Functional water supply device

Abstract

To provide a functional water supply device which can reduce power consumption.SOLUTION: A functional water supply device 2 includes: a branch section 14 which branches functional water fed by a first pump 4b into at least a first path 8, a second path 10 and a third path 12; a confluent path 16 for making the first path 8, the second path 10, and the third path 12 confluent; a pressure sensor 18 disposed between the first pump 4b and the branch section 14; a first opening / closing valve 20 disposed in the first path 8; a second opening / closing valve 22 disposed in the second path 10; a third opening / closing valve 24 disposed in the third path 12; temperature adjustment means 26 which adjusts the temperature of the functional water disposed in the confluent path 16; a second pump 28 which is disposed in the second path 10 and feeds the functional water passing through the second opening / closing valve 22 to the temperature adjustment means 26; a tank 30 which is disposed in the third path 12 and stores the functional water passing through the third opening / closing valve 24; a fourth opening / closing valve 34 which causes the functional water stored in the tank 30 to communicate between the second opening / closing valve 22 and the second pump 28; and control means 36.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a functional water supply device that supplies functional water pumped out from a water source by a first pump to a processing device.

Background Art

[0002] A wafer on which a plurality of devices such as ICs and LSIs are partitioned by a division planned line and formed on the surface is ground on the back surface by a grinding device to be processed to a predetermined thickness, and then divided into individual device chips by a dicing device. Each of the divided device chips is used in electric devices such as mobile phones and personal computers.

[0003] The grinding device generally includes a chuck table for holding a wafer, a grinding means rotatably mounting a grinding wheel having an annular grinding stone for grinding the wafer held on the chuck table, a grinding water supply means for supplying grinding water (pure water) to the grinding wheel, and a cleaning means for cleaning the wafer, and can grind the wafer with high precision (see, for example, Patent Document 1).

[0004] The dicing device generally includes a chuck table for holding a wafer, a cutting means rotatably mounting a cutting blade for cutting the wafer held on the chuck table, a cutting water supply means for supplying cutting water (pure water) to the cutting blade, and a cleaning means for cleaning the wafer, and can divide the wafer into individual device chips with high precision (see, for example, Patent Document 2).

[0005] Also, functional water including grinding water, cutting water, cleaning water, grinding means, and cutting means used in a grinding apparatus and a dicing apparatus, and cooling water for adjusting the temperature of these to a certain temperature, is sent from a functional water facility (water source) to a functional water supply device by a first pump. This functional water supply device includes a tank for storing the functional water sent out by the first pump, temperature adjustment means for adjusting the temperature of the functional water, and a second pump for sending out the pure water stored in the tank to the temperature adjustment means. Then, the functional water supply device supplies the functional water adjusted to a desired temperature to processing devices such as a grinding apparatus and a dicing apparatus.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0007] However, it has a configuration using a first pump and a second pump, and there is a problem that the power consumption of the first and second pumps and the heat generation of the first and second pumps increase the power consumption due to excessive operation of the temperature adjustment means by heating the functional water.

[0008] An object of the present invention is to provide a functional water supply device capable of reducing power consumption.

Means for Solving the Problems

[0009] According to the present invention, there is provided the following functional water supply device for solving the above problems. That is, "A functional water supply device that supplies functional water sent out from a water source by a first pump to a processing device, a branching portion that branches the functional water sent out by the first pump into at least a first path, a second path, and a third path, A confluence path that merges the first path, the second path, and the third path, A pressure sensor disposed between the first pump and the branch portion, A first on-off valve disposed in the first path, A second on-off valve disposed in the second path, A third on-off valve disposed in the third path, Temperature adjustment means disposed in the confluence path for adjusting the temperature of the functional water, A second pump disposed in the second path for sending the functional water that has passed through the second on-off valve to the temperature adjustment means, A tank disposed in the third path for storing the functional water that has passed through the third on-off valve, A fourth on-off valve for communicating the functional water stored in the tank between the second on-off valve and the second pump, Control means, A functional water supply device including

[0010] Preferably, when the control means determines that the value of the pressure sensor is a sufficient pressure value for supplying functional water to the processing device, the control means opens the first on-off valve, closes the second on-off valve and the third on-off valve, and deactivates the second pump to operate the first path to supply functional water to the processing device.

[0011] A flow rate adjustment valve for adjusting the flow rate of the functional water supplied to the processing device is disposed in the confluence path, and it is desirable to supply an appropriate amount of functional water to the processing device.

[0012] When the control means determines that the value of the pressure sensor can maintain a sufficient pressure value for supplying functional water to the processing device, the control means opens the third on-off valve to store functional water in the tank.

[0013] When the control means determines that the value of the pressure sensor is not a sufficient pressure value for supplying functional water to the processing device, it is preferable to open the second on-off valve, close the first on-off valve, the third on-off valve, and the fourth on-off valve, and activate the second pump to supply functional water to the processing device through the second path.

[0014] When the value of the pressure sensor is not a sufficient pressure value for the processing device to supply functional water and is unstable, the control means closes the first on-off valve and the second on-off valve, opens the third on-off valve and the fourth on-off valve, and operates the second pump to supply functional water to the processing device through the third path.

Advantages of the Invention

[0015] The functional water supply device of the present invention is a functional water supply device that supplies functional water sent from a water source by a first pump to a processing device, a branch portion that branches the functional water sent by the first pump into at least a first path, a second path, and a third path, a confluence path that merges the first path, the second path, and the third path, a pressure sensor disposed between the first pump and the branch portion, a first on-off valve disposed in the first path, a second on-off valve disposed in the second path, a third on-off valve disposed in the third path, a temperature adjustment means disposed in the confluence path to adjust the temperature of the functional water, a second pump disposed in the second path to send the functional water passing through the second on-off valve to the temperature adjustment means, a tank disposed in the third path to store the functional water passing through the third on-off valve, a fourth on-off valve that communicates the functional water stored in the tank between the second on-off valve and the second pump, control means, and includes the above, so that power consumption can be reduced.

Brief Description of the Drawings

[0016]

Figure 1

Embodiments for Carrying Out the Invention

[0017] Hereinafter, a preferred embodiment of the functional water supply device according to the present invention will be described with reference to the drawings.

[0018] The functional water supply device 2 shown in FIG. 1 is a device that supplies the functional water sent out from the tank 4a of the water source 4 to the processing device 6 by the first pump 4b. A plurality of functional water supply devices 2 are connected to the tank 4a of the water source 4. Further, a plurality of processing devices 6 are connected to each of the plurality of functional water supply devices 2. That is, the functional water of the water source 4 is sent to the plurality of functional water supply devices 2 by the first pump 4b, and further sent from each of the plurality of functional water supply devices 2 to the plurality of processing devices 6.

[0019] The first pump 4b of the water source 4 may have the ability to supply functional water to about 70% of the number of processing devices 6 among all the processing devices 6 connected to the tank 4a of the water source 4. The reason for this is that it is rare for all the processing devices 6 connected to the water source 4 to operate simultaneously, and in many cases, about 70% of the number of processing devices 6 are operating and the other about 30% of the number of processing devices 6 are in a standby state. That is, a pump having the ability to supply functional water to all the processing devices 6 is overspec as the first pump 4b, and operating such a pump will lead to waste of electric power. Therefore, the first pump 4b may have the ability to supply functional water to about 70% of the number of processing devices 6.

[0020] The functional water supply device 2 includes a branch portion 14 that branches the functional water sent out by the first pump 4b into at least a first path 8, a second path 10, and a third path 12, and a merging path 16 that merges the first path 8, the second path 10, and the third path 12.

[0021] A pressure sensor 18 is disposed between the first pump 4b and the branch portion 14. Further, a first on-off valve 20 is disposed in the first path 8, a second on-off valve 22 is disposed in the second path 10, and a third on-off valve 24 is disposed in the third path 12.

[0022] In the confluence path 16, a temperature adjustment means 26 for adjusting the temperature of the functional water is disposed. The temperature adjustment means 26 cools or heats the functional water by performing heat exchange between the functional water passing through the temperature adjustment means 26 and the refrigerant circulating through the temperature adjustment means 26, thereby adjusting the temperature of the functional water to a predetermined temperature. Note that the configuration of the temperature adjustment means 26 may include, for example, a compressor that compresses the refrigerant, a condenser that condenses the refrigerant compressed by the compressor, and an evaporator that vaporizes the refrigerant condensed by the condenser.

[0023] In the second path 10, in addition to the second on-off valve 22, a second pump 28 for sending the functional water that has passed through the second on-off valve 22 to the temperature adjustment means 26 is disposed. An inverter 28b is provided for a motor 28a that drives the second pump 28. The inverter 28b changes the frequency of the power supplied to the motor 28a within a predetermined range. As a result, the rotation speed of the motor 28a is changed, and the rotation speed of the second pump 28 is changed within a predetermined range.

[0024] In the third path 12, a tank 30 for storing the functional water that has passed through the third on-off valve 24 is disposed. The tank 30 is communicated with the second path 10 by a communication path 32. The communication path 32 is connected between the second on-off valve 22 and the second pump 28 in the second path 10. Also, a fourth on-off valve 34 is disposed in the communication path 32. When the fourth on-off valve 34 opens, the functional water stored in the tank 30 is communicated between the second on-off valve 22 and the second pump 28.

[0025] The functional water supply device 2 includes a control means 36 for controlling the operation of the functional water supply device 2. The control means 36 opens and closes the first, second, third, and fourth on-off valves 20, 22, 24, 34 by sending signals to the actuators of the first, second, third, and fourth on-off valves 20, 22, 24, 34. Also, the control means 36 sends a signal to the inverter 28b to control the operation of the second pump 28. Further, the control means 36 also sends a signal to the temperature adjustment means 26 to adjust the temperature of the functional water. Such a control means 36 can be composed of a computer having a processor and a memory.

[0026] In the functional water supply device 2 of this embodiment, a flow rate adjustment valve 38 for adjusting the flow rate of the functional water supplied to the processing device 6 is disposed in the confluence path 16. By this flow rate adjustment valve 38, an appropriate amount of functional water is supplied to the processing device 6. Note that the operation of the flow rate adjustment valve 38 is controlled by the control means 36.

[0027] Next, the operation of the functional water supply device 2 described above will be described.

[0028] At the start of the operation of the functional water supply device 2, the control means 36 opens the first on-off valve 20, closes the second on-off valve 22 and the third on-off valve 24, and activates the first path 8. Also, the second pump 28 is deactivated. As a result, the functional water supplied from the tank 4a of the water source 4 to the functional water supply device 2 by the first pump 4b flows from the first path 8 to the confluence path 16. The functional water flowing through the confluence path 16 is adjusted to an appropriate temperature by the temperature adjustment means 26. Then, the functional water adjusted to an appropriate temperature is supplied to each processing device 6 after its flow rate is controlled by the flow rate adjustment valve 38.

[0029] The pressure of the functional water flowing through the first path 8 is measured by the pressure sensor 18, and the measured pressure value is sent from the pressure sensor 18 to the control means 36. Then, when the control means 36 determines that the value of the pressure sensor 18 is a sufficient pressure value for supplying the functional water to the processing device 6, it maintains the above state and supplies the functional water to the processing device 6. That is, the control means 36 opens the first on-off valve 20, closes the second on-off valve 22 and the third on-off valve 24, deactivates the second pump 28, activates the first path 8, and supplies the functional water to the processing device 6.

[0030] When the number of operating processing apparatuses 6 is equal to or less than a predetermined number (for example, about 70% of the number of processing apparatuses 6), only by operating the first pump 4b, it is possible to secure the pressure (for example, 0.5 MPa) necessary for supplying the functional water to each processing apparatus 6. Therefore, in such a case, the control means 36 deactivates the second pump 28. As a result, the operating power of the second pump 28 becomes zero, and the heat generation of the second pump 28 also becomes zero, so the power of the temperature adjustment means 26 is also reduced. Therefore, according to the functional water supply apparatus 2 of the present embodiment, power consumption can be reduced.

[0031] Further, when the control means 36 determines that the value of the pressure sensor 18 can maintain a sufficient pressure value for supplying the functional water to the processing apparatus 6, the control means 36 opens the third on-off valve 24 to store the functional water in the tank 30.

[0032] Even when the first path 8 is operated to supply the functional water to the processing apparatus 6 and the functional water is supplied to the tank 30 to store the functional water in the tank 30, the value of the pressure sensor 18 may be able to maintain the above-mentioned necessary pressure (for example, 0.5 MPa). For example, when the number of operating processing apparatuses 6 is significantly less than the predetermined number. Therefore, when the value of the pressure sensor 18 is greater than the above-mentioned necessary pressure (for example, 0.6 to 0.7 MPa), and even when the functional water is supplied to the tank 30 to store the functional water in the tank 30, the value of the pressure sensor 18 can maintain the above-mentioned necessary pressure, the control means 36 opens the first on-off valve 20, closes the second on-off valve 22, deactivates the second pump 28, operates the first path 8 to supply the functional water to the processing apparatus 6, and opens the third on-off valve 24 to store the functional water in the tank 30 from the third path 12. As a result, when the functional water sent from the first pump 4b is insufficient, the functional water stored in the tank 30 can be replenished.

[0033] On the other hand, when the control means 36 determines that the value of the pressure sensor 18 is not a sufficient pressure value for the processing device 6 to supply the functional water, the second on-off valve 22 is opened, the first on-off valve 20 is closed, and the second pump 28 is operated to supply the functional water to the processing device 6 through the second path 10. In this case, the third on-off valve 24 and the fourth on-off valve 34 are closed.

[0034] Depending on the specifications of the workpiece, processing conditions, etc., when the number of operating processing devices 6 exceeds a predetermined number, there are times when it becomes impossible to ensure the pressure necessary to supply the functional water to the processing device 6 with only the operation of the first pump 4b. Therefore, in such a case, the control means 36 is configured to ensure the pressure necessary to supply the functional water to the processing device 6 by operating the second pump 28.

[0035] Furthermore, when the value of the pressure sensor 18 is not a sufficient pressure value for the processing device 6 to supply the functional water and is unstable, the control means 36 of the present embodiment closes the first on-off valve 20 and the second on-off valve 22, opens the third on-off valve 24 and the fourth on-off valve 34, operates the second pump 28, and supplies the functional water to the processing device 6 through the third path 12.

[0036] As described above, depending on the specifications of the workpiece, processing conditions, etc., when the number of operating processing devices 6 exceeds a predetermined number, there are times when it becomes impossible to ensure the pressure necessary to supply the functional water to the processing device 6 with only the operation of the first pump 4b. Furthermore, as the number of operating processing devices 6 increases, not only does the value of the pressure sensor 18 decrease, but it may also become unstable. Therefore, in such a case, the control means 36 opens the third on-off valve 24 and the fourth on-off valve 34 and operates the second pump 28 to supply the functional water stored in the tank 30 to the processing device 6 together with the functional water sent from the tank 4a of the water source 4. As a result, it is possible to ensure the pressure necessary to supply the functional water to the processing device 6 and to stabilize the pressure.

[0037] Thus, in the control means 36, based on the detection result of the pressure sensor 18, it is determined whether or not to operate the second pump 28. That is, the control means 36 operates the second pump 28 only when the pressure necessary to supply the functional water to the processing device 6 cannot be secured by the operation of the first pump 4b alone. Therefore, according to the functional water supply device 2 of the present embodiment, the power consumption can be reduced compared to the conventional configuration (the configuration in which the first and second pumps are always operated).

[0038] When operating the second pump 28, it is preferable to adjust the rotation speed of the second pump 28 according to the value of the pressure sensor 18. By doing so, it is possible to secure the minimum necessary pressure for supplying the functional water to the processing device 6 and suppress an increase in power consumption.

[0039] Also, in the present embodiment, based on the detection result of the pressure sensor 18, the functional water can be stored in the tank 30, and when the value of the pressure sensor 18 is not a sufficient pressure value for supplying the functional water to the processing device 6 and is unstable, the functional water stored in the tank 30 can be sent together with the functional water sent from the tank 4a of the water source 4. Therefore, even if the number of operating processing devices 6 increases, the operation of the processing device 6 can be surely continued.

Explanation of Reference Numerals

[0040] 2: Functional water supply device 4: Water source 4a: Tank 4b: First pump 6: Processing device 8: First path 10: Second path 12: Third path 14: Branch portion 16: Confluence path 18: Pressure sensor 20: First on-off valve 22: Second on-off valve 24: Third on-off valve 26: Temperature adjustment means 28: Second pump 28a: Motor 28b: Inverter 30: Tank 32: Communication path 34: Fourth on-off valve 36: Control means 38: Flow rate adjustment valve

Claims

1. A functional water supplying device that supplies functional water pumped from a water source by a first pump to a processing device, a branching section for branching the functional water pumped out by the first pump into at least a first path, a second path, and a third path; a merging route that merges the first route, the second route, and the third route; a pressure sensor disposed between the first pump and the branch; a first on-off valve disposed in the first path; a second on-off valve disposed in the second path; a third on-off valve disposed in the third path; and a temperature adjusting means arranged in the joining path for adjusting the temperature of the functional water; a second pump disposed in the second path and configured to deliver the functional water that has passed through the second on-off valve to the temperature adjustment means; a tank disposed in the third passage and configured to store functional water that has passed through the third on-off valve; a fourth on-off valve for connecting the functional water stored in the tank between the second on-off valve and the second pump; A control means; A functional water supply device comprising:

2. The control means A functional water supply device as described in claim 1, wherein when it is determined that the pressure sensor value is sufficient to supply functional water to the processing equipment, the first on-off valve is opened, the second on-off valve and the third on-off valve are closed, and the second pump is deactivated to cause the first path to function and supply functional water to the processing equipment.

3. 3. The functional water supplying apparatus according to claim 2, wherein a flow rate regulating valve for regulating the flow rate of the functional water supplied to the processing apparatus is disposed in the joining path, so that an appropriate amount of the functional water is supplied to the processing apparatus.

4. The control means 3. The functional water supplying apparatus according to claim 2, wherein when it is determined that the pressure sensor value can maintain a pressure value sufficient for supplying functional water to a processing device, the third on-off valve is opened to store functional water in the tank.

5. The control means A functional water supply device as described in claim 1, wherein when it is determined that the pressure sensor value is not a sufficient pressure value to supply functional water to the processing equipment, the second on-off valve is opened, the first on-off valve, the third on-off valve and the fourth on-off valve are closed, and the second pump is operated to supply functional water to the processing equipment via the second path.

6. The control means A functional water supply device as described in claim 1, wherein when the value of the pressure sensor is not a sufficient pressure value to supply functional water to the processing equipment and is unstable, the first on-off valve and the second on-off valve are closed, the third on-off valve and the fourth on-off valve are opened, and the second pump is operated to supply functional water to the processing equipment via the third path.

Images