Processor, work system, and transportation method

The processing device's innovative design with floor-contacting support members, wheels, and elastic bodies stabilizes conveyance and attachment to work devices, addressing conveyance instability.

JP2025097553APending Publication Date: 2025-07-01PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
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Patent Information

Application Number
JP2023213787
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-12-19
Publication Date
2025-07-01

AI Technical Summary

Technical Problem

Conventional processing devices experience instability during conveyance on floors due to inadequate running stability, necessitating improved conveyance methods.

Method used

A processing device design featuring a main body supported by two support members contacting the floor, wheels not on a common axis, and elastic bodies between the main body and wheels, along with a guide member for precise attachment to a work device.

Benefits of technology

Enhances conveyance stability by reducing sway and vibration, allowing stable attachment and detachment to work devices.

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Abstract

To inhibit swinging of a processor from occurring during transportation.SOLUTION: A processor 130 transported on a floor 300, includes: a main body 139; a first support member 171 in contact with the floor 300 and a second support member 172; a wheel that is not located on a virtual support axis 310 passing through the two support members but supports the main body 139; and an elastic body that intervenes between the main body 139 and the wheel.SELECTED DRAWING: Figure 3
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Description

Technical Field

[0001] The present invention relates to a processing device that performs processing on a working device, a working system including the processing device and the working device, and a conveying method for attaching the processing device to the working device.

Background Art

[0002] Conventionally, there has been a processing device that is conveyed on a floor where a working device is installed and is attached to the working device. Patent Document 1 describes a component mounting device that performs work on a printed circuit board or the like as one of the working devices, and a component supply device that automatically supplies a carrier tape holding a plurality of components as one of the processing devices.

[0003] Patent Document 1 describes that a positioning unit composed of a pair of rails is provided in the component supply device, and when the component supply device is attached to the component mounting device, the component supply device is guided through the positioning unit by guiding means attached to the component mounting device, and a technique for correcting the misalignment of the component supply device with respect to the component mounting device is described. The component supply device is provided on an automated guided vehicle.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] When the present inventor considered conveying the processing device by towing an automated guided vehicle on the floor where the working device is installed, it was found that there is room for improvement regarding the running stability of the processing device during conveyance.

[0006] The present invention is based on the inventor's findings and provides a processing device, a work system, and a conveyance method for solving the above problems.

Means for Solving the Problems

[0007] A processing device according to one aspect of the present invention is a processing device that is conveyed on a floor surface, and includes a main body portion, two support members that contact the floor surface, wheels that support the main body portion and are not located on a virtual support axis passing through the two support members, and an elastic body interposed between the main body portion and the wheels.

[0008] A work system according to one aspect of the present invention is a processing device that is conveyed on a floor surface, and includes a main body portion, two support members that contact the floor surface, wheels that support the main body portion and are not located on a virtual support axis passing through the two support members, an elastic body interposed between the main body portion and the wheels, a work device to which the processing device is detachably attached, and a guide member that guides the movement of the processing device when the processing device is attached to the work device.

[0009] A conveyance method according to one aspect of the present invention is a conveyance method for conveying on a floor surface a processing device including a main body portion, two support members that contact the floor surface, wheels that support the main body portion and are not located on a virtual support axis passing through the two support members, and an elastic body interposed between the main body portion and the wheels, and conveys while bringing at least one of the support members into contact with the floor surface.

Advantages of the Invention

[0010] According to the present invention, it is possible to solve the above problems.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

Figure 3

Figure 4

Embodiments for Carrying Out the Invention

[0012] Hereinafter, embodiments of the work system and the processing apparatus according to the present invention will be described with reference to the drawings. Note that the following embodiments are examples for explaining the present invention and are not intended to limit the present invention. For example, the shapes, structures, materials, components, relative positional relationships, connection states, numerical values, mathematical formulas, contents of each step in the method, the order of each step, etc. shown in the following embodiments are examples, and may include contents not described below. In addition, geometric expressions such as parallel and orthogonal may be used, but these expressions do not indicate mathematical precision and include substantially allowable errors, deviations, etc. Also, expressions such as simultaneous and identical also include a substantially allowable range.

[0013] Also, the drawings are schematic diagrams that are appropriately emphasized, omitted, or adjusted in ratio for explaining the present invention, and are different from the actual shapes, positional relationships, and ratios. Also, the X-axis, Y-axis, and Z-axis shown in the figures represent orthogonal coordinates arbitrarily set for the explanation of the figures. That is, the Z-axis is not necessarily the axis along the vertical direction, and the X-axis and Y-axis are not necessarily present in the horizontal plane.

[0014] Also, in the following, a plurality of inventions may be comprehensively described as one embodiment. Also, a part of the content described below is explained as an arbitrary component related to the present invention.

[0015] FIG. 1 is a perspective view showing a work system 100. The work system 100 is a system for performing work on an object (not shown), for example, and includes a work device 110, a processing device 130, and a guide member 150. In the case of this embodiment, the work system 100 includes an automated guided vehicle 200 for transporting the processing device 130.

[0016] FIG. 2 is a perspective view showing the working device 110 with the guide member 150 omitted. The guide member 150 will be described later. Examples of the working device 110 include devices that perform operations on a substrate, such as mounting components on the substrate. Specifically, examples of the working device 110 include a solder printing device that prints solder paste on the surface of a printed circuit board or the like, a component mounting device that mounts components on a substrate, a reflow oven that melts the solder paste by heating and mechanically and electrically connects the components to the substrate by cooling, and devices incorporated in a circuit board manufacturing line. The working device 110 also includes an inspection device that performs inspections in each process of executing operations on the substrate, a transfer device that connects between the devices and transfers the substrate or the like during manufacturing, and the like.

[0017] In the case of the present embodiment, the working device 110 includes a working device main body 111 and a sub-working device 112.

[0018] The working device main body 111 is a device that mainly performs operations on the substrate. For example, when the working device 110 is a component mounting device, the working device main body 111 mounts components on the substrate.

[0019] The sub-working device 112 is a device that is attached to and detached from the working device main body 111 and performs secondary operations on the substrate. For example, when the working device 110 is a component mounting device, the sub-working device 112 automatically supplies the components to be mounted on the substrate to the working device main body 111. The sub-working device 112 may be composed of a sub-working device main body 113, such as a component supply unit that conveys a carrier tape holding components in parallel to the working device main body 111 and supplies the components to the working device main body 111, and a carriage 114 that holds the sub-working device main body 113.

[0020] FIG. 3 is a perspective view showing the lower part of the processing apparatus 130 with the main body 139 in a transmissive state. The processing apparatus 130 is transported on the floor surface 300 where the working apparatus 110 is installed, executes processing with the working apparatus 110 while being attached to the working apparatus 110, and is removed from the working apparatus 110 after the processing is completed. The type of the processing apparatus 130 is not particularly limited. For example, as the processing apparatus 130, a carrier tape supply apparatus that supplies a container in which a carrier tape is stored to a component mounting apparatus which is one of the working apparatuses 110, a tray supply apparatus that supplies a tray on which components are placed, a solder supply apparatus that supplies solder paste to a solder printing apparatus, and the like can be exemplified. Further, the processing apparatus 130 may be an apparatus that accesses the working apparatus 110 to perform adjustment processing or the like instead of supplying components.

[0021] In the case of the present embodiment, the processing apparatus 130 executes processing with the working apparatus 110 while being attached to the sub-working apparatus 112, and is removed from the sub-working apparatus 112 by the automated guided vehicle 200 after the processing is completed. As shown in FIG. 3, the processing apparatus 130 includes a first support member 171 and a second support member 172 which are support members, a main body 139, first wheels 131, second wheels 132, third wheels 133, and fourth wheels 134 which are wheels, and first suspension devices 141, second suspension devices 142, third suspension devices 143, and fourth suspension devices 144 which are suspension devices provided with elastic bodies.

[0022] The main body 139 is a part that actually performs work on the working apparatus 110. In the case of the present embodiment, the main body 139 performs processing on the sub-working apparatus 112 while being attached to the sub-working apparatus 112.

[0023] The support member is a member that is attached to the lower part of the main body 139 and contacts the floor surface 300 when transporting the processing device 130. The first support member 171 and the second support member 172, which are support members, are spaced apart and arranged on a virtual support axis 310. The direction of the support axis 310 is not limited. In the case of this embodiment, the support axis 310 is arranged along the main transport direction of the processing device 130. The main transport direction is the alignment direction between the processing device 130 and the driverless transport vehicle 200 when the processing device 130 is carried by the driverless transport vehicle 200, the attachment / detachment direction of the processing device 130 with respect to the working device 110 (the Y-axis direction in the figure), etc. The support axis 310 is preferably arranged on a line connecting the position that intersects the center of gravity position of the processing device 130, for example, the central position between the first wheel 131 and the second wheel 132, and the central position between the third wheel 133 and the fourth wheel 134.

[0024] The shape and material of the support member are not limited, but when the processing device 130 is transported, it is preferable that there is less friction with the floor surface 300. For example, the support member may be a resin member with high sliding performance between it and the floor surface. In the case of this embodiment, both the first support member 171 and the second support member 172 are wheels that rotate around an axis parallel to the floor surface 300 on the floor surface 300. Both the first support member 171 and the second support member 172 are so-called casters that can turn the wheels around an axis perpendicular to the floor surface 300. The first support member 171 and the second support member 172 are attached to the main body 139 so as to contact the floor surface 300 when the processing device 130 is placed on the floor surface 300 parallel to the horizontal plane.

[0025] The processing device 130 can be transported by a transport method in which at least one (both in the case of this embodiment) of the first support member 171 and the second support member 172 is brought into contact with the floor surface 300 and rotated while being transported. Thereby, it becomes possible to transport while suppressing the swaying movement of the main body 139 around an axis orthogonal to the support axis 310, that is, in the case of this embodiment, the swaying movement in the pitching direction of the processing device 130.

[0026] The wheels are placed on the floor surface 300 and support the main body 139. The number of wheels is not limited, but in the case of this embodiment, the processing device 130 includes a first wheel 131, a second wheel 132, a third wheel 133, and a fourth wheel 134. The first wheel 131 and the second wheel 132 are arranged to be spaced apart from each other in the width direction (the X-axis direction in the figure) that is orthogonal to the attachment / detachment direction of the processing device 130 with respect to the working device 110 (the Y-axis direction in the figure) within the horizontal plane (the XY plane in the figure). The first wheel 131 and the second wheel 132 are attached to the lower part of the edge of the main body 139 on the side far from the working device 110 when the processing device 130 is attached to the working device 110. The types of the first wheel 131 and the second wheel 132 are not limited, but in the case of this embodiment, casters that can swivel around the vertical direction are adopted.

[0027] The third wheel 133 and the fourth wheel 134 are arranged to be spaced apart from each other in the width direction that is orthogonal to the attachment / detachment direction within the horizontal plane, and are arranged in a state of being spaced apart from the first wheel 131 and the second wheel 132 in the attachment / detachment direction. The types of the third wheel 133 and the fourth wheel 134 are not limited, but in the case of this embodiment, casters that can swivel around the vertical direction are adopted.

[0028] The elastic body is a member interposed between the main body 139 and each wheel (the first wheel 131, the second wheel 132, the third wheel 133, the fourth wheel 134). In the case of this embodiment, the elastic body is provided as a component of the suspension device.

[0029] The first suspension device 141 is arranged to be interposed between the main body 139 and the first wheel 131, and adjusts the distance between the main body 139 and the first wheel 131 in the vertical direction in order to absorb undulations and inclinations of the floor surface 300, etc. In the case of this embodiment, the first suspension device 141 includes two first elastic bodies 145 and a first damper 149, and functions as a shock absorber that suppresses the influence of undulations and inclinations of the floor surface 300, etc. from being transmitted to the main body 139 when the processing device 130 is conveyed. The first suspension device 141 is disposed below the main body 139 and outside the main body 139 in the width direction.

[0030] The second suspension device 142 is the same as the first suspension device 141, and is arranged to be interposed between the main body 139 and the second wheel 132, and adjusts the distance between the main body 139 and the second wheel 132 in the vertical direction in order to absorb undulations and inclinations of the floor surface 300, etc. In the case of this embodiment, the second suspension device 142 includes two second elastic bodies 146 and a second damper (not shown).

[0031] The third suspension device 143 and the fourth suspension device 144 each include two third elastic bodies 147 and two fourth elastic bodies 148. Also, the third suspension device 143 and the fourth suspension device 144 each include a third damper (not shown) and a fourth damper (not shown). The third suspension device 143 and the fourth suspension device 144 are disposed below the main body 139. Incidentally, each of the first damper 149, the second damper, the third damper, and the fourth damper attenuates the vibration energy generated in the main body 139, etc. when the processing device 130 is conveyed.

[0032] The spring forces of the first elastic body 145 included in the first suspension device 141, the second elastic body 146 included in the second suspension device 142, the third elastic body 147 included in the third suspension device 143, and the fourth elastic body 148 included in the fourth suspension device 144 are not limited. For example, when the processing device 130 is placed on a horizontal floor surface 300, the spring forces from the first elastic body 145 to the fourth elastic body 148 may be set so that the main body 139 is kept horizontal, the first support member 171 and the second support member 172 are in contact with the floor surface 300, and almost no load is applied to the first support member 171 and the second support member 172. For example, when the distances from the position of the center of gravity of the main body 139 to each wheel (the first wheel 131, the second wheel 132, the third wheel 133, the fourth wheel 134) are equal to each other, the spring forces of any of the elastic bodies from the first elastic body 145 to the fourth elastic body 148 may be the same. Also, when the distances from the position of the center of gravity of the main body 139 to each wheel (the first wheel 131, the second wheel 132, the third wheel 133, the fourth wheel 134) are different from each other, the spring forces of the elastic bodies from the first elastic body 145 to the fourth elastic body 148 are set to values corresponding to the distances to the center of gravity of the main body 139. Note that depending on the bias of the articles mounted on the processing device 130, the main body 139 may not be kept horizontal.

[0033] FIG. 4 is a perspective view showing one side of the guide member 150 and the guided member 160. FIG. 4 shows the guide member 150 and the guided member 160 provided on the side of the fourth wheel 134. The work system 100 includes a pair of guide members 150 and a pair of guided members 160, and one guide member 150 and guided member 160 are in a surface-symmetrical relationship with the other guide member 150 and guided member 160 with a plane including the attachment / detachment direction and the downward direction as the plane of symmetry. The guided member 160 and the guide member 150 are structures that determine the positional relationship of the processing device 130 with respect to the work device 110, and guide the movement of the processing device 130 when the processing device 130 is attached to the work device 110. The guide member 150 includes a first member 151. In the case of the present embodiment, the guide member 150 includes a pitching guide portion 152.

[0034] The first member 151 is a member for positioning the processing device 130 with respect to the working device 110. The first member 151 is a plate-like member extending along a vertical plane (YZ plane in the figure), which is a plane including the vertical direction, in the attachment / detachment direction (Y-axis direction in the figure), and is a pair of structural members arranged to face each other with a space in the width direction (X-axis direction in the figure) orthogonal to the attachment / detachment direction in the horizontal plane.

[0035] In the case of this embodiment, the pair of first members 151 protrude outward (in the Y- direction in the figure) from the working device main body 111 along the attachment / detachment direction (Y-axis direction in the figure) in the horizontal plane (XY plane in the figure) and are arranged parallel to each other. The pair of first members 151 has a plane-symmetrical shape with a plane including the attachment / detachment direction and the downward direction as the plane of symmetry.

[0036] As shown in FIG. 4, at the tip of each of the pair of first members 151 (on the side of the processing device 130), a tapered surface 153 that gradually separates from each other toward the tip is provided. When the processing device 130 is attached to the working device 110, the tip of the guided member 160 (details will be described later) first contacts the tapered surface 153. Thereby, even if the position of the processing device 130 in the left-right direction with respect to the working device 110 is displaced, it is guided by the tapered surface 153 and the position of the processing device 130 is corrected to an appropriate position.

[0037] In the case of this embodiment, the first member 151 has both the function of a roll guide portion that determines the roll angle (rotation angle around the Y-axis in the figure) of the main body portion 139 of the processing device 130 and the function of a yaw guide portion that determines the yaw angle (rotation angle around the Z-axis in the figure) of the main body portion 139 of the processing device 130. In the figure, the X-axis corresponds to the width direction, the Y-axis corresponds to the attachment / detachment direction, and the Z-axis corresponds to the gravity direction. Also, yaw is rotation around the Z-axis, roll is rotation around the Y-axis, and pitching is rotation around the X-axis.

[0038] The pitching guide part 152 is a part that corrects the pitching angle of the main body part 139 of the processing device 130. The pitching guide part 152 extends in a plane (XZ plane in the figure) orthogonal to the attaching / detaching direction (Y-axis direction in the figure), stands up vertically from the first member 151, and is a rectangular plate-shaped member extending in the vertical direction. The pitching guide part 152 determines the position of the processing device 130 in the attaching / detaching direction with respect to the working device 110 by coming into contact with the guided member 160.

[0039] The guided member 160 is a member that comes into contact with the guide member 150 to determine the position of the main body part 139 with respect to the working device 110. The guided member 160 is a member that moves relatively along each of the pair of first members 151 when the processing device 130 is attached to the working device 110. The pair of guided members 160 protrude from the processing device 130 toward the working device 110 along the attaching / detaching direction (Y-axis direction in the figure) in a horizontal plane (XY plane in the figure) and are arranged parallel to each other. The pair of guided members 160 has a plane-symmetric shape with a vertical plane including the attaching / detaching direction and the vertical direction as the plane of symmetry.

[0040] In the case of this embodiment, the guided member 160 includes a contact part 161 that directly contacts the guide member 150 and a holding part 162 that holds the contact part 161. The shape and structure of the contact part 161 are not limited. For example, it may be a sliding member that slides with respect to the guide member 150. In this embodiment, the contact part 161 is a roller rotatably attached to the holding part 162 around a rotation axis extending in the vertical direction (vertical direction).

[0041] Among the plurality of contact portions 161, at least two contact portions 161 that are spaced apart from each other in the vertical direction function as roll contact portions that correct the posture of the main body portion 139 of the processing device 130 in the roll direction. In the case of the present embodiment, on each of the guided members 160, two pairs of roller-shaped contact portions 161 that are spaced apart from each other in the vertical direction are arranged side by side in the attachment / detachment direction on the same rotation axis extending in the vertical direction. On the other hand, when viewed differently, among the plurality of contact portions 161, at least two contact portions 161 that are spaced apart from each other in the attachment / detachment direction function as yaw contact portions that correct the posture of the main body portion 139 of the processing device 130 in the yaw direction. In the case of the present embodiment, on each of the guided members 160, two pairs of roller-shaped contact portions 161 that are spaced apart from each other in the attachment / detachment direction are arranged side by side in the vertical direction. That is, the four contact portions 161 respectively arranged at the rectangular vertices of the guided member 160 can correct the posture of the main body portion 139 in both the roll direction and the yaw direction by contacting the plate-shaped first member 151. Note that the portions of the first member 151 that contact the plurality of contact portions 161 function as a roll guide portion and a yaw guide portion.

[0042] In the case of the present embodiment, the guided member 160 includes a pitching contact portion 163 that contacts a pitching guide portion 152 that determines the pitching angle of the main body portion 139. The guided member 160 includes at least two pitching contact portions 163 that are spaced apart from each other in the vertical direction, and contacts the pitching guide portion 152 at two locations in the vertical direction. The shape and structure of the pitching contact portion 163 are not limited, and for example, it may be a sliding member that slides with respect to the pitching guide portion 152. In the present embodiment, the pitching contact portion 163 is a roller that is rotatably attached to a holding portion 162 around a rotation axis extending in the width direction.

[0043] Note that the present invention is not limited to the above-described embodiments. For example, another embodiment realized by arbitrarily combining the components described in this specification and excluding some of the components may also be an embodiment of the present invention. Further, modification examples obtained by making various modifications conceivable by those skilled in the art without departing from the gist of the present invention, that is, the meaning indicated by the language described in the claims, with respect to the above-described embodiments are also included in the present invention.

[0044] For example, the support shaft 310 may be arranged along the width direction perpendicular to the conveyance direction of the processing device 130. According to this, it becomes possible to suppress the swaying movement of the main body portion 139 in the roll direction.

[0045] Further, a vibration damping device, so-called a damper, interposed between the main body portion 139 and the support member may be provided. According to this, it becomes possible to suppress the impact applied from the support member to the main body portion 139 when overcoming a step generated on the floor surface 300 or the like.

[0046] Further, the wheels provided in the processing device 130 may be two wheels, three wheels, five or more wheels other than four wheels.

[0047] Further, when the processing device 130 is placed on a horizontal plane, at least one of the support members may be separated from the floor surface 300.

[0048] Further, although the embodiment in which the guide member 150 is attached to the working device 110 has been described, the attachment position of the guide member 150 is not limited and may be attached to the floor surface 300 or the like.

[0049] Further, although the third wheel 133, the fourth wheel 134, the third suspension device 143, and the fourth suspension device 144 are arranged below the main body portion 139 of the processing device 130, these may be arranged on the side in the width direction of the main body portion 139.

[0050] In addition, although the case where the processing device 130 is transported by the automated guided vehicle 200 has been described, the processing device 130 may be transported by a manned transport vehicle or the like, or may be transported manually.

[0051] The processing device 130 according to the first aspect of the embodiment is a processing device 130 that is transported on the floor surface 300, and includes a main body portion 139, two support members that contact the floor surface 300, wheels that do not lie on a virtual support axis 310 passing through the two support members and support the main body portion 139, and an elastic body interposed between the main body portion 139 and the wheels.

[0052] According to the first aspect, among the degrees of freedom of the processing device 130 that swings based on the elastic body, it is possible to suppress the swinging movement around an axis orthogonal to the support axis 310 in a plane parallel to the floor surface 300. In addition, it is possible to configure such that not all of the mass of the main body portion 139 is supported by the elastic body (spring system), and a part of the mass is supported by the support member, and an elastic body having a relatively small spring constant can be used. As a result, it is possible to reduce the resistance of the deformation of the elastic body generated when changing the transport direction of the processing device 130, and it is possible to simplify the suspension device and reduce the cost.

[0053] The processing device 130 according to the second aspect includes the first aspect, and the support axis 310 is arranged along the transport direction of the processing device 130.

[0054] According to the second aspect, it is possible to suppress the vibration caused by acceleration and deceleration generated in the transport direction during the transport of the processing device 130 by the pair of support members. In addition, it is possible to suppress the vibration generated when traversing a step.

[0055] The processing device 130 according to the third aspect includes the first aspect, and the support axis 310 is arranged along the width direction orthogonal to the transport direction of the processing device 130.

[0056] According to the third aspect, it is possible to suppress the rolling movement generated when changing the transport direction of the processing device 130.

[0057] The processing device 130 of the fourth aspect includes any one of the first to third aspects, and includes a vibration damping device interposed between the main body 139 and the support member.

[0058] According to the fourth aspect, it is possible to suppress the impact applied from the support member to the main body 139 when overcoming the step generated on the floor surface 300.

[0059] The processing device 130 of the fifth aspect includes any one of the first to fourth aspects, and each of the support members is a second wheel that rotates on the floor surface 300.

[0060] According to the fifth aspect, when transporting the processing device 130, the friction between the support member and the floor surface 300 can be suppressed, and the processing device 130 can be transported with high efficiency.

[0061] The processing device 130 of the sixth aspect includes any one of the first to fifth aspects, and when the processing device 130 is placed on the floor surface 300 parallel to the horizontal plane, each of the support members is in contact with the floor surface 300.

[0062] According to the sixth aspect, a part of the mass of the main body 139 can be supported by the support member, and an elastic body with a relatively small spring constant can be used.

[0063] The work system 100 of the seventh aspect includes a processing device 130 according to any one of the first to sixth aspects, a work device 110 to which the processing device 130 is detachably attached, and a guide member 150 that guides the movement of the processing device 130 when the processing device 130 is attached to the work device 110.

[0064] According to the seventh aspect, it is possible to suppress the sway of the main body 139 of the processing device 130 around one axis during transportation, and it is possible to detach and attach the work device 110 and the processing device 130 in a stable state.

[0065] The conveyance method of the eighth aspect is a conveyance method for conveying any one of the processing apparatuses 130 from the first aspect to the sixth aspect on the floor surface 300, and is conveyed while bringing at least one of the support members into contact with the floor surface 300.

[0066] According to the eighth aspect, it is possible to convey while suppressing the sway of the main body portion 139 of the processing apparatus 130 around one axis.

Industrial Applicability

[0067] The present invention can be used for a processing apparatus that travels on a floor where a substrate processing line configured by a working apparatus is installed and performs work on the attached working apparatus, and a working system including the processing apparatus.

Explanation of Signs

[0068] 100 Working system 110 Working apparatus 111 Working apparatus main body 112 Sub-working apparatus 113 Sub-working apparatus main body 114 Cart 130 Processing apparatus 131 First wheel 132 Second wheel 133 Third wheel 134 Fourth wheel 139 Main body portion 141 First suspension device 142 Second suspension device 143 Third suspension device 144 Fourth suspension device 145 First elastic body 146 Second elastic body 147 Third elastic body 148 Fourth elastic body 149 First damper 150 Guide member 151 First member 152 Pitching guide portion 153 Tapered surface 160 Guided member 161 Contact portion 162 Holding portion 163 Pitching contact portion 171 First support member 172 Second support member 200 Automated guided vehicle 300 Floor surface 310 Support shaft

Claims

1. A processing device conveyed on a floor surface, comprising: a main body portion; two support members in contact with the floor surface; wheels that support the main body portion and are not located on a virtual support axis passing through the two support members; an elastic body interposed between the main body portion and the wheels; a processing device comprising the same.

2. The support axis is arranged along the conveyance direction of the processing device. The processing device according to claim 1.

3. The support axis is arranged along the width direction perpendicular to the conveyance direction of the processing device. The processing device according to claim 1.

4. A vibration damping device interposed between the main body portion and the support member is provided. The processing device according to claim 1 or 2.

5. At least one of the support members is a second wheel that rotates on the floor surface. The processing device according to claim 1 or 2.

6. When the processing device is placed on the floor surface parallel to the horizontal plane, each of the support members is in contact with the floor surface. The processing device according to claim 1 or 2.

7. A processing device according to claim 1 or 2; a working device to which the processing device is attached and detached; a guide member that guides the movement of the processing device when the processing device is attached to the working device. A working system comprising the same.

8. A conveyance method for conveying a processing device on the floor surface, the processing device comprising a main body portion, two support members in contact with the floor surface, wheels that support the main body portion and are not located on a virtual support axis passing through the two support members, and an elastic body interposed between the main body portion and the wheels, the method comprising: conveying while bringing at least one of the support members into contact with the floor surface. The conveyance method.

Citation Information

Patent Citations

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