Elemental analysis device, elemental analysis method and elemental analysis program

Abstract

To automatically confirm whether a process gas supplied to a heating furnace is switched correctly, in an elemental analysis device.SOLUTION: An elemental analysis device comprises: a heating furnace 2 that heats a sample; an analysis unit 6 that analyzes a sample gas; a gas supply path 3 that supplies a process gas to the heating furnace 2; a gas switching unit 4 that switches the type of the process gas supplied to the heating furnace 2 by the gas supply path 3; gas sensors S1, S2 that are provided in the gas supply path 3, and measure the process gas flowing through the gas supply path 3; and an arithmetic control device 10 that determines the type of the process gas flowing through the gas supply path 3 on the basis of the signals from the gas sensors S1, S2.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an elemental analyzer, an elemental analysis method, and an elemental analysis program.

Background Art

[0002] As a conventional elemental analyzer, as shown in Patent Document 1, there is a conceivable one in which the carrier gas supplied to the heating furnace can be switched between, for example, helium gas and argon gas.

[0003] When switching the carrier gas in this elemental analyzer, it takes about 1 to 2 hours until the gas in the elemental analyzer is replaced. Also, along with switching the carrier gas, the set values such as the flow rate of the carrier gas are changed.

[0004] However, when a human error such as a carrier gas switching mistake occurs, after the carrier gas replacement time (about 1 to 2 hours) has elapsed, it may be noticed that there is a human error by looking at the analysis result of the elemental analyzer. Then, after switching to the correct carrier gas, it becomes necessary to wait again for the carrier gas replacement time to elapse, and the compensation due to human error is large.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] Therefore, the present invention has been made in view of the above-described problems, and its main problem is to automatically confirm whether the switching of the processing gas supplied to the heating furnace in the elemental analyzer is correctly performed.

Means for Solving the Problems

[0007] That is, the elemental analyzer according to the present invention is an elemental analyzer that analyzes a sample gas generated by heating a sample and analyzes the elements in the sample, and includes a heating furnace that heats the sample, an analysis unit that analyzes the sample gas, a gas supply path that supplies a processing gas to the heating furnace, a gas switching unit that switches the type of the processing gas supplied to the heating furnace by the gas supply path, a gas sensor that is provided in the gas supply path and measures the processing gas flowing through the gas supply path, and a gas determination unit that determines the type of the processing gas flowing through the gas supply path based on the signal of the gas sensor.

[0008] With such an elemental analyzer, the processing gas is measured by a gas sensor provided in the gas supply path, and the type of the processing gas flowing through the gas supply path is determined based on the signal of the gas sensor. Therefore, it is possible to automatically confirm on the device side whether the switching of the processing gas is correctly performed. As a result, even if a human error such as a gas switching mistake occurs, the human error can be detected without waiting for the replacement time of the processing gas in the elemental analyzer.

[0009] As a specific embodiment of the gas supply path, it is conceivable that the gas supply path has a first connection port to which a cylinder of a first processing gas is connected and a second connection port to which a cylinder of a second processing gas is connected. In this configuration, it is desirable that the gas switching unit is configured by using an electromagnetic valve provided in the gas supply path and selectively communicates the first connection port or the second connection port with the heating furnace. With this configuration, the processing gas can be automatically switched by controlling the electromagnetic valve.

[0010] As a specific embodiment of the gas supply path, it is conceivable that the gas supply path includes a first flow path portion provided with the first connection port and a second flow path portion provided with the second connection port. In this configuration, it is desirable that the gas sensor is provided in each of the first flow path portion and the second flow path portion. With this configuration, it is possible to accurately determine whether the first processing gas is flowing through the first flow path portion and whether the second processing gas is flowing through the second flow path portion.

[0011] As a specific embodiment of the gas determination unit, it is desirable that the gas determination unit determines the type of the processing gas flowing through the gas supply path based on both signals of the gas sensors provided in each of the first flow path portion and the second flow path portion. With this configuration, it is possible to accurately determine whether the first processing gas is flowing through the first flow path portion and whether the second processing gas is flowing through the second flow path portion.

[0012] The elemental analyzer of the present invention further includes a switching control unit that controls the gas switching unit, and the gas determination unit is based on the signal of the gas sensor and the switching command input to the switching control unit or the switching control signal by the switching control unit. It is desirable to determine whether the switching of the type of the processing gas flowing through the gas supply path is normal or abnormal. With this configuration, it is possible to automate the switching of the processing gas and accurately determine whether the processing gas is normally switched along with the switching.

[0013] As a specific embodiment of the heating furnace of the present invention, it is conceivable to sandwich a graphite crucible containing a sample between an upper electrode and a lower electrode, and apply a voltage to the upper electrode and the lower electrode (energize the crucible) to heat the sample in the crucible. In this case, the processing gas is a carrier gas. And the gas switching unit switches the type of carrier gas supplied to the heating furnace through the gas supply path. Here, the carrier gas is an inert gas. For example, the first carrier gas is helium gas (He gas), and the second carrier gas is argon gas (Ar gas).

[0014] Further, the element analysis method according to the present invention is an element analysis method for analyzing a sample gas generated by heating a sample and analyzing the elements in the sample, which enables switching of the type of processing gas supplied to a heating furnace that heats the sample through a gas supply path, provides a gas sensor in the gas supply path to measure the processing gas, and determines the type of processing gas flowing through the gas supply path based on the signal of the gas sensor.

[0015] Furthermore, the element analysis program according to the present invention is an element analysis program used in an element analyzer for analyzing a sample gas generated by heating a sample and analyzing the elements in the sample. The element analyzer includes a heating furnace for heating the sample, an analysis unit for analyzing the sample gas, a gas supply path for supplying a processing gas to the heating furnace, a gas switching unit for switching the type of processing gas supplied to the heating furnace through the gas supply path, and a gas sensor provided in the gas supply path for measuring the processing gas flowing through the gas supply path. The element analysis program causes a computer to have a function as a gas determination unit for determining the type of processing gas flowing through the gas supply path based on the signal of the gas sensor.

Advantages of the Invention

[0016] According to the present invention described above, in an element analyzer, it is possible to automatically confirm whether the switching of the processing gas supplied to the heating furnace is correctly performed.

Brief Description of the Drawings

[0017]

Figure 1

Figure 2

Figure 3

Figure 4

Modes for Carrying Out the Invention

[0018] <An Embodiment of the Present Invention> Hereinafter, an embodiment of an elemental analyzer according to the present invention will be described with reference to the drawings. Note that, for any of the figures shown below, for the sake of clarity, they are schematically drawn with appropriate omissions or exaggerations. The same reference numerals are given to the same components, and the description thereof will be omitted as appropriate.

[0019] <Basic Configuration of Elemental Analyzer 100> The elemental analyzer 100 of this embodiment heats a metal sample or a ceramic sample (hereinafter also simply referred to as a sample) accommodated in a crucible R, and analyzes the gas components of the sample gas generated at that time, thereby analyzing the elements in the sample.

[0020] Specifically, as shown in FIG. 1, the elemental analyzer 100 includes a heating furnace 2 for heating a sample, a gas supply path 3 for supplying a carrier gas to the heating furnace 2, a gas switching unit 4 for switching the type of the carrier gas supplied to the heating furnace 2 by the gas supply path 3, a gas lead-out path 5 for leading out the sample gas generated in the heating furnace 2 together with the carrier gas, and one or a plurality of analysis units 6 provided in the gas lead-out path 5 for analyzing the sample gas.

[0021] The heating furnace 2 of this embodiment is composed of a heating mechanism including an upper electrode and a lower electrode, and is a so-called impulse furnace (heating furnace). Specifically, the heating furnace 2 sandwiches a graphite crucible containing a sample between the upper electrode and the lower electrode, and applies a voltage to the upper electrode and the lower electrode (energizes the crucible) to heat the sample in the crucible.

[0022] The gas supply path 3 supplies the first carrier gas or the second carrier gas to the heating furnace 2. Here, both of the two types of carrier gases are inert gases. Here, the first carrier gas is helium gas, and the second carrier gas is argon gas.

[0023] Specifically, the gas supply path 3 has a first connection port P1 to which a cylinder of the first carrier gas (hereinafter, the first cylinder) is connected, and a second connection port P2 to which a cylinder of the second carrier gas (hereinafter, the second cylinder) is connected. Further, the gas supply path 3 has a first flow path portion 31 provided with the first connection port P1, a second flow path portion 32 provided with the second connection port P2, and a main flow path portion 30 to which the first flow path portion 31 and the second flow path portion 32 are connected and which is connected to the heating furnace 2.

[0024] And a gas switching unit 4 for switching the type of carrier gas supplied to the heating furnace 2 by the gas supply path 3 is provided in the gas supply path 3. This gas switching unit 4 selectively communicates the first connection port P1 or the second connection port P2 with the heating furnace 2.

[0025] Specifically, the gas switching unit 4 is configured by using a solenoid valve SV provided in the gas supply path 3. In this embodiment, it is configured by using a three-way solenoid valve. The first flow path portion 31 is connected to the first port of the three-way solenoid valve SV, the second flow path portion 32 is connected to the second port, and the main flow path portion 30 is connected to the third port. When the first port and the third port are communicated in the three-way solenoid valve SV, the first carrier gas (helium gas) is supplied to the heating furnace 2. When the second port and the third port are communicated in the three-way solenoid valve SV, the second carrier gas (argon gas) is supplied to the heating furnace 2. This gas switching unit 4 is controlled by a switching control unit 13 of an arithmetic control device 10 described later.

[0026] The gas lead-out path 5 leads out the sample gas generated in the heating furnace 2 together with the carrier gas, and is provided with one or more analysis units 6 for analyzing the gas components of the sample gas.

[0027] In this embodiment, as the analysis unit 6, a CO analysis unit 61, a CO2 analysis unit 62, an H2O analysis unit 63, and an N2 analysis unit 64 are provided. In the gas lead-out path 5, an oxidation unit 7 such as copper oxide (CuO) is provided between the CO analysis unit 61 and the CO2 analysis unit 62. Further, in the gas lead-out path 5, between the H2O analysis unit 63 and the N2 analysis unit 64, a CO2 removal unit 8 such as ascarite or zeolite-based molecular sieve, and an H2O removal unit 9 such as magnesium perchlorate or calcium chloride are provided. Note that it is not necessarily required to be equipped with all of these analysis units 6 and the like, and the number and arrangement of the analysis units 6 and the like may be changed as appropriate.

[0028] The CO analysis unit 61 detects carbon monoxide (CO) contained in the sample gas and measures its concentration, and is composed of a non-dispersive infrared gas analyzer (NDIR). The CO2 analysis unit 62 detects carbon dioxide (CO2) contained in the sample gas and measures its concentration, and is composed of a non-dispersive infrared gas analyzer (NDIR). The H2O analysis unit 63 detects water (water vapor) contained in the sample gas and measures its concentration, and is composed of a non-dispersive infrared gas analyzer (NDIR). The N2 analysis unit 64 detects nitrogen (N2) contained in the sample gas and measures its concentration, and is composed of a thermal conductivity analyzer (TCD).

[0029] Here, in the gas conduction path 5, on the upstream side of the N2 analysis unit 64, specifically, between the H2O removal unit 9 and the N2 analysis unit 64, a first flow rate adjustment unit 51 when using helium gas as the carrier gas and a second flow rate adjustment unit 52 when using argon gas as the carrier gas are provided in parallel with each other. The first flow rate adjustment unit 51 and the second flow rate adjustment unit 52 are each composed of a pressure regulator and a needle valve. Further, the first flow rate adjustment unit 51 and the second flow rate adjustment unit 52 are configured to be switchable by valves V1 and V2.

[0030] Then, the measurement signals (measurement values indicating the concentrations of the respective gas components) obtained by each analysis unit 6 are output to the arithmetic control device 10.

[0031] The arithmetic control device 10 is a general-purpose or dedicated computer composed of, for example, a CPU, an internal memory, an input / output interface, an AD converter, etc. Note that the arithmetic control device 10 may be configured using a discrete analog circuit using a buffer, an amplifier, a comparator, etc. without using a computer.

[0032] This arithmetic control device 10 controls each part of the elemental analyzer 100 by operating the CPU and its peripheral devices based on an elemental analysis program stored in a predetermined area of the internal memory. Specifically, as shown in FIG. 2, the arithmetic control device 10 is configured to perform functions such as a signal intensity reception unit 11 that receives measurement signals obtained by each analysis unit 6, a concentration calculation unit 12 that calculates the concentrations of various components contained in the gas based on the measurement signal intensity, and a switching control unit 13 that controls the gas switching unit 4 to switch the type of carrier gas.

[0033] Here, the switching control unit 13 controls the gas switching unit 4 and valves V1 and V2 when a carrier gas switching command is input to the arithmetic control device 10 by the user. Thereby, the carrier gas can be automatically switched (automatic switching function). Further, when the above switching command is input, the concentration calculation unit 12 automatically switches various parameters for calculating the concentrations of various components. That is, when a switching command to helium gas is input, the concentration calculation unit 12 automatically switches to various parameters when using helium gas, and when a switching command to argon gas is input, it automatically switches to various parameters when using argon gas. For example, when converting a measurement signal (analog signal) obtained by the analysis unit 6 into a digital signal, the zero point setting value or gain value, etc. are also changed. Further, when the signal intensity reception unit 11 has an AD converter, it may be configured to have an AD converter for helium gas and an AD converter for argon gas and switch between them.

[0034] <Carrier gas determination function (switching diagnosis function)> Thus, the elemental analyzer 100 of the present embodiment is provided with a function of determining whether or not the carrier gas is normally switched by the gas switching unit 4.

[0035] Specifically, the elemental analyzer 100 includes gas sensors S1 and S2 that measure the carrier gas flowing through the gas supply path 3, and a gas determination unit 14 that determines the type of the carrier gas flowing through the gas supply path 3 based on the signals of the gas sensors S1 and S2.

[0036] The gas sensors S1 and S2 include a first gas sensor S1 provided in the first flow path portion 31 and a second gas sensor S2 provided in the second flow path portion 32. The first gas sensor S1 measures helium gas, and the second gas sensor S2 measures argon gas. Also, each gas sensor may be a flow rate sensor that measures the flow rate of the carrier gas or a pressure sensor that measures the pressure of the carrier gas, etc., as long as it can detect that the carrier gas is flowing through each of the flow path portions 31 and 32.

[0037] The gas determination unit 14 has its function exerted by the arithmetic control device 10, and determines the type of the carrier gas flowing through the gas supply path 3 based on the signals of both the gas sensors S1 and S2 provided in each of the first flow path portion 31 and the second flow path portion 32. Here, the gas determination unit 14 may use the analog signals of the gas sensors S1 and S2, or may use the digital signals obtained from the analog signals of the gas sensors S1 and S2.

[0038] Also, the gas determination unit 14 determines whether the switching of the type of the carrier gas flowing through the gas supply path 3 is normal or abnormal based on the signals of the gas sensors S1 and S2 and the switching command input to the switching control unit 13 or the switching control signal by the switching control unit 13. When the gas determination unit 14 determines that the switching of the type of the carrier gas is abnormal, it can output an error signal and display it on the display 20 or notify the user using other notification devices.

[0039] <Specific Example of Carrier Gas Determination> Hereinafter, a specific example of determination when the gas sensors S1 and S2 are flow rate sensors will be described. Note that the same applies even if the gas sensors S1 and S2 are other sensors such as pressure sensors.

[0040] For example, if the flow rate signal of the first gas sensor S1 is equal to or higher than a predetermined threshold value (High signal), and the flow rate signal of the second gas sensor S2 is lower than the predetermined threshold value (Low signal), the gas determination unit 14 determines that helium gas is flowing through the gas supply path 3. In this case, if the gas determination unit 14 has been switched to helium gas by a switching command or a switching control signal, it determines that the switching of the carrier gas is normal. On the other hand, if the gas determination unit 14 has been switched to argon gas by a switching command or a switching control signal, it determines that the switching of the carrier gas is abnormal. Note that the same applies even if each gas sensor is a pressure sensor.

[0041] Also, if the flow rate signal of the first gas sensor S1 is lower than a predetermined threshold value (Low signal), and the flow rate signal of the second gas sensor S2 is equal to or higher than the predetermined threshold value (High signal), the gas determination unit 14 determines that argon gas is flowing through the gas supply path 3. In this case, if the gas determination unit 14 has been switched to argon gas by a switching command or a switching control signal, it determines that the switching of the carrier gas is normal. On the other hand, if the gas determination unit 14 has been switched to helium gas by a switching command or a switching control signal, it determines that the switching of the carrier gas is abnormal. Note that the same applies even if each gas sensor is a pressure sensor.

[0042] <Effects of the present embodiment> According to the elemental analysis apparatus 100 of the present embodiment configured as described above, the carrier gas is measured by the gas sensors S1 and S2 provided in the gas supply path 3, and the type of the carrier gas flowing through the gas supply path 3 is determined based on the signals of the gas sensors S1 and S2. Therefore, it is possible to automatically confirm on the apparatus side whether the switching of the carrier gas is correctly performed. As a result, even if a human error such as a gas switching mistake occurs, the human error can be detected without waiting for the replacement time of the carrier gas in the elemental analysis apparatus 100.

[0043] In addition, in the present embodiment, since the type of carrier gas can be automatically switched and various parameters associated therewith can be switched, it is not necessary for the user or the service technician to go to the site to change various parameters, change the flow path, etc., and a user-friendly elemental analyzer 100 can be provided to the user.

[0044] <Other Embodiments> For example, in the above embodiment, the gas sensors S1 and S2 are provided in the first flow path section 31 and the second flow path section 32, respectively. However, as shown in FIG. 4, a configuration in which a common gas sensor S is provided in the main flow path section 30 may be employed. Even with this configuration, the type of carrier gas can be determined by the gas determination unit 14. For example, the gas determination unit 14 compares a set value such as a set flow rate or a set pressure set for each carrier gas with the signal of the gas sensor S to determine the type of carrier gas.

[0045] For example, when the flow rate signal of the gas sensor S is included in a predetermined first flow rate range, the gas determination unit 14 determines that helium gas is flowing in the gas supply path 3. Here, the first flow rate range is a flow rate range that includes the set flow rate of helium gas and does not include the set flow rate of argon gas. In this case, when the gas determination unit 14 is switched to helium gas by a switching command or a switching control signal, the gas determination unit 14 determines that the switching of the carrier gas is normal. On the other hand, when the gas determination unit 14 is switched to argon gas by a switching command or a switching control signal, the gas determination unit 14 determines that the switching of the carrier gas is abnormal.

[0046] On the other hand, when the flow rate signal of the gas sensor S is included in a predetermined second flow rate range, the gas determination unit 14 determines that argon gas is flowing in the gas supply path 3. Here, the second flow rate range is a flow rate range that includes the set flow rate of argon gas and does not include the set flow rate of helium gas. In this case, when the gas determination unit 14 is switched to argon gas by a switching command or a switching control signal, it determines that the switching of the carrier gas is normal. On the other hand, when the gas determination unit 14 is switched to helium gas by a switching command or a switching control signal, it determines that the switching of the carrier gas is abnormal.

[0047] Further, according to the type of gas determined by the gas determination unit 14, the arithmetic control device 10 may control the valves V1 and V2 to switch between the first flow rate adjustment unit 51 and the second flow rate adjustment unit 52. For example, when the gas determination unit 14 determines that helium gas is flowing in the gas supply path 3, the arithmetic control device 10 switches to the first flow rate adjustment unit 51, and when the gas determination unit 14 determines that argon gas is flowing in the gas supply path 3, the arithmetic control device 10 switches to the second flow rate adjustment unit 51.

[0048] The determination method and determination content of the gas determination unit 14 are not limited to the above embodiments. For example, the type of gas can also be determined based on the time until the signals of the gas sensors S1 and S2 reach a predetermined threshold value. Further, the gas leak can also be determined based on whether or not the signals of the gas sensors S1 and S2 reach a predetermined threshold value. Furthermore, based on the signals of the gas sensors S1 and S2, for example, it can be determined whether or not the gas replacement is completed due to the elapse of a predetermined time after the signal becomes stable.

[0049] In the above embodiment, a three-way solenoid valve is used as the solenoid valve of the gas switching unit 4, but a two-way solenoid valve may be provided in each of the first flow path unit 31 and the second flow path unit 32, and the type of carrier gas may be switched by switching the opening and closing of these two-way solenoid valves.

[0050] Furthermore, by using the signals of the gas sensors S1 and S2 of the above embodiment, leak checks can also be performed on the gas supply path 3 and the gas outlet path 5 in the elemental analyzer 100. In this case, the arithmetic control unit 10 has a leak check unit, and when the gas sensors S1 and S2 do not reach a predetermined lower limit value or exceed a predetermined upper limit value, the leak check unit detects a leak. When the gas sensors S1 and S2 do not reach the predetermined lower limit value, the leak check unit detects a leak on the upstream side of the gas sensors S1 and S2, and when the gas sensors S1 and S2 exceed the predetermined upper limit value, the leak check unit detects a leak on the downstream side of the gas sensors S1 and S2. For example, when flowing helium gas, if the flow rate signal of the gas sensor S1 (here, a flow rate sensor) does not reach the flow rate set value of the helium gas, a leak on the upstream side of the gas sensor S is detected.

[0051] The heating furnace 2 of the elemental analyzer of the above embodiment holds the graphite crucible containing the sample between the upper electrode and the lower electrode, and heats the sample in the crucible by applying a voltage to the upper electrode and the lower electrode. However, it may be an electric resistance furnace, or it may be one that heats the sample (high-frequency induction heating furnace) by inductively heating the sample or the crucible containing the sample using a high-frequency induction coil. Here, in the case of a high-frequency induction heating furnace, it is conceivable that the first processing gas supplied to the heating furnace by the gas supply path is oxygen gas and the second processing gas is nitrogen gas.

[0052] In addition, various modifications and combinations of embodiments may be made as long as they do not contravene the spirit of the present invention.

Explanation of Reference Numerals

[0053] 100 ··· Elemental analyzer W ··· Sample 2 ··· Heating furnace 3 ··· Gas supply path 31 ··· First flow path section 32 ··· Second flow path section P1 ··· First connection port P2 ··· Second connection port B1 ··· First gas cylinder B2 ··· Second gas cylinder 4 ··· Gas switching unit 6 ··· Analysis unit SV ··· Solenoid valve S1 ··· First gas sensor S2 ··· Second gas sensor 13 ··· Switching control unit 14 ··· Gas determination unit

Claims

1. An elemental analyzer that analyzes a sample gas generated by heating a sample and analyzes the elements in the sample, comprising: a heating furnace for heating the sample; an analysis unit for analyzing the sample gas; a gas supply path for supplying a processing gas to the heating furnace; a gas switching unit for switching the type of the processing gas supplied to the heating furnace by the gas supply path; a gas sensor provided in the gas supply path for measuring the processing gas flowing through the gas supply path; an elemental analyzer comprising a gas determination unit for determining the type of the processing gas flowing through the gas supply path based on a signal from the gas sensor.

2. The gas supply path has a first connection port to which a cylinder of a first processing gas is connected and a second connection port to which a cylinder of a second processing gas is connected, The gas switching unit is configured by using an electromagnetic valve provided in the gas supply path, and selectively communicates the first connection port or the second connection port with the heating furnace. The elemental analyzer according to claim 1.

3. The gas supply path has a first flow path portion provided with the first connection port and a second flow path portion provided with the second connection port, The elemental analyzer according to claim 2, wherein the gas sensor is provided in each of the first flow path portion and the second flow path portion.

4. The gas determination unit determines the type of the processing gas flowing through the gas supply path based on signals from both of the gas sensors provided in the first flow path portion and the second flow path portion, respectively. The elemental analyzer according to any one of claims 1 to 3.

5. Further comprising a switching control unit for controlling the gas switching unit, The gas determination unit determines whether the switching of the type of the processing gas flowing through the gas supply path is normal or abnormal based on the signal of the gas sensor and a switching command input to the switching control unit or a switching control signal from the switching control unit. The elemental analyzer according to any one of claims 1 to 4.

6. The processing gas is a carrier gas, The gas switching unit switches the type of the carrier gas supplied to the heating furnace by the gas supply path. The elemental analyzer according to any one of claims 1 to 5.

7. An elemental analysis method for analyzing a sample gas generated by heating a sample and analyzing the elements in the sample, comprising: making it possible to switch the type of the processing gas supplied to a heating furnace for heating the sample by a gas supply path A gas sensor is provided in the gas supply path to measure the processing gas, and an elemental analysis method for determining the type of the processing gas flowing through the gas supply path based on the signal of the gas sensor. **Claim 8** An elemental analysis program used in an elemental analyzer that analyzes a sample gas generated by heating a sample and analyzes the elements in the sample, wherein the elemental analyzer includes a heating furnace that heats the sample, an analysis unit that analyzes the sample gas, a gas supply path that supplies a processing gas to the heating furnace, a gas switching unit that switches the type of the processing gas supplied to the heating furnace by the gas supply path, and a gas sensor provided in the gas supply path to measure the processing gas flowing through the gas supply path, and the elemental analysis program causes a computer to function as a gas determination unit that determines the type of the processing gas flowing through the gas supply path based on the signal of the gas sensor.

Images