Fluid supply device

Abstract

To provide a fluid supply device capable of detecting deviation in nozzle position with high accuracy.SOLUTION: A fluid supply device includes a first nozzle that supplies a first fluid toward an object, an optical sensor including a light emitting unit that emits light for detection and a light receiving unit that receives the light, a first light blocking member that can be positioned at a first non-light blocking position that does not block light and a first light blocking position that blocks light, and a detection unit that detects displacement of the first nozzle on the basis of the amount of light received by the light receiving unit. The first light blocking member is capable of switching between the first light blocking position and the first non-light blocking position by being displaced in conjunction with the displacement of the first nozzle.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a fluid supply device.

Background Art

[0002] Supply devices that supply fluid toward an object are used. For example, the supply device includes a nozzle that supplies fluid (for example, chemical solution, rinse solution, etc.) to a substrate such as a semiconductor wafer (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above device, it was not easy to accurately determine the position of the nozzle. When the position of the nozzle was inaccurate, it was sometimes difficult to supply fluid (chemical solution, rinse solution, etc.) to the correct position with respect to the object. Therefore, when a deviation occurred in the position of the nozzle, it was required to accurately detect this deviation.

[0005] An object of the present invention is to provide a fluid supply device that can accurately detect a deviation in the position of a nozzle.

Means for Solving the Problems

[0006] The fluid supply device according to the first aspect of the present invention includes a first nozzle that supplies a first fluid toward an object, a light-emitting unit that emits light for detection, and a light sensor that includes a light-receiving unit that receives the light, a first light-shielding member that can be disposed at a first non-light-shielding position where the light is not blocked and a first light-shielding position where the light is blocked, and a detection unit that detects displacement of the first nozzle based on the amount of light received by the light-receiving unit. The first light-shielding member can switch between the first light-shielding position and the first non-light-shielding position by being displaced in conjunction with displacement of the first nozzle.

[0007] The fluid supply device according to the second aspect of the present invention, in the first aspect, further includes a second nozzle that supplies a second fluid toward the object, and a second light-shielding member that can be disposed at a second non-light-shielding position where the light is not blocked and a second light-shielding position where the light is blocked. The second light-shielding member can switch between the second light-shielding position and the second non-light-shielding position by being displaced in conjunction with displacement of the second nozzle.

[0008] The fluid supply device according to the third aspect of the present invention, in the first aspect, a first light passage region through which the light passes is formed in the first light-shielding member.

[0009] The fluid supply device according to the fourth aspect of the present invention, in the third aspect, the first light passage region is an opening or a transparent window.

[0010] The fluid supply device according to the fifth aspect of the present invention, in the second aspect, a second light passage region through which the light passes is formed in the second light-shielding member.

[0011] The fluid supply device according to the sixth aspect of the present invention, in the fifth aspect, the second light passage region is an opening or a transparent window.

[0012] The fluid supply device according to the seventh aspect of the present invention, in the second aspect, at least a part of the light sensor is disposed in a space between the first nozzle and the second nozzle.

[0013] In the fluid supply device according to the eighth aspect of the present invention, in any one of the first to seventh aspects, the light emitting unit irradiates the light in a direction away from the object.

[0014] The fluid supply device according to the ninth aspect of the present invention further includes a cover that covers at least a part of the first light shielding member in any one of the first to eighth aspects.

Advantages of the Invention

[0015] According to one aspect of the present invention, it is possible to provide a fluid supply device that can accurately detect the displacement of the nozzle position.

Brief Description of the Drawings

[0016]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Modes for Carrying Out the Invention

[0017] Hereinafter, the fluid supply device according to the present invention will be described with reference to the drawings.

[0018] [Substrate processing apparatus] FIG. 1 is a configuration diagram of a substrate processing apparatus 110 including a fluid supply device 100 according to the first embodiment. FIG. 2 is a perspective view of a part of the fluid supply device 100. FIG. 3 is a perspective view of a part of the fluid supply device 100. FIG. 4 is a cross-sectional view of the first nozzle 11 and the second nozzle 12. FIG. 5 is a plan view of a part of the fluid supply device 100.

[0019] As shown in FIG. 1, the substrate processing apparatus 110 cleans the surface of the substrate W while rotating the substrate W around the central axis of the substrate W in the presence of, for example, a cleaning liquid. Examples of the substrate W include semiconductor wafers and the like. The substrate processing apparatus 110 is, for example, a substrate cleaning apparatus. The substrate W is an example of an object.

[0020] The substrate processing apparatus 110 includes a fluid supply device 100 and a substrate support portion 111. The substrate support portion 111 rotatably supports the substrate W in the circumferential direction. The substrate support portion 111 can support the substrate W in a horizontal posture.

[0021] In the following description, an XYZ orthogonal coordinate system may be used. The X direction and the Y direction are parallel to the upper surface of the substrate W. The X direction and the Y direction are orthogonal to each other. The Z direction is orthogonal to the X direction and the Y direction. A plan view is a view from the Z direction. The plane along the X direction and the Y direction is referred to as the "XY plane". The XY plane is, for example, a horizontal plane. The plane along the X direction and the Z direction is referred to as the "XZ plane". The plane along the Y direction and the Z direction is referred to as the "YZ plane". One direction of the X direction is +X. -X is the direction opposite to +X. The -X side is the front side. The +X side is the rear side. One direction of the Y direction is +Y. -Y is the direction opposite to +Y.

[0022] [Fluid supply device] (First embodiment) As shown in FIGS. 2 and 3, the fluid supply device 100 according to the first embodiment includes a first nozzle 11, a second nozzle 12, a first light-shielding member 21 (first dog), a second light-shielding member 22 (second dog), a light sensor 30, a detection unit 40, and a support unit 50.

[0023] The first nozzle 11 is a tubular body that supplies a cleaning liquid supplied from a first supply pipe (not shown) to the substrate W. The "cleaning liquid" may be a chemical solution or a rinse liquid. The chemical solution includes, for example, ammonia hydrogen peroxide (SC1), hydrochloric acid hydrogen peroxide (SC2), sulfuric acid hydrogen peroxide (SPM), sulfuric acid addition, hydrofluoric acid, etc. Examples of the rinse liquid include ultrapure water and pure water (DIW). In the present embodiment, the first nozzle 11 supplies a chemical solution (first fluid). The injection direction (supply direction) of the chemical solution is determined by the orientation of the first nozzle 11.

[0024] The second nozzle 12 is a tubular body that supplies a cleaning liquid supplied from a second supply pipe (not shown) to the substrate W. In the present embodiment, the second nozzle 12 supplies a rinse liquid (second fluid). The injection direction (supply direction) of the rinse liquid is determined by the orientation of the second nozzle 12.

[0025] The support unit 50 includes a support frame 58, a first support 61, and a second support 71. The support frame 58 is, for example, in the shape of a plate parallel to the XZ plane. The support frame 58 extends in the vertical direction.

[0026] The first support 61 supports the first nozzle 11. The first support 61 includes a first mounting plate 63 and a first support plate 64. The first mounting plate 63 is parallel to the support frame 58. The first mounting plate 63 is attached to the support frame 58. The first support plate 64 protrudes from the front end of the first mounting plate 63 toward the -Y side. The first support plate 64 has an insertion hole 64a through which the first nozzle 11 is inserted.

[0027] The second support 71 supports the second nozzle 12. The second support 71 includes a second mounting plate 73 and a second support plate 74. The second mounting plate 73 is parallel to the support frame 58. The second mounting plate 73 is attached to the support frame 58. The second support plate 74 protrudes from the front end of the second mounting plate 73 toward the -Y side. The second support plate 74 has an insertion hole 74a through which the second nozzle 12 is inserted.

[0028] The first support 61 and the second support 71 are provided at different positions in the vertical direction (Z direction). The first support 61 is at a higher position than the second support 71.

[0029] A first holding portion 62 is attached to the first nozzle 11. The first holding portion 62 is disposed on the front side of the first support plate 64 and holds the first nozzle 11. The first holding portion 62 has an insertion hole 62a through which the first nozzle 11 is inserted. A connecting member 65 is attached to the side surface of the first holding portion 62 by fixtures 75, 76.

[0030] The first light-shielding member 21 includes an extending portion 23 and a first light-shielding portion 24. The extending portion 23 includes a mounting plate 13 and an extending plate 14. The mounting plate 13 is in the shape of a plate perpendicular to the XZ plane. The mounting plate 13 is inclined so as to rise toward the +X side. The mounting plate 13 is overlapped with the upper surface of the connecting member 65. The mounting plate 13 is attached to the connecting member 65 by fixtures 77, 78.

[0031] The extending plate 14 includes a front plate portion 15 and a rear plate portion 16. The extending plate 14 is in the shape of a plate parallel to the XZ plane. The front plate portion 15 is connected to the +Y side edge of the mounting plate 13. The front plate portion 15 is inclined so as to rise toward the +X side. The rear plate portion 16 extends rearward (+X side) from the rear end of the front plate portion 15.

[0032] The first light-shielding portion 24 protrudes from the rear end of the rear plate portion 16 toward the -Y side. The first light-shielding portion 24 is in the shape of a plate intersecting the optical axis of the light emitted from the light-emitting portion 31. The first light-shielding portion 24 is, for example, in the shape of a plate parallel to the YZ plane.

[0033] In the first light-shielding portion 24, a first light passage region 21a is formed. The first light passage region 21a is, for example, an opening (through-hole) that penetrates the first light-shielding portion 24 in the thickness direction. The first light passage region 21a allows the light emitted from the light-emitting portion 31 to pass through. The shape of the first light passage region 21a is not particularly limited, but for example, it is circular.

[0034] Since the first light-shielding member 21 is attached to the first holding portion 62 via the connecting member 65, it can be displaced in conjunction with the displacement of the first nozzle 11. The first nozzle 11 can change its posture, for example, by rotating about a point (support point) where it is inserted into the insertion hole 64a. The first light-shielding member 21 is displaced integrally with the first nozzle 11 as the first nozzle 11 is displaced.

[0035] A second holding portion 72 is attached to the second nozzle 12. The second holding portion 72 is disposed on the front side of the second support plate 74 and holds the second nozzle 12. The second holding portion 72 has an insertion hole 72a through which the second nozzle 12 is inserted.

[0036] A connecting member 80 is attached to the second holding portion 72. The connecting member 80 includes a mounting plate 81 and an extending plate 82. The mounting plate 81 is in the shape of a plate parallel to the XZ plane. The mounting plate 81 is attached to the side surface of the second holding portion 72 by fixtures 85, 86.

[0037] The extending plate 82 includes a front plate portion 83 and a rear plate portion 84. The extending plate 82 is in the shape of a plate perpendicular to the XZ plane. The front plate portion 83 is connected to the lower edge of the mounting plate 81. The front plate portion 83 is inclined so as to rise toward the +X side. The rear plate portion 84 extends rearward (+X side) from the rear end of the front plate portion 83. A fixing member 87 is provided on the upper surface of the rear plate portion 84. The fixing member 87 is attached to the rear plate portion 84 by a fixture 89.

[0038] The second light-shielding member 22 includes a mounting portion 25, a first extending portion 26, a second extending portion 27, and a second light-shielding portion 28. The mounting portion 25 is attached to the fixing member 87 by a fixture 88. The mounting portion 25 is in the shape of a plate parallel to the XZ plane. The first extending portion 26 extends from the +X side end of the mounting portion 25 toward the +Y side. The second extending portion 27 extends downward (-Z side) from the +Y side end of the first extending portion 26. The first extending portion 26 and the second extending portion 27 are in the shape of plates parallel to the YZ plane.

[0039] The second light-shielding portion 28 extends from the lower end of the second extending portion 27 toward the -Y side. The second light-shielding portion 28 is in the shape of a plate intersecting the optical axis of the light emitted from the light-emitting portion 31. The second light-shielding portion 28 is, for example, in the shape of a plate parallel to the YZ plane. The second light-shielding portion 28 is located lower than the rear plate portion 84.

[0040] A second light-passing region 22a is formed in the second light-shielding portion 28. The second light-passing region 22a is, for example, an opening (through-hole) penetrating the second light-shielding portion 28 in the thickness direction. The second light-passing region 22a allows the light emitted from the light-emitting portion 31 to pass through. The shape of the second light-passing region 22a is not particularly limited, but is, for example, circular.

[0041] When the first nozzle 11 and the second nozzle 12 are in the reference positions, the first light-passing region 21a and the second light-passing region 22a are at positions where at least a part thereof overlaps when viewed from the X direction.

[0042] The inner diameter of the first light-passing region 21a is different from the inner diameter of the second light-passing region 22a, and one of the light-passing regions 21a and 22a may include the other when viewed from the X direction. The first light-passing region 21a and the second light-passing region 22a may have the same diameter, and the entire regions of the light-passing regions 21a and 22a may overlap when viewed from the X direction.

[0043] The second light-shielding portion 28 is located on the +X side with respect to the first light-shielding portion 24 of the first light-shielding member 21. The second light-shielding portion 28 is, for example, parallel to the first light-shielding portion 24. It is desirable that the second light-shielding portion 28 is spaced apart from the first light-shielding portion 24 on the +X side.

[0044] Since the second light-shielding member 22 is attached to the second holding portion 72 via the fixing member 87 and the connecting member 80, it can be displaced in conjunction with the displacement of the second nozzle 12. The second nozzle 12 can change its posture, for example, by rotating about a fulcrum at a location (support location) inserted into the insertion hole 74a. The second light-shielding member 22 is displaced integrally with the second nozzle 12 as the second nozzle 12 is displaced.

[0045] As shown in FIG. 4, it is preferable to install the first light-shielding portion 24 at a position where the first distance to the first nozzle 11 (the location inserted into the insertion hole 64a of the first support plate 64) is equal to the second distance to the second nozzle 12 (the location inserted into the insertion hole 74a of the second support plate 74). "The first distance and the second distance are equal" means, for example, that the ratio of the first distance to the second distance is in the range of 0.8 to 1.2. For the second light-shielding portion 28 as well, it is preferable that the first distance and the second distance are equal.

[0046] As shown in FIG. 3, the optical sensor 30 includes a light-emitting portion 31 and a light-receiving portion 32. The light-emitting portion 31 emits detection light. The light-receiving portion 32 receives the light from the light-emitting portion 31. The light-emitting portion 31 and the light-receiving portion 32 are supported by a support base 33. The light-emitting portion 31 is held in the holding groove 33a of the support base 33. The light-receiving portion 32 is held in the holding groove 33b of the support base 33 where the light-emitting portion 31 is located. The light-emitting portion 31 is, for example, a light-emitting diode (LED). The light-receiving portion 32 is, for example, a phototransistor.

[0047] The light-receiving portion 32 is installed at a position away from the light-emitting portion 31 on the +X side. Therefore, the light from the light-emitting portion 31 is irradiated in a direction away from the substrate W. It is desirable that at least a part of the optical sensor 30 is arranged in the space between the first nozzle 11 and the second nozzle 12 when viewed in the X direction.

[0048] The detection unit 40 detects the displacement of at least one of the first nozzle 11 and the second nozzle 12 based on the amount of light received by the light receiving unit 32. For example, if the amount of light received is within a predetermined set range, it can be determined that the displacements of the first nozzle 11 and the second nozzle 12 are small (or not displaced). When the amount of light received falls below the lower limit value of the set range, it can be determined that at least one of the first nozzle 11 and the second nozzle 12 has been greatly displaced.

[0049] When the postures of the first nozzle 11 and the second nozzle 12 fluctuate, the position where the fluid (such as a chemical solution or a rinse solution) is sprayed onto the substrate W changes. The directions of the first nozzle 11 and the second nozzle 12 can fluctuate, for example, vertically (in the Z direction) (see FIG. 4). The directions of the first nozzle 11 and the second nozzle 12 can fluctuate, for example, horizontally (in the Y direction) (see FIG. 5). When the directions of the first nozzle 11 and the second nozzle 12 fluctuate vertically, the first light shielding portion 24 and the second light shielding portion 28 are displaced approximately vertically. When the directions of the first nozzle 11 and the second nozzle 12 fluctuate horizontally, the first light shielding portion 24 and the second light shielding portion 28 are displaced approximately horizontally.

[0050] [Method of using the fluid supply device] With reference to FIGS. 6 to 8, the method of using the fluid supply device 100 will be described. As shown in FIG. 6, the first non-light-shielding position P11 is the position of the first light shielding member 21 that does not block the light from the light emitting unit 31. As shown in FIG. 7, the first light-shielding position P21 is the position of the first light shielding member 21 that blocks the light from the light emitting unit 31. The first light shielding member 21 can switch between the first non-light-shielding position P11 and the first light-shielding position P21.

[0051] As shown in FIG. 6, the second non-light-shielding position P12 is the position of the second light shielding member 22 that does not block the light from the light emitting unit 31. As shown in FIG. 8, the second light-shielding position P22 is the position of the second light shielding member 22 that blocks the light from the light emitting unit 31. The second light shielding member 22 can switch between the second non-light-shielding position P12 and the second light-shielding position P22.

[0052] As shown in FIG. 6, when the first nozzle 11 and the second nozzle 12 are at predetermined reference positions, the first light-shielding member 21 is at the first non-light-shielding position P11, and the second light-shielding member 22 is at the second non-light-shielding position P12. The light from the light-emitting unit 31 passes through the light-passing regions 21a and 22a and reaches the light-receiving unit 32. Therefore, the amount of light received by the light-receiving unit 32 is within a predetermined set range. In this case, the detection unit 40 determines that the displacement of the first nozzle 11 and the second nozzle 12 is small (or not displaced).

[0053] As shown in FIG. 7, when the posture of the first nozzle 11 varies from the reference position, the position of the first light-shielding portion 24 changes, and the first light-passing region 21a also displaces. In FIG. 7, the first light-shielding member 21 is at the first light-shielding position P21 that blocks the light from the light-emitting unit 31. When the amount of light received by the light-receiving unit 32 falls below the predetermined set range, the detection unit 40 determines that the displacement of at least one of the first nozzle 11 and the second nozzle 12 is large.

[0054] As shown in FIG. 8, when the posture of the second nozzle 12 varies from the reference position, the position of the second light-shielding portion 28 changes, and the second light-passing region 22a also displaces. In FIG. 8, the second light-shielding member 22 is at the second light-shielding position P22 that blocks the light from the light-emitting unit 31. When the amount of light received by the light-receiving unit 32 falls below the predetermined set range, the detection unit 40 determines that the displacement of at least one of the first nozzle 11 and the second nozzle 12 is large.

[0055] It is desirable that the detection unit 40 can detect the displacement of the nozzles 11 and 12 when the position where the fluid (chemical solution, rinse solution, etc.) is sprayed onto the substrate W changes by a predetermined set value or more from the reference position. The inner diameters of the light-passing regions 21a and 22a can be determined so as to detect this displacement.

[0056] [Effects Exhibited by the Fluid Supply Device of the Embodiment] In the fluid supply device 100, the first light-shielding member 21 can switch between the first non-light-shielding position P11 and the first light-shielding position P21 by being displaced in conjunction with the displacement of the first nozzle 11. Therefore, when the first nozzle 11 is displaced due to the user accidentally touching the first nozzle 11 or the like, the displacement of the first nozzle 11 can be accurately detected.

[0057] In the fluid supply device 100, since the displacement of the first light-shielding member 21 can be detected by the optical sensor 30, unlike the case of detecting displacement based on an image of the nozzle, a large-scale configuration such as an imaging device is unnecessary, and the device configuration can be simplified. The fluid supply device 100 is advantageous in terms of downsizing and cost reduction of the device due to the simplification of the device configuration.

[0058] In the fluid supply device 100, the second light-shielding member 22 can switch between the second non-light-shielding position P12 and the second light-shielding position P22 by being displaced in conjunction with the displacement of the second nozzle 12. Therefore, when the second nozzle 12 is displaced, the displacement of the second nozzle 12 can be accurately detected. In the fluid supply device 100, since the displacement of the first nozzle 11 and the second nozzle 12 can be detected using one optical sensor 30, space saving is possible. Thus, the device configuration can be simplified and the device can be downsized.

[0059] In the fluid supply device 100, a first light passage region 21a, which is an opening, is formed in the first light-shielding member 21 (first light-shielding portion 24). Therefore, even when the first light-shielding portion 24 is displaced in any direction along the YZ plane (for example, the vertical and horizontal directions), this displacement can be detected. Thus, the detection accuracy of the displacement of the first nozzle 11 can be improved.

[0060] In the fluid supply device 100, a second light passage region 22a, which is an opening, is formed in the second light-shielding member 22 (second light-shielding portion 28). Therefore, even when the second light-shielding portion 28 is displaced in any direction along the YZ plane, this displacement can be detected. Thus, the detection accuracy of the displacement of the second nozzle 12 can be improved.

[0061] The optical sensor 30 is preferably arranged at least partially in the space between the first nozzle 11 and the second nozzle 12 in terms of space saving. If the light emitting unit 31 is configured to irradiate light in a direction away from the substrate W, it is possible to avoid the substrate W from being affected by the detection light (for example, oxidation of the surface of the substrate W).

[0062] As shown in FIG. 4, when the distances from the first light shielding portion 24 and the second light shielding portion 28 to the first nozzle 11 are equal to the distances to the second nozzle 12, the amount of displacement of the first light passing region 21a due to the displacement of the first nozzle 11 and the amount of displacement of the second light passing region 22a due to the displacement of the second nozzle 12 can be made equal. Therefore, both the displacement of the first nozzle 11 and the displacement of the second nozzle 12 can be accurately detected.

[0063] [Modifications of the First Light Shielding Member and the Second Light Shielding Member] FIG. 9 is a schematic diagram showing a modification of the first light shielding member 21 and the second light shielding member 22. As shown in FIG. 9, in the first light shielding member 21A, a window portion 41 (transparent window) formed of a transparent material is formed in the first light passing region 21a. In the second light shielding member 22A, a window portion 42 (transparent window) formed of a transparent material is formed in the second light passing region 22a. The window portions 41 and 42 are formed of, for example, glass, plastic, or the like.

[0064] [Fluid Supply Device] (Second Embodiment) FIG. 10 is a perspective view of a part of the fluid supply device 200 according to the second embodiment. The fluid supply device 200 is different from the fluid supply device 100 (see FIG. 2) in that it includes a first cover 120 (cover) and a second cover 130 (cover). The first cover 120 covers the light emitting unit 31 and the light receiving unit 32. The first cover 120 is attached to the outer surface of the support base 33.

[0065] The second cover 130 includes a front plate 131, side plates 132, and a rear plate 133. The second cover 130 covers at least a part (specifically, the light-shielding portions 24 and 28) (see FIG. 2) of the light-shielding members 21 and 22. The front plate 131, the side plates 132, and the support base 33 hang down from the lower surface of the rear plate portion 84 of the connecting member 80.

[0066] The front plate 131 is parallel to the YZ plane. The front plate 131 is located forward (-X side) compared to the first light-shielding portion 24. The front plate 131 has a size that includes the light passage regions 21a and 22a when viewed from the X direction. The side plate 132 extends from the -Y side end of the front plate 131 toward the +X side. The side plate 132 is parallel to the XZ plane. The side plate 132 is located outside (-Y side) with respect to the light-shielding portions 24 and 28 (see FIG. 2). The side plate 132 includes the light passage regions 21a and 22a when viewed from the Y direction. The rear plate 133 extends from the +X side end of the side plate 132 toward the +Y side. The rear plate 133 is parallel to the YZ plane. The rear plate 133 is located rearward (+X side) compared to the second light-shielding portion 28. The rear plate 133 has a size that includes the light passage regions 21a and 22a when viewed from the X direction.

[0067] The fluid supply device 200 includes a second cover 130 that covers at least a part (specifically, the light-shielding portions 24 and 28) of the light-shielding members 21 and 22. Therefore, it is possible to suppress false detection caused by droplets of fluid (for example, cleaning liquid) adhering to the light passage regions 21a and 22a.

[0068] Note that the technical scope of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. The "fluid" supplied in the fluid supply device is preferably a liquid, but the fluid is not limited to a liquid. For example, the fluid may be a gas. The fluid may be a gas-liquid mixture. The fluid may be a solid-liquid mixture containing a liquid and a solid.

[0069] The fluid supply device 100 shown in FIG. 2 has two nozzles, but the number of nozzles is not particularly limited. The number of nozzles may be one or a plurality (any number of two or more). For example, the fluid supply device may include a plurality of nozzles for supplying a chemical solution and one nozzle for supplying a rinse solution.

[0070] The light passing regions 21a and 22a of the first light shielding member 21 and the second light shielding member 22 shown in FIG. 3 are openings, but the light passing regions may be recesses formed at the peripheral edges of the first light shielding member and the second light shielding member. The first light shielding position P21 may be the position of the first light shielding member 21 that blocks at least a part of the light from the light emitting unit 31. The second light shielding position P22 may be the position of the second light shielding member 22 that blocks at least a part of the light from the light emitting unit 31. The photosensor 30 is configured to detect when at least one of the first light shielding member 21 and the second light shielding member 22 is in the light shielding position, but the photosensor may be configured to detect when at least one of the first light shielding member and the second light shielding member is in the non-light shielding position.

[0071] In addition, within the scope not departing from the gist of the present invention, it is possible to appropriately replace the components in the above-described embodiments with well-known components, and the above-described embodiments and modifications may be appropriately combined.

Explanation of Reference Numerals

[0072] 11... First nozzle, 12... Second nozzle, 21... First light shielding member, 21a... First light passing region, 22... Second light shielding member, 22a... Second light passing region, 30... Photosensor, 31... Light emitting unit, 32... Light receiving unit, 40... Detection unit, 41, 42... Windows (transparent windows), 100, 200... Fluid supply devices, 130... Second cover (cover), P11... First non-light shielding position, P12... Second non-light shielding position, P21... First light shielding position, P22... Second light shielding position, W... Substrate (object)

Claims

1. A first nozzle that supplies a first fluid toward an object, An optical sensor including a light emitting unit that emits detection light and a light receiving unit that receives the light, A first light shielding member that can be disposed at a first non-light-shielding position where the light is not blocked and a first light-shielding position where the light is blocked, A detection unit that detects displacement of the first nozzle based on the amount of light received by the light receiving unit, and The first light shielding member can switch between the first light-shielding position and the first non-light-shielding position by being displaced in conjunction with the displacement of the first nozzle. A fluid supply device.

2. A second nozzle that supplies a second fluid toward the object, Further comprising a second light shielding member that can be disposed at a second non-light-shielding position where the light is not blocked and a second light-shielding position where the light is blocked, The second light shielding member can switch between the second light-shielding position and the second non-light-shielding position by being displaced in conjunction with the displacement of the second nozzle. The fluid supply device according to claim 1.

3. The fluid supply device according to claim 1, wherein a first light passage region through which the light passes is formed in the first light shielding member.

4. The fluid supply device according to claim 3, wherein the first light passage region is an opening or a transparent window.

5. The fluid supply device according to claim 2, wherein a second light passage region through which the light passes is formed in the second light shielding member.

6. The fluid supply device according to claim 5, wherein the second light passage region is an opening or a transparent window.

7. At least a part of the optical sensor is disposed in a space between the first nozzle and the second nozzle. The fluid supply device according to claim 2.

8. The light emitting unit irradiates the light in a direction away from the object. The fluid supply device according to claim 1.

9. Further comprising a cover covering at least a part of the first light shielding member. The fluid supply device according to any one of claims 1 to 8.

Images