Environment application apparatus

Abstract

To provide an environment application apparatus that facilitates work of a sample and excellently maintains environmental conditions.SOLUTION: An environment application apparatus for performing work on objects such as chemicals under a prescribed environment, comprises: an environment application box in which the work is carried out; an air-conditioning device which sends air into the environment application box; a dehumidifier which sends outside air to the air-conditioning device; and a pipeline which connects the environment application box with the air-conditioning device. The environment application box has an open top surface, a bottom wall and side walls forming a thermal insulation layer, a side partition plate erected inside the side wall with a prescribed gap therebetween, an intermediate layer between the side wall and the side partition plate, and an environmental area surrounded by the side partition plate and the bottom wall. The upper end of the side partition plate is configured to be lower than the upper end of the side wall.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an environmental provision device.

Background Art

[0002] When performing operations such as filling and packing specimens such as chemicals and samples, depending on the type of specimen, there may be problems when performing the operations in a natural environment such as normal temperature. In such cases, an environmental provision device that provides a constant environment such as temperature conditions is used. This environmental provision device includes room types that keep the entire room, such as a dry room or a clean room, under a constant environment, and booth types that secure a space where an operator can work, such as a dry booth or a clean booth.

[0003] Since the room type is large, when a room cannot be created, a small booth type is used. Some of the booth types have gloves for working inside the booth provided on the wall surface, and it is possible to put a hand into the glove from the outside and work inside the booth through the glove.

[0004] On the other hand, recently, since there are specimens such as semiconductor samples that have severe temperature conditions and handling requirements, a temperature control device for an environmental provision device with improved temperature accuracy for specimens has been proposed (for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] Although the above-mentioned Patent Document 1 can improve the temperature accuracy by temperature control, there remains another problem, that is, the problem for handling delicate objects. That is, in the conventional environmental provision device, there is a problem that it is difficult to put a hand into the glove on the wall surface and perform operations through the glass.

[0007] In addition, some environmental provision devices typified by current environmental test chambers adopt a method of generating a stable artificial environment by sending conditioned air controlled by an air conditioner into an internal space surrounded by a heat insulation layer to eliminate the influence of disturbances. In this case, in order to take the specimen in and out of the artificial environment area, it has a door with at least one side that can be opened and closed. However, the internal environmental state is naturally disturbed by the opening and closing of the door, and there are many scenes where the opening and closing operation itself is troublesome. Under such circumstances, there is a demand for an environmental provision device in this type of device that provides good access to the specimen and maintains a good environmental state. In addition, there is a similar demand not only for environmental test chambers but also in cases where a workpiece is manufactured by adjusting environmental factors.

[0008] Therefore, an object of the present invention is to solve the above problems in the conventional environmental provision device and provide an environmental provision device that facilitates the operation of the specimen and maintains a good environmental state.

Means for Solving the Problems

[0009] The environmental provision device according to one aspect of the present invention is an environmental provision device for performing operations on articles such as chemicals in a predetermined environment, and includes an environmental provision box for performing the operations, an air conditioner for sending air into the environmental provision box, a dehumidifier for sending outside air into the air conditioner, and a pipe for connecting the environmental provision box and the air conditioner. The environmental provision box has an open top surface, a bottom wall and a peripheral wall forming a heat insulating layer, side partition plates erected inside the peripheral wall at a predetermined interval, an intermediate layer between the peripheral wall and the side partition plates, and an environmental area surrounded by the side partition plates and the bottom wall, and is characterized in that the upper end of the side partition plates is configured to be lower than the upper end of the peripheral wall.

[0010] According to this configuration, since the top surface of the environmental area where the operation is performed is open, the operator can put his hand in from the open top surface and directly access the test specimens such as chemicals and samples to perform the operation, so the work efficiency is good. And since the side partition plates are erected inside the peripheral wall at a predetermined interval and the height of the side partition plates is set lower than that of the peripheral wall, an intermediate layer serving as a buffer area with the outside air is formed around and above the environmental area by the air filled in the environmental provision box (see FIG. 3), and the environmental conditions such as the temperature in the environmental area can be accurately maintained.

[0011] Also, in the case of a configuration in which an environmental area without a side partition plate and without an intermediate layer is formed only by the peripheral wall and the air supplied from the air conditioner fills the entire environmental area, the environmental area will be greatly affected by the outside air. Also, when the supplied air is cold air, condensation is likely to occur on the upper part of the peripheral wall, and in addition to the outside air, the environmental area will be affected by the condensation. On the other hand, in the above configuration with side partition plates, a buffer area with the outside air can be formed around and above the environmental area, so it is difficult to be affected by the outside air and the condensation on the upper part of the peripheral wall can be suppressed. Thereby, the environmental conditions in the environmental area can be maintained well.

[0012] Also, this environmental provision device is characterized in that the environmental provision box is formed with supply holes through which air flows into the bottom wall existing in the environmental area.

[0013] According to this configuration, by arranging an air supply hole in the bottom wall of the environmental area of the environmental provision box, air that is colder than the outside air supplied by the air conditioner fills the entire environmental area through the supply hole in the bottom wall of the environmental area first. After that, the air that has overflowed from the environmental area gets over the side partition plate that is configured lower than the peripheral wall and fills the intermediate layer.

[0014] Note that after the entire environmental provision box is filled with air, the air overflows from the open top surface of the environmental provision box to the outside of the environmental provision box. In this way, by allowing air to flow in from the bottom wall, the air gradually rises from the bottom surface and is filled by overflow, it is possible to stabilize the air inside the environmental area and the entire environmental provision box, with less disturbance to the internal environment such as the temperature environment and good maintenance of the environmental state.

[0015] In addition to the above configuration, this environmental provision device can also adopt a configuration in which the environmental provision box is formed with exhaust holes through which air is discharged in the bottom wall or the side wall of the intermediate layer.

[0016] According to this configuration, the cold air supplied by the air conditioner fills the entire environmental area through the supply hole in the bottom wall of the environmental area first. After the air that has overflowed from the environmental area gets over the side partition plate that is configured lower than the peripheral wall and fills the intermediate layer, the air returns to the air conditioner through the exhaust holes. By adopting such a circulation type, the air that has been cooled once returns to the air conditioner at a temperature lower than the outside air, which can reduce the cost when the air conditioner cools the air again and achieve energy savings.

[0017] In addition, this environmental provision device is characterized in that in the intermediate layer and the environmental area, a perforated plate with a plurality of holes formed above the supply holes and the exhaust holes is arranged in the environmental provision box.

[0018] According to this configuration, the blowing air flow from the supply holes can be made uniform, and similarly, the sucking air flow into the exhaust holes can be made uniform. By doing so, the disturbance of the internal environment in the environmental area is small, and the maintenance of the environmental state is good.

[0019] Further, this environmental provision device is characterized in that in the environmental area, a porous plate having a plurality of holes formed therein is disposed above the supply holes in the environmental provision box.

[0020] According to this configuration, the blowing air flow from the supply holes can be made uniform. By doing so, the disturbance of the internal environment in the environmental area is small, and the maintenance of the environmental state is good. Particularly, in the case of a large environmental provision box, it is suitable when the air volume of the supplied air increases.

[0021] Further, this environmental provision device is characterized in that a heater is disposed at the upper part of the peripheral wall of the environmental provision box.

[0022] According to this configuration, by disposing a heater at the upper part of the peripheral wall of the environmental provision box, condensation can be surely prevented, and further, the environmental maintenance of the environmental area becomes good. Note that the heater is preferably disposed inside near the upper end of the peripheral wall.

[0023] Further, this environmental provision device is characterized in that after the environmental area is filled with air by the air flowing in from the supply holes, the intermediate layer is filled with air beyond the upper end of the side partition, and air overflows from the open top surface of the environmental provision box.

[0024] According to this configuration, by allowing air to flow in from the bottom wall, the air gradually rises from the bottom surface and is filled by overflow, it is possible to achieve the stabilization of the air in the environmental area and the entire environmental provision box, the disturbance of the internal environment such as the temperature environment is small, and the maintenance of the environmental state is good.

[0025] Further, in this environment providing device, air with a lower dew point than the outside air flows into the air conditioner through the dehumidifier, the air with the lower dew point is supplied to the environment providing box, and the environment area filled with the air with the lower dew point is maintained at a positive pressure.

[0026] According to this configuration, the inside of the environment providing box is filled with air having a lower dew point than the outside air, and the environment area is maintained at a positive pressure. Together with being surrounded by the surroundings and the upper intermediate layer, intrusion of outside air into the environment area can be suppressed.

[0027] Further, this environment providing device is characterized in that the temperature of the environment area of the environment providing box is maintained at 0°C or lower.

[0028] According to this configuration, in combination with the structure of the environment providing box, the temperature in the environment area can be maintained at 0°C or lower, and the test specimen can be operated in that environment.

[0029] Further, this environment providing device is characterized in that in the environment providing box, the temperature of the environment area is lower than the temperature of the intermediate layer area.

[0030] According to this configuration, due to the structure of this environment providing box, the temperature in the environment area can be made lower than that of the intermediate layer (for example, -3°C, -5°C, -10°C, etc.). Thus, the environment in the environment area can be maintained, and the temperature of the intermediate layer becomes higher than that of the environment area due to the influence of the outside air or the like.

[0031] Further, this environment providing device further includes a bottom partition plate erected inside the bottom wall with a predetermined interval, the environment area is surrounded by the side partition plate and the bottom partition plate, a second supply hole through which air flows is formed in the bottom partition plate, and the supply hole in the bottom wall and the second supply hole in the bottom partition plate are connected by a pipe.

[0032] According to this configuration, an intermediate layer can be formed even below the environmental area, thereby further improving the environmental maintenance of the environmental area.

Advantages of the Invention

[0033] According to the environmental provision device according to the above aspect of the present invention, it is possible to obtain an environmental provision device with good access to the specimen and good environmental maintenance in the environmental area where the work is performed.

Brief Description of the Drawings

[0034]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Modes for Carrying Out the Invention

[0035] Hereinafter, an environmental provision device according to an embodiment of the present invention will be described in detail. Note that the present invention is not limited by this embodiment. In addition, the constituent elements in the following embodiments include those that can be replaced by those skilled in the art and are easy to replace, or those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0036] <Embodiment 1> [Configuration of the environmental provision device] FIG. 1 is a configuration diagram showing an environmental provision device according to Embodiment 1 of the present invention. FIG. 2 is a diagram showing an environmental provision box constituting the environmental provision device, where (a) is a plan view and (b) is a cross-sectional view from the side.

[0037] As shown in FIG. 1, the environmental provision device of the present embodiment mainly includes an environmental provision box 1 which is a working place for a specimen S such as a chemical or a sample, an air conditioner 2 that supplies low-temperature air thereto, and a dehumidifier 3 that sends outside air into it. And these are connected by pipes 4 and 5.

[0038] As shown in FIG. 2, the environmental provision box 1 has an open top surface, a bottom wall 12 and a peripheral wall 13 that form an outer heat insulation layer C, and a side partition plate 11 erected from the bottom wall 12 at a predetermined interval inside the peripheral wall 13. Further, a heater 19 for preventing condensation is disposed inside the upper part of the peripheral wall 13 (see FIG. 1). Also, the upper end of the side partition plate 11 is lower than the upper end of the peripheral wall 13.

[0039] And the space surrounded by the side partition plate 11 and the bottom wall 12 constitutes an environmental area A. An intermediate layer B is formed above the environmental area A and surrounded by the side partition plate 11 and the peripheral wall 13 around the environmental area A.

[0040] Also, a supply hole 14 is provided at substantially the center of the bottom wall 12 of the environmental area A. Through this supply hole 14, air from the air conditioner 2 is supplied to the environmental area A.

[0041] Also, the bottom wall 12 and the peripheral wall 13 are made of a resin plate and foamed urethane as an example of the present embodiment and constitute the heat insulation layer C. Also, the side partition plate 11 is made of SUS sheet metal as an example of the present embodiment. And air flows into the portion surrounded by the side partition plate 11 and the peripheral wall 13 to form the intermediate layer B.

[0042] As shown in Fig. 1, the air conditioner 2 mainly includes an air supply fan 21, a heater 22, and a cooler 23. And, the dehumidifier 3 takes in outside air, and sends the air with a lower dew point to the air conditioner 2 through the pipe 5.

[0043] Then, the air with a lower dew point than the outside air is supplied from the supply hole 14 of the environmental enclosure box 1 to the environmental area A through the pipe 4 via the cooler 23, the heater 22, and the air supply fan 21.

[0044] [Air flow of the environmental conditioning device] Next, based on Fig. 3, the air flow will be described. Fig. 3 is a diagram showing the air flow in the environmental conditioning device and the temperature and dew point temperature at each location. Note that the air temperature and dew point temperature at each location are an example of this embodiment.

[0045] As shown in Fig. 3, first, the dehumidifier 3 takes in outside air at normal temperature (for example, temperature 20°C, dew point 10°C), and turns it into air with a lower dew point than the outside air (20°C, dew point -40°C). Then, this air with a lower dew point (20°C, dew point -40°C) is sent into the air conditioner 2 through the pipe 5.

[0046] When the air with a lower dew point (20°C, dew point -40°C) is sent into the air conditioner 2, it passes through the cooler 23 and the heater 22, and is changed into low-temperature and low-dew-point air (-25°C, dew point -40°C) where the air (20°C, dew point -40°C) is cooled. Then, this low-temperature and low-dew-point air (-25°C, dew point -40°C) is sent into the air conditioner 2 through the pipe 5.

[0047] When the low-temperature and low-dew-point air (-25°C, dew point -40°C) is supplied from the supply hole 14 of the bottom wall 12 of the environmental enclosure box 1, this air (-25°C, dew point -40°C) which is heavier than the outside air gradually rises from the bottom surface, and the environmental area A is filled with this air (-25°C, dew point -40°C). Note that in the process of filling the environmental area A, due to the influence of the intrusion heat in the pipe 5 part, the temperature and dew point temperature of the air in the environmental area A become (-20°C, dew point -40°C). Since there is no intrusion of moisture, the dew point temperature does not change.

[0048] After that, the air (-20°C, dew point -40°C) that has overflowed from above the environmental area A climbs over the side partition plate 11 configured lower than the peripheral wall 13 and fills the intermediate layer B. In the process of filling the intermediate layer B, due to the influence of outside air or the like from the top surface of the environmental provision box 1, the temperature and dew point temperature of the air in the intermediate layer B become approximately (-10°C, dew point -20°C).

[0049] Then, after the environmental area A and the intermediate layer B are filled and the entire environmental provision box 1 is filled with air, air overflows from the open top surface above the environmental provision box 1 to the outside of the environmental provision box 1.

[0050] In this way, by allowing air to flow in from the bottom wall 12, the air gradually rises from the bottom surface and is slowly filled by overflow, it is possible to stabilize the air in the environmental area A and the entire environmental provision box 1.

[0051] Also, since the intermediate layer B is formed above and around the environmental area A, in addition to the heat insulation layer C of the bottom wall 12 and the peripheral wall 13, an air wall can also be formed between the outside air. Combining with the above, it is possible to stabilize the air in the environmental area A and maintain the environmental state.

[0052] Summarizing the state where the environmental provision box 1 is filled with air, the temperature of the air in the environmental area A is approximately -20°C, the dew point temperature is dew point -40°C, the temperature of the air in the intermediate layer B is approximately -10 to -15°C, and the dew point temperature is approximately dew point -20°C. The reason why the temperature and dew point temperature of the intermediate layer B are higher than those in the environmental area A is that it is closer to the outside air and is affected by the outside air.

[0053] According to the environmental provision device of the present embodiment configured as described above, since the top surface of the environmental provision box 1 is open, access to the specimen is good, and since the intermediate layer B and the heat insulation layer C are formed around the environmental area A, the temperature state can be maintained, and since the filling of air is slowly carried out by overflow, the influence of disturbance from the outside air can be suppressed. Therefore, it is possible to maintain the environment in the environmental area A where the work of the specimen is carried out.

[0054] <Embodiment 2> The main difference between the environmental provision device of Embodiment 2 and the environmental provision device of Embodiment 1 is that the environmental provision box 1 is provided with an exhaust hole 15 for exhausting air to the outside of the box. Note that the same reference numerals are given to the configurations common to Embodiment 1.

[0055] FIG. 4 is a configuration diagram showing the environmental provision device according to Embodiment 2 of the present invention. FIG. 5 is a view showing the environmental provision box constituting the environmental provision device, (a) is a plan view, (b) is a cross-sectional view from the side, and (c) is a modified example.

[0056] As shown in FIG. 4, the environmental provision device of the present embodiment mainly includes an environmental provision box 1 which is a work place for the specimen, an air conditioner 2 for supplying low-temperature air thereto, and a dehumidifier 3 for sending outside air thereto. And these are connected by pipes 4, 5, and 6.

[0057] As shown in FIG. 5, the environmental provision box 1 has an open top surface, a bottom wall 12 and a peripheral wall 13 constituting the outer heat insulation layer C, and a side partition plate 11 erected from the bottom wall 12 at a predetermined interval inside the peripheral wall 13. Further, a heater 19 for preventing dew condensation is disposed inside the upper part of the peripheral wall 13 (see FIG. 4). Further, the upper end of the side partition plate 11 is lower than the upper end of the peripheral wall 13.

[0058] And the space surrounded by the side partition plate 11 and the bottom wall 12 constitutes the environmental area A. An intermediate layer B is formed around the environmental area A above the environmental area A and surrounded by the side partition plate 11 and the peripheral wall 13.

[0059] Also, a supply hole 14 is provided at approximately the center of the bottom wall 12 of the environmental area A. Through this supply hole 14, air from the air conditioner 2 is supplied to the environmental area A.

[0060] Also, below the peripheral wall 13, an exhaust hole 15 for exhausting the air that has flowed into the environmental provision box 1 is provided. And, through the exhaust hole 15 and the pipe 6, this air is configured to be returned to the air conditioner 2.

[0061] As shown in FIG. 4, the air conditioner 2 mainly includes an air supply fan 21, a heater 22, and a cooler 23. And, the dehumidifier 3 takes in outside air and sends the air with a lower dew point through the pipe 5 into the air conditioner 2.

[0062] Then, the air with a lower dew point than the outside air is supplied from the supply hole 14 of the environmental provision box 1 to the environmental area A through the cooler 23, the heater 22, the air supply fan 21, and the pipe 4.

[0063] After that, when the environmental area A is filled with air, the air that has overflowed from above the environmental area A fills the intermediate layer B beyond the side partition plate 11. And, when the intermediate layer B is filled with air, the air is discharged from the exhaust hole 15 and returned to the air conditioner 2. Also, a part of the air overflows from above the environmental provision box 1 and is also discharged to the outside. Note that the temperature and dew point temperature inside the environmental provision box 1 at this time are shown in FIG. 6.

[0064] According to the environmental provision device of the present embodiment configured as described above, since the top surface of the environmental provision box 1 is open, access to the test specimen is good, and since the intermediate layer B and the heat insulation layer C are formed around the environmental area A, the temperature state can be maintained. Note that, compared with Embodiment 1, since air is discharged from the exhaust hole 15, turbulence is likely to occur inside the environmental provision box 1, but since it is turbulence in the intermediate layer B, the influence is within a certain range.

[0065] In addition, since the once-cooled air can be returned to the air conditioner 2 for reuse, it is possible to suppress the running cost and achieve energy savings without wasting the thermal energy of the air.

[0066] Also, as in the modification shown in FIG. 5(c), by sandwiching the punching plate between the environmental area A and the intermediate layer B, it is possible to equalize both the blowing / suction flow. Note that the opening ratio of the punching plate is preferably 50% or less, and more preferably around 30%. By reducing the opening ratio, air can slowly flow into the environmental area, which is suitable for maintaining the environment in the environmental area.

[0067] <Other Embodiments> As described above, the preferred embodiments of the present invention have been described. However, it goes without saying that the present invention is not limited to the above-described embodiments, and various modifications or corrections within the scope described in the claims also belong to the technical scope of the present invention.

[0068] (1) For example, in the above-described Embodiments 1 and 2, the bottom wall 12 constitutes the bottom surface of the environmental area A. However, alternatively, the bottom surface of the environmental area A may be configured as the bottom partition plate 16. Further, an air supply hole 17 is provided substantially at the center of the bottom partition plate 16 and is connected to the supply hole 14 of the bottom wall 12 so that the cooled air from the air conditioner 2 is directly supplied into the environmental area A (see FIG. 7).

[0069] In this case, the environmental area A is formed by the bottom partition plate 16 and the side partition plate 11. That is, there is a configuration in which an intermediate layer B formed by the bottom partition plate 16 and the bottom wall 12 also exists below the environmental area A. This further improves the maintenance of the air state in the environmental area A.

[0070] (2) Also, for example, in the above embodiment, the supply hole 14 for supplying air is formed at the center of the bottom wall 12 of the environment area A of the environment-imparting box 1. However, even if the supply hole 18 is provided below the peripheral wall 13, although there may be some reduction in the effect in terms of the air flow relationship compared to the above Embodiment 1, it is considered that a certain effect can be obtained compared to the conventional ones (see Fig. 8a).

[0071] Further, when the supply hole 18 is provided laterally from below the peripheral wall 13, the upward blowing flow can be made uniform by installing a punching plate above the supply hole 18. Similarly, the suction flow can be made uniform by installing a punching plate near the bottom surface of the intermediate layer B (see Fig. 8b). By doing so, the performance of the environment area can be made close to that of Embodiment 1.

[0072] Note that the opening ratio of the punching plate is desirably 50% or less, and more desirably around 30%. By reducing the opening ratio, air can flow into the environment area slowly, and it is suitable for maintaining the environment in the environment area. Also, the installation of the punching plate is particularly suitable for a large-sized environment-imparting box. This is because in a large-sized environment-imparting box, the air volume flowing into the environment area becomes large.

Explanation of Signs

[0073] 1 Environment-imparting box 11 Side partition plate 12 Bottom wall 13 Peripheral wall 14 Supply hole 15 Exhaust hole 16 Bottom partition plate 17 Supply hole 18 Supply hole 19 Heater 2 Air conditioner 21 Air supply fan 22 Heater 23 Cooler 3 Dehumidifier A Environment area B Intermediate layer C Heat insulation layer

Claims

1. An environmental provision device for performing operations on a specimen in a predetermined environment, An environmental provision box for performing operations, An air conditioner for sending air into the environmental provision box, A dehumidifier for sending outside air into the air conditioner, And a pipe connecting the environmental provision box and the air conditioner, The environmental provision box, Has an open top surface, a bottom wall and a peripheral wall forming a heat insulation layer, Inside the peripheral wall, side partition plates erected at a predetermined interval, An intermediate layer between the peripheral wall and the side partition plates, And an environmental area surrounded by the side partition plates and the bottom wall, Characterized in that the upper end of the side partition plates is configured to be lower than the upper end of the peripheral wall, Environmental provision device.

2. The environmental provision box, On the bottom wall existing in the environmental area, Characterized in that a supply hole through which air flows in is formed, The environmental provision device according to Claim 1.

3. The environmental provision box, On the bottom wall or the side wall of the intermediate layer, Characterized in that an exhaust hole through which air is discharged is formed, The environmental provision device according to Claim 2.

4. The environmental provision box, In the intermediate layer and the environmental area, Above the supply hole and the exhaust hole, Characterized in that a porous plate with a plurality of holes formed is arranged, The environmental provision device according to Claim 3.

5. The environmental provision box, In the environmental area, Above the supply hole, A perforated plate with a plurality of holes formed is arranged, characterized in that, The environment providing device according to claim 1.

6. A heater is arranged at the upper part of the peripheral wall of the environment providing box, The environment providing device according to any one of claims 1 to 5.

7. By the air flowing in through the supply hole, After the environment area is filled with air, Beyond the upper end of the side partition, the intermediate layer is filled with air, Characterized in that air overflows from the open top surface of the environment providing box, The environment providing device according to any one of claims 1 to 5.

8. Air with a lower dew point than the outside air flows into the air conditioner through the dehumidifier, The air with a lower dew point is supplied to the environment providing box, Characterized in that the environment area filled with the air with a lower dew point is maintained at a positive pressure, The environment providing device according to claims 1 to 5.

9. Characterized in that the temperature of the environment area of the environment providing box is maintained at 0 °C or lower, The environment providing device according to any one of claims 1 to 5.

10. In the environment providing box, Characterized in that the temperature of the environment area is lower than the temperature of the area of the intermediate layer, The environment providing device according to any one of claims 1 to 5.

11. The environment providing box, Further includes a bottom partition plate erected inside the bottom wall at a predetermined interval, The environmental area is surrounded by the side partition plate and the bottom partition plate, a second supply hole through which air flows is formed in the bottom partition plate, the supply hole in the bottom wall and the second supply hole in the bottom partition plate are connected by a pipe, The environmental provision device according to any one of claims 1 to 5.

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