Electrical connection device

Abstract

To provide an electrical connection device that stabilizes the electrical connection between an object to be inspected and a land.SOLUTION: An electrical connection device 100 comprises: a probe 10 that includes a columnar body section 11 which extends in an axial direction and a base end section 13 which is connected to the body section 11; and a substrate 20 that has a first surface 201 which faces the base end section 13 of the probe 10 and on which lands 21 electrically connected to the base end section 13 are disposed. The base end section 13 of the probe 10 includes a plurality of connection sections 130 each having a linking section 131 that has one end connected to the body section 11 and a contact section 132 that is connected to the other end of the linking section 131. The substrate 20 has a land group 210 which includes a plurality of lands 21 that are individually in contact with the plurality of respective contact sections 132 included in the same base end section 13.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an electrical connection device used for inspecting the electrical characteristics of an object to be inspected.

Background Art

[0002] In order to inspect the electrical characteristics of an object to be inspected, such as a semiconductor integrated circuit, in a wafer state, an electrical connection device including probes is used. In an inspection using probes, one end of a probe contacts an electrode of the object to be inspected, and the other end of the probe contacts a terminal (hereinafter referred to as a "land") disposed on a substrate included in the electrical connection device. The land is electrically connected to an inspection device such as a tester.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In order to accurately inspect the electrical characteristics of an object to be inspected, it is necessary to stably electrically connect the object to be inspected and the land via a probe. An object of the present invention is to provide an electrical connection device capable of stably electrically connecting an object to be inspected and a land.

Means for Solving the Problems

[0005] An electrical connection device according to one aspect of the present invention includes a probe including a columnar main body portion extending in the axial direction and a base end portion connected to the main body portion, and a substrate having a land electrically connected to the base end portion disposed on a first surface facing the base end portion of the probe. The base end portion of the probe includes a plurality of connection portions each having a connecting portion with one end connected to the main body portion and a contact portion connected to the other end of the connecting portion. The substrate has a land group including a plurality of lands that individually contact each of the plurality of contact portions included in the same base end portion.

Advantages of the Invention

[0006] According to the present invention, an electrical connection device capable of stabilizing the electrical connection between an object to be inspected and a land can be provided.

Brief Description of the Drawings

[0007]

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[0008] Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the ratios of the thicknesses of the respective parts are different from the actual ones. Also, it goes without saying that there are parts where the dimensional relationships and ratios are different between the drawings. The embodiments shown below are examples of devices and methods for embodying the technical idea of the present invention, and the embodiments of the present invention do not specify the materials, shapes, structures, arrangements, etc. of the components as follows.

[0009] (First Embodiment) The electrical connection device 100 according to the first embodiment shown in FIG. 1 is used for inspecting the electrical characteristics of the inspection object 200. The electrical connection device 100 includes a probe 10 including a columnar main body portion 11 and a base end portion 13 connected to the main body portion 11, and a substrate 20 on which lands 21 electrically connected to the base end portion 13 of the probe 10 are arranged. The substrate 20 is, for example, a printed circuit board or a space transformer. The lands 21 are arranged on the first surface 201 of the substrate 20 facing the base end portion 13 of the probe 10.

[0010] Hereinafter, the direction in which the substrate 20 is located as viewed from the probe 10 is defined as upward, and the direction in which the probe 10 is located as viewed from the substrate 20 is defined as downward. Also, the surface facing upward of each part of the electrical connection device 100 is defined as the upper surface, the surface facing downward is defined as the lower surface, and the surface connecting the upper surface and the lower surface is defined as the side surface. For example, the first surface 201 is the lower surface of the substrate 20, and the second surface 202 is the upper surface of the substrate 20.

[0011] Referring to FIG. 2, the probe 10 of the electrical connection device 100 will be described. The probe 10 shown in FIG. 2 includes a columnar main body portion 11, a tip portion 12 that is connected to one end of the main body portion 11 and contacts the object to be inspected 200 in the inspection, and a base end portion 13 that is connected to the other end of the main body portion 11. Hereinafter, the axial direction in which the main body portion 11 extends is also simply referred to as the "axial direction". As shown in FIG. 2, the main body portion 11 and the tip portion 12 may be integrally formed. The base end portion 13 includes a plurality of connection portions 130. Each of the connection portions 130 has an elastic connecting portion 131 that connects to the main body portion 11 and a contact portion 132 that connects to the connecting portion 131.

[0012] The probe 10 shown in FIG. 2 has three connection portions 130 at the base end portion 13, but the number of connection portions 130 of the base end portion 13 may be two or four or more. Hereinafter, the case where the base end portion 13 has three connection portions 130 as shown in FIG. 2 will be exemplarily described.

[0013] As shown in FIG. 2, the base end portion 13 of the probe 10 includes a plurality of connection portions 130 each having a connecting portion 131 whose one end is connected to the main body portion 11 and a contact portion 132 that is connected to the other end of the connecting portion 131. On the other hand, as shown in FIG. 1, the substrate 20 has a land group 210 including a plurality of lands 21 that individually contact each of the plurality of contact portions 132 included in the same base end portion 13. In the electrical connection device 100 including a plurality of probes 10, the substrate 20 has a plurality of land groups 210 corresponding to each of the plurality of probes 10.

[0014] As shown in FIG. 3, the connecting portion 131 has a beam portion 1311 that is connected to the main body portion 11 and extends in a direction perpendicular to the axial direction, and a support portion 1312 that is connected to the beam portion 1311 and extends in the axial direction. The first end 132a of the contact portion 132 is connected to the support portion 1312 of the connecting portion 131. The contact portion 132 extends parallel to the axial direction. When viewed from the axial direction, the main body portion 11 and the contact portion 132 are spaced apart. The second end 132b of the contact portion 132 is included in a plane level perpendicular to the axial direction at a position axially extended from the position of the other end of the main body portion 11 to which the base end portion 13 is connected. The second end 132b of the contact portion 132 is connected to the land 21 in the inspection of the inspection object 200. The position of the other end of the main body portion 11 is below the position of the second end 132b of the contact portion 132, and a space is interposed between the end of the main body portion 11 and the first surface 201 of the substrate 20. The thicker the diameter of the contact portion 132, the more stable the contact between the land and the probe 10. Although an example in which the diameter of the contact portion 132 is thicker than the diameter of the connecting portion 131 is shown, the diameters of the contact portion 132 and the connecting portion 131 may be about the same. In order to arrange the probes 10 at a narrow pitch, it is preferable that the diameter of the contact portion 132 is thinner. Note that the end face of the second end 132b of the contact portion 132 may be configured to remove the oxide film on the surface of the land. For example, unevenness may be formed on the end face of the second end 132b.

[0015] The cross-section of the main body portion 11 perpendicular to the axial direction (hereinafter simply referred to as "cross-section") may be, for example, circular or polygonal. In the present embodiment, the case where the cross-section of the main body portion 11 is circular will be exemplarily described. In order to electrically connect the electrodes of the inspection object 200 and the land 21, a conductive material such as a metal material is used for the probe 10. For example, nickel (Ni), nickel alloy, gold (Au), silver (Ag), copper (Cu), palladium (Pd), palladium alloy, rhodium (Rh), rhodium alloy, and other precious metals may be used as the material of the probe 10.

[0016] When inspecting the object 200 to be inspected, the tip 12 of the probe 10 contacts an electrode pad (not shown) of the object 200 to be inspected. The connection part 130 of the base end part 13 of the probe 10 is connected to the land 21 of the substrate 20. Specifically, the second end 132b of the contact part 132 is connected to the land 21. The land 21 is electrically connected to an inspection device such as an IC tester (not shown).

[0017] The tip of the second end 132b of the contact part 132 may be a plane perpendicular to the axial direction of the probe 10. By making the tip of the second end 132b a plane, the contact area between the contact part 132 and the land 21 can be increased. The larger the contact area between the contact part 132 and the land 21, the larger current can flow through the probe 10.

[0018] The base end part 13 of the probe 10 may be joined to the land 21 to form the electrical connection device 100. The connection method and connection material for joining the probe 10 to the land 21 can be arbitrarily selected. For example, the second end 132b of the contact part 132 of the probe 10 may be joined to the land 21 by soldering.

[0019] Since the connecting part 131 of the connection part 130 has elasticity, when the tip 12 of the probe 10 in a state where the base end part 13 is connected to the land 21 is brought into contact with the object 200 to be inspected, elastic deformation along the axial direction of the probe 10 is possible. In other words, since the main body part 11 of the probe 10 is linear and does not have elasticity in the axial direction by itself, the probe 10 has axial elasticity as a whole. For this reason, after the probe 10 is brought into contact with the object 200 to be inspected, an overdrive can be applied to press the probe 10 against the object 200 to be inspected. By the overdrive, an electrical connection between the probe 10 and the object 200 to be inspected can be ensured. Further, since the base end part 13 of the probe 10 has a plurality of contact parts 132, the probe 10 can be stably brought into contact with the land 21.

[0020] After the inspection of the object 200 to be inspected is completed, the probe 10 is separated from the object 200 to be inspected. The connecting portion 131 is formed so as to be elastically deformed and return to its original state after the probe 10 is separated from the object 200 to be inspected. For example, the diameter of the beam portion 1311 of the connecting portion 131 may be made relatively thinner compared to the main body portion 11 to give elasticity to the connecting portion 131. Alternatively, elasticity may be given to the connecting portion 131 by using a material having a lower rigidity than the main body portion 11 for the connecting portion 131. Further, as will be described later, a slit may be provided in the connecting portion 131.

[0021] As shown in FIG. 4, when viewed from the axial direction of the probe 10, the angle θ formed between adjacent connecting portions 131 may be the same between any of the connecting portions 131. For example, when the base end portion 13 has three connecting portions 130, the angle θ is approximately 120 degrees. By making the angles formed between each other equal and extending a plurality of connecting portions 131 from the main body portion 11, the probe 10 can be stably brought into contact with the land 21. For example, the posture of the probe 10 can be maintained perpendicular to the surface on which the land 21 of the substrate 20 is disposed. Further, the plurality of connecting portions 130 of the base end portion 13 come into contact with the land 21 with equal pressing force.

[0022] By the way, a probe of a comparative example (hereinafter referred to as "comparative probe 10M") that makes one end of a columnar main body portion a tip portion that contacts an object to be inspected and connects to a land at a single point of the base end portion of the other end does not have axial elasticity in the probe itself. Therefore, for example, as in the electrical connection device of the comparative example shown in FIG. 5, an overdrive is applied by bending the main body portion of the comparative probe 10M.

[0023] In the electrical connection device of the comparative example shown in FIG. 5, the comparative probe 10M is held by a probe head 30 having a bottom side guide plate 31 and a top side guide plate 32. The bottom side guide plate 31 is disposed around the tip of the comparative probe 10M. The top side guide plate 32 is disposed around the base of the comparative probe 10M. The probe head 30 further has a first guide film 34 and a second guide film 35 that are spaced apart from each other in a space formed by sandwiching a spacer 33 between the top side guide plate 32 and the bottom side guide plate 31. The top side guide plate 32 and the bottom side guide plate 31 (hereinafter collectively referred to as "guide plates") are, for example, ceramic materials. The first guide film 34 and the second guide film 35 (hereinafter collectively referred to as "guide films") are, for example, resin films. The comparative probe 10M passes through guide holes (not shown) formed in the guide plates and the guide films.

[0024] In the probe head 30 shown in FIG. 5, for the guide holes through which the same comparative probe 10M passes, the position of the guide hole of the top side guide plate 32 is offset with respect to the guide hole of the bottom side guide plate 31 in parallel with the main surface of the bottom side guide plate 31. Due to the offset arrangement, the main body of the comparative probe 10M is curved inside the probe head 30 as shown by the solid line in FIG. 5. That is, in the hollow region between the bottom side guide plate 31 and the top side guide plate 32, the comparative probe 10M is in a curved state due to elastic deformation.

[0025] Since the guide plates are offset, when the tip of the comparative probe 10M contacts the object to be inspected, the comparative probe 10M buckles in the hollow region. That is, in the contact state where the comparative probe 10M contacts the object to be inspected, the comparative probe 10M further curves due to bending deformation as shown by the broken line in FIG. 5. As the comparative probe 10M further curves, the comparative probe 10M contacts the object to be inspected 200 with a predetermined pressure.

[0026] However, in the electrical connection device of the comparative example shown in FIG. 5, due to the deformation of the comparison probe 10M, rubbing occurs between the comparison probe 10M and the guide plate and the guide film. For this reason, problems such as the comparison probe 10M not being able to sufficiently contact the land 21 or the object to be inspected, and insufficient electrical conduction not being achieved between the object to be inspected and the land 21 occur.

[0027] On the other hand, the probe 10 does not need to be held in a state where the main body portion 11 is curved. That is, there is no rubbing between the probe 10 and the guide plate and the guide film, and the electrical conduction between the inspection object 200 and the land 21 is stabilized.

[0028] As described above, the electrical connection device 100 according to the embodiment is configured using the probe 10 including a plurality of connection portions 130 each having a contact portion 132 connected to the main body portion 11 via the connection portion 131. Therefore, according to the electrical connection device 100, the electrical connection between the inspection object 200 and the land 21 can be stabilized.

[0029] Furthermore, in the electrical connection device 100 including a plurality of probes 10, the arrangement of the lands 21 on the first surface 201 of the substrate 20 can be arbitrarily set. For example, as shown in FIG. 6, on the first surface 201 of the substrate 20, a plurality of lands 21 included in the land group 210 may be arranged so as to be separated from each other. FIG. 6 is a plan view of the first surface 201 of the substrate 20 viewed from the axial direction. Also, as shown in FIG. 6, at least a part of the lands 21 included in another land group 210 adjacent to the land group 210 may be arranged between the lands 21 included in one land group 210.

[0030] As shown in FIG. 6, in the electrical connection device 100, at least a part of the lands 21 included in another land group 210 can be arranged between the lands 21 included in one land group 210. Thereby, according to the electrical connection device 100, the interval D between the main body portions 11 of the probes 10 can be narrowed when viewed from the axial direction. In other words, an electrical connection device 100 with a narrowed interval between the probes 10 can be configured.

[0031] The substrate 20 has external electrodes that are electrically connected to at least one land 21 included in the land group 210 corresponding to each of the land groups 210. For example, as shown in FIG. 7, the external electrodes 22 are disposed on the second surface 202 of the substrate 20 facing in the direction opposite to the first surface 201. In the substrate 20 shown in FIG. 7, each of all the lands 21 included in the land group 210 is electrically connected to the external electrode 22 via the internal wiring 23 disposed inside the substrate 20.

[0032] Alternatively, as in the substrate 20 shown in FIG. 8, only one land 21 out of the plurality of lands 21 included in the same land group 210 may be electrically connected to the external electrode 22 via the internal wiring 23. The configuration shown in FIG. 8 allows for a smaller allowable value of the current flowing through the probe 10 than the configuration shown in FIG. 7. However, according to the substrate 20 having the configuration shown in FIG. 8, the number of internal wirings 23 can be suppressed, facilitating the manufacture of the substrate 20 and the layout of the internal wirings 23.

[0033] Also, as shown in FIG. 9, a plurality of lands 21 included in the land group 210 may be electrically connected to each other by the internal wiring 23 inside the substrate 20. That is, inside the substrate 20, a plurality of lands 21 included in the land group 210 may be electrically connected to each other.

[0034] As described above, as long as at least one land 21 included in the land group 210 is electrically connected to the external electrode 22, the internal wiring 23 may be arranged in any manner.

[0035] In FIG. 9, an example is shown in which the lands 21 included in the land group 210 are electrically connected to each other by the internal wiring 23 disposed inside the substrate 20. On the other hand, as shown in FIG. 10, conductive surface wiring 24 for electrically connecting a plurality of lands 21 included in one land group 210 to each other may be disposed on the first surface 201 of the substrate 20. FIG. 10 shows an example in which all the lands 21 included in the land group 210 are disposed inside one surface wiring 24. As shown in FIG. 11, the thickness of the surface wiring 24 may be thinner than the thickness of the land 21. The surface wiring 24 is electrically connected to the external electrode 22 via the internal wiring 23, whereby the land 21 is electrically connected to the external electrode 22.

[0036] When viewed from the normal direction of the first surface 201, the width of the surface wiring 24 connecting between the lands 21 may not exceed the diameter of the land 21. For example, as shown in FIG. 12, the width perpendicular to the direction from one land 21 of the surface wiring 24 toward the adjacent other land 21 may be made about the same as the diameter of the land 21. Alternatively, as shown in FIG. 13, the width of the surface wiring 24 connecting between the lands 21 may be made narrower than the diameter of the land 21. In other words, the surface wiring 24 may not exceed a straight line connecting the outer edges of the adjacent lands 21 included in the same land group 210.

[0037] Also, as shown in FIG. 14, when viewed from the normal direction of the first surface 201, the shape of the surface wiring 24 may be formed so as to overlap with the shape constituted by the main body portion 11 and the connecting portion 131 of the probe 10. The width of the surface wiring 24 between the lands 21 does not exceed the width of the connecting portion 131. By overlapping the positions of the main body portion 11 and the connecting portion 131 with the position of the surface wiring 24, a part of the lands 21 included in another land group 210 can be disposed between the lands 21 included in one land group 210. Therefore, when viewed from the normal direction of the first surface 201, the outer edge of the surface wiring 24 may not exceed the outer edges of the main body portion 11 and the connecting portion 131.

[0038] The probe 10 with an elastic connecting portion 131 of the connecting portion 130 can adopt various configurations. For example, as shown in FIG. 15, a probe 10 having slits 1310 formed in the connecting portions 131 of a plurality of connecting portions 130 may be used in the electrical connection device 100. The slit 1310 penetrates the connecting portion 131 in a direction parallel to the axial direction in the beam portion 1311. According to the probe 10 shown in FIG. 15, by providing the slit 1310 that penetrates from the upper surface to the lower surface in the beam portion 1311 of each connecting portion 131, the needle pressure (hereinafter, also simply referred to as "needle pressure") when the probe 10 contacts the inspection object 200 can be adjusted.

[0039] Also, as shown in FIG. 16, slits 1310 that penetrate the connecting portion 131 in a direction perpendicular to the axial direction in the beam portion 1311 may be formed in the connecting portion 131 of the probe 10. By providing the slit 1310 that penetrates in the side surface direction in the beam portion 1311, the needle pressure can be adjusted.

[0040] Alternatively, as shown in FIG. 17, the slits 1310 respectively formed in the beam portions 1311 of the plurality of connecting portions 131 may be communicated at the portion where the connecting portion 131 is connected to the main body portion 11. By communicating the slits 1310, the needle pressure can be adjusted for the entire plurality of connecting portions 131.

[0041] As shown in FIG. 18, the connecting portion 131 of the probe 10 may include a beam portion 1311 that is connected to the main body portion 11 and has elasticity and curves, and a support portion 1312 that connects the beam portion 1311 and the contact portion 132. The probe 10 shown in FIG. 18 includes a portion where the connecting portion 131 curves, so that the connecting portion 131 is likely to curve when the probe 10 contacts the inspection object. Therefore, according to the probe 10 shown in FIG. 18, a stronger overdrive can be applied. As a result, the probe 10 can be more stably brought into contact with the inspection object.

[0042] As shown in FIG. 19, the connecting portion 131 of the probe 10 may include a first arm 1311a and a second arm 1311b. The first arm 1311a and the second arm 1311b are arranged in parallel and are each connected to the main body portion 11. The first arm 1311a extends linearly at an angle that obliquely intersects the axial direction in a direction away from the main body portion 11. The second arm 1311b has a curved portion with elasticity. A contact portion 132 is connected to the joint portion of the first arm 1311a and the second arm 1311b. Since the probe 10 shown in FIG. 19 has a curved portion with elasticity in the second arm 1311b, the elasticity of the connecting portion 131 that curves when the probe 10 contacts the object to be inspected becomes stronger. As a result, a stronger overdrive can be applied. Although an example in which the connecting portion 131 includes the first arm 1311a and the second arm 1311b is shown in FIG. 19, the connecting portion 131 may be composed of three or more arms including at least one arm having a curved portion with elasticity.

[0043] (Second Embodiment) As shown in FIGS. 20 and 21, the base end portion 13 of the probe 10 of the electrical connection device 100 according to the second embodiment has four connection portions 130. The angle θ formed between the connecting portions 131 of adjacent connection portions 130 may be made substantially constant at 90 degrees. And, as shown in FIG. 22, one land group 210 includes four lands 21. The fact that the base end portion 13 of the probe 10 has four connection portions 130 and the land group 210 of the substrate 20 includes four lands 21 is the point where the electrical connection device 100 according to the second embodiment is different from the electrical connection device 100 according to the first embodiment. Regarding other configurations, the second embodiment is the same as the first embodiment.

[0044] At least one of the four lands 21 included in one land group 210 is electrically connected to the external electrode 22 via, for example, an internal wiring 23, similar to the substrate 20 shown in FIGS. 7 to 9. Alternatively, similar to the substrate 20 shown in FIGS. 10 to 14, the land 21 is electrically connected to the external electrode 22 via a surface wiring 24.

[0045] Also in the electrical connection device 100 according to the second embodiment, the probe 10 may have slits 1310 formed in the respective connecting portions 131 of the connection portion 130, similar to the probe 10 shown in FIGS. 15 to 17. Further, the connecting portion 131 of the probe 10 may have a portion that is elastic and curved, similar to the probe 10 shown in FIG. 18, or may include a first arm 1311a and a second arm 1311b arranged in parallel, similar to the probe 10 shown in FIG. 19.

[0046] Even in the electrical connection device 100 in which one land group 210 includes four lands 21, for example, as shown in FIG. 23, at least a part of the lands 21 included in another land group 210 may be arranged between the lands 21 included in one land group 210. Thereby, an electrical connection device 100 with a reduced mutual interval between the probes 10 can be configured. The arrangement of the land groups 210 shown in FIG. 23 corresponds to a configuration in which probes 10 whose directions in which the connecting portions 131 extend from the main body portion 11 are different by 45 degrees from each other are arranged adjacent to each other. For example, the shape of the surface wiring 24 may be formed so as to overlap the shape formed by the main body portion 11 and the connecting portion 131 of the probe 10 when viewed from the normal direction of the first surface 201.

[0047] The rest, the electrical connection device 100 according to the second embodiment is substantially the same as the first embodiment, and redundant descriptions are omitted.

[0048] (Other Embodiments) As described above, the present invention has been described by way of embodiments, but it should not be understood that the discussions and drawings forming part of this disclosure limit the present invention. Various alternative embodiments, examples, and operational techniques will be apparent to those skilled in the art from this disclosure.

[0049] For example, in the above description, the case where the number of connection parts 130 constituting the base end part 13 is 3 or 4 has been exemplarily described, but the number of connection parts 130 constituting the base end part 13 may be 2. The fewer the number of connection parts 130, the closer the probes 10 can be arranged to each other. Also, the number of connection parts 130 constituting the base end part 13 may be 5 or more. The more the number of connection parts 130, the higher the allowable value of the current flowing through the probe 10 can be made.

[0050] In the above, the electrical connection device 100 in which the contact part 132 of the probe 10 is joined to the land 21 has been shown, but the electrical connection device may be configured such that the contact and separation between the contact part 132 and the land 21 are freely achievable. For example, like the electrical connection device 101 shown in FIG. 24, the probe 10 may be held by the probe head 30. The substrate 20 is arranged adjacent to the probe head 30 in the axial direction. Lands 21 are arranged on the first surface 201 of the substrate 20 facing the probe head 30.

[0051] The probe head 30 may include a guide plate in which a plurality of guide holes through which the probes 10 respectively penetrate are formed. The probe head 30 holds the probes 10 in a state where each of the plurality of probes 10 penetrates through a different guide hole. For this reason, it is possible to suppress contact between adjacent probes 10. Also, by holding the probe 10 by the probe head 30, it may not be necessary to join the contact part 132 of the probe 10 to the land 21. Since the contact part 132 is not joined to the land 21, for example, when a defect occurs in the probe 10, etc., the probe 10 can be easily replaced. Also, a stopper having an outer diameter thicker than the inner diameter of the guide hole may be formed on the probe 10. By the stopper being caught around the opening of the guide hole of the probe head 30, it is possible to prevent the probe 10 from falling out of the probe head 30.

[0052] Thus, it goes without saying that the present invention includes various embodiments not described above.

Explanation of Reference Numerals

[0053] 10 Probe 11 Body part 12 Tip part 13 Base end part 20 Substrate 21 Land 30 Probe head 100, 101 Electrical connection device 130 Connection part 131 Linking part 132 Contact part 132a First end 132b Second end 200 Object to be inspected 1310 Slit 1311 Beam part 1311a First arm 1311b Second arm 1312 Support part

Claims

1. An electrical connection device used for inspecting the electrical characteristics of an object to be inspected, a probe including a columnar main body portion extending in the axial direction and a base end portion connected to the main body portion, and a substrate having a land electrically connected to the base end portion disposed on a first surface facing the base end portion of the probe and comprising: the base end portion of the probe includes a plurality of connection portions each having a connecting portion with one end connected to the main body portion and a contact portion connected to the other end of the connecting portion, the substrate has a land group including a plurality of lands each individually contacting a respective one of the plurality of contact portions included in the same base end portion, an electrical connection device.

2. including a plurality of the probes, the substrate has a plurality of the land groups each electrically connected to a respective one of the plurality of probes, at least a part of the lands included in another land group is disposed between the lands included in one land group, the electrical connection device according to claim 1.

3. The electrical connection device according to claim 1 or 2, wherein the substrate has an external electrode electrically connected to at least one of the plurality of lands included in one land group.

4. The electrical connection device according to claim 3, wherein the external electrode is disposed on a second surface of the substrate facing in a direction opposite to the first surface.

5. The electrical connection device according to claim 3, wherein on the first surface of the substrate, the plurality of lands included in one land group are disposed spaced apart from each other.

6. The electrical connection device according to claim 5, wherein the external electrode is electrically connected to only one of the plurality of lands included in one land group.

7. The electrical connection device according to claim 5, wherein inside the substrate, the plurality of lands included in the land group are electrically connected to each other.

8. The electrical connection device according to claim 3, wherein surface wiring for electrically connecting the plurality of lands included in one land group to each other is disposed on the first surface of the substrate.

9. The electrical connection device according to claim 8, wherein when viewed from the normal direction of the first surface, the width of the surface wiring between the lands does not exceed the diameter of the lands.

10. The electrical connection device according to claim 8, wherein when viewed from the normal direction of the first surface, the shape of the surface wiring overlaps with the shape formed by the main body portion and the connecting portion of the probe.

11. The electrical connection device according to claim 1 or 2, wherein the contact portion of the proximal end portion of the probe and the land are joined together.

12. The electrical connection device according to claim 1 or 2, wherein, when viewed from the axial direction, the angle formed between the adjacent connecting portions connected to the main body portion of the probe is the same between any of the connecting portions.

13. The probe has a tip portion that is connected to one end of the main body portion and contacts the object to be inspected in the inspection, and a proximal end portion that is connected to the other end of the main body portion and includes the electrical connection device according to claim 1 or 2.

14. The connecting portion is elastically connected to the main body portion, a first end of the contact portion is connected to the connecting portion, and a second end of the contact portion contacts the land, the electrical connection device according to claim 13.

15. The electrical connection device further includes a probe head that holds the probe, and the land is disposed on the first surface of the substrate facing the probe head. the electrical connection device according to claim 1 or 2.

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