Holding member
The holding member with a silicone resin and alumina filler addresses temperature-dependent strength issues by reducing pseudo-crosslinking points, ensuring effective use at high temperatures.
Patent Information
- Application Number
- JP2024017237
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2024-02-07
- Publication Date
- 2025-08-20
- Estimated Expiration
- 2044-02-07
AI Technical Summary
Existing holding members, such as electrostatic chucks, exhibit significant temperature dependency in adhesive strength, limiting their use at high temperatures.
A holding member comprising a first member, a second member, and an adhesive member with a silicone resin containing aromatic hydrocarbon groups and a hydrophilic filler like alumina, which reduces temperature dependency by minimizing pseudo-crosslinking points through increased SP value difference and sterically hindering micro-crystallization.
The adhesive member maintains strength with minimal temperature dependence, allowing the holding member to be used effectively at high temperatures without significant property changes.
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Abstract
Citation Information
Patent Citations
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