Component suction nozzle and component mounting device

Abstract

To provide a component suction nozzle capable of achieving both long life and compact size for a dust collection filter, and a component mounting device including the same.SOLUTION: The nozzle includes: a suction path 61; a first recess 75 that has an inner diameter larger than that of the suction path 61; an annular filter contact surface 76 that is formed spreading outward from the edge of the inner wall 75 W of the first recess 75; a film filter 53 that covers the first recess 75 with the outer edge portion 53G in contact with the filter contact surface 76; and a filter fixing member 77 with a through hole 78 extending through the same in the thickness direction, which presses the outer edge 53G of the filter 53 against the filter contact surface 76 to fix the same. The first recess 75 has a first recess 75 K that is formed so that the film filter 53 can bend toward the suction port.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to a component suction nozzle attached to a mounting head of a component mounting device for sucking components and a component mounting device including the component suction nozzle.

Background Art

[0002] Conventionally, a component mounting device that sucks components supplied from a component supply unit by a mounting head and mounts them on a substrate is known. The mounting head includes a component suction nozzle (hereinafter referred to as a nozzle) via a nozzle holder at the lower end of a vertically movable lifting shaft, and generates a vacuum suction force at the suction port at the lower end of the nozzle to suck the component.

[0003] In such a component mounting device equipped with such a nozzle, it is inevitable that minute dust and dirt sucked in together when air is sucked from the suction port reach the vacuum source from the suction path. Therefore, a filter for capturing dust and dirt is installed in the suction path. As such a filter, a sheet-like one (for example, Patent Document 1 below) or a metal one (for example, Patent Document 2 below) is known.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, conventionally, filters have been installed on the premise that they are replaced regularly, and it has been essential for operators to replace the filters. Generally, the lifespan of a dust collection filter is determined approximately in proportion to its surface area. For this reason, even for nozzles for micro parts, relatively large filters tend to be adopted in order to ensure the lifespan, and there has been a problem that it is difficult to achieve both miniaturization and a long lifespan of the filter.

[0006] Therefore, an object of the present invention is to provide a component suction nozzle capable of achieving both a long lifespan and miniaturization of a dust collection filter, and a component mounting apparatus including the same.

Means for Solving the Problems

[0007] The component suction nozzle of the present invention has one end face and the other end face, the one end face serving as a contact surface that contacts a component, and is a component suction nozzle having a suction path extending from a suction port opened in the contact surface to the other end face, and includes a first recess formed from the other end face and having an inner diameter larger than the inner diameter of the suction path, an annular filter contact surface formed to spread outward from an end portion of an inner wall of the first recess, a film-like filter covering the first recess with an outer edge portion thereof in contact with the filter contact surface, and a filter fixing member having a through hole penetrating in a thickness direction and pressing and fixing the outer edge portion of the filter against the filter contact surface, and a first space is formed by the first recess so that the filter can bend toward the suction port side.

[0008] Another component suction nozzle of the present invention has one end face and the other end face, the one end face serving as a contact surface that contacts a component, and has a nozzle shaft having a suction path extending from a suction port opened in the contact surface to the other end face, and a shaft holding portion that holds the nozzle shaft movably in the vertical direction. The nozzle shaft has a first recess formed from the other end face and having an inner diameter larger than the inner diameter of the suction path, an annular filter contact surface formed to extend outward from an end portion of the inner wall of the first recess, a film-like filter that covers the first recess with an outer edge portion thereof in contact with the filter contact surface, and a filter fixing member having a through hole penetrating in the thickness direction and pressing and fixing the outer edge portion of the filter against the filter contact surface. A first space is formed by the first recess so that the filter can bend toward the suction port side.

[0009] The component mounting apparatus of the present invention includes a nozzle holder that holds the component suction nozzle of the present invention, and mounts a component on a substrate using the component suction nozzle held by the nozzle holder.

[0010] Another component mounting apparatus of the present invention includes a nozzle holder that holds the component suction nozzle of the other present invention, and a buffer portion that biases the nozzle shaft of the component suction nozzle held by the nozzle holder downward, and mounts a component on a substrate using the component suction nozzle held by the nozzle holder.

Effect of the Invention

[0011] According to the present invention, it is possible to achieve both a long service life and miniaturization of the dust collection filter.

Brief Description of the Drawings

[0012]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Embodiments for Carrying Out the Invention

[0013] Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a component mounting apparatus 1 according to an embodiment of the present invention. The component mounting apparatus 1 is an apparatus that repeatedly executes a component mounting operation of mounting a component BH on a substrate KB sent from the upstream process side and carrying it out to the downstream process side.

[0014] The component mounting apparatus 1 includes a pair of conveyors 12 that convey the substrate KB on a base 11 and position it at a predetermined position, and a tape feeder 13 as a component supply device that supplies the component BH to a component take-out position 13K by pulling out and conveying a component tape BT in which the component BH is stored from a reel RL. The component mounting apparatus 1 further includes a mounting head 15 that is moved in a horizontal plane direction by a head moving mechanism 14 provided on the base 11. The head moving mechanism 14 is composed of, for example, an XY table mechanism, and the mounting head 15 is provided with a plurality of component suction nozzles (hereinafter referred to as nozzles 16) extending downward. The mounting head 15 can generate a vacuum suction force at the lower end of each nozzle 16.

[0015] The mounting head 15 is moved by the head movement mechanism 14, adsorbs the component BH supplied by the tape feeder 13, then moves above the substrate KB, and repeatedly executes a mounting cycle of mounting the component BH on the substrate KB. When all the components BH to be mounted on the substrate KB are mounted by repeatedly executing the mounting cycle by the mounting head 15, the conveyor 12 carries out the substrate KB to the downstream process side.

[0016] In the present embodiment, the configuration of the nozzle 16 provided in the mounting head 15 is characteristic, and the description thereof will be given below. As shown in FIG. 2, the mounting head 15 includes a plurality of elevating shafts 21 extending downward. Inside the mounting head 15, a plurality of shaft elevating parts 15M corresponding to the plurality of elevating shafts 21 are provided, and each elevating shaft 21 is elevated with respect to the mounting head 15 by the corresponding shaft elevating part 15M. As shown in FIG. 3, a vacuum pipeline (elevating shaft internal vacuum pipeline 21K) extending in the vertical direction is provided inside the elevating shaft 21. A vacuum pressure is supplied to the elevating shaft internal vacuum pipeline 21K from a vacuum source (not shown).

[0017] In FIG. 3, the lower part of each elevating shaft 21 is a small-diameter part 21D having a slightly smaller outer diameter, and a nozzle holder 22 is attached to the small-diameter part 21D. The nozzle holder 22 includes a hollow cylindrical holder main body part 31 extending in the vertical direction as a whole, and the nozzle holder 22 is connected to the elevating shaft 21 by the upper part 31a of the holder main body part 31 being externally fitted to the lower end of the elevating shaft 21.

[0018] In FIG. 3, the holder main body part 31 has an internal space 32 that penetrates vertically inside. This internal space 32 communicates with the elevating shaft internal vacuum pipeline 21K. The internal space 32 includes an upper internal space upper part 32a and a lower internal space lower part 32b located below the upper internal space upper part 32a and having a larger inner diameter than the upper internal space upper part 32a (FIG. 3).

[0019] In FIG. 3, three spherical body holding holes 33 are formed in the lower part 31b of the holder main body 31 at intervals of 120 degrees with respect to the holder central axis JX1 extending in the vertical direction. These spherical body holding holes 33 are through holes that penetrate the holder main body 31 in its thickness direction. A spherical body 34 as an engaging portion is housed in each of the spherical body holding holes 33, and a part of each spherical body 34 penetrates from the spherical body holding hole 33 and is positioned within the internal space 32 (specifically, the lower part 32b of the internal space) of the holder main body 31.

[0020] In FIG. 3, a spherical body holding band 35 is attached to the lower part 31b of the holder main body 31 with elastic tension so as to surround its outer periphery. The spherical body holding band 35 presses each of the three spherical bodies 34 into the corresponding spherical body holding hole 33 to prevent them from falling out of the spherical body holding hole 33, and holds each spherical body 34 so that it can roll freely within the corresponding spherical body holding hole 33. Note that in FIG. 3, two of the three spherical body holding holes 33 are shown, and one of the three spherical bodies 34 is shown.

[0021] In FIG. 3, a large outer diameter portion 36 having a slightly larger outer diameter than its upper part is formed at the lowermost part of the lower part 31b of the holder main body 31. The above-mentioned spherical body holding band 35 has its lower edge in contact with the stepped surface 36M on the upper surface of the large outer diameter portion 36. Thereby, the spherical body holding band 35 is positioned with respect to the holder main body 31, and is prevented from falling off (coming off) from the outer peripheral surface of the holder main body 31. A position adjusting projection 37 protruding downward is formed on a part of the lower surface of the large outer diameter portion 36.

[0022] In FIG. 3, a hollow multi-stage cylindrical pusher 41 is provided movably in the vertical direction at the intermediate part in the vertical direction of the internal space 32 of the holder main body 31 (the lower part of the upper part 32a of the internal space). A ring-shaped stopper 42 is attached to the cylindrical inner peripheral surface of the holder main body 31 at a position below the pusher 41 in the internal space 32 (the position at the boundary between the upper part 32a and the lower part 32b of the internal space), and prevents the pusher 41 from coming out downward from the internal space 32 (the upper part 32a of the internal space).

[0023] In a region above the pusher 41 in the upper part of the internal space 32a, a biasing spring 43 is disposed. The upper end of the biasing spring 43 abuts against the lower edge of the small-diameter portion 21D of the lifting shaft 21, and the lower end abuts against the bottom surface 41B of a recess formed in the upper part of the pusher 41. Therefore, the pusher 41 is biased downward by the biasing spring 43, and in a state where no upward pressing force acts on the pusher 41, the pusher 41 is in contact with the stopper 42 from above (FIG. 3).

[0024] The pusher 41 has an extending portion 41E extending downward, and the extending portion 41E extends through the stopper 42 downward. Inside the pusher 41, a pipe passage (pusher internal pipe passage 41K) extending through in the vertical direction is provided. The pusher internal pipe passage 41K communicates the upper part 32a of the internal space and the lower part 32b of the internal space.

[0025] In FIGS. 4 and 5, the nozzle 16 includes a nozzle shaft 51, a shaft holding portion 52, and a filter 53. The nozzle shaft 51 is a member having a hollow cylindrical shape extending in the vertical direction as a whole, and has a suction passage 61 inside. The nozzle shaft 51 is provided with a nozzle tip 62 at the lower end, and the lower surface of the nozzle tip 62 is a contact surface 62M (one end surface) that contacts the upper surface of the component BH. A suction port 16K in the nozzle 16 is opened in the contact surface 62M.

[0026] In FIG. 4, a suction passage 61 extends through the nozzle tip 62 in the vertical direction. Therefore, the nozzle shaft 51 has a structure having a suction passage 61 from the suction port 16K to the upper end surface 62N (the other end surface) of the nozzle shaft 51. A pin member 64 is provided on the side surface of the nozzle shaft 51 in a state of protruding outward.

[0027] In FIG. 3, the shaft holding portion 52 has a hollow cylindrical shape extending in the vertical direction as a whole. The shaft holding portion 52 has an insertion hole 73 extending through from the upper surface 71 to the lower surface 72, and the nozzle shaft 51 is inserted therethrough from above.

[0028] In FIGS. 4 and 5, a guide groove 74, which is an elongated hole-shaped groove extending in the vertical direction and connected to the insertion hole 73, is provided in a part of the side surface of the shaft holding portion 52. A pin member 64 is positioned in the guide groove 74, and by being guided by the insertion hole 73 extending in the vertical direction, the rotation of the nozzle shaft 51 about the nozzle central axis JX2 (FIG. 4) extending in the vertical direction is restricted. Further, when the pin member 64 abuts against the inner edge of the lower end of the guide groove 74 from above, the lowermost position among the vertical positions with respect to the shaft holding portion 52 is defined.

[0029] The filter 53 is formed of a circular film-shaped member (i.e., a member having flexibility in the out-of-plane direction), and as shown in FIGS. 4 and 5, is provided at the upper end portion of the nozzle shaft 51. As shown in FIGS. 6(a) and 6(b), which are enlarged views of the region AR shown in FIG. 4, a recess (first recess 75) having an inner diameter larger than the inner diameter of the suction passage 61 is provided at the upper end portion of the nozzle shaft 51. The first recess 75 is formed from the upper end surface 62N of the nozzle shaft 51 (formed in a concave shape that opens upward as a part of the upper end surface 62N), and its inner wall 75W is a cylindrical surface along a circle coaxial with the suction passage 61. An annular filter contact surface 76 that contacts the outer edge portion 53G of the filter 53 is formed in a portion that spreads outward from the end of the inner wall 75W of the first recess 75. The filter contact surface 76 also has a positional relationship coaxial with the suction passage 61.

[0030] In FIGS. 6(a) and 6(b), the filter 53 has its outer edge portion 53G in contact with the filter contact surface 76, and is positioned in a posture that spreads substantially orthogonally to the direction in which the suction passage 61 extends (i.e., the vertical direction). The outer edge portion 53G of the filter 53 is pressed from above by a filter fixing member 77 fitted into the first recess 75. The filter 53 covers the entire first recess 75 with its outer edge portion 53G in contact with the filter contact surface 76.

[0031] In FIGS. 6(a) and 6(b), a through hole 78 penetrating in the thickness direction is formed in the central portion of the filter fixing member 77, and an annular protruding portion (annular protruding portion 77T) extends downward from the lower surface thereof. The annular lower surface of the annular protruding portion 77T serves as a filter pressing surface 79 that presses the outer edge portion 53G of the filter 53 against the filter contact surface 76. A concave portion (second concave portion 77A) formed coaxially with the through hole 78 is formed in the central portion of the lower surface of the filter fixing member 77. The second concave portion 77A has a shape that opens toward the filter 53 side, and the lower surface of the filter fixing member 77 that spreads outward serves as the aforementioned filter pressing surface 79.

[0032] The first concave portion 75 forms a space (first space 75K) in which the filter 53 can bend toward the suction port 16K side (here, downward). The outer edge portion 53G of the filter 53 is sandwiched and fixed between the filter contact surface 76 and the filter fixing member 77, and air flowing in the blowing direction through the suction passage 61 is supplied. Due to the air (blowing air) from the air blow, the filter 53 is bent and deformed toward the suction port 16K side.

[0033] As shown in FIGS. 6(a) and 6(b), when the filter fixing member 77 presses the outer edge portion 53G of the filter 53 against the filter contact surface 76 with the annular filter pressing surface 79 on the lower surface of the annular protruding portion 77T, a space (second space 77K) is formed between the filter fixing member 77 and the filter 53 in which the filter 53 can bend toward the side opposite to the suction port 16K (upward). That is, the second space 77K is formed by the second concave portion 77A.

[0034] Thus, in this embodiment, a suction passage 61 connected to a suction port 16K opened in a contact surface 62M that contacts a component BH, a first recess 75 having an inner diameter larger than the inner diameter of the suction passage 61, an annular filter contact surface 76 formed to extend outward from an end of an inner wall 75W of the first recess 75, a film-like filter 53 having an outer edge portion 53G brought into contact with the filter contact surface 76, and a filter fixing member 77 having a through hole 78 penetrating in the thickness direction and pressing and fixing the outer edge portion 53G of the filter 53 against the filter contact surface 76 are provided. And a first space 75K in which the filter 53 can bend toward the suction port 16K side is formed between the filter 53 and the first recess 75.

[0035] Further, the filter fixing member 77 presses the outer edge portion 53G of the filter 53 against the filter contact surface 76 with an annular filter pressing surface 79, and a second space 77K in which the filter 53 can bend to the side opposite to the suction port 16K is formed between the filter 53 and the filter fixing member 77.

[0036] In FIGS. 4 and 5, three spherical body fitting portions 81 as concave portions are provided on a side surface of the shaft holding portion 52 at intervals of 120 degrees around a nozzle central axis JX2 extending in the vertical direction. A portion including an upper edge of the three spherical body fitting portions 81 on the side surface of the shaft holding portion 52 is an overhanging portion 82 that protrudes radially outward of the shaft holding portion 52, and upper and lower edges of the overhanging portion 82 are cam surfaces (an upper cam surface 82a and a lower cam surface 82b) each formed in a gentle arc shape or a gentle inclined shape. A flange portion 83 protruding laterally is provided at a lower portion of the shaft holding portion 52, and a notch 83K is formed in a part of the flange portion 83.

[0037] When assembling the nozzle 16, first, insert the nozzle shaft 51 through the insertion hole 73 from above the shaft holding portion 52 to attach the nozzle shaft 51 to the shaft holding portion 52. Then, after inserting the nozzle shaft 51 through the insertion hole 73, attach the pin member 64 to the side surface of the nozzle shaft 51 through the guide groove 74. As a result, the nozzle shaft 51 is in a state where it is prevented from falling off (coming out) from the shaft holding portion 52 (Fig. 4), and the assembly of the nozzle 16 is completed.

[0038] To attach the nozzle 16 assembled in this way to the nozzle holder 22, the operator OP pinches the flange portion 83 of the nozzle 16 with a finger and inserts the upper part of the nozzle 16 downward into the lower part 32b of the internal space of the nozzle holder 22 (holder main body portion 31). At this time, the operator OP adjusts the rotational position of the nozzle 16 around the holder central axis JX1 with respect to the holder main body portion 31 so that the position adjusting projection 37 formed on the large outer diameter portion 36 of the holder main body portion 31 enters the notch 83K formed in the flange portion 83 of the shaft holding portion 52, and then inserts the nozzle 16 into the lower part 32b of the internal space.

[0039] When the upper part of the nozzle 16 is inserted into the lower part 32b of the internal space of the holder main body portion 31, the upper cam surface 82a formed on the side surface of the shaft holding portion 52 of the nozzle 16 abuts against the three spheres 34 protruding and positioned within the lower part 32b of the internal space of the holder main body portion 31. After the upper cam surface 82a of the nozzle 16 abuts against the three spheres 34, when the nozzle 16 is further pushed upward, the three spheres 34 are respectively pressed in a direction away from the holder central axis JX1 by the upper cam surface 82a and move to the outside of the holder main body portion 31 against the elastic force of the sphere holding band 35. As a result, the distance between adjacent ones of the three spheres 34 widens, and when each of the three spheres 34 has overcome the overhanging portion 82, the three spheres 34 respectively move in a direction approaching the holder central axis JX1 by the elastic force of the sphere holding band 35 and fit into the corresponding sphere fitting portions 81. Thereby, the nozzle 16 is in a state of being held by the nozzle holder 22 (Fig. 7).

[0040] As described above, in this embodiment, the plurality (here, three) of sphere holding holes 33, the plurality (three) of spheres 34 held in these sphere holding holes 33, and the sphere holding bands 35 that bias and hold these plurality of spheres 34 in the corresponding sphere holding holes 33 function as a clamping mechanism (ball plunger) that fits into and holds in the sphere fitting portion 81, which is a concave portion formed on the side surface of the shaft holding portion 52 of the nozzle 16, when the nozzle 16 is inserted into the nozzle holder 22 (holder holding portion 31).

[0041] Until the nozzle 16 is held by the nozzle holder 22 as described above, the upper end surface of the nozzle shaft 51 abuts against the lower surface of the extending portion 41E of the pusher 41 in the nozzle holder 22, and as the nozzle 16 is inserted into the lower portion 32b of the internal space of the nozzle holder 22 (holder holding portion 31), the pusher 41 is pushed upward against the biasing force of the biasing spring 43. For this reason, in the state where the nozzle 16 is held by the nozzle holder 22 (FIG. 7), the nozzle 16 is biased downward by the biasing spring 43 via the pusher 41. Note that the operation of attaching the nozzle 16 to the nozzle holder 22 may be automatically performed by the component mounting apparatus 1.

[0042] When the component mounting apparatus 1 operates the mounting head 15 to suck the component BH supplied by the tape feeder 13 by the nozzle 16, the contact surface 62M of the nozzle tip 62 contacts the upper surface of the component BH. At this time, the nozzle 16 slightly presses the component BH from above. In this embodiment, when the component BH is pressed by the contact surface 62M of the nozzle tip 62 in this way, the nozzle shaft 51 is pushed upward from the component BH side as a reaction force of the pressing force, and the biasing spring 43 is compressed via the pusher 41. As a result, the impact that the nozzle shaft 51 receives from the component BH side at the moment when the contact surface 62M of the nozzle tip 62 comes into contact with the component BH is absorbed by the biasing spring 43 via the pusher 41, and the impact that the component BH receives from the nozzle tip 62 (nozzle shaft 51) side is alleviated.

[0043] Thus, in the present embodiment, the pusher 41 and the biasing spring 43 function as a buffer portion 90 (FIG. 7) that mitigates the impact received by the nozzle shaft 51 in the upward direction.

[0044] When the nozzle 16 is attached to the nozzle holder 22 as described above, the suction passage 61 connected to the suction port 16K at the lower end of the nozzle shaft 51 is connected to the vacuum passage 21K in the lifting shaft via the inner pipe passage 41K of the pusher and the upper portion 32a of the inner space of the nozzle holder 22 (FIG. 7). Therefore, when a vacuum pressure is supplied from a vacuum source (not shown), a suction force is generated at the suction port 16K at the lower end of the nozzle shaft 51, and it becomes possible to adsorb the component BH supplied by the tape feeder 13 by the nozzle shaft 51.

[0045] Incidentally, when the nozzle 16 is attached to the nozzle holder 22 and a vacuum pressure is supplied from the vacuum source into the vacuum passage 21K in the lifting shaft to generate a suction force at the suction port 16K at the lower end of the nozzle shaft 51, air flows into the suction passage 61 from the suction port 16K. At this time, minute dust contained in the air also enters the suction passage 61 together. However, since the filter 53 is attached to the upper portion of the nozzle 16, dust and dirt are captured by the filter 53, preventing them from reaching the vacuum source.

[0046] In the present embodiment, as described above, the filter 53 can be bent toward the suction port 16K side within the first space 75K formed by the first recess 75. Therefore, before starting production or during maintenance, etc., if air is blown toward the suction port 16K, the filter 53 bends and deforms toward the suction port 16K side within the first recess 75 (the first space 75K) (FIG. 8(a)), releases the captured dust and dirt, and discharges those dust and dirt from the suction port 16K to the outside of the suction passage 61. Thus, the nozzle 16 in the present embodiment has a self-cleaning function of the filter 53, and can extend the life due to clogging for a long period.

[0047] Furthermore, in the present embodiment, the filter 53 can be bent on the side opposite to the suction port 16K within the second space 77K formed on the filter fixing member 77 side (the side facing the first recess 75 with the filter 53 interposed therebetween). Therefore, when air in the suction direction (suction air) is supplied into the suction passage 61, the filter 53 is bent and deformed on the side opposite to the suction port 16K within the second space 77K (FIG. 8(b)). Thus, by alternately performing a suction operation of sucking air (suction operation) and a blow operation of releasing dust and dirt captured by the filter 53 (blow operation), the amount of deformation in the thickness direction (out-of-plane direction) of the filter 53 can be increased, and the effect of releasing dust and dirt captured by the filter 53 can be enhanced. Thereby, the self-cleaning function of the filter 53 can be enhanced, and the filter 53 can be made to have an even longer service life. Particularly in the case of a nozzle for micro parts, a film-shaped filter with a short service life may unavoidably be used due to size constraints. However, by mounting the filter in a state where the self-cleaning function can be exhibited, both a longer service life and miniaturization can be achieved.

[0048] In the present embodiment, as described above, by providing the self-cleaning function of the filter, the service life of the filter 53 can be extended, so it is also possible to continue using the filter 53 without replacing it until the nozzle 16 itself reaches the end of its service life. Then, since the filter 53 once (initially) attached is not removed thereafter, there is no need to adopt a complicated structure premised on filter replacement, and a suction nozzle with a simple structure and high reliability can be realized.

[0049] As described above, in the nozzle 16 of the present embodiment, the outer edge portion 53G of the film-shaped filter 53 is formed to spread outward from the end of the inner wall 75W of the first recess 75 having an inner diameter larger than the inner diameter of the suction passage 61, and is installed so as to cover the first recess 75 on the annular filter contact surface 76. The outer edge portion 53G of the filter 53 is pressed against the filter contact surface 76 by a filter fixing member 77 having a through hole 78 penetrating in the thickness direction. In the first recess 75, a space (first space 75K) is formed in which the filter 53 can bend toward the suction port 16K side. By supplying air for air blowing to the suction passage 61 to bend and deform the filter 53 toward the suction port 16K side, dust and dirt captured by the filter 53 can be released from the filter 53 and discharged from the suction port 16K. As described above, since the nozzle 16 in the present embodiment has a self-cleaning function of the filter 53, the filter 53 can have a longer life.

[0050] Although the embodiments of the present invention have been described so far, the present invention is not limited to those described above, and various modifications and the like are possible. For example, in the above-described embodiment, a second space 77K in which the filter 53 can bend to the side opposite to the suction port 16K is formed on the side facing the first recess 75 with the filter 53 interposed therebetween, but this second space 77K does not necessarily have to be formed. Further, in the above-described embodiment, the configuration includes a buffer portion 90 that alleviates the impact received by the nozzle shaft 51 upward, but this buffer portion 90 does not necessarily have to be provided. Further, in the above-described embodiment, the component supply unit that supplies the component BH has been described by taking the tape feeder 13 using the component tape BT as an example, but the component supply unit is not limited to the tape feeder 13, and other items (for example, tray feeders, etc.) may be used.

Industrial Applicability

[0051] It can be applied to a component mounting apparatus that performs a component mounting operation using a component suction nozzle.

Explanation of Reference Numerals

[0052] 1 Component Mounting Device 16 Nozzles (Component Suction Nozzles) 16K Suction Ports 22 Nozzle Holders 31 Holder Main Body 43 Biasing Springs 51 Nozzle Shafts 52 Shaft Holding Parts 53 Filters 53G Outer Edge 61 Suction Paths 62M Contact Surface (One End Surface) 62N Upper End Surface (Other End Surface) 64 Pin Members 71 Upper Surfaces 72 Lower Surfaces 73 Insertion Holes 74 Guide Grooves 75 First Recesses 75W Inner Walls 75K First Spaces 76 Filter Contact Surfaces 77 Filter Fixing Members 77A Second Recesses 77K Second Spaces 78 Through-Holes 79 Filter Pressing Surfaces 81 Sphere Insertion Parts 83 Flange Parts 90 Buffer Parts BH Components

Claims

1. A component suction nozzle having one end face and the other end face, wherein the one end face is a contact surface that contacts a component, and having a suction path extending from a suction port opened in the contact surface to the other end face, a first recess formed from the other end face and having an inner diameter larger than the inner diameter of the suction path, an annular filter contact surface formed to extend outward from an end portion of the inner wall of the first recess, a film-like filter that covers the first recess with an outer edge portion thereof in contact with the filter contact surface, and a filter fixing member having a through hole penetrating in the thickness direction and pressing and fixing the outer edge portion of the filter against the filter contact surface, and a first space is formed by the first recess so that the filter can bend toward the suction port side, the component suction nozzle.

2. The filter is bent and deformed toward the suction port side by air flowing in the blow direction through the suction path, the component suction nozzle according to claim 1.

3. The filter fixing member presses the outer edge portion of the filter against the filter contact surface with an annular filter pressing surface, and a second recess opened toward the filter side is formed inward from the filter contact surface, and a second space is formed by the second recess so that the filter can bend to the side opposite to the suction port, the component suction nozzle according to claim 1.

4. A nozzle shaft having one end face and the other end face, wherein the one end face is a contact surface that contacts a component, and having a suction path extending from a suction port opened in the contact surface to the other end face, and a shaft holding portion that holds the nozzle shaft movably in the vertical direction, the nozzle shaft includes a first recess formed from the other end face and having an inner diameter larger than the inner diameter of the suction path, an annular filter contact surface formed to extend outward from an end portion of the inner wall of the first recess, a film-like filter that covers the first recess with an outer edge portion thereof in contact with the filter contact surface, and a filter fixing member having a through hole penetrating in the thickness direction and pressing and fixing the outer edge portion of the filter against the filter contact surface, and a first space is formed by the first recess so that the filter can bend toward the suction port side, the component suction nozzle.

5. The filter is bent and deformed toward the suction port side by air flowing in the blow direction through the suction path, the component suction nozzle according to claim 4.

6. The filter fixing member presses the outer edge portion of the filter against the filter contact surface with an annular filter pressing surface, and a second recess that opens toward the filter side is formed inside from the filter contact surface, and a second space is formed by the second recess so that the filter can bend to the side opposite to the suction port. The component suction nozzle according to claim 4.

7. A component mounting apparatus comprising a nozzle holder that holds the component suction nozzle according to any one of claims 1 to 3, and mounting a component on a substrate using the component suction nozzle held by the nozzle holder.

8. A component mounting apparatus comprising a nozzle holder that holds the component suction nozzle according to any one of claims 4 to 6, and a buffer portion that biases the nozzle shaft of the component suction nozzle held by the nozzle holder downward, and mounting a component on a substrate using the component suction nozzle held by the nozzle holder.

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