X-ray inspection device

Abstract

To provide an X-ray inspection device equipped with an X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector, the device being capable of accurately moving the X-ray inspection unit over a long distance with a simple configuration even when inspecting a part of a large inspection object.SOLUTION: An X-ray inspection device 1 includes: an X-ray inspection unit 5 having an X-ray generator, an X-ray detector, and a rotation mechanism that rotates the X-ray generator and the X-ray detector with a horizontal direction as an axial direction of rotation; a mounting table 7 on which an inspection object 2 is mounted; and an orthogonal robot 6 that rotates the X-ray inspection unit 5 with a vertical direction as an axial direction of rotation and moves the X-ray inspection unit 5 in at least two horizontal directions. The orthogonal robot 6 moves the X-ray inspection unit 5 to an inspection part that is a part of the inspection object 2.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an X-ray inspection apparatus for non-destructively inspecting the interior of industrial products and the like.

Background Art

[0002] Conventionally, an X-ray CT apparatus for non-destructively inspecting an object to be inspected has been known (see, for example, Patent Document 1). The X-ray CT apparatus described in Patent Document 1 includes an X-ray generator (X-ray source), an X-ray detector, a bracket that connects the X-ray generator and the X-ray detector, a gripping device that grips the X-ray generator and the X-ray detector via the bracket, and a table on which the object to be inspected is placed. The gripping device is, for example, a vertically articulated robot that rotates the X-ray generator and the X-ray detector with the vertical direction as the axial direction and moves the X-ray generator and the X-ray detector in the horizontal direction.

[0003] Also, conventionally, an X-ray inspection apparatus for non-destructively inspecting an object to be inspected such as a small electronic component has been known (see, for example, Patent Document 2). The X-ray inspection apparatus described in Patent Document 2 includes an X-ray generator, an X-ray detector, and an inspection table on which the object to be inspected is placed. Further, this X-ray inspection apparatus includes a first shielding chamber that houses the object to be inspected, the X-ray generator, the X-ray detector, and the inspection table, a second shielding chamber that houses the X-ray generator and is housed in the first shielding chamber, and a shielding plate that is disposed on the back side of the X-ray detector and is housed in the first shielding chamber. The first shielding chamber, the second shielding chamber, and the shielding plate have an X-ray shielding function for shielding X-rays.

[0004] In the X-ray inspection apparatus of Patent Document 2, since the second shielding chamber and the shielding plate disposed in the first shielding chamber have an X-ray shielding function, it is possible to reduce the amount of an X-ray shielding member (X-ray shield) such as lead disposed along the inner surface of the first shielding chamber. Therefore, in this X-ray inspection apparatus, it is possible to reduce the weight of the entire apparatus and to reduce the environmental load when the X-ray inspection apparatus is discarded.

Prior Art Documents

Patent Documents

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2022-191670 [Patent Document 2] Japanese Patent Application Laid-Open No. 2023-139720 [Summary of the Invention] [Problems to be Solved by the Invention]

[0006] The inventor of the present application has developed an X-ray inspection apparatus (X-ray CT apparatus) for inspecting an inspection part which is a part of a large object to be inspected. The X-ray inspection apparatus under development includes an X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector, a mounting table on which the object to be inspected is placed, and a moving mechanism for moving the X-ray inspection unit to the inspection part. In the X-ray inspection apparatus under development, as a moving mechanism for moving the X-ray inspection unit, it is also possible to use a vertically articulated robot similar to the X-ray CT apparatus described in Patent Document 1.

[0007] However, in the X-ray inspection apparatus under development in which a part of a large object to be inspected is inspected, while the moving distance of the X-ray inspection unit moving to the inspection part becomes long, it is difficult to move the X-ray inspection unit by a long distance by a vertically articulated robot. Further, since the degree of freedom of movement of the vertically articulated robot is relatively high and the rigidity of the vertically articulated robot is relatively low, it is difficult to accurately move the X-ray inspection unit to the inspection part by the vertically articulated robot.

[0008] Therefore, a first object of the present invention is to provide an X-ray inspection apparatus including an X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector, which can move the X-ray inspection unit over a long distance with high accuracy with a simple configuration even when inspecting a part of a large object to be inspected.

[0009] In addition, the X-ray inspection apparatus developed by the inventor of the present application includes a shielding box that houses a subject, an X-ray inspection unit, a mounting table, and a moving mechanism, and has an X-ray shielding function for shielding X-rays. In the X-ray inspection apparatus under development, since a large-sized subject has to be housed in the shielding box, the shielding box becomes large. However, when the shielding box becomes large, the amount of X-ray shielding members such as lead used in the shielding box increases, so that the weight of the X-ray inspection apparatus increases and the environmental load when the X-ray inspection apparatus is discarded becomes high.

[0010] Therefore, a second problem of the present invention is to provide an X-ray inspection apparatus including an X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector, in which even if the shielding box for housing the subject becomes large, it is possible to reduce the amount of X-ray shielding members such as lead used in the shielding box.

Means for Solving the Problems

[0011] To solve the above-described first problem, the X-ray inspection apparatus of the present invention is an X-ray inspection apparatus for inspecting an inspection part that is a part of a subject. When one horizontal direction is defined as a first direction and a direction orthogonal to the first direction and the vertical direction is defined as a second direction, the X-ray inspection apparatus includes an X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector with the horizontal direction as an axial direction of rotation, a mounting table on which the subject is placed, and an orthogonal robot that rotates the X-ray inspection unit with the vertical direction as an axial direction of rotation and moves the X-ray inspection unit at least in the first direction and the second direction. The orthogonal robot is characterized by moving the X-ray inspection unit to the inspection part.

[0012] In the X-ray inspection apparatus of the present invention, an orthogonal robot moves the X-ray inspection unit at least in the first direction and the second direction. Therefore, in the present invention, compared with the case of moving the X-ray inspection unit by a vertical articulated robot, the X-ray inspection unit can be moved a long distance with a simple configuration. Further, the degree of freedom of movement of the orthogonal robot is lower than that of the vertical articulated robot, and it is easy to increase the rigidity of the orthogonal robot compared to that of the vertical articulated robot. Therefore, in the present invention, compared with the case of moving the X-ray inspection unit by a vertical articulated robot, the X-ray inspection unit can be moved accurately with a simple configuration.

[0013] That is, in the X-ray inspection apparatus of the present invention, even when inspecting a part of a large object to be inspected, the X-ray inspection unit can be moved a long distance accurately with a simple configuration. Further, in the present invention, since the rigidity of the orthogonal robot can be easily increased, it is possible to suppress the vibration of the X-ray inspection unit when the X-ray inspection unit is moved by the orthogonal robot.

[0014] In the present invention, the X-ray inspection apparatus includes two X-ray inspection units and two orthogonal robots that move each of the two X-ray inspection units. The object to be inspected is formed in a rectangular or square flat plate shape and placed on a mounting table. The thickness direction of the object to be inspected placed on the mounting table coincides with the vertical direction. When viewed from the vertical direction, the four sides of the object to be inspected placed on the mounting table are parallel to the first direction or the second direction. The part to be inspected is a corner of the object to be inspected. When viewed from the vertical direction, it is preferable that each of the two orthogonal robots is arranged on both sides of the mounting table in the first direction.

[0015] With such a configuration, it becomes possible to inspect the corner part (the part to be inspected) of the object to be inspected arranged on one side in the first direction with one X-ray inspection unit, and to inspect the corner part (the part to be inspected) of the object to be inspected arranged on the other side in the first direction with the other X-ray inspection unit. Therefore, even when inspecting the corner part of the object to be inspected arranged on one side in the first direction and the corner part of the object to be inspected arranged on the other side in the first direction, it becomes possible to shorten the inspection time of the object to be inspected. Also, even when inspecting the corner part of a larger object to be inspected, it becomes possible to inspect the corner part of the object to be inspected arranged on one side in the first direction and the corner part of the object to be inspected arranged on the other side in the first direction.

[0016] In the present invention, the object to be inspected is conveyed in the second direction with respect to the mounting table by a conveying mechanism, and each of the two X-ray inspection units waits on both sides of the mounting table in the first direction when the object to be inspected is conveyed with respect to the mounting table. It is preferable that the orthogonal robot moves the X-ray inspection unit to the corner part of the object to be inspected, which is the part to be inspected, when inspecting the part to be inspected. With such a configuration, it becomes possible to surely prevent contact between the object to be inspected and the X-ray inspection unit when the object to be inspected is conveyed with respect to the mounting table.

[0017] In the present invention, it is preferable that the X-ray inspection apparatus includes a mounting table elevating mechanism for elevating the mounting table, the orthogonal robot is arranged above the mounting table, and the mounting table elevating mechanism is arranged below the mounting table. With such a configuration, it becomes possible to easily arrange the orthogonal robot and the mounting table elevating mechanism while preventing interference between the orthogonal robot and the mounting table elevating mechanism. Therefore, the design work of the orthogonal robot and the mounting table elevating mechanism becomes easy and the assembly work of the X-ray inspection apparatus becomes easy.

[0018] In order to solve the above-described second problem, an X-ray inspection apparatus according to the present invention is an X-ray inspection apparatus for inspecting an inspection part that is a part of a subject to be inspected, and includes an X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector, a mounting table on which the subject to be inspected is placed, a moving mechanism for moving the X-ray inspection unit to the inspection part, and a first shielding box that houses the subject to be inspected, the X-ray inspection unit, the mounting table, and the moving mechanism and has an X-ray shielding function for shielding X-rays. The X-ray inspection unit includes a second shielding box that houses the X-ray generator and the X-ray detector and has an X-ray shielding function for shielding X-rays. The second shielding box is fixed to the moving mechanism, and an opening for inserting the inspection part into the second shielding box is formed in the second shielding box.

[0019] In the X-ray inspection apparatus of the present invention, the X-ray inspection unit includes a second shielding box that houses the X-ray generator and the X-ray detector, and leakage of X-rays generated by the X-ray generator to the outside of the X-ray inspection unit is suppressed. That is, in the present invention, leakage of X-rays from the X-ray inspection unit to the inside of the first shielding box in which the subject to be inspected, the X-ray inspection unit, etc. are housed is suppressed. Therefore, in the present invention, even if the X-ray shielding function of the first shielding box is lowered, it is possible to prevent leakage of X-rays to the outside of the first shielding box. As a result, in the present invention, even if the first shielding box in which the subject to be inspected is housed is enlarged, it is possible to reduce the amount of X-ray shielding members such as lead used in the first shielding box.

[0020] Particularly in the present invention, since the X-ray generator and the X-ray detector are housed in the second shielding box, compared with the case where only the X-ray generator is housed in the shielding box as in the X-ray inspection apparatus described in Patent Document 2, it is possible to effectively suppress leakage of X-rays from the X-ray inspection unit to the inside of the first shielding box. Therefore, in the present invention, even if the first shielding box is enlarged, it is possible to effectively reduce the amount of X-ray shielding members used in the first shielding box.

[0021] In the present invention, since an opening for inserting the inspection target into the second shielding box is formed in the second shielding box, even if the X-ray generator and the X-ray detector are housed in the second shielding box, it becomes possible to appropriately inspect the inspection target. Further, in the present invention, by setting the size of the opening formed in the second shielding box to an appropriate size according to the shape and size of the inspection target, even if the opening is formed in the second shielding box, it becomes possible to effectively suppress the leakage of X-rays to the outside of the X-ray inspection unit. Further, in the present invention, since the second shielding box is fixed to the moving mechanism, even if the X-ray inspection unit includes the second shielding box in which the X-ray generator and the X-ray detector are housed, the moving mechanism can easily move the second shielding box together with the X-ray generator and the X-ray detector.

[0022] In the present invention, the second shielding box includes a cylindrical box body portion having a circular shape when viewed from the axial direction of the rotation of the X-ray generator and the X-ray detector by the rotation mechanism, a disk-shaped bottom portion closing one end of the box body portion, and a disk-shaped lid portion closing the other end of the box body portion, and the opening is preferably formed in the lid portion. With this configuration, it becomes possible to make the shape of the second shielding box conform to the locus of the outer peripheral ends of the X-ray generator and the X-ray detector that rotate by the rotation mechanism. Therefore, it becomes possible to reduce the size of the second shielding box.

[0023] In the present invention, for example, the inspection object is formed in a flat plate shape of a rectangle or a square, the thickness direction of the inspection object placed on the mounting table coincides with the vertical direction, the inspection part is a corner part of the inspection object, the rotation mechanism rotates the X-ray generator and the X-ray detector with the horizontal direction as the axial direction of rotation, and the opening is formed in an elongated rectangular shape with the vertical direction as the short side direction. In this case, it becomes possible to set the size of the opening of the second shielding box to an appropriate size according to the shape of the inspection part and the like. Therefore, even if the opening is formed in the second shielding box, it becomes possible to effectively suppress the leakage of X-rays to the outside of the X-ray inspection unit.

Advantages of the Invention

[0024] As described above, in the present invention, in an X-ray inspection apparatus including an X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector, even when inspecting a part of a large subject, the X-ray inspection unit can be moved over a long distance with high accuracy with a simple configuration. Further, in the present invention, in an X-ray inspection apparatus including an X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector, even if the shielding box in which the subject is accommodated becomes larger, it is possible to reduce the amount of X-ray shielding members such as lead used in the shielding box.

Brief Description of the Drawings

[0025]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Embodiments for Carrying Out the Invention

[0026] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0027] (Schematic Configuration of X-ray Inspection Apparatus) FIG. 1 is a plan view of an X-ray inspection apparatus 1 according to an embodiment of the present invention. FIG. 2 is a front view of the X-ray inspection apparatus 1 shown in FIG. 1.

[0028] The X-ray inspection apparatus 1 of this embodiment is an apparatus for non-destructively inspecting the inside of a test object 2 such as an industrial product. Further, the X-ray inspection apparatus 1 is an apparatus for inspecting a test part 2a (see FIG. 8), which is a part of a large test object 2. The test object 2 of this embodiment is a large solid battery and is formed in a rectangular flat plate shape. The size of the test object 2 is approximately the same as that of one tatami mat, for example. The test part 2a is a corner part of the test object 2. In the X-ray inspection apparatus 1 of this embodiment, three corner parts of the test object 2 are inspected. That is, in this embodiment, each of the three corner parts of the test object 2 is the test part 2a. Further, in the X-ray inspection apparatus 1, the laminated state of a plurality of laminated members constituting the solid battery at the corner of the solid battery is inspected.

[0029] The X-ray inspection apparatus 1 includes an X-ray inspection unit 5 having an X-ray generator 3 and an X-ray detector 4 (see FIG. 4 etc.), and a moving mechanism 6 that moves the X-ray inspection unit 5 to the test part 2a. The X-ray inspection apparatus 1 of this embodiment includes two X-ray inspection units 5 and two moving mechanisms 6 that move each of the two X-ray inspection units 5. The moving mechanism 6 of this embodiment is an orthogonal robot. Therefore, hereinafter, the moving mechanism 6 will be referred to as the "orthogonal robot 6". Further, the X-ray inspection apparatus 1 includes a mounting table 7 on which the test object 2 is placed, a mounting table elevating mechanism 8 that raises and lowers the mounting table 7, and a first shielding box 9 that houses the test object 2, the X-ray inspection unit 5, the orthogonal robot 6, the mounting table 7, and the mounting table elevating mechanism 8 and has an X-ray shielding function for shielding X-rays.

[0030] In the following description, the X direction in one horizontal direction, such as in FIG. 1, is defined as the "left - right direction", and the Y direction in FIG. 1, etc., which is orthogonal to the up - down direction (vertical direction) and the left - right direction, is defined as the "front - back direction". Also, the X1 direction side in FIG. 1, etc., which is one side of the left - right direction, is defined as the "right" side, and the X2 direction side in FIG. 1, etc., which is the opposite side, is defined as the "left" side. The Y1 direction side in FIG. 1, etc., which is one side of the front - back direction, is defined as the "front" side, and the Y2 direction side in FIG. 1, etc., which is the opposite side, is defined as the "back" side. The left - right direction (Y direction) of this embodiment is the first direction, and the front - back direction (Y direction) is the second direction.

[0031] The X - ray generator 3 irradiates the examination part 2a with X - rays. The X - ray generator 3 emits, for example, conical X - rays (cone beam) toward the examination part 2a. The X - ray detector 4 is, for example, a two - dimensional area sensor (two - dimensional camera). The X - ray generator 3 and the X - ray detector 4 are arranged to face each other with a space therebetween. The examination part 2a is arranged between the X - ray generator 3 and the X - ray detector 4. The X - ray inspection unit 5 includes a rotation mechanism 12 that rotates the X - ray generator 3 and the X - ray detector 4 with the horizontal direction as the axial direction of rotation (see FIG. 4, etc.). In the X - ray inspection apparatus 1, a CT image of the examination part 2a is generated based on a plurality of X - ray images acquired by the X - ray detector 4. The specific configuration of the X - ray inspection unit 5 will be described later.

[0032] The thickness direction of the subject 2 placed on the mounting table 7 coincides with the up - down direction. When viewed from the up - down direction, the long side of the subject 2 placed on the mounting table 7 is parallel to the front - back direction. That is, when viewed from the up - down direction, the short side of the subject 2 is parallel to the left - right direction, and the four sides of the subject 2 placed on the mounting table 7 are parallel to the front - back direction or the left - right direction. The subject 2 is transported in the front - back direction with respect to the mounting table 7 by the transport mechanism 13. The transport mechanism 13 of this embodiment is a configuration separate from the X - ray inspection apparatus 1 and is not included in the X - ray inspection apparatus 1. However, the transport mechanism 13 may constitute a part of the X - ray inspection apparatus 1. That is, the transport mechanism 13 may be included in the X - ray inspection apparatus 1. In FIG. 1, the illustration of the transport mechanism 13 is omitted.

[0033] A part of the conveying mechanism 13 is disposed inside the first shielding box 9. The conveying mechanism 13 conveys the object to be inspected 2 from the front of the X-ray inspection apparatus 1 into the first shielding box 9 and places it on the mounting table 7. Further, the conveying mechanism 13 picks up the object to be inspected 2 placed on the mounting table 7 and conveys it out from inside the first shielding box 9 to the rear of the X-ray inspection apparatus 1. The specific configuration of the conveying mechanism 13 will be described later.

[0034] The first shielding box 9 is formed in the shape of a rectangular parallelepiped box with an open bottom surface. The first shielding box 9 is installed on the floor surface, for example. The outer shape of the first shielding box 9 when viewed from the vertical direction is rectangular. Further, the X-ray inspection apparatus 1 includes a frame 14 that supports the orthogonal robot 6 from below, and a gantry 15 that supports the conveying mechanism 13 and the frame 14, etc. from below. The frame 14 is housed in the first shielding box 9. Most of the gantry 15 is housed in the first shielding box 9. Both front and rear ends of the gantry 15 in the longitudinal direction are disposed outside the first shielding box 9.

[0035] (Configuration of the orthogonal robot) FIG. 3 is a plan view showing the X-ray inspection unit 5 and the orthogonal robot 6 shown in FIG. 1 extracted. FIG. 4 is a front view showing the X-ray inspection unit 5 and the orthogonal robot 6 shown in FIG. 2 extracted.

[0036] As described above, the X-ray inspection apparatus 1 includes two orthogonal robots 6. When viewed from the vertical direction, each of the two orthogonal robots 6 is disposed on both sides of the mounting table 7 in the left-right direction. That is, one of the two orthogonal robots 6 is disposed on the right side of the mounting table 7, and the other orthogonal robot 6 is disposed on the left side of the mounting table 7. Further, the orthogonal robot 6 is disposed above the X-ray inspection unit 5 and the mounting table 7. The orthogonal robot 6 is attached to the upper end portion of the frame 14.

[0037] The orthogonal robot 6 includes a rotation mechanism 18 that rotates the X-ray inspection unit 5 with the vertical direction as the axial direction of rotation, a linear motion mechanism 19 that linearly moves the X-ray inspection unit 5 and the rotation mechanism 18 in the front-rear direction, and a linear motion mechanism 20 that linearly moves the X-ray inspection unit 5, the rotation mechanism 18, and the linear motion mechanism 19 in the left-right direction. That is, the orthogonal robot 6 rotates the X-ray inspection unit 5 with the vertical direction as the axial direction of rotation and moves the X-ray inspection unit 5 in the front-rear direction and the left-right direction. The orthogonal robot 6 of this embodiment is composed of a rotation mechanism 18, a linear motion mechanism 19, and a linear motion mechanism 20. In FIGS. 1 and 3, the illustration of the rotation mechanism 18 is omitted.

[0038] The linear motion mechanism 20 includes a slide frame 21 on which the X-ray inspection unit 5, the rotation mechanism 18, and the linear motion mechanism 19 are mounted, a ball screw 22 that moves the slide frame 21 in the left-right direction, a motor 23 that rotates the screw shaft of the ball screw 22, and a guide mechanism 24 for guiding the slide frame 21 in the left-right direction. The nut of the ball screw 22 is attached to the slide frame 21. The guide mechanism 24 includes a guide rail fixed to the frame 14 and a guide block that engages with the guide rail and is fixed to the slide frame 21. The ball screw 22, the motor 23, and the guide mechanism 24 are installed at two locations, namely, the front end portion and the rear end portion of the frame 14. The nut of the ball screw 22 and the guide block of the guide mechanism 24 are attached to the front end portion and the rear end portion of the slide frame 21.

[0039] The linear motion mechanism 19 includes a slider 26 on which the X-ray inspection unit 5 and the rotation mechanism 18 are mounted, a ball screw 27 that moves the slider 26 in the front-rear direction, a motor 28 that rotates the screw shaft of the ball screw 27, and a guide mechanism 29 for guiding the slider 26 in the front-rear direction. The nut of the ball screw 27 is attached to the slider 26. The guide mechanism 29 includes a guide rail fixed to the slide frame 21 and a guide block that engages with the guide rail and is fixed to the slider 26.

[0040] The swing mechanism 18 includes a motor 30 and a speed reducer 31 connected to the output shaft of the motor 30. The cases of the motor 30 and the speed reducer 31 are attached to the slider 26. The input shaft of the speed reducer 31 is connected to the output shaft of the motor 30. The X-ray inspection unit 5 is fixed to the output shaft of the speed reducer 31. The X-ray inspection unit 5 is disposed below the speed reducer 31.

[0041] (Configuration of the First Shielding Box, the Stage Lifting Mechanism, and the Conveyor Mechanism) FIG. 5(A) is a cross-sectional view for explaining the configuration of part E in FIG. 1, and FIG. 5(B) is an enlarged view of part F in FIG. 5(A). FIG. 6 is a front view showing the stage 7, the stage lifting mechanism 8, the conveyor mechanism 13, etc. shown in FIG. 2 extracted.

[0042] As described above, the first shielding box 9 is formed in a rectangular parallelepiped box shape, and the outer shape of the first shielding box 9 when viewed from the vertical direction is rectangular. When viewed from the vertical direction, the long side direction of the rectangular first shielding box 9 is parallel to the left-right direction. X-ray shielding members such as lead are attached to the inner side surfaces and the top surface of the first shielding box 9. Openings 9a for allowing a later-described moving body 43 that constitutes a part of the conveyor mechanism 13 to pass through are formed in the front wall portion and the rear wall portion of the first shielding box 9. The opening 9a is a rectangular through-hole that penetrates the front wall portion and the rear wall portion of the first shielding box 9 in the front-rear direction.

[0043] The X-ray inspection apparatus 1 includes a shutter 34 for closing the opening 9a and a shutter lifting mechanism 35 for lifting and lowering the shutter 34. The shutter lifting mechanism 35 includes, for example, a ball screw for lifting and lowering the shutter 34, a motor 36 for rotating the screw shaft of the ball screw, and a guide mechanism 37 for guiding the shutter 34 in the vertical direction. The nut of the ball screw is attached to the shutter 34. The motor 36 is attached to the first shielding box 9. The guide mechanism 37 includes a guide rail fixed to the first shielding box 9 and a guide block that engages with the guide rail and is fixed to the shutter 34.

[0044] The mounting table lifting mechanism 8 is disposed below the mounting table 7. The mounting table lifting mechanism 8 includes a plurality of jacks 40 for lifting and lowering the mounting table 7, a motor 41 for driving the jacks 40, and a plurality of guide mechanisms 42 for guiding the mounting table 7 in the vertical direction. For example, the mounting table lifting mechanism 8 includes four jacks 40 and four guide mechanisms 42. The jack 40 includes, for example, a bevel gear box fixed to the gantry 15 and a ball screw. The nut of the ball screw rotates together with the bevel gear in the bevel gear box. When the bevel gear rotates and the nut rotates, the screw shaft of the ball screw moves up and down. The mounting table 7 is fixed to the upper end of the screw shaft of the ball screw.

[0045] As shown in FIG. 1, the four jacks 40 are connected to the four corners of the mounting table 7. In this embodiment, one motor 41 is connected to the bevel gear boxes of the four jacks 40 via a plurality of joints and a plurality of rotating shafts, and the four jacks 40 are driven in conjunction. The guide mechanisms 42 are installed at two locations at the front end of the mounting table 7 and two locations at the rear end of the mounting table 7. The guide mechanism 42 includes a guide shaft fixed to the mounting table 7 and a guide bush engaged with the guide shaft and fixed to the gantry 15. The mounting table 7 is fixed to the upper end of the guide shaft.

[0046] The transport mechanism 13 includes a moving body 43 that moves in the front-rear direction, a moving body drive mechanism 44 that moves the moving body 43 in the front-rear direction, and a guide mechanism 45 for guiding the moving body 43 in the front-rear direction. A support member 46 for supporting both left and right ends of the object to be inspected 2 from below is attached to the moving body 43. The object to be inspected 2 moves in the front-rear direction together with the moving body 43. The transport mechanism 13 of this embodiment includes a moving body 43 for loading for loading the object to be inspected 2 from the front of the X-ray inspection apparatus 1 into the first shielding box 9 and placing it on the mounting table 7, and a moving body 43 for unloading for lifting the object to be inspected 2 placed on the mounting table 7 and unloading it from the first shielding box 9 to the rear of the X-ray inspection apparatus 1.

[0047] The support member 46 is arranged on both end sides in the left-right direction of the moving body 43. Further, the support member 46 is arranged at a position where it does not overlap with the mounting table 7 when viewed from the up-down direction in a state where the moving body 43 is arranged above the mounting table 7. The support member 46 is connected to a support body drive mechanism that moves the support member 46 in the left-right direction and raises and lowers it, and is movable in the left-right direction and is capable of raising and lowering with respect to the moving body 43.

[0048] The moving body drive mechanism 44 includes, for example, a pinion rotatably attached to the moving body 43, a motor that rotates the pinion, and a rack that engages with the pinion and is fixed to the gantry 15. The pinion and the rack are arranged on both end sides in the left-right direction of the moving body 43. The guide mechanism 45 includes a guide rail fixed to the gantry 15 and a guide block that engages with the guide rail and is fixed to the moving body 43. The guide mechanism 45 is arranged on both end sides in the left-right direction of the moving body 43.

[0049] When the inspection object 2 is conveyed by the conveying mechanism 13, the mounting table 7 is arranged at a lower limit position below the inspection object 2 conveyed by the conveying mechanism 13 (see FIGS. 2 and 6). When the inspection object 2 is carried into the X-ray inspection apparatus 1, first, the carrying-in moving body 43 together with the inspection object 2 moves backward from the front of the X-ray inspection apparatus 1 to above (upper side) the mounting table 7 arranged at the lower limit position. Thereafter, the support member 46 that supports the inspection object 2 from below descends until the inspection object 2 is placed on the mounting table 7. Thereafter, after the support member 46 moves outward in the left-right direction to a retracted position where the mounting table 7 and the support member 46 do not interfere during the movement of the moving body 43, the carrying-in moving body 43 moves in front of the X-ray inspection apparatus 1.

[0050] When the subject 2 is unloaded from the X-ray inspection apparatus 1, first, the moving body 43 for unloading moves from behind the X-ray inspection apparatus 1 to above the mounting table 7 disposed at the lower limit position. At this time, the support member 46 is disposed at the retracted position. Then, after the support member 46 descends and moves inward in the lateral direction, it rises again to lift the subject 2 placed on the mounting table 7. Then, the moving body 43 for unloading moves behind the X-ray inspection apparatus 1.

[0051] (Configuration of the X-ray inspection unit) FIG. 7(A) is a side view of the X-ray inspection unit 5 shown in FIG. 1, FIG. 7(B) is a view showing the X-ray inspection unit 5 from the G-G direction of FIG. 7(A), and FIG. 7(C) is a cross-sectional view for explaining the configuration of the X-ray inspection unit 5 shown in FIG. 7(A).

[0052] As described above, the X-ray inspection unit 5 includes an X-ray generator 3, an X-ray detector 4, and a rotation mechanism 12. Further, the X-ray inspection unit 5 includes a holding member 50 that holds the X-ray generator 3 and the X-ray detector 4, a second shielding box 51 that houses the X-ray generator 3, the X-ray detector 4, and the holding member 50 and has an X-ray shielding function for shielding X-rays, and a connecting member 52 to which the second shielding box 51 is fixed and which is fixed to the output shaft of the speed reducer 31 of the rotation mechanism 18.

[0053] The holding member 50 is formed by bending a metal plate of a predetermined shape into a predetermined shape. The X-ray generator 3 and the X-ray detector 4 are attached to the holding member 50. The holding member 50 is connected to the rotation mechanism 12. The rotation mechanism 12 rotates the holding member 50 with the horizontal direction as the axial direction of rotation, thereby rotating the X-ray generator 3 and the X-ray detector 4 together with the horizontal direction as the axial direction of rotation.

[0054] The connecting member 52 is, for example, a metal plate bent into an L shape. The connecting member 52 is composed of a fixed portion 52a fixed to the output shaft of the speed reducer 31 and a box fixing portion 52b to which the second shielding box 51 is fixed. The thickness direction of the fixed portion 52a coincides with the vertical direction. The fixed portion 52a extends horizontally from the upper end of the box fixing portion 52b. The fixed portion 52a is fixed to the lower end portion of the output shaft of the speed reducer 31. The second shielding box 51 is fixed to the upper end portion of the box fixing portion 52b, for example.

[0055] The second shielding box 51 is fixed to the output shaft of the speed reducer 31 via the connecting member 52 and is fixed to the rotation mechanism 18 via the connecting member 52. That is, the second shielding box 51 is fixed to the orthogonal robot 6. The second shielding box 51 includes a cylindrical box body portion 51a having a circular shape when viewed from the axial direction of the rotation of the X-ray generator 3 and the X-ray detector 4 by the rotation mechanism 12, a disk-shaped bottom portion 51b closing one end of the box body portion 51a, and a disk-shaped lid portion 51c closing the other end of the box body portion 51a. The second shielding box 51 of the present embodiment is composed of the box body portion 51a, the bottom portion 51b, and the lid portion 51c.

[0056] On the inner side surface, top surface, and bottom surface of the second shielding box 51, an X-ray shielding member such as lead is attached. The second shielding box 51 is formed with an opening 51d for putting the inspection object 2a into the second shielding box 51. The opening 51d is formed in the lid portion 51c. The opening 51d is formed at the center of the lid portion 51c. Further, the opening 51d is formed in an elongated rectangular shape with the vertical direction as the short side direction. The width of the opening 51d in the vertical direction is slightly thicker than the thickness of the inspection object 2. The shape of the opening 51d is an appropriate shape according to the shape of the inspection object 2a and the like. The opening 51d is disposed above the inspection object 2 placed on the mounting table 7 disposed at the lower limit position.

[0057] The rotation mechanism 12 includes a motor and a speed reducer 54 connected to the output shaft of the motor. The motor is attached, for example, to the outer surface of the bottom portion 51b. The input shaft of the speed reducer 54 is connected to the output shaft of the motor. The case of the speed reducer 54 is attached to the lower end portion of the box fixing portion 52b. A holding member 50 is fixed to the output shaft of the speed reducer 54. The axis of rotation of the holding member 50 that rotates with the horizontal direction as the axial direction of rotation is orthogonal to the optical axis of the X-ray generator 3. When the motor of the rotation mechanism 12 is driven, the X-ray generator 3, the X-ray detector 4, and the holding member 50 rotate with the horizontal direction as the axial direction of rotation with respect to the second shielding box 51 and the connecting member 52. In this embodiment, when the optical axis of the X-ray generator 3 is parallel to the vertical direction, the axis of rotation of the X-ray inspection unit 5 that rotates with the vertical direction as the axial direction of rotation coincides with the optical axis of the X-ray generator 3.

[0058] (Operation of the X-ray inspection apparatus) FIG. 8 is a plan view for explaining the operation of the X-ray inspection apparatus 1 when inspecting the subject 2 shown in FIG. 1.

[0059] When inspecting the subject 2, first, the subject 2 is carried into the first shielding box 9 from the front of the X-ray inspection apparatus 1. At this time, the shutter 34 that closes the opening 9a of the front wall portion of the first shielding box 9 rises, and the opening 9a is opened. Also, at this time, each of the two X-ray inspection units 5 is waiting on both sides in the left-right direction of the mounting table 7 when viewed from the vertical direction. That is, the X-ray inspection unit 5 connected to the orthogonal robot 6 disposed on the right side of the mounting table 7 waits at the standby position on the right side of the mounting table 7, and the X-ray inspection unit 5 connected to the orthogonal robot 6 disposed on the left side of the mounting table 7 waits at the standby position on the left side of the mounting table 7 (see the two-dot chain line in FIGS. 1 and 3).

[0060] Also, when the subject 2 is carried in, as described above, the subject 2 is carried into the first shielding box 9 by the moving body 43 for carrying and placed on the mounting table 7 disposed at the lower limit position. Then, the moving body 43 for carrying moves in front of the X-ray inspection apparatus 1. Then, the shutter 34 descends, and the opening 9a of the front wall portion of the first shielding box 9 is closed. Also, the mounting table 7 rises to a predetermined position. Specifically, the mounting table 7 rises to a position where the inspection portion 2a can be inserted into the second shielding box 51 from the opening 51d.

[0061] Thereafter, the orthogonal robot 6 disposed on the right side of the mounting table 7 moves the X-ray inspection unit 5 to a position where the corner at the right front end of the subject 2, which is the inspection portion 2a, is disposed between the X-ray generator 3 and the X-ray detector 4 (see the solid line in FIG. 8). Also, the orthogonal robot 6 disposed on the left side of the mounting table 7 moves the X-ray inspection unit 5 to a position where the corner at the left front end of the subject 2, which is the inspection portion 2a, is disposed between the X-ray generator 3 and the X-ray detector 4 (see the solid line in FIG. 8). Then, while rotating the X-ray generator 3 and the X-ray detector 4 with the horizontal direction as the axial direction of rotation, a plurality of X-ray images of the inspection portion 2a (that is, the corners at the right front end and the left front end of the subject 2) are acquired.

[0062] Thereafter, the orthogonal robot 6 disposed on the right side of the mounting table 7 moves the X-ray inspection unit 5 to a position where the corner at the right rear end of the subject 2, which is the inspection portion 2a, is disposed between the X-ray generator 3 and the X-ray detector 4 (see the two-dot chain line in FIG. 8). Also, the orthogonal robot 6 disposed on the left side of the mounting table 7 moves the X-ray inspection unit 5 to the standby position (the position indicated by the two-dot chain line in FIG. 1 etc.). Then, while rotating the X-ray generator 3 and the X-ray detector 4 of the X-ray inspection unit 5 connected to the orthogonal robot 6 disposed on the right side of the mounting table 7, a plurality of X-ray images of the inspection portion 2a are acquired.

[0063] After that, the orthogonal robot 6 arranged on the right side of the mounting table 7 moves the X-ray inspection unit 5 to the standby position (the position indicated by the two-dot chain line in Fig. 1 etc.). Also, the mounting table 7 descends to the lower limit position. In that state, the object to be inspected 2 in the first shielding box 9 is carried out to the rear of the X-ray inspection apparatus 1. At this time, the shutter 34 closing the opening 9a of the rear wall portion of the first shielding box 9 rises, and the opening 9a is opened. Also, the moving body 43 for carrying out moves into the first shielding box 9. Also, as described above, the moving body 43 for carrying out picks up the object to be inspected 2 placed on the mounting table 7 and carries it out to the rear of the first shielding box 9. When the carrying out of the object to be inspected 2 is finished, the shutter 34 descends, and the opening 9a of the rear wall portion of the first shielding box 9 is closed.

[0064] As described above, in this embodiment, each of the two X-ray inspection units 9 waits on both sides in the left-right direction of the mounting table 7 when transporting the object to be inspected 2 with respect to the mounting table 7 (that is, when loading and transporting the object to be inspected 2). The orthogonal robot 6 moves the X-ray inspection unit 5 to the corner of the object to be inspected 2 which is the inspected part 2a during the inspection of the inspected part 2a.

[0065] (Main effects of this embodiment) As described above, in this embodiment, the orthogonal robot 6 moves the X-ray inspection unit 5 in the front-rear, left-right directions. Therefore, in this embodiment, compared with the case where the X-ray inspection unit 5 is moved in the front-rear, left-right directions by a vertically articulated robot, it is possible to move the X-ray inspection unit 5 over a long distance with a simple configuration. Also, in this embodiment, compared with the case where the X-ray inspection unit 5 is moved in the front-rear, left-right directions by a vertically articulated robot, it is possible to move the X-ray inspection unit 5 accurately with a simple configuration. That is, in the X-ray inspection apparatus 1 of this embodiment, even when inspecting the inspected part 2a of a large object to be inspected 2, it is possible to move the X-ray inspection unit 5 over a long distance and accurately with a simple configuration.

[0066] In this embodiment, the X-ray inspection apparatus 1 includes two X-ray inspection units 5 and two orthogonal robots 6 that move each of the two X-ray inspection units 5. When viewed from above and below, each of the two orthogonal robots 6 is disposed on both sides in the left-right direction of the mounting table 7. Therefore, in this embodiment, as described above, the X-ray inspection unit 5 connected to the orthogonal robot 6 disposed on the right side of the mounting table 7 inspects the corner portions at the right front end and the right rear end of the subject 2, and the X-ray inspection unit 5 connected to the orthogonal robot 6 disposed on the left side of the mounting table 7 can inspect the corner portion at the left front end of the subject 2. Thus, in this embodiment, even when inspecting the corner portions on the right and left sides of the subject 2, it is possible to shorten the inspection time of the subject 2. Further, in this embodiment, even when inspecting the corner portions of a larger subject 2, the two X-ray inspection units 5 can inspect the corner portions on the right and left sides of the subject 2.

[0067] In this embodiment, each of the two X-ray inspection units 9 waits on both sides in the left-right direction of the mounting table 7 when the subject 2 is being transported with respect to the mounting table 7. Further, in this embodiment, when inspecting the inspection portion 2a, the orthogonal robot 6 moves the X-ray inspection unit 5 to the corner portion of the subject 2 that is the inspection portion 2a. Therefore, in this embodiment, it is possible to surely prevent contact between the subject 2 and the X-ray inspection unit 9 during transportation of the subject 2 with respect to the mounting table 7.

[0068] In this embodiment, the orthogonal robot 6 is disposed above the mounting table 7, and the mounting table elevating mechanism 8 is disposed below the mounting table 7. Therefore, in this embodiment, it is possible to easily arrange the orthogonal robot 6 and the mounting table elevating mechanism 8 while preventing interference between the orthogonal robot 6 and the mounting table elevating mechanism 8. Thus, in this embodiment, the design work of the orthogonal robot 6 and the mounting table elevating mechanism 8 becomes easy and the assembly work of the X-ray inspection apparatus 1 becomes easy.

[0069] In this embodiment, the X-ray inspection unit 5 includes a second shielding box 51 that houses the X-ray generator 3 and the X-ray detector 4, and leakage of X-rays generated by the X-ray generator 3 to the outside of the X-ray inspection unit 5 is suppressed. That is, in this embodiment, leakage of X-rays from the X-ray inspection unit 5 to the inside of the first shielding box 9 that houses the subject 2, the X-ray inspection unit 5, etc. is suppressed. Therefore, in this embodiment, even if the X-ray shielding function of the first shielding box 9 is lowered, it is possible to prevent leakage of X-rays to the outside of the first shielding box 9. As a result, in this embodiment, even if the first shielding box 9 that houses the large subject 2 is enlarged, it is possible to reduce the amount of X-ray shielding members such as lead used in the first shielding box 9.

[0070] Particularly in this embodiment, since the X-ray generator 3 and the X-ray detector 4 are housed in the second shielding box 51, it is possible to effectively suppress leakage of X-rays from the X-ray inspection unit 5 to the inside of the first shielding box 9 compared to, for example, the case where only the X-ray generator 3 is housed in the second shielding box 51. Therefore, in this embodiment, it is possible to effectively reduce the amount of X-ray shielding members used in the first shielding box 9.

[0071] In this embodiment, an opening 51d for inserting the inspection part 2a into the second shielding box 51 is formed in the second shielding box 51. Therefore, in this embodiment, even if the X-ray generator 3 and the X-ray detector 4 are housed in the second shielding box 51, it is possible to appropriately inspect the inspection part 2a. Further, in this embodiment, the opening 51d is formed in an elongated rectangular shape with the vertical direction as the short side direction, and the shape of the opening 51d is an appropriate shape according to the shape of the inspection part 2a, etc. Therefore, in this embodiment, even if the opening 51d is formed in the second shielding box 51, it is possible to effectively suppress leakage of X-rays to the outside of the X-ray inspection unit 9.

[0072] In this embodiment, the second shielding box 51 is fixed to the rotation mechanism 18 via the connecting member 52. Therefore, in this embodiment, even if the X-ray inspection unit 5 includes the second shielding box 51 in which the X-ray generator 3 and the X-ray detector 4 are housed, the orthogonal robot 6 can easily move the second shielding box 51 together with the X-ray generator 3 and the X-ray detector 4.

[0073] In this embodiment, the second shielding box 51 includes a cylindrical box main body portion 51a having a circular shape when viewed from the axial direction of the rotation of the X-ray generator 3 and the X-ray detector 4 by the rotation mechanism 12, a disk-shaped bottom portion 51b closing one end of the box main body portion 51a, and a disk-shaped lid portion 51c closing the other end of the box main body portion 51a. Therefore, in this embodiment, the shape of the second shielding box 51 can be made to conform to the locus of the outer peripheral ends of the X-ray generator 3 and the X-ray detector 4 that rotate by the rotation mechanism 12. Accordingly, in this embodiment, the second shielding box 51 can be miniaturized.

[0074] (Other embodiments) In the above-described embodiment, in the X-ray inspection apparatus 1, the four corner portions of the subject 2 may be inspected. Further, in the above-described embodiment, the subject 2 may be formed in a square flat plate shape. Further, as long as the inspection can be performed by the X-ray inspection apparatus 1, the subject 2 may be formed in a flat plate shape other than a rectangle or a square. In this case, the inspected portion 2a does not have to be a corner portion of the subject 2. Further, as long as the inspection can be performed by the X-ray inspection apparatus 1, the subject 2 does not have to be formed in a flat plate shape. In this case, for example, the rotation mechanism 12 may rotate the X-ray generator 3 and the X-ray detector 4 with a direction inclined with respect to the horizontal direction as the axial direction of rotation.

[0075] In the above-described embodiment, the mounting table elevating mechanism 8 may be disposed above the mounting table 7. Further, in the above-described embodiment, the orthogonal robot 6 may be provided with a linear motion mechanism that linearly moves the X-ray inspection unit 5 and the rotation mechanism 18 in the vertical direction. In this case, the linear motion mechanism 19 linearly moves the X-ray inspection unit 5 and the rotation mechanism 18 in the vertical direction and linearly moves the X-ray inspection unit 5 and the rotation mechanism 18 in the front-rear direction. Also, in this case, the mounting table elevating mechanism 8 becomes unnecessary.

[0076] In the above-described embodiment, the number of X-ray inspection units 5 included in the X-ray inspection apparatus 1 may be one. In this case, the number of orthogonal robots 6 included in the X-ray inspection apparatus 1 is also one. Further, in the above-described embodiment, the moving mechanism 6 that moves the X-ray inspection unit 5 does not have to be an orthogonal robot. For example, the moving mechanism 6 may be a vertical articulated robot. Furthermore, in the above-described embodiment, the shape of the second shielding box 51 may be a shape other than a cylindrical shape. Also, in the above-described embodiment, the X-ray inspection unit 5 does not have to include the second shielding box 51. Also, in the above-described embodiment, the X-ray inspection apparatus 1 may inspect an object to be inspected 2 other than a solid-state battery.

Explanation of Reference Numerals

[0077] 1 X-ray inspection apparatus 2 Object to be inspected 2a Portion to be inspected 3 X-ray generator 4 X-ray detector 5 X-ray inspection unit 6 Orthogonal robot (moving mechanism) 7 Mounting table 8 Mounting table elevating mechanism 9 First shielding box 12 Rotation mechanism 13 Conveying mechanism 51 Second shielding box 51a Box main body portion 51b Bottom portion 51c Lid portion 51d Opening X First direction Y second direction

Claims

1. An X-ray inspection apparatus for inspecting an inspection part that is a part of a subject to be inspected, comprising: when one horizontal direction is defined as a first direction and a direction orthogonal to the first direction and the vertical direction is defined as a second direction, an X-ray inspection unit having an X-ray generator and an X-ray detector and a rotation mechanism that rotates the X-ray generator and the X-ray detector with the horizontal direction as the axial direction of rotation; a mounting table on which the subject to be inspected is placed; and an orthogonal robot that rotates the X-ray inspection unit with the vertical direction as the axial direction of rotation and moves the X-ray inspection unit at least in the first direction and the second direction, wherein the orthogonal robot moves the X-ray inspection unit to the inspection part. An X-ray inspection apparatus characterized by this.

2. Two of the X-ray inspection units and two orthogonal robots that move the respective two X-ray inspection units, the subject to be inspected is formed in a rectangular or square flat plate shape, the thickness direction of the subject to be inspected placed on the mounting table coincides with the vertical direction, when viewed from the vertical direction, the four sides of the subject to be inspected placed on the mounting table are parallel to the first direction or the second direction, the inspection part is a corner part of the subject to be inspected, when viewed from the vertical direction, each of the two orthogonal robots is arranged on both sides of the mounting table in the first direction. The X-ray inspection apparatus according to Claim 1, characterized by this.

3. the subject to be inspected is conveyed in the second direction with respect to the mounting table by a conveying mechanism, each of the two X-ray inspection units waits on both sides of the mounting table in the first direction when the subject to be inspected is conveyed with respect to the mounting table, the orthogonal robot moves the X-ray inspection unit to the corner part of the subject to be inspected that is the inspection part during inspection of the inspection part. The X-ray inspection apparatus according to Claim 2, characterized by this.

4. comprising a mounting table lifting mechanism for lifting and lowering the mounting table, the orthogonal robot is arranged above the mounting table, the mounting table lifting mechanism is arranged below the mounting table. The X-ray inspection apparatus according to any one of Claims 1 to 3, characterized by this.

5. An X-ray inspection apparatus for inspecting an inspection part that is a part of a subject to be inspected, comprising: An X-ray inspection unit having an X-ray generator, an X-ray detector, and a rotation mechanism for rotating the X-ray generator and the X-ray detector, a mounting table on which the subject is placed, a moving mechanism for moving the X-ray inspection unit to the part to be examined, and a first shielding box that houses the subject, the X-ray inspection unit, the mounting table, and the moving mechanism and has an X-ray shielding function for shielding X-rays. The X-ray inspection unit includes a second shielding box that houses the X-ray generator and the X-ray detector and has an X-ray shielding function for shielding X-rays. The second shielding box is fixed to the moving mechanism. The X-ray inspection apparatus is characterized in that an opening for inserting the part to be examined into the second shielding box is formed in the second shielding box.

6. The second shielding box includes a cylindrical box body portion having a circular shape when viewed from the axial direction of rotation of the X-ray generator and the X-ray detector by the rotation mechanism, a disk-shaped bottom portion closing one end of the box body portion, and a disk-shaped lid portion closing the other end of the box body portion. The X-ray inspection apparatus according to claim 5, wherein the opening is formed in the lid portion.

7. The subject is formed in a flat plate shape of a rectangle or a square. The thickness direction of the subject placed on the mounting table coincides with the vertical direction. The part to be examined is a corner portion of the subject. The rotation mechanism rotates the X-ray generator and the X-ray detector with the horizontal direction as the axial direction of rotation. The X-ray inspection apparatus according to claim 5 or 6, wherein the opening is formed in an elongated rectangular shape with the vertical direction as the short side direction.

Images