Inspection device and method of manufacturing camera module

Abstract

To provide an inspection device capable of appropriately inspecting an optical member used in a camera module for the presence of foreign matter adhered thereto, and a method of manufacturing the camera module.SOLUTION: An inspection device is provided, comprising an attachment / detachment unit configured to allow attachment and detachment of an optical member of a camera module, a light source for emitting light that passes through the optical member, and an image sensor for capturing an image, including shadows of foreign matter, formed by the light passing through the optical member.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to an inspection device and a method for manufacturing a camera module. [Background technology]

[0002] Patent Document 1 discloses a lens defect inspection device. In this lens defect inspection device, image data of the lens before air injection is stored. The injected air blows away foreign matter adhering to the front or back surface of the lens. Image data of the lens after air injection is stored. If a defect is detected in the image data before air injection but no foreign matter is detected in the image data after air injection, it is determined that the defect is foreign matter adhering to the lens and that it has been removed by air. The lens is imaged in a state where the light and dark contrast of foreign matter adhering to the front or back surface of the lens is clearly visible (paragraphs 0014, 0028, 0030, 0031, and 0032). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-179898 Summary of the Invention [Problem to be solved by the invention]

[0004] In a camera module, light transmitted through optical components such as a lens and an infrared cut filter forms an image on an image sensor, and the formed image is captured by the image sensor. Therefore, the focus is not on a foreign substance adhering to the optical component. Therefore, if the focus is on a foreign substance adhering to the optical component when inspecting whether or not the optical component has foreign substances attached, there is a possibility that a foreign substance that does not pose a problem in the camera module will be detected.

[0005] In view of this problem, an aspect of the present disclosure provides an inspection device and a method for manufacturing a camera module that can appropriately inspect whether or not foreign matter is attached to an optical member used in the camera module, for example. [Means for solving the problem]

[0006] The inspection device of the first aspect of the present disclosure includes a detachable unit that can attach and detach an optical element used in a camera module, a light source that emits light that passes through the optical element, and an imaging element that captures an image that includes the shadow of a foreign object, formed by the transmitted light that has passed through the optical element.

[0007] A method for manufacturing a camera module according to a second aspect of the present disclosure includes: a) inspecting the optical elements using the inspection device according to the first aspect of the present disclosure by making the optical arrangement of a first plurality of optical elements including the optical element in the inspection device equivalent to the optical arrangement of a second plurality of optical elements including the optical element provided in the camera module; and b) assembling the camera module after step a).

[0008] A manufacturing method for a camera module according to a third aspect of the present disclosure includes: a) inspecting the optical element using the inspection device according to the first aspect of the present disclosure; b) assembling the camera module after step a); and c) inspecting the camera module using a camera module inspection device, with the inspection conditions in the camera module inspection device set to be equivalent to the inspection conditions in the inspection device after step b). [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a diagram schematically illustrating an inspection device according to a first embodiment and an infrared cut filter (IRCF) inspected using the inspection device; [Figure 2] 1 is a perspective view schematically illustrating a support table and a mounting table provided in the inspection device of the first embodiment, and an IRCF inspected using the inspection device. FIG. [Figure 3] 4 is a flowchart showing the flow of an IRCF inspection performed using the inspection device of the first embodiment. [Figure 4] FIG. 10 is a diagram showing the contents of a determination made by a processing unit provided in the inspection device of the first embodiment as to whether or not a foreign substance is an adhering foreign substance adhering to an IRCF. [Figure 5] 10 is a flowchart showing the flow of manufacturing a camera module including an IRCF inspected using the inspection device of the first embodiment. [Figure 6] 1 is a cross-sectional view schematically illustrating the optical arrangement of a lens, an IRCF, and an imaging element in a camera module including an IRCF inspected using the inspection device of the first embodiment. FIG. [Figure 7] 10 is a diagram schematically illustrating an inspection device according to a second embodiment and an IRCF inspected using the inspection device. FIG. [Figure 8] FIG. 10 is a diagram schematically illustrating an inspection device according to a third embodiment and a lens inspected using the inspection device. [Figure 9] FIG. 10 is a perspective view schematically illustrating a lens socket, a rotary stage, and a rotary stage mounting base provided in an inspection device of a third embodiment, as well as a lens inspected using the inspection device. [Figure 10] 10 is a flowchart showing the flow of lens inspection performed using the inspection device of the third embodiment. [Figure 11] 10 is a flowchart showing the flow of manufacturing a camera module including a lens inspected using the inspection device of the third embodiment. [Figure 12] 10 is a cross-sectional view schematically illustrating the optical arrangement of a lens, an IRCF, and an imaging element in a camera module including a lens inspected using the inspection device of the third embodiment. FIG. [Figure 13] 10 is a diagram schematically illustrating an inspection device according to a fourth embodiment and an IRCF inspected using the inspection device. FIG. [Figure 14] 10 is a flowchart showing the flow of an IRCF inspection performed using an inspection device according to a fourth embodiment. [Figure 15]FIG. 10 is a diagram showing the contents of a determination made by a processing unit provided in the inspection device of the fourth embodiment as to whether or not a foreign substance is an adhered foreign substance adhered to an IRCF lens. [Figure 16] 10 is a diagram schematically illustrating an inspection device according to a fifth embodiment and an IRCF inspected using the inspection device. FIG. [Figure 17] FIG. 11 is a cross-sectional view schematically illustrating a glass cover provided in the inspection device of the fifth embodiment. [Figure 18] FIG. 13 is a diagram schematically illustrating an inspection device according to a sixth embodiment and an IRCF inspected using the inspection device. [Figure 19] 13 is a flowchart showing the flow of an IRCF inspection performed using an inspection device according to a sixth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the drawings, the same or equivalent elements are designated by the same reference numerals, and redundant description will be omitted.

[0011] 1. First embodiment 1.1 Inspection equipment FIG. 1 is a diagram schematically illustrating an inspection device according to a first embodiment and an infrared cut filter (IRCF) inspected using the inspection device.

[0012] 1 is used to inspect the IRCF 121. Inspecting the IRCF 121 includes determining whether or not a foreign matter FO is attached to the IRCF 121.

[0013] The IRCF 121 is an example of an optical member that can be inspected using the inspection apparatus 1. Optical members other than the IRCF 121 may also be inspected using the inspection apparatus 1. For example, mirrors, prisms, filters that are not IRCFs, etc. may also be inspected using the inspection apparatus 1.

[0014] As shown in FIG. 1, the inspection device 1 includes a light source 101, a light source fixing mechanism 102, a lens 111, a lens fixing mechanism 112, an IRCF displacement mechanism 123, an image sensor 131, an image sensor fixing mechanism 132, and a processing unit 171.

[0015] The light source 101, lens 111, and image sensor 131 are fixed to a light source fixing mechanism 102, a lens fixing mechanism 112, and an image sensor fixing mechanism 132, respectively. The IRCF displacement mechanism 123 is a detachable unit that can attach and detach the IRCF 121. The IRCF 121 is attached to and detached from the IRCF displacement mechanism 123 by an operator or an automatic transport mechanism.

[0016] When the IRCF 121 is inspected using the inspection device 1, the IRCF 121 is attached to the IRCF displacement mechanism 123. When the IRCF 121 is attached to the IRCF displacement mechanism 123, the light source 101, the lens 111, the IRCF 121, and the image sensor 131 are arranged along the optical axis 111a of the lens 111 in the order shown. The lens 111 and the IRCF 121 are disposed between the light source 101 and the image sensor 131.

[0017] The light source 101 emits light L. The light source 101 irradiates the emitted light L onto the lens 111, the IRCF 121, and the imaging element 131. The light source 101 is a light emitting diode, an incandescent lamp, a fluorescent lamp, an electroluminescence element, or the like.

[0018] The lens 111 transmits light L. The transmitted light L is condensed to form an image on the imaging surface 131a of the imaging element 131.

[0019] The IRCF 121 transmits the light L. The IRCF 121 cuts off the infrared component from the light L that is transmitted.

[0020] The image sensor 131 photoelectrically converts the collected light. As a result, the image sensor 131 captures the formed image and outputs image data corresponding to the captured image. If a foreign object FO is present in the optical path of the light L, the captured image will include the shadow of the foreign object FO. The foreign object FO is not in focus. Therefore, the shadow of the foreign object FO appears as a blurred, defocused image. The image sensor 131 may be a complementary metal-oxide semiconductor (CMOS) image sensor, a charge-coupled device (CCD) image sensor, or the like.

[0021] The processing unit 171 determines whether the foreign matter FO is a foreign matter adhering to the IRCF 121 based on the output image data. The processing unit 171 is composed of a processor, a memory, and peripheral circuits. A program is stored in the memory. The processor executes the stored program to cause the processor, memory, and peripheral circuits to operate as the processing unit 171. The processor is a central processing unit (CPU) or the like. The memory is a random access memory (RAM), a read-only memory (ROM), or the like. All or part of the processing unit 171 may be composed of a dedicated electronic circuit.

[0022] 1.2 Lens fixing mechanism As shown in FIG. 1, the lens fixing mechanism 112 includes a lens socket 201 and a mount 202 .

[0023] The lens 111 is inserted into the lens socket 201. The lens socket 201 holds the inserted lens 111. The lens socket 201 is placed on a mounting base 202.

[0024] 1.3 IRCF displacement mechanism FIG. 2 is a perspective view that schematically illustrates a support table and a mounting table provided in the inspection device of the first embodiment, and an IRCF inspected using the inspection device.

[0025] As shown in FIGS. 1 and 2, the IRCF displacement mechanism 123 includes a support table 211, a mounting table 212, and a pump 213.

[0026] The IRCF 121 is placed on a support base 211. The support base 211 is placed on a mounting base 212. As a result, the support base 211 and the mounting base 212 constitute a support mechanism 221 that supports the IRCF 121.

[0027] The support base 211 adsorbs the IRCF 121 when air is sucked in, and stops adsorbing the IRCF 121 when the air suction is stopped. The pump 213 adsorbs the IRCF 121 to the support base 211, and stops adsorbing the IRCF 121 to the support base 211 when the air suction is stopped. In this way, the support base 211 and the pump 213 constitute an adsorption mechanism 222 that switches between a state in which the IRCF 121 is adsorbed and a state in which the IRCF 121 is not adsorbed. When the adsorption mechanism 222 performs this switching, the IRCF 121 is displaced. Therefore, the IRCF displacement mechanism 123 displaces the IRCF 121 by performing this switching.

[0028] The support base 211 has a rectangular plate-like shape. Hole 211a and hole 211b are formed in the support base 211. Hole 211a serves as a path for light L to pass through. Hole 211b serves as a path for air to be sucked in. The pump 213 sucks in air through hole 211b. The IRCF 121 is placed on the support base 211 so that the center of the IRCF 121 covers hole 211a and the peripheral part of the IRCF 121 covers hole 211b.

[0029] The mounting base 212 has an L-shaped plate shape. To this end, the mounting base 212 includes a horizontal plate 231 and a vertical plate 232. The horizontal plate 231 and the vertical plate 232 each have a rectangular plate shape. One side of the horizontal plate 231 and one side of the vertical plate 232 are connected to each other. A hole 231a is formed in the horizontal plate 231. The hole 231a serves as a passageway for the light L. The support base 211 is placed on the horizontal plate 231 so that the hole 231a continues from the hole 211a of the support base 211.

[0030] 1.4 Inspection procedure FIG. 3 is a flowchart showing the flow of an IRCF inspection performed using the inspection device of the first embodiment.

[0031] When the IRCF 121 is inspected using the inspection device 1, steps S101 to S110 shown in FIG. 3 are executed.

[0032] In step S101, the IRCF 121 is placed on the support table 211 by an automatic transfer mechanism or an operator.

[0033] In the following step S102, the processing unit 171 causes the suction mechanism 222 to start suctioning the IRCF 121.

[0034] In the following step S103, the processing unit 171 causes the light source 101 to start emitting light L. As a result, an image including the shadow of the foreign object FO is formed on the imaging surface 131a of the imaging element 131.

[0035] In the following step S104, the processing unit 171 causes the imaging element 131 to capture the formed image. As a result, the processing unit 171 acquires the first image data output by the imaging element 131.

[0036] In the following step S105, the processing unit 171 causes the IRCF displacement mechanism 123 to slightly displace the IRCF 121.

[0037] In the following step S106, the processing unit 171 causes the imaging element 131 to capture the formed image. As a result, the processing unit 171 acquires the second image data output by the imaging element 131.

[0038] In the following step S107, the processing unit 171 determines whether the foreign matter FO is an adhering foreign matter adhering to the IRCF 121 based on the first image data output before the IRCF displacement mechanism 123 displaces the IRCF 121 and the second image data output after the IRCF displacement mechanism 123 displaces the IRCF 121.

[0039] In the following step S108, the processing unit 171 causes the light source 101 to stop emitting the light L.

[0040] In the following step S109, the processing unit 171 causes the suction mechanism 222 to stop suctioning the IRCF 121.

[0041] In the following step S110, the IRCF 121 is lifted from the support base 211 by an automatic transfer mechanism or an operator.

[0042] 1.5 Determining whether a foreign object is an attached foreign object FIG. 4 is a diagram showing the contents of the determination made by the processing unit provided in the inspection device of the first embodiment as to whether or not a foreign substance is an adhered foreign substance adhered to an IRCF.

[0043] As shown in FIG. 4, when determining whether a foreign substance FO is an attached foreign substance, the processing unit 171 identifies a first position (X1, Y1) and a second position (X2, Y2) of the shadow FOS from the first image data D1 and the second image data D2, respectively.

[0044] If the foreign object FO is an attached foreign object attached to the IRCF 121, the shadow FOS is displaced when the IRCF 121 is displaced. On the other hand, if the foreign object FO is not an attached foreign object attached to the IRCF 121, the shadow FOS is not displaced when the IRCF 121 is displaced. The processing unit 171 uses this to determine whether the foreign object FO is an attached foreign object attached to the IRCF 121. That is, if the second position (X2, Y2) is different from the first position (X1, Y1), the processing unit 171 determines that the foreign object FO is an attached foreign object. On the other hand, if the second position (X2, Y2) is the same as the first position (X1, Y1), the processing unit 171 determines that the foreign object FO is not an attached foreign object.

[0045] By determining whether or not the foreign object FO is an attached foreign object adhered to the IRCF121 based on the presence or absence of displacement of the shadow FOS, if the presence of an attached foreign object is suspected, it is possible to quickly determine whether or not the foreign object FO is an attached foreign object without cleaning the IRCF121 and re-inspecting the cleaned IRCF121.

[0046] 1.6 Camera module manufacturing FIG. 5 is a flowchart showing the flow of manufacturing a camera module including an IRCF inspected using the inspection device of the first embodiment.

[0047] When a camera module including the IRCF 121 is manufactured, steps S121 to S123 shown in FIG. 5 are executed.

[0048] In step S121, the IRCF 121 is inspected using the inspection device 1. At that time, the processing unit 171 determines whether or not a foreign matter FO is present based on the image data output by the image sensor 131, and determines whether or not the present foreign matter FO is an attached foreign matter attached to the IRCF 121. Whether or not a foreign matter FO is present is determined by whether or not a shadow FOS can be recognized.

[0049] In the following step S122, a camera module including the IRCF 121 is assembled.

[0050] In the following step S123, the camera module 301 is inspected using a camera module inspection device.

[0051] 1.7 Optical arrangement of optical components in inspection equipment and camera modules FIG. 6 is a cross-sectional view that schematically illustrates the optical arrangement of a lens, an IRCF, and an imaging element in a camera module that includes an IRCF inspected using the inspection device of the first embodiment.

[0052] As shown in Figure 6, the manufactured camera module 301 includes a lens 311 of the same type as the lens 111 provided in the inspection device 1, an IRCF 121 inspected using the inspection device 1, and an imaging element 331 of the same type as the imaging element 131 provided in the inspection device 1.

[0053] 1 and 6 , the optical arrangement of the lens 111, the IRCF 121, and the image sensor 131 in the inspection device 1 is equivalent to the optical arrangement of the lens 311, the IRCF 121, and the image sensor 331 provided in the camera module 301. Therefore, the optical path of the light beam that passes through the lens 111 and the IRCF 121 to reach the image sensor 131 in the inspection device 1 coincides with the optical path of the light beam that passes through the lens 311 and the IRCF 121 to reach the image sensor 331 in the camera module 301. In this way, if the optical arrangement of the first plurality of optical members in the inspection device 1 is equivalent to the arrangement of the second plurality of optical members provided in the camera module 301, when the IRCF 121 is inspected using the inspection device 1, the IRCF 121 is placed in a situation equivalent to the situation in which the IRCF 121 is placed in the camera module 301. This allows correlation between the optical characteristics of the first plurality of optical members in the inspection device 1 and the optical characteristics of the second plurality of optical members provided in the camera module 301. This allows appropriate inspection to determine whether or not a foreign matter FO is attached to the IRCF 121 used in the camera module 301. For example, it is possible to prevent the camera module 301 from detecting attached foreign matter that does not pose a problem.

[0054] However, even if the optical arrangement of the lens 111, IRCF 121, and image sensor 131 in the inspection device 1 is not equivalent to the optical arrangement of the lens 311, IRCF 121, and image sensor 331 provided in the camera module 301, the inspection device 1 can to some extent suppress the detection of foreign matter attached thereto that does not pose a problem in the camera module 301.

[0055] 1.8 Inspection conditions for inspection equipment and camera module inspection equipment The inspection conditions in the camera module inspection device are equivalent to the inspection conditions in the inspection device 1. This makes it possible to further prevent the detection of foreign matter adhering to the camera module 301 that does not pose a problem. The equivalent inspection conditions include the arrangement of the light source, the illuminance settings of the light source, the test program to be used, etc.

[0056] 2. Second embodiment The following describes the differences between the second embodiment and the first embodiment. For points that are not described, the second embodiment also employs the same configuration as that employed in the first embodiment.

[0057] FIG. 7 is a diagram schematically illustrating an inspection device according to the second embodiment and an IRCF inspected using the inspection device.

[0058] In the inspection device 2 of the second embodiment shown in FIG. 7, the IRCF displacement mechanism 123 further includes a drive mechanism 214.

[0059] The driving mechanism 214 displaces the support mechanism 221 in a direction perpendicular to the optical axis 111a of the lens 111, thereby displacing the IRCF 121 in that direction. The driving mechanism 214 is an XY-axis robot. The XY-axis robot holds a vertical plate 232 and displaces the held vertical plate 232 in the X direction or Y direction perpendicular to the optical axis 111a of the lens 111, thereby displacing the IRCF 121 in the X direction or Y direction. The driving mechanism 214 may be a driving mechanism other than an XY-axis robot.

[0060] The driving mechanism 214 may displace the support mechanism 221 in a direction parallel to the optical axis 111a of the lens 111, thereby displacing the IRCF 121 in that direction. In this case, the driving mechanism 214 is a Z-axis robot. The Z-axis robot holds the vertical plate 232 and displaces the vertical plate 232 in the Z direction parallel to the optical axis 111a of the lens 111, thereby displacing the IRCF 121 in the Z direction. The driving mechanism 214 may be a driving mechanism other than a Z-axis robot.

[0061] When the driving mechanism 214 displaces the IRCF 121 in the Z direction, the processing unit 171 may determine the first size and the second size of the shadow FOS from the first image data D1 and the second image data D2, respectively, and if the second size is different from the first size, determine that the foreign object FO is an attached foreign object attached to the IRCF 121, and if the second size is the same as the first size, determine that the foreign object FO is not an attached foreign object attached to the IRCF 121.

[0062] 3 Third embodiment The following describes the differences between the third embodiment and the first embodiment. For points that are not described, the third embodiment also employs the same configuration as that employed in the first embodiment.

[0063] 3.1 Inspection equipment FIG. 8 is a diagram schematically illustrating an inspection device according to the third embodiment and a lens inspected using the inspection device.

[0064] 8 is used to inspect a lens 111. Inspecting the lens 111 includes determining whether or not a foreign matter FO is attached to the lens 111.

[0065] The lens 111 is an example of an optical member that can be inspected using the inspection device 3.

[0066] As shown in FIG. 8, the inspection device 3 includes a light source 101, a light source fixing mechanism 102, a lens displacement mechanism 113, an IRCF 121, an IRCF fixing mechanism 122, an image pickup element 131, an image pickup element fixing mechanism 132, and a processing unit 171.

[0067] The light source 101, the IRCF 121, and the image sensor 131 are respectively fixed to a light source fixing mechanism 102, an IRCF fixing mechanism 122, and an image sensor fixing mechanism 132. The lens 111 is attached to and detached from a lens displacement mechanism 113 by an operator or an automatic transfer mechanism.

[0068] When the lens 111 is inspected using the inspection device 3, the lens 111 is attached to the lens displacement mechanism 113. In a state in which the lens 111 is attached to the lens displacement mechanism 113, the light source 101, the lens 111, the IRCF 121, and the image sensor 131 are arranged along the optical axis 111a of the lens 111 in the order shown. The lens 111 and the IRCF 121 are disposed between the light source 101 and the image sensor 131.

[0069] The processing unit 171 determines whether the foreign matter FO is a foreign matter adhering to the lens 111 based on the image data output by the image sensor 131.

[0070] 3.2 Lens displacement mechanism FIG. 9 is a perspective view that schematically illustrates a lens socket, a rotary stage, and a rotary stage mounting base that are provided in the inspection device of the third embodiment, as well as a lens that is inspected using the inspection device.

[0071] As shown in FIGS. 8 and 9, the lens displacement mechanism 113 includes a lens socket 201, a mounting table 202, and a rotation stage 203.

[0072] The lens 111 is inserted into the lens socket 201. The lens socket 201 holds the inserted lens 111. The lens socket 201 is placed on a rotation stage 203. The rotation stage 203 rotates the placed lens socket 201 around the optical axis 111a of the lens 111 to displace the lens 111. The rotation stage 203 may be replaced with a drive mechanism other than the rotation stage 203. The rotation stage 203 is placed on the mounting base 202.

[0073] The lens displacement mechanism 113 may include a suction mechanism that switches between a state in which the lens 111 is suctioned and a state in which the lens 111 is not suctioned, and may displace the lens 111 by performing this switching. The lens displacement mechanism 113 may also include a drive mechanism that displaces a support mechanism that supports the lens 111 in a direction perpendicular to or parallel to the optical axis 111a of the lens 111, thereby displacing the lens 111 in that direction.

[0074] The lens socket 201 has a cylindrical shape. An accommodating hole 201a is formed in the lens socket 201. The accommodating hole 201a accommodates the lens 111 and serves as a path through which the light L passes.

[0075] The rotation stage 203 has a cylindrical shape. A hole 203a is formed in the rotation stage 203. The hole 203a serves as a passage for the light L. The lens socket 201 is placed on the rotation stage 203 so that the hole 203a continues from the receiving hole 201a of the lens socket 201.

[0076] The mounting table 202 has an L-shaped plate shape. To this end, the mounting table 202 includes a horizontal plate 241 and a vertical plate 242. The horizontal plate 241 and the vertical plate 242 each have a rectangular plate shape. One side of the horizontal plate 241 and one side of the vertical plate 242 are connected to each other. A hole 241a is formed in the horizontal plate 241. The hole 241a serves as a passageway for the light L. The rotation stage 203 is placed on the horizontal plate 241 so that the hole 241a is continuous with the hole 203a of the rotation stage 203.

[0077] 1.1 Inspection procedure FIG. 10 is a flowchart showing the flow of lens inspection performed using the inspection device of the third embodiment.

[0078] When the lens 111 is inspected using the inspection device 3, steps S131 to S138 shown in FIG. 10 are executed.

[0079] In step S131, the lens 111 is inserted into the lens socket 201 by an automatic transport mechanism or an operator.

[0080] In the following step S132, the processing unit 171 causes the light source 101 to start emitting light L. As a result, an image including the shadow of the foreign object FO is formed on the imaging surface 131a of the imaging element 131.

[0081] In the following step S133, the processing unit 171 causes the imaging element 131 to capture the formed image. As a result, the processing unit 171 acquires the first image data D1 output by the imaging element 131.

[0082] In the following step S134, the processing unit 171 causes the lens displacement mechanism 113 to slightly displace the lens 111.

[0083] In the following step S135, the processing unit 171 causes the imaging element 131 to capture the formed image. As a result, the processing unit 171 acquires the second image data D2 output by the imaging element 131.

[0084] In the following step S136, the processing unit 171 determines whether the foreign matter FO is an adhered foreign matter attached to the lens 111 based on the first image data D1 output before the lens displacement mechanism 113 displaces the lens 111 and the second image data D2 output after the lens displacement mechanism 113 displaces the lens 111. When determining whether the foreign matter FO is an adhered foreign matter, the processing unit 171 identifies a first position (X1, Y1) and a second position (X2, Y2) of the shadow FOS from the first image data D1 and the second image data D2, respectively. If the second position (X2, Y2) is different from the first position (X1, Y1), the processing unit 171 determines that the foreign matter FO is an adhered foreign matter attached to the lens 111. On the other hand, if the second position (X2, Y2) is the same as the first position (X1, Y1), the processing unit 171 determines that the foreign matter FO is not an adhered foreign matter attached to the lens 111.

[0085] In the following step S137, the processing unit 171 causes the light source 101 to stop emitting the light L.

[0086] In the following step S138, the lens 111 is removed from the lens socket 201 by the automatic transport mechanism or an operator.

[0087] 1.2 Camera module manufacturing FIG. 11 is a flowchart showing the flow of manufacturing a camera module including a lens inspected using the inspection device of the third embodiment.

[0088] When a camera module including the lens 111 is manufactured, steps S141 to S143 shown in FIG. 11 are performed.

[0089] In step S141, the lens 111 is inspected using the inspection device 3. At that time, it is determined whether or not a foreign matter FO is present based on image data output by the image sensor 131, and it is determined whether or not the present foreign matter FO is an adhered foreign matter attached to the lens 111.

[0090] In the following step S142, a camera module including the lens 111 is assembled.

[0091] In the following step S143, the camera module 301 is inspected using a camera module inspection device.

[0092] 1.3 Optical arrangement of optical components in inspection equipment and camera modules FIG. 12 is a cross-sectional view that schematically illustrates the optical arrangement of a lens, an IRCF, and an imaging element in a camera module that includes a lens inspected using the inspection device of the third embodiment.

[0093] As shown in Figure 12, the manufactured camera module 301 includes a lens 111 inspected using the inspection device 3, an IRCF 321 of the same type as the IRCF 121 provided in the inspection device 3, and an imaging element 331 of the same type as the imaging element 131 provided in the inspection device 3.

[0094] 8 and 12 , the optical arrangement of the lens 111, IRCF 121, and image sensor 131 in the inspection device 3 is equivalent to the optical arrangement of the lens 111, IRCF 321, and image sensor 331 provided in the camera module 301. Therefore, the optical path of the light beam that passes through the lens 111 and IRCF 121 to reach the image sensor 131 in the inspection device 3 coincides with the optical path of the light beam that passes through the lens 111 and IRCF 321 to reach the image sensor 331 in the camera module 301. In this way, if the optical arrangement of the first plurality of optical members in the inspection device 3 is equivalent to the arrangement of the second plurality of optical members provided in the camera module 301, when the lens 111 is inspected using the inspection device 3, the lens 111 is placed in a situation equivalent to the situation in which the lens 111 is placed in the camera module 301. This allows correlation between the optical characteristics of the first plurality of optical members in the inspection device 3 and the optical characteristics of the second plurality of optical members provided in the camera module 301. This allows appropriate inspection to be performed to determine whether or not foreign matter FO is attached to the lens 111 used in the camera module 301. For example, it is possible to prevent, to a certain extent, the camera module 301 from detecting attached foreign matter that does not pose a problem.

[0095] However, even if the optical arrangement of the lens 111, IRCF 121, and image sensor 131 in the inspection device 3 is not equivalent to the optical arrangement of the lens 111, IRCF 321, and image sensor 331 provided in the camera module 301, the inspection device 3 can prevent the detection of foreign matter attached that does not pose a problem in the camera module 301.

[0096] 1.4 Inspection equipment and camera module inspection equipment inspection conditions The inspection conditions in the camera module inspection device are equivalent to the inspection conditions in the inspection device 3. This makes it possible to further prevent the detection of foreign matter adhering to the camera module 301 that does not pose a problem. The equivalent inspection conditions include the arrangement of the light source, the illuminance settings of the light source, the test program to be used, etc.

[0097] 2. Fourth embodiment The following describes the differences between the fourth embodiment and the first embodiment. For points that are not described, the fourth embodiment also employs the same configuration as that employed in the first embodiment.

[0098] 2.1 Inspection equipment FIG. 13 is a diagram schematically illustrating an inspection device according to the fourth embodiment and an IRCF inspected using the inspection device.

[0099] The inspection device 4 of the fourth embodiment shown in FIG.

[0100] As shown in FIG. 13, the inspection device 4 includes a light source 101, a light source displacement mechanism 103, a lens 111, a lens displacement mechanism 113, an IRCF displacement mechanism 123, an image sensor 131, an image sensor displacement mechanism 133, and a processing unit 171.

[0101] The light source 101, lens 111, IRCF 121, and image sensor 131 are attached to and detached from the light source displacement mechanism 103, lens displacement mechanism 113, IRCF displacement mechanism 123, and image sensor displacement mechanism 133, respectively, by an operator or an automatic transport mechanism.

[0102] In the inspection device 4, the IRCF 121 is the first optical member to be inspected, and the light source 101, lens 111, and image sensor 131 are the second optical members not to be inspected. Alternatively, the IRCF displacement mechanism 123 is the first displacement mechanism that displaces the first optical member to be inspected, and the light source displacement mechanism 103, lens displacement mechanism 113, and image sensor displacement mechanism 133 are the second displacement mechanisms that displace the second optical member not to be inspected. Alternatively, the lens displacement mechanism 113 may be the first displacement mechanism that displaces the first optical member to be inspected, and the light source displacement mechanism 103, IRCF displacement mechanism 123, and image sensor displacement mechanism 133 are the second displacement mechanisms that displace the second optical member not to be inspected.

[0103] When the IRCF 121 is inspected using the inspection device 4, the light source 101, the lens 111, the IRCF 121, and the image sensor 131 are attached to the light source displacement mechanism 103, the lens displacement mechanism 113, the IRCF displacement mechanism 123, and the image sensor displacement mechanism 133, respectively. In a state in which the light source 101, the lens 111, the IRCF 121, and the image sensor 131 are attached to the light source displacement mechanism 103, the lens displacement mechanism 113, the IRCF displacement mechanism 123, and the image sensor displacement mechanism 133, respectively, the light source 101, the lens 111, the IRCF 121, and the image sensor 131 are arranged along the optical axis 111a of the lens 111 in the order listed. The lens 111 and the IRCF 121 are disposed between the light source 101 and the image sensor 131.

[0104] 13, the light source displacement mechanism 103 includes a support mechanism 251 and a drive mechanism 252. The support mechanism 251 supports the light source 101. The drive mechanism 252 displaces the support mechanism 251 to displace the light source 101.

[0105] The lens displacement mechanism 113 is the same mechanism as the lens displacement mechanism 113 provided in the inspection device 3 of the third embodiment.

[0106] 13, the imaging element displacement mechanism 133 includes a support mechanism 261 and a drive mechanism 262. The support mechanism 261 supports the imaging element 131. The drive mechanism 262 displaces the support mechanism 261 to displace the imaging element 131.

[0107] 2.2 Inspection procedure FIG. 14 is a flowchart showing the flow of an IRCF inspection performed using the inspection device of the fourth embodiment.

[0108] When the IRCF 121 is inspected using the inspection device 4, steps S151 to S160 shown in FIG. 14 are executed.

[0109] In steps S151 to S153, the same processes as those in steps S111 to S113 shown in FIG. 3 are performed.

[0110] In the following step S154, the processing unit 171 causes the imaging element 131 to capture the formed image. As a result, the processing unit 171 acquires the first image data D1 output by the imaging element 131.

[0111] In the following step S155, the processing unit 171 causes the light source displacement mechanism 103, the lens displacement mechanism 113, and the image sensor displacement mechanism 133 to slightly displace the light source 101, the lens 111, and the image sensor 131, respectively.

[0112] In the following step S156, the processing unit 171 causes the imaging element 131 to capture the formed image. As a result, the processing unit 171 acquires the second image data D2 output by the imaging element 131.

[0113] In the following step S157, the processing unit 171 determines whether the foreign matter FO is an adhering foreign matter attached to the IRCF 121 based on the first image data D1 output before the light source displacement mechanism 103, the lens displacement mechanism 113, and the image sensor displacement mechanism 133 displace the light source 101, the lens 111, and the image sensor 131, respectively, and the second image data D2 output after the light source displacement mechanism 103, the lens displacement mechanism 113, and the image sensor displacement mechanism 133 displace the light source 101, the lens 111, and the image sensor 131, respectively.

[0114] In the subsequent steps S158 to S160, the same processes as those performed in steps S118 to S120 shown in FIG. 3 are performed.

[0115] 2.3 Determining whether a foreign object is an attached foreign object FIG. 15 is a diagram showing the contents of the determination made by the processing unit provided in the inspection device of the fourth embodiment as to whether or not a foreign substance is an adhered foreign substance adhered to an IRCF lens.

[0116] In the inspection device 4, as shown in FIG. 15, when the processing unit 171 determines whether or not a foreign substance FO is an attached foreign substance, it identifies the first position (X1, Y1) and the second position (X2, Y2) of the shadow FOS from the first image data D1 and the second image data D2, respectively.

[0117] If the foreign object FO is an attached foreign object attached to the IRCF 121, the shadow FOS does not displace when the light source 101, the lens 111, and the image sensor 131 are displaced. On the other hand, if the foreign object FO is not an attached foreign object attached to the IRCF 121, that is, if the foreign object FO is a foreign object attached to the light source 101, the lens 111, or the image sensor 131, the shadow FOS displaces when the IRCF 121 is displaced. The processing unit 171 utilizes this fact to determine whether the foreign object FO is an attached foreign object attached to the IRCF 121. That is, if the second position (X2, Y2) is different from the first position (X1, Y1), the processing unit 171 determines that the foreign object FO is not an attached foreign object. On the other hand, if the second position (X2, Y2) is the same as the first position (X1, Y1), the processing unit 171 determines that the foreign object FO is an attached foreign object.

[0118] 3 Fifth embodiment The following describes the differences between the fifth embodiment and the first embodiment. For points that are not described, the fifth embodiment also employs the same configuration as that employed in the first embodiment.

[0119] FIG. 16 is a diagram schematically illustrating an inspection device according to the fifth embodiment and an IRCF inspected using the inspection device.

[0120] 16, the imaging surface 131a of the imaging element 131 faces vertically downward. This makes it possible to prevent foreign matter from adhering to the imaging surface 131a. This makes it possible to more accurately inspect whether or not a foreign matter FO is adhering to the IRCF 121.

[0121] The inspection device 5 further includes a cooling mechanism 151 .

[0122] The cooling mechanism 151 cools the imaging element 131. This makes it possible to prevent oils and the like derived from the human body from adhering to the imaging element 131. This makes it possible to more accurately inspect whether or not a foreign object FO is adhering to the IRCF 121. The cooling mechanism 151 is a Peltier element or the like.

[0123] The inspection device 5 further includes a glass cover 141. The glass cover 141 covers the imaging surface 131a of the imaging element 131.

[0124] FIG. 17 is a cross-sectional view that schematically illustrates a glass cover provided in the inspection device of the fifth embodiment.

[0125] 17, the glass cover 141 includes a glass plate 341, a first coating 342, and a second coating 343. One of the first coating 342 and the second coating 343 may be omitted.

[0126] The glass plate 341 has a first main surface 341a and a second main surface 341b, which are located on opposite sides to each other.

[0127] The first coating 342 and the second coating 343 are formed on the first principal surface 341a and the second principal surface 341b, respectively, and cover the first principal surface 341a and the second principal surface 341b. The first coating 342 and the second coating 343 are made of a material to which foreign matter does not easily adhere. For example, the first coating 342 and the second coating 343 are made of fluororesin. This makes it possible to prevent foreign matter from adhering to the imaging surface 131a of the imaging element 131. This makes it possible to more accurately inspect whether or not foreign matter FO is adhering to the IRCF 121.

[0128] 4 Sixth embodiment The following describes the differences between the sixth embodiment and the first embodiment. For points that are not described, the sixth embodiment also employs the same configuration as that employed in the first embodiment.

[0129] 4.1 Inspection equipment FIG. 18 is a diagram schematically illustrating an inspection device according to the sixth embodiment and an IRCF inspected using the inspection device.

[0130] The inspection device 6 of the sixth embodiment shown in FIG.

[0131] The removal mechanism 161 removes foreign matter adhering to the IRCF 121. The removal mechanism 161 is a blower that blows an air flow onto the IRCF 121, an ionizer blower that blows an air flow containing ions onto the IRCF 121, or the like.

[0132] 4.2 Inspection procedure FIG. 19 is a flowchart showing the flow of an IRCF inspection performed using the inspection device of the sixth embodiment.

[0133] When the IRCF 121 is inspected using the inspection device 6, steps S171 to S182 shown in FIG. 19 are executed.

[0134] In steps S171 to S177, the same processes as those performed in steps S101 to S107 shown in FIG. 3 are performed.

[0135] In the following step S178, the processing unit 171 determines the next process based on whether or not it has determined that the foreign matter FO is an attached foreign matter. If the processing unit 171 determines that the foreign matter FO is an attached foreign matter, it executes step S179 and then step S180. If the processing unit 171 determines that the foreign matter FO is not an attached foreign matter, it executes step S180 without executing step S179.

[0136] In step S179, the processing unit 171 causes the removal mechanism 161 to remove the foreign matter adhering to the IRCF 121. As a result, even if the foreign matter FO is adhering to the IRCF 121, it is possible to finally obtain an IRCF 121 free of the foreign matter FO.

[0137] In steps S180 to S182, the same processing as that performed in steps S108 to S110 shown in FIG. 3 is performed.

[0138] The present disclosure is not limited to the above-described embodiments, and may be replaced with a configuration that is substantially the same as the configuration shown in the above-described embodiments, a configuration that has the same effect, or a configuration that can achieve the same purpose. [Explanation of symbols]

[0139] 1, 2, 3, 4, 5, 6 Inspection device, 101 light source, 102 light source fixing mechanism, 103 light source displacement mechanism, 111 lens, 111a optical axis, 112 lens fixing mechanism, 113 lens displacement mechanism, 121 IRCF, 122 IRCF fixing mechanism, 123 IRCF displacement mechanism, 131 imaging element, 131a imaging surface, 132 imaging element fixing mechanism, 133 imaging element displacement mechanism, 141 glass cover, 151 cooling mechanism, 161 removal mechanism, 171 processing section, 201 lens socket, 201a accommodation hole, 202 mounting table, 203 rotation stage, 203a hole, 211 support table, 211a hole, 211b hole, 212 mounting table, 213 pump, 214 drive mechanism, 221 support mechanism, 222 Adsorption mechanism, 231 horizontal plate, 231a hole, 232 vertical plate, 241 horizontal plate, 241a hole, 242 vertical plate, 251 support mechanism, 252 drive mechanism, 261 support mechanism, 262 drive mechanism, 301 camera module, 311 lens, 321 IRCF, 331 imaging element, 341 glass plate, 341a first main surface, 341b second main surface, 342 first coating, 343 second coating, L light, FO foreign matter, FOS shadow, D1 first image data, D2 second image data.

Claims

1. a detachable portion to which an optical member used in the camera module can be attached and detached; a light source that emits light that passes through the optical member; an imaging element that captures an image including a shadow of a foreign substance formed by light transmitted through the optical member; An inspection device comprising:

2. The shadow is a defocused image The inspection device according to claim 1 .

3. the imaging element outputs image data corresponding to the image; a processing unit that determines whether the foreign matter is a foreign matter that has adhered to the optical member based on the image data; The inspection device according to claim 1 or 2.

4. a displacement mechanism for displacing the optical member; Determining whether the foreign matter is the adhered foreign matter based on the image data includes causing the displacement mechanism to displace the optical member, and determining whether the foreign matter is the adhered foreign matter based on first image data output by the image sensor before causing the displacement mechanism to displace the optical member and second image data output by the image sensor after displacing the optical member. The inspection device according to claim 3 .

5. Determining whether the foreign matter is the attached foreign matter based on the first image data and the second image data includes identifying a first position and a second position of the shadow from the first image data and the second image data, respectively, determining that the foreign matter is the attached foreign matter if the second position is different from the first position, and determining that the foreign matter is not the attached foreign matter if the second position is the same as the first position. The inspection device according to claim 4.

6. The displacement mechanism includes a suction mechanism that switches between a state in which the optical member is suctioned and a state in which the optical member is not suctioned, thereby displacing the optical member. The inspection device according to claim 4.

7. a lens that transmits the light and has an optical axis; The displacement mechanism includes a support mechanism that supports the optical member, and a drive mechanism that displaces the support mechanism in a direction perpendicular to the optical axis or a direction parallel to the optical axis to displace the optical member. The inspection device according to claim 4.

8. the optical member is a lens having an optical axis, The displacement mechanism includes a lens socket that holds the lens, and a drive mechanism that rotates the lens socket around the optical axis to displace the optical member. The inspection device according to claim 4.

9. the optical member is a first optical member, a second optical member; and a displacement mechanism that displaces the second optical member, Determining whether the foreign matter is the adhered foreign matter based on the image data includes causing the displacement mechanism to displace the second optical member, and determining whether the foreign matter is the adhered foreign matter based on first image data output by the image sensor before causing the displacement mechanism to displace the second optical member and second image data output by the image sensor after causing the displacement mechanism to displace the second optical member. The inspection device according to claim 3 .

10. Determining whether the foreign matter is the attached foreign matter based on the first image data and the second image data includes identifying a first position and a second position of the shadow from the first image data and the second image data, respectively, determining that the foreign matter is not the attached foreign matter when the first position is different from the second position, and determining that the foreign matter is the attached foreign matter when the first position is the same as the second position. The inspection device according to claim 9.

11. a removal mechanism for removing the adhering foreign matter, When the processing unit determines that the foreign matter is the adhering foreign matter, the processing unit causes the removal mechanism to remove the adhering foreign matter. The inspection device according to claim 3 .

12. the imaging element has an imaging surface on which the image is formed, The imaging surface faces vertically downward. The inspection device according to claim 1 or 2.

13. the imaging element has an imaging surface on which the image is formed, The imaging device includes a glass plate having a main surface and a coating formed on the main surface, and a glass cover covering the imaging surface. The inspection device according to claim 1 or 2.

14. A cooling mechanism for cooling the imaging element is provided. The inspection device according to claim 1 or 2.

15. The optical member is an infrared cut filter or a lens. The inspection device according to claim 1 or 2.

16. a) inspecting the optical member by using the inspection device according to claim 1 or 2, while making an optical arrangement of a first plurality of optical members including the optical member in the inspection device equivalent to an optical arrangement of a second plurality of optical members including the optical member provided in the camera module; b) after step a), assembling the camera module; A method for manufacturing a camera module comprising:

17. a) inspecting the optical member using the inspection device according to claim 1 or 2; b) after step a), assembling the camera module; c) after step b), inspecting the camera module using a camera module inspection device under inspection conditions equivalent to those of the inspection device; A method for manufacturing a camera module comprising:

Images