Bubble water generator

Abstract

To reduce contamination and generate a higher concentration of UFB water efficiently.SOLUTION: A bubble water generator includes: tanks 10A, 10B which are connected to each other through pipe passages 21A, 21B and temporarily store a solution BW in which a dissolved gas is dissolved; and a vacuum pump 90 which sets a predetermined pressure difference between one of the tanks 10A, 10B and the other tank. When the bubble water generator repeatedly moves the solution BW between the one tank and the other tank through the pipe passages 21A, 21B while controlling the vacuum pump 90 to switch a pressure in the one tank and a pressure in the other tank alternately to generate bubble water containing a predetermined number of ultra fine bubbles, the vacuum pump 90 is controlled so that the one tank is evacuated to send the gas remaining in the one tank to the other tank when movement of the solution BW from the one tank to the other tank ends.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a bubble water generating device that generates ultra-fine bubble (UFB) water, also known as nanobubbles. [Background technology]

[0002] BACKGROUND ART Conventionally, a fine bubble generating system is known as a device for generating bubble water containing fine bubbles with extremely small particle diameters (see, for example, Patent Document 1).

[0003] This microbubble generating system is equipped with a pump having a liquid suction section for sucking in liquid and a liquid discharge section for discharging liquid. An air bubble mixing section is attached to the liquid suction section side of the pump via a circulation pipe, and an air bubble breakup section is attached to the liquid discharge section side via a circulation pipe.

[0004] According to the above-described microbubble generating system, even a pump with a small output was able to generate microbubbles with extremely small particle diameters. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-209953 Summary of the Invention [Problem to be solved by the invention]

[0006] However, in the case of the above-mentioned microbubble generating system, gas is sucked in from the outside and mixed into the liquid as bubbles, and the liquid containing the bubbles passes through the pump, which poses a problem in that it is not possible to reduce contamination from both inside and outside the pump.

[0007] The present invention has been made in consideration of the above, and its purpose is to provide a bubble water generating device that can reduce contamination and efficiently generate UFB water with a higher concentration. [Means for solving the problem]

[0008] In order to achieve the above-mentioned object, one aspect of the present invention comprises a plurality of tanks connected to each other via piping paths and configured to temporarily store a liquid in which the gas is dissolved together with the dissolved gas; a pressure setting unit that sets a predetermined pressure difference between at least one of the plurality of tanks and the other of the tanks that are connected via the piping paths; and a control unit that controls the pressure setting unit to alternately switch between the pressure in one of the tanks and the pressure in the other of the tanks, thereby repeatedly transferring the liquid between the one of the tanks and the other of the tanks via the piping paths, thereby generating bubble water containing a predetermined number of ultra-fine bubbles, wherein the control unit controls the pressure setting unit so that, upon completion of the transfer of the liquid from the one of the tanks to the other of the tanks, the gas remaining in the one of the tanks is evacuated and sent to the other of the tanks.

[0009] Another aspect of the present invention comprises a plurality of tanks connected to each other via piping lines for temporarily storing a liquid in which the gas is dissolved together with the gas for dissolution; a pressure setting unit for setting a predetermined pressure difference between at least one tank and another tank of the plurality of tanks connected via the piping lines; and a control unit for controlling the pressure setting unit to alternately switch between the pressure in one tank and the pressure in the other tank, and repeatedly moving the liquid between the one tank and the other tank via the piping lines, thereby generating bubble water containing a predetermined number of ultra-fine bubbles, wherein the control unit controls the pressure setting unit so that the internal pressure of the one tank is pressurized and the internal pressure of the other tank is reduced. [Effects of the Invention]

[0010] According to the present invention, a bubble water generating device can be provided that can reduce contamination and efficiently generate UFB water with a higher concentration. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a schematic diagram showing the basic configuration of a UFB water generation system to which a bubble water generation device according to one embodiment of the present invention is applied. [Figure 2] FIG. 2 is a schematic diagram illustrating the control blocks of a UFB water generating system according to one embodiment. [Figure 3] FIG. 2 is a diagram illustrating the control steps of a UFB water generating system according to one embodiment. [Figure 4] 10 is a flowchart illustrating the control operation of a UFB water generating system according to one embodiment. [Figure 5] FIG. 10 is a schematic diagram showing an example of the configuration of a UFB water generating system according to another embodiment of the present invention. [Figure 6A] 10 is a first flowchart illustrating the control operation of a UFB water generating system according to another embodiment. [Figure 6B] 10 is a second flowchart illustrating the control operation of a UFB water generating system according to another embodiment. [Figure 6C] 10 is a flowchart (part 3) illustrating the control operation of a UFB water generating system according to another embodiment. [Figure 7] FIG. 10 is a schematic diagram showing an example of the configuration of a UFB water generating system according to yet another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0012] The present invention relates to a bubble water generating device and a bubble water generating method, and is described below with reference to the accompanying drawings. Note that the drawings are merely a schematic representation of the invention and may differ from the actual device.

[0013] One embodiment FIG. 1 is a schematic diagram, partly in cross section, showing the basic configuration of a UFB water generating system 1 to which a bubble water generating device according to one embodiment of the present invention is applied.

[0014] The UFB water generating system 1 of this embodiment will be described as generating UFB water in which the particle size of bubbles (fine bubbles) dissolved in the solution BW, which is the raw water for generating the bubble water, is at the nano level.

[0015] 1, the UFB water generating system 1 of this embodiment includes multiple tanks 10A, 10B (one or the other) in which the solution BW is moved and temporarily stored, and a vacuum pump (pressure setting unit) 90 that controls the internal pressure of the tanks 10A, 10B. Also, a gas supply unit 80 is connected to the tank 10A, which fills the tank with a gas to be dissolved, such as ozone gas (O), hydrogen, oxygen, or a medical gas.

[0016] The tanks 10A and 10B are provided with pressure gauges (vacuum gauges) 70A and 70B, respectively, for measuring the internal pressure. The tanks 10A and 10B are also provided with gas-liquid mixed high-concentration dissolved gasification nozzles 50A and 50B, respectively, for taking in the solution BW inside.

[0017] The gas-liquid mixed high concentration dissolved gasification nozzles 50A, 50B are UFB nozzles having a vaporization supply port with a gas-liquid mixing function that can dissolve the gas remaining in the tanks 10A, 10B at a high concentration in the solution BW in the tanks 10A, 10B.

[0018] The tanks 10A and 10B are connected to the intake port of the vacuum pump 90 via vacuum valves 30A and 30B. The tanks 10A and 10B are also connected to the exhaust port of the vacuum pump 90 via exhaust (pressurization) valves 40A and 40B, and are connected to the outside (outside air) via an outside air exhaust (ventilation) valve 40E.

[0019] The pipe line 21A of the tank 10A is connected to the gas-liquid mixed high concentration dissolved gasification nozzle 50B of the tank 10B via the solution valve 20A. The pipe line 21B of the tank 10B is also connected to the gas-liquid mixed high concentration dissolved gasification nozzle 50A of the tank 10A via the solution valve 20B.

[0020] The solution valve 20A on the tank 10A side is connected to a gas supply unit 80 via a gas supply valve 60A. Gas is filled into the tank 10A from the gas supply unit 80 only at the beginning of UFB water production (after the raw water is injected into the tank 10A).

[0021] In this embodiment, tanks 10A, 10B, a vacuum pump 90, gas-liquid mixed high-concentration dissolved gasification nozzles 50A, 50B, and a gas supply unit 80 constitute a closed-pressure type UFB water production system 1 capable of producing UFB water in a closed-loop state.

[0022] That is, in the UFB water generating system 1 according to this embodiment, the pressure in one tank 10A, into which raw water for generating UFB is poured, is brought to normal pressure by filling it with gas from the gas supply unit 80. Also, the other tank 10B, which does not store raw water, is brought to a vacuum (reduced pressure) state by drawing a vacuum with the vacuum pump 90.

[0023] Then, UFB is generated in the other tank 10B as the solution BW containing dissolved gas in raw water is transferred from one tank 10A to the other tank 10B via the gas-liquid mixed high-concentration dissolved gasification nozzle 50B. As the solution BW transfers, the pressures in both tanks 10A and 10B are brought to a semi-reduced state (an equal state of vacuum pressure and normal pressure).

[0024] In this state, the gas remaining in the tank 10A from which the solution BW was delivered is evacuated by the vacuum pump 90, and the gas is supplied to the other tank 10B to which the solution BW has been transferred. As a result, the tank 10A from which the solution BW was delivered is now placed in a vacuum state, and the other tank 10B into which the solution BW has been newly stored is placed in a normal pressure state.

[0025] In this way, the UFB concentration is gradually increased by repeatedly transferring the solution BW between the tanks 10A and 10B while alternately switching the internal pressures of the tanks 10A and 10B. Moreover, when producing UFB water, it is possible to produce UFB water at the maximum pressure difference between normal pressure and reduced pressure in a nearly completely closed (closed loop) state from the beginning (injection of raw water and filling with gas) to the end (removal of produced UFB water).

[0026] Fig. 2 illustrates the main control blocks of the UFB water generation system 1. That is, the UFB water generation system 1 according to this embodiment includes, for example, as shown in Fig. 2, a control unit 11, an operation input unit 13 connected to the control unit 11, pressure gauges 70A and 70B, a vacuum pump 90, a valve switch 15, a memory unit 19, and a gas supply unit 80 (not shown).

[0027] The operation input unit 13 is operated by an operator, for example, when generating UFB water, and is used to set initial conditions such as the number of times the solution BW is moved (set number of times), the particle size of the bubbles to be generated, or the gas concentration of the UFB water to be generated. In addition, the operation input unit 13 is used to input instructions such as to start and stop the system.

[0028] The memory unit 19 is for storing various setting values input from the operation input unit 13, and may be configured to store in advance the relationship between the number of times the solution BW is moved and the bubble content or particle size.

[0029] The control unit 11 controls the start / stop of the gas supply unit 80 and the vacuum pump 90 in response to instructions from the operation input unit 13, and controls the valve switch 15 based on the outputs of the pressure gauges 70A and 70B.

[0030] Valve switch 15 switches on (open) / off (close) solution valves 20A and 20B, vacuum valves 30A and 30B, exhaust valves 40A, 40B, and 40E, and gas supply valve 60A in accordance with instructions from control unit 11.

[0031] The gas supply valve 60A is turned on, for example, at the start of UFB water production, so that gas is filled from the gas supply unit 80 into one of the tanks 10A into which raw water has been injected, only once.

[0032] Figure 3 shows the control steps during UFB water generation in the UFB water generation system 1. In this embodiment, the step states are initial, standby, before generation starts, generation step 1, generation step 2, generation step 3, and generation step 4, and generation steps 1 to 4 are repeated according to the set number of times. Note that here, we will omit the explanation of the control blocks shown in Figure 2 and will explain the flow of the control steps.

[0033] 3, the initial state of the step is when all valves 20A, 20B, 30A, 30B, 40A, 40B, 40E, and 60A and vacuum pump 90 are turned off, and the pressure inside tanks 10A and 10B is normal pressure (outside air). In this initial state, raw water (solution BW) is poured into tank 10B.

[0034] The standby state is a gas replacement state in which valves 20B, 30A, 30B and vacuum pump 90 are turned off, and valves 20A, 40A, 40B, 40E, 60A are turned on (open), and the pressure inside tanks 10A and 10B is both normal pressure (gas).

[0035] The state before production begins is a vacuum state (e.g., -0.08 MPa) in which valves 20A, 20B, 30B, 40A, 40B, and 60A are turned off, valves 30A and 40E and vacuum pump 90 are turned on, and the pressure inside tank 10A is reduced from normal pressure to a vacuum.

[0036] The first generation step state is a UFB generation state in tank 10A in which valves 30A, 40B, and 40E and vacuum pump 90 are turned off and valve 20A is turned on, causing solution BW in tank 10B to move to tank 10A. In this first generation step state, the internal pressures of tanks 10A and 10B are both set to a vacuum plus atmospheric pressure state (e.g., −0.04 MPa). Valves 20B, 30B, 40A, and 60A maintain their on / off states.

[0037] The two-step generation state is a state in which valve 20A is turned off, valves 30B and 40A and vacuum pump 90 are turned on, and the pressure inside tank 10B is reduced to a vacuum state, while the pressure inside tank 10A to which solution BW has moved is normal pressure. Note that valves 20B, 30A, 40B, 40E, and 60A maintain their on / off states.

[0038] The three-step generation state is a UFB generation state in tank 10B in which valves 30B and 40A and vacuum pump 90 are turned off and valve 20B is turned on, causing solution BW in tank 10A to move to tank 10B. In this three-step generation state, the internal pressures of tanks 10A and 10B are both set to a vacuum plus atmospheric pressure state. Valves 20A, 30A, 40B, 40E, and 60A maintain their on / off states.

[0039] The four-step generation state is a state in which valve 20B is turned off, valves 30A and 40B, and vacuum pump 90 are turned on, and the pressure inside tank 10A is reduced to a vacuum state, while the pressure inside tank 10B, to which solution BW has moved, is normal pressure. Note that valves 20A, 30B, 40A, 40E, and 60A maintain their on / off states.

[0040] By repeating these steps from Generation 1 to Generation 4 a predetermined number of times, the pressure difference between tanks 10A and 10B causes the solution BW to move between tanks 10A and 10B, making it possible to generate bubble water containing UFB with a higher dissolved concentration in solution BW.

[0041] Furthermore, by providing gas-liquid mixed high concentration dissolved gasification nozzles 50A and 50B in tanks 10A and 10B, respectively, it is possible to produce bubble water containing UFB using the gas in tanks 10A and 10B as a raw material without adding additional gas.

[0042] FIG. 4 is a flowchart illustrating the control operation of the UFB water generating system 1 according to this embodiment.

[0043] 4, when UFB water is produced by UFB water production system 1, first, as an initial state setting, gases and solution (raw water) BW necessary for producing UFB water are introduced into, for example, one of tanks 10A and 10B, which are set to normal pressure (step S01). In this state, all valves 20A, 20B, 30A, 30B, 40A, 40B, 40E, 60A and vacuum pump 90 are turned off.

[0044] Thereafter, the valves 20A, 40A, 40B, 40E, and 60A are turned on to enter a standby state (step S02).

[0045] To generate UFB water, a predetermined pressure difference between the tanks 10A and 10B is essential, and the predetermined pressure difference must be, for example, between a normal pressure state and a reduced pressure state (vacuum state).

[0046] Therefore, as a pre-production state, valves 30A and 40E are turned on and vacuum pump 90 is started (step S03). Valves 20A, 40A, 40B, and 60A are turned off. As a result, only the other tank 10A is depressurized and placed in a vacuum state.

[0047] Then, valves 30A and 40E are turned off, and after vacuum pump 90 is stopped, valve 20A is turned on, so that solution BW and gas in tank 10B are transferred to tank 10A (step S04). As solution BW and gas are transferred from the normal pressure state to the vacuum state, UFB water is generated in tank 10A (first generation step state).

[0048] After the UFB water is produced, the pressure inside both tanks 10A and 10B becomes semi-reduced due to the movement of solution BW and gas. To produce the desired UFB water, the UFB water (solution BW and gas) must be repeatedly moved, but in the semi-reduced state, the pressure difference is insufficient to produce sufficient UFB water.

[0049] To obtain the necessary pressure difference, for example, new gas may be introduced into the tank to be kept at normal pressure, and the remaining gas may be exhausted (discharged) from the tank to be kept at reduced pressure.

[0050] However, adding new gas or discharging residual gas will damage the closed state of the system 1, resulting in risks such as contamination.

[0051] Therefore, in this embodiment, the residual gas remaining in the tank from which the solution BW and gas were sent is forcibly sent to the tank to which the solution BW and gas were moved, thereby creating a pressure difference between the normal pressure state and the reduced pressure state.

[0052] That is, after the valve 20A is turned off, the vacuum pump 90 is started and the valves 30B and 40A are turned on, so that the tank 10A is at normal pressure and the tank 10B is in a two-step reduced pressure generation state (step S05).

[0053] Then, valves 30B and 40A are turned off, and after vacuum pump 90 is stopped, valve 20B is turned on, so that solution BW and gas in tank 10A are transferred to tank 10B (step S06). As solution BW and gas are transferred from the normal pressure state to the vacuum state, UFB water is generated in tank 10B (generation 3 step state).

[0054] After valve 20B is turned off, vacuum pump 90 is started and valves 30A and 40B are turned on, creating a four-step state in which tank 10A is at reduced pressure and tank 10B is at normal pressure (step S07).

[0055] In this way, UFB water can be produced simply by changing the state from normal pressure to reduced pressure, without the need to change the state from semi-reduced pressure to reduced pressure. Therefore, by repeatedly transferring UFB water between tanks 10A and 10B a set number of times (YES in step S08), high-concentration UFB water can be easily produced without any risk of contamination.

[0056] As described above, according to this embodiment, it is possible to reduce contamination from the outside and to efficiently produce UFB water with a higher concentration.

[0057] That is, UFB water can be produced while maintaining a closed state without transferring gas to the outside, such as by introducing new gas or discharging remaining gas (depressurized UFB production method). In this case, as UFB water is produced, the gas remaining in the source tank is sent to the destination tank to which the solution BW and gas have been transferred. In other words, the pressure inside the source tank is reduced by the intake of vacuum pump 90, and at the same time, the pressure inside the destination tank is forcibly returned to normal pressure by the exhaust of vacuum pump 90.

[0058] This makes it possible to easily create the pressure difference required to produce UFB water between tanks 10A and 10B without transferring gas to the outside, such as by introducing new gas or discharging remaining gas.

[0059] Moreover, it is possible to reduce the amount of gas consumed, which is suitable when using precious or dangerous gases.

[0060] Therefore, it becomes possible to more safely produce UFB water with a higher concentration containing a predetermined number of ultrafine bubbles while reducing the risk of external contamination and other issues.

[0061] In particular, since the system can be constructed using a small number of valves, it is possible to reduce costs and facilitate control for switching the valves.

[0062] It is also useful as a device for generating wafer cleaning fluids in the bio and semiconductor markets, where the effects of contamination must be avoided.

[0063] Other embodiments 5 is a schematic diagram showing an example of the configuration of a UFB water production system according to another embodiment of the present invention. Note that the same or similar reference numerals are used to designate the same parts as those in FIG. 1, and detailed explanations thereof will be omitted here.

[0064] In other embodiments, the UFB water generation system may be configured to include a raw water container 98 for storing raw water and a BW container 99 for storing solution BW, as shown in FIG. 5, or may be configured to include at least three tanks 10A, 10B, and 10C.

[0065] Specifically, for example, the UFB water generation system 1 shown in Figure 1 further includes a tank 10C, a solution valve 20C, a piping line 21C, vacuum valves 30C and 30D, an exhaust valve 40C, a solution drainage valve 40D, a gas-liquid mixed high concentration dissolved gasification nozzle 50C, a raw water supply valve 60B, a pressure gauge (vacuum gauge) 70C, a raw water container 98, a BW container 99, and the like.

[0066] In the case of a UFB water generation system configured in this manner, as shown in Figure 6A, for example, an initial state is first set in which tanks 10A, 10B, and 10C are at normal pressure, and then each of the preliminary step states 1-6 is set as the above-mentioned standby state and the state before generation begins.

[0067] That is, in setting the initial state (step S11), for example, the tanks 10A, 10B, and 10C are set to normal pressure. Also, raw water required for producing UFB water is introduced into the raw water container 98.

[0068] In this state, in the preliminary one step state (step S12), for example, the valves 20B, 20C, 30C, and 40E are turned on and the vacuum pump 90 is started, thereby temporarily reducing the pressure in all of the tanks 10A, 10B, and 10C.

[0069] Next, in the preliminary two-step state (step S13), for example, all valves 20A, 20B, 20C, 30A, 30B, 30C, 30D, 40A, 40B, 40C, 40D, 40E, 60A, and 60B are turned off and the vacuum pump 90 is stopped.

[0070] Next, in the preliminary three-step state (step S14), for example, only the valve 60B is turned on to set the tank 10C to a normal pressure state, and raw water is injected from the raw water container 98 into the tank 10C.

[0071] Next, in the preliminary 4-step state (step S15), for example, the valves 30C and 40E are turned on and the vacuum pump 90 is started, thereby reducing the pressure in the tank 10C and removing dissolved gases.

[0072] Next, in the preliminary 5-step state (step S16), for example, the valves 40C and 60A are turned on and the vacuum pump 90 is stopped. Then, the tank 10C, which has been brought to a normal pressure state, is filled with gas from the gas supply unit 80.

[0073] Next, in the preliminary 6-step state (step S17), for example, all the valves 20A, 20B, 20C, 30A, 30B, 30C, 30D, 40A, 40B, 40C, 40D, 40E, 60A, and 60B are turned off.

[0074] Thereafter, as shown in, for example, FIGS. 6B and 6C, the states of the steps 1 to 6 of generation for generating UFB water are set.

[0075] That is, in the first production step state (step S18), for example, valve 20A is turned on, which moves the solution BW and gas in tank 10C to tank 10A, thereby generating UFB water in tank 10A.

[0076] Next, in the second generation step state (step S19), for example, the valves 30C and 40A are turned on and the vacuum pump 90 is started, thereby bringing the tank 10A into a normal pressure state and the tank 10C into a reduced pressure state.

[0077] Next, in the production 3 step state (step S20), for example, the valve 20B is turned on, which moves the solution BW and gas in the tank 10A to the tank 10B, thereby producing UFB water in the tank 10B.

[0078] Next, in the fourth generation step state (step S21), for example, the valve 40B is turned on and the vacuum pump 90 is started, thereby bringing the tank 10A into a reduced pressure state and the tank 10B into a normal pressure state.

[0079] Next, in the fifth production step state (step S22), for example, valve 20C is turned on, which moves the solution BW and gas in tank 10B to tank 10C, thereby generating UFB water in tank 10C.

[0080] Next, in the sixth generation step state (step S23), for example, the valves 30B and 40C are turned on and the vacuum pump 90 is started, thereby bringing the tank 10B into a reduced pressure state and the tank 10C into a normal pressure state.

[0081] Then, by repeating each of these production step states 1-6 until a preset number of times is reached (YES in step S24), high-concentration UFB water can be easily produced in a closed state without any risk of contamination or the like.

[0082] The generated high-concentration UFB water is taken out through the steps of discharge 1-3 and end 1-2, as shown in FIG. 6C, for example, and prepared for the next generation.

[0083] That is, in the first discharge step state (step S25), for example, the valve 20A is turned on, which causes the production of UFB water in the tank 10A.

[0084] Next, in the second discharge step state (step S26), for example, the valves 30C and 40A are turned on and the vacuum pump 90 is started, thereby bringing the tank 10C into a reduced pressure state and the tank 10A into a normal pressure state.

[0085] Next, in the discharge 3 step state (step S27), for example, the valves 30D and 40D are turned on to move the solution BW from the tank 10A to the BW container 99, thereby extracting the UFB water.

[0086] Then, in the final one step state (step S28), for example, all valves 20A, 20B, 20C, 30A, 30B, 30C, 30D, 40A, 40B, 40C, 40D, 40E, and 60B except for valve 60A are turned on.

[0087] In this way, after the extraction of UFB water is completed and tanks 10A, 10B, and 10C, which have been brought to normal pressure, are emptied (YES in step S29), in the final 2-step state (step S30), for example, all valves 20A, 20B, 20C, 30A, 30B, 30C, 30D, 40A, 40B, 40C, 40D, 40E, 60A, and 60B are turned off in preparation for the next generation of UFB water.

[0088] In the case of this embodiment, it is possible to produce higher concentration UFB water more safely while reducing the risk of contamination and other problems that accompany the movement of gas with the outside, such as the introduction of new gas or the discharge of remaining gas.

[0089] Further embodiments 7 is a schematic diagram showing an example of the configuration of a UFB water production system 100 according to yet another embodiment of the present invention. Here, we will explain a case where UFB water BS is produced by utilizing the pressure difference between the pressurized and depressurized states of multiple (at least two) depressurized and pressurized tanks 110A, 110B and the dissolved concentration difference due to the pressurized and depressurized states.

[0090] 7, the UFB water generating system 100 of this embodiment includes one or the other of the decompression / pressurization tanks 110A, 110B in which the UFB water BS is temporarily stored by movement, and a decompression / pressurization pump (pressure setting unit) 190.

[0091] The pressure reducing / pressurizing pump 190 controls the pressure state inside the pressure reducing / pressurizing tanks 110A and 110B, and is connected to the pressure reducing pipe 102 on the intake side of the pressure reducing / pressurizing pump 190 and to the pressure increasing pipe 103 on the exhaust side.

[0092] The decompression pipe 102 is connected to the top of the decompression / pressurization tanks 110A and 110B via decompression valves 130A and 130B, respectively. The pressurization pipe 103 is connected to the top of the decompression / pressurization tanks 110A and 110B via pressurization valves 140A and 140B, respectively, and is connected to the outside (open air) via an exhaust valve 140E.

[0093] In addition, gas cylinders 180 filled with, for example, ozone gas (O3), hydrogen, oxygen, or medical gas are connected to the tops of the decompression and pressurization tanks 110A and 110B via gas pipes 101 and gas supply valves 160A and 160B, respectively.

[0094] UFB generation units 150A and 150B for generating UFB water BS are attached to the tops of the decompression and pressure tanks 110A and 110B, respectively, facing downward. The base ends of the UFB generation units 150A and 150B are connected to each other via UFB generation piping 104 and UFB generation valve 121.

[0095] The UFB generation units 150A, 150B are high-concentration dissolved gasification nozzles having a vaporization supply port with a gas-liquid mixing function that can dissolve the gas remaining in the reduced pressure and pressurization tanks 110A, 110B at a high concentration in the solution in the reduced pressure and pressurization tanks 110A, 110B.

[0096] The lower part of each of the reduced pressure and pressurization tanks 110A and 110B is connected to an inter-tank pipe 106. The inter-tank pipes 106 are connected to each other via an inter-tank solution stop valve 141, and are also connected to an intake / exhaust pipe 105, which is connected to a BS container 199 for storing UFB water BS, via a solution intake / exhaust valve 140D.

[0097] In the case of a UFB water generation system 100 configured as described above, first, with all valves 121, 130A, 130B, 140A, 140B, 140D, 140E, 141, 160A, and 160B turned off (closed), raw water required to generate UFB water BS is introduced into the BS container 199.

[0098] In this state, the pressure reducing valve 130A is turned on (open) and the pressure reducing / pressurizing pump 190 is started, thereby putting the pressure reducing / pressurizing tank 110A into a vacuum state.

[0099] After this, the pressure reducing valve 130A is turned off and the solution intake / exhaust valve 140D is turned on, and due to the pressure difference between the pressure inside the reduced pressure / pressurization tank 110A and the pressure inside the BS container 199 (normal pressure), the raw water inside the BS container 199 is taken into the reduced pressure / pressurization tank 110A via the intake / exhaust piping 105 and the inter-tank piping 106.

[0100] The raw water taken into the reduced pressure and pressurization tank 110A is stored in the reduced pressure and pressurization tank 110A by turning off the solution intake and discharge valve 140D and disconnecting the intake and discharge pipe 105 from the inter-tank pipe 106.

[0101] Next, the decompression valves 130A and 130B provided on the decompression pipe 102 are both turned on, and the decompression / pressurization pump 190 is started, thereby putting the decompression / pressurization tanks 110A and 110B into a vacuum state.

[0102] Then, when both gas supply valves 160A and 160B provided on gas pipe 101 are turned on, gas from gas cylinder 180 is filled into decompression / pressurization tanks 110A and 110B.

[0103] Next, after both gas supply valves 160A and 160B are turned off, both decompression valve 130B provided in decompression pipe 102 and pressurization valve 140A provided in pressurization pipe 103 are turned on. Then, by starting decompression / pressurization pump 190, the inside of decompression / pressurization tank 110A is pressurized (for example, about 0.1 MPa to 0.02 MPa), and the inside of decompression / pressurization tank 110B is decompressed (for example, about 0.1 MPa to 0.02 MPa).

[0104] In this state, UFB generation valve 121 is turned on, and the raw water in decompression / pressurization tank 110A is moved by UFB generation unit 150B to decompression / pressurization tank 110B via UFB generation piping 104. As this movement occurs, UFB water BS, in which gas is dissolved in the raw water, is generated due to the pressure difference between the decompression / pressurization tanks 110A and 110B in the pressurized / pressurized state and the difference in dissolved concentration due to the pressurized / pressurized state.

[0105] Then, when the pressures inside the decompression and pressurization tanks 110A and 110B become substantially the same, the UFB generation valve 121, the decompression valve 130B, and the pressurization valve 140A are all turned off.

[0106] Next, the pressure reducing valve 130A provided in the pressure reducing pipe 102 and the pressure increasing valve 140B provided in the pressure increasing pipe 103 are both turned on. Then, by starting the pressure reducing / pressurizing pump 190, the pressure inside the pressure reducing / pressurizing tank 110B is increased and the pressure inside the pressure reducing / pressurizing tank 110A is reduced.

[0107] In this state, the UFB generation valve 121 is turned on, and the UFB water BS in the reduced pressure / pressurization tank 110B is moved to the reduced pressure / pressurization tank 110A via the UFB generation piping 104 by the UFB generation unit 150A.

[0108] In this way, by repeatedly moving the UFB water BS between the reduced pressure and pressure tanks 110A and 110B according to the set number of times, it is possible to easily produce highly concentrated UFB water BS without the risk of contamination associated with the sliding action, as compared to when using a syringe.

[0109] As described above, this embodiment also makes it possible to more safely produce UFB water BS with a higher concentration containing a predetermined number of ultrafine bubbles while reducing the risk of contamination and the like.

[0110] Moreover, it is safe even when using special gases such as ozone in a clean environment, and large amounts of UFB water BS can be efficiently produced as the number of tanks increases.

[0111] The above describes one aspect of the present invention by illustrating an embodiment, but this is only an example, and the scope of the invention described in the claims can be modified in various ways without departing from the gist of the invention. [Explanation of symbols]

[0112] 1 UFB water generation system 10A, 10B, 10C tanks 11 Control section 20A, 20B, 20C Solution Valve 21A,21B Piping path 30A, 30B, 30C, 30D Vacuum valve 40A, 40B, 40C Exhaust valve 50A, 50B, 50C Gas-liquid mixed high concentration dissolved gasification nozzle 60A Gas Supply Valve 80 Gas supply unit 90 Vacuum pump (pressure setting part) 98 Raw water container 99 BW container 100 UFB Water Generation System 110A, 110B Decompression and pressurization tank 121 UFB generating valve 130A, 130B pressure reducing valve 140A, 140B pressure valve 140D Solution intake and discharge valve 141 Inter-tank solution stop valve 150A,150B UFB generation section 160A, 160B Gas supply valve 180 Gas Cylinder (Gas Supply Unit) 190 Pressure reducing / pressurizing pump (pressure setting part) 199 BS container BW solution (liquid) BS UFB Water

Claims

1. a plurality of tanks connected to each other via piping lines for temporarily storing the gas to be dissolved and the liquid in which the gas is dissolved; a pressure setting unit that sets a predetermined pressure difference between at least one of the plurality of tanks and another of the tanks that are connected via the piping; a control unit that controls the pressure setting unit to alternately switch the pressure in the one tank and the pressure in the other tank, and repeatedly moves the liquid between the one tank and the other tank through the piping, thereby generating bubble water containing a predetermined number of ultra-fine bubbles; Equipped with A bubble water generating device characterized in that the control unit controls the pressure setting unit so that, upon completion of the transfer of the liquid from one tank to the other tank, the gas remaining in the one tank is vacuumed and sent to the other tank.

2. 2. The bubble water generating device according to claim 1, wherein the pressure in the other tank is kept at a vacuum state and the pressure in the one tank is kept at normal pressure.

3. 3. The bubble water generating device according to claim 2, wherein the pressure in the one tank is set to normal pressure by introducing the dissolving gas from a gas supply unit only once.

4. 2. The bubble water generating device according to claim 1, wherein the pressure setting unit is configured by a vacuum pump.

5. 2. The bubble water generating device according to claim 1, wherein one of the three tanks is the one tank and one of the remaining tanks is the other tank.

6. a plurality of tanks connected to each other via piping lines for temporarily storing the gas to be dissolved and the liquid in which the gas is dissolved; a pressure setting unit that sets a predetermined pressure difference between at least one of the plurality of tanks and another of the tanks that are connected via the piping; a control unit that controls the pressure setting unit to alternately switch the pressure in the one tank and the pressure in the other tank, and repeatedly moves the liquid between the one tank and the other tank through the piping, thereby generating bubble water containing a predetermined number of ultra-fine bubbles; Equipped with A bubble water generating device characterized in that the control unit controls the pressure setting unit so that the internal pressure of one of the tanks is pressurized and the internal pressure of the other tank is reduced.

7. 7. The bubble water generating device according to claim 6, wherein the pressure setting unit is configured by a pressure reducing / pressurizing pump.

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