Reticle pressing machine and reticle box adopting them

Abstract

To provide a reticle pressing machine.SOLUTION: A reticle pressing machine used for a reticle box that houses a reticle, contains: a reticle press plate; pressing means that is arranged to the reticle press plate, and contains a pressing part, in which the pressing part presses the reticle press plate in accordance with a movement width corresponded to the reticle press plate of the pressing means, and moving the reticle press plate to a lateral direction to the pressing means; and an adjustment element that is provided to an inside of the reticle press plate via the pressing means, and presses the pressing part to the reticle press plate until the reticle is fixed by adjusting the movement width of the pressing means, or adjusts the pressing part of the pressing means so as to be separated from the reticle and cancels a pressing force.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to a reticle press apparatus and a reticle box to which the same is applied. [Background technology]

[0002] In the semiconductor industry, reticles play a very important role in the process. Whether it is traditional yellow light photolithography or etching, or the recent extreme ultraviolet lithography (EUVL) process, it is inseparable from the use of reticles.

[0003] Among many industries directly or indirectly related to semiconductors, photoelectric related industries are also quite important. When manufacturing large-sized panels, the size of the reticle used in the process varies with the size of the panel. Summary of the Invention [Problem to be solved by the invention]

[0004] However, when a large reticle is placed in the reticle box, the inertial motion associated therewith becomes more serious. Large reticles are prone to shaking, collision, and even tilting of the entire reticle container due to the problem of insufficient transportation accuracy during transportation or transport, which leads to damage to the large reticle. In addition, the clamping method of the reticle by the large reticle box currently on the market has a problem of looseness, so that the large reticle flies around inside the reticle box during transportation, and further generates fine particles that contaminate the reticle. In addition, since the elements included in the conventional reticle press device used in the reticle box are independent from each other, the user needs to use both hands during assembly and removal (for example, holding the device with one hand and locking the screw to the reticle box with the device with the other hand), making the operation difficult and unstable.

[0005] Therefore, how to propose a reticle press device and a reticle box that can solve the above problems is one of the problems that the industry is currently investing research and development resources to solve. [Means for solving the problem]

[0006] In view of this, one object of the present disclosure is to propose a reticle press device that can solve the above problems and a reticle box to which the same is applied.

[0007] In order to achieve the above-mentioned object, according to one embodiment of the present disclosure, a reticle press device used in a reticle box for storing a reticle includes a reticle press plate, a press means arranged on the reticle press plate and including a pressing portion, which presses the reticle press plate according to the movement width of the press means relative to the reticle press plate and moves the reticle press plate laterally relative to the press means, and an adjustment element provided within the reticle press plate via the press means, for adjusting the movement width of the press means to press the pressing portion against the reticle press plate until the reticle is fixed, or to move the pressing portion of the press means away from the reticle and remove the pressing force.

[0008] In one or more embodiments of the present disclosure, the pressing portion includes an elastic portion and an inclined surface coupled to the elastic portion, and the pressing means presses the reticle press plate toward or away from the reticle along the inclination angle of the inclined surface in response to adjustment of the adjustment element, and at the same time, the elastic portion elastically deforms in response to the pressing force of the inclined surface.

[0009] In one or more embodiments of the present disclosure, the press means moves toward the reticle press plate along a first axial direction, causing the pressing portion to press the reticle press plate so as to move laterally relative to the press means along a second axial direction and is inclined with respect to the first axial direction and the second axial direction.

[0010] In one or more embodiments of the present disclosure, the pressing means further includes a main body portion, the main body portion being coupled to the pressing portion and providing for placement of the adjustment element, the pressing portion including an elastic portion that elastically deforms in response to lateral movement of the main body portion.

[0011] In one or more embodiments of the present disclosure, the adjustment element is rotatably coupled to the pressing means.

[0012] In one or more embodiments of the present disclosure, the pressing means has a through hole, the through hole has an enlarged portion and a reduced portion that are connected to each other, the diameter of the enlarged portion is larger than the diameter of the reduced portion, and the adjustment element is inserted into the enlarged portion and is positioned in a coupled manner toward the reduced portion.

[0013] In one or more embodiments of the present disclosure, the reduced bore has a flange within it for mating with and positioning the annular engagement groove of the adjustment element.

[0014] In one or more embodiments of the present disclosure, the adjustment element includes a head portion configured to abut against the pressing means and move away from one side of the reticle press plate, a lock portion for locking the reticle box and adjusting the movement width of the pressing means relative to the reticle press plate depending on the degree of locking, and a lock portion having one end coupled to the head portion and the other end coupled to the lock portion, and configured to move the reticle press plate via the pressing means. and a pillar disposed within the

[0015] In one or more embodiments of the present disclosure, the reticle press plate, the press means and the adjustment element are coupled together, and the adjustment element includes a locking portion for locking the reticle box, and when the locking portion is unlocked from the reticle box, the reticle press plate, the press means and the adjustment element can be removed together from the reticle box.

[0016] In one or more embodiments of the present disclosure, the reticle press plate has a mounting hole and has first limiting portions on either side of the mounting hole, and the press means includes a mounting portion and has second limiting portions on either side of the mounting portion, the second limiting portions corresponding to the first limiting portions and arranged to limit each other.

[0017] In order to achieve the above-mentioned object, according to one embodiment of the present disclosure, a reticle press device includes a reticle box, the reticle box including a wall portion, a box body having a plurality of stage portions arranged around the inside of the wall portion, each stage portion having a locking hole; a reticle press plate disposed within the box body having a storage space for accommodating a reticle, the reticle press plate being disposed on one of the stage portions; a press means disposed on the reticle press plate and including a pressing portion, the pressing portion pressing the reticle press plate in accordance with the movement width of the press means relative to the reticle press plate and moving the reticle press plate laterally relative to the press means; and an adjustment element that is provided within the reticle press plate via the press means, has a locking portion for locking into the locking hole, and adjusts the movement width of the press means relative to the reticle press plate in accordance with the degree of locking of the locking portion. (Effects of the Invention)

[0018] As described above, in the reticle press device of the present disclosure, when the adjusting element is adjusted (locked) to the reticle press plate, the pressing means moving toward the reticle press plate together with the adjusting element has its inclined surface portion pushing the reticle press plate to move laterally, thereby achieving the purpose of the reticle press plate clamping the reticle laterally. In an embodiment in which the adjusting element is coupled to the contracted hole portion of the pressing means, when the adjusting element rotates, the reticle press plate restricts the pressing means so that the pressing means does not rotate with the adjusting element. In an embodiment in which the pressing means has an engaging portion for engaging with the reticle press plate, in combination with the coupling relationship between the adjusting element and the contracted hole portion of the pressing means, the reticle press plate can move upward with the adjusting element together with the pressing means after the adjusting element is completely loosened from the locking hole of the reticle box, so that the entire reticle press device can be removed from the reticle box (i.e., the convenience of operation can be improved).

[0019] The above is used to explain the problems that the present disclosure aims to solve, the technical means for solving the problems, and the effects resulting therefrom, and specific details of the present disclosure will be described in detail in the following embodiments and related drawings. [Brief description of the drawings]

[0020] To make the above and other objects, features, advantages and embodiments of the present disclosure more clearly and comprehensibly, the drawings are described as follows. [Figure 1] FIG. 2 is a perspective combined view illustrating a reticle press apparatus according to one embodiment of the present disclosure. [Diagram 2] FIG. 2 is an exploded perspective view showing the reticle press device in FIG. [Diagram 3] FIG. 2 is a perspective view showing an adjustment element in FIG. [Figure 4] FIG. 2 is a cross-sectional view showing a pressing means and an adjusting element in FIG. [Diagram 5] FIG. 2 is a perspective view showing a pressing means in FIG. [Figure 6]FIG. 2 is a perspective view illustrating a reticle box according to one embodiment of the present disclosure. [Figure 7] 7 is an enlarged perspective exploded view showing a part of the box body and the reticle press device in FIG. 6. FIG. [Figure 8] 8 is an enlarged perspective combination view showing a part of the box body and the reticle press device in FIG. 7. FIG. [Figure 9] 8 is another enlarged perspective combination view showing a part of the box body and the reticle press device in FIG. 7. FIG. [Figure 10] 8 is a partial cross-sectional view showing the box body and the reticle pressing device in FIG. 7. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] In the following, in order to disclose and clearly explain several embodiments of the present disclosure in the drawings, many practical details are described in the following description. However, it should be understood that these practical details are not applied to limit the present disclosure. That is, in some embodiments of the present disclosure, these practical details are not necessary. Moreover, in order to simplify the drawings, some of the conventional structures and elements are simply illustrated in the drawings.

[0022] 1 and 2, FIG. 1 is a perspective combination view showing a reticle press apparatus 200 according to an embodiment of the present disclosure. FIG. 2 is a perspective exploded view showing the reticle press apparatus 200 in FIG. 1. As shown in FIG. 1 and FIG. 2, in this embodiment, the reticle press apparatus 200 includes a reticle press plate 210, a pressing means 220, and an adjustment element 230. The pressing means 220 includes a pressing unit 222. The pressing unit 222 is configured to press the reticle press plate 210 according to the movement width of the pressing means 220 relative to the reticle press plate 210, and to move the reticle press plate 210 laterally relative to the pressing means 220. The adjustment element 230 is provided in the reticle press plate 210 via the press means 220 and is configured to adjust the movement range of the press means 220, and adjusts the pressing portion 222 to press the reticle press plate 210 until the reticle 900 is fixed (see Figure 9), or to move the pressing portion 222 of the press means 220 away from the reticle 900 and release the pressing force (see Figure 8).

[0023] For example, as shown in FIG. 2, the adjustment element 230 is configured to move the pressing means 220 along the first axial direction A1 toward the reticle pressing plate 210 such that the pressing portion 222 presses the reticle pressing plate 210 and moves it laterally with respect to the pressing means 220 along the second axial direction A2. Specifically, the pressing means 220 further includes a main body portion 221. The main body portion 221 provides an installation for the adjustment element 230. The pressing portion 222 is coupled to the main body portion 221. The pressing portion 222 includes an elastic portion 222b and an inclined surface 222a coupled to the elastic portion 222b. The inclined surface 222a is located in the elastic portion 222b and on the side away from the main body portion 221 of the elastic portion 222b. The inclined surface 222a is inclined with respect to the first axial direction A1 and the second axial direction A2. The pressing means 220 presses the reticle pressing plate 210 to approach or move away from the reticle 900 along the inclination angle of the inclined surface 222a according to the adjustment of the adjustment element 230. At the same time, the elastic portion 222b elastically deforms according to the pressing force of the inclined surface 222a. As can be seen from this, the elastic portion 222b elastically deforms according to the lateral movement of the main body portion 221. With the elastically deformable pressing portion 222, the pressing means 220 can achieve the purpose that the main body portion 221 abuts against the reticle pressing plate 210 and the pressing portion 222 presses the reticle pressing plate 210 laterally.

[0024] In some embodiments, the inclined surface 222a is an inclined surface inclined with respect to the first axial direction A1 and the second axial direction A2, but the present disclosure is not limited thereto. In actual applications, the inclined surface 222a may be an arc surface.

[0025] In some embodiments, the first axial direction A1 and the second axial direction A2 are perpendicular to each other, but the present disclosure is not limited thereto.

[0026] In some embodiments, the adjustment element 230 is rotatably coupled to the pressing means 220. For example, referring to FIG. 3, which is a perspective view showing the adjustment element 230 in FIG. 1. As shown in FIGS. 2 and 3, in this embodiment, the pressing means 220 has a through hole 221a. The through hole 221a has a communicating enlarged hole portion 221a1 and a reduced hole portion 221a2. The hole diameter of the enlarged hole portion 221a1 is larger than that of the reduced hole portion 221a2. For example, the contour of the through hole 221a having the enlarged hole portion 221a1 and the reduced hole portion 221a2 resembles a ladle. The adjustment element 230 is configured to be placed in the enlarged hole portion 221a1 and coupled and positioned toward the reduced hole portion 221a2.

[0027] Specifically, the adjustment element 230 includes a column body 231 and a head portion 233. The head portion 233 is configured to abut against the pressing means 220 and be away from one side of the reticle pressing plate 210. One end of the column body 231 is coupled to the head portion 233. The column body 231 is provided in the reticle pressing plate 210 through the pressing means 220. The size of the through hole 221a is not suitable for the passage of the head portion 233. For example, the enlarged hole portion 221a1 is a part of a circular hole (not limited thereto), and since its hole diameter is greater than or equal to the outer diameter of the column body 231, the column body 231 can pass through the enlarged hole portion 221a1.

[0028] Referring to FIG. 4, which is a cross-sectional view showing the pressing means 220 and the adjustment element 230 in FIG. 1. As shown in FIGS. 3 and 4, in this embodiment, the adjustment element 230 is configured to be rotatably coupled to the reduced hole portion 221a2 of the through hole 221a. Specifically, the reduced hole portion 221a2 has a flange 221a3 inside. Also, the column body 231 of the adjustment element 230 has an annular engagement groove 231a. The flange 221a3 is used to couple and position to the annular engagement groove 231a. For example, the reduced hole portion 221a2 is a part of a circular hole, and since its hole diameter is greater than or equal to the outer diameter of the annular engagement groove 231a and smaller than the outer diameter of the column body 231, the flange 221a3 is rotatably engaged with the annular engagement groove 231a.

[0029] In some embodiments, the contour of the shrinkage hole portion 221a2 is slightly larger than a semi - circle, and the column body 231 originally located in the expansion hole portion 221a1 can enter the shrinkage hole portion 221a2 by pressing through the annular engagement groove 231a. Therefore, when the flange 221a3 is rotatably engaged with the annular engagement groove 231a, the adjustment element 230 is rotatable relative to the pressing means 220. Thus, when the adjustment element 230 rotates, the pressing means 220 does not rotate following the adjustment element 230.

[0030] Referring to FIG. 5, it is a perspective view showing the pressing means 220 in FIG. 1. As shown in FIGS. 2 and 5, in this embodiment, the reticle pressing plate 210 has mounting holes 211. The pressing means 220 is configured to pass through the mounting holes 211 and slide along the mounting holes 211. The inclined surface 222a of the abutting portion 222 is abutted against the inner edge of the mounting hole 211 so as to move the reticle pressing plate 210 laterally with respect to the pressing means 220. Specifically, the mounting holes 211 extend, for example, along the second axial direction A2, and both sides of the mounting holes 211 have two opposing first limiting portions 211a. The pressing means 220 further includes a mounting portion 223. The main body portion 221 of the pressing means 220 is configured to abut against one side of the reticle pressing plate 210 (for example, the top side of the reticle pressing plate 210 in FIG. 2). The mounting portion 223 is connected to the main body portion 221 and passes through the mounting holes 211. Both sides of the mounting portion 223 have two opposing second limiting portions 223a. The two second limiting portions 223a are each configured to abut against the two first limiting portions 211a. Thus, while the pressing means 220 passes through the mounting holes 211 and slides along the mounting holes 211, the two first limiting portions 211a of the mounting holes 211 limit the two second limiting portions 223a of the mounting portion 223, thereby preventing the pressing means 220 from rotating relative to the reticle pressing plate 210 around the first axial direction A1. As can be seen from this, when the adjustment element 230 rotates, the pressing means 220 whose rotation is restricted by the reticle pressing plate 210 does not rotate following the adjustment element 230.

[0031] Furthermore, as shown in FIGS. 2 and 5, in this embodiment, the pressing means 220 further includes two engaging portions 224. The two engaging portions 224 are respectively connected to two second restricting portions 223a of the mounting portion 223 and protrude in a direction opposite to the mounting portion 223. The two engaging portions 224 are configured to engage with the other side of the reticle pressing plate 210 (the bottom side of the reticle pressing plate 210 in FIG. 2, and reference may be made to FIG. 10 above) so as to restrict the reticle pressing plate 210 between the main body portion 221 of the pressing means 220 and the two engaging portions 224. When actually assembling, the mounting portion 223 of the pressing means 220 can be passed through the mounting hole 211 of the reticle pressing plate 210. While the mounting portion 223 passes through the mounting hole 211, the two first restricting portions 211a of the mounting hole 211 press against the two engaging portions 224. After passing through the mounting hole 211 by pressing, the two engaging portions 224 can engage with the other side of the reticle pressing plate 210.

[0032] Based on the foregoing structural arrangement, in addition to adjusting the coupling relationship between the element 230 and the shrinkage hole portion 221a2 of the pressing means 220, when the engaging relationship between the engaging portion 224 of the pressing means 220 and the reticle pressing plate 210 is combined, the reticle pressing plate 210 can move together with the pressing means 220 according to the adjusting element 230, so that the convenience of operation of the reticle pressing device 200 can be improved.

[0033] As shown in FIG. 5, in this embodiment, the engaging portion 224 is hook-shaped, but the present disclosure is not limited thereto.

[0034] Referring to FIG. 6, it is a perspective view of a reticle box 10 according to an embodiment of the present disclosure. As shown in FIG. 6, in this embodiment, the reticle box 10 includes a box body 100 and a plurality of reticle pressing devices 200. The box body 100 includes a wall portion 110. The wall portion 110 surrounds to form an accommodation space. A plurality of stage portions 111 are provided around the inner side of the wall portion 110. The reticle pressing device 200 is configured to be assembled to the stage portion 111.

[0035] Referring to FIGS. 7, 8, and 9, FIG. 7 is an exploded perspective view showing an enlarged part of the box body 100 and the reticle pressing device 200 in FIG. 6. FIG. 8 is an assembled perspective view showing an enlarged part of the box body 100 and the reticle pressing device 200 in FIG. 7. FIG. 9 is another assembled perspective view showing an enlarged part of the box body 100 and the reticle pressing device 200 in FIG. 7. The assembler can attach the reticle pressing device 200 to the box body 100 in the order of FIGS. 7 to 9, and the reticle pressing device 200 can fix and hold the reticle 900 located in the accommodation space of the wall portion 110.

[0036] As shown in FIG. 7, in this embodiment, each stage portion 111 of the wall portion 110 has a locking hole 111a. As described above, by adjusting the coupling relationship between the element 230 and the shrinkage hole portion 221a2 of the pressing means 220 and the engagement relationship between the engaging portion 224 of the pressing means 220 and the reticle pressing plate 210, when the assembler grasps the adjusting element 230, the entire reticle pressing device 200 can be moved above the stage portion 111.

[0037] As shown in FIG. 8 and referring also to FIG. 3, in the present embodiment, the adjustment element 230 further includes a locking portion 232. The locking portion 232 is provided at an end of the column body 231 away from the head portion 233. The locking portion 232 is located on the side away from the pressing means 220 of the reticle pressing plate 210. An assembler holding the adjustment element 230 can move the entire reticle pressing apparatus 200 to the stage portion 111 to bring the locking portion 232 into contact with the locking hole 111a, and initially align the reticle pressing apparatus 200 and the stage portion 111. According to the degree of locking of the locking portion 232, the moving width of the pressing means 220 with respect to the reticle pressing plate 210 can be adjusted.

[0038] As shown in FIG. 9, in the present embodiment, the locking portion 232 of the adjustment element 230 is configured to be locked to the locking hole 111a along the first axial direction A1. The assembler can lock the locking portion 232 downward into the locking hole 111a by rotating the head portion 233 of the adjustment element 230. While the locking portion 232 is completely locked in the locking hole 111a, the head portion 233 of the adjustment element 230 presses the pressing portion 222 against the reticle pressing plate 210 along the first axial direction A1, causing the inclined surface 222a of the pressing portion 222 to press against the reticle pressing plate 210, moving the reticle pressing plate 210 laterally with respect to the pressing means 220 along the second axial direction A2 away from the wall portion 110 and fixing and holding the reticle 900. When the locking portion 232 is completely locked in the locking hole 111a, the main body portion 221 of the pressing means 220 and the reticle pressing plate 210 are sandwiched between the stage portion 111 and the head portion 233 of the adjustment element 230.

[0039] When the assembler attempts to remove the reticle press device 200 to release the reticle 900, the program from FIG. 9 to FIG. 7 can be executed in reverse order, which will not be further described here. As described above, the reticle press plate 210, the pressing means 220, and the adjusting element 230 are coupled. When unlocking the locking portion 232 from the reticle box 10, the reticle press plate 210, the pressing means 220, and the adjusting element 230 can be removed from the reticle box 10.

[0040] Referring to FIG. 10, it is a partial cross-sectional view showing the box body 100 and the reticle press device 200 in FIG. 7. As shown in FIG. 10, in the present embodiment, the stage portion 111 further has a guide structure 111b. The guide structure 111b is configured to guide the reticle press plate 210 to move along the second axial direction A2. Specifically, the guide structure 111b of the stage portion 111 is a bump. The bump extends along the second axial direction A2. Also, the bottom of the reticle press plate 210 correspondingly has a guide structure 211b. The guide structure 211b of the reticle press plate 210 is two ribs. The two ribs extend along the second axial direction A2. The bump is slidably coupled between the two ribs and guides the reticle press plate 210 to move relative to the stage portion 111 along the second axial direction A2.

[0041] In some embodiments, the guide structure 111b of the stage portion 111 and the guide structure 211b of the reticle press plate 210 can be mutually exchanged, and similarly, the effect of guiding each other can be achieved.

[0042] As is clearly understood from the detailed description of the specific embodiments of the present disclosure above, in the reticle pressing device of the present disclosure, when adjusting (locking) the adjusting element to the reticle pressing plate, the pressing means that moves along with the reticle pressing plate accordingly pushes the reticle pressing plate with its inclined portion so as to move it laterally, whereby the purpose that the reticle pressing plate clamps the reticle laterally can be achieved. In the embodiment where the adjusting element is coupled to the shrinkage hole portion of the pressing means, when the adjusting element rotates, the reticle pressing plate restricts the pressing means so that the pressing means does not rotate according to the adjusting element. In the embodiment where the pressing means has an engaging portion for engaging with the reticle pressing plate, by combining the coupling relationship between the adjusting element and the shrinkage hole portion of the pressing means, the reticle pressing plate can move upward according to the adjusting element together with the pressing means after the adjusting element is completely loosened from the locking hole of the reticle box, whereby the entire reticle pressing device can be removed from the reticle box (that is, the convenience of operation can be improved).

[0043] Although the present disclosure is disclosed in embodiments as described above, the above embodiments do not limit the present disclosure, and any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on what is defined by the scope of the patent application attached later.

Description of Reference Numerals

[0044] 10: Reticle box 100: Box body 110: Wall portion 111: Stage portion 111a: Locking hole 111b, 211b: Guide structure 200: Reticle pressing device 210: Reticle pressing plate 211: Mounting hole 211a: First restricting portion 220: Pressing means 221: Body portion 221a: Through hole 221a1: Reaming portion 221a2: Shrinkage hole portion 221a3: Flange 222: Pressing portion 222a: Inclined surface 222b: Elastic portion 223: Mounting portion 223a: Second limiting portion 224: Engaging portion 230: Adjusting element 231: Column body 231a: Annular engaging groove 232: Locking portion 233: Head portion 900: Reticle A1: First axial direction A2: Second axial direction

Claims

1. A reticle press device for use in a reticle box for storing a reticle, comprising: A reticle press plate; a pressing means arranged on the reticle press plate and including a pressing unit, the pressing unit pressing the reticle press plate in accordance with a moving width of the pressing means relative to the reticle press plate and moving the reticle press plate laterally relative to the pressing means; a pressing portion of the pressing means for pressing the reticle against the reticle press plate until the reticle is fixed, or for moving the pressing portion of the pressing means away from the reticle and releasing the pressing force by adjusting the movement width of the pressing means.

2. 2. The reticle press device of claim 1, wherein the pressing portion includes an elastic portion and an inclined surface coupled to the elastic portion, and the pressing means presses the reticle press plate toward or away from the reticle along the inclination angle of the inclined surface in response to adjustment of the adjustment element, and at the same time, the elastic portion elastically deforms in response to the pressing force of the inclined surface.

3. 2. The reticle press apparatus of claim 1, wherein the press means moves toward the reticle press plate along a first axial direction, such that the pressing portion presses the reticle press plate so as to move laterally relative to the press means along a second axial direction, and is inclined with respect to the first axial direction and the second axial direction.

4. 2. The reticle press apparatus of claim 1, wherein the pressing means further includes a body portion coupled to the pressing portion and providing placement of the adjustment element, the pressing portion including an elastic portion that elastically deforms in response to lateral movement of the body portion.

5. 2. The reticle pressing apparatus of claim 1, wherein said adjustment element is rotatably coupled to said pressing means.

6. 2. The reticle press apparatus of claim 1, wherein the pressing means has a through hole, the through hole having an enlarged portion and a reduced portion that communicate with each other, the diameter of the enlarged portion being larger than the diameter of the reduced portion, and the adjustment element is inserted into the enlarged portion and coupled toward the reduced portion to be positioned.

7. 7. The reticle press apparatus of claim 6, wherein the inside of the reduced bore portion has a flange for coupling with and positioning one of the annular engagement grooves in the adjustment element.

8. The adjustment element is a head portion configured to abut against the pressing means and spaced apart from one side of the reticle pressing plate; a locking portion for locking the reticle box and adjusting a moving width of the pressing means relative to the reticle pressing plate according to a degree of locking; a column having one end connected to the head portion and the other end connected to the lock portion, the column being disposed within the reticle press plate via the press means; 10. The reticle press apparatus of claim 1, comprising:

9. 2. The reticle press apparatus of claim 1, wherein the reticle press plate, the press means and the adjustment element are coupled together, the adjustment element includes a locking portion for locking the reticle box, and when the locking portion is unlocked from the reticle box, the reticle press plate, the press means and the adjustment element can be removed together from the reticle box.

10. The reticle press plate has a mounting hole and a first limiting portion on each side of the mounting hole; and 2. The reticle press apparatus of claim 1, wherein the pressing means includes a mounting portion and has second limiting portions on either side of the mounting portion, the second limiting portions corresponding to the first limiting portions and arranged to limit each other.

11. 1. A reticle box, comprising: a box body including a wall portion, a plurality of stage portions being provided around the inside of the wall portion, each of the plurality of stage portions having a lock hole; a reticle press device disposed within the box body having an accommodation space for accommodating a reticle, a reticle press plate disposed on one of the stage portions; a pressing means arranged on the reticle press plate and including a pressing unit, the pressing unit pressing the reticle press plate in accordance with a moving width of the pressing means relative to the reticle press plate and moving the reticle press plate laterally relative to the pressing means; an adjustment element that is provided within the reticle press plate via the press means, has a locking portion for locking with the locking hole, and adjusts the movement width of the press means relative to the reticle press plate in accordance with the degree of locking of the locking portion; A reticle press apparatus including: Including the reticle box.

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