Detachably supporting mechanism and reticle pod with the same

Abstract

To provide a detachable supporting mechanism and a reticule pod including the supporting mechanism.SOLUTION: A reticle pod with a detachable supporting mechanism is suitable for a dual pod including an outer pod, and an inner pod housed in the outer pod. The inner pod includes: a base; and at least one supporting mechanism mounted on the base. The supporting mechanism includes: a supporting assembly connected to a mounting interface of the base and including a seat, at least one limiting post connected to the seat, and a mounting hole which penetrates through the seat and is not a circular hole; and a supporting member having an adapting structure to match with the mounting hole, the supporting member detachably housed in the mounting hole.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a support mechanism for a reticle pod, and more particularly to a support mechanism having a removable support structure. [Background technology]

[0002] In a conventional extreme ultraviolet (EUV) reticle carrier, a reticle is supported via a support mechanism, which includes a support member and a limiting post. The support member is used to place and contact the reticle, and the limiting post and the support member are integrated. When the support mechanism is assembled to the inner pod base of the reticle pod, in addition to fixing with a screw, a knurled pin is riveted inside the limiting post to strengthen the fixing and prevent loosening. Since the inside of the knurled pin and the limiting post are an interference fit, when it is necessary to replace the conventional support structure, it is necessary to first destroy the limiting post, remove the screw, and then knock out the knurled pin.

[0003] However, in actual use, only the support members contact the reticle, and the limiting posts only serve to prevent damage to the reticle components caused by abnormal operation errors in emergency situations, so that the reticle does not come into contact with the limiting posts under normal circumstances. In other words, only the support members are consumables, and the limiting posts do not actually need to be replaced. However, in the current design, when the support members need to be replaced, the limiting posts are also replaced together with the support members, which results in waste of materials and costs, and is also inconvenient to remove. Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention focuses on the above-mentioned problems of the prior art, and provides a removable support structure to simplify the removal process of the support mechanism and reduce the waste of materials and costs. In addition, the support member can be made of more wear-resistant materials according to actual needs to extend its life. [Means for solving the problem]

[0005] The present invention provides a reticle pod suitable for a dual pod including an external pod and an internal pod housed in the external pod, the internal pod including a base and at least one support mechanism provided on the base, the support mechanism including a support assembly coupled to a mounting interface of the base, the support assembly including a seat, at least one limiting post coupled to the seat, a non-circular mounting hole passing through the seat, and a support member having a matching structure for matching with the mounting hole and removably housed within the mounting hole.

[0006] In one specific embodiment, the support member has at least one anti-rotation feature that abuts a periphery of the mounting hole when the support member is installed in the mounting hole.

[0007] In one specific embodiment, the thickness of the detent mechanism is the same as or similar to the thickness of the seat.

[0008] In one specific embodiment, the support member includes a contact portion, a neck portion, and a bottom portion, the contact portion and the bottom portion being connected via the neck portion, and the neck portion having the at least one anti-rotation mechanism.

[0009] In one specific embodiment, the support member includes a contact portion, a neck portion, and a bottom portion, the bottom portion having at least one protrusion that protrudes outwardly from the bottom portion, and the mounting hole having at least one notch that corresponds to the shape of the at least one protrusion and extends outwardly from a periphery of the mounting hole.

[0010] In one specific embodiment, the neck portion is provided with at least one anti-rotation mechanism and the mounting hole is provided with at least one locating protrusion that protrudes inwardly from the periphery of the mounting hole, the locating protrusion abutting the at least one anti-rotation mechanism to prevent the support member from rotating relative to the support assembly.

[0011] In one specific embodiment, the at least one anti-rotation feature is an abutment protrusion extending outwardly from a surface of the neck portion, and the abutment protrusion of the neck portion and the at least one protrusion of the base portion are vertically offset.

[0012] In one specific embodiment, the bottom has at least one recess that is recessed radially inward from a surface of the bottom such that the bottom avoids the positioning protrusion of the mounting hole when the support member is inserted into the mounting hole.

[0013] In one specific embodiment, the at least one recess and the at least one protrusion are disposed side-by-side.

[0014] In one specific embodiment, the support member has fixing holes provided in the bottom and the neck portion, and after the support member is rotated to a positioning position where the abutment protrusion and the positioning protrusion abut each other, the installation of the support member is completed by cooperation of a fixing element with the fixing holes.

[0015] In one specific embodiment, when the support member is in the positioned position, the lower surface of the contact portion contacts the upper surface of the seat and the upper surface of the base contacts the lower surface of the seat.

[0016] In one specific embodiment, the support member and the support assembly are made of different materials.

[0017] In one specific embodiment, the support member material has a glass transition temperature of 200° C. (392° F.) or greater.

[0018] For a better understanding of the present invention, reference may be made to the following drawings and description. Non-limiting and non-exhaustive embodiments are described with reference to the following drawings. It should be noted that the components in the drawings are not necessarily drawn to actual size, but are instead drawn with a focus on explaining the structure and principles. [Brief description of the drawings]

[0019] [Figure 1] FIG. 2 is a three-dimensional view of the base of an inner pod provided with the support mechanism of the present invention. [Diagram 2] FIG. 2 is a partially enlarged exploded three-dimensional view of the support mechanism of part A in FIG. 1. [Diagram 3] 11 is a partially enlarged three-dimensional view of the support mechanism when replacing the support member. FIG. [Figure 4A] FIG. 4 is a bottom view of a support member according to an embodiment of the present invention. [Figure 4B] FIG. 2 is a front view of a support member according to an embodiment of the present invention. [Figure 4C] FIG. 2 is a three-dimensional view of a support member according to an embodiment of the present invention. [Figure 5A] FIG. 4 is a bottom view of a support member according to an embodiment of the present invention. [Figure 5B] FIG. 2 is a front view of a support assembly according to an embodiment of the present invention. [Figure 6A] 4 is a three-dimensional view of the support mechanism when the support member according to the embodiment of the present invention is in a positioning position. FIG. [Figure 6B] 11 is a three-dimensional view showing the support mechanism from another angle when the support member in the embodiment of the present invention is not in the position where it is positioned. FIG. [Figure 7A] 4 is a three-dimensional view of the support mechanism when the support member according to the embodiment of the present invention is in a positioning position. FIG. [Figure 7B] 11 is a three-dimensional view showing the support mechanism from another angle when the support member in the embodiment of the present invention is in a position where it is positioned. FIG. [Figure 8A] FIG. 6B is a cross-sectional view of plane B in FIG. 6A. [Figure 8B] FIG. 7B is a cross-sectional view of plane C in FIG. 7A. [Figure 9]FIG. 11 is a partially enlarged exploded stereoscopic view of a support mechanism according to a second embodiment of the present invention. [Figure 10] FIG. 11 is a partially enlarged three-dimensional view of the support mechanism when replacing the support member according to the second embodiment of the present invention. [Figure 11A] FIG. 11 is a side view of a support member according to a second embodiment of the present invention. [Figure 11B] FIG. 11 is a top view of a support member according to a second embodiment of the present invention. [Figure 12A] FIG. 11 is a side view of a support assembly according to a second embodiment of the present invention. [Figure 12B] FIG. 11 is a top view of a support assembly according to a second embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] 1, the present invention provides a reticle pod suitable for dual pods, which includes an outer pod and an inner pod housed in the outer pod. The inner pod includes a base 10, a lid (not shown), and a support mechanism 20 that is connected to a mounting interface 101 of the base 10 and supports a reticle thereon.

[0021] Example 1 2, which is an enlarged exploded view of circle A in FIG. 1. The removable support mechanism 20 of the first embodiment of the present invention includes a support assembly 21 and a support member 23. The support assembly 21 is provided on the mounting interface 101 of the base 10, and the support member 23 has a matching structure 23A for fitting to the mounting hole 213 of the support assembly 21, so that the support member 23 is removably received in the mounting hole 213 of the support assembly 21.

[0022] 4A to 4C, the support member 23 includes a contact portion 231, a fixing hole 234, and a fitting structure 23A. The contact portion 231 can be used to allow a user to hold or rotate the support member 23, and the fixing hole 234 penetrates the fitting structure 23A. At the same time, referring to FIG. 3, the fitting structure 23A penetrates the mounting hole 213 and partially abuts against the mounting hole 213 so that the support member can be accommodated in the mounting hole 213. In this embodiment, the fitting structure 23A includes a neck portion 232 and a bottom portion 233. The contact portion 231 and the bottom portion 233 are connected through the neck portion 232, and the fixing hole 234 is provided in the bottom portion 233 and the neck portion 232. In this embodiment, the fixing hole 234 penetrates from the lower surface 2337 of the bottom portion 233 and extends completely or partially to the neck portion 232. Preferably, the upper surface of the contact portion 231 is used for direct contact with the reticle, and the neck portion 232 extends from the lower surface 2315 of the contact portion 231 and extends from the upper surface 2335 of the bottom portion 233. Preferably, a plurality of contact protrusions 2311 are formed on the upper surface of the contact portion 231 to reduce the contact area between the reticle and the support member 23 when the reticle is placed on it.

[0023] The periphery of the bottom 233 has at least one protrusion 2331 and at least one recess 2333, the protrusion 2331 protruding outward relative to the radial direction of the surface of the bottom 233, the recess 2333 recessed inward relative to the radial direction of the surface of the bottom 233, and the at least one protrusion 2331 and the at least one recess 2333 are arranged adjacent to each other. Preferably, the bottom 233 has a center O1, and a distance R1 from the protrusion 2331 to the center O1 is greater than a distance p1 from the recess 2333 to the center O1. In an embodiment of the present invention, the periphery of the bottom 233 has four protrusions 2331 and four recesses 2333.

[0024] 4B and 4C, the neck portion 232 has at least one abutment protrusion 2321 (also referred to as a rotation prevention mechanism) that protrudes radially outward from a surface of the neck portion 232. The neck portion 232 has a thickness d1 in a front view. The thickness d1 may be a vertical distance from a lower surface 2315 of the contact portion 231 to an upper surface 2335 of the bottom portion 233. A maximum distance R1 of the protrusion 2331 from a center O1 of the bottom portion 233 defines a vertical direction Y1, and a minimum distance p1 of the abutment protrusion 2321 from a center O1 of the bottom portion 233 defines a vertical direction Y2, and the protrusion 2331 and the abutment protrusion 2321 are vertically offset, i.e., the vertical direction Y1 and the vertical direction Y2 are parallel but do not overlap.

[0025] 5A and 5B, the support assembly 21 includes a seat 211, at least one limiting post 212, and a mounting hole 213. The at least one limiting post 212 is coupled to the seat 211, and a fixing hole 2121 is provided inside the at least one limiting post 212. The mounting hole 213 is a non-circular hole that passes through the seat 211, and the matching structure 23A of the support member 23 fits the shape of the mounting hole 213, so that the support member 23 is removably attached to the mounting hole 213. In the support assembly 21, the seat 211 has a thickness D1 that is substantially the same as or similar to the thickness d1 of the neck portion 232 of the support member 23 in a front view.

[0026] The periphery of the mounting hole 213 has at least one notch 2131 and at least one positioning protrusion 2133, the notch 2131 extending outward in the radial direction of the mounting hole 213, the positioning protrusion 2133 recessed inward in the radial direction of the mounting hole 213, and the at least one notch 2131 and the at least one positioning protrusion 2133 are arranged adjacent to each other. When the support member is assembled to the support assembly, the notch 2131 avoids the matching structure 23A of the support member 23 and abuts against the matching structure 23A of the support member 23 via the positioning protrusion 2133 to position them relative to each other, thereby preventing unnecessary rotation of the support member 23 during assembly.

[0027] In this embodiment, when the support member 23 is assembled to the support assembly 21, the protrusion 2331 of the support member 23 can be avoided, and the recess 2333 of the support member 23 can avoid the positioning protrusion 2133. When the support member 23 is assembled to the support assembly 21, the positioning protrusion 2133 and the abutment protrusion 2321 of the support member 23 are positioned relative to each other. In this embodiment, the mounting hole 213 has a center O2, and a distance R2 from the notch 2131 to the center O2 is greater than a distance p2 from the positioning protrusion 2133 to the center O2. Preferably, the notch 2131 has a shape corresponding to the protrusion 2331, and the positioning protrusion 2133 has a shape corresponding to the recess 2333. Preferably, the distance R2 from the notch 2131 to the center O2 is greater than or equal to the distance R1 from the protrusion 2331 to the center O1. In this embodiment, the periphery of the mounting hole 213 has four notches 2131 and four positioning protrusions 2133 .

[0028] 6A and 6B, the base 10 is omitted in the figures to more clearly show the relative positions of the support member 23 and the support assembly 21. When the support member 23 is accommodated in the support assembly 21, the user can hold the contact portion 231 of the support member 23 directly or via a robot arm, align the protrusion 2331 of the support member 23 with the notch 2131 of the mounting hole 213, and insert the support member 23 into the mounting hole 213 until the lower surface of the contact portion 231 contacts the upper surface 2115 of the seat 211. At this time, the contact portion 231 is located above the upper surface 2115 of the seat 211, the bottom portion 233 is located below the lower surface 2117 of the seat 211, and the neck portion 232 is accommodated in the mounting hole 213. Also referring to FIG. 8A, FIG. 8A is a cross-sectional view of plane B of FIG. 6A, and the abutment protrusion 2321 and the positioning protrusion 2133 are not in contact with each other at this time.

[0029] Next, referring to Figures 7A and 7B, after the support member 23 is rotated in one direction, the protrusion 2331 and the notch 2131 are displaced vertically upward, and the upper surface of the bottom 233 contacts the lower surface of the seat 211 to prevent the support member 23 from being separated from the vertical direction. Referring to Figure 8B, which is a cross-sectional view of plane C in Figure 7A, the support member 23 is rotated until the abutment protrusion 2321 and the positioning protrusion 2133 abut against each other, and the support member 23 is positioned at a position. Then, the support member 23 is fastened from below the base 10 via the mounting element 24, and the support member 23 is attached to the support assembly 21 provided on the base 10, completing the attachment of the support mechanism 20. The abutment of the abutment protrusion 2321 and the positioning protrusion 2133 prevents the support member 23 from rotating relative to the support assembly 21 during the process of the mounting element 24 fastening the support member 23. Preferably, the distance t1 from the center O1 of the support member 23 to the abutment protrusion 2321 is greater than the distance p2 from the center O1 of the support member 23 to the positioning protrusion 2133, and the positioning protrusion 2133 of the mounting hole 213 abuts against the support member 23, thereby preventing the support member 23 from rotating relative to the support assembly 21. In this embodiment, the mounting element 24 is a screw, and the fixing hole 234 is a screw hole corresponding to the screw. The rotation direction of the support member 23 until the abutment protrusion 2321 and the positioning protrusion 2133 abut against each other is the same as the direction in which the mounting element 24 tightens the support member 23, so that when the support member 23 is tightened, the abutment protrusion 2321 and the positioning protrusion 2133 are forcibly kept in contact with each other, and unnecessary rotation of the support member 23 during the tightening process is prevented, thereby improving the mounting efficiency.

[0030] The flow of attaching the removable support mechanism of the present invention to the mounting interface of the base will be described below. First, referring to Figures 2 and 5A, the support assembly 21 is fixed through the through hole 102 of the base 10 and the fixing hole 2121 in the limiting post 212 by the fixing element 22. The fixing element 22 can be fixed to the limiting post 212 by riveting a knurled pin or tightening with a screw.

[0031] Next, referring to Figures 6A and 6B, the protrusion 2331 of the support member 23 is aligned with the notch 2131 of the mounting hole 213, and the support member 23 is inserted into the mounting hole 213 until the lower surface 2315 of the contact portion 231 and the upper surface 2115 of the seat portion 211 come into contact with each other.

[0032] 7A and 7B, the support member 23 is rotated in one direction, the protrusion 2331 of the support member 23 and the notch 2131 of the mounting hole 213 are vertically displaced upward, and the upper surface 2335 of the bottom portion 233 is brought into contact with the lower surface 2117 of the seat portion 211. Also referring to FIG. 8B, the support member 23 is rotated until the positioning protrusion 2133 comes into contact with the abutment protrusion 2321, and the support member 23 reaches the positioning position.

[0033] Finally, the support member 23 is fastened with the mounting element 24 from below the through-hole 103 of the base, completing the installation of the support mechanism 20. When the support member 23 is placed in the mounting hole 213, the abutment protrusion 2321 is forced to continue to abut against the positioning protrusion 2133 of the mounting hole 213, thereby preventing the support member 23 from rotating relative to the support assembly 21 during the installation process.

[0034] When replacing the support member 23, first remove the mounting element 24, then rotate the support member 23 until the protrusion 2331 of the support member 23 is aligned with the notch 2131 of the mounting hole 213, remove the support member 23 from the mounting hole 213, and then repeat the above-mentioned procedure to replace the support member 23.

[0035] Example 2 9 shows a support mechanism according to a second embodiment of the present invention. The difference between the first and second embodiments is the structure of the support member 33 and the support assembly 31.

[0036] The removable support mechanism of the second embodiment includes a support assembly 31 and a support member 33. The support assembly 31 is provided on the mounting interface 101 of the base 10, and the support member 33 is removably attached to the support assembly 31.

[0037] 11A and 11B, the support member 33 includes a main body 331, a matching structure 33A, and a fixing hole (not shown). The main body 331 is substantially cylindrical, and is formed with a plurality of contact protrusions 3311 to reduce the contact area between the reticle and the support member 33 when the reticle is placed on the upper surface. The matching structure 33A is used to fit into the mounting hole 313 of the support assembly 31 so that the support member 33 is accommodated in the mounting hole 313 of the support assembly 31. In this embodiment, the matching structure 33A includes a rotation prevention mechanism 332 protruding outward from the main body 331, and the rotation prevention mechanism 332 has a thickness d2 in a side view. The fixing hole is formed in the main body 331 and partially penetrates the main body 331.

[0038] 12A and 12B, the support assembly 31 has a seat 311, at least one limiting post 312, and a mounting hole 313. The at least one limiting post 312 is connected to the seat 311, and a fixing hole (same as the fixing hole 2121 in the first embodiment) is provided inside the at least one limiting post 312. The mounting hole 313 is a non-circular hole that penetrates the seat 311. The cross-sectional shape of the anti-rotation mechanism 332 matches the shape of the mounting hole 313 so that the support member 33 is received in the mounting hole 313 and abuts against the mounting hole 313 to prevent the support member 33 from rotating on its own axis. In the support assembly 31, the seat 311 has a thickness D2 that is substantially the same as or similar to the thickness d2 of the anti-rotation mechanism 332 of the support member 33 in a front view.

[0039] Hereinafter, a flow of attaching the removable support mechanism of the second embodiment of the present invention to the base 10 will be described. First, referring to Fig. 10, the support assembly 31 is fixed to the base 10 from the through hole 102 of the lower cover and the fixing hole 2121 in the limiting post 312 by the fixing element 22. The fixing element 22 can be fixed to the limiting post 312 by riveting a knurled pin or tightening with a screw.

[0040] Next, the user can hold the matching structure 33A of the support member 33 directly or via a robot arm, align it with the mounting hole 313, and insert the matching structure 33A of the support member 33 into the mounting hole 313. Next, the support member 33 is attached via the mounting element 24 from below the through hole 103 of the base, completing the installation of the support mechanism. Since the cross-sectional shape of the anti-rotation mechanism 332 matches the shape of the mounting hole 313, when the support member 33 is placed in the mounting hole 313, the anti-rotation mechanism 332 is forced to continue to abut against the periphery of the mounting hole 313, and the support member 33 can be prevented from rotating relative to the support assembly 31 during the installation process.

[0041] If the support member 33 needs to be replaced, after removing the mounting element 24, the support member 33 can be removed vertically, and the above procedure can then be repeated to replace the support member 33. Since the support assembly 31 does not need to be removed and replaced after it is secured to the base 10, waste of material and costs can be avoided.

[0042] The removable support mechanism of the first and second embodiments of the present invention not only provides quick attachment and detachment function but also provides high flexibility in combination and assembly due to the removable design of the support members 23, 33 and the support assemblies 21, 31.

[0043] Preferably, the support assemblies 21, 31 and the support members 23, 33 may be made of different materials or have different surface treatments. For example, the support assemblies 21, 31 may be manufactured using a relatively cost-saving material, and the support members 23, 33 may be made of a suitable material according to the actual application needs. Preferably, the support members 23, 33 may be made of a material that is more wear-resistant, for example, a material having a glass transition temperature (Tg) of 200° C. (392° F.) or higher, and / or has insulating and static dissipative properties (for example, a surface resistance of 100 nm or less) in a general air or vacuum environment. 4 ~10 11 (Ω / sq)) material can be selected.

[0044] Preferably, in the embodiment of the present invention, the material of the support members 23, 33 is polyimide (Pi), which significantly improves wear resistance and lifespan. The material of the support members 23, 33 themselves may be plastic or metal, and may be processed, such as surface treatment or surface coating. The coating material selected for the support members 23, 33 has a glass transition temperature of 200°C (392°F) or higher, and / or has insulating properties and static electricity dissipation functions in a general atmospheric or vacuum environment, thereby improving the lifespan of the support members 23, 33.

[0045] By selecting a material having high wear resistance and high performance as the material for the support members 23, 33, the wear resistance and lifespan of the support members 23, 33 are effectively improved, and contamination of the reticle by particles is reduced. [Explanation of symbols]

[0046] 10 base 101 Mounting Interface 102 through hole 103 Through Hole 20 Support mechanism 21 Support assembly 211 Seat area 212 Restricted Post 2121 Fixing hole 213 Mounting hole 2131 Notch 2133 Positioning protrusion 22 Fixed elements 23 Support member 23A Compatible structure 231 Contact part 2311 Contact convexity 2315 Bottom surface 232 Neck 2321 Contact projection 233 Bottom 2331 Convex 2333 Recess 2335 Top surface 2337 Bottom surface 234 fixing hole 24 Mounting elements 31 Support assembly 311 Base 312 Restricted Post 313 Mounting hole 33 Support member 33A Compatible structure 331 Main unit 3311 Contact convexity 332 Anti-rotation mechanism d1, D1, d2, D2 thickness R1, R2, p1, p2, n1 distance A Yen B, C plane Y1, Y2 vertical direction

Claims

1. A reticle pod suitable for a dual pod having an external pod and an internal pod housed in the external pod, the internal pod comprising: A base and at least one support mechanism provided on the base, The support mechanism includes: a support assembly coupled to the mounting interface of the base, the support assembly including a seat, at least one limiting post coupled to the seat, and a mounting hole extending through the seat, the mounting hole being a non-round hole; a support member having a matching structure for mating with the mounting hole and removably received within the mounting hole; Reticle pod.

2. 2. The reticle pod of claim 1, wherein said support member has at least one anti-rotation mechanism, said at least one anti-rotation mechanism abutting a periphery of said mounting hole when said support member is placed in said mounting hole.

3. The reticle pod of claim 2 , wherein the thickness of the anti-rotation mechanism is the same as or similar to the thickness of the seat.

4. The reticle pod of claim 2 , wherein the support member includes a contact portion, the matching structure includes a neck portion and a bottom portion, the contact portion and the bottom portion are connected via the neck portion, and the neck portion has the at least one anti-rotation mechanism.

5. 2. The reticle pod of claim 1, wherein the support member includes a contact portion, the matching structure includes a neck portion and a bottom portion, the bottom portion has at least one protrusion thereon, the at least one protrusion protruding outward from the bottom portion, and the mounting hole has at least one notch thereon, the at least one notch corresponding to the shape of the at least one protrusion and extending outward from the periphery of the mounting hole.

6. 6. A reticle pod as described in claim 5, wherein the neck portion is provided with at least one anti-rotation mechanism and the mounting hole is provided with at least one positioning protrusion, the positioning protrusion protruding inwardly from the periphery of the mounting hole, and the positioning protrusion abuts against the at least one anti-rotation mechanism to prevent the support member from rotating relative to the support assembly.

7. 7. The reticle pod of claim 6, wherein the at least one anti-rotation mechanism is an abutment protrusion extending outward from a surface of the neck portion, and the abutment protrusion of the neck portion and the at least one protrusion of the bottom portion are vertically offset.

8. The reticle pod of claim 6, wherein the bottom has at least one recess that is recessed radially inward from the surface of the bottom so that the bottom avoids the positioning protrusion of the mounting hole when the support member is inserted into the mounting hole.

9. The reticle pod of claim 8 , wherein the at least one recess and the at least one protrusion in the bottom are disposed adjacent to each other.

10. The reticle pod of claim 6, wherein the support member has a fixing hole formed in the bottom, and after the support member is rotated to a positioning position where the abutment protrusion and the positioning protrusion abut each other, a fixing element cooperates with the fixing hole to fix the support member to the mounting hole.

11. The reticle pod of claim 10 , wherein when said support member is in said position, a lower surface of said contact portion contacts an upper surface of said seat, and an upper surface of said bottom portion contacts a lower surface of said seat.

12. The reticle pod of claim 1 , wherein the support member material has a glass transition temperature of 200° C. or higher.

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