be coupled to the inner upper part of the jig structure 6000, and can also be coupled to the lower surface (or lower stage) of the jig support portion 6100.

[0288] In order to couple the dehumidifier 420 to the fixture structure 6000, a fixing bracket 6120 may be provided on the dehumidifier 420 side, and one or more fixing brackets 6120 may be provided.

[0289] The jig support part 6100 may be formed with an opening (not shown) for inserting the fixing means 6110, and may have one or more such openings.

[0290] The fixing means 6110 is inserted into the jig support part 6100 and coupled to a fixing bracket 6210 on the side of the dehumidifier 420 , thereby enabling the jig support part 6100 and the dehumidifier 420 to be coupled together.

[0291] FIG. 25 is a diagram for explaining a jig structure coupled to a dehumidifier.

[0292] Referring to FIG. 25, a dehumidifier 420 can be coupled to the body 411 of the EFEM chamber.

[0293] For coupling the dehumidifier 420 to the main body 411 of the EFEM chamber, one or more fixing brackets 6140 may be provided on the dehumidifier 420 side and one or more fixing brackets 6150 may be provided on the main body 411 side of the EFEM chamber.

[0294] The fixing means 6140 is inserted into the fixing bracket 6140 on the dehumidifier 420 side and the fixing bracket 6160 on the main body 411 side, and is firmly connected to the fixing bracket 6140, so that the dehumidifier 420 and the main body 411 can be coupled together.

[0295] Here, an airtight member 6130 may be disposed between the dehumidifier 420 and the main body 411 of the EFEM chamber. The airtight member 6130 may be configured to prevent outflow of gas or inflow of outside air that may occur in a section between where the dehumidifier 420 and the main body 411 are connected.

[0296] FIG. 26 is a diagram for explaining the gas circulation operation of the EFEM coupled to the jig structure.

[0297] Referring to FIG. 26, the main body 411 of the EFEM chamber can include a penetration pipe 461, a blower 440, a filter 450, and a first space 410.

[0298] The purification unit 463, the external circulation duct 465, the internal circulation duct 462, and the external air intake 466 can be connected to the EFEM chamber, specifically, to the dehumidifier 420 and the main body 411 of the EFEM chamber. In addition, the regeneration gas intake 468 and the regeneration gas exhaust 467 can be connected to the dehumidifier 420.

[0299] In addition, a first valve 4601 can be provided to control the flow of gas in the through pipe 461, and a second valve 4602, a third valve 4603, and a fourth valve 4604 can be provided to control the flow of gas in the external circulation duct 465, the internal circulation duct 462, and the external air intake 466.

[0300] The purification section 463 may be connected to a collection section formed at the bottom of the first space 410, and the gas passing through the first space 410 may be supplied again to the first space 410 through the purification section 463 via the external circulation duct 465 or the internal circulation duct 462.

[0301] Here, the internal circulation duct 462 may be connected to the blower 440 or may be connected to the through pipe 461. The internal circulation duct 462 may be configured to circulate air that does not need to be dehumidified (for example, air with a relative humidity of 1% or less) without passing through the dehumidifier 420.

[0302] The external circulation duct 465 may be connected to the dehumidifier 420 together with the outside air intake 466 .

[0303] Here, the EFEM can be operated in a first to a third mode, and the gas flow and operation of each configuration can be the same as described above.

[0304] FIG. 27 is a diagram for explaining the non-gas circulating operation of the EFEM coupled to the jig structure.

[0305] Referring to FIG. 27, a fixture structure 6000 can be coupled to the body 411 of a non-circulating EFEM chamber where gas is vented to the outside.

[0306] That is, the gas flowing into the dehumidifier 420 coupled to the upper inner portion of the jig structure 6000 (or the lower portion of the jig support portion 6100) can pass through the through pipe 461, the blower 440, the filter 450, and the first space 410. Here, the first space 410 can be provided with a perforated plate (not shown) for collecting the gas and a collection portion (not shown) which is a space in which the gas is collected. The gas that has passed through the first space 410 can be discharged to the outside. The gas can be discharged to the lower portion of the main body 411 or from the side, and can be variously changed as necessary.

[0307] Furthermore, the main body 411 may further include an exhaust device (not shown) for sucking in the gas that has passed through the first space 410 and discharging it to the outside.

[0308] FIG. 28 is a diagram for explaining a jig structure coupled to a dehumidifier.

[0309] 28, the dehumidifier 420 may be coupled to the jig structure 6000, specifically, to the outer upper part of the jig structure 6000. Furthermore, the dehumidifier 420 may be coupled to the upper surface (or upper stage) of the jig support portion 6100.

[0310] In order to couple the dehumidifier 420 to the jig structure 6000, a fixing bracket 6120 may be provided on the dehumidifier 420 side, and one or more of such fixing brackets 6120 may be provided.

[0311] The jig support part 6100 may be formed with an opening (not shown) for inserting the fixing means 6110, and may include one or more such openings.

[0312] The fixing means 6110 is inserted into the jig support part 6100 and coupled to a fixing bracket 6210 on the side of the dehumidifier 420 , thereby enabling the jig support part 6100 and the dehumidifier 420 to be coupled together.

[0313] FIG. 29 is a diagram for explaining the gas circulation operation of the EFEM coupled to the jig structure.

[0314] Referring to FIG. 29, the main body 411 of the EFEM chamber can include a penetration pipe 461, a blower 440, a filter 450, and a first space 410.

[0315] The purification unit 463, the external circulation duct 465, the internal circulation duct 462, and the external air intake 466 can be connected to the EFEM chamber, specifically, to the dehumidifier 420 and the main body 411 of the EFEM chamber. In addition, the regeneration gas intake 468 and the regeneration gas exhaust 467 can be connected to the dehumidifier 420.

[0316] In addition, a first valve 4601 can be provided to control the flow of gas in the through pipe 461, and a second valve 4602, a third valve 4603, and a fourth valve 4604 can be provided to control the flow of gas in the external circulation duct 465, the internal circulation duct 462, and the outside air intake 466.

[0317] The purification section 463 may be connected to a collection section formed at the bottom of the first space 410, and the gas passing through the first space 410 may be supplied again to the first space 410 through the purification section 463, the external circulation duct 465 or the internal circulation duct 462.

[0318] Here, the internal circulation duct 462 may be connected to the blower 440 or may be connected to the through pipe 461. The internal circulation duct 462 may be configured to circulate air that does not need to be dehumidified (for example, air with a relative humidity of 1% or less) without passing through the dehumidifier 420.

[0319] The external circulation duct 465 may be connected to the dehumidifier 420 together with the outside air intake 466 .

[0320] Here, the EFEM can be operated in a first to a third mode, and the gas flow and operation of each configuration can be the same as described above.

[0321] FIG. 30 is a diagram for explaining the non-gas circulating operation of the EFEM coupled to the jig structure.

[0322] Referring to FIG. 30, a fixture structure 6000 can be coupled to the body 411 of a non-circulating EFEM chamber where gas is vented to the outside.

[0323] That is, the gas flowing into the dehumidifier 420 coupled to the upper outer portion of the jig structure 6000 (or the upper portion of the jig support portion 6100) can pass through the first space 410 via the through pipe 461, the blower 440, and the filter 450. Here, the first space 410 can be provided with a perforated plate (not shown) for collecting the gas and a collection portion (not shown) which is a space in which the gas is collected. Then, the gas that has passed through the first space 410 can be discharged to the outside. The gas can be discharged to the bottom of the main body 411 or from the side, and can be variously changed as necessary.

[0324] Furthermore, the main body 411 may further include an exhaust device (not shown) for sucking in the gas that has passed through the first space 410 and discharging it to the outside.

[0325] FIG. 31 is a front view illustrating a fourth exemplary technique for reducing humidity in an EFEM chamber.

[0326] Referring to FIG. 31, the EFEM chamber 112 may include a first space 410, a dehumidifier 420, a blower 440, and a filter 450. Here, the first space 410 may be an internal space formed in the main body 411. The second space 430 may be a space formed by separating the dehumidifier 420 and the blower 440. The dehumidifier 420 may be connected to a regeneration gas inlet 468 to which gas used for regeneration of the dehumidifier 420 is supplied and a regeneration gas outlet 467 to which the regeneration gas is discharged. Furthermore, the dehumidifier 420 may be connected to an outside air inlet 466, and the flow of gas in the outside air inlet 466 may be controlled by a second valve 4602. The blower 440 may include a fan 442.

[0327] The dehumidifier 420 may dehumidify gas supplied from the outside air intake 466, and the dehumidified gas may be supplied to the blower 440 through the external connection duct 469. Here, the flow of gas in the external connection duct 469 may be controlled by a fifth valve 4605. The fifth valve 4605 may be referred to as an external connection valve. The gas may be supplied to the first space 410 through the blower 440 and the filter 450. The gas that has passed through the first space 410 may be collected in the collection unit 480 through the perforated plate 481 and then discharged to the outside.

[0328] Here, the gas discharged to the outside may be discharged to the bottom surface of the EFEM chamber 3100 or to one side surface.

[0329] FIG. 32 is a side view illustrating a fourth exemplary technique for reducing humidity in an EFEM chamber.

[0330] Referring to FIG. 32, the EFEM chamber 3100 may include a first space 410 formed within a body 411, a dehumidifier 420, a blower 440, and a filter 450.

[0331] Additionally, the EFEM chamber 3100 may include a blower fresh air inlet 470 that supplies fresh air to the blower, and may include a sixth valve 4606 that controls the flow of gas at the blower fresh air inlet 470. Here, the sixth valve 4606 may be referred to as a blower fresh air valve.

[0332] 31 and 32, when outside air that needs to be dehumidified is supplied, the second valve 4602 and the fifth valve 4605 may be in an open, on state, and the sixth valve 4606 may be in a closed, off state. In this case, the gas may be supplied through the outside air intake 466 and dehumidified through the dehumidifier 420, and the gas may pass through the blower 440 through the external connection duct 469 and be supplied to the first space 410.

[0333] In addition, when outside air that does not need to be dehumidified is supplied, the second valve 4602 and the fifth valve 4605 may be in an off state, and the sixth valve 4606 may be in an on state so that unnecessary dehumidification is not performed. In this case, the outside air may be supplied directly to the blower 440 through the blower outside air intake 470, or may be supplied to the first space 410 through the filter 450.

[0334] The gas supplied to the first space 410 can be collected in the collecting section 480 through the perforated plate 481 and then discharged to the outside.

[0335] Fig. 33 is a diagram for explaining an exhaust device that may be included in an EFEM according to an embodiment. Fig. 34 is a diagram for explaining gas exhaust through an exhaust device that may be included in an EFEM according to an embodiment. Fig. 35 is a diagram for explaining gas exhaust through an exhaust device that may be included in an EFEM according to an embodiment.

[0336] Configurations not necessary for the description of the exhaust device 3300 are omitted. Furthermore, the EFEM chamber can use one or more of the above-mentioned embodiments.

[0337] 33 to 35, the EFEM chamber 3100 may be equipped with an exhaust device 3300. The exhaust device 3300 may be disposed at the lower stage of the EFEM chamber 3100, but is not limited thereto, and may be modified in various ways as necessary.

[0338] The exhaust device 3300 may be disposed inside the main body 411 of the EFEM chamber 3100, or may be disposed outside the main body 411. Also, the exhaust device 3300 may be connected to the first space 410 so that gas is in communication with the first space 410.

[0339] The exhaust device 3300 can play a role in helping to discharge (or exhaust) the gas that has passed through the first space 410 to the outside. The exhaust device 3300 can collect (or collect) the gas and discharge it to the outside, and can be disposed under the other hole plate 481, or can be disposed in the EFEM chamber 3100 from which the other hole plate 481 has been removed.

[0340] The exhaust device 3300 may be configured to exhaust the combined gas to a lower portion of the EFEM chamber 3100 or to one side of the EFEM chamber 3100 .

[0341] The EFEM chamber 3100 may include a foot so that the lower surface may be spaced from the bottom.

[0342] The exhaust device 3300 may be configured to include one or more baffles including an opening. That is, the gas that has passed through the first space 410 may be uniformly exhausted through the exhaust device 3300. The exhaust device 3300 has the advantage of being able to generate a uniform gas flow, thereby improving the efficiency of gas purification.

[0343] Here, the exhaust device 3300 may be connected to the lower part of the EFEM chamber 3100 so that the gas is in communication with the first space 410, and the exhaust device 3300 may have one or more baffles arranged in parallel, and the openings of the baffles may be formed so that the diameter of the openings increases as they are arranged downward (toward the ground, etc.). That is, the gas passing through the exhaust device 3300 can pass through openings with gradually increasing diameters.

[0344] The exhaust device 3300 can be used in a non-circulating EFEM chamber in which the gas that has passed through the first space 410 is discharged to the outside, but is not limited thereto, and can also be used in a circulating EFEM chamber in which the gas that has passed through the first space 410 is supplied again to the dehumidifier 420.

[0345] Additionally, the exhaust device 3300 may be configured and provided at a low height (eg, 100 mm or less) at the bottom of the EFEM chamber 3100 to minimize airflow disturbance inside the EFEM.

[0346] FIG. 36 is a diagram for explaining an exhaust pipe and an exhaust fan that may be included in an EFEM according to one embodiment.

[0347] Referring to FIG. 36, the EFEM chamber 3100 may include an exhaust pipe 3310 and an exhaust fan 3320.

[0348] The exhaust pipe 3310 may be arranged to be connected to the exhaust device 3300, and the exhaust fan 3320 may be arranged to be connected to the exhaust pipe 3310. The exhaust pipe 3310 may be configured to provide a passage for the gas passing through the exhaust device 3300 to be discharged to the outside, and the exhaust fan 3320 may be configured to provide power for smoothly discharging the gas to the outside, and may be configured to control the flow rate of the gas in the EFEM chamber 3100 and the exhaust pipe 3310.

[0349] The exhaust pipe 3310 may be located on one side of the EFEM chamber 3100 or may be located on the underside.

[0350] Fume means gas particles, and the gas circulating in the EFEM chamber can be a concept that includes fumes.

[0351] The exhaust fan 3320 may be coated with Teflon to prevent corrosion due to fumes. Here, the structure forming the outer shape of the exhaust fan 3320 may be coated with Teflon. Also, the exhaust fan 3320 may include a blade portion that rotates to control the flow rate of the gas, and here, the blade portion may be configured to be coated with Teflon.

[0352] Fig. 37 is a block diagram of an exhaust device that can be included in the EFEM. Fig. 38 is a side view of an example of an exhaust device that can be included in the EFEM. Fig. 39 is a side view of another example of an exhaust device that can be included in the EFEM.

[0353] 37 to 39, an exhaust device 3300 according to an embodiment may include a first baffle 3301, a second baffle 3302, a third baffle 3303, and a joint 3304. Further, the exhaust device 3300 may be connected to an exhaust pipe 3310 so as to allow gas to flow therethrough.

[0354] The first baffle 3301 can have one or more openings of a first size. The second baffle 3302 can have one or more openings of a second size. The third baffle 3303 can have one or more openings of a third size.

[0355] The openings provided in the first to third baffles 3301, 3302, and 3303 can be uniformly arranged.

[0356] Here, the first size may be smaller than the second size and the third size, the second size may be larger than the first size and smaller than the third size, and the third size may be larger than the first size and the second size.

[0357] The first baffle 3301 may include a greater number of openings than the second baffle 3302 and the third baffle 3303. The second baffle 3302 may include a lesser number of openings than the first baffle 3301 and may include a greater number of openings than the third baffle 3303. The third baffle 3303 may include a lesser number of openings than the first baffle 3301 and the second baffle 3302.

[0358] The first baffle 3301, the second baffle 3302, and the third baffle 3303 may be arranged parallel to each other and may be arranged at a certain distance apart.

[0359] This allows the gas passing through the exhaust device 3300 to be exhausted uniformly.

[0360] The joint portion 3304 may be formed to match an opening included in the third baffle 3303 so that the gas passing through the third baffle 3303 can be joined. Also, the joint portion 3304 may be disposed to contact the third baffle 3303. In this way, all of the gas passing through the third baffle 3303 can be collected by the joint portion 3304.

[0361] The first baffle 3301, the second baffle 3302, the third baffle 3303, and the joint 3304 may be arranged parallel to each other and may have a height of 80 mm or less, so that the flow of gas through the EFEM is not impeded.

[0362] The gas combined at the combining portion 3304 moves to an exhaust pipe 3310 and is exhausted to the outside.

[0363] The cross section of the joint portion 3304 may be formed in a square shape, and the cross section of the exhaust pipe 3310 may be formed in a circle shape. This allows the gas jointed in the square shape to be circularized and discharged. The cross section of the exhaust pipe 3310 may be larger than the first size opening, the second size opening, and the third size opening included in the first baffle 3301, 3302, and 3303. The cross section of the passage formed inside the exhaust pipe 3310 may be formed in a fourth size larger than the first size opening, the second size opening, and the third size opening.

[0364] Also, a lid (not shown) for controlling the area of ​​an opening may be further provided to control the flow of gas passing through the first baffle 3301, the second baffle 3302, and the third baffle 3303. That is, the lid can control the area of ​​the opening by covering one or more openings of the first baffle 3301, the second baffle 3302, and the third baffle 3303. The lid may be configured as one for the exhaust device 3300, or may be configured as one or more lids individually for each baffle.

[0365] 38 and 39, the exhaust pipe 3310 may be connected to one side of the exhaust device 3300 or to the bottom of the exhaust device 3300. This is not limiting, and the arrangement and connection relationship of each component may be variously changed as necessary.

[0366] FIG. 40 is a diagram showing the configuration of a dehumidifying FFU.

[0367] 40, the dehumidification FFU 4000 according to one embodiment may include a dehumidification module 510, a fan filter module 520, and a main valve 530. Here, the dehumidification FFU 500 may be referred to as a dehumidification fan filter unit. The dehumidification FFU 500 may play a role in dehumidifying gas and supplying the gas to a retention space in the EFEM chamber.

[0368] The dehumidification module 510 may include an outside air port 511 , a dehumidification filter 512 , an intake section 513 , a dehumidification section 514 , and a cooling section 515 .

[0369] The dehumidification module 510 can supply gas through an outside air port 511, which can provide a passageway through which the gas can flow.

[0370] The dehumidifying filter 512 may be configured to purify (filter) the gas supplied through the outside air port 511.

[0371] The suction unit 513 may include a fan, and the suction unit 513 may rotate the fan to introduce gas so that the dehumidification module 510 can suck in the gas.

[0372] The dehumidifier 514 may be configured to remove moisture from the gas passing through the dehumidifier module 510. The dehumidifier 514 may be made of one or more materials including silica gel, polymer, zeolite, etc. Also, the dehumidifier 514 may regenerate its dehumidification capacity through a regenerating gas. In other words, the dehumidifier 514 may continue the process of dehumidifying the gas, and the degree of dehumidification may become weak, but this can be regenerated through a regenerating gas.

[0373] The dehumidification module 510 may be provided with a regeneration gas inlet 5141 and a regeneration gas outlet 5142, and the regeneration gas flowing in through the regeneration gas inlet 5141 can pass through the dehumidification section 514 to regenerate the dehumidification function of the dehumidification section 514, and the regeneration gas that has passed through the dehumidification section 514 can be discharged through the regeneration gas outlet 5142.

[0374] Here, various gases including air, nitrogen, etc. can be used as the regeneration gas, and the temperature of the regeneration gas can be, for example, 60°C or higher and 200°C or lower.

[0375] The cooling unit 515 may be configured to cool the gas dehumidified through the dehumidifier 514. The cooling unit 515 may be configured to include a heat exchanger, and the cooling unit 515 may play a role in exchanging heat with the gas to a temperature of 25° C. or less. Here, the temperature of the gas passing through the cooling unit 515 may be changed in various ways as necessary, and for example, the temperature of the gas passing through the cooling unit 515 may be set in various ways, such as 10° C. or less, 15° C. or less, 20° C. or less, 25° C. or less, 30° C. or less, 35° C. or less, 40° C. or less, 45° C. or less, 50° C. or less, etc.

[0376] The main valve 530 may be configured to control the flow of gas between the dehumidification module 510 and the fan filter module 520. That is, when the main valve 530 is in an off state, the valve is closed and gas may not flow between the dehumidification module 510 and the fan filter module 520, and when the main valve 530 is in an on state, the valve is open and gas may flow between the dehumidification module 510 and the fan filter module 520.

[0377] The fan filter module 520 may include a blower 521 and a main filter section 522 .

[0378] The blower 521 may be a component that blows gas in order to supply the dehumidified gas to other components, and may include a fan for this purpose.

[0379] The main filter unit 522 may be configured to purify (filter) the dehumidified gas blown by the blower 521. The main filter unit 522 may include, but is not limited to, an Ultra Low Penetration Air (ULPA) filter, a High Efficiency Particulate Air (HEPA) filter, a filter made of glass fiber, an activated carbon filter, or the like.

[0380] Further, the dehumidification FFU 500 may include a controller 540 .

[0381] The controller 540 may play a role in controlling each component of the dehumidification FFU 500. Specifically, the controller 540 may control the suction strength of the suction unit 513, the temperature of the regenerating gas passing through the dehumidification unit 514, the on / off of the main valve 530, the flow rate of the gas by the blower 521, the temperature of the gas set by the cooling unit 515, etc. Without being limited thereto, the controller 540 may further play a role in controlling the components included in the dehumidification FFU 500.

[0382] FIG. 41 is a diagram illustrating an example technique for applying a dehumidifying FFU to reduce humidity in an EFEM chamber.

[0383] Referring to FIG. 41, the EFEM chamber 4112 can include a dehumidifying FFU 4000 and a residence space 410.

[0384] For convenience of explanation, the dehumidifying FFU 4000 is described as one configuration of the EFEM chamber 4112, but it may be formed as a separate configuration that can be separated from the EFEM chamber 4112. The dehumidifying FFU 4000 can be inserted into a slot formed in the EFEM chamber 4112, and can be detached from the slot as needed. And, in the dehumidifying FFU 4000, the blower fan can be located on the upper side, the filter can be located on the lower side, and the dehumidifying module can be located between the blower fan and the filter as needed. And, moisture and heat generated from the dehumidifying FFU 4000 may be discharged to a side of the EFEM chamber 4112 other than the upper and lower sides.

[0385] The dehumidifying FFU 4000 is disposed in the main body 411 and can supply gas through an outside air intake port 460 formed in the main body 411 .

[0386] The dehumidification FFU 4000 is supplied with gas flowing in through the outside air intake port 460, performs dehumidification, and can supply the dehumidified air to the retention space 410. Here, the dehumidification FFU 4000 can be expected to be easy to install through a simplified device configuration and a reduced volume by simultaneously performing dehumidification and blowing gas.

[0387] For example, the temperature of the outside air supplied to the dehumidifying FFU 4000 through the outside air intake 460 may be 25° C., and the humidity may be 30 to 50% in terms of relative humidity.

[0388] The retention space 410 may be a space formed in the main body 411, or may be a space in which the substrate is retained. Damage to the substrate caused by moisture can be prevented by supplying gas dehumidified by the dehumidification FFU 4000 to the retention space 410. The retention space 410 may be referred to as a transfer chamber.

[0389] The gas dehumidified by the dehumidification FFU 4000 and supplied to the retention space 410 may have a temperature of 25° C. and a relative humidity of 5%, for example. However, this is not limited thereto, and the temperature and humidity of the dehumidified gas may be changed as necessary by controlling the dehumidification FFU 4000.

[0390] The gas blown by the dehumidifying FFU 4000 may have a flow in a certain direction in the retention space 410. As an example, the gas may flow downward (toward the ground) in the retention space 410. That is, the gas in the retention space 410 may form a vertical laminar flow flowing from the top to the bottom.

[0391] The gas that has passed through the retention space 410 passes through the perforated plate 481 and can be collected in the collection unit 480. The perforated plate 481 can be formed in the form of a plate having one or more perforations, and can form a uniform flow of gas.

[0392] The gas collected in the collection unit 480 may be discharged to the bottom of the EFEM chamber 4112, but is not limited thereto, and may be discharged to one side of the EFEM chamber 4112. In this way, the method of discharging the gas to the outside can be called a non-circulation type. In order to discharge the gas, an exhaust device (not shown) equipped with an exhaust fan or the like can be used.

[0393] The EFEM chamber 4112 may include a foot for spacing from the bottom.

[0394] FIG. 42 illustrates another example technique for applying a dehumidifying FFU to reduce humidity in an EFEM chamber.

[0395] 42, the EFEM chamber 4212 may include one or more dehumidifying FFUs 4000. That is, two or more dehumidifying FFUs 4000 may be arranged to dehumidify the gas and supply the gas to the retention space 410. The number of dehumidifying FFUs 4000 arranged in the EFEM chamber 4212 may be changed in various ways as needed. In addition, the size, arrangement position, configuration, etc. of the dehumidifying FFU 4000 may be changed in various ways as needed.

[0396] FIG. 43 illustrates yet another example technique for applying a dehumidifying FFU to reduce humidity in an EFEM chamber.

[0397] Referring to FIG. 43, the EFEM chamber 4312 can include a dehumidifying FFU 4000 and a residence space 410.

[0398] Although the dehumidifying FFU 4000 is described in one configuration of the EFEM chamber 4312 for ease of explanation, it may be formed in a separate configuration separable from the EFEM chamber 4312.

[0399] The dehumidifying FFU 4000 is disposed in the main body 411 and can supply gas through a circulating outside air intake part 466 formed in the main body 411 .

[0400] The dehumidification FFU 4000 is supplied with gas flowing in through the circulating outside air intake unit 466, performs dehumidification, and can supply the dehumidified air to the retention space 410. Here, the dehumidification FFU 4000 can be expected to be easy to install by simultaneously performing dehumidification and blowing gas, thereby simplifying the device configuration and reducing the volume.

[0401] The circulating outside air intake unit 466 may be configured to receive outside air or to supply an initial airflow of gas to manage positive pressure. The circulating outside air intake unit 466 may include an outside air valve 4661, which may be controlled by turning on and off, thereby controlling the flow of outside air. Here, the open state of the outside air valve 4661 may be on, and the closed state may be off. The outside air valve 4661 may be turned off when a certain amount or more of gas is supplied to the dehumidifying FFU 4000.

[0402] For example, the temperature of the outside air supplied to the dehumidifying FFU 4000 through the circulating outside air intake unit 466 may be 25° C., and the humidity may be 30 to 50% in terms of relative humidity.

[0403] The retention space 410 may be a space formed in the main body 411, or may be a space in which the substrate is retained. Damage to the substrate caused by moisture can be prevented by supplying gas dehumidified by the dehumidification FFU 4000 to the retention space 410. The retention space 410 may be referred to as a transfer chamber.

[0404] The gas dehumidified by the dehumidification FFU 4000 and supplied to the retention space 410 may have a temperature of 25° C. and a relative humidity of 5%, for example. However, this is not limited thereto, and the temperature and humidity of the dehumidified gas can be changed as needed by controlling the dehumidification FFU 4000.

[0405] The gas blown by the dehumidifying FFU 4000 may flow in a certain direction in the retention space 410. As an example, the gas may flow downward (toward the ground) in the retention space 410. That is, the gas in the retention space 410 may form a vertical laminar flow flowing from above to below.

[0406] The gas that has passed through the retention space 410 passes through the perforated plate 481 and can be collected in the collection unit 480. The perforated plate 481 can be formed in the form of a plate having one or more perforations, and can form a uniform flow of gas.

[0407] The gas collected in the collection section 480 can be supplied to the purification section 463 , purified (filtered), and supplied to the circulation section 465 .

[0408] The circulation unit 465 may be configured to provide a gas circulation passage so that the gas that has passed through the retention space 410 is again supplied to the dehumidification FFU 4000. That is, the gas that has passed through the retention space 410 may be collected in the collection unit 480 and supplied to the purification unit 463, and the gas purified in the purification unit 463 may be again supplied to the dehumidified FFU 4000 through the circulation unit 465. Then, the gas may be again supplied to the retention space 410 through the dehumidification FFU 4000. The method in which the gas is circulated through the circulation unit 465 in this manner may be referred to as a circulation type.

[0409] The circulation unit 465 may include a circulation valve 4651 that controls the flow of gas in the circulation unit 465. The circulation valve 4651 may be controlled to be on / off, and when the circulation valve 4651 is on, gas may flow inside the circulation unit 465, and when the circulation valve 4651 is off, gas may not flow inside the circulation unit 465.

[0410] The EFEM chamber 4312 may be provided with a foot for spacing from the bottom.

[0411] FIG. 44 is a diagram illustrating another example technique applied to a dehumidifying FFU to reduce humidity in an EFEM chamber.

[0412] 44, the EFEM chamber 4412 can include one or more dehumidifying FFUs 4000. That is, two or more dehumidifying FFUs 4000 can be arranged to dehumidify the gas and supply the gas to the retention space 410. The number of dehumidifying FFUs 4000 arranged in the EFEM chamber 4412 can be changed in various ways as needed. In addition, the size, arrangement position, configuration, etc. of the dehumidifying FFU 4000 can be changed in various ways as needed.

[0413] FIG. 45 is a diagram for explaining a control device used in an EFEM chamber to which a dehumidifying FFU is applied.

[0414] 45, the EFEM chamber 4512 can include a control device 4520. Here, for convenience of explanation, the control device 4520 has been described as one component of the EFEM chamber 4512, but it may be formed as a separate component that can be separated from the EFEM chamber 4512.

[0415] The controller 4520 may be configured to process information regarding the EFEM, and may also be configured to control the operation of the EFEM and EFEM chamber components.

[0416] The control device 4520 may be located at the top of the EFEM chamber 4512, but is not limited to this and may be variously modified as needed.

[0417] The control device 4520 may be located outside the EFEM or EFEM chamber, or may be located in a control box used with the EFEM chamber. The control device 4520 may be used with, but is not limited to, circulating EFEM chambers and non-circulating EFEM chambers, and may be applied in various ways.

[0418] The control device 4520 may include a command processing unit, a temperature acquisition unit, a humidity acquisition unit, a pressure acquisition unit, a blower operation controller, a memory unit, an input unit, other operation controllers, a valve operation controller, a dehumidifier controller, a dehumidification controller, a regeneration controller, an air volume controller, a communication module, and a screen display unit.

[0419] The instruction processing unit may be a component (eg, a processor) that processes signals received from each component.

[0420] The temperature acquisition unit may be configured to measure the temperatures of the EFEM and the EFEM chamber to acquire temperature information. Specifically, the temperature of the components of the EFEM, such as the outside air intake, the circulation unit, the dehumidification FFU, the blower and main filter in the dehumidification FFU, the collection unit, the perforated plate, the purification unit, the main valve, the outside air valve, the circulation valve, and the retention space in the main body, may be acquired. To acquire the temperature, a temperature sensor may be disposed in each component of the EFEM and the EFEM chamber.

[0421] The humidity acquisition unit may be configured to measure the humidity of the EFEM and the EFEM chamber to acquire humidity information. Specifically, the humidity may be acquired from the components of the EFEM, such as the outside air intake, the circulation unit, the dehumidification FFU, the blower and main filter in the dehumidification FFU, the collection unit, the perforated plate, the purification unit, the main valve, the outside air valve, the circulation valve, and the retention space in the main body. To acquire the humidity, a humidity sensor may be disposed in each component of the EFEM and the EFEM chamber.

[0422] The pressure acquisition unit may be configured to measure the pressure of the EFEM and the EFEM chamber to acquire pressure information. Specifically, the pressure of the components of the EFEM, such as the outside air intake, the circulation unit, the dehumidification FFU, the blower and main filter in the dehumidification FFU, the collection unit, the perforated plate, the purification unit, the main valve, the outside air valve, the circulation valve, and the retention space in the main body, may be acquired. To acquire the pressure, a pressure sensor can be disposed in each component of the EFEM and the EFEM chamber.

[0423] The blower operation controller may be configured to control the operation of the blower of the EFEM chamber. That is, the blower operation controller can control the on / off or wind strength of the blower included in the dehumidifying FFU 4000.

[0424] The storage unit may be configured to store the operation of each component of the EFEM chamber, or may be configured to save a process recipe.

[0425] The input unit may be configured to input commands to operate each component of the EFEM and the EFEM chamber. The input unit may also be configured to transmit the input commands to the command processing unit.

[0426] The other operation controller may be configured to control the operation of additional components of the EFEM chamber. For example, the other operation controller may control the operation of an ion controller that controls an ion bar. Here, the ion bar may be disposed at the upper portion of the space in the main body of the EFEM chamber, and may remove static electricity generated by the gas flowing in the space through which the gas flows. Here, the ion bar may be of various forms.

[0427] The valve operation controller may be configured to control the on / off of the valves included in the EFEM chamber. That is, the operation mode of the EFEM chamber can be controlled by the valve operation controller, and the valve operation controller can control the main valve, the outside air valve, the circulation valve, etc.

[0428] The dehumidifier controller may be configured to control the operation of the dehumidifier in the EFEM chamber, and the dehumidifier controller may include a dehumidification controller, a regeneration controller, and an air volume controller. Specifically, the dehumidification controller may be configured to control the dehumidification unit of the dehumidification FFU 4000, the regeneration controller may be configured to control the supply of gas for regeneration of the dehumidification FFU 4000, and the air volume controller includes the dehumidification FFU 4000. It may be configured to control the suction unit to control the flow of gas supplied to the dehumidification FFU 4000. Here, the dehumidification controller may be configured to determine the degree of dehumidification of air in the dehumidification FFU 4000 and control the size and position of the dehumidification unit, and the regeneration controller may determine the degree of regeneration of the dehumidification unit and control the heater, fan, etc. used for regeneration of the dehumidification unit. The air volume controller may control the air volume by controlling a fan arranged in the dehumidifier used for inflow and discharge of gas for regeneration.

[0429] The communication module may be configured to communicate with the outside world.

[0430] The screen display unit may be configured to display on a screen the status inside the EFEM chamber, such as the process recipe, the temperature, humidity, and pressure conditions inside the EFEM chamber, the air volume of the blower included in the dehumidifying FFU, and the on / off status of the valves.

Claims

1. A FOUP (Front-Opening Unified Pod) on which substrates are loaded; a main body having a first space formed therein, the first space communicating with the hoop through a door and capable of receiving the substrate to be transferred; a dehumidification module arranged to communicate with the first space and configured to dehumidify gas; a blower that supplies the dehumidified gas to the first space; a through pipe providing a path of travel for the dehumidified gas between the dehumidifier and the blower.

2. The dehumidifying EFEM of claim 1 , further comprising an external circulation duct providing a circulation passage for gas in the first space to be supplied to the dehumidifying module.

3. an internal circulation duct connecting the external circulation duct and the through pipe; The dehumidifying EFEM of claim 2 , further comprising: an outside air intake port connected to the external circulation duct for drawing in gas from the outside.

4. The dehumidifying EFEM of claim 1 , wherein the dehumidifying module is a rotor type dehumidifier including a dehumidifying section and a regenerating section.

5. The body releases gas to the outside, The dehumidifying EFEM of claim 1 , wherein the dehumidifying module is located within the body and disposed in communication with the first space.

6. The body further includes a perforated plate for collecting gas; The dehumidifying EFEM of claim 5 , wherein the perforated plate is disposed in a lower portion within the first space.

7. 10. The dehumidifying EFEM of claim 1, further comprising an exhaust device in gas communication with the first space to assist in discharging the gas.

8. The dehumidifying EFEM of claim 7 , wherein the exhaust system comprises one or more baffles including openings.

9. The dehumidifying EFEM of claim 8 , wherein the openings are one or more uniformly formed on the baffle.

10. 8. The dehumidifying EFEM of claim 7, further comprising an exhaust pipe coupled to the exhaust device and providing an exhaust passage for gas.

11. A dehumidification module applicable to an EFEM including a front-opening unified pod (FOUP) on which substrates are loaded, and a main body communicating with the FOUP through a door and having a first space formed therein in which the substrates being transported can be accommodated, A dehumidification module including a dehumidifier disposed in communication with the first space and configured to dehumidify gas and supply the dehumidified gas to the first space.

12. 12. The dehumidification module of claim 11, further comprising a filter for filtering the dehumidified gas.

13. The dehumidifier is A dehumidifying filter unit that filters outside air; an intake section that draws in the gas filtered from the dehumidifying filter section; a dehumidification unit that receives gas from the suction unit and performs dehumidification; The dehumidification module according to claim 11 , further comprising: a cooling unit that cools the gas dehumidified by the dehumidification unit.

14. The dehumidifier is The dehumidification module according to claim 13 , further comprising a regeneration gas inlet and a regeneration gas outlet through which the regeneration gas of the dehumidification section flows.

15. The dehumidification module according to claim 11, further comprising a fan filter module including a blower for blowing gas and a main filter unit for filtering the blown gas.

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