Coin-slot and ball-lock ceramic lift pin holder

Abstract

To provide a ceramic lift pin holder and a retainer mechanism that can be fabricated entirely from a ceramic material.SOLUTION: A first lift pin holder assembly 200 includes a base portion 202, and a stem portion including a ball lock 206 to hold a lift pin. A second lift pin holder assembly includes a base portion, and a stem portion including a fork lock mechanism to hold a lift pin. A slotted ring with coin-slot type slots is arranged on a base of a substrate support assembly. A plurality of the first or second lift pin holder assemblies is retained in the slots using retainers that surround the base portions of the lift pin holder assemblies. Each slot includes an aperture into which a T-shaped retainer is inserted. The top portion of the T-shaped retainer prevents the retainer and the lift pin holder assembly from sliding out of the slot.SELECTED DRAWING: Figure 3A

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of U.S. Provisional Application No. 62 / 939,252, filed November 22, 2019, the entire disclosure of which is incorporated herein by reference.

[0002] FIELD OF THE DISCLOSURE The present disclosure relates generally to substrate processing systems, and more particularly to a lift pin holder assembly for a substrate support assembly used in a processing chamber of a substrate processing system. [Background technology]

[0003] The background art provided herein is intended to provide a general background to the present disclosure, and the work of the inventors named herein, to the extent described in this background art, along with aspects of the description that would not normally be considered prior art at the time of filing, are not admitted expressly or impliedly as prior art to the present disclosure.

[0004] Substrate processing systems may be used to perform film deposition, etching, ashing, cleaning, or other processes on substrates, such as semiconductor wafers. Substrate processing systems typically include a processing chamber, a gas distribution apparatus, and a substrate support assembly. During processing, the substrate is positioned on the substrate support assembly. Various gas mixtures may be introduced into the processing chamber. Radio frequency (RF) plasma and / or heat may be used to activate chemical reactions.

[0005] Lift pins may be utilized to enable transfer and removal of substrates from a processing chamber using a robotic arm. Typically, the upper ends of the lift pins are located flush with or below the upper surface of the substrate support assembly. During substrate transfer or removal, the lift pins are raised relative to the upper surface of the substrate support assembly to lift the substrate and provide clearance between the substrate and the substrate support assembly. The clearance between the substrate and the substrate support assembly allows for insertion or removal of the end effector of the robotic arm.

[0006] The bottoms of the lift pins are positioned and held by lift pin holders, which are typically made of metal, which can cause metal contamination of the substrate during processing at high temperatures and / or with certain processing chemistries. Summary of the Invention

[0007] The lift pin holder assembly includes a base portion, a stem portion, and a top portion. The base portion includes a cavity at the center of the base portion. The cavity extends along the height of the base portion. The stem portion extends perpendicularly from the base portion along the height of the base portion. The cavity extends through the center of the stem portion along the height of the stem portion. The centers of the base portion and the stem portion are collinear. The stem portion includes a ball lock disposed at its distal end proximate to the portion of the cavity adjacent to the distal end of the stem portion. The top portion surrounds and is retained around the stem portion and includes an opening adjacent to the distal end of the stem portion that aligns with the cavity.

[0008] In other features, the base portion, the stem portion, and the top portion are made of a ceramic material.

[0009] In other features, the lift pin holder assembly further includes a lift pin having a first end inserted into a cavity in the stem portion through the opening in the top portion. The first end includes a circular groove. The lift pin is retained in the cavity in the stem portion by a ball lock locked in the circular groove. The lift pin has a second end extending outward from the opening in the top portion along the height of the stem portion.

[0010] In other features, the base portion is cylindrical and has a first diameter, and the stem portion comprises a first cylindrical portion, a second cylindrical portion, and a ring-shaped structure. The first cylindrical portion extends perpendicularly from the base portion along the height of the stem portion and has a second diameter smaller than the first diameter. The second cylindrical portion extends perpendicularly from the first cylindrical portion along the height of the stem portion and has a third diameter larger than the second diameter but smaller than the first diameter. The ring-shaped structure surrounds the second cylindrical portion.

[0011] In another feature, the second cylindrical portion includes a slot for the ball lock, the slot being located on an opposite side of the ring-shaped structure from the first cylindrical portion.

[0012] In another feature, the ring-shaped structure is disposed about a middle portion of the second cylindrical portion.

[0013] In other features, the top portion includes a circular portion and a hollow cylindrical portion. The circular portion includes an opening at the center of the circular portion. The hollow cylindrical portion extends perpendicularly from the circular portion along the height of the stem portion. The hollow cylindrical portion engages with a second cylindrical portion, and the ring-shaped structure surrounds the second cylindrical portion.

[0014] In other features, the base portion has a first height and the stem portion has a second height greater than the first height.

[0015] In other features, the base portion is cylindrical and has a first diameter, and the top portion is cylindrical and has a second diameter less than or equal to the first diameter and a third height less than the second height and greater than the first height.

[0016] In other features, the cavity is cylindrical and has a first diameter, the opening is circular and has a second diameter substantially equal to the first diameter, and the cavity and opening are aligned along a height of the stem portion.

[0017] In other features, the cavity is cylindrical and has a first diameter. The opening is circular and has a second diameter. The cavity and opening are aligned along the height of the stem. The lift pin is cylindrical and has a third diameter smaller than the first and second diameters.

[0018] In still other features, a lift pin holder assembly includes a base portion, a stem portion, and a top portion. The base portion includes a cavity at the center of the base portion. The cavity extends along the height of the base portion. The stem portion extends perpendicularly from the base portion along the height of the base portion. The stem portion is C-shaped. The stem portion defines a hollow portion extending through the center of the stem portion along the height of the stem portion. The hollow portion is coincident with the cavity. The centers of the base portion and the stem portion are collinear. The top portion surrounds the stem portion and includes an opening adjacent the distal end of the stem portion that is coincident with the cavity.

[0019] In other features, the base portion, the stem portion, and the top portion are made of a ceramic material.

[0020] In other features, the lift pin holder assembly further includes a lift pin having a first end inserted into the hollow portion of the stem portion through the opening in the top portion. The first end includes a circular groove. The lift pin is retained within the hollow portion by an inner radial portion at the distal end of the stem portion locking into the circular groove. The lift pin has a second end extending outward from the opening in the top portion along the height of the stem portion.

[0021] In other features, the base portion is cylindrical and the top portion comprises a circular portion, a cylindrical portion, and a second cavity. The circular portion has an opening at its center. The cylindrical portion extends perpendicularly from the circular portion along the height of the stem portion. The second cavity in the cylindrical portion engages with the stem portion.

[0022] In other features, the base portion is cylindrical and has a first diameter and a first height, and the stem portion has a second diameter smaller than the first diameter and a second height greater than the first height.

[0023] In other features, the top portion is cylindrical, has a third diameter less than or equal to the first diameter and substantially equal to the second diameter, and has a third height less than the second height and greater than the first height.

[0024] In other features, the cavity is cylindrical and has a first diameter, the opening is circular and has a second diameter substantially equal to the first diameter, and the cavity and opening are aligned along a height of the stem portion.

[0025] In other features, the cavity is cylindrical and has a first diameter. The opening is circular and has a second diameter. The cavity and opening are aligned along the height of the stem. The lift pin is cylindrical and has a third diameter smaller than the first and second diameters.

[0026] In yet another feature, an apparatus includes an annular ring and a plurality of slots disposed on an upper surface of the annular ring. The annular ring has an outer diameter and an inner diameter. The annular ring has a top surface and a bottom surface that define a thickness of the annular ring. Each of the slots has a depth that is less than the thickness of the annular ring. Each of the slots is defined by two parallel lines and an arc-shaped element. The two parallel lines extend in depth from the outer diameter of the annular ring toward the inner diameter of the annular ring in a plane parallel to the upper surface of the annular ring. Distal ends of the two parallel lines bend toward each other at an acute angle. The arc-shaped element extends in depth from the distal ends of the two parallel lines toward the inner diameter of the annular ring in a plane parallel to the inner diameter of the annular ring.

[0027] In another feature, the top of each of the slots is flush with the top surface of the annular ring.

[0028] In another feature, the annular ring is made of a ceramic material.

[0029] In other features, the apparatus further includes a lift pin holder assembly disposed within one of the plurality of slots. The lift pin holder assembly includes a cylindrical base portion and a step portion. The cylindrical base portion is disposed within the slot. A stem portion extends perpendicularly from the cylindrical base portion along a height of the lift pin holder assembly and holds a lift pin inserted into the stem portion.

[0030] In another feature, the stem portion includes a ball lock at its distal end that locks into a circular groove on the lift pin.

[0031] In another feature, the stem includes an inner radial portion at its distal end that locks into a circular groove on the front lift pin.

[0032] In another feature, the apparatus further includes a retainer surrounding the cylindrical base portion to hold the lift pin holder assembly in the slot, the retainer being cylindrical and having a diameter equal to the distance between the two parallel lines of the slot and an outer periphery that engages the arcuate elements of the slot.

[0033] In other features, the retainer includes a circular portion and a cylindrical portion. The circular portion is parallel to the top surface of the annular ring. The circular portion includes an opening at its center through which the stem portion and lift pin of the lift pin holder assembly extend vertically away from the top surface of the annular ring along the height of the lift pin holder assembly. The cylindrical portion extends vertically from the circular portion toward the top surface of the annular ring. The cylindrical portion surrounds the cylindrical base portion of the lift pin holder assembly.

[0034] In other features, the device further includes a hole and a T-shaped element. The hole is disposed within the slot proximate an intersection of one of the two parallel lines and the outer diameter of the annular ring. The T-shaped element is perpendicular to the upper front surface of the annular ring and has a first portion inserted into the hole. The T-shaped element is parallel to the upper surface of the annular ring and perpendicular to the first portion and has a second portion extending in a radially outward path of the retainer that holds the lift pin holder assembly within the slot.

[0035] In other features, the first portion of the T-shaped element is cylindrical and the second portion of the T-shaped element is rectangular.

[0036] In another feature, the apparatus further comprises a substrate support assembly, wherein the annular ring is disposed on a base of the substrate support assembly.

[0037] Further areas of applicability of the present disclosure will become apparent from the detailed description, claims, and drawings. The detailed description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the present disclosure. [Brief explanation of the drawings]

[0038] The present disclosure will become more fully understood from the detailed description and accompanying drawings set forth below.

[0039] [Figure 1A] FIG. 1 is a diagram showing an example of a substrate processing system. [Figure 1B] FIG. 1 is a diagram showing an example of a substrate processing system.

[0040] [Figure 2] FIG. 2 illustrates an example of a substrate support assembly that may be used in the substrate processing system of FIGS. 1A and 1B.

[0041] [Figure 3A] 3 illustrates a ball-lock type ceramic lift pin holder assembly for use with the substrate support assembly of FIG. 2. [Figure 3B]3 illustrates a ball-lock type ceramic lift pin holder assembly for use with the substrate support assembly of FIG. 2. [Figure 3C] 3 illustrates a ball-lock type ceramic lift pin holder assembly for use with the substrate support assembly of FIG. 2. [Figure 3D] 3 illustrates a ball-lock type ceramic lift pin holder assembly for use with the substrate support assembly of FIG. 2.

[0042] [Figure 4A] 3 illustrates a fork-lock type ceramic lift pin holder assembly for use with the substrate support assembly of FIG. 2. [Figure 4B] 3 illustrates a fork-lock type ceramic lift pin holder assembly for use with the substrate support assembly of FIG. 2.

[0043] [Figure 5A] 3 illustrates a ring-shaped platform with a coin-slot type structure that can accommodate ball-lock and fork-lock type lift pin holder assemblies for use with the substrate support assembly of FIG. 2. FIG. [Figure 5B] 3 illustrates a ring-shaped platform with a coin-slot type structure that can accommodate ball-lock and fork-lock type lift pin holder assemblies for use with the substrate support assembly of FIG. 2. FIG. [Figure 5C] 3 illustrates a ring-shaped platform with a coin-slot type structure that can accommodate ball-lock and fork-lock type lift pin holder assemblies for use with the substrate support assembly of FIG. 2. FIG.

[0044] [Figure 6A] 5A-5C illustrate examples of retainers that can be used to hold ball-lock type lift pin holder assemblies within the coin slot type structure shown in FIGS. 5A-5C. [Figure 6B]5A-5C illustrate examples of retainers that can be used to hold the fork-lock type lift pin holder assembly within the coin slot type structure shown in FIGS. 5A-5C.

[0045] [Figure 7] 6A and 6B from sliding out of the coin slot type structure shown in FIGS. 5A-5C.

[0046] In the drawings, the same numbers may be used to identify similar and / or identical elements. DETAILED DESCRIPTION OF THE INVENTION

[0047] The present disclosure provides ceramic lift pin holders and retention mechanisms that can be fabricated entirely from ceramic materials, eliminating the need for any flexible materials. Specifically, the present disclosure provides mechanical designs that allow the lift pin holder to be installed by feel using only one hand, without the need to see the parts and their engagement mechanism. One of the designs described snaps into a regular-sized engagement holder, creating a puzzle-like retention lock on the lift pin holder.

[0048] Current machine designs used for this purpose use flexible metal spring retention designs to enable a one-handed installation process. The metal composition of these springs is prone to severe corrosion when exposed to processing chemicals commonly present in processing chambers. Protective coatings applied to these springs and metal components can delay the onset of this corrosion, but are typically consumed over time and only slow the corrosion degradation. The resulting corrosion forms metal-containing frames and particles that can contaminate deposited films or lead to mechanical defects on the wafer. Continued use can eventually lead to more serious failures where the wafer handling pins no longer hold and prevent wafer placement or movement.

[0049] The new design according to the present disclosure replaces all metal components with ceramic components. The new design replicates the one-handed installation feature with ceramic parts. The new design allows an interference locking mechanism to work with a non-sliding mechanism that locks into place by expanding and locking into place as described below.

[0050] This disclosure is organized as follows. First, an example of a substrate processing system is illustrated and described with reference to FIGS. 1A and 1B. An example of a substrate support assembly including a lift pin holder assembly is illustrated and described with reference to FIG. 2. A ball-lock type ceramic lift pin holder assembly is illustrated and described with reference to FIGS. 3A-3D. A fork-lock type ceramic lift pin holder assembly is illustrated and described with reference to FIGS. 4A-4B. A ring-shaped platform with a coin slot-type structure to which ball-lock type and fork-lock type lift pin holder assemblies can be attached is illustrated and described with reference to FIGS. 5A-5C. An example of a retainer that can be used to hold ball-lock type and fork-lock type lift pin holder assemblies within the coin slot-type structure is illustrated and described with reference to FIGS. 6A and 6B. A T-shaped retainer that can prevent the retainer from sliding out of the coin slot-type structure is illustrated and described with reference to FIG. 7.

[0051] 1A shows a substrate processing system 10 including a process chamber 12 that houses other components of the substrate processing system 10 and confines an RF plasma (if utilized). The substrate processing system 10 includes a showerhead 14 and a substrate support assembly 16. A substrate 18 is disposed on the substrate support assembly 16. The showerhead 14 introduces and distributes process gases during processing of the substrate 18.

[0052] If a plasma is used, the plasma can be a direct plasma or a remote plasma. In this example, an RF generation system 30 generates and outputs an RF voltage to either the showerhead 14 or the substrate support assembly 16 (the other is DC grounded, AC grounded, or floating). By way of example only, the RF generation system 30 may include an RF voltage generator 32 that generates an RF voltage that is supplied to the showerhead 14 or the substrate support assembly 16 by a matching network 34. Alternatively, the plasma may be supplied by a remote plasma source 36.

[0053] A gas delivery system 40 includes one or more gas sources 42-1, 42-2, ..., and 42-N (collectively, gas sources 42), where N is a positive integer. The gas sources 42 deliver one or more etching gas mixtures, precursor gas mixtures, cleaning gas mixtures, ashing gas mixtures, etc., to the processing chamber 12. Vaporized precursors may also be used. The gas sources 42 are connected to a manifold 48 by valves 44-1, 44-2, ..., and 44-N (collectively, valves 44) and mass flow controllers 46-1, 46-2, ..., and 46-N (collectively, mass flow controllers 46). The output of the manifold 48 is delivered to the processing chamber 12. By way of example only, the output of the manifold 48 is delivered to the showerhead 14.

[0054] A heater 50 may be connected to a heater coil (not shown) disposed within the substrate support assembly 16. The heater 50 may be used to control the temperature of the substrate support assembly 16 and the substrate 18. Valves 60 and pumps 62 may be used to evacuate reactants from the processing chamber 12. A controller 70 may be used to control components of the substrate processing system 10. By way of example only, the controller 70 may be used to control the flow of process gases, monitor process parameters (temperature, pressure, power, etc.), ignite and extinguish a plasma, remove reactants, etc.

[0055] 1B shows another example of a substrate processing chamber 80 including an upper chamber 82 and a lower chamber 84 containing a substrate support assembly 16. An inductive coil 86 is disposed around the upper chamber 82. An RF generation system 30 outputs RF power to the inductive coil 86 to generate a plasma 88 within the upper chamber 82. A showerhead 90 filters ions and delivers radicals to the lower chamber 84. The showerhead 90 may also be used to deliver a secondary gas (such as a precursor gas) from a gas delivery system 40-2 to the lower chamber 84.

[0056] Although two example substrate processing systems are shown, the lift pin holder assemblies described herein may be used in any other type of substrate processing system.

[0057] FIG. 2 shows substrate support assembly 16 in further detail. Substrate support assembly 16 may be disposed in a processing chamber (such as the chamber shown in FIGS. 1A and 1B or any other substrate processing chamber). Substrate support assembly 16 includes a substrate support plate 110, support posts 112, and a base 114. Base 114 may include a ring-shaped platform (also referred to as a lift ring) with a coin-slot-type structure (shown in FIGS. 5A-5C) to which the ball-lock and fork-lock holder assemblies of the present disclosure may be attached. In some examples, support posts 112 move relative to base 114.

[0058] A lift pin holder assembly 120 (shown generally here and more specifically in Figures 3A-4B below) is positioned below the substrate support plate 110 on a base 114. The lift pin holder assembly 120 includes a base portion 126, lift pins 130, and a lift pin holder 134. In some examples, the lift pin holder assembly 120 and the lift pins 130 are generally cylindrical. The lift pins 130 include a circular groove 131 that is useful for locking the lift pins 130 into the lift pin holder assembly, which will be described below with reference to Figures 3A-4B below.

[0059] One or more guide elements 140 may be used to assist in guiding the lift pins 130. In some examples, the guide elements 140 comprise cylindrical supports 143 attached to the bottom surface of the substrate support plate 110. The cylindrical supports 143 comprise holes 145 for receiving central portions of the lift pins 130. Similarly, the substrate support plate 110 comprises holes 141 for receiving upper portions of the lift pins 130.

[0060] In use, the posts 112 and / or base 114 may be raised or lowered relative to the substrate support plate 110 to vary the height of the upper ends of the lift pins 130 relative to the upper surface of the substrate support plate 110. As a result, the lift pins 130 are positioned to lift the substrate 122 above the substrate support plate 110 or to receive the substrate 122 loaded onto the substrate support plate 110. A gap is provided between the substrate 122 and the upper surface of the substrate support plate 110, as shown at 148.

[0061] Figures 3A-7 detail various examples and components of the lift pin holder assembly 120 and retainer. Figures 3A-3D show a ball-lock holder assembly. Figures 4A and 4B show a fork-lock holder assembly. Figures 5A-5C show a ring-shaped platform (also called a lift ring) with a coin-slot-type structure to which the ball-lock and fork-lock holder assemblies can be attached. Figures 6A and 6B show a retainer that can hold the ball-lock and fork-lock holder assemblies within the coin-slot-type structure. Figure 7 shows a T-shaped retainer structure that can prevent the retainer from sliding out of the coin-slot-type structure.

[0062] All of the structures, assemblies, and components shown in Figures 3A-7 are made from non-metallic materials. For example, all of the structures, assemblies, and components shown in Figures 3A-7 are made from ceramic materials. Additionally, the lift pins 130 are also made from non-metallic materials.

[0063] 3A-3D show ball-lock holder assembly 200. In FIGS. 3A and 3B, ball-lock holder assembly 200 includes a base portion 202 and a top portion (also referred to as a cap) 204. Base portion 202 includes a ball lock 206 for locking lift pin 130 when lift pin 130 is inserted into base portion 202, as described below. Top portion 204 is attached to base portion 202 by sliding top portion 204 downwardly over ball lock 206. Once top portion 204 is slid over ball lock 206, top portion 204 is locked to base portion 202 by a ring-shaped structure (element 218, described below) that protrudes radially from the stem of the base portion and engages with a corresponding element 234 on top portion 204, as described below.

[0064] Figure 3A shows ball-lock holder assembly 200 with top portion 204 not fully attached (i.e., unlocked) to base portion 202. Figure 3B shows ball-lock holder assembly 200 with top portion 204 fully attached (i.e., locked) to base portion 202.

[0065] With the top portion 204 fully attached (i.e., locked) to the base portion 202 (i.e., when elements 218 and 234 of the base portion 202 and top portion 204 are engaged), the lift pin 130 can be inserted into the ball-lock holder assembly 200 through the opening 208 in the top portion 204. After the lift pin 130 is inserted downward toward the base portion 202 through the opening 208, it is locked to the ball-lock holder assembly 200 by slightly lifting the top portion 204. A ring-shaped groove 131 (shown in FIG. 2 ) around the lift pin 130 slides over and locks onto the ball lock 206. To unlock and release the lift pin 130 from the ball-lock holder assembly 200, the top portion 204 is slightly lifted up and the lift pin 130 is removed from the ball-lock holder assembly 200. The ring-shaped groove 131 around the lift pin 130 is unlocked and released from the ball lock 206 .

[0066] Figure 3C shows in more detail the base portion 202 of the ball-lock holder assembly 200. Figure 3C shows various views of the base portion 202. Although the base portion 202 is described geometrically below in terms of (i.e., as comprising) various parts and structures, the base portion 202 is one piece (i.e., a single, integral structure).

[0067] The base portion 202 includes a first cylindrical portion 210 having a first diameter d1. The first cylindrical portion 210 defines a lower portion (or base) of the base portion 202. The base portion 202 further includes a second cylindrical portion 212 having a second diameter d2 extending perpendicularly from the first cylindrical portion 210 (i.e., along the height of the base portion 202 or the height of the ball-lock holder assembly 200), where d2 <d1である。

[0068] The base portion 202 further includes a third cylindrical portion 214 having a diameter d3 extending coaxially from the second cylindrical portion 212 (i.e., perpendicular to the first cylindrical portion 210 and along the height of the base portion 202 or the height of the ball-lock holder assembly 200), where d1>d3>d2. The third cylindrical portion 214 is longer (i.e., has a greater height) than the second cylindrical portion 212.

[0069] The base portion 202 further includes a receptacle (or slot) 216 for the ball lock 206 at the distal end of the third cylindrical portion 214. That is, the third cylindrical portion 214 includes the receptacle 216 at its distal end. The receptacle 216 is shown in detail at 222. The ball lock 206 is disposed within the receptacle 216.

[0070] The base portion 202 further includes a ring-shaped structure 218 having a diameter d4 that surrounds a central portion of the third cylindrical portion 214, where d1 > d4 > d3. The ring-shaped structure 218 extends or protrudes generally radially outward (i.e., perpendicular to the height of the base portion 202 or the height of the ball-lock holder assembly 200) from a midpoint of the third cylindrical portion 214. The ring-shaped structure 218 is adjacent to the receptacle 216. The first and second cylindrical portions 210, 212 are on opposite sides of the ring-shaped structure 218 from the receptacle 216.

[0071] Base portion 202 is hollow in the center, with a cylindrical cavity (i.e., hole) 220 centrally located along the length (i.e., height) of base portion 202. That is, cylindrical cavity 220 passes through the centers of elements 210, 212, 214, and 218 of base portion 202 along the length (i.e., height) of base portion 202.

[0072] Ball lock 206 is disposed within receptacle 216 and is adjacent to or proximate a portion of cylindrical cavity 220 near the distal end of third cylindrical portion 214 of base portion 202. Cylindrical cavity 220 receives lift pin 130 when lift pin 130 is inserted into ball-lock holder assembly 200 through opening 208 in top portion 204 (shown in FIGS. 3A and 3B).

[0073] Accordingly, base portion 202 may be generally described as comprising first cylindrical portion 210 and stem portion 211, which includes elements 212-218. That is, elements 212-218 may be collectively referred to as stem portion 211 of base portion 202. Stem portion 211 extends perpendicularly from first cylindrical portion 210 along the height of base portion 202. Cylindrical cavity 220 extends through the centers of elements 210 and 211 along the height of base portion 202. Ball-lock 206 and its receptacle 216 are located at the distal end of stem portion 211 and are adjacent to the portion of cylindrical cavity 220 near the distal end of stem portion 211. Again, elements 210-220 are integral with base portion 202 and define base portion 202 as a single unit.

[0074] 3D shows the top portion 204 of the ball-lock holder assembly 200 in further detail. The top portion 204 is cylindrical and includes a plurality of hollow structures that mate with the third cylindrical portion 214 and ring-shaped structure 218 of the base portion 202. Again, while the top portion 204 is described geometrically below in terms of (i.e., as including) various parts and structures, the top portion 204 is one piece (i.e., a single, integral structure).

[0075] The outer diameter of the top portion 204 may be less than d1. The height of the top portion 204 is greater than the height of the first cylindrical portion 210 of the base portion 202 and less than the combined height of the second and third cylindrical portions 212, 214 of the base portion 202 (i.e., less than the height of the stem portion 211).

[0076] The top portion 204 includes an opening 208. The opening 208 has a diameter a1 that matches the diameter of the lift pin 130. The top portion 204 includes a first cylindrical hollow portion 230 having a diameter a1 that extends from the opening 208 along the center of the top portion 204 (i.e., along the cylindrical axis or height) and the first cylindrical hollow portion 230 has a diameter a1. The top portion 204 further includes a second cylindrical hollow portion 232 having a diameter a2 that extends from a distance x1 from the opening 208 along the center of the top portion 204 (i.e., along the cylindrical axis or height).

[0077] The top portion 204 further includes a third cylindrical hollow portion 234 having a diameter a3 that enlarges (i.e., extends radially or perpendicular to the height of the top portion 204) the intermediate portion of the second cylindrical hollow portion 232, where a3 > a2. The third cylindrical hollow portion 234 engages with and surrounds the ring-shaped structure 218 of the base portion 202 when the top portion 204 is attached and locked to the base portion 202. The opening 208 aligns with a cylindrical cavity (i.e., hole) 220 near the top of the base portion 202 when the top portion 204 is attached and locked to the base portion 202.

[0078] The first, second, and third cylindrical hollows 230, 232, 234 of the top portion 204 define a single hollow or cavity in the top portion 204. The single hollow or cavity in the top portion 204 extends from an opening 208 at one end (upper end) of the top portion 204 to the other end (lower end) of the top portion 204.

[0079] 4A and 4B show a fork lock holder assembly 300. In FIGS. 4A and 4B, the fork lock holder assembly 300 includes a base portion 302 and a top portion (also referred to as a cap) 304. Before attaching the top portion 304 to the base portion 302, a lift pin 130 is inserted through an opening 306 in the center of the top portion 304. The top portion 304 is attached to the base portion 302 by sliding the top portion 304, along with the lift pin 130, downward onto the base portion 302. The top portion 304 is then slid downward on the lift pin 130 toward the base portion 302. The lift pin 130 is locked to the base portion 302 and remains locked to the base portion 302, as will be described later.

[0080] After the top portion 304 is attached to the base portion 302, the fork-lock holder assembly 300 appears externally similar to the ball-lock holder assembly 200 shown in Figure 3B. Therefore, a view of the fork-lock holder assembly 300 with the top portion 304 attached to the base portion 302 is not shown again for simplicity.

[0081] To remove the lift pin 130 from the fork lock holder assembly 300, the top portion 304 is pulled up and away from the base portion 302. Once the top portion 304 is pulled up and away from the base portion 302, the lift pin 130 is unlocked from the base portion 302 (i.e., from the fork lock holder assembly 300) and can be removed from the base portion 302.

[0082] Figure 4A shows in more detail the base portion 302 of the fork lock holder assembly 300. Figure 4A shows various views of the base portion 302. Although the base portion 302 is geometrically described below in terms of (i.e., as comprising) various elements, the base portion 302 is one piece (i.e., a single, integral structure).

[0083] The base portion 302 includes a cylindrical portion 310 having a diameter b1. The cylindrical portion 310 defines a lower portion (or base) of the base portion 302. The base portion 302 includes a slot 312 for receiving the lift pin 130. The slot 312 extends vertically from the cylindrical portion 310 (i.e., along the height of the base portion 302 or the height of the fork lock holder assembly 300). The slot 312 is generally a C-shaped structure that defines a cavity 314 in which the lift pin 130 is received and retained. The slot 312 is generally a hollow, circular or oval tubular structure, with a portion of the tubular structure cut out along the length (i.e., height) of the slot 312 such that the slot 312 has a C-shaped structure. The cavity 314 extends through the slot 312 into the cylindrical portion 310. The height of the slot 312 is greater than the height of the cylindrical portion 310. A circle drawn around the slot 312 has a diameter b 2 that is smaller than the diameter b 1 of the cylindrical portion 310 of the base portion 302 .

[0084] Detail B in FIG. 4A shows the design of slot 312, which allows lift pin 130 to be inserted and retained in base portion 302 (i.e., in fork lock holder assembly 300). Slot 312 has a series of radii that allow lift pin 130 to be inserted offset from the centerline of base portion 302 and then slid toward the centerline. At its distal end (i.e., the end opposite cylindrical portion 310), slot 312 has a smaller (inner) radius or inner radial portion that locks into ring-shaped groove 131 around lift pin 130 (shown in FIG. 2). The inner radius or inner radial portion near the top of slot 312 engages with ring-shaped groove 131 on lift pin 130, locking lift pin 130 within slot 312 and base portion 302. The sliding surface of slot 312 has a radius that matches the insertion portion of slot 312 and is chamfered both above and below to guide lift pin 130 into locking relative to base portion 302. The outer radius of slot 312 matches the inner radius of top portion 304 so that top portion 304 slides down slot 312, retaining lift pin 130 within cavity 314 within slot 312. Again, elements 310-314 are integral with base portion 302 and define base portion 302 as a single piece.

[0085] 4B shows the top portion 304 of the fork lock holder assembly 300 in more detail. The top portion 304 is cylindrical and includes a hollow structure that engages with the slot 312 in the base portion 302. Again, although the top portion 304 is described geometrically below in terms of (i.e., as comprising) various elements, the top portion 304 is one piece (i.e., a single, integral structure).

[0086] The outer diameter of the top portion 304 may be smaller than the diameter b1 of the cylindrical portion 310. The height of the top portion 304 is smaller than the height of the slot 312 in the base portion 302.

[0087] The top portion 304 includes an opening 306. The opening 306 has a diameter a1 that corresponds to the diameter of the lift pin 130. The top portion 304 includes a first cylindrical hollow portion 330 having a diameter a1 that extends from the opening 306 along the center of the top portion 304 (i.e., along the cylindrical axis or height) of the top portion 304. The top portion 304 also includes a second cylindrical hollow portion 332 having a diameter p1 that extends a distance y1 from the opening 306 along the center of the top portion 304 (i.e., along the cylindrical axis or height), where p1 > a1 and p1 = b2. The second cylindrical hollow portion 332 engages with and surrounds the slot 312 in the base portion 302 when the top portion 304 is attached to the base portion 302. The opening 306 aligns with a portion of the cavity 314 near the top of the slot 312 when the top portion 304 is attached to the base portion 302.

[0088] The first and second cylindrical hollows 330 and 332 in the top portion 304 define a single hollow or cavity in the top portion 304. The single hollow or cavity in the top portion 304 extends from an opening 306 at one end (upper end) of the top portion 304 to the other end (lower end) of the top portion 304.

[0089] 5A-5C illustrate a slotted ring (also referred to as a lift ring) 400 that may be included in the base 114 of the substrate support assembly 16 shown in FIG. 2. In FIG. 5A, the slotted ring 400 includes a plurality of coin slot-shaped structures 402. The coin slot-shaped structures 402 are designed to hold the lift pin holder assemblies shown in FIGS. 3A-4B and are hereafter referred to as slots 402. The number of slots 402 is equal to the number of lift pins 130 used in the substrate support assembly 16. FIG. 5B illustrates a detail for attaching the slotted ring 400 to the base 114 of the substrate support assembly 16 at Detail A. FIG. 5C illustrates the slots 402 in further detail.

[0090] The slotted ring 400 is annular and has an inner diameter and an outer diameter. Each slot 402 is defined by two parallel lines extending inward from the outer diameter of the slotted ring 400 to approximately halfway (i.e., to the midpoint) of the distance between the inner and outer diameters of the slotted ring 400. The distal ends (i.e., the inwardly extending ends) of the two parallel lines, opposite the ends that terminate at the outer diameter of the slotted ring 400, are curved inward toward each other at an acute angle. Each slot 402 is further defined by an arc-shaped or C-shaped element having ends that terminate at the curved ends of the two parallel lines. The curved portion of the arc-shaped or C-shaped element extends toward the inner diameter of the slotted ring 400.

[0091] For each slot 402, a portion of the slotted ring 400 bounded by two parallel lines, an arc-shaped or C-shaped element, and the portion of the outer diameter between the two parallel lines is removed (carved or excavated) from the slotted ring 400 to form a slot 402 with a uniform depth. For example, the slot 402 may be formed by machining or etching away the portion within the bounds from the top surface of the slotted ring 400. The depth h of each slot 402 is less than the thickness of the slotted ring 400. The top of each slot 402 is flush with the top surface of the slotted ring 400. The slot 402 is flush with the slotted ring 400.

[0092] As will be described later, a retainer, shown in Figures 6A and 6B, which can hold the lift pin holder assembly shown in Figures 3A-4B, is slid radially from the outer diameter to the inner diameter of the slotted ring 400 into these slots 402.

[0093] In each slot 402, a hole 404 is formed adjacent to one of the two parallel lines and adjacent to the outer diameter of the slotted ring 400. The hole 404 is formed adjacent to the intersection or corner of one of the two parallel lines and the outer diameter of the slotted ring 400.

[0094] As will be described later, in order to prevent the retainers shown in FIGS. 6A and 6B from sliding radially outward (from the inner diameter to the outer diameter of the slotted ring 400) and disengaging from the slots 402, the T-shaped retainer shown in FIG. 7 may be inserted into the holes 404.

[0095] FIGS. 6A and 6B show retainers that can hold these assemblies when the lift pin holder assemblies shown in FIGS. 3A - 4B are slid into the slots 402 together with the retainers. FIG. 6A shows a retainer 500 for the ball lock holder assembly 200 shown in FIGS. 3A - 3D. FIG. 6B shows a retainer 550 for the fork lock holder assembly 300 shown in FIGS. 4A and 4B.

[0096] In FIG. 6A, the retainer 500 for the ball lock holder assembly 200 is cylindrical. FIG. 6A shows various views of the base portion retainer 500. The retainer 500 is geometrically described below in terms of various elements (i.e., as having them), but the retainer 500 is one part (i.e., a single integral structure).

[0097] The retainer 500 is defined by a hollow cylinder 502 of diameter c1 that extends vertically (i.e., along the height of the retainer 500) from an annular upper surface 504. The annular upper surface 504 is perpendicular to the hollow cylinder 502 (i.e., perpendicular to the height of the retainer 500) and has a circular opening 506. The annular upper surface 504 has an outer diameter c1 and an inner diameter c2, where c1 > d1 > c2. That is, the hollow cylinder 502 has an outer diameter c1 > d1, and the circular opening 506 has a diameter c2 < d1.

[0098] The retainer 500 includes an annular ring 508 at the distal end of the hollow cylinder 502. The annular ring 508 extends radially (i.e., perpendicular to the height of the retainer 500) from the distal end of the hollow cylinder 502 opposite the end that extends from the annular top surface 504. The annular ring 508 has an inner diameter c1 and an outer diameter that closely matches the distance between the two parallel lines that define each of the slots 402. The annular ring 508 has a thickness or height t that closely matches the depth h of the slots 402. Thus, the retainer 500 can slide radially into the slots 402. The annular ring 508 (and the retainer 500) have an outer periphery that engages with an arcuate or C-shaped element of the slots 402.

[0099] Again, elements 502-508 are integrated into retainer 500 and define retainer 500 as a single piece. The height of retainer 500 (i.e., the height of hollow cylinder 502) is greater than the height of base portion 202 of ball-lock holder assembly 200. The height of retainer 500 is less than the height of ball-lock holder assembly 200.

[0100] Because c1 > d1 > c2, retainer 500 can be slid off top portion 204 of ball-lock holder assembly 200 after top portion 204 is attached to base portion 202 of ball-lock holder assembly 200 (i.e., after ball-lock holder assembly 200 is fully assembled). Furthermore, because c1 > d1 > c2, after retainer 500 is slid down ball-lock holder assembly 200 and into slot 402, base portion 202 cannot be pulled out of circular opening 506 by pulling on top portion 204 protruding from circular opening 506. Within slot 402, retainer 500 covers base portion 202 of ball-lock holder assembly 200. The height of retainer 500 is greater than the depth h of slot 402 and the height of base portion 202.

[0101] In FIG. 6B, the retainer 550 for the fork lock holder assembly 300 is also cylindrical. FIG. 6B shows various views of the base portion retainer 550. The retainer 550 is geometrically described below in terms of various elements (i.e., as comprising them), but the retainer 550 is one piece (i.e., a single integral structure).

[0102] The retainer 550 is defined by a hollow cylinder 552 of diameter q1 that extends vertically (i.e., along the height of the retainer 550) from an annular upper surface 554. The annular upper surface 554 is perpendicular to the hollow cylinder 552 (i.e., perpendicular to the height of the retainer 550) and includes a circular opening 556. The annular upper surface 554 has an outer diameter q1 and an inner diameter q2, where q1 > b1 > q2. That is, the hollow cylinder 502 has an outer diameter q1 > b1, and the circular opening 556 has a diameter q2 < b1.

[0103] The retainer 550 includes an annular ring 558 at the distal end of the hollow cylinder 552. The annular ring 558 extends radially (i.e., perpendicular to the height of the retainer 550) from the distal end of the hollow cylinder 552 on the side opposite the end that extends from the annular upper surface 554. The annular ring 558 has an inner diameter q1 and an outer diameter that exactly matches the distance between the two parallel lines that each define the slot 402. The annular ring 558 has a thickness or height t that exactly matches the depth h of the slot 402. Thus, the retainer 550 can slide radially into the slot 402. The annular ring 558 (and the retainer 550) has an outer perimeter that engages the arcuate or C-shaped element of the slot 402.

[0104] Again, the elements 552 - 558 are integrated into the retainer 550 and define the retainer 550 as a single molded piece. The height of the retainer 550 (i.e., the height of the hollow cylinder 552) is greater than the height of the base portion 302 of the fork lock holder assembly 300. The height of the retainer 550 is less than the height of the fork lock holder assembly 300.

[0105] Before placing the fork lock holder assembly 300 in the slot 402 and before attaching the top portion 304 to the base portion 302 of the fork lock holder assembly 300, the retainer 550 is positioned on top of the base portion 302 so as to surround (i.e., cover) the base portion 302 because q1 > b1. Then, before attaching the top portion 304 to the base portion 302, the retainer 550 is slid into the slot 402 together with the base portion 302. The top portion 304 is then attached to the base portion 302 with the lift pins 130 inserted in the top portion 304. Because the diameter b1 of the base portion 302 is greater than the diameter q2 of the circular opening 556, the base portion 302 cannot be pulled out of the circular opening 556 by pulling on the top portion 304 protruding from the circular opening 556. Within the slot 402, the retainer 550 covers the base portion 302 of the fork lock holder assembly 300. The height of the retainer 550 is greater than the depth h of the slot 402 and the height of the base portion 302 .

[0106] When the retainer 500, along with the ball-lock holder assembly 200, is in the slot 402, the annular top surface (which may also be referred to as the circular portion) 504 of the retainer 500 is parallel to the top surface of the slotted ring 400. The stem portion 211 of the ball-lock holder assembly 200 and the lift pin 130 held therein extend through a circular opening 506 in the retainer 500 in a direction perpendicular to and away from the top surface of the slotted ring 400. The cylindrical portion (i.e., hollow cylinder 502) of the retainer 500 extends perpendicularly from the annular top surface (i.e., the circular portion) 504 of the retainer 500 toward the top surface of the slotted ring 400 and surrounds the cylindrical base portion 202 of the ball-lock holder assembly 200.

[0107] When the retainer 550, along with the fork lock holder assembly 300, is in the slot 402, the annular upper surface (which may be referred to as the circular portion) 554 of the retainer 550 is parallel to the upper surface of the slotted ring 400. The slot 312 (which may be referred to as the stem portion) of the fork lock holder assembly 300 and the lift pin 130 held therein extend vertically away from the upper surface of the slotted ring 400 through a circular opening 556 in the retainer 550. The cylindrical portion (i.e., hollow cylinder 552) of the retainer 550 extends vertically from the annular upper surface (i.e., the circular portion) 554 of the retainer 550 toward the upper surface of the slotted ring 400 and surrounds the cylindrical portion 310 of the fork lock holder assembly 300.

[0108] FIG. 7 shows a T-shaped retainer 600 that can be inserted into the hole 404 after the retainers 500, 550 shown in FIGS. 6A and 6B have been slid into the slots 402 along with their respective lift pin holder assemblies 200, 300. The T-shaped retainer 600 is a single piece including a top portion 602 and a bottom portion 604. The top portion may be rectangular, while the bottom portion may be cylindrical. The bottom portion 604 extends perpendicularly from the top portion 602. The bottom portion 604 is inserted into the hole 404. The T-shaped retainer 600 is then rotated so that the top portion 602 prevents the retainers 500, 550 from sliding radially outward (from the inner diameter toward the outer diameter of the slotted ring 400) and out of the slots 402. The height of the T-shaped retainer 600 is less than the height of each of the retainers 500 and 550.

[0109] When the T-shaped retainer 600 is attached to the slotted ring (i.e., inserted into the hole 404), the bottom portion 604 is perpendicular to the plane in which the slotted ring 400 lies, and the top portion 602 is parallel to the plane in which the slotted ring 400 lies. The top portion 602 extends in the radially outward path of the retainers 500, 550. By thus interfering with the radially outward path of the retainers 500, 550, the T-shaped retainer 600 secures the retainers 500, 550, along with their respective pin holder assemblies 200, 300, within the slots 402. In other words, the T-shaped retainer 600 prevents the retainers 500, 550 and their respective pin holder assemblies 200, 300 from sliding out of the slots 402.

[0110] When attached to the slotted ring (i.e., inserted into slot 402), the heights of elements 200, 300, 500, and 550 are parallel to an axis perpendicular to the plane in which slotted ring 400 lies, which is parallel to the plane in which the substrate rests on the substrate support assembly during processing.

[0111] Throughout this disclosure, the shapes of elements 130 and 200-604 are described as being generally circular and cylindrical, however, at least some of these elements may have other shapes.

[0112] The foregoing description is merely exemplary in nature and is not intended to limit the disclosure, its applications, or uses. The broad teachings of the present disclosure may be embodied in a variety of forms. Accordingly, while the present disclosure includes specific examples, the true scope of the disclosure is not limited to those examples, as other variations will become apparent from a study of the drawings, specification, and claims that follow.

[0113] It should be understood that one or more steps included in a method may be performed in a different order (or simultaneously) without altering the principles of the present disclosure. Furthermore, although each of the embodiments is described as having certain features, any one or more of the features described with respect to any embodiment of the present disclosure can be implemented in any of the other embodiments and / or can be combined with any of the features of the other embodiments, even if the combination is not expressly described. In other words, the above-described embodiments are not mutually exclusive, and it is within the scope of the present disclosure to substitute one or more embodiments for one another.

[0114] Spatial and functional relationships between elements (e.g., between modules, circuit elements, semiconductor layers) are described using various terms, such as "connected," "engaged," "coupled," "adjacent," "adjacent," "on top of," "above," "below," and "disposed." When describing a relationship between first and second elements in this disclosure, unless expressly stated as "direct," the relationship may be a direct relationship in which no other intervening elements exist between the first and second elements, or it may be an indirect relationship in which one or more intervening elements exist (spatially or functionally) between the first and second elements.

[0115] As used herein, the phrase "at least one of A, B, and C" should be interpreted to mean the logical (A or B or C) using a non-exclusive logical OR, and not to mean "at least one of A, at least one of B, and at least one of C."

[0116] In some embodiments, the controller is part of a system, which may be part of the examples described above. Such a system may include semiconductor processing equipment, such as one or more processing tools, one or more chambers, one or more platforms for processing, and / or specific processing components (e.g., wafer pedestals, gas flow systems, etc.). These systems may be integrated with electronics for controlling the operation of the system before, during, and after processing of a semiconductor wafer or substrate. The electronics may be referred to as a "controller" and may control various components or subcomponents of the system.

[0117] The controller may be programmed to control any of the processes disclosed herein, such as supply of process gases, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow rate settings, fluid supply settings, position and motion settings, and wafer movement in and out of tools and other moving tools and / or load locks connected or coupled to a particular system, depending on the process requirements and / or type of system.

[0118] Generally, a controller may be defined as electronic equipment having various integrated circuits, logic, memory, and / or software that receive instructions, issue instructions, control operations, enable cleaning operations, enable endpoint measurements, etc. Integrated circuits may include chips in the form of firmware that store program instructions, digital signal processors (DSPs), chips defined as application specific integrated circuits (ASICs), and / or one or more microprocessors or microcontrollers that execute program instructions (e.g., software).

[0119] Program instructions may be communicated to the controller in the form of various individual settings (or program files) that define operational parameters for performing particular processes on or for semiconductor wafers or instructions to the system. The operational parameters, in some embodiments, may be part of a recipe defined by a process engineer to accomplish one or more processing steps during the processing of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or dies of the wafer.

[0120] In some embodiments, the controller may be part of or connected to a computer that is integrated with, connected to, or otherwise networked with the system, or a combination thereof. For example, the controller may be in the "cloud" or may be all or part of a fab host computer system that can enable remote access to wafer processing. The computer may enable remote access to the system to monitor the current progress of a manufacturing operation, examine the history of past manufacturing operations, or examine trends or performance indicators from multiple manufacturing operations, to change parameters of a current process, set processing steps according to a current process, or initiate a new process.

[0121] In some examples, a remote computer (e.g., a server) may provide process recipes to the system over a network (which may include a local network or the Internet). The remote computer may include a user interface that allows for entry or programming of parameters and / or settings, which are communicated to the system from the remote computer.

[0122] In some examples, the controller receives instructions in the form of data, the instructions specifying parameters for each of the process steps to be performed during one or more operations, It should be understood that the parameters may be specific to the type of process being performed as well as the type of tool the controller is configured to interface with or control.

[0123] Thus, as described above, the controller may be distributed, such as by having one or more separate controllers that are networked and operate toward a common purpose (such as the processing and control described herein). One example of a distributed controller for such purposes is one or more integrated circuits on the chamber that communicate with one or more remotely located integrated circuits (e.g., located at the platform level or remotely as part of a remote computer) that cooperate to control processing in the chamber.

[0124] Without limitation, example systems may include a plasma etch chamber or module, a deposition chamber or module, a spin rinse chamber or module, a metal plating chamber or module, a cleaning chamber or module, a bevel edge etch chamber or module, a physical vapor deposition (PVD) chamber or module, a chemical vapor deposition (CVD) chamber or module, an atomic layer deposition (ALD) chamber or module, an atomic layer etch (ALE) chamber or module, an ion implantation chamber or module, a track chamber or module, and any other semiconductor processing system that may be associated with or utilized in the fabrication and / or manufacturing of semiconductor wafers.

[0125] As described above, depending on the processing step or steps being performed by the tool, the controller may communicate with one or more of other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, nearby tools, tools located throughout the factory, a main computer, another controller, or tools used in material transport to carry containers of wafers to or from tool locations and / or load ports within a semiconductor fabrication factory.

Claims

1. 1. A lift pin holder assembly comprising: a base portion having a cavity at its center, said cavity extending along the height of said base portion; a stem portion extending perpendicularly from the base portion along the height of the base portion, the cavity extending through a center of the stem portion along the height of the stem portion, the centers of the base portion and the stem portion being collinear, the stem portion comprising a ball lock disposed at a distal end of the stem portion proximate to a portion of the cavity adjacent the distal end of the stem portion; a top portion surrounding and retained about the stem portion, the top portion having an opening adjacent the distal end of the stem portion and aligned with the cavity; 1. A lift pin holder assembly comprising:

2. 10. The lift pin holder assembly of claim 1, wherein the base portion, stem portion, and top portion are made of a ceramic material.

3. 2. The lift pin holder assembly of claim 1, further comprising a lift pin having a first end inserted through the opening in the top portion and into the cavity in the stem portion; a lift pin holder assembly, the first end of which has a circular groove, the lift pin being retained within the cavity of the stem portion by the ball lock being locked into the circular groove, and the lift pin having a second end which extends out of the opening in the top portion along the height of the stem portion.

4. 10. The lift pin holder assembly of claim 1, wherein the base portion is cylindrical and has a first diameter; The stem portion is a first cylindrical portion extending perpendicularly from the base portion along the height of the stem portion and having a second diameter smaller than the first diameter; a second cylindrical portion extending perpendicularly from the first cylindrical portion along the height of the stem portion, the second cylindrical portion having a third diameter greater than the second diameter and less than the first diameter; a ring-shaped structure surrounding the second cylindrical portion; 1. A lift pin holder assembly comprising:

5. 5. The lift pin holder assembly of claim 4, the second cylindrical portion includes a slot for the ball lock; the slot is located on an opposite side of the ring-shaped structure from the first cylindrical portion.

6. The lift pin holder assembly of claim 4 , wherein the ring-shaped structure is disposed around a middle portion of the second cylindrical portion.

7. 5. The lift pin holder assembly of claim 4, wherein the top portion comprises: a circular portion having the opening at its center; a hollow cylindrical portion extending perpendicularly from the circular portion along the height of the stem portion and engaging the second cylindrical portion and the ring-shaped structure surrounding the second cylindrical portion; 1. A lift pin holder assembly comprising:

8. 10. The lift pin holder assembly of claim 1, the base portion has a first height; The stem portion has a second height greater than the first height.

9. 9. The lift pin holder assembly of claim 8, the base portion is cylindrical and has a first diameter; The top portion is cylindrical, has a second diameter less than or equal to the first diameter, and has a third height less than the second height and greater than the first height.

10. 10. The lift pin holder assembly of claim 1, the cavity is cylindrical and has a first diameter; the opening is circular and has a second diameter substantially equal to the first diameter; the cavity and the opening are aligned along the height of the stem portion.

11. 4. The lift pin holder assembly of claim 3, the cavity is cylindrical and has a first diameter; the opening is circular and has a second diameter; the cavity and the opening are aligned along the height of the stem portion; The lift pin holder assembly, wherein the lift pin is cylindrical and has a third diameter smaller than the first and second diameters.

12. 1. A lift pin holder assembly comprising: a base portion having a cavity at its center, the cavity extending along a height of the base portion; a stem extending perpendicularly from the base along the height of the base, the stem being C-shaped and defining a hollow extending along the height of the stem through a center of the stem, the hollow coinciding with the cavity, and the centers of the base and stem being collinear; a top portion surrounding the stem portion, the top portion having an opening adjacent a distal end of the stem portion and aligned with the cavity; 1. A lift pin holder assembly comprising:

13. 13. The lift pin holder assembly of claim 12, wherein the base portion, stem portion, and top portion are made of a ceramic material.

14. 13. The lift pin holder assembly of claim 12, further comprising a lift pin having a first end inserted through the opening in the top portion into the hollow portion of the stem portion, the first end having a circular groove, the lift pin being retained within the hollow portion by an inner radial portion at the distal end of the stem portion locking into the circular groove, and the lift pin having a second end extending out from the opening in the top portion along the height of the stem portion.

15. 13. The lift pin holder assembly of claim 12, wherein the base portion is cylindrical and the top portion comprises: a circular portion having the opening at its center; a cylindrical portion extending perpendicularly from the circular portion along the height of the stem portion; a second cavity in the cylindrical portion that engages the stem portion; 1. A lift pin holder assembly comprising:

16. 13. The lift pin holder assembly of claim 12, the base portion is cylindrical and has a first diameter and a first height; The stem portion has a second diameter smaller than the first diameter and a second height greater than the first height.

17. 17. The lift pin holder assembly of claim 16, wherein the top portion is cylindrical, has a third diameter less than or equal to the first diameter and substantially equal to the second diameter, and has a third height less than the second height and greater than the first height.

18. 13. The lift pin holder assembly of claim 12, the cavity is cylindrical and has a first diameter; the opening is circular and has a second diameter substantially equal to the first diameter; the cavity and the opening are aligned along the height of the stem portion.

19. 15. The lift pin holder assembly of claim 14, the cavity is cylindrical and has a first diameter; the opening is circular and has a second diameter; the cavity and the opening are aligned along the height of the stem portion; The lift pin holder assembly, wherein the lift pin is cylindrical and has a third diameter smaller than the first and second diameters.

20. 1. An apparatus comprising: an annular ring having an outer diameter, an inner diameter, and top and bottom surfaces that define a thickness of the annular ring; a plurality of slots disposed in the top surface of the annular ring; Equipped with each of the slots has a depth less than the thickness of the annular ring; two parallel lines extending from the outer diameter of the annular ring toward the inner diameter of the annular ring at the depth in a plane parallel to the top surface of the annular ring, the distal ends of the two parallel lines bending toward each other at an acute angle; an arcuate element extending from the distal ends of the two parallel lines toward the inner diameter of the annular ring in the plane at the depth.

21. 21. The apparatus of claim 20, wherein the top of each of the slots is flush with the top surface of the annular ring.

22. 21. The apparatus of claim 20, wherein the annular ring is made of a ceramic material.

23. 21. The apparatus of claim 20, further comprising a lift pin holder assembly disposed within one of the plurality of slots; The lift pin holder assembly includes: a cylindrical base portion disposed within the slot; a stem extending perpendicularly from the cylindrical base along the height of the lift pin holder assembly, the stem retaining a lift pin inserted therein; An apparatus comprising:

24. 24. The device of claim 23, wherein the stem portion includes a ball lock at a distal end that locks into a circular groove on the lift pin.

25. 24. The apparatus of claim 23, wherein the stem portion includes an inner radial portion at a distal end that locks into a circular groove on the lift pin.

26. 24. The apparatus of claim 23, further comprising a retainer surrounding the cylindrical base portion to hold the lift pin holder assembly within the slot, the retainer being cylindrical and having a diameter equal to the distance between the two parallel lines of the slot and an outer periphery that engages the arc-shaped elements of the slot.

27. 27. The device of claim 26, wherein the retainer comprises: a circular portion parallel to the top surface of the annular ring, the circular portion having an opening at its center through which the stem portion and the lift pin of the lift pin holder assembly extend vertically away from the top surface of the annular ring along the height of the lift pin holder assembly; a cylindrical portion extending perpendicularly from the circular portion toward the top surface of the annular ring and surrounding the cylindrical base portion of the lift pin holder assembly; An apparatus comprising:

28. 27. The apparatus of claim 26, further comprising: a hole disposed in the slot proximate an intersection of one of the two parallel lines and the outer diameter of the annular ring; A T-shaped element; Equipped with The T-shaped element is a first portion that is perpendicular to the top surface of the annular ring and that is inserted into the hole; a second portion extending in a radially outward path of the retainer parallel to the top surface of the annular ring and perpendicular to the first portion, the second portion retaining the lift pin holder assembly within the slot; An apparatus comprising:

29. 29. The apparatus of claim 28, the first portion of the T-shaped element is cylindrical; The apparatus, wherein the second portion of the T-shaped element is rectangular.

30. 21. The apparatus of claim 20, further comprising a substrate support assembly, The annular ring is disposed on a base of the substrate support assembly.

Images