Polishing liquid set, polishing liquid manufacturing method, polishing liquid, and polishing method

Abstract

To provide a polymer composition having excellent storage stability as a polymer composition containing a polymer and an aqueous medium, and also provides a polymer from which a polishing liquid that contains an abrasive and a polymer and can suppress excessive dishing during over-polishing of a patterned wafer can be obtained.SOLUTION: A polymer for a polishing liquid has a first structural unit derived from at least one styrene compound selected from the group consisting of styrene and styrene derivatives, and a second structural unit derived from at least one methacrylic acid compound selected from the group consisting of methacrylic acid and salts thereof, the content of the first structural unit is more than 0 mol% and 38 mol% or less.SELECTED DRAWING: None

Description

[Technical field]

[0001] The present disclosure relates to a polymer, a polymer composition, a polishing liquid set, a polishing liquid, a method for producing a polishing liquid, a polishing method, and the like. [Background technology]

[0002] In recent years, processing techniques for achieving higher density and finer detail have become increasingly important in the manufacturing process of semiconductor parts. One of the processing techniques, CMP (Chemical Mechanical Polishing), is essential for forming STI, planarizing premetal insulating films or interlayer insulating films, forming plugs or buried metal wiring, and the like in the manufacturing process of semiconductor parts. As a polishing liquid used in a polishing process such as the CMP process, a polishing liquid containing abrasive grains, a polymer, and an aqueous medium is known (see, for example, Patent Documents 1 to 3 below). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2015 / 170436 [Patent Document 2] JP 2011-103498 A [Patent Document 3] International Publication No. 2007 / 055278 Summary of the Invention [Problem to be solved by the invention]

[0004] In some cases, the components of the polishing liquid are stored in a state separated into a polymer composition (polymer-containing composition) containing a polymer and an aqueous medium for the polishing liquid and other components such as abrasive grains, and the polishing liquid is obtained by mixing the polymer composition with the other components. However, since a certain amount of time has passed since the preparation of the polymer composition containing a polymer and an aqueous medium for the polishing liquid, sediment may occur, it is desired to improve the storage stability of the polymer composition.

[0005] In recent years, miniaturization of semiconductor parts has been accelerating, and the wiring width is shrinking and the thickness is becoming thinner. As a result, the standards required for the manufacturing process of semiconductor parts are becoming stricter, and there is a need to highly planarize a base having multiple insulating members. For example, in CMP technology (CMP technology for forming STI, etc.), a pattern wafer having a substrate having a concave-convex pattern, a stopper (a member containing a stopper material) placed on the convex portion of the substrate, and an insulating member (a member containing an insulating material) placed on the substrate and the stopper so as to fill the concave portion of the substrate may be polished. In such polishing, the polishing of the insulating member is stopped by the stopper, and the polishing of the insulating member is stopped at the stage where the stopper is exposed. This is because it is difficult to artificially control the amount of polishing of the insulating member (for example, the thickness removed in the insulating member), and the degree of polishing is controlled by polishing the insulating member until the stopper is exposed.

[0006] In the CMP technique, after polishing is stopped at the stage where the stopper is exposed by polishing the insulating member, in order to prevent the insulating member from remaining on the stopper, the polishing may be performed extra after the stopper is exposed. This extra polishing is called "over-polishing". On the other hand, when over-polishing is performed, even insulating members other than the insulating member remaining on the stopper (insulating members embedded in the recesses of the substrate) may be polished extra. This may cause dishing (a phenomenon in which insulating members other than the insulating member remaining on the stopper (insulating members embedded in the recesses of the substrate) are excessively polished), resulting in poor flatness after polishing. For this reason, it is required that the polishing liquid containing abrasive grains suppresses excessive dishing during over-polishing of a pattern wafer having protrusions and recesses.

[0007] An object of one aspect of the present disclosure is to provide a polymer that can provide a polymer composition having excellent storage stability as a polymer composition containing a polymer and an aqueous medium, and can provide a polishing liquid that can suppress excessive dishing during over-polishing of a patterned wafer as a polishing liquid containing an abrasive grain and a polymer. Another object of the present disclosure is to provide a polymer composition containing the polymer. Another object of the present disclosure is to provide a polishing liquid set including the polymer composition. Another object of the present disclosure is to provide a polishing liquid containing the polymer. Another object of the present disclosure is to provide a manufacturing method for a polishing liquid using the polymer composition. Another object of the present disclosure is to provide a polishing method using the polishing liquid. [Means for solving the problem]

[0008] The present disclosure relates in some aspects to the following items [1] to

[12] , etc. [1] A polymer for a polishing liquid, the polymer having a first structural unit derived from at least one styrene compound selected from the group consisting of styrene and styrene derivatives, and a second structural unit derived from at least one methacrylic acid compound selected from the group consisting of methacrylic acid and salts thereof, the content of the first structural unit being more than 0 mol% and 38 mol% or less. [2] The polymer according to [1], wherein the first structural unit includes a structural unit derived from styrene. [3] The polymer according to [1] or [2], wherein the content of the second structural unit is 60 to 90 mol %. [4] The total amount of carboxyl groups and carboxylate groups is 6.7 × 10 -3 mol / g or more, and the converted total amount is calculated by replacing carboxylate groups in the polymer with carboxy groups. [5] The polymer according to any one of [1] to [4], which has a weight average molecular weight of 3,000 to 500,000. [6] A polymer composition comprising the polymer according to any one of [1] to [5] and an aqueous medium. [7] A polishing liquid set comprising the polymer composition according to [6] and a liquid containing abrasive grains and an aqueous medium. [8] The polishing liquid set according to [7], wherein the abrasive grains contain at least one oxide selected from the group consisting of cerium oxide, silicon oxide, aluminum oxide, zirconium oxide and yttrium oxide. [9] A polishing liquid comprising an abrasive grain, the polymer according to any one of [1] to [5], and an aqueous medium.

[10] The polishing liquid according to [9], wherein the abrasive grains contain at least one oxide selected from the group consisting of cerium oxide, silicon oxide, aluminum oxide, zirconium oxide and yttrium oxide.

[11] A method for producing a polishing liquid, comprising a step of mixing the polymer composition according to [6] with a liquid containing abrasive grains and an aqueous medium.

[12] A polishing method comprising a step of polishing a surface to be polished using the polishing liquid described in [9]. Effect of the Invention

[0009] According to one aspect of the present disclosure, a polymer composition having excellent storage stability can be obtained as a polymer composition containing a polymer and an aqueous medium, and a polymer capable of obtaining a polishing liquid capable of suppressing excessive dishing during over-polishing of a patterned wafer as a polishing liquid containing an abrasive grain and a polymer can be provided. According to another aspect of the present disclosure, a polymer composition containing the polymer can be provided. According to another aspect of the present disclosure, a polishing liquid set including the polymer composition can be provided. According to another aspect of the present disclosure, a polishing liquid containing the polymer can be provided. According to another aspect of the present disclosure, a method for producing a polishing liquid using the polymer composition can be provided. According to another aspect of the present disclosure, a polishing method using the polishing liquid can be provided. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, embodiments of the present disclosure will be described in detail.

[0011] <Definition> In this specification, the term "polishing liquid" is defined as a composition that comes into contact with the surface to be polished during polishing. The term "polishing liquid" itself does not limit the components contained in the polishing liquid. As described later, the polishing liquid according to this embodiment can contain abrasive grains. Abrasive grains are also called "abrasive particles", but are referred to as "abrasive grains" in this specification. Abrasive grains are generally solid particles, and during polishing, it is considered that the object to be removed is removed by the mechanical action of the abrasive grains and the chemical action of the abrasive grains (mainly the surfaces of the abrasive grains), but the mechanism of polishing is not limited.

[0012] In this specification, the term "process" includes not only an independent process, but also a process that cannot be clearly distinguished from other processes, as long as the intended effect of the process is achieved. A numerical range indicated using "~" indicates a range including the numerical values ​​before and after "~" as the minimum and maximum values, respectively. In the numerical ranges described in stages in this specification, the upper limit or lower limit of a numerical range of a certain stage can be arbitrarily combined with the upper limit or lower limit of a numerical range of another stage. In the numerical ranges described in this specification, the upper limit or lower limit of the numerical range may be replaced with a value shown in the examples. Unless otherwise specified, the materials exemplified in this specification may be used alone or in combination of two or more types. When a plurality of substances corresponding to each component are present in the composition, the amount of each component in the composition means the total amount of the plurality of substances present in the composition, unless otherwise specified. "Polishing rate" means the rate at which material is removed per unit time (removal rate = removal rate). "A or B" may include either A or B, or may include both. The numerical range "A or more" means A and a range exceeding A. The numerical range "A or less" means A and a range less than A. The "hydroxy group" does not include the OH structure contained in the carboxy group or sulfo group (sulfonic acid group). The "carboxylate group" has a structure in which the carboxy group forms a salt, and examples of such groups include -COONa, -COOK, and -COONH4. The "main chain" of a polymer refers to the molecular chain that constitutes the longest molecular chain (e.g., a hydrocarbon chain) in the polymer, and the "side chain" refers to a molecular chain other than the main chain. The "aqueous medium" refers to water or a hydrophilic solvent that is compatible with water at 25°C.

[0013] In this specification, unless otherwise specified, the term "ethylenically unsaturated bond" refers to an ethylenically unsaturated bond having radical polymerizability. In the case of a polymer having a structural unit A derived from a compound A having an ethylenically unsaturated bond A, the chemical structure of the portion of the structural unit A of the polymer other than the portion corresponding to the ethylenically unsaturated bond A of the compound A is the same as the chemical structure of the portion of the compound A before polymerization other than the ethylenically unsaturated bond A. For example, a structural unit derived from styrene has a structure of "-CH2CH(C6H5(phenyl group))-" in the polymer. In the case of a structural unit having an ionic functional group, even if ion exchange is performed after polymerization, the structural unit is named based on the structure of the polymer. For example, when the corresponding structural unit is "-CH2CH(COOH)-" by ion exchange after polymerization of sodium acrylate, this structural unit is called a "structural unit derived from acrylic acid".

[0014] In this specification, the median diameter (D50) is the particle diameter of particles such as abrasive grains that is 50% in the cumulative particle size distribution based on volume. The median diameter (D50) can be measured using a laser diffraction / scattering type particle size distribution measuring device (manufactured by Microtrac-Bell Corporation, product name: Microtrac MT3300EXII) by using a dispersion liquid (e.g., a polishing liquid) in which particles are dispersed in a liquid as a sample.

[0015] In this specification, the pH of a liquid (such as a solution or dispersion) can be measured under the following conditions. Measurement temperature: 25℃±0.5℃ Measuring device: Model D-71, manufactured by Horiba Ltd. Measurement method: After two-point calibration using standard buffer solutions (phthalate pH buffer solution, pH: 4.01 (25°C); neutral phosphate pH buffer solution, pH: 6.86 (25°C)), the electrode is placed in the liquid and the pH is measured after stabilization for more than 3 minutes using the measuring device described above.

[0016] <Polymer> The polymer according to the present embodiment is a polymer for polishing liquid (a polymer used as a component of the polishing liquid), and may be, for example, a polymer for CMP polishing liquid (a polymer used as a component of the CMP polishing liquid). The polymer according to the present embodiment has a first structural unit (a monomer unit of a styrene compound) derived from at least one styrene compound selected from the group consisting of styrene and styrene derivatives, and a second structural unit (a monomer unit of a methacrylic acid compound) derived from at least one methacrylic acid compound selected from the group consisting of methacrylic acid and its salts (salts of methacrylic acid). That is, the polymer according to the present embodiment has a styrene compound and a methacrylic acid compound as monomer units. The content of the first structural unit in the polymer according to the present embodiment is more than 0 mol% and 38 mol% or less. Hereinafter, the polymer according to the present embodiment may be referred to as "polymer P" in some cases.

[0017] According to the polymer P of this embodiment, it is possible to suppress the generation of sediment over time in a polymer composition (polymer-containing composition) containing the polymer P and an aqueous medium, and a polymer composition having excellent storage stability can be obtained. For example, according to the polymer P of this embodiment, as shown in the evaluation method (visual observation of the presence or absence of sediment) described in the examples described later, when the polymer composition is centrifuged after being kept at 60°C for 7 days (168 hours) after preparation, an evaluation result of A, B, or C can be obtained.

[0018] The pH of the polishing liquid is adjusted according to the type of object to be polished, and may be adjusted to, for example, an acidic region. Therefore, when the components of the polishing liquid are stored in a state where the polymer composition containing the polymer for the polishing liquid and other components such as abrasive grains are separated, the pH of the polymer composition may also be adjusted to an acidic region so that the pH of the polishing liquid is adjusted to an acidic region when the polymer composition and other components are mixed. However, when the pH of the polymer composition containing the polymer for the polishing liquid is maintained in the acidic region, precipitates may occur, so it is required to improve the storage stability of the polymer composition having a pH in the acidic region. In contrast, according to one aspect of the polymer P according to this embodiment, even if the polymer composition containing the polymer P and the aqueous medium has a pH in the acidic region (for example, pH 4.0 or more and less than 7.0), it is possible to suppress the generation of precipitates over time, and a polymer composition having excellent storage stability can be obtained. One aspect of the polymer P according to this embodiment may be used in a polymer composition that does not have a pH in the acidic region, as long as it has the property of suppressing the generation of precipitates over time when the polymer composition has a pH in the acidic region.

[0019] When a certain time has passed since the preparation of a polymer composition containing a polymer and an aqueous medium for use in a polishing liquid, the transmittance may decrease. In contrast, according to one aspect of the polymer P according to this embodiment, in a polymer composition containing the polymer P and an aqueous medium, it is possible to suppress the decrease in transmittance over time, and a polymer composition having even better storage stability can be obtained. In addition, according to one aspect of the polymer P according to this embodiment, even if the polymer composition containing the polymer P and an aqueous medium has a pH in the acidic range, the decrease in transmittance over time can be suppressed. For example, according to one aspect of the polymer P according to this embodiment, as shown in the evaluation method (measurement of transmittance) described in the examples below, in a supernatant obtained by centrifuging a polymer composition kept at 60° C. for 7 days (168 hours) after preparation, a transmittance of light at a wavelength of 700 nm can be obtained, for example, of 90% or more (preferably 94% or more, 96% or more, 97% or more, etc.).

[0020] According to the polymer P of this embodiment, a polishing liquid containing abrasive grains and polymer P can be obtained that can suppress excessive dishing during over-polishing of a patterned wafer. This allows the surface of the patterned wafer to be polished and flattened with high precision. For example, according to the polymer P of this embodiment, by using a polishing liquid containing abrasive grains and polymer P, excessive dishing can be suppressed during over-polishing of a portion of L / S=20 / 80 μm (a pattern in which convex portions having a width of 20 μm and concave portions having a width of 80 μm are alternately arranged) in a patterned wafer, and as shown by the evaluation method described in the examples below, the amount of remaining steps in the portion of L / S=20 / 80 μm can be reduced to, for example, 60 nm or less (preferably, 50 nm or less, 40 nm or less, 30 nm or less, 20 nm or less, etc.).

[0021] According to one aspect of the polymer P of this embodiment, by using a polishing liquid containing abrasive grains and the polymer P, it is possible to suppress excessive dishing during over-polishing of an L / S=50 / 50 μm portion (a pattern in which 50 μm-wide convex portions and 50 μm-wide concave portions are arranged alternately) in a patterned wafer, and as shown by the evaluation method described in the examples below, the residual step amount in the L / S=50 / 50 μm portion can be reduced to, for example, 30 nm or less (preferably, 20 nm or less, 10 nm or less, 5.0 nm or less, etc.).

[0022] According to one aspect of the polymer P according to the present embodiment, a polishing liquid capable of suppressing over-polishing of the stopper arranged on the convex portion during over-polishing of the patterned wafer can be obtained. According to one aspect of the polymer P according to the present embodiment, by using a polishing liquid containing abrasive grains and polymer P, over-polishing of the stopper can be suppressed during over-polishing of the L / S=20 / 80 μm portion of the patterned wafer, and as shown in the evaluation method described in the examples below, the polishing amount of the stopper at the L / S=20 / 80 μm portion can be reduced to, for example, 4.0 nm or less (preferably, 2.0 nm or less, 1.5 nm or less, etc.). According to one aspect of the polymer P according to the present embodiment, by using a polishing liquid containing abrasive grains and polymer P, over-polishing of the stopper can be suppressed during over-polishing of the L / S=50 / 50 μm portion of the patterned wafer, and as shown in the evaluation method described in the examples below, the polishing amount of the stopper at the L / S=50 / 50 μm portion can be reduced to, for example, 1.0 nm or less (preferably, 0.5 nm or less, 0.3 nm or less, etc.).

[0023] According to one aspect of the polymer P of this embodiment, by using a polishing liquid containing abrasive grains and polymer P, in a patterned wafer having a substrate having a concave-convex pattern, a stopper (a member containing a stopper material) arranged on the convex portions of the substrate, and an insulating member (a member containing an insulating material) arranged on the substrate and the stopper so as to fill the concave portions of the substrate, when the stopper material is silicon nitride and the insulating material is silicon oxide, excessive dishing can be suppressed during over-polishing, and over-polishing of the stopper can be suppressed during over-polishing.

[0024] The polymer P according to this embodiment has a first structural unit derived from at least one styrene compound selected from the group consisting of styrene and styrene derivatives. The first structural unit may contain a structural unit derived from styrene from the viewpoint of easily suppressing excessive dishing (easy to suppress excessive dishing during over-polishing of a patterned wafer (unless otherwise specified, any patterned portion such as a portion of L / S=20 / 80 μm, a portion of L / S=50 / 50 μm, etc.) using a polishing liquid containing abrasive grains and polymer P: same below), or easy to suppress over-polishing of a stopper (easy to suppress over-polishing of a stopper during over-polishing of a patterned wafer (unless otherwise specified, any patterned portion such as a portion of L / S=20 / 80 μm, a portion of L / S=50 / 50 μm, etc.) using a polishing liquid containing abrasive grains and polymer P: same below).

[0025] The solubility of the styrene compound in water at 25°C may be in the following range. From the viewpoint of easily suppressing excessive dishing or easily suppressing overpolishing of the stopper, the solubility of the styrene compound may be 0.1 g / 100 mL or less, 0.05 g / 100 mL or less, or 0.03 g / 100 mL or less. From the viewpoint of easily obtaining excellent storage stability of the polymer composition, the solubility of the styrene compound may be 0.01 g / 100 mL or more, 0.02 g / 100 mL or more, or 0.025 g / 100 mL or more. From these viewpoints, the solubility of the styrene compound may be 0.01 to 0.1 g / 100 mL. The solubility of styrene in water at 25°C is 0.03 g / 100 mL.

[0026] Examples of the styrene derivative include alkylstyrenes (α-methylstyrene, etc.), alkoxystyrenes (α-methoxystyrene, p-methoxystyrene, etc.), m-chlorostyrene, trimethylsilylstyrene, 4-carboxystyrene, and styrenesulfonic acid. From the viewpoint of easily suppressing excessive dishing or easily suppressing overpolishing of the stopper, the styrene derivative may contain at least one selected from the group consisting of hydrocarbon compounds and compounds in which at least one hydrogen atom contained in a hydrocarbon compound is substituted with a halogen atom, or may contain a hydrocarbon compound. The first structural unit in the polymer P may be an embodiment consisting of a structural unit derived from at least one selected from the group consisting of hydrocarbon compounds and compounds in which at least one hydrogen atom contained in a hydrocarbon compound is substituted with a halogen atom, or may be an embodiment consisting of a structural unit derived from a hydrocarbon compound.

[0027] The styrene derivative does not need to have a hydrophilic structure, from the viewpoint of easily suppressing excessive dishing or easily suppressing overpolishing of the stopper. Examples of the hydrophilic structure include a polyether group, a hydroxy group, a carboxy group, a carboxylate group, a sulfonic acid group, and an amino group.

[0028] The content (content) of the first structural unit in the polymer P is 38 mol% or less based on the total amount of the structural units constituting the polymer P, from the viewpoint of obtaining excellent storage stability of the polymer composition. The content of the first structural unit may be 35 mol% or less, 32 mol% or less, 30 mol% or less, 28 mol% or less, 25 mol% or less, 22 mol% or less, 20 mol% or less, 18.5 mol% or less, 18 mol% or less, or 17 mol% or less, from the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper. The content of the first structural unit may be 16 mol% or less, 15.5 mol% or less, 15 mol% or less, less than 15 mol%, 14.5 mol% or less, or 14 mol% or less. The content (content) of the first structural unit in the polymer P is more than 0 mol% based on the total amount of structural units constituting the polymer P, from the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper. The content of the first structural unit may be 1.0 mol% or more, 3.0 mol% or more, 5.0 mol% or more, 7.0 mol% or more, 9.0 mol% or more, 10 mol% or more, 11 mol% or more, 13 mol% or more, 14 mol% or more, 14.5 mol% or more, 15 mol% or more, 15.5 mol% or more, 16 mol% or more, or 17 mol% or more, from the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper. The content of the first structural unit may be 18 mol% or more, 18.5 mol% or more, 20 mol% or more, 22 mol% or more, 25 mol% or more, 28 mol% or more, or 30 mol% or more. From these viewpoints, the content of the first structural unit in the polymer P may be more than 0 mol% and 35 mol% or less, 1.0 to 38 mol%, 5.0 to 38 mol%, 7.0 to 35 mol%, 9.0 to 32 mol%, 11 to 25 mol%, 13 to 25 mol%, or 15.5 to 18.5 mol%.When polymer P has structural units derived from styrene and structural units derived from a styrene derivative, the content of the first structural units is the total amount of the structural units derived from styrene and the structural units derived from a styrene derivative.

[0029] The polymer P according to this embodiment has a second structural unit derived from at least one methacrylic acid compound selected from the group consisting of methacrylic acid and its salts. Examples of the salts of methacrylic acid include alkali metal salts (sodium salts, potassium salts, etc.) and ammonium salts. The second structural unit may contain a structural unit derived from methacrylic acid from the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper.

[0030] The content (content) of the second structural unit in polymer P may be less than 100 mol%, 99 mol% or less, 97 mol% or less, 95 mol% or less, 93 mol% or less, 91 mol% or less, 90 mol% or less, 89 mol% or less, 87 mol% or less, 86 mol% or less, 85.5 mol% or less, 85 mol% or less, 84.5 mol% or less, 84 mol% or less, or 83 mol% or less, based on the total amount of the structural units constituting polymer P, from the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper. The content of the second structural unit may be 82 mol% or less, 81.5 mol% or less, 80 mol% or less, 78 mol% or less, 75 mol% or less, 72 mol% or less, 70 mol% or less, 68 mol% or less, 65 mol% or less, 62 mol% or less, 60 mol% or less, 50 mol% or less, 40 mol% or less, 30 mol% or less, 20 mol% or less, 15 mol% or less, 12 mol% or less, or 10 mol% or less. The content (content) of the second structural unit in the polymer P is more than 0 mol% from the viewpoint of obtaining excellent storage stability of the polymer composition and from the viewpoint of suppressing excessive dishing during over-polishing of the L / S=20 / 80 μm portion of the patterned wafer. The content of the second structural unit may be 1.0 mol% or more, 3.0 mol% or more, 5.0 mol% or more, 7.0 mol% or more, 9.0 mol% or more, 10 mol% or more, 20 mol% or more, 30 mol% or more, 40 mol% or more, 50 mol% or more, 60 mol% or more, 62 mol% or more, 65 mol% or more, 68 mol% or more, 70 mol% or more, 72 mol% or more, 75 mol% or more, 78 mol% or more, 80 mol% or more, 81.5 mol% or more, 82 mol% or more, or 83 mol% or more, from the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper. The content of the second structural unit may be 84 mol% or more, 84.5 mol% or more, 85 mol% or more, 85.5 mol% or more, or 86 mol% or more.From these viewpoints, the content of the second structural unit in the polymer P may be more than 0 mol% and less than 100 mol%, 65 mol% or more and less than 100 mol%, 62 to 99 mol%, 5.0 to 95 mol%, 7.0 to 95 mol%, 9.0 to 95 mol%, 50 to 93 mol%, 60 to 90 mol%, 65 to 91 mol%, 68 to 89 mol%, 75 to 87 mol%, or 81.5 to 85.5 mol%. When the polymer P has a structural unit derived from methacrylic acid and a structural unit derived from a salt of methacrylic acid, the content of the second structural unit is the total amount of the structural unit derived from methacrylic acid and the structural unit derived from a salt of methacrylic acid.

[0031] At least one selected from the group consisting of the first structural unit and the second structural unit may be contained in the main chain of the polymer P, or may be contained in a side chain of the polymer P. The main chain of the polymer P may contain at least one selected from the group consisting of the first structural unit and the second structural unit, or may contain the first structural unit and the second structural unit, from the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper.

[0032] The total amount of the first structural unit and the second structural unit may be 10% by mass or more, 20% by mass or more, 30% by mass or more, 40% by mass or more, 50% by mass or more, 60% by mass or more, 70% by mass or more, 80% by mass or more, 90% by mass or more, 95% by mass or more, 97% by mass or more, 98% by mass or more, or 99% by mass or more based on the total mass of the structural units constituting the polymer P, from the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper. The structural units constituting the polymer P may be substantially composed of the first structural unit and the second structural unit (substantially 100% by mass of the structural units constituting the polymer P are the first structural unit and the second structural unit).

[0033] The molar ratio A of the content of the second structural unit to the content of the first structural unit (ratio of substance amount: content of the second structural unit / content of the first structural unit) may be in the following range. From the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper, the molar ratio A may be 0.10 or more, 0.30 or more, 0.50 or more, 0.80 or more, 1.0 or more, 2.0 or more, 2.5 or more, 3.0 or more, 3.5 or more, 4.0 or more, or 4.5 or more. The molar ratio A may be 5.0 or more, 5.5 or more, or 6.0 or more. From the viewpoint of easily obtaining excellent storage stability of the polymer composition, from the viewpoint of easily suppressing excessive dishing, or from the viewpoint of easily suppressing overpolishing of the stopper, the molar ratio A may be 10 or less, 9.0 or less, 8.0 or less, 7.0 or less, 6.5 or less, 6.0 or less, 5.5 or less, or 5.0 or less. The molar ratio A may be 4.5 or less, 4.0 or less, 3.5 or less, 3.0 or less, 2.5 or less, 2.0 or less, 1.0 or less, 0.80 or less, 0.50 or less, or 0.40 or less. From these viewpoints, the molar ratio A may be 0.10 to 10, 2.0 to 10, 4.5 to 10, 0.10 to 6.5, 2.0 to 6.5, 4.5 to 6.5, 0.10 to 5.5, 2.0 to 5.5, or 4.5 to 5.5.

[0034] The polymer P may have a structural unit derived from other monomers (monomers not corresponding to styrene compounds and methacrylic acid compounds) polymerizable with a styrene compound or a methacrylic acid compound. As such a monomer, a polymerizable vinyl compound can be used, and examples of the monomer include acrylic acid, (meth)acrylic acid alkyl esters (methyl (meth)acrylate, ethyl (meth)acrylate, n-butyl (meth)acrylate, iso-butyl (meth)acrylate, tert-butyl (meth)acrylate, cyclohexyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, lauryl (meth)acrylate, stearyl (meth)acrylate, isobornyl (meth)acrylate, etc.), heterocyclic vinyl compounds (vinylpyrrolidone, etc.), hydroxy vinyl compounds, etc., and the like. Alkyl (meth)acrylates (2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, etc.), polyalkylene glycol (meth)acrylates (ethylene glycol (meth)acrylate, butylene glycol (meth)acrylate, etc.), alkylamino (meth)acrylates (N,N-dimethylaminoethyl (meth)acrylate, N,N-dimethylaminopropyl (meth)acrylate, etc.), vinyl ester compounds (vinyl formate, vinyl acetate, vinyl propionate, vinyl versaticate (for example, trade name: VeoVa 10, Hexion Specialty Chemicals), etc.), monoolefin compounds (ethylene, propylene, butylene, isobutylene, etc.), conjugated diolefin compounds (butadiene, isoprene, chloroprene, etc.), α,β-unsaturated mono- or dicarboxylic acids other than acrylic acid and methacrylic acid (crotonic acid, citraconic acid, maleic acid, itaconic acid, maleic anhydride, fumaric acid, etc.), carboxy group-containing vinyl compounds (monohydroxyethyl (meth)acrylate phthalate, monohydroxypropyl (meth)acrylate oxalate, etc.), amine imide group-containing vinyl compounds (1,1,1-trimethylamine methacrylimide, etc.), cyanide vinyl compounds (acrylonitrile, methacrylonitrile, etc.), amide group- or substituted amide group-containing α,β-ethylenically unsaturated compounds ((meth)acrylamide, N-methylacrylamide, N,N-dimethyl(meth)acrylamide, N,N-dimethylaminopropyl (meth)acrylamide, etc.), carbonyl group-containing α,β-ethylenically unsaturated compounds (acrolein, diacetone acrylamide, vinyl methyl ketone, diacetone acrylate, acetonitrile acrylate, etc.), sulfonic acid group-containing α,β-ethylenically unsaturated compounds (allyl sulfonate, sodium p-styrenesulfonate, etc.), etc.

[0035] The polymer P according to this embodiment may have a third structural unit derived from at least one selected from the group consisting of carboxylic acids other than methacrylic acid and salts thereof. Examples of carboxylic acids other than methacrylic acid include acrylic acid, maleic acid, itaconic acid, and other carboxylic acids having an ethylenically unsaturated bond. The content of the second structural unit in the polymer P having the third structural unit is more than 0 mol% based on the total mass of the structural units constituting the polymer P from the viewpoint of obtaining excellent storage stability of the polymer composition and from the viewpoint of suppressing excessive dishing during over-polishing of the L / S=20 / 80 μm portion of the patterned wafer using a polishing liquid containing abrasive grains and the polymer P, and may be 1.0 mol% or more, 3.0 mol% or more, 5.0 mol% or more, 7.0 mol% or more, 9.0 mol% or more, or 10 mol% or more from the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing over-polishing of the stopper. The content of the second structural unit in the polymer P having the third structural unit may be within the above-mentioned ranges, for example, 30 mol% or less, 20 mol% or less, 15 mol% or less, 12 mol% or less, or 10 mol% or less, based on the total mass of the structural units constituting the polymer P. The content of the first structural unit in the polymer P having the third structural unit may be within the above-mentioned ranges.

[0036] In the polymer P according to the present embodiment, the content B of structural units derived from at least one selected from the group consisting of acrylic acid and maleic acid (the total amount of structural units derived from acrylic acid and structural units derived from maleic acid) may be in the following range based on the total mass of the structural units constituting the polymer P. The content B may be 70 mol% or less, 60 mol% or less, 50 mol% or less, 40 mol% or less, less than 40 mol%, 30 mol% or less, 20 mol% or less, 10 mol% or less, 5 mol% or less, or 1 mol% or less. The content B may be 0 mol% or more, or more than 0 mol%.

[0037] In polymer P according to this embodiment, the content of structural units derived from a monomer having at least one selected from the group consisting of a sulfonic acid group and a sulfonate group may be 5 mol% or less, less than 5 mol%, 1 mol% or less, or 0 mol% or less, and may be 0 mol%.

[0038] In the polymer P according to this embodiment, the content of structural units derived from acrylonitrile may be 10 mol % or less, less than 10 mol %, 5 mol % or less, 1 mol % or less, or 0 mol % or less, and may be 0 mol %.

[0039] The content of the structural units constituting the polymer P is 13 Specifically, the content of the structural units constituting the polymer P can be measured by C-NMR. TM Using a Bruker Avance NEO400 Onebay equipped with a 5mm (BBO type) 13 It can be measured by C-NMR (resonance frequency: 100 MHz, measurement temperature: 25°C, relaxation waiting time: 4 seconds). The content of the structural unit can be adjusted by adjusting the amount of each monomer used during the synthesis of the polymer P, the timing of its addition, and the like.

[0040] The converted total amount C of the carboxyl group and the carboxylate group in the polymer P according to the present embodiment may be in the following range based on the total amount of the polymer P. The converted total amount C is preferably 6.5×10 to 7.5×10 from the viewpoint of easily obtaining good solubility of the polymer P in an aqueous medium, easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper. -3 mol / g or more, 6.7×10 -3 mol / g or more, 7.0×10 -3 mol / g or more, 7.4×10 -3 mol / g or more, 7.5×10 -3 mol / g or more, 8.0×10 -3 mol / g or more, 8.3×10 -3 mol / g or more, 8.5×10 -3 mol / g or more, 9.0×10 -3 mol / g or more, 9.1×10 -3 mol / g or more, or 9.3×10 -3 mol / g or more. The converted total amount C is 9.5×10 -3 The converted total amount C may be 1.1×10 mol / g or more from the viewpoint of easily adjusting the pH of the polymer composition or the polishing liquid, easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper. -2 mol / g or less, 1.0×10 -2 mol / g or less, 9.8×10 -3 mol / g or less, 9.5×10 -3 mol / g or less, or 9.3×10 -3 The converted total amount C is 9.1×10 -3 mol / g or less, 9.0×10 -3 mol / g or less, 8.5×10 -3 mol / g or less, 8.3×10 -3 mol / g or less, or 8.0×10 -3 From these viewpoints, the converted total amount C is 6.5×10 -3 ~1.1×10 -2 mol / g, 6.5×10 -3 ~9.8×10-3 mol / g, 6.5×10 -3 ~9.5×10 -3 mol / g, 7.5×10 -3 ~1.1×10 -2 mol / g, 7.5×10 -3 ~9.8×10 -3 mol / g, 7.5×10 -3 ~9.5×10 -3 mol / g, 9.0×10 -3 ~1.1×10 -2 mol / g, 9.0×10 -3 ~9.8×10 -3 mol / g or 9.0×10 -3 ~9.5×10 -3 The total amount C of the carboxyl group and the carboxylate group is calculated by replacing the carboxylate group in the polymer with the carboxyl group, and specifically, can be calculated by the method described in the Examples.

[0041] The weight average molecular weight of the polymer P may be in the following ranges from the viewpoint of easily obtaining excellent storage stability of the polymer composition, easily suppressing excessive dishing, or easily suppressing overpolishing of the stopper. The weight average molecular weight may be 500000 or less, 300000 or less, 200000 or less, 100000 or less, 80000 or less, 60000 or less, 50000 or less, 45000 or less, 43000 or less, 42000 or less, 40000 or less, or 39000 or less. The weight average molecular weight may be 3000 or more, 5000 or more, 10000 or more, 20000 or more, more than 20000, 30000 or more, 35000 or more, 39000 or more, 40000 or more, 42000 or more, or 43000 or more. From these viewpoints, the weight average molecular weight of the polymer P may be 3000 to 500000, 3000 to 100000, 3000 to 50000, 30000 to 500000, 30000 to 100000, 30000 to 50000, 40000 to 500000, 40000 to 100000, or 40000 to 50000. The weight average molecular weight (Mw) is a pullulan-equivalent value measured by gel permeation chromatography (GPC), and specifically, can be measured by the method described in the Examples.

[0042] <Polymer Composition> The polymer composition (polymer-containing composition) according to this embodiment contains a polymer P and an aqueous medium. In the polymer composition according to this embodiment, the polymer P may be used alone or in combination of two or more types. For example, as the two or more types of polymer P, polymers P having different contents of structural units (first structural units, second structural units, etc.) may be used, or polymers P having different types of structural units (first structural units, second structural units, etc.) may be used. The polymer composition according to this embodiment does not need to contain abrasive grains.

[0043] In the polymer composition, at least a part (part or all) of the polymer P may be dissolved in the aqueous medium. The proportion of the polymer P dissolved in the aqueous medium in the polymer composition is not particularly limited, but may be 90% by mass or more, 95% by mass or more, or 99% by mass or more.

[0044] The content of the polymer P in the polymer composition may be in the following range based on the total mass of the polymer composition. The content of the polymer P may be 0.010 mass% or more, 0.050 mass% or more, 0.10 mass% or more, 0.50 mass% or more, 1.0 mass% or more, 2.0 mass% or more, or 3.0 mass% or more from the viewpoint of easily suppressing excessive dishing or easily suppressing overpolishing of the stopper. The content of the polymer P may be 30 mass% or less, 20 mass% or less, 10 mass% or less, 5.0 mass% or less, 4.0 mass% or less, or 3.0 mass% or less from the viewpoint of easily suppressing precipitation of the polymer P and enhancing storage stability. From these viewpoints, the content of the polymer P may be 0.010 to 30 mass%, 0.10 to 20 mass%, 1.0 to 10 mass%, or 2.0 to 5.0 mass%.

[0045] The aqueous medium may contain water and may contain a hydrophilic solvent that is compatible with water at 25° C. Examples of the hydrophilic solvent include, but are not limited to, alcohols such as methanol and ethanol; organic solvents such as acetone and N-methylpyrrolidone; and the like. The content of water in the aqueous medium is not particularly limited, but may be 50% by mass or more, 70% by mass or more, 85% by mass or more, or 95% by mass or more, or may be 100% by mass.

[0046] The polymer composition according to the present embodiment may contain components other than the abrasive grains, the polymer P, and the aqueous medium. Examples of such components include water-soluble polymers other than the polymer P, pH adjusters, buffers (buffers for stabilizing pH), and antifoaming agents (e.g., silicone mixtures).

[0047] A water-soluble polymer is defined as a polymer that dissolves at 0.1 g or more in 100 g of water (25° C.). Examples of water-soluble polymers other than polymer P include polyglycerin; polysaccharides such as alginic acid, pectinic acid, carboxymethylcellulose, agar, curdlan, and pullulan; homopolymers of unsaturated carboxylic acids such as acrylic acid, methacrylic acid, maleic acid, fumaric acid, and itaconic acid (polyacrylic acid, etc.); ammonium salts or amine salts of the homopolymers; copolymers of unsaturated carboxylic acids such as acrylic acid, methacrylic acid, maleic acid, fumaric acid, and itaconic acid with monomers such as alkyl acrylates (methyl acrylate, ethyl acrylate, etc.), hydroxyalkyl acrylates (hydroxyethyl acrylate, etc.), alkyl methacrylates (methyl methacrylate, ethyl methacrylate, etc.), hydroxyalkyl methacrylates (hydroxyethyl methacrylate, etc.), vinyl acetate, and vinyl alcohol (copolymers of acrylic acid and alkyl acrylate, etc.); and ammonium salts or amine salts of the copolymers.

[0048] Examples of pH adjusters include organic acids, inorganic acids, organic bases, and inorganic bases. Examples of organic acids include formic acid, acetic acid, propionic acid, butyric acid, valeric acid, caproic acid, lactic acid, maleic acid, phthalic acid, citric acid, and succinic acid. Examples of inorganic acids include nitric acid, sulfuric acid, hydrochloric acid, phosphoric acid, and boric acid. Examples of organic bases include triethylamine, pyridine, piperidine, pyrrolidine, imidazole, 2-methylimidazole, and chitosan. Examples of inorganic bases include tetramethylammonium hydroxide (TMAH), ammonia, potassium hydroxide, and sodium hydroxide.

[0049] The buffer may be provided as a buffer solution (a liquid containing the buffer), such as an acetate buffer, a phthalate buffer, etc.

[0050] The pH of the polymer composition according to the present embodiment may be 4.0 or more, 4.5 or more, or 5.0 or more, from the viewpoint of easily obtaining good solubility of the polymer P in the polymer composition. The pH of the polymer composition according to the present embodiment may be less than 7.0, 6.5 or less, 6.0 or less, or 5.5 or less. From these viewpoints, the pH of the polymer composition according to the present embodiment may be 4.0 or more and less than 7.0, 4.0 to 6.0, or 5.0 to 6.0.

[0051] <Polishing liquid set> The polishing liquid set according to this embodiment includes the polymer composition according to this embodiment and an abrasive-containing liquid (liquid containing abrasive and an aqueous medium) containing abrasive grains and an aqueous medium. A polishing liquid can be obtained by mixing the polymer composition and the abrasive-containing liquid in the polishing liquid set according to this embodiment. The polishing liquid set according to this embodiment may include a polymer composition, an abrasive-containing liquid, and a liquid containing components other than the abrasive grains, the polymer P, and the aqueous medium (water-soluble polymer, pH adjuster, buffer, defoamer, etc.). At least one selected from the group consisting of the polymer composition and the abrasive-containing liquid may contain the above-mentioned components other than the abrasive grains, the polymer P, and the aqueous medium (water-soluble polymer, pH adjuster, buffer, defoamer, etc.).

[0052] From the viewpoint of easily obtaining a desired polishing rate of an insulating material (such as silicon oxide), the abrasive grains may contain at least one selected from the group consisting of cerium oxide, silicon oxide (e.g., silica), aluminum oxide (e.g., alumina), zirconium oxide (e.g., zirconia), and yttrium oxide (e.g., yttria), and may contain cerium oxide. The cerium oxide may be CeO2 (cerium (IV) oxide, ceria) or Ce2O3 (cerium (III) oxide).

[0053] The abrasive-containing liquid may be an abrasive dispersion in which abrasive grains are dispersed in an aqueous medium. The abrasive dispersion may contain a dispersant (abrasive grain dispersant) such as a phosphate compound or a hydrogen phosphate compound. The aqueous medium of the abrasive dispersion may be the aqueous medium described above for the polymer composition. The aqueous medium of the polymer composition and the aqueous medium of the abrasive dispersion may have the same composition or different compositions.

[0054] <Polishing liquid and its manufacturing method> The polishing liquid according to this embodiment contains abrasive grains, polymer P, and an aqueous medium. In the polishing liquid according to this embodiment, the abrasive grains can be dispersed in the aqueous medium. In the polishing liquid, at least a portion (partial or all) of the polymer P may be dissolved in the aqueous medium. The proportion of the polymer P dissolved in the aqueous medium in the polishing liquid is not particularly limited, but may be 90% by mass or more, 95% by mass or more, or 99% by mass or more.

[0055] The polishing liquid according to the present embodiment can be used as a CMP polishing liquid. The polishing liquid according to the present embodiment can be used to polish a surface to be polished that includes an insulating material. The polishing liquid according to the present embodiment can be used to polish a surface to be polished that includes an insulating material and a stopper material, and can be used to selectively polish the insulating material relative to the stopper material. According to the polishing liquid according to the present embodiment, the surface to be polished can be suitably polished when the insulating material includes silicon oxide and the stopper material includes silicon nitride.

[0056] The polishing liquid according to the present embodiment may be obtained by mixing the abrasive grains, the polymer P, and an aqueous medium, may be obtained by mixing the abrasive grains and the polymer composition according to the present embodiment, or may be obtained by mixing the polymer composition according to the present embodiment and an abrasive grain-containing liquid containing the abrasive grains and an aqueous medium (for example, it may be obtained by mixing the polymer composition and the abrasive grain-containing liquid in the polishing liquid set according to the present embodiment). That is, the manufacturing method of the polishing liquid according to the present embodiment may include a step of mixing the abrasive grains, the polymer P, and an aqueous medium as a step of obtaining the polishing liquid, may include a step of mixing the abrasive grains and the polymer composition according to the present embodiment, or may include a step of mixing the polymer composition according to the present embodiment and an abrasive grain-containing liquid containing the abrasive grains and an aqueous medium (for example, a step of mixing the polymer composition and the abrasive grain-containing liquid in the polishing liquid set according to the present embodiment).

[0057] The abrasive grains, polymer P, and aqueous medium of the polishing liquid may be the abrasive grains, polymer P, and aqueous medium described above with respect to the polymer composition. For example, the abrasive grains may contain at least one selected from the group consisting of cerium oxide, silicon oxide (e.g., silica), aluminum oxide (e.g., alumina), zirconium oxide (e.g., zirconia), and yttrium oxide (e.g., yttria), and may contain cerium oxide, from the viewpoint of easily obtaining a desired polishing rate for an insulating material (such as silicon oxide). Each component of the polishing liquid may be the same as or different from each component of the polymer composition and the abrasive-containing liquid.

[0058] In the polishing liquid according to the present embodiment, one type of polymer P may be used alone, or two or more types may be used in combination. For example, as the two or more types of polymer P, polymers P having different contents of structural units (such as the first structural unit, the second structural unit, etc.) may be used, or polymers P having different types of structural units (such as the first structural unit, the second structural unit, etc.) may be used.

[0059] The polishing liquid according to this embodiment may contain the above-mentioned components (water-soluble polymer, pH adjuster, buffer, antifoaming agent, etc.) other than the abrasive grains, polymer P, and aqueous medium.

[0060] In the polishing liquid according to the present embodiment, the median diameter (D50) of the abrasive grains may be in the following range. The median diameter of the abrasive grains may be 1 nm or more, 5 nm or more, 10 nm or more, 20 nm or more, 30 nm or more, 40 nm or more, 50 nm or more, 60 nm or more, 65 nm or more, 70 nm or more, 75 nm or more, or 80 nm or more, from the viewpoint of easily improving the polishing rate of the insulating material (silicon oxide, etc.). The median diameter of the abrasive grains may be 1000 nm or less, 500 nm or less, 300 nm or less, 200 nm or less, 150 nm or less, 120 nm or less, 100 nm or less, 90 nm or less, or 80 nm or less, from the viewpoint of easily suppressing scratches on the polished surface. From these viewpoints, the median diameter of the abrasive grains may be 1 to 1000 nm, 10 to 1000 nm, 10 to 500 nm, 30 to 300 nm, 30 to 200 nm, 50 to 150 nm, or 65 to 100 nm.

[0061] The content of the abrasive grains may be in the following range based on the total mass of the polishing liquid. From the viewpoint of easily improving the polishing rate of the insulating material (silicon oxide, etc.), the content of the abrasive grains may be 0.01 mass% or more, 0.05 mass% or more, 0.1 mass% or more, 0.15 mass% or more, 0.2 mass% or more, 0.25 mass% or more, 0.3 mass% or more, 0.35 mass% or more, 0.4 mass% or more, 0.45 mass% or more, or 0.5 mass% or more. The content of the abrasive grains may be 20 mass% or less, 15 mass% or less, 10 mass% or less, 5 mass% or less, 3 mass% or less, 2 mass% or less, 1 mass% or less, 0.8 mass% or less, 0.6 mass% or less, or 0.5 mass% or less. From these viewpoints, the content of the abrasive grains may be 0.01 to 20 mass%, 0.05 to 10 mass%, or 0.1 to 1 mass%.

[0062] The content of the polymer P may be in the following range based on the total mass of the polishing liquid from the viewpoint of easily suppressing excessive dishing or easily suppressing overpolishing of the stopper. The content of the polymer P may be 0.01 mass% or more, 0.03 mass% or more, 0.05 mass% or more, 0.08 mass% or more, 0.1 mass% or more, 0.12 mass% or more, 0.14 mass% or more, or 0.15 mass% or more. The content of the polymer P may be 10 mass% or less, 8 mass% or less, 5 mass% or less, 3 mass% or less, 2 mass% or less, 1 mass% or less, 0.8 mass% or less, 0.5 mass% or less, 0.3 mass% or less, 0.2 mass% or less, or 0.15 mass% or less. From these viewpoints, the content of the polymer P may be 0.01 to 10 mass%, 0.05 to 1 mass%, or 0.1 to 0.5 mass%.

[0063] The content of the polymer P may be in the following range with respect to 100 parts by mass of the abrasive grains from the viewpoint of easily suppressing excessive dishing or easily suppressing overpolishing of the stopper. The content of the polymer P may be 1 part by mass or more, 5 parts by mass or more, 6 parts by mass or more, more than 6 parts by mass, 10 parts by mass or more, 15 parts by mass or more, 20 parts by mass or more, 25 parts by mass or more, or 30 parts by mass or more. The content of the polymer P may be 100 parts by mass or less, 80 parts by mass or less, 60 parts by mass or less, 55 parts by mass or less, 50 parts by mass or less, 45 parts by mass or less, 40 parts by mass or less, 35 parts by mass or less, or 30 parts by mass or less. From these viewpoints, the content of the polymer P may be 1 to 100 parts by mass, 1 to 60 parts by mass, or 10 to 50 parts by mass.

[0064] The pH of the polishing liquid according to this embodiment may be in the following ranges from the viewpoint of easily suppressing excessive dishing or from the viewpoint of easily suppressing overpolishing of the stopper. The pH of the polishing liquid may be 3.0 or more, 3.5 or more, 4.0 or more, 4.5 or more, 5.0 or more, 5.4 or more, or 5.5 or more. The pH of the polishing liquid may be 7.0 or less, less than 7.0, 6.5 or less, 6.0 or less, or 5.5 or less. From these viewpoints, the pH of the polishing liquid may be 3.0 to 7.0, 4.0 to 6.5, or 5.0 to 6.0.

[0065] <Polishing method> The polishing method according to this embodiment includes a polishing step of polishing a surface to be polished using the polishing liquid according to this embodiment. The polishing liquid used in the polishing step may be obtained by mixing abrasive grains and a polymer P, may be obtained by mixing abrasive grains and the polymer composition according to this embodiment, or may be obtained by mixing the polymer composition according to this embodiment with an abrasive-containing liquid containing abrasive grains and an aqueous medium (for example, it may be obtained by mixing the polymer composition in the polishing liquid set according to this embodiment with the abrasive-containing liquid). The polishing method according to this embodiment is, for example, a method for polishing a substrate having a surface to be polished.

[0066] The surface to be polished may include an insulating material and may include silicon oxide. The surface to be polished may include an insulating material and a stopper material (silicon nitride, polysilicon, etc.), for example, may include silicon oxide and silicon nitride. The polishing method according to this embodiment may be a polishing method for a substrate having a surface to be polished that includes an insulating material (silicon oxide, etc.) and a stopper material (silicon nitride, polysilicon, etc.). The substrate may have, for example, an insulating member including an insulating material and a stopper including a stopper material.

[0067] The polishing method according to this embodiment is a method for polishing a surface to be polished that includes an insulating material (silicon oxide, etc.) and a stopper material (silicon nitride, polysilicon, etc.), and may include a polishing step of selectively polishing the insulating material relative to the stopper material using the polishing liquid according to this embodiment, and may include a polishing step of selectively polishing silicon oxide relative to silicon nitride using the polishing liquid according to this embodiment. "Selectively polishing material A relative to material B" means that the polishing rate of material A is higher than the polishing rate of material B under the same polishing conditions. When selectively polishing silicon oxide relative to silicon nitride, the polishing selectivity of silicon oxide relative to silicon nitride may be 10 or more, 20 or more, 30 or more, or 35 or more.

[0068] The substrate to be polished may be, for example, a substrate in which a polished member is formed on a substrate (e.g., a semiconductor substrate on which an STI pattern, a gate pattern, a wiring pattern, etc. are formed) used in the manufacture of semiconductor components. Examples of materials to be polished that constitute the polished member include insulating materials (excluding stopper materials) such as silicon oxide; stopper materials such as silicon nitride and polysilicon. The material to be polished may be a single material or may be a plurality of materials. When a plurality of materials are exposed on the surface to be polished, they can be regarded as the material to be polished. The member to be polished may be in the form of a film (film to be polished). The insulating member containing the insulating material may be in the form of a film (insulating film: silicon oxide film, etc.). The stopper containing the stopper material may be in the form of a film (stopper film: silicon nitride film, polysilicon film, etc.).

[0069] By using the polishing liquid according to this embodiment to polish a polished member (e.g., an insulating film such as a silicon oxide film) formed on a substrate and removing excess portions, it is possible to eliminate unevenness on the surface of the polished member and obtain a smooth surface over the entire polished surface.

[0070] In the polishing method according to the present embodiment, it is possible to polish an insulating member in a base (e.g., a base having an insulating member, a stopper arranged in a lower layer of the insulating member, and a semiconductor substrate arranged under the stopper) having a substrate having a concave-convex pattern, a stopper arranged on the convex portion of the substrate, and an insulating member (e.g., a silicon oxide film containing at least silicon oxide on the surface) arranged on the substrate and the stopper so as to fill the concave portion of the concave-convex pattern. In such a base, by stopping polishing when the stopper is exposed, it is possible to prevent the insulating member from being excessively polished, thereby improving the flatness of the insulating member after polishing. The stopper material constituting the stopper is a material having a lower polishing rate than the insulating material, and may be silicon nitride, polysilicon, or the like.

[0071] The polishing liquid and polishing method according to the present embodiment can also be used to polish pre-metal insulating films, whose constituent materials include silicon oxide, phosphorus silicate glass, boron phosphorus silicate glass, silicon oxyfluoride, and amorphous carbon fluoride.

[0072] The polishing liquid and polishing method according to the present embodiment can be applied to materials other than insulating materials such as silicon oxide, etc. Examples of such materials include high dielectric constant materials such as Hf-based, Ti-based, and Ta-based oxides, semiconductor materials such as silicon, amorphous silicon, SiC, SiGe, Ge, GaN, GaP, GaAs, and organic semiconductors, phase change materials such as GeSbTe, inorganic conductive materials such as ITO, and polymer resin materials such as polyimide-based, polybenzoxazole-based, acrylic-based, epoxy-based, and phenol-based materials.

[0073] The polishing liquid and polishing method according to the present embodiment can be applied not only to film-like objects to be polished, but also to various substrates made of glass, silicon, SiC, SiGe, Ge, GaN, GaP, GaAs, sapphire, plastic, etc.

[0074] The polishing liquid and polishing method according to the present embodiment can be used not only in the manufacture of semiconductor parts, but also in the manufacture of image display devices such as TFTs and organic EL; optical components such as photomasks, lenses, prisms, optical fibers, and single crystal scintillators; optical elements such as optical switching elements and optical waveguides; light-emitting elements such as solid-state lasers and blue laser LEDs; and magnetic storage devices such as magnetic disks and magnetic heads.

[0075] <Parts manufacturing methods, etc.> The component manufacturing method according to the present embodiment includes a component manufacturing step of obtaining a component using a polished member polished by the polishing method according to the present embodiment. The component according to the present embodiment is a component obtained by the component manufacturing method according to the present embodiment. The component according to the present embodiment is not particularly limited, and may be an electronic component (e.g., a semiconductor component such as a semiconductor package), a wafer (e.g., a semiconductor wafer), or a chip (e.g., a semiconductor chip). As one aspect of the component manufacturing method according to the present embodiment, in the electronic component manufacturing method according to the present embodiment, an electronic component is obtained using a polished member polished by the polishing method according to the present embodiment. As one aspect of the component manufacturing method according to the present embodiment, in the semiconductor component manufacturing method according to the present embodiment, a semiconductor component (e.g., a semiconductor package) is obtained using a polished member polished by the polishing method according to the present embodiment. The component manufacturing method according to the present embodiment may include a polishing step of polishing a polished member by the polishing method according to the present embodiment before the component manufacturing step.

[0076] The manufacturing method of the component according to the present embodiment may include, as one aspect of the component manufacturing process, a singulation process for singulating the polished member polished by the polishing method according to the present embodiment. The singulation process may be, for example, a process for dicing a wafer (e.g., a semiconductor wafer) polished by the polishing method according to the present embodiment to obtain chips (e.g., semiconductor chips). As one aspect of the manufacturing method of the component according to the present embodiment, the manufacturing method of the electronic component according to the present embodiment may include a process for singulating the polished member polished by the polishing method according to the present embodiment to obtain electronic components (e.g., semiconductor components). As one aspect of the manufacturing method of the component according to the present embodiment, the manufacturing method of the semiconductor component according to the present embodiment may include a process for singulating the polished member polished by the polishing method according to the present embodiment to obtain semiconductor components (e.g., semiconductor packages).

[0077] The manufacturing method of the component according to the present embodiment may include, as one aspect of the component manufacturing process, a connecting process for connecting (e.g., electrically connecting) the polished member polished by the polishing method according to the present embodiment to another connected body. The connected body to be connected to the polished member polished by the polishing method according to the present embodiment is not particularly limited, and may be the polished member polished by the polishing method according to the present embodiment, or may be a connected body different from the polished member polished by the polishing method according to the present embodiment. In the connecting process, the polished member and the connected body may be directly connected (connected in a state where the polished member and the connected body are in contact with each other), or the polished member and the connected body may be connected via another member (conductive member, etc.). The connecting process may be performed before the singulation process, after the singulation process, or before or after the singulation process.

[0078] The connecting step may be a step of connecting the polished surface of the polished member polished by the polishing method according to the present embodiment to the connected body, or may be a step of connecting the connecting surface of the polished member polished by the polishing method according to the present embodiment to the connecting surface of the connected body. The connecting surface of the polished member may be the polished surface polished by the polishing method according to the present embodiment. The connecting step can obtain a connected body including the polished member and the connected body. In the connecting step, when the connecting surface of the polished member has a metal part, the connected body may be brought into contact with the metal part. In the connecting step, when the connecting surface of the polished member has a metal part and the connecting surface of the connected body has a metal part, the metal parts may be brought into contact with each other. The metal part may include, for example, copper.

[0079] The device according to this embodiment (for example, an electronic device such as a semiconductor device) comprises at least one selected from the group consisting of a polished member polished by the polishing method according to this embodiment and a part according to this embodiment. EXAMPLES

[0080] Hereinafter, the present disclosure will be specifically described based on examples, but the present disclosure is not limited to these examples.

[0081] <Preparation of polymer composition> In each Example and Comparative Example, a polymer composition having a polymer content of 3.0% by mass and a pH (25°C) of 5.2 was obtained by mixing the polymer in Table 1, a pH adjuster, and ion-exchanged water. A 10% by mass aqueous solution of acetic acid was used as the pH adjuster in all Examples and Comparative Examples. The pH of the polymer composition was measured according to the measurement method described in the definition of pH above. The types of structural units contained in the polymer in each Example and Comparative Example are as shown in Table 1. In Table 1, St represents styrene, MAa represents methacrylic acid, and Aa represents acrylic acid. The polymer in Table 1 has each structural unit in the monomer ratio in Table 1.

[0082] <Weight average molecular weight of polymer> The weight average molecular weight (Mw) of the above polymer was measured by gel permeation chromatography (GPC) under the following conditions and converted into pullulan. The measurement results are shown in Table 1. Equipment used (detector): Showa Denko Co., Ltd., Shodex GPC-101 Column: Showa Denko Co., Ltd., Shodex SB-807, 806M, 803 Eluent: 0.05M aqueous solution of disodium hydrogen phosphate Measurement temperature: 40℃ Flow rate: 0.8mL / min Measurement time: 60 minutes Sample: A sample prepared by adjusting the polymer content in the polymer composition with a solution having the same composition as the eluent so that the polymer content is adjusted to 0.1% by mass, and filtering the solution through a 0.45 μm membrane filter. Injection volume: 100μL Standard material: Showa Denko Co., Ltd., Shodex STANDARD P-82

[0083] <Total amount of carboxyl groups and carboxylate salt groups in polymer> The total amount C [mol / g] of the carboxyl group and the carboxylate group in the above polymer was calculated from the following formula. The results are shown in Table 1. C=Σ{N i ×(R i / 100)} / Σ{M i×(R i / 100)} M i : Molecular weight of each monomer used to obtain a polymer [g / mol] (however, in cases where the carboxyl group forms a salt (for example, when a carboxylate is used as a monomer, or when a salt is formed by ion exchange after polymerization of a carboxylic acid, etc.), the molecular weight is the molecular weight in which these structures are replaced with a carboxyl group (COOH)) N i : The valence of the carboxyl group and carboxylate group of each monomer (for example, N in the case of styrene) i =0) R i : The proportion of each monomer in the total amount of monomers used to obtain the polymer [mol%]

[0084] <Storage stability of polymer composition> (Visual inspection for the presence or absence of sediment) First, 45 g of the above-mentioned polymer composition was sealed in a 50 mL centrifuge tube, and the centrifuge tube was left to stand at 60° C. for 7 days (168 hours). The centrifuge tube was then cooled to 25° C. and centrifuged for 40 minutes at a centrifugal acceleration of 9700 G (9700 times the gravitational acceleration) using a centrifuge (KUBOTA, high-speed large-capacity refrigerated centrifuge 7000). The presence or absence of precipitates in the centrifuge tube was then visually observed and evaluated according to the following criteria. The polymer composition was kept at 25° C. from centrifugation to observation and during observation. The results are shown in Table 1. A: No sediment or turbidity is observed. B: A small amount of sediment is observed, but it redissolves by shaking. C: Even more sediment than B is seen, but it redissolves upon shaking. D: Sediment is observed and does not redissolve even after shaking.

[0085] (Transmittance measurement) The transmittance of the polymer composition (supernatant) after the above-mentioned centrifugation was measured. In detail, the transmittance of light having a wavelength of 700 nm was measured using a spectrophotometer (manufactured by Shimadzu Corporation, product name: UV-1900) and a quartz cell with an optical path length of 10 mm. The polymer composition was kept at 25°C from the centrifugation to the measurement and during the measurement. The results are shown in Table 1.

[0086] <Preparation of polishing solution> In Examples 1 to 5 and Comparative Examples 1 to 3, 0.5 parts by mass of abrasive grains (ceria particles), 0.15 parts by mass of the polymer in Table 1, 0.06 parts by mass of acetic acid, 0.003 parts by mass of an antifoaming agent (silicone admixture, manufactured by Momentive Performance Materials Japan, LLC, product name: TSA780), and ion-exchanged water were mixed to prepare 100 parts by mass of a polishing liquid (CMP polishing liquid) having a pH of 5.5. The polymer in Table 1 was supplied using the above-mentioned polymer composition. The pH of the polishing liquid was measured according to the measurement method described in the definition of pH above. The median diameter (D50) of the abrasive grains was measured according to the measurement method described in the definition of median diameter above, and the median diameter in Examples 1 to 5 and Comparative Examples 1 to 3 was 80 nm.

[0087] <Polishing of the substrate> Using the polishing solutions of Examples 1 to 5 and Comparative Examples 1 to 3, substrates to be polished were polished under the following polishing conditions.

[0088] {Polishing conditions} Polishing equipment: Reflexion LK (manufactured by APPLIED MATERIALS) Polishing fluid flow rate: 250mL / min Substrate to be polished: Wafer with the following pattern Polishing pad: Polyurethane foam resin with closed cells (Dow Chemical Japan, model number IC1010) Grinding pressure: 3.0psi (20.6kPa) Rotation speed of the substrate and polishing plate: Substrate / polishing plate = 93 / 87 rpm Polishing time: From the time the stopper is exposed until 15 seconds Drying of the wafer: After polishing, the wafer was dried using a spin dryer.

[0089] {Pattern wafer} The patterned wafer on which the simulated pattern was formed was a wafer obtained by laminating a silicon nitride film (SiN film) as a stopper on a silicon substrate, forming a trench in the exposure and development process, and then laminating a silicon oxide film (SiO2 film) as an insulating film on the silicon substrate and stopper so as to fill the stopper and trench. The silicon oxide film was formed by the HDP (High Density Plasma) method.

[0090] The above-mentioned pattern wafer had "parts where the convex lines (L) / concave spaces (S) are at a pitch of 100 μm and the convex pattern density is 50%" (parts where L / S=50 / 50 μm) and "parts where the L / S is at a pitch of 100 μm and the convex pattern density is 20%" (parts where L / S=20 / 80 μm).

[0091] L / S is a simulated pattern in which active parts masked with a silicon nitride film, which are convex parts, and trench parts in which grooves, which are concave parts, are arranged alternately. For example, "L / S with a 100 μm pitch" means that the total width of the active parts (line parts) and trench parts (space parts) is 100 μm. For example, "L / S with a 100 μm pitch and a convex pattern density of 50%" means a pattern in which convex parts with a width of 50 μm and concave parts with a width of 50 μm are arranged alternately.

[0092] In the patterned wafer, the thickness of the silicon oxide film was 420 nm both on the silicon substrate in the recessed portion and on the silicon nitride film in the protruding portion. Specifically, the thickness of the silicon nitride film on the silicon substrate was 120 nm, the thickness of the silicon oxide film in the protruding portion was 420 nm, the thickness of the silicon oxide film in the recessed portion was 420 nm, and the depth of the recessed portion of the silicon oxide film was 300 nm (trench depth 180 nm + silicon nitride film thickness 120 nm).

[0093] <Evaluation of polishing characteristics> The above-mentioned substrate (pattern wafer) was polished under the above-mentioned polishing conditions to expose the stopper, and then the stopper was further polished (over-polished) for 15 seconds to remove the stopper. The amount of stopper polished (SiN loss) and the amount of remaining step (Dishing) were calculated in the "L / S=50 / 50 μm portion" and the "L / S=20 / 80 μm portion" using the following procedure.

[0094] (Stopper grinding amount) The amount of stopper polished (SiN loss) was calculated as the difference between the initial film thickness of the stopper on the convex part and the remaining film thickness after polishing of the stopper on the convex part, as shown in the following formula. The film thickness of the stopper before and after polishing was measured using an optical interference film thickness measurement device (manufactured by Nova, product name: Nova i500). The results are shown in Table 1. (Amount of stopper polished [nm]) = (Initial film thickness of stopper on convex part [nm]) - (Remaining film thickness after polishing of stopper on convex part [nm])

[0095] (Remaining level difference) The "L / S=50 / 50μm part" and "L / S=20 / 80μm ​​part" of the polished substrate were scanned with an automatic atomic force step gauge (Bruker, product name: InSight CAP) to measure the height difference between the convex and concave parts, thereby obtaining the remaining step amount (Dishing). The results are shown in Table 1.

[0096] [Table 1]

Claims

1. A polymer composition containing a polymer and an aqueous medium, and a liquid containing an abrasive grain and an aqueous medium, The polymer has a first structural unit derived from at least one styrene compound selected from the group consisting of styrene and styrene derivatives, and a second structural unit derived from at least one methacrylic acid compound selected from the group consisting of methacrylic acid and salts thereof, The weight average molecular weight of the polymer is 3,000 to 500,000; The content of the first structural unit in the polymer is more than 0 mol % and 38 mol % or less, the content of the second structural unit in the polymer is 60 to 90 mol %, The polishing liquid set, wherein the content of the polymer in the polymer composition is 0.010 to 30 mass %.

2. The polishing liquid set according to claim 1 , wherein the first structural unit comprises a structural unit derived from styrene.

3. The total amount of carboxyl groups and carboxylate groups in the polymer is 6.7×10 －３ 2. The polishing liquid set according to claim 1, wherein the converted total amount is calculated by replacing carboxylate groups in the polymer with carboxy groups.

4. A method for producing a polishing liquid, comprising a step of mixing the polymer composition and the liquid in the polishing liquid set according to any one of claims 1 to 3.

5. The method includes the steps of: The polymer has a first structural unit derived from at least one styrene compound selected from the group consisting of styrene and styrene derivatives, and a second structural unit derived from at least one methacrylic acid compound selected from the group consisting of methacrylic acid and salts thereof, The weight average molecular weight of the polymer is 3,000 to 500,000; The content of the first structural unit in the polymer is more than 0 mol % and 38 mol % or less, the content of the second structural unit in the polymer is 60 to 90 mol %, The polishing liquid has a content of the polymer of 0.01 to 10 mass %.

6. The polishing liquid according to claim 5 , wherein the first structural unit includes a structural unit derived from styrene.

7. The total amount of carboxyl groups and carboxylate groups in the polymer is 6.7×10 －３ 6. The polishing liquid according to claim 5, wherein the converted total amount is calculated by replacing carboxylate groups in the polymer with carboxy groups.

8. A polishing method comprising a step of polishing a surface to be polished with the polishing liquid according to any one of claims 5 to 7.

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